TW201938984A - Optical inspection apparatus - Google Patents

Abstract

An optical inspection apparatus is used to inspect a test sample placed on a working plane. The optical inspection apparatus includes a frame, an image capturing component, a rotating carrier, a first light source and a second light source. The image capturing component and the rotating carrier are disposed on the frame. The image capturing component has a light axis, and the light axis extends through the test sample. The first light source and the second light source are respectively disposed at two opposite sides of the rotating carrier. The rotating carrier is configured to rotate relative to the fame around an axis to switch orientations of the first light source and the second light source. Hence, there is no necessary to disassemble and assemble the light sources and would not affect the projection angle of the lights, which ease of use and has excellent reliability.

Description

Optical inspection equipment

The invention relates to a detection device, and in particular to an optical detection device.

In order to improve the efficiency of automated production, Automated Optical Inspection has been widely used in related industries such as panel, circuit board, wafer, light-emitting diode or packaging test, which can pass high-speed, high-precision optical The image detection system obtains the image of the object to be tested for defect judgment, positioning measurement, size measurement or geometric measurement, etc., instead of the traditional method of using optical instruments for detection by human labor.

In response to detection requirements, most automatic optical detection devices are provided with at least two light sources, which are used to light the object to be measured, for example, coaxial light is used to coaxially light the object to be measured, or side light sources are used to incline the object to be measured. Oblique lighting. Further, the side light source may be a visible light source or an invisible light source (such as infrared light and / or ultraviolet light). In practice, in the process of replacing the side light source, the user must first remove the original side light source from the machine. After disassembling it, the other side light source is assembled to the machine, which not only takes time to disassemble, but also affects the lighting angle of the side light source.

The invention provides an optical detection device, which has excellent convenience and reliability.

The optical detection device of the present invention is used to detect a test object placed on a work plane. The optical detection device includes a carrier, an image capturing element, a rotating carrier, a first light source and a second light source. The image capturing element is arranged on the carrier. The image capturing element has an optical axis, and the optical axis extends through the object to be measured. The rotary carrier is arranged on the carrier and is located on one side of the image capturing element. The first light source is configured to emit a first light. The second light source and the first light source are respectively disposed on opposite sides of the rotary carrier, and are configured to emit a second light. The rotating carrier is configured to rotate relative to the carrier according to an axis so that the first light from the first light source or the second light from the second light source strikes the object to be measured, and the axis intersects the optical axis.

Based on the above, the optical detection device of the present invention can switch the orientation of the first light source and the second light source by rotating the carrier plate, so that one of the first light source and the second light source faces the beam splitting element, and it is not only necessary to disassemble and replace the light source. The program can also avoid affecting the projection angle of light, so it has excellent convenience and reliability.

In order to make the above features and advantages of the present invention more comprehensible, embodiments are hereinafter described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic diagram of an optical detection device according to an embodiment of the present invention. FIG. 2 is a schematic diagram after the rotary carrier of FIG. 1 is rotated. Please refer to FIG. 1 and FIG. 2. In this embodiment, the optical detection device 100 can be used to detect the object to be measured 20 placed on the work plane 10, and the user can switch the positions of at least two light sources according to the needs to choose to pass through them. The light emitted by a light source is directed toward the object 20 to be measured. Specifically, the optical detection device 100 includes a carrier 110, a spectroscopic element 120, an image capturing element 130, a rotating carrier 140, a first light source 150, and a second light source 160. The spectroscopic element 120, image capturing element 130, The transfer tray 140 is all disposed on the carrier 110, and the object to be measured 20, the light splitting element 120 and the image capturing element 130 are aligned with each other.

The object to be measured 20 and the image capturing element 130 are located on opposite sides of the spectroscopic element 120, respectively. The image capturing element 130 has an optical axis 131, and the optical axis 131 extends through the spectroscopic element 120 and the object to be measured 20. Therefore, the light reflected from the DUT 20 can substantially pass through the spectroscopic element 120 along the optical axis 131 and be incident on the image capturing element 130, and the image capturing element 130 receives the light reflected from the DUT 20 to obtain An image of the test object 20. The image capturing element 130 includes a light sensing element 132 and a lens 133, wherein the light sensing element 132 and the beam splitting element 120 are located on opposite sides of the lens 133, respectively, and the lens 133 is used to adjust the path of light entering the image capturing element 130 to Light is caused to fall on the photosensitive element 132 to form an image.

The rotating carrier 140 is located on one side of the light splitting element 120 and the image capturing element 130, and is arranged on the principle that it does not hinder the transmission path of light. On the other hand, the first light source 150 and the second light source 160 are respectively disposed on opposite sides of the rotary carrier 140. In the state shown in FIG. 1, the first light source 150 faces the beam splitter 120, and the second light source 160 faces away. Spectroscopic element 120. In other words, the second light source 160 and the spectroscopic element 120 are located on opposite sides of the first light source 150, respectively. In this embodiment, the rotary carrier 140 can rotate relative to the carrier 110 along the axis 141, and the rotary light carrier 140 can rotate relative to the carrier 110 along the axis 141, so that the second light source 160 can be turned to the beam splitting element 120, as shown in FIG. 2 shown. In the state shown in FIG. 2, the second light source 160 faces the spectroscopic element 120, and the first light source 150 faces away from the spectroscopic element 120. In other words, the first light source 150 and the spectroscopic element 120 are located on opposite sides of the second light source 160, respectively.

In short, the optical detection device 100 can switch the orientation of the first light source 150 and the second light source 160 through the rotating carrier 140, so that one of the first light source 150 and the second light source 160 faces the beam splitting element 120, which can not only eliminate The procedure of disassembling and replacing the light source can also avoid affecting the projection angle of the light, so it has excellent convenience and reliability.

Please continue to refer to FIG. 1 and FIG. 2. In this embodiment, the axis 141 intersects the optical axis 131. The optical axis 131 is, for example, perpendicular to the work plane 10, and the axis 141 is at an acute angle with the work plane 10. Further, the rotating carrier 140 includes a seat portion 142 and a bearing portion 143, wherein the seat portion 142 is rotatably connected to the carrier 110, and is configured to adjust the first light 151 emitted by the first light source 150 and the working plane 10. The included angle A between the two is the adjusted angle B between the second light 161 emitted from the second light source 160 and the work plane 10. That is, the user can rotate the rotating portion 142 relative to the carrier 110 so that the included angle A between the first light 151 of the first light source 150 and the work plane 10 is adjusted between 30 degrees and 60 degrees, or The angle B between the second light 161 of the second light source 160 and the work plane 10 is adjusted between 30 degrees and 60 degrees. More specifically, the adjustment range of the included angle A (or included angle B) can be 30 degrees or more and 60 degrees or less, and 55 degrees is preferred. With this angle setting, the image obtained by the image capturing element 130 can be more For clarity.

On the other hand, the first light source 150 and the second light source 160 are respectively disposed on opposite sides of the bearing portion 143, wherein the bearing portion 143 is rotatably connected to the seat portion 142, and the first light source 150 (or the second light source 160) and the seat The portions 142 are respectively located on opposite sides of the bearing portion 143. The bearing portion 143 is used to carry the first light source 150 and the second light source 160, and the bearing portion 143 can rotate relative to the seat portion 142 along the axis 141 to switch the orientations of the first light source 150 and the second light source 160.

In the present embodiment, the axis 141 intersects the optical axis 131, where the optical axis 131 is, for example, perpendicular to the work plane 10, and the first light ray 151 (or the second light 161) is, for example, perpendicular to the axis 141. Therefore, the included angle C between the axis 141 and the optical axis 131 may be equal to the included angle A (or included angle B). That is, by rotating the seat portion 142 relative to the carrier 110, the included angle A (or included angle B) and the included angle C can be adjusted at the same time, and the angles of the two are equal.

The first light source 150 and the second light source 160 include a combination of a visible light source and an invisible light source. The invisible light source may be an infrared light source or an ultraviolet light source. The light splitting element 120 is located on the transmission path of the first light 151 (or the second light 161), where the light splitting element 120 has a first surface 121 and a second surface 122 opposite to each other, and the first surface 121 faces the first light source 150 (or the second Light source 160), and the second surface 122 faces the object 20 to be measured.

In the state shown in FIG. 1, the first light 151 is emitted toward the first surface 121 and is emitted from the second surface 122 toward the object 20 after passing through the light splitting element 120. Subsequently, the first light 151 reflected from the DUT 20 is directed toward the second surface 122 and after passing through the spectroscopic element 120, it is directed from the first surface 121 to the image capturing element 130, and the image capturing element 130 is received from the DUT 20 reflects the first light 151 to obtain an image of the object 20 to be measured. It is particularly noted that, in FIG. 1, the first light 151 reflected from the object to be measured 20 overlaps the optical axis 131, for example.

In the state shown in FIG. 2, the second light 161 is emitted toward the first surface 121 and is emitted from the second surface 122 toward the object 20 after passing through the light splitting element 120. Subsequently, the second light 161 reflected from the object under test 20 is emitted toward the second surface 122 and after passing through the spectroscopic element 120 from the first surface 121 to the image capturing element 130, and the image capturing element 130 receives the object from the object to be measured 20 reflects the second light 161 to obtain an image of the object 20 to be measured. In particular, in FIG. 2, the second light 161 reflected from the object to be measured 20 overlaps the optical axis 131, for example.

On the other hand, the optical detection device 100 further includes a third light source 170 disposed on the carrier 110. The rotating carrier 140 and the third light source 170 are respectively located on opposite sides of the light splitting element 120, and the third light source 170 faces the second surface 122 of the light splitting element 120. The third light 171 emitted by the third light source 170 is directed toward the second surface 122 and is reflected from the second surface 122 to the object 20 to be measured. Subsequently, the third light 171 reflected from the DUT 20 is directed toward the second surface 122 and after passing through the spectroscopic element 120, it is directed from the first surface 121 to the image capturing element 130, and the image capturing element 130 is received from the DUT 20 reflects the third light 171 to obtain an image of the object 20 to be measured. In particular, in FIG. 1 and FIG. 2, the third light 171 reflected from the second surface 122 and directed toward the test object 20 is, for example, an optical axis 131 that overlaps with the first light reflected from the test object 20. The light ray 151 overlaps the optical axis 131, for example.

In summary, the optical detection device of the present invention can switch the orientation of the first light source and the second light source by rotating the carrier plate, so that one of the first light source and the second light source faces the beam splitting element, which not only eliminates disassembly and replacement The program of the light source can also avoid affecting the projection angle of the light, so it has excellent convenience and reliability. On the other hand, the optical detection device can also adjust the angle at which the first light from the first light source or the second light from the second light source is projected to the object to be measured by rotating the carrier, for example, between 30 degrees and 60 degrees, and 55 degrees is preferred, and the angle setting can make the image obtained by the image capturing element clearer.

Although the present invention has been disclosed as above with the examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.

10‧‧‧Working plane

20‧‧‧DUT

100‧‧‧ Optical Inspection Equipment

110‧‧‧ Carrier

120‧‧‧ Beamsplitter

121‧‧‧ the first surface

122‧‧‧Second surface

130‧‧‧Image capture element

131‧‧‧ Optical axis

132‧‧‧photosensitive element

133‧‧‧ lens

140‧‧‧rotating carrier

141‧‧‧ axis

142‧‧‧Seat

143‧‧‧bearing department

150‧‧‧first light source

151‧‧‧First Light

160‧‧‧second light source

161‧‧‧second light

170‧‧‧ third light source

171‧‧‧ third light

A ~ C‧‧‧ Angle

FIG. 1 is a schematic diagram of an optical detection device according to an embodiment of the present invention. FIG. 2 is a schematic diagram after the rotary carrier of FIG. 1 is rotated.

Claims (10)

An optical detection device is used to detect an object to be measured placed on a work plane. The optical detection device includes: a carrier; an image capturing element disposed on the carrier; the image capturing element has a An optical axis, and the optical axis extends through the object to be measured; a rotating carrier plate is disposed on the carrier frame and is located on a side of the image capturing element; a first light source configured to emit a first light A second light source and the first light source are respectively disposed on opposite sides of the rotary carrier and are configured to emit a second light, wherein the rotary carrier is configured to be relative to the carrier along an axis; The rotation causes the first light of the first light source or the second light of the second light source to hit the object to be measured, and the axis intersects the optical axis. The optical inspection device according to item 1 of the patent application scope, wherein the rotating carrier includes: a portion rotatably connected to the carrier, and configured to adjust the first light or the second light source of the first light source An angle between the second light source of the light source and the working plane; and a bearing portion rotatably connected to the seat portion, wherein the first light source and the second light source are respectively disposed on opposite sides of the bearing portion, And the bearing portion is configured to rotate relative to the seat portion according to the axis. The optical detection device according to item 2 of the patent application scope, wherein the angle between the first light of the first light source or the second light of the second light source and the working plane is between 30 degrees and 60 degrees . The optical detection device according to item 1 of the patent application scope further includes: a light splitting element disposed on the carrier, and the optical axis extending through the light splitting element. The optical detection device according to item 4 of the scope of patent application, further comprising: a third light source disposed on the carrier, and the rotating carrier and the third light source are respectively located on opposite sides of the light splitting element. The optical detection device according to item 5 of the scope of patent application, wherein the beam splitting element has a first surface and a second surface opposite to each other, and a third light emitted by the third light source is directed toward the second surface and from The second surface reflects and is directed toward the object to be measured, the third light reflected from the object to be measured is directed to the second surface, and after passing through the light splitting element, it is directed to the image capturing element from the first surface. The optical detection device according to item 4 of the patent application scope, wherein the beam splitting element has a first surface and a second surface opposite to each other, and the first light from the first light source is directed toward the first surface and passes through the first surface. The beam splitting element strikes the object from the second surface, the first light reflected from the substance hits the second surface, and passes through the beam splitting element and then captures the image from the first surface toward the image capture. element. The optical detection device according to item 4 of the patent application scope, wherein the beam splitting element has a first surface and a second surface opposite to each other, and the second light from the second light source is directed toward the first surface and passes through the first surface. After the spectroscopic element is emitted from the second surface toward the object to be measured, the second light reflected from the object to be measured is directed to the second surface and after passing through the spectroscopic element, it is projected from the first surface to the image capture element. The optical detection device according to item 1 of the patent application scope, wherein the first light source and the second light source include a combination of a visible light source and an invisible light source. The optical detection device according to item 1 of the patent application scope, wherein the image capturing element includes a photosensitive element and a lens, and the photosensitive element and the beam splitting element are located on opposite sides of the lens, respectively.