TW202129180A - Fluid control valve - Google Patents

Abstract

A regulator performing fluid control includes an annular protruding portion having a valve seat on its leading end and an annular diameter-decreasing surface formed by decreasing an inner diameter of the annular protruding portion toward a valve hole. The regulator includes a valve element provided with a contact surface to be in contact with the valve seat and a columnar step portion provided on an inner peripheral side of the valve seat protruding from the contact surface toward the valve hole, the step portion having a diameter larger than an inner diameter of the valve hole and being coaxially formed with the valve hole. An annular ridge is formed by an outer peripheral surface of the step portion intersecting an end face of the step portion on the valve-hole side with the annular diameter-decreasing surface to constitute a passage narrowing portion.

Description

Fluid control valve

The present invention relates to a fluid control valve having a valve body, a valve chamber on the upstream side that accommodates the valve body, a valve hole on the downstream side communicating with the valve chamber, and protruding from the inner surface of the valve chamber on the valve hole side along the outer circumference of the valve hole And an annular protrusion with a valve seat at the tip, and fluid control is performed by abutting and separating the valve body and the valve seat.

As a fluid control device that performs fluid control by abutting and separating the valve body and the valve seat, for example, the flow control valve disclosed in Japanese Patent Laid-Open No. 2009-230259, the regulating valve 50 shown in Fig. 4, etc. are considered to be Such a device. The regulating valve 50 is a device that pressure-controls a control fluid such as pure water or a chemical liquid used in a semiconductor manufacturing process. The regulating valve 50 has a flow path that communicates the input port 511, the valve chamber 513, the downstream fluid chamber 516a, and the output port 512. Inside the valve body 51, the operating air introduced into the pressure acting chamber 516b interacts with the membrane member The abutting surface 54 a of the valve body 54 connected with 55 abuts and separates from the valve seat 515, thereby performing pressure control of the control fluid input from the input port 511 and output from the output port 512.

[Issues to be solved]

However, the above-mentioned conventional technology has the following problems. Due to the pressure control, the control fluid pressure difference between the input side and the output side is as large as about 200 kPa, for example. In this case, the distance between the contact surface 54a and the valve seat 515 (that is, the valve opening) is as small as, for example, 0.035 mm On the left and right, the flow velocity of the control fluid passing through such a small gap becomes faster. As the flow rate increases, the pressure of the control fluid decreases on the downstream side of the valve seat 515 (Bernoulli's theorem), creating a negative pressure area. As a result, in the control fluid, bubbling (cavitation phenomenon) caused by boiling occurs. Then, the bubble caused by the cavitation phenomenon bursts, and the shock wave caused by the burst of the bubble induces vibration at the regulating valve 50. In addition, the volume of the control fluid vaporized by the cavitation phenomenon increases, but the increased volume returns to the original volume due to the burst of the bubble. This increase and decrease in the volume of the control fluid causes pressure vibration in the downstream side fluid chamber 516a. The vibration or pressure vibration caused by these shock waves is also transmitted to the pipeline connected to the regulating valve 50, which may become a cause of noise.

In addition, when the control fluid passes through the gap between the contact surface 54a and the valve seat 515 with a valve opening degree of approximately 0.035 mm, the flow velocity of the control fluid becomes faster, and therefore jet flow is generated on the downstream side of the valve seat 515. This jet flows along the abutting surface 54a, so there is a risk of vibrating the valve body 54, and this vibration is also transmitted to the pipeline connected to the regulating valve 50, which may become a cause of noise.

In recent years, due to the miniaturization and high density of semiconductor manufacturing equipment, there has been a demand for miniaturization of fluid control valves. The conventional regulating valve 50 is considered to be able to be absorbed by the thin film member 55 connected to the valve body 54 even if cavitation phenomenon or vibration caused by jet flow occurs. Small, the volume of the downstream fluid chamber 516a and the pressure application chamber 516b becomes smaller, so it is considered that the vibration caused by the cavitation phenomenon can no longer be absorbed, and it is considered that the vibration is prone to occur.

The present invention has been completed in view of the above-mentioned problems, and its object is to provide a fluid control valve capable of preventing or suppressing vibration caused by the flow of the control fluid. [Scheme to solve the problem]

In order to solve the above-mentioned problems, the fluid control valve of the present invention has the following structure.

The fluid control valve has a valve body, a valve chamber on the upstream side that accommodates the valve body, a valve hole on the downstream side communicating with the valve chamber, and protruding from the inner surface of the valve hole of the valve chamber along the outer circumference of the valve hole and has a The annular protrusion of the valve seat is controlled by the valve body abutting and separating from the valve seat. It is characterized in that the annular protrusion has an inner diameter that makes the annular protrusion on the entire circumference of the inner diameter side of the annular protrusion. A ring-shaped reduced-diameter surface that reduces the diameter of the valve hole in the radial direction; A cylindrical step with a large diameter and coaxial with the valve hole; the annular ridge line intersecting the outer peripheral surface of the step and the end surface on the valve hole side of the step is located near the annular reduced diameter surface, forming a flow path throttling Department.

According to the fluid control valve described above, the fluid flowing from the valve chamber to the valve hole sequentially passes through the following positions: the position where the flow path area is throttled by the valve body and the valve seat; the flow path area is contacted by the annular reduced diameter surface The position where the space enclosed by the outer peripheral surface of the surface and the stepped portion is enlarged; and the position where the flow path area is reduced by the flow path throttle. The applicant found through experiments that the negative pressure state on the downstream side of the valve seat 115a is thereby alleviated.

Due to the reduced negative pressure, the occurrence of cavitation can be suppressed, and even if cavitation occurs, the time from bubble generation to disappearance can be shortened. As a result, the occurrence of vibration caused by the cavitation phenomenon can be suppressed, and the generation of noise caused by the vibration can be suppressed.

Furthermore, the jet flow is guided to the valve hole side by the step portion protruding from the contact surface on the valve hole side, and peels off from the valve body. By peeling the jet from the valve body, it is possible to suppress the generation of valve body vibration caused by the jet, and it is possible to suppress the generation of noise.

According to the fluid control valve of the present invention, it is possible to prevent or suppress vibration caused by the flow of the control fluid.

With reference to the drawings, embodiments of the fluid control valve of the present invention will be described in detail.

The fluid control device of this embodiment is a regulating valve 1, which performs pressure control of a control fluid such as a chemical liquid or pure water used in a semiconductor manufacturing process. As shown in Figure 1, the regulating valve 1 includes a valve body 11 and an upper cover (cover An example of components) 12 and the lower cover 13, and the upper cover 12 and the lower cover 13 are assembled from the valve body 11 in a direction parallel to the direction in which the valve body 14 abuts and separates from the valve seat 115a (refer to FIG. 2). The valve body 11 is formed with an input port 111 for inputting the control fluid and an output port 112 for outputting the control fluid. The valve body 11, which is a member in contact with liquid, is formed of, for example, a fluorine-based synthetic resin with high corrosion resistance, and the upper cover 12 and the lower cover 13, which are members that are not in contact with liquid, are formed of, for example, polypropylene resin.

In the center of the valve body 11, from the end surface of the valve body 11 on the lower cover 13 side to the upper cover 12 side, a valve chamber 113 communicating with the input port 111 through the input flow path 111a is penetrated. Furthermore, the valve hole 114 communicates with the valve chamber 113, and an annular protrusion 115 along the outer periphery of the valve hole 114 is protrudingly provided on the valve hole side inner surface 113 a of the valve chamber 113.

As shown in Figure 2, a valve seat 115a is formed at the tip of the annular protrusion 115 to abut and separate from the valve body 14 described later, and an annular shape is formed on the entire circumference on the inner diameter side of the annular protrusion 115 The reduced-diameter surface 115b reduces the inner diameter of the annular protrusion 115 in the direction of the valve hole 114. Furthermore, the annular reduced diameter surface 115b and the inner peripheral surface of the valve hole 114 are connected by an annular recessed portion 117. The annular recessed portion 117 is drilled from the annular reduced diameter surface 115b to the side of the valve hole 114 and is connected to the valve hole 114. The holes 114 are coaxial.

Furthermore, as shown in FIG. 1, in the valve body 11, an opening 116 communicating with the valve hole 114 is drilled on the end surface on the upper cover 12 side. The opening 116 is divided by a thin film member 15 described later into a downstream fluid chamber 116a that communicates with the output port 112 via an output flow path 112a, and a pressure acting chamber 116b. In addition, the input flow path 111a, the valve chamber 113, the valve hole 114, the downstream side fluid chamber 116a, and the output flow path 112a constitute a flow path from the input port 111 to the output port 112.

A cylindrical valve body 14 is housed in the valve chamber 113, which can reciprocate in a direction parallel to the assembling direction of the upper cover 12 and the lower cover 13. The valve body 14 is formed with an enlarged diameter portion 141 having a larger diameter than other portions in the center portion in the axial direction. As shown in FIG. 2, the end surface of the enlarged diameter portion 141 facing the valve seat 115a becomes a contact surface 141a that abuts the valve seat 115a. When the valve body 14 moves to the side of the annular protrusion 115, the abutting surface 141a abuts the valve seat 115a and blocks the flow path from the input port 111 to the output port 112. On the other hand, when the valve body 14 moves to the side opposite to the annular protrusion 115 side, the abutting surface 141a separates from the valve seat 115a, and the flow path from the input port 111 to the output port 112 communicates.

In addition, on the contact surface 141a, a cylindrical step portion 143 is protrudingly provided on the inner peripheral side of the valve seat 115a toward the valve hole 114 side. The step 143 has a diameter larger than the inner diameter of the valve hole 114 and is located coaxially with the valve hole 114.

As shown in Fig. 3, the third ring-shaped ridge line 118 where the inner peripheral surface of the ring-shaped recess 117 intersects the ring-shaped reduced diameter surface 115b is located on the outer peripheral surface of the stepped portion 143 and the end surface of the stepped portion 143 on the valve hole 114 side ( The upper end surface) is in the vicinity of the first annular ridgeline 145 (an example of the annular ridgeline) intersecting, and the first annular ridgeline 145 and the third annular ridgeline 118 form the flow path throttle portion 17. The cross-sectional area of the flow path narrowed by the contact surface 141a and the valve seat 115a is in the space surrounded by the contact surface 141a, the outer peripheral surface of the step portion 143, and the annular reduced diameter surface 115b (the first space ) After the expansion once, the flow path throttling portion 17 is narrowed again.

Furthermore, as shown in FIG. 2, on the upper end surface of the stepped portion 143, a cylindrical second stepped portion 144 having a diameter smaller than the outer diameter of the stepped portion 143 is protruded to the side of the valve hole 114. The position of the second step portion 144 is coaxial with the valve hole 114.

As shown in Figure 3, the fourth annular ridge line 119 where the inner surface of the annular recess 117 on the valve hole 114 side intersects the inner peripheral surface of the valve hole 114 is located between the outer peripheral surface of the second step portion 144 and the second step portion In the vicinity of the second annular ridgeline 146 where the end face (upper end face) on the valve hole 114 side of 144 intersects, the second annular ridgeline 146 and the fourth annular ridgeline 119 form the second flow path throttle portion 18. The cross-sectional area of the flow path narrowed by the flow path throttle portion 17 is in the space enclosed by the upper end surface of the stepped portion 143, the outer peripheral surface of the second stepped portion 144, and the annular recessed portion 117 ( After the second space is enlarged, it is narrowed again by the second flow path throttle portion 18.

The gap size C1 in the diameter direction of the first ring-shaped ridgeline 145 of the flow path throttle portion 17 is desirably set such that the gap size C1 is multiplied by the diameter of the ring-shaped protrusion 115 at the center portion (center line CL11) of the valve seat 115a The value of the dimension D1 (refer to FIG. 2) is between 0.6 and 1.2. For example, in this embodiment, the product value is 0.83.

In addition, the gap size C2 in the diameter direction of the second annular ridgeline 146 of the second flow path throttle portion 18 is desirably set such that the gap size C2 is multiplied by the annular protrusion at the center portion (central portion CL11) of the valve seat 115a The value of the diameter dimension D1 of the portion 115 is between 0.6 and 1.2. For example, in this embodiment, the product value is set to 0.83.

The distance d1 from the center portion (center line CL11) of the valve seat 115a to the outer peripheral surface of the step portion 143 is desirably in the range of 0.4 mm to 0.8 mm, for example, 0.5 mm in the present embodiment. In addition, the distance d2 from the outer peripheral surface of the stepped portion 143 to the outer peripheral surface of the second stepped portion 144 is desirably in the range of 0.4 mm to 0.8 mm, for example, 0.4 mm in the present embodiment.

The distance d3 from the valve seat 115a to the inner surface of the annular recess 117 on the valve hole 114 side is desirably smaller than the distance d4 from the abutting surface 141a to the upper end surface of the second stepped portion 144 by 0.03mm to 0.13mm, for example in this In the embodiment, it is set to be smaller than 0.1 mm.

Furthermore, as shown in Figure 1, the valve body 14 has a film portion 142 integrally formed with the valve body 14 at the end on the lower cover 13 side, and a film member 15 having a film portion 152 is joined to the end on the upper cover 12 side. . The thin film portion 142 of the valve body 14 and the thin film portion 152 of the thin film member 15 are elastically deformed in accordance with the movement of the valve body 14 abutting and separating from the valve seat 115a. In addition, the valve body 14 and the thin film member 15 which are members in contact with the liquid have high corrosion resistance, and are molded by, for example, a fluorine-based synthetic resin.

The thin film member 15 has a thin film portion 152 on the outer periphery of the central portion 151 connected to the valve body 14, and further has an annular fixing portion 153 along the outer periphery of the thin film portion 152. The ring-shaped fixing portion 153 has a ring-shaped notch 153c, except for the end on the upper cover 12 side (upper end surface 153b). The ring-shaped notched portion 153c extends from the outer peripheral surface to the end surface (lower end surface ) Make an opening. A press-fitting part 153 a is provided on the lower end surface of the ring-shaped fixing part 153 and can be press-fitted into the opening 116 of the valve body 11. The upper cover 12 and the valve body 11 sandwich the annular fixing portion 153 from both sides in the direction in which the valve body 14 abuts and separates from the valve seat 115 a, thereby fixing the thin film member 15 pressed into the opening 116. An O-ring 19 is arranged between the upper end surface 153b of the annular fixing portion 153 and the upper cover 12 to maintain the airtightness of the pressure application chamber 116b.

By providing the ring-shaped notch portion 153c, the wall thickness t11 of the valve body 11 can be thicker in proportion to the degree to which the ring-shaped notch portion 153c opens the ring-shaped fixing portion 153, and the strength of the valve body 11 can be maintained. In addition, since the ring-shaped notch portion 153c is notched from the outer peripheral surface to the lower end surface, leaving the upper end surface 153b of the ring-shaped fixing portion 153, the area pressed by the upper cover 12 can be secured at the upper end surface 153b.

At the lower cover 13, a spring accommodating chamber 131 is formed on the opposite side of the valve chamber 113 with a thin film portion 142 sandwiched therebetween. The compression coil spring 16 is accommodated in the spring accommodation chamber 131. By the pressing force of the compression coil spring 16 in this way, the valve body 14 is normally pressed in a direction in which it abuts against the valve seat 115a. This maintains the state where the contact surface 141a of the valve body 14 is in contact with the valve seat 115a.

An introduction port 121 communicating with the pressure application chamber 116b is formed in the upper cover 12, and operating air is introduced into the pressure application chamber 116b through the introduction port 121. The position of the valve body 14 is adjusted by controlling the pressure of the operating air in the pressure application chamber 116b.

The flow of the control fluid in the vicinity of the contact surface 141a of the valve body 14 and the valve seat 115a of the regulating valve 1 having the above structure will be described below.

First, the occurrence of the cavitation phenomenon, which is a problem in the prior art, will be explained using FIGS. 5 to 8.

Figures 5 and 6 show the pressure difference between the control fluid pressure on the input side and the output side of the regulator valve 1 when the pressure difference is controlled to, for example, about 200 kPa and the valve opening is about 0.035 mm. The pressure distribution diagram in the vicinity of the valve seat 115a represents the result of analysis using the finite element method of a computer. In addition, Fig. 7 is a pressure distribution diagram near the contact surface 54a and the valve seat 515 when the valve opening degree is about 0.035mm in the conventional regulating valve 50, which shows the analysis using the finite element method of the computer. result. In Figs. 5 to 7, a portion with a high dot density indicates a portion with a low pressure of the control fluid, and a portion with a low dot density indicates a portion with a high pressure of the control fluid.

In addition, the lower the pressure on the downstream side of the valve seat 115a is, the more cavitation is likely to occur. For example, a state below the pressure value P11 (refer to FIG. 8) is a state where cavitation is likely to occur.

When the valve opening is about 0.035 mm, the flow velocity of the control fluid passing through such a small gap becomes faster. It can be seen that when the flow rate of the control fluid becomes faster, for example, as shown in Fig. 7, when the valve seat of the regulating valve 50 of the conventional technique in the pressure distribution diagram is observed at three points of the measurement points A21, A22, and A23 When the pressure of the fluid at the downstream side of 515 is controlled, it can be seen that they are all in a negative pressure state. This is because as the flow rate increases, the pressure decreases (Bernoulli's theorem). Furthermore, as shown in the graph in Fig. 8, it can be seen that the pressure values at the measurement points A21, A22, and A23 are all below the pressure value P11, and cavitation is prone to occur.

On the other hand, in the regulating valve 1 of the present embodiment, as shown in FIG. 5, although the gap between the valve body 14 and the valve seat 115a is in a negative pressure state, it is at a position corresponding to the measurement point A21. Observe the pressure distribution diagram at the measurement point A11 in the first space, eliminate the negative pressure state, and the pressure value is positive. This is also clear in the chart shown in Figure 8.

In addition, the pressure profile is observed at the measurement point A12 in the second space corresponding to the position of the measurement point A22, the negative pressure state is eliminated, and the pressure value becomes a positive value. This is also clear in the chart shown in Figure 8.

At the measurement point A13 corresponding to the position of the measurement point A23, when observing the pressure distribution graph, although it can be seen that it is a negative pressure state, as shown in the graph in Figure 8, the value exceeds the pressure value P11, which can be said to be easy to occur The state of cavitation has been eliminated.

That is, in the regulating valve 1 of the present embodiment, all the measuring points A11, A12, and A13 show a pressure equal to or higher than the pressure value P11, and are in a state where cavitation phenomenon is unlikely to occur.

Here, as described above, for the gap size C1 in the radial direction of the first annular ridgeline 145 of the flow path throttle portion 17, it is desirable that the gap size C1 is multiplied by the center portion of the valve seat 115a of the ring-shaped protrusion 115 (center line CL11 ) Diameter dimension D1 is between 0.6 and 1.2. For the gap dimension C2 in the radial direction of the second annular ridgeline 146 of the second flow path throttle portion 18, it is desirable that the gap dimension C2 be multiplied by the annular protrusion 115 The value of the diameter dimension D1 in the center portion (center line CL11) of the valve seat 115a is between 0.6 and 1.2. For example, when the gap size C2 is increased and the gap size C2 is multiplied by the diameter D1 at the center (center line CL11) of the valve seat 115a of the annular protrusion 115, the value deviates from the range of 0.6 to 1.2, as As shown in Figure 6, the measurement point A11 in the first space and the measurement point A12 in the second space are in a negative pressure state, respectively. Moreover, as shown in Figure 8 (enlarged C2), the pressure values of measurement point A11 and measurement point A12 are lower than P11, which indicates that there is a risk of cavitation.

In addition, like the regulating valve of the first modification shown in FIG. 12, the annular recessed portion 117 may not be provided on the annular reduced diameter surface 115b. In this case, despite the negative pressure in the second space, in the vicinity of the first space and the valve hole 114, the pressure value maintains a level where cavitation does not occur, which is effective for suppressing the occurrence of cavitation.

Next, the occurrence of the jet stream, which is a problem caused by the conventional technology, will be explained with reference to FIGS. 9 to 11. Figures 9 and 10 show that the pressure difference between the control fluid pressure on the input side and the output side of the regulator valve 1 is controlled to be, for example, about 200 kPa, and the valve opening is about 0.035 mm. The contact surface 141a and the valve The distribution diagram of the flow velocity of the control fluid near the seat 115a represents the result of analysis using the finite element method of a computer. In addition, Fig. 11 is a distribution diagram of the flow velocity of the control fluid in the vicinity of the contact surface 54a and the valve seat 515 with the valve opening degree of about 035 mm in the conventional control valve 50, showing the result of analysis using the finite element method of the computer . In Figs. 9 to 11, the portion with high dot density indicates the portion where the flow velocity of the control fluid is fast, and the portion with low dot density indicates the portion where the flow velocity of the control fluid is slow.

When observing the analysis result of the conventional regulating valve 50 shown in FIG. 11, it can be seen that the portion of the control fluid having a high flow velocity extends along the contact surface 54 a of the valve body 54. This indicates that a jet has occurred along the abutting surface 54a. The jet flow generated along the abutting surface 54a is the cause of the vibration of the valve body 54.

On the other hand, it can be seen that in the regulating valve 1 of this embodiment, as shown in Fig. 9, the portion where the flow velocity of the control fluid is high extends along the annular reduced diameter surface 115b from the gap between the contact surface 141a and the valve seat 115a. The extension eliminates the state where the jet flow occurs along the abutting surface 54a in the prior art. This is because the step 143 guides the jet to the valve hole 114 and separates it from the valve body 14. By separating the jet flow from the valve body 14, it is possible to suppress the occurrence of vibration of the valve body 14 caused by the jet flow.

Here, as described above, the distance d1 from the center portion (center line CL11) of the valve seat 115a to the outer peripheral surface of the stepped portion 143 is desirably in the range of 0.4 to 0.8 mm, and is from the outer peripheral surface of the stepped portion 143 to the second The distance d2 of the outer circumferential surface of the stepped portion 144 is desirably in the range of 0.4 mm to 0.8 mm. For example, when the distance d1 is enlarged to deviate from the range of 0.4mm to 0.8mm, as shown in Fig. 10, it can be seen that the portion where the flow velocity of the control fluid is high extends along the contact surface 141a of the valve body 14, and the injection The flow does not separate from the valve body 14. In this state, it may not be possible to suppress the occurrence of vibration of the valve body 14 due to the jet flow.

In addition, as a second modification of the present embodiment, as shown in FIGS. 13 and 14, it is possible to abut the valve seat 215a provided at the tip of the annular protrusion 215 of the valve body 21 and to be provided in the valve The contact surface 241 a on the enlarged diameter portion 241 of the body 24 is inclined with respect to the axis of the valve body 24. In addition, the inner surface of the annular recessed portion 217 on the valve hole 214 side, and the end surface (upper end surface) of the valve hole 214 side of the step portion 243 and the second step portion 244 may be inclined.

At this time, in the vicinity of the first annular ridge line 245 (an example of the annular ridgeline) where the outer peripheral surface of the stepped portion 243 and the upper end surface of the stepped portion 243 intersect, the inner peripheral surface of the annular recessed portion 217 and the annular reduced-diameter surface The third ring-shaped ridge line 218 intersecting at 215 b is located here, and the first ring-shaped ridge line 245 and the third ring-shaped ridge line 218 form the flow channel throttle 27. Furthermore, in the vicinity of the second annular ridge line 246 where the outer peripheral surface of the second stepped portion 244 and the upper end surface of the second stepped portion 244 intersect, the inner surface of the annular recessed portion 217 on the valve hole 114 side and the inner periphery of the valve hole 214 The fourth ring-shaped ridge line 219 where the surfaces intersect is located here, and forms the second flow path throttle portion 28.

Furthermore, as a third modification example, as shown in FIGS. 15 and 16, the third flow path throttle 39 may be provided by providing the third stepped portion 345 and the second annular recessed portion 318.

First, the valve body 31 will be described. The valve body 31 has a ring-shaped protrusion 315, a valve seat 315a at the tip, and a ring-shaped reduced diameter surface 315b and a ring-shaped recessed portion 317. This is similar to the above-mentioned first embodiment. same. The valve body 31 has a second ring-shaped recessed portion 318 that is penetrated from the inner surface of the ring-shaped recessed portion 317 on the valve hole 314 side to the valve hole 314 side.

Next, the valve body 34 will be described. The valve body 34 has an enlarged diameter portion 341, the enlarged diameter portion 341 has a contact surface 341a contacting the valve seat 315a, and the step portion 343 extends from the contact surface 341a to the valve hole 314 side. The second step portion 344 protrudes from the end surface (upper end surface) of the step portion 343 on the valve hole 314 side to the valve hole 314 side. This point is the same as the above-mentioned first embodiment. The third step portion 345 protrudes from the end surface (upper end surface) on the valve hole 314 side of the second step portion 344 toward the valve hole 314 side, has a diameter smaller than that of the second step portion 344, and is positioned coaxially with the valve hole 314.

At this time, in the vicinity of the first annular ridgeline 346 (an example of the annular ridgeline) where the outer peripheral surface of the stepped portion 343 and the upper end surface of the stepped portion 343 intersect, the inner peripheral surface of the annular recessed portion 317 and the annular reduced-diameter surface The third ring-shaped ridge line 319 where 315 b intersects is located here, and the first ring-shaped ridge line 346 and the third ring-shaped ridge line 319 form a flow channel throttle 37. In addition, in the vicinity of the second annular ridge line 347 where the outer peripheral surface of the second stepped portion 344 and the upper end surface of the second stepped portion 344 intersect, the inner surface of the annular recessed portion 317 on the valve hole 314 side and the second annular recessed portion The fourth ring-shaped ridge line 320 where the inner peripheral surface of 318 intersects is located here, and the second ring-shaped ridge line 347 and the fourth ring-shaped ridge line 320 form the second flow path throttle portion 38. Furthermore, in the vicinity of the fifth annular ridge line 348 where the outer peripheral surface of the third stepped portion 345 and the end surface of the third stepped portion 345 on the valve hole 314 side intersect, the inner surface of the second annular recessed portion 318 on the valve hole 314 side and The sixth annular ridgeline 322 where the inner peripheral surface of the valve hole 314 intersects is located here, and the fifth annular ridgeline 348 and the sixth annular ridgeline 322 form the third flow path throttle 39.

As described above, according to the regulator valve 1 of the present embodiment, (1) has the valve body 14, the valve chamber 113 on the upstream side that accommodates the valve body 14, the valve hole 114 on the downstream side communicating with the valve chamber 113, and the valve hole The outer circumference of 114 protrudes from the inner surface on the valve hole 114 side of the valve chamber 113 and has an annular protrusion 115 with a valve seat 115a at the tip. It is characterized in that the annular protrusion 115 has an annular reduced diameter surface 115b that reduces the diameter of the inner radial valve hole 114 of the annular protrusion 115 on the entire circumference of the inner diameter side of the annular protrusion 115; The abutting surface 141a to which the seat 115a abuts is protruded from the abutting surface 141a toward the valve hole 114 on the inner peripheral side of the valve seat 115a, has a diameter larger than the inner diameter of the valve hole 114, and is coaxial with the valve hole 114 The first annular ridgeline 145 where the outer peripheral surface of the step 143 intersects the end surface of the step 143 on the valve hole 114 side is located near the annular reduced diameter surface 115b, and forms the flow path throttle portion 17.

According to the regulating valve 1 described in (1), the control fluid flowing from the valve chamber 113 to the valve hole 114 sequentially passes through the following positions: the flow path area is throttled by the valve body 14 and the valve seat 115a, and the flow path area is restricted by the valve body 14 and the valve seat 115a. The position where the space (first space) surrounded by the annular reduced-diameter surface 115 b, the contact surface 141 a, and the outer peripheral surface of the step portion 143 expands, and the position where the flow path area is reduced by the flow path throttle portion 17. The applicant found through experiments that the negative pressure state on the downstream side of the valve seat 115a is thereby alleviated.

Due to the reduced negative pressure, the occurrence of cavitation can be suppressed, and even if cavitation occurs, the time from bubble generation to disappearance can be shortened. As a result, the occurrence of vibration caused by the cavitation phenomenon can be suppressed, and the generation of noise caused by the vibration can be suppressed.

Furthermore, the jet flow is guided to the valve hole 114 side by the step portion 143 protruding from the contact surface 141 a to the valve hole 114 side, and is separated from the valve body 14. By separating the jet flow from the valve body 14, the occurrence of vibration of the valve body 14 caused by the jet flow can be suppressed, and the generation of noise can be suppressed.

(2) The regulating valve 1 according to (1), characterized in that the gap dimension C1 in the radial direction of the first annular ridgeline 145 of the flow path throttle portion 17 is multiplied by the valve seat 115a of the annular protrusion 115 The value of the diameter dimension D1 of the central part (the center line CL11) is between 0.6 and 1.2.

The applicant has found through experiments that according to the regulating valve 1 described in (2), it is possible to obtain a regulating valve 1 that is excellent in suppressing vibration caused by the cavitation phenomenon.

(3) The regulating valve 1 according to (1) or (2) is characterized in that the distance from the center portion (center line CL11) of the valve seat 115a to the outer peripheral surface of the stepped portion 143 is 0.4mm to 0.8mm Within range.

The applicant found through experiments that according to the regulating valve 1 described in (3), it is possible to obtain the regulating valve 1 excellent in suppressing the vibration caused by the jet.

(4) The regulating valve 1 according to any one of (1) to (3), characterized in that the valve body 14 has a valve protruding from the end face of the stepped portion 143 on the valve hole 114 side to the valve hole 114 side. The second stepped portion 144 has a diameter smaller than the outer diameter of the stepped portion 143 and is coaxial with the valve hole 114; The ring-shaped ridge 146 is located near the inner peripheral surface of the valve hole 114 and forms the second flow path throttle portion 18.

According to the regulating valve 1 described in (4), the control fluid flowing from the valve chamber 113 to the valve hole 114 sequentially passes through the following positions: the position where the flow path area is throttled by the valve body 14 and the valve seat 115a, and the flow path area is surrounded by the valve body 14 and the valve seat 115a. The space (first space) surrounded by the narrow-diameter surface 115b, the abutting surface 141a, and the stepped portion 143 widens, and the flow path area is throttled by the flow path throttling portion 17, and then passes in order The following positions: the position where the flow path area is enlarged by the end surface of the stepped portion 143 on the valve hole 114 side and the outer peripheral surface of the second stepped portion 144, and the position where the flow path area is throttled by the second flow path throttling portion 18. The applicant has found through experiments that the negative pressure state on the downstream side of the valve seat 115a is thereby further reduced.

By reducing the negative pressure state, the occurrence of cavitation can be suppressed. If the occurrence of the cavitation phenomenon can be suppressed, the occurrence of vibration caused by the cavitation phenomenon can be suppressed, and the generation of noise caused by the vibration can be suppressed.

(5) The regulating valve 1 according to (4), characterized in that the gap size C2 in the radial direction of the second annular ridgeline 146 of the second flow path throttle portion 18 is multiplied by the valve of the annular protrusion 115 The value of the diameter dimension D1 of the center portion (center line CL11) of the seat 115a is between 0.6 and 1.2.

The applicant found through experiments that according to the regulating valve 1 described in (5), a fluid control valve excellent in suppressing vibration caused by the cavitation phenomenon can be obtained.

(6) The regulating valve 1 according to (4) or (5), characterized in that the annular reduced diameter surface 115b and the inner peripheral surface of the valve hole 114 are formed by moving from the annular reduced diameter surface 115b to the valve hole The 114 side is penetrated and connected with a ring-shaped recess 117 coaxial with the valve hole 114. The third ring-shaped ridge line 118 where the inner peripheral surface of the ring-shaped recess 117 intersects with the ring-shaped reduced diameter surface 115b is located at the first ring-shaped ridge line. In the vicinity of 145, the flow passage throttle 17 is formed together with the first annular ridge 145; the fourth annular ridge 119 where the inner surface of the annular recess 117 on the valve hole 114 side intersects the inner peripheral surface of the valve hole 114 is located at the first In the vicinity of the two ring-shaped ridgeline 146, the second flow path throttle portion 18 is formed together with the second ring-shaped ridgeline 146.

The applicant found through experiments that according to the regulating valve 1 described in (6), the annular recessed portion 117 expands the space (second space) between the flow path throttle portion 17 and the second flow path throttle portion 18, The vibration caused by the cavitation phenomenon is suppressed, whereby an excellent regulating valve 1 can be obtained.

(7) The regulating valve 1 according to (6), characterized in that the distance from the center portion (center line CL11) of the valve seat 115a to the inner surface of the annular recess 117 on the valve hole 114 side is greater than the distance from the abutment The distance from the surface 141a to the end surface on the valve hole 114 side of the second step portion 144 is smaller by 0.03 mm to 0.13 mm.

According to the regulator valve 1 described in (7), on the downstream side of the valve seat 115a, even in the valve opening degree (for example, about 0.035 mm) in the region where negative pressure is likely to occur, the fourth annular ridgeline 119 is reliably positioned in the second annular shape. In the vicinity of the ridge line 146, the second flow path throttle portion 18 can be formed, and the regulating valve 1 excellent in suppressing the vibration caused by the cavitation phenomenon can be obtained.

(8) The regulating valve 1 according to any one of (4) to (7), characterized in that the distance from the outer circumferential surface of the stepped portion 143 to the outer circumferential surface of the second stepped portion 144 is 0.4mm to 0.8mm In the range.

The applicant found through experiments that according to the regulating valve 1 described in (8), the jet flow is reliably guided to the valve hole 114 side, and the occurrence of vibration of the valve body 14 caused by the jet flow is suppressed, thereby enabling the adjustment Valve 1 is excellent.

(9) The regulating valve 1 according to any one of (1) to (8), characterized in that it has: a valve body 11 having a valve chamber 113 and a valve hole 114 inside, and a valve body 11 connected to the valve body 14 The upper cover 12 stacked on the valve body 11 in a direction parallel to the abutment and separation direction has a film portion 152 that is connected to the valve body 14 at the center portion 151 and is elastically deformed when the valve body 14 is contacted and separated from the outer periphery of the center portion 151 The film member 15; the valve body 11 has an opening 116 on the upper cover 12 side to install the film member 15, the film member 15 has a ring-shaped fixing portion 153 along the outer periphery of the film portion 152, by pressing the ring-shaped fixing portion 153 into the opening The thin film member 15 installed in the opening 116 in 116 is fixed by the upper cover 12 and the valve body 11 sandwiching the ring-shaped fixing portion 153 from both sides in the abutting and separating direction; the ring-shaped fixing portion 153 is along the entire outer periphery The circumference has an annular notch 153c that opens from the outer peripheral surface to the end surface on the valve body 11 side, except for the end on the upper cover 12 side.

According to the regulating valve 1 described in (9), the ring-shaped fixing portion 153 sandwiched between the upper cover 12 and the valve body 11 from the two sides in the abutting and separating direction extends along the entire circumference, except for the end on the upper cover 12 side, from the outer peripheral surface to The end surface on the valve main body 11 side has an open ring-shaped notch 153 c. Therefore, the upper end surface 153 b of the ring-shaped fixing portion 153 on the upper cover 12 side can ensure the area covered by the upper cover 12. By ensuring the area covered by the upper cover 12 in the ring-shaped fixing portion 153, the thin film member 15 can be reliably fixed, and vibration of the valve body 14 connected to the thin film member 15 can be suppressed. In addition, the thickness of the valve body 11 can be ensured to the extent that the ring-shaped fixing portion 153 opens in the ring-shaped notch portion 153c, and the strength of the valve body 11 can be improved.

In addition, the above-mentioned embodiments are only examples, and do not limit the present invention in any way. Therefore, as a matter of course, various improvements and modifications can be made to the present invention without departing from its gist.

For example, in this embodiment, the first annular ridgeline 145, the second annular ridgeline 146, the third annular ridgeline 118, and the fourth annular ridgeline 119 are shown in sharp shapes, but they may be rounded or Chamfered.

1: Regulating valve (an example of fluid control valve) 11: Valve body 12: Upper cover 13: Lower cover 14: Valve body 15: Film member 16: Compression coil spring 17: Flow Throttle 18: The second flow path throttling part 19: O-ring 21: Valve body 24: Valve body 27: Throttle 28: The second flow path throttling part 31: Valve body 34: Valve body 37: Throttle 38: The second flow path throttling part 39: The third flow path throttling part 111: Input port 111a: Input stream 112: output port 112a: output flow path 113: Valve Chamber 113a: The inner surface of the valve hole side 114: valve hole 115: Annular protrusion 115a: Valve seat 115b: Annular reduced diameter surface 116: opening 116a: Downstream fluid chamber 116b: Pressure chamber 117: Annular depression 118: Third Ring Edge 119: Fourth Ring Edge 121: import port 131: Spring storage room 141: Enlarging part 141a: abutment surface 142: Film Department 143: Step 144: Second Step 145: The first ring-shaped ridge (an example of a ring-shaped ridge) 146: Second Ring Edge 151: Central 152: Film Department 153: Ring fixed part 153a: Press-in part 153b: Upper end face 153c: Ring notch 214: Valve hole 215: Ring protrusion 215a: Valve seat 215b: Annular reduced diameter surface 217: Annular depression 218: Third Ring Edge 219: Fourth Ring Edge 241: Enlarging part 241a: abutment surface 243: step 244: Second Step 245: The first ring-shaped ridge (an example of a ring-shaped ridge) 246: Second Ring Edge 314: Valve hole 315: Ring protrusion 315a: Valve seat 315b: Annular reduced diameter surface 317: Annular depression 318: second annular depression 319: Third Ring Edge 320: Fourth Ring Edge 322: Sixth Ring Edge 341: Enlarging part 341a: abutment surface 343: step 344: second step 345: Third Step 346: The first ring-shaped ridge (an example of a ring-shaped ridge) 347: Second Ring Edge 348: Fifth Ring Edge d1~d4: distance t11: wall thickness CL11: Centerline C1, C2: gap size D1: Diameter size E11: Partial E12: Partial E21: Partial E31: Partial

Fig. 1 shows a cross-sectional view of the regulating valve of this embodiment. Fig. 2 is a partial enlarged view showing the vicinity of the valve seat of Fig. 1. Fig. 3 is a partial enlarged view showing the vicinity of the valve seat of Fig. 2. Figure 4 is a cross-sectional view showing a conventional regulating valve. Fig. 5 is a diagram showing the pressure distribution of the control fluid in the vicinity of the valve seat of the regulating valve of the present embodiment. Fig. 6 is a diagram showing the pressure distribution of the control fluid in the vicinity of the valve seat when the gap size of the second flow path orifice is enlarged. Fig. 7 is a diagram showing the pressure distribution of the control fluid in the vicinity of the valve seat of the conventional control valve. Fig. 8 is a graph comparing the pressure value of the control fluid in the vicinity of the valve seat. Fig. 9 is a diagram showing the distribution of the flow velocity of the control fluid in the vicinity of the valve seat of the regulating valve of the present embodiment. Figure 10 is a diagram showing the distribution of the flow velocity of the control fluid near the valve seat when the distance between the valve seat and the stepped portion is enlarged. Figure 11 is a diagram showing the distribution of the flow velocity of the control fluid in the vicinity of the valve seat of the conventional control valve. Fig. 12 is a diagram showing the pressure distribution of the control fluid in the vicinity of the valve seat in the first modification example of the regulating valve of the present embodiment. Fig. 13 is a partial enlarged view of the second modification example of the regulating valve of the present embodiment. Fig. 14 is a partial enlarged view showing the vicinity of the valve seat of Fig. 13. Fig. 15 is a partial enlarged view of the third modification example of the regulating valve of the present embodiment. Fig. 16 is a partial enlarged view showing the vicinity of the valve seat of Fig. 15.

11: Valve body

14: Valve body

113a: The inner surface of the valve hole side

113: Valve Chamber

114: valve hole

115: Annular protrusion

115a: Valve seat

115b: Annular reduced diameter surface

117: Annular depression

141: Enlarging part

141a: abutment surface

143: Step

144: Second Step

d1~d4: distance

CL11: Centerline

C1, C2: gap size

E11: Partial

E12: Partial

D1: Diameter size

Claims (10)

A fluid control valve, characterized in that it comprises a valve body (14), an upstream valve chamber (113) accommodating the valve body, a downstream valve hole (114) communicating with the valve chamber, and a valve along the valve hole The outer circumference of the valve chamber protrudes from the inner surface of the valve hole side of the valve chamber, and has an annular protrusion (115) with a valve seat at the tip, and fluid control is performed by contacting and separating the valve body and the valve seat The annular protrusion has an annular reduced diameter surface (115b) that reduces the diameter of the valve hole in the inner radial direction of the annular protrusion on the entire circumference of the inner diameter side of the annular protrusion, so The valve body has an abutting surface (141a) that abuts against the valve seat, and on the inner peripheral side of the valve seat, there is provided on the inner peripheral side of the valve seat protruding from the abutting surface on the valve hole side and having a larger diameter than the valve hole. A cylindrical step (143) with a large inner diameter and coaxial with the valve hole, an annular ring in which the outer peripheral surface of the step intersects the end surface of the step on the valve hole side The ridgeline (145) is located in the vicinity of the annular reduced diameter surface, and forms a flow path throttle (17). The fluid control valve according to claim 1, wherein the gap size in the radial direction of the annular ridgeline (145) of the flow path throttle portion (17) is multiplied by the The value of the diameter dimension of the center part of the valve seat (115a) is between 0.6 and 1.2. The fluid control valve according to claim 1, wherein the distance from the center portion of the valve seat (115a) to the outer peripheral surface of the step portion (143) is in a range of 0.4 mm to 0.8 mm. The fluid control valve according to claim 2, wherein the distance from the center portion of the valve seat (115a) to the outer peripheral surface of the step portion (143) is in a range of 0.4 mm to 0.8 mm. The fluid control valve according to claim 1, wherein the valve body (14) has an end surface protruding from the valve hole (114) side of the step portion (143). A cylindrical second step portion (144) having a diameter smaller than the outer diameter of the step portion (143) and coaxial with the valve hole, the outer peripheral surface of the second step portion and the first step A second annular ridge line (146) where the end surfaces on the valve hole side of the two stepped portions intersect is located near the inner peripheral surface of the valve hole, and forms a second narrowed portion (18) of the constricted flow path. The fluid control valve according to claim 5, wherein a gap size in the radial direction of the second annular ridgeline (146) of the second flow path throttle portion (18) is multiplied by the annular protrusion The value of the diameter dimension of the central part of the valve seat (115a) of the part is between 0.6 and 1.2. The fluid control valve according to claim 5, wherein the ring-shaped reduced diameter surface (115b) and the inner peripheral surface of the valve hole (114) pass from the ring-shaped reduced diameter surface to the valve hole A third ring-shaped ridge line (118) where the inner peripheral surface of the ring-shaped recessed part intersects with the ring-shaped reduced diameter surface is connected by a ring-shaped recess (117) provided on the side and coaxial with the valve hole. Located near the ring-shaped ridgeline, and together with the ring-shaped ridgeline (145), a flow path throttling portion (17) is formed. The inner surface of the ring-shaped recessed portion on the side of the valve hole is A fourth ring-shaped ridgeline (119) intersecting the inner peripheral surface is located near the second ring-shaped ridgeline, and forms the second flow path throttle (18) together with the second ring-shaped ridgeline. The fluid control valve according to claim 7, wherein the distance (d3) from the valve seat (115a) to the inner surface of the annular recessed portion (117) on the side of the valve hole (114) is greater than The distance (d4) from the contact surface (141a) to the end surface on the valve hole side of the second step portion (144) is smaller by 0.03mm to 0.13mm. The fluid control valve according to claim 5, wherein the distance (d2) from the outer circumferential surface of the stepped portion (143) to the outer circumferential surface of the second stepped portion (144) is in the range of 0.4mm to 0.8mm Inside. The fluid control valve according to claim 1, further comprising: a valve body (11) having the valve chamber (113) and the valve hole (114) inside, and a valve body (11) relative to the valve body (14) The cover member (12) and the thin film member (15) stacked on the valve body in a direction parallel to the direction of the abutment and separation A thin film portion (152) that is elastically deformed when the valve body is contacted and separated. The valve body has an opening (116) on the side of the cover member for installing the thin film member, and the thin film member runs along the The outer periphery of the film portion has a ring-shaped fixing portion (153), and the film member installed in the opening portion by pressing the ring-shaped fixing portion into the opening is formed by the cover member and the The valve body clamps the ring-shaped fixing portion from both sides in the abutting and separating direction to be fixed. An annular notch (153c) that opens to the end surface on the side of the valve body.

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