TW202003261A - Laminating device and component laminating method using same - Google Patents

Laminating device and component laminating method using same Download PDF

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TW202003261A
TW202003261A TW107121614A TW107121614A TW202003261A TW 202003261 A TW202003261 A TW 202003261A TW 107121614 A TW107121614 A TW 107121614A TW 107121614 A TW107121614 A TW 107121614A TW 202003261 A TW202003261 A TW 202003261A
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component
accommodating cavity
vacuum
upper cover
platform
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TW107121614A
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TWI694927B (en
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王世銘
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大陸商業成科技(成都)有限公司
大陸商業成光電(深圳)有限公司
英特盛科技股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/02Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor using sheet or web-like material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/0004Component parts, details or accessories; Auxiliary operations

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  • Manufacturing & Machinery (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

A laminating device is provided. The laminating device includes an upper cover, an upper pressure head, a lower platform, a lower pressure head and an inner platform. The upper pressure head is movably disposed in the upper cover for fixing a first to-be-bonded component. The lower platform is configured to cooperate with the upper pressure head to form a first holding chamber. The lower pressure head is disposed on the lower platform and located in the first holding chamber when the lower platform and the upper pressure head cooperate to form the first holding chamber. The lower pressure head cooperates with the lower platform to form a second holding chamber. The lower pressure head comprises a lower platform deck that is disposed opposite to the upper pressure head. The lower platform deck is configured to carry a second to-be-bonded component. The lower platform deck is provided with a plurality of vacuum holes passing through the lower platform deck. The inner platform is movably disposed in the second holding chamber. The inner platform is provided with a plurality of sealing columns. The plurality of sealing columns are used in the first holding chamber and the second holding chamber when the vacuum condition of the first holding chamber is same to the vacuum condition of the second holding chamber. The present invention also provides a component attaching method using the laminating device.

Description

貼合裝置及使用該貼合裝置的元件貼合方法Laminating device and component laminating method using the laminating device

本發明涉及一種貼合裝置及使用該貼合裝置進行元件貼合的方法。The invention relates to a bonding device and a method for bonding components using the bonding device.

近年來,隨著技術的進步,觸控螢幕的用途已越來越廣,從常見的提款機、智慧型手機、平板電腦、到工業用的觸控電腦等等。被廣泛應用的觸控螢幕往往需要在真空環境下進行貼合,然而傳統的貼合工藝存在明顯且難以克服的缺陷。In recent years, with the advancement of technology, the use of touch screens has become wider and wider, from common cash dispensers, smart phones, tablet computers, to industrial touch computers and so on. The widely used touch screens often need to be bonded in a vacuum environment. However, the traditional bonding process has obvious and difficult to overcome defects.

傳統結構中,觸控薄膜的貼合需要使用真空貼合機台完成,放置於真空貼合機台的載臺上的觸控薄膜藉由真空孔產生的負壓被吸附,觸控薄膜為柔性材料,真空孔處產生的真空負壓極易使觸控薄膜產生一種類似“水波紋”的形變,這種形變在貼合完成之後難以被消除觸控薄膜的形變會使得視覺效果不均勻,對顯示造成較大影響。In the traditional structure, the lamination of the touch film needs to be completed using a vacuum laminating machine. The touch film placed on the stage of the vacuum laminating machine is absorbed by the negative pressure generated by the vacuum hole, and the touch film is flexible Material, the vacuum negative pressure generated at the vacuum hole is very easy to cause the touch film to produce a "water ripple"-like deformation. This deformation is difficult to be eliminated after the bonding is completed. The deformation of the touch film will make the visual effect uneven. The display has a greater impact.

本發明提供一種貼合裝置,包括:The invention provides a laminating device, including:

上蓋;上壓頭,可活動地設置於該上蓋內,用於固定一第一待貼合元件;下平臺,用於與該上蓋配合形成一第一容置腔;下壓頭,設置於該下平臺上並在下平臺與上蓋配合形成該第一容置腔時位於該第一容置腔內,該下壓頭與該下平臺配合形成一第二容置腔,該下壓頭包括一與該上壓頭相對設置的下載台,該下載台用於承載一第二待貼合元件,該下載臺上開設有貫通該下載台的真空孔;內載台,可活動地設置於該第二容置腔內,該內載臺上設置有密封柱,所述密封柱用於在所述第一容置腔與所述第二容置腔的真空狀態相同時封堵所述真空孔。The upper cover; the upper pressure head is movably arranged in the upper cover for fixing a first component to be attached; the lower platform is used for forming a first accommodating cavity with the upper cover; the lower pressure head is arranged in the The lower platform is located in the first receiving cavity when the lower platform and the upper cover cooperate to form the first receiving cavity. The lower pressing head cooperates with the lower platform to form a second receiving cavity. The lower pressing head includes a A download station opposite to the upper pressure head, the download station is used to carry a second component to be attached, and the download station is provided with a vacuum hole penetrating the download station; the inner loading station is movably arranged on the second In the accommodating cavity, a sealing post is provided on the inner stage, and the sealing post is used to block the vacuum hole when the vacuum states of the first accommodating cavity and the second accommodating cavity are the same.

還提供一種使用本發明的貼合裝置的元件貼合的方法,包括如下步驟:Also provided is a method for bonding components using the bonding apparatus of the present invention, including the following steps:

提供一第一待貼合元件和一第二待貼合元件,將所述第一待貼合元件和所述第二待貼合元件分別固定於所述上壓頭及所述下載臺上,使所述第一待貼合元件和所述第二待貼合元件相對放置,其中所述第二待貼合元件藉由真空吸附方式固定於所述下載臺上,所述第二容置腔保持一第一真空狀態;使所述上蓋及所述下平臺扣合形成所述第一容置腔,並使所述第一待貼合元件及所述第二待貼合元件正對且間隔設置;對第一容置腔抽真空,使第一容置腔與第二容置腔內部壓強趨於相同,在第一容置腔與第二容置腔壓強相同之前,使所述密封柱封堵所有真空孔,持續對第一容置腔及第二容置腔抽真空使二者共同達到第二真空狀態的過程與所述密封柱封堵所述真空孔的過程同步完成;移動上載台和/或下載台使第一待貼合元件與第二待貼合元件貼合在一起。Providing a first to-be-laminated element and a second to-be-laminated element, respectively fixing the first to-be-laminated element and the second to-be-laminated element on the upper pressing head and the downloading station, The first to-be-laminated element and the second to-be-laminated element are placed relative to each other, wherein the second to-be-laminated element is fixed on the downloading table by a vacuum suction method, and the second accommodating cavity Maintain a first vacuum state; buckle the upper cover and the lower platform to form the first accommodating cavity, and make the first to-be-laminated element and the second to-be-laminated element face and spaced Set; evacuate the first accommodating cavity to make the internal pressure of the first accommodating cavity and the second accommodating cavity tend to be the same. Before the pressure of the first accommodating cavity and the second accommodating cavity are the same, make the sealing column Block all vacuum holes, continue to evacuate the first containing chamber and the second containing chamber to achieve the second vacuum state together with the process of sealing the vacuum holes by the sealing column; move upload The station and/or the downloading station bond the first component to be bonded and the second component to be bonded together.

上述貼合裝置包括該內載台,使用該貼合裝置進行元件貼合時,藉由控制內載台的移動,使得位於內載臺上的密封柱在合適的時間嵌入真空孔中,可以有效消除“水波紋”形變問題。The above laminating device includes the inner stage. When the laminating device is used for laminating components, by controlling the movement of the inner stage, the sealing column on the inner stage can be embedded in the vacuum hole at an appropriate time, which can be effective Eliminate the "water ripple" deformation problem.

為了使本申請所揭示的技術內容更加詳盡與完備,可參照附圖以及本發明之下述各種具體實施例,附圖中相同的標記代表相同或相似的元件。然而,本領域的普通技術人員應當理解,下文中所提供的實施例並非用來限制本發明所覆蓋的範圍。此外,附圖僅僅用於示意性地加以說明,並未依照其實際尺寸按比例進行繪製。In order to make the technical content disclosed in this application more detailed and complete, reference may be made to the drawings and the following various specific embodiments of the present invention. The same symbols in the drawings represent the same or similar elements. However, those of ordinary skill in the art should understand that the embodiments provided below are not intended to limit the scope of the present invention. In addition, the drawings are for illustrative purposes only, and are not drawn to scale according to their actual dimensions.

下面參照附圖,對本發明之具體實施方式作進一步的詳細描述。The specific embodiments of the present invention will be further described in detail below with reference to the drawings.

如圖1所示,為本發明實施例的貼合裝置10的立體分解示意圖,貼合裝置10包括上蓋11、上壓頭12、下壓頭15、下平臺16以及內載台18。上蓋11包括一開口111及容置部113;上壓頭12包括一伸縮部121和一上載台122;下壓頭15包括下載台151、側壁156、真空孔152以及第二容置腔150;內載台18包括板部183、多個密封柱184以及伸縮軸185。第一待貼合元件13及第二待貼合元件14藉由貼合裝置10進行貼合。As shown in FIG. 1, it is a three-dimensional exploded schematic view of a laminating device 10 according to an embodiment of the present invention. The laminating device 10 includes an upper cover 11, an upper pressure head 12, a lower pressure head 15, a lower platform 16 and an inner stage 18. The upper cover 11 includes an opening 111 and an accommodating portion 113; the upper head 12 includes a telescopic portion 121 and an upper stage 122; the lower head 15 includes a downloading stage 151, a side wall 156, a vacuum hole 152, and a second accommodating chamber 150; The inner stage 18 includes a plate portion 183, a plurality of sealing columns 184, and a telescopic shaft 185. The first to-be-laminated element 13 and the second to-be-laminated element 14 are bonded by the bonding device 10.

如圖2所示,為本發明實施例的貼合裝置10的立體示意圖。上蓋11與下平臺16相對設置,上蓋11的開口111設置於上蓋11一表面,開口111相對於下平臺16設置且與容置部113貫通。上壓頭12可活動地設置於容置部113內,伸縮部121的一端與上蓋11連接,伸縮部121的另一端與上載台122連接以控制上載台122的運動,上載台122對應開口111設置。下平臺16用於與該上蓋11配合形成一第一容置腔110(參圖4),下壓頭15設置於下平臺16與上蓋11相對設置的表面,並在下平臺16與上蓋11配合形成該第一容置腔110時位於該第一容置腔110內。下壓頭15與下平臺16相互配合形成一第二容置腔150,其中下載台151與上載台122相對設置,側壁156圍繞下載台151設置,下載台151、側壁156以及下平臺16構成第二容置腔150的外壁,真空孔152貫穿設置於下載台151上。內載台18可活動地設置於該第二容置腔150內部,板部183的尺寸略小於下載台151的尺寸,多個密封柱184設置於板部183一側表面並由板部183朝向下載台151凸伸,密封柱184對應真空孔152設置,密封柱184的形狀、數量、尺寸分別與真空孔152的形狀、數量、尺寸相匹配,伸縮軸185設置於板部183遠離密封柱184一側,伸縮軸185的長度可變化,其可以在一定限度內進行伸縮,伸縮軸185用於帶動板部183在第二容置腔150內移動。As shown in FIG. 2, it is a schematic perspective view of a bonding apparatus 10 according to an embodiment of the invention. The upper cover 11 is disposed opposite to the lower platform 16. The opening 111 of the upper cover 11 is disposed on a surface of the upper cover 11. The opening 111 is disposed relative to the lower platform 16 and penetrates the receiving portion 113. The upper head 12 is movably disposed in the accommodating portion 113, one end of the telescopic portion 121 is connected to the upper cover 11, and the other end of the telescopic portion 121 is connected to the upper stage 122 to control the movement of the upper stage 122, and the upper stage 122 corresponds to the opening 111 Settings. The lower platform 16 is used to cooperate with the upper cover 11 to form a first accommodating cavity 110 (see FIG. 4 ). The lower pressure head 15 is disposed on a surface of the lower platform 16 and the upper cover 11 opposite to each other, and is formed on the lower platform 16 and the upper cover 11. The first accommodating cavity 110 is located in the first accommodating cavity 110. The lower head 15 and the lower platform 16 cooperate with each other to form a second accommodating cavity 150, wherein the downloading table 151 and the upper loading table 122 are oppositely arranged, the side wall 156 is arranged around the downloading table 151, and the downloading table 151, the side wall 156 and the lower platform 16 constitute a first On the outer wall of the two accommodating chambers 150, the vacuum holes 152 penetrate through the downloading table 151. The inner stage 18 is movably disposed inside the second accommodating cavity 150, the size of the plate portion 183 is slightly smaller than the size of the downloading platform 151, and a plurality of sealing posts 184 are provided on one side surface of the plate portion 183 and faced by the plate portion 183 The downloading table 151 protrudes, and the sealing post 184 is provided corresponding to the vacuum hole 152. The shape, number, and size of the sealing post 184 match the shape, number, and size of the vacuum hole 152, respectively, and the telescopic shaft 185 is provided on the plate portion 183 away from the sealing post 184 On one side, the length of the telescopic shaft 185 can be changed, and it can be telescopic within a certain limit. The telescopic shaft 185 is used to drive the plate portion 183 to move in the second accommodating cavity 150.

於一實施例中,上蓋11大致為一端開口的矩形框體。在其他實施例中,上蓋11可以為一端開口且中空的柱狀結構。上壓頭12設置於容置部113內,可藉由該開口111向上蓋11外延伸,或者位於下平臺16上的下壓頭15可藉由該開口111進入上蓋11內部。上載台122的伸縮部121為一柱狀結構,上載台122及伸縮部121內可佈設有相互連接的真空管道,使得上載台122可真空吸附放置於其表面的第一待貼合元件13。伸縮部121的長度可變化,其可以在一定限度內進行伸縮。In one embodiment, the upper cover 11 is a rectangular frame with one end open. In other embodiments, the upper cover 11 may be a cylindrical structure with one end open and hollow. The upper pressure head 12 is disposed in the accommodating portion 113, and can extend out of the upper cover 11 through the opening 111, or the lower pressure head 15 on the lower platform 16 can enter the inside of the upper cover 11 through the opening 111. The telescopic portion 121 of the upper stage 122 is a column-shaped structure, and vacuum pipes connected to each other can be disposed in the upper stage 122 and the telescopic portion 121, so that the first stage 122 to be bonded on the surface of the upper stage 122 can be vacuum-adsorbed. The length of the expansion and contraction part 121 can be changed, and it can expand and contract within a certain limit.

於一實施例中,下壓頭15為一中空的矩形框體,真空孔152與第二容置腔150貫通形成真空通道,所述真空孔152的數量不做特別限制,其可以為一個或者多個,本實施例中所述真空孔152為多個。當第二容置腔150進行抽真空時,下壓頭15外部壓強大於第二容置腔150內部的壓強,真空孔152對應下壓頭15外部的開口處將產生負壓並產生吸力,使得下載台151可真空吸附放置於其表面的第二待貼合元件14。In an embodiment, the lower pressure head 15 is a hollow rectangular frame, and the vacuum holes 152 and the second accommodating cavity 150 penetrate to form a vacuum channel. The number of the vacuum holes 152 is not particularly limited, and it may be one or There are a plurality of vacuum holes 152 in this embodiment. When the second accommodating cavity 150 is evacuated, the external pressure of the lower pressure head 15 is stronger than the internal pressure of the second accommodating cavity 150, and the vacuum hole 152 corresponding to the opening outside the lower pressure head 15 will generate negative pressure and generate suction, so that The downloading table 151 can vacuum suction the second to-be-laminated component 14 placed on its surface.

下面結合圖3至圖6對使用該貼合裝置10在元件貼合過程中的運動方式進行描述。The following describes the movement mode of using the bonding device 10 during the bonding process of components with reference to FIGS. 3 to 6.

如圖3所示,為本發明實施例的貼合裝置10的進行元件貼合時的第一狀態示意圖。第一狀態為初始狀狀態,上蓋11與下平臺16不接觸,下壓頭15位於容置部113外部,上壓頭12位於容置部113內部,上載台122與下載台151不接觸,真空孔152均未被密封柱184填充,第一待貼合元件13和第二待貼合元件14分別置於上載台122及下載台151上,第一待貼合元件13和第二待貼合元件14相對放置。As shown in FIG. 3, it is a schematic diagram of the first state of the bonding apparatus 10 of the embodiment of the present invention when bonding components. The first state is the initial state, the upper cover 11 is not in contact with the lower platform 16, the lower pressure head 15 is located outside the accommodation portion 113, the upper pressure head 12 is located inside the accommodation portion 113, the uploading platform 122 is not in contact with the downloading platform 151, the vacuum The holes 152 are not filled by the sealing post 184, the first to-be-laminated element 13 and the second to-be-laminated element 14 are respectively placed on the uploading table 122 and the downloading table 151, and the first to-be-laminated element 13 and the second to-be-laminated element The components 14 are placed relatively.

如圖4所示,為本發明實施例的貼合裝置10的進行元件貼合時的第二狀態示意圖。第二狀態為待貼合物對位元狀態,上蓋11與下平臺16扣合形成第一容置腔110,下壓頭15位於第一容置腔110內部,上載台122及下載台151正對設置,且第一待貼合元件13與第二待貼合元件14之間存在一預定距離。As shown in FIG. 4, it is a schematic diagram of the second state when the bonding device 10 of the embodiment of the present invention performs component bonding. The second state is the alignment state of the to-be-adhered patch. The upper cover 11 and the lower platform 16 are engaged to form a first accommodating cavity 110, the lower pressure head 15 is located inside the first accommodating cavity 110, and the uploading platform 122 and the downloading platform 151 are aligned. Paired, and there is a predetermined distance between the first to-be-laminated element 13 and the second to-be-laminated element 14.

如圖5所示,為本發明實施例的貼合裝置10的進行元件貼合時的第三狀態示意圖。第三狀態為真空貼合狀態,當伸縮軸185推動板部183向下載台151運動一段距離後,多個密封柱184分別位於多個真空孔152中並將真空孔152完全封堵。As shown in FIG. 5, it is a schematic diagram of the third state of the bonding apparatus 10 according to the embodiment of the present invention when bonding components. The third state is the vacuum bonding state. When the telescopic shaft 185 pushes the plate portion 183 to move toward the download platform 151 for a distance, the plurality of sealing columns 184 are respectively located in the plurality of vacuum holes 152 and completely seal the vacuum holes 152.

如圖6所示,為本發明實施例的貼合裝置10貼合工件時第一待貼合元件13與第二待貼合元件14貼合在一起的局部截面示意圖。當伸縮軸185推動板部183向下載台151運動時,每一個密封柱184恰好可以對應進入一個真空孔152中,使得真空孔152被密封柱184封堵。當上蓋11與下平臺16配合形成第一容置腔110時,可對第一容置腔110抽真空使其形成真空狀態。第二容置腔150也可形成真空狀態。密封柱184用於在第一容置腔110與第二容置腔150的真空狀態相同時封堵真空孔152,以防止第二待貼合元件14表面形成部分區域凹陷的“水波紋”狀褶皺。密封柱184可由彈性材料製成,於一實施例中,密封柱184由矽膠製成。密封柱184的尺寸也可略大於真空孔152的尺寸,密封柱184為柔性材料,密封柱184與真空孔152實現過盈配合。As shown in FIG. 6, it is a partial cross-sectional schematic diagram of the first to-be-laminated element 13 and the second to-be-laminated element 14 being bonded together when the bonding device 10 of the embodiment of the present invention is bonding a workpiece. When the telescopic shaft 185 pushes the plate portion 183 toward the downloading table 151, each sealing post 184 can just correspond to a vacuum hole 152, so that the vacuum hole 152 is blocked by the sealing post 184. When the upper cover 11 cooperates with the lower platform 16 to form the first accommodating cavity 110, the first accommodating cavity 110 may be evacuated to form a vacuum state. The second accommodating cavity 150 may also form a vacuum state. The sealing column 184 is used to block the vacuum hole 152 when the vacuum state of the first accommodating chamber 110 and the second accommodating chamber 150 are the same, so as to prevent the surface of the second to-be-laminated element 14 from forming a partially water-recessed “water ripple” shape Folds. The sealing post 184 may be made of an elastic material. In an embodiment, the sealing post 184 is made of silicone. The size of the sealing post 184 may also be slightly larger than the size of the vacuum hole 152. The sealing post 184 is a flexible material, and the sealing post 184 and the vacuum hole 152 achieve an interference fit.

如圖7所示,本實施例使用該貼合裝置10的元件貼合方法包括如下步驟:As shown in FIG. 7, the component bonding method using the bonding apparatus 10 in this embodiment includes the following steps:

步驟S1,提供第一待貼合元件13和第二待貼合元件14,將第一待貼合元件13和第二待貼合元件14分別置於上載台122及下載台151上,使第一待貼合元件13和第二待貼合元件14相對放置,其中第二待貼合元件14藉由真空吸附方式固定於下載台151上,第二容置腔150保持第一真空狀態。In step S1, the first to-be-laminated component 13 and the second to-be-laminated component 14 are provided, and the first to-be-laminated component 13 and the second to-be-laminated component 14 are placed on the uploading platform 122 and the downloading platform 151, respectively, so that A to-be-laminated component 13 and a second to-be-laminated component 14 are placed oppositely, wherein the second to-be-laminated component 14 is fixed on the downloading table 151 by vacuum suction, and the second accommodating cavity 150 maintains the first vacuum state.

第一待貼合元件13設置於上載台122表面並藉由真空吸附方式固定。第二待貼合元件14設置於下載台151表面並藉由真空吸附方式固定,該過程中,第二容置腔150內持續抽真空,但並不會到達真空臨界值,保持第二容置腔150處於壓強為小於大氣壓強的第一真空狀態。在一實施例中,第一待貼合元件13為一玻璃蓋板,第二待貼合元件14為一側塗布有光學膠的觸控薄膜,觸控薄膜上形成有用於觸控感測的電極,吸附於該下載台151上時該光學膠位於觸控薄膜朝向該上載台122的一側。在其他實施例中,第二待貼合元件14也可為其他柔性材料的工件。The first component 13 to be bonded is disposed on the surface of the upper stage 122 and fixed by vacuum suction. The second to-be-laminated component 14 is disposed on the surface of the downloading table 151 and is fixed by vacuum suction. During this process, the second accommodating cavity 150 continues to be evacuated, but it will not reach the vacuum threshold and maintain the second accommodating position. The cavity 150 is in a first vacuum state with a pressure less than atmospheric pressure. In one embodiment, the first component to be bonded 13 is a glass cover plate, and the second component to be bonded 14 is a touch film coated with optical glue on one side, and a touch sensing film is formed on the touch film When the electrode is adsorbed on the download stage 151, the optical glue is located on the side of the touch film facing the upload stage 122. In other embodiments, the second component 14 to be bonded may also be a workpiece of other flexible materials.

步驟S2,使上蓋11與下平臺16扣合形成第一容置腔110,並使第一待貼合元件13與第二待貼合元件14正對且間隔設置。In step S2, the upper cover 11 and the lower platform 16 are snapped together to form a first accommodating cavity 110, and the first to-be-laminated element 13 and the second to-be-laminated element 14 are directly and spaced apart.

移動上蓋11及下平臺16中的至少其中之一使得上蓋11的開口111被下平臺16閉合以形成第一容置腔110,此時下壓頭15位於第一容置腔110內部;調整上載台122及下載台151的位置使得二者正對設置,同時保持第一待貼合元件13與第二待貼合元件14之間存在一預定距離,本實施例中,該預定距離為150μm。Move at least one of the upper cover 11 and the lower platform 16 so that the opening 111 of the upper cover 11 is closed by the lower platform 16 to form the first accommodating cavity 110, at this time the lower head 15 is located inside the first accommodating cavity 110; adjust the upload The positions of the platform 122 and the downloading platform 151 are such that they are directly opposed to each other, while maintaining a predetermined distance between the first component 13 to be bonded and the second component 14 to be bonded. In this embodiment, the predetermined distance is 150 μm.

步驟S3,對第一容置腔110抽真空,使第一容置腔110與第二容置腔150內部壓強趨於相同,在第一容置腔110與第二容置腔150壓強相同之前,使密封柱184封堵所有真空孔152,並持續對第一容置腔110及第二容置腔150抽真空使二者共同達到第二真空狀態的過程與密封柱184封堵真空孔152的過程同步完成。Step S3: Vacuum the first accommodating chamber 110 so that the internal pressure of the first accommodating chamber 110 and the second accommodating chamber 150 tend to be the same, before the pressure of the first accommodating chamber 110 and the second accommodating chamber 150 are the same , The sealing column 184 blocks all the vacuum holes 152, and continues to evacuate the first accommodating chamber 110 and the second accommodating chamber 150 so that the two can reach the second vacuum state together with the sealing column 184 sealing the vacuum holes 152 The process is completed synchronously.

對第一容置腔110抽真空,使第一容置腔110內部壓強快速下降,當在第一容置腔110與第二容置腔150壓強相同之前,藉由伸縮軸185推動板部183上升,使得密封柱184進入真空孔152中並將真空孔152完全封堵,且,與此同時持續對第一容置腔110及第二容置腔150抽真空使二者共同達到第二真空狀態的過程與密封柱184封堵所述真空孔152的過程同步完成。The first accommodating cavity 110 is evacuated so that the pressure inside the first accommodating cavity 110 drops rapidly. Before the pressure of the first accommodating cavity 110 and the second accommodating cavity 150 are the same, the plate portion 183 is pushed by the telescopic shaft 185 Ascending, the sealing column 184 enters the vacuum hole 152 and completely seals the vacuum hole 152, and at the same time, continuously evacuates the first accommodating chamber 110 and the second accommodating chamber 150 so that the two together reach the second vacuum The process of the state is completed in synchronization with the process of sealing the vacuum hole 152 by the sealing column 184.

第二真空狀態對應的壓強小於該第一真空狀態對應的壓強,本實施例中,該第二真空狀態係指目前工業標準中認可的且可以達到的真空狀態(並非特指絕對真空),該真空狀態可以儘量避免貼合過程中產生氣泡。The pressure corresponding to the second vacuum state is less than the pressure corresponding to the first vacuum state. In this embodiment, the second vacuum state refers to a vacuum state recognized and achievable in current industry standards (not specifically referring to absolute vacuum). Vacuum state can try to avoid bubbles during the bonding process.

步驟S4,移動上載台122和/或下載台151使第一待貼合元件13與第二待貼合元件14貼合在一起。In step S4, the uploading platform 122 and/or the downloading platform 151 move the first component 13 to be bonded and the second component 14 to be bonded together.

步驟S5,同時解除第一容置腔110及第二容置腔150的真空狀態,使上蓋11與下平臺16分離,取出貼合在一起的第一待貼合元件13與第二待貼合元件14。Step S5, the vacuum states of the first accommodating cavity 110 and the second accommodating cavity 150 are released at the same time, the upper cover 11 and the lower platform 16 are separated, and the first to-be-laminated element 13 and the second to-be-laminated which are bonded together are taken out Element 14.

上述方法中,當第一容置腔110內除第二容置腔150之外的區域的壓強與第二容置腔150內部的壓強即將相同時,使得密封柱184進入真空孔152中並將真空孔152封堵,在密封柱184進入真空孔152的過程中,第二待貼合元件14並未與第一待貼合元件13完成貼合,真空孔152被封堵使得第二待貼合元件14靠近下載台151一側失去吸附力,另一側(靠近第二待貼合元件14的一側)的負壓壓強在短時間較大,使得第二待貼合元件14的“水波紋”在該負壓的作用下得以修復。In the above method, when the pressure in the first accommodating chamber 110 excluding the second accommodating chamber 150 is about to be the same as the pressure inside the second accommodating chamber 150, the sealing column 184 enters the vacuum hole 152 and The vacuum hole 152 is blocked. During the process of the sealing column 184 entering the vacuum hole 152, the second component 14 to be bonded does not complete the bonding with the first component 13 to be bonded, and the vacuum hole 152 is blocked so that the second component to be bonded The side of the closing element 14 close to the downloading table 151 loses its suction force, and the negative pressure on the other side (the side close to the second element 14 to be attached) is relatively large in a short time, making the "water of the second element 14 to be attached" "Ripple" is repaired under this negative pressure.

上文中,參照附圖描述了本發明之具體實施方式。然,本領域中的普通技術人員能夠理解,在不偏離本發明之精神和範圍的情況下,亦可對本發明之具體實施方式作各種變更和替換。該些變更和替換都落在本發明申請專利範圍所限定的範圍內。In the foregoing, specific embodiments of the present invention have been described with reference to the accompanying drawings. Of course, those of ordinary skill in the art can understand that various changes and replacements can be made to the specific embodiments of the present invention without departing from the spirit and scope of the present invention. These changes and replacements all fall within the scope defined by the patent application scope of the present invention.

10‧‧‧貼合裝置 11‧‧‧上蓋 111‧‧‧開口 110‧‧‧第一容置腔 113‧‧‧容置部 12‧‧‧上壓頭 121‧‧‧伸縮部 122‧‧‧上載台 15‧‧‧下壓頭 151‧‧‧下載台 152‧‧‧真空孔 156‧‧‧側壁 150‧‧‧第二容置腔 16‧‧‧下平臺 18‧‧‧內載台 183‧‧‧板部 184‧‧‧密封柱 185‧‧‧伸縮軸 13‧‧‧第一待貼合元件 14‧‧‧第二待貼合元件 S1~S5‧‧‧貼合步驟 10‧‧‧ Laminating device 11‧‧‧Cover 111‧‧‧ opening 110‧‧‧ First receiving cavity 113‧‧‧Accommodation Department 12‧‧‧Upper indenter 121‧‧‧Telescopic Department 122‧‧‧Uploading station 15‧‧‧ Lower pressure head 151‧‧‧ download station 152‧‧‧vacuum hole 156‧‧‧Sidewall 150‧‧‧Second accommodating cavity 16‧‧‧ Lower platform 18‧‧‧Inner stage 183‧‧‧ Board Department 184‧‧‧Seal column 185‧‧‧telescopic shaft 13‧‧‧The first component to be bonded 14‧‧‧The second component to be bonded S1~S5‧‧‧‧Laying procedure

圖1為本發明實施例的貼合裝置的立體分解示意圖。FIG. 1 is a three-dimensional exploded schematic view of a bonding device according to an embodiment of the invention.

圖2為本發明實施例的貼合裝置的立體示意圖。FIG. 2 is a schematic perspective view of a bonding device according to an embodiment of the invention.

圖3為本發明實施例的貼合裝置的進行元件貼合時的第一狀態示意圖。FIG. 3 is a schematic diagram of a first state of the bonding apparatus according to an embodiment of the present invention when bonding components.

圖4為本發明實施例的貼合裝置的進行元件貼合時的第二狀態示意圖。FIG. 4 is a schematic diagram of a second state when the bonding device of the embodiment of the present invention performs component bonding.

圖5為本發明實施例的貼合裝置的進行元件貼合時的第三狀態示意圖。FIG. 5 is a schematic diagram of a third state of the bonding apparatus according to an embodiment of the present invention when bonding components.

圖6為本發明實施例的貼合裝置貼合工件時第一待貼合元件與第二待貼合元件貼合在一起的局部截面示意圖。6 is a partial cross-sectional schematic diagram of the first to-be-laminated component and the second to-be-laminated component being bonded together when the bonding device of the embodiment of the present invention is bonding a workpiece.

圖7為使用本發明實施例的貼合裝置進行元件貼合的方法的流程示意圖。7 is a schematic flowchart of a method for bonding components using the bonding apparatus according to an embodiment of the present invention.

10‧‧‧貼合裝置 10‧‧‧ Laminating device

11‧‧‧上蓋 11‧‧‧Cover

111‧‧‧開口 111‧‧‧ opening

113‧‧‧容置部 113‧‧‧Accommodation Department

12‧‧‧上壓頭 12‧‧‧Upper indenter

121‧‧‧伸縮部 121‧‧‧Telescopic Department

122‧‧‧上載台 122‧‧‧Uploading station

15‧‧‧下壓頭 15‧‧‧ Lower pressure head

151‧‧‧下載台 151‧‧‧ download station

152‧‧‧真空孔 152‧‧‧vacuum hole

156‧‧‧側壁 156‧‧‧Sidewall

150‧‧‧第二容置腔 150‧‧‧Second accommodating cavity

16‧‧‧下平臺 16‧‧‧ Lower platform

18‧‧‧內載台 18‧‧‧Inner stage

183‧‧‧板部 183‧‧‧ Board Department

184‧‧‧密封柱 184‧‧‧Seal column

185‧‧‧伸縮軸 185‧‧‧telescopic shaft

13‧‧‧第一待貼合元件 13‧‧‧The first component to be bonded

14‧‧‧第二待貼合元件 14‧‧‧The second component to be bonded

Claims (10)

一種貼合裝置,其改良在於,包括: 上蓋; 上壓頭,可活動地設置於所述上蓋內; 下平臺,用於與所述上蓋配合形成一第一容置腔; 下壓頭,設置於所述下平臺上並在所述下平臺與所述上蓋配合形成所述第一容置腔時位於所述第一容置腔內,所述下壓頭與所述下平臺配合形成一第二容置腔,所述下壓頭包括一與所述上壓頭相對設置的下載台,所述下載臺上開設有貫通所述下載台的真空孔;以及 內載台,可活動地設置於所述第二容置腔內,所述內載臺上設置有密封柱,所述密封柱用於在所述第一容置腔與所述第二容置腔的真空狀態相同時封堵所述真空孔。A fitting device, the improvement of which includes: an upper cover; an upper head, which is movably arranged in the upper cover; a lower platform, which cooperates with the upper cover to form a first accommodating cavity; a lower head, provided Located on the lower platform and when the lower platform and the upper cover cooperate to form the first accommodating cavity, the lower pressure head cooperates with the lower platform to form a first Two accommodating chambers, the lower pressure head includes a downloading table opposite to the upper pressure head, and a vacuum hole penetrating the downloading table is opened on the downloading table; and an internal loading table is movably set at In the second accommodating cavity, a sealing post is provided on the inner stage, and the sealing post is used to block off the first accommodating cavity and the second accommodating cavity in the same vacuum state. Said the vacuum hole. 如請求項1所述之貼合裝置,其中:所述內載台還包括一板部及與所述板部連接的一伸縮軸,所述密封柱形成於所述板部上並由所述板部朝向所述下載台凸伸,所述伸縮軸用於帶動所述板部及所述密封柱在所述第二容置腔內移動。The laminating device according to claim 1, wherein: the inner stage further includes a plate portion and a telescopic shaft connected to the plate portion, the sealing column is formed on the plate portion and is formed by the The plate portion protrudes toward the download platform, and the telescopic shaft is used to drive the plate portion and the sealing column to move in the second accommodating cavity. 如請求項1所述之貼合裝置,其中:所述真空孔與所述密封柱的形狀、尺寸相同。The laminating device according to claim 1, wherein the vacuum hole has the same shape and size as the sealing column. 如請求項1所述之貼合裝置,其中:所述密封柱的尺寸大於所述真空孔的尺寸,所述密封柱為柔性材料。The laminating device according to claim 1, wherein the size of the sealing column is larger than the size of the vacuum hole, and the sealing column is a flexible material. 如請求項1所述之貼合裝置,其中:所述真空孔與所述第二容置腔相通以構成真空通道。The laminating device according to claim 1, wherein the vacuum hole communicates with the second accommodating cavity to form a vacuum channel. 如請求項1所述之貼合裝置,其中:所述上壓頭用於固定一第一待貼合元件,所述下載台用於承載一第二待貼合元件。The bonding device according to claim 1, wherein the upper pressing head is used to fix a first component to be bonded, and the downloading station is used to carry a second component to be bonded. 如請求項6所述之貼合裝置,其中:所述上蓋內包括一容置部,所述上壓頭包括一伸縮部和與所述伸縮部連接的一上載台,所述上載台用於固定所述第一待貼合元件,所述伸縮部用於帶動所述上載台在所述容置部內移動。The laminating device according to claim 6, wherein: the upper cover includes an accommodating portion, the upper indenter includes a telescopic portion and an uploading table connected to the telescopic portion, the uploading table is used for The first to-be-laminated element is fixed, and the telescopic part is used to drive the loading table to move in the accommodating part. 使用如請求項1-7任意一項所述之貼合裝置的元件貼合方法,包括如下步驟: 提供一第一待貼合元件和一第二待貼合元件,將所述第一待貼合元件和所述第二待貼合元件分別固定於所述上壓頭及所述下載臺上,使所述第一待貼合元件和所述第二待貼合元件相對放置,其中所述第二待貼合元件藉由真空吸附方式固定於所述下載臺上,所述第二容置腔保持一第一真空狀態; 使所述上蓋及所述下平臺扣合形成所述第一容置腔,並使所述第一待貼合元件及所述第二待貼合元件正對且間隔設置; 對所述第一容置腔抽真空,使所述第一容置腔與所述第二容置腔內部壓強趨於相同,在所述第一容置腔與所述第二容置腔壓強相同之前,使所述密封柱封堵每個所述真空孔,持續對所述第一容置腔及所述第二容置腔抽真空使二者共同達到一第二真空狀態的過程與所述密封柱封堵所述真空孔的過程同步完成;以及 移動所述上載台和/或所述下載台使所述第一待貼合元件與所述第二待貼合元件貼合在一起。The component bonding method using the bonding device according to any one of claims 1-7 includes the following steps: providing a first component to be bonded and a second component to be bonded, and placing the first component to be bonded The joining element and the second to-be-attached element are respectively fixed on the upper indenter and the downloading platform, so that the first to-be-attached element and the second to-be-attached element are placed relatively, wherein the The second to-be-laminated component is fixed on the download platform by vacuum suction, and the second accommodating cavity maintains a first vacuum state; the upper cover and the lower platform are snapped together to form the first container Place a cavity and make the first to-be-laminated element and the second to-be-laminated element face and spaced apart; evacuate the first containing cavity to make the first containing cavity and the The internal pressure of the second accommodating cavity tends to be the same. Before the pressure of the first accommodating cavity and the second accommodating cavity are the same, the sealing column blocks each of the vacuum holes and continues to The process of evacuating a containing cavity and the second containing cavity to achieve a second vacuum state together with the process of sealing the vacuum hole by the sealing column is completed synchronously; and moving the upload stage and/or Or the downloading station bonds the first component to be bonded and the second component to be bonded together. 如請求項8所述之貼合裝置的元件貼合方法,其中:所述第二真空狀態對應的壓強小於所述第一真空狀態對應的壓強。The component bonding method of the bonding apparatus according to claim 8, wherein: the pressure corresponding to the second vacuum state is smaller than the pressure corresponding to the first vacuum state. 如請求項8所述之貼合裝置的元件貼合方法,還包括以下步驟:同時解除所述第一容置腔及所述第二容置腔的真空狀態,使所述上蓋與所述下平臺分離。The component bonding method of the bonding apparatus according to claim 8, further comprising the steps of: simultaneously releasing the vacuum state of the first accommodating cavity and the second accommodating cavity, so that the upper cover and the lower Platform separation.
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