JP2013168488A - Masking tape exfoliation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a plate-like work from being separated from an exfoliation table when exfoliating a masking tape from the plate-like work held on the exfoliation table.SOLUTION: An exfoliation table 2 is divided into a central area 20 where a central part of a plate-like work W is sucked, and an outer peripheral area 21 which surrounds the central area 20 and in which an outer peripheral side of the plate-like work W than the central part is sucked. The central area 20 and the outer peripheral area 21 are connected to different suction sources 24, 26, respectively. A sucking force to act on the outer peripheral area 21 is made stronger than a sucking force to act on the central area 20. Therefore, when exfoliating a masking tape 10 applied to the plate-like work W held on the exfoliation table 2 from the plate-like work W, the plate-like work W can be prevented from being separated from the exfoliation table 2, thereby smoothly exfoliating the masking tape 10.

Description

  The present invention relates to an apparatus for peeling off a protective tape adhered to a plate-like workpiece.

  When grinding one surface of a plate-like workpiece such as a semiconductor wafer, the other surface is protected by sticking a protective tape to the other surface held by the holding table. After completion, it is necessary to peel off the protective tape.

  When peeling off the protective tape, hold the surface of the plate-shaped workpiece that is not attached with the protective tape on the holding table, attach the peeling tape to the protective tape, and pull the peeling tape to remove the protective tape. By pulling, the protective tape is peeled off from the plate-like workpiece. As the holding table, for example, the one disclosed in Patent Document 1 below can be used.

JP 2007-168025 A

  However, when the protective tape is peeled off, the plate-shaped workpiece is lifted together with the protective tape, and the plate-shaped workpiece may be separated from the holding table. In particular, when the protective tape is lifted and peeling is started, the plate-shaped workpiece often floats, and when the plate-shaped workpiece is separated from the holding table even a little, the suction force of the holding table is reduced to hold the plate-shaped workpiece. There is a problem that the protective tape cannot be peeled off from the plate-like workpiece.

  The present invention has been considered in view of such problems, and it is an object of the present invention to prevent the plate-like workpiece from being pulled away from the holding table when the protective tape is peeled from the plate-like workpiece.

  The present invention relates to a peeling table that sucks and holds the back surface of a plate-like workpiece having a protective tape attached to the surface, and a part of the peeling tape that has stronger adhesive strength than the protective tape protrudes to the outer peripheral side of the protective tape. It has a gripping part that grips the protruding part formed on the peeling tape by sticking it, operates the gripping part that grips the protruding part in a direction away from the surface of the plate-like workpiece, and puts the protective tape in a plate shape Regarding the protective tape peeling device that peels from a workpiece, the peeling table is divided into a central area that sucks the central portion of the plate-shaped workpiece and an outer peripheral area that surrounds the central area and sucks the outer peripheral side from the central portion of the plate-shaped workpiece. The central area and the outer peripheral area are respectively connected to different suction sources, and the suction force acting on the outer peripheral area can be made stronger than the suction force acting on the central area.

  In the present invention, the suction area of the peeling table is divided into a central area and an outer peripheral area, and the suction force acting on the outer peripheral area can be made stronger than the suction force acting on the central area. When the protective tape adhered to the plate-shaped workpiece is peeled from the plate-shaped workpiece, the plate-shaped workpiece can be prevented from being separated from the peeling table, and the protective tape can be smoothly peeled off.

It is a perspective view which shows an example of a protective tape peeling apparatus. It is a top view which shows an example of a peeling table. It is sectional drawing which shows the structure of the peeling table schematically. It is sectional drawing which shows schematically the state which hold | maintained the plate-shaped workpiece | work on the peeling table. It is sectional drawing which shows schematically the state at the time of the peeling start of the protective tape from a plate-shaped workpiece. It is a perspective view which shows the state which peels a protective tape from a plate-shaped workpiece. It is sectional drawing which shows schematically the state which peels a protective tape from a plate-shaped workpiece.

  A protective tape peeling apparatus 1 shown in FIG. 1 includes a peeling table 2 that holds a plate-like workpiece W in which a protective tape 10 is adhered to a surface W1 on which a device D is formed, and a plate-like workpiece held on the peeling table 2. And peeling means 3 for peeling the protective tape from W. The plate-like workpiece W is formed thin by grinding the back surface W2.

  As shown in FIG. 2, the peeling table 2 includes a circular central area 20 and a ring-shaped outer peripheral area 21 that surrounds the central area 20, and the central area 20 and the outer peripheral area 21 are independent. For example, it is formed of a porous member.

  As shown in FIG. 3, the central area 20 and the outer peripheral area 21 are supported by a base 22. A first suction path 23 formed inside the base 22 communicates with the central area 20, and the first suction path 23 communicates with a first suction source 24. On the other hand, the second suction path 25 formed inside the base 22 communicates with the outer peripheral area 21, and the second suction path 25 communicates with the second suction source 26.

  The peeling means 3 shown in FIG. 1 includes a gripping portion 30 constituted by two L-shaped members that can approach and separate from each other, an arm portion 31 having the gripping portion 30 at the tip, and a gripping portion. A Z-axis direction drive unit 32 for driving 30 and the arm unit 31 in the vertical direction (Z-axis direction); and an X-axis direction drive unit 33 for driving the gripping unit 30 and the arm unit 31 in the horizontal direction (X-axis direction). It has.

  The Z-axis direction drive unit 32 includes a ball screw 320 having an axial center in the Z-axis direction, a motor 321 that rotates the ball screw 320, a guide plate 322 that is disposed in parallel to the ball screw 320, and a side portion. And an elevating part 323 having a nut which is in sliding contact with the guide plate 322 and screwed into the ball screw 320 therein. The elevating part 323 is guided by the guide plate 322 by the rotation of the ball screw 320 and is moved up and down in the Z-axis direction. The grip portion 30 and the arm portion 31 are also configured to move up and down in the Z-axis direction.

  The X-axis direction drive unit 33 includes a ball screw 330 having an axis in the X-axis direction, a motor 331 for rotating the ball screw 330, a guide plate 332 arranged in parallel to the ball screw 330, and side portions. And a moving part 333 which is in sliding contact with the guide plate 332 and is internally screwed into the ball screw 330. The moving part 333 is moved in the X-axis direction by the rotation of the ball screw 330 and fixed to the moving part 333. The Z-axis direction driving unit 32, the gripping unit 30, and the arm unit 31 are also configured to move in the X-axis direction.

  When the protective tape 10 is peeled from the front surface W1 of the plate-like workpiece W using the protective tape peeling device 1 shown in FIG. 1, the back surface W2 of the plate-like workpiece W is held by the peeling table 2. At this time, as shown in FIG. 4, the entire surface of the central area 20 is covered with the plate-like workpiece W. Further, if the outer diameter R1 of the outer peripheral area 21 and the diameter R2 of the plate-like workpiece W are completely coincident and the center of the plate-like workpiece W and the center of the central area 20 are accurately aligned, the outer peripheral area 21 is also completely covered by the plate-like workpiece W.

  Here, if the outer diameter R1 of the outer peripheral area 21 is larger than the diameter R2 of the plate-shaped workpiece W, the outer peripheral area 21 is completely covered and air leakage is eliminated. In this case, the outer peripheral edge of the plate-shaped workpiece W is Since it is not sucked and held, when the protective tape 10 is lifted upward and peeled off, the plate-like workpiece W is also lifted, and the protective tape 10 cannot be peeled off.

  Therefore, the outer diameter R2 of the plate-like workpiece W is made smaller than the outer diameter R1 of the outer peripheral area 21, and there is no plate-like workpiece W directly above the peripheral wall 210 of the outer peripheral area 21, and a part of the outer peripheral area 21 is exposed. It is assumed that Then, by making the suction force acting on the outer peripheral area 21 stronger than the suction force acting on the central area 20, even if the upper surface of the outer peripheral area 21 is slightly exposed, the outer peripheral side of the plate-like workpiece W is firmly sucked. Be able to hold.

  For example, when the diameter R2 of the plate-like workpiece W to be held on the peeling table 2 is 200 to 300 mm, the diameter of the central area 20 is 160 to 260 mm, and the width of the outer peripheral area 21 is about 10 mm.

  The protective tape 10 is composed of a base material 10a and an adhesive layer 10b, and the adhesive layer 10b is attached to the surface W1 of the plate-like workpiece W.

  A release tape 11 is attached to the outer periphery of the protective tape 10. The release tape 11 includes a base material 11 a and an adhesive layer 11 b, and the adhesive layer 11 b is attached to the base material 10 a of the protective tape 10. The adhesive layer 11 b of the release tape 11 has a higher adhesive strength than the adhesive layer 10 b of the protective tape 10.

  The peeling tape 11 is pasted so that a part thereof protrudes from the outer peripheral side of the protective tape 10 so that the protruding portion 110 is formed.

  Next, after the gripping part 30 is moved above the protruding part 110, the end part of the protruding part 110 is sandwiched by the gripping part 30, and the gripping part 30 is raised as shown in FIG. The protective tape 11 is peeled from the plate-like workpiece W by pulling 11 upward. Since the adhesive layer 11b of the peeling tape 11 has a stronger adhesive force than the adhesive layer 10b of the protective tape 10, the protective tape 10 is surely peeled from the plate-like workpiece W without the peeling tape 11 being peeled from the protective tape 10. be able to.

  When the gripping portion 30 is raised to a predetermined height, the protective tape 10 is then moved by moving the gripping portion 30 in the X-axis direction by the X-axis direction driving portion 33 as shown in FIGS. Peel off in the X-axis direction. Then, the protective tape 10 is completely peeled from the plate-like workpiece W.

  The second suction source 26 that sucks the outer peripheral portion of the plate-like workpiece W in the outer peripheral area 21 has a stronger suction force in the outer peripheral area 21 than the first suction source 24 that sucks the central portion of the plate-like workpiece W in the central area 20. In order to act, even if there is an air leak because a part of the outer peripheral area 21 is exposed, the plate-like workpiece W can be firmly sucked and held. Therefore, the protective tape 10 can be reliably peeled without the plate-like workpiece W separating from the outer peripheral area 21.

  A pressure sensor for monitoring the suction force of the outer peripheral area 20 is provided, and when the suction force of the outer peripheral area 20 decreases during the peeling operation of the protective tape 10, the peeling operation is temporarily stopped and the plate-like workpiece W is stopped in the central area 20. If the plate-like work is held in the outer peripheral area 21 by increasing the suction force of the outer peripheral area 20 while maintaining the state in which the plate-like work W is not separated from the peeling table 2, the plate-like work is obtained. The peeling operation of the protective tape can be resumed without lifting up.

1: protective tape peeling device W: plate-like workpiece W1: front surface D: device W2: back surface 10: protective tape 10a: base material 10b: adhesive layer 11: release tape 11a: base material 11b: adhesive layer 110: protruding portion 2: Peeling table 20: Central area 21: Outer peripheral area 22: Base 23: First suction path 24: First suction source 25: Second suction path 26: Second suction source 3: Peeling means 30: Grasping part 31: Arm Unit 32: Z-axis direction driving unit 320: Ball screw 321: Motor 322: Guide plate 323: Lifting unit 33: X-axis direction driving unit 330: Ball screw 331: Motor 332: Guide plate 333: Moving unit

Claims (1)

A peeling table for sucking and holding the back surface of the plate-like workpiece having a protective tape attached to the surface;
A gripping part for gripping a protruding part formed on the peeling tape by a part of the peeling tape having an adhesive strength stronger than that of the protective tape protruding to the outer peripheral side of the protective tape and being attached to the protective tape;
With
A protective tape peeling device that operates the gripping part that grips the protruding part in a direction away from the surface of the plate-like workpiece, and peels the protective tape from the plate-like workpiece;
The peeling table is divided into a central area that sucks the central part of the plate-like work and an outer peripheral area that surrounds the central area and sucks the outer peripheral side from the central part of the plate-like work,
The central tape and the outer peripheral area are each connected to a separate suction source, and the protective tape peeling device capable of making the suction force acting on the outer peripheral area stronger than the suction force acting on the central area .

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