TW202124237A - Sheet article conveying method, device and equipment to improve unstable conveying status of the article on the conveying path because of irregular deflection to be suitable for automatic conveying - Google Patents

Abstract

The invention provides a sheet article conveying method, device, and equipment. The sheet article conveying method comprises steps of: delivering a sheet article through a conveying path; and poking and pushing the sheet article on the conveying path from a rear end of the sheet article to perform displacement. Accordingly, the unstable conveying condition of the sheet article can be improved to be suitable for automatic conveying.

Description

Method, device and equipment for conveying sheet objects

The present invention relates to an object conveying method, device and equipment, in particular to a thin object conveying method, device and equipment for conveying a thin object.

According to the general chip, there are a variety of manufacturing processes. One is to form a plurality of circuit sections arranged in a matrix on a thin rectangular substrate, so that the substrate is cleaned, sprayed with flux, and multiple solder balls are implanted in each of the circuit sections. After placing, after baking, the process of soldering and fixing the connection and positioning of the die on the solder ball in the circuit area is used by the industry. This process is usually required after the ball (solder ball) is planted and baked Go through a process of inspection to confirm whether the solder balls on the substrate are in the correct position.

The prior art uses sampling inspection for manual inspection. The reason is that the flaky substrate will be flexed and deformed after baking, and the direction of deformation has a variety of variables. There are longitudinal arcs and transverse arcs. There are curved upwards and downwards curved. It is difficult for the operator to perform automated ball planting inspection on the curved and deformed substrate. They can only choose to remove the substrate with a small amount of deformation for manual sampling inspection, which is lacking. For efficiency, defective products may be produced without being discovered; however, for automated inspections, automated transportation must be the first step.

The object of the present invention is to provide a sheet article conveying method suitable for conveying thin plate articles.

Another object of the present invention is to provide a sheet object conveying device suitable for conveying thin plate objects.

Another object of the present invention is to provide a sheet object conveying device for carrying out the sheet object conveying method as described above.

The method for conveying a sheet object according to the object of the present invention includes: a sheet object is conveyed by a conveying flow path; the conveying flow path is displaced by the conveying flow path from the rear end of the sheet object against the sheet object.

According to another object of the present invention, a sheet object conveying device includes: a conveying flow path for conveying a sheet object; a shifting member arranged on the conveying flow path and capable of being driven by a driving member to push against the thin sheet object.

According to another object of the present invention, a sheet object conveying device is used to implement the sheet object conveying method.

According to the method, device, and equipment for conveying a sheet object according to the embodiment of the present invention, since the conveying flow path of the loading rail of the first conversion device is driven by the conveying flow path from the rear end of the sheet object to the sheet object. The displacement can improve the unstable conveying state of the sheet object in the conveying flow path due to irregular deflection, which facilitates the automation of the entire conveying process.

Referring to FIG. 1, the method, device, and equipment for transporting a thin object according to the embodiment of the present invention can be illustrated by the ball planting inspection device L shown in the figure. The thin object of the embodiment of the present invention can be used for the ball planting inspection device Accept the substrate K after the ball (solder ball) is planted and baked. The substrate K is a rectangular thin object. The substrate K is provided with a plurality of circuit sections K1 arranged in a matrix, and each circuit section has been planted according to the circuit needs. There are a plurality of solder balls for soldering dies (due to the large number and too small, not shown in the figure).

Please refer to Figures 1 and 2. The ball planting inspection equipment L is installed on the same machine L1: A feeding device A, which is provided with a plurality of X-axis and a conveying channel A1 providing a conveying flow path A11, is used to receive the substrate K that has been planted and baked in the previous process and is input into the planting inspection equipment L; A first conversion device B is provided with a Y-axis first rail seat B1, the first rail seat B1 is provided with a loading rail B2 that provides an X-axis conveying flow path B21, the loading rail B2 can be driven by the first rail seat B1 and selectively displaced on the first rail seat B1 to selectively correspond to each conveying path A1 on the feeding device A, and to accept the corresponding conveying path A1 The transferred substrate K; An inspection device C is provided with two rails C1 parallel to each other in the Y axis, and each rail C1 is provided with a X axis linear transport flow path C11 so that the substrate K can be transported thereon. The transport flow The path C11 is located behind the conveying direction of the conveying flow path B21; the loading rails B2 on the first conversion device B can respectively selectively correspond to one of the rails C1, and load the substrate K on the rails B2 Is transmitted to the corresponding rail frame C1; the inspection device C is provided with an inspection unit C2 and a leveling unit C3 that can be driven for X, Y, and Z axial displacement, wherein the inspection unit C2 is located on the rail frame C1 is above the front section of the transport flow path C11 and can selectively correspond to one of the rails C1; the leveling unit C3 is located above the rear section of the transport flow path C11 of the rail C1 and can selectively correspond to one of the rails C1; A second conversion device D is provided with a Y-axis second rail seat D1, the second rail seat D1 is provided with a Z-axis third rail seat D2, and the third rail seat D2 is provided with an X-axis Move the rail frame D3 to one of the conveying flow path D21, the conveying flow path D21 is located in front of the conveying direction of the conveying flow path C11; the second rail seat D1 can drive the third rail seat D2 to link the moving out rail rack D3 as Y Axial displacement, the movable rail frame D3 can be driven by the third rail seat D2 to move up and down on the second rail seat D1, and the movable rail frame D3 uses the second rail seat D1 and the third rail seat D2 is selectively shifted to selectively correspond to each rail C1 on the inspection device C, and to accept the substrate K that has been inspected transmitted by the corresponding rail C1; the second conversion device D is located on the machine L1 Relative to the feeding device A, the first conversion device B, and the inspection device C, the table surface L2 is recessed in an interval L3; A collecting device E is provided with a box seat E1 having a plurality of X-axis slots E11 arranged parallel to each other in the Y-axis direction, each slot E11 can accommodate a frame box E2, and the second conversion device The removal rail D3 of D can respectively selectively correspond to one of the frame boxes E2, and the substrate K on the removal rail frame D3 can be transferred to the corresponding frame box E2.

Please refer to Figures 3 and 4, each conveying path A1 of the feeding device A on the horizontal conveying surface is respectively composed of a plurality of Y-axis rollers A2 that are spaced apart and arranged parallel to the X-axis, and each conveying path A1 is respectively provided at the discharge port A3 with a gate A5 that can be driven up and down by a driving member A4 composed of a pneumatic cylinder for blocking or opening control. There is a shield A6 that limits the height of the substrate K at the discharge port A3. Below the shield A6 is provided a guide A7 with a downwardly inclined surface toward the discharge port A3, so that the There may be, for example, that the front end portion K2 of the substrate K curved upward on both sides in the figure can be guided downward and blocked by the gate A5, so as to prevent the front end portion K2 from being left between the shielding member A6 and the gate A5. The gap protrudes outside; the discharge port A3 is equipped with a detector A8 to detect the discharge status; each roller A2 is driven by a driving member A9 composed of a motor and is linked by a belt A91 to act as an active Sexual rotation.

Referring to Figures 5 and 6, the loading rail B2 of the first conversion device B is formed on the horizontal conveying surface by a plurality of Y-axis rollers B22 that are spaced apart and arranged parallel to each other in the X-axis to form the conveying flow path B21. On one side of the loading rail B2, there are a plurality of Z-axis side rollers B23 arranged parallel to the X-axis. The conveying flow path B21 is provided with a Z-axis rod-shaped shift member B24. The shift member B24 can be driven by a driving member B241 on a slide rail B242 on the side of the side roller shaft B23 for X-axis displacement and driven by a driving member B243 for Z-axis upward and downward displacement, so as to be conveyed by the The upper part of the flow path B21 hangs down from the back end of the base plate K to push against the base plate K for X-axis displacement; A driving member B251 composed of a pneumatic cylinder drives a gate B25 that moves up and down for blocking or opening control. Above the discharge port B211 and inside the gate B25 is provided a shielding member B26, and the shielding member B26 restricts the substrate The height of K at the discharge port B211, below the shielding member B26, there is provided a guide member B261 with a downwardly inclined surface toward the discharge port B211, so that there may be, for example, curved upwards on both sides in the figure. The front end portion K2 of the substrate K can be guided downward and blocked by the gate B25, so as to prevent the front end portion K2 from protruding outside from the clearance between the shielding member B26 and the gate B25; at the discharge port B211 It is equipped with a detector B27 to detect the discharging condition; each roller B22 is driven by a driving member B221 constituted by a motor and is linked by a belt B222 for active rotation; the loading rail B2 is opposite to the side The other side of the roller shaft B23 is provided with two Z-axis rod-shaped pushers B28 at a distance. The two pushers B28 are arranged on both sides of a horizontally arranged linkage frame B281. The linkage frame B281 is composed of a motor. The driving member B282 drives a belt B283 to be linked to make Y-axis displacement on a slide rail B284, and through the linkage of the two pushing members B28 to make Y-axis displacement between the two rollers B22 and push the substrate K, so that The substrate K is transported by abutting against the side roller B23 on one side.

Referring to FIGS. 7-10, the conveying flow path C11 formed by any of the rails C1 respectively includes a feeding area C111, an inspection area C112, and a discharge area C113 according to the order of conveyance; , The feeding area C111 and the inspection area C112 are formed by a first rail frame C12, and the discharging area C113 is formed by a second rail frame C13, and the first rail frame C12 is longer than the second rail frame C13; The first rail frame C12 is provided with two side frames C121 spaced apart in parallel in the Y-axis direction. The two inner sides of the two side frames C121 facing each other are respectively provided with belts C123 driven by the driving member C122 to be synchronously linked. The second belts C123 An X-axis channel C124 recessed to the inner side of the side frame C121 is formed between the upper ends of the side frames C121 to which they are abutted, and the two belts C123 together form a part of the conveying flow path C11; two side frames C121 is also actuated by a moving mechanism C126 driven by a driving member C125 to change the distance between each other, so as to be suitable for conveying objects of different specifications; a Z-axis rod-shaped rod is provided in the feeding zone C111 The shift member C127 is driven by a driving member C128 outside the first rail frame C12 to move on a slide rail C129, and extends the rod-shaped part in the feeding area C111 for the X axis To push the substrate K from one end to the other end and enter the inspection area C112; the entrance end C114 of the conveying flow path C11 is located at one end of the feeding area C111 on the first rail C12, and the entrance end The two side frames C121 of the first rail frame C12 at C114 are respectively provided with a pressing mechanism C14. The pressing mechanism C14 includes a pressing wheel C142 that is driven to rotate by a driving member C141 composed of a motor. The wheel C142 can be moved up and down under the action of a driving member C143 formed by a pneumatic cylinder. The pressure wheel C142 is located above the belt C123 and the channel C124; a viewer is provided below the entrance end C114 near the conveying flow path C11 C15 is used to detect the bottom information of the substrate K, such as a barcode; the inspection area C112 is provided with a fixture C16; The second rail frame C13 is provided with two side frames C131 spaced apart in parallel in the Y-axis direction. The two inner sides of the two side frames C131 facing each other are respectively provided with a belt C133 driven by a driving member C132 and synchronously linked. The second belt C133 An X-axis channel C134 recessed to the inner side of the side frame C131 is formed between each of the upper ends of the side frame C131 to which it is abutted, and the two belts C133 together form another part of the conveying flow path C11; The frame C131 is actuated by a moving mechanism C136 driven by a driving member C135 to change the interval between the two to be suitable for conveying objects of different specifications; a clamping member C137 is provided in the discharge area C113, the The clamping member C137 is driven by a driving member C1371 outside the second rail frame C13 to move up and down in the Z-axis, and is driven by another driving member C1372 to move on a slide rail C1373, whereby the clamping The holder C137 descends and moves into the conveying flow path C11 in the discharge zone C113 for X-axis displacement, so as to clamp the substrate K in the inspection zone C112 and move it into the discharge zone C113, and the substrate K reaches After positioning, it is loosened and lifted away from the conveying flow path C11; below the conveying flow path C11 of the discharging area C113 is provided with a pusher C138, and the pusher C138 is provided with a pusher that can be raised and lowered in the Z-axis A1381, the pushing member C138 is linked by a belt C1383 driven by a driving member C1382, and can make X-axis displacement on an X-axis slide rail C1384 between the two side frames C131, and will be located in the discharge area C113 The substrate K in FIG. 2 is pushed out to the removal rail D3 of the second conversion device D in FIG. 2; a sensor C1391 and a stopper C1392 are provided at the discharge port C139 of the discharge area C113. The sensor C1391 is used to detect the discharge information of the substrate K. The blocking member C1392 is provided with a blocking portion C1393 capable of moving up and down in the Z-axis to control the blocking or allow the substrate K to be discharged from the discharge port C139.

Please refer to FIG. 11, the inspection unit C2 of the inspection device C is set on a Y-axis rail seat C22 that is set on an X-axis rail seat C21 elevated by a frame C211, and the rail seat C22 can be The rail seat C21 is driven for X-axis displacement, the inspection unit C2 can be driven by the rail seat C22 for Y-axis displacement, and the inspection unit C2 can be mounted on a Z of a fixed seat C23 fixed on the rail seat C22 The sliding rail C231 in the axial direction is displaced in the Z axis; the viewing unit C2 can be a CCD lens C24, which is projected by a light source through a straight slit in the Y axis along the Y axis on the lower light source holder C241 (in the figure Not shown), and inspect the ball planting condition on the substrate K (Figure 1) below by a line scan; the leveling unit C3 of the inspection device C is set on an X-axis elevated by a frame C311 On the Y-axis rail seat C32 set on the rail seat C31, the rail seat C32 can be driven by the rail seat C31 for X-axis displacement, and the leveling unit C3 can be driven by the rail seat C32 for the Y-axis Displacement; the rail seat C22 in the Y axis of the inspection unit C2 and the rail seat C32 in the Y axis of the leveling unit C3 are provided with a coupling C4, the rail seat C22 and the rail seat C32 The displacement in the X-axis is synchronously displaced while keeping a certain distance apart. On the one hand, the coupling C4 ensures the synchronous displacement relationship, and on the other hand, prevents the rail seat C22 and the rail seat C32 from colliding with each other caused by the failure. happen.

11 and 12, the leveling unit C3 is provided with a fixing frame C33 for fixing and interlocking with the rail base C32, and a horizontally arranged rectangular first fixing base C331 is fixedly arranged under the fixing frame C33. A horizontally arranged rectangular second fixed seat C332 is arranged under a fixed seat C331, and a plurality of Z-axis pivots C333 are arranged between the first fixed seat C331 and the second fixed seat C332; the fixed frame C33 includes a spacer There are two frame plates C335 with a spacing of C334 and parallel to each other. Between the two frame plates C335 is provided a driving member C336 composed of a pneumatic cylinder. The driving member C336 extends through the first fixing seat C331 with a cylinder rod (not shown in the figure) And it is linked with the second fixing base C332, and can drive the second fixing base C332 to move up and down; under the second fixing base C332, a rectangular pedestal C34 is fastened and fastened by a fastener C337, the pedestal The bottom of C34 is provided with a cushion body C341 with appropriate flexibility. The two sides of the second fixing seat C332 and the two sides of the fixing frame C33 are connected with elastic members C338 composed of tension springs, so that the driving member C336 is opposite to the second The fixing seat C332 accumulates elastic restoring force when it is driven downward; the first fixing seat C331 is provided with a hollow section C3311, and the second fixing seat C332 is protrudingly provided with a Z-axis suspension seat C3321, the suspension The seat C3321 protrudes through the hollow section C3311, and a stopper C3323 having a width greater than the width of the hollow section is transversely provided on an end C3322 above the first fixing seat C331, and a fine adjustment member C3324 is provided on the stopper C3323 And a sensing element C3325. The stopper C3323 limits the upper and lower separation distance between the second fixing base C332 and the first fixing base C331, and uses the fine adjustment member C3324 to fine-tune the distance of the distance, and uses the sensing member C3325 to perform Proximity detection is controlled by the next action signal when it is in place.

7 and 12, the fixture C16 of the inspection area C112 of the rail frame C1 is provided with a horizontally arranged rectangular first fixture seat C161, and a horizontally arranged rectangular fixture seat C161 is provided above the first fixture seat C161 The second jig seat C162, the first jig seat C161 and the second jig seat C162 are provided with a plurality of Z-axis pivot rods C163; the first jig seat C161 is provided with a rod-shaped spacer C164 A base C165 is spaced apart, and a hollow section C1651 is provided on the base C165. A driving member C166 composed of a pneumatic cylinder is disposed under the first jig seat C161. The lower end of the driving member C166 extends through the hollow section C1611 of the base C165. The upper end of the cylinder rod C1661 extends through the first jig seat C161 to be linked with the second jig seat C162, and can drive the second jig seat C162 to move up and down; above the second jig seat C162 A rectangular mold base C168 is fastened by the fastener C167. The mold base C168 is provided with a suction base C169. The suction base C169 is rectangular and is provided with a carrier mold C1691. The carrier mold C1691 is provided with a recess A rectangular accommodating area C1692, the accommodating area C1692 is provided with a substantially rectangular ring-shaped gasket C1693 composed of a flexible body, and the area enclosed by the ring-shaped gasket C1693 is provided with a rectangular plate-shaped inside The air-permeable seat C1694, the ring-shaped periphery of the gasket C1693 is higher than the surface of the air-permeable seat C1694, the air-permeable seat C1694 is provided with a plurality of air holes C1695, and the air holes C1695 can provide adsorption force by negative pressure gas; the carrier mold C1691 The number and shape of the upper accommodating area C1692, the sealing gasket C1693, and the air-permeable seat C1694 are determined by the specifications of the substrate K. The area of the substrate K is larger than the rectangular ring-shaped area of the sealing gasket C1693 and can be covered The upper edge of the rectangular ring frame shape of the sealing gasket C1693 is tight; the area enclosed by the ring frame shape of the gasket C1693 is smaller than the area of the substrate K but covers most of the area of the substrate K. In the design of the substrate K of different specifications, the substrate K may be divided into two regions, left and right, and a hollow gap is formed in the middle part between the two regions. At this time, the gasket C1693 may be set to two spaced apart to avoid the hollow gap. The ring frame shape corresponds to the left and right areas respectively, so that the area enclosed by each ring frame shape is smaller than the area of the left or right area corresponding to the substrate K but covers most of the area of the left or right area of the substrate K, so that Avoid the area enclosed by the ring frame to cover the hollow gap and cause air leakage.

Referring to FIG. 12, the removal rail frame D3 of the second conversion device D is provided with two side frames D31 spaced in parallel in the Y-axis direction, and the two inner sides of the two side frames D31 facing each other are respectively driven by a driving member D32. And the synchronously linked belt D33, the two belts D33 respectively form an X-axis channel D34 recessed inside the side frame D31 between the two belts D33 and the upper end of the side frame D31 to which they are abutted, and the two belts D33 together form a conveyor Flow path D35; two side frames D31 and a moving mechanism D36 driven by a driving member (not shown in the figure) can change the spacing between the two sides to be suitable for conveying objects of different specifications; in the conveying flow The road D35 is provided with a Z-axis rod-shaped shifting member D37. The shifting member D37 is linked by a belt D372 driven by a driving member D371 outside the two side frames D31 to move on a slide rail D373 and extend. X-axis displacement is made in the conveying flow path D35 to push the substrate K from one end to the other in FIG. 2 and discharge the removal rail D3; the removal rail D351 at the outlet end D351 of the conveying flow path D35 The two side frames D31 of D3 are respectively provided with a pressing wheel D311, the pressing wheel D311, the pressing wheel D311 is located above the belt D33, and each can be driven by a driving member D312 to rotate; the outlet end D351 At the same time, a stopper D36 is provided, and a stopper D361 that can be raised and lowered is provided on the stopper D36.

Referring to Figures 7 and 13, each frame box E2 of the collecting device E has a front and a rear opening E21 respectively, wherein the upper and lower sides of the opening E21 at the feeding end are respectively provided with corresponding to each other and recessed from the end edge. There are a plurality of rollers E12 on both sides of each slot E11 on the box seat E1, and the frame box E2 is located between the rollers E12 on both sides; each frame box E2 is provided with a gantry type The seat frame E3, the seat frame E3 is provided with a light E31 for displaying the working status of the corresponding frame box E2, and is provided with a detector E32 corresponding to the hollow section E22 in each frame box E1 to detect the feeding situation.

After the substrate K of the embodiment of the present invention is input by the conveying path A1 of the feeding device A, it will be blocked in front of the gate A5, and wait for the selective displacement corresponding to the input or output object to transport the sheet object. The conveying flow path on the loading rail B2 of the first conversion device B After B21 selectively corresponds to the conveying lane A1, the gate A5 is opened and the substrate K is released to be transferred to the loading rail B2; the substrate K in the loading rail B2 is moved by the second pusher B28 The side roller B23 is transported to the side of the side roller B23 until the gate B25 is blocked. After the loading rail B2 selectively corresponds to one of the two rails C1 in the inspection device C, the loading The gate B25 in the rail frame B2 is opened and the substrate K is released and transferred to the feeding area C111 of the rail frame C1; the substrate K transferred into the feeding area C111 will be pressed by the pressing mechanism C14 The wheel C142 executes pressing from top to bottom, so that if there is a deflection, the curved surface with the front end facing upwards is conveyed forward to the corresponding channel C124 by the belt C123, and is conveyed by the belt C123 if it has a deflection. After checking the barcode, C15 is pushed down by the dial C127 into the inspection area C112 and is located above the fixture C16; the fixture C16 will cause the driver C166 to drive the second fixture base C162 to link the mold base C168, The suction seat C169 rises to abut against the bottom surface of the substrate K and transfers the substrate K to a predetermined height, and the air hole C1695 of the suction seat C169 is passed through a negative pressure to adsorb the substrate K, and the leveling unit C3 is relatively The inspection unit C2 is first displaced to a proper height above the substrate K of the jig C16, and the driving member C336 drives the pedestal C34 to press down the substrate K with a cushion body C341 with appropriate flexibility at the bottom to make the substrate K K can smoothly press against the sealing gasket C1693 in the shape of the lower ring frame, so that the sealing gasket C1693 can fully seal the negative pressure gas, and the substrate K can be absorbed and positioned smoothly, and then the drive member C336 of the leveling unit C3 The air in the air cylinder is released, and the cushion C34 is acted on by the restoring force of the elastic member C338, and the cushion body C341 at the bottom is pulled back and lifted away from the substrate K and removed, and then the inspection unit C2 is shifted to a position at an appropriate height above the substrate K on the fixture C16 that has been leveled and positioned, so that the lens C24 can inspect the condition of the ball implantation on the substrate K below by line scanning; after the inspection is completed, the treatment The air hole C1695 on the suction seat C169 with C16 is relieved of negative pressure, and the driving member C166 drives the second jig seat C162 to link the mold seat C168 and the suction seat C169 to descend from the bottom surface of the substrate K. At this time The clamping member C137 in the discharge zone C113 will move into the conveying flow path C11 in the discharge zone C113 for X-axis displacement, and clamp the substrate K in the inspection zone C112 and move it into the In the discharging area C113, until it is stopped and positioned by the stopper C1393 of the stopper C1392, after the substrate K reaches the positioning, the clamping member C137 loosens and rises away from the conveying flow path C11. At this time, you can make a selection The conveying flow path D21 of the moving-out rail D3 of the second conversion device D corresponding to the input or output object to transport the sheet object has corresponded to the discharge of the rail C1 Under the discharge port C139 of the zone C113, the stopper C1393 of the stopper C1392 will descend, and the pusher C138 will push the substrate K located in the discharge zone C113 to the second conversion device D. Move out of the rail D3 until it is blocked and positioned by the stop portion D361 of the stopper D36, and when the exit end D351 of the move out rail D3 selectively corresponds to a predetermined frame box E2 on the collecting device E, The stopping portion D361 descends and causes the shift member D37 to push the substrate K through the pressure roller D311 at the outlet end D351 and the belt D33 to discharge the moving rail D3 to the frame box E2 for collection ; Since the sheet object of the substrate K can be pressed and pressed at the same time during adsorption and positioning, each periphery of the sheet object is adsorbed to form a flat surface, which reduces the phenomenon of flexure and deformation, so that subsequent inspection operations can be taken accurately The results of the inspection to reduce the misjudgment and defect rate.

According to the method, device and equipment for conveying a sheet object according to the embodiment of the present invention, since the conveying flow path of the loading rail B2 of the first conversion device B, the conveying flow path is offset from the back end of the sheet object to the sheet The displacement of the object can improve the unstable conveying state of the sheet object in the conveying flow path B21 due to irregular deflection, which facilitates the automation of the entire conveying process.

Please refer to Figures 14 and 15, which are schematic diagrams of another embodiment of the present invention. The parts that are the same as the original embodiment will not be repeated, and only the exceptions will be explained. The same device uses the original number; mainly the first conversion The device F is equipped with two loading rail frames F1, and the second conversion device G is equipped with two moving out rail frames G1, and the inspection device H has a jig H11 on the first rail frame H1, and the machine L1 is additionally provided on it A rail frame M forming a conveying flow path M1; one side of the rail frame H1 is provided with an X-axis rail seat H2, and the rail seat H2 is provided with a common interval that can be driven by the rail seat H2 for X-axis synchronization A displacing inspection unit H3 and a leveling unit H4; the feeding device N is provided with a first conveying part N1 and a second conveying part N2, the first conveying part N1 includes two conveying channels N11, and the second conveying part N2 Including the second conveying lane N21; Wherein, the first conveying part N1 is used to convey the substrate K that has been ball-planted and baked, and the second conveying part N2 is used to convey the substrate O that has been ball-planted but has not yet been baked; After the substrate K is input by one of the conveying lanes N11 of the first conveying part N1, after being selectively matched and accepted by the loading rail F1 on the side of the first conveying part N1 of the first conversion device F, Will be directly transferred to the rail frame H1 provided with the jig H11, and after being leveled by the leveling unit H4 and inspected by the inspection unit H3, the second conversion device G is moved out of the rail on the side of the rail frame H1 The rack G1 takes over and sends it to one of the preset frame boxes E2 of the collection device E for collection; After the substrate O is input by one of the conveying lanes N211 of the second conveying part N2, after being selectively correspondingly matched and accepted by the loading rail F1 on the side of the second conveying part N2 of the first conversion device F, Will be directly transferred to the rail frame M provided with only the conveying flow path M1, and directly transferred to the second conversion device G to be received by the moving rail frame G1 on the side of the rail frame H2, and transferred to the collection device E One of the preset boxes E2 on the box seat E1 is collected.

However, the above are only the preferred embodiments of the present invention. The scope of implementation of the present invention is limited, that is, all simple equivalent changes and modifications made according to the scope of the patent application and the description of the invention are still within the scope of the patent of the present invention.

A: Feeding device A1: Conveyor A11: Transport flow path A2: Roller A3: Outlet A4: Driver A5: Gate A6: Shield A7: guide A8: Detector A9: Driver A91: Belt B: The first conversion device B1: The first rail seat B2: Loading the rail B21: Conveying flow path B211: discharge port B22: roller B221: Driver B222: Belt B23: Side roller B24: shift piece B241: Driver B242: Slide rail B243: Driver B25: Gate B251: Driver B26: Shield B261: guide B27: Detector B28: Pushing piece B281: linkage frame B282: Driver B283: Belt B284: Slide rail C: Inspection device C1: Rail frame C11: Transport flow path C111: Feeding area C112: Inspection area C113: Discharge area C114: Entry side C12: The first rail frame C121: Side frame C122: Driver C123: Belt C124: Channel C125: Driver C126: Relocation mechanism C127: shift piece C128: Driver C129: Slide rail C13: Second rail C131: Side frame C132: Driver C133: Belt C134: Channel C135: Driver C136: Relocation mechanism C137: Clamping parts C1371: Driver C1372: Driver C1373: Slide rail C138: push parts C1381: Arrival and Push Department C1382: Driver C1383: belt C1384: Slide rail C139: Outlet C1391: Sensing part C1392: Blocking piece C1393: Blocking Department C14: Pressing mechanism C141: Driver C142: Pressure roller C143: Driver C15: Viewer C16: Fixture C161: The first fixture seat C162: The second fixture seat C163: Pivot C164: Spacer C165: Base C1651: hollow interval C166: Driver C1661: Cylinder rod C167: Fastener C168: Mould base C169: Adsorption seat C1691: Load mold C1692: accommodating interval C1693: gasket C1694: Breathable seat C1695: Stoma C2: Viewing unit C21: Rail seat C211: Seat frame C22: Rail seat C23: fixed seat C231: Slide rail C24: lens C241: light source base C3: Leveling unit C31: Rail seat C32: Rail seat C33: Fixed frame C331: The first fixed seat C3311: hollow interval C332: second fixed seat C3321: Suspension seat C3322: end C3323: stop C3324: Fine tuning pieces C3325: Sensing parts C333: Pivot C334: Spacing C335: Shelf board C336: Driver C337: Fastener C338: Elastic parts C34: Pedestal C341: Pad body C4: coupling D: The second conversion device D1: The second rail seat D2: Third rail seat D21: X axis conveying flow path D3: Remove the rail rack D31: Side frame D311: Pressure wheel D312: Driver D32: Driver D33: Belt D34: Channel D35: Conveying flow path D351: Export end D36: Relocation mechanism D361: Blocking Department D371: Driver D372: Belt D373: Slide rail E: Collection device E1: Box holder E11: Slot E12: Roller E2: Box E21: Opening E3: Seat frame E31: light signal E32: Detector F: The first conversion device F1: Load rail frame G: Second conversion device G1: Remove the rail rack H: Inspection device H1: Rail frame H11: Fixture H2: Rail seat H3: Viewing unit H4: Leveling unit K: substrate K1: Circuit section K2: Front end L: Ball planting inspection equipment L1: Machine L2: Countertop L3: interval M: Rail frame M1: Conveying flow path N: Feeding device N1: The first conveying part N11: Conveyor N2: The second conveying part N21: Conveyor O: substrate

Fig. 1 is a schematic diagram of the configuration relationship of the devices on the ball planting inspection equipment in the embodiment of the present invention. Fig. 2 is a three-dimensional schematic diagram of the configuration relationship of the devices on the ball planting inspection equipment in the embodiment of the present invention. Fig. 3 is a three-dimensional schematic diagram of the feeding device in the embodiment of the present invention. Fig. 4 is a partial schematic diagram of one side of the feeding device in the embodiment of the present invention. Fig. 5 is a three-dimensional schematic diagram of the first conversion device in the embodiment of the present invention. FIG. 6 is a partial schematic diagram of one side of the first conversion device in the embodiment of the present invention. Fig. 7 is a perspective view of one side of the rail of the inspection device in the embodiment of the present invention. Fig. 8 is a perspective view of the other side of the rail of the inspection device in the embodiment of the present invention. Fig. 9 is a schematic top view of the rail frame of the inspection device in the embodiment of the present invention. Fig. 10 is a three-dimensional schematic diagram of the pressing mechanism of the inspection device in the embodiment of the present invention. Fig. 11 is a three-dimensional schematic diagram of the erection of the inspection unit and the leveling unit of the inspection device in the embodiment of the present invention. Fig. 12 is a three-dimensional exploded schematic diagram of the leveling unit and the jig in the embodiment of the present invention. Fig. 13 is a three-dimensional schematic diagram of a second conversion device in an embodiment of the present invention. Fig. 14 is a three-dimensional schematic diagram of the collecting device in the embodiment of the present invention. FIG. 15 is a schematic diagram of the configuration relationship of each device on the ball planting inspection equipment according to the second embodiment of the present invention. FIG. 16 is a three-dimensional schematic diagram of the configuration relationship of the devices on the ball planting inspection equipment according to the second embodiment of the present invention.

B: The first conversion device

B1: The first rail seat

B21: Conveying flow path

B22: roller

B23: Side roller

B24: shift piece

B241: Driver

B242: Slide rail

B243: Driver

B25: Gate

B251: Driver

B28: Pushing piece

B281: linkage frame

K: substrate

Claims (10)

A method for transporting thin objects, including: A sheet object is conveyed by a conveying flow path; The conveying flow path is displaced by the conveying flow path from the rear end of the sheet object against the sheet object for displacement. The method for conveying a sheet object according to claim 1, wherein the conveying flow path causes the sheet object to be pushed against one side to be conveyed. The method for conveying a sheet object according to claim 1, wherein the conveying flow path is driven by a driving member constituted by a motor and is linked by a belt for active rotation. A conveying device for sheet objects, including: A conveying flow path for conveying a thin object; A shifting member is arranged on the conveying flow path and can be driven by a driving member to shift against the sheet object. According to claim 4, the sheet object conveying device, wherein the shifting member can be driven to move on a slide rail on one side. According to claim 4, the sheet object conveying device, wherein the shifting member can be driven to move up and down. The sheet object conveying device according to claim 4, wherein the conveying flow path is constituted by a plurality of rollers arranged in parallel at intervals. The sheet object conveying device according to claim 4, wherein a plurality of side rollers in the Z-axis are arranged on one side of the conveying flow path and arranged in parallel with the X-axis at intervals. According to claim 4, the sheet object conveying device, wherein the conveying flow path is provided with a detector at a discharge port to detect the discharge condition. A sheet object conveying device is used to execute the sheet object conveying method according to any one of claim items 1 to 3.

Images