TW202126446A - Sucker with two-layer structure which can effectively prolong the service life of the sucker - Google Patents

Sucker with two-layer structure which can effectively prolong the service life of the sucker Download PDF

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TW202126446A
TW202126446A TW108148708A TW108148708A TW202126446A TW 202126446 A TW202126446 A TW 202126446A TW 108148708 A TW108148708 A TW 108148708A TW 108148708 A TW108148708 A TW 108148708A TW 202126446 A TW202126446 A TW 202126446A
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ring body
inner ring
substrate
space
suction cup
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TW108148708A
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Chinese (zh)
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TWI752397B (en
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簡嘉宏
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大嘉科技股份有限公司
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Abstract

A sucker with a two-layer structure is suitable for absorbing a substrate. The sucker includes a connecting rod, a main body, an outer annular body and an inner annular body. The connecting rod is hollow and has a surrounding wall and an air suction space defined by the surrounding wall. The main body is provided for inserting the connecting rod therein and has a surface facing the substrate. The surface is formed with a slot communicated with the air suction space. The outer annular body is made of elastic material and extended away from the main body from the periphery of the surface. The inner annular body is made of elastic material and extended away from the main body from the surface. The inner annular body surrounds the slot of the main body and is spaced apart from the outer annular body. When the sucker adsorbs the substrate, the outer annular body and the inner annular body are abutted against the substrate to be elastically deformed, so that the inner annular body and the main body define an inner adsorption space. The inner annular body, the outer annular body and the main body define an outer adsorption space. The inner adsorption space and the outer adsorption space are separated by the inner annular body.

Description

具有雙層結構的吸盤Suction cup with double-layer structure

本發明是有關於一種吸盤,特別是指一種具有雙層結構的吸盤。The present invention relates to a suction cup, in particular to a suction cup with a double-layer structure.

台灣專利公開號TW201920019A揭露了一種玻璃製造設備,其中提及製作出一玻璃帶後,欲將該玻璃帶分割出一玻璃片時,需要先以一抓持頭固持玻璃片,再對玻璃帶進行切割得出玻璃片,如此才能防止玻璃片在切割完成後掉落,造成玻璃片損壞甚至破裂。抓持頭具有多個吸盤及一連通該等吸盤的抽氣裝置,藉由該抽氣裝置對該等吸盤抽氣至真空狀態以吸附玻璃片。然而,吸盤在切割過程中容易被切割產生的玻璃碎屑割破,一旦吸盤有破洞將降低抓持頭的固持穩定度,可能會使玻璃片在切割完成後掉落,依照經驗大約每1-2天就需要停機重新更換所有的吸盤,才能防止玻璃片掉落的情形發生。因此現有的吸盤尚有改良的空間。Taiwan Patent Publication No. TW201920019A discloses a glass manufacturing equipment, which mentions that after a glass ribbon is produced, when the glass ribbon is to be divided into a glass sheet, it is necessary to first hold the glass sheet with a gripping head, and then perform the process on the glass ribbon. The cut glass sheet can prevent the glass sheet from falling after the cutting is completed, causing the glass sheet to be damaged or even broken. The gripping head has a plurality of suction cups and a suction device connected to the suction cups, and the suction cups are sucked to a vacuum state by the suction device to suck the glass sheet. However, the suction cup is easy to be cut by the glass chips produced by cutting during the cutting process. Once the suction cup has a hole, it will reduce the holding stability of the gripping head and may cause the glass sheet to fall after the cutting is completed. According to experience, it is about every 1 -2 days, it will be necessary to stop the machine and replace all the suction cups to prevent the glass sheet from falling. Therefore, the existing suction cups still have room for improvement.

因此,本發明之其中一目的,即在提供一種具有雙層結構能延長使用壽命的吸盤。Therefore, one of the objectives of the present invention is to provide a suction cup with a double-layer structure that can prolong the service life.

於是,本發明具有雙層結構的吸盤適用於吸附一基板,該吸盤包含一連接桿,呈中空狀並具有一圍壁及一由該圍壁界定出的抽氣空間;一本體,為彈性材質供該連接桿插設,並具有一朝向該基板的表面,該表面形成有一連通該抽氣空間的凹槽;一外環體,為彈性材質且自該表面的周緣遠離該本體延伸;及一內環體,為彈性材質且自該表面的遠離該本體延伸,該內環體圍繞該本體的該凹槽並與該外環體相間隔,該本體、該外環體及該內環體是以一體成形的方式形成;當該吸盤吸附該基板時,該外環體及該內環體抵接該基板而彈性變形,使得該內環體與該本體界定出一內吸附空間,該內環體、該外環體及該本體界定出一外吸附空間,該內吸附空間與該外吸附空間被該內環體間隔開。Therefore, the sucker with a double-layer structure of the present invention is suitable for sucking a substrate. The sucker includes a connecting rod, is hollow and has a surrounding wall and a suction space defined by the surrounding wall; a body made of elastic material The connecting rod is inserted and has a surface facing the substrate, and the surface is formed with a groove communicating with the suction space; an outer ring body made of elastic material and extending away from the main body from the periphery of the surface; and An inner ring body made of elastic material and extending away from the body from the surface. The inner ring body surrounds the groove of the body and is spaced from the outer ring body. The body, the outer ring body and the inner ring body It is formed in an integrated manner; when the suction cup adsorbs the substrate, the outer ring body and the inner ring body abut the substrate and elastically deform, so that the inner ring body and the body define an inner suction space, and the inner The ring body, the outer ring body and the body define an outer adsorption space, and the inner adsorption space and the outer adsorption space are separated by the inner ring body.

在一些實施態樣中,該連接桿的該圍壁開設有至少一連通該抽氣空間的穿孔,該本體的該表面形成有至少一與該凹槽相隔的通氣孔及至少一朝該連接桿延伸並連通該通氣孔及該穿孔的氣流支道,該通氣孔位於該內環體及該外環體之間,該外吸附空間藉由該通氣孔、該氣流支道及該穿孔連通該抽氣空間。In some embodiments, the surrounding wall of the connecting rod is provided with at least one through hole communicating with the suction space, and the surface of the body is formed with at least one vent spaced apart from the groove and at least one facing the connecting rod Extending and connecting the vent hole and the perforated air flow branch, the vent hole is located between the inner ring body and the outer ring body, and the outer adsorption space is connected to the pump through the vent hole, the air flow branch and the perforation Air space.

在一些實施態樣中,該本體還具有多個凸設於該表面位於該內環體內的擋止塊,該等擋止塊彼此相間隔且呈環狀圍繞該凹槽,當該吸盤吸附該基板時,該等擋止塊抵靠該基板防止該表面與該基板接觸。In some embodiments, the body further has a plurality of stop blocks protruding on the surface and located in the inner ring. The stop blocks are spaced apart from each other and surround the groove in a ring shape. When the suction cup absorbs the When the substrate is used, the stop blocks abut against the substrate to prevent the surface from contacting the substrate.

在一些實施態樣中,該圍壁開設多個穿孔,該表面形成多個通氣孔及多個氣流支道,該等通氣孔呈環狀排列於該內環體及該外環體之間。In some embodiments, the surrounding wall is provided with a plurality of perforations, the surface is formed with a plurality of vent holes and a plurality of air flow branches, and the vent holes are arranged in a ring shape between the inner ring body and the outer ring body.

在一些實施態樣中,該內環體的延伸長度小於該內環體與該外環體的間距。In some embodiments, the extension length of the inner ring body is smaller than the distance between the inner ring body and the outer ring body.

本發明至少具有以下功效:藉由該內環體及該外環體的設置,即使外環體有破損產生孔洞使得該外吸附空間與外界連通,該吸盤依然能藉由與該外吸附空間分隔開的該內吸附空間被抽氣至真空狀態,以持續穩固地吸附該基板,不同於現有的吸盤一旦破損產生孔洞後,因為與外界連通,吸盤內部空間無法被抽至真空使得吸附力大幅下降,無法穩固地吸附該基板而必須做更換。因此,該內環體及該外環體的雙層結構設計將能有效延長該吸盤的使用壽命。The present invention has at least the following effects: through the arrangement of the inner ring body and the outer ring body, even if the outer ring body is damaged and produces holes to make the outer adsorption space communicate with the outside, the suction cup can still be separated from the outer adsorption space. The partitioned inner suction space is evacuated to a vacuum state to continuously and firmly adsorb the substrate, unlike the existing suction cup once it is damaged and creates a hole, because it is connected to the outside world, the internal space of the suction cup cannot be evacuated to a vacuum so that the suction force is large. When it falls, the substrate cannot be firmly adsorbed and must be replaced. Therefore, the double-layer structure design of the inner ring body and the outer ring body can effectively prolong the service life of the suction cup.

參閱圖1與圖2,本發明具有雙層結構的吸盤之一實施例,適用於裝設在一玻璃製造設備(圖未示)的一擷取爪100的末端,該擷取爪100裝設有多個吸盤10,該玻璃製造設備還包含一設置於該擷取爪100並藉由氣流管路(圖未示)連通吸盤10的抽氣裝置20,該抽氣裝置20可對該吸盤10抽氣至真空狀態以吸附一基板1,再對該基板1進行切割加工,該基板1可例如為一玻璃板。每一吸盤10包含一連接桿2、一本體3、一外環體4及一內環體5。1 and 2, an embodiment of the suction cup with a double-layer structure of the present invention is suitable for being installed at the end of a picking claw 100 of a glass manufacturing equipment (not shown), and the picking claw 100 is installed There are a plurality of suction cups 10, and the glass manufacturing equipment further includes a suction device 20 arranged on the extraction claw 100 and connected to the suction cup 10 through an air flow pipe (not shown), and the suction device 20 can be used for the suction cup 10 The air is evacuated to a vacuum state to adsorb a substrate 1, and then the substrate 1 is cut and processed. The substrate 1 may be, for example, a glass plate. Each suction cup 10 includes a connecting rod 2, a body 3, an outer ring body 4 and an inner ring body 5.

參閱圖2至圖4,連接桿2為金屬材質呈中空圓筒狀,其埋設於該本體3並可拆卸地連接該擷取爪100的末端。該連接桿2具有一圍壁21及一由該圍壁21界定出的抽氣空間22。該圍壁21埋設於該本體3的部分開設有兩個連通該抽氣空間22的穿孔211,該圍壁21露出該本體3部分的外表面31形成有螺紋,擷取爪100末端也設有對應配合的螺孔,以便於該連接桿2裝設於該擷取爪100。抽氣空間22則是藉由氣流管路(圖未示)連通於該抽氣裝置20。其中,該連接桿2與該擷取爪100的結合方式並不以本實施例為限,只要該連接桿2能以可拆卸地的結合方式連接於該擷取爪100,方便使用者替換該吸盤10即可。Referring to FIGS. 2 to 4, the connecting rod 2 is made of a metal material and is in the shape of a hollow cylinder, which is embedded in the main body 3 and is detachably connected to the end of the extraction claw 100. The connecting rod 2 has a surrounding wall 21 and a suction space 22 defined by the surrounding wall 21. The part of the surrounding wall 21 buried in the body 3 is provided with two perforations 211 communicating with the suction space 22. The surrounding wall 21 is exposed on the outer surface 31 of the body 3 and is formed with threads. The end of the extraction claw 100 is also provided Correspondingly matched screw holes, so that the connecting rod 2 is installed on the capturing claw 100. The air extraction space 22 is connected to the air extraction device 20 through an air flow pipe (not shown). Wherein, the coupling method of the connecting rod 2 and the capturing claw 100 is not limited to this embodiment, as long as the connecting rod 2 can be detachably connected to the capturing claw 100, it is convenient for the user to replace the Suction cup 10 is enough.

該本體3的形狀大致如同兩個以底面相接的圓台,且為彈性材質,可例如為矽橡膠,具有耐高溫的特性。該本體3具有一朝向該基板1的表面31,該表面31形成有一連通該抽氣空間22的凹槽32、八個凸設於該表面31的擋止塊33、兩個與該凹槽32相隔的通氣孔34兩個朝該連接桿2延伸並分別連通該等通氣孔34及該等穿孔211的氣流支道35。該等擋止塊33大致呈圓柱狀,並彼此相間隔且呈環狀排列圍繞該凹槽32。The shape of the main body 3 is roughly the same as two truncated cones connected by bottom surfaces, and is made of elastic material, such as silicon rubber, which has high temperature resistance characteristics. The main body 3 has a surface 31 facing the substrate 1, the surface 31 is formed with a groove 32 communicating with the suction space 22, eight stop blocks 33 protruding on the surface 31, two and the groove Two vent holes 34 separated by 32 extend toward the connecting rod 2 and communicate with the vent holes 34 and the air flow branch passages 35 of the perforations 211 respectively. The stopping blocks 33 are generally cylindrical, spaced apart from each other and arranged in a ring shape to surround the groove 32.

該外環體4自該表面31的周緣遠離該本體3向外斜向地延伸,該外環體4同樣為彈性材質,可例如為矽橡膠,具有耐高溫的特性。該內環體5自該表面31的遠離該本體3延伸,該內環體5同樣為彈性材質,可例如為矽橡膠,具有耐高溫的特性。該內環體5圍繞該本體3的該凹槽32及該等擋止塊33並與該外環體4相間隔,該等通氣孔34位於該內環體5及該外環體4之間。在本實施例中,該本體3、該外環體4及該內環體5是以一體成形的方式形成的,且該內環體5的延伸長度小於該外環體4的延伸長度,但不以此為限,在其他實施例中該內環體5的延伸長度可以相同於該外環體4的延伸長度,只要該內環體5的延伸長度小於該內環體5與該外環體4的間距即可,而且該外環體4及該內環體5並不以本實施例的斜向延伸方式為限制,在其他實施例中也可以是沿著與該表面31大致垂直的方向延伸。其中,該等擋止塊33的數量並不以八個為限制,在其他實施例中也可以為其他數量,只要是多個即可。該等穿孔211、該等通氣孔34及該等氣流支道35的數量也不以兩個為限制,在其他實施例中也可以為其他數量,且如果該等通氣孔34的數量為三個以上則是呈環狀排列於該內環體5及該外環體4之間。The outer ring body 4 extends obliquely outwards away from the main body 3 from the periphery of the surface 31. The outer ring body 4 is also made of elastic material, such as silicon rubber, which has high temperature resistance. The inner ring body 5 extends from the surface 31 away from the main body 3. The inner ring body 5 is also made of elastic material, such as silicon rubber, which has high temperature resistance. The inner ring body 5 surrounds the groove 32 and the stop blocks 33 of the body 3 and is spaced from the outer ring body 4, and the vent holes 34 are located between the inner ring body 5 and the outer ring body 4 . In this embodiment, the main body 3, the outer ring body 4, and the inner ring body 5 are integrally formed, and the extension length of the inner ring body 5 is smaller than the extension length of the outer ring body 4, but Not limited to this. In other embodiments, the extension length of the inner ring body 5 may be the same as the extension length of the outer ring body 4, as long as the extension length of the inner ring body 5 is smaller than that of the inner ring body 5 and the outer ring body. The distance between the bodies 4 is sufficient, and the outer ring body 4 and the inner ring body 5 are not limited by the oblique extension of this embodiment. In other embodiments, they may also be along substantially perpendicular to the surface 31. Direction extension. Wherein, the number of the stop blocks 33 is not limited to eight. In other embodiments, it can also be other numbers, as long as there are more than one. The number of the perforations 211, the ventilation holes 34, and the air flow branch passages 35 is not limited to two, and other numbers may be used in other embodiments, and if the number of the ventilation holes 34 is three The above is arranged in a ring shape between the inner ring body 5 and the outer ring body 4.

參閱圖4,當該吸盤10吸附該基板1時,該外環體4及該內環體5抵接該基板1而彈性變形,該等擋止塊33抵靠該基板1以防止該表面31與該基板1接觸,使得該內環體5與該本體3界定出一內吸附空間S1,該內環體5、該外環體4及該本體3界定出一外吸附空間S2,該內吸附空間S1與該外吸附空間S2被該內環體5間隔開。該抽氣裝置20便透過氣流管路(圖未示)經由抽氣空間22及凹槽32對該內吸附空間S1抽氣至真空狀態,以及經由抽氣空間22、氣流支道35及通氣孔34對該外吸附空間S2抽氣至真空狀態,以同時對該基板1對應於該內吸附空間S1與該外吸附空間S2的區域表面31產生吸附力,使該吸盤10能穩固地吸附該基板1,且藉由該等擋止塊33抵靠該基板1能增加吸盤10與基板1之間的摩擦力,使吸盤10不易滑動。如此一來,即使外環體4在切割基板1的過程中被玻璃碎片或殘渣割破而產生孔洞,使得該外吸附空間S2與外界連通而無法被抽至真空狀態,該吸盤10依然能藉由與該外吸附空間S2分隔開的該內吸附空間S1被抽氣至真空狀態,以持續穩固地吸附該基板1,不會因為該外環體4受損就失去吸附力而必須更換吸盤10,有效延長吸盤10的使用壽命,且經實測的結果與現有的吸盤相比,能夠將使用壽命自1-2天延長至20天左右,效果十分顯著。需要補充說明的是,該內環體5的延伸長度不宜大於該內環體5與該外環體4的間距,否則在該吸盤10吸附該基板1時,該外環體4彈性變形後將可能蓋住該等通氣孔34進而影響該外吸附空間S2的吸附力。4, when the suction cup 10 sucks the substrate 1, the outer ring body 4 and the inner ring body 5 abut the substrate 1 and elastically deform, and the stop blocks 33 abut the substrate 1 to prevent the surface 31 In contact with the substrate 1, the inner ring body 5 and the body 3 define an inner adsorption space S1, the inner ring body 5, the outer ring body 4, and the body 3 define an outer adsorption space S2, and the inner adsorption The space S1 and the outer adsorption space S2 are separated by the inner ring body 5. The air extraction device 20 evacuates the inner adsorption space S1 to a vacuum state through the air extraction space 22 and the groove 32 through the air flow pipeline (not shown), and passes the air extraction space 22, the air flow branch 35 and the vent hole 34. The outer suction space S2 is pumped to a vacuum state to simultaneously generate suction force on the surface 31 of the substrate 1 corresponding to the inner suction space S1 and the outer suction space S2, so that the suction cup 10 can firmly adsorb the substrate 1. By abutting against the substrate 1 by the stop blocks 33, the friction between the suction cup 10 and the substrate 1 can be increased, so that the suction cup 10 is not easy to slide. In this way, even if the outer ring body 4 is cut by glass shards or residues during the cutting of the substrate 1 to produce holes, so that the outer adsorption space S2 communicates with the outside and cannot be evacuated to a vacuum state, the suction cup 10 can still borrow The inner adsorption space S1 separated from the outer adsorption space S2 is evacuated to a vacuum state to continuously and firmly adsorb the substrate 1 without losing the adsorption force due to damage to the outer ring body 4 and the suction cup must be replaced 10. Effectively prolong the service life of the suction cup 10, and compared with the existing suction cup, the measured results can extend the service life from 1-2 days to about 20 days, and the effect is very significant. It should be supplemented that the extension length of the inner ring body 5 should not be greater than the distance between the inner ring body 5 and the outer ring body 4, otherwise when the suction cup 10 adsorbs the substrate 1, the outer ring body 4 will be elastically deformed. It may cover the vent holes 34 and affect the adsorption force of the outer adsorption space S2.

綜上所述,本發明具有雙層結構的吸盤10藉由該內環體5及該外環體4的設置,即使外環體4在切割基板1的過程中被玻璃碎片或殘渣割破而產生孔洞,使得該外吸附空間S2與外界連通而無法被抽至真空狀態,該吸盤10依然能藉由與該外吸附空間S2分隔開的該內吸附空間S1被抽氣至真空狀態,以持續穩固地吸附該基板1,不同於現有的吸盤一旦破損產生孔洞後,因為與外界連通,吸盤內部空間無法被抽至真空使得吸附力大幅下降,無法穩固地吸附該基板1而必須做更換。因此,該內環體5及該外環體4的雙層結構設計將能有效延長該吸盤10的使用壽命,故確實能達成本發明之目的。In summary, the suction cup 10 with a double-layer structure of the present invention is provided with the inner ring body 5 and the outer ring body 4, even if the outer ring body 4 is cut by glass fragments or residues during the cutting of the substrate 1. Holes are generated so that the outer adsorption space S2 communicates with the outside world and cannot be evacuated to a vacuum state. The suction cup 10 can still be evacuated to a vacuum state by the inner adsorption space S1 separated from the outer adsorption space S2. Sustaining and stably adsorbing the substrate 1 is different from the existing suction cup once it is damaged and creating a hole. Because of the communication with the outside, the internal space of the suction cup cannot be evacuated, so that the suction force is greatly reduced, and the substrate 1 cannot be firmly adsorbed and must be replaced. Therefore, the double-layer structure design of the inner ring body 5 and the outer ring body 4 can effectively prolong the service life of the suction cup 10, and thus can indeed achieve the purpose of the invention.

惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited by this, all simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the content of the patent specification still belong to This invention patent covers the scope.

10:吸盤 20:抽氣裝置 100:擷取爪 1:基板 2:連接桿 21:圍壁 211:穿孔 22:抽氣空間 3:本體 31:表面 32:凹槽 33:擋止塊 34:通氣孔 35:氣流支道 4:外環體 5:內環體 S1:內吸附空間 S2:外吸附空間10: Suction cup 20: Exhaust device 100: pick claw 1: substrate 2: connecting rod 21: Wall 211: Piercing 22: pumping space 3: Ontology 31: Surface 32: Groove 33: Stop block 34: Vent 35: Airflow branch 4: Outer ring body 5: inner ring body S1: Internal adsorption space S2: Outer adsorption space

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中: 圖1是一不完整的俯視示意圖,說明本發明具有雙層結構的吸盤的一實施例裝設於一擷取爪,用於吸附一基板; 圖2是該實施例的一立體圖; 圖3是由圖2的剖線III-III得出的一剖視圖,說明該實施例;及 圖4是一不完整的剖視圖,說明該實施例吸附該基板的狀態。Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: 1 is an incomplete schematic top view illustrating an embodiment of the suction cup with a double-layer structure of the present invention is installed on a picking claw for sucking a substrate; Figure 2 is a perspective view of the embodiment; Fig. 3 is a cross-sectional view taken from the section line III-III of Fig. 2 to illustrate the embodiment; and FIG. 4 is an incomplete cross-sectional view illustrating the state in which the substrate is adsorbed by this embodiment.

10:吸盤10: Suction cup

2:連接桿2: connecting rod

21:圍壁21: Wall

211:穿孔211: Piercing

22:抽氣空間22: pumping space

3:本體3: Ontology

31:表面31: Surface

32:凹槽32: Groove

33:擋止塊33: Stop block

34:通氣孔34: Vent

35:氣流支道35: Airflow branch

4:外環體4: Outer ring body

5:內環體5: inner ring body

Claims (5)

一種具有雙層結構的吸盤,適用於吸附一基板,該吸盤包含: 一連接桿,呈中空狀並具有一圍壁及一由該圍壁界定出的抽氣空間; 一本體,為彈性材質供該連接桿插設,並具有一朝向該基板的表面,該表面形成有一連通該抽氣空間的凹槽; 一外環體,為彈性材質且自該表面的周緣遠離該本體延伸;及 一內環體,為彈性材質且自該表面的遠離該本體延伸,該內環體圍繞該本體的該凹槽並與該外環體相間隔,該本體、該外環體及該內環體是以一體成形的方式形成; 當該吸盤吸附該基板時,該外環體及該內環體抵接該基板而彈性變形,使得該內環體與該本體界定出一內吸附空間,該內環體、該外環體及該本體界定出一外吸附空間,該內吸附空間與該外吸附空間被該內環體間隔開。A suction cup with a double-layer structure suitable for absorbing a substrate. The suction cup includes: A connecting rod, which is hollow and has a surrounding wall and a suction space defined by the surrounding wall; A body made of elastic material for the connecting rod to be inserted, and has a surface facing the substrate, and a groove communicating with the suction space is formed on the surface; An outer ring body made of elastic material and extending away from the body from the periphery of the surface; and An inner ring body made of elastic material and extending away from the body from the surface. The inner ring body surrounds the groove of the body and is spaced from the outer ring body. The body, the outer ring body and the inner ring body It is formed in one piece; When the sucker sucks the substrate, the outer ring body and the inner ring body abut the substrate and elastically deform, so that the inner ring body and the body define an inner suction space, the inner ring body, the outer ring body, and the The body defines an outer adsorption space, and the inner adsorption space and the outer adsorption space are separated by the inner ring body. 如請求項1所述的吸盤,其中,該連接桿的該圍壁開設有至少一連通該抽氣空間的穿孔,該本體的該表面形成有至少一與該凹槽相隔的通氣孔及至少一朝該連接桿延伸並連通該通氣孔及該穿孔的氣流支道,該通氣孔位於該內環體及該外環體之間,該外吸附空間藉由該通氣孔、該氣流支道及該穿孔連通該抽氣空間。The suction cup according to claim 1, wherein the surrounding wall of the connecting rod is provided with at least one through hole communicating with the suction space, and the surface of the body is formed with at least one vent hole separated from the groove and at least one Extends toward the connecting rod and communicates with the vent hole and the perforated air flow branch. The vent hole is located between the inner ring body and the outer ring body. The outer adsorption space passes through the vent hole, the air flow branch and the The perforation communicates with the suction space. 如請求項1所述的吸盤,其中,該本體還具有多個凸設於該表面位於該內環體內的擋止塊,該等擋止塊彼此相間隔且呈環狀圍繞該凹槽,當該吸盤吸附該基板時,該等擋止塊抵靠該基板以防止該表面與該基板接觸。The suction cup according to claim 1, wherein the body further has a plurality of stop blocks protruding from the surface and located in the inner ring body, the stop blocks are spaced apart from each other and surround the groove in a ring shape, when When the sucker sucks the substrate, the stop blocks abut the substrate to prevent the surface from contacting the substrate. 如請求項2所述的吸盤,其中,該圍壁開設多個穿孔,該表面形成多個通氣孔及多個氣流支道,該等通氣孔呈環狀排列於該內環體及該外環體之間。The suction cup according to claim 2, wherein the surrounding wall is provided with a plurality of perforations, the surface forms a plurality of vent holes and a plurality of air flow branches, and the vent holes are arranged in a ring shape on the inner ring body and the outer ring Between the body. 如請求項2所述的吸盤,其中,該內環體的延伸長度小於該內環體與該外環體的間距。The suction cup according to claim 2, wherein the extension length of the inner ring body is smaller than the distance between the inner ring body and the outer ring body.
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CN115303925A (en) * 2022-08-29 2022-11-08 深圳市拓元丰科技有限公司 Vacuum chuck

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