TW202132240A - Manufacturing method for copper-coated ceramic and composite plate thereof flattening a copper foil to a process carrier plate to be delivered to an oxidation thermal treatment furnace capable of controlling an oxygen content - Google Patents

Abstract

This invention relates to a manufacturing method for a double-sided copper-coated ceramic substrate. The manufacturing method includes: a. a step of thermal oxidation for single side of copper foil: attaching a copper foil to a process carrier plate to be delivered to an oxidation thermal treatment furnace capable of controlling an oxygen content, performing first half of oxidation thermal treatment in a high-temperature environment in which the oxygen content is 0 ppm so that the copper foil is softened to cling to the process carrier plate, performing the latter half of oxidation thermal treatment in a high-temperature environment in which the oxygen content is 200ppm to 500ppm so that the top surface of the copper foil is exposed in a high-temperature oxygen-containing environment to form a uniform thin copper oxide layer, the bottom surface of the copper foil clings to the process carrier plate without contacting the oxygen, and then, the bottom of the copper foil may not be thermally oxidized in the high-temperature environment; and b, a step of coating the ceramic with copper: attaching the thin copper oxide layers of the two copper foils prepared in the step a to two surfaces of a ceramic plate, and performing bonding thermal treatment at the temperature of 1063 DEG C to 1083DEG C to combine the two copper foils to the two surfaces of the ceramic plate. Therefore, a compounding effect can be achieved by coating the double sides of the ceramic plate with copper at the same time.

Description

Manufacturing method of copper-clad ceramics and composite board thereof

The present invention relates to a method for manufacturing copper-clad ceramics and a composite board thereof, in particular to a method of controlling the oxygen content so that only a single surface of the copper foil has a thin layer of copper oxide, and then the copper foil having only a single surface of the copper oxide thin layer is composited on Designer of ceramic plates.

According to, the copper-clad ceramic substrate manufactured using Direct Bonded Copper (DBC) technology is to adhere a piece of copper foil with a thin layer of copper oxide to the ceramic board, and the temperature is between 1063°C and 1083°C. Next, the bonding heat treatment is performed to bond the copper foil to the surface of the ceramic plate.

Press again, the conventional oxidation heat treatment process to form a thin layer of copper oxide on the surface of the copper foil, unless it goes through a complicated process, it is not easy to only oxidize a single surface of the copper foil, so that both sides of the copper foil after the general oxidation heat treatment will be formed A thin layer of copper oxide; however, since the sintering stage used to carry the copper foil and the ceramic plate is also made of ceramic material when the bonding heat treatment is performed, when the copper foil is combined on both sides of the ceramic plate, in order to avoid the copper foil after oxidation heat treatment To join with the sintering stage, DBC sintering of a single-sided copper foil must be used. However, due to the difference in thermal expansion coefficient between the copper foil and the ceramic plate, the semi-finished product after the DBC sintering of the single-sided copper foil will be severely warped, so the second side DBC sintering of copper foil requires the use of special jigs.

The main purpose of the present invention is to solve the complicated problem of the prior art process that only oxidizes a single surface of copper foil, and has the effect of simplifying the process of oxidizing only a single surface of copper foil.

Another objective of the present invention is to have the effect that the ceramic board can be laminated with copper on both sides at the same time.

Another object of the present invention is to have the effect of manufacturing double-sided copper-clad ceramic substrates without using special jigs.

In order to achieve the above effects, the method of the present invention for single-sided thermal oxidation of copper foil is to affix the copper foil flatly on the process carrier and send it into an oxidation heat treatment furnace with controllable oxygen content. The first half of oxidation heat treatment is at a high temperature of 0 ppm oxygen In the environment, the copper foil is tightly attached to the process carrier due to softening. In the second half of the oxidation heat treatment, in a high temperature environment with an oxygen content of 200 ppm to 500 ppm, the top surface of the copper foil is exposed to a high temperature oxygen-containing environment to form uniform copper oxide. With a thin layer, the bottom surface of the copper foil will not be exposed to oxygen due to the close contact with the process carrier, so that the bottom surface of the copper foil will not be thermally oxidized in a high-temperature environment.

The manufacturing method of the double-sided copper-clad ceramic substrate of the present invention includes: a. The copper foil single-sided thermal oxidation step, the copper foil is flatly attached to the process carrier and sent to the oxidation heat treatment furnace with controllable oxygen content, the first half of the oxidation heat treatment In a high temperature environment with an oxygen content of 0ppm, the copper foil is softened and tightly attached to the process carrier. The second half of the oxidation heat treatment is in a high temperature environment with an oxygen content of 200ppm to 500ppm, so that the top surface of the copper foil is exposed to the high temperature and contains oxygen. A thin layer of uniform copper oxide is formed in an environment where the bottom surface of the copper foil is tightly attached to the process carrier and will not be exposed to oxygen, so that the bottom surface of the copper foil will not be thermally oxidized in a high-temperature environment; and b. the ceramic copper coating step, Two pieces of copper foil prepared in step a are used, and two pieces of copper oxide thin layers of copper foil are flatly attached to the two surfaces of a ceramic plate, and the joint heat treatment is performed at a temperature of 1063°C to 1083°C, and the two pieces The copper foil is bonded to the two surfaces of the ceramic board.

In addition, the material of the process carrier is made of copper with oxidation activity greater than or equal to copper. The material of the process carrier is aluminum or iron. Furthermore, the first half of the oxidation heat treatment is performed for 5 to 30 minutes, and the temperature is gradually increased from room temperature to 600 ~900℃, and keep the temperature at 600~900℃ for 2~15 minutes; the second half of the oxidation heat treatment is carried out for 5~30 minutes, and first keep the temperature at 600~900℃ for 2~15 minutes, and then gradually increase the temperature from 600~900℃ Cool down to room temperature.

The double-sided copper-clad ceramic substrate of the present invention is manufactured using the above-mentioned method, including: two pieces of copper foil, first in a high temperature environment with an oxygen content of 0 ppm, causing the bottom surface of the copper foil to soften and stick to the process carrier, and then In a high temperature environment with an oxygen content of 200ppm to 500ppm, only the top surface of the copper foil is exposed to a high-temperature oxygen-containing environment to form a uniform copper oxide thin layer; and a ceramic plate to flatten the copper oxide thin layer of the two copper foils. Paste on both surfaces, and conduct bonding heat treatment at a temperature of 1063°C to 1083°C, so that two pieces of copper foil are bonded to the two surfaces of the ceramic plate.

In this way, a simple method of controlling the oxygen content is used to first let the copper foil adhere to the process carrier due to softening in a high-temperature, oxygen-free environment, and then place the copper foil in a high-temperature, oxygen-containing environment, and only A uniform copper oxide thin layer is formed on the top surface, and a copper foil with a copper oxide thin layer on only a single surface is manufactured.

First of all, please refer to [Figure 1]. The method of the present invention to thermally oxidize copper foil on one side is to affix the copper foil flatly to a process carrier made of aluminum or iron and send it to an oxidation heat treatment that can control the oxygen content. The oxidation heat treatment is carried out in the furnace. The first half of the oxidation heat treatment is carried out in a high temperature environment with oxygen content of 0 ppm for 5 to 30 minutes. The temperature is gradually increased from room temperature to 600 to 900°C, and the constant temperature is maintained at 600 to 900°C for 2 to 15 Minutes, causing the copper foil to soften and stick to the process carrier; the second half of the oxidation heat treatment is carried out in a high temperature environment with an oxygen content of 200 ppm to 500 ppm for 5 to 30 minutes, and a constant temperature of 600 to 900 °C is maintained for 2 to 15 minutes, and then The temperature is gradually lowered from 600~900℃ to room temperature, so that the top surface of the copper foil is exposed to a high-temperature oxygen-containing environment to form a uniform copper oxide thin layer, and the bottom surface of the copper foil is tightly attached to the process carrier and will not touch To oxygen, the bottom surface of the copper foil will not be thermally oxidized in a high temperature environment.

Next, please refer to [Figure 2]. Use the above method to put the copper foil 10 in a high temperature environment with an oxygen content of 0 ppm, so that the bottom surface of the copper foil 10 is softened and adheres to the process carrier 20, and then the oxygen content In a high temperature environment of 200 ppm to 500 ppm, the top surface of the copper foil is exposed to a high temperature oxygen-containing environment to form a uniform copper oxide thin layer 11, thereby manufacturing a copper foil 10 with a copper oxide thin layer 11 on a single surface.

Furthermore, please refer to [Figure 3], using two pieces of copper foil 10 with a copper oxide thin layer 11 on the single surface described above, and the two pieces of copper oxide thin layer 11 of the copper foil 10 are flatly attached to a ceramic plate 30. The two surfaces are joined and heat treated at a temperature of 1063° C. to 1083° C., and two pieces of copper foil 10 are bonded to the two surfaces of the ceramic plate 30 to produce a copper-clad ceramic substrate.

Based on this technology, the present invention first makes the copper foil 10 adhere to the process carrier 20 due to softening in a high-temperature, oxygen-free environment, and then places the copper foil 10 in a high-temperature, oxygen-containing environment with only the top surface A uniform copper oxide thin layer 11 is formed, and a simple method of controlling the oxygen content can be used to produce a copper foil 10 with a copper oxide thin layer 11 on a single surface, which has the effect of a simple process of oxidizing only a single surface of the copper foil; However, when the copper foil 10 with a single surface oxidized is used to manufacture a double-sided copper-clad ceramic substrate, it has the effect that the ceramic plate can be manufactured with double-sided copper-clad at the same time, or can be manufactured without using a special jig.

In summary, the technical means disclosed in the present invention do have the requirements for invention patents such as "novelty", "progressiveness" and "available for industrial use". I pray that the Jun Bureau will grant patents to encourage invention without any responsibility. Sense of virtue.

However, the drawings and descriptions disclosed above are only preferred embodiments of the present invention. Anyone who is familiar with the art and makes modifications or equivalent changes based on the spirit of the case should still be included in the scope of the patent application in this case.

10: Copper foil 11: Thin layer of copper oxide 20: Process carrier board 30: ceramic plate

[Figure 1] is a heating curve diagram of the method of the present invention for single-sided thermal oxidation of copper foil. [Figure 2] is a schematic diagram of the structure of the single-sided thermally oxidized copper foil of the present invention. [Figure 3] is a schematic diagram of the structure of the double-sided copper-clad ceramic substrate of the present invention.

Claims (9)

A method of single-sided thermal oxidation of copper foil. The copper foil is flatly attached to the process carrier and sent to an oxidation heat treatment furnace with controllable oxygen content. The first half of the oxidation heat treatment is in a high temperature environment with an oxygen content of 0 ppm, which causes Soften and close to the process carrier, the second half of the oxidation heat treatment is in a high temperature environment with an oxygen content of 200ppm to 500ppm, so that the top surface of the copper foil is exposed to a high temperature oxygen-containing environment to form a uniform copper oxide thin layer, and the bottom surface of the copper foil Since it is tightly attached to the process carrier, it will not be exposed to oxygen, so that the bottom surface of the copper foil will not be thermally oxidized in a high-temperature environment. For example, in the single-sided thermal oxidation method of copper foil described in item 1 of the scope of patent application, the material of the process carrier is selected to have an oxidation activity greater than or equal to copper. The single-sided thermal oxidation method of copper foil as described in item 2 of the scope of patent application, wherein the material of the process carrier is aluminum or iron. For example, the copper foil single-sided thermal oxidation method described in item 1, 2 or 3 of the scope of patent application, wherein the first half of the oxidation heat treatment is carried out for 5 to 30 minutes, and the temperature is gradually increased from room temperature to 600 to 900 ℃, and Maintain a constant temperature at 600-900°C for 2-15 minutes; the second half of the oxidation heat treatment is performed for 5-30 minutes, and firstly maintain a constant temperature at 600-900°C for 2-15 minutes, and then gradually lower the temperature from 600-900°C to room temperature. A method for manufacturing a double-sided copper-clad ceramic substrate includes: a. The copper foil single-sided thermal oxidation step, the copper foil is flatly attached to the process carrier board and sent to the oxidation heat treatment furnace with controllable oxygen content. The first half of the oxidation heat treatment is in a high temperature environment with oxygen content of 0 ppm, which causes the copper foil Soften and close to the process carrier, the second half of the oxidation heat treatment is in a high temperature environment with an oxygen content of 200ppm to 500ppm, so that the top surface of the copper foil is exposed to a high temperature oxygen-containing environment to form a uniform copper oxide thin layer, and the bottom surface of the copper foil Because it is tightly attached to the process carrier, it will not be exposed to oxygen, so that the bottom surface of the copper foil will not be thermally oxidized in a high-temperature environment; and b. Ceramic copper-clad step, using two pieces of copper foil prepared in step a, and two pieces of copper oxide thin layers of copper foil flatly attached to the two surfaces of a ceramic board, and performed at a temperature of 1063°C to 1083°C Joining heat treatment, and the two pieces of copper foil are bonded to the two surfaces of the ceramic plate. For example, the method for manufacturing a double-sided copper-clad ceramic substrate described in item 5 of the scope of patent application, wherein the material of the process carrier is selected to have an oxidation activity greater than or equal to copper. For example, the method for manufacturing a double-sided copper-clad ceramic substrate described in item 6 of the scope of patent application, wherein the material of the manufacturing process carrier is aluminum or iron. For example, the method for manufacturing a double-sided copper-clad ceramic substrate described in item 5, 6 or 7 of the scope of the patent application, wherein the first half of the oxidation heat treatment is performed for 5 to 30 minutes, and the temperature is gradually increased from room temperature to 600 to 900°C, And maintain a constant temperature at 600~900℃ for 2~15 minutes; the second half of the oxidation heat treatment is carried out for 5~30 minutes, and first maintain a constant temperature at 600~900℃ for 2~15 minutes, and then gradually reduce the temperature from 600~900℃ to room temperature . A double-sided copper-clad ceramic substrate manufactured by the method described in any one of items 5 to 8 in the scope of patent application, including: Two pieces of copper foil, first in a high temperature environment with oxygen content of 0ppm, causing the bottom surface of the copper foil to soften and adhere to the process carrier, and then in a high temperature environment with oxygen content of 200ppm to 500ppm, so that the copper foil has only the top surface A uniform copper oxide thin layer is formed due to exposure to a high-temperature oxygen-containing environment; and For a ceramic plate, two thin copper oxide layers of copper foil are flatly attached to both surfaces, and the bonding heat treatment is performed at a temperature of 1063°C to 1083°C, so that the two pieces of copper foil are bonded to the two surfaces of the ceramic plate.

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