KR102647957B1 - Rotary connector - Google Patents

Abstract

A rotary connector capable of maintaining stable electricity supply between rotating members is provided.
One rotating member (2) is electrically conductive and provided with a driving force transmission unit (20) and is driven to rotate, and the other rotating member (2) is electrically conductive and provided with a driving force transmission unit (30) and rotates in accordance with one rotating member (2). It is provided with a rotating member 3 and a series of elastically deformable conductive members 4 that are respectively press-welded to the outer peripheral surfaces 20d and 30d of the driving force transmission parts 20 and 30 on both sides overlapping in the radial direction.

Description

Rotary connector{ROTARY CONNECTOR}

The present invention relates to a rotary connector for conducting electricity while transmitting a driving force between rotating members.

In rotating machines such as semiconductor manufacturing machines, it is known to perform surface treatment on semiconductor components by energizing a rotationally driven drive shaft.

For example, in Patent Document 1, an energized roll is connected to a drive shaft that is driven to rotate in hoop plating equipment and rotates together with the drive shaft. The current supplied from the drive shaft to the energizing roll is used for electrolytic treatment of the surface of the semiconductor component.

Additionally, the end of the drive shaft is inserted into an axially concave concave portion at the end of the energizing roll, and is oriented in the radial direction by the tip of a bolt threaded into a screw hole penetrating the energizing roll in the radial direction. It is pressed, and the outer peripheral surface of the end of the drive shaft is connected by being press-welded to the inner peripheral surface of the concave portion. In addition, by replacing the energizing roll connected to the end of the drive shaft with one of a different shape, it is possible to handle surface processing of multiple types of semiconductor components.

Japanese Patent Publication No. 2011-222463 (page 6, Figure 5)

In Patent Document 1, mechanical and electrical connections are made between the drive shaft and the energizing roll by the pressing force of the bolt, and a conductive passage is formed between the drive shaft and the energizing roll while transmitting the driving force of the rotationally driven drive shaft to the energizing roll. there is. However, because the drive shaft and the energizing roll rotate, the bolts may become loose at the connecting portion, and as the pressing force of the bolt weakens, the state of pressure contact between the drive shaft and the energizing roll changes, causing the drive shaft and the energizing roll to change. There was a risk that electricity supply from the drive shaft to the energizing roll would become unstable due to the change in contact resistance between the two.

The present invention was made in view of these problems, and its purpose is to provide a rotary connector that can maintain stable electricity supply between rotating members.

In order to solve the above problem, the rotary connector of the present invention,

A rotating member on one side that is conductive, has a driving force transmission portion, and is rotated,

a rotating member on the other side that is conductive, has a driving force transmission portion, and rotates in accordance with the rotating member on one side;

A series of elastically deformable conductive members are provided, each of which is pressure-welded to the outer peripheral surface of the driving force transmission unit on both sides overlapping in the radial direction.

According to this, a series of elastically deformable conductive members are press-contacted with the outer peripheral surfaces of the driving force transmission portions of both rotary members, and the elastic deformation of the conductive members suppresses fluctuations in contact resistance, and the press-contact state is maintained even during rotational driving. , a conductive path connecting the outer peripheral surface of one driving force transmission unit, the conductive member, and the outer peripheral surface of the other driving force transmission unit is reliably formed. In this way, the rotary connector can maintain stable electricity supply between the rotating members while transmitting the driving force by engaging the driving force transmission units. Additionally, since the conductive member is elastically deformable, mechanical and electrical connection between one rotating member and the other rotating member can be easily performed.

Each of the driving force transmission parts may have a flat surface extending along the central axis.

According to this, since the driving force transmitting portions receive forces in a well-balanced manner with each other as they rotate, the circumferential bias of the force acting from the outer peripheral surface of the driving force transmitting portion to the conductive member is small, and fluctuations in contact resistance can be suppressed.

The electrically conductive member may have a plurality of elastic pressure-contact portions equally spaced in the circumferential direction, respectively pressure-contacted with the outer peripheral surfaces of the rotation members on both sides.

According to this, the elastic pressure-welded portion can be pressure-welded to the outer peripheral surfaces of both rotating members in a well-balanced circumferential direction.

The electrically conductive member may have an annular connecting portion that connects the elastic press-welded portions in series.

According to this, deformation of the conductive member accompanying rotation can be suppressed, and at the same time, a tightening force can be applied from the outer periphery to both rotating members to ensure that both driving force transmission portions are reliably engaged.

The electrically conductive member may have a higher electrical conductivity than both of the rotating members.

According to this, the conductive passage between the rotating members can be reliably formed by the conductive member.

A movement regulating member that regulates movement of the conductive member in the axial direction may be fixed to one of the rotating members.

According to this, it is possible to prevent movement of the conductive member in the axial direction with respect to the driving force transmission unit.

The movement regulating member may be a cover that covers the electrically conductive member.

According to this, contact from the outside to the conductive member can be prevented.

1 is a perspective view showing a rotary connector in an embodiment of the present invention;
Figure 2 is an exploded perspective view of the rotary connector of the embodiment;
3 is a partial cross-sectional view showing the rotary connector of the embodiment,
Figure 4 is a cross-sectional view taken along the line AA of Figure 3 showing the rotary connector of the embodiment;
5 is a partial cross-sectional view showing the rotary connector in Modification Example 1;
6 is a partial cross-sectional view showing the rotary connector in Modification Example 2;
FIG. 7 is a perspective view showing the structure of the driving force transmission unit in Modification Example 2. Additionally, for convenience of explanation, only the drive shaft and driven shaft are shown in FIG. 7.

A form for implementing the rotary connector according to the present invention will be described below based on examples.

Example

A rotary connector according to an embodiment will be described with reference to FIGS. 1 to 4. Hereinafter, the left and right sides viewed from the front side of FIG. 3 will be described as the left and right sides of the rotary connector.

The rotary connector 1 of this embodiment is used, for example, at a rotation point in a semiconductor manufacturing machine, and a high-frequency (not shown) signal is generated between one rotary member that is rotationally driven and the other rotary member that rotates in accordance with the one rotary member. It conducts high-frequency electricity supplied from a power source.

As shown in FIGS. 1 to 3, the rotary connector 1 includes a drive shaft 2 as one rotary member that is driven to rotate by a drive unit of a semiconductor manufacturing machine (not shown), and a drive shaft 2 that rotates in accordance with the drive shaft 2. It is formed in a series of pressure contacts with the driven shaft 3 as the other rotating member and the outer peripheral surfaces 20d and 30d of the driving force transmission parts 20 and 30 that mechanically connect the driving shaft 2 and the driven shaft 3, respectively. It is composed of a conductive member 4 and a cover 5 as a movement regulating member that is fixed to the drive shaft 2 and covers the outer periphery of the conductive member 4.

The drive shaft 2 and the driven shaft 3 are pillar-shaped bodies with a circular cross-section and made of conductive metal. In addition, the drive shaft 2 and the driven shaft 3 are not limited to being made of metal, and may be formed of a conductive material such as a conductive resin. In addition, the drive shaft 2 and the driven shaft 3 may be formed of the same conductive material or may be formed of different conductive materials.

As shown in FIGS. 2 to 4, the drive shaft 2 and the driven shaft 3 are provided with driving force transmission portions 20 and 30 of a semicircular cross-section shape that overlap in the radial direction, respectively, at ends opposite to each other in the axial direction. The driving force transmission units 20 and 30 have flat surfaces 20a and 30a that extend along the central axes of the driving shaft 2 and the driven shaft 3 and face each other in the radial direction, and both flat surfaces 20a and 30a It is designed to transmit power by engaging this. Additionally, the surface opposing the radial direction in the driving force transmission unit is not limited to a flat surface and may be a curved surface. Additionally, in the driving force transmission portion, unevenness or the like may be provided on the surface facing the radial direction.

The drive shaft 2 has the flat surface 20a of the driving force transmission unit 20 in radial contact with the flat surface 30a of the driving force transmission unit 30 of the driven shaft 3, thereby forming the drive shaft 2. The driving force is transmitted to the driven shaft 3 by the driving force transmission parts 20 and 30 that engage with each other, and the driven shaft 3 rotates together with the driving shaft 2.

In addition, as shown in FIG. 3, the distal end surface 20b of the driving force transmission unit 20 is axially aligned with the end surface 30c of the driven shaft 3 formed on the proximal side of the driving force transmission unit 30. At the same time as contact, the distal end surface 30b of the driving force transmission unit 30 abuts in the axial direction the end surface 20c of the drive shaft 2 formed on the proximal side of the driving force transmission unit 20. That is, the driving force transmission units 20 and 30 have complementary shapes.

The driving force transmission units 20 and 30 regulate movement in the direction of approaching each other in the axial direction. In addition, the driving force transmission units 20 and 30 are allowed to move on both sides of the axial direction as long as the conductive member 4 is always within the range of being press-contacted with the outer peripheral surfaces 20d and 30d of the driving force transmission units 20 and 30, respectively. It's okay if it's done.

1 to 3, the cover 5 has a substantially cylindrical shape and includes a cylindrical portion 50 capable of receiving the conductive member 4 on the inner diameter side, and an axial left end portion of the cylindrical portion 50. It has a fixed flange portion 51 extending from the inner diameter direction. Additionally, the cover 5 is formed of an insulating material such as ceramics or resin.

As shown in FIG. 3, when the conductive member 4 is accommodated on the inner diameter side of the cylindrical portion 50, the outer peripheral surface of the conductive member 4, specifically the outer peripheral surface of the connecting portions 41 and 41, which will be described later, is, They are in contact along the inner peripheral surface of the cylindrical portion (50). Additionally, the outer peripheral surface of the conductive member 4 and the inner peripheral surface of the cylindrical portion 50 may be spaced apart in the radial direction.

In addition, when the conductive member 4 is accommodated on the inner diameter side of the cylindrical portion 50, the axial left end of the conductive member 4 is axially abutted against the axial right end surface of the fixed flange portion 51. , the axial right end of the conductive member 4 is arranged to coincide with the axial right end of the cylindrical portion 50 in the axial direction. That is, the degree of insertion of the conductive member 4 into the cylindrical portion 50 can be defined by the contact with the fixed flange portion 51. Therefore, the assembly workability of the rotary connector 1 is high.

Additionally, the fixing flange portion 51 is provided with a through hole 51a penetrating in the axial direction on its inner diameter side. The cover 5 is press-fitted to the outer peripheral surface of the drive shaft 2 while the drive shaft 2 is inserted through the through hole 51a. That is, the cover 5 and the conductive member 4 rotate together with the drive shaft 2. Additionally, the cover 5 may be fixed to the drive shaft 2 by a method other than press fitting.

As shown in FIGS. 2 to 4, the conductive member 4 is a substantially cylindrical leaf spring made of metal, and the axial central portion has a cross-section that is bent in the inner radial direction and has a substantially circular arc shape, and has an elastic pressure-welded portion divided 12 times in the circumferential direction. (40) and annular connecting portions (41, 41) that connect both axial ends of each elastic pressure-welded portion (40) in series in the circumferential direction. Additionally, the conductive member 4 is formed of a conductive material with a higher electrical conductivity than the drive shaft 2 and the driven shaft 3.

In addition, in the state before mounting the conductive member 4 (see FIG. 2), the inner diameter dimension of the minimum inner diameter portion M on the inner surface 40a of the axial center portion of the elastic pressure contact portion 40 bent in the inner diameter direction is is formed to be smaller than the outer diameter dimension of the driving force transmission parts 20 and 30 when the driving force transmission parts 20 and 30 are mechanically connected.

That is, by inserting the driving force transmission portions 20 and 30 into the inner diameter side of the conductive member 4, the axial central portion of each elastic pressure contact portion 40 is uniformly expanded toward the outer diameter side. Accordingly, each elastic press-contact portion 40 is in a compressed state, and the inner surface 40a is press-contacted with approximately equal force to the outer peripheral surfaces 20d and 30d of the driving force transmission portions 20 and 30 by the elastic restoring force, The drive shaft (2) and the driven shaft (3) are electrically connected through a conductive member (4).

For example, as indicated by an arrow in FIG. 4, the current supplied to the drive shaft 2 from a high-frequency power source (not shown) flows from the outer peripheral surface 20d of the driving force transmission unit 20 to the outer peripheral surface of the driving force transmission unit 20. The driving force transmission portion 30 flows from the elastic pressure contact portion 40 pressure-contacted to (20d), passes through the connecting portions 41 and 41, and is pressure-contacted with the outer peripheral surface 30d of the driving force transmission portion 30. ) flows to the outer peripheral surface (30d) and is supplied to the driven shaft (3). In addition, the rotary connector 1 of this embodiment is one in which the drive shaft 2 and the driven shaft 3 are electrically connected through the conductive member 4 as described above, and the diameters of the drive force transmission units 20 and 30 are The current does not need to flow between the flat surfaces 20a and 30a facing in opposite directions.

As described above, the rotary connector 1 has a drive shaft 2 that is electrically conductive, is provided with a driving force transmission unit 20, and is rotationally driven, and is electrically conductive, is provided with a driving force transmission unit 30, and is connected to the drive shaft 2. It is provided with a driven shaft 3 that is driven and rotated, and a series of elastically deformable conductive members 4 that are respectively pressure-welded to the outer peripheral surfaces 20d and 30d of the driving force transmission parts 20 and 30 that overlap in the radial direction. According to this, the elastic pressure-contact portion 40 of the elastically deformable conductive member 4 is pressure-welded to the outer peripheral surfaces 20d and 30d of the driving force transmission portions 20 and 30 of the drive shaft 2 and the driven shaft 3. By elastically deforming the elastic press-contact portion 40 of the conductive member 4, fluctuations in contact resistance are suppressed, and the press-contact state is maintained even during rotational driving, so that the outer peripheral surface 20d of the driving force transmission portion 20, A conductive path (see FIG. 4) connecting the conductive member 4 and the outer peripheral surface 30d of the driving force transmission unit 30 is reliably formed. In this way, the rotary connector 1 can maintain stable electricity supply between the drive shaft 2 and the driven shaft 3 while transmitting the driving force by engaging the driving force transmission units 20 and 30.

Additionally, since the conductive member 4 is elastically deformable, mechanical and electrical connection between the drive shaft 2 and the driven shaft 3 can be easily performed. In detail, with the conductive member 4 accommodated on the inner diameter side of the cover 5 fixed to the drive shaft 2, the driving force transmission portion of the driven shaft 3 in the state before insertion shown by the chain line in FIG. 3 ( The flat surface 30a of 30 is radially opposed to the flat surface 20a of the driving force transmission portion 20 of the drive shaft 2, and is inserted into the inner diameter side of the conductive member 4 in the axial direction, thereby forming the drive shaft ( 2) and the driven shaft 3 can be easily connected with one touch.

In addition, the driving force transmission units 20 and 30 are made of complementary shapes, so that the front end surfaces 20b and 30b of the driving force transmission units 20 and 30 are aligned with the end surfaces 20c of the driving shaft 2 and the driven shaft 3. By contacting 30c) in the axial direction, the degree of insertion of the driven shaft 3 axially inserted into the inner diameter side of the conductive member 4 is defined. Therefore, the assembly workability of the rotary connector 1 is high.

In addition, since the contact area between the outer peripheral surfaces (20d, 30d) of the driving force transmission units (20, 30) and the inner surface (40a) of each elastic pressure contact portion (40) is maintained, heat generation is prevented even when a high-frequency current is applied. It is unlikely to occur, and damage caused by heat can be prevented.

Additionally, the driving force transmission units 20 and 30 have flat surfaces 20a and 30a extending along the central axis and have complementary shapes. According to this, since the driving force transmission parts 20 and 30 receive forces in a well-balanced manner with each other as they rotate, the force acting on the conductive member 4 from the outer peripheral surfaces 20d and 30d of the driving force transmission parts 20 and 30 Since the deviation in the circumferential direction is small, fluctuations in contact resistance can be suppressed.

Additionally, the conductive member 4 has a plurality of elastic pressure-contact portions 40 evenly spaced in the circumferential direction. According to this, the inner surface 40a of each elastic pressure-contact portion 40 can be pressure-welded to the outer peripheral surfaces 20d and 30d of the driving force transmission portions 20 and 30 in a well-balanced circumferential direction, so that the driving force transmission portions 20 and 30 The circumferential deviation of the force acting from the outer peripheral surfaces 20d and 30d to the conductive member 4 can be further reduced.

In addition, since the conductive member 4 presses the inner surface 40a of the axial center portion of each elastic pressure-welded portion 40 to the outer peripheral surfaces 20d and 30d of the driving force transmitting portions 20 and 30, the driving force transmitting portion The force acting on the conductive member 4 from the outer peripheral surfaces 20d and 30d of (20, 30) can be stabilized. In addition, since the inner surfaces 40a of each elastic press-contact portion 40 are press-contacted at approximately the same axial position on the outer peripheral surfaces 20d and 30d of the driving force transmission portions 20 and 30, the conductive member 4 can be configured compactly in the axial direction.

Additionally, the conductive member 4 has annular connecting portions 41 and 41 that connect each elastic pressure-welded portion 40 in series. According to this, deformation of the conductive member 4 accompanying rotation can be suppressed, and at the same time, a tightening force is applied to the drive shaft 2 and driven shaft 3 from the outer periphery to ensure the drive force transmission portions 20 and 30. It can be combined. In addition, since the conductive member 4 has a substantially cylindrical shape by connecting both axial ends of each elastic press-welded portion 40 in series by the annular connecting portions 41 and 41, the conductive member ( The deformation of 4) is further suppressed.

Additionally, the conductive member 4 is formed of a conductive material with a higher electrical conductivity than the drive shaft 2 and the driven shaft 3. According to this, the conductive passage between the driving force transmission parts 20 and 30 can be reliably formed by the conductive member 4.

Additionally, a cover 5 serving as a movement regulating member that regulates movement of the conductive member 4 in the axial direction is fixed to the drive shaft 2 that rotates. According to this, it is possible to prevent movement of the conductive member 4 in the axial direction with respect to the driving force transmission portions 20 and 30, so that the inner surface 40a of each elastic pressure contact portion 40 is connected to the driving force transmission portions 20 and 30. It can be reliably pressure-welded to the outer peripheral surface (20d, 30d).

Additionally, since the outer circumference of the conductive member 4 is covered by the cover 5, contact with the conductive member 4 from the outside can be prevented.

Additionally, on the inner diameter side of the cover 5, the outer peripheral surface of the connecting portions 41, 41 of the conductive member 4 abuts along the inner peripheral surface of the cylindrical portion 50, so that the strength of the connecting portions 41, 41 increases. As the height increases, each elastic pressure contact portion 40 can be elastically deformed in a stable manner. In addition, since damage due to excessive deformation of the conductive member 4 is prevented by the cover 5, the mechanical connection in the driving force transmission portions 20 and 30 and the driving force transmission portion by the conductive member 4 The electrical connection between (20, 30) is reliably maintained.

In addition, since the conductive member 4 and the cover 5 rotate together with the drive shaft 2 and the driven shaft 3, wear due to rotation does not occur between these members, and maintainability is high. .

Although the embodiments of the present invention have been described above with reference to the drawings, the specific configuration is not limited to these embodiments, and any changes or additions that do not deviate from the gist of the present invention are included in the present invention.

For example, in the above embodiment, the driving force transmission portions 20 and 30 of the driving shaft 2 and the driven shaft 3 have a flat surface 20a extending along the central axis of the driving shaft 2 and the driven shaft 3. , 30a), it is described as being formed in a semicircular cross-section shape, but it is not limited to this, and the driving force transmission part can be overlapped in the radial direction and transmit the driving force from the rotating shaft to the driven shaft. For example, a modified example shown in FIG. 5. As shown in 1, it may be formed in a shape having inclined surfaces 102a and 103a that are inclined with respect to the central axes of the drive shaft 102 and the driven shaft 103, respectively.

In addition, as in Modification 2 shown in FIGS. 6 and 7, hook-shaped convex portions 220 and 230 protruding in the axial direction from the ends opposite to the axial direction of the drive shaft 202 and the driven shaft 203, and concave A driving force transmission portion may be formed by keying the portions 221 and 231 to each other. In this case, as shown in FIG. 6, the inner surface 240a of each elastic pressure contact portion 240 of the conductive member 204 is at a different position in the axial direction with respect to the outer peripheral surface 220a and 230a at the position of the driving force transmission portion. Each may be pressure-welded.

In addition, in the above embodiment, the conductive member 4 has been described as being composed of a substantially cylindrical leaf spring, but the conductive member is not limited to this, and the conductive member may have, for example, a stepped end in which the connection portion is formed in a C shape. It may be composed of a leaf spring in the shape of a plate. Additionally, the electrically conductive member may be composed of a material other than a leaf spring as long as it is elastically deformable. Additionally, the entire conductive member does not need to be elastically deformable, and it is sufficient as long as at least the portion that comes into contact with the driving force transmission portion is elastically deformable.

In addition, in the above embodiment, the conductive member 4 has been described as having both ends in the axial direction of each elastic pressure contact portion 40 connected in series by the connecting portions 41 and 41, but the present invention is not limited to this. For example, only the axial ends of each elastic pressure-welded portion may be connected in series by a connecting portion.

Additionally, the elastic pressure-welded portion may have its axial central portion connected in the circumferential direction and its inner surface may be annularly pressure-welded to the outer peripheral surface of the driving force transmission portion.

In addition, in the above embodiment, the elastic pressure-contact portions 40 have been described as being multiplied 12 times in the circumferential direction. However, this is not limited to this, and the number and arrangement of the elastic pressure-contact portions in the conductive member may be freely configured.

In addition, in the above embodiment, the elastic pressure-welded portion 40 has been described as having a substantially arc-shaped cross-section in which the axial central portion is bent in the inner radial direction, but the elastic pressure-welded portion is not limited to this and may have a different cross-sectional shape. .

In addition, the conductive member is not limited to being formed of a conductive material having a higher conductivity than the drive shaft and the driven shaft. The conductive member may be formed of a conductive material having the same conductivity as that of the drive shaft and the driven shaft, or may be formed of a conductive material having a low conductivity. It's okay to be

Additionally, the rotary connector does not need to have a cover covering the outer periphery of the conductive member. In this case, the movement regulating member that regulates the axial movement of the conductive member may be configured, for example, in a disk shape similar to the fixed flange portion 51 in the above embodiment that abuts the conductive member in the axial direction.

Additionally, the movement regulating member is not limited to being fixed to the drive shaft, and may be fixed to the driven shaft.

Additionally, the rotary connector does not need to have a movement regulating member.

In addition, in the above embodiment, the rotary connector 1 has been described as a device that conducts high-frequency electricity between rotating members. However, it is not limited to this and transmits low-frequency electricity between rotating members. It can be used to conduct electricity or transmit electrical signals. Additionally, the rotary connector may be applied to rotating machines other than semiconductor manufacturing machines.

One; swivel connector
2; Drive shaft (rotating member on one side)
3; Driven shaft (rotating member on the other side)
4; lack of challenge
5; Cover (no movement restrictions)
20, 30; Driving force transmission unit
20a, 30a; flat surface
20d, 30d; outer surface
40; Elastic pressure joint
40a; inside
41; connection
50; Cylindrical part
51; Fixed flange part
220, 230; Convex part (driving force transmission part)
221, 231; Concave part (driving force transmission part)

Claims (7)

A rotating member on one side that is conductive, has a driving force transmission portion, and is rotated,
It has conductivity, is provided with a driving force transmission part, and has a rotary member on the other side that rotates in accordance with the rotary member on one side,
A rotary connector for conducting electricity between the one rotary member and the other rotary member while rotating the one rotary member and the other rotary member,
A rotary connector comprising a series of elastically deformable conductive members that are pressure-welded to the outer peripheral surfaces of the driving force transmission portions on both sides overlapping in the radial direction.
According to paragraph 1,
Each of the driving force transmission units is a rotary connector having a flat surface extending along a central axis.
According to claim 1 or 2,
A rotary connector in which the electrically conductive member has a plurality of elastic pressure-contact portions equally spaced in the circumferential direction, respectively pressure-contacted with the outer peripheral surfaces of the rotary members on both sides.
According to paragraph 3,
A rotary connector in which the conductive member has an annular connecting portion that connects the elastic pressure contact portions in series.
According to claim 1 or 2,
A rotary connector in which the conductive member has a higher electrical conductivity than both rotary members.
According to claim 1 or 2,
A rotary connector in which a movement regulating member that regulates movement in the axial direction of the conductive member is fixed to one of the rotary members.
According to clause 6,
A rotary connector wherein the movement regulating member is a cover that covers the conductive member.

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