TW202126907A - 渦輪分子泵 - Google Patents

渦輪分子泵 Download PDF

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Publication number
TW202126907A
TW202126907A TW109137946A TW109137946A TW202126907A TW 202126907 A TW202126907 A TW 202126907A TW 109137946 A TW109137946 A TW 109137946A TW 109137946 A TW109137946 A TW 109137946A TW 202126907 A TW202126907 A TW 202126907A
Authority
TW
Taiwan
Prior art keywords
blades
rotor
wing
blade
stator
Prior art date
Application number
TW109137946A
Other languages
English (en)
Chinese (zh)
Inventor
二木敬一
Original Assignee
日商島津製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商島津製作所股份有限公司 filed Critical 日商島津製作所股份有限公司
Publication of TW202126907A publication Critical patent/TW202126907A/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
TW109137946A 2020-01-09 2020-10-30 渦輪分子泵 TW202126907A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-002445 2020-01-09
JP2020002445A JP7363494B2 (ja) 2020-01-09 2020-01-09 ターボ分子ポンプ

Publications (1)

Publication Number Publication Date
TW202126907A true TW202126907A (zh) 2021-07-16

Family

ID=76708982

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109137946A TW202126907A (zh) 2020-01-09 2020-10-30 渦輪分子泵

Country Status (3)

Country Link
JP (1) JP7363494B2 (ja)
CN (1) CN113107875B (ja)
TW (1) TW202126907A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7396209B2 (ja) * 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
JP2007198205A (ja) * 2006-01-25 2007-08-09 Shimadzu Corp ターボ分子ポンプ
JP5369591B2 (ja) * 2008-10-03 2013-12-18 株式会社島津製作所 ターボ分子ポンプ
CN102465890A (zh) * 2010-11-04 2012-05-23 致扬科技股份有限公司 改良的涡轮分子泵的定子结构及其制造方法
CN102536902A (zh) * 2010-12-13 2012-07-04 致扬科技股份有限公司 涡轮分子泵的叶片结构改良
DE102014203604A1 (de) * 2014-02-27 2015-08-27 Rolls-Royce Deutschland Ltd & Co Kg Schaufelreihengruppe
WO2018174013A1 (ja) 2017-03-23 2018-09-27 エドワーズ株式会社 真空ポンプとこれに用いられるブレード部品およびロータならびに固定のブレード

Also Published As

Publication number Publication date
JP7363494B2 (ja) 2023-10-18
CN113107875A (zh) 2021-07-13
JP2021110286A (ja) 2021-08-02
CN113107875B (zh) 2023-09-08

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