WO2013189135A1

WO2013189135A1 - Inspection device and method for small holes

Info

Publication number: WO2013189135A1
Application number: PCT/CN2012/082289
Authority: WO
Inventors: 陈菁菘; 陈俊融; 周辰儒
Original assignee: 财团法人工业技术研究院
Priority date: 2012-06-18
Filing date: 2012-09-28
Publication date: 2013-12-27
Also published as: CN104380087A

Abstract

An inspection device and method for small holes. The inspection device (1) comprises an inspection bench (10), signal processing and control unit (20) and display unit (30). The inspection bench (10) is used to inspect an object (P) with a plurality of holes (HO), and comprises a light-emitting unit (12), a light-flux detecting unit (14) and a work platform. The light-emitting unit (12) comprises a light source and a divergence angle limiter (126), wherein the light source provides light-emission for inspection, and the divergence angle limiter (126) is used to reduce the divergence angle of the light to enter each hole. The work platform is used to support the object (P), and is driven to change the relative position between the object (P) and the light-flux detecting unit (14) so that the holes pass the light-flux detecting unit (14) sequentially. The signal processing and control unit (20) is used to control the inspection bench (10) and receives the feedback signal from the inspection bench (10). The display unit (30) is used to display inspection results.

Description

Micro hole detecting device and method

The present invention relates to a detecting apparatus and method therefor, and more particularly to a detecting apparatus and method for detecting the degree of clogging of a minute hole. Background technique

In general, tiny holes are very small and are easily blocked by foreign objects and are not easily cleaned completely. At present, when detecting the cleanliness of tiny holes, it is more dependent on manual detection by a magnifying glass or projection. However, when observed by the human eye, the following situations often occur: (1) The human eye is prone to fatigue or human factors, resulting in inaccurate or error detection results; (2) The inspection speed is slow and the standards are inconsistent, resulting in detection rate. difference.

In order to improve the above situation, the prior art discloses the use of an instrument instead of an artificial spinneret automatic inspection device, but this method is still prone to measurement errors or even undetectable for a spinneret of poor quality, which needs further improvement. . Summary of the invention

SUMMARY OF THE INVENTION It is an object of the present invention to provide a microcavity detecting apparatus and method for detecting and judging a degree of clogging of a hole and improving measurement accuracy.

According to an aspect of the invention, a microcavity detecting device is provided, comprising a detecting machine, a signal processing and control unit, and a display unit. The detecting machine is used to detect the object to be tested having a plurality of holes. The inspection machine includes a lighting unit, a luminous flux detecting unit, and a work platform. The lighting unit includes a light source and a divergence angle limiter. This source produces the light needed for detection. The divergence angle limiter is used to reduce the divergence angle of the light entering each hole. The luminous flux detecting unit is configured to measure the luminous flux passing through each of the holes. The working platform is used to carry the object to be tested, and the working platform is driven to change the relative position between the object to be tested and the luminous flux detecting unit, so that the holes pass through the luminous flux detecting unit in sequence. The signal processing and control unit is used to control the detection machine and receive the signal returned by the detection machine. The display unit is used to display the measurement result.

According to an aspect of the invention, a microcavity detecting device is provided, comprising a detecting machine, a signal processing and control unit, and a display unit. The detecting machine is used to detect the object to be tested having a plurality of holes. The detecting machine comprises a lighting unit, a luminous flux detecting unit and a working platform. The light unit includes a light source, and the light source is generated Detect the required light. The luminous flux detecting unit is configured to measure the luminous flux passing through each of the holes. The luminous flux detecting unit includes a photo sensor and an optical filter. The light filter filters out light having a relatively large angle with respect to light rays passing through the respective holes in parallel, so that the light sensor receives light that passes through the optical filter in parallel. The working platform is configured to carry the object to be tested, and drives the working platform to change the relative position between the object to be tested and the luminous flux detecting unit, so that the holes sequentially pass through the luminous flux detecting unit. The signal processing and control unit is configured to control the detection machine and receive signals returned by the detection machine. The display unit is used to display the measurement result.

According to another aspect of the present invention, a micro hole detecting method is proposed, comprising the following steps. A light source is provided which produces the light required to detect the hole. A luminous flux detecting unit is provided for receiving luminous flux of light that is nearly parallel to each of the holes. The degree of clogging of each hole is judged based on the luminous flux. An image capture unit is provided to assist in determining the degree of clogging of the micro d and the hole.

For a better understanding of the above and other aspects of the present invention, the following detailed description of the embodiments of the invention

1A to 1C illustrate three methods for detecting a luminous flux by using a light beam through a hole;

2 is a schematic view of a micro hole detecting device according to an embodiment;

3 is a schematic diagram of a light emitting unit according to an embodiment;

4A and 4B are schematic diagrams showing a luminous flux detecting unit according to an embodiment;

5A to 5D are schematic diagrams showing various divergence angle limiters;

6A-6D illustrate schematic views of various optical filters. Main component symbol description

1 : Micro hole detection device

10 inspection machine

12 lighting unit

13 control box

14, 14': Luminous flux detection unit

16 image capture unit

18 work platform

20 signal processing and control unit 24: Input / output device

30: display unit

P: DUT

HO : Hole

102 : light source

104 : Light sensor

106 : Divergence angle limiter

108 : Light filter

122 : light source

124 : astigmatism element

126 : Divergence angle limiter

126a: lens group

126b: Lens array module

126c: Open Hole Array Module

126d: Divergence angle limiter

127 opening

128 thread

142 light sensor

144, 144' : optical filter

144a: lens group

144b: transparent polymer

144c: Light filter

144d: Light filter

145, 145': light guide

146: Signal Conversion Amplifier

147: Opening

148: Thread

162: Image sensor

164: Lens group

166: Indicating light components

182: Horizontal moving mechanism 184: Rotating mechanism

186: Vertical movement mechanism

188: Fixture

A: Center line

L, LI ~ L4: incident light

Θ1, Θ2: incident angle

The microcavity detecting device and method disclosed in this embodiment utilizes a luminous flux detecting unit to determine whether or not a foreign matter is blocked in the hole. Referring to Figures 1A-1C, three methods of utilizing a beam of light through a hole to detect luminous flux are illustrated. In FIG. 1A, in order to make the light source 102 uniformly divergent, an astigmatism element (for example, a diffusion sheet) is used. However, after the light passes through the astigmatism element, the divergence angle is usually greater than 90 degrees (plus or minus 45 degrees), and the light is not all at this time. It is parallel to the hole wall through the hole, but a part of the light is reflected by the photo sensor 104 after being reflected multiple times in the hole. Since the reflected light intensity is different, and the light sensor 104 measures all the light in a certain angular range, the large-angle reflected light L2 occupies a large proportion, so the light sensor 104 measures The luminous flux is not simply the luminous flux of the light L1 that is close to the parallel through the tiny holes, and thus cannot truly reflect the degree of clogging of the small holes. In order to improve the above situation, the present invention proposes a micro-cavity detecting device and method for increasing the luminous flux accuracy, and the following two ways can be achieved to achieve the object of the present invention: (1) Using a divergence angle limiter 106 as shown in FIG. 1B The light ray L1 entering the minute hole 其1 is reduced to within plus or minus 30 degrees, for example. The smaller the divergence angle Θ1 is, the higher the accuracy of the measurement is; (2) using the optical filter 108 as shown in FIG. 1C, the large-angle light L3 before entering the photo sensor 104 is filtered out, and only the light sensation is made. The detector 104 receives a small angle of incident light L4. The smaller the angle 入射2 of the incident light L4, the higher the accuracy of the measurement. Both of the above methods can make the luminous flux measured by the photo sensor 104 truly reflect the degree of clogging of the micro-holes, thereby improving the accuracy of the measurement. In addition, in the embodiment, the detection device has an image-assisted measurement function, and an image analysis can be performed on the blocked hole found after the luminous flux detection to assist in analyzing the degree of clogging in the hole.

The embodiments are described in detail below, and the embodiments are only intended to be illustrative, and are not intended to limit the scope of the invention. First embodiment

Please refer to FIG. 2 , which illustrates a schematic diagram of a micro hole detecting device according to an embodiment. The micro hole detecting device 1 may include a detecting machine 10, a signal processing and control unit 20, and a display unit 30. The detecting machine 10 is for detecting a substance P to be tested having a plurality of minute holes HO, such as a spinneret or a printed circuit board. The signal processing and control unit 20 is configured to control the detection machine 10 and receive signals returned by the detection machine 10. The display unit 30 is used to display the measurement result.

The detecting machine 10 includes a lighting unit 12, a luminous flux detecting unit 14, an image capturing unit 16, and a working platform 18. The illumination unit 12 is used to provide a light source required for detection, such as a stable, large area, high density light source. The light flux detecting unit 14 has a light sensor 142 for receiving light that passes through the minute holes HO in parallel. Further, the luminous flux detecting unit 14 converts the current signal output from the photo sensor 142 into a voltage signal by the signal conversion amplifier 146 and amplifies it. This voltage signal can be transmitted to the signal processing and control unit 20 via the input/output device 24 to determine the degree of clogging of each hole HO.

The image capturing unit 16 mainly includes an image sensor 162, a lens group 164 and an indicating light element 166 for observing and/or measuring the degree of clogging of the small holes HO. In an embodiment, when the equivalent measurement result indicates that the number of holes with insufficient luminous flux exceeds the set value, the system can manually activate the image-assisted measurement function or automatically use the image captured by the image capturing unit 16. To confirm if the hole HO is blocked. In another embodiment, after all the holes HO are detected, the system can use the indicating light unit 166 to indicate the holes that may be blocked by the holes, and use the image capturing unit 16 to capture the images of the holes, and then The display unit 30 displays the captured image.

In Fig. 2, a work piece 18 is mounted on the work platform 18 for holding the object P to be tested. The object to be tested P is placed on the work platform 18 and is movable by the movement of the horizontal moving mechanism 182 and/or the vertical moving mechanism 186. In addition, the work platform 18 can also be rotated by the actuation of the rotating mechanism 184. In addition, the control box 13 is used to activate or control the movement of the horizontal moving mechanism 182, the vertical moving mechanism 186, and the rotating mechanism 184. Therefore, the relative position between the object P and the luminous flux detecting unit 14 or the image capturing unit 16 can be changed, so that the holes HO sequentially pass through the luminous flux detecting unit 14 to detect the luminous flux of each of the holes HO one by one.

In addition, the signal processing and control unit 20 includes a processor 22 and an input/output device 24 for receiving signals returned by the light flux detecting unit 14 and the image capturing unit 16, and controlling the motion and illumination of the working platform 18. Unit 12 is instructed to indicate the state of light unit 166.

Referring to the light-emitting unit 12 of FIG. 3, the light-emitting unit 12 is mainly composed of a light source capable of detecting a desired light source. A photodiode or a halogen lamp is provided to provide a stable, large-area, high-brightness detection light source with a small divergence angle. In order to make the light generated by the light source evenly divergent, it is necessary to astigmatize with a astigmatism element (for example, a diffusion sheet) 124, and then use the divergence angle limiter 126 to reduce the divergence angle Θ1 of the light L1 entering the minute hole HO, which is equivalent to Figure 1B illustrates the situation.

In addition, please refer to the luminous flux detecting units 14 and 14 of FIGS. 4A and 4B, the luminous flux detecting unit

14 and 14' are mainly composed of a photo sensor 142 and a signal conversion amplifier 146, and the front end of the photo sensor 142 may need to be equipped with an optical filter 144 or 144' to make it larger before entering the photo sensor 142. The angle ray L3 is filtered out, which corresponds to the situation shown in Fig. 1C.

Referring to Figures 5A and 5B, in one embodiment, the divergence angle limiter is, for example, a lens group 126a or a lens array module 126b composed of a plurality of lenses such that the originally diverged light L can converge. In one embodiment, the divergence angle of the detection light, for example, converges to 60 degrees (plus or minus 30 degrees) to have a better effect.

Further, the divergence angle limiter is, for example, an element having absorption of large angle light. Referring to FIG. 5C, the divergence angle limiter is, for example, an aperture array module 126c that is mounted on the light source 122 and has an aperture 127 having an aspect ratio greater than about 0.8, and is made of a light absorbing characteristic to absorb a large angle of incident light L2. Only the incident light L1 having a small divergence angle Θ1 is passed through each opening 127. The aspect ratio of the opening 127 can be adjusted as desired, for example, the aspect ratio is substantially equal to or less than 25 or other values greater than 25. The larger the aspect ratio of the opening 127, the better the effect. For example, when the ratio of the depth D to the width W of the opening 127 is greater than ^ ^/2 , the angle Θ1 between the light L1 emitted by the small angle and the center line A of the opening 127 can be controlled to be less than plus or minus 30 degrees to filter Except for the incident light L2 at a large angle, only the light L1 exiting at a small angle passes through the opening 127.

In addition, referring to FIG. 5D, the inner wall of the opening 127 of the divergence angle limiter 126d has, for example, a scribe or a thread 128. The function of the thread 128 is to reflect the incident light L2 of a large angle back to the original position, and a small cave can be made to make the light. L2 multiple reflections increase the effect of absorption, so that the amount of light emitted by the reflected light can be reduced, so that the proportion of reflected light passing through the minute holes is actually reduced, and the degree of clogging of the holes can be actually reflected.

Also, the same method can be applied to the optical filter. Referring to FIG. 6A, in an embodiment, the optical filter is, for example, a lens group 144a for deflecting a large angle of incident light L3 to other places, allowing only a small angle of incident light to enter the photo sensor 142. Further, referring to Fig. 6B, the optical filter is, for example, a cylindrical transparent polymer 144b for deflecting the large-angle incident light L3 thereto.

Next, referring to FIG. 6C, the optical filter 144c has, for example, an opening 147 having an aspect ratio of more than about 0.8, and is made of a light absorbing characteristic to absorb a large angle of incident light L3. The aspect ratio of the opening 147 can be adjusted as desired, for example, the aspect ratio is less than 25 or other values. The larger the aspect ratio of the opening 147, the effect The better. For example, when the ratio of the depth D to the width W of the opening 147 is greater than ^ ^{/ 2} , the angle between the light L4 having a small incident angle Θ ² and the center line A of the opening 147 can be controlled to be less than plus or minus 30 degrees to filter In addition to the light ray L3 having a large incident angle, only the light ray L4 having a small incident angle Θ2 is incident on the photo sensor 142.

In addition, referring to FIG. 6D, the inner wall of the opening 147 of the optical filter 144d has, for example, a scribe or a thread 148. The function of the thread 148 is to reflect the incident light L3 of a large angle back to the original position, or to create a small cavity for the light L3. Multiple reflections increase the effect of absorption, so that the amount of light entering the reflected light can be reduced, so that the proportion of reflected light actually entering the photo sensor 142 is reduced, and the degree of clogging of the holes can be actually compared.

Next, referring to the light flux detecting unit 14 of FIG. 4A, a light guide 145 can be further added to the front end of the optical filter 144. The light guide 145 is, for example, a cylindrical optical fiber, and the light passing through the micro hole may be guided as needed. It enters the light sensor 142. In addition, the optical fiber has flexibility, which makes the photo sensor 142 more flexible in space configuration, so the number and density of the optical fiber and the photo sensor 142 can be increased or decreased according to the number and density of holes to be detected. the way.

In addition, please refer to the luminous flux detecting unit 14' of Fig. 4B. In another embodiment, the light guide 145' is disposed, for example, between the optical filter 144' and the photo sensor 142. That is, the optical filter 144' is located at the front end of the light guide 145' such that a small angle of incident light passes through the optical filter 144' and is guided to the photo sensor 142 via the light guide 145'.

In summary, although the invention has been disclosed in connection with the preferred embodiments thereof, it is not intended to limit the invention. A person skilled in the art to which the invention pertains can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention should be determined by the appended claims.

Claims

Claim

1. A micro hole detecting device comprising:

a detecting machine for detecting a test object having a plurality of holes, the detecting machine comprising:

The light emitting unit includes a light source and a divergence angle limiter, the light source generates light required for detecting, and the divergence angle limiter is configured to reduce a divergence angle of the light entering each of the holes;

a luminous flux detecting unit for measuring luminous flux passing through each of the holes;

a working platform for carrying the object to be tested, and driving the working platform to change the relative position between the object to be tested and the luminous flux detecting unit, so that the holes pass through the luminous flux detecting unit in sequence; signal processing and control unit Controlling the detection machine and receiving signals returned by the detection machine;

A display unit for displaying measurement results.

2. The microcavity detecting apparatus according to claim 1, wherein the light source comprises a light emitting diode or a halogen lamp.

3. The microcavity detecting device of claim 1, wherein the divergence angle limiter comprises a lens group or a lens array module.

4. The microcavity detecting apparatus according to claim 1, wherein the divergence angle limiter has at least one opening having an aspect ratio greater than 0.8.

5. The microcavity detecting device according to claim 4, wherein the opening has an inner wall having at least one scribe or thread.

6. The microcavity detecting apparatus according to claim 1, wherein a divergence angle of light passing through the divergence angle limiter is within plus or minus 30 degrees.

7. The micro-hole detecting device according to claim 1, further comprising an image capturing unit for capturing an image of the at least one hole in the holes that is blocked by the luminous flux detection.

8. A micro-hole detecting device comprising:

a light emitting unit, comprising a light source, the light source generating light required for detecting;

a luminous flux detecting unit, configured to measure a luminous flux passing through each of the holes, the luminous flux detecting unit comprising a photo sensor and an optical filter, wherein the optical filter filters out a large angle with respect to the light passing through the holes in parallel Light such that the light sensor receives light that is nearly parallel through the optical filter; a working platform for carrying the object to be tested, and driving the working platform to change the relative position between the object to be tested and the luminous flux detecting unit, so that the holes sequentially pass through the luminous flux detecting unit; signal processing and control a unit for controlling the detection machine and receiving a signal returned by the detection machine;

A display unit for displaying measurement results.

9. The microcavity detecting apparatus according to claim 8, wherein the light source comprises a light emitting diode or a halogen lamp.

10. The microcavity detecting apparatus according to claim 8, wherein the optical filter comprises a lens group.

The microcavity detecting device according to claim 8, wherein the optical filter has at least one opening having an aspect ratio of more than 0.8.

12. The microcavity detecting device according to claim 11, wherein the opening has an inner wall having at least one engraving or thread.

13. The microcavity detecting device according to claim 11, wherein the light passing through the optical filter has an angle within plus or minus 30 degrees.

14. The micro-cavity detecting device according to claim 8, further comprising an image capturing unit for capturing an image of the at least one hole in the holes that is blocked by the luminous flux detection.

The micro-hole detecting device of claim 8 , further comprising a light guide disposed at a front end of the optical filter or between the optical filter and the photo sensor for guiding through each of the holes Light enters the light sensor.

16. A method for detecting tiny holes, comprising:

Providing a light source that produces light required to detect the hole;

Providing a luminous flux detecting unit for receiving a luminous flux of light passing through each of the holes in parallel; determining a degree of clogging of each of the holes according to the luminous flux;

An image capturing unit is provided to assist in determining the degree of clogging of each of the holes.

17. The microcavity detecting method according to claim 16, further comprising illuminating the light entering each of the holes with a divergence angle within plus or minus 30 degrees.

18. The microcavity detecting method according to claim 16, further comprising filtering out incident light rays having a larger angle with respect to rays passing through the respective holes in parallel, so that the luminous flux detecting unit receives the light passing through in parallel.

19. The microcavity detecting method according to claim 18, wherein the light having an incident angle greater than plus or minus 30 degrees is filtered out.