TW202112561A - Vacuum tear film recycling mechanism - Google Patents

Vacuum tear film recycling mechanism Download PDF

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TW202112561A
TW202112561A TW108134061A TW108134061A TW202112561A TW 202112561 A TW202112561 A TW 202112561A TW 108134061 A TW108134061 A TW 108134061A TW 108134061 A TW108134061 A TW 108134061A TW 202112561 A TW202112561 A TW 202112561A
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substrate
vacuum
film
wheel
suction cup
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TW108134061A
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Chinese (zh)
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TWI700190B (en
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甘旻諭
李韋坤
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大陸商業成科技(成都)有限公司
大陸商業成光電(深圳)有限公司
英特盛科技股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006Delaminating

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  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Separation, Recovery Or Treatment Of Waste Materials Containing Plastics (AREA)

Abstract

A vacuum tear film recovery mechanism comprises: a conveyor belt, a pressing wheel, a working wheel, a recycling wheel, and an elastic belt; wherein the conveyor belt transports a substrate to be torn film from its front end to its rear end The elastic band is sleeved on the pressing wheel, the working wheel and the recycling wheel, and the elastic band is provided with a multi-port suction cup microstructure on the outward side for distributing the vacuum suction evenly and generating The vacuum adhesion of the tile force, so that when the substrate to be torn is passed through the pressing wheel, the multi-ported suction cup microstructure of the elastic band will be pressed down on the film of the substrate to be torn to make a vacuum on the film Suction, and then the film of the substrate to be torn film is detached from the substrate by the relative movement of the elastic band and the substrate; thus, the film on the substrate is torn off by vacuum suction, so that the film can be recycled, not damaged and no residue Requirements.

Description

真空撕膜回收機構Vacuum tear film recycling mechanism

本發明係一種真空撕膜回收機構,尤指一種利用真空吸力將基板上薄膜撕下並回收之機構者。The present invention is a vacuum tearing film recovery mechanism, especially a mechanism that uses vacuum suction to tear off and recover the film on the substrate.

按,現行撕膜製程大部分使用膠帶撕膜方法,請參閱第1圖所示,係設有一工作平台11,該工作平台11上設有一輸送帶12,用以將待撕膜基板13由該工作平台11之前端輸送至該工作平台11之後端,相鄰該工作平台11前端之一側設有一待撕膜基板置放匣14,而能利用一夾取機械手臂(圖中未示),將該待撕膜基板置放匣14中之待撕膜基板13取出並置放於該工作平台11之前端上,使該待撕膜基板13藉由該輸送帶12之輸送,由該工作平台11之前端輸送至該工作平台11之後端,相鄰該工作平台11後端之一側設有一基板收集匣15,而能利用一插入機械手臂(圖中未示),將該工作平台11後端完成撕膜之基板131,夾取並插入該基板收集匣15之卡夾151中。By the way, most of the current tearing process uses tape tearing methods. Please refer to Figure 1. A working platform 11 is provided. The working platform 11 is provided with a conveyor belt 12 for removing the substrate 13 to be teared from the film. The front end of the working platform 11 is transported to the rear end of the working platform 11. A side of the front end adjacent to the working platform 11 is provided with a substrate placing box 14 for tearing the film, and a gripping mechanical arm (not shown in the figure) can be used. The substrate 13 to be torn from the substrate placement box 14 is taken out and placed on the front end of the work platform 11, so that the substrate 13 to be torn is transported by the conveyor belt 12, and the work platform 11 The front end is transported to the rear end of the work platform 11. A substrate collection box 15 is provided on one side adjacent to the rear end of the work platform 11, and an insertion robot arm (not shown in the figure) can be used to move the back end of the work platform 11 The substrate 131 with the film to be peeled off is clamped and inserted into the clip 151 of the substrate collecting box 15.

該工作平台11近中央處設有一組壓合輪16,相鄰該組壓合輪16之一側上方設有一工作輪17,相對應該工作輪17之另一側上方則設有一回收輪18,其中該工作輪17上設有一膠帶19,使該膠帶19跨於三滾輪(該組壓合輪16、工作輪17、回收輪18)間,該膠帶19之朝外一面設有黏膠。藉此,該待撕膜基板13經過該組壓合輪16時,運用該膠帶19之黏膠的黏著力而剝離該基板131之薄膜132,使薄膜132材料跟隨膠帶19一起捲入該回收輪18之回收膠卷完成薄膜132剝離動作,但是以此方法缺點為撕取下來的薄膜132難以回收,且易殘膠於薄膜132上。The working platform 11 is provided with a set of pressing wheels 16 near the center, a working wheel 17 is arranged above one side adjacent to the group of pressing wheels 16, and a recovery wheel 18 is arranged above the other side corresponding to the working wheel 17. The working wheel 17 is provided with an adhesive tape 19 so that the adhesive tape 19 spans between the three rollers (the group of pressing wheels 16, the working wheel 17, and the recovery wheel 18), and the adhesive tape 19 is provided with glue on the outward side. Thereby, when the substrate 13 to be torn off passes the set of laminating wheels 16, the adhesive force of the adhesive tape 19 is used to peel off the film 132 of the substrate 131, so that the material of the film 132 is rolled into the recycling wheel along with the tape 19 The recycled film of 18 completes the peeling action of the film 132, but the disadvantage of this method is that the torn-off film 132 is difficult to recycle, and it is easy to leave glue on the film 132.

因此目前對於薄膜回收的撕膜製程,以手動式刮刀法為主,請參閱第2圖所示,將該待撕膜基板13放置於一載台21上,以一刮刀22施以應力將薄膜132與基板131分離,再將分離後之薄膜132手動撕下。但是,使用該刮刀22施予應力的原因,易造成薄膜132破損,使生產良率較低。Therefore, the current tearing process for film recycling is mainly a manual squeegee method. Please refer to Figure 2. The substrate 13 to be teared is placed on a stage 21, and a squeegee 22 is used to apply stress to the film. 132 is separated from the substrate 131, and then the separated film 132 is manually torn off. However, the use of the scraper 22 to apply stress is likely to cause damage to the film 132, resulting in a lower production yield.

因此在上述習知技術中,薄膜132在成形於基板131上後,將薄膜132完整撕下的製程仍有待開發與改善,使其達到可回收、不破損與不殘膠的要求。Therefore, in the above-mentioned conventional technology, after the film 132 is formed on the substrate 131, the process of completely tearing off the film 132 still needs to be developed and improved to meet the requirements of recyclability, no damage and no glue residue.

有鑑於此,本案發明人本於多年從事相關產品之製造開發與設計經驗,針對上述之目標,詳加設計與審慎評估後,終得一確具實用性之本發明。In view of this, the inventor of the present case has been engaged in the manufacturing, development and design of related products for many years. Aiming at the above-mentioned goals, after detailed design and careful evaluation, he finally obtained a practical invention.

本發明之目的,在提供一種真空撕膜回收機構,係利用真空吸力將基板上薄膜撕下並回收,而達到薄膜可回收、不破損與不殘膠的要求。The object of the present invention is to provide a vacuum tearing film recovery mechanism, which uses vacuum suction to tear off and recover the film on the substrate, so as to meet the requirements of film recyclability, no damage and no glue residue.

根據上述之目的,本發明之真空撕膜回收機構,其主要係包括有:一輸送帶、一壓合輪、一工作輪、一回收輪、及一彈性帶;其中,該輸送帶將一待撕膜基板由該輸送帶之前端輸送至該輸送帶之後端;該壓合輪壓抵於該輸送帶之近中央處,與一動力源相接,而能轉動;該工作輪設於相鄰該壓合輪一側上方處,與一動力源相接,而能轉動;該回收輪設於相鄰該壓合輪另一側上方處,與一動力源相接,而能轉動;該彈性帶套設於該壓合輪、該工作輪、該回收輪上,使其跨於該壓合輪、工作輪、回收輪之間,該彈性帶朝外一面上設有一多口式吸盤微結構,用以使真空吸力平均分布,並能產生凡得瓦力(Van der Waals force)之真空黏附性,該壓合輪、該工作輪、該回收輪轉動時可帶動該彈性帶產生同步轉動;藉此,當該待撕膜基板經過該壓合輪時,該彈性帶之多口式吸盤微結構將下壓於該待撕膜基板之薄膜上,使其內空氣排出,形成真空,對薄膜產生真空吸力,再藉由該彈性帶與基板的相對運動,將該待撕膜基板之薄膜從基板上脫離;如此,利用真空吸力將基板上薄膜撕下,而達到薄膜可回收、不破損與不殘膠的要求。According to the above objective, the vacuum tear film recovery mechanism of the present invention mainly includes: a conveyor belt, a pressing wheel, a working wheel, a recovery wheel, and an elastic belt; wherein the conveyor belt will be The tear film substrate is transported from the front end of the conveyor belt to the rear end of the conveyor belt; the pressing wheel is pressed against the center of the conveyor belt, and is connected with a power source to rotate; the working wheel is arranged adjacent The upper side of the pressing wheel is connected with a power source and can rotate; the recovery wheel is arranged above the other side of the adjacent pressing wheel, and is connected with a power source to rotate; the elasticity The belt is sleeved on the pressing wheel, the working wheel, and the recovery wheel so that it spans between the pressing wheel, the working wheel, and the recovery wheel. The elastic belt is provided with a multi-port suction cup on the outward side. The structure is used to evenly distribute the vacuum suction force and generate the vacuum adhesion of Van der Waals force. When the pressing wheel, the working wheel, and the recovery wheel rotate, the elastic belt can be driven to rotate synchronously ; With this, when the substrate to be torn film passes through the pressing wheel, the multi-mouth suction cup microstructure of the elastic belt will be pressed down on the film of the substrate to be torn film, so that the air in the substrate is discharged to form a vacuum, The film generates vacuum suction, and then the relative movement of the elastic band and the substrate separates the film of the substrate to be torn from the substrate; in this way, the film on the substrate is torn off by the vacuum suction, so that the film can be recycled without damage With no residual glue requirements.

為便 貴審查委員能對本發明之目的、形狀、構造裝置特徵及其功效,做更進一步之認識與瞭解,茲舉實施例配合圖式,詳細說明如下:In order to facilitate your reviewer to have a further understanding and understanding of the purpose, shape, features and effects of the structure of the present invention, a detailed description is given as follows:

本發明乃有關一種「真空撕膜回收機構」,請參閱第3、4圖所示,本發明之真空撕膜回收機構,其主要係包括有:一輸送帶31、一壓合輪32、一工作輪33、一回收輪34、及一彈性帶35。The present invention relates to a "vacuum tearing film recovery mechanism". Please refer to Figures 3 and 4. The vacuum tearing film recovery mechanism of the present invention mainly includes: a conveyor belt 31, a pressing wheel 32, and a Working wheel 33, a recovery wheel 34, and an elastic belt 35.

其中,該輸送帶31將一待撕膜基板36由該輸送帶31之前端輸送至該輸送帶31之後端。The conveyor belt 31 conveys a substrate 36 to be torn from the front end of the conveyor belt 31 to the rear end of the conveyor belt 31.

該壓合輪32壓抵於該輸送帶31之近中央處,與一動力源(圖中未示)相接,而能轉動。The pressing wheel 32 is pressed against the center of the conveyor belt 31, connected with a power source (not shown in the figure), and can rotate.

該工作輪33設於相鄰該壓合輪32一側上方處,與一動力源(圖中未示)相接,而能轉動。The working wheel 33 is arranged at the upper side of one side adjacent to the pressing wheel 32, connected with a power source (not shown in the figure), and can rotate.

該回收輪34設於相鄰該壓合輪32另一側上方處,與一動力源(圖中未示)相接,而能轉動。The recovery wheel 34 is arranged above the other side of the adjacent pressing wheel 32, and is connected to a power source (not shown in the figure) and can rotate.

該彈性帶35套設於該壓合輪32、該工作輪33、該回收輪34上,使其跨於該壓合輪32、工作輪33、回收輪34之間,該彈性帶35朝外一面上設有一多口式吸盤微結構351(如第4圖所示),用以使真空吸力平均分布,並能產生凡得瓦力(Van der Waals force)之真空黏附性,該壓合輪32、該工作輪33、該回收輪34轉動時可帶動該彈性帶35產生同步轉動。The elastic belt 35 is sleeved on the pressing wheel 32, the working wheel 33, and the recovery wheel 34 so that it spans between the pressing wheel 32, the working wheel 33 and the recovery wheel 34, and the elastic belt 35 faces outward One side is provided with a multi-mouth suction cup microstructure 351 (as shown in Figure 4), which is used to distribute the vacuum suction evenly and produce the vacuum adhesion of Van der Waals force. When the wheel 32, the working wheel 33, and the recovery wheel 34 rotate, the elastic belt 35 can be driven to rotate synchronously.

藉上述構件之組成,當該待撕膜基板36經過該壓合輪32時,該彈性帶35之多口式吸盤微結構351將下壓於該待撕膜基板36之薄膜361上,使其內空氣排出,形成真空,對薄膜361產生真空吸力,再藉由該彈性帶35與基板362的相對運動,將該待撕膜基板36之薄膜361從基板362上脫離。With the composition of the above-mentioned components, when the substrate 36 to be torn off passes the pressing wheel 32, the multi-port suction cup microstructure 351 of the elastic belt 35 will press down on the film 361 of the substrate to be torn off 36 to make it The internal air is exhausted to form a vacuum to generate a vacuum suction force on the film 361, and then the film 361 of the substrate 36 to be torn off is separated from the substrate 362 by the relative movement of the elastic band 35 and the substrate 362.

如此一來,利用真空吸力將基板362上薄膜361撕下,達到薄膜361可回收、不破損與不殘膠的要求。In this way, the film 361 on the substrate 362 is torn off by the vacuum suction force, so that the film 361 is recyclable, free from damage, and free from glue residue.

復請參閱第3、4圖所示,該回收輪34係為一小曲率半徑之滾輪,俾透過該回收輪34小曲率半徑滾輪的設計,可使該多口式吸盤微結構351之吸盤破真空,藉由該彈性帶35的微黏性將薄膜361帶至一下料處37取下。Please refer to Figures 3 and 4 again. The recovery wheel 34 is a roller with a small radius of curvature. The design of the recovery wheel 34 with a small radius of curvature allows the suction cup of the multi-port suction cup microstructure 351 to be broken. Under vacuum, the film 361 is brought to the unloading place 37 by the slight adhesiveness of the elastic band 35 to be removed.

復請參閱第3、4圖所示,該下料處37可為一回收平台。Please refer to Figures 3 and 4 again, the feeding place 37 can be a recycling platform.

復請參閱第3、4圖所示,該彈性帶35可為一具彈性之矽橡膠帶。Please refer to Figures 3 and 4 again, the elastic band 35 can be an elastic silicone rubber band.

復請參閱第3、4圖所示,該彈性帶35之多口式吸盤微結構351的吸盤口352係由可變形之塑性材料構成,其表面結構為六角蜂巢狀(Honeycomb)並透過凡得瓦力與微結構之吸附產生真空黏附性。Please refer to Figures 3 and 4 again. The suction cup 352 of the multi-mouth suction cup microstructure 351 of the elastic belt 35 is composed of a deformable plastic material, and its surface structure is a hexagonal honeycomb shape (Honeycomb) and transparent The adsorption of wall force and microstructure produces vacuum adhesion.

復請參閱第3、4圖所示,該多口式吸盤微結構351之吸盤口352為密集陣列排列。Please refer to Figures 3 and 4 again, the suction cup openings 352 of the multi-port suction cup microstructure 351 are arranged in a dense array.

復請參閱第3、4圖所示,該多口式吸盤微結構351之吸盤口352為密集交錯排列。Please refer to Figures 3 and 4 again, the suction cup openings 352 of the multi-port suction cup microstructure 351 are densely staggered.

復請參閱第3、4圖所示,相鄰該輸送帶31前端之一側設有一待撕膜基板置放匣38,而能利用一夾取機械手臂(圖中未示),將該待撕膜基板置放匣38中之待撕膜基板36取出並置放於該輸送帶31之前端上,使該待撕膜基板36藉由該輸送帶31之輸送,由該輸送帶31之前端輸送至該輸送帶31之後端,相鄰該輸送帶31後端之一側設有一基板收集匣39,而能利用一插入機械手臂(圖中未示),將該輸送帶31後端完成撕膜之基板362,夾取並插入該基板收集匣39之卡夾391中。Please refer to Figures 3 and 4 again. Adjacent one side of the front end of the conveyor belt 31 is provided with a substrate placing box 38 to be torn, and a gripping mechanical arm (not shown in the figure) can be used to remove the substrate. The substrate 36 to be torn from the substrate placing box 38 is taken out and placed on the front end of the conveyor belt 31, so that the substrate 36 to be torn off is conveyed by the conveyor belt 31 and conveyed by the front end of the conveyor belt 31 To the rear end of the conveyor belt 31, a substrate collection box 39 is provided on one side adjacent to the rear end of the conveyor belt 31, and an inserting mechanical arm (not shown in the figure) can be used to complete the tearing of the rear end of the conveyor belt 31 The substrate 362 is clamped and inserted into the clamp 391 of the substrate collecting box 39.

請參閱第5圖所示,該多口式吸盤微結構351的吸力可藉由對薄膜361接觸面積、吸盤內真空度(由下壓力來調整吸盤內真空度)來調整,而吸盤表面對薄膜361的黏性,可藉由吸盤密度來調整。As shown in Figure 5, the suction force of the multi-port suction cup microstructure 351 can be adjusted by the contact area of the film 361 and the vacuum degree in the suction cup (the vacuum degree in the suction cup is adjusted by the downward pressure). The viscosity of 361 can be adjusted by the density of the suction cup.

以上所述,僅為本發明最佳具體實施例,惟本發明之構造特徵並不侷限於此,任何熟悉該項技藝者在本發明領域內,可輕易思及之變化或修飾,皆可涵蓋在以下本案之專利範圍。The above are only the best specific embodiments of the present invention, but the structural features of the present invention are not limited thereto. Any change or modification that can be easily thought of by anyone familiar with the art in the field of the present invention can be covered. In the following patent scope of this case.

31:輸送帶 32:壓合輪 33:工作輪 34:回收輪 35:彈性帶 351:多口式吸盤微結構 352:吸盤口 36:待撕膜基板 361:薄膜 362:基板 37:下料處 38:待撕膜基板置放匣 39:基板收集匣 391:卡夾31: Conveyor belt 32: pressing wheel 33: Working wheel 34: recycling wheel 35: elastic band 351: Multi-mouth suction cup microstructure 352: Suction Cup 36: substrate to be torn 361: Film 362: Substrate 37: Unloading place 38: Placement cassette for the substrate to be torn 39: substrate collection box 391: Card Holder

第 1 圖為習用撕膜機構之外觀示意圖。Figure 1 is a schematic diagram of the appearance of a conventional tearing mechanism.

第 2 圖為習用利用刮刀撕膜之示意圖。Figure 2 is a schematic diagram of the conventional use of a scraper to tear the film.

第 3 圖為本發明真空撕膜回收機構之外觀示意圖。Figure 3 is a schematic diagram of the appearance of the vacuum tear film recovery mechanism of the present invention.

第 4 圖為本發明真空撕膜回收機構之多口式矽膠吸盤微結構之外觀示意圖。Figure 4 is a schematic diagram of the appearance of the microstructure of the multi-port silicone sucker of the vacuum tear film recycling mechanism of the present invention.

第 5 圖為本發明真空撕膜回收機構之真空吸盤計算公式示意圖。Figure 5 is a schematic diagram of the vacuum suction cup calculation formula of the vacuum tear film recovery mechanism of the present invention.

31:輸送帶31: Conveyor belt

32:壓合輪32: pressing wheel

33:工作輪33: Working wheel

34:回收輪34: recycling wheel

35:彈性帶35: elastic band

36:待撕膜基板36: substrate to be torn

361:薄膜361: Film

362:基板362: Substrate

37:下料處37: Unloading place

38:待撕膜基板置放匣38: Placement cassette for the substrate to be torn

39:基板收集匣39: substrate collection box

391:卡夾391: Card Holder

Claims (10)

一種真空撕膜回收機構,包括: 一輸送帶,該輸送帶將一待撕膜基板由該輸送帶之前端輸送至該輸送帶之後端; 一壓合輪,該壓合輪壓抵於該輸送帶之近中央處,與一動力源相接,而能轉動; 一工作輪,該工作輪設於相鄰該壓合輪一側上方處,與一動力源相接,而能轉動; 一回收輪,該回收輪設於相鄰該壓合輪另一側上方處,與一動力源相接,而能轉動;及 一彈性帶,該彈性帶套設於該壓合輪、該工作輪、該回收輪上,使其跨於該壓合輪、工作輪、回收輪之間,該彈性帶朝外一面上設有一多口式吸盤微結構,用以使真空吸力平均分布,並能產生凡得瓦力之真空黏附性,該壓合輪、該工作輪、該回收輪轉動時可帶動該彈性帶產生同步轉動,令該待撕膜基板經過該壓合輪時,該彈性帶之多口式吸盤微結構將下壓於該待撕膜基板之薄膜上,使其內空氣排出,形成真空,對薄膜產生真空吸力,再藉由該彈性帶與基板的相對運動,將該待撕膜基板之薄膜從基板上脫離。A vacuum tear film recycling mechanism, including: A conveyor belt that transports a substrate to be torn from the front end of the conveyor belt to the back end of the conveyor belt; A pressing wheel, which presses against the center of the conveyor belt, is connected to a power source, and can rotate; A working wheel, the working wheel is arranged at the upper side of the adjacent pressing wheel, connected with a power source, and can rotate; A recovery wheel, the recovery wheel is arranged above the other side of the adjacent pressing wheel, is connected to a power source, and can rotate; and An elastic belt, the elastic belt is sleeved on the pressing wheel, the working wheel, and the recovery wheel so that it spans between the pressing wheel, the working wheel and the recovery wheel. The elastic belt is provided with an outward facing surface A multi-port suction cup microstructure, used to distribute the vacuum suction force evenly, and produce the vacuum adhesion of Van der Waals force. When the pressing wheel, the working wheel, and the recovery wheel rotate, the elastic belt can be driven to rotate synchronously. , When the substrate to be torn off is passed through the pressing wheel, the multi-mouth suction cup microstructure of the elastic belt will press down on the film of the substrate to be torn off, so that the air in the substrate is exhausted, forming a vacuum, and creating a vacuum on the film The suction force then releases the film of the substrate to be torn off from the substrate by the relative movement of the elastic band and the substrate. 如申請專利範圍第 1 項所述之真空撕膜回收機構,其中該回收輪係為一小曲率半徑之滾輪,俾透過該回收輪小曲率半徑滾輪的設計,可使該多口式吸盤微結構之吸盤破真空,藉由該彈性帶的微黏性將薄膜帶至一下料處取下。For example, the vacuum tear film recovery mechanism described in the first item of the scope of patent application, wherein the recovery wheel train is a roller with a small radius of curvature, so that the microstructure of the multi-mouth suction cup can be made through the design of the recovery wheel with a small radius of curvature. The suction cup breaks the vacuum, and the film is taken to the unloading place by the micro-adhesiveness of the elastic band and removed. 如申請專利範圍第 2 項所述之真空撕膜回收機構,其中該下料處係為一回收平台。For the vacuum tear film recycling mechanism described in item 2 of the scope of patent application, the unloading place is a recycling platform. 如申請專利範圍第 1 項所述之真空撕膜回收機構,其中該彈性帶係為一具彈性之矽橡膠帶。For the vacuum tear film recycling mechanism described in item 1 of the scope of patent application, the elastic belt is an elastic silicone rubber belt. 如申請專利範圍第 4 項所述之真空撕膜回收機構,其中該彈性帶之多口式吸盤微結構的吸盤口係由可變形之塑性材料構成,其表面結構為六角蜂巢狀並透過凡得瓦力與微結構之吸附產生真空黏附性。The vacuum tear film recovery mechanism described in item 4 of the scope of patent application, wherein the suction cup mouth of the multi-mouth suction cup microstructure of the elastic belt is composed of a deformable plastic material, and its surface structure is a hexagonal honeycomb shape and penetrates the vane The adsorption of wall force and microstructure produces vacuum adhesion. 如申請專利範圍第 4 項所述之真空撕膜回收機構,其中該彈性帶之多口式吸盤微結構的吸盤口係由可變形之塑性材料構成,其表面結構為圓形並透過凡得瓦力與微結構之吸附產生真空黏附性。The vacuum tear film recovery mechanism described in item 4 of the scope of patent application, wherein the suction cup mouth of the multi-mouth suction cup microstructure of the elastic belt is made of deformable plastic material, and its surface structure is round and penetrates Van der Waals The adsorption of force and microstructure produces vacuum adhesion. 如申請專利範圍第 5 項所述之真空撕膜回收機構,其中該多口式吸盤微結構之吸盤口為密集陣列排列。The vacuum tear film recovery mechanism described in item 5 of the scope of patent application, wherein the suction cup openings of the multi-port suction cup microstructure are arranged in a dense array. 如申請專利範圍第 5 項所述之真空撕膜回收機構,其中該多口式吸盤微結構之吸盤口為密集交錯排列。The vacuum tear film recovery mechanism described in item 5 of the scope of patent application, wherein the suction cup openings of the multi-port suction cup microstructure are densely staggered. 如申請專利範圍第 1 項所述之真空撕膜回收機構,其中相鄰該輸送帶前端之一側設有一待撕膜基板置放匣,而能利用一夾取機械手臂,將該待撕膜基板置放匣中之待撕膜基板取出並置放於該輸送帶之前端上,使該待撕膜基板藉由該輸送帶之輸送,由該輸送帶之前端輸送至該輸送帶之後端,相鄰該輸送帶後端之一側設有一基板收集匣,而能利用一插入機械手臂,將該輸送帶後端完成撕膜之基板,夾取並插入該基板收集匣之卡夾中。As described in the first item of the scope of patent application, the vacuum tearing film recovery mechanism is provided with a substrate placement box for tearing film adjacent to the front end of the conveyor belt, and a gripping mechanical arm can be used to remove the tearing film The substrate to be torn from the substrate placement cassette is taken out and placed on the front end of the conveyor belt, so that the substrate to be torn off is transported by the conveyor belt from the front end of the conveyor belt to the back end of the conveyor belt, correspondingly A substrate collection box is arranged on one side adjacent to the rear end of the conveyor belt, and an inserting mechanical arm can be used to complete the tearing of the substrate at the rear end of the conveyor belt, and the substrate collection box can be clamped and inserted into the clip of the substrate collection box. 如申請專利範圍第 5 項所述之真空撕膜回收機構,其中該多口式吸盤微結構的吸力可藉由對薄膜接觸面積、吸盤內真空度,即由下壓力來調整吸盤內真空度來調整,而吸盤表面對薄膜的黏性,可藉由吸盤密度來調整。The vacuum tear film recovery mechanism described in item 5 of the scope of patent application, wherein the suction force of the microstructure of the multi-mouth suction cup can be adjusted by the contact area of the film, the vacuum degree in the suction cup, that is, the vacuum degree in the suction cup is adjusted by the downward pressure Adjust, and the stickiness of the suction cup surface to the film can be adjusted by the suction cup density.
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TWI823713B (en) * 2021-12-30 2023-11-21 韓商细美事有限公司 Delamination module and gas assisted bonding equipment including the same

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TWI817783B (en) * 2021-11-16 2023-10-01 韓商细美事有限公司 Film peeling device, layering equipment equipped with the same, and semiconductor manufacturing equipment
TWI823713B (en) * 2021-12-30 2023-11-21 韓商细美事有限公司 Delamination module and gas assisted bonding equipment including the same

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