TWI792095B - Fluid control valve - Google Patents

Abstract

A regulator performing fluid control includes an annular protruding portion having a valve seat on its leading end and an annular diameter-decreasing surface formed by decreasing an inner diameter of the annular protruding portion toward a valve hole. The regulator includes a valve element provided with a contact surface to be in contact with the valve seat and a columnar step portion provided on an inner peripheral side of the valve seat protruding from the contact surface toward the valve hole, the step portion having a diameter larger than an inner diameter of the valve hole and being coaxially formed with the valve hole. An annular ridge is formed by an outer peripheral surface of the step portion intersecting an end face of the step portion on the valve-hole side with the annular diameter-decreasing surface to constitute a passage narrowing portion.

Description

fluid control valve

The invention relates to a fluid control valve, which has a valve body, a valve chamber on the upstream side accommodating the valve body, a valve hole on the downstream side communicating with the valve chamber, and protruding from the inner surface of the valve hole side of the valve chamber along the outer periphery of the valve hole. And there is an annular protruding part of the valve seat at the top, and fluid control is performed by the valve body abutting and separating from the valve seat.

As a fluid control device that performs fluid control by abutting and separating the valve body and the valve seat, for example, the flow control valve disclosed in Japanese Patent Laid-Open No. 2009-230259 and the regulating valve 50 shown in FIG. such a device. The regulator valve 50 is a device that controls the pressure of a control fluid such as pure water or chemical liquid used in semiconductor manufacturing processes. The regulator valve 50 has a flow path connecting the input port 511, the valve chamber 513, the downstream side fluid chamber 516a, and the output port 512. Inside the valve main body 51, the operating air introduced into the pressure action chamber 516b and the diaphragm member The abutting surface 54a of the valve body 54 connected to the valve body 55 abuts and separates from the valve seat 515, thereby controlling the pressure of the control fluid input from the input port 511 and output from the output port 512.

However, the above conventional technology has the following problems. Due to pressure control, the control fluid pressure difference between the input side and the output side is as large as about 200kPa, in this case, the distance between the abutment surface 54a and the valve seat 515 (that is, the valve opening) is as small as 0.035mm Right or left, the flow rate of the control fluid through such a small gap becomes fast. Due to the increase in flow velocity, on the downstream side of the valve seat 515, the pressure of the control fluid decreases (Bernoulli's theorem), creating a negative pressure region. Then, in the control fluid, a bubbling phenomenon (cavitation phenomenon) caused by boiling occurs. Then, the bubbles caused by the cavitation phenomenon collapse, and shock waves caused by the bubble collapse induce vibration at the regulating valve 50 . Also, the volume of the vaporized control fluid increases due to the cavitation phenomenon, but the increased volume returns to the original volume due to the collapse of the bubbles. This increase and decrease in the volume of the control fluid generates pressure oscillations in the downstream side fluid chamber 516a. The vibration or pressure vibration caused by these shock waves is also transmitted to the pipeline connected to the regulator valve 50, which may cause noise.

In addition, when the control fluid passes through the gap between the contact surface 54 a and the valve seat 515 with a valve opening of about 0.035 mm, the flow velocity of the control fluid increases, so that jet flow is generated on the downstream side of the valve seat 515 . This jet flows along the abutment surface 54a, so there is a risk of vibrating the valve body 54, and this vibration is also transmitted to the pipeline connected to the regulating valve 50, which may cause noise.

In recent years, in order to reduce the size and increase the density of semiconductor manufacturing equipment, the size reduction of fluid control valves is required. In the conventional control valve 50, it is considered that even if vibration caused by cavitation or jet flow occurs, the film member 55 connected to the valve body 54 can absorb it. Smaller, the volumes of the downstream side fluid chamber 516a and the pressure application chamber 516b become smaller, so it is considered that the vibration caused by the cavitation phenomenon can no longer be absorbed, and it is considered that the vibration is likely to occur.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a fluid control valve capable of preventing or suppressing vibration caused by controlling the flow of fluid.

In order to solve the above-mentioned problems, the fluid control valve of the present invention has the following structure.

The fluid control valve has a valve body, a valve chamber on the upstream side accommodating the valve body, a valve hole on the downstream side communicating with the valve chamber, and a The annular protruding part of the valve seat is used for fluid control by the abutment and separation of the valve body and the valve seat. The annular diameter reducing surface of the radial valve hole is reduced; the valve body has an abutting surface that abuts against the valve seat, and on the inner peripheral side of the valve seat, there is a protruding setting from the abutting surface to the valve hole side, and has an inner surface that is larger than the valve hole. The cylindrical stepped part with a large diameter and coaxial with the valve hole; the annular ridge line where the outer peripheral surface of the stepped part intersects with the end surface on the side of the valve hole of the stepped part is located near the annular shrinking surface, forming a flow path throttling department.

According to the fluid control valve described above, the fluid flowing from the valve chamber to the valve hole passes through the following positions sequentially: the position where the flow path area is throttled by the valve body and the valve seat; The position where the space surrounded by the surface and the outer peripheral surface of the stepped portion expands; and the position where the flow path area is reduced by the flow path narrowing portion. The applicant found through experiments that the negative pressure state on the downstream side of the valve seat 115a is thus relieved.

Since the negative pressure state is reduced, the occurrence of cavitation phenomenon can be suppressed, and even if cavitation phenomenon occurs, the time from bubble generation to disappearance can be shortened. This can suppress the occurrence of vibration due to the cavitation phenomenon, and suppress the generation of noise due to the vibration.

Furthermore, the jet flow is guided to the valve hole side by the stepped portion protruding from the abutting surface toward the valve hole side, and is separated from the valve body. By stripping the jet flow from the valve body, it is possible to suppress the generation of vibration of the valve body caused by the jet flow, and it becomes possible to suppress the generation of noise.

According to the fluid control valve of the present invention, it is possible to prevent or suppress vibration generated by controlling the flow of fluid.

Embodiments of the fluid control valve of the present invention will be described in detail with reference to the drawings.

The fluid control device of this embodiment is a regulating valve 1, which controls the pressure of a control fluid such as a chemical solution or pure water used in a semiconductor manufacturing process. As shown in FIG. An example of the member) 12 and the lower cover 13, and with respect to the valve main body 11, the upper cover 12 and the lower cover 13 are assembled from a direction parallel to the direction in which the valve body 14 abuts and separates from the valve seat 115a (see FIG. 2 ). An input port 111 through which control fluid is input and an output port 112 through which control fluid is output are formed at the valve main body 11 . The valve main body 11 as a member in contact with liquid is formed of, for example, a highly corrosion-resistant fluorine-based synthetic resin, and the upper cover 12 and lower cover 13 as members not in contact with liquid are formed of, for example, polypropylene resin.

In the central portion of the valve body 11 , a valve chamber 113 communicating with the input port 111 through the input channel 111 a is drilled from the end surface of the valve body 11 on the lower cover 13 side to the upper cover 12 side. Also, the valve hole 114 communicates with the valve chamber 113 , and an annular protrusion 115 along the outer periphery of the valve hole 114 is protrudingly provided on the valve hole-side inner surface 113 a of the valve chamber 113 .

As shown in FIG. 2, a valve seat 115a that abuts and separates from the valve body 14 described later is formed at the tip of the annular protruding portion 115, and an annular protruding portion 115 is formed with an annular The reduced-diameter surface 115 b reduces the diameter of the inner diameter of the annular protrusion 115 toward the direction of the valve hole 114 . Moreover, the ring-shaped reduced-diameter surface 115b is connected to the inner peripheral surface of the valve hole 114 by an annular concave portion 117, and the annular concave portion 117 is drilled from the annular-shaped reduced-diameter surface 115b to the side of the valve hole 114, and is connected with the valve hole. Holes 114 are coaxial.

Furthermore, as shown in FIG. 1 , in the valve body 11 , an opening 116 communicating with the valve hole 114 is drilled on the end surface on the side of the upper cover 12 . The opening 116 is divided into a downstream side fluid chamber 116a communicating with the output port 112 via an output flow path 112a and a pressure acting chamber 116b by a thin film member 15 described later. In addition, the input flow path 111 a , the valve chamber 113 , the valve hole 114 , the downstream side fluid chamber 116 a , and the output flow path 112 a constitute a flow path from the input port 111 to the output port 112 .

A cylindrical valve body 14 is accommodated at the valve chamber 113 , which can reciprocate in a direction parallel to the assembly direction of the upper cover 12 and the lower cover 13 . In the valve body 14 , an enlarged diameter portion 141 having a larger diameter than other portions is formed at the central portion in the axial direction. As shown in FIG. 2 , the end surface of the enlarged diameter portion 141 that faces the valve seat 115 a serves as a contact surface 141 a that contacts the valve seat 115 a. When the valve body 14 moves to the side of the annular protrusion 115 , the contact surface 141 a contacts the valve seat 115 a and blocks the flow path from the input port 111 to the output port 112 . On the other hand, when the valve body 14 moves to the side opposite to the annular protrusion 115 side, the contact surface 141a is separated from the valve seat 115a, and the flow path from the input port 111 to the output port 112 is communicated.

In addition, on the contact surface 141a, a columnar stepped portion 143 is protrudingly provided on the inner peripheral side of the valve seat 115a toward the valve hole 114 side. The stepped portion 143 has a diameter larger than the inner diameter of the valve hole 114 and is located coaxially with the valve hole 114 .

As shown in FIG. 3, the third annular ridgeline 118 where the inner peripheral surface of the annular recessed portion 117 intersects with the annular reduced-diameter surface 115b is located between the outer peripheral surface of the stepped portion 143 and the end surface of the stepped portion 143 on the valve hole 114 side ( upper end surface) near the first annular ridgeline 145 (an example of an annular ridgeline), and the first annular ridgeline 145 and the third annular ridgeline 118 form the flow path restriction 17 . The cross-sectional area of the flow path narrowed by the abutment surface 141a and the valve seat 115a is in the space (the first space) surrounded by the abutment surface 141a, the outer peripheral surface of the stepped portion 143, and the annular reduced diameter surface 115b. ) and expanded once, narrowed again by the flow path restriction part 17.

Furthermore, as shown in FIG. 2 , on the upper end surface of the stepped portion 143 , a cylindrical second stepped portion 144 having a diameter smaller than the outer diameter of the stepped portion 143 protrudes toward the valve hole 114 side. The position of the second stepped portion 144 is coaxial with the valve hole 114 .

As shown in FIG. 3, the fourth annular ridgeline 119 where the inner surface of the valve hole 114 side of the annular recess 117 intersects with the inner peripheral surface of the valve hole 114 is located between the outer peripheral surface of the second stepped portion 144 and the second stepped portion. 144 near the second annular ridgeline 146 where the end surface (upper end surface) on the valve hole 114 side intersects, and the second annular ridgeline 146 and the fourth annular ridgeline 119 form the second flow path narrowing portion 18 . The cross-sectional area of the flow path narrowed by the flow path throttling portion 17 is within the space surrounded by the upper end surface of the stepped portion 143, the outer peripheral surface of the second stepped portion 144, and the annular recessed portion 117 ( After the second space) is enlarged, it is narrowed again by the second flow path restriction 18 .

The gap dimension C1 in the diameter direction of the first annular ridgeline 145 of the flow path restriction portion 17 is desirably set such that the gap dimension C1 is multiplied by the diameter of the annular protrusion 115 at the center portion (centerline CL11 ) of the valve seat 115 a The value of the dimension D1 (see FIG. 2 ) is between 0.6 and 1.2. For example, in this embodiment, the value of the product is 0.83.

In addition, the gap dimension C2 in the diameter direction of the second annular ridgeline 146 of the second flow path restricting portion 18 is desirably set such that the gap dimension C2 is multiplied by the annular protrusion at the center portion (center portion CL11 ) of the valve seat 115 a The value of the diameter dimension D1 of the portion 115 is between 0.6 and 1.2. For example, in this embodiment, the product value is 0.83.

The distance d1 from the center portion (center line CL11 ) of the valve seat 115 a to the outer peripheral surface of the stepped portion 143 is desirably in the range of 0.4 mm to 0.8 mm, for example, 0.5 mm in the present embodiment. In addition, the distance d2 from the outer peripheral surface of the stepped portion 143 to the outer peripheral surface of the second stepped portion 144 is desirably in the range of 0.4 mm to 0.8 mm, for example, 0.4 mm in this embodiment.

The distance d3 from the valve seat 115a to the inner surface of the valve hole 114 side of the annular recess 117 is expected to be 0.03mm to 0.13mm smaller than the distance d4 from the contact surface 141a to the upper end surface of the second stepped portion 144. In the embodiment, it is set to be smaller than 0.1 mm.

Furthermore, as shown in FIG. 1 , the valve body 14 has a film portion 142 integrally formed with the valve body 14 at the end portion on the lower cover 13 side, and a film member 15 having a film portion 152 is combined at the end portion on the upper cover 12 side. . The thin film portion 142 of the valve body 14 and the thin film portion 152 of the thin film member 15 are elastically deformed as the valve body 14 abuts and separates from the valve seat 115 a. In addition, the valve body 14 and the film member 15, which are members in contact with liquid, have high corrosion resistance and are molded of, for example, a fluorine-based synthetic resin.

The thin film member 15 has a thin film portion 152 on the outer periphery of a central portion 151 coupled to the valve body 14 , and further has an annular fixing portion 153 along the outer periphery of the thin film portion 152 . The annular fixing portion 153 has an annular notch portion 153c, which extends from the outer peripheral surface to the end surface (lower end surface 153b) on the side of the valve main body 11 along the entire circumference of the outer periphery except for the end portion (upper end surface 153b) on the side of the upper cover 12. ) to open. A press-fit portion 153 a is provided on a lower end surface of the annular fixing portion 153 , and can be press-fit into the opening 116 of the valve main body 11 . The upper cover 12 and the valve body 11 sandwich the ring-shaped fixing portion 153 from both sides in the direction in which the valve body 14 abuts and separates from the valve seat 115 a , thereby fixing the film member 15 pressed into the opening 116 . An O-ring 19 is arranged between the upper end surface 153b of the annular fixing portion 153 and the upper cover 12 to keep the pressure application chamber 116b airtight.

By providing the annular notch portion 153c, the thickness t11 of the valve body 11 can be increased in proportion to the extent to which the annular notch portion 153c opens the annular fixing portion 153, and the strength of the valve body 11 can be maintained. In addition, since the annular notch portion 153c is notched from the outer peripheral surface to the lower end surface to leave the upper end surface 153b of the annular fixing portion 153, an area pressed by the upper cover 12 can be ensured at the upper end surface 153b.

At the lower cover 13 , a spring housing chamber 131 is formed on the opposite side of the valve chamber 113 with the thin film portion 142 sandwiched therebetween. The compression coil spring 16 is housed in the spring housing chamber 131 . By the pushing force of the compressed coil spring 16 , the valve body 14 is usually pushed in a direction to abut against the valve seat 115 a. This maintains the state where the contact surface 141a of the valve body 14 is in contact with the valve seat 115a.

An introduction port 121 communicating with the pressure action chamber 116 b is formed at the upper cover 12 , and operating air is introduced into the pressure action chamber 116 b through the introduction port 121 . The position of the valve body 14 is adjusted by controlling the pressure of the operating air in the pressure acting chamber 116b.

The flow of the control fluid in the vicinity of the contact surface 141a of the valve body 14 and the valve seat 115a of the regulating valve 1 having the above structure will be described below.

First, the generation of cavitation phenomenon which causes problems in the conventional technique will be described using FIGS. 5 to 8 .

Figures 5 and 6 show the pressure difference between the control fluid pressure on the input side and the output side of the regulating valve 1 being controlled to be, for example, about 200 kPa, and the valve opening is about 0.035 mm when the abutment surface 141a and The pressure distribution diagram near the valve seat 115a shows the result of analysis using the finite element method of a computer. In addition, FIG. 7 is a pressure distribution diagram near the contact surface 54a and the valve seat 515 when the valve opening is about 0.035mm in the regulating valve 50 of the conventional technology, which shows the analysis using the finite element method of the computer. result. In FIGS. 5 to 7 , a portion with a high dot density indicates a portion where the pressure of the control fluid is low, and a portion with a low dot density indicates a portion where the pressure of the control fluid is high.

In addition, the lower the pressure on the downstream side of the valve seat 115a, the more likely the cavitation phenomenon will occur. For example, the state below the pressure value P11 (see FIG. 8 ) is a state where the cavitation phenomenon is likely to occur.

When the valve opening is about 0.035 mm, the flow velocity of the control fluid passing through such a small gap increases. It can be seen that when the flow velocity of the control fluid becomes faster, for example, as shown in FIG. When the pressure of the control fluid at the downstream side of 515, it can be seen that they are all under negative pressure. This is because as the flow rate increases, the pressure decreases (Bernoulli's theorem). Furthermore, as shown in the graph of FIG. 8, it can be seen that the pressure values at the measurement points A21, A22, and A23 are all below the pressure value P11, and the cavitation phenomenon is likely to occur.

On the other hand, in the regulating valve 1 of the present embodiment, as shown in FIG. 5 , although the vicinity of the gap between the valve body 14 and the valve seat 115a is in a negative pressure state, at the position corresponding to the measurement point A21 Observing the pressure distribution diagram at the measurement point A11 in the first space, the negative pressure state is eliminated, and the pressure value is positive. This is also clear in the graph shown in Figure 8.

Further, observing the pressure distribution diagram at the measurement point A12 in the second space corresponding to the position of the measurement point A22, the negative pressure state is eliminated, and the pressure value becomes a positive value. This is also clear in the graph shown in Figure 8.

At the measurement point A13 corresponding to the position of the measurement point A23, when looking at the pressure distribution diagram, it can be seen that it is a negative pressure state, but as shown in the graph of Fig. 8, the value exceeds the pressure value P11, and it can be said that it is easy to occur The state of cavitation phenomenon has been eliminated.

That is, in the regulator valve 1 of the present embodiment, all of the measurement points A11, A12, and A13 show pressures equal to or greater than the pressure value P11, and are in a state where cavitation is unlikely to occur.

Here, as described above, for the gap dimension C1 in the radial direction of the first annular ridgeline 145 of the flow path narrowing portion 17, it is desirable to multiply the gap dimension C1 by the center portion (centerline CL11) has a diameter dimension D1 value between 0.6 and 1.2, for the gap dimension C2 in the radial direction of the second annular ridgeline 146 of the second flow path restriction 18, the expected gap dimension C2 is multiplied by the annular protrusion The value of the diameter dimension D1 in the central portion (central line CL11 ) of the valve seat 115a of the valve seat 115 is between 0.6 and 1.2. For example, when the clearance dimension C2 is increased so that the value of the clearance dimension C2 multiplied by the diameter dimension D1 at the center portion (centerline CL11) of the valve seat 115a of the annular protrusion 115 is out of the range of 0.6 to 1.2, as As shown in FIG. 6, the measurement point A11 in the first space and the measurement point A12 in the second space are respectively in a negative pressure state. Furthermore, as shown in Fig. 8 (enlarged C2), the pressure values at measurement points A11 and A12 are lower than P11, indicating that there is a risk of cavitation.

In addition, like the regulator valve of the first modified example shown in FIG. 12 , the annular concave portion 117 may not be provided on the annular diameter-reducing surface 115b. In this case, although the second space is in a negative pressure state, the pressure value in the vicinity of the first space and the valve hole 114 is maintained at a level at which cavitation does not occur, which is effective for suppressing the occurrence of cavitation.

Next, the generation of the jet stream, which is a problem caused in the conventional art, will be described with reference to FIGS. 9 to 11 . Figures 9 and 10 show the abutment surface 141a and the valve opening of about 0.035mm for the differential pressure of the control fluid pressure on the input side and the output side of the regulator valve 1, which is controlled to be, for example, about 200kPa larger. The distribution diagram of the flow velocity of the control fluid in the vicinity of the seat 115a shows the results of analysis using the finite element method using a computer. In addition, FIG. 11 is a distribution diagram of the flow velocity of the control fluid in the vicinity of the abutment surface 54a and the valve seat 515 with a valve opening of about 0.35 mm in the conventional control valve 50, showing the results of analysis using the finite element method of a computer. . In FIGS. 9 to 11 , a portion with a high dot density indicates a portion with a high flow velocity of the control fluid, and a portion with a low dot density indicates a portion with a slow flow velocity of the control fluid.

When looking at the analysis results of the conventional control valve 50 shown in FIG. 11 , it can be seen that the portion of the control fluid with a high flow velocity extends along the contact surface 54 a of the valve body 54 . This indicates that a jet flow has occurred along the abutment surface 54a. The jet flow generated along the contact surface 54 a causes the valve body 54 to vibrate.

On the other hand, in the control valve 1 of the present embodiment, as shown in FIG. 9 , the portion where the flow velocity of the control fluid is high extends from the gap between the contact surface 141a and the valve seat 115a along the annular diameter-reduced surface 115b. The extension eliminates the state of jet flow occurring along the abutment surface 54a in the prior art. This is because the stepped portion 143 guides the jet flow toward the valve hole 114 and separates it from the valve body 14 . By separating the jet flow from the valve body 14 , it is possible to suppress the vibration of the valve body 14 caused by the jet flow.

Here, as described above, the distance d1 from the center portion (center line CL11) of the valve seat 115a to the outer peripheral surface of the stepped portion 143 is desirably in the range of 0.4 to 0.8mm, and from the outer peripheral surface of the stepped portion 143 to the second The distance d2 of the outer peripheral surface of the stepped portion 144 is desirably in the range of 0.4 mm to 0.8 mm. For example, when the distance d1 is enlarged to deviate from the range of 0.4mm to 0.8mm, as shown in FIG. The flow is not separated from the valve body 14 . In this state, it may not be possible to suppress the occurrence of vibration of the valve body 14 due to the jet flow.

In addition, as a second modified example of this embodiment, as shown in FIGS. 13 and 14, the valve seat 215a provided at the tip of the annular protrusion 215 of the valve main body 21 may abut against and be provided on the valve body. The contact surface 241 a on the enlarged diameter portion 241 of the body 24 is inclined relative to the axis of the valve body 24 . In addition, the inner surface of the annular recessed portion 217 on the valve hole 214 side and the end surfaces (upper end surfaces) of the stepped portion 243 and the second stepped portion 244 on the valve hole 214 side may be inclined.

At this time, in the vicinity of the first annular ridgeline 245 (an example of an annular ridgeline) where the outer peripheral surface of the stepped portion 243 intersects with the upper end surface of the stepped portion 243, the inner peripheral surface of the annular concave portion 217 and the annular reduced diameter surface The third annular ridgeline 218 where 215 b intersects is located here, and the first annular ridgeline 245 and the third annular ridgeline 218 form the flow path restriction 27 . Furthermore, in the vicinity of the second annular ridgeline 246 where the outer peripheral surface of the second stepped portion 244 intersects with the upper end surface of the second stepped portion 244 , the inner surface of the annular recess 217 on the side of the valve hole 214 and the inner periphery of the valve hole 214 The intersecting fourth annular ridgeline 219 is located here to form the second flow path restriction 28 .

Furthermore, as a third modified example, as shown in FIGS. 15 and 16 , the third flow path restriction 39 can be provided by providing the third stepped portion 345 and the second annular recessed portion 318 .

First, the valve main body 31 will be described. The valve main body 31 has an annular protruding portion 315, a valve seat 315a at the tip, and an annular reduced-diameter surface 315b and an annular concave portion 317. same. The valve main body 31 has a second annular recessed portion 318 that is drilled from the inner surface of the annular recessed portion 317 on the valve hole 314 side to the valve hole 314 side.

Next, the valve body 34 will be described. The valve body 34 has an enlarged diameter portion 341, the enlarged diameter portion 341 has an abutment surface 341a abutting against the valve seat 315a, and the stepped portion 343 extends from the abutment surface 341a to the valve hole 314 side. The second stepped portion 344 protrudes from the valve hole 314 side end surface (upper end surface) of the stepped portion 343 toward the valve hole 314 side, which is the same as the first embodiment described above. The third stepped portion 345 protrudes from the valve hole 314 side end surface (upper end surface) of the second stepped portion 344 toward the valve hole 314 side, has a smaller diameter than the second stepped portion 344 , and is positioned coaxially with the valve hole 314 .

At this time, in the vicinity of the first annular ridgeline 346 (an example of an annular ridgeline) where the outer peripheral surface of the stepped portion 343 intersects with the upper end surface of the stepped portion 343, the inner peripheral surface of the annular concave portion 317 and the annular reduced diameter surface The third annular ridgeline 319 where 315b intersects is located here, and the first annular ridgeline 346 and the third annular ridgeline 319 form the flow path restriction 37 . In addition, in the vicinity of the second annular ridgeline 347 where the outer peripheral surface of the second stepped portion 344 intersects the upper end surface of the second stepped portion 344, the inner surface of the annular recessed portion 317 on the side of the valve hole 314 and the second annular recessed portion The fourth annular ridgeline 320 where the inner peripheral surfaces of 318 intersect is located there, and the second annular ridgeline 347 and the fourth annular ridgeline 320 form the second flow path restriction 38 . Furthermore, in the vicinity of the fifth annular ridgeline 348 where the outer peripheral surface of the third stepped portion 345 intersects with the end surface of the third stepped portion 345 on the valve hole 314 side, the inner surface of the second annular recessed portion 318 on the valve hole 314 side is in contact with the third stepped portion 345 . The sixth annular ridgeline 322 where the inner peripheral surfaces of the valve hole 314 intersect is located there, and the fifth annular ridgeline 348 and the sixth annular ridgeline 322 form the third flow path restriction 39 .

As described above, the regulating valve 1 according to the present embodiment (1) has the valve body 14, the valve chamber 113 on the upstream side accommodating the valve body 14, the valve hole 114 on the downstream side communicating with the valve chamber 113, and the valve hole 114 along the valve hole. The outer periphery of 114 protrudes from the inner surface of the valve hole 114 side of the valve chamber 113 and has an annular protrusion 115 with a valve seat 115a at the top end. The valve body 14 abuts and separates from the valve seat 115a to perform fluid control. It is characterized in that: the annular protruding portion 115 has an annular diameter-reducing surface 115b that reduces the diameter of the inner diameter of the annular protruding portion 115 to the valve hole 114 on the entire circumference of the inner diameter side of the annular protruding portion 115; The abutment surface 141a that the seat 115a abuts on has a diameter larger than the inner diameter of the valve hole 114 and is coaxial with the valve hole 114, protruding from the abutment surface 141a toward the valve hole 114 side on the inner peripheral side of the valve seat 115a. The cylindrical stepped portion 143; the first annular ridgeline 145 where the outer peripheral surface of the stepped portion 143 intersects with the end surface on the valve hole 114 side of the stepped portion 143 is located near the annular reduced diameter surface 115b, forming a flow path restriction 17.

According to the regulating valve 1 described in (1), the control fluid flowing from the valve chamber 113 to the valve hole 114 passes through the following positions sequentially: the position where the flow path area is throttled by the valve body 14 and the valve seat 115a, the position where the flow path area is restricted by the The position where the space (first space) surrounded by the annular reduced-diameter surface 115 b , the contact surface 141 a , and the outer peripheral surface of the stepped portion 143 is enlarged, and the position where the flow path area is reduced by the flow path narrowing portion 17 . The applicant found through experiments that the negative pressure state on the downstream side of the valve seat 115a is thus relieved.

Since the negative pressure state is reduced, the occurrence of cavitation phenomenon can be suppressed, and even if cavitation phenomenon occurs, the time from bubble generation to disappearance can be shortened. This can suppress the occurrence of vibration due to the cavitation phenomenon, and suppress the generation of noise due to the vibration.

Furthermore, the jet flow is guided to the valve hole 114 side by the step portion 143 protruding from the contact surface 141 a toward the valve hole 114 side, and separated from the valve body 14 . By separating the jet flow from the valve body 14, the occurrence of vibration of the valve body 14 caused by the jet flow can be suppressed, and the generation of noise can be suppressed.

(2) The regulating valve 1 according to (1), wherein the clearance dimension C1 in the radial direction of the first annular ridgeline 145 of the flow-path restricting portion 17 is multiplied by the valve seat 115a of the annular protrusion 115 The value of the diameter dimension D1 of the central portion (centerline CL11) is between 0.6 and 1.2.

The applicant found out through experiments that according to the regulating valve 1 described in (2), the regulating valve 1 excellent in suppressing the vibration caused by the cavitation phenomenon can be obtained.

(3) The regulating valve 1 according to (1) or (2), characterized in that the distance from the center portion (center line CL11 ) of the valve seat 115 a to the outer peripheral surface of the stepped portion 143 is between 0.4 mm and 0.8 mm. within range.

The applicant found out through experiments that according to the regulating valve 1 described in (3), the regulating valve 1 excellent in suppressing the vibration caused by the jet flow can be obtained.

(4) The regulator valve 1 according to any one of (1) to (3), wherein the valve body 14 has a protruding portion protruding from the end face of the stepped portion 143 on the valve hole 114 side, The second stepped portion 144 having a diameter smaller than the outer diameter of the stepped portion 143 and coaxial with the valve hole 114; The annular ridgeline 146 is located near the inner peripheral surface of the valve hole 114 and forms the second flow path narrowing portion 18 .

According to the regulating valve 1 described in (4), the control fluid flowing from the valve chamber 113 to the valve hole 114 passes through the following positions sequentially: the position where the flow path area is throttled by the valve body 14 and the valve seat 115 a After the position where the space (first space) surrounded by the reduced-diameter surface 115b, the contact surface 141a, and the outer peripheral surface of the stepped portion 143 widens, and the position where the flow path area is throttled by the flow path throttling portion 17, then pass through the Positions where the flow path area is enlarged by the end surface of the stepped portion 143 on the valve hole 114 side and the outer peripheral surface of the second stepped portion 144 , and where the flow path area is narrowed by the second flow path narrowing portion 18 . The applicant found through experiments that the negative pressure state on the downstream side of the valve seat 115a is further reduced.

By reducing the negative pressure state, the occurrence of cavitation can be suppressed. If the occurrence of the cavitation phenomenon can be suppressed, the occurrence of vibration due to the cavitation phenomenon can be suppressed, and the generation of noise due to the vibration can be suppressed.

(5) The regulating valve 1 according to (4), characterized in that the gap dimension C2 in the radial direction of the second annular ridgeline 146 of the second flow-path restricting portion 18 is multiplied by the valve diameter of the annular protrusion 115 The value of the diameter dimension D1 of the center portion (center line CL11 ) of the seat 115 a is between 0.6 and 1.2.

The applicant found through experiments that according to the regulating valve 1 described in (5), a fluid control valve excellent in suppressing vibration caused by cavitation can be obtained.

(6) The regulating valve 1 described in (4) or (5), is characterized in that the ring-shaped diameter-reducing surface 115b and the inner peripheral surface of the valve hole 114 are formed by connecting the ring-shaped diameter-reducing surface 115b to the valve hole. 114 is pierced and connected to the annular recessed part 117 coaxial with the valve hole 114, and the third annular ridgeline 118 where the inner peripheral surface of the annular recessed part 117 intersects with the annular reducing surface 115b is located on the first annular ridgeline Near 145, together with the first annular ridgeline 145, the flow path restriction 17 is formed; the fourth annular ridgeline 119 where the inner surface of the annular recess 117 on the side of the valve hole 114 intersects with the inner peripheral surface of the valve hole 114 is located at the second In the vicinity of the second annular ridgeline 146 , together with the second annular ridgeline 146 , the second flow path restriction portion 18 is formed.

The applicant found through experiments that, according to the regulating valve 1 described in (6), the annular recess 117 expands the space (second space) between the flow path restriction 17 and the second flow path restriction 18 , Vibration caused by the cavitation phenomenon can be suppressed to obtain an excellent regulator valve 1 .

(7) The regulator valve 1 according to (6), wherein the distance from the center portion (center line CL11 ) of the valve seat 115 a to the inner surface of the annular recess 117 on the side of the valve hole 114 is greater than the distance from the abutment The distance from the surface 141 a to the end surface of the second stepped portion 144 on the valve hole 114 side is smaller by 0.03 mm to 0.13 mm.

According to the regulating valve 1 described in (7), on the downstream side of the valve seat 115a, even at the valve opening degree (for example, about 0.035 mm) in the region where negative pressure is likely to be generated, the fourth annular ridgeline 119 is reliably located in the second annular shape. Near the ridge line 146, and the second flow path narrowing portion 18 can be formed, and the control valve 1 excellent in suppressing vibration caused by the cavitation phenomenon can be obtained.

(8) The regulating valve 1 according to any one of (4) to (7), wherein the distance from the outer peripheral surface of the stepped portion 143 to the outer peripheral surface of the second stepped portion 144 is 0.4 mm to 0.8 mm In the range.

The applicant found through experiments that, according to the regulating valve 1 described in (8), the jet flow is reliably guided to the valve hole 114 side, and the occurrence of vibration of the valve body 14 caused by the jet flow is suppressed, thereby enabling the regulation Valve 1 is excellent.

(9) The regulating valve 1 according to any one of (1) to (8), is characterized in that it has: a valve body 11 having a valve chamber 113 and a valve hole 114 inside; The upper cover 12 stacked on the valve main body 11 in a direction parallel to the abutment and separation direction has a film portion 152 that is connected to the valve body 14 at the central portion 151 and elastically deformed when the valve body 14 is abutted and separated from the outer periphery of the central portion 151 The film member 15; the valve main body 11 has an opening 116 for installing the film member 15 on the side of the upper cover 12, and the film member 15 has an annular fixing part 153 along the outer periphery of the film part 152, by pressing the annular fixing part 153 into the opening In 116, the film member 15 installed in the opening 116 is fixed by the upper cover 12 and the valve body 11 clamping the ring-shaped fixing part 153 from both sides of the abutting and separating direction; the ring-shaped fixing part 153 is fixed along the entire outer circumference. The circumference has an annular notch 153c opening from the outer peripheral surface to the end surface on the valve main body 11 side except for the end on the upper cover 12 side.

According to the regulating valve 1 described in (9), the upper cover 12 and the valve main body 11 clamp the ring-shaped fixing portion 153 from both sides in the abutting and separating direction along the entire circumference of the outer circumference, except for the end portion on the upper cover 12 side, from the outer peripheral surface to the The end surface on the side of the valve body 11 has an open annular notch 153c, so the upper end surface 153b on the side of the upper cover 12 of the annular fixing portion 153 can secure an area covered by the upper cover 12 . By ensuring the area covered by the upper cover 12 in the ring-shaped fixing portion 153 , the diaphragm member 15 can be securely fixed, and vibration of the valve body 14 connected to the diaphragm member 15 can be suppressed. In addition, the thickness of the valve main body 11 can be ensured to the extent that the annular fixing portion 153 opens in the annular notch 153c, and the strength of the valve main body 11 can be increased.

In addition, the above-mentioned embodiment is only an example, and does not limit the present invention in any way. Therefore, of course, various improvements and deformation|transformation are possible for this invention in the range which does not deviate from the summary.

For example, in this embodiment, the first circular ridgeline 145, the second circular ridgeline 146, the third circular ridgeline 118, and the fourth circular ridgeline 119 are shown as sharp shapes, but they may be rounded or rounded. chamfered.

1: Control valve (an example of a fluid control valve)

11: Valve body

12: Upper cover

13: Lower cover

14: valve body

15: Film component

16: Compression coil spring

17: Flow path throttling part

18: The second flow path throttling part

19: O-ring

21: Valve body

24: valve body

27: Throttling department

28: The second flow path throttling part

31: Valve body

34: valve body

37: Throttling department

38: The second flow path throttling part

39: The throttling part of the third flow path

111: input port

111a: input flow path

112: output port

112a: output flow path

113: valve chamber

113a: Inner surface of valve hole side

114: valve hole

115: annular protrusion

115a: valve seat

115b: Annular reducing surface

116: opening

116a: downstream side fluid chamber

116b: Pressure application chamber

117: Annular depression

118: The third circular ridge

119: The fourth circular ridge

121: import port

131: spring accommodation room

141: Diameter expansion part

141a: abutment surface

142: film department

143: Ladder Department

144: The second step

145: The first circular ridgeline (an example of a circular ridgeline)

146: Second circular ridge

151: central part

152: film department

153: Ring fixed part

153a: Press-in part

153b: upper end face

153c: Annular notch

214: valve hole

215: ring protrusion

215a: valve seat

215b: Annular reducing surface

217: Annular depression

218: The third circular ridge

219: The fourth circular ridge

241: Expanding part

241a: abutment surface

243: Ladder department

244: The second step

245: The first circular ridgeline (an example of circular ridgeline)

246: Second circular ridge

314: valve hole

315: ring protrusion

315a: valve seat

315b: Annular reducing surface

317: Annular depression

318: the second annular depression

319: The third circular ridge

320: The fourth circular ridge

322: The sixth circular ridge

341: expansion part

341a: abutment surface

343: Ladder department

344: The second step

345: The third step

346: The first circular ridgeline (an example of a circular ridgeline)

347: Second circular ridge

348: Fifth circular ridge

d1~d4: distance

t11: wall thickness

CL11: Centerline

C1, C2: gap size

D1: diameter size

E11: part

E12: part

E21: part

E31: part

FIG. 1 is a cross-sectional view showing a regulating valve according to this embodiment.

FIG. 2 shows a partially enlarged view of part E11 of FIG. 1 .

FIG. 3 shows a partially enlarged view of part E12 of FIG. 2 .

Fig. 4 is a sectional view showing a regulating valve of the prior art.

Fig. 5 is a diagram showing the pressure distribution of the control fluid in the vicinity of the valve seat of the regulating valve according to the present embodiment.

FIG. 6 is a graph showing the pressure distribution of the control fluid in the vicinity of the valve seat when the gap size of the second flow path narrowing portion is enlarged.

Fig. 7 is a graph showing the pressure distribution of the control fluid in the vicinity of the valve seat of the conventional control valve.

FIG. 8 is a graph showing the comparison of the pressure values of the control fluid in the vicinity of the valve seat.

Fig. 9 is a distribution diagram showing the flow velocity distribution of the control fluid in the vicinity of the valve seat of the regulating valve according to the present embodiment.

FIG. 10 is a distribution diagram showing the flow velocity of the control fluid in the vicinity of the valve seat when the distance between the valve seat and the stepped portion increases.

Fig. 11 is a diagram showing the distribution of the flow velocity of the control fluid in the vicinity of the valve seat of the conventional control valve.

FIG. 12 is a pressure distribution diagram of the control fluid in the vicinity of the valve seat in the first modified example of the regulating valve of the present embodiment.

Fig. 13 is a partially enlarged view of a second modified example of the regulating valve of the present embodiment.

FIG. 14 shows a partially enlarged view of part E21 of FIG. 13 .

Fig. 15 is a partially enlarged view of a third modified example of the regulating valve of the present embodiment.

FIG. 16 shows a partially enlarged view of part E31 of FIG. 15 .

11: Valve body

14: valve body

113a: Inner surface of valve hole side

113: valve chamber

114: valve hole

115: annular protrusion

115a: valve seat

115b: Annular reducing surface

117: Annular depression

141: Diameter expansion part

141a: abutment surface

143: Ladder Department

144: The second step

d1~d4: distance

CL11: Centerline

C1, C2: gap size

E11: part

E12: part

D1: diameter size

Claims (10)

A fluid control valve, characterized by comprising a valve body (14), an upstream valve chamber (113) accommodating the valve body, a downstream valve hole (114) communicating with the valve chamber, and a The outer circumference protrudes from the inner surface of the valve hole side of the valve chamber, and has an annular protrusion (115) with a valve seat at the top end, and fluid control is performed by making the valve body abut and separate from the valve seat. , the annular protrusion has an annular diameter-reducing surface (115b) on the entire circumference of the inner diameter side of the annular protrusion to reduce the diameter of the inner diameter of the annular protrusion to the valve hole, so The valve body has an abutment surface (141a) that abuts against the valve seat, and on the inner peripheral side of the valve seat, there is a valve hole that protrudes from the abutment surface to the side of the valve hole and has a A cylindrical stepped part (143) with a large inner diameter and coaxial with the valve hole, an annular ring whose outer peripheral surface intersects the end surface of the stepped part on the side of the valve hole The shaped ridgeline (145) is located near the ring-shaped diameter-reducing surface, forming a flow path throttling part (17). The fluid control valve according to claim 1, wherein the gap size in the radial direction of the annular ridgeline (145) of the flow path restriction (17) is multiplied by the The value of the diameter dimension of the central portion of the valve seat (115a) is between 0.6 and 1.2. The fluid control valve according to claim 1, wherein the distance from the central part of the valve seat (115a) to the outer peripheral surface of the stepped part (143) is in the range of 0.4 mm to 0.8 mm. The fluid control valve according to claim 2, wherein the distance from the central part of the valve seat (115a) to the outer peripheral surface of the stepped part (143) is in the range of 0.4 mm to 0.8 mm. The fluid control valve according to claim 1, wherein the valve body (14) protrudes from the end of the stepped portion (143) on the side of the valve hole (114) toward the side of the valve hole a cylindrical second stepped portion (144) having a diameter smaller than the outer diameter of the stepped portion (143) and coaxial with the valve hole, the outer peripheral surface of the second stepped portion is in contact with the first stepped portion The second annular ridgeline (146) where the end surfaces on the side of the valve hole of the two-step part intersect is located near the inner peripheral surface of the valve hole, forming a second constricted flow passage narrow part (18). The fluid control valve according to claim 5, wherein the gap size in the radial direction of the second annular ridgeline (146) of the second flow path restriction (18) is multiplied by the annular protrusion The value of the diameter of the central part of the valve seat (115a) is between 0.6 and 1.2. The fluid control valve according to claim 5, wherein, the annular diameter-reducing surface (115b) and the inner peripheral surface of the valve hole (114) The ring-shaped recessed part (117) coaxial with the valve hole is provided through side drilling, and the third ring-shaped ridge line (118) where the inner peripheral surface of the ring-shaped recessed part intersects with the ring-shaped diameter-reducing surface It is located near the annular ridgeline and together with the annular ridgeline (145) forms a flow path restriction (17), the inner surface of the annular depression on the side of the valve hole and the valve hole The fourth annular ridgeline (119) intersecting the inner peripheral surfaces is located near the second annular ridgeline, and together with the second annular ridgeline forms the second flow path restriction (18). The fluid control valve according to claim 7, wherein the distance (d3) from the valve seat (115a) to the inner surface of the annular recess (117) on the side of the valve hole (114) is greater than A distance ( d4 ) from the abutting surface ( 141 a ) to an end surface of the second stepped portion ( 144 ) on the side of the valve hole is 0.03 mm to 0.13 mm smaller. The fluid control valve according to claim 5, wherein the distance (d2) from the outer peripheral surface of the stepped portion (143) to the outer peripheral surface of the second stepped portion (144) is in the range of 0.4 mm to 0.8 mm Inside. The fluid control valve according to claim 1, further comprising: a valve main body (11) having the valve chamber (113) and the valve hole (114) inside, and the valve body (14) ) The cover member (12) and the film member (15) stacked on the valve body in a direction parallel to the abutting and separating direction have a central part connected to the valve body and an outer periphery connected to the central part The thin film portion (152) elastically deforms when the valve body is abutted and separated. The valve main body has an opening portion (116) for installing the thin film member on the side of the cover member. The outer periphery of the film part has a ring-shaped fixing part (153), and the film member installed in the opening part by pressing the ring-shaped fixing part into the opening part is connected by the cover member and the The valve main body is clamped and fixed from both sides in the abutment and separation direction by the ring-shaped fixing portion, which has a ring-shaped fixing portion extending from the outer peripheral surface along the entire circumference of the outer circumference except for the end portion on the side of the cover member. An annular notch (153c) opening to the end surface on the side of the valve main body.

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