TW201937286A - Photosensitive composition, cured product, cured product forming method, color filter and image display device capable of presenting excellent light-shielding properties and insulating properties - Google Patents

Photosensitive composition, cured product, cured product forming method, color filter and image display device capable of presenting excellent light-shielding properties and insulating properties Download PDF

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TW201937286A
TW201937286A TW107140344A TW107140344A TW201937286A TW 201937286 A TW201937286 A TW 201937286A TW 107140344 A TW107140344 A TW 107140344A TW 107140344 A TW107140344 A TW 107140344A TW 201937286 A TW201937286 A TW 201937286A
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TWI804526B (en
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田所恵典
塩田大
佐藤梓実
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日商東京應化工業股份有限公司
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Abstract

The object of the present invention is to provide a photosensitive composition that has excellent light-shielding properties and insulating properties and is capable of forming a cured film having a desired cross-sectional shape, and also provide a cured product of the photosensitive composition, a color filter including a black matrix made of the cured product, an image display panel including the color filter, an image display device including the image display panel, and a method of using the photosensitive composition to produce a patterned cured film. In the photosensitive composition containing a light shielding agent in accordance with the present invention, an oxime ester compound having a specific structure is used as a photopolymerization initiator, and resin-coated carbon black is used as the light shielding agent.

Description

感光性組合物、硬化物、硬化物形成方法、彩色濾光片、及影像顯示裝置Photosensitive composition, cured product, cured product forming method, color filter, and image display device

本發明係關於一種感光性組合物、使用該感光性組合物之圖案形成方法、使用該感光性組合物而形成之硬化物、具備該硬化物之彩色濾光片、以及影像顯示裝置。The present invention relates to a photosensitive composition, a pattern forming method using the photosensitive composition, a cured product formed using the photosensitive composition, a color filter including the cured product, and a video display device.

於如液晶顯示裝置之顯示裝置用之面板中,通常形成黑矩陣或黑柱間隔件等圖案化之遮光性膜。於此種用途中提出各種用以形成遮光性膜之含有遮光性之黑色顏料與光聚合起始劑之感光性組合物。In a panel for a display device such as a liquid crystal display device, a patterned light-shielding film such as a black matrix or a black pillar spacer is usually formed. In such use, various photosensitive compositions containing a light-shielding black pigment and a photopolymerization initiator for forming a light-shielding film are proposed.

例如,作為黑矩陣之形成用材料,提出含有光聚合性化合物、光聚合起始劑、分散有丙烯酸系樹脂微粒子之丙烯酸系樹脂微粒子分散液、碳黑及溶劑之負型感光性樹脂組合物(參照專利文獻1)。
[先前技術文獻]
[專利文獻]
For example, as a material for forming a black matrix, a negative photosensitive resin composition containing a photopolymerizable compound, a photopolymerization initiator, an acrylic resin fine particle dispersion in which acrylic resin fine particles are dispersed, carbon black, and a solvent is proposed ( Refer to Patent Document 1).
[Previous Technical Literature]
[Patent Literature]

[專利文獻1]日本專利特開2011-170075號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2011-170075

[發明所欲解決之問題][The problem that the invention wants to solve]

然而,於影像顯示裝置用之面板中,日漸謀求畫質之提高。故而,就對比度提高之方面等而言,要求黑矩陣進一步提高遮光性。例如,於使用如專利文獻1中記載之感光性樹脂組合物形成黑矩陣之情形時,藉由增加感光性樹脂組合物中之碳黑之含量,可提高所形成之黑矩陣之遮光性。
但於增加感光性樹脂組合物中之碳黑之含量之情形時,由於所形成之黑矩陣之絕緣性(電阻值)下降或感光性樹脂組合物之感度下降所伴隨之硬化不良,存在難以形成所期望之截面形狀之黑矩陣之情形。
However, in the panel for image display devices, the image quality is increasingly sought. Therefore, in terms of improvement in contrast, etc., the black matrix is required to further improve the light blocking property. For example, when a black matrix is formed using the photosensitive resin composition described in Patent Document 1, the light-shielding property of the formed black matrix can be improved by increasing the content of carbon black in the photosensitive resin composition.
However, when the content of the carbon black in the photosensitive resin composition is increased, the insulating property (resistance value) of the formed black matrix is lowered or the sensitivity of the photosensitive resin composition is lowered, which is difficult to form. The case of a black matrix of the desired cross-sectional shape.

本發明係鑒於上述課題而完成者,其目的在於提供一種可形成遮光性與絕緣性優異且為期望之截面形狀之硬化膜之感光性組合物、該感光性組合物之硬化物、具備包含該硬化物之黑矩陣之彩色濾光片、具備該彩色濾光片之影像顯示面板、具備該影像顯示面板之影像顯示裝置、及使用上述感光性組合物之經圖案化之硬化膜之製造方法。
[解決問題之技術手段]
The present invention has been made in view of the above-described problems, and an object of the invention is to provide a photosensitive composition which can form a cured film having a desired light-shielding property and insulating property and has a desired cross-sectional shape, and a cured product of the photosensitive composition, A color filter of a black matrix of a cured product, an image display panel including the color filter, an image display device including the image display panel, and a method of manufacturing a patterned cured film using the photosensitive composition.
[Technical means to solve the problem]

本發明者等人反覆進行潛心研究,結果發現藉由於含有遮光劑之感光性組合物中使用特定結構之肟酯化合物作為光聚合起始劑,且使用樹脂被覆碳黑作為遮光劑,可解決上述課題,從而完成本發明。The inventors of the present invention have conducted intensive studies, and as a result, it has been found that by using a phthalate compound having a specific structure as a photopolymerization initiator in a photosensitive composition containing an opacifier, and using a resin-coated carbon black as an opacifier, the above solution can be solved. The subject matter is thus completed.

本發明之第1態樣係一種感光性組合物,其係含有鹼可溶性樹脂(A)、光聚合性單體(B)、光聚合起始劑(C)及遮光劑(D)者,並且
光聚合起始劑(C)含有下述式(c1)所表示之肟酯化合物(C1):
[化1]

(式(c1)中,R1 為1價有機基,R2 為可具有取代基之烴基或可具有取代基之雜環基,R3 為1價有機基,R4 為1價有機基,R5 及R6 分別獨立為可具有取代基之苯環或可具有取代基之萘環,m1、m2及m3分別為0或1),
肟酯化合物(C1)滿足下述(1)~(3)之至少一個條件:
(1)R1 含有-OR7 所表示之基,R7 為鹵烷基
(2)m2為1,R4 含有-OR7 所表示之基,R7 為鹵烷基
(3)R3 為可具有取代基之支鏈狀烷基,
遮光劑(D)含有樹脂被覆碳黑(D1)。
The first aspect of the present invention is a photosensitive composition containing an alkali-soluble resin (A), a photopolymerizable monomer (B), a photopolymerization initiator (C), and an opacifier (D), and The photopolymerization initiator (C) contains the oxime ester compound (C1) represented by the following formula (c1):
[Chemical 1]

(In the formula (c1), R 1 is a monovalent organic group, R 2 is a hydrocarbon group which may have a substituent or a heterocyclic group which may have a substituent, R 3 is a monovalent organic group, and R 4 is a monovalent organic group. R 5 and R 6 are each independently a benzene ring which may have a substituent or a naphthalene ring which may have a substituent, and m1, m2 and m3 are each 0 or 1),
The oxime ester compound (C1) satisfies at least one of the following conditions (1) to (3):
(1) R 1 contains a group represented by -OR 7 and R 7 is a haloalkyl group
(2) m2 is 1, R 4 contains a group represented by -OR 7 , and R 7 is a haloalkyl group.
(3) R 3 is a branched alkyl group which may have a substituent,
The sunscreen (D) contains a resin-coated carbon black (D1).

本發明之第2態樣係第1態樣之感光性組合物之硬化物。The second aspect of the present invention is a cured product of the photosensitive composition of the first aspect.

本發明之第3態樣係具備包含第2態樣之感光性組合物之硬化物之黑矩陣之彩色濾光片。According to a third aspect of the present invention, there is provided a color filter comprising a black matrix of a cured product of the photosensitive composition of the second aspect.

本發明之第4態樣係具備第3態樣之彩色濾光片之影像顯示面板。A fourth aspect of the present invention is an image display panel including a color filter of a third aspect.

本發明之第5態樣係具備第4態樣之影像顯示面板之影像顯示裝置。A fifth aspect of the present invention is the image display device of the image display panel of the fourth aspect.

本發明之第6態樣係一種製造方法,其係經圖案化之硬化膜之製造方法,其包含:
於基板上塗佈第1態樣之感光性組合物而形成塗佈膜、
位置選擇地對塗佈膜進行曝光、
對曝光之塗佈膜進行顯影。
[發明之效果]
A sixth aspect of the present invention is a method of producing a patterned cured film, comprising:
Applying the photosensitive composition of the first aspect to the substrate to form a coating film,
Selectively exposing the coating film,
The exposed coating film is developed.
[Effects of the Invention]

根據本發明,可提供一種可形成遮光性與絕緣性優異且為期望之截面形狀之硬化膜之感光性組合物、該感光性組合物之硬化物、具備包含該硬化物之黑矩陣之彩色濾光片、具備該彩色濾光片之影像顯示面板、具備該影像顯示面板之影像顯示裝置、使用上述感光性組合物之經圖案化之硬化膜之製造方法。According to the present invention, it is possible to provide a photosensitive composition capable of forming a cured film having excellent light-shielding properties and insulating properties and having a desired cross-sectional shape, a cured product of the photosensitive composition, and a color filter having a black matrix containing the cured product. A light sheet, an image display panel including the color filter, an image display device including the image display panel, and a method of manufacturing a patterned cured film using the photosensitive composition.

≪感光性組合物≫
感光性組合物含有鹼可溶性樹脂(A)、光聚合性單體(B)、光聚合起始劑(C)及遮光劑(D)。光聚合起始劑(C)含有下述特定結構之肟酯化合物(C1)。遮光劑(D)含有樹脂被覆碳黑(D1)。感光性組合物視需要可含有添加劑(E)、有機溶劑(S)等成分。
≪Photosensitive composition≫
The photosensitive composition contains an alkali-soluble resin (A), a photopolymerizable monomer (B), a photopolymerization initiator (C), and an opacifier (D). The photopolymerization initiator (C) contains an oxime ester compound (C1) having the specific structure described below. The sunscreen (D) contains a resin-coated carbon black (D1). The photosensitive composition may contain components such as an additive (E) and an organic solvent (S) as needed.

使用感光性組合物而形成之硬化膜之膜厚並無特別限定。硬化膜之膜厚較佳為0.2 μm以上,更佳為0.3 μm以上且5 μm以下,進而較佳為0.4 μm以上且3 μm以下,尤佳為0.5 μm以上且2 μm以下。
以下,對感光性組合物中所含之作為必需成分之鹼可溶性樹脂(A)、光聚合性單體(B)、光聚合起始劑(C)及遮光劑(D)、以及任意成分、感光性組合物之硬化物之製造方法進行說明。
The film thickness of the cured film formed using the photosensitive composition is not particularly limited. The film thickness of the cured film is preferably 0.2 μm or more, more preferably 0.3 μm or more and 5 μm or less, further preferably 0.4 μm or more and 3 μm or less, and particularly preferably 0.5 μm or more and 2 μm or less.
In the following, an alkali-soluble resin (A), a photopolymerizable monomer (B), a photopolymerization initiator (C), an opacifier (D), and an optional component, which are essential components contained in the photosensitive composition, A method for producing a cured product of a photosensitive composition will be described.

<鹼可溶性樹脂(A)>
感光性組合物含有鹼可溶性樹脂(A)。作為鹼可溶性樹脂(A),並無特別限定,可自先前調配於各種感光性樹脂組合物中之鹼可溶性樹脂適當選擇。
此處,於本說明書中,所謂鹼可溶性樹脂(A)係指於分子內具備使其具有鹼可溶性之官能基(例如酚性羥基、羧基、磺酸基等)之樹脂。
<alkali soluble resin (A)>
The photosensitive composition contains an alkali-soluble resin (A). The alkali-soluble resin (A) is not particularly limited, and can be appropriately selected from alkali-soluble resins previously formulated in various photosensitive resin compositions.
In the present specification, the alkali-soluble resin (A) is a resin having a functional group (for example, a phenolic hydroxyl group, a carboxyl group, a sulfonic acid group, or the like) having an alkali solubility in a molecule.

至於作為鹼可溶性樹脂(A)所較佳之樹脂,可列舉具有Cardo結構之樹脂(a-1)(以下亦記為「Cardo樹脂(a-1)」)。
於使用具有Cardo結構之樹脂(a-1)作為鹼可溶性樹脂之情形時,易於獲得解像性優異之感光性組合物,易於使用感光性組合物形成不易因加熱而過度流動之硬化膜。故而,易於形成截面形狀良好之硬化膜。
The resin which is preferable as the alkali-soluble resin (A) is a resin (a-1) having a Cardo structure (hereinafter also referred to as "Cardo resin (a-1)").
When the resin (a-1) having a Cardo structure is used as the alkali-soluble resin, a photosensitive composition excellent in resolution can be easily obtained, and a photosensitive composition can be easily used to form a cured film which is less likely to excessively flow by heating. Therefore, it is easy to form a cured film having a good cross-sectional shape.

[具有Cardo結構之樹脂(a-1)]
作為具有Cardo骨架之樹脂(a-1),可使用於其結構中具有Cardo骨架且具有特定之鹼可溶性之樹脂。所謂Cardo骨架係指於構成第1環狀結構之1個環碳原子上鍵結有第2環狀結構與第3環狀結構之骨架。再者,第2環狀結構與第3環狀結構可為相同之結構,亦可為不同之結構。
作為Cardo骨架之代表例,可列舉於茀環之9位之碳原子上鍵結有2個芳香環(例如苯環)之骨架。
[Resin with a Cardo structure (a-1)]
As the resin (a-1) having a Cardo skeleton, it can be used for a resin having a Cardo skeleton in its structure and having a specific alkali solubility. The Cardo skeleton refers to a skeleton in which a second cyclic structure and a third cyclic structure are bonded to one ring carbon atom constituting the first cyclic structure. Further, the second annular structure and the third annular structure may have the same structure or different structures.
A typical example of the Cardo skeleton is a skeleton in which two aromatic rings (for example, a benzene ring) are bonded to a carbon atom at the 9-position of the anthracene ring.

作為Cardo樹脂(a-1),並無特別限定,可使用先前公知之樹脂。其中,較佳為下述式(a-1)所表示之樹脂。The Cardo resin (a-1) is not particularly limited, and a conventionally known resin can be used. Among them, a resin represented by the following formula (a-1) is preferred.

[化2]
[Chemical 2]

式(a-1)中,Xa 表示下述式(a-2)所表示之基。t1表示0以上且20以下之整數。In the formula (a-1), X a represents a group represented by the following formula (a-2). T1 represents an integer of 0 or more and 20 or less.

[化3]
[Chemical 3]

上述式(a-2)中,Ra1 分別獨立表示氫原子、碳原子數1以上且6以下之烴基、或鹵素原子,Ra2 分別獨立表示氫原子或甲基,Ra3 分別獨立表示直鏈或支鏈之伸烷基,t2表示0或1,Wa 表示下述式(a-3)所表示之基。In the above formula (a-2), R a1 independently represents a hydrogen atom, a hydrocarbon group having 1 or more and 6 or less carbon atoms, or a halogen atom, and R a2 independently represents a hydrogen atom or a methyl group, and R a3 independently represents a linear chain. Or a branched alkyl group, t2 represents 0 or 1, and W a represents a group represented by the following formula (a-3).

[化4]
[Chemical 4]

式(a-2)中,作為Ra3 ,較佳為碳原子數1以上且20以下之伸烷基,更佳為碳原子數1以上且10以下之伸烷基,尤佳為碳原子數1以上且6以下之伸烷基,最佳為乙烷-1,2-二基、丙烷-1,2-二基及丙烷-1,3-二基。In the formula (a-2), R a3 is preferably an alkylene group having 1 or more and 20 or less carbon atoms, more preferably an alkylene group having 1 or more and 10 or less carbon atoms, and particularly preferably a carbon atom number. The alkylene group of 1 or more and 6 or less is preferably an ethane-1,2-diyl group, a propane-1,2-diyl group and a propane-1,3-diyl group.

式(a-3)中之環A表示可與芳香族環縮合且可具有取代基之脂肪族環。脂肪族環可為脂肪族烴環,亦可為脂肪族雜環。
作為脂肪族環,可列舉:單環烷烴、雙環烷烴、三環烷烴、四環烷烴等。
具體可列舉:環戊烷、環己烷、環庚烷、環辛烷等單環烷烴、或金剛烷、降𦯉烷、異𦯉烷、三環癸烷、四環十二烷。
可與脂肪族環縮合之芳香族環可為芳香族烴環,亦可為芳香族雜環,較佳為芳香族烴環。具體而言,較佳為苯環及萘環。
The ring A in the formula (a-3) represents an aliphatic ring which is condensable with an aromatic ring and which may have a substituent. The aliphatic ring may be an aliphatic hydrocarbon ring or an aliphatic heterocyclic ring.
The aliphatic ring may, for example, be a monocycloalkane, a bicycloalkane, a tricycloalkane or a tetracycloalkane.
Specific examples thereof include a monocycloalkane such as cyclopentane, cyclohexane, cycloheptane or cyclooctane, or adamantane, norbornane, isodecane, tricyclodecane or tetracyclododecane.
The aromatic ring condensable with the aliphatic ring may be an aromatic hydrocarbon ring or an aromatic heterocyclic ring, preferably an aromatic hydrocarbon ring. Specifically, a benzene ring and a naphthalene ring are preferred.

作為式(a-3)所表示之2價基之較佳例,可列舉下述基。
[化5]
Preferred examples of the divalent group represented by the formula (a-3) include the following groups.
[Chemical 5]

式(a-1)中之2價基Xa 係藉由使提供殘基Za 之四羧酸二酐與下式(a-2a)所表示之二醇化合物反應而導入至Cardo樹脂(a-1)中。
[化6]
Of formula (a-1) in the divalent group X a system by providing that the Z a residue of tetracarboxylic dianhydride of the following formula (a-2a) represented by reacting the diol compound Cardo introduced into the resin (a -1) Medium.
[Chemical 6]

式(a-2a)中,Ra1 、Ra2 、Ra3 及t2係如關於式(a-2)所說明。關於式(a-2a)中之環A,係如關於式(a-3)所說明。In the formula (a-2a), R a1 , R a2 , R a3 and t2 are as described for the formula (a-2). Regarding the ring A in the formula (a-2a), it is as described with respect to the formula (a-3).

式(a-2a)所表示之二醇化合物例如可藉由以下方法而製造。
首先,視需要,依據常法將下述式(a-2b)所表示之二醇化合物所具有之酚性羥基中之氫原子取代為-Ra3 -OH所表示之基後,使用表氯醇等進行縮水甘油基化,獲得下述式(a-2c)所表示之環氧化合物。
繼而,使式(a-2c)所表示之環氧化合物與丙烯酸或甲基丙烯酸反應,藉此獲得式(a-2a)所表示之二醇化合物。
式(a-2b)及式(a-2c)中,Ra1 、Ra3 及t2係如關於式(a-2)所說明。關於式(a-2b)及式(a-2c)中之環A,係如關於式(a-3)所說明。
再者,式(a-2a)所表示之二醇化合物之製造方法並不限定於上述方法。
[化7]
The diol compound represented by the formula (a-2a) can be produced, for example, by the following method.
First, if the hydrogen atom in the phenolic hydroxyl group of the diol compound represented by the following formula (a-2b) is substituted with a group represented by -R a3 -OH according to the usual method, epichlorohydrin is used. The glycidylation is carried out to obtain an epoxy compound represented by the following formula (a-2c).
Then, the epoxy compound represented by the formula (a-2c) is reacted with acrylic acid or methacrylic acid, whereby the diol compound represented by the formula (a-2a) is obtained.
In the formula (a-2b) and the formula (a-2c), R a1 , R a3 and t2 are as described for the formula (a-2). The ring A in the formula (a-2b) and the formula (a-2c) is as described for the formula (a-3).
Further, the method for producing the diol compound represented by the formula (a-2a) is not limited to the above method.
[Chemistry 7]

作為式(a-2b)所表示之二醇化合物之較佳例,可列舉以下二醇化合物。
[化8]
Preferred examples of the diol compound represented by the formula (a-2b) include the following diol compounds.
[化8]

上述式(a-1)中,Ra0 為氫原子或-CO-Ya -COOH所表示之基。此處,Ya 表示自二羧酸酐去除酸酐基(-CO-O-CO-)所得之殘基。作為二羧酸酐之例,可列舉:順丁烯二酸酐、琥珀酸酐、伊康酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、甲基內亞甲基四氫鄰苯二甲酸酐、氯橋酸酐、甲基四氫鄰苯二甲酸酐、戊二酸酐等。In the above formula (a-1), R a0 is a hydrogen atom or a group represented by -CO-Y a -COOH. Here, Y a represents a residue obtained by removing an acid anhydride group (-CO-O-CO-) from a dicarboxylic acid anhydride. Examples of the dicarboxylic acid anhydride include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, and methylene. Tetrahydrophthalic anhydride, chloro bridge anhydride, methyltetrahydrophthalic anhydride, glutaric anhydride, and the like.

又,上述式(a-1)中,Za 表示自四羧酸二酐去除2個酸酐基所得之殘基。作為四羧酸二酐之例,可列舉:下述式(a-4)所表示之四羧酸二酐、均苯四甲酸二酐、二苯甲酮四羧酸二酐、聯苯四羧酸二酐、聯苯醚四羧酸二酐等。
又,上述式(a-1)中,t1表示0以上且20以下之整數。
Further, in the above formula (a-1), Z a represents a residue obtained by removing two acid anhydride groups from tetracarboxylic dianhydride. Examples of the tetracarboxylic dianhydride include tetracarboxylic dianhydride, pyromellitic dianhydride, benzophenone tetracarboxylic dianhydride, and biphenyl tetracarboxylic acid represented by the following formula (a-4). Acid dianhydride, diphenyl ether tetracarboxylic dianhydride, and the like.
Further, in the above formula (a-1), t1 represents an integer of 0 or more and 20 or less.

[化9]

(式(a-4)中,Ra4 、Ra5 及Ra6 分別獨立表示選自由氫原子、碳原子數1以上且10以下之烷基及氟原子所組成之群中之一種,t3表示0以上且12以下之整數)
[Chemistry 9]

(In the formula (a-4), R a4 , R a5 and R a6 each independently represent one selected from the group consisting of a hydrogen atom, an alkyl group having 1 or more and 10 or less carbon atoms, and a fluorine atom, and t3 represents 0. Above and an integer below 12)

可選擇作為式(a-4)中之Ra4 之烷基為碳原子數1以上且10以下之烷基。藉由將烷基所具備之碳原子數設定為該範圍,可更加提高所得羧酸酯之耐熱性。於Ra4 為烷基之情形時,作為其碳原子數,就易於獲得耐熱性優異之Cardo樹脂之方面而言,較佳為1以上且6以下,更佳為1以上且5以下,進而較佳為1以上且4以下,尤佳為1以上且3以下。
於Ra4 為烷基之情形時,該烷基可為直鏈狀,亦可為支鏈狀。
The alkyl group of R a4 in the formula (a-4) may be an alkyl group having 1 or more and 10 or less carbon atoms. By setting the number of carbon atoms of the alkyl group to be in this range, the heat resistance of the obtained carboxylic acid ester can be further improved. When R a4 is an alkyl group, it is preferably 1 or more and 6 or less, more preferably 1 or more and 5 or less, and more preferably 1 or more and 6 or less, as the number of carbon atoms, which is easy to obtain a heat resistance. It is preferably 1 or more and 4 or less, and particularly preferably 1 or more and 3 or less.
In the case where R a4 is an alkyl group, the alkyl group may be linear or branched.

作為式(a-4)中之Ra4 ,就易於獲得耐熱性優異之Cardo樹脂之方面而言,更佳為分別獨立為氫原子或碳原子數1以上且10以下之烷基。式(a-4)中之Ra4 更佳為氫原子、甲基、乙基、正丙基或異丙基,尤佳為氫原子或甲基。
就易於製備高純度之四羧酸二酐之方面而言,式(a-4)中之複數個Ra4 較佳為相同之基。
In the case of the Cardo resin which is excellent in heat resistance, R a4 in the formula (a-4) is more preferably independently a hydrogen atom or an alkyl group having 1 or more and 10 or less carbon atoms. R a4 in the formula (a-4) is more preferably a hydrogen atom, a methyl group, an ethyl group, a n-propyl group or an isopropyl group, and particularly preferably a hydrogen atom or a methyl group.
In terms of ease of preparation of the high-purity tetracarboxylic dianhydride, the plurality of R a4 in the formula (a-4) are preferably the same group.

式(a-4)中之t3表示0以上且12以下之整數。藉由使t3之值為12以下,可使四羧酸二酐之精製變得容易。
就四羧酸二酐之精製變得容易之方面而言,t3之上限較佳為5,更佳為3。
就四羧酸二酐之化學穩定性之方面而言,t3之下限較佳為1,更佳為2。
式(a-4)中之t3尤佳為2或3。
In the formula (a-4), t3 represents an integer of 0 or more and 12 or less. By setting the value of t3 to 12 or less, the purification of tetracarboxylic dianhydride can be facilitated.
The upper limit of t3 is preferably 5, more preferably 3, in terms of ease of purification of tetracarboxylic dianhydride.
The lower limit of t3 is preferably 1, more preferably 2, in terms of chemical stability of the tetracarboxylic dianhydride.
The t3 in the formula (a-4) is particularly preferably 2 or 3.

可選擇作為式(a-4)中之Ra5 及Ra6 之碳原子數1以上且10以下之烷基與可選擇作為Ra4 之碳原子數1以上且10以下之烷基相同。
就四羧酸二酐之精製變得容易之方面而言,Ra5 及Ra6 較佳為氫原子或碳原子數1以上且10以下(較佳為1以上且6以下,更佳為1以上且5以下,進而較佳為1以上且4以下,尤佳為1以上且3以下)之烷基,尤佳為氫原子或甲基。
The alkyl group having 1 or more and 10 or less carbon atoms of R a5 and R a6 in the formula (a-4) may be selected from the same group as the alkyl group having 1 or more and 10 or less carbon atoms which may be selected as R a4 .
In terms of purification of the tetracarboxylic dianhydride, R a5 and R a6 are preferably a hydrogen atom or a carbon number of 1 or more and 10 or less (preferably 1 or more and 6 or less, more preferably 1 or more). Further, it is preferably 5 or less, more preferably 1 or more and 4 or less, still more preferably 1 or more and 3 or less alkyl groups, and particularly preferably a hydrogen atom or a methyl group.

作為式(a-4)所表示之四羧酸二酐,例如可列舉:降𦯉烷-2-螺-α-環戊酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐(別名「降𦯉烷-2-螺-2'-環戊酮-5'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐」)、甲基降𦯉烷-2-螺-α-環戊酮-α'-螺-2''-(甲基降𦯉烷)-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環己酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐(別名「降𦯉烷-2-螺-2'-環己酮-6'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐」)、甲基降𦯉烷-2-螺-α-環己酮-α'-螺-2''-(甲基降𦯉烷)-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環丙酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環丁酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環庚酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環辛酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環壬酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環癸酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環十一酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環十二酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環十三酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環十四酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-環十五酮-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-(甲基環戊酮)-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐、降𦯉烷-2-螺-α-(甲基環己酮)-α'-螺-2''-降𦯉烷-5,5'',6,6''-四羧酸二酐等。Examples of the tetracarboxylic dianhydride represented by the formula (a-4) include norbornane-2-spiro-α-cyclopentanone-α'-spiro-2''-norbornane-5,5. '',6,6''-tetracarboxylic dianhydride (alias "norbornane-2-spiro-2'-cyclopentanone-5'-spiro-2''-norbornane-5,5'' , 6,6''-tetracarboxylic dianhydride"), methylnorbornane-2-spiro-α-cyclopentanone-α'-spiro-2''-(methylnorbornane)-5, 5'',6,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclohexanone-α'-spiro-2''-norbornane-5,5'',6 ,6''-tetracarboxylic dianhydride (alias "norbornane-2-spiro-2'-cyclohexanone-6'-spiro-2''-norbornane-5,5'',6,6 ''-Tetracarboxylic dianhydride), methylnorbornane-2-spiro-α-cyclohexanone-α'-spiro-2''-(methylnorbornane)-5,5'', 6,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclopropanone-α'-spiro-2''-norbornane-5,5'',6,6''- Tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclobutanone-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride , decane-2-spiro-α-cycloheptanone-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, norbornane- 2-spiro-α-cyclooctanone-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α -cyclohexanone-α'-spiro-2''-norbornane-5,5'',6 , 6''-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclononanone-α'-spiro-2''-norbornane-5,5'',6,6''- Tetracarboxylic dianhydride, norbornane-2-spiro-α-cycloundecyl-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic acid Anhydride, norbornane-2-spiro-α-cyclododecanone-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, hydrazine Alkan-2-non-α-cyclotridecyl-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, norbornane-2- Spiro-α-cyclotetradecanone-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α- Cyclopentadecanone-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α-(methyl ring Pentanone)-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α-(methylcyclohexane Ketone)-α'-spiro-2''-norbornane-5,5'', 6,6''-tetracarboxylic dianhydride and the like.

Cardo樹脂(a-1)之重量平均分子量較佳為1000以上且40000以下,更佳為1500以上且30000以下,進而較佳為2000以上且10000以下。藉由設為上述範圍,可獲得良好之顯影性,並且關於硬化膜可獲得充分之耐熱性與機械強度。The weight average molecular weight of the Cardo resin (a-1) is preferably 1,000 or more and 40,000 or less, more preferably 1,500 or more and 30,000 or less, and still more preferably 2,000 or more and 10,000 or less. By setting it as the said range, good developability is acquired, and sufficient heat resistance and mechanical strength are acquired with respect to a hardened film.

[酚醛清漆樹脂(a-2)]
就抑制因後烘烤時之加熱所導致之硬化膜之過度之熱流動之觀點而言,鹼可溶性樹脂(A)含有酚醛清漆樹脂(a-2)亦較佳。
作為酚醛清漆樹脂(a-2),可使用先前於感光性樹脂組合物中調配之各種酚醛清漆樹脂。作為酚醛清漆樹脂(a-2),較佳為藉由使具有酚性羥基之芳香族化合物(以下僅稱為「酚類」)與醛類於酸觸媒下進行加成縮合而獲得之樹脂。
[Novolak resin (a-2)]
The alkali-soluble resin (A) containing a novolak resin (a-2) is also preferable from the viewpoint of suppressing excessive heat flow of the cured film due to heating at the time of post-baking.
As the novolac resin (a-2), various novolac resins previously formulated in the photosensitive resin composition can be used. The novolak resin (a-2) is preferably a resin obtained by addition-condensation of an aromatic compound having a phenolic hydroxyl group (hereinafter simply referred to as "phenol") and an aldehyde under an acid catalyst. .

(酚類)
作為製作酚醛清漆樹脂(a-2)時所使用之酚類,例如可列舉:苯酚;鄰甲酚、間甲酚、對甲酚等甲酚類;2,3-二甲苯酚、2,4-二甲苯酚、2,5-二甲苯酚、2,6-二甲苯酚、3,4-二甲苯酚、3,5-二甲苯酚等二甲苯酚類;鄰乙基苯酚、間乙基苯酚、對乙基苯酚等乙基苯酚類;2-異丙基苯酚、3-異丙基苯酚、4-異丙基苯酚、鄰丁基苯酚、間丁基苯酚、對丁基苯酚以及對第三丁基苯酚等烷基苯酚類;2,3,5-三甲基苯酚及3,4,5-三甲基苯酚等三烷基苯酚類;間苯二酚、鄰苯二酚、對苯二酚、對苯二酚單甲醚、鄰苯三酚及間苯三酚等多酚類;烷基間苯二酚、烷基鄰苯二酚及烷基對苯二酚等烷基多酚類(任一烷基均為碳原子數1以上且4以下);α-萘酚;β-萘酚;羥基聯苯;以及雙酚A等。該等酚類可單獨使用,亦可組合兩種以上使用。
(phenols)
Examples of the phenol used in the production of the novolac resin (a-2) include phenol; cresols such as o-cresol, m-cresol, and p-cresol; and 2,3-xylenol and 2,4. - xylenol, 2,5-xylenol, 2,6-xylenol, 3,4-xylenol, 3,5-xylenol, etc.; o-ethylphenol, m-ethyl Ethylphenols such as phenol and p-ethylphenol; 2-isopropylphenol, 3-isopropylphenol, 4-isopropylphenol, o-butylphenol, m-butylphenol, p-butylphenol, and Alkylphenols such as tributylphenol; trialkylphenols such as 2,3,5-trimethylphenol and 3,4,5-trimethylphenol; resorcinol, catechol, p-benzene Polyphenols such as diphenols, hydroquinone monomethyl ether, pyrogallol and phloroglucinol; alkyl polyphenols such as alkyl resorcinol, alkyl catechol and alkyl hydroquinone (any alkyl group has 1 or more and 4 or less carbon atoms); α-naphthol; β-naphthol; hydroxybiphenyl; and bisphenol A. These phenols may be used singly or in combination of two or more.

該等酚類之中,較佳為間甲酚及對甲酚,更佳為併用間甲酚與對甲酚。於該情形時,藉由調整兩者之調配比例,可調節使用感光性組合物而形成之黑矩陣之耐熱性等諸特性。
間甲酚與對甲酚之調配比例並無特別限定,以間甲酚/對甲酚之莫耳比計較佳為3/7以上且8/2以下。藉由以該範圍比率使用間甲酚及對甲酚,易於獲得可形成耐熱性優異之黑矩陣之感光性組合物。
Among these phenols, m-cresol and p-cresol are preferred, and m-cresol and p-cresol are more preferably used in combination. In this case, by adjusting the blending ratio of the two, it is possible to adjust characteristics such as heat resistance of the black matrix formed using the photosensitive composition.
The blending ratio of m-cresol to p-cresol is not particularly limited, and is preferably 3/7 or more and 8/2 or less in terms of the molar ratio of m-cresol/p-cresol. By using m-cresol and p-cresol in this range ratio, it is easy to obtain a photosensitive composition which can form a black matrix excellent in heat resistance.

又,併用間甲酚與2,3,5-三甲基苯酚而製造之酚醛清漆樹脂亦較佳。於使用該酚醛清漆樹脂之情形時,尤其易於獲得可形成不易因後烘烤時之加熱而過度流動之黑矩陣之感光性組合物。
間甲酚與2,3,5-三甲基苯酚之調配比例並無特別限定,以間甲酚/2,3,5-三甲基苯酚之莫耳比計較佳為70/30以上且95/5以下。
Further, a novolak resin produced by using m-cresol and 2,3,5-trimethylphenol in combination is also preferable. In the case of using the novolak resin, it is particularly easy to obtain a photosensitive composition which can form a black matrix which is not easily excessively flowed by heating at the time of post-baking.
The blending ratio of m-cresol to 2,3,5-trimethylphenol is not particularly limited, and it is preferably 70/30 or more and 95% by mol ratio of m-cresol/2,3,5-trimethylphenol. /5 or less.

(醛類)
作為製作酚醛清漆樹脂(a-2)時所使用之醛類,例如可列舉:甲醛、對甲醛、糠醛、苯甲醛、硝基苯甲醛及乙醛等。該等醛類可單獨使用,亦可組合兩種以上使用。
(aldehydes)
Examples of the aldehyde used in the production of the novolac resin (a-2) include formaldehyde, p-formaldehyde, furfural, benzaldehyde, nitrobenzaldehyde, and acetaldehyde. These aldehydes may be used singly or in combination of two or more.

(酸觸媒)
作為製作酚醛清漆樹脂(a-2)時所使用之酸觸媒,例如可列舉:乙酸、硫酸、硝酸、磷酸及亞磷酸等無機酸類;甲酸、草酸、乙酸、二乙基硫酸及對甲苯磺酸等有機酸類;以及乙酸鋅等金屬鹽類等。該等酸觸媒可單獨使用,亦可組合兩種以上使用。
(acid catalyst)
Examples of the acid catalyst used in the production of the novolac resin (a-2) include inorganic acids such as acetic acid, sulfuric acid, nitric acid, phosphoric acid, and phosphorous acid; formic acid, oxalic acid, acetic acid, diethyl sulfuric acid, and p-toluene. Organic acids such as acids; and metal salts such as zinc acetate. These acid catalysts may be used singly or in combination of two or more.

(分子量)
作為酚醛清漆樹脂(a-2)之聚苯乙烯換算之重量平均分子量(Mw;以下亦簡稱為「重量平均分子量」),就使用感光性組合物而形成之黑矩陣對加熱所導致之流動之耐性之觀點而言,作為下限值較佳為2000,更佳為5000,尤佳為10000,進而較佳為15000,最佳為20000,作為上限值較佳為50000,更佳為45000,進而較佳為40000,最佳為35000。
(molecular weight)
The polystyrene-equivalent weight average molecular weight (Mw; hereinafter also referred to as "weight average molecular weight") of the novolac resin (a-2), the black matrix formed by using the photosensitive composition, and the flow caused by heating From the viewpoint of patience, the lower limit is preferably 2,000, more preferably 5,000, still more preferably 10,000, still more preferably 15,000, most preferably 20,000, and the upper limit is preferably 50,000, more preferably 45,000. Further preferably, it is 40,000, and most preferably 35,000.

作為酚醛清漆樹脂(a-2),可組合使用至少兩種聚苯乙烯換算之重量平均分子量不同之樹脂。藉由組合使用重量平均分子量不同之樹脂,可取得感光性組合物之顯影性與使用感光性組合物而形成之硬化膜之耐熱性之平衡。As the novolak resin (a-2), at least two resins having different weight average molecular weights in terms of polystyrene can be used in combination. By using a resin having a different weight average molecular weight in combination, the balance between the developability of the photosensitive composition and the heat resistance of the cured film formed using the photosensitive composition can be obtained.

[改性環氧樹脂(a-3)]
作為鹼可溶性樹脂(A),就實現烘烤時之更高之流動耐性,又,易於對硬化膜賦予較高之耐水性之方面而言,可含有環氧化合物(a-3a)與含不飽和基之羧酸(a-3b)之反應物之多元酸酐(a-3c)加成體(a-3)。關於該加成體,亦記為「改性環氧樹脂(a-3)」。
再者,本申請案之說明書及申請專利範圍中,將屬於上述定義且不屬於上述具有Cardo結構之樹脂(a-1)之化合物作為改性環氧樹脂(a-3)。
[Modified Epoxy Resin (a-3)]
As the alkali-soluble resin (A), it is possible to achieve higher flow resistance at the time of baking, and it is easy to impart a high water resistance to the cured film, and may contain an epoxy compound (a-3a) and not A polybasic acid anhydride (a-3c) adduct (a-3) of a reactant of a saturated carboxylic acid (a-3b). This additive is also referred to as "modified epoxy resin (a-3)".
Further, in the specification and the patent application of the present application, a compound which belongs to the above definition and does not belong to the above resin (a-1) having a Cardo structure is used as the modified epoxy resin (a-3).

以下,對環氧化合物(a-3a)、含不飽和基之羧酸(a-3b)及多元酸酐(a-3c)進行說明。Hereinafter, the epoxy compound (a-3a), the unsaturated group-containing carboxylic acid (a-3b), and the polybasic acid anhydride (a-3c) will be described.

<環氧化合物(a-3a)>
環氧化合物(a-3a)只要為具有環氧基之化合物,則並無特別限定,可為具有芳香族基之芳香族環氧化合物,亦可為不含芳香族基之脂肪族環氧化合物,較佳為具有芳香族基之芳香族環氧化合物。
環氧化合物(a-3a)可為單官能環氧化合物,亦可為雙官能以上之多官能環氧化合物,較佳為多官能環氧化合物。
<epoxy compound (a-3a)>
The epoxy compound (a-3a) is not particularly limited as long as it is a compound having an epoxy group, and may be an aromatic epoxy compound having an aromatic group or an aliphatic epoxy compound containing no aromatic group. It is preferably an aromatic epoxy compound having an aromatic group.
The epoxy compound (a-3a) may be a monofunctional epoxy compound or a difunctional or higher polyfunctional epoxy compound, preferably a polyfunctional epoxy compound.

作為環氧化合物(a-3a)之具體例,可列舉:雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚AD型環氧樹脂、萘型環氧樹脂及聯苯型環氧樹脂等雙官能環氧樹脂;二聚酸縮水甘油酯及三縮水甘油酯等縮水甘油酯型環氧樹脂;四縮水甘油基胺基二苯甲烷、三縮水甘油基-對胺基苯酚、四縮水甘油基間苯二甲胺及四縮水甘油基雙胺基甲基環己烷等縮水甘油基胺型環氧樹脂;異氰尿酸三縮水甘油酯等雜環式環氧樹脂;間苯三酚三縮水甘油醚、三羥基聯苯三縮水甘油醚、三羥基苯基甲烷三縮水甘油醚、甘油三縮水甘油醚、2-[4-(2,3-環氧丙氧基)苯基]-2-[4-[1,1-雙[4-(2,3-環氧丙氧基)苯基]乙基]苯基]丙烷及1,3-雙[4-[1-[4-(2,3-環氧丙氧基)苯基]-1-[4-[1-[4-(2,3-環氧丙氧基)苯基]-1-甲基乙基]苯基]乙基]苯氧基]-2-丙醇等3官能型環氧樹脂;四羥基苯基乙烷四縮水甘油醚、四縮水甘油基二苯甲酮、雙間苯二酚四縮水甘油醚及四縮水甘油氧基聯苯等4官能型環氧樹脂。Specific examples of the epoxy compound (a-3a) include bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol AD type epoxy resin, and naphthalene type. Bifunctional epoxy resin such as epoxy resin and biphenyl type epoxy resin; glycidyl ester type epoxy resin such as dimer acid glycidyl ester and triglycidyl ester; tetraglycidylamino diphenylmethane and triglycidyl a glycidylamine type epoxy resin such as a base-p-aminophenol, a tetraglycidyl meta-xylylenediamine, and a tetraglycidyl bisaminomethylcyclohexane; a heterocyclic type such as a triglycidyl isocyanurate; Epoxy resin; phloroglucin triglycidyl ether, trihydroxybiphenyl triglycidyl ether, trihydroxyphenylmethane triglycidyl ether, glycerol triglycidyl ether, 2-[4-(2,3-epoxy) Propoxy)phenyl]-2-[4-[1,1-bis[4-(2,3-epoxypropoxy)phenyl]ethyl]phenyl]propane and 1,3-double [ 4-[1-[4-(2,3-epoxypropoxy)phenyl]-1-[4-[1-[4-(2,3-epoxypropoxy)phenyl]-1 3-functional epoxy resin such as -methylethyl]phenyl]ethyl]phenoxy]-2-propanol; tetrahydroxyphenylethane tetraglycidyl ether, four A tetrafunctional epoxy resin such as glycidyl benzophenone, bis resorcinol tetraglycidyl ether or tetraglycidoxybiphenyl.

又,作為環氧化合物(a-3a),較佳為具有聯苯骨架之環氧化合物。
具有聯苯骨架之環氧化合物較佳為於主鏈具有至少1個以上之下述式(a-3a-1)所表示之聯苯骨架。
具有聯苯骨架之環氧化合物較佳為具有2個以上之環氧基之多官能環氧化合物。
藉由使用具有聯苯骨架之環氧化合物,易於獲得感度與顯影性之平衡優異,且可形成對基板之密接性優異之硬化膜之感光性組合物。
Further, the epoxy compound (a-3a) is preferably an epoxy compound having a biphenyl skeleton.
The epoxy compound having a biphenyl skeleton preferably has at least one or more biphenyl skeleton represented by the following formula (a-3a-1) in the main chain.
The epoxy compound having a biphenyl skeleton is preferably a polyfunctional epoxy compound having two or more epoxy groups.
By using an epoxy compound having a biphenyl skeleton, it is easy to obtain a photosensitive composition which is excellent in balance between sensitivity and developability, and which can form a cured film excellent in adhesion to a substrate.

[化10]

(式(a-3a-1)中,Ra7 分別獨立為氫原子、碳原子數1以上且12以下之烷基、鹵素原子或可具有取代基之苯基,j為1以上且4以下之整數)
[化10]

(In the formula (a-3a-1), R a7 is independently a hydrogen atom, an alkyl group having 1 or more and 12 or less carbon atoms, a halogen atom or a phenyl group which may have a substituent, and j is 1 or more and 4 or less. Integer)

於Ra7 為碳原子數1以上且12以下之烷基之情形時,作為烷基之具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、異戊基、第二戊基、第三戊基、正己基、正庚基、正辛基、異辛基、第二辛基、第三辛基、正壬基、異壬基、正癸基、異癸基、正十一烷基及正十二烷基。In the case where R a7 is an alkyl group having 1 or more and 12 or less carbon atoms, specific examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group and isobutyl group. , second butyl, tert-butyl, n-pentyl, isopentyl, second pentyl, third pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, second octyl, Trioctyl, n-decyl, isodecyl, n-decyl, isodecyl, n-undecyl and n-dodecyl.

於Ra7 為鹵素原子之情形時,作為鹵素原子之具體例,可列舉:氟原子、氯原子、溴原子及碘原子。In the case where R a7 is a halogen atom, specific examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

於Ra7 為可具有取代基之苯基之情形時,苯基上之取代基之個數並無特別限定。苯基上之取代基之個數為0~5,較佳為0或1。
作為取代基之例,可列舉:碳原子數1以上且4以下之烷基、碳原子數1以上且4以下之烷氧基、碳原子數2以上且4以下之脂肪族醯基、鹵素原子、氰基及硝基。
When R a7 is a phenyl group which may have a substituent, the number of the substituent on the phenyl group is not particularly limited. The number of substituents on the phenyl group is from 0 to 5, preferably from 0 or 1.
Examples of the substituent include an alkyl group having 1 or more and 4 or less carbon atoms, an alkoxy group having 1 or more and 4 or less carbon atoms, an aliphatic fluorenyl group having 2 or more and 4 or less carbon atoms, and a halogen atom. , cyano and nitro.

作為具有上述式(a-3a-1)所表示之聯苯骨架之環氧化合物(a-3a),並無特別限定,例如可列舉下述式(a-3a-2)所表示之環氧化合物。
[化11]

(式(a-3a-2)中,Ra7 及j與式(a-3a-1)相同,k為括弧內之構成單元之平均重複數,為0以上且10以下)
The epoxy compound (a-3a) having a biphenyl skeleton represented by the above formula (a-3a-1) is not particularly limited, and examples thereof include an epoxy represented by the following formula (a-3a-2). Compound.
[11]

(In the formula (a-3a-2), R a7 and j are the same as the formula (a-3a-1), and k is the average number of repetitions of constituent units in parentheses, and is 0 or more and 10 or less)

式(a-3a-2)所表示之環氧化合物之中,就尤其易於獲得感度與顯影性之平衡優異之感光性組合物之方面而言,較佳為下述式(a-3a-3)所表示之化合物。
[化12]

(式(a-3a-3)中,k與式(a-3a-2)相同)
Among the epoxy compounds represented by the formula (a-3a-2), the photosensitive composition having excellent balance between sensitivity and developability is particularly preferable, and the following formula (a-3a-3) is preferred. ) the compound represented.
[化12]

(in the formula (a-3a-3), k is the same as the formula (a-3a-2))

(含不飽和基之羧酸(a-3b))
製備為改性環氧化合物(a-3)時,使環氧化合物(a-3a)與含不飽和基之羧酸(a-3b)進行反應。
作為含不飽和基之羧酸(a-3b),較佳為於分子中含有丙烯醯基或甲基丙烯醯基等反應性不飽和雙鍵之單羧酸。作為此種含不飽和基之羧酸,例如可列舉:丙烯酸、甲基丙烯酸、β-苯乙烯基丙烯酸、β-糠基丙烯酸、α-氰基桂皮酸、桂皮酸等。又,含不飽和基之羧酸(a-3b)可單獨使用或組合兩種以上使用。
(Unsaturated carboxylic acid (a-3b))
When the modified epoxy compound (a-3) is prepared, the epoxy compound (a-3a) is reacted with the unsaturated group-containing carboxylic acid (a-3b).
The unsaturated group-containing carboxylic acid (a-3b) is preferably a monocarboxylic acid containing a reactive unsaturated double bond such as an alkyl fluorenyl group or a methacryl fluorenyl group in the molecule. Examples of such an unsaturated group-containing carboxylic acid include acrylic acid, methacrylic acid, β-styrylacrylic acid, β-mercaptoacrylic acid, α-cyanocinnamic acid, and cinnamic acid. Further, the unsaturated group-containing carboxylic acid (a-3b) may be used singly or in combination of two or more.

可藉由公知之方法使環氧化合物(a-3a)與含不飽和基之羧酸(a-3b)進行反應。作為較佳之反應方法,例如可列舉如下方法:將三乙胺、苄基乙胺等三級胺、十二烷基三甲基氯化銨、四甲基氯化銨、四乙基氯化銨、苄基三乙基氯化銨等四級銨鹽、吡啶或三苯膦等作為觸媒,於有機溶劑中,於反應溫度50℃以上且150℃以下使環氧化合物(a-3a)與含不飽和基之羧酸(a-3b)反應數小時至數十小時。The epoxy compound (a-3a) can be reacted with an unsaturated group-containing carboxylic acid (a-3b) by a known method. As a preferable reaction method, for example, a tertiary amine such as triethylamine or benzylethylamine, dodecyltrimethylammonium chloride, tetramethylammonium chloride or tetraethylammonium chloride can be mentioned. a quaternary ammonium salt such as benzyltriethylammonium chloride, pyridine or triphenylphosphine as a catalyst, and an epoxy compound (a-3a) in an organic solvent at a reaction temperature of 50 ° C or more and 150 ° C or less The unsaturated group-containing carboxylic acid (a-3b) is reacted for several hours to several tens of hours.

作為環氧化合物(a-3a)與含不飽和基之羧酸(a-3b)之反應中之兩者之使用量之比率,以環氧化合物(a-3a)之環氧當量與含不飽和基之羧酸(a-3b)之羧酸當量之比計,通常較佳為1:0.5~1:2,更佳為1:0.8~1:1.25,尤佳為1:0.9~1:1.1。
若環氧化合物(a-3a)之使用量與含不飽和基之羧酸(a-3b)之使用量之比率以上述當量比計為1:0.5~1:2,則存在交聯效率提高之傾向,較佳。
The ratio of the amount of the two of the reactions of the epoxy compound (a-3a) and the unsaturated group-containing carboxylic acid (a-3b) to the epoxy equivalent of the epoxy compound (a-3a) The ratio of the carboxylic acid equivalent of the saturated carboxylic acid (a-3b) is usually preferably from 1:0.5 to 1:2, more preferably from 1:0.8 to 1:1.25, still more preferably from 1:0.9 to 1: 1.1.
When the ratio of the amount of the epoxy compound (a-3a) to the amount of the unsaturated group-containing carboxylic acid (a-3b) used is from 1:0.5 to 1:2 in the above equivalent ratio, crosslinking efficiency is improved. The tendency is better.

(多元酸酐(a-3c))
多元酸酐(a-3c)係具有2個以上之羧基之羧酸之酸酐。
作為多元酸酐(a-3c),並無特別限定,例如可列舉:順丁烯二酸酐、琥珀酸酐、伊康酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、甲基六氫鄰苯二甲酸酐、甲基四氫鄰苯二甲酸酐、偏苯三甲酸酐、均苯四甲酸酐、二苯甲酮四羧酸二酐、3-甲基六氫鄰苯二甲酸酐、4-甲基六氫鄰苯二甲酸酐、3-乙基六氫鄰苯二甲酸酐、4-乙基六氫鄰苯二甲酸酐、四氫鄰苯二甲酸酐、3-甲基四氫鄰苯二甲酸酐、4-甲基四氫鄰苯二甲酸酐、3-乙基四氫鄰苯二甲酸酐、4-乙基四氫鄰苯二甲酸酐、下述式(a-3c-1)所表示之化合物及下述式(a-3c-2)所表示之化合物。又,多元酸酐(a-3c)可單獨使用或組合兩種以上使用。
(polybasic anhydride (a-3c))
The polybasic acid anhydride (a-3c) is an acid anhydride of a carboxylic acid having two or more carboxyl groups.
The polybasic acid anhydride (a-3c) is not particularly limited, and examples thereof include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, and hexahydrophthalic acid. Formic anhydride, methylhexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, benzophenone tetracarboxylic dianhydride, 3-methylhexahydrohydride Phthalic anhydride, 4-methylhexahydrophthalic anhydride, 3-ethylhexahydrophthalic anhydride, 4-ethylhexahydrophthalic anhydride, tetrahydrophthalic anhydride, 3-methyltetrahydrophthalic anhydride, 4-methyltetrahydrophthalic anhydride, 3-ethyltetrahydrophthalic anhydride, 4-ethyltetrahydrophthalic anhydride, the following A compound represented by the formula (a-3c-1) and a compound represented by the following formula (a-3c-2). Further, the polybasic acid anhydride (a-3c) may be used singly or in combination of two or more.

[化13]

(式(a-3c-2)中,Ra8 表示碳原子數1以上且10以下之可具有取代基之伸烷基)
[Chemistry 13]

(In the formula (a-3c-2), R a8 represents an alkylene group which may have a substituent having 1 or more and 10 or less carbon atoms)

作為多元酸酐(a-3c),就易於獲得感度與顯影性之平衡優異之感光性組合物之方面而言,較佳為具有2個以上之苯環之化合物。又,多元酸酐(a-3c)更佳為含有上述式(a-3c-1)所表示之化合物及上述式(a-3c-2)所表示之化合物之至少一者。The polybasic acid anhydride (a-3c) is preferably a compound having two or more benzene rings from the viewpoint of easily obtaining a photosensitive composition excellent in balance between sensitivity and developability. Further, the polybasic acid anhydride (a-3c) preferably contains at least one of the compound represented by the above formula (a-3c-1) and the compound represented by the above formula (a-3c-2).

使環氧化合物(a-3a)與含不飽和基之羧酸(a-3b)反應後,與多元酸酐(a-3c)反應之方法可自公知之方法中適當選擇。
又,作為使用量比,以環氧化合物(a-3a)與含不飽和基之羧酸(a-3b)之反應後之成分中之OH基之莫耳數與多元酸酐(a-3c)之酸酐基之當量比計,通常為1:1~1:0.1,較佳為1:0.8~1:0.2。藉由設為上述範圍,易於獲得顯影性良好之感光性組合物。
The method of reacting the epoxy compound (a-3a) with the unsaturated group-containing carboxylic acid (a-3b) and reacting with the polybasic acid anhydride (a-3c) can be appropriately selected from known methods.
Further, as the usage ratio, the number of moles of the OH group and the polybasic acid anhydride (a-3c) in the component after the reaction of the epoxy compound (a-3a) and the unsaturated group-containing carboxylic acid (a-3b) The equivalent ratio of the acid anhydride group is usually 1:1 to 1:0.1, preferably 1:0.8 to 1:0.2. By setting it as the said range, it is easy to acquire the photosensitive composition which is excellent in developability.

又,改性環氧樹脂(a-3)之酸值以樹脂固形物成分計,較佳為10 mgKOH/g以上且150 mgKOH/g以下,更佳為70 mgKOH/g以上且110 mgKOH/g以下。藉由使樹脂之酸值為10 mgKOH/g以上,可獲得對顯影液之充分之溶解性,又,藉由使酸值為150 mgKOH/g以下,可獲得充分之硬化性,可使表面性變得良好。Further, the acid value of the modified epoxy resin (a-3) is preferably 10 mgKOH/g or more and 150 mgKOH/g or less, more preferably 70 mgKOH/g or more and 110 mgKOH/g, based on the resin solid content component. the following. By setting the acid value of the resin to 10 mgKOH/g or more, sufficient solubility to the developer can be obtained, and by setting the acid value to 150 mgKOH/g or less, sufficient hardenability can be obtained, and surface properties can be obtained. Becomes good.

又,改性環氧樹脂(a-3)之重量平均分子量較佳為1000以上且40000以下,更佳為2000以上且30000以下。藉由使重量平均分子量為1000以上,易於形成耐熱性及強度優異之硬化膜。又,藉由設為40000以下,易於獲得顯示對顯影液之充分之溶解性之感光性組合物。Further, the weight average molecular weight of the modified epoxy resin (a-3) is preferably 1,000 or more and 40,000 or less, more preferably 2,000 or more and 30,000 or less. When the weight average molecular weight is 1000 or more, it is easy to form a cured film excellent in heat resistance and strength. Further, by setting it to 40,000 or less, it is easy to obtain a photosensitive composition which exhibits sufficient solubility to the developer.

[丙烯酸系樹脂(a-4)]
丙烯酸系樹脂(a-4)亦又較佳作為構成鹼可溶性樹脂(A)之成分。
作為丙烯酸系樹脂(a-4),可使用含有源自(甲基)丙烯酸之構成單元及/或源自(甲基)丙烯酸酯等其他單體之構成單元之樹脂。(甲基)丙烯酸係丙烯酸或甲基丙烯酸。(甲基)丙烯酸酯係下述式(a-4-1)所表示之化合物,只要不損害本發明之目的,則無特別限定。
[Acrylic resin (a-4)]
The acrylic resin (a-4) is also preferably used as a component constituting the alkali-soluble resin (A).
As the acrylic resin (a-4), a resin containing a constituent unit derived from (meth)acrylic acid and/or a constituent unit derived from another monomer such as (meth)acrylate can be used. (Meth)acrylic acrylic or methacrylic acid. The (meth) acrylate is a compound represented by the following formula (a-4-1), and is not particularly limited as long as the object of the present invention is not impaired.

[化14]
[Chemistry 14]

上述式(a-4-1)中,Ra9 為氫原子或甲基,Ra10 為1價有機基。該有機基可於該有機基中含有雜原子等烴基以外之鍵或取代基。又,該有機基可為直鏈狀、支鏈狀、環狀之任一者。In the above formula (a-4-1), R a9 is a hydrogen atom or a methyl group, and R a10 is a monovalent organic group. The organic group may contain a bond or a substituent other than a hydrocarbon group such as a hetero atom in the organic group. Further, the organic group may be any of a linear chain, a branched chain, and a cyclic chain.

作為Ra10 之有機基中之烴基以外之取代基,只要不損害本發明之效果,則無特別限定,可列舉:鹵素原子、羥基、巰基、硫基、氰基、異氰基、氰酸基、異氰酸基(isocyanato group)、硫氰酸基、異硫氰酸基、矽烷基、矽烷醇基、烷氧基、烷氧基羰基、胺甲醯基、硫代胺甲醯基、硝基、亞硝基、羧基、羧酸酯基、醯基、醯氧基、亞磺酸基、磺基、磺酸根基(sulfonato group)、膦基、氧膦基、膦酸基、膦酸根基(phosphonato group)、羥基亞胺基、烷基醚基、烷基硫醚基、芳醚基、芳基硫醚基、胺基(-NH2 、-NHR、-NRR':R及R'分別獨立表示烴基)等。上述取代基中所含之氫原子可被取代為烴基。又,上述取代基中所含之烴基可為直鏈狀、支鏈狀及環狀之任一者。The substituent other than the hydrocarbon group in the organic group of R a10 is not particularly limited as long as the effect of the present invention is not impaired, and examples thereof include a halogen atom, a hydroxyl group, a thiol group, a thio group, a cyano group, an isocyano group, and a cyanate group. , isocyanato group, thiocyanate group, isothiocyanate group, decyl group, decyl alcohol group, alkoxy group, alkoxycarbonyl group, amine methyl group, thioamine formazan group, nitrate Base, nitroso, carboxyl, carboxylate, sulfhydryl, decyloxy, sulfinate, sulfo, sulfonato group, phosphino, phosphinyl, phosphonate, phosphonate (phosphonato group), hydroxyimino group, alkyl ether group, alkyl sulfide group, aryl ether group, aryl sulfide group, amine group (-NH 2 , -NHR, -NRR': R and R' respectively Independently means a hydrocarbon group). The hydrogen atom contained in the above substituent may be substituted with a hydrocarbon group. Further, the hydrocarbon group contained in the substituent may be any of a linear chain, a branched chain, and a cyclic group.

又,作為Ra10 之有機基可具有丙烯醯氧基、甲基丙烯醯氧基、環氧基、氧雜環丁基等反應性官能基。
丙烯醯氧基或甲基丙烯醯氧基等具有不飽和雙鍵之醯基例如可藉由使丙烯酸或甲基丙烯酸等不飽和羧酸與含有具有環氧基之構成單元之丙烯酸系樹脂(a-4)中之環氧基之至少一部分反應而製造。
Further, the organic group of R a10 may have a reactive functional group such as an acryloxy group, a methacryloxy group, an epoxy group or an oxetanyl group.
A mercapto group having an unsaturated double bond such as an acryloxy group or a methacryloxy group can be, for example, an unsaturated carboxylic acid such as acrylic acid or methacrylic acid and an acrylic resin containing a constituent unit having an epoxy group (a) -4) At least a portion of the epoxy groups are reacted to produce.

作為Ra10 ,較佳為烷基、芳基、芳烷基或雜環基,該等基可經鹵素原子、羥基、烷基或雜環基取代。又,於該等基含有伸烷基部分之情形時,伸烷基部分可被醚鍵、硫醚鍵、酯鍵中斷。As R a10 , an alkyl group, an aryl group, an arylalkyl group or a heterocyclic group is preferred, and these groups may be substituted by a halogen atom, a hydroxyl group, an alkyl group or a heterocyclic group. Further, in the case where the groups contain an alkylene moiety, the alkyl group moiety may be interrupted by an ether bond, a thioether bond or an ester bond.

於烷基為直鏈狀或支鏈狀之情形時,烷基之碳原子數較佳為1以上且20以下,更佳為1以上且15以下,尤佳為1以上且10以下。作為較佳之烷基之例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、異戊基、第二戊基、第三戊基、正己基、正庚基、正辛基、異辛基、第二辛基、第三辛基、正壬基、異壬基、正癸基、異癸基等。When the alkyl group is linear or branched, the number of carbon atoms of the alkyl group is preferably 1 or more and 20 or less, more preferably 1 or more and 15 or less, and still more preferably 1 or more and 10 or less. Preferred examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, second butyl group, tert-butyl group, n-pentyl group and isopentyl group. , second amyl, third amyl, n-hexyl, n-heptyl, n-octyl, isooctyl, second octyl, third octyl, n-decyl, isodecyl, n-decyl, isoindole Base.

於烷基為脂環式基或含有脂環式基之基之情形時,作為烷基中所含之較佳之脂環式基,可列舉:環戊基及環己基等單環之脂環式基或金剛烷基、降𦯉基、異𦯉基、三環壬基、三環癸基及四環十二烷基等多環之脂環式基。In the case where the alkyl group is an alicyclic group or a group containing an alicyclic group, as the preferred alicyclic group contained in the alkyl group, a monocyclic alicyclic ring such as a cyclopentyl group or a cyclohexyl group may be mentioned. a polycyclic alicyclic group such as an adamantyl group, a norbornyl group, an isodecyl group, a tricyclodecyl group, a tricyclodecyl group or a tetracyclododecyl group.

作為式(a-4-1)所表示之化合物具備具有環氧基之鏈狀基作為Ra10 之情形時之式(a-4-1)所表示之化合物之具體例,可列舉;(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸2-甲基縮水甘油酯、(甲基)丙烯酸3,4-環氧丁酯、(甲基)丙烯酸6,7-環氧庚酯等(甲基)丙烯酸環氧烷基酯類。Specific examples of the compound represented by the formula (a-4-1) in the case where the compound represented by the formula (a-4-1) has a chain group having an epoxy group as R a10 may be mentioned; Glycidyl acrylate, 2-methylglycidyl (meth)acrylate, 3,4-epoxybutyl (meth)acrylate, 6,7-epoxyheptyl (meth)acrylate, etc. Base) Acrylic alkyl acrylates.

又,式(a-4-1)所表示之化合物可為含脂環式環氧基之(甲基)丙烯酸酯。構成脂環式環氧基之脂環式基可為單環,亦可為多環。作為單環之脂環式基,可列舉:環戊基、環己基等。又,作為多環之脂環式基,可列舉:降𦯉基、異𦯉基、三環壬基、三環癸基、四環十二烷基等。Further, the compound represented by the formula (a-4-1) may be an alicyclic epoxy group-containing (meth) acrylate. The alicyclic group constituting the alicyclic epoxy group may be a single ring or a polycyclic ring. Examples of the monocyclic alicyclic group include a cyclopentyl group and a cyclohexyl group. Further, examples of the polycyclic alicyclic group include a norbornyl group, an isodecyl group, a tricyclodecyl group, a tricyclodecyl group, and a tetracyclododecyl group.

作為式(a-4-1)所表示之化合物為含脂環式環氧基之(甲基)丙烯酸酯之情形時之具體例,例如可列舉下述式(a-4-1a)~(a-4-1o)所表示之化合物。該等之中,為使顯影性成為適度之範圍內,較佳為下述式(a-4-1a)~(a-4-1e)所表示之化合物,更佳為下述式(a-4-1a)~(a-4-1c)所表示之化合物。Specific examples of the case where the compound represented by the formula (a-4-1) is an alicyclic epoxy group-containing (meth) acrylate, for example, the following formula (a-4-1a) to (a) Compound represented by a-4-1o). Among these, in order to make the developability into an appropriate range, the compound represented by the following formula (a-4-1a) to (a-4-1e) is preferable, and the following formula (a-) is more preferable. a compound represented by 4-1a) to (a-4-1c).

[化15]
[化15]

[化16]
[Chemistry 16]

[化17]
[化17]

上述式中,Ra20 表示氫原子或甲基,Ra21 表示碳原子數1以上且6以下之2價之脂肪族飽和烴基,Ra22 表示碳原子數1以上且10以下之2價烴基,t表示0以上且10以下之整數。作為Ra21 ,較佳為直鏈狀或支鏈狀之伸烷基,例如亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基。作為Ra22 ,例如較佳為亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基、伸苯基、伸環己基、-CH2 -Ph-CH2 -(Ph表示伸苯基)。In the above formula, R a20 represents a hydrogen atom or a methyl group, R a21 represents a divalent aliphatic saturated hydrocarbon group having 1 or more and 6 or less carbon atoms, and R a22 represents a divalent hydrocarbon group having 1 or more and 10 or less carbon atoms, and An integer of 0 or more and 10 or less is represented. As R a21 , a linear or branched alkyl group such as methylene, ethyl, propyl, tetramethylene, ethyl ethyl, pentamethylene or hexamethylene is preferred. base. As R a22 , for example, a methylene group, an ethyl group, a propyl group, a tetramethylene group, an ethyl group ethyl group, a pentamethylene group, a hexamethylene group, a phenylene group, a cyclohexyl group, and a -CH are preferable. 2 -Ph-CH 2 - (Ph represents a phenylene group).

又,丙烯酸系樹脂(a-4)亦可為進而使(甲基)丙烯酸酯以外之單體聚合而成之共聚物。作為(甲基)丙烯酸酯以外之單體,可列舉:(甲基)丙烯醯胺類、不飽和羧酸類、烯丙基化合物、乙烯醚類、乙烯酯類、苯乙烯類等。該等單體可單獨使用或組合兩種以上使用。Further, the acrylic resin (a-4) may be a copolymer obtained by further polymerizing a monomer other than (meth) acrylate. Examples of the monomer other than the (meth) acrylate include (meth) acrylamide, an unsaturated carboxylic acid, an allyl compound, a vinyl ether, a vinyl ester, and a styrene. These monomers may be used singly or in combination of two or more.

作為(甲基)丙烯醯胺類,可列舉:(甲基)丙烯醯胺、N-烷基(甲基)丙烯醯胺、N-芳基(甲基)丙烯醯胺、N,N-二烷基(甲基)丙烯醯胺、N,N-芳基(甲基)丙烯醯胺、N-甲基-N-苯基(甲基)丙烯醯胺、N-羥基乙基-N-甲基(甲基)丙烯醯胺等。Examples of the (meth) acrylamide include (meth) acrylamide, N-alkyl (meth) acrylamide, N-aryl (meth) acrylamide, and N, N-di. Alkyl (meth) acrylamide, N,N-aryl (meth) acrylamide, N-methyl-N-phenyl (meth) acrylamide, N-hydroxyethyl-N- Base (meth) acrylamide and the like.

作為不飽和羧酸類,可列舉:丁烯酸等單羧酸;順丁烯二酸、反丁烯二酸、檸康酸、中康酸、伊康酸等二羧酸;該等二羧酸之酸酐等。Examples of the unsaturated carboxylic acid include monocarboxylic acids such as crotonic acid; dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, and itaconic acid; and these dicarboxylic acids. Anhydride, etc.

作為烯丙基化合物,可列舉:乙酸烯丙酯、己酸烯丙酯、辛酸烯丙酯、月桂酸烯丙酯、棕櫚酸烯丙酯、硬脂酸烯丙酯、苯甲酸烯丙酯、乙醯乙酸烯丙酯、乳酸烯丙酯等烯丙酯類;烯丙氧基乙醇等。Examples of the allyl compound include allyl acetate, allyl hexanoate, allyl octanoate, allyl laurate, allyl palmitate, allyl stearate, allyl benzoate, Allyl acetate such as allyl acetate, allyl lactate; allyloxyethanol and the like.

作為乙烯醚類,可列舉:己基乙烯醚、辛基乙烯醚、癸基乙烯醚、乙基己基乙烯醚、甲氧基乙基乙烯醚、乙氧基乙基乙烯醚、氯乙基乙烯醚、1-甲基-2,2-二甲基丙基乙烯醚、2-乙基丁基乙烯醚、羥基乙基乙烯醚、二乙二醇乙烯醚、二甲胺基乙基乙烯醚、二乙胺基乙基乙烯醚、丁胺基乙基乙烯醚、苄基乙烯醚、四氫糠基乙烯醚等烷基乙烯醚;乙烯基苯醚、乙烯基甲苯醚、乙烯基氯苯醚、乙烯基-2,4-二氯苯醚、乙烯基萘醚、乙烯基蒽醚等乙烯基芳醚等。Examples of the vinyl ethers include hexyl vinyl ether, octyl vinyl ether, mercapto vinyl ether, ethylhexyl vinyl ether, methoxy ethyl vinyl ether, ethoxyethyl vinyl ether, and chloroethyl vinyl ether. 1-methyl-2,2-dimethylpropyl vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether, dimethylaminoethyl vinyl ether, diethyl Alkyl vinyl ethers such as aminoethyl vinyl ether, butylaminoethyl vinyl ether, benzyl vinyl ether, tetrahydrofurfuryl vinyl ether; vinyl phenyl ether, vinyl toluene ether, vinyl chlorophenyl ether, vinyl a vinyl aryl ether such as 2,4-dichlorophenyl ether, vinyl naphthyl ether or vinyl anthracene.

作為乙烯酯類,可列舉:丁酸乙烯酯、異丁酸乙烯酯、三甲基乙酸乙烯酯、二乙基乙酸乙烯酯、戊酸乙烯酯、己酸乙烯酯、氯乙酸乙烯酯、二氯乙酸乙烯酯、甲氧基乙酸乙烯酯、丁氧基乙酸乙烯酯、苯基乙酸乙烯酯、乙醯乙酸乙烯酯、乳酸乙烯酯、β-苯基丁酸乙烯酯、苯甲酸乙烯酯、水楊酸乙烯酯、氯苯甲酸乙烯酯、四氯苯甲酸乙烯酯、萘甲酸乙烯酯等。Examples of the vinyl esters include vinyl butyrate, vinyl isobutyrate, trimethyl vinyl acetate, diethyl vinyl acetate, vinyl valerate, vinyl hexanoate, vinyl chloroacetate, and dichloro Vinyl acetate, methoxyvinyl acetate, butoxy vinyl acetate, vinyl phenyl acetate, ethylene vinyl acetate, vinyl lactate, vinyl β-phenylbutyrate, vinyl benzoate, water Vinyl acetate, vinyl chlorobenzoate, vinyl tetrachlorobenzoate, vinyl naphthalate, and the like.

作為苯乙烯類,可列舉:苯乙烯;甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、異丙基苯乙烯、丁基苯乙烯、己基苯乙烯、環己基苯乙烯、癸基苯乙烯、苄基苯乙烯、氯甲基苯乙烯、三氟甲基苯乙烯、乙氧基甲基苯乙烯、乙醯氧基甲基苯乙烯等烷基苯乙烯;甲氧基苯乙烯、4-甲氧基-3-甲基苯乙烯、二甲氧基苯乙烯等烷氧基苯乙烯;氯苯乙烯、二氯苯乙烯、三氯苯乙烯、四氯苯乙烯、五氯苯乙烯、溴苯乙烯、二溴苯乙烯、碘苯乙烯、氟苯乙烯、三氟苯乙烯、2-溴-4-三氟甲基苯乙烯、4-氟-3-三氟甲基苯乙烯等鹵代苯乙烯等。Examples of the styrenes include styrene; methylstyrene, dimethylstyrene, trimethylstyrene, ethylstyrene, diethylstyrene, isopropylstyrene, and butylstyrene. Alkenyl styrene, cyclohexyl styrene, mercapto styrene, benzyl styrene, chloromethyl styrene, trifluoromethyl styrene, ethoxymethyl styrene, ethoxymethyl methyl styrene Alkoxystyrene, methoxystyrene, 4-methoxy-3-methylstyrene, dimethoxystyrene, etc.; chlorostyrene, dichlorostyrene, trichlorostyrene, Tetrachlorostyrene, pentachlorostyrene, bromostyrene, dibromostyrene, iodine styrene, fluorostyrene, trifluorostyrene, 2-bromo-4-trifluoromethylstyrene, 4-fluoro-3 - Halogenated styrene such as trifluoromethylstyrene.

丙烯酸系樹脂(a-4)中之源自(甲基)丙烯酸之構成單元之量與源自其他單體之構成單元之量於不損害本發明之目的之範圍內無特別限定。丙烯酸系樹脂(a-4)中之源自(甲基)丙烯酸之構成單元之量相對於丙烯酸系樹脂(a-4)之質量,較佳為5質量%以上且50質量%以下,更佳為10質量%以上且30質量%以下。The amount of the constituent unit derived from (meth)acrylic acid in the acrylic resin (a-4) and the amount of the constituent unit derived from the other monomer are not particularly limited as long as the object of the present invention is not impaired. The amount of the constituent unit derived from (meth)acrylic acid in the acrylic resin (a-4) is preferably 5% by mass or more and 50% by mass or less, more preferably the mass of the acrylic resin (a-4). It is 10% by mass or more and 30% by mass or less.

於丙烯酸系樹脂(a-4)具備具有不飽和雙鍵之構成單元之情形時,丙烯酸系樹脂(a-4)中之具有不飽和雙鍵之構成單元之量較佳為1質量%以上且50質量%以下,更佳為1質量%以上且30質量%以下,尤佳為1質量%以上且20質量%以下。
藉由使丙烯酸系樹脂(a-4)含有上述範圍內之量之具有不飽和雙鍵之構成單元,可將丙烯酸系樹脂引入抗蝕膜內之交聯反應而均勻化,故而對硬化膜之耐熱性、機械特性之提高有效。
In the case where the acrylic resin (a-4) has a constituent unit having an unsaturated double bond, the amount of the constituent unit having an unsaturated double bond in the acrylic resin (a-4) is preferably 1% by mass or more. 50% by mass or less, more preferably 1% by mass or more and 30% by mass or less, and particularly preferably 1% by mass or more and 20% by mass or less.
When the acrylic resin (a-4) contains a constituent unit having an unsaturated double bond in an amount within the above range, the crosslinking reaction of the acrylic resin into the resist film can be uniformized, so that the cured film is The improvement of heat resistance and mechanical properties is effective.

丙烯酸系樹脂(a-4)之重量平均分子量較佳為2000以上且50000以下,更佳為3000以上且30000以下。藉由設為上述範圍,存在易於獲得感光性組合物之膜形成能力、曝光後之顯影性之平衡之傾向。The weight average molecular weight of the acrylic resin (a-4) is preferably 2,000 or more and 50,000 or less, more preferably 3,000 or more and 30,000 or less. When it is set to the above range, there is a tendency to easily obtain a balance between the film forming ability of the photosensitive composition and the developability after exposure.

鹼可溶性樹脂(A)之含量相對於感光性組合物之固形物成分整體之質量,較佳為10質量%以上且65質量%以下,更佳為15質量%以上且50質量%以下。藉由設為上述範圍,易於獲得顯影性優異之感光性組合物。The content of the alkali-soluble resin (A) is preferably 10% by mass or more and 65% by mass or less, and more preferably 15% by mass or more and 50% by mass or less based on the total mass of the solid content component of the photosensitive composition. By setting it as the said range, the photosensitive composition excellent in developability is acquired easily.

<光聚合性單體(B)>
作為光聚合性單體(B),可較佳地使用具有乙烯性不飽和雙鍵之化合物。作為該具有乙烯性不飽和雙鍵之化合物之較佳例,有單官能單體與多官能單體。
<Photopolymerizable monomer (B)>
As the photopolymerizable monomer (B), a compound having an ethylenically unsaturated double bond can be preferably used. Preferred examples of the compound having an ethylenically unsaturated double bond include a monofunctional monomer and a polyfunctional monomer.

作為單官能單體,可列舉:(甲基)丙烯醯胺、羥甲基(甲基)丙烯醯胺、甲氧基甲基(甲基)丙烯醯胺、乙氧基甲基(甲基)丙烯醯胺、丙氧基甲基(甲基)丙烯醯胺、丁氧基甲氧基甲基(甲基)丙烯醯胺、N-羥甲基(甲基)丙烯醯胺、N-羥基甲基(甲基)丙烯醯胺、(甲基)丙烯酸、反丁烯二酸、順丁烯二酸、順丁烯二酸酐、伊康酸、伊康酸酐、檸康酸、檸康酸酐、丁烯酸、2-丙烯醯胺-2-甲基丙磺酸、第三丁基丙烯醯胺磺酸、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基丁酯、(甲基)丙烯酸2-苯氧基-2-羥基丙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基-2-羥基丙酯、甘油單(甲基)丙烯酸酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸N,N-二甲胺基乙酯、(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸2,2,2-三氟乙酯、(甲基)丙烯酸2,2,3,3-四氟丙酯、鄰苯二甲酸衍生物之(甲基)丙烯酸半酯等。該等單官能單體可單獨使用或組合兩種以上使用。Examples of the monofunctional monomer include (meth)acrylamide, hydroxymethyl (meth) acrylamide, methoxymethyl (meth) acrylamide, and ethoxymethyl (methyl). Acrylamide, propoxymethyl (meth) acrylamide, butoxymethoxymethyl (meth) acrylamide, N-hydroxymethyl (meth) acrylamide, N-hydroxyl Base (meth) acrylamide, (meth) acrylate, fumaric acid, maleic acid, maleic anhydride, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, butyl Acrylic acid, 2-propenylamine-2-methylpropanesulfonic acid, tert-butyl propylene decyl sulfonic acid, methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate , 2-ethylhexyl (meth)acrylate, cyclohexyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, (meth)acrylic acid 2 -hydroxybutyl ester, 2-phenoxy-2-hydroxypropyl (meth)acrylate, 2-(methyl)propenyloxy-2-hydroxypropyl phthalate, glycerol mono(meth)acrylic acid Ester, tetrahydrofurfuryl (meth)acrylate, N,N-dimethylaminoethyl (meth)acrylate, (methyl) propyl Acid glycidyl ester, 2,2,2-trifluoroethyl (meth)acrylate, 2,2,3,3-tetrafluoropropyl (meth)acrylate, (meth) Acrylic acid half ester and the like. These monofunctional monomers may be used singly or in combination of two or more.

另一方面,作為多官能單體,可列舉:1,3-丁二醇二(甲基)丙烯酸酯、1,4-丁二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、1,9-壬二醇二(甲基)丙烯酸酯、1,10-癸二醇二(甲基)丙烯酸酯、1,12-十二烷二醇二(甲基)丙烯酸酯、乙氧基化己二醇二(甲基)丙烯酸酯、三環癸烷二甲醇二(甲基)丙烯酸酯、(甲基)丙烯酸2-羥基-3-(甲基)丙烯醯氧基丙酯、二季戊四醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、二丙二醇二(甲基)丙烯酸酯、三丙二醇二(甲基)丙烯酸酯、乙氧基化新戊二醇二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、聚(乙二醇-丙二醇)二(甲基)丙烯酸酯、聚四亞甲基二醇二(甲基)丙烯酸酯、乙氧基化雙酚A二(甲基)丙烯酸酯、丙氧基化雙酚A二(甲基)丙烯酸酯、丙氧基化乙氧基化雙酚A二(甲基)丙烯酸酯、乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、甘油二(甲基)丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、2,2-雙(4-(甲基)丙烯醯氧基二乙氧基苯基)丙烷、2,2-雙(4-(甲基)丙烯醯氧基聚乙氧基苯基)丙烷、(甲基)丙烯酸2-羥基-3-(甲基)丙烯醯氧基丙酯、乙二醇二縮水甘油醚二(甲基)丙烯酸酯、二乙二醇二縮水甘油醚二(甲基)丙烯酸酯、鄰苯二甲酸二縮水甘油酯二(甲基)丙烯酸酯、甘油三丙烯酸酯、甘油聚縮水甘油醚聚(甲基)丙烯酸酯、(甲基)丙烯酸胺基甲酸酯(即,甲苯二異氰酸酯、三甲基六亞甲基二異氰酸酯或六亞甲基二異氰酸酯等與(甲基)丙烯酸2-羥基乙酯之反應物)、亞甲基雙(甲基)丙烯醯胺、(甲基)丙烯醯胺亞甲基醚、多元醇與N-羥甲基(甲基)丙烯醯胺之縮合物、三丙烯醯基縮甲醛、2,4,6-三側氧基六氫-1,3,5-三𠯤-1,3,5-三乙醇三丙烯酸酯及2,4,6-三側氧基六氫-1,3,5-三𠯤-1,3,5-三乙醇二丙烯酸酯等。該等多官能單體可單獨使用或組合兩種以上使用。On the other hand, examples of the polyfunctional monomer include 1,3-butanediol di(meth)acrylate, 1,4-butanediol di(meth)acrylate, and 1,6-hexanediol. Di(meth)acrylate, 1,9-nonanediol di(meth)acrylate, 1,10-nonanediol di(meth)acrylate, 1,12-dodecanediol di(a) Acrylate, ethoxylated hexanediol di(meth) acrylate, tricyclodecane dimethanol di(meth) acrylate, 2-hydroxy-3-(methyl) acrylate (meth) acrylate醯-propyl propyl ester, dipentaerythritol di (meth) acrylate, diethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, dipropylene glycol di (meth) acrylate, Tripropylene glycol di(meth)acrylate, ethoxylated neopentyl glycol di(meth)acrylate, polyethylene glycol di(meth)acrylate, poly(ethylene glycol-propylene glycol) di(methyl) Acrylate, polytetramethylene glycol di(meth)acrylate, ethoxylated bisphenol A di(meth)acrylate, propoxylated bisphenol A di(meth)acrylate, C Oxylated ethoxylated bisphenol A di(meth) acrylate, ethylene glycol di(meth) propylene Ester, diethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate, polypropylene glycol di(meth)acrylate, butanediol II Methyl) acrylate, neopentyl glycol di(meth) acrylate, 1,6-hexanediol di(meth) acrylate, trimethylolpropane tri(meth) acrylate, glycerol di(a) Acrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pentaerythritol di(meth) acrylate, pentaerythritol tri(meth) acrylate, pentaerythritol tetra (methyl) ) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 2,2-bis(4-(methyl) propylene oxy diethoxy phenyl) propane, 2 , 2-bis(4-(methyl)propenyloxypolyethoxyphenyl)propane, 2-hydroxy-3-(methyl)propenyloxypropyl (meth)acrylate, ethylene glycol II Glycidyl ether di(meth)acrylate, diethylene glycol diglycidyl ether di(meth)acrylate, diglycidyl phthalate di(methyl) Acrylate, glycerol triacrylate, glycerol polyglycidyl ether poly(meth) acrylate, (meth) acrylate urethane (ie, toluene diisocyanate, trimethyl hexamethylene diisocyanate or six a reaction product such as methylene diisocyanate with 2-hydroxyethyl (meth)acrylate), methylene bis(meth) acrylamide, (meth) acrylamide methyl ether, polyol and N a condensate of hydroxymethyl (meth) acrylamide, tripropylene decyl formal, 2,4,6-trisethoxy hexahydro-1,3,5-tris-1,3,5- Triethanol triacrylate and 2,4,6-trisethoxy hexahydro-1,3,5-tris-1,3,5-triethanol diacrylate. These polyfunctional monomers may be used singly or in combination of two or more.

該等具有乙烯性不飽和雙鍵之化合物之中,就獲得提供強度與對基板之密接性優異之硬化物之感光性組合物之方面而言,較佳為雙官能以上之多官能單體。該等之中,尤佳為三官能以上之多官能單體。例如可較佳使用季戊四醇四(甲基)丙烯酸酯(四官能單體)、二季戊四醇五(甲基)丙烯酸酯(五官能單體)及二季戊四醇六(甲基)丙烯酸酯(六官能單體)。
就玻璃轉移點(Tg)之控制之觀點而言,可併用三官能以上之多官能單體而使用單官能單體或雙官能單體,該等之中,較佳為1,6-己二醇二(甲基)丙烯酸酯。
Among these compounds having an ethylenically unsaturated double bond, a difunctional or higher polyfunctional monomer is preferred in terms of obtaining a photosensitive composition which provides a cured product having excellent strength and adhesion to a substrate. Among these, a trifunctional or higher polyfunctional monomer is particularly preferable. For example, pentaerythritol tetrakis(meth)acrylate (tetrafunctional monomer), dipentaerythritol penta(meth)acrylate (pentafunctional monomer), and dipentaerythritol hexa(meth)acrylate (hexafunctional monomer) can be preferably used. ).
From the viewpoint of controlling the glass transition point (Tg), a monofunctional monomer or a difunctional monomer may be used in combination with a trifunctional or higher polyfunctional monomer, among which 1,6-hexane is preferred. Alcohol di(meth)acrylate.

光聚合性單體(B)之感光性組合物中之含量相對於感光性組合物之固形物成分整體之質量,較佳為1質量%以上且50質量%以下,更佳為5質量%以上且40質量%以下。藉由設為上述範圍,存在易於取得感度、顯影性、解像性之平衡之傾向。The content of the photosensitive composition of the photopolymerizable monomer (B) is preferably 1% by mass or more and 50% by mass or less, and more preferably 5% by mass or more based on the total mass of the solid content component of the photosensitive composition. And 40% by mass or less. By setting it as the said range, it exists in the tendency to acquire the balance of sensitivity, developability, and resolution.

<光聚合起始劑(C)>
感光性組合物含有下述式(c1)所表示之肟酯化合物(C1)作為光聚合起始劑(C)。以下,說明肟酯化合物(C1)。
<Photopolymerization initiator (C)>
The photosensitive composition contains the oxime ester compound (C1) represented by the following formula (c1) as a photopolymerization initiator (C). Hereinafter, the oxime ester compound (C1) will be described.

[肟酯化合物(C1)]
肟酯化合物(C1)係由下述式(c1)表示:
[化18]

(式(c1)中,R1 為1價有機基,R2 為可具有取代基之烴基或可具有取代基之雜環基,R3 為1價有機基,R4 為1價有機基,R5 及R6 分別獨立為可具有取代基之苯環或可具有取代基之萘環,m1、m2及m3分別為0或1),
且滿足下述(1)~(3)中之至少一個條件的化合物:
(1)R1 含有-OR7 所表示之基,R7 為鹵烷基。
(2)m2為1,R4 含有-OR7 所表示之基,R7 為鹵烷基。
(3)R3 為可具有取代基之支鏈狀烷基。
[肟 ester compound (C1)]
The oxime ester compound (C1) is represented by the following formula (c1):
[化18]

(In the formula (c1), R 1 is a monovalent organic group, R 2 is a hydrocarbon group which may have a substituent or a heterocyclic group which may have a substituent, R 3 is a monovalent organic group, and R 4 is a monovalent organic group. R 5 and R 6 are each independently a benzene ring which may have a substituent or a naphthalene ring which may have a substituent, and m1, m2 and m3 are each 0 or 1),
And a compound satisfying at least one of the following (1) to (3):
(1) R 1 contains a group represented by -OR 7 and R 7 is a haloalkyl group.
(2) m2 is 1, R 4 contains a group represented by -OR 7 , and R 7 is a haloalkyl group.
(3) R 3 is a branched alkyl group which may have a substituent.

式(c1)中,R5 及R6 為可具有取代基之苯環或可具有取代基之萘環。
式(c1)中所示之含有R3 所鍵結之氮原子之環與苯環或萘環藉由共有苯環或萘環中之任意碳-碳鍵而縮合。
故而,式(c1)中之含有R3 所鍵結之氮原子之環係以氮原子、源自R5 之2個碳原子及源自R6 之2個碳原子為環構成原子之5員環。
即,式(c1)所表示之化合物包含R5 及R6 與上述5員環,具有3環式至5環式之縮合環作為中心骨架。
In the formula (c1), R 5 and R 6 are a benzene ring which may have a substituent or a naphthalene ring which may have a substituent.
The ring containing the nitrogen atom to which R 3 is bonded as shown in the formula (c1) is condensed with a benzene ring or a naphthalene ring by a carbon-carbon bond in a common benzene ring or a naphthalene ring.
Therefore, the ring containing the nitrogen atom to which R 3 is bonded in the formula (c1) is a member of a ring of nitrogen atoms, two carbon atoms derived from R 5 and two carbon atoms derived from R 6 . ring.
That is, the compound represented by the formula (c1) contains R 5 and R 6 and the above 5-membered ring, and has a 3-ring to 5-ring condensed ring as a central skeleton.

於R5 及/或R6 為萘環之情形時,含有R3 所鍵結之氮原子之上述5員環與萘環之縮合形態並無特別限定。
於R5 及R6 之至少一者為萘環之情形時,包含R5 及R6 與含有R3 所鍵結之氮原子之上述5員環之縮合環可為以下任一者。
[化19]
In the case where R 5 and/or R 6 is a naphthalene ring, the condensation form of the above 5-membered ring and the naphthalene ring containing a nitrogen atom bonded to R 3 is not particularly limited.
In the case where at least one of R 5 and R 6 is a naphthalene ring, the condensed ring containing the above 5-membered ring containing R 5 and R 6 and a nitrogen atom bonded to R 3 may be any of the following.
[Chemistry 19]

於作為R5 及R6 之苯環或萘環具有取代基之情形時,該取代基之種類及個數於不損害本發明之目的之範圍內無特別限定。
作為取代基之較佳例,可列舉:碳原子數1以上且6以下之烷基、碳原子數1以上且6以下之烷氧基、碳原子數2以上且7以下之飽和脂肪族醯基、碳原子數2以上且7以下之烷氧基羰基、碳原子數2以上且7以下之飽和脂肪族醯氧基、具有碳原子數1以上且6以下之烷基之單烷基胺基、具有碳原子數1以上且6以下之烷基之二烷基胺基、𠰌啉-1-基、哌𠯤-1-基、鹵素原子及氰基等。
於作為R5 及R6 之苯環或萘環具有取代基之情形時,該取代基之個數於不損害本發明之目的之範圍內無限定,較佳為1以上且4以下。於取代基為複數個之情形時,複數個取代基可相同,亦可不同。
In the case where the benzene ring or the naphthalene ring of R 5 and R 6 has a substituent, the kind and the number of the substituent are not particularly limited as long as the object of the present invention is not impaired.
Preferable examples of the substituent include an alkyl group having 1 or more and 6 or less carbon atoms, an alkoxy group having 1 or more and 6 or less carbon atoms, and a saturated aliphatic fluorenyl group having 2 or more and 7 or less carbon atoms. And an alkoxycarbonyl group having 2 or more and 7 or less carbon atoms, a saturated aliphatic decyloxy group having 2 or more and 7 or less carbon atoms, a monoalkylamino group having an alkyl group having 1 or more and 6 or less carbon atoms, A dialkylamino group, a porphyrin-1-yl group, a piperidin-1-yl group, a halogen atom, a cyano group or the like having an alkyl group having 1 or more and 6 or less carbon atoms.
In the case where the benzene ring or the naphthalene ring of R 5 and R 6 has a substituent, the number of the substituent is not limited insofar as it does not impair the object of the present invention, and is preferably 1 or more and 4 or less. In the case where the substituent is plural, the plurality of substituents may be the same or different.

於R5 具有取代基之情形時,R5 所具有之取代基可與R1 或R3 鍵結而形成環。
又,於R6 具有取代基之情形時,R6 所具有之取代基可與R3 鍵結而形成環。
When R 5 in the case of having a substituent of the group, R 5 substituents may be possessed by the R 1 or R 3 bonded to form a ring.
Further, in the case where R 6 has a substituent of the group, R 6 has a substituent of R 3 may be bonded to form a ring.

R5 所具有之取代基與R1 鍵結而形成之環可為烴環,亦可為雜環。該雜環中所含之雜原子並無特別限定。作為較佳之雜原子,可列舉N、O、S等。
R5 及/或R6 所具有之取代基與R3 鍵結而形成之環除與R3 鍵結之氮原子以外,亦可含有其他雜原子。該雜環中所含之雜原子並無特別限定。作為較佳之雜原子,可列舉N、O、S等。
The ring formed by the substituent of R 5 and R 1 may be a hydrocarbon ring or a hetero ring. The hetero atom contained in the hetero ring is not particularly limited. Preferred examples of the hetero atom include N, O, and S.
R 5 and / or R 6 has the substituents R 3 bonded to form a ring other than the nitrogen atom bonded to the R 3, may also contain other hetero atoms. The hetero atom contained in the hetero ring is not particularly limited. Preferred examples of the hetero atom include N, O, and S.

於R5 所具有之取代基或R6 所具有之取代基與R3 鍵結而形成環之情形時,作為式(c1)所表示之化合物,較佳為下述式(c1-1-a)~(c1-1-h)所表示之化合物:
[化20]

(式(c1-1-a)~(c1-1-h)中,R1 、R2 、R4 、m1、m2及m3與式(c1)相同,R8 為烷基)。
When the substituent of R 5 or the substituent of R 6 is bonded to R 3 to form a ring, the compound represented by formula (c1) is preferably the following formula (c1-1-a). ) to (c1-1-h) the compound represented:
[Chemistry 20]

(In the formulae (c1-1-a) to (c1-1-h), R 1 , R 2 , R 4 , m1, m2 and m3 are the same as those of the formula (c1), and R 8 is an alkyl group).

作為R8 之烷基可為直鏈狀,亦可為支鏈狀。作為R7 之烷基之碳原子數並無特別限定,較佳為1以上且20以下,更佳為1以上且10以下。The alkyl group as R 8 may be linear or branched. The number of carbon atoms of the alkyl group of R 7 is not particularly limited, but is preferably 1 or more and 20 or less, more preferably 1 or more and 10 or less.

於R5 所具有之取代基與R1 鍵結而形成環之情形時,於式(c1)中,m1較佳為0。於該情形時,式(c1)所表示之化合物較佳為下述式(c1-1-i)~(c1-1-l)所表示之化合物:
[化21]

(式(c1-1-i)~(c1-1-l)中,R2 、R3 、R4 、m2及m3與式(c1)相同,R8 為碳原子數1以上且20以下之烷基)。
作為R8 之烷基可為直鏈狀,亦可為支鏈狀。
In the case where the substituent of R 5 is bonded to R 1 to form a ring, in the formula (c1), m1 is preferably 0. In this case, the compound represented by the formula (c1) is preferably a compound represented by the following formulas (c1-1-i) to (c1-1-1):
[Chem. 21]

(In the formulae (c1-1-i) to (c1-1-1), R 2 , R 3 , R 4 , m2 and m3 are the same as the formula (c1), and R 8 is a carbon number of 1 or more and 20 or less. alkyl).
The alkyl group as R 8 may be linear or branched.

考慮以上說明之R5 及R6 之較佳組合,作為式(c1)所表示之化合物,較佳為下述式(c1-I)~(c1-IV)所表示之化合物:
[化22]

(式(c1-I)~(c1-IV)中,R1 、R2 、R3 、R4 、m1、m2及m3與式(c1)相同),
更佳為式(c1-II)或式(c1-III)所表示之化合物,尤佳為式(c1-III)所表示之化合物。
In view of the preferred combination of R 5 and R 6 described above, the compound represented by the formula (c1) is preferably a compound represented by the following formulas (c1 - I) to (c1 - IV):
[化22]

(In the formulae (c1-I) to (c1-IV), R 1 , R 2 , R 3 , R 4 , m1, m2 and m3 are the same as in the formula (c1)),
More preferably, it is a compound represented by the formula (c1-II) or the formula (c1-III), and particularly preferably a compound represented by the formula (c1-III).

作為上述式(c1-I)~(c1-IV)所表示之化合物,較佳為下述式(c1-I-a)~(c1-IV-a)所表示之化合物,更佳為式(c1-II-a)或式(c1-III-a)所表示之化合物,尤佳為式(c1-III-a)所表示之化合物。
[化23]
The compound represented by the above formulas (c1 - I) to (c1 - IV) is preferably a compound represented by the following formulas (c1 - Ia) to (c1 - IV - a), more preferably a formula (c1). The compound represented by II-a) or formula (c1-III-a) is particularly preferably a compound represented by formula (c1-III-a).
[化23]

作為上述式(c1-I-a)~(c1-IV-a)所表示之化合物,較佳為下述式(c1-I-b)~(c1-IV-b)所表示之化合物,更佳為式(c1-II-b)或式(c1-III-b)所表示之化合物,尤佳為式(c1-III-b)所表示之化合物。
[化24]
The compound represented by the above formulas (c1 - Ia) to (c1 - IV - a) is preferably a compound represented by the following formulas (c1 - Ib) to (c1 - IV - b), more preferably a formula ( The compound represented by the formula (c1-II-b) or the formula (c1-III-b) is particularly preferably a compound represented by the formula (c1-III-b).
[Chem. 24]

至於作為R1 所較佳之1價有機基之例,可列舉:烷基、烷氧基、環烷基、環烷氧基、飽和脂肪族醯基、烷氧基羰基、飽和脂肪族醯氧基、可具有取代基之苯基、可具有取代基之苯氧基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之苯甲醯氧基、可具有取代基之苯基烷基、可具有取代基之萘基、可具有取代基之萘氧基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之萘甲醯氧基、可具有取代基之萘基烷基、可具有取代基之雜環基、可具有取代基之雜環基羰基、經1個或2個有機基取代之胺基、𠰌啉-1-基及哌𠯤-1-基等。As an example of the preferred monovalent organic group as R 1 , an alkyl group, an alkoxy group, a cycloalkyl group, a cycloalkoxy group, a saturated aliphatic fluorenyl group, an alkoxycarbonyl group, a saturated aliphatic fluorenyloxy group may be mentioned. a phenyl group which may have a substituent, a phenoxy group which may have a substituent, a benzyl group which may have a substituent, a phenoxycarbonyl group which may have a substituent, a benzyl methoxy group which may have a substituent, a phenylalkyl group having a substituent, a naphthyl group which may have a substituent, a naphthyloxy group which may have a substituent, a naphthylmethyl group which may have a substituent, a naphthyloxycarbonyl group which may have a substituent, may have a substituent Naphthylmethoxycarbonyl, naphthylalkyl group which may have a substituent, heterocyclic group which may have a substituent, heterocyclic carbonyl group which may have a substituent, amine group substituted by one or two organic groups, hydrazine Andolin-1-yl and piperidin-1-yl and the like.

於R1 為烷基之情形時,烷基之碳原子數較佳為1以上且20以下,更佳為1以上且6以下。又,於R1 為烷基之情形時,可為直鏈,亦可為支鏈。作為R1 為烷基之情形時之具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、異戊基、第二戊基、第三戊基、正己基、正庚基、正辛基、異辛基、第二辛基、第三辛基、正壬基、異壬基、正癸基及異癸基等。又,於R1 為烷基之情形時,烷基可於碳鏈中含有醚鍵(-O-)。作為於碳鏈中具有醚鍵之烷基之例,可列舉:甲氧基乙基、乙氧基乙基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙氧基乙氧基乙基及甲氧基丙基等。When R 1 is an alkyl group, the number of carbon atoms of the alkyl group is preferably 1 or more and 20 or less, more preferably 1 or more and 6 or less. Further, in the case where R 1 is an alkyl group, it may be a straight chain or a branched chain. Specific examples of the case where R 1 is an alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, second butyl group, tert-butyl group, and n-pentyl group. Base, isopentyl, second pentyl, third amyl, n-hexyl, n-heptyl, n-octyl, isooctyl, second octyl, third octyl, n-decyl, isodecyl, positive Sulfhydryl and isomeric groups. Further, in the case where R 1 is an alkyl group, the alkyl group may have an ether bond (-O-) in the carbon chain. Examples of the alkyl group having an ether bond in the carbon chain include a methoxyethyl group, an ethoxyethyl group, a methoxyethoxyethyl group, an ethoxyethoxyethyl group, and a propoxy group. Ethoxyethyl and methoxypropyl and the like.

於R1 為烷氧基之情形時,烷氧基之碳原子數較佳為1以上且20以下,更佳為1以上且6以下。又,於R1 為烷氧基之情形時,可為直鏈,亦可為支鏈。作為R1 為烷氧基之情形時之具體例,可列舉:甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、第二丁氧基、第三丁氧基、正戊氧基、異戊氧基、第二戊氧基、第三戊氧基、正己氧基、正庚氧基、正辛氧基、異辛氧基、第二辛氧基、第三辛氧基、正壬氧基、異壬氧基、正癸氧基及異癸氧基等。又,於R1 為烷氧基之情形時,烷氧基可於碳鏈中含有醚鍵(-O-)。作為於碳鏈中具有醚鍵之烷氧基之例,可列舉:甲氧基乙氧基、乙氧基乙氧基、甲氧基乙氧基乙氧基、乙氧基乙氧基乙氧基、丙氧基乙氧基乙氧基及甲氧基丙氧基等。When R 1 is an alkoxy group, the number of carbon atoms of the alkoxy group is preferably 1 or more and 20 or less, more preferably 1 or more and 6 or less. Further, in the case where R 1 is an alkoxy group, it may be a straight chain or a branched chain. Specific examples of the case where R 1 is an alkoxy group include a methoxy group, an ethoxy group, a n-propoxy group, an isopropoxy group, a n-butoxy group, an isobutoxy group, and a second butoxy group. , third butoxy, n-pentyloxy, isopentyloxy, second pentyloxy, third pentyloxy, n-hexyloxy, n-heptyloxy, n-octyloxy, isooctyloxy, second Octyloxy, trioctyloxy, n-decyloxy, isodecyloxy, n-decyloxy and isodecyloxy. Further, in the case where R 1 is an alkoxy group, the alkoxy group may have an ether bond (-O-) in the carbon chain. Examples of the alkoxy group having an ether bond in the carbon chain include a methoxyethoxy group, an ethoxyethoxy group, a methoxyethoxyethoxy group, and an ethoxyethoxyethoxy group. Base, propoxyethoxyethoxy and methoxypropoxy groups, and the like.

於R1 為環烷基或環烷氧基之情形時,環烷基或環烷氧基之碳原子數較佳為3以上且10以下,更佳為3以上且6以下。作為R1 為環烷基之情形時之具體例,可列舉:環丙基、環丁基、環戊基、環己基、環庚基及環辛基等。作為R1 為環烷氧基之情形時之具體例,可列舉:環丙氧基、環丁氧基、環戊氧基、環己氧基、環庚氧基及環辛氧基等。When R 1 is a cycloalkyl group or a cycloalkoxy group, the number of carbon atoms of the cycloalkyl group or the cycloalkoxy group is preferably 3 or more and 10 or less, more preferably 3 or more and 6 or less. Specific examples of the case where R 1 is a cycloalkyl group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Specific examples of the case where R 1 is a cycloalkoxy group include a cyclopropoxy group, a cyclobutoxy group, a cyclopentyloxy group, a cyclohexyloxy group, a cycloheptyloxy group, and a cyclooctyloxy group.

於R1 為飽和脂肪族醯基或飽和脂肪族醯氧基之情形時,飽和脂肪族醯基或飽和脂肪族醯氧基之碳原子數較佳為2以上且21以下,更佳為2以上且7以下。作為R1 為飽和脂肪族醯基之情形時之具體例,可列舉:乙醯基、丙醯基、正丁醯基、2-甲基丙醯基、正戊醯基、2,2-二甲基丙醯基、正己醯基、正庚醯基、正辛醯基、正壬醯基、正癸醯基、正十一碳醯基、正十二碳醯基、正十三碳醯基、正十四碳醯基、正十五碳醯基及正十六碳醯基等。作為R1 為飽和脂肪族醯氧基之情形時之具體例,可列舉:乙醯氧基、丙醯氧基、正丁醯氧基、2-甲基丙醯氧基、正戊醯氧基、2,2-二甲基丙醯氧基、正己醯氧基、正庚醯氧基、正辛醯氧基、正壬醯氧基、正癸醯氧基、正十一碳醯氧基、正十二碳醯氧基、正十三碳醯氧基、正十四碳醯氧基、正十五碳醯氧基及正十六碳醯氧基等。When R 1 is a saturated aliphatic fluorenyl group or a saturated aliphatic fluorenyloxy group, the number of carbon atoms of the saturated aliphatic fluorenyl group or the saturated aliphatic fluorenyloxy group is preferably 2 or more and 21 or less, more preferably 2 or more. And 7 or less. Specific examples of the case where R 1 is a saturated aliphatic fluorenyl group include an ethyl fluorenyl group, a propyl fluorenyl group, a n-butyl fluorenyl group, a 2-methyl propyl fluorenyl group, a n-pentamethylene group, and a 2,2-dimethyl group. Propyl group, n-hexyl group, n-heptyl group, n-octyl group, n-decyl group, n-decyl group, n-decyl fluorenyl group, n-dodecyl fluorenyl group, n-tridecyl fluorenyl group, positive fourteen Carbon sulfhydryl, n-pentadecacarbonyl and n-hexadecanthyl. Specific examples of the case where R 1 is a saturated aliphatic fluorenyloxy group include an ethoxycarbonyl group, a propenyloxy group, a n-butenyloxy group, a 2-methylpropoxy group, and a n-pentyloxy group. , 2,2-dimethylpropoxy, n-hexyloxy, n-heptyloxy, n-octyloxy, n-decyloxy, n-decyloxy, n-undecyloxy, N-dodecyloxy, n-tridecyloxy, n-tetradecyloxy, n-pentadecyloxy and n-hexadecyloxy.

於R1 為烷氧基羰基之情形時,烷氧基羰基之碳原子數較佳為2以上且20以下,更佳為2以上且7以下。作為R1 為烷氧基羰基之情形時之具體例,可列舉:甲氧基羰基、乙氧基羰基、正丙氧基羰基、異丙氧基羰基、正丁氧基羰基、異丁氧基羰基、第二丁氧基羰基、第三丁氧基羰基、正戊氧基羰基、異戊氧基羰基、第二戊氧基羰基、第三戊氧基羰基、正己氧基羰基、正庚氧基羰基、正辛氧基羰基、異辛氧基羰基、第二辛氧基羰基、第三辛氧基羰基、正壬氧基羰基、異壬氧基羰基、正癸氧基羰基及異癸氧基羰基等。When R 1 is an alkoxycarbonyl group, the number of carbon atoms of the alkoxycarbonyl group is preferably 2 or more and 20 or less, more preferably 2 or more and 7 or less. Specific examples of the case where R 1 is an alkoxycarbonyl group include a methoxycarbonyl group, an ethoxycarbonyl group, a n-propoxycarbonyl group, an isopropoxycarbonyl group, a n-butoxycarbonyl group, and an isobutoxy group. Carbonyl, second butoxycarbonyl, tert-butoxycarbonyl, n-pentyloxycarbonyl, isopentyloxycarbonyl, second pentyloxycarbonyl, third pentyloxycarbonyl, n-hexyloxycarbonyl, n-heptyloxy Carbocarbonyl, n-octyloxycarbonyl, isooctyloxycarbonyl, second octyloxycarbonyl, third octyloxycarbonyl, n-decyloxycarbonyl, isodecyloxycarbonyl, n-decyloxycarbonyl and isodecyloxy Alkylcarbonyl and the like.

於R1 為苯基烷基之情形時,苯基烷基之碳原子數較佳為7以上且20以下,更佳為7以上且10以下。又,於R1 為萘基烷基之情形時,萘基烷基之碳原子數較佳為11以上且20以下,更佳為11以上且14以下。作為R1 為苯基烷基之情形時之具體例,可列舉:苄基、2-苯基乙基、3-苯基丙基及4-苯基丁基。作為R1 為萘基烷基之情形時之具體例,可列舉:α-萘基甲基、β-萘基甲基、2-(α-萘基)乙基及2-(β-萘基)乙基。於R1 為苯基烷基或萘基烷基之情形時,R1 可於苯基或萘基上進而具有取代基。When R 1 is a phenylalkyl group, the number of carbon atoms of the phenylalkyl group is preferably 7 or more and 20 or less, more preferably 7 or more and 10 or less. Further, when R 1 is a naphthylalkyl group, the number of carbon atoms of the naphthylalkyl group is preferably 11 or more and 20 or less, more preferably 11 or more and 14 or less. Specific examples of the case where R 1 is a phenylalkyl group include a benzyl group, a 2-phenylethyl group, a 3-phenylpropyl group, and a 4-phenylbutyl group. Specific examples of the case where R 1 is a naphthylalkyl group include α-naphthylmethyl group, β-naphthylmethyl group, 2-(α-naphthyl)ethyl group, and 2-(β-naphthyl group). ) Ethyl. In the case where R 1 is a phenylalkyl group or a naphthylalkyl group, R 1 may further have a substituent on the phenyl group or a naphthyl group.

於R1 為雜環基之情形時,雜環基為含有1個以上之N、S或O之5員或6員之單環,或者為該單環彼此或該單環與苯環縮合而成之雜環基。於雜環基為縮合環之情形時,環數至多為3。雜環基可為芳香族基(雜芳基),亦可為非芳香族基。作為構成該雜環基之雜環,可列舉:呋喃、噻吩、吡咯、㗁唑、異㗁唑、噻唑、噻二唑、異噻唑、咪唑、吡唑、三唑、吡啶、吡𠯤、嘧啶、嗒𠯤、苯并呋喃、苯并噻吩、吲哚、異吲哚、吲、苯并咪唑、苯并三唑、苯并㗁唑、苯并噻唑、咔唑、嘌呤、喹啉、異喹啉、喹唑啉、酞𠯤、㖕啉及喹㗁啉等。於R1 為雜環基之情形時,雜環基可進而具有取代基。In the case where R 1 is a heterocyclic group, the heterocyclic group is a monocyclic ring containing 5 or more members of N, S or O, or the monocyclic ring or the monocyclic ring is condensed with the benzene ring. A heterocyclic group. In the case where the heterocyclic group is a condensed ring, the number of rings is at most 3. The heterocyclic group may be an aromatic group (heteroaryl group) or a non-aromatic group. Examples of the heterocyclic ring constituting the heterocyclic group include furan, thiophene, pyrrole, oxazole, isoxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyridinium, pyrimidine, and the like. Bismuth, benzofuran, benzothiophene, anthracene, isoindole, anthracene , benzimidazole, benzotriazole, benzoxazole, benzothiazole, carbazole, anthracene, quinoline, isoquinoline, quinazoline, anthracene, porphyrin and quinoxaline. In the case where R 1 is a heterocyclic group, the heterocyclic group may further have a substituent.

於R1 為雜環基羰基之情形時,雜環基羰基中所含之雜環基與R1 為雜環基之情形相同。In the case where R 1 is a heterocyclic carbonyl group, the heterocyclic group contained in the heterocyclic carbonyl group is the same as the case where R 1 is a heterocyclic group.

於R1 為經1個或2個有機基取代之胺基之情形時,有機基之較佳例可列舉:碳原子數1以上且20以下之烷基、碳原子數3以上且10以下之環烷基、碳原子數2以上且21以下之飽和脂肪族醯基、可具有取代基之苯基、可具有取代基之苯甲醯基、可具有取代基之碳原子數7以上且20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘甲醯基、可具有取代基之碳原子數11以上且20以下之萘基烷基、及雜環基等。該等較佳之有機基之具體例與R1 相同。作為經1個或2個有機基取代之胺基之具體例,可列舉:甲基胺基、乙基胺基、二乙基胺基、正丙基胺基、二正丙基胺基、異丙基胺基、正丁基胺基、二正丁基胺基、正戊基胺基、正己基胺基、正庚基胺基、正辛基胺基、正壬基胺基、正癸基胺基、苯基胺基、萘基胺基、乙醯基胺基、丙醯基胺基、正丁醯基胺基、正戊醯基胺基、正己醯基胺基、正庚醯基胺基、正辛醯基胺基、正癸醯基胺基、苯甲醯基胺基、α-萘甲醯基胺基及β-萘甲醯基胺基等。In the case where R 1 is an amine group substituted with one or two organic groups, examples of the organic group include an alkyl group having 1 or more and 20 or less carbon atoms, and a carbon number of 3 or more and 10 or less. a cycloalkyl group, a saturated aliphatic fluorenyl group having 2 or more and 21 or less carbon atoms, a phenyl group which may have a substituent, a benzamyl group which may have a substituent, and a carbon atom having a substituent of 7 or more and 20 or less A phenylalkyl group, a naphthyl group which may have a substituent, a naphthylmethyl group which may have a substituent, a naphthylalkyl group having 11 or more and 20 or less carbon atoms which may have a substituent, and a heterocyclic group. Specific examples of such preferred organic groups are the same as those of R 1 . Specific examples of the amine group substituted with one or two organic groups include a methylamino group, an ethylamino group, a diethylamino group, a n-propylamino group, a di-n-propylamino group, and a different one. Propylamino, n-butylamino, di-n-butylamino, n-pentylamino, n-hexylamino, n-heptylamino, n-octylamino, n-decylamine, n-decyl Amino, phenylamino, naphthylamino, etidylamino, propylamino, n-butyl decyl, n-pentylamino, n-hexylamino, n-heptylamino, A n-octylamino group, a n-decylamino group, a benzhydrylamino group, an α-naphthylmethylamino group, and a β-naphthylmethylamino group.

作為R1 中所含之苯基、萘基及雜環基進而具有取代基之情形時之取代基,可列舉:碳原子數1以上且6以下之烷基、碳原子數1以上且6以下之烷氧基、碳原子數2以上且7以下之飽和脂肪族醯基、碳原子數2以上且7以下之烷氧基羰基、碳原子數2以上且7以下之飽和脂肪族醯氧基、具有碳原子數1以上且6以下之烷基之單烷基胺基、具有碳原子數1以上且6以下之烷基之二烷基胺基、𠰌啉-1-基、哌𠯤-1-基、鹵素、硝基及氰基等。於R1 中所含之苯基、萘基及雜環基進而具有取代基之情形時,該取代基之個數於不損害本發明之目的之範圍內無限定,較佳為1以上且4以下。於R1 中所含之苯基、萘基及雜環基具有複數個取代基之情形時,複數個取代基可相同,亦可不同。Examples of the substituent in the case where the phenyl group, the naphthyl group, and the heterocyclic group contained in R 1 have a substituent include an alkyl group having 1 or more and 6 or less carbon atoms, and a carbon number of 1 or more and 6 or less. Alkoxy group, a saturated aliphatic fluorenyl group having 2 or more and 7 or less carbon atoms, an alkoxycarbonyl group having 2 or more and 7 or less carbon atoms, a saturated aliphatic decyloxy group having 2 or more and 7 or less carbon atoms, a monoalkylamino group having an alkyl group having 1 or more and 6 or less carbon atoms, a dialkylamino group having an alkyl group having 1 or more and 6 or less, porphyrin-1-yl, and piperidin-1- Base, halogen, nitro and cyano groups. In the case where the phenyl group, the naphthyl group and the heterocyclic group contained in R 1 further have a substituent, the number of the substituent is not limited insofar as it does not impair the object of the present invention, and is preferably 1 or more and 4 the following. When the phenyl group, the naphthyl group and the heterocyclic group contained in R 1 have a plurality of substituents, the plurality of substituents may be the same or different.

又,作為R1 ,亦較佳為環烷基烷基、可於芳香環上具有取代基之苯氧基烷基、可於芳香環上具有取代基之苯硫基烷基。苯氧基烷基及苯硫基烷基可具有之取代基與R1 中所含之苯基可具有之取代基相同。Further, R 1 is preferably a cycloalkylalkyl group, a phenoxyalkyl group which may have a substituent on the aromatic ring, or a phenylthioalkyl group which may have a substituent on the aromatic ring. The phenoxyalkyl group and the phenylthioalkyl group may have the same substituent as the substituent which the phenyl group contained in R 1 may have.

1價有機基之中,作為R1 ,較佳為烷基、環烷基、可具有取代基之苯基、或環烷基烷基、可於芳香環上具有取代基之苯硫基烷基。作為烷基,較佳為碳原子數1以上且20以下之烷基,更佳為碳原子數1以上且8以下之烷基,尤佳為碳原子數1以上且4以下之烷基,最佳為甲基。可具有取代基之苯基之中,較佳為甲基苯基,更佳為2-甲基苯基。環烷基烷基中所含之環烷基之碳原子數較佳為5以上且10以下,更佳為5以上且8以下,尤佳為5或6。環烷基烷基中所含之伸烷基之碳原子數較佳為1以上且8以下,更佳為1以上且4以下,尤佳為2。環烷基烷基之中,較佳為環戊基乙基。可於芳香環上具有取代基之苯硫基烷基中所含之伸烷基之碳原子數較佳為1以上且8以下,更佳為1以上且4以下,尤佳為2。可於芳香環上具有取代基之苯硫基烷基之中,較佳為2-(4-氯苯硫基)乙基。Among the monovalent organic groups, R 1 is preferably an alkyl group, a cycloalkyl group, a phenyl group which may have a substituent, or a cycloalkylalkyl group, and a phenylthioalkyl group which may have a substituent on the aromatic ring. . The alkyl group is preferably an alkyl group having 1 or more and 20 or less carbon atoms, more preferably an alkyl group having 1 or more and 8 or less carbon atoms, and still more preferably an alkyl group having 1 or more and 4 or less carbon atoms. Good for methyl. Among the phenyl groups which may have a substituent, a methylphenyl group is preferred, and a 2-methylphenyl group is more preferred. The number of carbon atoms of the cycloalkyl group contained in the cycloalkylalkyl group is preferably 5 or more and 10 or less, more preferably 5 or more and 8 or less, and still more preferably 5 or 6. The number of carbon atoms of the alkylene group contained in the cycloalkylalkyl group is preferably 1 or more and 8 or less, more preferably 1 or more and 4 or less, and particularly preferably 2. Among the cycloalkylalkyl groups, a cyclopentylethyl group is preferred. The number of carbon atoms of the alkylene group contained in the phenylthioalkyl group having a substituent on the aromatic ring is preferably 1 or more and 8 or less, more preferably 1 or more and 4 or less, and still more preferably 2 or less. Among the phenylthioalkyl groups having a substituent on the aromatic ring, 2-(4-chlorophenylthio)ethyl group is preferred.

如上所述,式(c1)所表示之化合物必須滿足下述(1)~(3)中之至少一個條件:
(1)R1 含有-OR7 所表示之基,R7 為鹵烷基。
(2)m2為1,R4 含有-OR7 所表示之基,R7 為鹵烷基。
(3)R3 為可具有取代基之支鏈狀烷基。
故而,R1 較佳為經-OR7 所表示之取代基取代。R7 為鹵烷基。於R1 經-OR7 所表示之基取代之情形時,R1 中所含之-OR7 所表示之基之個數並無特別限定。於R1 經-OR7 所表示之基取代之情形時,R1 中所含之-OR7 所表示之基之個數較佳為1或2,更佳為1。
又,式(c1)所表示之化合物所具有之-OR7 所表示之基之個數亦較佳為1或2,更佳為1。
As described above, the compound represented by the formula (c1) must satisfy at least one of the following conditions (1) to (3):
(1) R 1 contains a group represented by -OR 7 and R 7 is a haloalkyl group.
(2) m2 is 1, R 4 contains a group represented by -OR 7 , and R 7 is a haloalkyl group.
(3) R 3 is a branched alkyl group which may have a substituent.
Therefore, R 1 is preferably substituted with a substituent represented by -OR 7 . R 7 is a haloalkyl group. The substituents on the group R & lt -OR 1 through 7 represent the case of, R 1 -OR number contained in the group represented by the sum 7 is not particularly limited. By -OR 1 when R & lt on the substituent of the group represented by the case 7, R 1 -OR number contained in the group represented by the seven of preferably 1 or 2, more preferably 1.
Further, the number of the groups represented by -OR 7 of the compound represented by the formula (c1) is also preferably 1 or 2, more preferably 1.

作為鹵烷基中所含之鹵素原子,可列舉:氟原子、氯原子、溴原子及碘原子。鹵烷基可含有一種鹵素原子,亦可組合含有兩種以上之鹵素原子。
鹵烷基所具有之鹵素原子之個數於不損害本發明之目的之範圍內無特別限定。鹵烷基所具有之鹵素原子之個數較佳為1以上,更佳為2以上,尤佳為3以上。作為鹵烷基所具有之鹵素原子之個數之上限,就式(c1)所表示之化合物與感光性組合物中之其他成分之相溶性良好之方面而言,較佳為7以下,更佳為6以下,尤佳為5以下。
又,式(c1)所表示之化合物中所含之鹵素原子之個數亦較佳為1以上,更佳為2以上,尤佳為3以上,較佳為7以下,更佳為6以下,尤佳為5以下。
Examples of the halogen atom contained in the haloalkyl group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. The haloalkyl group may contain one halogen atom or may contain two or more kinds of halogen atoms in combination.
The number of the halogen atoms which the haloalkyl group has is not particularly limited insofar as it does not impair the object of the present invention. The number of halogen atoms which the haloalkyl group has is preferably 1 or more, more preferably 2 or more, and still more preferably 3 or more. The upper limit of the number of halogen atoms in the haloalkyl group is preferably 7 or less, and more preferably 7 or less, in terms of compatibility between the compound represented by the formula (c1) and other components in the photosensitive composition. It is 6 or less, and particularly preferably 5 or less.
Further, the number of halogen atoms contained in the compound represented by the formula (c1) is preferably 1 or more, more preferably 2 or more, still more preferably 3 or more, more preferably 7 or less, still more preferably 6 or less. It is especially good for 5 or less.

鹵烷基之碳原子數於不損害本發明之目的之範圍內無特別限定。鹵烷基之碳原子數較佳為1以上,更佳為2以上,尤佳為3以上。鹵烷基之碳原子數之上限較佳為10以下,更佳為7以下,尤佳為5以下。
作為鹵烷基,較佳為氟化烷基。作為鹵烷基之較佳具體例,可列舉:2,2,3,3-四氟丙基、2,2,2-三氟乙基、3,3,3-三氟丙基、2,2,3,3,3-五氟丙基及2,2,3,3,4,4,5,5-八氟戊基等。該等之中,就式(c1)所表示之化合物之製造較容易等方面而言,較佳為2,2,3,3-四氟丙基。
The number of carbon atoms of the haloalkyl group is not particularly limited insofar as it does not impair the object of the present invention. The number of carbon atoms of the haloalkyl group is preferably 1 or more, more preferably 2 or more, and still more preferably 3 or more. The upper limit of the number of carbon atoms of the haloalkyl group is preferably 10 or less, more preferably 7 or less, and still more preferably 5 or less.
As the haloalkyl group, a fluorinated alkyl group is preferred. Preferred examples of the haloalkyl group include 2,2,3,3-tetrafluoropropyl, 2,2,2-trifluoroethyl, 3,3,3-trifluoropropyl, 2, 2,3,3,3-pentafluoropropyl and 2,2,3,3,4,4,5,5-octafluoropentyl and the like. Among these, the compound represented by the formula (c1) is preferably easily produced, and is preferably 2,2,3,3-tetrafluoropropyl.

至於作為R1 之經鹵烷基取代之基,較佳為經1個或2個鹵烷基取代之苯基。具體而言,作為R1 之經鹵烷基取代之基較佳為下述式(c1-01)所表示之基:
[化25]

(式(c1-01)中,R7 如上所述,R9 為作為R1 之苯基可具有之取代基,m4為1或2,m4+m5為1以上且5以下之整數)。
作為R9 ,較佳為碳原子數1以上且6以下之烷基、及碳原子數1以上且6以下之烷氧基,更佳為碳原子數1以上且6以下之烷基,進而較佳為甲基及乙基,尤佳為甲基。
m5較佳為1。
As the halogen-substituted alkyl group as R 1 , a phenyl group substituted by one or two haloalkyl groups is preferred. Specifically, the halogen-substituted alkyl group as R 1 is preferably a group represented by the following formula (c1-01):
[化25]

(In the formula (c1-01), R 7 is as defined above, and R 9 is a substituent which the phenyl group as R 1 may have, m4 is 1 or 2, and m4+m5 is an integer of 1 or more and 5 or less).
R 9 is preferably an alkyl group having 1 or more and 6 or less carbon atoms, an alkoxy group having 1 or more and 6 or less carbon atoms, more preferably an alkyl group having 1 or more and 6 or less carbon atoms, and further more preferably Preferably, it is a methyl group and an ethyl group, and particularly preferably a methyl group.
M5 is preferably 1.

又,R1 亦可為下述式(c1-02)所表示之基:
[化26]

(式(c1-02)中,R1 、R2 、R3 、R4 、R5 、R6 、m1、m2及m3與式(c1)相同,R10 為2價有機基)。
Further, R 1 may be a group represented by the following formula (c1-02):
[Chem. 26]

(In the formula (c1-02), R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , m1, m2 and m3 are the same as those of the formula (c1), and R 10 is a divalent organic group).

作為R10 之2價有機基於不損害本發明之目的之範圍內無特別限定。至於作為R10 之2價有機基之較佳例,可列舉:碳原子數1以上且10以下之烷二基(例如亞甲基、乙烷-1,2-二基、丙烷-1,3-二基、丁烷-1,4-二基等)及伸芳基(對伸苯基、間伸苯基、鄰伸苯基、1,1'-聯苯-4,4'二基等)。R 10 is the divalent organic based not particularly limited within the range does not impair the object of the present invention. Preferable examples of the divalent organic group as R 10 include an alkanediyl group having 1 or more and 10 or less carbon atoms (for example, methylene, ethane-1,2-diyl, propane-1,3). -diyl, butane-1,4-diyl, etc.) and aryl (p-phenyl, meta-phenyl, o-phenyl, 1,1'-biphenyl-4,4' diyl, etc. ).

作為R1 為上述式(c1-02)所表示之基之情形時之式(c1)所表示之化合物之具體例,可列舉下述式之化合物。
[化27]
Specific examples of the compound represented by the formula (c1) in the case where R 1 is a group represented by the above formula (c1-02) include a compound of the following formula.
[化27]

以上說明之R1 之中,較佳為下述式所表示之基。
[化28]
Among R 1 described above, a group represented by the following formula is preferred.
[化28]

式(c1)中,R2 為可具有取代基之烴基或可具有取代基之雜環基。作為可具有取代基之烴基,較佳為可具有取代基之碳原子數1以上且11以下之烷基、或可具有取代基之芳基。作為芳基,較佳為苯基及萘基,較佳為苯基。作為R2 為烷基之情形時可具有之取代基,可較佳例示苯基、萘基等。又,作為R2 為芳基之情形時可具有之取代基,可較佳例示碳原子數1以上且5以下之烷基、烷氧基、鹵素原子等。In the formula (c1), R 2 is a hydrocarbon group which may have a substituent or a heterocyclic group which may have a substituent. The hydrocarbon group which may have a substituent is preferably an alkyl group having 1 or more and 11 or less carbon atoms which may have a substituent, or an aryl group which may have a substituent. As the aryl group, a phenyl group and a naphthyl group are preferred, and a phenyl group is preferred. The substituent which may be contained in the case where R 2 is an alkyl group is preferably a phenyl group, a naphthyl group or the like. Further, the substituent which may be contained in the case where R 2 is an aryl group is preferably an alkyl group having 1 or more and 5 or less carbon atoms, an alkoxy group, a halogen atom or the like.

於R2 為雜環基之情形時,該雜環基可為脂肪族雜環基,亦可為芳香族雜環基。於R2 為雜環基之情形時,雜環基為含有1個以上之N、S或O之5員或6員之單環,或者為該單環彼此或該單環與苯環縮合而成之雜環基。於雜環基為縮合環之情形時,環數至多為3。作為構成該雜環基之雜環,可列舉:呋喃、噻吩、吡咯、㗁唑、異㗁唑、噻唑、噻二唑、異噻唑、咪唑、吡唑、三唑、吡啶、吡𠯤、嘧啶、嗒𠯤、苯并呋喃、苯并噻吩、吲哚、異吲哚、吲、苯并咪唑、苯并三唑、苯并㗁唑、苯并噻唑、咔唑、嘌呤、喹啉、異喹啉、喹唑啉、酞𠯤、㖕啉、喹㗁啉、哌啶、哌𠯤、𠰌啉、哌啶、四氫吡喃及四氫呋喃等。
於R2 為雜環基之情形時,作為該雜環基可具有之取代基,可列舉:羥基、碳原子數1以上且6以下之烷氧基、鹵素原子、氰基、硝基等。
In the case where R 2 is a heterocyclic group, the heterocyclic group may be an aliphatic heterocyclic group or an aromatic heterocyclic group. In the case where R 2 is a heterocyclic group, the heterocyclic group is a monocyclic ring containing 5 or more members of N, S or O, or the monocyclic ring or the monocyclic ring is condensed with the benzene ring. A heterocyclic group. In the case where the heterocyclic group is a condensed ring, the number of rings is at most 3. Examples of the heterocyclic ring constituting the heterocyclic group include furan, thiophene, pyrrole, oxazole, isoxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyridinium, pyrimidine, and the like. Bismuth, benzofuran, benzothiophene, anthracene, isoindole, anthracene Benzimidazole, benzotriazole, benzoxazole, benzothiazole, carbazole, anthracene, quinoline, isoquinoline, quinazoline, indole, porphyrin, quinoxaline, piperidine, piperidine , porphyrin, piperidine, tetrahydropyran and tetrahydrofuran.
In the case where R 2 is a heterocyclic group, examples of the substituent which the heterocyclic group may have include a hydroxyl group, an alkoxy group having 1 or more and 6 or less carbon atoms, a halogen atom, a cyano group, a nitro group and the like.

作為R2 ,較佳為甲基、苯基及噻吩基,更佳為甲基。R 2 is preferably a methyl group, a phenyl group or a thienyl group, more preferably a methyl group.

式(c1)中,R3 為1價有機基。R3 可於不損害本發明之目的之範圍內自各種有機基中選擇。作為R3 之較佳例,可列舉:碳原子數1以上且20以下之可具有取代基之烷基、碳原子數3以上且20以下之可具有取代基之環烷基、碳原子數2以上且20以下之可具有取代基之飽和脂肪族醯基、碳原子數2以上且20以下之可具有取代基之烷氧基羰基、可具有取代基之苯基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之碳原子數7以上且20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之碳原子數11以上且20以下之萘基烷基、可具有取代基之雜環基及可具有取代基之雜環基羰基等。In the formula (c1), R 3 is a monovalent organic group. R 3 can be selected from various organic groups within the range not impairing the object of the present invention. Preferable examples of R 3 include an alkyl group which may have a substituent of 1 or more and 20 or less carbon atoms, a cycloalkyl group which may have a substituent of 3 or more and 20 or less carbon atoms, and 2 carbon atoms. a saturated aliphatic fluorenyl group which may have a substituent of 20 or more, an alkoxycarbonyl group which may have a substituent of 2 or more and 20 or less, a phenyl group which may have a substituent, and a phenyl group which may have a substituent a mercapto group, a phenoxycarbonyl group which may have a substituent, a phenylalkyl group having 7 or more and 20 or less carbon atoms which may have a substituent, a naphthyl group which may have a substituent, a naphthylmethyl group which may have a substituent, A naphthyloxycarbonyl group which may have a substituent, a naphthylalkyl group having 11 or more and 20 or less carbon atoms which may have a substituent, a heterocyclic group which may have a substituent, and a heterocyclic carbonyl group which may have a substituent.

R3 之中,較佳為碳原子數1以上且20以下之烷基。該烷基可為直鏈狀,亦可為支鏈狀。就式(c1)所表示之化合物於感光性組合物中之溶解性良好之方面而言,作為R3 之烷基之碳原子數較佳為2以上,更佳為5以上,尤佳為7以上。又,就感光性組合物中之式(c1)所表示之化合物與其他成分之相溶性良好之方面而言,作為R3 之烷基之碳原子數較佳為15以下,更佳為10以下。Among R 3 , an alkyl group having 1 or more and 20 or less carbon atoms is preferred. The alkyl group may be linear or branched. When the solubility of the compound represented by the formula (c1) in the photosensitive composition is good, the number of carbon atoms of the alkyl group as R 3 is preferably 2 or more, more preferably 5 or more, and particularly preferably 7 the above. In addition, in the photosensitive composition, the compatibility of the compound represented by the formula (c1) with other components is good, and the number of carbon atoms of the alkyl group as R 3 is preferably 15 or less, more preferably 10 or less. .

於R3 具有取代基之情形時,作為該取代基之較佳例,可列舉:羥基、碳原子數1以上且20以下之烷基、碳原子數1以上且20以下之烷氧基、碳原子數2以上且20以下之脂肪族醯基、碳原子數2以上且20以下之脂肪族醯氧基、苯氧基、苯甲醯基、苯甲醯氧基、-PO(OR)2 所表示之基(R為碳原子數1以上且6以下之烷基)、鹵素原子、氰基、雜環基等。作為取代基之雜環基之較佳例與作為R2 之雜環基之較佳例相同。In the case where R 3 has a substituent, examples of the substituent include a hydroxyl group, an alkyl group having 1 or more and 20 or less carbon atoms, an alkoxy group having 1 or more and 20 or less carbon atoms, and carbon. An aliphatic fluorenyl group having 2 or more and 20 or less atoms, an aliphatic decyloxy group having 2 or more and 20 or less carbon atoms, a phenoxy group, a benzylidene group, a benzamethyleneoxy group, or a -PO(OR) 2 group The group represented by R (R is an alkyl group having 1 or more and 6 or less carbon atoms), a halogen atom, a cyano group or a heterocyclic group. Preferred examples of the heterocyclic group as a substituent are the same as preferred examples of the heterocyclic group as R 2 .

如上所述,式(c1)所表示之化合物必須滿足下述(1)~(3)中之至少一個條件:
(1)R1 含有-OR7 所表示之基,R7 為鹵烷基。
(2)m2為1,R4 含有-OR7 所表示之基,R7 為鹵烷基。
(3)R3 為可具有取代基之支鏈狀烷基。
故而,R3 較佳為可具有取代基之支鏈狀烷基。
As described above, the compound represented by the formula (c1) must satisfy at least one of the following conditions (1) to (3):
(1) R 1 contains a group represented by -OR 7 and R 7 is a haloalkyl group.
(2) m2 is 1, R 4 contains a group represented by -OR 7 , and R 7 is a haloalkyl group.
(3) R 3 is a branched alkyl group which may have a substituent.
Therefore, R 3 is preferably a branched alkyl group which may have a substituent.

又,作為R3 ,為下述式(c1-03):
[化29]

(式(c1-03)中,R1 、R2 、R4 、R5 、R6 、m1、m2及m3與式(c1)相同,R11 為2價有機基)
Further, as R 3 , it is the following formula (c1-03):
[化29]

(In the formula (c1-03), R 1 , R 2 , R 4 , R 5 , R 6 , m1, m2 and m3 are the same as the formula (c1), and R 11 is a divalent organic group)

作為R11 之2價有機基於不損害本發明之目的之範圍內無特別限定。至於作為R11 之2價有機基之較佳例,可列舉:碳原子數1以上且10以下之烷二基(例如亞甲基、乙烷-1,2-二基、丙烷-1,3-二基、丁烷-1,4-二基、戊烷-1,5-二基、己烷-1,6-二基、庚烷-1,7-二基、辛烷-1,8-二基等)、伸芳基(對伸苯基、間伸苯基、鄰伸苯基、1,1'-聯苯-4,4'二基等)。As the divalent organic R 11 is not particularly limited within a range based on the object of the present invention are not impaired. Preferred examples of the divalent organic group as R 11 include an alkanediyl group having 1 or more and 10 or less carbon atoms (for example, methylene, ethane-1,2-diyl, propane-1,3). -diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8 - Diyl, etc.), aryl (p-phenyl, meta-phenyl, o-phenyl, 1,1'-biphenyl-4,4' diyl, etc.).

又,至於作為R11 之2價有機基,下述基亦較佳。下述式中,R12 為碳原子數1以上且20以下之伸烷基。至於作為R12 之伸烷基,較佳為:亞甲基、乙烷-1,2-二基、丙烷-1,3-二基、丁烷-1,4-二基、戊烷-1,5-二基、己烷-1,6-二基、庚烷-1,7-二基及辛烷-1,8-二基。
[化30]
Further, as the divalent organic group of R 11 , the following group is also preferable. In the following formula, R 12 is an alkylene group having 1 or more and 20 or less carbon atoms. As the alkylene group as R 12 , a methylene group, an ethane-1,2-diyl group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1 are preferable. , 5-diyl, hexane-1,6-diyl, heptane-1,7-diyl and octane-1,8-diyl.
[化30]

作為R3 為上述式(c1-03)所表示之基之情形時之式(c1)所表示之化合物之具體例,可列舉下述式之化合物。
[化31]
Specific examples of the compound represented by the formula (c1) in the case where R 3 is a group represented by the above formula (c1-03) include a compound of the following formula.
[化31]

作為以上說明之R3 之較佳具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、異戊基、新戊基、戊烷-3-基、第二戊基、第三戊基、正己基、正庚基、正辛基及2-乙基己基。
如上所述,作為R3 ,較佳為支鏈狀烷基,因此上述烷基之中,較佳為異丙基、異丁基、第二丁基、第三丁基、異戊基、新戊基、戊烷-3-基、第二戊基、第三戊基及2-乙基己基。
又,就式(c1)所表示之化合物於感光性組合物中之溶解性良好之方面而言,較佳為正辛基及2-乙基己基,更佳為2-乙基己基。
Preferred examples of R 3 described above include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, t-butyl, t-butyl, n-pentyl. , isoamyl, neopentyl, pentan-3-yl, second pentyl, third pentyl, n-hexyl, n-heptyl, n-octyl and 2-ethylhexyl.
As described above, R 3 is preferably a branched alkyl group, and therefore, among the above alkyl groups, an isopropyl group, an isobutyl group, a second butyl group, a tert-butyl group, an isopentyl group, and a new group are preferable. Butyl, pentan-3-yl, second pentyl, third pentyl and 2-ethylhexyl.
Further, the compound represented by the formula (c1) is preferably an n-octyl group and a 2-ethylhexyl group, and more preferably a 2-ethylhexyl group, in terms of solubility in a photosensitive composition.

式(c1)中之R4 為1價有機基。至於作為R4 之1價有機基,可列舉與作為R1 之1價有機基相同之基。R 4 in the formula (c1) is a monovalent organic group. The monovalent organic group as R 4 may be the same as the monovalent organic group as R 1 .

R4 作為R4 -(CO)m3 -所表示之基鍵結於式(c1)所表示之化合物之主骨架。作為R4 -(CO)m3 -所表示之基之較佳具體例,可列舉下述式所表示之基。於下述式中,m3與式(c1)同樣地為1或0。
[化32]
R 4 is bonded to the main skeleton of the compound represented by the formula (c1) as a group represented by R 4 -(CO) m3 -. Preferred examples of the group represented by R 4 -(CO) m3 - include the groups represented by the following formulas. In the following formula, m3 is 1 or 0 in the same manner as in the formula (c1).
[化32]

[化33]
[化33]

[化34]
[化34]

上述R4 -(CO)m3 -所表示之基之較佳例之中,較佳為1,3,5-三甲基苯甲醯基。Among the preferred examples of the group represented by the above R 4 -(CO) m3 - , a 1,3,5-trimethylbenzylidene group is preferred.

如上所述,式(c1)所表示之化合物必須滿足下述(1)~(3)中之至少一個條件:
(1)R1 含有-OR7 所表示之基,R7 為鹵烷基。
(2)m2為1,R4 含有-OR7 所表示之基,R7 為鹵烷基。
(3)R3 為可具有取代基之支鏈狀烷基。
故而,R4 較佳為經-OR7 所表示之取代基取代。R7 為鹵烷基。關於R7 ,如上所述。
As described above, the compound represented by the formula (c1) must satisfy at least one of the following conditions (1) to (3):
(1) R 1 contains a group represented by -OR 7 and R 7 is a haloalkyl group.
(2) m2 is 1, R 4 contains a group represented by -OR 7 , and R 7 is a haloalkyl group.
(3) R 3 is a branched alkyl group which may have a substituent.
Therefore, R 4 is preferably substituted with a substituent represented by -OR 7 . R 7 is a haloalkyl group. Regarding R 7 , as described above.

至於作為R4 之經鹵烷基取代之基,較佳為經1個或2個鹵烷基取代之苯基。具體而言,與作為R1 之經鹵烷基取代之基同樣地,較佳為上述式(c1-01)所表示之基。As the halogenated alkyl group substituted by R 4 , a phenyl group substituted by one or two haloalkyl groups is preferred. Specifically, similarly to the group substituted with a haloalkyl group as R 1 , a group represented by the above formula (c1-01) is preferred.

又,作為R4 ,下述式(c1-04)所表示之基亦較佳:
[化35]

(式(c1-04)中,R1 、R3 、R5 、R6 、m1、m2及m3與式(c1)相同,R13 為2價有機基)。
Further, as R 4 , the group represented by the following formula (c1-04) is also preferable:
[化35]

(In the formula (c1-04), R 1 , R 3 , R 5 , R 6 , m1, m2 and m3 are the same as those of the formula (c1), and R 13 is a divalent organic group).

作為R13 之2價有機基於不損害本發明之目的之範圍內無特別限定。至於作為R13 之2價有機基之較佳例,可列舉:碳原子數1以上且10以下之烷二基及伸芳基。作為烷二基之具體例,可列舉:亞甲基、乙烷-1,2-二基、丙烷-1,3-二基、丁烷-1,4-二基、戊烷-1,5-二基、己烷-1,6-二基、庚烷-1,7-二基及辛烷-1,8-二基等。作為伸芳基之具體例,可列舉:對伸苯基、間伸苯基、鄰伸苯基及1,1'-聯苯-4,4'二基等。As the divalent organic R 13 is not particularly limited within a range based on the object of the present invention are not impaired. Preferable examples of the divalent organic group as R 13 include an alkanediyl group and an extended aryl group having 1 or more and 10 or less carbon atoms. Specific examples of the alkanediyl group include a methylene group, an ethane-1,2-diyl group, a propane-1,3-diyl group, a butane-1,4-diyl group, and a pentane-1,5. - Diyl, hexane-1,6-diyl, heptane-1,7-diyl and octane-1,8-diyl and the like. Specific examples of the aryl group include a p-phenylene group, an exophenyl group, an o-phenyl group, and a 1,1'-biphenyl-4,4'-diyl group.

又,至於作為R13 之2價有機基,下述基亦較佳。下述式中,R13 為可經鹵素原子取代之碳原子數1以上且20以下之伸烷基。至於作為R14 之伸烷基,較佳為亞甲基、乙烷-1,2-二基、丙烷-1,3-二基、丁烷-1,4-二基、戊烷-1,5-二基、己烷-1,6-二基、庚烷-1,7-二基及辛烷-1,8-二基。
又,作為R14 ,該等伸烷基中之全部氫原子被取代為鹵素原子,尤其被取代為氟原子之基亦較佳。
[化36]
Further, as the divalent organic group of R 13 , the following group is also preferable. In the following formula, R 13 is an alkylene group having 1 or more and 20 or less carbon atoms which may be substituted by a halogen atom. As the alkylene group as R 14 , a methylene group, an ethane-1,2-diyl group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1 group are preferable. 5-diyl, hexane-1,6-diyl, heptane-1,7-diyl and octane-1,8-diyl.
Further, as R 14 , all of the hydrogen atoms in the alkylene group are substituted with a halogen atom, and a group substituted with a fluorine atom is also preferable.
[化36]

式(c1)中,m1、m2及m3均為0或1。作為m1,較佳為0。作為m2,較佳為1,作為m3,較佳為1。In the formula (c1), m1, m2 and m3 are both 0 or 1. As m1, it is preferably 0. As m2, it is preferably 1, and as m3, it is preferably 1.

作為以上說明之式(c1)所表示之化合物之較佳具體例,可列舉以下化合物。
[化37]
Preferred examples of the compound represented by the formula (c1) described above include the following compounds.
[化37]

[化38]
[化38]

[化39]
[39]

[化40]
[化40]

[化41]
[化41]

[化42]
[化42]

[化43]

如上所述,式(c1)所表示之化合物必須滿足下述(1)~(3)中之至少一個條件:
(1)R1 含有-OR7 所表示之基,R7 為鹵烷基。
(2)m2為1,R4 含有-OR7 所表示之基,R7 為鹵烷基。
(3)R3 為可具有取代基之支鏈狀烷基。若滿足該條件,則可混合兩種以上之不同化合物而用作光聚合起始劑(C)。
[化43]

As described above, the compound represented by the formula (c1) must satisfy at least one of the following conditions (1) to (3):
(1) R 1 contains a group represented by -OR 7 and R 7 is a haloalkyl group.
(2) m2 is 1, R 4 contains a group represented by -OR 7 , and R 7 is a haloalkyl group.
(3) R 3 is a branched alkyl group which may have a substituent. If this condition is satisfied, two or more different compounds may be mixed and used as a photopolymerization initiator (C).

如上所述,感光性組合物含有肟酯化合物(C1)作為光聚合起始劑(C)。肟酯化合物(C1)之吸收紫外線而產生自由基之能力優異。故而,肟酯化合物(C1)為高感度,即使於含有高濃度之遮光劑(D)之情形時,亦易於以較少之曝光量使感光性組合物充分硬化。於含有較多遮光劑(D)之感光性組合物之情形時,形成感光性組合物之膜之光學密度為3時,深層部之紫外線曝光量為表層部(最表面)之千分之一,光學密度為4時,亦會成為表層部(最表面)之萬分之一,肟酯化合物(C1)即使以此種相對較少之紫外線曝光量亦可產生自由基,從而使感光性組合物良好地硬化。As described above, the photosensitive composition contains the oxime ester compound (C1) as a photopolymerization initiator (C). The oxime ester compound (C1) is excellent in the ability to absorb ultraviolet rays and generate radicals. Therefore, the oxime ester compound (C1) is highly sensitive, and even when it contains a high concentration of the light-shielding agent (D), it is easy to sufficiently harden the photosensitive composition with a small amount of exposure. In the case of a photosensitive composition containing a large amount of the opacifier (D), when the optical density of the film forming the photosensitive composition is 3, the ultraviolet exposure amount of the deep portion is one thousandth of the surface portion (the outermost surface). When the optical density is 4, it will become one ten thousandth of the surface layer (the outermost surface), and the oxime ester compound (C1) can generate radicals even with such a relatively small amount of ultraviolet exposure, thereby making the photosensitive combination The material hardens well.

又,於在感光性組合物中以高濃度調配下述遮光劑(D)之情形時,包含感光性組合物之塗佈膜中,不可避免地產生遮光劑(D)之一次凝集體(凝聚體)。然而,於使用含有肟酯化合物(C1)作為光聚合起始劑(C)之感光性組合物之情形時,即使於凝聚體複雜重合之一點點間隙,光聚合起始劑(C)亦可於紫外線照射時產生自由基。
其結果,感光性組合物之硬化物不僅於常溫常濕且大氣壓之環境下,對基板之密接性或電阻率(絕緣性)優異,即使於硬化物暴露於高溫高濕高壓環境下之情形時,對基板之密接性或電阻率(絕緣性)亦不易下降。高溫高濕高壓環境下之耐久性可藉由所謂PCT試驗(Pressure Cooker Test,壓力鍋試驗)而確認。
故而,於使用有包含含有肟酯化合物(C1)之感光性組合物之硬化物之黑矩陣之影像顯示面板中,即使使用環境為高溫或多濕之情形時,亦不易產生性能下降。
In the case where the following light-shielding agent (D) is blended at a high concentration in the photosensitive composition, the coating film containing the photosensitive composition inevitably generates a primary aggregate of the light-shielding agent (D) (coagulation) body). However, in the case of using a photosensitive composition containing the oxime ester compound (C1) as the photopolymerization initiator (C), the photopolymerization initiator (C) can be used even if the agglomerates are complicatedly overlapped by a little bit gap. Free radicals are generated upon exposure to ultraviolet light.
As a result, the cured product of the photosensitive composition is excellent not only in the environment of normal temperature and humidity but also in an atmospheric pressure, and is excellent in adhesion to a substrate or electrical resistivity (insulating property) even when the cured product is exposed to a high-temperature, high-humidity, high-pressure environment. The adhesion to the substrate or the resistivity (insulation) are not easily lowered. The durability in a high-temperature, high-humidity, high-pressure environment can be confirmed by a so-called PCT test (Pressure Cooker Test).
Therefore, in the image display panel using the black matrix containing the cured product containing the photosensitive composition of the oxime ester compound (C1), even if the use environment is high temperature or high humidity, performance degradation is less likely to occur.

光聚合起始劑(C)可於不損害本發明之目的之範圍內,進而含有肟酯化合物(C1)以外之光聚合起始劑。肟酯化合物(C1)之質量相對於光聚合起始劑(C)整體之質量之比率較佳為20質量%以上,更佳為30質量%以上,進而更佳為35質量%以上,尤佳為40質量%以上。The photopolymerization initiator (C) may contain a photopolymerization initiator other than the oxime ester compound (C1) within a range not impairing the object of the present invention. The ratio of the mass of the oxime ester compound (C1) to the mass of the photopolymerization initiator (C) as a whole is preferably 20% by mass or more, more preferably 30% by mass or more, and still more preferably 35% by mass or more. It is 40% by mass or more.

作為肟酯化合物(C1)以外之光聚合起始劑(C),例如可較佳地使用胺基烷基苯酮系光聚合起始劑(C2)。
作為胺基烷基苯酮系光聚合起始劑(C2)之較佳例,可列舉下述式(c2-1)所表示之化合物。
As the photopolymerization initiator (C) other than the oxime ester compound (C1), for example, an aminoalkylphenone-based photopolymerization initiator (C2) can be preferably used.
A preferred example of the aminoalkylphenone-based photopolymerization initiator (C2) is a compound represented by the following formula (c2-1).

[化44]
[化44]

式(c2-1)中,Rc01 為碳原子數1以上且12以下之直鏈狀、支鏈狀或環狀之烷基。
Rc02 及Rc03 分別獨立為氫原子、碳原子數1以上且12以下之烷基、碳原子數3以上且12以下之環烷基或苄基。作為Rc02 或Rc03 之烷基可為直鏈狀,亦可為支鏈狀。
Rc04 、Rc05 、Rc07 及Rc08 分別獨立為氫原子、鹵素原子、碳原子數1以上且12以下之烷基、碳原子數3以上且12以下之環烷基或碳原子數1以上且4以下之烷氧基。作為Rc04 、Rc05 、Rc07 及Rc08 之烷基及烷氧基可為直鏈狀,亦可為支鏈狀。
Rc06 為氫原子、鹵素原子、碳原子數1以上且12以下之烷基、碳原子數3以上且12以下之環烷基或碳原子數1以上且4以下之烷氧基。作為Rc06 之烷基及烷氧基可為直鏈狀,亦可為支鏈狀。又,作為Rc06 之烷基、環烷基及烷氧基可經1個以上之取代基取代。該取代基為選自由羥基及碳原子數1以上且4以下之烷氧基所組成之群中之一種以上。作為Rc06 中之取代基之烷氧基可為直鏈狀,亦可為支鏈狀。
In the formula (c2-1), R c01 is a linear, branched or cyclic alkyl group having 1 or more and 12 or less carbon atoms.
R c02 and R c03 are each independently a hydrogen atom, an alkyl group having 1 or more and 12 or less carbon atoms, or a cycloalkyl group or a benzyl group having 3 or more and 12 or less carbon atoms. The alkyl group as R c02 or R c03 may be linear or branched.
R c04 , R c05 , R c07 and R c08 are each independently a hydrogen atom, a halogen atom, an alkyl group having 1 or more and 12 or less carbon atoms, a cycloalkyl group having 3 or more and 12 or less carbon atoms or a carbon number of 1 or more. And an alkoxy group of 4 or less. The alkyl group and the alkoxy group as R c04 , R c05 , R c07 and R c08 may be linear or branched.
R c06 is a hydrogen atom, a halogen atom, an alkyl group having 1 or more and 12 or less carbon atoms, a cycloalkyl group having 3 or more and 12 or less carbon atoms, or an alkoxy group having 1 or more and 4 or less carbon atoms. The alkyl group and the alkoxy group of R c06 may be linear or branched. Further, the alkyl group, the cycloalkyl group and the alkoxy group of R c06 may be substituted with one or more substituents. The substituent is one or more selected from the group consisting of a hydroxyl group and an alkoxy group having 1 or more and 4 or less carbon atoms. The alkoxy group as a substituent in R c06 may be linear or branched.

作為Rc01 為烷基之情形時之較佳具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、正己基、正庚基、正辛基、正壬基、正癸基、正十一烷基及正十二烷基等。該等之中,較佳為甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基及正己基,更佳為乙基。Preferred examples of the case where R c01 is an alkyl group include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, t-butyl, and t-butyl groups. N-pentyl, n-hexyl, n-heptyl, n-octyl, n-decyl, n-decyl, n-undecyl and n-dodecyl groups. Among these, a methyl group, an ethyl group, a n-propyl group, an isopropyl group, a n-butyl group, an isobutyl group, a second butyl group, a t-butyl group, a n-pentyl group and a n-hexyl group are preferred, and more preferably Ethyl.

作為Rc01 為環烷基之情形時之較佳具體例,可列舉:環丙基、環丁基、環戊基、環己基、環庚基、環辛基、環壬基、環癸基、環十一烷基及環十二烷基。Preferable examples of the case where R c01 is a cycloalkyl group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a cyclodecyl group, a cyclodecyl group, Cyclodecyl and cyclododecyl.

Rc02 及Rc03 為烷基或環烷基之情形時之較佳具體例與Rc01 為烷基或環烷基之情形時之較佳具體例相同。作為Rc02 及Rc03 ,較佳為甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、正己基、正庚基及正辛基,更佳為甲基。Preferred examples of the case where R c02 and R c03 are an alkyl group or a cycloalkyl group are the same as those in the case where R c01 is an alkyl group or a cycloalkyl group. R 2 O 2 and R c03 are preferably methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, t-butyl, t-butyl, n-pentyl, n-hexyl, or Heptyl and n-octyl, more preferably methyl.

作為Rc04 、Rc05 、Rc07 及Rc08 為鹵素原子之情形時之具體例,可列舉:氯原子、碘原子、溴原子及氟原子等。
Rc04 、Rc05 、Rc07 及Rc08 為烷基或環烷基之情形時之較佳具體例與Rc01 為烷基或環烷基之情形時之較佳具體例相同。
作為Rc04 、Rc05 、Rc07 及Rc08 為烷氧基之情形時之具體例,可列舉:甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、第二丁氧基及第三丁氧基。
作為Rc04 、Rc05 、Rc07 及Rc08 ,就感光性組合物之感度與焦點深度良好之方面、及易於形成與基板之密接性良好之硬化膜之方面而言,較佳為氫原子、甲基及乙基,更佳為氫原子。
Specific examples of the case where R c04 , R c05 , R c07 and R c08 are a halogen atom include a chlorine atom, an iodine atom, a bromine atom and a fluorine atom.
Preferred examples of the case where R c04 , R c05 , R c07 and R c08 are an alkyl group or a cycloalkyl group are the same as those in the case where R c01 is an alkyl group or a cycloalkyl group.
Specific examples of the case where R c04 , R c05 , R c07 and R c08 are alkoxy groups include methoxy group, ethoxy group, n-propoxy group, isopropoxy group, n-butoxy group and the like. Butoxy, second butoxy and third butoxy.
R c04 , R c05 , R c07 and R c08 are preferably hydrogen atoms in terms of a sensitivity and a depth of focus of the photosensitive composition, and a cured film which is easy to form a good adhesion to a substrate. A methyl group and an ethyl group are more preferably a hydrogen atom.

Rc06 為鹵素原子、烷基、環烷基或烷氧基之情形時之具體例與Rc04 、Rc05 、Rc07 及Rc08 為鹵素原子、烷基、環烷基或烷氧基之情形時之具體例相同。
於作為Rc06 之烷基或
作為Rc06 之烷基、環烷基及烷氧基經1個以上之取代基取代之情形時,作為該取代基,較佳為羥基及甲氧基。
A specific example in the case where R c06 is a halogen atom, an alkyl group, a cycloalkyl group or an alkoxy group, and a case where R c04 , R c05 , R c07 and R c08 are a halogen atom, an alkyl group, a cycloalkyl group or an alkoxy group. The specific examples are the same.
When the alkyl group as R c06 or the alkyl group, the cycloalkyl group or the alkoxy group of R c06 is substituted with one or more substituents, the substituent is preferably a hydroxyl group or a methoxy group.

作為Rc06 之較佳具體例,較佳為氫原子、甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、正己基、正庚基、正辛基、正癸基、正十二烷基、羥基甲基、2-羥基乙基、甲氧基甲基、2-甲氧基乙基、甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、羥基甲氧基、2-羥基乙氧基、甲氧基甲氧基及2-甲氧基乙氧基等,更佳為氫原子、甲基及乙基。Preferred examples of R c06 are preferably a hydrogen atom, a methyl group, an ethyl group, a n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a second butyl group, a t-butyl group or a n-pentyl group. , n-hexyl, n-heptyl, n-octyl, n-decyl, n-dodecyl, hydroxymethyl, 2-hydroxyethyl, methoxymethyl, 2-methoxyethyl, methoxy, Ethoxy, n-propoxy, isopropoxy, n-butoxy, hydroxymethoxy, 2-hydroxyethoxy, methoxymethoxy and 2-methoxyethoxy, etc., more preferably It is a hydrogen atom, a methyl group and an ethyl group.

較佳為Rc01 為甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基或正己基,Rc02 為甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、正己基、正庚基或正辛基,Rc03 為甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、正己基、正庚基或正辛基等,Rc04 為氫原子、甲基或乙基,Rc05 為氫原子、甲基或乙基,Rc07 為氫原子、甲基或乙基,Rc08 為氫原子、甲基或乙基,Rc06 為甲基或氫原子。Preferably, R c01 is methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, t-butyl, t-butyl, n-pentyl or n-hexyl, and R c02 is methyl , ethyl, n-propyl, isopropyl, n-butyl, isobutyl, t-butyl, tert-butyl, n-pentyl, n-hexyl, n-heptyl or n-octyl, R c03 is methyl , ethyl, n-propyl, isopropyl, n-butyl, isobutyl, t-butyl, tert-butyl, n-pentyl, n-hexyl, n-heptyl or n-octyl, etc., R c04 is hydrogen An atom, a methyl group or an ethyl group, R c05 is a hydrogen atom, a methyl group or an ethyl group, R c07 is a hydrogen atom, a methyl group or an ethyl group, R c08 is a hydrogen atom, a methyl group or an ethyl group, and R c06 is a methyl group or A hydrogen atom.

作為式(c2-1)所表示之胺基烷基苯酮系化合物之例,可列舉:2-苄基-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮(例如Ciba Specialty Chemicals公司製造之IRGACURE369)、2-(4-甲基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮(例如Ciba Specialty Chemicals公司製造之IRGACURE379)、2-(4-乙基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮、2-(4-異丙基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮、2-(4-正丁基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮、2-(4-異丁基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮、2-(4-正十二烷基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮、2-(3,4-二甲基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮、2-(4-甲氧基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮、2-(4-乙氧基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮、2-(4-羥基甲基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮、2-[4-(2-羥基乙氧基)苄基]-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮、2-[4-(2-甲氧基乙氧基)苄基]-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮、2-(4-異丙基苄基)-2-[(正丁基)(甲基)胺基]-1-(4-𠰌啉基苯基)丁烷-1-酮、2-(4-正丁基苄基)-2-[(正丁基)(甲基)胺基]-1-(4-𠰌啉基苯基)丁烷-1-酮、2-(4-異丙基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)戊烷-1-酮、2-(4-異丁基苄基)-2-[(正丁基)(甲基)胺基]]-1-(4-𠰌啉基苯基)戊烷-1-酮、2-(4-正丁氧基苄基)-2-[(正丁基)(甲基)胺基]-1-(4-𠰌啉基苯基)戊烷-1-酮、2-(4-甲基苄基)-2-[二(正辛基)胺基]-1-(4-𠰌啉基苯基)己烷-1-酮及2-(4-正十二烷基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)辛烷-1-酮等。
其中,較佳為2-(4-甲基苄基)-2-(二甲胺基)-1-(4-𠰌啉基苯基)丁烷-1-酮。
Examples of the aminoalkylphenone compound represented by the formula (c2-1) include 2-benzyl-2-(dimethylamino)-1-(4-carbolinylphenyl) butyl Alkan-1-one (for example, IRGACURE 369 manufactured by Ciba Specialty Chemicals, Inc.), 2-(4-methylbenzyl)-2-(dimethylamino)-1-(4-carbolinylphenyl)butane- 1-ketone (for example, IRGACURE 379, manufactured by Ciba Specialty Chemicals, Inc.), 2-(4-ethylbenzyl)-2-(dimethylamino)-1-(4-carbolinylphenyl)butane-1- Ketone, 2-(4-isopropylbenzyl)-2-(dimethylamino)-1-(4-carbolinylphenyl)butan-1-one, 2-(4-n-butylbenzyl) 2-(2-dimethylamino)-1-(4-carbolinylphenyl)butan-1-one, 2-(4-isobutylbenzyl)-2-(dimethylamino) 1-(4-carbolinylphenyl)butan-1-one, 2-(4-n-dodecylbenzyl)-2-(dimethylamino)-1-(4-carbolinyl) Phenyl)butan-1-one, 2-(3,4-dimethylbenzyl)-2-(dimethylamino)-1-(4-carbolinylphenyl)butan-1-one , 2-(4-methoxybenzyl)-2-(dimethylamino)-1-(4-carbolinylphenyl)butan-1-one, 2-(4-ethoxybenzyl) )-2-(dimethylamino)-1-(4-carbolinylphenyl)butan-1-one, 2-(4-hydroxymethylbenzyl)-2-(dimethylamino)- 1-(4-carbolinyl) Phenyl)butan-1-one, 2-[4-(2-hydroxyethoxy)benzyl]-2-(dimethylamino)-1-(4-carbolinylphenyl)butane- 1-keto, 2-[4-(2-methoxyethoxy)benzyl]-2-(dimethylamino)-1-(4-carbolinylphenyl)butan-1-one, 2-(4-Isopropylbenzyl)-2-[(n-butyl)(methyl)amino]-1-(4-carbolinylphenyl)butan-1-one, 2-(4 -n-butylbenzyl)-2-[(n-butyl)(methyl)amino]-1-(4-carbolinylphenyl)butan-1-one, 2-(4-isopropyl Benzyl)-2-(dimethylamino)-1-(4-carbolinylphenyl)pentan-1-one, 2-(4-isobutylbenzyl)-2-[(n-butyl) (methyl)amino]]-1-(4-carbolinylphenyl)pentan-1-one, 2-(4-n-butoxybenzyl)-2-[(n-butyl)( Methyl)amino]-1-(4-carbolinylphenyl)pentan-1-one, 2-(4-methylbenzyl)-2-[di(n-octyl)amino]-1 -(4-carbolinylphenyl)hexane-1-one and 2-(4-n-dodecylbenzyl)-2-(dimethylamino)-1-(4-carbolinylphenyl) ) octane-1-one and the like.
Among them, 2-(4-methylbenzyl)-2-(dimethylamino)-1-(4-carbolinylphenyl)butan-1-one is preferred.

若與肟酯化合物(C1)一同組合胺基烷基苯酮系光聚合起始劑(C2),則易於控制使用感光性組合物而形成之黑矩陣之截面形狀。具體而言,藉由使關於黑矩陣之截面形狀之下述線錐角為可変,可使黑矩陣之截面形狀自正錐可變為倒錐。正錐形狀為下述圖1所示之截面形狀,倒錐形狀為下述圖2所示之截面形狀。When the aminoalkylphenone-based photopolymerization initiator (C2) is combined with the oxime ester compound (C1), the cross-sectional shape of the black matrix formed using the photosensitive composition can be easily controlled. Specifically, the cross-sectional shape of the black matrix can be changed from the forward cone to the inverted cone by making the following line taper angle with respect to the cross-sectional shape of the black matrix. The shape of the forward taper is the cross-sectional shape shown in Fig. 1 below, and the shape of the inverted taper is the cross-sectional shape shown in Fig. 2 below.

例如,於僅由肟酯化合物(C1)與胺基烷基苯酮系光聚合起始劑(C2)構成光聚合起始劑(C)之情形時,若胺基烷基苯酮系光聚合起始劑(C2)之使用量較多,則圖1及圖2所示之各θ值變大,易於形成截面形狀為倒錐形狀之經圖案化之硬化膜。
另一方面,若肟酯化合物(C1)之使用量較多,則圖1及圖2所示之各θ值變小,易於形成截面形狀為正錐形狀之經圖案化之硬化膜。
For example, when the photopolymerization initiator (C) is composed only of the oxime ester compound (C1) and the aminoalkylphenone-based photopolymerization initiator (C2), if the aminoalkylphenone is photopolymerized When the amount of the initiator (C2) used is large, the respective θ values shown in FIGS. 1 and 2 become large, and it is easy to form a patterned cured film having a cross-sectional shape of an inverted tapered shape.
On the other hand, when the amount of the oxime ester compound (C1) used is large, the respective θ values shown in FIGS. 1 and 2 become small, and it is easy to form a patterned cured film having a cross-sectional shape of a forward tapered shape.

認為其原因在於:胺基烷基苯酮系光聚合起始劑(C2)存在相對而言對感光性組合物之表層部分(面對曝光之光之面與其附近)產生光聚合自由基之傾向,肟酯化合物(C1)存在相對而言對感光性組合物之深層部分亦產生光聚合自由基之傾向。感光性組合物之膜厚越厚,該傾向表現得越顯著,1 μm以下之較薄膜厚亦可確認。
又,作為與肟酯化合物(C1)一同使用胺基烷基苯酮系光聚合起始劑(C2)之次要效果,綜合上提高感度,可由較少之曝光量獲得感光性組合物之硬化物。進而,於與肟酯化合物(C1)一同使用胺基烷基苯酮系光聚合起始劑(C2)之情形時,線邊緣之直進性與對基板之密接性良好,易於形成圖案缺陷較少之黑矩陣。
The reason for this is considered to be that the aminoalkyl phenone-based photopolymerization initiator (C2) tends to relatively generate photopolymerization radicals in the surface layer portion of the photosensitive composition (the surface facing the exposed light and its vicinity). The oxime ester compound (C1) tends to relatively generate photopolymerization radicals in the deep portion of the photosensitive composition. The thicker the film thickness of the photosensitive composition, the more pronounced this tendency is, and the film thickness of 1 μm or less can be confirmed.
Further, as a secondary effect of using an aminoalkylphenone-based photopolymerization initiator (C2) together with the oxime ester compound (C1), the sensitivity is improved comprehensively, and the photosensitive composition can be hardened by a small amount of exposure. Things. Further, when an aminoalkylphenone photopolymerization initiator (C2) is used together with the oxime ester compound (C1), the straightness of the line edge is good with the adhesion to the substrate, and it is easy to form a pattern defect. Black matrix.

於感光性組合物中,光聚合起始劑(C)含有肟酯化合物(C1)與胺基烷基苯酮系光聚合起始劑(C2)之情形時,胺基烷基苯酮系光聚合起始劑(C2)之質量相對於肟酯化合物(C1)之質量與胺基烷基苯酮系光聚合起始劑(C2)之質量之合計的比率較佳為20質量%以上且75質量%以下,更佳為25質量%以上且70質量%以下,尤佳為30質量%以上且60質量%以下。再者,較理想的是以形成較厚之硬化膜之情形時之肟酯化合物(C1)之混合比率高於形成較薄之硬化膜之情形時之肟酯化合物(C1)之混合比率之方式,於感光性組合物中調配肟酯化合物(C1)。In the photosensitive composition, when the photopolymerization initiator (C) contains an oxime ester compound (C1) and an aminoalkylphenone photopolymerization initiator (C2), the aminoalkylphenone light is used. The ratio of the mass of the polymerization initiator (C2) to the total mass of the oxime ester compound (C1) and the mass of the aminoalkylphenone-based photopolymerization initiator (C2) is preferably 20% by mass or more and 75. The mass% or less is more preferably 25% by mass or more and 70% by mass or less, and particularly preferably 30% by mass or more and 60% by mass or less. Further, it is preferable that the mixing ratio of the oxime ester compound (C1) in the case of forming a thicker cured film is higher than the mixing ratio of the oxime ester compound (C1) in the case of forming a thinned cured film The oxime ester compound (C1) is formulated in the photosensitive composition.

作為可用作光聚合起始劑(C)之肟酯化合物(C1)及胺基烷基苯酮系光聚合起始劑(C2)以外之光聚合起始劑之具體例,可列舉:1-羥基環己基苯基酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、1-[4-(2-羥基乙氧基)苯基]-2-羥基-2-甲基-1-丙烷-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、1-(4-十二烷基苯基)-2-羥基-2-甲基丙烷-1-酮、2,2-二甲氧基-1,2-二苯基乙烷-1-酮、雙(4-二甲胺基苯基)酮、2,4,6-三甲基苯甲醯基二苯基氧化膦、4-苯甲醯基-4'-甲基二甲硫醚、4-二甲胺基苯甲酸、4-二甲胺基苯甲酸甲酯、4-二甲胺基苯甲酸乙酯、4-二甲胺基苯甲酸丁酯、4-二甲胺基-2-乙基己基苯甲酸、4-二甲胺基-2-異戊基苯甲酸、苄基-β-甲氧基乙基縮醛、苄基二甲基縮酮、鄰苯甲醯基苯甲酸甲酯、2,4-二乙基-9-氧硫𠮿、2-氯-9-氧硫𠮿、2,4-二甲基-9-氧硫𠮿、1-氯-4-丙氧基-9-氧硫𠮿、硫𠮿、2-氯硫𠮿、2,4-二乙基硫𠮿、2-甲基硫𠮿、2-異丙基硫𠮿、2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌、偶氮二異丁腈、過氧化苯甲醯、氫過氧化異丙苯、2-巰基苯并咪唑、2-巰基苯并㗁唑、2-巰基苯并噻唑、2-(鄰氯苯基)-4,5-二苯基咪唑二聚物、2-(鄰氯苯基)-4,5-二(甲氧基苯基)咪唑二聚物、2-(鄰氟苯基)-4,5-二苯基咪唑二聚物、2-(鄰甲氧基苯基)-4,5-二苯基咪唑二聚物、2-(對甲氧基苯基)-4,5-二苯基咪唑二聚物、2,4,5-三芳基咪唑二聚物、二苯甲酮、2-氯二苯甲酮、4,4'-雙(二甲胺基)二苯甲酮(即米其勒酮)、4,4'-雙(二乙胺基)二苯甲酮(即乙基米其勒酮)、4,4'-二氯二苯甲酮、3,3-二甲基-4-甲氧基二苯甲酮、苯偶醯、安息香、安息香甲醚、安息香乙醚、安息香異丙醚、安息香正丁醚、安息香異丁醚、安息香丁醚、苯乙酮、2,2-二乙氧基苯乙酮、對二甲基苯乙酮、對二甲胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對第三丁基苯乙酮、對二甲胺基苯乙酮、對第三丁基三氯苯乙酮、對第三丁基二氯苯乙酮、α,α-二氯-4-苯氧基苯乙酮、9-氧硫𠮿、2-甲基-9-氧硫𠮿、2-異丙基-9-氧硫𠮿、二苯并環庚酮、4-二甲胺基苯甲酸戊酯、9-苯基吖啶、1,7-雙-(9-吖啶基)庚烷、1,5-雙-(9-吖啶基)戊烷、1,3-雙-(9-吖啶基)丙烷、對甲氧基三𠯤、2,4,6-三(三氯甲基)-均三𠯤、2-甲基-4,6-雙(三氯甲基)-均三𠯤、2-[2-(5-甲基呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-均三𠯤、2-[2-(呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-均三𠯤、2-[2-(4-二乙胺基-2-甲基苯基)乙烯基]-4,6-雙(三氯甲基)-均三𠯤、2-[2-(3,4-二甲氧基苯基)乙烯基]-4,6-雙(三氯甲基)-均三𠯤、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-均三𠯤、2-(4-乙氧基苯乙烯基)-4,6-雙(三氯甲基)-均三𠯤、2-(4-正丁氧基苯基)-4,6-雙(三氯甲基)-均三𠯤、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯基-均三𠯤、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯基-均三𠯤、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯乙烯基苯基-均三𠯤、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯乙烯基苯基-均三𠯤等。該等光聚合起始劑可單獨或組合兩種以上與肟酯化合物(C1)一同使用。Specific examples of the photopolymerization initiator other than the oxime ester compound (C1) and the aminoalkyl phenone-based photopolymerization initiator (C2) which can be used as the photopolymerization initiator (C) include: -hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1-[4-(2-hydroxyethoxy)phenyl]-2-hydroxy-2- Methyl-1-propan-1-one, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropan-1-one, 1-(4-dodecylphenyl)- 2-hydroxy-2-methylpropan-1-one, 2,2-dimethoxy-1,2-diphenylethane-1-one, bis(4-dimethylaminophenyl)one, 2,4,6-trimethylbenzimidyldiphenylphosphine oxide, 4-benzylidene-4'-methyldimethyl sulfide, 4-dimethylaminobenzoic acid, 4-dimethylamine Methyl benzoate, ethyl 4-dimethylaminobenzoate, butyl 4-dimethylaminobenzoate, 4-dimethylamino-2-ethylhexylbenzoic acid, 4-dimethylamino- 2-isoamylbenzoic acid, benzyl-β-methoxyethyl acetal, benzyl dimethyl ketal, methyl o-besylbenzoate, 2,4-diethyl-9-oxygen Thiopurine 2-chloro-9-oxopurine 2,4-Dimethyl-9-oxothione 1-chloro-4-propoxy-9-oxothiolane Thiopurine 2-chlorothiazide 2,4-diethylthiopurine 2-methylthionine 2-isopropylthiopurine , 2-ethyl hydrazine, octamethyl hydrazine, 1,2-benzopyrene, 2,3-diphenyl fluorene, azobisisobutyronitrile, benzammonium peroxide, hydroperoxide Propylbenzene, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, 2-(o-chlorophenyl)-4,5-diphenylimidazole dimer, 2-(ortho Chlorophenyl)-4,5-bis(methoxyphenyl)imidazole dimer, 2-(o-fluorophenyl)-4,5-diphenylimidazole dimer, 2-(o-methoxy) Phenyl)-4,5-diphenylimidazole dimer, 2-(p-methoxyphenyl)-4,5-diphenylimidazole dimer, 2,4,5-triarylimidazole dimerization , benzophenone, 2-chlorobenzophenone, 4,4'-bis(dimethylamino)benzophenone (ie, miconesone), 4,4'-bis(diethylamino) Benzophenone (ie ethyl acesulfame), 4,4'-dichlorobenzophenone, 3,3-dimethyl-4-methoxybenzophenone, benzoin, benzoin , benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin n-butyl ether, benzoin isobutyl ether, benzoin butyl ether, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone , p-dimethylaminopropiophenone, dichloroacetophenone, trichloroacetophenone, pair Butylacetophenone, p-dimethylaminoacetophenone, p-tert-butyltrichloroacetophenone, p-tert-butyldichloroacetophenone, α,α-dichloro-4-phenoxybenzene Ethyl ketone, 9-oxopurine 2-methyl-9-oxothiolane 2-isopropyl-9-oxoxime , dibenzocycloheptanone, amyl 4-dimethylaminobenzoate, 9-phenyl acridine, 1,7-bis-(9-acridinyl) heptane, 1,5-bis-(9 - aridinoyl)pentane, 1,3-bis-(9-acridinyl)propane, p-methoxytrimethylene, 2,4,6-tris(trichloromethyl)-allotriazole, 2- Methyl-4,6-bis(trichloromethyl)-homo-trimium, 2-[2-(5-methylfuran-2-yl)vinyl]-4,6-bis(trichloromethyl) - each triterpenoid, 2-[2-(furan-2-yl)vinyl]-4,6-bis(trichloromethyl)-allotriazole, 2-[2-(4-diethylamino)- 2-methylphenyl)vinyl]-4,6-bis(trichloromethyl)-allotriazole, 2-[2-(3,4-dimethoxyphenyl)vinyl]-4, 6-bis(trichloromethyl)-homo-trimium, 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-homo-trimium, 2-(4-ethoxyl Styryl)-4,6-bis(trichloromethyl)-homo-trimium, 2-(4-n-butoxyphenyl)-4,6-bis(trichloromethyl)-allotriazole, 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy)phenyl-s-triazine, 2,4-bis-trichloromethyl-6-(2-bromo-4 -Methoxy)phenyl--tris-trimium, 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy)styrylphenyl---tris-, 2,4- Bis-trichloromethyl-6-(2-bromo-4-methoxy)styrylphenyl- All three, etc. These photopolymerization initiators may be used alone or in combination of two or more with the oxime ester compound (C1).

感光性組合物較佳為與肟酯化合物(C1)一同含有肟酯化合物(C3)。
肟酯化合物(C3)係下述式(c3)所表示之化合物:
[化45]

(式(c3)中,CR為下述式(c3a)或下述式(c3b)所表示之基:
[化46]

Rc1 為氫原子、硝基或1價有機基,Rc2 及Rc3 分別為可具有取代基之鏈狀烷基、可具有取代基之鏈狀烷氧基、可具有取代基之環狀有機基或氫原子,Rc2 與Rc3 可相互鍵結而形成環,Rc4 為1價有機基,Rc5 為氫原子、可具有取代基之碳原子數1以上且20以下之脂肪族烴基、或可具有取代基之芳基,n1為0以上且4以下之整數,n2為0或1)。
就式(c3)所表示之肟酯化合物之合成或獲取之容易性或易於藉由Rc2 及Rc3 之選擇而調整肟酯化合物之特性之方面等而言,作為式(c3)中之CR,較佳為式(c3a)所表示之基。
The photosensitive composition preferably contains an oxime ester compound (C3) together with the oxime ester compound (C1).
The oxime ester compound (C3) is a compound represented by the following formula (c3):
[化45]

(In the formula (c3), CR is a group represented by the following formula (c3a) or the following formula (c3b):
[Chem. 46]
,
R c1 is a hydrogen atom, a nitro group or a monovalent organic group, and R c2 and R c3 are each a chain alkyl group which may have a substituent, a chain alkoxy group which may have a substituent, and a cyclic organic group which may have a substituent a hydrogen atom, R c2 and R c3 may be bonded to each other to form a ring, R c4 is a monovalent organic group, R c5 is a hydrogen atom, an aliphatic hydrocarbon group having 1 or more and 20 or less carbon atoms which may have a substituent, Or an aryl group which may have a substituent, n1 is an integer of 0 or more and 4 or less, and n2 is 0 or 1).
As the CR in the formula (c3), the ease of synthesis or acquisition of the oxime ester compound represented by the formula (c3) or the ease of adjusting the characteristics of the oxime ester compound by the selection of R c2 and R c3 Preferably, it is a group represented by the formula (c3a).

作為式(c3)中之CR之式(c3a)或式(c3b)所表示之基中,Rc1 為氫原子、硝基或1價有機基。Rc1 於式(c3a)或式(c3b)中之縮合環上,鍵結於與-(CO)n2 -所表示之基所鍵結之芳香環不同之6員芳香環上。式(c3a)或式(c3b)中,Rc1 之鍵結位置並無特別限定。於式(c3)所表示之化合物具有1個以上之Rc1 之情形時,就式(c3)所表示之化合物之合成容易等方面而言,較佳為1個以上之Rc1 中之1個鍵結於下述式(c3a-1)及式(c3b-1)所表示之結構中之*所示之位置:
[化47]

於Rc1 為複數個之情形時,複數個Rc1 可相同,亦可不同。
In the group represented by the formula (c3a) or the formula (c3b) of CR in the formula (c3), R c1 is a hydrogen atom, a nitro group or a monovalent organic group. R c1 is bonded to a 6-membered aromatic ring different from the aromatic ring to which the group represented by -(CO) n2 - is bonded, on the condensed ring of formula (c3a) or formula (c3b). In the formula (c3a) or the formula (c3b), the bonding position of R c1 is not particularly limited. When the compound represented by the formula (c3) has one or more R c1 , it is preferable that one of the R c1 is one or more in terms of the synthesis of the compound represented by the formula (c3). The bond is bonded to the position shown by * in the structure represented by the following formula (c3a-1) and formula (c3b-1):
[化47]
.
In the case where R c1 is plural, the plurality of R c1 may be the same or different.

於Rc1 為有機基之情形時,Rc1 於不損害本發明之目的之範圍內無特別限定,可自各種有機基適當選擇。作為Rc1 為有機基之情形時之較佳例,可列舉:烷基、烷氧基、環烷基、環烷氧基、飽和脂肪族醯基、飽和脂肪族醯氧基、烷氧基羰基、可具有取代基之苯基、可具有取代基之苯氧基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之苯甲醯氧基、可具有取代基之苯基烷基、可具有取代基之萘基、可具有取代基之萘氧基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之萘甲醯氧基、可具有取代基之萘基烷基、可具有取代基之雜環基、可具有取代基之雜環基羰基、經1個或2個有機基取代之胺基、𠰌啉-1-基及哌𠯤-1-基等。In the case where R c1 is an organic group, R c1 is not particularly limited insofar as it does not impair the object of the present invention, and may be appropriately selected from various organic groups. Preferable examples of the case where R c1 is an organic group include an alkyl group, an alkoxy group, a cycloalkyl group, a cycloalkoxy group, a saturated aliphatic fluorenyl group, a saturated aliphatic decyloxy group, and an alkoxycarbonyl group. a phenyl group which may have a substituent, a phenoxy group which may have a substituent, a benzyl group which may have a substituent, a phenoxycarbonyl group which may have a substituent, a benzyl methoxy group which may have a substituent, a phenylalkyl group having a substituent, a naphthyl group which may have a substituent, a naphthyloxy group which may have a substituent, a naphthylmethyl group which may have a substituent, a naphthyloxycarbonyl group which may have a substituent, may have a substituent Naphthylmethoxycarbonyl, naphthylalkyl group which may have a substituent, heterocyclic group which may have a substituent, heterocyclic carbonyl group which may have a substituent, amine group substituted by one or two organic groups, hydrazine Andolin-1-yl and piperidin-1-yl and the like.

於Rc1 為烷基之情形時,烷基之碳原子數較佳為1以上且20以下,更佳為1以上且6以下。又,於Rc1 為烷基之情形時,可為直鏈,亦可為支鏈。作為Rc1 為烷基之情形時之具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、異戊基、第二戊基、第三戊基、正己基、正庚基、正辛基、異辛基、第二辛基、第三辛基、正壬基、異壬基、正癸基及異癸基等。又,於Rc1 為烷基之情形時,烷基可於碳鏈中含有醚鍵(-O-)。作為於碳鏈中具有醚鍵之烷基之例,可列舉:甲氧基乙基、乙氧基乙基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙氧基乙氧基乙基及甲氧基丙基等。When R c1 is an alkyl group, the number of carbon atoms of the alkyl group is preferably 1 or more and 20 or less, more preferably 1 or more and 6 or less. Further, when R c1 is an alkyl group, it may be a straight chain or a branched chain. Specific examples of the case where R c1 is an alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, second butyl group, tert-butyl group, and n-pentyl group. Base, isopentyl, second pentyl, third amyl, n-hexyl, n-heptyl, n-octyl, isooctyl, second octyl, third octyl, n-decyl, isodecyl, positive Sulfhydryl and isomeric groups. Further, when R c1 is an alkyl group, the alkyl group may have an ether bond (-O-) in the carbon chain. Examples of the alkyl group having an ether bond in the carbon chain include a methoxyethyl group, an ethoxyethyl group, a methoxyethoxyethyl group, an ethoxyethoxyethyl group, and a propoxy group. Ethoxyethyl and methoxypropyl and the like.

於Rc1 為烷氧基之情形時,烷氧基之碳原子數較佳為1以上且20以下,更佳為1以上且6以下。又,於Rc1 為烷氧基之情形時,烷氧基可為直鏈,亦可為支鏈。作為Rc1 為烷氧基之情形時之具體例,可列舉:甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、第二丁氧基、第三丁氧基、正戊氧基、異戊氧基、第二戊氧基、第三戊氧基、正己氧基、正庚氧基、正辛氧基、異辛氧基、第二辛氧基、第三辛氧基、正壬氧基、異壬氧基、正癸氧基及異癸氧基等。又,於Rc1 為烷氧基之情形時,烷氧基可於碳鏈中含有醚鍵(-O-)。作為於碳鏈中具有醚鍵之烷氧基之例,可列舉:甲氧基乙氧基、乙氧基乙氧基、甲氧基乙氧基乙氧基、乙氧基乙氧基乙氧基、丙氧基乙氧基乙氧基及甲氧基丙氧基等。When R c1 is an alkoxy group, the number of carbon atoms of the alkoxy group is preferably 1 or more and 20 or less, more preferably 1 or more and 6 or less. Further, when R c1 is an alkoxy group, the alkoxy group may be a straight chain or a branched chain. Specific examples of the case where R c1 is an alkoxy group include a methoxy group, an ethoxy group, a n-propoxy group, an isopropoxy group, a n-butoxy group, an isobutoxy group, and a second butoxy group. , third butoxy, n-pentyloxy, isopentyloxy, second pentyloxy, third pentyloxy, n-hexyloxy, n-heptyloxy, n-octyloxy, isooctyloxy, second Octyloxy, trioctyloxy, n-decyloxy, isodecyloxy, n-decyloxy and isodecyloxy. Further, when R c1 is an alkoxy group, the alkoxy group may have an ether bond (-O-) in the carbon chain. Examples of the alkoxy group having an ether bond in the carbon chain include a methoxyethoxy group, an ethoxyethoxy group, a methoxyethoxyethoxy group, and an ethoxyethoxyethoxy group. Base, propoxyethoxyethoxy and methoxypropoxy groups, and the like.

於Rc1 為環烷基或環烷氧基之情形時,環烷基或環烷氧基之碳原子數較佳為3以上且10以下,更佳為3以上且6以下。作為Rc1 為環烷基之情形時之具體例,可列舉:環丙基、環丁基、環戊基、環己基、環庚基及環辛基等。作為Rc1 為環烷氧基之情形時之具體例,可列舉:環丙氧基、環丁氧基、環戊氧基、環己氧基、環庚氧基及環辛氧基等。When R c1 is a cycloalkyl group or a cycloalkoxy group, the number of carbon atoms of the cycloalkyl group or the cycloalkoxy group is preferably 3 or more and 10 or less, more preferably 3 or more and 6 or less. Specific examples of the case where R c1 is a cycloalkyl group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Specific examples of the case where R c1 is a cycloalkoxy group include a cyclopropoxy group, a cyclobutoxy group, a cyclopentyloxy group, a cyclohexyloxy group, a cycloheptyloxy group, and a cyclooctyloxy group.

於Rc1 為飽和脂肪族醯基或飽和脂肪族醯氧基之情形時,飽和脂肪族醯基或飽和脂肪族醯氧基之碳原子數較佳為2以上且21以下,更佳為2以上且7以下。作為Rc1 為飽和脂肪族醯基之情形時之具體例,可列舉:乙醯基、丙醯基、正丁醯基、2-甲基丙醯基、正戊醯基、2,2-二甲基丙醯基、正己醯基、正庚醯基、正辛醯基、正壬醯基、正癸醯基、正十一碳醯基、正十二碳醯基、正十三碳醯基、正十四碳醯基、正十五碳醯基及正十六碳醯基等。作為Rc1 為飽和脂肪族醯氧基之情形時之具體例,可列舉:乙醯氧基、丙醯氧基、正丁醯氧基、2-甲基丙醯氧基、正戊醯氧基、2,2-二甲基丙醯氧基、正己醯氧基、正庚醯氧基、正辛醯氧基、正壬醯氧基、正癸醯氧基、正十一碳醯氧基、正十二碳醯氧基、正十三碳醯氧基、正十四碳醯氧基、正十五碳醯氧基及正十六碳醯氧基等。When R c1 is a saturated aliphatic fluorenyl group or a saturated aliphatic fluorenyloxy group, the number of carbon atoms of the saturated aliphatic fluorenyl group or the saturated aliphatic fluorenyloxy group is preferably 2 or more and 21 or less, more preferably 2 or more. And 7 or less. Specific examples of the case where R c1 is a saturated aliphatic fluorenyl group include an ethyl fluorenyl group, a propyl fluorenyl group, a n-butyl fluorenyl group, a 2-methyl propyl fluorenyl group, a n-pentamethylene group, and a 2,2-dimethyl group. Propyl group, n-hexyl group, n-heptyl group, n-octyl group, n-decyl group, n-decyl group, n-decyl fluorenyl group, n-dodecyl fluorenyl group, n-tridecyl fluorenyl group, positive fourteen Carbon sulfhydryl, n-pentadecacarbonyl and n-hexadecanthyl. Specific examples of the case where R c1 is a saturated aliphatic decyloxy group include an ethoxycarbonyl group, a propenyloxy group, a n-butenyloxy group, a 2-methylpropenyloxy group, and a n-pentamethyleneoxy group. , 2,2-dimethylpropoxy, n-hexyloxy, n-heptyloxy, n-octyloxy, n-decyloxy, n-decyloxy, n-undecyloxy, N-dodecyloxy, n-tridecyloxy, n-tetradecyloxy, n-pentadecyloxy and n-hexadecyloxy.

於Rc1 為烷氧基羰基之情形時,烷氧基羰基之碳原子數較佳為2以上且20以下,更佳為2以上且7以下。作為Rc1 為烷氧基羰基之情形時之具體例,可列舉:甲氧基羰基、乙氧基羰基、正丙氧基羰基、異丙氧基羰基、正丁氧基羰基、異丁氧基羰基、第二丁氧基羰基、第三丁氧基羰基、正戊氧基羰基、異戊氧基羰基、第二戊氧基羰基、第三戊氧基羰基、正己氧基羰基、正庚氧基羰基、正辛氧基羰基、異辛氧基羰基、第二辛氧基羰基、第三辛氧基羰基、正壬氧基羰基、異壬氧基羰基、正癸氧基羰基及異癸氧基羰基等。When R c1 is an alkoxycarbonyl group, the number of carbon atoms of the alkoxycarbonyl group is preferably 2 or more and 20 or less, more preferably 2 or more and 7 or less. Specific examples of the case where R c1 is an alkoxycarbonyl group include a methoxycarbonyl group, an ethoxycarbonyl group, a n-propoxycarbonyl group, an isopropoxycarbonyl group, a n-butoxycarbonyl group, and an isobutoxy group. Carbonyl, second butoxycarbonyl, tert-butoxycarbonyl, n-pentyloxycarbonyl, isopentyloxycarbonyl, second pentyloxycarbonyl, third pentyloxycarbonyl, n-hexyloxycarbonyl, n-heptyloxy Carbocarbonyl, n-octyloxycarbonyl, isooctyloxycarbonyl, second octyloxycarbonyl, third octyloxycarbonyl, n-decyloxycarbonyl, isodecyloxycarbonyl, n-decyloxycarbonyl and isodecyloxy Alkylcarbonyl and the like.

於Rc1 為苯基烷基之情形時,苯基烷基之碳原子數較佳為7以上且20以下,更佳為7以上且10以下。又,於Rc1 為萘基烷基之情形時,萘基烷基之碳原子數較佳為11以上且20以下,更佳為11以上且14以下。作為Rc1 為苯基烷基之情形時之具體例,可列舉:苄基、2-苯基乙基、3-苯基丙基及4-苯基丁基。作為Rc1 為萘基烷基之情形時之具體例,可列舉:α-萘基甲基、β-萘基甲基、2-(α-萘基)乙基及2-(β-萘基)乙基。於Rc1 為苯基烷基或萘基烷基之情形時,Rc1 可於苯基或萘基上進而具有取代基。When R c1 is a phenylalkyl group, the number of carbon atoms of the phenylalkyl group is preferably 7 or more and 20 or less, more preferably 7 or more and 10 or less. Further, when R c1 is a naphthylalkyl group, the number of carbon atoms of the naphthylalkyl group is preferably 11 or more and 20 or less, more preferably 11 or more and 14 or less. Specific examples of the case where R c1 is a phenylalkyl group include a benzyl group, a 2-phenylethyl group, a 3-phenylpropyl group, and a 4-phenylbutyl group. Specific examples of the case where R c1 is a naphthylalkyl group include α-naphthylmethyl group, β-naphthylmethyl group, 2-(α-naphthyl)ethyl group, and 2-(β-naphthyl group). ) Ethyl. In the case where R c1 is a phenylalkyl group or a naphthylalkyl group, R c1 may further have a substituent on the phenyl or naphthyl group.

於Rc1 為雜環基之情形時,雜環基為含有1個以上之N、S或O之5員或6員之單環,或者為該單環彼此或該單環與苯環縮合而成之雜環基。於雜環基為縮合環之情形時,構成該縮合環之環數至多為3。雜環基可為芳香族基(雜芳基),亦可為非芳香族基。作為構成該雜環基之雜環,可列舉:呋喃、噻吩、吡咯、㗁唑、異㗁唑、噻唑、噻二唑、異噻唑、咪唑、吡唑、三唑、吡啶、吡𠯤、嘧啶、嗒𠯤、苯并呋喃、苯并噻吩、吲哚、異吲哚、吲、苯并咪唑、苯并三唑、苯并㗁唑、苯并噻唑、咔唑、嘌呤、喹啉、異喹啉、喹唑啉、酞𠯤、㖕啉、喹㗁啉、哌啶、哌𠯤、𠰌啉、哌啶、四氫吡喃及四氫呋喃等。於Rc1 為雜環基之情形時,雜環基可進而具有取代基。In the case where R c1 is a heterocyclic group, the heterocyclic group is a monocyclic ring containing 5 or more members of N, S or O, or the monocyclic ring or the monocyclic ring is condensed with the benzene ring. A heterocyclic group. In the case where the heterocyclic group is a condensed ring, the number of rings constituting the condensed ring is at most 3. The heterocyclic group may be an aromatic group (heteroaryl group) or a non-aromatic group. Examples of the heterocyclic ring constituting the heterocyclic group include furan, thiophene, pyrrole, oxazole, isoxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyridinium, pyrimidine, and the like. Bismuth, benzofuran, benzothiophene, anthracene, isoindole, anthracene Benzimidazole, benzotriazole, benzoxazole, benzothiazole, carbazole, anthracene, quinoline, isoquinoline, quinazoline, indole, porphyrin, quinoxaline, piperidine, piperidine , porphyrin, piperidine, tetrahydropyran and tetrahydrofuran. In the case where R c1 is a heterocyclic group, the heterocyclic group may further have a substituent.

於Rc1 為雜環基羰基之情形時,雜環基羰基中所含之雜環基與Rc1 為雜環基之情形相同。In the case where R c1 is a heterocyclic carbonyl group, the heterocyclic group contained in the heterocyclic carbonyl group is the same as the case where R c1 is a heterocyclic group.

於Rc1 為經1個或2個有機基取代之胺基之情形時,有機基之較佳例可列舉:碳原子數1以上且20以下之烷基、碳原子數3以上且10以下之環烷基、碳原子數2以上且21以下之飽和脂肪族醯基、可具有取代基之苯基、可具有取代基之苯甲醯基、可具有取代基之碳原子數7以上且20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘甲醯基、可具有取代基之碳原子數11以上且20以下之萘基烷基、及雜環基等。該等較佳有機基之具體例與Rc1 相同。作為經1個或2個有機基取代之胺基之具體例,可列舉:甲胺基、乙胺基、二乙胺基、正丙胺基、二正丙胺基、異丙胺基、正丁胺基、二正丁胺基、正戊胺基、正己胺基、正庚胺基、正辛胺基、正壬胺基、正癸胺基、苯胺基、萘胺基、乙醯胺基、丙醯胺基、正丁醯胺基、正戊醯胺基、正己醯胺基、正庚醯胺基、正辛醯胺基、正癸醯胺基、苯甲醯胺基、α-萘甲醯胺基及β-萘甲醯胺基等。In the case where R c1 is an amine group substituted with one or two organic groups, examples of the organic group include an alkyl group having 1 or more and 20 or less carbon atoms, and a carbon number of 3 or more and 10 or less. a cycloalkyl group, a saturated aliphatic fluorenyl group having 2 or more and 21 or less carbon atoms, a phenyl group which may have a substituent, a benzamyl group which may have a substituent, and a carbon atom having a substituent of 7 or more and 20 or less A phenylalkyl group, a naphthyl group which may have a substituent, a naphthylmethyl group which may have a substituent, a naphthylalkyl group having 11 or more and 20 or less carbon atoms which may have a substituent, and a heterocyclic group. Specific examples of such preferred organic groups are the same as R c1 . Specific examples of the amine group substituted with one or two organic groups include a methylamino group, an ethylamino group, a diethylamino group, a n-propylamino group, a di-n-propylamino group, an isopropylamine group, and a n-butylamino group. , di-n-butylamino, n-pentylamino, n-hexylamino, n-heptylamino, n-octylamino, n-nonylamino, n-nonylamino, anilino, naphthylamino, acetaminophen, propionium Amino, n-butylammonium, n-pentamethylene, n-hexylamine, n-heptylamino, n-octylamine, n-nonylamine, benzamidine, alpha-naphthylamine Base and β-naphthylamino group and the like.

作為Rc1 中所含之苯基、萘基及雜環基進而具有取代基之情形時之取代基,可列舉:碳原子數1以上且6以下之烷基、碳原子數1以上且6以下之烷氧基、碳原子數2以上且7以下之飽和脂肪族醯基、碳原子數2以上且7以下之烷氧基羰基、碳原子數2以上且7以下之飽和脂肪族醯氧基、具有碳原子數1以上且6以下之烷基之單烷基胺基、具有碳原子數1以上且6以下之烷基之二烷基胺基、𠰌啉-1-基、哌𠯤-1-基、鹵素、硝基及氰基等。於Rc1 中所含之苯基、萘基及雜環基進而具有取代基之情形時,該取代基之個數於不損害本發明之目的之範圍內無限定,較佳為1以上且4以下。於Rc1 中所含之苯基、萘基及雜環基具有複數個取代基之情形時,複數個取代基可相同,亦可不同。Examples of the substituent in the case where the phenyl group, the naphthyl group, and the heterocyclic group contained in the R c1 further have a substituent include an alkyl group having 1 or more and 6 or less carbon atoms, and a carbon number of 1 or more and 6 or less. Alkoxy group, a saturated aliphatic fluorenyl group having 2 or more and 7 or less carbon atoms, an alkoxycarbonyl group having 2 or more and 7 or less carbon atoms, a saturated aliphatic decyloxy group having 2 or more and 7 or less carbon atoms, a monoalkylamino group having an alkyl group having 1 or more and 6 or less carbon atoms, a dialkylamino group having an alkyl group having 1 or more and 6 or less, porphyrin-1-yl, and piperidin-1- Base, halogen, nitro and cyano groups. In the case where the phenyl group, the naphthyl group and the heterocyclic group contained in R c1 further have a substituent, the number of the substituents is not limited insofar as it does not impair the object of the present invention, and is preferably 1 or more and 4 the following. When the phenyl group, the naphthyl group and the heterocyclic group contained in R c1 have a plurality of substituents, the plurality of substituents may be the same or different.

以上說明之基之中,作為Rc1 ,若為硝基或Rc6 -CO-所表示之基,則存在感度提高之傾向,較佳。Rc6 於不損害本發明之目的之範圍內無特別限定,可自各種有機基選擇。至於作為Rc6 之較佳基之例,可列舉:碳原子數1以上且20以下之烷基、可具有取代基之苯基、可具有取代基之萘基及可具有取代基之雜環基。作為Rc6 ,該等基之中,尤佳為2-甲基苯基、噻吩-2-基及α-萘基。Among the above-mentioned examples, R c1 is a group represented by a nitro group or R c6 -CO-, and the sensitivity tends to be improved, which is preferable. R c6 is not particularly limited insofar as it does not impair the object of the present invention, and can be selected from various organic groups. Examples of the preferred group of R c6 include an alkyl group having 1 or more and 20 or less carbon atoms, a phenyl group which may have a substituent, a naphthyl group which may have a substituent, and a heterocyclic group which may have a substituent. . As R c6 , among these groups, 2-methylphenyl, thiophen-2-yl and α-naphthyl are particularly preferable.

式(c3a)中,Rc2 及Rc3 分別為可具有取代基之鏈狀烷基、可具有取代基之鏈狀烷氧基、可具有取代基之環狀有機基或氫原子。Rc2 與Rc3 可相互鍵結而形成環。該等基之中,作為Rc2 及Rc3 ,較佳為可具有取代基之鏈狀烷基。於Rc2 及Rc3 為可具有取代基之鏈狀烷基之情形時,鏈狀烷基可為直鏈烷基,亦可為支鏈烷基。In the formula (c3a), R c2 and R c3 are each a chain alkyl group which may have a substituent, a chain alkoxy group which may have a substituent, a cyclic organic group which may have a substituent, or a hydrogen atom. R c2 and R c3 may be bonded to each other to form a ring. Among these groups, R c2 and R c3 are preferably a chain alkyl group which may have a substituent. In the case where R c2 and R c3 are a chain alkyl group which may have a substituent, the chain alkyl group may be a linear alkyl group or a branched alkyl group.

於Rc2 及Rc3 為不具有取代基之鏈狀烷基之情形時,鏈狀烷基之碳原子數較佳為1以上且20以下,更佳為1以上且10以下,尤佳為1以上且6以下。作為Rc2 及Rc3 為鏈狀烷基之情形時之具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、異戊基、第二戊基、第三戊基、正己基、正庚基、正辛基、異辛基、第二辛基、第三辛基、正壬基、異壬基、正癸基及異癸基等。又,於Rc2 及Rc3 為烷基之情形時,烷基可於碳鏈中含有醚鍵(-O-)。作為於碳鏈中具有醚鍵之烷基之例,可列舉:甲氧基乙基、乙氧基乙基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙氧基乙氧基乙基及甲氧基丙基等。When R c2 and R c3 are a chain alkyl group having no substituent, the number of carbon atoms of the chain alkyl group is preferably 1 or more and 20 or less, more preferably 1 or more and 10 or less, and particularly preferably 1 Above and below 6. Specific examples of the case where R c2 and R c3 are a chain alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, second butyl group, and third group. Butyl, n-pentyl, isopentyl, second pentyl, third pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, second octyl, third octyl, n-decyl, Isoindolyl, n-decyl and isodecyl. Further, when R c2 and R c3 are an alkyl group, the alkyl group may have an ether bond (-O-) in the carbon chain. Examples of the alkyl group having an ether bond in the carbon chain include a methoxyethyl group, an ethoxyethyl group, a methoxyethoxyethyl group, an ethoxyethoxyethyl group, and a propoxy group. Ethoxyethyl and methoxypropyl and the like.

於Rc2 及Rc3 為具有取代基之鏈狀烷基之情形時,鏈狀烷基之碳原子數較佳為1以上且20以下,更佳為1以上且10以下,尤佳為1以上且6以下。於該情形時,取代基之碳原子數不包括於鏈狀烷基之碳原子數中。具有取代基之鏈狀烷基較佳為直鏈狀。
烷基可具有之取代基於不損害本發明之目的之範圍內無特別限定。作為取代基之較佳例,可列舉:氰基、鹵素原子、環狀有機基及烷氧基羰基。作為鹵素原子,可列舉:氟原子、氯原子、溴原子、碘原子。該等之中,較佳為氟原子、氯原子、溴原子。作為環狀有機基,可列舉:環烷基、芳香族烴基、雜環基。作為環烷基之具體例,與Rc1 為環烷基之情形時之較佳例相同。作為芳香族烴基之具體例,可列舉:苯基、萘基、聯苯基、蒽基及菲基等。作為雜環基之具體例,與Rc1 為雜環基之情形時之較佳例相同。於Rc1 為烷氧基羰基之情形時,烷氧基羰基中所含之烷氧基可為直鏈狀,亦可為支鏈狀,較佳為直鏈狀。烷氧基羰基中所含之烷氧基之碳原子數較佳為1以上且10以下,更佳為1以上且6以下。
When R c2 and R c3 are a chain-like alkyl group having a substituent, the number of carbon atoms of the chain alkyl group is preferably 1 or more and 20 or less, more preferably 1 or more and 10 or less, and still more preferably 1 or more. And 6 or less. In this case, the number of carbon atoms of the substituent is not included in the number of carbon atoms of the chain alkyl group. The chain alkyl group having a substituent is preferably linear.
The alkyl group may have a substitution without particular limitation insofar as it does not impair the object of the present invention. Preferable examples of the substituent include a cyano group, a halogen atom, a cyclic organic group, and an alkoxycarbonyl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Among these, a fluorine atom, a chlorine atom, and a bromine atom are preferable. Examples of the cyclic organic group include a cycloalkyl group, an aromatic hydrocarbon group, and a heterocyclic group. Specific examples of the cycloalkyl group are the same as those in the case where R c1 is a cycloalkyl group. Specific examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthracenyl group, and a phenanthryl group. Specific examples of the heterocyclic group are the same as those in the case where R c1 is a heterocyclic group. When R c1 is an alkoxycarbonyl group, the alkoxy group contained in the alkoxycarbonyl group may be linear or branched, and preferably linear. The number of carbon atoms of the alkoxy group contained in the alkoxycarbonyl group is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less.

於鏈狀烷基具有取代基之情形時,取代基之個數並無特別限定。較佳之取代基個數根據鏈狀烷基之碳原子數而改變。取代基之個數典型的為1以上且20以下,較佳為1以上且10以下,更佳為1以上且6以下。In the case where the chain alkyl group has a substituent, the number of the substituents is not particularly limited. The number of preferred substituents varies depending on the number of carbon atoms of the chain alkyl group. The number of the substituents is typically 1 or more and 20 or less, preferably 1 or more and 10 or less, and more preferably 1 or more and 6 or less.

於Rc2 及Rc3 為不具有取代基之鏈狀烷氧基之情形時,鏈狀烷氧基之碳原子數較佳為1以上且20以下,更佳為1以上且10以下,尤佳為1以上且6以下。作為Rc2 及Rc3 為鏈狀烷氧基之情形時之具體例,可列舉:甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、第二丁氧基、第三丁氧基、正戊氧基、異戊氧基、第二戊氧基、第三戊氧基、正己氧基、正庚氧基、正辛氧基、異辛氧基、第二辛氧基、第三辛氧基、正壬氧基、異壬氧基、正癸氧基及異癸氧基等。又,於Rc2 及Rc3 為烷氧基之情形時,烷氧基可於碳鏈中含有醚鍵(-O-)。作為於碳鏈中具有醚鍵之烷氧基之例,可列舉:甲氧基乙氧基、乙氧基乙氧基、甲氧基乙氧基乙氧基、乙氧基乙氧基乙氧基、丙氧基乙氧基乙氧基及甲氧基丙氧基等。
於Rc2 及Rc3 為具有取代基之鏈狀烷氧基之情形時,烷氧基可具有之取代基與Rc2 及Rc3 為鏈狀烷基之情形相同。
When R c2 and R c3 are a chain alkoxy group having no substituent, the number of carbon atoms of the chain alkoxy group is preferably 1 or more and 20 or less, more preferably 1 or more and 10 or less, and particularly preferably It is 1 or more and 6 or less. Specific examples of the case where R c2 and R c3 are a chain alkoxy group include a methoxy group, an ethoxy group, a n-propoxy group, an isopropoxy group, a n-butoxy group, and an isobutoxy group. Second butoxy, n-butoxy, n-pentyloxy, isopentyloxy, second pentyloxy, third pentyloxy, n-hexyloxy, n-heptyloxy, n-octyloxy, isooctyl An oxy group, a second octyloxy group, a third octyloxy group, a n-decyloxy group, an isodecyloxy group, a n-decyloxy group, an isodecyloxy group or the like. Further, when R c2 and R c3 are alkoxy groups, the alkoxy group may have an ether bond (-O-) in the carbon chain. Examples of the alkoxy group having an ether bond in the carbon chain include a methoxyethoxy group, an ethoxyethoxy group, a methoxyethoxyethoxy group, and an ethoxyethoxyethoxy group. Base, propoxyethoxyethoxy and methoxypropoxy groups, and the like.
In the case where R c2 and R c3 are a chain alkoxy group having a substituent, the alkoxy group may have the same substituent as in the case where R c2 and R c3 are a chain alkyl group.

於Rc2 及Rc3 為環狀有機基之情形時,環狀有機基可為脂環式基,亦可為芳香族基。作為環狀有機基,可列舉:脂肪族環狀烴基、芳香族烴基、雜環基。於Rc2 及Rc3 為環狀有機基之情形時,環狀有機基可具有之取代基與Rc2 及Rc3 為鏈狀烷基之情形相同。When R c2 and R c3 are a cyclic organic group, the cyclic organic group may be an alicyclic group or an aromatic group. Examples of the cyclic organic group include an aliphatic cyclic hydrocarbon group, an aromatic hydrocarbon group, and a heterocyclic group. In the case where R c2 and R c3 are a cyclic organic group, the cyclic organic group may have the same substituent as in the case where R c2 and R c3 are a chain alkyl group.

於Rc2 及Rc3 為芳香族烴基之情形時,芳香族烴基較佳為苯基、或複數個苯環經由碳-碳鍵而鍵結形成之基、或複數個苯環縮合形成之基。於芳香族烴基為苯基或複數個苯環鍵結或縮合而形成之基之情形時,芳香族烴基中所含之苯環之環數並無特別限定,較佳為3以下,更佳為2以下,尤佳為1。作為芳香族烴基之較佳具體例,可列舉:苯基、萘基、聯苯基、蒽基及菲基等。When R c2 and R c3 are an aromatic hydrocarbon group, the aromatic hydrocarbon group is preferably a phenyl group, a group in which a plurality of benzene rings are bonded via a carbon-carbon bond, or a group in which a plurality of benzene rings are condensed. In the case where the aromatic hydrocarbon group is a group in which a phenyl group or a plurality of benzene rings are bonded or condensed, the number of rings of the benzene ring contained in the aromatic hydrocarbon group is not particularly limited, but is preferably 3 or less, more preferably 2 or less, especially preferably 1. Preferable specific examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthracenyl group, and a phenanthryl group.

於Rc2 及Rc3 為脂肪族環狀烴基之情形時,脂肪族環狀烴基可為單環式,亦可為多環式。脂肪族環狀烴基之碳原子數並無特別限定,較佳為3以上且20以下,更佳為3以上且10以下。作為單環式之環狀烴基之例,可列舉:環丙基、環丁基、環戊基、環己基、環庚基、環辛基、降𦯉基、異𦯉基、三環壬基、三環癸基、四環十二烷基及金剛烷基等。In the case where R c2 and R c3 are aliphatic cyclic hydrocarbon groups, the aliphatic cyclic hydrocarbon group may be monocyclic or polycyclic. The number of carbon atoms of the aliphatic cyclic hydrocarbon group is not particularly limited, but is preferably 3 or more and 20 or less, and more preferably 3 or more and 10 or less. Examples of the monocyclic cyclic hydrocarbon group include cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, norbornyl, isodecyl, tricyclodecyl, Tricyclic fluorenyl, tetracyclododecyl and adamantyl.

於Rc2 及Rc3 為雜環基之情形時,雜環基為含有1個以上之N、S或O之5員或6員之單環,或者為該單環彼此或該單環與苯環縮合而成之雜環基。於雜環基為縮合環之情形時,構成該縮合環之環數至多為3。雜環基可為芳香族基(雜芳基),亦可為非芳香族基。作為構成該雜環基之雜環,可列舉:呋喃、噻吩、吡咯、㗁唑、異㗁唑、噻唑、噻二唑、異噻唑、咪唑、吡唑、三唑、吡啶、吡𠯤、嘧啶、嗒𠯤、苯并呋喃、苯并噻吩、吲哚、異吲哚、吲、苯并咪唑、苯并三唑、苯并㗁唑、苯并噻唑、咔唑、嘌呤、喹啉、異喹啉、喹唑啉、酞𠯤、㖕啉、喹㗁啉、哌啶、哌𠯤、𠰌啉、哌啶、四氫吡喃及四氫呋喃等。In the case where R c2 and R c3 are heterocyclic groups, the heterocyclic group is a single ring of 5 or 6 members containing 1 or more of N, S or O, or the monocyclic ring or the monocyclic ring and benzene. A heterocyclic group formed by condensation of a ring. In the case where the heterocyclic group is a condensed ring, the number of rings constituting the condensed ring is at most 3. The heterocyclic group may be an aromatic group (heteroaryl group) or a non-aromatic group. Examples of the heterocyclic ring constituting the heterocyclic group include furan, thiophene, pyrrole, oxazole, isoxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyridinium, pyrimidine, and the like. Bismuth, benzofuran, benzothiophene, anthracene, isoindole, anthracene Benzimidazole, benzotriazole, benzoxazole, benzothiazole, carbazole, anthracene, quinoline, isoquinoline, quinazoline, indole, porphyrin, quinoxaline, piperidine, piperidine , porphyrin, piperidine, tetrahydropyran and tetrahydrofuran.

Rc2 及Rc3 可相互鍵結而形成環。包含Rc2 及Rc3 形成之環之基較佳為亞環烷基。於Rc2 及Rc3 鍵結形成亞環烷基之情形時,構成亞環烷基之環較佳為5員環~6員環,更佳為5員環。R c2 and R c3 may be bonded to each other to form a ring. The group comprising a ring formed by R c2 and R c3 is preferably a cycloalkylene group. In the case where R c2 and R c3 are bonded to form a cycloalkylene group, the ring constituting the cycloalkylene group is preferably a 5-membered ring to a 6-membered ring, and more preferably a 5-membered ring.

於Rc2 及Rc3 鍵結形成之基為亞環烷基之情形時,亞環烷基可與1個以上之其他環縮合。作為可與亞環烷基縮合之環之例,可列舉:苯環、萘環、環丁烷環、環戊烷環、環己烷環、環庚烷環、環辛烷環、呋喃環、噻吩環、吡咯環、吡啶環、吡𠯤環及嘧啶環等。In the case where the group formed by the bonding of R c2 and R c3 is a cycloalkylene group, the cycloalkylene group may be condensed with one or more other rings. Examples of the ring condensable with the cycloalkylene group include a benzene ring, a naphthalene ring, a cyclobutane ring, a cyclopentane ring, a cyclohexane ring, a cycloheptane ring, a cyclooctane ring, and a furan ring. A thiophene ring, a pyrrole ring, a pyridine ring, a pyridinium ring, and a pyrimidine ring.

作為以上說明之Rc2 及Rc3 中之較佳基之例,可列舉:式-A1 -A2 所表示之基。式中,A1 為直鏈伸烷基。A2 為烷氧基、氰基、鹵素原子、鹵化烷基、環狀有機基或烷氧基羰基。Examples of the preferred groups of R c2 and R c3 described above include the groups represented by the formula -A 1 -A 2 . In the formula, A 1 is a linear alkylene group. A 2 is an alkoxy group, a cyano group, a halogen atom, a halogenated alkyl group, a cyclic organic group or an alkoxycarbonyl group.

A1 之直鏈伸烷基之碳原子數較佳為1以上且10以下,更佳為1以上且6以下。於A2 為烷氧基之情形時,烷氧基可為直鏈狀,亦可為支鏈狀,較佳為直鏈狀。烷氧基之碳原子數較佳為1以上且10以下,更佳為1以上且6以下。於A2 為鹵素原子之情形時,較佳為氟原子、氯原子、溴原子、碘原子,更佳為氟原子、氯原子、溴原子。於A2 為鹵化烷基之情形時,鹵化烷基中所含之鹵素原子較佳為氟原子、氯原子、溴原子、碘原子,更佳為氟原子、氯原子、溴原子。鹵化烷基可為直鏈狀,亦可為支鏈狀,較佳為直鏈狀。於A2 為環狀有機基之情形時,環狀有機基之例與Rc2 及Rc3 作為取代基而具有之環狀有機基相同。於A2 為烷氧基羰基之情形時,烷氧基羰基之例與Rc2 及Rc3 作為取代基而具有之烷氧基羰基相同。The number of carbon atoms of the linear alkyl group of A 1 is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less. In the case where A 2 is an alkoxy group, the alkoxy group may be linear or branched, and is preferably linear. The number of carbon atoms of the alkoxy group is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less. When A 2 is a halogen atom, a fluorine atom, a chlorine atom, a bromine atom or an iodine atom is preferred, and a fluorine atom, a chlorine atom or a bromine atom is more preferred. In the case where A 2 is a halogenated alkyl group, the halogen atom contained in the halogenated alkyl group is preferably a fluorine atom, a chlorine atom, a bromine atom or an iodine atom, more preferably a fluorine atom, a chlorine atom or a bromine atom. The halogenated alkyl group may be linear or branched, and is preferably linear. In the case where A 2 is a cyclic organic group, the cyclic organic group is the same as the cyclic organic group which R c2 and R c3 have as a substituent. In the case where A 2 is an alkoxycarbonyl group, the alkoxycarbonyl group is the same as the alkoxycarbonyl group which R c2 and R c3 have as a substituent.

作為Rc2 及Rc3 之較佳具體例,可列舉:乙基、正丙基、正丁基、正己基、正庚基及正辛基等烷基;2-甲氧基乙基、3-甲氧基正丙基、4-甲氧基正丁基、5-甲氧基正戊基、6-甲氧基正己基、7-甲氧基正庚基、8-甲氧基正辛基、2-乙氧基乙基、3-乙氧基正丙基、4-乙氧基正丁基、5-乙氧基正戊基、6-乙氧基正己基、7-乙氧基正庚基及8-乙氧基正辛基等烷氧基烷基;2-氰基乙基、3-氰基正丙基、4-氰基正丁基、5-氰基正戊基、6-氰基正己基、7-氰基正庚基及8-氰基正辛基等氰基烷基;2-苯基乙基、3-苯基正丙基、4-苯基正丁基、5-苯基正戊基、6-苯基正己基、7-苯基正庚基及8-苯基正辛基等苯基烷基;2-環己基乙基、3-環己基正丙基、4-環己基正丁基、5-環己基正戊基、6-環己基正己基、7-環己基正庚基、8-環己基正辛基、2-環戊基乙基、3-環戊基正丙基、4-環戊基正丁基、5-環戊基正戊基、6-環戊基正己基、7-環戊基正庚基及8-環戊基正辛基等環烷基烷基;2-甲氧基羰基乙基、3-甲氧基羰基正丙基、4-甲氧基羰基正丁基、5-甲氧基羰基正戊基、6-甲氧基羰基正己基、7-甲氧基羰基正庚基、8-甲氧基羰基正辛基、2-乙氧基羰基乙基、3-乙氧基羰基正丙基、4-乙氧基羰基正丁基、5-乙氧基羰基正戊基、6-乙氧基羰基正己基、7-乙氧基羰基正庚基及8-乙氧基羰基正辛基等烷氧基羰基烷基;2-氯乙基、3-氯正丙基、4-氯正丁基、5-氯正戊基、6-氯正己基、7-氯正庚基、8-氯正辛基、2-溴乙基、3-溴正丙基、4-溴正丁基、5-溴正戊基、6-溴正己基、7-溴正庚基、8-溴正辛基、3,3,3-三氟丙基及3,3,4,4,5,5,5-七氟正戊基等鹵化烷基。Preferred examples of R c2 and R c3 include an alkyl group such as ethyl, n-propyl, n-butyl, n-hexyl, n-heptyl and n-octyl; 2-methoxyethyl, 3- Methoxy-n-propyl, 4-methoxy-n-butyl, 5-methoxy-n-pentyl, 6-methoxy-n-hexyl, 7-methoxy-n-heptyl, 8-methoxy-n-octyl , 2-ethoxyethyl, 3-ethoxy-n-propyl, 4-ethoxy-n-butyl, 5-ethoxy-n-pentyl, 6-ethoxy-n-hexyl, 7-ethoxy Alkoxyalkyl group such as heptyl and 8-ethoxy-n-octyl; 2-cyanoethyl, 3-cyano-n-propyl, 4-cyano-n-butyl, 5-cyano-n-pentyl, 6 a cyanoalkyl group such as cyano n-hexyl, 7-cyano-n-heptyl or 8-cyano-n-octyl; 2-phenylethyl, 3-phenyl-n-propyl, 4-phenyl-n-butyl, Phenylalkyl such as 5-phenyl-n-pentyl, 6-phenyl-n-hexyl, 7-phenyl-n-heptyl and 8-phenyl-n-octyl; 2-cyclohexylethyl, 3-cyclohexyl-n-propyl , 4-cyclohexyl n-butyl, 5-cyclohexyl n-pentyl, 6-cyclohexyl n-hexyl, 7-cyclohexyl n-heptyl, 8-cyclohexyl n-octyl, 2-cyclopentylethyl, 3- Cyclopentyl n-propyl, 4-cyclopentyl n-butyl, 5-cyclopentyl a cycloalkylalkyl group such as n-pentyl, 6-cyclopentyl n-hexyl, 7-cyclopentyl n-heptyl and 8-cyclopentyl n-octyl; 2-methoxycarbonylethyl, 3-methoxy Carbonyl n-propyl, 4-methoxycarbonyl n-butyl, 5-methoxycarbonyl n-pentyl, 6-methoxycarbonyl n-hexyl, 7-methoxycarbonyl n-heptyl, 8-methoxycarbonyl n-Octyl, 2-ethoxycarbonylethyl, 3-ethoxycarbonyl-n-propyl, 4-ethoxycarbonyl-n-butyl, 5-ethoxycarbonyl-n-pentyl, 6-ethoxycarbonyl-n-hexane Alkoxycarbonylalkyl such as 7-ethoxycarbonyl-n-heptyl and 8-ethoxycarbonyl-n-octyl; 2-chloroethyl, 3-chloro-n-propyl, 4-chloro-n-butyl, 5 -chloro-n-pentyl, 6-chloro-n-hexyl, 7-chloro-n-heptyl, 8-chloro-n-octyl, 2-bromoethyl, 3-bromo-n-propyl, 4-bromo-n-butyl, 5-bromo-positive Pentyl, 6-bromo-n-hexyl, 7-bromo-n-heptyl, 8-bromo-n-octyl, 3,3,3-trifluoropropyl and 3,3,4,4,5,5,5-heptafluoro A halogenated alkyl group such as n-pentyl.

作為Rc2 及Rc3 ,上述中較佳之基為:乙基、正丙基、正丁基、正戊基、2-甲氧基乙基、2-氰基乙基、2-苯基乙基、2-環己基乙基、2-甲氧基羰基乙基、2-氯乙基、2-溴乙基、3,3,3-三氟丙基及3,3,4,4,5,5,5-七氟正戊基。As R c2 and R c3 , preferred ones of the above are: ethyl, n-propyl, n-butyl, n-pentyl, 2-methoxyethyl, 2-cyanoethyl, 2-phenylethyl , 2-cyclohexylethyl, 2-methoxycarbonylethyl, 2-chloroethyl, 2-bromoethyl, 3,3,3-trifluoropropyl and 3,3,4,4,5, 5,5-heptafluoro-n-pentyl.

作為Rc4 之較佳有機基之例,與Rc1 同樣地,可列舉:烷基、烷氧基、環烷基、環烷氧基、飽和脂肪族醯基、烷氧基羰基、飽和脂肪族醯氧基、可具有取代基之苯基、可具有取代基之苯氧基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之苯甲醯氧基、可具有取代基之苯基烷基、可具有取代基之萘基、可具有取代基之萘氧基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之萘甲醯氧基、可具有取代基之萘基烷基、可具有取代基之雜環基、可具有取代基之雜環基羰基、經1個或2個有機基取代之胺基、𠰌啉-1-基及哌𠯤-1-基等。該等基之具體例與關於Rc1 所說明之基相同。又,作為Rc4 ,環烷基烷基、可於芳香環上具有取代基之苯氧基烷基、可於芳香環上具有取代基之苯硫基烷基亦較佳。苯氧基烷基及苯硫基烷基可具有之取代基與Rc1 中所含之苯基可具有之取代基相同。Examples of preferred organic groups for R c4 include, in the same manner as R c1 : an alkyl group, an alkoxy group, a cycloalkyl group, a cycloalkoxy group, a saturated aliphatic fluorenyl group, an alkoxycarbonyl group, or a saturated aliphatic group. a decyloxy group, a phenyl group which may have a substituent, a phenoxy group which may have a substituent, a benzamyl group which may have a substituent, a phenoxycarbonyl group which may have a substituent, a benzamidine which may have a substituent a phenylalkyl group which may have a substituent, a naphthyl group which may have a substituent, a naphthyloxy group which may have a substituent, a naphthylmethyl group which may have a substituent, a naphthyloxycarbonyl group which may have a substituent, A naphthylmethoxycarbonyl group having a substituent, a naphthylalkyl group which may have a substituent, a heterocyclic group which may have a substituent, a heterocyclic carbonyl group which may have a substituent, an amine substituted with one or two organic groups Base, porphyrin-1-yl and piperidin-1-yl and the like. Specific examples of such groups are the same as those described for R c1 . Further, as R c4 , a cycloalkylalkyl group, a phenoxyalkyl group which may have a substituent on the aromatic ring, and a phenylthioalkyl group which may have a substituent on the aromatic ring are also preferable. The phenoxyalkyl group and the phenylthioalkyl group may have the same substituent as the substituent which the phenyl group contained in R c1 may have.

有機基之中,作為Rc4 ,較佳為烷基、環烷基、可具有取代基之苯基或環烷基烷基、可於芳香環上具有取代基之苯硫基烷基。作為烷基,較佳為碳原子數1以上且20以下之烷基,更佳為碳原子數1以上且8以下之烷基,尤佳為碳原子數1以上且4以下之烷基,最佳為甲基。可具有取代基之苯基之中,較佳為甲基苯基,更佳為2-甲基苯基。環烷基烷基中所含之環烷基之碳原子數較佳為5以上且10以下,更佳為5以上且8以下,尤佳為5或6。環烷基烷基中所含之伸烷基之碳原子數較佳為1以上且8以下,更佳為1以上且4以下,尤佳為2。環烷基烷基之中,較佳為環戊基乙基。可於芳香環上具有取代基之苯硫基烷基中所含之伸烷基之碳原子數較佳為1以上且8以下,更佳為1以上且4以下,尤佳為2。可於芳香環上具有取代基之苯硫基烷基之中,較佳為2-(4-氯苯硫基)乙基。Among the organic groups, R c4 is preferably an alkyl group, a cycloalkyl group, a phenyl group or a cycloalkylalkyl group which may have a substituent, or a phenylthioalkyl group which may have a substituent on the aromatic ring. The alkyl group is preferably an alkyl group having 1 or more and 20 or less carbon atoms, more preferably an alkyl group having 1 or more and 8 or less carbon atoms, and still more preferably an alkyl group having 1 or more and 4 or less carbon atoms. Good for methyl. Among the phenyl groups which may have a substituent, a methylphenyl group is preferred, and a 2-methylphenyl group is more preferred. The number of carbon atoms of the cycloalkyl group contained in the cycloalkylalkyl group is preferably 5 or more and 10 or less, more preferably 5 or more and 8 or less, and still more preferably 5 or 6. The number of carbon atoms of the alkylene group contained in the cycloalkylalkyl group is preferably 1 or more and 8 or less, more preferably 1 or more and 4 or less, and particularly preferably 2. Among the cycloalkylalkyl groups, a cyclopentylethyl group is preferred. The number of carbon atoms of the alkylene group contained in the phenylthioalkyl group having a substituent on the aromatic ring is preferably 1 or more and 8 or less, more preferably 1 or more and 4 or less, and still more preferably 2 or less. Among the phenylthioalkyl groups having a substituent on the aromatic ring, 2-(4-chlorophenylthio)ethyl group is preferred.

又,作為Rc4 ,-A3 -CO-O-A4 所表示之基亦較佳。A3 為2價有機基,較佳為2價烴基,較佳為伸烷基。A4 為1價有機基,較佳為1價烴基。Further, the group represented by R c4 and -A 3 -CO-OA 4 is also preferable. A 3 is a divalent organic group, preferably a divalent hydrocarbon group, preferably an alkylene group. A 4 is a monovalent organic group, preferably a monovalent hydrocarbon group.

於A3 為伸烷基之情形時,伸烷基可為直鏈狀,亦可為支鏈狀,較佳為直鏈狀。於A3 為伸烷基之情形時,伸烷基之碳原子數較佳為1以上且10以下,更佳為1以上且6以下,尤佳為1以上且4以下。In the case where A 3 is an alkylene group, the alkyl group may be linear or branched, preferably linear. When A 3 is an alkylene group, the number of carbon atoms of the alkylene group is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less, and still more preferably 1 or more and 4 or less.

作為A4 之較佳例,可列舉:碳原子數1以上且10以下之烷基、碳原子數3以上且10以下之環烷基、碳原子數4以上且10以下之環烷基烷基、碳原子數7以上且20以下之芳烷基、及碳原子數6以上且20以下之芳香族烴基。作為A4 之較佳具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、正己基、苯基、萘基、苄基、苯乙基、α-萘基甲基及β-萘基甲基等。Preferable examples of A 4 include an alkyl group having 1 or more and 10 or less carbon atoms, a cycloalkyl group having 3 or more and 10 or less carbon atoms, and a cycloalkylalkyl group having 4 or more and 10 or less carbon atoms. An aralkyl group having 7 or more and 20 or less carbon atoms, and an aromatic hydrocarbon group having 6 or more and 20 or less carbon atoms. Preferred examples of A 4 include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, second butyl group, tert-butyl group, n-pentyl group and n-hexyl group. Phenyl, naphthyl, benzyl, phenethyl, α-naphthylmethyl and β-naphthylmethyl.

作為-A3 -CO-O-A4 所表示之基之較佳具體例,可列舉:2-甲氧基羰基乙基、2-乙氧基羰基乙基、2-正丙氧基羰基乙基、2-正丁氧基羰基乙基、2-正戊氧基羰基乙基、2-正己氧基羰基乙基、2-苄氧基羰基乙基、2-苯氧基羰基乙基、3-甲氧基羰基正丙基、3-乙氧基羰基正丙基、3-正丙氧基羰基正丙基、3-正丁氧基羰基正丙基、3-正戊氧基羰基正丙基、3-正己氧基羰基正丙基、3-苄氧基羰基正丙基及3-苯氧基羰基正丙基等。Preferred examples of the group represented by -A 3 -CO-OA 4 include 2-methoxycarbonylethyl, 2-ethoxycarbonylethyl, 2-n-propoxycarbonylethyl, 2-n-Butoxycarbonylethyl, 2-n-pentyloxycarbonylethyl, 2-n-hexyloxycarbonylethyl, 2-benzyloxycarbonylethyl, 2-phenoxycarbonylethyl, 3-methyl Oxycarbonylcarbonyl n-propyl, 3-ethoxycarbonyl n-propyl, 3-n-propoxycarbonyl n-propyl, 3-n-butoxycarbonyl n-propyl, 3-n-pentyloxycarbonyl n-propyl, 3-n-hexyloxycarbonyl n-propyl, 3-benzyloxycarbonyl-n-propyl, 3-phenoxycarbonyl-n-propyl and the like.

以上,關於Rc4 進行了說明,作為Rc4 ,較佳為下述式(c3-a)或(c3-b)所表示之基。
[化48]

(式(c3-a)及(c3-b)中,Rc7 及Rc8 分別為有機基,n3為0以上且4以下之整數,於Rc7 及Rc8 存在於苯環上之鄰接位置之情形時,Rc7 與Rc8 可相互鍵結而形成環,n4為1以上且8以下之整數,n5為1以上且5以下之整數,n6為0以上且(n5+3)以下之整數,Rc9 為有機基)
As described above, R c4 is preferred, and R c4 is preferably a group represented by the following formula (c3-a) or (c3-b).
[48]

(In the formulae (c3-a) and (c3-b), R c7 and R c8 are each an organic group, and n3 is an integer of 0 or more and 4 or less, and R c7 and R c8 are present in an adjacent position on the benzene ring. In this case, R c7 and R c8 may be bonded to each other to form a ring, n4 is an integer of 1 or more and 8 or less, n5 is an integer of 1 or more and 5 or less, and n6 is an integer of 0 or more and (n5+3) or less, R c9 Organic base)

關於式(c3-a)中之Rc7 及Rc8 之有機基之例與Rc1 相同。作為Rc7 ,較佳為烷基或苯基。於Rc7 為烷基之情形時,其碳原子數較佳為1以上且10以下,更佳為1以上且5以下,尤佳為1以上且3以下,最佳為1。即,Rc7 最佳為甲基。於Rc7 與Rc8 鍵結形成環之情形時,該環可為芳香族環,亦可為脂肪族環。作為由式(c3-a)所表示且Rc7 與Rc8 形成環之基之較佳例,可列舉:萘-1-基或1,2,3,4-四氫萘-5-基等。上述式(c3-a)中,n3為0以上且4以下之整數,較佳為0或1,更佳為0。Examples of the organic group of R c7 and R c8 in the formula (c3-a) are the same as those of R c1 . As R c7 , an alkyl group or a phenyl group is preferred. When R c7 is an alkyl group, the number of carbon atoms is preferably 1 or more and 10 or less, more preferably 1 or more and 5 or less, still more preferably 1 or more and 3 or less, and most preferably 1. That is, R c7 is most preferably a methyl group. In the case where R c7 and R c8 are bonded to form a ring, the ring may be an aromatic ring or an aliphatic ring. Preferred examples of the group represented by the formula (c3-a) and in which R c7 and R c8 form a ring include naphthyl-1-yl or 1,2,3,4-tetrahydronaphthalen-5-yl. . In the above formula (c3-a), n3 is an integer of 0 or more and 4 or less, preferably 0 or 1, more preferably 0.

上述式(c3-b)中,Rc9 為有機基。作為有機基,可列舉與關於Rc1 所說明之有機基相同之基。有機基之中,較佳為烷基。烷基可為直鏈狀,亦可為支鏈狀。烷基之碳原子數較佳為1以上且10以下,更佳為1以上且5以下,尤佳為1以上且3以下。作為Rc9 ,可較佳地例示甲基、乙基、丙基、異丙基、丁基等,該等之中,更佳為甲基。In the above formula (c3-b), R c9 is an organic group. The organic group may be the same as the organic group described for R c1 . Among the organic groups, an alkyl group is preferred. The alkyl group may be linear or branched. The number of carbon atoms of the alkyl group is preferably 1 or more and 10 or less, more preferably 1 or more and 5 or less, and still more preferably 1 or more and 3 or less. As R c9 , a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group or the like is preferably exemplified, and among these, a methyl group is more preferable.

上述式(c3-b)中,n5為1以上且5以下之整數,較佳為1以上且3以下之整數,更佳為1或2。上述式(c3-b)中,n6為0以上且(n5+3)以下,較佳為0以上且3以下之整數,更佳為0以上且2以下之整數,尤佳為0。上述式(c3-b)中,n4為1以上且8以下之整數,較佳為1以上且5以下之整數,更佳為1以上且3以下之整數,尤佳為1或2。In the above formula (c3-b), n5 is an integer of 1 or more and 5 or less, preferably an integer of 1 or more and 3 or less, more preferably 1 or 2. In the above formula (c3-b), n6 is 0 or more and (n5+3) or less, preferably an integer of 0 or more and 3 or less, more preferably an integer of 0 or more and 2 or less, and particularly preferably 0. In the above formula (c3-b), n4 is an integer of 1 or more and 8 or less, preferably an integer of 1 or more and 5 or less, more preferably an integer of 1 or more and 3 or less, and particularly preferably 1 or 2.

式(c3)中,Rc5 為氫原子、可具有取代基之碳原子數1以上且20以下之脂肪族烴基、或可具有取代基之芳基。作為Rc5 為脂肪族烴基之情形時可具有之取代基,可較佳地例示苯基、萘基等。又,作為Rc1 為芳基之情形時可具有之取代基,可較佳地例示碳原子數1以上且5以下之烷基、烷氧基、鹵素原子等。In the formula (c3), R c5 is a hydrogen atom, an aliphatic hydrocarbon group having 1 or more and 20 or less carbon atoms which may have a substituent, or an aryl group which may have a substituent. The substituent which may be contained in the case where R c5 is an aliphatic hydrocarbon group is preferably a phenyl group, a naphthyl group or the like. In addition, a substituent which may be contained in the case where R c1 is an aryl group, and an alkyl group, an alkoxy group, a halogen atom or the like having 1 or more and 5 or less carbon atoms is preferably exemplified.

式(c3)中,作為Rc5 ,可較佳地例示氫原子、甲基、乙基、正丙基、異丙基、正丁基、2-環戊基乙基、2-環丁基乙基、環己基甲基、苯基、苄基、甲基苯基、萘基等,該等之中,更佳為甲基或苯基。In the formula (c3), as R c5 , a hydrogen atom, a methyl group, an ethyl group, a n-propyl group, an isopropyl group, a n-butyl group, a 2-cyclopentylethyl group or a 2-cyclobutyl group can be preferably exemplified. A group, a cyclohexylmethyl group, a phenyl group, a benzyl group, a methylphenyl group, a naphthyl group or the like, among these, a methyl group or a phenyl group is more preferable.

作為式(c3)所表示之化合物之較佳具體例,可列舉下述化合物。
[化49]
Preferred examples of the compound represented by the formula (c3) include the following compounds.
[化49]

[化50]
[化50]

[化51]
[化51]

[化52]
[化52]

[化53]
[化53]

感光性組合物中之光聚合起始劑(C)之含量於不損害本發明之目的之範圍內無特別限定。光聚合起始劑(C)之含量相對於感光性組合物之固形物成分之質量,較佳為0.1質量%以上且50質量%以下,更佳為0.3質量%以上且30質量%以下,尤佳為0.5質量%以上且20質量%以下。藉由使用該範圍內之量之光聚合起始劑(C),易於在不損害硬化物之機械特性、耐溶劑性、耐化學品性等之狀態下獲得藉由使用光聚合起始劑(C)而帶來之所期望之效果。The content of the photopolymerization initiator (C) in the photosensitive composition is not particularly limited insofar as it does not impair the object of the present invention. The content of the photopolymerization initiator (C) is preferably 0.1% by mass or more and 50% by mass or less, more preferably 0.3% by mass or more and 30% by mass or less, based on the mass of the solid content component of the photosensitive composition. It is preferably 0.5% by mass or more and 20% by mass or less. By using the photopolymerization initiator (C) in an amount within the range, it is easy to obtain a photopolymerization initiator by using a photopolymerization initiator without impairing the mechanical properties, solvent resistance, chemical resistance, and the like of the cured product ( C) the desired effect.

<遮光劑(D)>
感光性組合物含有遮光劑(D)。遮光劑(D)必須含有樹脂被覆碳黑(D1)。故而,使用感光組合物,易於獲得遮光性與絕緣性之兩者優異之硬化膜。
<Sunscreen (D)>
The photosensitive composition contains an opacifier (D). The sunscreen (D) must contain a resin-coated carbon black (D1). Therefore, by using a photosensitive composition, it is easy to obtain a cured film excellent in both light-shielding property and insulating property.

至於作為藉由樹脂而被覆之對象物之未經樹脂被覆之未被覆碳黑,並無特別限定,可使用先前用作遮光劑之各種碳黑。作為未被覆碳黑,具體可使用:煙囪黑、爐黑、熱碳黑、燈黑等公知之碳黑。
未被覆碳黑可單獨使用一種,亦可組合使用兩種以上。
The uncoated carbon black which is not coated with the resin as the object to be coated with the resin is not particularly limited, and various carbon blacks which have been conventionally used as an opacifier can be used. As the uncoated carbon black, a known carbon black such as chimney black, furnace black, hot carbon black, or lamp black can be used.
The uncoated carbon black may be used alone or in combination of two or more.

作為未被覆碳黑,實施有導入酸性基之處理之碳黑亦較佳。導入碳黑之酸性基係顯示基於布忍斯特酸之定義之酸性之官能基。作為酸性基之具體例,可列舉:羧基、磺酸基、磷酸基等。導入碳黑之酸性基可形成鹽。與酸性基形成鹽之陽離子於不損害本發明之目的之範圍內無特別限定。作為陽離子之例,可列舉:各種金屬離子、含氮化合物之陽離子、銨離子等,較佳為鈉離子、鉀離子、鋰離子等鹼金屬離子或銨離子。As the uncoated carbon black, carbon black which is subjected to a treatment for introducing an acidic group is also preferable. The acidic group introduced into the carbon black shows an acidic functional group based on the definition of Bronsted acid. Specific examples of the acidic group include a carboxyl group, a sulfonic acid group, and a phosphoric acid group. The introduction of an acidic group of carbon black forms a salt. The cation which forms a salt with an acidic group is not specifically limited in the range which does not impair the objective of this invention. Examples of the cation include various metal ions, a cation of a nitrogen-containing compound, an ammonium ion, and the like, and an alkali metal ion such as a sodium ion, a potassium ion or a lithium ion or an ammonium ion is preferable.

以上說明之實施有導入酸性基之處理之碳黑之中,就使用感光性組合物而形成之遮光性之硬化膜達成高電阻之觀點而言,較佳為具有選自由羧酸基、羧酸鹽基、磺酸基及磺酸鹽基所組成之群中之一種以上之官能基之碳黑。In the carbon black to which the acidic group is introduced, the light-shielding cured film formed by using the photosensitive composition achieves high electrical resistance, and preferably has a carboxylic acid group or a carboxylic acid. a carbon black of one or more functional groups of a group consisting of a salt group, a sulfonic acid group, and a sulfonate group.

於碳黑中導入酸性基之方法並無特別限定。作為導入酸性基之方法,可列舉例如以下方法。
1)藉由使用濃硫酸、發煙硫酸、氯磺酸等之直接取代法或使用亞硫酸鹽、亞硫酸氫鹽等之間接取代法,於碳黑中導入磺酸基的方法。
2)使具有胺基與酸性基之有機化合物與碳黑進行重氮偶合的方法。
3)藉由威廉森(Williamson)之醚化法,使具有鹵素原子與酸性基之有機化合物與具有羥基之碳黑進行反應的方法。
4)使具有鹵代羰基與藉由保護基而保護之酸性基之有機化合物與具有羥基之碳黑進行反應的方法。
5)使用具有鹵代羰基與藉由保護基而保護之酸性基之有機化合物,對碳黑進行佛瑞德-克來福特(Friedel-Crafts)反應後進行脫保護的方法。
The method of introducing an acidic group into carbon black is not particularly limited. As a method of introducing an acidic group, the following methods are mentioned, for example.
1) A method of introducing a sulfonic acid group into carbon black by a direct substitution method using concentrated sulfuric acid, fuming sulfuric acid, chlorosulfonic acid or the like or an indirect substitution method using sulfite or bisulfite.
2) A method of diazo coupling an organic compound having an amine group and an acidic group with carbon black.
3) A method of reacting an organic compound having a halogen atom and an acidic group with a carbon black having a hydroxyl group by an etherification method of Williamson (Williamson).
4) A method of reacting an organic compound having a halogenated carbonyl group with an acidic group protected by a protective group with a carbon black having a hydroxyl group.
5) A method of deprotecting a carbon black by a Friedel-Crafts reaction using an organic compound having a halogenated carbonyl group and an acidic group protected by a protective group.

該等方法之中,就酸性基之導入處理容易且安全之方面而言,較佳為方法2)。作為方法2)中所使用之具有胺基與酸性基之有機化合物,較佳為於芳香族基上鍵結有胺基與酸性基之化合物。作為此種化合物之例,可列舉:對胺基苯磺酸之類之胺基苯磺酸或4-胺基苯甲酸之類之胺基苯甲酸。Among these methods, the method 2) is preferable in terms of the ease of introduction of the acidic group and the safety. The organic compound having an amine group and an acidic group used in the method 2) is preferably a compound having an amine group and an acidic group bonded to an aromatic group. As an example of such a compound, an aminobenzoic acid such as an aminobenzenesulfonic acid or a 4-aminobenzoic acid such as an aminobenzenesulfonic acid may be mentioned.

導入至碳黑之酸性基之莫耳數於不損害本發明之目的之範圍內無特別限定。導入至碳黑之酸性基之莫耳數相對於碳黑100 g,較佳為1 mmol以上且200 mmol以下,更佳為5 mmol以上且100 mmol以下。The number of moles of the acidic group introduced into the carbon black is not particularly limited insofar as it does not impair the object of the present invention. The number of moles of the acidic group introduced into the carbon black is preferably 1 mmol or more and 200 mmol or less, more preferably 5 mmol or more and 100 mmol or less with respect to 100 g of carbon black.

藉由樹脂被覆未被覆碳黑之方法並無特別限定。
作為被覆方法,可列舉:以樹脂之溶液、含有樹脂之微粒之分散液或乳液被覆碳黑之粒子後,自被覆層去除溶劑之方法。
又,以硬化性之樹脂進行被覆之情形時,可使單體或未硬化之樹脂前驅物附著於碳黑之粒子表面後,使單體聚合,或使未硬化之樹脂前驅物硬化。於該情形時,較佳為藉由使用單體或未硬化之樹脂前驅物之溶液被覆碳黑之粒子,而使單體或未硬化之樹脂前驅物附著於碳黑之粒子表面。進而,視需要可與單體或未硬化之樹脂前驅物一同使用聚合起始劑或硬化劑。
The method of coating the uncoated carbon black with a resin is not particularly limited.
As a coating method, a method of removing a solvent from a coating layer after coating a particle of carbon black with a solution of a resin, a dispersion containing fine particles of a resin, or an emulsion is exemplified.
Further, when the resin is coated with a curable resin, the monomer or the uncured resin precursor may be adhered to the surface of the carbon black particles, and then the monomer may be polymerized or the uncured resin precursor may be cured. In this case, it is preferred to coat the particles of the carbon black by using a solution of the monomer or the uncured resin precursor to adhere the monomer or the uncured resin precursor to the surface of the carbon black particles. Further, a polymerization initiator or a hardener may be used together with a monomer or an uncured resin precursor as needed.

亦可使碳黑粒子分散於包含樹脂之基質中後,對含有碳黑粒子之樹脂進行微粉碎,從而製造樹脂被覆碳黑樹脂(D1)。After the carbon black particles are dispersed in a matrix containing a resin, the resin containing the carbon black particles is finely pulverized to produce a resin-coated carbon black resin (D1).

樹脂被覆碳黑(D1)中之樹脂被覆層之厚度較佳為0.5 nm以上且50 nm以下。The thickness of the resin coating layer in the resin-coated carbon black (D1) is preferably 0.5 nm or more and 50 nm or less.

樹脂被覆碳黑(D1)之作為乾燥粉體之電阻率即所謂粉體電阻較佳為0.5 Ω・cm以上且50 Ω・cm以下。
於使用含有此種樹脂被覆碳黑(D1)之感光性組合物之情形時,易於形成體積電阻率較高,對基板之密接性與遮光性優異之硬化膜。
The resistivity of the resin-coated carbon black (D1) as a dry powder, that is, the powder resistance is preferably 0.5 Ω·cm or more and 50 Ω·cm or less.
When a photosensitive composition containing such a resin-coated carbon black (D1) is used, it is easy to form a cured film having a high volume resistivity and excellent adhesion to a substrate and light-shielding properties.

作為可用於碳黑之被覆之樹脂之例,可列舉:酚樹脂、三聚氰胺樹脂、二甲苯樹脂、鄰苯二甲酸二烯丙酯樹脂、甘酞樹脂、環氧樹脂、烷基苯樹脂等熱硬化性樹脂,或聚苯乙烯、聚碳酸酯、聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、改性聚苯醚、聚碸、聚對伸苯基對苯二甲醯胺、聚醯胺醯亞胺、聚醯亞胺、聚胺基雙馬來醯亞胺、聚醚磺基聚伸苯基碸、聚芳酯、聚醚醚酮等熱塑性樹脂。其中,可尤佳地使用環氧樹脂。Examples of the resin which can be used for the coating of carbon black include thermosetting such as phenol resin, melamine resin, xylene resin, diallyl phthalate resin, kansui resin, epoxy resin, and alkylbenzene resin. Resin, or polystyrene, polycarbonate, polyethylene terephthalate, polybutylene terephthalate, modified polyphenylene ether, polyfluorene, polyparaphenylene terephthalamide A thermoplastic resin such as polyamidoximine, polyimine, polyamine-based bismaleimide, polyether sulfopolyphenylene fluorene, polyarylate, polyetheretherketone or the like. Among them, an epoxy resin can be preferably used.

感光性組合物之製備中所使用之樹脂被覆碳黑(D1)等遮光劑(D)之形態並無特別限定。遮光劑(D)可作為粉體使用,亦可作為分散液使用。遮光劑(D)較佳為作為分散液而用於感光性組合物之製備。
作為分散液,可使用含有兩種以上之遮光劑之分散液。又,可使用分別含有不同種類之遮光劑之兩種以上之分散液。
The form of the light-shielding agent (D) such as the resin-coated carbon black (D1) used for the preparation of the photosensitive composition is not particularly limited. The sunscreen (D) can be used as a powder or as a dispersion. The opacifier (D) is preferably used as a dispersion for the preparation of a photosensitive composition.
As the dispersion, a dispersion containing two or more kinds of light-shielding agents can be used. Further, two or more kinds of dispersion liquids each containing a different type of light-shielding agent can be used.

含有樹脂被覆碳黑(D1)之遮光劑(D)如上所述較佳為作為分散於分散介質中之分散液而使用。作為分散介質,例如可使用:丙二醇單甲醚乙酸酯、乙酸溶纖劑、乙酸3-甲氧基丁酯、乙酸甲氧基丙酯、乙酸2-甲氧基乙酯、丙酸3-乙氧基乙酯、丙二醇單甲醚丙酸酯等有機溶劑或水等。The light-shielding agent (D) containing the resin-coated carbon black (D1) is preferably used as a dispersion liquid dispersed in a dispersion medium as described above. As the dispersion medium, for example, propylene glycol monomethyl ether acetate, cellosolve acetate, 3-methoxybutyl acetate, methoxypropyl acetate, 2-methoxyethyl acetate, and propionic acid 3- can be used. An organic solvent such as ethoxyethyl ester or propylene glycol monomethyl ether propionate or water.

為使遮光劑(D)於分散液中之分散穩定化或感光性組合物中之遮光劑(D)之分散性變得良好,可於遮光劑(D)中添加分散劑。
作為分散劑,較佳為使用聚伸乙基亞胺系、胺基甲酸酯樹脂系、丙烯酸系樹脂系之高分子分散劑。遮光劑(D)含有樹脂被覆碳黑(D1),故而作為分散劑,較佳為使用可良好地用於碳黑之分散之丙烯酸系樹脂系之分散劑或胺基甲酸酯樹脂系之分散劑。
再者,亦存在自硬化膜產生起因於分散劑之腐蝕性之氣體之情形。故而,遮光劑(D)不使用分散劑地進行分散處理亦為較佳態樣之一例。
In order to stabilize the dispersion of the opacifier (D) in the dispersion or to improve the dispersibility of the opacifier (D) in the photosensitive composition, a dispersant may be added to the opacifier (D).
As the dispersing agent, a poly(ethylenimine)-based, urethane-based resin-based or acrylic-based polymer-dispersing agent is preferably used. Since the opacifier (D) contains a resin-coated carbon black (D1), it is preferable to use a dispersion of an acrylic resin-based dispersant or a urethane resin which can be suitably used for dispersion of carbon black as a dispersing agent. Agent.
Further, there is also a case where a corrosive gas due to a dispersing agent is generated from the cured film. Therefore, the sunscreen (D) is preferably a dispersion treatment without using a dispersant.

分散液之黏度並無特別限制。關於分散液之黏度,作為藉由錐-板型黏度計於25℃下之測定值,較佳為3 mPa・s以上且200 mPa・s以下。只要為該範圍之黏度,則樹脂被覆碳黑與分散介質之調配比並無限制,根據分散介質之種類而有所不同,作為一例,將樹脂被覆碳黑含量設為含有樹脂被覆碳黑之分散液整體之1質量%以上且50質量%以下。The viscosity of the dispersion is not particularly limited. The viscosity of the dispersion is preferably 3 mPa·s or more and 200 mPa·s or less as a value measured at 25 ° C by a cone-plate type viscometer. The blending ratio of the resin-coated carbon black to the dispersion medium is not limited as long as it is the viscosity in the range, and varies depending on the type of the dispersion medium. As an example, the resin-coated carbon black content is dispersed by containing the resin-coated carbon black. 1% by mass or more and 50% by mass or less of the entire liquid.

分散液中之遮光劑(D)之粒徑以分散平均粒徑計,較佳為80 nm以上且300 nm以下。分散平均粒徑可使用雷射繞射式之粒度分佈系統測定。The particle diameter of the opacifier (D) in the dispersion is preferably 80 nm or more and 300 nm or less in terms of the dispersed average particle diameter. The dispersed average particle size can be measured using a laser diffraction type particle size distribution system.

於感光性組合物含有樹脂被覆碳黑(D1)作為遮光劑(D)之情形時,可使用感光性組合物形成體積電阻率較高之硬化膜。故而,避免碳黑之增量所導致之硬化膜之絕緣性之顯著下降,並且易於形成單位光學密度較高之硬化膜。When the photosensitive composition contains the resin-coated carbon black (D1) as the light-shielding agent (D), the photosensitive composition can be used to form a cured film having a high volume resistivity. Therefore, the insulation of the cured film caused by the increase in carbon black is prevented from being significantly lowered, and the cured film having a high unit optical density is easily formed.

另一方面,通常,於使用感光性組合物形成單位光學密度較高之硬化膜之情形時,對包含感光性組合物之塗佈膜曝光時,塗佈膜之深部之硬化容易變得不充分。然而,藉由使感光性組合物含有上述肟酯化合物(C1)作為光聚合起始劑(C),而易於使塗佈膜之深部充分硬化,易於形成與基板之密接性良好之硬化膜。其同時亦具有使包含感光性組合物硬化物之黑矩陣圖案之截面為正錐之效果,使用感光性組合物之硬化物構成液晶顯示面板或液晶顯示裝置時,可減少圖案端面之滲光(下文詳述)。
又,若塗佈膜之深部充分硬化,則高溫高濕高壓環境下之硬化膜之耐久性得以改善,即使硬化膜暴露於此種嚴酷之環境下,水亦難以浸入至硬化膜之內部,且硬化膜對基板之密接性或體積電阻率(較高之絕緣性)亦不易受損。
On the other hand, when a photosensitive film having a high unit optical density is formed by using a photosensitive composition, when the coating film containing the photosensitive composition is exposed, the hardening of the deep portion of the coating film is likely to be insufficient. . However, when the photosensitive composition contains the above-described oxime ester compound (C1) as a photopolymerization initiator (C), it is easy to sufficiently harden the deep portion of the coating film, and it is easy to form a cured film having good adhesion to the substrate. At the same time, the cross section of the black matrix pattern containing the cured composition of the photosensitive composition is a forward cone, and when the liquid crystal display panel or the liquid crystal display device is formed using the cured product of the photosensitive composition, the opacity of the end face of the pattern can be reduced ( Detailed below).
Further, if the deep portion of the coating film is sufficiently cured, the durability of the cured film in a high-temperature, high-humidity, high-pressure environment is improved, and even if the cured film is exposed to such a harsh environment, it is difficult for water to be immersed into the interior of the cured film, and The adhesion of the cured film to the substrate or the volume resistivity (higher insulation) is also not easily impaired.

又,伴隨較高之單位光學密度之實現,易於使包含感光性組合物之硬化物之黑矩陣之厚度變薄。若使用較薄之黑矩陣,則可進一步減少液晶顯示裝置中之黑矩陣之圖案端面之滲光,進而亦可減少材料成本。Further, with the realization of a higher unit optical density, it is easy to make the thickness of the black matrix containing the cured product of the photosensitive composition thin. If a thin black matrix is used, the glazing of the pattern end faces of the black matrix in the liquid crystal display device can be further reduced, and the material cost can be reduced.

感光性組合物可與樹脂被覆碳黑(D1)一同含有樹脂被覆碳黑(D1)以外之其他遮光劑作為遮光劑(D)。於感光性組合物含有其他遮光劑之情形時,遮光劑(D)之質量中之樹脂被覆碳黑(D1)之質量之比率較佳為50質量%以上,更佳為70質量%以上,進而較佳為80質量%以上,尤佳為90質量%以上,最佳為95質量%以上。The photosensitive composition may contain, as a light shielding agent (D), a light-shielding agent other than the resin-coated carbon black (D1) together with the resin-coated carbon black (D1). When the photosensitive composition contains another light-shielding agent, the ratio of the mass of the resin-coated carbon black (D1) in the mass of the light-shielding agent (D) is preferably 50% by mass or more, more preferably 70% by mass or more, and further It is preferably 80% by mass or more, particularly preferably 90% by mass or more, and most preferably 95% by mass or more.

作為可與樹脂被覆碳黑一同使用之其他遮光劑,可列舉:未被覆碳黑、內醯胺系顏料、以銀錫(AgSn)合金為主成分之微粒子、鈦黑、銅、鐵、錳、鈷、鉻、鎳、鋅、鈣、銀等之金屬氧化物、複合氧化物、金屬硫化物、金屬硫酸鹽或金屬碳酸鹽等無論有機物、無機物之各種顏料。Examples of other light-shielding agents which can be used together with the resin-coated carbon black include carbon black, an internal phthalamide pigment, fine particles containing silver tin (AgSn) alloy as a main component, titanium black, copper, iron, manganese, and the like. Any of various organic and inorganic pigments such as metal oxides, composite oxides, metal sulfides, metal sulfates, or metal carbonates such as cobalt, chromium, nickel, zinc, calcium, and silver.

於感光性組合物中,作為遮光劑(D),可組合使用樹脂被覆碳黑(D1)等顏料與染料。該染料可自公知之材料中適當選擇。
作為可應用於感光性組合物之染料,例如可列舉:偶氮染料、金屬錯鹽偶氮染料、蒽醌染料、三苯基甲烷染料、二苯并吡喃染料、花青染料、萘醌染料、醌亞胺染料、次甲基染料、酞菁染料等。
又,關於該等染料,可藉由色澱化(成鹽化)而分散於有機溶劑等中,將其用作遮光劑(D)。
該等染料以外,例如亦可較佳地使用日本專利特開2013-225132號公報、日本專利特開2014-178477號公報、日本專利特開2013-137543號公報、日本專利特開2011-38085號公報、日本專利特開2014-197206號公報等中記載之染料等。
In the photosensitive composition, a pigment such as a resin-coated carbon black (D1) and a dye may be used in combination as the light-shielding agent (D). The dye can be appropriately selected from known materials.
Examples of the dye which can be applied to the photosensitive composition include an azo dye, a metal salt azo dye, an anthraquinone dye, a triphenylmethane dye, a dibenzopyran dye, a cyanine dye, and a naphthoquinone dye. , quinone imine dye, methine dye, phthalocyanine dye, and the like.
Further, these dyes can be dispersed in an organic solvent or the like by lake formation (salting), and used as an opacifier (D).
In addition to the above-mentioned dyes, for example, Japanese Patent Laid-Open Publication No. 2013-225132, Japanese Patent Laid-Open No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. A dye or the like described in Japanese Laid-Open Patent Publication No. 2014-197206, and the like.

感光性組合物中之遮光劑(D)之含量之總量可於不損害本發明之目的之範圍內適當選擇,典型的是相對於樹脂組合物之固形物成分整體之質量,較佳為90質量%以下,較佳為2質量%以上且85質量%以下,更佳為3質量%以上且80質量%以下。再者,只要可使用感光性組合物而形成遮光性充分高之硬化膜,遮光劑(D)之含量之總量相對於感光性組合物之固形物成分整體之質量之上限值可為90質量%以下,亦可為85質量%以下,亦可為80質量%以下。
再者,於本說明書中,關於上述遮光劑(D)量,可定義為亦包含與遮光劑(D)一同存在之分散劑之量之值。
The total amount of the content of the opacifier (D) in the photosensitive composition can be appropriately selected within the range not impairing the object of the present invention, and is preferably 90 in terms of the mass of the solid content of the resin composition as a whole. The mass% or less is preferably 2% by mass or more and 85% by mass or less, more preferably 3% by mass or more and 80% by mass or less. Further, as long as a photosensitive composition can be used to form a cured film having a sufficiently high light-shielding property, the total amount of the total amount of the light-shielding agent (D) can be 90% or more with respect to the mass of the solid content of the photosensitive composition as a whole. The mass% or less may be 85% by mass or less, or may be 80% by mass or less.
Further, in the present specification, the amount of the above-mentioned light-shielding agent (D) may be defined as a value which also contains the amount of the dispersing agent which is present together with the light-shielding agent (D).

<其他成分(E)>
以下,繼而敍述關於作為其他成分之任意成分。關於其他成分(E)之添加量,並無特別限制。可使用不損害本發明之目的之範圍之量之其他成分(E)。
<Other ingredients (E)>
Hereinafter, any component which is another component will be described. The amount of addition of the other component (E) is not particularly limited. Other components (E) in an amount that does not impair the purpose of the object of the present invention can be used.

(表面調整劑)
表面調整劑藉由降低感光性組合物之表面張力而抑制表面缺陷或顏料之不均勻分佈所導致之外觀不良(顏料之不均勻分佈)之產生。具體而言,可較佳地使用聚二甲基矽氧烷、聚醚改性聚矽氧烷、聚甲基烷基矽氧烷、藉由芳烷基或聚酯鏈而改性之聚矽氧烷等。
(surface conditioner)
The surface conditioner suppresses the appearance defect (non-uniform distribution of the pigment) caused by surface defects or uneven distribution of the pigment by lowering the surface tension of the photosensitive composition. Specifically, polydimethyl methoxy olefin, polyether modified polyoxy siloxane, polymethyl alkyl decane, poly fluorene modified by aralkyl or polyester chain can be preferably used. Oxytomane, etc.

(密接性提昇劑)
可使用矽烷偶合劑、鈦酸酯偶合劑、鋁酸鹽偶合劑等公知之偶合劑。其中就提高與玻璃基板之密接性之觀點而言,可較佳地使用矽烷偶合劑。
(adhesion enhancer)
A known coupling agent such as a decane coupling agent, a titanate coupling agent, or an aluminate coupling agent can be used. Among them, a decane coupling agent can be preferably used from the viewpoint of improving the adhesion to the glass substrate.

感光性組合物視需要可含有上述以外之各種添加劑。具體可例示:增感劑、硬化促進劑、光交聯劑、光敏劑、分散助劑、填充劑、抗氧化劑、紫外線吸收劑、抗凝集劑、熱聚合抑制劑、消泡劑、界面活性劑、鏈轉移劑、光起始助劑、溶劑等。關於任一種添加劑,可使用先前公知之添加劑。The photosensitive composition may contain various additives other than the above as needed. Specific examples thereof include a sensitizer, a hardening accelerator, a photocrosslinking agent, a photosensitizer, a dispersing aid, a filler, an antioxidant, an ultraviolet absorber, an anti-aggregating agent, a thermal polymerization inhibitor, an antifoaming agent, and an interfacial activity. Agent, chain transfer agent, photoinitiator, solvent, and the like. Regarding any of the additives, previously known additives can be used.

作為界面活性劑,例如可列舉:陰離子系化合物、陽離子系化合物、非離子系化合物等。
作為熱聚合抑制劑,例如可列舉:對苯二酚、對苯二酚單乙醚等。
作為消泡劑,例如可列舉:聚矽氧系化合物、氟系化合物等。
作為鏈轉移劑,例如可列舉:硫醇系化合物、鹵素系化合物、醌系化合物、α-甲基苯乙烯二聚物等。藉由含有鏈轉移劑,可良好地控制圖案形狀(尤其,孔圖案之CD(critical dimension,臨界尺寸)變化,曝光餘裕(exposure margin))。其中,2,4-二苯基-4-甲基-1-戊烯(α-甲基苯乙烯二聚物)除上述效果外,亦可減少昇華物或著色、臭氣,於此方面而言較佳。
作為光起始助劑,例如可列舉:三乙醇胺、甲基二乙醇胺、三異丙醇胺、4-二甲胺基苯甲酸甲酯、4-二甲胺基苯甲酸乙酯、4-二甲胺基苯甲酸異戊酯、4-二甲胺基苯甲酸2-乙基己酯、苯甲酸2-二甲胺基乙酯、N,N-二甲基對甲苯胺、4,4'-雙(二甲胺基)二苯甲酮(通稱米其勒酮)、4,4'-雙(二乙胺基)二苯甲酮、9,10-二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽及2-乙基-9,10-二乙氧基蒽等。該等光起始助劑可使用一種或組合兩種以上使用。
Examples of the surfactant include an anionic compound, a cationic compound, and a nonionic compound.
Examples of the thermal polymerization inhibitor include hydroquinone and hydroquinone monoethyl ether.
Examples of the antifoaming agent include a polyfluorene-based compound and a fluorine-based compound.
Examples of the chain transfer agent include a thiol compound, a halogen compound, an anthraquinone compound, and an α-methylstyrene dimer. By including a chain transfer agent, the pattern shape (especially the CD (critical dimension) change, the exposure margin) of the hole pattern can be well controlled. Among them, 2,4-diphenyl-4-methyl-1-pentene (α-methylstyrene dimer) can also reduce sublimation or coloration and odor in addition to the above effects. Better words.
Examples of the photoinitiating aid include triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, and 4-di Isoamyl methylaminobenzoate, 2-ethylhexyl 4-dimethylaminobenzoate, 2-dimethylaminoethyl benzoate, N,N-dimethyl-p-toluidine, 4,4' - bis(dimethylamino)benzophenone (commonly known as micbutone), 4,4'-bis(diethylamino)benzophenone, 9,10-dimethoxyanthracene, 2-B Base-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene and 2-ethyl-9,10-diethoxyanthracene. These photoinitiating aids may be used alone or in combination of two or more.

<溶劑(S)>
感光性組合物較佳為含有用以稀釋之溶劑(S)。作為溶劑(S),例如可列舉:乙二醇單甲醚、乙二醇單乙醚、乙二醇正丙醚、乙二醇單正丁醚、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單正丙醚、二乙二醇單正丁醚、三乙二醇單甲醚、三乙二醇單乙醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單正丙醚、丙二醇單正丁醚、二丙二醇單甲醚、二丙二醇單乙醚、二丙二醇單正丙醚、二丙二醇單正丁醚、三丙二醇單甲醚、三丙二醇單乙醚等(聚)伸烷基二醇單烷基醚類;乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等(聚)伸烷基二醇單烷基醚乙酸酯類;二乙二醇二甲醚、二乙二醇甲基乙醚、二乙二醇二乙醚、四氫呋喃等其他醚類;甲基乙基酮、環己酮、2-庚酮、3-庚酮等酮類;2-羥基丙酸甲酯、2-羥基丙酸乙酯等乳酸烷基酯類;2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、乙酸3-甲基-3-甲氧基丁酯、丙酸3-甲基-3-甲氧基丁酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸正丁酯、丁酸乙酯、丁酸正丙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯乙酸甲酯、乙醯乙酸乙酯、2-側氧丁酸乙酯等其他酯類;甲苯、二甲苯等芳香族烴類;N-甲基吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等醯胺類等。該等溶劑可單獨使用,亦可組合兩種以上使用。
<Solvent (S)>
The photosensitive composition preferably contains a solvent (S) for dilution. Examples of the solvent (S) include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, and diethylene glycol single. Ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, Propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether, etc. Monoalkyl ethers; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether Acetate, propylene glycol monoethyl ether acetate (poly) alkyl glycol monoalkyl ether acetate; diethylene glycol dimethyl ether, diethylene glycol methyl ether, diethylene glycol diethyl ether, Other ethers such as tetrahydrofuran; ketones such as methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone; milks such as methyl 2-hydroxypropionate and ethyl 2-hydroxypropionate Alkyl esters; ethyl 2-hydroxy-2-methylpropanoate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, 3- Ethyl ethoxypropionate, ethyl ethoxyacetate, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutanoate, 3-methyl-3-methoxybutyl acetate, propionic acid 3 -methyl-3-methoxybutyl ester, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, n-amyl formate, isoamyl acetate, n-butyl propionate Ester, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetate, ethyl acetate Other esters such as ethyl ester and ethyl 2-oxobutanoate; aromatic hydrocarbons such as toluene and xylene; N-methylpyrrolidone, N,N-dimethylformamide, N,N-II A guanamine such as methyl acetamide. These solvents may be used singly or in combination of two or more.

上述溶劑之中,丙二醇單甲醚、乙二醇單甲醚乙酸酯、丙二醇單甲醚乙酸酯(GPMEA)、丙二醇單乙醚乙酸酯、二乙二醇二甲醚、二乙二醇甲基乙醚(MEDG)、環己酮、乙酸3-甲氧基丁酯(MBA)對上述光聚合起始劑(C)顯示優異之溶解性,故而較佳,尤佳為使用丙二醇單甲醚乙酸酯、乙酸3-甲氧基丁酯。
溶劑(S)之含量較佳為感光性組合物之固形物成分濃度成為1質量%以上且50質量%以下之量,更佳為成為5質量%以上且40質量%以下之量。
Among the above solvents, propylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate (GPMEA), propylene glycol monoethyl ether acetate, diethylene glycol dimethyl ether, diethylene glycol Methyl ether (MEDG), cyclohexanone, and 3-methoxybutyl acetate (MBA) exhibit excellent solubility to the above photopolymerization initiator (C), and thus it is preferred to use propylene glycol monomethyl ether. Acetate, 3-methoxybutyl acetate.
The content of the solvent (S) is preferably such that the solid content concentration of the photosensitive composition is 1% by mass or more and 50% by mass or less, and more preferably 5% by mass or more and 40% by mass or less.

≪感光性組合物之製備方法≫
感光性組合物係將上述各成分均勻地攪拌、混合,均勻地使之溶解、分散而製備。混合時,可使用輥磨機、球磨機、砂磨機等攪拌機而混合。視需要可藉由2 μm膜濾器等過濾器進行過濾而製備。
制备Preparation method of photosensitive composition≫
In the photosensitive composition, the above components are uniformly stirred and mixed, and uniformly dissolved and dispersed to prepare. When mixing, it can be mixed using a mixer such as a roll mill, a ball mill, or a sand mill. It can be prepared by filtration using a filter such as a 2 μm membrane filter as needed.

≪硬化物形成方法及硬化物≫
硬化物形成方法除使用上述感光性組合物外,與使用感光性組合物之先前之硬化物形成方法相同。
Method for forming hardened material and hardened material
The method of forming a cured product is the same as the method of forming a prior art using a photosensitive composition, except that the above photosensitive composition is used.

使用上述感光性組合物形成硬化物之方法並無特別限制,可自先前採用之方法中適當選擇。硬化物係藉由感光性組合物之塗佈時之塗膜之形狀之控制、或位置選擇性之曝光與顯影之組合,而形成為期望之形狀之成形體。作為較佳之硬化物形成方法,可列舉包含使用上述感光性組合物而形成塗膜之塗膜形成步驟、及對上述塗膜進行曝光之曝光步驟的方法。於位置選擇性地進行曝光之情形時,可藉由顯影液對經曝光之塗膜進行顯影,從而獲得圖案化之硬化物。The method of forming the cured product using the above photosensitive composition is not particularly limited and may be appropriately selected from the methods previously employed. The cured product is formed into a molded body having a desired shape by the control of the shape of the coating film at the time of application of the photosensitive composition or the combination of positional selective exposure and development. A preferred method for forming a cured product includes a coating film forming step of forming a coating film using the photosensitive composition, and a method of exposing the coating film to an exposure step. In the case where the exposure is selectively performed at a position, the exposed coating film can be developed by a developing solution to obtain a patterned cured product.

首先,塗膜形成步驟中,例如,使用輥式塗佈機、反向塗佈機、棒式塗佈機等接觸轉印型塗佈裝置或旋轉器(旋轉式塗佈裝置)、淋幕式流塗機(curtain flow coater)等非接觸型塗佈裝置,將上述感光性組合物塗佈於欲形成硬化物之基板上,視需要藉由乾燥(預烘烤)去除溶劑而形成塗膜。
再者,關於溢灘於基板上之液滴、或埋入具有凹凸之基板之凹部之感光性組合物、或填充於模具之凹部之感光性組合物等,亦為了方便而稱為「塗膜」。
First, in the coating film forming step, for example, a contact transfer type coating device, a rotator (rotary coating device), or a shower curtain type using a roll coater, a reverse coater, a bar coater or the like is used. A non-contact type coating apparatus such as a curtain flow coater applies the photosensitive composition onto a substrate on which a cured product is to be formed, and if necessary, removes a solvent by drying (prebaking) to form a coating film.
Further, the photosensitive composition for depositing a droplet on a substrate or a concave portion in which a substrate having irregularities is embedded, or a photosensitive composition filled in a concave portion of a mold is also referred to as a "coating film" for convenience. "."

使用感光性組合物而形成之感光性組合物硬化物之膜厚、以及遮光層(黑矩陣)之層厚並無特別限定,較佳為0.2 μm以上,更理想的是0.3 μm以上且5 μm以下,更理想的是0.4 μm以上且3 μm以下,最理想的是0.5 μm以上且2 μm以下。The film thickness of the cured photosensitive composition formed by using the photosensitive composition and the layer thickness of the light shielding layer (black matrix) are not particularly limited, but are preferably 0.2 μm or more, and more preferably 0.3 μm or more and 5 μm. Hereinafter, it is more preferably 0.4 μm or more and 3 μm or less, and most preferably 0.5 μm or more and 2 μm or less.

繼而,形成之塗膜供至曝光步驟。於曝光步驟中,對塗膜照射ArF準分子雷射、KrF準分子雷射、F2 準分子雷射、極紫外線(EUV)、真空紫外線(VUV)、電子束、X射線、軟X射線、i射線、g射線、h射線等輻射或電磁波而將塗膜曝光。對塗膜之曝光可經由負型之遮罩而位置選擇性地進行。曝光量根據感光性組合物之組成而有所不同,例如較佳為10 mJ/cm2 以上且600 mJ/cm2 以下左右。Then, the formed coating film is supplied to the exposure step. In the exposure step, the coating film is irradiated with ArF excimer laser, KrF excimer laser, F 2 excimer laser, extreme ultraviolet (EUV), vacuum ultraviolet (VUV), electron beam, X-ray, soft X-ray, The coating film is exposed by radiation or electromagnetic waves such as i-rays, g-rays, and h-rays. Exposure to the coating film can be carried out in a positionally selective manner via a negative mask. The amount of exposure varies depending on the composition of the photosensitive composition, and is preferably, for example, about 10 mJ/cm 2 or more and 600 mJ/cm 2 or less.

經曝光之塗膜視需要進行顯影。
上述感光性組合物於曝光後不易對鹼性顯影液過度溶解。故而,藉由使用上述感光性組合物,易於形成將曝光部作為凸部,將未曝光部作為凹部之良好形狀之圖案化硬化物。
The exposed coating film is developed as needed.
The photosensitive composition is less likely to be excessively dissolved in the alkaline developing solution after exposure. Therefore, by using the photosensitive composition described above, it is easy to form a patterned cured product having an exposed portion as a convex portion and an unexposed portion as a concave portion.

於顯影步驟中,藉由利用顯影液對經曝光之塗膜進行顯影,形成圖案化為期望之形狀之硬化物。顯影方法並無特別限定,可使用浸漬法、噴霧法等。作為顯影液之具體例,可列舉:氫氧化鈉、氫氧化鉀、碳酸鈉、氨、四級銨鹽等之水溶液。In the developing step, the exposed coating film is developed by using a developing solution to form a cured product patterned into a desired shape. The development method is not particularly limited, and a dipping method, a spray method, or the like can be used. Specific examples of the developer include aqueous solutions of sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia, and a quaternary ammonium salt.

並且,視需要可對曝光後之硬化物或顯影後之圖案化硬化物實施後烘烤,進一步推進加熱硬化。後烘烤之溫度較佳為150℃以上且270℃以下。Further, post-baking of the cured product after exposure or the developed patterned cured product may be carried out as needed to further promote heat hardening. The post-baking temperature is preferably 150 ° C or more and 270 ° C or less.

硬化物係使用上述感光性組合物而形成。硬化物之用途並無特別限定。硬化物可尤佳地用作各種影像顯示裝置用彩色濾光片中所使用之黑矩陣。具備包含使用上述感光性組合物而形成之硬化物之黑矩陣之彩色濾光片可較佳地用於影像顯示面板。該影像顯示面板可較佳地用於液晶顯示裝置或有機EL(Electroluminescence,電致發光)顯示裝置、無機EL顯示裝置等各種影像顯示裝置中。又,同樣地可較佳地用於兼具影像顯示面板、及包含靜電電容電極或電阻電極等之表面感測器之觸控面板中。The cured product is formed using the above photosensitive composition. The use of the cured product is not particularly limited. The cured product can be preferably used as a black matrix used in various color filters for image display devices. A color filter having a black matrix including a cured product formed using the above photosensitive composition can be preferably used for an image display panel. The image display panel can be preferably used in various image display devices such as a liquid crystal display device, an organic EL (Electroluminescence) display device, and an inorganic EL display device. Further, similarly, it can be preferably used in a touch panel having both an image display panel and a surface sensor including a capacitance electrode or a resistance electrode.

≪彩色濾光片及影像顯示面板≫
以下,使用圖3,說明具備彩色濾光片100之影像顯示面板1之一例。
圖3係模式地表示作為影像顯示面板1之代表例之驅動液晶而顯示影像之液晶型影像顯示面板1之截面之圖。
影像顯示面板1中,依序積層有偏光層50b、TFT(薄膜電晶體)支持基板90b、液晶層30、彩色濾光片100、CF(彩色濾光片)支持基板90a及偏光層50a。
液晶層30中,使液晶層30之層厚成為固定厚度之間隔件以面內方向之特定間隔設置(未圖示)。
≪Color filter and image display panel≫
Hereinafter, an example of the image display panel 1 including the color filter 100 will be described with reference to FIG.
FIG. 3 is a view schematically showing a cross section of the liquid crystal display panel 1 that displays an image as a representative example of the image display panel 1.
In the image display panel 1, a polarizing layer 50b, a TFT (thin film transistor) supporting substrate 90b, a liquid crystal layer 30, a color filter 100, a CF (color filter) supporting substrate 90a, and a polarizing layer 50a are sequentially laminated.
In the liquid crystal layer 30, spacers having a layer thickness of the liquid crystal layer 30 having a constant thickness are provided at specific intervals in the in-plane direction (not shown).

偏光層50a與偏光層50b以形成特定偏光角之方式而配置。又,於影像顯示面板1之設置偏光層50b之側設置有背光裝置(未圖示)。
CF支持基板90a與TFT支持基板90b分別為了使背光裝置發出之光線透過而包含玻璃或透明樹脂等透光性材料。
The polarizing layer 50a and the polarizing layer 50b are disposed to form a specific polarization angle. Further, a backlight device (not shown) is provided on the side of the image display panel 1 on which the polarizing layer 50b is provided.
Each of the CF supporting board 90a and the TFT supporting board 90b includes a light transmissive material such as glass or a transparent resin for transmitting light emitted from the backlight.

彩色濾光片100於CF支持基板90a之液晶層30側被CF支持基板90a支持而設置。彩色濾光片100包含遮光層10、著色層20a、20b及20c。遮光層10相當於黑矩陣。
再者,著色層20a、20b及20c之色相並非黑色,典型的是紅(R)、綠(G)、藍(B)等有彩色。
著色層20a、20b及20c係使相互不同之色相之光透過之第1著色層20a、第2著色層20b及第3著色層20c。第1著色層20a、第2彩色濾光片20b及第3 20c之色相例如為紅(R)、綠(G)及藍(B)。
於TFT支持基板90b之液晶層30側之面形成配線40。作為TFT支持基板90b,可使用公知之TFT基板。
The color filter 100 is provided on the liquid crystal layer 30 side of the CF support substrate 90a by the CF support substrate 90a. The color filter 100 includes a light shielding layer 10 and colored layers 20a, 20b, and 20c. The light shielding layer 10 corresponds to a black matrix.
Further, the hue of the colored layers 20a, 20b, and 20c is not black, and typically red (R), green (G), blue (B), and the like are colored.
The colored layers 20a, 20b, and 20c are the first colored layer 20a, the second colored layer 20b, and the third colored layer 20c through which light of different hue is transmitted. The hue of the first colored layer 20a, the second color filter 20b, and the third 20c are, for example, red (R), green (G), and blue (B).
The wiring 40 is formed on the surface of the TFT supporting substrate 90b on the liquid crystal layer 30 side. As the TFT supporting substrate 90b, a known TFT substrate can be used.

遮光層10包含上述感光性組合物之硬化物。因此,遮光層10顯示所期望之較高之單位光學密度。又,遮光層10之截面形狀如下述圖1所示,相對於支持基板90a為正錐。
[實施例]
The light shielding layer 10 contains a cured product of the above photosensitive composition. Therefore, the light shielding layer 10 exhibits a desired higher unit optical density. Further, the cross-sectional shape of the light shielding layer 10 is as shown in FIG. 1 below, and is a forward cone with respect to the support substrate 90a.
[Examples]

以下,藉由實施例進而詳細地說明本發明,但本發明不限定於該等實施例。Hereinafter, the present invention will be described in detail by way of examples, but the invention is not limited to the examples.

[實施例1~3及比較例1~5]
使鹼可溶性樹脂(A-1)、光聚合性單體(B-1)、光聚合起始劑(C-1、C-2、C-3及C-4)、遮光劑(D-1及D-2)及添加劑(E-1及E-2)分別以表1所記載之比例,分散、溶解於有機溶劑(包含S-1、S-2及S-3之混合溶劑)中,製備感光性組合物。作為固形物成分之鹼可溶性樹脂、光聚合性單體、光聚合起始劑、遮光劑、添加劑之各自之混合比根據質量份,如表1所記載。又,有機溶劑係以感光性組合物中之固形物成分濃度成為15質量%之方式而製備。
[Examples 1 to 3 and Comparative Examples 1 to 5]
Alkali-soluble resin (A-1), photopolymerizable monomer (B-1), photopolymerization initiator (C-1, C-2, C-3, and C-4), and sunscreen (D-1) And D-2) and the additives (E-1 and E-2) are dispersed and dissolved in an organic solvent (including a mixed solvent of S-1, S-2, and S-3) in the ratios shown in Table 1, respectively. A photosensitive composition was prepared. The mixing ratio of each of the alkali-soluble resin, the photopolymerizable monomer, the photopolymerization initiator, the light-shieling agent, and the additive as a solid component is as shown in Table 1 in terms of parts by mass. Further, the organic solvent was prepared so that the concentration of the solid content component in the photosensitive composition was 15% by mass.

[表1]
[Table 1]

其中,鹼可溶性樹脂(A)係製備Cardo樹脂而使用。Cardo樹脂之製備方法示於製備例1。Among them, the alkali-soluble resin (A) is used by preparing a Cardo resin. The preparation method of Cardo resin is shown in Preparation Example 1.

[製備例1]
於500 mL四口燒瓶中添加雙酚茀型環氧樹脂(環氧當量235)235 g、四甲基氯化銨110 mg、2,6-二-第三丁基-4-甲基苯酚100 mg及丙烯酸72.0 g,一面於其中以25 mL/分之速度吹入空氣一面加熱至90℃以上且100℃以下而溶解。其次,於溶液為白濁之狀態下緩慢升溫,加熱至120℃而使之完全溶解。此時,溶液逐漸地變得透明黏稠,於該狀態下持續攪拌。該期間,測定酸值,持續攪拌直至成為未達1.0 mgKOH/g。酸值成為目標值為止需12小時。繼而冷卻至室溫,獲得無色透明且固體狀之下述式所表示之雙酚茀型環氧丙烯酸酯。
[Preparation Example 1]
Add bisphenol hydrazine type epoxy resin (epoxy equivalent 235) 235 g, tetramethylammonium chloride 110 mg, 2,6-di-tert-butyl-4-methylphenol 100 to a 500 mL four-necked flask. Mg and 72.0 g of acrylic acid were dissolved while being blown into the air at a rate of 25 mL/min., and heated to 90 ° C or higher and 100 ° C or lower. Next, the solution was slowly heated while the solution was cloudy, and heated to 120 ° C to be completely dissolved. At this time, the solution gradually became transparent and viscous, and stirring was continued in this state. During this period, the acid value was measured and stirring was continued until it became less than 1.0 mgKOH/g. It takes 12 hours for the acid value to become the target value. Then, it was cooled to room temperature to obtain a bisphenolphthalein type epoxy acrylate represented by the following formula which was colorless, transparent and solid.

[化54]
[54]

繼而,於如此獲得之上述雙酚茀型環氧丙烯酸酯307.0 g中添加乙酸3-甲氧基丁酯600 g而溶解後,混合二苯甲酮四羧酸二酐80.5 g及溴化四乙基銨1 g,緩慢升溫於110~115℃下反應4小時。確認酸酐基之消失後,混合1,2,3,6-四氫鄰苯二甲酸酐38.0 g,於90℃下反應6小時,獲得作為Cardo樹脂之樹脂(R-1)。酸酐基之消失係藉由IR光譜而確認。Then, after dissolving 600 g of 3-methoxybutyl acetate in 307.0 g of the above-mentioned bisphenolphthalein type epoxy acrylate, 80.5 g of benzophenone tetracarboxylic dianhydride and tetraethyl bromide were mixed. 1 g of ammonium chloride was slowly heated to 110 to 115 ° C for 4 hours. After confirming the disappearance of the acid anhydride group, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed and reacted at 90 ° C for 6 hours to obtain a resin (R-1) as a Cardo resin. The disappearance of the acid anhydride group was confirmed by IR spectroscopy.

作為光聚合性單體(B),使用光聚合性單體M-1(DPHA(日本化藥製造),二季戊四醇五丙烯酸酯與二季戊四醇六丙烯酸酯之混合物)。As the photopolymerizable monomer (B), a photopolymerizable monomer M-1 (DPHA (manufactured by Nippon Kayaku Co., Ltd.), a mixture of dipentaerythritol pentaacrylate and dipentaerythritol hexaacrylate) is used.

作為光聚合起始劑(C-1),使用下述P-1、P-2、P-3、P-4。
[化55]
As the photopolymerization initiator (C-1), the following P-1, P-2, P-3, and P-4 were used.
[化55]

又,作為遮光劑(D),分別使用作為遮光劑之分散液之遮光劑D-1與遮光劑D-2。
遮光劑D-1係環氧樹脂被覆碳黑分散液(分散介質為丙二醇單甲醚乙酸酯(PM))。關於遮光劑D-1,樹脂被覆碳黑之分散平均粒徑為130 nm,粉體電阻為5 Ω・cm。又,遮光劑D-2係未經樹脂被覆之碳黑分散液(分散介質為丙二醇單甲醚乙酸酯(PM))。關於遮光劑D-2,碳黑之分散平均粒徑為110 nm,粉體電阻為作為測定極限下限之1.0×10-6 Ω・cm。再者,於表1中,關於遮光劑D-1及D-2之重量份之記載,根據各固形物成分之重量而記載。
Further, as the light-shielding agent (D), the light-shielding agent D-1 and the light-shielding agent D-2 which are dispersion liquids of the light-shielding agent were used, respectively.
The sunscreen D-1 is an epoxy resin coated carbon black dispersion (the dispersion medium is propylene glycol monomethyl ether acetate (PM)). Regarding the light-shielding agent D-1, the resin-coated carbon black had a dispersed average particle diameter of 130 nm and a powder resistance of 5 Ω·cm. Further, the light-shielding agent D-2 is a carbon black dispersion liquid which is not coated with a resin (the dispersion medium is propylene glycol monomethyl ether acetate (PM)). Regarding the sunscreen D-2, the dispersed average particle diameter of the carbon black was 110 nm, and the powder resistance was 1.0 × 10 -6 Ω·cm which is the lower limit of the measurement limit. In addition, in Table 1, the description of the weight parts of the light-shielding agents D-1 and D-2 is described based on the weight of each solid content component.

作為添加劑E-1,使用包含作為表面調整劑之聚酯改性聚二甲基矽氧烷之BYK-310(BYK-Chemie Japan株式會公司製造)。作為添加劑E-2,使用作為密接性提昇劑之3-苯基胺基正丙基(三甲氧基)矽烷。As the additive E-1, BYK-310 (manufactured by BYK-Chemie Japan Co., Ltd.) containing a polyester-modified polydimethylsiloxane as a surface conditioning agent was used. As the additive E-2, 3-phenylamino-n-propyl (trimethoxy)decane was used as the adhesion promoter.

作為溶劑,混合以下之S-1、S-2及S-3,用作混合溶劑。各混合比(重量比)為S-1:S-2:S-3=50:30:20。
S-1:乙酸3-甲氧基丁酯(MA)
S-2:丙二醇單甲醚乙酸酯(PM)
S-3:環己酮(AN)
此處,S-2含有上述遮光劑D-1及D-2所具有之分散介質。
As the solvent, the following S-1, S-2 and S-3 were mixed and used as a mixed solvent. The mixing ratio (weight ratio) was S-1:S-2:S-3=50:30:20.
S-1: 3-methoxybutyl acetate (MA)
S-2: propylene glycol monomethyl ether acetate (PM)
S-3: cyclohexanone (AN)
Here, S-2 contains the dispersion medium of the above-mentioned sunscreen agents D-1 and D-2.

使用實施例1~3、比較例1~5之感光性組合物,依據下述製作方法與測定方法,進行感光性組合物之硬化物之評價。Using the photosensitive compositions of Examples 1 to 3 and Comparative Examples 1 to 5, the cured product of the photosensitive composition was evaluated in accordance with the following production method and measurement method.

<具備硬化膜之基板Cg之製作>
使用旋轉塗佈機,將各實施例及比較例中獲得之感光性組合物塗佈於100×100 mm、0.7 mm厚之玻璃基板上後,將塗膜於90℃下進行60秒鐘預烘烤,獲得膜厚1.2 μm之硬化膜。
繼而,使用曝光裝置TME150RTO(TOPCON製造),不使用遮罩,對塗膜以40 mJ/cm2 之曝光量進行整面曝光(藉由超高壓水銀燈之紫外線曝光)。
曝光後,將濃度0.05質量%之氫氧化鉀之水溶液用作顯影液,於25℃、60秒之條件下進行顯影。
將顯影後之曝光之塗膜於230℃下、30+180分鐘(合計210分鐘)之條件下進行後烘烤,獲得基板Cg。
<Production of substrate Cg having cured film>
The photosensitive composition obtained in each of the examples and the comparative examples was applied onto a glass substrate of 100 × 100 mm and 0.7 mm thick using a spin coater, and then the coating film was prebaked at 90 ° C for 60 seconds. Bake to obtain a cured film having a film thickness of 1.2 μm.
Then, using the exposure apparatus TME150RTO (manufactured by TOPCON), the coating film was subjected to full-surface exposure (exposure by ultraviolet light of an ultrahigh pressure mercury lamp) at an exposure amount of 40 mJ/cm 2 without using a mask.
After the exposure, an aqueous solution of potassium hydroxide having a concentration of 0.05% by mass was used as a developing solution, and development was carried out at 25 ° C for 60 seconds.
The developed coating film was post-baked at 230 ° C for 30 + 180 minutes (total 210 minutes) to obtain a substrate Cg.

<單位光學密度之測定>
關於基板Cg,使用光學密度測定裝置D-200II(格靈達-麥克貝斯(Gretag Macbeth)製造),測定硬化膜之光學密度,藉由膜厚換算,求得單位光學密度(單位:/μm)。結果記載於表2。
<Measurement of unit optical density>
With respect to the substrate Cg, the optical density of the cured film was measured using an optical density measuring device D-200II (manufactured by Gretag Macbeth), and the unit optical density (unit: /μm) was obtained by conversion of the film thickness. . The results are shown in Table 2.

<密接性之測定>
於基板Cg中之硬化膜中切割出寬1 mm之格子狀切口(交叉切割)。
繼而,於120℃、濕度100%、2個大氣壓之環境下進行36小時暴露之PCT試驗(壓力鍋試驗)。
其後,返回至室溫,進行於ASTM-D3359-09e2中規定之膠帶剝離測試,觀察各格子有無剝離。關於膠帶剝離測試之結果,依據以下基準進行評價。結果記載於表2。
◎(等級5B):完全無剝離。
○(等級4B):剝離之硬化膜數相對於藉由格子狀切割而分割之硬化膜之總數之比率為5%以下。
△(等級3B):剝離之硬化膜數相對於藉由格子狀切割而分割之硬化膜之總數之比率為超過5%且15%以下。剝離為超過15%以上。
×(等級2B~0B):剝離之硬化膜數相對於藉由格子狀切割而分割之硬化膜之總數之比率為15%以上。
<Measurement of adhesion>
A lattice-shaped slit (cross-cut) having a width of 1 mm was cut in the cured film in the substrate Cg.
Then, a PCT test (pressure cooker test) of 36 hours of exposure was carried out in an environment of 120 ° C, humidity of 100%, and 2 atmospheres.
Thereafter, the mixture was returned to room temperature, and subjected to a tape peeling test specified in ASTM-D3359-09e2, and the presence or absence of peeling of each of the lattices was observed. The results of the tape peeling test were evaluated based on the following criteria. The results are shown in Table 2.
◎ (Grade 5B): No peeling at all.
○ (Grade 4B): The ratio of the number of cured films peeled off to the total number of cured films divided by the lattice cut is 5% or less.
Δ (Grade 3B): The ratio of the number of cured films peeled off to the total number of cured films divided by lattice cutting is more than 5% and 15% or less. The peeling is more than 15%.
× (Grade 2B to 0B): The ratio of the number of cured films peeled off to the total number of cured films divided by lattice cutting is 15% or more.

<具備硬化膜之基板Cs之製作>
使用5英吋低電阻矽晶圓(表面電阻:0.01~0.03 Ω)代替玻璃基板。藉由與基板Cg相同之製作方法,使用各實施例及比較例中獲得之感光性組合物,獲得具備感光性組合物之硬化膜之基板Cs。
<Production of substrate Cs having a cured film>
Instead of a glass substrate, a 5 inch low resistance 矽 wafer (surface resistance: 0.01 to 0.03 Ω) was used. The photosensitive composition obtained in each of the examples and the comparative examples was used to obtain a substrate Cs having a cured film of a photosensitive composition by the same production method as that of the substrate Cg.

<體積電阻值之測定>
對於基板Cs,於120℃、濕度100%、2個大氣壓之環境下進行1小時暴露之PCT試驗。其後,返回至室溫,使用電阻率計Hiresta MCP HT-450(三菱化學製造),藉由根據JIS-K6911之方法,算出硬化膜之體積電阻值(測定條件:電壓10 V,60秒鐘)。結果記載於表2。
◎:1.0×1014 Ω・cm以上。
○:1.0×1013 ~9.9×1013 Ω・cm。
×:9.9×1012 Ω・cm以下。
<Measurement of volume resistance value>
For the substrate Cs, a PCT test of exposure for 1 hour was carried out in an environment of 120 ° C, humidity of 100%, and 2 atmospheres. Thereafter, the temperature was returned to room temperature, and the volume resistivity of the cured film was calculated by a method according to JIS-K6911 using a resistivity meter Hiresta MCP HT-450 (manufactured by Mitsubishi Chemical Corporation) (measurement conditions: voltage 10 V, 60 seconds) ). The results are shown in Table 2.
◎: 1.0 × 10 14 Ω·cm or more.
○: 1.0 × 10 13 to 9.9 × 10 13 Ω·cm.
×: 9.9 × 10 12 Ω·cm or less.

<具備經圖案化之硬化膜之基板Pg之製作>
使用旋轉塗佈機,將各實施例及比較例中獲得之感光性組合物塗佈於100×100 mm、0.7 mm厚之玻璃基板上後,將塗膜以90℃進行60秒鐘預烘烤,獲得膜厚1.2 μm之硬化膜。
繼而,使用曝光裝置(TOPCON製造,TME150RTO),經由具有10 μm線與間隙圖案之光罩,對塗膜以40 mJ/cm2 之曝光量進行曝光(藉由超高壓水銀燈之紫外線曝光)。
曝光後,將濃度0.05質量%之氫氧化鉀之水溶液用作顯影液,於25℃、60秒之條件下進行顯影。
將顯影後之經曝光之塗膜於230℃下、30+180分鐘(合計210分鐘)之條件下進行後烘烤,獲得基板Pg。
<Production of Substrate Pg Having Patterned Cured Film>
The photosensitive composition obtained in each of the examples and the comparative examples was applied onto a glass substrate of 100 × 100 mm and 0.7 mm thick by a spin coater, and then the coating film was prebaked at 90 ° C for 60 seconds. A cured film having a film thickness of 1.2 μm was obtained.
Then, using a exposure apparatus (manufactured by TOPCON, TME150RTO), the coating film was exposed to an exposure amount of 40 mJ/cm 2 via a photomask having a line and gap pattern of 10 μm (exposure by ultraviolet light of an ultrahigh pressure mercury lamp).
After the exposure, an aqueous solution of potassium hydroxide having a concentration of 0.05% by mass was used as a developing solution, and development was carried out at 25 ° C for 60 seconds.
The developed coated film after development was post-baked at 230 ° C for 30 + 180 minutes (total 210 minutes) to obtain a substrate Pg.

<圖案形狀評價(缺陷、直進性、線錐角)>
藉由掃描式電子顯微鏡S-9220(日立製作所製造)觀察於基板Pg上形成之線與間隙圖案,實施例1~3及比較例1~5之任一者均可形成線與間隙圖案,確認各感光性組合物係具有於曝光量40 mJ/cm2 下或其以下之曝光量下硬化之感度之負型感光性組合物。
繼而,更詳細地評價圖案剝離缺陷、線直進性(遮罩忠實性)、線錐角。
圖案剝離缺陷係基於10根線之觀察結果,依據以下基準而評價。
○:無圖案剝離。
△:10根中,觀察到剝離之線之根數為1根或2根。
×:10根中,觀察到剝離之線之根數為3根至10根。
線直進性係依據以下基準而評價。
○:形成筆直之圖案。
×:觀察到變形、蜿蜒、邊緣欠缺等不良。
<pattern shape evaluation (defect, straightness, line cone angle)>
A line and gap pattern formed on the substrate Pg was observed by a scanning electron microscope S-9220 (manufactured by Hitachi, Ltd.), and any of the examples 1 to 3 and the comparative examples 1 to 5 was able to form a line and gap pattern, and it was confirmed. Each of the photosensitive compositions has a negative photosensitive composition which is sensitive to an exposure amount at an exposure amount of 40 mJ/cm 2 or less.
Then, the pattern peeling defect, the linear straightness (mask faith), and the line taper angle were evaluated in more detail.
The pattern peeling defect was evaluated based on the observation results of 10 lines based on the following criteria.
○: No pattern peeling.
△: Among the 10 pieces, the number of the lines of peeling was observed to be one or two.
×: Among the 10 roots, the number of the lines of peeling was observed to be 3 to 10.
The straightness is evaluated based on the following criteria.
○: A straight pattern is formed.
×: Defects such as deformation, flaws, and lack of edges were observed.

線錐角係關於該感光性組合物之硬化物圖案之線部10之寬度方向之截面,如圖1所示測量基板90a與線部10之側面所形成之角度θ。再者,於為如圖1所示之梯形形狀之情形時,θ超過0度且未達90度,稱為正錐。又,於為如圖2所示之倒梯形形狀之情形時,θ超過90度且未達180度,稱為倒錐。關於線錐角(圖案截面形狀),依據以下基準進行評價。
◎:測定角度θ為70度以上且85度以下
○:測定角度θ為86度以上且90度以下
△:測定角度θ為91度以上且100度以下
×:測定角度為100度以上
再者,於圖1及圖2中,將基板90a與感光性組合物硬化物圖案之線部10相接之面作為基準面,將基準面之平行線與線側面所形成之角度表示為θ,與上述θ相同。
The line taper angle is a cross section in the width direction of the line portion 10 of the cured product pattern of the photosensitive composition, and the angle θ formed by the side surface of the substrate 90a and the line portion 10 is measured as shown in Fig. 1 . Furthermore, in the case of the trapezoidal shape as shown in FIG. 1, θ exceeds 0 degrees and is less than 90 degrees, which is called a forward cone. Further, in the case of the inverted trapezoidal shape as shown in FIG. 2, θ exceeds 90 degrees and is less than 180 degrees, which is called an inverted cone. Regarding the line taper angle (pattern cross-sectional shape), evaluation was performed based on the following criteria.
◎: The measurement angle θ is 70 degrees or more and 85 degrees or less. ○: The measurement angle θ is 86 degrees or more and 90 degrees or less. Δ: The measurement angle θ is 91 degrees or more and 100 degrees or less ×: The measurement angle is 100 degrees or more. In FIGS. 1 and 2, the surface where the substrate 90a is in contact with the line portion 10 of the cured composition cured pattern is used as a reference surface, and the angle formed by the parallel line of the reference surface and the line side surface is expressed as θ. θ is the same.

<對液晶顯示面板要求之線錐角θ>
此處,關於線錐角θ進行補充。作為線錐角θ,為確保對遮罩圖案之忠實性,理想的是90度。然而,於將使用感光性組合物之黑矩陣組入至影像顯示面板之情形時,有液晶與黑矩陣相接地配置之情況。
液晶係藉由電壓而控制分子配向,於包含偏光板之光學系統中,藉由使透光率劇烈地變化,而進行文字、影像等之顯示。於液晶與黑矩陣相接地配置之情形時,於黑矩陣之圖案邊界部,受到邊界階差之影響,液晶配向行為顯示與圖案平坦部(相當於上述線部或間隙部)不同之行為。其作為光學現象而言,即使於圖案平坦部之透光率為0%,於圖案邊界部光線亦透過,作為圖案邊界部之滲光或漏光而被觀察到,作為影像顯示面板及影像顯示裝置並不合適。
該滲光現象於黑矩陣圖案之線錐角θ超過90度時顯著,線錐角θ為90度以下時減輕。若作為影像顯示面板及影像顯示裝置進行驅動試驗,則線錐角θ為85度以下係適合之角度。再者,若未達70度,則光透過區域變窄(於圖1中,相當於線部10以外之間隙部變窄),光量減少,故而作為影像顯示面板及影像顯示裝置並不合適。
因此,作為液晶顯示面板及液晶顯示裝置,線錐角θ理想的是90度以下,最理想的是70度以上且85度以下。
<Line taper angle θ required for liquid crystal display panel>
Here, the line taper angle θ is supplemented. As the line taper angle θ, in order to ensure the faithfulness to the mask pattern, it is desirable to be 90 degrees. However, when a black matrix using a photosensitive composition is incorporated into an image display panel, liquid crystal and black matrix may be disposed in contact with each other.
In the liquid crystal system, the molecular alignment is controlled by a voltage, and in an optical system including a polarizing plate, display of characters, images, and the like is performed by changing the light transmittance drastically. When the liquid crystal and the black matrix are placed in contact with each other, the boundary of the pattern of the black matrix is affected by the boundary step, and the liquid crystal alignment behavior is different from the pattern flat portion (corresponding to the above-mentioned line portion or gap portion). As an optical phenomenon, even if the light transmittance of the flat portion of the pattern is 0%, light is transmitted through the boundary portion of the pattern, and is observed as light leakage or light leakage at the boundary portion of the pattern, and is used as an image display panel and an image display device. Not suitable.
This glazing phenomenon is remarkable when the line taper angle θ of the black matrix pattern exceeds 90 degrees, and is reduced when the line taper angle θ is 90 degrees or less. When the driving test is performed as the image display panel and the image display device, the line taper angle θ is 85 degrees or less, which is a suitable angle. In addition, if it is less than 70 degrees, the light transmission region is narrowed (in FIG. 1, the gap portion other than the line portion 10 is narrowed), and the amount of light is reduced. Therefore, it is not suitable as an image display panel and a video display device.
Therefore, as the liquid crystal display panel and the liquid crystal display device, the taper angle θ is preferably 90 degrees or less, and most preferably 70 degrees or more and 85 degrees or less.

[表2]
*1 120℃、2個大氣壓、36小時處理後
*2 120℃、2個大氣壓、1小時處理後
[Table 2]
*1 120 ° C, 2 atmospheres, 36 hours after treatment
*2 120 ° C, 2 atmospheres, 1 hour after treatment

根據表1及2可知,若使用含有鹼可溶性樹脂(A)、光聚合性單體(B)、光聚合起始劑(C)及遮光劑(D),且含有特定結構之肟酯化合物(C1)作為光聚合起始劑(C),含有樹脂被覆碳黑(D1)作為遮光劑(D)的實施例1~3之感光性組合物,則可形成具有較高之單位光學密度(3.8/μm)與較高之體積電阻值(1.0×1013 Ω・m以上,更佳為1.0×1014 Ω・m以上),並且具有良好之對基板之密接性與良好之圖案形狀(缺陷、直進性、線錐角度θ)的經圖案化之硬化膜。According to Tables 1 and 2, when an alkali-soluble resin (A), a photopolymerizable monomer (B), a photopolymerization initiator (C), and an opacifier (D) are contained, an oxime ester compound having a specific structure is used ( C1) As the photopolymerization initiator (C), the photosensitive compositions of Examples 1 to 3 containing the resin-coated carbon black (D1) as the light-shielding agent (D) can form a higher unit optical density (3.8). /μm) and a higher volume resistance value (1.0 × 10 13 Ω · m or more, more preferably 1.0 × 10 14 Ω · m or more), and have good adhesion to the substrate and a good pattern shape (defect, Patterned cured film with straightness, line taper angle θ).

另一方面,可知於使用不含符合肟酯化合物(C1)之化合物的比較例1~4之感光性組合物之情形時,僅可形成對基板之密接性、體積電阻率及圖案形狀(缺陷、直進性、錐角度θ)之任一者不充分之硬化膜。On the other hand, in the case of using the photosensitive compositions of Comparative Examples 1 to 4 which do not contain the compound satisfying the oxime ester compound (C1), only the adhesion to the substrate, the volume resistivity, and the pattern shape (defects) can be formed. A cured film which is insufficient in any of straightness and taper angle θ).

1‧‧‧影像顯示面板1‧‧‧Image display panel

10‧‧‧遮光層 10‧‧‧Lighting layer

20a、20b、20c‧‧‧著色層 20a, 20b, 20c‧‧‧ colored layer

30‧‧‧液晶層 30‧‧‧Liquid layer

40‧‧‧配線 40‧‧‧ wiring

50a、50b‧‧‧偏光層 50a, 50b‧‧‧ polarizing layer

90a‧‧‧CF支持基板 90a‧‧‧CF support substrate

90b‧‧‧TFT支持基板 90b‧‧‧TFT support substrate

100‧‧‧彩色濾光片 100‧‧‧Color filters

圖1係模式地表示具備正錐之截面形狀之使用感光性組合物而形成之硬化膜(黑矩陣)之圖案寬度方向截面形狀之圖。Fig. 1 is a view schematically showing a cross-sectional shape in a pattern width direction of a cured film (black matrix) formed using a photosensitive composition having a cross-sectional shape of a forward taper.

圖2係模式地表示具備倒錐之截面形狀之使用感光性組合物而形成之硬化膜(黑矩陣)之圖案寬度方向截面形狀之圖。 2 is a view schematically showing a cross-sectional shape in the pattern width direction of a cured film (black matrix) formed using a photosensitive composition having a cross-sectional shape of an inverted cone.

圖3係模式地表示使用感光性組合物而形成之彩色濾光片與使用該彩色濾光片而形成之影像顯示面板1之截面之圖。 Fig. 3 is a view schematically showing a cross section of a color filter formed using a photosensitive composition and an image display panel 1 formed using the color filter.

Claims (12)

一種感光性組合物,其係含有鹼可溶性樹脂(A)、光聚合性單體(B)、光聚合起始劑(C)及遮光劑(D)者, 上述光聚合起始劑(C)含有下述式(c1)所表示之肟酯化合物(C1): [化1] (式(c1)中,R1 為1價有機基,R2 為可具有取代基之烴基或可具有取代基之雜環基,R3 為1價有機基,R4 為1價有機基,R5 及R6 分別獨立為可具有取代基之苯環或可具有取代基之萘環,m1、m2及m3分別為0或1), 上述肟酯化合物(C1)滿足下述(1)~(3)之至少一個條件: (1)R1 含有-OR7 所表示之基,R7 為鹵烷基 (2)m2為1,R4 含有-OR7 所表示之基,R7 為鹵烷基 (3)R3 為可具有取代基之支鏈狀烷基,且 上述遮光劑(D)含有樹脂被覆碳黑(D1)。A photosensitive composition containing an alkali-soluble resin (A), a photopolymerizable monomer (B), a photopolymerization initiator (C), and an opacifier (D), and the photopolymerization initiator (C) Containing the oxime ester compound (C1) represented by the following formula (c1): [Chemical Formula 1] (In the formula (c1), R 1 is a monovalent organic group, R 2 is a hydrocarbon group which may have a substituent or a heterocyclic group which may have a substituent, R 3 is a monovalent organic group, and R 4 is a monovalent organic group. R 5 and R 6 are each independently a benzene ring which may have a substituent or a naphthalene ring which may have a substituent, and m1, m2 and m3 are each 0 or 1), and the above oxime ester compound (C1) satisfies the following (1) to (3) at least one of the conditions: (1) R 1 contains a group represented by -OR 7 , R 7 is a haloalkyl group (2) m2 is 1, R 4 contains a group represented by -OR 7 , and R 7 is a halogen. The alkyl group (3) R 3 is a branched alkyl group which may have a substituent, and the above-mentioned sunscreen agent (D) contains a resin-coated carbon black (D1). 如請求項1之感光性組合物,其中上述肟酯化合物(C1)係下述式(c1-III)所表示之化合物: [化2] (式(c1-III)中,R1 、R2 、R3 、R4 、m1、m2及m3與上述式(c1)相同)。The photosensitive composition of claim 1, wherein the oxime ester compound (C1) is a compound represented by the following formula (c1-III): [Chemical 2] (In the formula (c1-III), R 1 , R 2 , R 3 , R 4 , m1, m2 and m3 are the same as the above formula (c1)). 如請求項1或2之感光性組合物,其中上述光聚合起始劑(C)進而含有胺基烷基苯酮化合物(C2)。The photosensitive composition of claim 1 or 2, wherein the photopolymerization initiator (C) further contains an aminoalkylphenone compound (C2). 如請求項1或2之感光性組合物,其中上述樹脂被覆碳黑(D1)含有環氧樹脂被覆碳黑(D1)。The photosensitive composition of claim 1 or 2, wherein the resin-coated carbon black (D1) contains an epoxy-coated carbon black (D1). 如請求項1或2之感光性組合物,其中上述光聚合起始劑(C)之含量相對於上述感光性組合物之固形物成分之質量為1質量%以上且15質量%以下。The photosensitive composition of Claim 1 or 2, wherein the content of the photopolymerization initiator (C) is 1% by mass or more and 15% by mass or less based on the mass of the solid content component of the photosensitive composition. 如請求項1或2之感光性組合物,其中上述肟酯化合物(C1)之含量相對於上述光聚合起始劑(C)之質量為30質量%以上。The photosensitive composition of Claim 1 or 2, wherein the content of the above-mentioned oxime ester compound (C1) is 30% by mass or more based on the mass of the photopolymerization initiator (C). 一種硬化物,其係如請求項1至6中任一項之感光性組合物之硬化物。A hardened material which is a cured product of the photosensitive composition of any one of claims 1 to 6. 一種彩色濾光片,其具備包含如請求項7之硬化物之黑矩陣。A color filter comprising a black matrix comprising a cured material as claimed in claim 7. 一種影像顯示面板,其具備如請求項8之彩色濾光片。An image display panel having a color filter as claimed in claim 8. 一種影像顯示裝置,其具備如請求項9之影像顯示面板。An image display device comprising the image display panel of claim 9. 一種經圖案化之硬化膜之製造方法,其包括: 於基板上塗佈如請求項1至6中任一項之感光性組合物而形成塗佈膜, 位置選擇地對上述塗佈膜進行曝光,及 對上述經曝光之塗佈膜進行顯影。A method of manufacturing a patterned cured film, comprising: Applying the photosensitive composition according to any one of claims 1 to 6 to form a coating film on the substrate, Positionally selectively exposing the coating film, and The exposed coated film was developed. 如請求項11之製造方法,其中上述經圖案化之硬化膜係黑矩陣。The manufacturing method of claim 11, wherein the patterned hardened film is a black matrix.
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