TW202122941A - Calibration device, calibration method and operating equipment applied thereto capable of adjusting and compensating the operating position of the working device to have a precise alignment - Google Patents

Abstract

Disclosed are a calibration device and a calibration method. A carrier detection program is used for obtaining the position of the supporting part of a carrier after deformation, and implementing the working device detection program; the calibration mechanism of the calibration device is used for obtaining the distance between the calibration part of the calibration workpiece and the working device of the operating unit, so as to know the distance between the first center position of the working imager of the operating unit and the working device; an alignment procedure is executed in order to enable the first center of the working imager to be aligned with the third center of the carrier, so that the deviation between the working device and the supporting part can be obtained; a calibration procedure of the working device is then executed, which is used for calculating a compensation value by using a control mechanism of the calibration device based on the deviation, so as to adjust and compensate the operating position of the working device, thereby having the working device and the supporting part to be precisely aligned, which achieves the practical benefit of improving the accuracy of the operation.

Description

Correction device, correction method and working equipment for application thereof

The present invention provides a calibration device and a calibration method that can accurately align the working device of the working unit and the supporting part of the holder, thereby improving the working accuracy.

Nowadays, the working equipment is based on the working device (such as the shifter or CCD or cleaner) of the working unit (such as the material moving unit or the inspection unit or the cleaning unit) on different holders (such as the stage or the tester or the preheating unit). plate ) Carry out the material transfer operation of picking and placing electronic components, or perform the inspection operation of the image receiving component, or perform the cleaning operation of cleaning the supporting parts; since the electronic components will be used in high temperature or low temperature places in the future, In order to ensure the quality of electronic components, the industry must perform thermal or cold testing of electronic components. For example, thermal testing of electronic components. The operating equipment is equipped with a carrier for the carrier, and the carrier has multiple accommodating slots. The supporting part is used to hold the electronic components, and the heating element is arranged on the stage to heat up the electronic components to be tested. One is the operating unit of the material moving unit, which is equipped with multiple operating devices as the material moving device. And use a plurality of shifters to move the plurality of electronic components to be tested into the plurality of accommodating slots of the carrier, the carrier is in the process of carrying the plurality of electronic components, that is, the heating element is used to preheat the plurality of electronic components. , And shorten the heating operation time of a plurality of electronic components in a plurality of testers; However, under the increasingly sophisticated and miniaturized design of electronic components, the accuracy requirements for the shifter to move the electronic components into the accommodating slot of the carrier are quite high. However, because the carrier is easily affected by the high temperature of the heating element, the expansion and deformation increase, which causes the position of the plurality of accommodating grooves to shift, but the working position of the material shifter is based on the position of the accommodating groove of the carrier before the deformation The relative configuration results in a deviation between the working position of the shifter and the position of the receiving slot of the deformed carrier, so that the shifter cannot accurately move the electronic components into the receiving slot of the deformed carrier, which affects subsequent operations or collisions. Damage to electronic components.

The first object of the present invention is to provide a calibration device for calibrating a working unit with a working imager and a working device. The calibration device includes a calibration mechanism and a control mechanism. The calibration mechanism is provided with a calibration imager and a calibration piece. The calibration piece It is equipped with a calibration unit. The calibration imager is an operating device that captures the calibration unit and operation unit of the calibration part; the control mechanism has a controller to receive the image data transmitted by the calibration imager and analyze it The distance between the operating device and the operating imager; in order to obtain the initial position of the operating device, it can be used to correct and adjust the actual operating position of the operating device to achieve the practical benefit of improving the accuracy of the operation.

The second objective of the present invention is to provide a calibration device, which further includes an adjustment mechanism. The adjustment mechanism is provided with at least one adjuster for correcting the deviation between the second center of the imager and the calibration part of the calibration part. The adjuster adjusts the position of the calibrated image taker, so as to accurately capture the operating device of the operating unit, and achieve the practical benefit of improving the accuracy of the calibration.

The third object of the present invention is to provide a calibration device, the calibration part of the calibration part can be used to capture images of the working imager of the working unit, so that the working unit can adjust the first center of the working imager to accurately align the calibration part The alignment part makes the first center of the working imager accurately align with the second center of the calibration imager to facilitate the analysis of the distance between the working imager and the working imager to achieve the practical benefit of improving the accuracy of the calibration.

The fourth object of the present invention is to provide a calibration method in which the carrier detection program is to obtain the position of the supporting part of the carrier after deformation, and the working tool detection program is executed to obtain the calibration by the calibration mechanism of the calibration device The distance between the alignment part of the piece and the working device of the working unit to know the distance between the first center position of the working imager of the working unit and the working device. The center is aligned with the third center of the supporting device to know the deviation amount between the working device and the supporting part, and then the working device adjustment program is executed, and the control mechanism of the correction device calculates the compensation value according to the deviation amount , To adjust the working position of the compensation working device to make the working device and the supporting part accurately align, to achieve the practical benefit of improving the accuracy of the operation.

The fifth object of the present invention is to provide a working equipment using a calibration device, including a machine, a feeding device, a receiving device, a working device, a calibration device of the present invention, and a central control device. The feeding device is arranged on the machine and At least one feeder is provided to accommodate the electronic components to be operated; the receiving device is arranged on the machine, and at least one receiver is provided to accommodate the electronic components that have been operated; the operating device is arranged on the machine The table is equipped with at least one holder and at least one working unit. The holder is for holding electronic components. The working unit is equipped with a working device and a working imager, and the working device is used to perform preset operations on the electronic components; The calibration device of the invention is configured in the machine and includes a calibration mechanism and a control mechanism to calibrate electronic components; the central control device is used to control and integrate the actions of each device to perform automated operations and achieve practical benefits of enhancing operational performance.

In order to enable your reviewer to have a better understanding of the present invention, a preferred embodiment is given with the accompanying drawings. The details are as follows:

Please refer to Figures 1, 2 and 3, the working equipment of the present invention includes a machine 10, a feeding device 20, a receiving device 30, a working device 40, a correction device 50 of the present invention, and a central control device (not shown); The material device 20 is arranged on the machine table 10 and is provided with at least one feeder 21 for accommodating electronic components to be operated; the material receiving device 30 is arranged on the machine table 10 and is provided with at least one material receiver 31, To accommodate the electronic components that have been operated; the working device 40 is arranged on the machine 10, and is provided with at least one holder and at least one working unit. The holder is for holding the electronic components, and the working unit is provided with a working device and a working unit. Take the imager, and use the operating device to perform preset operations on the electronic components; further, the holder can be a stage or a tester or a pre-warming plate, and the operating unit can be a material transfer unit, an inspection unit or a cleaning unit, and an operating device It can be a material shifter or a CCD or a cleaner; in this embodiment, the working device 40 is provided with a first holder, a second holder, and a third holder, and the first holder is the first holder. The center of the carrier 41 is the third center L3. The first carrier 41 is also provided with a plurality of first supporting parts that are the first accommodating grooves 411 for holding electronic components to be operated, and at least A susceptor is provided with at least one temperature control for temperature control electronic components. The temperature control can be a heating element, a cooling chip or a pre-warming fluid. In this embodiment, the first carrier 41 is provided with It is the temperature control of the heating element 412 for preheating the electronic components; the second holder is the second carrier 42 and is provided with a plurality of second holders which are the second accommodating grooves 421 for supplying Hold the electronic components that have been operated; the third holder is a tester, which includes an electrically connected circuit board 431 and a test socket 432 with electrical sockets (such as probes) for testing electronic components; Furthermore, the working device 40 is provided with a first working unit, a second working unit, and a third working unit. The first working unit is provided with a first working imager 441 and a plurality of first workings which are the first shifters 442 The center of the first shifter 442 is the first center L1, and the first shifter 442 transfers the electronic components to be operated between the feeding device 20, the calibration device 50 and the first carrier 41. The second operating unit is provided with a second operating imager 451 and a plurality of second operating devices that are second shifters 452, to take out the electronic components to be operated on the first stage 41, and transfer the electronic components and Press against the test base 432 to perform the test operation, and transfer the operated electronic components of the test base 432 to the second stage 42, and the second stage 42 loads the operated electronic components The third operating unit is provided with a third operating imager 461 and a plurality of third operating devices that are third shifters 462. The third shifter 462 takes out the electronic components that have been operated on the second stage 42. According to the operation result, the electronic components that have been operated are transferred to the receiving device 30 for sorting and storage; the central control device is used to control and integrate the actions of each device to perform automated operations to achieve practical benefits of improving the operation efficiency.

The calibration device 50 is disposed on the machine table 10 and includes a calibration mechanism 51 and a control mechanism 52, and further includes a base 53 and an adjustment mechanism 54.

The calibration mechanism 51 is provided with a calibration part 511 and a calibration imagefinder 512. The calibration part 511 is provided with a calibration part 5111. Furthermore, the calibration part 511 can be assembled on the machine table 10 or the base 53, and the calibration part 511 can be used as a fixed type. Disposable or displaceable in at least one direction, the alignment part 5111 can be a marking pattern or a marking block; in this embodiment, the alignment element 511 is made of transparent material, and is provided with a marking pattern at a preset position. A support frame 5112 is installed at the end of the calibration part 511 far away from the calibration part 5111; the calibration image picker 512 is an operating device that captures the calibration part 5111 of the calibration part 511 and the operating unit. The image taker 512 can be assembled on the machine table 10 or the base 53, the correction image taker 512 can be configured in a fixed configuration or can be configured to be displaced in at least one direction, and the correction image taker 512 can be arranged above or below the calibration element 511. Or it can be used with a diamond mirror to be arranged on the side of the calibration part 511; in this embodiment, the correction imager 512 is a CCD, and its center is the second center L2, and the correction imager 512 is located on the calibration part 511 Below, the alignment part 5111 of the image calibration element 511 and a plurality of first shifters 442 are provided.

The control mechanism 52 has a controller 521 to receive the image data transmitted by the calibration imager 512 of the calibration mechanism 51 and analyze the distance between the operating device and the operating imager to obtain the initial position of the operating device for calibration adjustment The actual operating position of the operating device; in this embodiment, the controller 521 can receive the image data of the calibration unit 5111 and the image data of the plurality of first shifters 442 transmitted by the calibration image capture device 512, and the controller 521 And receive the image data of the first carrier 41 transmitted by the first operating imager 441 The control mechanism 52 further includes a database 522. The database 522 has reference image data of the operating device for the controller 521 for a comparative analysis. In this embodiment, the database 522 has the reference image of the first carrier 41 data.

The base 53 is used to assemble the calibration mechanism 51. In this embodiment, the base 53 is provided with a bottom plate 531 and a side plate 532. The bottom plate 531 is used to assemble the calibration imager 512 of the calibration mechanism 51, and the side plate 532 and the calibration piece 511 are supported. A first driving source 533 is arranged between the frames 5112, and the first driving source 533 drives the support frame 5112 of the calibration element 511 to move in a first direction (such as the Z direction) to adjust the working height of the calibration element 511.

The adjustment mechanism 54 is equipped with a correction imager 512 or a base 53 for adjusting the position of the correction imager 512 or the base 53. In this embodiment, the adjustment mechanism 54 is provided with at least one adjuster 541. 541 is mounted under the correction imager 512 for adjusting the position of the correction imager 512.

Please refer to FIGS. 4 to 8 (see FIGS. 1 to 3 for reference). The calibration method of the present invention includes a carrier detection program 551, a working device detection program 552, an alignment program 553, and a working device calibration program 554.

The supporting device detection program 551 is to obtain the position of the supporting part of the supporting device after deformation; the supporting device detection program 551 further includes the creation of a supporting device sample program, which is the data of the control mechanism 52 The database 522 establishes the base image data of the holder. In this embodiment, the procedure of creating the holder sample is to create the base image data of the first stage 41 in the database 522 of the control mechanism 52; the holder detection program 551 It uses the working imager of the working unit to take an image of the deformed holder, and transmits the image data to the controller 521 of the control mechanism 52; in this embodiment, when the first stage 41 expands and deforms due to heat Because the first stage 41 has a plurality of positioning points 413, the carrier detection program 551 uses the first working imager 441 to capture the plurality of positioning points 413 of the deformed first stage 41, and The image data of the plurality of positioning points 413 are transmitted to the controller 521 of the control mechanism 52. The controller 521 of the control mechanism 52 can calculate the deformation amount of the first stage 41 from the plurality of positioning points 413, or the deformation of the first stage 41 The image data of the carrier 41 and the reference image data of the first carrier 41 of the database 522 are compared and analyzed. The above methods can obtain the position of the first receiving slot 411 of the first carrier 41 after the deformation, so that the controller 521 The position of the first accommodating groove 411 of the first carrier 41 after deformation is known.

The working device detection program 552 uses the calibration mechanism 51 of the calibration device 50 to obtain the distance between the calibration part 5111 of the calibration piece 511 and the working device of the working unit, so as to know the position of the first center L1 of the working imager of the working unit and The distance of the working device; in this embodiment, the first working unit drives the first material shifter 442 to move above the calibration member 511 of the calibration device 50 according to the preset stroke, and the calibration imager 512 is calibrated relative to the calibration imager 512 512 is to capture the alignment part 5111 and the first material shifter 442 to obtain the distance between the alignment part 5111 and the first material shifter 442, and then the first center L1 of the first working imager 441 and the alignment element 511 The alignment part 5111 is used as a center alignment requirement, and the relative position of the first operating imager 441 and the first shifter 442 can be obtained. , When the plurality of first material shifters 442 sequentially move to the top of the calibration member 511 for capturing images, the relative positions between the plurality of first material shifters 442 and the first working imager 441 can be obtained, and The data is transmitted to the controller 521 of the control mechanism 52.

The working device detection program 552 further includes a working imager calibration program. The working imager calibration program is performed before the calibration imager 512 takes the image of the working device, using the first center L1 of the working imager and the calibration piece The calibration unit 512 of 511 performs calibration; in this embodiment, before the calibration image capture device 512 performs image capture of the plurality of first shifters 442, the first operating unit drives the first operating image capture device 441 to move to Above the calibration part 511, the first center L1 of the first working imager 441 and the calibration part 5111 of the calibration part 511 are calibrated and aligned to facilitate the correct acquisition of a plurality of first shifters 442 and the first working fetching device. The relative position between the imagers 441.

The working device detection program 552 further includes a calibration imager calibration program. The calibration imager calibration program is used to calibrate the second center L2 system of the imager 512 and the calibration part 511 before the operation imager calibration program is executed. In this embodiment, the calibration imager 512 is the calibration part 5111 of the calibration piece 511. If there is an error, the compensation value can be added by the controller 521, or the adjustment mechanism 54 can be used. The adjuster 541 adjusts the position of the calibration imager 512, so that the second center L2 of the calibration imager 512 is aligned with the calibration part 5111 of the calibration piece 511, so that the calibration imager 512 can correctly capture the first shifting material 442 location.

The operating device detection program 552 further includes calibration imager and operating imager calibration program. The calibration imager and operating imager calibration program are executed after the operating imager calibration program is executed, so that the operating image can be captured. The first center L1 of the camera is aligned with the second center L2 of the calibration imager 512; in this embodiment, when the calibration part 5111 of the calibration element 511 is respectively aligned with the first center of the first working imager 441 After L1 and the second center L2 of the correction imager 512 are calibrated and aligned, the first center L1 of the first working imager 441 and the second center L2 of the correction imager 512 can be calibrated and aligned to The position of the first shifter 442 can be correctly captured by the image capturing device 512.

The alignment program 553 is based on the first center of the working imager to align the third center of the holder , In order to know the amount of deviation between the working device and the supporting part; in this embodiment, the alignment program 553 is aligned and deformed by the first center L1 of the first working imager 441. Three centers L3, and then obtain the relative position between the third center L3 of the first carrier 41 and the plurality of first shifters 442, so that the controller 521 of the control mechanism 52 knows the plurality of first shifters 442 and the deformation The deviation amount of the plurality of first accommodating grooves 411 of the rear first carrier 41.

The working device calibration program 554 uses the control mechanism of the calibration device to calculate the compensation value according to the deviation amount, and adjusts the working position of the compensation working device to make the working device and the supporting part accurately align; in this embodiment, the control mechanism After the controller 521 of 52 knows the deviation between the plurality of first shifters 442 and the plurality of first accommodating grooves 411 of the deformed first carrier 41, due to the first center of the first working imager 441 L1 is aligned with the third center L3 of the first stage 41, that is, the first center L1 of the first working imager 441 can be used as a reference, and the compensation value is added to the position value of the plurality of first shifters 442 to adjust The actual operating positions of the plurality of first shifters 442 enable the plurality of first shifters 442 to be precisely aligned and deformed. The plurality of first accommodating grooves 411 of the first carrier 41 make the plurality of first shifters 442 accurately picks and places electronic components in the plurality of first accommodating grooves 411 of the first carrier 41 after deformation.

10: Machine 20: Feeding device 21: feeder 30: Receiving device 31: Receiver 40: operating device 41: First stage 411: first housing tank 412: heating element 413: Anchor Point 42: second stage 421: second holding tank 431: Circuit Board 432: Test Block 441: First job imager 442: first shifter 451: Second job imager 452: Second Shifter 461: Third job imager 462: Third Shifter 50: Calibration device 51: Correction mechanism 511: Calibration part 5111: School Position Department 5112: Support frame 512: Calibration viewfinder 52: control mechanism 521: Controller 522: Database 53: Pedestal 531: bottom plate 532: Side Panel 533: first drive source 54: adjustment mechanism 541: Adjuster 551: Holder detection program 552: Working device detection program 553: Alignment Program 554: Work Device Calibration Program L1: First center L2: second center L3: Third Center

Figure 1: Schematic diagram of the working equipment of the present invention. Figure 2: The layout diagram of the holder, working unit and calibration device of the present invention. Figure 3: A schematic diagram of the calibration device of the present invention. Figure 4: Flow chart of the calibration method. Figure 5: Schematic diagram of the calibration method (1). Figure 6: Schematic diagram of the calibration method (2). Figure 7: Schematic diagram of the calibration method (3). Figure 8: Schematic diagram of the calibration method (4). Figure 9: Schematic diagram of the calibration method (5).

41: First stage

411: first housing tank

441: First job imager

442: first shifter

50: Calibration device

511: Calibration part

512: Calibration viewfinder

52: control mechanism

521: Controller

522: database

53: Pedestal

54: adjustment mechanism

L1: First center

L3: Third Center

Claims (10)

A calibration device for calibrating a working unit with a working imager and working device. The calibration The positive device contains: Calibration mechanism: a calibration part and a calibration imager are provided, and the calibration part is provided with at least one calibration unit , The calibration imager captures the calibration part and the operation unit of the calibration part The operating device; Control mechanism: it has a controller to receive the transmission of the correction imager of the correction mechanism Image data for analyzing the distance between the operating device and the operating imager. According to the calibration device described in item 1 of the scope of patent application, the calibration of the calibration mechanism The imager is assembled on the base. According to the calibration device described in item 2 of the scope of patent application, wherein the base and the calibration piece are A first driving source is provided in between, and the first driving source is used to drive the calibration element for at least one direction position shift. According to the calibration device described in item 2 of the scope of patent application, it also includes an adjustment mechanism, which The structure is provided with at least one adjuster for adjusting the position of the correction image taker. According to the calibration device described in item 1 of the scope of patent application, the calibration of the calibration mechanism The alignment part of the document is for the operation imager of the operation unit to take the image, and the operation imager is parallel The image capturing data is transmitted to the controller of the control mechanism for analysis. According to the calibration device described in item 1 of the scope of patent application, the control mechanism is equipped with capital The database has the base image data of the holder for transmission to the controller. A correction method, including: Supporter detection procedure: to obtain the position of the supporting part of the supporter after deformation; Working device detection procedure: the calibration part of the calibration part is obtained with the calibration imager of the calibration device and The distance of the working device of the working unit to know the work of the working unit The distance between the first center of the camera and the operating device; Sequence of position and process: based on the first center of the working imager and the holder after deformation The third center is calibrated and aligned to know that the working device and the bearing Deviation of components; Work device calibration procedure: the control mechanism of the calibration device calculates the compensation according to the deviation Compensation value, adjust and compensate the working position of the working device, so that the working position The industrial device is accurately aligned with the supporting component. According to the calibration method described in item 7 of the scope of patent application, the detection procedure of the operating device is more Contains the job imager calibration program, the job imager calibration program is based on the job imager The first center is aligned with the calibration part of the calibration piece. According to the calibration method described in item 8 of the scope of patent application, the detection procedure of the operating device is more Contains calibration imager and job imager calibration program, the calibration imager and job imager The calibration procedure is based on the first center of the working imager and the second center of the calibration imager The heart makes corrections. A kind of work equipment, including: Machine; Feeding device: It is configured on the machine platform and is provided with at least one feeder for receiving One less electronic component to be operated; Receiving device: It is configured on the machine platform and is equipped with at least one receiving device to accommodate One less electronic component already in operation; Working device: It is configured on the machine and includes at least one holder and at least one working unit , The holder is for holding electronic components, and the working unit is provided with a working device And a working imager, and use the working device to perform preset operations on the electronic components; At least one calibration device described in any one of items 1 to 6 of the scope of the patent application is equipped with the On the machine Central control device: It is used to control and integrate the actions of various devices.

Images