TW202130075A - Rotary connector capable of maintaining steady electric connection with rotating members - Google Patents
Rotary connector capable of maintaining steady electric connection with rotating members Download PDFInfo
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- TW202130075A TW202130075A TW109145473A TW109145473A TW202130075A TW 202130075 A TW202130075 A TW 202130075A TW 109145473 A TW109145473 A TW 109145473A TW 109145473 A TW109145473 A TW 109145473A TW 202130075 A TW202130075 A TW 202130075A
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- driving force
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R39/00—Rotary current collectors, distributors or interrupters
- H01R39/02—Details for dynamo electric machines
- H01R39/18—Contacts for co-operation with commutator or slip-ring, e.g. contact brush
- H01R39/28—Roller contacts; Ball contacts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R35/00—Flexible or turnable line connectors, i.e. the rotation angle being limited
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- Coupling Device And Connection With Printed Circuit (AREA)
- Shafts, Cranks, Connecting Bars, And Related Bearings (AREA)
- Electrophotography Configuration And Component (AREA)
- Joints Allowing Movement (AREA)
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Abstract
Description
本發明係關於一種在帶有旋轉的構件之間傳達驅動力的同時進行通電用的旋轉接頭。The present invention relates to a rotary joint for energizing while transmitting driving force between rotating members.
已知在半導體製造機等的旋轉機器之中,對旋轉驅動的驅動軸進行通電,藉此進行對半導體構件的表面處理。It is known that in a rotating machine such as a semiconductor manufacturing machine, a drive shaft that is rotationally driven is energized to perform surface treatment on a semiconductor member.
例如,專利文獻1之中,環向電鍍(hoop plating)設備之中,於旋轉驅動的驅動軸連接通電輥,而與驅動軸一同旋轉。從驅動軸供給至通電輥的電流,被利用於半導體構件的表面的電解處理。For example, in
再者,驅動軸的端部,在插入於通電輥的端部之中軸方向凹陷的凹部的狀態下,藉由螺固於徑方向貫穿通電輥的螺孔的螺栓的尖端而於徑方向受到推壓,驅動軸的端部的外周面與凹部的內周面相壓接而連接。另外,藉由將連接於驅動軸的端部的通電輥予以替換成不同形狀之物,而能夠對應複數種類的半導體構件的表面加工。 [先前技術文獻] [專利文獻]Furthermore, the end of the drive shaft is inserted into the recessed portion in the axial direction of the end of the current-carrying roller, and is pushed in the radial direction by screwing the tip of the bolt that penetrates the screw hole of the current-carrying roller in the radial direction. Pressing, the outer peripheral surface of the end of the drive shaft and the inner peripheral surface of the recess are in pressure contact and connected. In addition, by replacing the current-carrying roller connected to the end of the drive shaft with a different shape, it is possible to cope with the surface processing of a plurality of types of semiconductor members. [Prior technical literature] [Patent Literature]
[專利文獻1]日本特開2011-222463號公報(第6頁,第5圖)。[Patent Document 1] JP 2011-222463 A (page 6, figure 5).
[發明所欲解決之問題]
專利文獻1之中,藉由螺栓的推壓力而在驅動軸與通電輥之間達成機械性連接及電性連接,受旋轉驅動的驅動軸的驅動力傳達至通電輥的同時,在驅動軸與通電輥之間形成導電通路。然而,驅動軸與通電輥伴隨著旋轉,而在連結部分會發生螺栓鬆脫的情況,當螺栓的推壓力減弱,使驅動軸與通電輥的壓接狀態發生變化,驅動軸與通電輥之間的接觸電阻產生變動,因而從驅動軸到通電輥的通電會有不安定的疑慮。[The problem to be solved by the invention]
In
本發明著眼於如此的問題點,目的在於提供一種旋轉接頭,能夠在帶有旋轉的構件之間維持安定的通電。 [解決問題之技術手段]The present invention focuses on such problems and aims to provide a rotary joint capable of maintaining stable energization between rotating members. [Technical means to solve the problem]
為了解決前述課題,本發明的旋轉接頭,包含:一個旋轉構件,係受旋轉驅動,且具有導電性,並設置有驅動力傳達部;另一個旋轉構件,係從動於該一個旋轉構件而轉動,且具有導電性,並設置有驅動力傳達部;以及成串的導電構件,係得以彈性變形,且分別壓接於在徑方向重疊的二個該驅動力傳達部的外周面。 藉此,形成為得以彈性變形的成串的導電構件,壓接於二個旋轉構件的驅動力傳達部的外周面,藉由導電構件的彈性變形而使接觸電阻的變動受到抑制,所述壓接狀態在旋轉驅動時也有維持,藉此將連繫一個驅動力傳達部的外周面、導電構件及另一個驅動力傳達部的外周面的導電路徑予以確實地形成。如此一來,旋轉接頭藉由驅動力傳達部彼此的套合,能夠在傳達驅動力的同時在旋轉構件之間維持安定的通電。再者,由於導電構件能夠彈性變形,一個旋轉構件與另一個旋轉構件的機械性連接及電性連接能夠簡單地進行。In order to solve the aforementioned problems, the rotary joint of the present invention includes: a rotary member that is driven by rotation, has conductivity, and is provided with a driving force transmission part; and the other rotary member is driven by the one rotary member to rotate , And has conductivity, and is provided with a driving force transmission part; and a series of conductive members are elastically deformed and are respectively crimped on the outer peripheral surfaces of two driving force transmission parts overlapping in the radial direction. As a result, a series of conductive members that can be elastically deformed are crimped on the outer peripheral surface of the driving force transmission portion of the two rotating members, and the change in contact resistance is suppressed by the elastic deformation of the conductive members. The connected state is also maintained during rotational driving, and thereby a conductive path connecting the outer peripheral surface of one driving force transmission part, the conductive member, and the outer peripheral surface of the other driving force transmission part is reliably formed. In this way, the rotary joint can transmit the driving force while maintaining stable energization between the rotating members through the fitting of the driving force transmitting parts. Furthermore, since the conductive member can be elastically deformed, the mechanical and electrical connection between one rotating member and the other rotating member can be easily performed.
各個該驅動力傳達部得以具有沿著中心軸線而延伸的平坦面。 藉此,伴隨著旋轉,驅動力傳達部互相平衡良好地受力的緣故,從驅動力傳達部的外周面作用至導電構件的力的周方向的偏差小,而能夠抑制接觸電阻的變動。Each of the driving force transmission parts can have a flat surface extending along the central axis. With this, the driving force transmission portion receives forces in a well-balanced manner along with the rotation, and the circumferential deviation of the force acting from the outer peripheral surface of the driving force transmission portion to the conductive member is small, and the variation in contact resistance can be suppressed.
該導電構件得以具有於周方向複數個均等的彈性壓接部,該彈性壓接部係分別壓接於二個該旋轉構件的外周面。 藉此,能夠將彈性壓接部於周方向平衡良好地壓接於二個旋轉構件的外周面。The conductive member can have a plurality of equal elastic crimping portions in the circumferential direction, and the elastic crimping portions are crimped to the outer peripheral surfaces of the two rotating members, respectively. Thereby, the elastic pressure-bonding part can be pressure-bonded to the outer peripheral surfaces of the two rotating members in a well-balanced circumferential direction.
該導電構件得以具有環狀的連結部,該連結部係將該彈性壓接部予以成串地連繫。 藉此,能夠抑制帶有旋轉的導電構件的變形,同時能夠從外周對二個旋轉構件賦予緊迫力以使二個驅動力傳達部確實地套合。The conductive member may have a ring-shaped connecting portion, and the connecting portion connects the elastic crimping portion in series. Thereby, the deformation of the conductive member with rotation can be suppressed, and at the same time, a urging force can be applied to the two rotating members from the outer periphery so that the two driving force transmission parts can be surely fitted together.
該導電構件的導電率得以比二個該旋轉構件更高。 藉此,能夠藉由導電構件而確實地形成旋轉構件之間的導電通路。The conductivity of the conductive member can be higher than that of the two rotating members. Thereby, the conductive path between the rotating members can be reliably formed by the conductive member.
一個該旋轉構件得以固定有一移動限制構件,該移動限制構件係將該導電構件的軸方向的移動予以限制。 藉此,能夠防止相對於驅動力傳達部的導電構件的軸方向的移動。One of the rotating members is fixed with a movement restricting member, and the movement restricting member restricts the movement of the conductive member in the axial direction. Thereby, it is possible to prevent the movement in the axial direction of the conductive member with respect to the driving force transmission portion.
該移動限制構件得以為包覆該導電構件的殼罩。 藉此,能夠防止對導電構件的來自外部的接觸。The movement restriction member can be a shell covering the conductive member. Thereby, it is possible to prevent external contact with the conductive member.
關於本發明的旋轉接頭的實施方式,基於以下實施例而進行說明。 [實施例]The embodiment of the rotary joint of the present invention will be described based on the following examples. [Example]
參考第1圖至第4圖而說明關於實施例的旋轉接頭。以下,將從第3圖的正視側觀看的左右側作為旋轉接頭的左右側以進行說明。The rotary joint of the embodiment will be described with reference to Figs. 1 to 4. Hereinafter, the left and right sides viewed from the front view side of FIG. 3 will be described as the left and right sides of the rotary joint.
本實施例的旋轉接頭1係用於例如半導體製造機的旋轉部位,在受旋轉驅動的一個旋轉構件與從動於該一個旋轉構件而旋轉的另一個旋轉構件之間,使從未圖示的高頻電源所供給的高頻電流予以通電。The
如第1圖至第3圖所示,旋轉接頭1係構成有:藉由未圖示的半導體製造機的驅動部而旋轉驅動的作為一個旋轉構件的驅動軸2、從動於該驅動軸2而旋轉的作為另一個旋轉構件的從動軸3、分別壓接於將驅動軸2及從動軸3予以機械性連接的驅動力傳達部20、30的外周面20d、30d的形成為成串的導電構件4、以及固定於驅動軸2且包覆導電構件4的外周的作為移動限制構件的殼罩5。As shown in Figures 1 to 3, the
驅動軸2及從動軸3為具有導電性的金屬製的剖面圓形的柱狀體。另外,驅動軸2及從動軸3不限於金屬製,亦可藉由具有導電性的樹脂等的導電材料形成。再者,驅動軸2及從動軸3能夠以相同的導電材料形成,亦能夠以相異的導電材料形成。The
如第2圖至第4圖所示,驅動軸2及從動軸3,於軸方向對向的端部,設有分別在徑方向重疊的剖面半圓形的驅動力傳達部20、30。驅動力傳達部20、30,具有沿著驅動軸2及從動軸3的中心軸線延伸且於徑方向對向的平坦面20a、30a,平坦面20a、30a藉由套合以傳達動力。另外,驅動力傳達部之中於徑方向相對的面不限於平坦面,亦可為曲面。進一步,驅動力傳達部之中於徑方向相對的面亦可設有凹凸。As shown in Figs. 2 to 4, the
驅動軸2的驅動力傳達部20的平坦面20a於徑方向抵接於從動軸3的驅動力傳達部30的平坦面30a,而使驅動軸2的驅動力藉由互相套合的驅動力傳達部20、30而傳達至從動軸3,使從動軸3與驅動軸2一同旋轉。The
再者,如第3圖所示,驅動力傳達部20的前端面20b於軸方向抵接於形成在驅動力傳達部30的根部側的從動軸3的端面30c的同時,驅動力傳達部30的前端面30b於軸方向抵接於形成在驅動力傳達部20的根部側的驅動軸2的端面20c。亦即,驅動力傳達部20、30成為互補的形狀。Furthermore, as shown in Fig. 3, the
驅動力傳達部20、30互相限制於軸方向朝著靠近的方向的移動。另外,驅動力傳達部20、30,只要在導電構件4總是壓接於分別的驅動力傳達部20、30的外周面20d、30d的範圍內,亦得以容許朝軸方向兩側的移動。The driving
如第1圖至第3圖所示,殼罩5為略圓筒形,並且具有:得以於內徑側收納導電構件4的圓筒部50、以及從圓筒部50的軸方向左端部於內徑方向延伸的固定法蘭部51。另外,殼罩5係由陶瓷或樹脂等的絕緣體所構成。As shown in Figs. 1 to 3, the
如第3圖所示,在圓筒部50的內徑側收納有導電構件4的狀態下,導電構件4的外周面、詳細後述的連結部41、41的外周面,沿著圓筒部50的內周面而抵接。另外,導電構件4的外周面與圓筒部50的内周面,亦得以於徑方向相互間隔有距離。As shown in Fig. 3, in a state where the
再者,圓筒部50的內徑側收納有導電構件4的狀態下,導電構件4的軸方向左端,於軸方向抵接於固定法蘭部51的軸方向右端面,導電構件4的軸方向右端,配置為於軸方向與圓筒部50的軸方向右端對齊。亦即,對圓筒部50的導電構件4的插入進度能夠藉由與固定法蘭部51的抵接而規定。因此,旋轉接頭1的組裝作業性高。Furthermore, when the
再者,在固定法蘭部51的內徑側設有於軸方向貫穿的貫穿孔51a。殼罩5於貫穿孔51a插通有驅動軸2的狀態下,對驅動軸2的外周面壓入而固定。亦即,殼罩5及導電構件4與驅動軸2一同旋轉。另外,殼罩5的朝驅動軸2的固定亦可為壓入以外的方法。In addition, a
如第2圖至第4圖所示,導電構件4為金屬製的略圓筒狀的板彈簧,呈軸方向中央部於內徑方向彎曲的剖面略圓弧形,具有於周方向十二等分配置的彈性壓接部40及分別於周方向將各個彈性壓接部40的軸方向兩端予以連繫的環狀的連結部41、41。另外,導電構件4由導電率較驅動軸2及從動軸3更高的導電材料所形成。As shown in Figures 2 to 4, the
再者,導電構件4的安裝前的狀態(參考第2圖)之中,於內徑方向彎曲的彈性壓接部40的軸方向中央部的內側面40a的最小內徑部M的內徑尺寸係形成為比驅動力傳達部20、30在機械性連接的狀態下的驅動力傳達部20、30的外徑尺寸更小。Furthermore, in the state before the installation of the conductive member 4 (refer to FIG. 2), the inner diameter size of the smallest inner diameter portion M of the
亦即,導電構件4的內徑側插通有驅動力傳達部20、30,藉此各個彈性壓接部40的軸方向中央部得以於外徑側均等地推開。藉此,各個彈性壓接部40成為壓縮狀態,藉由其彈性恢復力,內側面40a以略均等的力壓接於驅動力傳達部20、30的外周面20d、30d,驅動軸2及從動軸3透過導電構件4而電性連接。That is, the driving
例如,如第4圖中的箭頭所表示,從未圖示的高頻電源供給至驅動軸2的電流,從驅動力傳達部20的外周面20d流向壓接於驅動力傳達部20的外周面20d的彈性壓接部40,通過連結部41、41,從壓接於驅動力傳達部30的外周面30d的彈性壓接部40,流向驅動力傳達部30的外周面30d,而供給至從動軸3。另外,本實施例的旋轉接頭1,如同上述,透過導電構件4而電性連接驅動軸2及從動軸3,驅動力傳達部20、30的於徑方向對向的平坦面20a、30a之間亦可沒有電流流通。For example, as indicated by the arrow in Figure 4, the current supplied from the high-frequency power supply (not shown) to the
如同以上說明,旋轉接頭1包含:驅動軸2,係受旋轉驅動,且具有導電性,並設置有驅動力傳達部20;從動軸3,係從動於驅動軸2而轉動,且具有導電性,並設置有驅動力傳達部30;以及成串的導電構件4,係得以彈性變形,且分別壓接於在徑方向重疊的驅動力傳達部20、30的外周面20d、30d。藉此,得以彈性變形的形成為成串的導電構件4的彈性壓接部40壓接於驅動軸2及從動軸3的驅動力傳達部20、30的外周面20d、30d,因而導電構件4的彈性壓接部40藉由彈性變形而抑制接觸電阻的變動,在旋轉驅動時也維持該壓接狀態,藉此將連繫驅動力傳達部20的外周面20d、導電構件4、及驅動力傳達部30的外周面30d的導電路徑(參考第4圖)予以確實地形成。如此一來,旋轉接頭1藉由驅動力傳達部20、30彼此的套合,能夠在傳達驅動力的同時在驅動軸2與從動軸3之間維持安定的通電。As explained above, the
再者,由於導電構件4能夠彈性變形,驅動軸2與從動軸3的機械性連接及電性連接能夠簡單地進行。詳細而言,固定於驅動軸2的殼罩5的內徑側收納有導電構件4的狀態下,將第3圖中以鏈線所示的插入前狀態的從動軸3的驅動力傳達部30的平坦面予以於徑方向與驅動軸2的驅動力傳達部20的平坦面20a相對向,在導電構件4的內徑側於軸方向進行插入,藉此能夠以單觸(one touch)的方式簡單地進行驅動軸2與從動軸3的機械性連接及電性連接。Furthermore, since the
再者,驅動力傳達部20、30成為互補的形狀,驅動力傳達部20、30的前端面20b、30b於軸方向抵接於驅動軸2及從動軸3的端面20c、30c,藉此在導電構件4的內徑側於軸方向插入的從動軸3的插入進度受到規定。因此,旋轉接頭1的組裝作業性高。Furthermore, the driving
再者,驅動力傳達部20、30的外周面20d、30d與各個彈性壓接部40的內側面40a的接觸面積被確保的狀態受到維持,因而即使高頻電流通電也難以產生發熱,而能夠防止發熱所導致的損傷。Furthermore, the state in which the contact area between the outer
再者,驅動力傳達部20、30具有沿著中心軸線延伸的平坦面20a、30a,同時成為互補的形狀。藉此,伴隨著旋轉,驅動力傳達部20、30互相平衡良好地受力的緣故,從驅動力傳達部20、30的外周面20d、30d作用至導電構件4的力的周方向的偏差小,而能夠抑制接觸電阻的變動。Furthermore, the driving
導電構件4具有於周方向複數個均等的彈性壓接部40。藉此,能夠將各個彈性壓接部40的內側面40a於周方向平衡良好地壓接於驅動力傳達部20、30的外周面20d、30d,從驅動力傳達部20、30的外周面20d、30d作用至導電構件4的力的周方向的偏差更為減小。The
再者,導電構件4,使各個彈性壓接部40的軸方向中央部的內側面40a壓接於驅動力傳達部20、30的外周面20d、30d,因而能夠使從驅動力傳達部20、30的外周面20d、30d向導電構件4作用的力安定。再者,各個彈性壓接部40的內側面40a,在驅動力傳達部20、30的外周面20d、30d之中的略相同的軸方向位置受到壓接,因而能夠於軸方向緊密地構成導電構件4。Furthermore, the
再者,導電構件4具有將各個彈性壓接部40予以成串地連繫的環狀的連結部41、41。藉此,能夠抑制帶有旋轉的導電構件4的變形,同時能夠從外周對驅動軸2及從動軸3賦予緊迫力以使驅動力傳達部20、30確實地套合。進一步,各個彈性壓接部40的軸方向兩端藉由環狀的連結部41、41連繫成串而藉此使導電構件4成為略圓筒形,而進一步抑制帶有旋轉的導電構件4的變形。Furthermore, the
導電構件4由導電率較驅動軸2及從動軸3更高的導電材料所形成。藉此,能夠藉由導電構件4而確實地形成驅動力傳達部20、30之間的導電通路。The
再者,於旋轉驅動的驅動軸2固定有限制導電構件4的軸方向的移動的作為移動限制構件的殼罩5。藉此,能夠防止相對於驅動力傳達部20、30的導電構件4的軸方向的移動,能夠將各個彈性壓接部40的內側面40a予以確實地壓接於驅動力傳達部20、30的外周面20d、30d。Furthermore, a
再者,藉由殼罩5而包覆導電構件4的外周,因而能夠防止對導電構件4的來自外部的接觸。Furthermore, since the outer periphery of the
再者,殼罩5的內徑側之中,導電構件4的連結部41、41的外周面沿著圓筒部50的內周面而抵接,因而提高連結部41、41的強度,能夠使各個彈性壓接部40安定地彈性變形。再者,藉由殼罩5而防止導電構件4的過度變形所導致的破損,因而驅動力傳達部20、30的機械性連接及導電構件4所致的驅動力傳達部20、30之間的電性連接能夠確保。Furthermore, on the inner diameter side of the
再者,導電構件4及殼罩5與驅動軸2及從動軸3一同旋轉,因而這些構件之間不會產生旋轉所導致的磨耗,維護性高。Furthermore, the
以上,雖然藉由圖式而說明了本發明的實施例,但是具體的構成並非限定於這些實施例,在不脫離本發明的宗旨的範圍內的變更或附加皆包含於本發明內。Above, although the embodiments of the present invention have been described with the drawings, the specific configuration is not limited to these embodiments, and changes or additions within the scope that do not depart from the spirit of the present invention are included in the present invention.
例如,雖然在前述實施例之中說明:驅動軸2及從動軸3的驅動力傳達部20、30,形成為具有沿著驅動軸2及從動軸3的中心軸線而延伸的平坦面20a、30a的剖面半圓形,但是不限於此,只要驅動力傳達部於徑方向重疊且能夠將驅動力從旋轉軸傳達至從 動軸,亦可如第5圖所示的變形例一,形成為分別具有相對於驅動軸102及從動軸103的中心軸線而傾斜的傾斜面102a、103a的形狀。For example, although described in the foregoing embodiment: the driving
再者,如第6圖及第7圖所示的變形例二,亦可藉由從驅動軸202及從動軸的於軸方向相對向的端部突出的鉤狀的凸部220、230與凹部221、231互相鍵結合而構成驅動力傳達部。此場合,如第6圖所示,導電構件204的各個彈性壓接部240的內側面240a,亦可在驅動力傳達部的位置之中相對於外周面220a、230a於軸方向相異的位置分別壓接。Furthermore, as shown in the second modification shown in FIGS. 6 and 7, it is also possible to use hook-shaped
再者,雖然在前述實施例之中說明:導電構件4係由略圓筒狀的板彈簧構成,但是並非限定於此,導電構件亦可由例如連結部形成為C字狀的有端狀的板彈簧構成。再者,只要是得以彈性變形的導電構件,亦可由板彈簧以外構成。進一步,導電構件不必整體得以彈性變形,只要至少抵接於驅動力傳達部的部位得以彈性變形即可。Furthermore, although it is explained in the foregoing embodiment that the
再者,在前述實施例之中,雖然說明導電構件4的各個彈性壓接部40的軸方向兩端藉由連結部41、41而連繫成串,但是並非限定於此,各個彈性壓接部的僅軸方向一端藉由連結部而連繫成串亦可。Furthermore, in the foregoing embodiment, although it is described that the axial ends of each elastic crimping
再者,彈性壓接部的軸方向中央部於周方向連繫,而內側面環狀地壓接於驅動力傳達部的外周面亦可。Furthermore, the axial center part of the elastic crimping portion may be connected in the circumferential direction, and the inner surface may be crimped to the outer peripheral surface of the driving force transmission portion in an annular shape.
再者,在前述實施例之中,雖然說明彈性壓接部40於周方向十二等分配置,但是並非限定於此,導電構件之中的彈性壓接部的數量及配置可自由地構成。Furthermore, in the foregoing embodiment, although the elastic crimping
再者,在前述實施例之中,雖然說明彈性壓接部40的軸方向中央部形成向內徑方向彎曲的剖面略圓弧形,但是並非限定於此,彈性壓接部亦可具有其他的剖面形狀。Furthermore, in the foregoing embodiment, although it is described that the axial center portion of the elastic crimping
再者,導電構件不限於由導電率比驅動軸及從動軸高的導電材料形成,導電構件可由導電率與驅動軸及從動軸相同的導電材料形成,亦可由導電率低的導電材料形成。Furthermore, the conductive member is not limited to being formed of a conductive material with a higher conductivity than the drive shaft and the driven shaft. The conductive member may be formed of a conductive material with the same conductivity as the drive shaft and the driven shaft, or may be formed of a conductive material with low conductivity. .
再者,旋轉接頭亦可不具有包覆導電構件的外周的殼罩。此場合,限制導電構件的軸方向的移動的移動限制構件,亦可構成為例如於軸方向與導電構件抵接的前述實施例的固定法蘭部51的圓板形狀。Furthermore, the rotary joint may not have a shell covering the outer circumference of the conductive member. In this case, the movement restricting member that restricts the movement of the conductive member in the axial direction may be configured, for example, in the shape of a disc of the fixed
再者,移動限制構件不限於固定於驅動軸,亦可固定於從動軸。Furthermore, the movement restriction member is not limited to being fixed to the drive shaft, and may be fixed to the driven shaft.
再者,旋轉接頭亦可不具有移動限制構件。Furthermore, the rotary joint may not have a movement restricting member.
再者,在前述實施例之中,雖然說明旋轉接頭1在帶有旋轉的構件之間通有高頻電流,但是並非限定於此,亦可在帶有旋轉的構件之間通有低頻電流或傳達電氣訊號。再者,旋轉接頭亦可應用於半導體製造機以外的旋轉機器。Furthermore, in the foregoing embodiments, although it is described that the rotary joint 1 passes high-frequency current between the rotating members, it is not limited to this, and low-frequency current or low-frequency current may be passed between the rotating members. Convey electrical signals. Furthermore, the rotary joint can also be applied to rotating machines other than semiconductor manufacturing machines.
1:旋轉接頭
2、102、202:驅動軸
3、103:從動軸
4、204:導電構件
5:殼罩
20、30:驅動力傳達部
20a、30a:平坦面
20b、30b:前端面
20c、30c:端面
20d、30d:外周面
40、240:彈性壓接部
40a、240a:內側面
41:連結部
50:圓筒部
51:固定法蘭部
51a:貫穿孔
102a、103a:傾斜面
220、230:凸部
220a、230a:外周面
221、231:凹部
M:最小內徑部1: Rotary joint
2, 102, 202: drive shaft
3.103: driven shaft
4.204: Conductive member
5:
[第1圖]表示本發明的實施例的旋轉接頭的立體圖。 [第2圖]係實施例的旋轉接頭的分解立體圖。 [第3圖]表示實施例的旋轉接頭的部分剖面圖。 [第4圖]表示實施例的旋轉接頭的第3圖的A-A剖面圖。 [第5圖]表示變形例一的旋轉接頭的部分剖面圖。 [第6圖]表示變形例二的旋轉接頭的部分剖面圖。 [第7圖]表示變形例二的驅動力傳達部的構造的立體圖。另外,為說明方便,第7圖中僅圖示驅動軸及從動軸。[Figure 1] A perspective view of a rotary joint according to an embodiment of the present invention. [Figure 2] is an exploded perspective view of the rotary joint of the embodiment. [Figure 3] shows a partial cross-sectional view of the rotary joint of the embodiment. [Fig. 4] A cross-sectional view taken along the line A-A in Fig. 3 showing the rotary joint of the embodiment. [Figure 5] A partial cross-sectional view of the rotary joint of Modification Example 1. [Figure 6] A partial cross-sectional view of the rotary joint of Modification Example 2. [Fig. 7] A perspective view showing the structure of the driving force transmission unit of Modification Example 2. In addition, for the convenience of description, only the drive shaft and the driven shaft are shown in FIG. 7.
2:驅動軸2: drive shaft
3:從動軸3: driven shaft
4:導電構件4: conductive member
5:殼罩5: Shell
20、30:驅動力傳達部20, 30: Driving force transmission department
20a、30a:平坦面20a, 30a: flat surface
20b、30b:前端面20b, 30b: front face
20c、30c:端面20c, 30c: end face
20d、30d:外周面20d, 30d: outer peripheral surface
40:彈性壓接部40: Elastic crimping part
40a:內側面40a: inner side
41:連結部41: Connection
50:圓筒部50: Cylinder
51:固定法蘭部51: Fixed flange
51a:貫穿孔51a: Through hole
M:最小內徑部M: Minimum inner diameter
Claims (7)
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JP2020-006239 | 2020-01-17 | ||
JP2020006239A JP7282469B2 (en) | 2020-01-17 | 2020-01-17 | rotating connector |
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TW202130075A true TW202130075A (en) | 2021-08-01 |
TWI802832B TWI802832B (en) | 2023-05-21 |
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ID=77077129
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW109145473A TWI802832B (en) | 2020-01-17 | 2020-12-22 | Rotary joint |
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JP (1) | JP7282469B2 (en) |
KR (1) | KR102647957B1 (en) |
TW (1) | TWI802832B (en) |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS52170970U (en) * | 1976-06-21 | 1977-12-26 | ||
JPS61166233U (en) * | 1985-04-04 | 1986-10-15 | ||
JPH0229320U (en) * | 1988-08-15 | 1990-02-26 | ||
NL8902490A (en) * | 1989-10-06 | 1991-05-01 | Leonardus Mathijs Marie Nevels | METHOD FOR CLEANING FLUE GASES |
JPH0484920U (en) * | 1990-11-30 | 1992-07-23 | ||
JP2000346086A (en) | 1999-06-01 | 2000-12-12 | Asano Kenkyusho:Kk | Rotary shaft connecting structure |
JP2003072567A (en) | 2001-08-31 | 2003-03-12 | Koyo Seiko Co Ltd | Electric power steering device |
TWM313881U (en) * | 2006-11-13 | 2007-06-11 | Cheng Uei Prec Ind Co Ltd | Power connector |
JP3145697U (en) * | 2008-08-06 | 2008-10-16 | 株式会社荻野精機製作所 | Axial joint |
JP2011222463A (en) | 2010-04-07 | 2011-11-04 | Yamaguchi Seisakusho Co Ltd | Rotary electric connector |
DE102012010279A1 (en) | 2012-05-25 | 2013-11-28 | Auto-Kabel Management Gmbh | ELECTRICAL CONNECTION SYSTEM |
KR102207574B1 (en) * | 2015-02-03 | 2021-01-27 | 현대모비스 주식회사 | Motor driven power steering system |
DE102015122303B3 (en) * | 2015-12-15 | 2017-04-20 | Amphenol-Tuchel Electronics Gmbh | connector socket |
TWI659570B (en) * | 2017-02-16 | 2019-05-11 | 揚明光學股份有限公司 | Connecting system |
CN110350375B (en) * | 2018-04-03 | 2020-12-29 | 深圳市默孚龙科技有限公司 | Slip ring |
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TWI802832B (en) | 2023-05-21 |
JP7282469B2 (en) | 2023-05-29 |
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