TW202112561A - Vacuum tear film recycling mechanism - Google Patents
Vacuum tear film recycling mechanism Download PDFInfo
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- TW202112561A TW202112561A TW108134061A TW108134061A TW202112561A TW 202112561 A TW202112561 A TW 202112561A TW 108134061 A TW108134061 A TW 108134061A TW 108134061 A TW108134061 A TW 108134061A TW 202112561 A TW202112561 A TW 202112561A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
- B32B43/006—Delaminating
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- Separation, Recovery Or Treatment Of Waste Materials Containing Plastics (AREA)
Abstract
Description
本發明係一種真空撕膜回收機構,尤指一種利用真空吸力將基板上薄膜撕下並回收之機構者。The present invention is a vacuum tearing film recovery mechanism, especially a mechanism that uses vacuum suction to tear off and recover the film on the substrate.
按,現行撕膜製程大部分使用膠帶撕膜方法,請參閱第1圖所示,係設有一工作平台11,該工作平台11上設有一輸送帶12,用以將待撕膜基板13由該工作平台11之前端輸送至該工作平台11之後端,相鄰該工作平台11前端之一側設有一待撕膜基板置放匣14,而能利用一夾取機械手臂(圖中未示),將該待撕膜基板置放匣14中之待撕膜基板13取出並置放於該工作平台11之前端上,使該待撕膜基板13藉由該輸送帶12之輸送,由該工作平台11之前端輸送至該工作平台11之後端,相鄰該工作平台11後端之一側設有一基板收集匣15,而能利用一插入機械手臂(圖中未示),將該工作平台11後端完成撕膜之基板131,夾取並插入該基板收集匣15之卡夾151中。By the way, most of the current tearing process uses tape tearing methods. Please refer to Figure 1. A working
該工作平台11近中央處設有一組壓合輪16,相鄰該組壓合輪16之一側上方設有一工作輪17,相對應該工作輪17之另一側上方則設有一回收輪18,其中該工作輪17上設有一膠帶19,使該膠帶19跨於三滾輪(該組壓合輪16、工作輪17、回收輪18)間,該膠帶19之朝外一面設有黏膠。藉此,該待撕膜基板13經過該組壓合輪16時,運用該膠帶19之黏膠的黏著力而剝離該基板131之薄膜132,使薄膜132材料跟隨膠帶19一起捲入該回收輪18之回收膠卷完成薄膜132剝離動作,但是以此方法缺點為撕取下來的薄膜132難以回收,且易殘膠於薄膜132上。The working
因此目前對於薄膜回收的撕膜製程,以手動式刮刀法為主,請參閱第2圖所示,將該待撕膜基板13放置於一載台21上,以一刮刀22施以應力將薄膜132與基板131分離,再將分離後之薄膜132手動撕下。但是,使用該刮刀22施予應力的原因,易造成薄膜132破損,使生產良率較低。Therefore, the current tearing process for film recycling is mainly a manual squeegee method. Please refer to Figure 2. The
因此在上述習知技術中,薄膜132在成形於基板131上後,將薄膜132完整撕下的製程仍有待開發與改善,使其達到可回收、不破損與不殘膠的要求。Therefore, in the above-mentioned conventional technology, after the
有鑑於此,本案發明人本於多年從事相關產品之製造開發與設計經驗,針對上述之目標,詳加設計與審慎評估後,終得一確具實用性之本發明。In view of this, the inventor of the present case has been engaged in the manufacturing, development and design of related products for many years. Aiming at the above-mentioned goals, after detailed design and careful evaluation, he finally obtained a practical invention.
本發明之目的,在提供一種真空撕膜回收機構,係利用真空吸力將基板上薄膜撕下並回收,而達到薄膜可回收、不破損與不殘膠的要求。The object of the present invention is to provide a vacuum tearing film recovery mechanism, which uses vacuum suction to tear off and recover the film on the substrate, so as to meet the requirements of film recyclability, no damage and no glue residue.
根據上述之目的,本發明之真空撕膜回收機構,其主要係包括有:一輸送帶、一壓合輪、一工作輪、一回收輪、及一彈性帶;其中,該輸送帶將一待撕膜基板由該輸送帶之前端輸送至該輸送帶之後端;該壓合輪壓抵於該輸送帶之近中央處,與一動力源相接,而能轉動;該工作輪設於相鄰該壓合輪一側上方處,與一動力源相接,而能轉動;該回收輪設於相鄰該壓合輪另一側上方處,與一動力源相接,而能轉動;該彈性帶套設於該壓合輪、該工作輪、該回收輪上,使其跨於該壓合輪、工作輪、回收輪之間,該彈性帶朝外一面上設有一多口式吸盤微結構,用以使真空吸力平均分布,並能產生凡得瓦力(Van der Waals force)之真空黏附性,該壓合輪、該工作輪、該回收輪轉動時可帶動該彈性帶產生同步轉動;藉此,當該待撕膜基板經過該壓合輪時,該彈性帶之多口式吸盤微結構將下壓於該待撕膜基板之薄膜上,使其內空氣排出,形成真空,對薄膜產生真空吸力,再藉由該彈性帶與基板的相對運動,將該待撕膜基板之薄膜從基板上脫離;如此,利用真空吸力將基板上薄膜撕下,而達到薄膜可回收、不破損與不殘膠的要求。According to the above objective, the vacuum tear film recovery mechanism of the present invention mainly includes: a conveyor belt, a pressing wheel, a working wheel, a recovery wheel, and an elastic belt; wherein the conveyor belt will be The tear film substrate is transported from the front end of the conveyor belt to the rear end of the conveyor belt; the pressing wheel is pressed against the center of the conveyor belt, and is connected with a power source to rotate; the working wheel is arranged adjacent The upper side of the pressing wheel is connected with a power source and can rotate; the recovery wheel is arranged above the other side of the adjacent pressing wheel, and is connected with a power source to rotate; the elasticity The belt is sleeved on the pressing wheel, the working wheel, and the recovery wheel so that it spans between the pressing wheel, the working wheel, and the recovery wheel. The elastic belt is provided with a multi-port suction cup on the outward side. The structure is used to evenly distribute the vacuum suction force and generate the vacuum adhesion of Van der Waals force. When the pressing wheel, the working wheel, and the recovery wheel rotate, the elastic belt can be driven to rotate synchronously ; With this, when the substrate to be torn film passes through the pressing wheel, the multi-mouth suction cup microstructure of the elastic belt will be pressed down on the film of the substrate to be torn film, so that the air in the substrate is discharged to form a vacuum, The film generates vacuum suction, and then the relative movement of the elastic band and the substrate separates the film of the substrate to be torn from the substrate; in this way, the film on the substrate is torn off by the vacuum suction, so that the film can be recycled without damage With no residual glue requirements.
為便 貴審查委員能對本發明之目的、形狀、構造裝置特徵及其功效,做更進一步之認識與瞭解,茲舉實施例配合圖式,詳細說明如下:In order to facilitate your reviewer to have a further understanding and understanding of the purpose, shape, features and effects of the structure of the present invention, a detailed description is given as follows:
本發明乃有關一種「真空撕膜回收機構」,請參閱第3、4圖所示,本發明之真空撕膜回收機構,其主要係包括有:一輸送帶31、一壓合輪32、一工作輪33、一回收輪34、及一彈性帶35。The present invention relates to a "vacuum tearing film recovery mechanism". Please refer to Figures 3 and 4. The vacuum tearing film recovery mechanism of the present invention mainly includes: a conveyor belt 31, a
其中,該輸送帶31將一待撕膜基板36由該輸送帶31之前端輸送至該輸送帶31之後端。The conveyor belt 31 conveys a
該壓合輪32壓抵於該輸送帶31之近中央處,與一動力源(圖中未示)相接,而能轉動。The
該工作輪33設於相鄰該壓合輪32一側上方處,與一動力源(圖中未示)相接,而能轉動。The
該回收輪34設於相鄰該壓合輪32另一側上方處,與一動力源(圖中未示)相接,而能轉動。The
該彈性帶35套設於該壓合輪32、該工作輪33、該回收輪34上,使其跨於該壓合輪32、工作輪33、回收輪34之間,該彈性帶35朝外一面上設有一多口式吸盤微結構351(如第4圖所示),用以使真空吸力平均分布,並能產生凡得瓦力(Van der Waals force)之真空黏附性,該壓合輪32、該工作輪33、該回收輪34轉動時可帶動該彈性帶35產生同步轉動。The
藉上述構件之組成,當該待撕膜基板36經過該壓合輪32時,該彈性帶35之多口式吸盤微結構351將下壓於該待撕膜基板36之薄膜361上,使其內空氣排出,形成真空,對薄膜361產生真空吸力,再藉由該彈性帶35與基板362的相對運動,將該待撕膜基板36之薄膜361從基板362上脫離。With the composition of the above-mentioned components, when the
如此一來,利用真空吸力將基板362上薄膜361撕下,達到薄膜361可回收、不破損與不殘膠的要求。In this way, the
復請參閱第3、4圖所示,該回收輪34係為一小曲率半徑之滾輪,俾透過該回收輪34小曲率半徑滾輪的設計,可使該多口式吸盤微結構351之吸盤破真空,藉由該彈性帶35的微黏性將薄膜361帶至一下料處37取下。Please refer to Figures 3 and 4 again. The
復請參閱第3、4圖所示,該下料處37可為一回收平台。Please refer to Figures 3 and 4 again, the
復請參閱第3、4圖所示,該彈性帶35可為一具彈性之矽橡膠帶。Please refer to Figures 3 and 4 again, the
復請參閱第3、4圖所示,該彈性帶35之多口式吸盤微結構351的吸盤口352係由可變形之塑性材料構成,其表面結構為六角蜂巢狀(Honeycomb)並透過凡得瓦力與微結構之吸附產生真空黏附性。Please refer to Figures 3 and 4 again. The
復請參閱第3、4圖所示,該多口式吸盤微結構351之吸盤口352為密集陣列排列。Please refer to Figures 3 and 4 again, the
復請參閱第3、4圖所示,該多口式吸盤微結構351之吸盤口352為密集交錯排列。Please refer to Figures 3 and 4 again, the
復請參閱第3、4圖所示,相鄰該輸送帶31前端之一側設有一待撕膜基板置放匣38,而能利用一夾取機械手臂(圖中未示),將該待撕膜基板置放匣38中之待撕膜基板36取出並置放於該輸送帶31之前端上,使該待撕膜基板36藉由該輸送帶31之輸送,由該輸送帶31之前端輸送至該輸送帶31之後端,相鄰該輸送帶31後端之一側設有一基板收集匣39,而能利用一插入機械手臂(圖中未示),將該輸送帶31後端完成撕膜之基板362,夾取並插入該基板收集匣39之卡夾391中。Please refer to Figures 3 and 4 again. Adjacent one side of the front end of the conveyor belt 31 is provided with a substrate placing
請參閱第5圖所示,該多口式吸盤微結構351的吸力可藉由對薄膜361接觸面積、吸盤內真空度(由下壓力來調整吸盤內真空度)來調整,而吸盤表面對薄膜361的黏性,可藉由吸盤密度來調整。As shown in Figure 5, the suction force of the multi-port
以上所述,僅為本發明最佳具體實施例,惟本發明之構造特徵並不侷限於此,任何熟悉該項技藝者在本發明領域內,可輕易思及之變化或修飾,皆可涵蓋在以下本案之專利範圍。The above are only the best specific embodiments of the present invention, but the structural features of the present invention are not limited thereto. Any change or modification that can be easily thought of by anyone familiar with the art in the field of the present invention can be covered. In the following patent scope of this case.
31:輸送帶 32:壓合輪 33:工作輪 34:回收輪 35:彈性帶 351:多口式吸盤微結構 352:吸盤口 36:待撕膜基板 361:薄膜 362:基板 37:下料處 38:待撕膜基板置放匣 39:基板收集匣 391:卡夾31: Conveyor belt 32: pressing wheel 33: Working wheel 34: recycling wheel 35: elastic band 351: Multi-mouth suction cup microstructure 352: Suction Cup 36: substrate to be torn 361: Film 362: Substrate 37: Unloading place 38: Placement cassette for the substrate to be torn 39: substrate collection box 391: Card Holder
第 1 圖為習用撕膜機構之外觀示意圖。Figure 1 is a schematic diagram of the appearance of a conventional tearing mechanism.
第 2 圖為習用利用刮刀撕膜之示意圖。Figure 2 is a schematic diagram of the conventional use of a scraper to tear the film.
第 3 圖為本發明真空撕膜回收機構之外觀示意圖。Figure 3 is a schematic diagram of the appearance of the vacuum tear film recovery mechanism of the present invention.
第 4 圖為本發明真空撕膜回收機構之多口式矽膠吸盤微結構之外觀示意圖。Figure 4 is a schematic diagram of the appearance of the microstructure of the multi-port silicone sucker of the vacuum tear film recycling mechanism of the present invention.
第 5 圖為本發明真空撕膜回收機構之真空吸盤計算公式示意圖。Figure 5 is a schematic diagram of the vacuum suction cup calculation formula of the vacuum tear film recovery mechanism of the present invention.
31:輸送帶31: Conveyor belt
32:壓合輪32: pressing wheel
33:工作輪33: Working wheel
34:回收輪34: recycling wheel
35:彈性帶35: elastic band
36:待撕膜基板36: substrate to be torn
361:薄膜361: Film
362:基板362: Substrate
37:下料處37: Unloading place
38:待撕膜基板置放匣38: Placement cassette for the substrate to be torn
39:基板收集匣39: substrate collection box
391:卡夾391: Card Holder
Claims (10)
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CN201910874963.7 | 2019-09-17 | ||
CN201910874963.7A CN110525014B (en) | 2019-09-17 | 2019-09-17 | Vacuum dyestripping retrieves mechanism |
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TWI700190B TWI700190B (en) | 2020-08-01 |
TW202112561A true TW202112561A (en) | 2021-04-01 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI817783B (en) * | 2021-11-16 | 2023-10-01 | 韓商细美事有限公司 | Film peeling device, layering equipment equipped with the same, and semiconductor manufacturing equipment |
TWI823713B (en) * | 2021-12-30 | 2023-11-21 | 韓商细美事有限公司 | Delamination module and gas assisted bonding equipment including the same |
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JP3053244B2 (en) * | 1991-04-25 | 2000-06-19 | 株式会社東芝 | Film peeling method and apparatus |
CN201169105Y (en) * | 2008-01-04 | 2008-12-24 | 王玉梅 | Improved film sticking and tearing machine |
JP6283573B2 (en) * | 2014-06-03 | 2018-02-21 | 東京エレクトロン株式会社 | Peeling apparatus, peeling system, peeling method, program, and computer storage medium |
CN207758313U (en) * | 2017-12-05 | 2018-08-24 | 宁德新能源科技有限公司 | Automatic dyestripping machine |
CN207565977U (en) * | 2017-12-14 | 2018-07-03 | 苏州晶洲装备科技有限公司 | A kind of vacuum inhales dyestripping film sticking apparatus |
CN108372705A (en) * | 2018-04-24 | 2018-08-07 | 郑州仟嘉安环保科技有限公司 | A kind of optical thin film rim charge is dialled from equipment |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI817783B (en) * | 2021-11-16 | 2023-10-01 | 韓商细美事有限公司 | Film peeling device, layering equipment equipped with the same, and semiconductor manufacturing equipment |
TWI823713B (en) * | 2021-12-30 | 2023-11-21 | 韓商细美事有限公司 | Delamination module and gas assisted bonding equipment including the same |
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TWI700190B (en) | 2020-08-01 |
CN110525014B (en) | 2021-09-28 |
CN110525014A (en) | 2019-12-03 |
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