TWI716935B - Method, device and equipment for inspecting sheet objects - Google Patents

Abstract

The present invention provides a thin object inspection method, device and equipment. The inspection method includes: causing a thin object to be transported by a conveying flow path; causing the thin object to be absorbed by a jig in the conveying flow path; The sheet object with adsorption is pressed down by a flattening unit; after the flattening unit is separated from the sheet object, the sheet object is inspected by a viewing unit; thereby, the sheet object can be processed on the sheet object. an examination.

Description

Method, device and equipment for inspecting sheet objects

The present invention relates to an object inspection method, device and equipment, in particular to a thin object inspection method, device and equipment for inspecting the production process results of a thin object that may be deformed during the manufacturing process.

According to the general chip, there are a variety of manufacturing processes. One is to form a plurality of circuit sections arranged in a matrix on a thin rectangular substrate, so that the substrate is cleaned, flux sprayed, and multiple solder balls are implanted in each circuit section. After placing, after baking, the process of soldering and fixing the connection and positioning of the die on the solder ball in the circuit area is used in the industry. This process is usually necessary after the ball (solder ball) is planted and baked Go through an inspection process to confirm whether the solder balls on the substrate are in the correct position.

The prior art uses sampling inspection for manual inspection. The reason is that the flaky substrate will be flexed and deformed after baking, and the direction of deformation has a variety of variables. There are longitudinal arcs and transverse arcs. There are curved upwards and downward curved. It is difficult for the operator to perform automated ball planting inspections on the curved and deformed substrates. They can only choose to remove the substrates with a small amount of deformation for manual sampling inspection, which is lacking. Efficiency, defective products may also be produced without being discovered.

The object of the present invention is to provide a sheet object inspection device suitable for inspecting thin plate objects.

Another object of the present invention is to provide a thin object inspection method using the thin object inspection device.

Another object of the present invention is to provide a device for performing the inspection method of the thin object.

Another object of the present invention is to provide a device using the thin object inspection method.

A thin object inspection device according to the object of the present invention includes: a rail frame on which a conveying flow path for conveying a thin object is formed; a jig, which is arranged in the conveying flow path, and the jig is provided with a negative pressure capable of adsorbing The sheet object; a leveling unit, which is arranged in the conveying flow path, can be displaced to the top of the jig; a viewing unit, which is arranged in the conveying flow path, can be displaced to the top of the jig.

According to another object of the present invention, a method for inspecting a thin object using the thin object inspection device includes: causing a thin object to be transported by a conveying flow path; in the conveying flow path, causing the thin object to be adsorbed by a jig ; The sheet object adsorbed by the fixture is pressed down by a flattening unit; after the flattening unit is separated from the sheet object, the sheet object is inspected with a viewing unit.

According to another object of the present invention, a thin object inspection device includes: a device for executing the thin object inspection method.

According to still another object of the present invention, a sheet object inspection device using the method for inspecting a sheet object further includes a feeding device provided with a plurality of conveying channels providing a conveying flow path for inputting the sheet object .

According to another object of the present invention, another thin object inspection device using the thin object inspection method as described above further includes a collecting device provided with a plurality of frame boxes.

According to the method, device and equipment for inspecting a thin object according to the embodiment of the present invention, since the thin object can be pressed while being adsorbed and positioned, each peripheral edge of the thin object is adsorbed It becomes a flat surface to reduce the phenomenon of deflection and deformation, so that the follow-up inspection operation can obtain accurate inspection results, and reduce the misjudgment and defect rate.

A: Feeding device

A1: Conveyor

A2: Roller

A3: Outlet

A4: Driver

A5: Gate

A6: Shield

A7: guide

A8: Detector

A9: Driver

A91: Belt

B: The first conversion device

B1: The first rail seat

B2: Loading the rail

B21: Conveying flow path

B211: discharge port

B22: roller

B221: Driver

B222: Belt

B23: Side roller

B24: dial

B241: Driver

B242: Slide rail

B243: Driver

B25: Gate

B251: Driver

B26: Shield

B261: guide

B27: Detector

B28: Pushing piece

B281: linkage frame

B282: Driver

B283: Belt

B284: Slide rail

C: Inspection device

C1: Rail frame

C11: Transport flow path

C111: Feeding area

C112: Inspection area

C113: Discharge area

C114: Entry side

C12: The first rail

C121: side frame

C122: Driver

C123: Belt

C124: Channel

C125: Driver

C126: Relocation mechanism

C127: dial

C128: Driver

C129: Slide rail

C13: Second rail

C131: side frame

C132: Driver

C133: Belt

C134: Channel

C135: Driver

C136: Relocation mechanism

C137: Clamping parts

C1371: Driver

C1372: Driver

C1373: Slide rail

C138: Pushing pieces

C1381: Arrival and Push Department

C1382: Driver

C1383: belt

C1384: Slide rail

C139: Outlet

C1391: Sensor

C1392: Blocking piece

C1393: Blocking Department

C14: Pressing mechanism

C141: Driver

C142: Pressure roller

C143: Driver

C15: Viewer

C16: Fixture

C161: The first fixture seat

C162: The second fixture seat

C163: Pivot

C164: Spacer

C165: Base

C1651: hollow interval

C166: Driver

C1661: Cylinder rod

C167: Fastener

C168: Mould base

C169: Adsorption seat

C1691: Load mold

C1692: containment interval

C1693: gasket

C1694: Breathable seat

C1695: Stoma

C2: Viewing unit

C21: Rail seat

C211: Seat frame

C22: Rail seat

C23: fixed seat

C231: Slide rail

C24: lens

C241: light source base

C3: Leveling unit

C31: Rail seat

C32: Rail seat

C33: Fixed frame

C331: The first fixed seat

C3311: hollow interval

C332: second fixed seat

C3321: suspension seat

C3322: end

C3323: Block

C3324: Fine tuning pieces

C3325: Sensor

C333: Pivot

C334: Spacing

C335: shelf board

C336: Driver

C337: Fastener

C338: Elastic parts

C34: Pedestal

C341: Pad body

C4: coupling

D: The second conversion device

D1: The second rail seat

D2: Third rail seat

D3: Remove the rail rack

D31: Side frame

D311: Pressure wheel

D312: Driver

D32: Driver

D33: Belt

D34: Channel

D35: Conveying flow path

D351: Exit

D36: Relocation mechanism

D361: Blocking Department

D371: Driver

D372: Belt

D373: Slide rail

E: Collection device

E1: Box holder

E11: Slot

E12: Wheel

E2: Box

E21: Opening

E3: Seat frame

E31: light signal

E32: Detector

F: The first conversion device

F1: Load rail frame

G: Second conversion device

G1: Remove the rail rack

H: Inspection device

H1: Rail frame

H11: Fixture

H2: Rail seat

H3: Viewing unit

H4: Leveling unit

K: substrate

K1: Circuit section

L: Ball planting inspection equipment

L1: Machine

L2: Countertop

L3: interval

M: Rail frame

M1: Conveying flow path

N: Feeding device

N1: The first conveyor

N11: Conveyor

N2: The second conveying part

N21: Conveyor

O: substrate

FIG. 1 is a schematic diagram of the configuration relationship of each device on the ball planting inspection equipment in the embodiment of the present invention.

Fig. 2 is a three-dimensional schematic diagram of the configuration relationship of the devices on the ball planting inspection equipment in the embodiment of the present invention.

Fig. 3 is a three-dimensional schematic diagram of the feeding device in the embodiment of the present invention.

Figure 4 is a partial schematic diagram of one side of the feeding device in the embodiment of the present invention.

Fig. 5 is a three-dimensional schematic diagram of the first conversion device in the embodiment of the present invention.

FIG. 6 is a partial schematic diagram of one side of the first conversion device in the embodiment of the present invention.

Fig. 7 is a perspective view of one side of the rail of the inspection device in the embodiment of the present invention.

Fig. 8 is a perspective view of the other side of the rail of the inspection device in the embodiment of the present invention.

Figure 9 is a schematic top view of the rail of the inspection device in the embodiment of the present invention.

Fig. 10 is a three-dimensional schematic diagram of the pressing mechanism of the inspection device in the embodiment of the present invention.

Fig. 11 is a three-dimensional schematic diagram of the erection of the inspection unit and the leveling unit of the inspection device in the embodiment of the present invention.

Fig. 12 is a three-dimensional exploded schematic diagram of the leveling unit and the jig in the embodiment of the present invention.

Figure 13 is a three-dimensional schematic diagram of a second conversion device in an embodiment of the present invention.

Figure 14 is a three-dimensional schematic diagram of the collecting device in the embodiment of the present invention.

FIG. 15 is a schematic diagram of the configuration relationship of each device on the ball planting inspection equipment of the second embodiment of the present invention.

FIG. 16 is a three-dimensional schematic diagram of the configuration relationship of the devices on the ball planting inspection equipment according to the second embodiment of the present invention.

Please refer to FIG. 1. The method for inspecting a thin object according to the embodiment of the present invention can be illustrated by the ball planting inspection device L shown in the figure as an example. The thin object of the embodiment of the present invention can be the ball planting inspection device to accept and complete the ball planting. (Solder ball) and baked substrate K, the substrate K is a rectangular thin object, the substrate K is provided with a plurality of circuit sections K1 arranged in a matrix, each circuit section has been planted with a plurality of supply Soldering dies of solder balls (due to the large number and too small, not shown in the figure).

Please refer to Figures 1 and 2. The ball planting inspection equipment L is equipped on the same machine L1 with: a feeding device A, which is equipped with a plurality of X-axis and provides a conveying path A1 of a conveying flow path A11 for receiving The substrate K, which has been ball-planted and baked in the previous process, is input into the ball-planting inspection equipment L; a first conversion device B is provided with a Y-axis first rail seat B1, and the first rail seat B1 is provided with a A loading rail B2 of the X-axis conveying flow path B21, the loading rail B2 can be driven by the first rail seat B1 and selectively displaced on the first rail seat B1 to selectively correspond Each conveying lane A1 on the feeding device A accepts the substrate K conveyed by the corresponding conveying lane A1; an inspection device C is provided with two rails C1 parallel to each other in the Y axis, each rail C1 respectively provide a X-axis linear transport flow path C11 so that the substrate K can be transported thereon, the transport flow path C11 is located behind the transport flow path B21 in the transport direction; the loading on the first conversion device B The rail frame B2 can selectively correspond to one of the rail frames C1, and the substrate K loaded on the rail frame B2 can be transferred to the corresponding rail frame C1; the inspection device C is provided with a device that can be driven as X, Y , A viewing unit C2 and a leveling unit C3 displaced in the Z-axis, wherein the viewing unit C2 is located above the front section of the transport flow path C11 of the rail frame C1, and can selectively correspond to one of the rail frames C1; The flat unit C3 is located above the rear section of the conveying flow path C11 of the rail frame C1, and can selectively correspond to one of the rail frames C1; A second conversion device D is provided with a Y-axis second rail seat D1, the second rail seat D1 is provided with a Z-axis third rail seat D2, and the third rail seat D2 is provided with an X-axis Move the rail frame D3 to one of the conveying flow path D21, the conveying flow path D21 is located in front of the conveying direction of the conveying flow path C11; the second rail seat D1 can drive the third rail seat D2 to link the moving out rail rack D3 as Y Axial displacement, the movable rail frame D3 can be driven by the third rail seat D2 to move up and down on the second rail seat D1, and the movable rail frame D3 uses the second rail seat D1 and the third rail seat D2 is selectively shifted to selectively correspond to each rail C1 on the inspection device C, and to receive the substrate K that has been inspected transmitted by the corresponding rail C1; the second conversion device D is located on the machine L1 Relative to the feeding device A, the first conversion device B, and the inspection device C, the table surface L2 is recessed in an interval L3; a collection device E is provided with a plurality of X axes parallel to each other with the Y axis A box seat E1 in the slot E11, each slot E11 can accommodate a frame box E2, and the derailing rack D3 of the second conversion device D can selectively correspond to one of the frame boxes E2, and The substrate K on the removal rail D3 is transferred to the corresponding frame box E2.

Please refer to Figures 3 and 4, each conveying path A1 of the feeding device A on the horizontal conveying surface is respectively composed of a plurality of Y-axis rollers A2 spaced parallel to the X-axis, and each conveying path A1 is respectively provided at the discharge port A3 with a gate A5 that can be driven up and down by a driving member A4 composed of a pneumatic cylinder for blocking or opening control. The discharge port A3 is above the discharge port A3 and the inside of the gate A5 is provided There is a shielding member A6, the shielding member A6 limits the height of the substrate K at the discharge port A3, and below the shielding member A6 is provided a guide member A7 with a downwardly inclined surface toward the discharge port A3, so that the There may be, for example, that the front end portion K2 of the substrate K that curves upward on both sides in the figure can be guided downward and blocked by the gate A5, so as to prevent the front end portion K2 from being left between the shielding member A6 and the gate A5. The gap protrudes outside; the discharge port A3 is equipped with a detector A8 to detect Material condition: Each roller A2 is driven by a driving member A9 composed of a motor and is linked by a belt A91 for active rotation.

Referring to Figures 5 and 6, the loading rail B2 of the first conversion device B on the horizontal conveying surface consists of a plurality of Y-axis rollers B22 spaced in parallel with the X-axis to form the conveying flow path B21. On one side of the loading rail B2, there are a plurality of Z-axis side rollers B23 arranged parallel to the X-axis. The conveying flow path B21 is provided with a Z-axis rod-shaped shift member B24. The shift member B24 can be driven by a driving member B241 on a slide rail B242 on the side of the side roller shaft B23 for X-axis displacement and driven by a driving member B243 for Z-axis upward and downward displacement, so as to be conveyed by the The upper part of the flow path B21 hangs down from the back end of the base plate K to push against the base plate K for X-axis displacement; the conveying flow path B21 loaded into the rail frame B2 is provided at a discharge port B211. A driving member B251 composed of a pneumatic cylinder drives a gate B25 that moves up and down for blocking or opening control. Above the discharge port B211 and inside the gate B25 is provided a shielding member B26, and the shielding member B26 restricts the substrate The height of K at the discharge port B211, below the shielding member B26, there is provided a guide member B261 with a downwardly inclined surface toward the discharge port B211, so that the possibility exists, for example, curved upward on both sides in the figure. The front end portion K2 of the substrate K can be guided downward and blocked by the gate B25, so as to prevent the front end portion K2 from protruding outside from the clearance between the shielding member B26 and the gate B25; at the discharge port B211 It is equipped with a detector B27 to detect the discharging condition; each roller B22 is driven by a driving member B221 composed of a motor and is linked by a belt B222 for active rotation; the loading rail B2 is opposite to the side The other side of the roller shaft B23 is provided with two Z-axis rod-shaped pushers B28 at intervals. The two pushers B28 are arranged on both sides of a horizontally arranged linkage frame B281. The linkage frame B281 is composed of a motor. The driving member B282 drives a belt B283 to be linked to make Y-axis displacement on a slide rail B284, and through the linkage of the two pushing members B28, the Y-axis displacement between the two rollers B22 can push the substrate K, so that The substrate K is transported against the side roller B23 on one side.

Please refer to Figures 7-10. The conveying flow path C11 formed by any of the rails C1 respectively includes a feeding area C111, an inspection area C112, and a discharging area C113 according to the order of conveyance; , The feeding area C111 and the inspection area C112 are formed by a first rail frame C12, and the discharging area C113 is formed by a second rail frame C13, the first rail frame C12 is longer than the second rail frame C13; The first rail frame C12 is provided with two side frames C121 spaced in parallel in the Y-axis direction. The two inner sides of the two side frames C121 facing each other are respectively provided with belts C123 that are driven by a driving member C122 and synchronously linked. The second belts C123 An X-axis channel C124 recessed to the inner side of the side frame C121 is formed between the upper ends of the side frames C121 to which they correspond to each other, and the two belts C123 together form a part of the conveying flow path C11; two side frames C121 is also actuated by a moving mechanism C126 driven by a driving member C125 to change the distance between each other to be suitable for conveying objects of different specifications; a Z-axis rod-shaped rod is provided in the feeding zone C111 The shift member C127 is driven by a driving member C128 outside the first rail frame C12 to move on a slide rail C129, and extends the rod-shaped part in the feeding area C111 for the X axis To push the substrate K from one end to the other end and enter the inspection area C112; the entrance end C114 of the conveying flow path C11 is located at one end of the feeding area C111 on the first rail C12, and the entrance end The two side frames C121 of the first rail frame C12 at C114 are respectively provided with a pressing mechanism C14. The pressing mechanism C14 includes a pressing wheel C142 that is driven to rotate by a driving member C141 composed of a motor. The wheel C142 can be moved up and down under the action of a driving member C143 formed by a pneumatic cylinder. The pressure wheel C142 is located above the belt C123 and the channel C124; a viewer is provided below the entrance end C114 near the conveying flow path C11 C15 is used to detect the bottom information of the substrate K, such as a bar code; the inspection area C112 is provided with a jig C16; the second rail frame C13 is provided with two side frames C131 arranged in parallel in the Y axis at intervals, two side frames The two opposite inner sides of C131 are respectively provided with belts that are driven by the driving part C132 and are synchronously linked. C133, the two belts C133 form an X-axis channel C134 recessed inside the side frame C131 between the two belts C133 and the upper end of the side frame C131 to which they are abutted, and the two belts C133 together form the other of the conveying flow path C11 One part; two side frames C131 and a moving mechanism C136 driven by a driving member C135 can change the spacing between them to be suitable for conveying objects of different specifications; in the discharge area C113 is provided Clamping member C137, the clamping member C137 is driven by a driving member C1371 outside the second rail C13 to move up and down in the Z-axis, and is driven by another driving member C1372 on a slide rail C1373 Displacement, whereby the clamping member C137 descends and moves into the conveying flow path C11 in the discharge zone C113 for X-axis displacement, so as to clamp the substrate K in the inspection zone C112 and move it into the discharge zone C113 When the substrate K reaches the position, it is loosened and lifted away from the conveying flow path C11; under the conveying flow path C11 of the discharging area C113 is provided a pusher C138, and the pusher C138 is provided with a Z The thrusting part A1381 that rises and lowers in the axial direction. The thrusting part C138 is linked by a belt C1383 driven by a driving part C1382, and can perform X-axis displacement on an X-axis slide rail C1384 between the two side frames C131, and The substrate K located in the discharging area C113 is pushed out to the removal rail D3 of the second conversion device D in FIG. 2; a sensor C1391 and a stopper are provided at the discharge port C139 of the discharging area C113 C1392. The sensor C1391 is used to detect the discharge information of the substrate K. The blocking member C1392 is provided with a blocking portion C1393 that can move up and down in the Z-axis to control blocking or allow the substrate K to exit the discharge port C139 is discharged.

Please refer to FIG. 11, the inspection unit C2 of the inspection device C is set on a rail seat C22 in the Y axis which is set on an X-axis rail seat C21 elevated by a frame C211, and the rail seat C22 can be The rail seat C21 is driven for X-axis displacement, the inspection unit C2 can be driven by the rail seat C22 for Y-axis displacement, and the inspection unit C2 can be mounted on a Z of a fixed seat C23 fixed on the rail seat C22. The axial slide rail C231 is displaced in the Z axis; the viewing unit C2 can be a CCD lens C24, which is projected by a light source through the lower light source holder C241. The Y-axis linear slits (not shown in the figure) are used to inspect the ball planting condition on the substrate K (Figure 1) below by a line scan; the leveling unit C3 of the inspection device C is set in On a Y-axis rail seat C32 set on an X-axis rail seat C31 elevated by a frame C311, the rail seat C32 can be driven by the rail seat C31 for X-axis displacement, and the leveling unit C3 can Driven by the rail seat C32 for Y-axis displacement; a connecting piece C4 is provided between the rail seat C22 in the Y axis of the inspection unit C2 and the rail seat C32 in the Y axis of the leveling unit C3 , The displacement of the rail seat C22 and the rail seat C32 in the X-axis direction is synchronously displaced while keeping a certain distance apart. The coupling C4 on the one hand ensures the synchronous displacement relationship, and on the other hand prevents the rail from malfunctioning. The collision between the seat C22 and the rail seat C32 occurred.

Referring to Figures 11 and 12, the leveling unit C3 is provided with a fixing frame C33 for fixing and interlocking with the rail base C32, and a horizontally arranged rectangular first fixing base C331 is fixedly arranged under the fixing frame C33. A horizontally arranged rectangular second fixed seat C332 is arranged under a fixed seat C331, and a plurality of Z-axis pivots C333 are arranged between the first fixed seat C331 and the second fixed seat C332; the fixed frame C33 includes a spacer Two frame plates C335 with a spacing of C334 and parallel to each other, between the two frame plates C335 is provided a driving member C336 composed of a pneumatic cylinder, and a cylinder rod (not shown in the figure) extends through the first fixing seat C331. And it is linked with the second fixing base C332, and can drive the second fixing base C332 to move up and down; under the second fixing base C332, a rectangular pedestal C34 is fastened by a fastener C337, the pedestal The bottom of the C34 is provided with a cushion body C341 with appropriate flexibility. The two sides of the second fixing seat C332 and the two sides of the fixing frame C33 are connected with an elastic member C338 composed of a tension spring, so that the driving member C336 is opposite to the second The fixing seat C332 accumulates an elastic restoring force when it is driven downward; the first fixing seat C331 is provided with a hollow section C3311, and the second fixing seat C332 is protrudingly provided with a suspension seat C3321 in the Z-axis direction. The seat C3321 protrudes through the hollow section C3311, and on one end C3322 above the first fixing seat C331, a stopper C3323 having a width greater than the width of the hollow section is transversely provided, and a stopper C3323 is provided on the stopper C3323 There are a fine adjustment member C3324 and a sensing member C3325. The stop member C3323 limits the upper and lower separation distance between the second fixing seat C332 and the first fixing seat C331, and uses the fine adjustment member C3324 to fine-tune the distance of the distance, and the sensing The test piece C3325 performs proximity detection to perform the next motion signal control when it is in place.

7 and 12, the fixture C16 of the inspection area C112 of the rail frame C1 is provided with a horizontally arranged rectangular first fixture seat C161, and a horizontally arranged rectangular fixture seat C161 is provided above the first fixture seat C161 A second jig seat C162. A plurality of Z-axis pivot rods C163 are provided between the first jig seat C161 and the second jig seat C162; a rod-shaped spacer C164 is provided under the first jig seat C161 A base C165 is spaced apart, a hollow section C1651 is provided on the base C165, a driving member C166 composed of a pneumatic cylinder is disposed under the first jig seat C161, and the lower end of the driving member C166 extends through the hollow section C1611 of the base C165 , The upper end of the cylinder rod C1661 extends through the first fixture seat C161 to be linked with the second fixture seat C162, and can drive the second fixture seat C162 to move up and down; above the second fixture seat C162 A rectangular mold base C168 is fastened by the fastener C167. The mold base C168 is provided with a suction base C169. The suction base C169 is rectangular and is provided with a carrier mold C1691. The carrier mold C1691 is provided with a recess A rectangular accommodating area C1692, the accommodating area C1692 is provided with a substantially rectangular ring-shaped gasket C1693 composed of a flexible body, and the area enclosed by the ring-shaped gasket C1693 has a rectangular plate-shaped inside The air-permeable seat C1694, the ring-shaped periphery of the gasket C1693 is higher than the surface of the air-permeable seat C1694, the air-permeable seat C1694 is provided with a plurality of air holes C1695, the air holes C1695 can provide adsorption force by negative pressure gas; the carrier mold C1691 The number and shape of the upper accommodating area C1692, the sealing gasket C1693, and the air-permeable seat C1694 are determined by the specifications of the substrate K. The area of the substrate K is larger than the rectangular ring-shaped area of the gasket C1693 and can be covered The upper edge of the rectangular ring frame shape of the sealing pad C1693 is tight; the area enclosed by the ring frame shape of the sealing pad C1693 is smaller than the area of the substrate K but covers most of the area of the substrate K. Different specifications In the design of the substrate K, the substrate K may be divided into two regions, left and right, and a hollow gap is formed in the middle part between the two regions. At this time, the gasket C1693 may be set in two ring-frame shapes separated by a distance to avoid the hollow gap. Corresponding to the left and right areas respectively, so that the area enclosed by each ring frame is smaller than the area of the left or right area corresponding to the substrate K but covers most of the area of the left or right area of the substrate K, so that the ring frame can be avoided The area enclosed by the shape covers the hollowed-out gap, causing deflation.

Please refer to FIG. 12, the removal rail frame D3 of the second conversion device D is provided with two side frames D31 spaced in parallel in the Y-axis direction, and the two inner sides of the two side frames D31 facing each other are respectively driven by a driving member D32. The synchronously linked belt D33 and the two belts D33 respectively form an X-axis channel D34 recessed inside the side frame D31 between the upper ends of the two belts D33 and the corresponding side frame D31. The two belts D33 together form a conveyor Flow path D35; two side frames D31 and a moving mechanism D36 driven by a driving member (not shown in the figure) can change the spacing between them to be suitable for conveying objects of different specifications; in the conveying flow The road D35 is provided with a Z-axis rod-shaped shift member D37. The shift member D37 is linked by a belt D372 driven by a driving member D371 outside the two side frames D31 to move on a slide rail D373 and extend X-axis displacement is made in the conveying flow path D35 to push the substrate K from one end to the other end in FIG. 2 and discharge the removal rail D3; the removal rail D351 at the exit end D351 of the conveying flow path D35 The two side frames D31 of D3 are respectively provided with a pressing wheel D311, the pressing wheel D311, the pressing wheel D311 is located above the belt D33, and each can be driven by a driving member D312 to rotate; the outlet end D351 At the same time, a stopper D36 is provided, and a stopper D361 that can be raised and lowered is provided on it.

Referring to Figures 7 and 13, each frame box E2 of the collection device E has front and rear openings E21, respectively, wherein the upper and lower sides of the opening E21 at the feeding end are respectively provided with corresponding and recessed ends There are a plurality of rollers E12 on both sides of each slot E11 on the box seat E1, and the frame box E2 is located between the rollers E12 on both sides; each frame box E2 A gantry-like seat frame E3 is provided on the upper side. The seat frame E3 is provided with a light E31 to display the working status of the corresponding frame box E2, and a detector corresponding to the hollow section E22 in each frame box E1 E32 to detect the feeding condition.

After the substrate K of the embodiment of the present invention is input by the conveying path A1 of the feeding device A, it will be blocked in front of the gate A5, and wait for the selective displacement corresponding to the input or output object to transport the sheet object. After the conveying channel B21 on the loading rail B2 of the first conversion device B selectively corresponds to the conveying channel A1, the gate A5 is opened and the substrate K is released to be transferred to the loading rail B2; The substrate K loaded in the rail B2 is transported to the gate B25 to be stopped by the second pushing member B28 moving toward the side of the side roller shaft B23. When the loading rail B2 is selectively After corresponding to one of the two rail racks C1 in the inspection device C, the gate B25 loaded in the rail rack B2 is opened and the substrate K is released and transferred to the feeding area C111 of the rail rack C1; The substrate K in the feeding area C111 will be pressed from top to bottom by the pressing wheel C142 of the pressing mechanism C14, so that the curved surface with the front end facing upwards will be conveyed forward under the restricted pressing. To the corresponding channel C124, it is conveyed by the belt C123, and after the barcode is checked by the viewer C15, it is pushed down by the dial piece C127 into the inspection area C112 and is located above the fixture C16; the fixture C16 will make The driving member C166 drives the second jig seat C162 to link the mold seat C168 and the suction seat C169 up to the bottom surface of the substrate K and transfer the substrate K to a predetermined height, and the air hole C1695 of the suction seat C169 is blocked The substrate K is adsorbed by negative pressure, and the leveling unit C3 is displaced to a proper height above the substrate K of the jig C16 before the inspection unit C2, and the driving member C336 drives the pedestal C34 to A cushion body C341 with appropriate flexibility at the bottom presses down the substrate K, so that the substrate K can be smoothly pressed against the ring-shaped gasket C1693 below, so that the gasket C1693 can fully seal the negative pressure gas and make the substrate K flat After the ground is adsorbed and positioned, the driving member C336 of the leveling unit C3 is then made to vent the air in the air cylinder, so that the cushion C34 is acted on by the restoring force of the elastic member C338 together with the cushion body C341 at the bottom. It is pulled back and lifted away from the substrate K and moved away, and then continues to move from the inspection unit C2 to a position at a proper height above the substrate K on the jig C16 that has been flatly positioned, so that the lens C24 is scanned in a line Inspect the ball planting condition on the substrate K below; after the inspection is completed, the air hole C1695 on the suction seat C169 of the fixture C16 is relieved of negative pressure, and the driving member C166 drives the second fixture The seat C162 links the mold seat C168 and the adsorption seat C169 down and away from the bottom surface of the substrate K. At this time, the clamping member C137 in the discharge area C113 will move into the conveying flow path C11 in the discharge area C113 as X Axial displacement, and clamp the substrate K in the inspection area C112 and move it into the discharging area C113 until it is blocked and positioned by the blocking portion C1393 of the blocking member C1392. After the substrate K reaches the positioning, the clamping The piece C137 is released again and rises away from the conveying flow path C11. At this time, the conveying flow path D21 of the removal rail D3 of the second conversion device D that can be selectively displaced corresponding to the input or output object to convey the sheet object Corresponding to the discharge port C139 of the discharging area C113 of the rail frame C1, the blocking portion C1393 of the blocking member C1392 will descend, and the blocking member C138 will be positioned on the substrate in the discharging area C113 K is pushed out into the removal rail D3 of the second conversion device D until it is resisted and positioned by the blocking portion D361 of the blocking member D36, and the outlet end D351 of the removal rail D3 selectively corresponds to the collecting device E When a predetermined frame box E2 is placed on the upper part, the blocking portion D361 is lowered and the shifting member D37 is pushed against the base plate K and is discharged out of the rail between the pressing wheel D311 and the belt D33 at the outlet end D351 D3 into the box E2 for collection.

In the method, device and equipment for inspecting a thin object according to the embodiment of the present invention, since the thin object of the substrate K can be pressed and pressed at the same time during adsorption and positioning, each peripheral edge of the thin object can be adsorbed to form a flat surface, which reduces the deflection. The phenomenon of warp and deformation enables the subsequent inspection operations to obtain accurate inspection results, reducing misjudgments and defective rates.

Please refer to Figures 14 and 15, which are schematic diagrams of another embodiment of the present invention, in which the same parts as the original embodiment will not be repeated, and only the exceptions will be explained. The same devices use the original numbers; Mainly, the first conversion device F is equipped with two loading rail frames F1, and the second conversion device G is equipped with two removal rail frames G1, and the inspection device H is equipped with a jig H11 on the first rail frame H1, and the machine L1 is additionally provided with a rail frame M on which a conveying flow path M1 is formed; one side of the rail frame H1 is provided with an X-axis rail seat H2, and the rail seat H2 is provided with a common distance between the rail seat H2 Drives a viewing unit H3 and a leveling unit H4 for synchronous displacement in the X axis; the feeding device N is provided with a first conveying part N1 and a second conveying part N2. The first conveying part N1 includes two conveying channels N11, The second conveying part N2 includes two conveying lanes N21; wherein, the first conveying part N1 is used to convey the substrate K that has been planted and baked, and the second conveying part N2 is used to convey the completed planting But the substrate O that has not been baked; after the substrate K is input by one of the conveying lanes N11 of the first conveying portion N1, it is loaded by the loading rail on the side of the first conveying portion N1 of the first conversion device F After the frame F1 is selectively corresponding and accepted, it will be directly transmitted to the rail frame H1 provided with the fixture H11, and after being leveled by the leveling unit H4 and inspected by the inspection unit H3, it is leaned by the second conversion device G The removal rail G1 on the side of the rail H1 is received and transported to one of the preset frame boxes E2 of the collection device E for collection; the substrate O is input by one of the conveying lanes N211 of the second conveying part N2, and is After the loading rail F1 on the side of the second conveying part N2 of the first conversion device F is selectively corresponding and accepted, it will be directly transferred to the rail M with only the conveying flow path M1, and It is directly transferred to the second conversion device G to be received by the removal rail G1 on the side of the rail H2, and transferred to one of the preset frame boxes E2 on the box seat E1 of the collecting device E for collection.

However, the foregoing are only preferred embodiments of the present invention, and should not be used to limit the scope of implementation of the present invention, that is, simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the description of the invention, All are still within the scope of the invention patent.

A: Feeding device

B: The first conversion device

C: Inspection device

D: The second conversion device

E: Collection device

K: substrate

L: Ball planting inspection equipment

L1: Machine

L2: Countertop

L3: interval

Claims (13)

A thin object inspection device, comprising: a rail frame on which a conveying flow path for conveying a thin object is formed; a jig, arranged in the conveying flow path, and the jig is provided with a negative pressure to absorb the thin object; A leveling unit is arranged in the conveying flow path and can be displaced above the jig; and a viewing unit is arranged in the conveying flow path and can be displaced above the jig. As described in the first item of the scope of patent application, the rail frame includes a first rail frame with a feeding area and an inspection area, and a second rail frame with a discharge area. A method for inspecting a sheet object, using the sheet object inspection device as described in any one of items 1 to 2 of the scope of patent application, includes: making a sheet object be transported by the conveying flow path; making the sheet object be transported in the conveying flow path The fixture is adsorbed; the sheet object adsorbed by the fixture is pressed down by the flattening unit; after the flattening unit is separated from the sheet object, the inspection unit is used to inspect the sheet object. For example, the method for inspecting a thin object according to item 3 of the scope of patent application includes: the jig is vented into a gasket with negative pressure, and the thin object is placed on the gasket and moved to a predetermined height. For example, the sheet object inspection method described in item 3 of the scope of patent application includes: the sheet object conveyed into the conveying flow path is pressed from top to bottom, so that the front end of the sheet object is conveyed forward under the restriction . For example, the method for inspecting sheet objects described in item 3 of the scope of patent application includes: one of the front or back of the conveying direction of the conveying flow path is provided with a conveying flow that can be selectively displaced corresponding to the input or output object to convey the sheet object road. For example, the sheet object inspection method described in item 3 of the scope of patent application, the conveying flow path includes the feeding area, the inspection area, and the discharge area according to the order of conveyance; the sheet object is pushed by The feeding area enters the inspection area; the sheet object in the inspection area is moved into the discharge area in a clamping manner. As the method for inspecting a thin object described in item 3 of the scope of patent application, the leveling unit and the inspection unit can be synchronized and linked in the X axis. A thin object inspection device includes: a device for executing the thin object inspection method as described in any one of items 3 to 8 in the scope of patent application. A sheet object inspection equipment, which uses the sheet object inspection method described in any one of items 3 to 8 of the scope of the patent application, and further includes a feeding device provided with a plurality of conveying channels providing conveying flow paths. To import the sheet object. For example, the sheet object inspection equipment described in item 10 of the scope of patent application, wherein the feeding device is provided with a first conveying part and a second conveying part, and the first conveying part is used for conveying the balls that have been planted and baked The substrate, the second conveying part is used to convey the substrate that has been ball-planted but not yet baked. Such as the sheet object inspection equipment described in item 11 of the scope of patent application, wherein the substrate input by the first conveying part is leveled by the leveling unit and inspected by the inspection unit; the substrate input by the second conveying part is directly conveyed A rail rack with only one conveying flow path is provided and transported to a collection device for collection. A thin object inspection equipment, which uses the thin object inspection method described in any one of items 3 to 8 in the scope of the patent application, further includes a collection device with a plurality of frame boxes.

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