TW201903529A - Photosensitive composition, cured film, display device, and method for forming patterned cured film capable of forming a black cured film excellent in insulation and adhesion properties to a substrate despite its excellent light shielding property - Google Patents

Photosensitive composition, cured film, display device, and method for forming patterned cured film capable of forming a black cured film excellent in insulation and adhesion properties to a substrate despite its excellent light shielding property Download PDF

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TW201903529A
TW201903529A TW107107859A TW107107859A TW201903529A TW 201903529 A TW201903529 A TW 201903529A TW 107107859 A TW107107859 A TW 107107859A TW 107107859 A TW107107859 A TW 107107859A TW 201903529 A TW201903529 A TW 201903529A
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TWI772379B (en
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鈴木茂
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日商東京應化工業股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • G03F7/0755Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Filters (AREA)

Abstract

The subject of the present invention is to provide a photosensitive composition capable of forming a black cured film excellent in insulation and adhesion properties to a substrate despite its excellent light shielding property, a cured film formed by curing the photosensitive composition, a display device having the cured film, and a method of using the photosensitive composition to form a patterned cured film. To solve the problem, in the photosensitive composition containing a photo-polymerization initiator (B) and a carbon black (C) in an amount of 30 mass% or more in the total solid content, a siloxane compound having two or more polymerizable carbon-carbon double bonds in its structure is processed to serve as a crosslinking component (A).

Description

感光性組成物、硬化膜、顯示裝置,及經圖型化之硬化膜的形成方法Photosensitive composition, cured film, display device, and patterned method of forming cured film

本發明係關於感光性組成物、使該感光性組成物硬化而成的硬化膜、具備該硬化膜的顯示裝置,及使用前述感光性組成物的經圖型化之硬化膜的形成方法。The present invention relates to a photosensitive composition, a cured film obtained by curing the photosensitive composition, a display device including the cured film, and a method of forming a patterned cured film using the photosensitive composition.

液晶顯示器等之圖像顯示裝置中之顯示面板,係成為形成有彼此對向成對之電極的2片基板之間夾著液晶層的結構。然後一側的基板之內側,形成有具有由紅色(R)、綠色(G)、藍色(B)等各色而成之像素的彩色濾光片。然後,此彩色濾光片中,或為了防止各像素中之不同色的混色,或為了隱藏電極的圖型,通常,形成有以區分R、G、B各色像素之方式配置成矩陣狀而成的黑矩陣。In a display panel of an image display device such as a liquid crystal display, a liquid crystal layer is interposed between two substrates on which electrodes opposed to each other are formed. Then, a color filter having pixels of respective colors such as red (R), green (G), and blue (B) is formed on the inner side of the substrate. Then, in the color filter, or in order to prevent color mixing of different colors in each pixel, or to hide the pattern of the electrodes, generally, a matrix is formed so as to distinguish pixels of R, G, and B colors. Black matrix.

一般而言,彩色濾光片係藉由微影術法形成。具體而言首先,於基板將黑色的感光性組成物進行塗佈、曝光、顯影,形成黑矩陣。之後,接著,藉由對於每個紅(R)、綠(G)、藍(B)各色感光性組成物重複進行塗佈、曝光、顯影,而於指定位置形成各色之圖型來形成彩色濾光片。In general, color filters are formed by lithography. Specifically, first, a black photosensitive composition is applied, exposed, and developed on a substrate to form a black matrix. Then, by repeating coating, exposure, and development for each of the red (R), green (G), and blue (B) color photosensitive compositions, a pattern of each color is formed at a predetermined position to form a color filter. Light film.

關於形成彩色濾光片時之黑矩陣的形成方法,提案有使用負型之感光性樹脂組成物的方法。   例如,專利文獻1中顯示,作為可以低成本兼具高遮光性與低反射率之黑色矩陣的原料之黑色感光性樹脂組成物,顯示有摻合碳黑與疏水性二氧化矽微粒子等而成之負型的感光性樹脂組成物。 [先前技術文獻] [專利文獻]As a method of forming a black matrix when a color filter is formed, a method of using a negative photosensitive resin composition has been proposed. For example, Patent Document 1 discloses that a black photosensitive resin composition which can be used as a raw material of a black matrix having high light-shielding property and low reflectance at low cost is formed by blending carbon black and hydrophobic cerium oxide microparticles. A negative photosensitive resin composition. [Prior Technical Literature] [Patent Literature]

[專利文獻1]日本特開2015-161815號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2015-161815

[發明所欲解決之課題][Problems to be solved by the invention]

由圖像顯示裝置之高畫質化的觀點來看,黑矩陣被期望有更高的遮光性。作為提高使用專利文獻1所記載之感光性樹脂組成物形成的黑矩陣之遮光性的方法,可舉例使感光性樹脂組成物中之碳黑含量增加的方法。然而,如專利文獻1所記載之感光性樹脂組成物中增加碳黑含量時,形成之硬化膜中,有絕緣性與對基板的密著性降低的問題。From the viewpoint of high image quality of the image display device, the black matrix is expected to have higher light blocking properties. As a method of improving the light-shielding property of the black matrix formed using the photosensitive resin composition of the patent document 1, the method of increasing the carbon black content in the photosensitive resin composition can be illustrated. However, when the content of the carbon black is increased in the photosensitive resin composition described in Patent Document 1, the cured film formed has a problem that the insulating property and the adhesion to the substrate are lowered.

本發明係鑑於上述課題所成者,其目的在於提供:一種感光性組成物,其可形成儘管遮光性優異,絕緣性與對基板之密著性仍優異之黑色硬化膜;一種硬化膜,其係使該感光性組成物硬化而成者;一種顯示裝置,其具備該硬化膜;及一種經圖型化之硬化膜的形成方法,其使用前述感光性組成物。 [解決課題之手段]The present invention has been made in view of the above problems, and an object of the invention is to provide a photosensitive composition which can form a black cured film which is excellent in light shielding property and excellent in insulation property and adhesion to a substrate, and a cured film. A photosensitive device is obtained by curing the photosensitive composition; a display device comprising the cured film; and a method for forming a patterned cured film, wherein the photosensitive composition is used. [Means for solving the problem]

本發明者們,發現在包含(B)光聚合起始劑與全固體成分中30質量%以上之(C)碳黑的感光性組成物中,藉由摻合作為(A)交聯成分之該結構中具有2個以上之可聚合之碳-碳雙鍵的矽氧烷化合物可解決上述課題,終至完成本發明。更具體而言,本發明提供下列者。The present inventors have found that a photosensitive composition containing (B) a photopolymerization initiator and 30% by mass or more of (C) carbon black in the total solid component is a (A) cross-linking component by blending The siloxane compound having two or more polymerizable carbon-carbon double bonds in the structure can solve the above problems, and the present invention has been completed. More specifically, the present invention provides the following.

本發明之第1態樣係一種感光性組成物,其係包含(A)交聯成分、(B)光聚合起始劑與(C)碳黑之感光性組成物,   (A)交聯成分係包含選自下述式(a1)~(a4)所示之M單元、D單元、T單元及Q單元中之1種以上的結構單元之矽氧烷化合物:   M單元:R1 R2 R3 SiO1/2 ・・・(a1)   D單元:R4 R5 SiO2/2 ・・・(a2)   T單元:R6 SiO3/2 ・・・(a3)   Q單元:SiO4/2 ・・・(a4)   (式(a1)~(a4)中,R1 ~R6 各自獨立,為R7 -或R7 -O-所示之基,R7 為藉由C-Si鍵鍵結於式(a1)~式(a3)中之矽原子,或藉由C-O鍵鍵結於R7 -O-中之氧原子的1價有機基),   矽氧烷化合物在其結構中具有2個以上之碳-碳雙鍵,且,矽氧烷化合物包含2個以上之選自M單元、D單元、T單元及Q單元中的結構單元,   感光性組成物之全固體成分中的(C)碳黑含量為30質量%以上,   以下述測定條件測定感光性組成物之硬化物中的矽原子量(質量%)與碳原子量(質量%)時,矽原子量(質量%)/碳原子量(質量%)的比率為0.05以上。A first aspect of the present invention is a photosensitive composition comprising (A) a crosslinking component, (B) a photopolymerization initiator, and (C) a photosensitive composition of carbon black, (A) a crosslinking component. A pyrithion compound containing one or more structural units selected from the group consisting of M units, D units, T units, and Q units represented by the following formulas (a1) to (a4): M unit: R 1 R 2 R 3 SiO 1/2・・・(a1) D unit: R 4 R 5 SiO 2/2・・・(a2) T unit: R 6 SiO 3/2・・・(a3) Q unit: SiO 4/2・・・(a4) (In the formulas (a1) to (a4), R 1 to R 6 are each independently a group represented by R 7 - or R 7 -O-, and R 7 is a bond represented by a C-Si bond. a helium atom of the formula (a1) to (a3), or a monovalent organic group bonded to an oxygen atom in R 7 -O- by a CO bond, the cyclooxyl compound having 2 in its structure More than one carbon-carbon double bond, and the oxoxane compound contains two or more structural units selected from the group consisting of M unit, D unit, T unit, and Q unit, among all the solid components of the photosensitive composition (C) The carbon black content is 30% by mass or more, and the amount of ruthenium atom (% by mass) in the cured product of the photosensitive composition is measured under the following measurement conditions. In the case of the amount of carbon atoms (% by mass), the ratio of the amount of ruthenium atom (% by mass) / the amount of carbon atoms (% by mass) is 0.05 or more.

(測定條件)   將感光性組成物以成為厚度1μm之方式塗佈玻璃基板上,以50mJ/cm2 之曝光量曝光ghi線,接著以230℃、20分鐘的條件進行後烘烤,做成硬化膜。對此硬化膜之表面測定XPS,求得各元素之波峰面積,算出各元素之質量比例。(Measurement conditions) The photosensitive composition was applied onto a glass substrate so as to have a thickness of 1 μm, and the ghi line was exposed at an exposure amount of 50 mJ/cm 2 , followed by post-baking at 230 ° C for 20 minutes to form a hardening. membrane. XPS was measured on the surface of the cured film, and the peak area of each element was determined, and the mass ratio of each element was calculated.

本發明之第2態樣係一種硬化膜,其係使第1態樣之感光性組成物硬化而成者。A second aspect of the present invention is a cured film obtained by curing a photosensitive composition of a first aspect.

本發明之第3態樣係一種顯示裝置,其具備第2態樣之硬化膜。A third aspect of the invention is a display device comprising a cured film of a second aspect.

本發明之第4態樣係一種經圖型化之硬化膜的形成方法,其包含下述步驟:   藉由塗佈第1態樣之感光性組成物形成塗佈膜的步驟、   位置選擇性地曝光塗佈膜的步驟,及   將經曝光之塗佈膜進行顯影的步驟。 [發明效果]A fourth aspect of the present invention provides a method for forming a patterned cured film, comprising the steps of: forming a coating film by applying the photosensitive composition of the first aspect, and selectively and selectively The step of exposing the coating film and the step of developing the exposed coating film. [Effect of the invention]

若依據本發明,可提供:一種感光性組成物,其可形成儘管遮光性優異,絕緣性與對基板之密著性仍優異之黑色硬化膜;一種硬化膜,其係使該感光性組成物硬化而成者;一種顯示裝置,其具備該硬化膜;及一種經圖型化之硬化膜的形成方法,其使用前述感光性組成物。According to the present invention, it is possible to provide a photosensitive composition which can form a black cured film which is excellent in light-shielding property, excellent in insulation property and adhesion to a substrate, and a cured film which is a photosensitive composition. A curing device; a display device comprising the cured film; and a method of forming a patterned cured film, wherein the photosensitive composition is used.

≪感光性組成物≫   感光性組成物包含(A)交聯成分、(B)光聚合起始劑與(C)碳黑。感光性組成物中之(C)碳黑的含量,感光性組成物之全固體成分中之(C)碳黑之含量為30質量%以上。因此,使用感光性組成物,可形成遮光性優異的硬化膜。≪Photosensitive composition 感光 The photosensitive composition contains (A) a crosslinking component, (B) a photopolymerization initiator, and (C) carbon black. The content of the (C) carbon black in the photosensitive composition is 30% by mass or more based on the content of the (C) carbon black in the total solid content of the photosensitive composition. Therefore, by using a photosensitive composition, a cured film excellent in light-shielding property can be formed.

又,感光性組成物所含之(A)交聯成分係包含選自下述式(a1)~(a4)所示之M單元、D單元、T單元及Q單元中之1種以上的結構單元之矽氧烷化合物:   M單元:R1 R2 R3 SiO1/2 ・・・(a1)   D單元:R4 R5 SiO2/2 ・・・(a2)   T單元:R6 SiO3/2 ・・・(a3)   Q單元:SiO4/2 ・・・(a4)   (式(a1)~(a4)中,R1 ~R6 各自獨立,為R7 -或R7 -O-所示之基,R7 為藉由C-Si鍵鍵結於式(a1)~式(a3)中之矽原子,或藉由C-O鍵鍵結於R7 -O-中之氧原子的1價有機基),   然後,矽氧烷化合物在其結構中具有2個以上之碳-碳雙鍵,且,矽氧烷化合物包含2個以上之選自M單元、D單元、T單元及Q單元中的結構單元,   感光性組成物藉由包含上述之矽氧烷化合物作為(A)交聯成分,容易形成絕緣性與對基板之密著性優異的硬化膜。In addition, the crosslinking component (A) contained in the photosensitive composition contains one or more selected from the group consisting of M units, D units, T units, and Q units represented by the following formulas (a1) to (a4). The unit's oxane compound: M unit: R 1 R 2 R 3 SiO 1/2・・・(a1) D unit: R 4 R 5 SiO 2/2・・・(a2) T unit: R 6 SiO 3 /2・・・(a3) Q unit: SiO 4/2・・・(a4) (In the formulas (a1) to (a4), R 1 to R 6 are independent, and are R 7 - or R 7 -O- The group shown, R 7 is a ruthenium atom bonded to the formula (a1) to the formula (a3) by a C-Si bond, or an oxygen atom bonded to the R 7 -O- by a CO bond. a valence organic group), then, the oxoxane compound has two or more carbon-carbon double bonds in its structure, and the oxoxane compound contains two or more selected from the group consisting of M unit, D unit, T unit, and Q unit. In the structural unit, the photosensitive composition contains the above-described oxoane compound as the (A) crosslinking component, and it is easy to form a cured film having excellent insulating properties and adhesion to the substrate.

進而,以下述測定條件測定感光性組成物之硬化物中的矽原子量(質量%)與碳原子量(質量%)時,矽原子量(質量%)/碳原子量(質量%)的比率為0.05以上。該比率為0.06以上較佳,0.07以上更佳,0.08以上再更佳,0.09以上特佳,0.10以上最佳。 (測定條件)   將感光性組成物以厚度成為1μm之方式塗佈在玻璃基板上,以ghi線50mJ/cm2 的曝光量進行曝光,接著以230℃、20分鐘的條件進行後烘烤,做成硬化膜。對此硬化膜之表面測定XPS,求得各元素之波峰面積,算出各元素之質量比例。Further, when the amount of ruthenium atom (% by mass) and the amount of carbon atoms (% by mass) in the cured product of the photosensitive composition are measured under the following measurement conditions, the ratio of the amount of ruthenium atom (% by mass) / the amount of carbon atom (% by mass) is 0.05 or more. The ratio is preferably 0.06 or more, more preferably 0.07 or more, still more preferably 0.08 or more, particularly preferably 0.09 or more, and most preferably 0.10 or more. (Measurement conditions) The photosensitive composition was applied onto a glass substrate so as to have a thickness of 1 μm, and exposed to an exposure amount of 50 mJ/cm 2 on a ghi line, followed by post-baking at 230 ° C for 20 minutes. Become a hardened film. XPS was measured on the surface of the cured film, and the peak area of each element was determined, and the mass ratio of each element was calculated.

為了提升基板與硬化膜之密著性,(A)交聯成分之矽氧烷化合物係感光性組成物中之矽氧烷化合物與(C)碳黑或後述之(D)黏結劑樹脂的量之關係為重要,若感光性組成物之硬化物中之矽原子量(質量%)/碳原子量(質量%)的比率為0.05以上,則矽氧烷化合物與(C)碳黑或後述(D)黏結劑樹脂充分地作用,可使基板與硬化膜之密著性充分地提升。   又,若矽原子量(質量%)/碳原子量(質量%)的比率為0.05以上,則(A)交聯成分之矽氧烷化合物與(C)碳黑之表面充分地作用,可形成絕緣性優異的硬化膜。In order to improve the adhesion between the substrate and the cured film, (A) the amount of the oxoxane compound in the photosensitive composition of the crosslinking component and (C) carbon black or the (D) binder resin described later. The relationship is important. When the ratio of the amount of ruthenium atom (% by mass) / the amount of carbon atoms (% by mass) in the cured product of the photosensitive composition is 0.05 or more, the siloxane compound and (C) carbon black or (D) will be described later. The binder resin acts sufficiently to sufficiently enhance the adhesion between the substrate and the cured film. In addition, when the ratio of the atomic weight (% by mass) / the amount of carbon atoms (% by mass) is 0.05 or more, the surface of the (A) crosslinked component and the surface of the (C) carbon black sufficiently act to form insulation. Excellent hardened film.

<(A)交聯成分>   (A)交聯成分係具有可藉由後述之(B)光聚合起始劑進行聚合之碳-碳雙鍵的成分。(A)交聯成分係包含選自下述式(a1)~(a4)所示之M單元、D單元、T單元及Q單元中之1種以上的結構單元之矽氧烷化合物:   M單元:R1 R2 R3 SiO1/2 ・・・(a1)   D單元:R4 R5 SiO2/2 ・・・(a2)   T單元:R6 SiO3/2 ・・・(a3)   Q單元:SiO4/2 ・・・(a4)   (式(a1)~(a3)中,R1 ~R6 各自獨立,為R7 -或R7 -O-所示之基,R7 為藉由C-Si鍵鍵結於式(a1)~式(a3)中之矽原子,或藉由C-O鍵鍵結於R7 -O-中之氧原子的1價有機基),該矽氧烷化合物在其結構中具有2個以上碳-碳雙鍵。   感光性組成物藉由組合包含該(A)交聯成分與感光性組成物之全固體成分中30質量%以上之(C)碳黑,可形成儘管遮光性優異,絕緣性與對基板之密著性仍優異之黑色硬化膜。<(A) Crosslinking component> (A) The crosslinking component is a component which has a carbon-carbon double bond which can be polymerized by the (B) photopolymerization initiator mentioned later. (A) The crosslinking component is a siloxane compound containing one or more structural units selected from the group consisting of M units, D units, T units, and Q units represented by the following formulas (a1) to (a4): M unit :R 1 R 2 R 3 SiO 1/2・・・(a1) D unit: R 4 R 5 SiO 2/2・・・(a2) T unit: R 6 SiO 3/2・・・(a3) Q Unit: SiO 4/2 (a4) (In the formulas (a1) to (a3), R 1 to R 6 are each independently, and are a group represented by R 7 - or R 7 -O-, and R 7 is a borrowing a ruthenium atom bonded to a ruthenium atom in the formula (a1) to the formula (a3) by a C-Si bond, or a monovalent organic group bonded to an oxygen atom in R 7 -O- by a CO bond, The compound has two or more carbon-carbon double bonds in its structure. The photosensitive composition can be formed by combining 30% by mass or more of (C) carbon black containing the cross-linking component (A) and the total solid content of the photosensitive composition, and is excellent in light-shielding property and insulative property to the substrate. A black cured film that is still excellent in character.

上述式(a1)~(a3)中,R1 ~R6 各自獨立,為R7 -或R7 -O-所示之基。然後,R7 為1價有機基,且藉由C-Si鍵鍵結於式(a1)~式(a3)中之矽原子,或藉由C-O鍵鍵結於R7 -O-中之氧原子。In the above formulae (a1) to (a3), R 1 to R 6 are each independently a group represented by R 7 - or R 7 -O-. Then, R 7 is a monovalent organic group, and is bonded to a halogen atom in the formula (a1) to the formula (a3) by a C-Si bond, or an oxygen bonded to the R 7 -O- by a CO bond. atom.

作為R7 之有機基,只要滿足上述條件便無特別限定。R7 亦可含有O、N、S、P、B、鹵素原子等之雜原子。   作為R7 之有機基為不具有可藉由(B)光聚合起始劑進行聚合之碳-碳雙鍵之情形的合適例子,可舉例碳原子數1以上20以下之烷基、碳原子數3以上20以下之環烷基、碳原子數6以上20以下之芳香族烴基,及碳原子數7以上20以下之芳烷基、碳原子數2以上20以下之飽和脂肪族醯基、碳原子數7以上20以下之芳香族醯基等。此等基皆可具有取代基。取代基之種類及數量,在不妨礙本發明之目的的範圍內便無特別限定。The organic group of R 7 is not particularly limited as long as the above conditions are satisfied. R 7 may also contain a hetero atom such as O, N, S, P, B or a halogen atom. A suitable example of the case where the organic group of R 7 is a carbon-carbon double bond which can be polymerized by the (B) photopolymerization initiator can be exemplified by an alkyl group having 1 or more carbon atoms and a carbon number. 3 or more and 20 or less cycloalkyl groups, an aromatic hydrocarbon group having 6 or more and 20 or less carbon atoms, an aralkyl group having 7 or more and 20 or less carbon atoms, a saturated aliphatic fluorenyl group having 2 or more and 20 or less carbon atoms, or a carbon atom An aromatic sulfhydryl group having a number of 7 or more and 20 or less. These groups may all have a substituent. The type and the number of the substituents are not particularly limited as long as they do not impair the object of the present invention.

作為取代基之合適的例子,可舉例碳原子數1以上20以下之烷基、碳原子數1以上20以下之烷氧基、碳原子數3以上10以下之環烷基、碳原子數3以上10以下之環烷氧基、碳原子數2以上20以下之飽和脂肪族醯基、碳原子數2以上20以下之烷氧基羰基、碳原子數2以上20以下之飽和脂肪族醯氧基、可具有取代基之苯基、可具有取代基之苯氧基、可具有取代基之苯基硫基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之苯甲醯氧基、可具有取代基之碳原子數7以上20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘氧基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之萘甲醯氧基、可具有取代基之碳原子數11以上20以下之萘基烷基、可具有取代基之雜環基、可具有取代基之雜環羰基、胺基、經1或2個有機基取代的胺基、羥基、巰基、鹵素原子、硝基,及氰基等。A suitable example of the substituent is an alkyl group having 1 or more and 20 or less carbon atoms, an alkoxy group having 1 or more and 20 or less carbon atoms, a cycloalkyl group having 3 or more and 10 or less carbon atoms, and 3 or more carbon atoms. a cycloalkoxy group of 10 or less, a saturated aliphatic fluorenyl group having 2 or more and 20 or less carbon atoms, an alkoxycarbonyl group having 2 or more and 20 or less carbon atoms, a saturated aliphatic decyloxy group having 2 or more and 20 or less carbon atoms, a phenyl group which may have a substituent, a phenoxy group which may have a substituent, a phenylthio group which may have a substituent, a benzyl group which may have a substituent, a phenoxycarbonyl group which may have a substituent, may have a substitution a benzyl methoxy group, a phenylalkyl group having 7 or more and 20 or less carbon atoms which may have a substituent, a naphthyl group which may have a substituent, a naphthyloxy group which may have a substituent, and a naphthyl group which may have a substituent A mercapto group, a naphthyloxycarbonyl group which may have a substituent, a naphthylmethoxycarbonyl group which may have a substituent, a naphthylalkyl group having 11 or more and 20 or less carbon atoms which may have a substituent, and a heterocyclic group which may have a substituent a heterocyclic carbonyl group having an substituent, an amine group, substituted with 1 or 2 organic groups Group, a hydroxyl group, a mercapto group, a halogen atom, a nitro group, a cyano group and the like.

作為R7 之有機基之合適的具體例,可舉例甲基、乙基、n-丙基、異丙基、n-丁基、異丁基、sec-丁基、三級丁基、n-戊基及n-己基等之碳原子數1以上6以下之烷基;苯基、o-甲苯基、m-甲苯基、p-甲苯基、萘-1-基,及萘2-基等之芳香族烴基;乙醯基、丙醯基、丁醯基、戊醯基等之碳原子數2以上6以下之飽和脂肪族醯基;苯甲醯基、萘-1-基羰基、萘-2-基羰基等之芳香族醯基。   此等之中,以甲基、乙基、苯基、甲氧基、乙氧基及苯氧基較佳。As a suitable specific example of the organic group of R 7 , a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a sec-butyl group, a tertiary butyl group, and an n- An alkyl group having 1 or more and 6 or less carbon atoms such as a pentyl group or an n-hexyl group; a phenyl group, an o-tolyl group, an m-tolyl group, a p-tolyl group, a naphthalene-1-yl group, and a naphthalene-2-yl group; Aromatic hydrocarbon group; saturated aliphatic fluorenyl group having 2 or more and 6 or less carbon atoms; such as an ethyl fluorenyl group, a propyl fluorenyl group, a butyl fluorenyl group or a pentamidine group; a benzepidine group, a naphthalen-1-ylcarbonyl group, a naphthalen-2-yl group An aromatic fluorenyl group such as a carbonyl group. Among these, a methyl group, an ethyl group, a phenyl group, a methoxy group, an ethoxy group, and a phenoxy group are preferable.

作為不具有碳-碳雙鍵之M單元之合適的具體例,可舉例(CH3 )3 SiO1/2 、(CH3 CH2 )(CH3 )2 SiO1/2 、(CH3 CH2 )2 (CH3 )SiO1/2 、(CH3 CH2 )3 SiO1/2 等之三烷基單元;(C6 H5 )3 SiO1/2 等之三芳基單元;(C6 H5 )2 (CH3 )SiO1/2 、(C6 H5 )2 (CH3 CH2 )SiO1/2 等之二芳基單烷基單元;(C6 H5 )(CH3 )2 SiO1/2 、(C6 H5 )(CH3 CH2 )2 SiO1/2 等之單芳基二烷基單元;(CH3 O)3 SiO1/2 、(CH3 CH2 O)(CH3 O)2 SiO1/2 、(CH3 CH2 O)2 (CH3 O)SiO1/2 、(CH3 CH2 O)3 SiO1/2 等之三烷氧基單元;(C6 H5 O)3 SiO1/2 等之三芳氧基單元;(C6 H5 O)2 (CH3 O)SiO1/2 、(C6 H5 O)2 (CH3 CH2 O)SiO1/2 等之二芳氧基單烷氧基單元;(C6 H5 O)(CH3 O)2 SiO1/2 、(C6 H5 O)(CH3 CH2 O)2 SiO1/2 等之單芳氧基二烷氧基單元;(CH3 O)2 (CH3 )SiO1/2 、(CH3 O)2 (CH3 CH2 )SiO1/2 、(CH3 CH2 O)2 (CH3 )SiO1/2 、(CH3 CH2 O)2 (CH3 CH2 )SiO1/2 等之二烷氧基單烷基單元;(CH3 O)2 (C6 H5 )SiO1/2 、(CH3 CH2 O)2 (C6 H5 )SiO1/2 等之二烷氧基單芳基單元;(CH3 O)(C6 H5 )2 SiO1/2 、(CH3 CH2 O)(C6 H5 )2 SiO1/2 等之單烷氧基二芳基單元;(C6 H5 O)(CH3 )2 SiO1/2 、(C6 H5 O)(CH3 CH2 )2 SiO1/2 等之單芳氧基二烷基單元;(C6 H5 O)2 (CH3 )SiO1/2 、(C6 H5 O)2 (CH3 CH2 )SiO1/2 等之二芳氧基單烷基單元;(C6 H5 O)(C6 H5 )2 SiO1/2 等之單芳氧基二芳基單元;(C6 H5 O)2 (C6 H5 )SiO1/2 等之二芳氧基單芳基單元等。As a suitable specific example of the M unit having no carbon-carbon double bond, (CH 3 ) 3 SiO 1/2 , (CH 3 CH 2 )(CH 3 ) 2 SiO 1/2 , (CH 3 CH 2 ) can be exemplified. a trialkyl unit of 2 (CH 3 )SiO 1/2 , (CH 3 CH 2 ) 3 SiO 1/2 or the like; a triaryl unit of (C 6 H 5 ) 3 SiO 1/2 or the like; (C 6 H 5 ) a diarylmonoalkyl unit of 2 (CH 3 )SiO 1/2 , (C 6 H 5 ) 2 (CH 3 CH 2 )SiO 1/2 or the like; (C 6 H 5 )(CH 3 ) 2 a monoaryldialkyl unit such as SiO 1/2 or (C 6 H 5 )(CH 3 CH 2 ) 2 SiO 1/2 ; (CH 3 O) 3 SiO 1/2 , (CH 3 CH 2 O) (CH 3 O) 2 SiO 1/2 , (CH 3 CH 2 O) 2 (CH 3 O) SiO 1/2, (CH 3 CH 2 O) 3 SiO 1/2 units, etc. trialkoxy; ( C 6 H 5 O) 3 SiO 1/2 or the like triaryloxy unit; (C 6 H 5 O) 2 (CH 3 O)SiO 1/2 , (C 6 H 5 O) 2 (CH 3 CH 2 O a diaryloxymonoalkoxy unit of SiO 1/2 or the like; (C 6 H 5 O)(CH 3 O) 2 SiO 1/2 , (C 6 H 5 O)(CH 3 CH 2 O) 2 a monoaryloxy dialkoxy unit of SiO 1/2 or the like; (CH 3 O) 2 (CH 3 )SiO 1/2 , (CH 3 O) 2 (CH 3 CH 2 )SiO 1/2 , (CH 3 CH 2 O) 2 (CH 3) SiO 1/2, (CH 3 CH 2 O) 2 (CH 3 CH 2) SiO 1/2 , etc. dialkoxy monoalkoxy Unit; (CH 3 O) 2 ( C 6 H 5) SiO 1/2, (CH 3 CH 2 O) 2 (C 6 H 5) SiO 1/2 , etc. dialkoxy monoaryl units; (CH 3 O) (C 6 H 5 ) 2 SiO 1/2 , (CH 3 CH 2 O)(C 6 H 5 ) 2 SiO 1/2 or the like monoalkoxy diaryl unit; (C 6 H 5 O (CH 3 ) 2 SiO 1/2 , (C 6 H 5 O)(CH 3 CH 2 ) 2 SiO 1/2 or the like monoaryloxydialkyl unit; (C 6 H 5 O) 2 (CH 3 ) a diaryloxymonoalkyl unit such as SiO 1/2 or (C 6 H 5 O) 2 (CH 3 CH 2 )SiO 1/2 ; (C 6 H 5 O)(C 6 H 5 ) 2 a monoaryloxydiaryl unit of SiO 1/2 or the like; a diaryloxymonoaryl unit of (C 6 H 5 O) 2 (C 6 H 5 )SiO 1/2 or the like.

作為不具有碳-碳雙鍵之D單元之合適的具體例,可舉例(CH3 )2 SiO2/2 、(CH3 CH2 )(CH3 )SiO2/2 、(CH3 CH2 )2 SiO2/2 等之二烷基單元;(C6 H5 )2 SiO2/2 等之二芳基單元;(C6 H5 )(CH3 )SiO2/2 、(C6 H5 )(CH3 CH2 )SiO2/2 等之單芳基單烷基單元;(CH3 O)2 SiO2/2 、(CH3 CH2 O)(CH3 O)SiO2/2 、(CH3 CH2 O)2 SiO2/2 等之二烷氧基單元;(C6 H5 O)2 SiO2/2 等之二芳氧基單元;(C6 H5 O)(CH3 O)SiO2/2 、(C6 H5 O)(CH3 CH2 O)SiO2/2 等之單芳氧基單烷氧基單元;(CH3 O)(CH3 )SiO2/2 、(CH3 O)(CH3 CH2 )SiO2/2 、(CH3 CH2 O)(CH3 )SiO2/2 、(CH3 CH2 O)(CH3 CH2 )SiO2/2 等之單烷氧基單烷基單元;(CH3 O)(C6 H5 )SiO2/2 、(CH3 CH2 O)(C6 H5 )SiO2/2 等之單烷氧基單芳基單元;(C6 H5 O)(CH3 )SiO2/2 、(C6 H5 O)(CH3 CH2 )SiO2/2 等之單芳氧基單烷基單元;(C6 H5 O)(C6 H5 )SiO2/2 等之單芳氧基單芳基單元等。As a suitable specific example of the D unit having no carbon-carbon double bond, (CH 3 ) 2 SiO 2/2 , (CH 3 CH 2 )(CH 3 )SiO 2/2 , (CH 3 CH 2 ) can be exemplified. 2 SiO 2/2 units, etc. dialkyl; (C 6 H 5) 2 SiO 2/2 units, etc. biaryl; (C 6 H 5) ( CH 3) SiO 2/2, (C 6 H 5 a monoaryl monoalkyl unit of (CH 3 CH 2 )SiO 2/2 or the like; (CH 3 O) 2 SiO 2/2 , (CH 3 CH 2 O)(CH 3 O)SiO 2/2 , ( CH 3 CH 2 O) 2 diatomoxy unit of SiO 2/2 ; diaryloxy unit of (C 6 H 5 O) 2 SiO 2/2 ; (C 6 H 5 O) (CH 3 O a monoaryloxymonoalkoxy unit such as SiO 2/2 or (C 6 H 5 O)(CH 3 CH 2 O)SiO 2/2 ; (CH 3 O)(CH 3 )SiO 2/2 , (CH 3 O)(CH 3 CH 2 )SiO 2/2 , (CH 3 CH 2 O)(CH 3 )SiO 2/2 , (CH 3 CH 2 O)(CH 3 CH 2 )SiO 2/2, etc. a monoalkoxy monoalkyl unit; a monoalkoxy group of (CH 3 O)(C 6 H 5 )SiO 2/2 , (CH 3 CH 2 O)(C 6 H 5 )SiO 2/2 or the like An aryl unit; a monoaryloxymonoalkyl unit of (C 6 H 5 O)(CH 3 )SiO 2/2 , (C 6 H 5 O)(CH 3 CH 2 )SiO 2/2 or the like; 6 H 5 O) (C 6 H 5 ) SiO 2/2 or the like monoaryloxymonoaryl unit or the like.

作為不具有碳-碳雙鍵之T單元之合適的具體例,可舉例(CH3 )SiO3/2 、(CH3 CH2 )SiO3/2 等之單烷基單元;(C6 H5 )SiO3/2 等之單芳基單元;(CH3 O)SiO3/2 、(CH3 CH2 O)SiO3/2 等之單烷氧基單元;(C6 H5 O)SiO3/2 等之二單芳氧基單元等。As a suitable specific example of the T unit having no carbon-carbon double bond, a monoalkyl unit such as (CH 3 )SiO 3/2 or (CH 3 CH 2 )SiO 3/2 can be exemplified; (C 6 H 5 a monoaryl unit such as SiO 3/2 ; a monoalkoxy unit such as (CH 3 O)SiO 3/2 or (CH 3 CH 2 O)SiO 3/2 ; (C 6 H 5 O)SiO 3 /2 or the like of a mono-aryloxy unit or the like.

作為R7 為具有碳-碳雙鍵之基之情形的合適例子,可舉例碳原子數2以上10以下之烯基、經碳原子數2以上4以下之烯基取代的芳香族烴基、經碳原子數2以上4以下之烯基取代的雜環基、經丙烯醯氧基取代的碳原子數2以上10以下之烷基、經甲基丙烯醯氧基取代的碳原子數2以上10以下之烷基、經丙烯醯氧基取代的芳香族烴基、經甲基丙烯醯氧基取代的芳香族烴基、經丙烯醯氧基取代的雜環基、經甲基丙烯醯氧基取代的雜環基。As a suitable example of the case where R 7 is a group having a carbon-carbon double bond, an alkenyl group having 2 or more and 10 or less carbon atoms, an aromatic hydrocarbon group substituted by an alkenyl group having 2 or more and 4 or less carbon atoms, and carbon can be exemplified. An alkenyl-substituted heterocyclic group having 2 or more and 4 or less atoms, an alkyl group having 2 or more and 10 or less carbon atoms substituted with an acryloxy group, and 2 or more and 10 or less carbon atoms substituted by a methacryloxy group. An alkyl group, an propyleneoxy group-substituted aromatic hydrocarbon group, a methacryloxy group-substituted aromatic hydrocarbon group, an acryloxy group-substituted heterocyclic group, a methacryloxy group-substituted heterocyclic group .

作為R7 為具有碳-碳雙鍵之基之情形的合適之具體例,可舉例乙烯基、烯丙基、3-丁烯基、4-戊烯基、5-己烯基、4-乙烯基苯基、3-乙烯基苯基、2-乙烯基苯基、2-丙烯醯氧基乙基、2-甲基丙烯醯氧基乙基、3-丙烯醯氧基n-丙基、3-甲基丙烯醯氧基n-丙基。此等之中,以乙烯基、烯丙基、3-丙烯醯氧基n-丙基及3-甲基丙烯醯氧基n-丙基較佳。As a suitable specific example of the case where R 7 is a group having a carbon-carbon double bond, a vinyl group, an allyl group, a 3-butenyl group, a 4-pentenyl group, a 5-hexenyl group, a 4-ethylene group can be exemplified. Phenylphenyl, 3-vinylphenyl, 2-vinylphenyl, 2-propenyloxyethyl, 2-methylpropenyloxyethyl, 3-propenyloxy n-propyl, 3 - Methacryloxyloxy n-propyl. Among these, vinyl, allyl, 3-propenyloxy n-propyl and 3-methylpropenyloxy n-propyl are preferred.

矽氧烷化合物的全結構單元中之包含具有碳-碳雙鍵之基的M單元、D單元及T單元的總量,為5莫耳%以上70莫耳%以下較佳,10莫耳%以上50莫耳%以下更佳,15莫耳%以上30莫耳%以下特佳。The total amount of the M unit, the D unit, and the T unit including the group having a carbon-carbon double bond in the entire structural unit of the siloxane compound is preferably 5 mol% or more and 70 mol% or less, preferably 10 mol%. The above 50 mol% or less is more preferable, and 15 mol% or more and 30 mol% or less are particularly preferable.

作為具有乙烯基作為具有碳-碳雙鍵之基的M單元之合適例子,可舉例下述式所示之單元。 As a suitable example of the M unit having a vinyl group as a group having a carbon-carbon double bond, a unit represented by the following formula can be exemplified.

作為具有烯丙基作為具有碳-碳雙鍵之基的M單元之合適例子,可舉例下述式所示之單元。 As a suitable example of the M unit having an allyl group as a group having a carbon-carbon double bond, a unit represented by the following formula can be exemplified.

作為具有3-丙烯醯氧基n-丙基作為具有碳-碳雙鍵之基的M單元之合適例子,可舉例下述式所示之單元。 As a suitable example of the M unit having a 3-propenyloxyl n-propyl group as a group having a carbon-carbon double bond, a unit represented by the following formula can be exemplified.

作為具有3-甲基丙烯醯氧基n-丙基作為具有碳-碳雙鍵之基的M單元之合適例子,可舉例下述式所示之單元。 As a suitable example of the M unit having a 3-methacryloxyl n-propyl group as a group having a carbon-carbon double bond, a unit represented by the following formula can be exemplified.

作為具有乙烯基作為具有碳-碳雙鍵之基的D單元之合適例子,可舉例下述式所示之單元。 As a suitable example of the D unit having a vinyl group as a group having a carbon-carbon double bond, a unit represented by the following formula can be exemplified.

作為具有烯丙基作為具有碳-碳雙鍵之基的D單元之合適例子,可舉例下述式所示之單元。 As a suitable example of the D unit having an allyl group as a group having a carbon-carbon double bond, a unit represented by the following formula can be exemplified.

作為具有3-丙烯醯氧基n-丙基或3-甲基丙烯醯氧基n-丙基作為具有碳-碳雙鍵之基的M單元之合適例子,可舉例下述式所示之單元。 As a suitable example of the M unit having a 3-propenyloxyl n-propyl group or a 3-methylpropenyloxy n-propyl group as a group having a carbon-carbon double bond, a unit represented by the following formula can be exemplified .

作為具有乙烯基、烯丙基、3-丙烯醯氧基n-丙基或3-甲基丙烯醯氧基n-丙基作為具有碳-碳雙鍵之基的T單元之合適例子,可舉例下述式所示之單元。 As a suitable example of a T unit having a vinyl group, an allyl group, a 3-propenyloxyl n-propyl group or a 3-methylpropenyloxy n-propyl group as a group having a carbon-carbon double bond, an example is exemplified. The unit shown by the following formula.

以上說明之具有選自式(a1)所示之M單元、式(a2)所示之D單元、式(a3)所示之T單元、式(a4)所示之Q單元中之單元的矽氧烷化合物,可藉由將下述式(a-I)~(a-IV)所示之矽烷化合物依循常規方法使其水解縮合來製造。The above description has a unit selected from the group consisting of an M unit represented by the formula (a1), a D unit represented by the formula (a2), a T unit represented by the formula (a3), and a unit represented by the formula (a4). The oxane compound can be produced by subjecting a decane compound represented by the following formulas (aI) to (a-IV) to hydrolysis and condensation according to a conventional method.

賦予M單元之矽烷化合物:R1 R2 R3 SiR8 ・・・(a-I)   賦予D單元之矽烷化合物:R4 R5 SiR8 2 ・・・(a-II)   賦予T單元之矽烷化合物:R6 SiR8 3 ・・・(a-III)   賦予Q單元之矽烷化合物:SiR8 4 ・・・(a-IV)   上述式(a-I)~(a-IV)中,R1 ~R6 與式(a1)~(a4)中之R1 ~R6 相同,R8 表示藉由水解生成矽醇基的基。The decane compound to which the M unit is added: R 1 R 2 R 3 SiR 8 (a) The decane compound to which the D unit is added: R 4 R 5 SiR 8 2 (a-II) The decane compound to which the T unit is added: R 6 SiR 8 3 (a-III) The decane compound to which the Q unit is added: SiR 8 4 (a-IV) In the above formulas (aI) to (a-IV), R 1 to R 6 and R 1 to R 6 in the formulae (a1) to (a4) are the same, and R 8 represents a group which forms a sterol group by hydrolysis.

作為藉由水解生成矽醇基的基並無特別限定,可由公知的基中適當地選擇。作為藉由水解生成矽醇基的基,可舉例甲氧基、乙氧基、n-丙基氧基、異丙基氧基等之烷氧基;苯氧基;氯原子、溴原子等之鹵素原子;異氰酸酯基等。The group which forms a sterol group by hydrolysis is not specifically limited, and can be suitably selected from well-known base. Examples of the group which forms a sterol group by hydrolysis include an alkoxy group such as a methoxy group, an ethoxy group, an n-propyloxy group or an isopropyloxy group; a phenoxy group; a chlorine atom, a bromine atom or the like. A halogen atom; an isocyanate group or the like.

上述之矽氧烷化合物,為包含選自下述式(a1a)、式(a2a)、式(a3a)及式(a4)所示之結構單元中之1種以上的結構單元I者較佳:   (R7 O)3 SiO1/2 ・・・(a1a)   (R7 O)2 SiO2/2 ・・・(a2a)   (R7 O)SiO3/2 ・・・(a3a)   SiO4/2 ・・・(a4)   (式(a1a)、式(a2a)及式(a3a)中,R7 為藉由C-O鍵鍵結於R7 -O-中之氧原子的1價有機基)。   矽氧烷化合物藉由包含該結構單元I,而更容易形成絕緣性與對基板之密著性優異的黑色硬化膜。The above-mentioned oxoxane compound is preferably one or more structural units I selected from the structural units represented by the following formula (a1a), formula (a2a), formula (a3a), and formula (a4): (R 7 O) 3 SiO 1/2・・・(a1a) (R 7 O) 2 SiO 2/2・(a2a) (R 7 O)SiO 3/2・・・(a3a) SiO 4/ 2 (a4) (In the formula (a1a), the formula (a2a), and the formula (a3a), R 7 is a monovalent organic group bonded to an oxygen atom in R 7 -O- by a CO bond). By including the structural unit I, the siloxane compound can more easily form a black cured film having excellent insulating properties and adhesion to a substrate.

上述之矽氧烷化合物,為進而包含選自下述式(a1b)、式(a2b)及式(a3b)所示之結構單元中之1種以上的結構單元II,及/或   選自下述式(a1c)及式(a2c)所示之結構單元中之1種以上之結構單元III者較佳:   (R7 O)2 R7 SiO1/2 ・・・(a1b)   (R7 O)R7 SiO2/2 ・・・(a2b)   R7 SiO3/2 ・・・(a3b)   (式(a1b)、式(a2b)及式(a3b)中,R7 為以C-Si鍵鍵結於式(a1b)、式(a2b)及式(a3b)中之矽原子,或藉由C-O鍵鍵結於R7 -O-中之氧原子的1價有機基);   (R7 O)R7 2 SiO1/2 ・・・(a1c)   R7 2 SiO2/2 ・・・(a2c)   (式(a1c)及式(a2c)中,R7 為以C-Si鍵鍵結於式(a1c)及式(a2c)中之矽原子,或藉由C-O鍵鍵結於R7 -O-中之氧原子的1價有機基)。   矽氧烷化合物藉由包含上述之結構單元I同時包含結構單元II及/或結構單元III,而進而更容易形成絕緣性與對基板之密著性優異的黑色硬化膜。The above-mentioned oxoxane compound further contains one or more structural units II selected from the structural units represented by the following formula (a1b), formula (a2b) and formula (a3b), and/or is selected from the following It is preferable that one or more structural units III of the structural unit represented by the formula (a1c) and the formula (a2c) are: (R 7 O) 2 R 7 SiO 1/2 (1) (a1b) (R 7 O) R 7 SiO 2/2・(a2b) R 7 SiO 3/2・(a3b) (In the formula (a1b), the formula (a2b), and the formula (a3b), R 7 is a C-Si bond. a ruthenium atom in the formula (a1b), the formula (a2b) and the formula (a3b), or a monovalent organic group bonded to an oxygen atom in R 7 -O- by a CO bond; (R 7 O) R 7 2 SiO 1/2・・・(a1c) R 7 2 SiO 2/2・(a2c) (In the formula (a1c) and the formula (a2c), R 7 is bonded to the C—Si bond. (a1c) and a halogen atom in the formula (a2c), or a monovalent organic group bonded to an oxygen atom in R 7 -O- by a CO bond). By including the structural unit II and/or the structural unit III, the siloxane compound furthermore can more easily form a black cured film having excellent insulating properties and adhesion to a substrate.

矽氧烷化合物包含結構單元I同時包含結構單元II及/或結構單元III之情形中,矽氧烷化合物中之(結構單元I之莫耳量)/(結構單元I、結構單元II及結構單元III之莫耳量的總和)之值為0.25以上較佳。   藉由(結構單元I之莫耳量)/(結構單元I、結構單元II及結構單元III之莫耳量的總和)之值為0.25以上,而特別容易形成絕緣性與對基板之密著性優異的黑色硬化膜。   (結構單元I之莫耳量)/(結構單元I、結構單元II及結構單元III之莫耳量的總和)之值為0.30以上較佳,0.40以上更佳,0.50以上特佳。   (結構單元I之莫耳量)/(結構單元I、結構單元II及結構單元III之莫耳量的總和)之值的上限值雖可適當地設定,但可例如0.90以下,較佳為0.85以下。In the case where the structural unit I contains the structural unit II and/or the structural unit III, the oxoxane compound (the molar amount of the structural unit I) / (the structural unit I, the structural unit II and the structural unit) The sum of the molar amounts of III) is preferably 0.25 or more. The value of (the molar amount of the structural unit I) / (the sum of the molar amount of the structural unit I, the structural unit II, and the structural unit III) is 0.25 or more, and the insulating property and the adhesion to the substrate are particularly easily formed. Excellent black hardened film. The value of (the molar amount of the structural unit I) / (the sum of the molar amounts of the structural unit I, the structural unit II, and the structural unit III) is preferably 0.30 or more, more preferably 0.40 or more, and particularly preferably 0.50 or more. The upper limit of the value of (the molar amount of the structural unit I) / (the sum of the molar amounts of the structural unit I, the structural unit II, and the structural unit III) may be appropriately set, but may be, for example, 0.90 or less, preferably Below 0.85.

作為以上說明之矽氧烷化合物之較佳的一例,可舉例由(CH3 O)SiO3/2 (T單元)、(CH3 )SiO3/2 (T單元)及下述式之單元(T單元)而成之矽氧烷化合物。此處,(CH3 O)SiO3/2 (T單元)相當於上述結構單元I。又,(CH3 )SiO3/2 (T單元)及下述式之單元(T單元),相當於上述結構單元II。 As a preferable example of the above-described alkoxysilane compound, (CH 3 O)SiO 3/2 (T unit), (CH 3 )SiO 3/2 (T unit), and a unit of the following formula can be exemplified ( T unit) is a oxane compound. Here, (CH 3 O)SiO 3/2 (T unit) corresponds to the above structural unit 1. Further, (CH 3 )SiO 3/2 (T unit) and a unit (T unit) of the following formula correspond to the above structural unit II.

該矽氧烷化合物中,(CH3 O)SiO3/2 (T單元)之含量,在全結構單元中,為25莫耳%以上80莫耳%以下較佳,30莫耳%以上70莫耳%以下更佳,40莫耳%以上60莫耳%以下特佳。   又,上述之矽氧烷化合物中,具有3-甲基丙烯醯氧基n-丙基之上述式之結構單元之含量,在全結構單元中為5莫耳%以上70莫耳%以下較佳,10莫耳%以上50莫耳%以下更佳,15莫耳%以上30莫耳%以下特佳。In the oxane compound, the content of (CH 3 O)SiO 3/2 (T unit) is preferably 25 mol% or more and 80 mol% or less in the total structural unit, and 30 mol% or more is 70 mol. More preferably, the ear is less than or equal to 40%, and more preferably 40% or more and 60% or less. Further, among the above-mentioned oxoxane compounds, the content of the structural unit of the above formula having a 3-methylpropenyloxy n-propyl group is preferably 5 mol% or more and 70 mol% or less in the total structural unit. 10 mol% or more and 50 mol% or less is more preferable, and 15 mol% or more is 30 mol% or less.

矽氧烷化合物之分子量,在不妨礙本發明之目的的範圍內便無特別限定。矽氧烷化合物之聚苯乙烯換算的重量平均分子量(Mw),為750以上6000以下較佳,800以上5000以下更佳,1000以上3000以下特佳。The molecular weight of the siloxane compound is not particularly limited as long as it does not impair the object of the present invention. The polystyrene-equivalent weight average molecular weight (Mw) of the siloxane compound is preferably 750 or more and 6000 or less, more preferably 800 or more and 5,000 or less, and still more preferably 1,000 or more and 3,000 or less.

感光性組成物中之(A)交聯成分之矽氧烷化合物之含量,相對於感光性組成物之全固體成分為5質量%以上較佳,5質量%以上30質量%以下更佳,5質量%以上20質量%以下進而佳,5質量%以上15質量%以下特佳。The content of the oxoxane compound of the cross-linking component (A) in the photosensitive composition is preferably 5% by mass or more, more preferably 5% by mass or more and 30% by mass or less, based on the total solid content of the photosensitive composition. It is more preferably 20% by mass or more and more preferably 5% by mass or more and 15% by mass or less.

<(B)光聚合起始劑>   作為(B)光聚合起始劑並無特別限定,可使用以往公知的光聚合起始劑。<(B) Photopolymerization initiator> The (B) photopolymerization initiator is not particularly limited, and a conventionally known photopolymerization initiator can be used.

作為(B)光聚合起始劑,具體而言,可舉例1-羥基環己基苯基酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、1-[4-(2-羥基乙氧基)苯基]-2-羥基-2-甲基-1-丙烷-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、1-(4-十二烷基苯基)-2-羥基-2-甲基丙烷-1-酮、2,2-二甲氧基-1,2-二苯基乙烷-1-酮、雙(4-二甲胺基苯基)酮、2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉基丙烷-1-酮、2-苄基-2-二甲胺基-1-(4-嗎啉基苯基)-丁烷-1-酮、乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基],1-(O-乙醯肟)、(9-乙基-6-硝基-9H-咔唑-3-基)[4-(2-甲氧基-1-甲基乙氧基)-2-甲基苯基]甲酮O-乙醯肟、2-(苯甲醯氧基亞胺基)-1-[4-(苯基硫基)苯基]-1-辛酮、2,4,6-三甲基苯甲醯基二苯基膦氧化物、4-苯甲醯基-4’-甲基二甲硫醚、4-二甲胺基苯甲酸、4-二甲胺基苯甲酸甲酯、4-二甲胺基苯甲酸乙酯、4-二甲胺基苯甲酸丁酯、4-二甲胺基-2-乙基己基苯甲酸、4-二甲胺基-2-異戊基苯甲酸、苄基-β-甲氧基乙基縮醛、苄基二甲基縮酮、1-苯基-1,2-丙烷二酮-2-(O-乙氧基羰基)肟、o-苯甲醯基苯甲酸甲酯、2,4-二乙基噻吨酮、2-氯噻吨酮、2,4-二甲基噻吨酮、1-氯-4-丙氧基噻吨酮、噻噸、2-氯噻噸、2,4-二乙基噻噸、2-甲基噻噸、2-異丙基噻噸、2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌、偶氮雙異丁腈、苯甲醯基過氧化物、氫過氧化異丙苯、2-巰基苯并咪唑、2-巰基苯并唑、2-巰基苯并噻唑、2-(o-氯苯基)-4,5-二(m-甲氧基苯基)-咪唑基二聚體、二苯甲酮、2-氯二苯甲酮、p,p’-雙二甲胺基二苯甲酮、4,4’-雙二乙胺基二苯甲酮、4,4’-二氯二苯甲酮、3,3-二甲基-4-甲氧基二苯甲酮、苄基、安息香、安息香甲基醚、安息香乙基醚、安息香異丙基醚、安息香-n-丁基醚、安息香異丁基醚、安息香丁基醚、苯乙酮、2,2-二乙氧基苯乙酮、p-二甲基苯乙酮、p-二甲胺基丙醯苯、二氯苯乙酮、三氯苯乙酮、p-三級丁基苯乙酮、p-二甲胺基苯乙酮、p-三級丁基三氯苯乙酮、p-三級丁基二氯苯乙酮、α,α-二氯-4-苯氧基苯乙酮、噻吨酮、2-甲基噻吨酮、2-異丙基噻吨酮、二苯并環庚酮、戊基-4-二甲胺基苯甲酸酯、9-苯基吖啶、1,7-雙-(9-吖啶基)庚烷、1,5-雙-(9-吖啶基)戊烷、1,3-雙-(9-吖啶基)丙烷、p-甲氧基三、2,4,6-參(三氯甲基)-s-三、2-甲基-4,6-雙(三氯甲基)-s-三、2-[2-(5-甲基呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s-三、2-[2-(呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s-三、2-[2-(4-二乙胺基-2-甲基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三、2-[2-(3,4-二甲氧基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-s-三、2-(4-乙氧基苯乙烯基)-4,6-雙(三氯甲基)-s-三、2-(4-n-丁氧基苯基)-4,6-雙(三氯甲基)-s-三、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯基-s-三、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯基-s-三、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯乙烯基苯基-s-三、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯乙烯基苯基-s-三等。此等之光聚合起始劑,可單獨或組合2種以上來使用。As the (B) photopolymerization initiator, specifically, 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1-[4-( 2-hydroxyethoxy)phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropane- 1-ketone, 1-(4-dodecylphenyl)-2-hydroxy-2-methylpropan-1-one, 2,2-dimethoxy-1,2-diphenylethane- 1-ketone, bis(4-dimethylaminophenyl)one, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinylpropan-1-one, 2-benzyl 2-dimethylamino-1-(4-morpholinylphenyl)-butan-1-one, ethyl ketone, 1-[9-ethyl-6-(2-methylbenzhydryl) )-9H-carbazol-3-yl], 1-(O-acetamidine), (9-ethyl-6-nitro-9H-carbazol-3-yl)[4-(2-methoxy -1-methylethoxy)-2-methylphenyl]methanone O-acetamidine, 2-(benzylideneoxyimino)-1-[4-(phenylthio) Phenyl]-1-octanone, 2,4,6-trimethylbenzimidyldiphenylphosphine oxide, 4-benzylidene-4'-methyldimethyl sulfide, 4-dimethyl Aminobenzoic acid, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, butyl 4-dimethylaminobenzoate, 4-dimethylamino-2-ethylhexyl benzoic acid 4-dimethylamino-2-isopentylbenzoic acid, benzyl-β-methoxyethyl acetal, benzyldimethylketal, 1-phenyl-1,2-propanedione-2 -(O-ethoxycarbonyl)anthracene, methyl o-benzylidenebenzoate, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone , 1-chloro-4-propoxythioxanthone, thioxanthene, 2-chlorothioxanthene, 2,4-diethylthioxanthene, 2-methylthioxanthene, 2-isopropylthioxanthene, 2- Ethyl hydrazine, octamethyl hydrazine, 1,2-benzopyrene, 2,3-diphenyl hydrazine, azobisisobutyronitrile, benzhydryl peroxide, isopropyl hydroperoxide Benzene, 2-mercaptobenzimidazole, 2-mercaptobenzoene Oxazole, 2-mercaptobenzothiazole, 2-(o-chlorophenyl)-4,5-di(m-methoxyphenyl)-imidazolyl dimer, benzophenone, 2-chlorodiphenyl Methyl ketone, p,p'-bisdimethylaminobenzophenone, 4,4'-bisdiethylaminobenzophenone, 4,4'-dichlorobenzophenone, 3,3-di Methyl-4-methoxybenzophenone, benzyl, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin-n-butyl ether, benzoin isobutyl ether, benzoin Ether, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropenylbenzene, dichloroacetophenone, trichloroacetophenone, P-tertiary butyl acetophenone, p-dimethylamino acetophenone, p-tertiary butyl trichloroacetophenone, p-tertiary butyl dichloroacetophenone, α,α-dichloro -4-phenoxyacetophenone, thioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, dibenzocycloheptanone, pentyl-4-dimethylaminobenzoic acid Ester, 9-phenyl acridine, 1,7-bis-(9-acridinyl)heptane, 1,5-bis-(9-acridinyl)pentane, 1,3-bis-(9- Acridine)propane, p-methoxy three , 2,4,6-para (trichloromethyl)-s-three 2-methyl-4,6-bis(trichloromethyl)-s-three ,2-[2-(5-methylfuran-2-yl)vinyl]-4,6-bis(trichloromethyl)-s-three ,2-[2-(furan-2-yl)vinyl]-4,6-bis(trichloromethyl)-s-three ,2-[2-(4-diethylamino-2-methylphenyl)vinyl]-4,6-bis(trichloromethyl)-s-three ,2-[2-(3,4-dimethoxyphenyl)vinyl]-4,6-bis(trichloromethyl)-s-three , 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-s-three , 2-(4-ethoxystyryl)-4,6-bis(trichloromethyl)-s-three , 2-(4-n-butoxyphenyl)-4,6-bis(trichloromethyl)-s-three 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy)phenyl-s-three 2,4-bis-trichloromethyl-6-(2-bromo-4-methoxy)phenyl-s-three 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy)styrylphenyl-s-three 2,4-bis-trichloromethyl-6-(2-bromo-4-methoxy)styrylphenyl-s-three Wait. These photopolymerization initiators can be used singly or in combination of two or more.

此等之中,使用肟系之光聚合起始劑,在感度方面上特加。肟系之光聚合起始劑之中,作為特佳者,可舉例O-乙醯基-1-[6-(2-甲基苯甲醯基)-9-乙基-9H-咔唑-3-基]乙酮肟、乙酮,1-[9-乙基-6-(吡咯-2-基羰基)-9H-咔唑-3-基],1-(O-乙醯肟),及1,2-辛烷二酮,1-[4-(苯基硫基)-,2-(O-苯甲醯肟)]。Among these, a lanthanide photopolymerization initiator is used, and the sensitivity is particularly added. Among the photopolymerization initiators of the lanthanoid series, as a particularly preferred one, O-acetamido-1-[6-(2-methylbenzylidene)-9-ethyl-9H-carbazole- 3-yl]ethanone oxime, ethyl ketone, 1-[9-ethyl-6-(pyrrol-2-ylcarbonyl)-9H-indazol-3-yl], 1-(O-acetyl), And 1,2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzamide)].

作為光聚合起始劑,又,使用下述式(b1)所示之肟系化合物亦較佳。(Rb1 為選自由1價有機基、胺基、鹵素、硝基及氰基所成群組中之基,   n1為0以上4以下之整數,   n2為0或1,   Rb2 為可具有取代基之苯基,或可具有取代基之咔唑基,   Rb3 為氫原子,或碳原子數1以上6以下之烷基)。Further, as the photopolymerization initiator, an anthracene compound represented by the following formula (b1) is also preferably used. (R b1 is a group selected from the group consisting of a monovalent organic group, an amine group, a halogen, a nitro group, and a cyano group, and n1 is an integer of 0 or more and 4 or less, n2 is 0 or 1, and R b2 is a substitutable group. a phenyl group, or a carbazolyl group which may have a substituent, and R b3 is a hydrogen atom or an alkyl group having 1 or more and 6 or less carbon atoms).

式(b1)中,Rb1 在不妨礙本發明之目的的範圍內便無特別限定,可由各種有機基中適當地選擇。作為Rb1 為有機基時的合適例子,可舉例烷基、烷氧基、環烷基、環烷氧基、飽和脂肪族醯基、飽和脂肪族醯氧基、烷氧基羰基、可具有取代基之苯基、可具有取代基之苯氧基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之苯甲醯氧基、可具有取代基之苯基烷基、可具有取代基之萘基、可具有取代基之萘氧基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之萘甲醯氧基、可具有取代基之萘基烷基、可具有取代基之雜環基、胺基、經1或2個有機基取代的胺基、嗎啉-1-基,及哌-1-基、鹵素、硝基,及氰基等。n1為2以上4以下之整數時,Rb1 可相同亦可不同。又,取代基之碳原子數中,不包含取代基進一步具有之取代基的碳原子數。In the formula (b1), R b1 is not particularly limited as long as it does not impair the object of the present invention, and may be appropriately selected from various organic groups. As a suitable example when R b1 is an organic group, an alkyl group, an alkoxy group, a cycloalkyl group, a cycloalkoxy group, a saturated aliphatic fluorenyl group, a saturated aliphatic decyloxy group, an alkoxycarbonyl group, or a substituent may be exemplified. a phenyl group, a phenoxy group which may have a substituent, a benzinyl group which may have a substituent, a phenoxycarbonyl group which may have a substituent, a benzyl fluorenyloxy group which may have a substituent, may have a substituent a phenylalkyl group, a naphthyl group which may have a substituent, a naphthyloxy group which may have a substituent, a naphthylmethyl fluorenyl group which may have a substituent, a naphthyloxycarbonyl group which may have a substituent, a naphthoquinone which may have a substituent An oxy group, a naphthylalkyl group which may have a substituent, a heterocyclic group which may have a substituent, an amine group, an amine group substituted with 1 or 2 organic groups, a morpholin-1-yl group, and a piperidine -1-yl, halogen, nitro, and cyano. When n1 is an integer of 2 or more and 4 or less, R b1 may be the same or different. Further, the number of carbon atoms of the substituent does not include the number of carbon atoms of the substituent which the substituent further has.

Rb1 為烷基時,為碳原子數1以上20以下較佳,碳原子數1以上6以下更佳。又,Rb1 為烷基時,可為直鏈,亦可為支鏈。作為Rb1 為烷基時的具體例,可舉例甲基、乙基、n-丙基、異丙基、n-丁基、異丁基、sec-丁基、三級丁基、n-戊基、異戊基、sec-戊基、tert-戊基、n-己基、n-庚基、n-辛基、異辛基、sec-辛基、tert-辛基、n-壬基、異壬基、n-癸基,及異癸基等。又,Rb1 為烷基時,烷基在碳鏈中亦可含有醚鍵(-O-)。作為在碳鏈中具有醚鍵之烷基的例子,可舉例甲氧基乙基、乙氧基乙基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙基氧基乙氧基乙基,及甲氧基丙基等。When R b1 is an alkyl group, it is preferably 1 or more and 20 or less carbon atoms, and more preferably 1 or more and 6 or less carbon atoms. Further, when R b1 is an alkyl group, it may be a straight chain or a branched chain. Specific examples of the case where R b1 is an alkyl group include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tertiary butyl, and n-pentyl. Base, isopentyl, sec-pentyl, tert-pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, sec-octyl, tert-octyl, n-fluorenyl, iso Sulfhydryl, n-fluorenyl, and isodecyl. Further, when R b1 is an alkyl group, the alkyl group may further contain an ether bond (-O-) in the carbon chain. As an example of the alkyl group having an ether bond in the carbon chain, a methoxyethyl group, an ethoxyethyl group, a methoxyethoxyethyl group, an ethoxyethoxyethyl group, a propyloxy group can be illustrated. Ethoxyethyl, methoxypropyl and the like.

Rb1 為烷氧基時,為碳原子數1以上20以下較佳,碳原子數1以上6以下更佳。又,Rb1 為烷氧基時,可為直鏈,亦可為支鏈。作為Rb1 為烷氧基時的具體例,可舉例甲氧基、乙氧基、n-丙基氧基、異丙基氧基、n-丁基氧基、異丁基氧基、sec-丁基氧基、三級丁基氧基、n-戊基氧基、異戊基氧基、sec-戊基氧基、tert-戊基氧基、n-己基氧基、n-庚基氧基、n-辛基氧基、異辛基氧基、sec-辛基氧基、tert-辛基氧基、n-壬基氧基、異壬基氧基、n-癸基氧基,及異癸基氧基等。又,Rb1 為烷氧基時,烷氧基在碳鏈中亦可含有醚鍵(-O-)。作為碳鏈中具有醚鍵之烷氧基的例子,可舉例甲氧基乙氧基、乙氧基乙氧基、甲氧基乙氧基乙氧基、乙氧基乙氧基乙氧基、丙基氧基乙氧基乙氧基,及甲氧基丙基氧基等。When R b1 is an alkoxy group, it is preferably 1 or more and 20 or less carbon atoms, and more preferably 1 or more and 6 or less carbon atoms. Further, when R b1 is an alkoxy group, it may be a straight chain or a branched chain. Specific examples of the case where R b1 is an alkoxy group include a methoxy group, an ethoxy group, an n-propyloxy group, an isopropyloxy group, an n-butyloxy group, an isobutyloxy group, and a sec-. Butyloxy, tert-butyloxy, n-pentyloxy, isopentyloxy, sec-pentyloxy, tert-pentyloxy, n-hexyloxy, n-heptyloxy , n-octyloxy, isooctyloxy, sec-octyloxy, tert-octyloxy, n-nonyloxy, isodecyloxy, n-decyloxy, and Isodecyloxy and the like. Further, when R b1 is an alkoxy group, the alkoxy group may further contain an ether bond (-O-) in the carbon chain. Examples of the alkoxy group having an ether bond in the carbon chain include a methoxyethoxy group, an ethoxyethoxy group, a methoxyethoxyethoxy group, and an ethoxyethoxyethoxy group. Propyloxyethoxyethoxy, and methoxypropyloxy and the like.

Rb1 為環烷基或環烷氧基時,為碳原子數3以上10以下較佳,碳原子數3以上6以下更佳。作為Rb1 為環烷基時的具體例,可舉例環丙基、環丁基、環戊基、環己基、環庚基,及環辛基等。作為Rb1 為環烷氧基時的具體例,可舉例環丙基氧基、環丁基氧基、環戊基氧基、環己基氧基、環庚基氧基,及環辛基氧基等。When R b1 is a cycloalkyl group or a cycloalkoxy group, it is preferably 3 or more and 10 or less carbon atoms, and more preferably 3 or more and 6 or less carbon atoms. Specific examples of the case where R b1 is a cycloalkyl group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Specific examples of the case where R b1 is a cycloalkoxy group include a cyclopropyloxy group, a cyclobutyloxy group, a cyclopentyloxy group, a cyclohexyloxy group, a cycloheptyloxy group, and a cyclooctyloxy group. Wait.

Rb1 為飽和脂肪族醯基或飽和脂肪族醯氧基時,為碳原子數2以上20以下較佳,碳原子數2以上7以下更佳。作為Rb1 為飽和脂肪族醯基時的具體例,可舉例乙醯基、丙醯基、n-丁醯基、2-甲基丙醯基、n-戊醯基、2,2-二甲基丙醯基、n-己醯基、n-庚醯基、n-辛醯基、n-壬醯基、n-癸醯基、n-十一醯基、n-十二醯基、n-十三醯基、n-十四醯基、n-十五醯基,及n-十六醯基等。作為Rb1 為飽和脂肪族醯氧基時的具體例,可舉例乙醯氧基、丙醯氧基、n-丁醯氧基、2-甲基丙醯氧基、n-戊醯氧基、2,2-二甲基丙醯氧基、n-己醯氧基、n-庚醯氧基、n-辛醯氧基、n-壬醯氧基、n-癸醯氧基、n-十一醯氧基、n-十二醯氧基、n-十三醯氧基、n-十四醯氧基、n-十五醯氧基,及n-十六醯氧基等。When R b1 is a saturated aliphatic fluorenyl group or a saturated aliphatic fluorenyloxy group, it is preferably 2 or more and 20 or less carbon atoms, and more preferably 2 or more and 7 or less carbon atoms. Specific examples of the case where R b1 is a saturated aliphatic fluorenyl group include ethyl hydrazino group, propyl fluorenyl group, n-butyl fluorenyl group, 2-methyl propyl fluorenyl group, n-pentyl fluorenyl group, and 2,2-dimethyl propyl group. Sulfhydryl, n-hexyl, n-heptyl, n-octyl, n-fluorenyl, n-fluorenyl, n-undecyl, n-dodedecyl, n-tride Base, n-tetradecyl, n-pentadecanyl, and n-hexadecanyl. Specific examples of the case where R b1 is a saturated aliphatic oxime group include an ethoxy group, a propenyloxy group, an n-butenyloxy group, a 2-methylpropoxy group, and an n-pentamoxy group. 2,2-dimethylpropenyloxy, n-hexyloxy, n-heptyloxy, n-octyloxy, n-decyloxy, n-decyloxy, n-ten Monomethoxy, n-dodecyloxy, n-tridecanyloxy, n-tetradecyloxy, n-pentadecanyloxy, and n-hexadecyloxy.

Rb1 為烷氧基羰基時,為碳原子數2以上20以下較佳,碳原子數2以上7以下更佳。作為Rb1 為烷氧基羰基時的具體例,可舉例甲氧基羰基、乙氧基羰基、n-丙基氧基羰基、異丙基氧基羰基、n-丁基氧基羰基、異丁基氧基羰基、sec-丁基氧基羰基、三級丁基氧基羰基、n-戊基氧基羰基、異戊基氧基羰基、sec-戊基氧基羰基、tert-戊基氧基羰基、n-己基氧基羰基、n-庚基氧基羰基、n-辛基氧基羰基、異辛基氧基羰基、sec-辛基氧基羰基、tert-辛基氧基羰基、n-壬基氧基羰基、異壬基氧基羰基、n-癸基氧基羰基,及異癸基氧基羰基等。When R b1 is an alkoxycarbonyl group, it is preferably 2 or more and 20 or less carbon atoms, and more preferably 2 or more and 7 or less carbon atoms. Specific examples of the case where R b1 is an alkoxycarbonyl group include a methoxycarbonyl group, an ethoxycarbonyl group, an n-propyloxycarbonyl group, an isopropyloxycarbonyl group, an n-butyloxycarbonyl group, and an isobutyl group. Alkoxycarbonyl, sec-butyloxycarbonyl, tert-butyloxycarbonyl, n-pentyloxycarbonyl, isopentyloxycarbonyl, sec-pentyloxycarbonyl, tert-pentyloxy Carbonyl, n-hexyloxycarbonyl, n-heptyloxycarbonyl, n-octyloxycarbonyl, isooctyloxycarbonyl, sec-octyloxycarbonyl, tert-octyloxycarbonyl, n- A mercaptooxycarbonyl group, an isodecyloxycarbonyl group, an n-fluorenyloxycarbonyl group, an isodecyloxycarbonyl group or the like.

Rb1 為苯基烷基時,為碳原子數7以上20以下較佳,碳原子數7以上10以下更佳。又,Rb1 為萘基烷基時,為碳原子數11以上20以下較佳,碳原子數11以上14以下更佳。作為Rb1 為苯基烷基時的具體例,可舉例苄基、2-苯基乙基、3-苯基丙基,及4-苯基丁基。作為Rb1 為萘基烷基時的具體例,可舉例α-萘基甲基、β-萘基甲基、2-(α-萘基)乙基,及2-(β-萘基)乙基。Rb1 為苯基烷基或萘基烷基時,Rb1 亦可於苯基或萘基上進一步具有取代基。When R b1 is a phenylalkyl group, it is preferably 7 or more and 20 or less carbon atoms, and more preferably 7 or more and 10 or less carbon atoms. Further, when R b1 is a naphthylalkyl group, the number of carbon atoms is preferably 11 or more and 20 or less, and more preferably 11 or more and 14 or less. Specific examples of the case where R b1 is a phenylalkyl group include a benzyl group, a 2-phenylethyl group, a 3-phenylpropyl group, and a 4-phenylbutyl group. Specific examples of the case where R b1 is a naphthylalkyl group include α-naphthylmethyl group, β-naphthylmethyl group, 2-(α-naphthyl)ethyl group, and 2-(β-naphthyl)ethyl group. base. When R b1 is a phenylalkyl group or a naphthylalkyl group, R b1 may further have a substituent on the phenyl group or a naphthyl group.

Rb1 為雜環基時,雜環基為包含1個以上之N、S、O的5員或6員單環,或為該單環彼此或該單環與苯環縮合而成的雜環基。雜環基為縮合環時,定為環數為3為止者。作為構成該雜環基的雜環,可舉例呋喃、噻吩、吡咯、唑、異唑、噻唑、噻二吖唑、異噻唑、咪唑、吡唑、三唑、吡啶、吡、嘧啶、嗒、苯并呋喃、苯并噻吩、吲哚、異吲哚、吲嗪、苯并咪唑、苯并三唑、苯并唑、苯并噻唑、咔唑、嘌呤、喹啉、異喹啉、喹唑啉、呔、噌啉,及喹喔啉等。Rb1 為雜環基時,雜環基亦可進一步具有取代基。When R b1 is a heterocyclic group, the heterocyclic group is a 5-membered or 6-membered monocyclic ring containing one or more of N, S, and O, or a heterocyclic ring in which the single ring or the monocyclic ring is condensed with a benzene ring. base. When the heterocyclic group is a condensed ring, the number of rings is set to 3. Examples of the heterocyclic ring constituting the heterocyclic group include furan, thiophene, and pyrrole. Azole Oxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyridyl Pyrimidine , benzofuran, benzothiophene, anthracene, isoindole, pyridazine, benzimidazole, benzotriazole, benzo Azole, benzothiazole, carbazole, anthracene, quinoline, isoquinoline, quinazoline, anthracene , porphyrins, and quinoxalines. When R b1 is a heterocyclic group, the heterocyclic group may further have a substituent.

Rb1 為經1或2個有機基取代的胺基時,有機基之合適例子,可舉例碳原子數1以上20以下之烷基、碳原子數3以上10以下之環烷基、碳原子數2以上20以下之飽和脂肪族醯基、可具有取代基之苯基、可具有取代基之苯甲醯基、可具有取代基之碳原子數7以上20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘甲醯基、可具有取代基之碳原子數11以上20以下之萘基烷基,及雜環基等。此等合適之有機基的具體例,與Rb1 相同。作為經1或2個有機基取代的胺基的具體例,可舉例甲胺基、乙胺基、二乙胺基、n-丙胺基、二-n-丙胺基、異丙胺基、n-丁胺基、二-n-丁胺基、n-戊胺基、n-己胺基、n-庚胺基、n-辛胺基、n-壬胺基、n-癸胺基、苯基胺基、萘基胺基、乙醯基胺基、丙醯基胺基、n-丁醯基胺基、n-戊醯基胺基、n-己醯基胺基、n-庚醯基胺基、n-辛醯基胺基、n-癸醯基胺基、苯甲醯基胺基、α-萘甲醯基胺基,及β-萘甲醯基胺基等。When R b1 is an amine group substituted with one or two organic groups, examples of the organic group include an alkyl group having 1 or more and 20 or less carbon atoms, a cycloalkyl group having 3 or more and 10 or less carbon atoms, and a carbon number. a saturated aliphatic fluorenyl group having 2 or more and 20 or less, a phenyl group which may have a substituent, a benzamyl group which may have a substituent, a phenylalkyl group having 7 or more and 20 or less carbon atoms which may have a substituent, may have a substitution The naphthyl group, a naphthylmethyl group which may have a substituent, a naphthylalkyl group having 11 or more and 20 or less carbon atoms which may have a substituent, and a heterocyclic group. Specific examples of such suitable organic groups are the same as R b1 . Specific examples of the amine group substituted with 1 or 2 organic groups include methylamino group, ethylamino group, diethylamino group, n-propylamino group, di-n-propylamino group, isopropylamine group, and n-butyl group. Amino, di-n-butylamino, n-pentylamino, n-hexylamino, n-heptylamino, n-octylamino, n-nonylamino, n-nonylamino, phenylamine Base, naphthylamino group, ethyl hydrazino group, propyl decylamino group, n-butyl decylamino group, n-pentenylamino group, n-hexyl decylamino group, n-heptylamino group, n a octylamino group, an n-fluorenylamino group, a benzhydrylamino group, an α-naphthylmethylamino group, and a β-naphthylmethylamino group.

作為Rb1 所含之苯基、萘基及雜環基進一步具有取代基時的取代基,可舉例碳原子數1以上6以下之烷基、碳原子數1以上6以下之烷氧基、碳原子數2以上7以下之飽和脂肪族醯基、碳原子數2以上7以下之烷氧基羰基、碳原子數2以上7以下之飽和脂肪族醯氧基、具有碳原子數1以上6以下之烷基的單烷基胺基、具有碳原子數1以上6以下之烷基的二烷基胺基、嗎啉-1-基、哌-1-基、鹵素、硝基,及氰基等。Rb1 所含之苯基、萘基及雜環基進一步具有取代基時,該取代基的個數,在不阻礙本發明之目的的範圍內雖無限定,但為1以上4以下較佳。Rb1 所含之苯基、萘基及雜環基具有複數之取代基時,複數之取代基可相同亦可不同。Examples of the substituent in the case where the phenyl group, the naphthyl group and the heterocyclic group contained in the R b1 further have a substituent include an alkyl group having 1 or more and 6 or less carbon atoms, an alkoxy group having 1 or more and 6 or less carbon atoms, and carbon. a saturated aliphatic fluorenyl group having 2 or more and 7 or less atoms, an alkoxycarbonyl group having 2 or more and 7 or less carbon atoms, a saturated aliphatic decyloxy group having 2 or more and 7 or less carbon atoms, and having 1 or more and 6 or less carbon atoms. a monoalkylamino group of an alkyl group, a dialkylamino group having an alkyl group having 1 or more and 6 or less carbon atoms, morpholin-1-yl group, and piperazine -1-yl, halogen, nitro, and cyano. When the phenyl group, the naphthyl group and the heterocyclic group contained in R b1 further have a substituent, the number of the substituents is not limited, but is preferably 1 or more and 4 or less, insofar as the object of the present invention is not inhibited. When the phenyl group, the naphthyl group and the heterocyclic group contained in R b1 have a plurality of substituents, the plural substituents may be the same or different.

Rb1 之中,由化學安定,或立體障礙少,肟酯化合物之合成為容易等來看,為選自由碳原子數1以上6以下之烷基、碳原子數1以上6以下之烷氧基,及碳原子數2以上7以下之飽和脂肪族醯基所成群組中之基較佳,碳原子數1以上6以下之烷基更佳,甲基特佳。Among the R b1 , the chemical stability or the steric hindrance is small, and the synthesis of the oxime ester compound is easy, etc., and is an alkoxy group selected from the group consisting of an alkyl group having 1 or more and 6 or less carbon atoms and a carbon number of 1 or more and 6 or less. Further, a group of a saturated aliphatic fluorenyl group having 2 or more and 7 or less carbon atoms is preferably a group, and an alkyl group having 1 or more and 6 or less carbon atoms is more preferable, and a methyl group is particularly preferable.

Rb1 鍵結的苯基中,苯基與肟酯化合物之主骨架的鍵結處之位置定為1位,甲基之位置定為2位時,Rb1 鍵結於苯基的位置為4位或5位較佳,5位更佳。又,n1為0以上3以下之整數較佳,0以上2以下之整數更佳,0或1特佳。In the phenyl group bonded to R b1 , the position of the bond between the main skeleton of the phenyl group and the oxime ester compound is set to 1 position, and when the position of the methyl group is 2 position, the position of R b1 bonded to the phenyl group is 4 Bit or 5 is better, and 5 is better. Further, n1 is preferably an integer of 0 or more and 3 or less, and an integer of 0 or more and 2 or less is more preferable, and 0 or 1 is particularly preferable.

Rb2 為可具有取代基之苯基,或可具有取代基之咔唑基。又,Rb2 為可具有取代基之咔唑基時,咔唑基上的氮原子,亦可經碳原子數1以上6以下之烷基取代。R b2 is a phenyl group which may have a substituent, or a carbazolyl group which may have a substituent. Further, when R b2 is a carbazole group which may have a substituent, the nitrogen atom on the carbazolyl group may be substituted with an alkyl group having 1 or more and 6 or less carbon atoms.

Rb2 中,苯基或咔唑基具有的取代基,在不妨礙本發明之目的的範圍內便無特別限定。作為苯基或咔唑基在碳原子上可具有的合適之取代基的例子,可舉例碳原子數1以上20以下之烷基、碳原子數1以上20以下之烷氧基、碳原子數3以上10以下之環烷基、碳原子數3以上10以下之環烷氧基、碳原子數2以上20以下之飽和脂肪族醯基、碳原子數2以上20以下之烷氧基羰基、碳原子數2以上20以下之飽和脂肪族醯氧基、可具有取代基之苯基、可具有取代基之苯氧基、可具有取代基之苯基硫基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之苯甲醯氧基、可具有取代基之碳原子數7以上20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘氧基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之萘甲醯氧基、可具有取代基之碳原子數11以上20以下之萘基烷基、可具有取代基之雜環基、可具有取代基之雜環羰基、胺基、經1或2個有機基取代的胺基、嗎啉-1-基,及哌-1-基、鹵素、硝基,及氰基等。In R b2 , the substituent of the phenyl group or the carbazolyl group is not particularly limited as long as it does not impair the object of the present invention. Examples of suitable substituents which the phenyl group or the carbazolyl group may have on the carbon atom include an alkyl group having 1 or more and 20 or less carbon atoms, an alkoxy group having 1 or more and 20 or less carbon atoms, and 3 carbon atoms. The above 10 or less cycloalkyl group, a cycloalkyloxy group having 3 or more and 10 or less carbon atoms, a saturated aliphatic fluorenyl group having 2 or more and 20 or less carbon atoms, an alkoxycarbonyl group having 2 or more and 20 or less carbon atoms, or a carbon atom; a saturated aliphatic decyloxy group having 2 or more and 20 or less, a phenyl group which may have a substituent, a phenoxy group which may have a substituent, a phenylthio group which may have a substituent, a benzhydryl group which may have a substituent, a phenoxycarbonyl group which may have a substituent, a benzylideneoxy group which may have a substituent, a phenylalkyl group having 7 or more and 20 or less carbon atoms which may have a substituent, a naphthyl group which may have a substituent, may have a substitution a naphthyloxy group, a naphthylmethyl group which may have a substituent, a naphthyloxycarbonyl group which may have a substituent, a naphthylmethoxycarbonyl group which may have a substituent, and a number of carbon atoms which may have a substituent of 11 or more and 20 or less Naphthylalkyl group, heterocyclic group which may have a substituent, heterocyclic ring which may have a substituent a carbonyl group, an amine group, an amine group substituted with 1 or 2 organic groups, a morpholin-1-yl group, and a piperidine -1-yl, halogen, nitro, and cyano.

Rb2 為咔唑基時,作為咔唑基在氮原子上可具有的合適之取代基的例子,可舉例碳原子數1以上20以下之烷基、碳原子數3以上10以下之環烷基、碳原子數2以上20以下之飽和脂肪族醯基、碳原子數2以上20以下之烷氧基羰基、可具有取代基之苯基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之碳原子數7以上20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之碳原子數11以上20以下之萘基烷基、可具有取代基之雜環基,及可具有取代基之雜環羰基等。此等之取代基之中,以碳原子數1以上20以下之烷基較佳,碳原子數1以上6以下之烷基更佳,乙基特佳。When R b2 is a carbazolyl group, examples of a suitable substituent which the carbazolyl group may have on the nitrogen atom may, for example, be an alkyl group having 1 or more and 20 or less carbon atoms or a cycloalkyl group having 3 or more and 10 or less carbon atoms. a saturated aliphatic fluorenyl group having 2 or more and 20 or less carbon atoms, an alkoxycarbonyl group having 2 or more and 20 or less carbon atoms, a phenyl group which may have a substituent, a benzamyl group which may have a substituent, and a substituent a phenoxycarbonyl group, a phenylalkyl group having 7 or more and 20 or less carbon atoms which may have a substituent, a naphthyl group which may have a substituent, a naphthylmethyl group which may have a substituent, and a naphthyloxy group which may have a substituent The carbonyl group, a naphthylalkyl group having 11 or more and 20 or less carbon atoms which may have a substituent, a heterocyclic group which may have a substituent, and a heterocyclic carbonyl group which may have a substituent. Among these substituents, an alkyl group having 1 or more and 20 or less carbon atoms is preferred, and an alkyl group having 1 or more and 6 or less carbon atoms is more preferable, and ethyl is particularly preferred.

關於苯基或咔唑基可具有之取代基的具體例,烷基、烷氧基、環烷基、環烷氧基、飽和脂肪族醯基、烷氧基羰基、飽和脂肪族醯氧基、可具有取代基之苯基烷基、可具有取代基之萘基烷基、可具有取代基之雜環基,及經1或2個有機基取代的胺基,與Rb1 相同。Specific examples of the substituent which the phenyl group or the carbazolyl group may have, an alkyl group, an alkoxy group, a cycloalkyl group, a cycloalkoxy group, a saturated aliphatic fluorenyl group, an alkoxycarbonyl group, a saturated aliphatic decyloxy group, A phenylalkyl group which may have a substituent, a naphthylalkyl group which may have a substituent, a heterocyclic group which may have a substituent, and an amine group substituted with 1 or 2 organic groups are the same as R b1 .

Rb2 中,作為苯基或咔唑基具有之取代基所含之苯基、萘基及雜環基進一步具有取代基時的取代基的例子,可舉例碳原子數1以上6以下之烷基;碳原子數1以上6以下之烷氧基;碳原子數2以上7以下之飽和脂肪族醯基;碳原子數2以上7以下之烷氧基羰基;碳原子數2以上7以下之飽和脂肪族醯氧基;苯基;萘基;苯甲醯基;萘甲醯基;經選自由碳原子數1以上6以下之烷基、嗎啉-1-基、哌-1-基,及苯基所成群組中之基所取代之苯甲醯基;具有碳原子數1以上6以下之烷基的單烷基胺基;具有碳原子數1以上6以下之烷基的二烷基胺基;嗎啉-1-基;哌-1-基;鹵素;硝基;氰基。苯基或咔唑基具有之取代基所含之苯基、萘基及雜環基進一步具有取代基時,該取代基的個數,在不阻礙本發明之目的的範圍內雖無限定,但為1以上4以下較佳。苯基、萘基及雜環基具有複數之取代基時,複數之取代基可相同亦可不同。In the case of R b2 , examples of the substituent when the phenyl group, the naphthyl group and the heterocyclic group which are contained in the substituent of the phenyl group or the carbazolyl group further have a substituent include an alkyl group having 1 or more and 6 or less carbon atoms. An alkoxy group having 1 or more and 6 or less carbon atoms; a saturated aliphatic fluorenyl group having 2 or more and 7 or less carbon atoms; an alkoxycarbonyl group having 2 or more and 7 or less carbon atoms; and a saturated fat having 2 or more and 7 or less carbon atoms; Alkyloxy; phenyl; naphthyl; benzhydryl; naphthylmethyl; alkyl, morpholin-1-yl, pipe selected from the group consisting of 1 or more and 6 or less carbon atoms a benzyl group substituted with a group in the group of phenyl groups and a group of phenyl groups; a monoalkylamino group having an alkyl group having 1 or more and 6 or less carbon atoms; and having a carbon number of 1 or more and 6 or less Alkyl dialkylamine; morpholin-1-yl; -1-yl; halogen; nitro; cyano. When the phenyl group, the naphthyl group and the heterocyclic group which are contained in the substituent of the phenyl or carbazolyl group further have a substituent, the number of the substituents is not limited insofar as it does not inhibit the object of the present invention, but It is preferably 1 or more and 4 or less. When the phenyl group, the naphthyl group and the heterocyclic group have a plurality of substituents, the plural substituents may be the same or different.

Rb2 之中,由容易得到感度優異之光聚合起始劑之點來看,以下述式(b2)或(b3)所示之基較佳,下述式(b2)所示之基更佳,下述式(b2)所示之基且A為S之基特佳。Among the R b2 , a group represented by the following formula (b2) or (b3) is preferred from the viewpoint of easily obtaining a photopolymerization initiator excellent in sensitivity, and the group represented by the following formula (b2) is more preferable. It is a group represented by the following formula (b2) and A is a group of S.

(Rb4 為選自由1價有機基、胺基、鹵素、硝基,及氰基所成群組中之基,A為S或O,n3為0以上4以下之整數)。 (R b4 is a group selected from the group consisting of a monovalent organic group, an amine group, a halogen, a nitro group, and a cyano group, and A is S or O, and n 3 is an integer of 0 or more and 4 or less).

(Rb5 及Rb6 各自為1價有機基)。 (R b5 and R b6 are each a monovalent organic group).

式(b2)中之Rb4 為有機基時,在不阻礙本發明之目的的範圍內,可自各種有機基中選擇。作為式(b2)中Rb4 為有機基時之合適例子,可舉例碳原子數1以上6以下之烷基;碳原子數1以上6以下之烷氧基;碳原子數2以上7以下之飽和脂肪族醯基;碳原子數2以上7以下之烷氧基羰基;碳原子數2以上7以下之飽和脂肪族醯氧基;苯基;萘基;苯甲醯基;萘甲醯基;經選自由碳原子數1以上6以下之烷基、嗎啉-1-基、哌-1-基,及苯基所成群組中之基所取代之苯甲醯基;具有碳原子數1以上6以下之烷基的單烷基胺基;具有碳原子數1以上6以下之烷基的二烷基胺基;嗎啉-1-基;哌-1-基;鹵素;硝基;氰基。When R b4 in the formula (b2) is an organic group, it can be selected from various organic groups within a range not inhibiting the object of the present invention. As a suitable example of the case where R b4 in the formula (b2) is an organic group, an alkyl group having 1 or more and 6 or less carbon atoms; an alkoxy group having 1 or more and 6 or less carbon atoms; and a saturated number of 2 or more and 7 or less carbon atoms can be exemplified. An aliphatic fluorenyl group; an alkoxycarbonyl group having 2 or more and 7 or less carbon atoms; a saturated aliphatic fluorenyloxy group having 2 or more and 7 or less carbon atoms; a phenyl group; a naphthyl group; a benzamidine group; a naphthylmethyl group; Selecting an alkyl group having a carbon number of 1 or more and 6 or less, morpholin-1-yl, and piperazine a benzyl group substituted with a group in the group of phenyl groups and a group of phenyl groups; a monoalkylamino group having an alkyl group having 1 or more and 6 or less carbon atoms; and having a carbon number of 1 or more and 6 or less Alkyl dialkylamine; morpholin-1-yl; -1-yl; halogen; nitro; cyano.

Rb4 之中,以苯甲醯基;萘甲醯基;經選自由碳原子數1以上6以下之烷基、嗎啉-1-基、哌-1-基,及苯基所成群組中之基所取代之苯甲醯基;硝基較佳,苯甲醯基;萘甲醯基;2-甲基苯基羰基;4-(哌-1-基)苯基羰基;4-(苯基)苯基羰基更佳。Among R b4 , a benzepidine group; a naphthylmethyl group; an alkyl group selected from a carbon number of 1 or more and 6 or less, a morpholin-1-yl group, a piperidine a benzyl group substituted with a group in the group of -1- group and a group of phenyl groups; a nitro group; a benzyl group; a naphthyl group; a 2-methylphenylcarbonyl group; 1-yl)phenylcarbonyl; 4-(phenyl)phenylcarbonyl is more preferred.

又,式(b2)中,n3為0以上3以下之整數較佳,0以上2以下之整數更佳,0或1特佳。n3為1時,Rb4 之鍵結位置,相對於Rb4 鍵結之苯基與氧原子或硫原子鍵結的鍵結處,為對位較佳。Further, in the formula (b2), n3 is preferably an integer of 0 or more and 3 or less, and an integer of 0 or more and 2 or less is more preferable, and 0 or 1 is particularly preferable. when n3 is 1, the bonding position of R b4, with respect to the phenyl group bonded to an oxygen atom or a sulfur atom bonded at the bonding R b4, the preferred position for the.

式(b3)中之Rb5 ,在不阻礙本發明之目的的範圍內,可自各種有機基中選擇。作為Rb5 之合適例子,可舉例碳原子數1以上20以下之烷基、碳原子數3以上10以下之環烷基、碳原子數2以上20以下之飽和脂肪族醯基、碳原子數2以上20以下之烷氧基羰基、可具有取代基之苯基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之碳原子數7以上20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之碳原子數11以上20以下之萘基烷基、可具有取代基之雜環基,及可具有取代基之雜環羰基等。R b5 in the formula (b3) can be selected from various organic groups within a range not inhibiting the object of the present invention. A suitable example of R b5 is an alkyl group having 1 or more and 20 or less carbon atoms, a cycloalkyl group having 3 or more and 10 or less carbon atoms, a saturated aliphatic fluorenyl group having 2 or more and 20 or less carbon atoms, and 2 carbon atoms. The above 20 or less alkoxycarbonyl group, a phenyl group which may have a substituent, a benzylidene group which may have a substituent, a phenoxycarbonyl group which may have a substituent, and a carbon atom which may have a substituent have 7 or more and 20 or less. A phenylalkyl group, a naphthyl group which may have a substituent, a naphthylmethyl group which may have a substituent, a naphthyloxycarbonyl group which may have a substituent, a naphthylalkyl group which may have a substituent of 11 or more and 20 or less carbon atoms a heterocyclic group which may have a substituent, a heterocyclic carbonyl group which may have a substituent, and the like.

Rb5 之中,碳原子數1以上20以下之烷基較佳,碳原子數1以上6以下之烷基更佳,乙基特佳。Among R b5 , an alkyl group having 1 or more and 20 or less carbon atoms is preferred, and an alkyl group having 1 or more and 6 or less carbon atoms is more preferable, and ethyl is particularly preferred.

式(b3)中之Rb6 ,在不妨礙本發明之目的的範圍內便無特別限定,可自各種有機基中選擇。作為Rb6 合適基的具體例,可舉例碳原子數1以上20以下之烷基、可具有取代基之苯基、可具有取代基之萘基,及可具有取代基之雜環基。作為Rb6 ,此等基之中以可取代基之苯基更佳,2-甲基苯基特佳。R b6 in the formula (b3) is not particularly limited as long as it does not impair the object of the present invention, and can be selected from various organic groups. Specific examples of the suitable group of R b6 include an alkyl group having 1 or more and 20 or less carbon atoms, a phenyl group which may have a substituent, a naphthyl group which may have a substituent, and a heterocyclic group which may have a substituent. As R b6 , a phenyl group which may be a substituent among these groups is more preferable, and a 2-methylphenyl group is particularly preferable.

作為Rb4 、Rb5 或Rb6 所含之苯基、萘基及雜環基進一步具有取代基時的取代基,可舉例碳原子數1以上6以下之烷基、碳原子數1以上6以下之烷氧基、碳原子數2以上7以下之飽和脂肪族醯基、碳原子數2以上7以下之烷氧基羰基、碳原子數2以上7以下之飽和脂肪族醯氧基、具有碳原子數1以上6以下之烷基的單烷基胺基、具有碳原子數1以上6以下之烷基的二烷基胺基、嗎啉-1-基、哌-1-基、鹵素、硝基,及氰基等。Rb4 、Rb5 ,或Rb6 所含之苯基、萘基及雜環基進一步具有取代基時,該取代基的個數,在不阻礙本發明之目的的範圍內雖無限定,但為1以上4以下較佳。Rb4 、Rb5 或Rb6 所含之苯基、萘基及雜環基具有複數之取代基時,複數之取代基可相同亦可不同。The substituent in the case where the phenyl group, the naphthyl group and the heterocyclic group contained in R b4 , R b5 or R b6 further have a substituent, and examples thereof include an alkyl group having 1 or more and 6 or less carbon atoms, and a carbon number of 1 or more and 6 or less. An alkoxy group, a saturated aliphatic fluorenyl group having 2 or more and 7 or less carbon atoms, an alkoxycarbonyl group having 2 or more and 7 or less carbon atoms, a saturated aliphatic decyloxy group having 2 or more and 7 or less carbon atoms, and a carbon atom; a monoalkylamino group having an alkyl group of 1 or more and 6 or less, a dialkylamino group having an alkyl group having 1 or more and 6 or less, morpholin-1-yl, and piperidin -1-yl, halogen, nitro, and cyano. When the phenyl group, the naphthyl group and the heterocyclic group contained in R b4 , R b5 or R b6 further have a substituent, the number of the substituents is not limited insofar as it does not inhibit the object of the present invention, but is 1 or more and 4 or less are preferable. When the phenyl group, the naphthyl group and the heterocyclic group contained in R b4 , R b5 or R b6 have a plurality of substituents, the plural substituents may be the same or different.

式(b1)中之Rb3 為氫原子,或碳原子數1以上6以下之烷基。作為Rb3 ,以甲基或乙基較佳,甲基更佳。R b3 in the formula (b1) is a hydrogen atom or an alkyl group having 1 or more and 6 or less carbon atoms. As R b3 , a methyl group or an ethyl group is preferred, and a methyl group is more preferred.

作為式(b1)所示之肟酯化合物之中特別合適之化合物,可舉例下述之PI-1~PI-42。 As a particularly suitable compound among the oxime ester compounds represented by the formula (b1), the following PI-1 to PI-42 can be exemplified.

以下結構的化合物亦較佳作為式(b1)所示之肟酯化合物。以下結構的化合物,作為NCI-831 (ADEKA公司製)被市售。 The compound of the following structure is also preferably used as the oxime ester compound represented by the formula (b1). The compound of the following structure is commercially available as NCI-831 (made by ADEKA Corporation).

又,下述式(b4)所示之肟酯化合物亦較佳作為光聚合起始劑。Further, the oxime ester compound represented by the following formula (b4) is also preferably used as a photopolymerization initiator.

(Rb7 為氫原子、硝基或1價有機基,Rb8 及Rb9 各自為可具有取代基之鏈狀烷基、可具有取代基之環狀有機基,或氫原子,亦可Rb8 與Rb9 互相鍵結形成環,Rb10 為1價有機基,Rb11 為氫原子、可具有取代基之碳原子數1以上11以下之烷基,或可具有取代基之芳基,n4為0以上4以下之整數,n5為0或1)。 (R b7 is a hydrogen atom, a nitro group or a monovalent organic group, and each of R b8 and R b9 is a chain alkyl group which may have a substituent, a cyclic organic group which may have a substituent, or a hydrogen atom, or R b8 R b 9 is bonded to each other to form a ring, R b10 is a monovalent organic group, R b11 is a hydrogen atom, an alkyl group having 1 or more and 11 or less carbon atoms which may have a substituent, or an aryl group which may have a substituent, n 4 is An integer of 0 or more and 4 or less, and n5 is 0 or 1).

此處,作為用以製造式(b4)之肟酯化合物的肟化合物,以下式(b5)所示之化合物為適宜。Here, as the hydrazine compound for producing the oxime ester compound of the formula (b4), a compound represented by the following formula (b5) is suitable.

(Rb7 、Rb8 、Rb9 、Rb10 、n4及n5與式(b4)相同)。 (R b7 , R b8 , R b9 , R b10 , n4 and n5 are the same as in the formula (b4)).

式(b4)及(b5)中,Rb7 為氫原子、硝基或1價有機基。Rb7 係與在式(b4)中之茀環上鍵結於-(CO)n5 -所示之基的6員芳香環,鍵結於不同的6員芳香環。式(b4)中, Rb7 之對於茀環的鍵結位置並無特別限定。式(b4)所示之化合物具有1個以上之Rb7 時,由式(b4)所示之化合物的合成為容易方面等來看,以1個以上之Rb7 之中的1個鍵結於茀環中之2位者較佳。Rb7 為複數時,複數的Rb7 可相同亦可不同。In the formulae (b4) and (b5), R b7 is a hydrogen atom, a nitro group or a monovalent organic group. The R b7 is a 6-membered aromatic ring bonded to a group represented by -(CO) n5 - on the anthracene ring in the formula (b4), and bonded to a different 6-membered aromatic ring. In the formula (b4), the bonding position of R b7 to the anthracene ring is not particularly limited. When the compound represented by the formula (b4) has one or more R b7 , the synthesis of the compound represented by the formula (b4) is easy, and one of the one or more R b7 is bonded to each other. Two of the rings are preferred. When R b7 is a complex number, the plural R b7 may be the same or different.

Rb7 為有機基時,Rb7 在不妨礙本發明之目的的範圍內便無特別限定,可由各種有機基中適當地選擇。作為Rb7 為有機基時的合適例子,可舉例烷基、烷氧基、環烷基、環烷氧基、飽和脂肪族醯基、飽和脂肪族醯氧基、烷氧基羰基、可具有取代基之苯基、可具有取代基之苯氧基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之苯甲醯氧基、可具有取代基之苯基烷基、可具有取代基之萘基、可具有取代基之萘氧基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之萘甲醯氧基、可具有取代基之萘基烷基、可具有取代基之雜環基、可具有取代基之雜環羰基、經1或2個有機基取代的胺基、嗎啉-1-基,及哌-1-基等。When R b7 is an organic group, R b7 is not particularly limited as long as it does not impair the object of the present invention, and can be appropriately selected from various organic groups. As a suitable example when R b7 is an organic group, an alkyl group, an alkoxy group, a cycloalkyl group, a cycloalkoxy group, a saturated aliphatic fluorenyl group, a saturated aliphatic decyloxy group, an alkoxycarbonyl group, or a substituent may be exemplified. a phenyl group, a phenoxy group which may have a substituent, a benzinyl group which may have a substituent, a phenoxycarbonyl group which may have a substituent, a benzyl fluorenyloxy group which may have a substituent, may have a substituent a phenylalkyl group, a naphthyl group which may have a substituent, a naphthyloxy group which may have a substituent, a naphthylmethyl fluorenyl group which may have a substituent, a naphthyloxycarbonyl group which may have a substituent, a naphthoquinone which may have a substituent An oxy group, a naphthylalkyl group which may have a substituent, a heterocyclic group which may have a substituent, a heterocyclic carbonyl group which may have a substituent, an amine group substituted with 1 or 2 organic groups, a morpholin-1-yl group, And piperazine -1- base and so on.

Rb7 為烷基時,烷基之碳原子數為1以上20以下較佳,1以上6以下更佳。又,Rb7 為烷基時,可為直鏈,亦可為支鏈。作為Rb7 為烷基時的具體例,可舉例甲基、乙基、n-丙基、異丙基、n-丁基、異丁基、sec-丁基、三級丁基、n-戊基、異戊基、sec-戊基、tert-戊基、n-己基、n-庚基、n-辛基、異辛基、sec-辛基、tert-辛基、n-壬基、異壬基、n-癸基,及異癸基等。又,Rb7 為烷基時,烷基在碳鏈中亦可含有醚鍵(-O-)。作為在碳鏈中具有醚鍵之烷基的例子,可舉例甲氧基乙基、乙氧基乙基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙基氧基乙氧基乙基,及甲氧基丙基等。When R b7 is an alkyl group, the number of carbon atoms of the alkyl group is preferably 1 or more and 20 or less, more preferably 1 or more and 6 or less. Further, when R b7 is an alkyl group, it may be a straight chain or a branched chain. Specific examples of the case where R b7 is an alkyl group include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, n-pentyl. Base, isopentyl, sec-pentyl, tert-pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, sec-octyl, tert-octyl, n-fluorenyl, iso Sulfhydryl, n-fluorenyl, and isodecyl. Further, when R b7 is an alkyl group, the alkyl group may further contain an ether bond (-O-) in the carbon chain. As an example of the alkyl group having an ether bond in the carbon chain, a methoxyethyl group, an ethoxyethyl group, a methoxyethoxyethyl group, an ethoxyethoxyethyl group, a propyloxy group can be illustrated. Ethoxyethyl, methoxypropyl and the like.

Rb7 為烷氧基時,烷氧基之碳原子數為1以上20以下較佳,1以上6以下更佳。又,Rb7 為烷氧基時,可為直鏈,亦可為支鏈。作為Rb7 為烷氧基時的具體例,可舉例甲氧基、乙氧基、n-丙基氧基、異丙基氧基、n-丁基氧基、異丁基氧基、sec-丁基氧基、三級丁基氧基、n-戊基氧基、異戊基氧基、sec-戊基氧基、tert-戊基氧基、n-己基氧基、n-庚基氧基、n-辛基氧基、異辛基氧基、sec-辛基氧基、tert-辛基氧基、n-壬基氧基、異壬基氧基、n-癸基氧基,及異癸基氧基等。又,Rb7 為烷氧基時,烷氧基在碳鏈中亦可含有醚鍵(-O-)。作為碳鏈中具有醚鍵之烷氧基的例子,可舉例甲氧基乙氧基、乙氧基乙氧基、甲氧基乙氧基乙氧基、乙氧基乙氧基乙氧基、丙基氧基乙氧基乙氧基,及甲氧基丙基氧基等。When R b7 is an alkoxy group, the number of carbon atoms of the alkoxy group is preferably 1 or more and 20 or less, more preferably 1 or more and 6 or less. Further, when R b7 is an alkoxy group, it may be a straight chain or a branched chain. Specific examples of the case where R b7 is an alkoxy group include a methoxy group, an ethoxy group, an n-propyloxy group, an isopropyloxy group, an n-butyloxy group, an isobutyloxy group, and a sec-. Butyloxy, tert-butyloxy, n-pentyloxy, isopentyloxy, sec-pentyloxy, tert-pentyloxy, n-hexyloxy, n-heptyloxy , n-octyloxy, isooctyloxy, sec-octyloxy, tert-octyloxy, n-nonyloxy, isodecyloxy, n-decyloxy, and Isodecyloxy and the like. Further, when R b7 is an alkoxy group, the alkoxy group may further contain an ether bond (-O-) in the carbon chain. Examples of the alkoxy group having an ether bond in the carbon chain include a methoxyethoxy group, an ethoxyethoxy group, a methoxyethoxyethoxy group, and an ethoxyethoxyethoxy group. Propyloxyethoxyethoxy, and methoxypropyloxy and the like.

Rb7 為環烷基或環烷氧基時,環烷基或環烷氧基之碳原子數為3以上10以下較佳,3以上6以下更佳。作為Rb7 為環烷基時的具體例,可舉例環丙基、環丁基、環戊基、環己基、環庚基,及環辛基等。作為Rb7 為環烷氧基時的具體例,可舉例環丙基氧基、環丁基氧基、環戊基氧基、環己基氧基、環庚基氧基,及環辛基氧基等。When R b7 is a cycloalkyl group or a cycloalkoxy group, the number of carbon atoms of the cycloalkyl group or the cycloalkoxy group is preferably 3 or more and 10 or less, more preferably 3 or more and 6 or less. Specific examples of the case where R b7 is a cycloalkyl group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Specific examples of the case where R b7 is a cycloalkoxy group include a cyclopropyloxy group, a cyclobutyloxy group, a cyclopentyloxy group, a cyclohexyloxy group, a cycloheptyloxy group, and a cyclooctyloxy group. Wait.

Rb7 為飽和脂肪族醯基或飽和脂肪族醯氧基時,飽和脂肪族醯基或飽和脂肪族醯氧基之碳原子數為2以上21以下較佳,2以上7以下更佳。作為Rb7 為飽和脂肪族醯基時的具體例,可舉例乙醯基、丙醯基、n-丁醯基、2-甲基丙醯基、n-戊醯基、2,2-二甲基丙醯基、n-己醯基、n-庚醯基、n-辛醯基、n-壬醯基、n-癸醯基、n-十一醯基、n-十二醯基、n-十三醯基、n-十四醯基、n-十五醯基,及n-十六醯基等。作為Rb7 為飽和脂肪族醯氧基時的具體例,可舉例乙醯氧基、丙醯氧基、n-丁醯氧基、2-甲基丙醯氧基、n-戊醯氧基、2,2-二甲基丙醯氧基、n-己醯氧基、n-庚醯氧基、n-辛醯氧基、n-壬醯氧基、n-癸醯氧基、n-十一醯氧基、n-十二醯氧基、n-十三醯氧基、n-十四醯氧基、n-十五醯氧基,及n-十六醯氧基等。When R b7 is a saturated aliphatic fluorenyl group or a saturated aliphatic fluorenyloxy group, the number of carbon atoms of the saturated aliphatic fluorenyl group or the saturated aliphatic fluorenyloxy group is preferably 2 or more and 21 or less, more preferably 2 or more and 7 or less. Specific examples of the case where R b7 is a saturated aliphatic fluorenyl group include ethyl hydrazino group, propyl fluorenyl group, n-butyl fluorenyl group, 2-methyl propyl fluorenyl group, n-pentyl fluorenyl group, and 2,2-dimethyl propyl group. Sulfhydryl, n-hexyl, n-heptyl, n-octyl, n-fluorenyl, n-fluorenyl, n-undecyl, n-dodedecyl, n-tride Base, n-tetradecyl, n-pentadecanyl, and n-hexadecanyl. Specific examples of the case where R b7 is a saturated aliphatic oxime group include an ethoxy group, a propenyloxy group, an n-butenyloxy group, a 2-methylpropoxy group, and an n-pentyloxy group. 2,2-dimethylpropenyloxy, n-hexyloxy, n-heptyloxy, n-octyloxy, n-decyloxy, n-decyloxy, n-ten Monomethoxy, n-dodecyloxy, n-tridecanyloxy, n-tetradecyloxy, n-pentadecanyloxy, and n-hexadecyloxy.

Rb7 為烷氧基羰基時,烷氧基羰基之碳原子數為2以上20以下較佳,2以上7以下更佳。作為Rb7 為烷氧基羰基時的具體例,可舉例甲氧基羰基、乙氧基羰基、n-丙基氧基羰基、異丙基氧基羰基、n-丁基氧基羰基、異丁基氧基羰基、sec-丁基氧基羰基、三級丁基氧基羰基、n-戊基氧基羰基、異戊基氧基羰基、sec-戊基氧基羰基、tert-戊基氧基羰基、n-己基氧基羰基、n-庚基氧基羰基、n-辛基氧基羰基、異辛基氧基羰基、sec-辛基氧基羰基、tert-辛基氧基羰基、n-壬基氧基羰基、異壬基氧基羰基、n-癸基氧基羰基,及異癸基氧基羰基等。When R b7 is an alkoxycarbonyl group, the number of carbon atoms of the alkoxycarbonyl group is preferably 2 or more and 20 or less, more preferably 2 or more and 7 or less. Specific examples of the case where R b7 is an alkoxycarbonyl group include a methoxycarbonyl group, an ethoxycarbonyl group, an n-propyloxycarbonyl group, an isopropyloxycarbonyl group, an n-butyloxycarbonyl group, and an isobutyl group. Alkoxycarbonyl, sec-butyloxycarbonyl, tert-butyloxycarbonyl, n-pentyloxycarbonyl, isopentyloxycarbonyl, sec-pentyloxycarbonyl, tert-pentyloxy Carbonyl, n-hexyloxycarbonyl, n-heptyloxycarbonyl, n-octyloxycarbonyl, isooctyloxycarbonyl, sec-octyloxycarbonyl, tert-octyloxycarbonyl, n- A mercaptooxycarbonyl group, an isodecyloxycarbonyl group, an n-fluorenyloxycarbonyl group, an isodecyloxycarbonyl group or the like.

Rb7 為苯基烷基時,苯基烷基之碳原子數為7以上20以下較佳,7以上10以下更佳。又,Rb7 為萘基烷基時,萘基烷基之碳原子數為11以上20以下較佳,11以上14以下更佳。作為Rb7 為苯基烷基時的具體例,可舉例苄基、2-苯基乙基、3-苯基丙基,及4-苯基丁基。作為Rb7 為萘基烷基時的具體例,可舉例α-萘基甲基、β-萘基甲基、2-(α-萘基)乙基,及2-(β-萘基)乙基。Rb7 為苯基烷基或萘基烷基時,Rb7 在苯基或萘基上可進一步具有取代基。When R b7 is a phenylalkyl group, the number of carbon atoms of the phenylalkyl group is preferably 7 or more and 20 or less, more preferably 7 or more and 10 or less. Further, when R b7 is a naphthylalkyl group, the number of carbon atoms of the naphthylalkyl group is preferably 11 or more and 20 or less, more preferably 11 or more and 14 or less. Specific examples of the case where R b7 is a phenylalkyl group include a benzyl group, a 2-phenylethyl group, a 3-phenylpropyl group, and a 4-phenylbutyl group. Specific examples of the case where R b7 is a naphthylalkyl group include α-naphthylmethyl group, β-naphthylmethyl group, 2-(α-naphthyl)ethyl group, and 2-(β-naphthyl)ethyl group. base. When R b7 is a phenylalkyl group or a naphthylalkyl group, R b7 may further have a substituent on the phenyl group or a naphthyl group.

Rb7 為雜環基時,雜環基為含有1個以上之N、S、O的5員或6員之單環,或為該單環彼此或該單環與苯環縮合而成的雜環基。雜環基為縮合環時,環數定為3為止。雜環基,可為芳香族基(雜芳基),亦可為非芳香族基。作為構成該雜環基之雜環,可舉例呋喃、噻吩、吡咯、唑、異唑、噻唑、噻二吖唑、異噻唑、咪唑、吡唑、三唑、吡啶、吡、嘧啶、嗒、苯并呋喃、苯并噻吩、吲哚、異吲哚、吲嗪、苯并咪唑、苯并三唑、苯并唑、苯并噻唑、咔唑、嘌呤、喹啉、異喹啉、喹唑啉、呔、噌啉、喹喔啉、哌啶、哌、嗎啉、哌啶、四氫哌喃,及四氫呋喃等。Rb7 為雜環基時,雜環基可進一步具有取代基。When R b7 is a heterocyclic group, the heterocyclic group is a single ring of 5 or 6 members containing one or more of N, S, and O, or a heterocyclic ring or a mixture of the monocyclic ring and the benzene ring. Ring base. When the heterocyclic group is a condensed ring, the number of rings is set to 3. The heterocyclic group may be an aromatic group (heteroaryl group) or a non-aromatic group. As the heterocyclic ring constituting the heterocyclic group, furan, thiophene, pyrrole, Azole Oxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyridyl Pyrimidine , benzofuran, benzothiophene, anthracene, isoindole, pyridazine, benzimidazole, benzotriazole, benzo Azole, benzothiazole, carbazole, anthracene, quinoline, isoquinoline, quinazoline, anthracene , porphyrin, quinoxaline, piperidine, piperidine , morpholine, piperidine, tetrahydropyran, and tetrahydrofuran. When R b7 is a heterocyclic group, the heterocyclic group may further have a substituent.

Rb7 為雜環羰基時,雜環羰基所含之雜環基,與Rb7 為雜環基時相同。When R b7 is a heterocyclic carbonyl group, the heterocyclic group contained in the heterocyclic carbonyl group is the same as when R b7 is a heterocyclic group.

Rb7 為經1或2個有機基取代的胺基時,有機基之合適例子,可舉例碳原子數1以上20以下之烷基、碳原子數3以上10以下之環烷基、碳原子數2以上21以下之飽和脂肪族醯基、可具有取代基之苯基、可具有取代基之苯甲醯基、可具有取代基之碳原子數7以上20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘甲醯基、可具有取代基之碳原子數11以上20以下之萘基烷基,及雜環基等。此等之合適的有機基之具體例,與Rb7 相同。作為經1或2個有機基取代的胺基之具體例,可舉例甲胺基、乙胺基、二乙胺基、n-丙胺基、二-n-丙胺基、異丙胺基、n-丁胺基、二-n-丁胺基、n-戊胺基、n-己胺基、n-庚胺基、n-辛胺基、n-壬胺基、n-癸胺基、苯基胺基、萘基胺基、乙醯基胺基、丙醯基胺基、n-丁醯基胺基、n-戊醯基胺基、n-己醯基胺基、n-庚醯基胺基、n-辛醯基胺基、n-癸醯基胺基、苯甲醯基胺基、α-萘甲醯基胺基,及β-萘甲醯基胺基等。When R b7 is an amine group substituted with one or two organic groups, a suitable example of the organic group is an alkyl group having 1 or more and 20 or less carbon atoms, a cycloalkyl group having 3 or more and 10 or less carbon atoms, and a carbon number. a saturated aliphatic fluorenyl group having 2 or more and 21 or less, a phenyl group which may have a substituent, a benzamyl group which may have a substituent, a phenylalkyl group having 7 or more and 20 or less carbon atoms which may have a substituent, may have a substitution The naphthyl group, a naphthylmethyl group which may have a substituent, a naphthylalkyl group having 11 or more and 20 or less carbon atoms which may have a substituent, and a heterocyclic group. Specific examples of such suitable organic groups are the same as R b7 . Specific examples of the amine group substituted with 1 or 2 organic groups include a methylamino group, an ethylamino group, a diethylamino group, an n-propylamino group, a di-n-propylamino group, an isopropylamine group, and an n-butyl group. Amino, di-n-butylamino, n-pentylamino, n-hexylamino, n-heptylamino, n-octylamino, n-nonylamino, n-nonylamino, phenylamine Base, naphthylamino group, ethyl hydrazino group, propyl decylamino group, n-butyl decylamino group, n-pentenylamino group, n-hexyl decylamino group, n-heptylamino group, n a octylamino group, an n-fluorenylamino group, a benzhydrylamino group, an α-naphthylmethylamino group, and a β-naphthylmethylamino group.

作為Rb7 所含之苯基、萘基及雜環基進一步具有取代基時的取代基,可舉例碳原子數1以上6以下之烷基、碳原子數1以上6以下之烷氧基、碳原子數2以上7以下之飽和脂肪族醯基、碳原子數2以上7以下之烷氧基羰基、碳原子數2以上7以下之飽和脂肪族醯氧基、具有碳原子數1以上6以下之烷基的單烷基胺基、具有碳原子數1以上6以下之烷基的二烷基胺基、嗎啉-1-基、哌-1-基、鹵素、硝基,及氰基等。Rb7 所含之苯基、萘基及雜環基進一步具有取代基時,該取代基的個數,在不阻礙本發明之目的的範圍內雖無限定,但為1以上4以下較佳。Rb7 所含之苯基、萘基及雜環基具有複數之取代基時,複數之取代基可相同亦可不同。Examples of the substituent in the case where the phenyl group, the naphthyl group and the heterocyclic group contained in the R b7 further have a substituent include an alkyl group having 1 or more and 6 or less carbon atoms, an alkoxy group having 1 or more and 6 or less carbon atoms, and carbon. a saturated aliphatic fluorenyl group having 2 or more and 7 or less atoms, an alkoxycarbonyl group having 2 or more and 7 or less carbon atoms, a saturated aliphatic decyloxy group having 2 or more and 7 or less carbon atoms, and having 1 or more and 6 or less carbon atoms. a monoalkylamino group of an alkyl group, a dialkylamino group having an alkyl group having 1 or more and 6 or less carbon atoms, morpholin-1-yl group, and piperazine -1-yl, halogen, nitro, and cyano. When the phenyl group, the naphthyl group and the heterocyclic group contained in R b7 further have a substituent, the number of the substituents is not limited, but is preferably 1 or more and 4 or less, insofar as the object of the present invention is not inhibited. When the phenyl group, the naphthyl group and the heterocyclic group contained in R b7 have a plurality of substituents, the plural substituents may be the same or different.

以上說明之基之中,作為Rb7 ,若為硝基或Rb12 -CO-所示之基,則有感度提升的傾向為較佳。Rb12 在不妨礙本發明之目的的範圍內便無特別限定,可自各種有機基中選擇。作為作為Rb12 合適的基之例子,可舉例碳原子數1以上20以下之烷基、可具有取代基之苯基、可具有取代基之萘基,及可具有取代基之雜環基。作為Rb12 ,此等基之中,以2-甲基苯基、噻吩-2-基,及α-萘基特佳。   又,若Rb7 為氫原子,則有透明性變得良好之傾向為較佳。此外,若Rb7 為氫原子且Rb10 為後述之式(b4a)或(b4b)所示之基,則有透明性變得更良好之傾向為較佳。Among the above-described examples, as R b7 , a group represented by a nitro group or R b12 -CO- tends to have a high sensitivity. R b12 is not particularly limited insofar as it does not impair the object of the present invention, and can be selected from various organic groups. Examples of a suitable group of R b12 include an alkyl group having 1 or more and 20 or less carbon atoms, a phenyl group which may have a substituent, a naphthyl group which may have a substituent, and a heterocyclic group which may have a substituent. As R b12 , among these groups, 2-methylphenyl, thiophen-2-yl, and α-naphthyl are particularly preferred. Further, when R b7 is a hydrogen atom, the transparency tends to be good. In addition, when R b7 is a hydrogen atom and R b10 is a group represented by the formula (b4a) or (b4b) which will be described later, the transparency tends to be further improved.

式(b4)中,Rb8 及Rb9 各自為可具有取代基之鏈狀烷基、可具有取代基之環狀有機基,或氫原子。Rb8 與Rb9 亦可相互鍵結形成環。此等基之中,作為Rb8 及Rb9 ,為可具有取代基之鏈狀烷基較佳。Rb8 及Rb9 為可具有取代基之鏈狀烷基時,鏈狀烷基可為直鏈烷基亦可為支鏈烷基。In the formula (b4), each of R b8 and R b9 is a chain alkyl group which may have a substituent, a cyclic organic group which may have a substituent, or a hydrogen atom. R b8 and R b9 may also be bonded to each other to form a ring. Among these groups, R b8 and R b9 are preferably a chain alkyl group which may have a substituent. When R b8 and R b9 are a chain alkyl group which may have a substituent, the chain alkyl group may be a linear alkyl group or a branched alkyl group.

Rb8 及Rb9 為不具有取代基之鏈狀烷基時,鏈狀烷基之碳原子數為1以上20以下較佳,1以上10以下更佳,1以上6以下特佳。作為Rb8 及Rb9 為鏈狀烷基時的具體例,可舉例甲基、乙基、n-丙基、異丙基、n-丁基、異丁基、sec-丁基、三級丁基、n-戊基、異戊基、sec-戊基、tert-戊基、n-己基、n-庚基、n-辛基、異辛基、sec-辛基、tert-辛基、n-壬基、異壬基、n-癸基,及異癸基等。又,Rb8 及Rb9 為烷基時,烷基在碳鏈中亦可含有醚鍵(-O-)。作為在碳鏈中具有醚鍵之烷基的例子,可舉例甲氧基乙基、乙氧基乙基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙基氧基乙氧基乙基,及甲氧基丙基等。When R b8 and R b9 are a chain alkyl group having no substituent, the number of carbon atoms of the chain alkyl group is preferably 1 or more and 20 or less, more preferably 1 or more and 10 or less, and particularly preferably 1 or more and 6 or less. Specific examples of the case where R b8 and R b9 are a chain alkyl group include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, and tertiary butyl. Base, n-pentyl, isopentyl, sec-pentyl, tert-pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, sec-octyl, tert-octyl, n - mercapto, isoindolyl, n-fluorenyl, and isodecyl. Further, when R b8 and R b9 are an alkyl group, the alkyl group may further contain an ether bond (-O-) in the carbon chain. As an example of the alkyl group having an ether bond in the carbon chain, a methoxyethyl group, an ethoxyethyl group, a methoxyethoxyethyl group, an ethoxyethoxyethyl group, a propyloxy group can be illustrated. Ethoxyethyl, methoxypropyl and the like.

Rb8 及Rb9 為具有取代基之鏈狀烷基時,鏈狀烷基之碳原子數為1以上20以下較佳,1以上10以下更佳,1以上6以下特佳。此時,取代基之碳原子數,不包含鏈狀烷基之碳原子數。具有取代基之鏈狀烷基,以直鏈狀者較佳。   烷基可具有的取代基,在不妨礙本發明之目的的範圍內便無特別限定。作為取代基之合適的例子,可舉例氰基、鹵素原子、環狀有機基,及烷氧基羰基。作為鹵素原子,可舉例氟原子、氯原子、溴原子、碘原子。此等之中,以氟原子、氯原子、溴原子較佳。作為環狀有機基,可舉例環烷基、芳香族烴基、雜環基。作為環烷基之具體例,與Rb7 為環烷基時之合適例子相同。作為芳香族烴基之具體例,可舉例苯基、萘基、聯苯基、蒽基,及菲基等。作為雜環基之具體例,與Rb7 為雜環基時之合適例子相同。Rb7 為烷氧基羰基時,烷氧基羰基所含之烷氧基,可為直鏈狀亦可為支鏈狀,以直鏈狀較佳。烷氧基羰基所含之烷氧基之碳原子數為1以上10以下較佳,1以上6以下更佳。When R b8 and R b9 are a chain alkyl group having a substituent, the number of carbon atoms of the chain alkyl group is preferably 1 or more and 20 or less, more preferably 1 or more and 10 or less, and particularly preferably 1 or more and 6 or less. In this case, the number of carbon atoms of the substituent does not include the number of carbon atoms of the chain alkyl group. The chain alkyl group having a substituent is preferably a linear one. The substituent which the alkyl group may have is not particularly limited insofar as it does not impair the object of the present invention. As a suitable example of the substituent, a cyano group, a halogen atom, a cyclic organic group, and an alkoxycarbonyl group can be exemplified. The halogen atom may, for example, be a fluorine atom, a chlorine atom, a bromine atom or an iodine atom. Among these, a fluorine atom, a chlorine atom, and a bromine atom are preferred. The cyclic organic group may, for example, be a cycloalkyl group, an aromatic hydrocarbon group or a heterocyclic group. Specific examples of the cycloalkyl group are the same as those in the case where R b7 is a cycloalkyl group. Specific examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, a fluorenyl group, and a phenanthryl group. Specific examples of the heterocyclic group are the same as those in the case where R b7 is a heterocyclic group. When R b7 is an alkoxycarbonyl group, the alkoxy group contained in the alkoxycarbonyl group may be linear or branched, and is preferably linear. The alkoxy group contained in the alkoxycarbonyl group is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less.

鏈狀烷基具有取代基時,取代基之個數並無特別限定。較佳的取代基之個數視鏈狀烷基之碳原子數改變。取代基之個數,典型為1以上20以下,以1以上10以下較佳,1以上6以下更佳。When the chain alkyl group has a substituent, the number of the substituents is not particularly limited. The number of preferred substituents varies depending on the number of carbon atoms of the chain alkyl group. The number of the substituents is typically 1 or more and 20 or less, more preferably 1 or more and 10 or less, and still more preferably 1 or more and 6 or less.

Rb8 及Rb9 為環狀有機基時,環狀有機基可為脂環式基,亦可為芳香族基。作為環狀有機基,可舉例脂肪族環狀烴基、芳香族烴基、雜環基。Rb8 及Rb9 為環狀有機基時,環狀有機基可具有之取代基,與Rb8 及Rb9 為鏈狀烷基時相同。When R b8 and R b9 are a cyclic organic group, the cyclic organic group may be an alicyclic group or an aromatic group. The cyclic organic group may, for example, be an aliphatic cyclic hydrocarbon group, an aromatic hydrocarbon group or a heterocyclic group. When R b8 and R b9 are a cyclic organic group, the cyclic organic group may have a substituent, and is the same as when R b8 and R b9 are a chain alkyl group.

Rb8 及Rb9 為芳香族烴基時,芳香族烴基為苯基,或為複數之苯環透過碳-碳鍵鍵結的基,或為複數之苯環縮合形成的基較佳。芳香族烴基為苯基,或為複數之苯環鍵結或縮合形成的基時,芳香族烴基所含之苯環之環數並無特別限定,以3以下較佳,2以下更佳,1特佳。作為芳香族烴基之較佳的具體例,可舉例苯基、萘基、聯苯基、蒽基,及菲基等。When R b8 and R b9 are an aromatic hydrocarbon group, the aromatic hydrocarbon group is a phenyl group, or a plurality of benzene rings are bonded through a carbon-carbon bond, or a group formed by condensation of a plurality of benzene rings is preferred. When the aromatic hydrocarbon group is a phenyl group or a benzene ring bond or a condensed group, the number of rings of the benzene ring contained in the aromatic hydrocarbon group is not particularly limited, and is preferably 3 or less, more preferably 2 or less, and 1 is preferable. Very good. Preferable specific examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, a fluorenyl group, and a phenanthryl group.

Rb8 及Rb9 為脂肪族環狀烴基時,脂肪族環狀烴基可為單環式亦可為多環式。脂肪族環狀烴基之碳原子數雖無特別限定,但為3以上20以下較佳,3以上10以下更佳。作為單環式之環狀烴基的例子,可舉例環丙基、環丁基、環戊基、環己基、環庚基、環辛基、降莰基、異莰基、三環壬基、三環癸基、四環十二烷基,及金剛烷基等。When R b8 and R b9 are aliphatic cyclic hydrocarbon groups, the aliphatic cyclic hydrocarbon group may be monocyclic or polycyclic. The number of carbon atoms of the aliphatic cyclic hydrocarbon group is not particularly limited, but is preferably 3 or more and 20 or less, more preferably 3 or more and 10 or less. Examples of the monocyclic cyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a decyl group, an isodecyl group, a tricyclodecyl group, and a trisole. Cyclodecyl, tetracyclododecyl, and adamantyl.

Rb8 及Rb9 為雜環基時,雜環基為含有1個以上之N、S、O的5員或6員之單環,或為該單環彼此或該單環與苯環縮合而成的雜環基。雜環基為縮合環時,環數定為3為止。雜環基可為芳香族基(雜芳基),亦可為非芳香族基。作為構成該雜環基之雜環,可舉例呋喃、噻吩、吡咯、唑、異唑、噻唑、噻二吖唑、異噻唑、咪唑、吡唑、三唑、吡啶、吡、嘧啶、嗒、苯并呋喃、苯并噻吩、吲哚、異吲哚、吲嗪、苯并咪唑、苯并三唑、苯并唑、苯并噻唑、咔唑、嘌呤、喹啉、異喹啉、喹唑啉、呔、噌啉、喹喔啉、哌啶、哌、嗎啉、哌啶、四氫哌喃,及四氫呋喃等。When R b8 and R b9 are a heterocyclic group, the heterocyclic group is a single ring of 5 or 6 members containing one or more of N, S, and O, or the monocyclic ring or the monocyclic ring is condensed with the benzene ring. a heterocyclic group. When the heterocyclic group is a condensed ring, the number of rings is set to 3. The heterocyclic group may be an aromatic group (heteroaryl group) or a non-aromatic group. As the heterocyclic ring constituting the heterocyclic group, furan, thiophene, pyrrole, Azole Oxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyridyl Pyrimidine , benzofuran, benzothiophene, anthracene, isoindole, pyridazine, benzimidazole, benzotriazole, benzo Azole, benzothiazole, carbazole, anthracene, quinoline, isoquinoline, quinazoline, anthracene , porphyrin, quinoxaline, piperidine, piperidine , morpholine, piperidine, tetrahydropyran, and tetrahydrofuran.

Rb8 與Rb9 亦可互相鍵結形成環。由Rb8 與Rb9 形成環而成之基,為環亞烷基較佳。Rb8 與Rb9 鍵結形成環亞烷基時,構成環亞烷基之環為5員環~6員環較佳,5員環更佳。R b8 and R b9 may also be bonded to each other to form a ring. The group formed by the ring formation of R b8 and R b9 is preferably a cycloalkylene group. When R b8 and R b9 are bonded to form a cycloalkylene group, the ring constituting the cycloalkylene group is preferably a 5-membered ring to a 6-membered ring, and a 5-membered ring is more preferable.

Rb8 與Rb9 鍵結形成之基為環亞烷基時,環亞烷基可與1個以上之其他環縮合。作為可與環亞烷基縮合之環的例子,可舉例苯環、萘環、環丁烷環、環戊烷環、環己烷環、環庚烷環、環辛烷環、呋喃環、噻吩環、吡咯環、吡啶環、吡環,及嘧啶環等。When the group formed by the bonding of R b8 and R b9 is a cycloalkylene group, the cycloalkylene group may be condensed with one or more other rings. Examples of the ring condensable with the cycloalkylene group include a benzene ring, a naphthalene ring, a cyclobutane ring, a cyclopentane ring, a cyclohexane ring, a cycloheptane ring, a cyclooctane ring, a furan ring, and a thiophene group. Ring, pyrrole ring, pyridine ring, pyridyl Ring, and pyrimidine ring.

作為以上說明之Rb8 及Rb9 之中合適的基之例子,可舉例式-A1 -A2 所示之基。可舉例式中,A1 為直鏈伸烷基,A2 為烷氧基、氰基、鹵素原子、鹵化烷基、環狀有機基,或烷氧基羰基。As an example of a suitable group among R b8 and R b9 described above, a group represented by the formula -A 1 -A 2 can be exemplified. In the formula, A 1 is a linear alkylene group, and A 2 is an alkoxy group, a cyano group, a halogen atom, a halogenated alkyl group, a cyclic organic group, or an alkoxycarbonyl group.

A1 之直鏈伸烷基之碳原子數為1以上10以下較佳,1以上6以下更佳。A2 為烷氧基時,烷氧基可為直鏈狀亦可為支鏈狀,以直鏈狀較佳。烷氧基之碳原子數為1以上10以下較佳,1以上6以下更佳。A2 為鹵素原子時,以氟原子、氯原子、溴原子、碘原子較佳,氟原子、氯原子、溴原子更佳。A2 為鹵化烷基時,鹵化烷基所含之鹵素原子為氟原子、氯原子、溴原子、碘原子較佳,氟原子、氯原子、溴原子更佳。鹵化烷基可為直鏈狀亦可為支鏈狀,以直鏈狀較佳。A2 為環狀有機基時,環狀有機基之例子,與Rb8 及Rb9 作為取代基所具有之環狀有機基相同。A2 為烷氧基羰基時,烷氧基羰基之例子,與Rb8 及Rb9 作為取代基所具有之烷氧基羰基相同。The number of carbon atoms of the linear alkyl group of A 1 is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less. When A 2 is an alkoxy group, the alkoxy group may be linear or branched, and is preferably linear. The number of carbon atoms of the alkoxy group is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less. When A 2 is a halogen atom, a fluorine atom, a chlorine atom, a bromine atom or an iodine atom is preferred, and a fluorine atom, a chlorine atom or a bromine atom is more preferable. When A 2 is a halogenated alkyl group, the halogen atom contained in the halogenated alkyl group is preferably a fluorine atom, a chlorine atom, a bromine atom or an iodine atom, and a fluorine atom, a chlorine atom or a bromine atom is more preferable. The halogenated alkyl group may be linear or branched, and is preferably linear. When A 2 is a cyclic organic group, an example of the cyclic organic group is the same as the cyclic organic group which R b8 and R b9 have as a substituent. When A 2 is an alkoxycarbonyl group, an alkoxycarbonyl group is the same as the alkoxycarbonyl group which R b8 and R b9 have as a substituent.

作為Rb8 及Rb9 之合適之具體例,可舉例乙基、n-丙基、n-丁基、n-己基、n-庚基,及n-辛基等之烷基;2-甲氧基乙基、3-甲氧基-n-丙基、4-甲氧基-n-丁基、5-甲氧基-n-戊基、6-甲氧基-n-己基、7-甲氧基-n-庚基、8-甲氧基-n-辛基、2-乙氧基乙基、3-乙氧基-n-丙基、4-乙氧基-n-丁基、5-乙氧基-n-戊基、6-乙氧基-n-己基、7-乙氧基-n-庚基,及8-乙氧基-n-辛基等之烷氧基烷基;2-氰基乙基、3-氰基-n-丙基、4-氰基-n-丁基、5-氰基-n-戊基、6-氰基-n-己基、7-氰基-n-庚基,及8-氰基-n-辛基等之氰基烷基;2-苯基乙基、3-苯基-n-丙基、4-苯基-n-丁基、5-苯基-n-戊基、6-苯基-n-己基、7-苯基-n-庚基,及8-苯基-n-辛基等之苯基烷基;2-環己基乙基、3-環己基-n-丙基、4-環己基-n-丁基、5-環己基-n-戊基、6-環己基-n-己基、7-環己基-n-庚基、8-環己基-n-辛基、2-環戊基乙基、3-環戊基-n-丙基、4-環戊基-n-丁基、5-環戊基-n-戊基、6-環戊基-n-己基、7-環戊基-n-庚基,及8-環戊基-n-辛基等之環烷基烷基;2-甲氧基羰基乙基、3-甲氧基羰基-n-丙基、4-甲氧基羰基-n-丁基、5-甲氧基羰基-n-戊基、6-甲氧基羰基-n-己基、7-甲氧基羰基-n-庚基、8-甲氧基羰基-n-辛基、2-乙氧基羰基乙基、3-乙氧基羰基-n-丙基、4-乙氧基羰基-n-丁基、5-乙氧基羰基-n-戊基、6-乙氧基羰基-n-己基、7-乙氧基羰基-n-庚基,及8-乙氧基羰基-n-辛基等之烷氧基羰基烷基;2-氯乙基、3-氯-n-丙基、4-氯-n-丁基、5-氯-n-戊基、6-氯-n-己基、7-氯-n-庚基、8-氯-n-辛基、2-溴乙基、3-溴-n-丙基、4-溴-n-丁基、5-溴-n-戊基、6-溴-n-己基、7-溴-n-庚基、8-溴-n-辛基、3,3,3-三氟丙基,及3,3,4,4,5,5,5-七氟-n-戊基等之鹵化烷基。Specific examples of R b8 and R b9 include ethyl, n-propyl, n-butyl, n-hexyl, n-heptyl, and n-octyl and the like; 2-methoxy Ethyl ethyl, 3-methoxy-n-propyl, 4-methoxy-n-butyl, 5-methoxy-n-pentyl, 6-methoxy-n-hexyl, 7-A Oxy-n-heptyl, 8-methoxy-n-octyl, 2-ethoxyethyl, 3-ethoxy-n-propyl, 4-ethoxy-n-butyl, 5 An alkoxyalkyl group such as ethoxy-n-pentyl, 6-ethoxy-n-hexyl, 7-ethoxy-n-heptyl, and 8-ethoxy-n-octyl; 2-cyanoethyl, 3-cyano-n-propyl, 4-cyano-n-butyl, 5-cyano-n-pentyl, 6-cyano-n-hexyl, 7-cyano -n-heptyl, and cyanoalkyl such as 8-cyano-n-octyl; 2-phenylethyl, 3-phenyl-n-propyl, 4-phenyl-n-butyl, Phenylalkyl 5-phenyl-n-pentyl, 6-phenyl-n-hexyl, 7-phenyl-n-heptyl, and 8-phenyl-n-octyl; 2-cyclohexyl Ethyl, 3-cyclohexyl-n-propyl, 4-cyclohexyl-n-butyl, 5-cyclohexyl-n-pentyl, 6-cyclohexyl-n-hexyl, 7-cyclohexyl-n-g , 8-cyclohexyl-n-octyl, 2-cyclopentylethyl, 3-cyclopentyl-n-propyl, 4-cyclopentyl-n- Butyl, 5-cyclopentyl-n-pentyl, 6-cyclopentyl-n-hexyl, 7-cyclopentyl-n-heptyl, and cyclohexane of 8-cyclopentyl-n-octyl Alkylalkyl; 2-methoxycarbonylethyl, 3-methoxycarbonyl-n-propyl, 4-methoxycarbonyl-n-butyl, 5-methoxycarbonyl-n-pentyl, 6 -methoxycarbonyl-n-hexyl, 7-methoxycarbonyl-n-heptyl, 8-methoxycarbonyl-n-octyl, 2-ethoxycarbonylethyl, 3-ethoxycarbonyl- N-propyl, 4-ethoxycarbonyl-n-butyl, 5-ethoxycarbonyl-n-pentyl, 6-ethoxycarbonyl-n-hexyl, 7-ethoxycarbonyl-n-g And alkoxycarbonylalkyl groups such as 8-ethoxycarbonyl-n-octyl; 2-chloroethyl, 3-chloro-n-propyl, 4-chloro-n-butyl, 5-chloro -n-pentyl, 6-chloro-n-hexyl, 7-chloro-n-heptyl, 8-chloro-n-octyl, 2-bromoethyl, 3-bromo-n-propyl, 4-bromo -n-butyl, 5-bromo-n-pentyl, 6-bromo-n-hexyl, 7-bromo-n-heptyl, 8-bromo-n-octyl, 3,3,3-trifluoropropene And a halogenated alkyl group such as 3,3,4,4,5,5,5-heptafluoro-n-pentyl.

作為Rb8 及Rb9 ,上述之中合適的基,為乙基、n-丙基、n-丁基、n-戊基、2-甲氧基乙基、2-氰基乙基、2-苯基乙基、2-環己基乙基、2-甲氧基羰基乙基、2-氯乙基、2-溴乙基、3,3,3-三氟丙基,及3,3,4,4,5,5,5-七氟-n-戊基。As R b8 and R b9 , suitable ones among the above are ethyl, n-propyl, n-butyl, n-pentyl, 2-methoxyethyl, 2-cyanoethyl, 2- Phenylethyl, 2-cyclohexylethyl, 2-methoxycarbonylethyl, 2-chloroethyl, 2-bromoethyl, 3,3,3-trifluoropropyl, and 3,3,4 , 4,5,5,5-heptafluoro-n-pentyl.

作為Rb10 之合適的有機基之例子,與Rb7 相同,可舉例烷基、烷氧基、環烷基、環烷氧基、飽和脂肪族醯基、烷氧基羰基、飽和脂肪族醯氧基、可具有取代基之苯基、可具有取代基之苯氧基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之苯甲醯氧基、可具有取代基之苯基烷基、可具有取代基之萘基、可具有取代基之萘氧基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之萘甲醯氧基、可具有取代基之萘基烷基、可具有取代基之雜環基、可具有取代基之雜環羰基、經1或2個有機基取代的胺基、嗎啉-1-基,及哌-1-基等。此等基之具體例,與於Rb7 所說明者相同。又,作為Rb10 ,為環烷基烷基、可於芳香環上具有取代基之苯氧基烷基、可於芳香環上具有取代基之苯基硫烷基亦較佳。苯氧基烷基及苯基硫烷基可具有之取代基,與Rb7 所含之苯基可具有的取代基相同。As an example of a suitable organic group of R b10 , as with R b7 , an alkyl group, an alkoxy group, a cycloalkyl group, a cycloalkoxy group, a saturated aliphatic fluorenyl group, an alkoxycarbonyl group, a saturated aliphatic oxime can be exemplified. a phenyl group which may have a substituent, a phenoxy group which may have a substituent, a benzyl group which may have a substituent, a phenoxycarbonyl group which may have a substituent, a benzyl methoxy group which may have a substituent, a phenylalkyl group which may have a substituent, a naphthyl group which may have a substituent, a naphthyloxy group which may have a substituent, a naphthylmethyl fluorenyl group which may have a substituent, a naphthyloxycarbonyl group which may have a substituent, may have a substitution A naphthylmethoxy group, a naphthylalkyl group which may have a substituent, a heterocyclic group which may have a substituent, a heterocyclic carbonyl group which may have a substituent, an amine group substituted with 1 or 2 organic groups, morpholine -1-yl, and piperazine -1- base and so on. Specific examples of such bases are the same as those described in R b7 . Further, R b10 is preferably a cycloalkylalkyl group, a phenoxyalkyl group which may have a substituent on the aromatic ring, and a phenylsulfanyl group which may have a substituent on the aromatic ring. The phenoxyalkyl group and the phenylsulfanyl group may have a substituent which is the same as the substituent which the phenyl group contained in R b7 may have.

有機基之中,作為Rb10 ,以烷基、環烷基、可具有取代基之苯基,或環烷基烷基、可於芳香環上具有取代基之苯基硫烷基較佳。作為烷基,以碳原子數1以上20以下之烷基較佳,碳原子數1以上8以下之烷基更佳,碳原子數1以上4以下之烷基特佳,甲基最佳。可具有取代基之苯基之中,甲基苯基較佳,2-甲基苯基更佳。環烷基烷基所含之環烷基之碳原子數為5以上10以下較佳,5以上8以下更佳,5或6特佳。環烷基烷基所含之伸烷基之碳原子數為1以上8以下較佳,1以上4以下更佳,2特佳。環烷基烷基之中,以環戊基乙基較佳。可於芳香環上具有取代基之苯基硫烷基所含之伸烷基之碳原子數為1以上8以下較佳,1以上4以下更佳,2特佳。可於芳香環上具有取代基之苯基硫烷基之中,以2-(4-氯苯基硫基)乙基較佳。Among the organic groups, R b10 is preferably an alkyl group, a cycloalkyl group, a phenyl group which may have a substituent, or a cycloalkylalkyl group, and a phenylsulfanyl group which may have a substituent on the aromatic ring. The alkyl group is preferably an alkyl group having 1 or more and 20 or less carbon atoms, more preferably an alkyl group having 1 or more and 8 or less carbon atoms, and most preferably an alkyl group having 1 or more and 4 or less carbon atoms, and the methyl group is most preferable. Among the phenyl groups which may have a substituent, a methylphenyl group is preferred, and a 2-methylphenyl group is more preferred. The number of carbon atoms of the cycloalkyl group contained in the cycloalkylalkyl group is preferably 5 or more and 10 or less, more preferably 5 or more and 8 or less, and particularly preferably 5 or 6. The number of carbon atoms of the alkylene group contained in the cycloalkylalkyl group is preferably 1 or more and 8 or less, more preferably 1 or more and 4 or less, and particularly preferably 2. Among the cycloalkylalkyl groups, a cyclopentylethyl group is preferred. The number of carbon atoms of the alkylene group contained in the phenylsulfanyl group having a substituent on the aromatic ring is preferably 1 or more and 8 or less, more preferably 1 or more and 4 or less, and particularly preferably 2. Among the phenylsulfanyl groups having a substituent on the aromatic ring, 2-(4-chlorophenylthio)ethyl is preferred.

又,作為Rb10 ,-A3 -CO-O-A4 所示之基亦較佳。A3 為2價有機基,以2價烴基較佳,伸烷基較佳。A4 為1價有機基,以1價烴基較佳。Further, as R b10 , a group represented by -A 3 -CO-OA 4 is also preferable. A 3 is a divalent organic group, preferably a divalent hydrocarbon group, and an alkyl group is preferred. A 4 is a monovalent organic group, and a monovalent hydrocarbon group is preferred.

A3 為伸烷基時,伸烷基可為直鏈狀亦可為支鏈狀,以直鏈狀較佳。A3 為伸烷基時,伸烷基之碳原子數為1以上10以下較佳,1以上6以下更佳,1以上4以下特佳。When A 3 is an alkylene group, the alkyl group may be linear or branched, and is preferably a linear chain. When A 3 is an alkylene group, the number of carbon atoms of the alkyl group is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less, and particularly preferably 1 or more and 4 or less.

作為A4 之合適例子,可舉例碳原子數1以上10以下之烷基、碳原子數7以上20以下之芳烷基,及碳原子數6以上20以下之芳香族烴基。作為A4 之合適之具體例,可舉例甲基、乙基、n-丙基、異丙基、n-丁基、異丁基、sec-丁基、三級丁基、n-戊基、n-己基、苯基、萘基、苄基、苯乙基、α-萘基甲基,及β-萘基甲基等。A suitable example of A 4 is an alkyl group having 1 or more and 10 or less carbon atoms, an aralkyl group having 7 or more and 20 or less carbon atoms, and an aromatic hydrocarbon group having 6 or more and 20 or less carbon atoms. Specific examples of suitable A 4 include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, n-pentyl, N-hexyl, phenyl, naphthyl, benzyl, phenethyl, α-naphthylmethyl, and β-naphthylmethyl.

作為-A3 -CO-O-A4 所示之基的合適之具體例,可舉例2-甲氧基羰基乙基、2-乙氧基羰基乙基、2-n-丙基氧基羰基乙基、2-n-丁基氧基羰基乙基、2-n-戊基氧基羰基乙基、2-n-己基氧基羰基乙基、2-苄氧基羰基乙基、2-苯氧基羰基乙基、3-甲氧基羰基-n-丙基、3-乙氧基羰基-n-丙基、3-n-丙基氧基羰基-n-丙基、3-n-丁基氧基羰基-n-丙基、3-n-戊基氧基羰基-n-丙基、3-n-己基氧基羰基-n-丙基、3-苄氧基羰基-n-丙基,及3-苯氧基羰基-n-丙基等。As a suitable specific example of the group represented by -A 3 -CO-OA 4 , 2-methoxycarbonylethyl, 2-ethoxycarbonylethyl, 2-n-propyloxycarbonylethyl can be exemplified. , 2-n-butyloxycarbonylethyl, 2-n-pentyloxycarbonylethyl, 2-n-hexyloxycarbonylethyl, 2-benzyloxycarbonylethyl, 2-phenoxy Carbonylethyl, 3-methoxycarbonyl-n-propyl, 3-ethoxycarbonyl-n-propyl, 3-n-propyloxycarbonyl-n-propyl, 3-n-butyloxy Carbocarbonyl-n-propyl, 3-n-pentyloxycarbonyl-n-propyl, 3-n-hexyloxycarbonyl-n-propyl, 3-benzyloxycarbonyl-n-propyl, and 3-phenoxycarbonyl-n-propyl and the like.

以上,雖已說明關於Rb10 ,但作為Rb10 ,以下述式(b4a)或(b4b)所示之基較佳。(式(b4a)及(b4b)中,Rb13 及Rb14 各自為有機基,n6為0以上4以下之整數,Rb13 及Rb14 為苯環上之隣接的位置存在時,Rb13 與Rb14 亦可互相鍵結形成環,n7為1以上8以下之整數,n8為1以上5以下之整數,n9為0以上(n8+3)以下之整數,Rb15 為有機基)。Above, Although description of R b10, but as R b10, the following formula (B4A) or (B4B) of the group represented by are preferred. (In the formulae (b4a) and (b4b), R b13 and R b14 are each an organic group, and n6 is an integer of 0 or more and 4 or less. When R b13 and R b14 are adjacent to each other on the benzene ring, R b13 and R B14 may be bonded to each other to form a ring, n7 is an integer of 1 or more and 8 or less, n8 is an integer of 1 or more and 5 or less, n9 is an integer of 0 or more (n8+3) or less, and Rb15 is an organic group).

關於式(b4a)中之Rb13 及Rb14 之有機基的例子,與Rb7 相同。作為Rb13 ,以烷基或苯基較佳。Rb13 為烷基時,其碳原子數為1以上10以下較佳,1以上5以下更佳,1以上3以下特佳,1最佳。亦即,Rb13 為甲基最佳。Rb13 與Rb14 鍵結形成環時,該環可為芳香族環,亦可為脂肪族環。作為式(b4a)所示之基,且為Rb13 與Rb14 形成之基的合適例子,可舉例萘-1-基,或1,2,3,4-四氫萘-5-基等。上述式(b4a)中,n6為0以上4以下之整數,0或1較佳,0更佳。Examples of the organic group of R b13 and R b14 in the formula (b4a) are the same as those of R b7 . As R b13 , an alkyl group or a phenyl group is preferred. When R b13 is an alkyl group, the number of carbon atoms is preferably 1 or more and 10 or less, more preferably 1 or more and 5 or less, and most preferably 1 or more and 3 or less, and 1 is most preferable. That is, R b13 is the methyl group most. When R b13 and R b14 are bonded to form a ring, the ring may be an aromatic ring or an aliphatic ring. As a suitable example of the group represented by the formula (b4a) and which is a group in which R b13 and R b14 are formed, a naphthalen-1-yl group, a 1,2,3,4-tetrahydronaphthalen-5-yl group or the like can be exemplified. In the above formula (b4a), n6 is an integer of 0 or more and 4 or less, 0 or 1 is preferable, and 0 is more preferable.

上述式(b4b)中,Rb15 為有機基。作為有機基,可舉例與於Rb7 說明之有機基相同的基。有機基之中,以烷基較佳。烷基可為直鏈狀亦可為支鏈狀。烷基之碳原子數為1以上10以下較佳,1以上5以下更佳,1以上3以下特佳。作為Rb15 ,較佳例示有甲基、乙基、丙基、異丙基、丁基等,此等之中,甲基更佳。In the above formula (b4b), R b15 is an organic group. As the organic group, the same ones as those exemplified for R b7 can be exemplified. Among the organic groups, an alkyl group is preferred. The alkyl group may be linear or branched. The number of carbon atoms of the alkyl group is preferably 1 or more and 10 or less, more preferably 1 or more and 5 or less, and particularly preferably 1 or more and 3 or less. As R b15 , a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group or the like is preferably exemplified, and among these, a methyl group is more preferable.

上述式(b4b)中,n8為1以上5以下之整數,1以上3以下之整數較佳,1或2更佳。上述式(b4b)中,n9為0以上(n8+3)以下,0以上3以下之整數較佳,0以上2以下之整數更佳,0特佳。上述式(b4b)中,n7為1以上8以下之整數,1以上5以下之整數較佳,1以上3以下之整數更佳,1或2特佳。In the above formula (b4b), n8 is an integer of 1 or more and 5 or less, and an integer of 1 or more and 3 or less is more preferable, and 1 or 2 is more preferable. In the above formula (b4b), n9 is 0 or more (n8+3) or less, and an integer of 0 or more and 3 or less is preferable, and an integer of 0 or more and 2 or less is more preferable, and 0 is particularly preferable. In the above formula (b4b), n7 is an integer of 1 or more and 8 or less, and an integer of 1 or more and 5 or less is preferable, and an integer of 1 or more and 3 or less is more preferable, and 1 or 2 is particularly preferable.

式(b4)中,Rb11 為氫原子、可具有取代基之碳原子數1以上11以下之烷基,或可具有取代基之芳基。作為Rb11 為烷基時可具有的取代基,較佳例示有苯基、萘基等。又,作為Rb7 為芳基時可具有的取代基,較佳例示有碳原子數1以上5以下之烷基、烷氧基、鹵素原子等。In the formula (b4), R b11 is a hydrogen atom, an alkyl group having 1 to 11 or less carbon atoms which may have a substituent, or an aryl group which may have a substituent. The substituent which may be possessed when R b11 is an alkyl group is preferably a phenyl group, a naphthyl group or the like. In addition, as the substituent which may be contained when R b7 is an aryl group, an alkyl group having 1 to 5 or less carbon atoms, an alkoxy group, a halogen atom or the like is preferably exemplified.

式(b4)中,作為Rb11 ,較佳例示有氫原子、甲基、乙基、n-丙基、異丙基、n-丁基、苯基、苄基、甲基苯基、萘基等,此等之中,甲基或苯基更佳。In the formula (b4), as R b11 , a hydrogen atom, a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a phenyl group, a benzyl group, a methylphenyl group or a naphthyl group are preferably exemplified. Etc. Among these, methyl or phenyl is preferred.

作為式(b4)所示之化合物之合適的具體例,可舉例以下之PI-43~PI-83。 As a specific specific example of the compound represented by the formula (b4), the following PI-43 to PI-83 can be exemplified.

(B)光聚合起始劑之含量,相對於去除後述之(S)有機溶劑的質量之感光性組成物的質量(固體成分全體)而言為0.5質量%以上30質量%以下較佳,1質量%以上20質量%以下更佳。藉由(B)光聚合起始劑之含量定為上述之範圍,可得到難以產生圖型形狀不良的感光性組成物。(B) The content of the photopolymerization initiator is preferably 0.5% by mass or more and 30% by mass or less based on the mass of the photosensitive composition (the entire solid content) of the mass of the organic solvent (S) to be described later. More preferably, the mass% is more than 20% by mass. When the content of the (B) photopolymerization initiator is set to the above range, a photosensitive composition which is less likely to cause a pattern shape defect can be obtained.

又,(B)光聚合起始劑中,亦可組合光起始助劑。作為光起始助劑,可舉例三乙醇胺、甲基二乙醇胺、三異丙醇胺、4-二甲胺基苯甲酸甲酯、4-二甲胺基苯甲酸乙酯、4-二甲胺基苯甲酸異戊酯、4-二甲胺基苯甲酸2-乙基己酯、苯甲酸2-二甲胺基乙酯、N,N-二甲基對甲苯胺、4,4’-雙(二甲胺基)二苯甲酮、9,10-二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基-9,10-二乙氧基蒽、2-巰基苯并噻唑、2-巰基苯并唑、2-巰基苯并咪唑、2-巰基-5-甲氧基苯并噻唑、3-巰基丙酸、3-巰基丙酸甲酯、季戊四醇四巰基乙酸酯、3-巰基丙酸酯等之硫醇化合物等。此等之光起始助劑,可單獨或組合2種以上來使用。Further, in the (B) photopolymerization initiator, a photoinitiating aid may be combined. As the photoinitiator, triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, 4-dimethylamine can be exemplified. Isoamyl benzoate, 2-ethylhexyl 4-dimethylaminobenzoate, 2-dimethylaminoethyl benzoate, N,N-dimethyl-p-toluidine, 4,4'-double (dimethylamino)benzophenone, 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl -9,10-diethoxyanthracene, 2-mercaptobenzothiazole, 2-mercaptobenzoene Oxazole, 2-mercaptobenzimidazole, 2-mercapto-5-methoxybenzothiazole, 3-mercaptopropionic acid, methyl 3-mercaptopropionate, pentaerythritol tetradecyl acetate, 3-mercaptopropionate, etc. a thiol compound or the like. These photoinitiating aids can be used singly or in combination of two or more.

<(C)碳黑>   感光性組成物包含(C)碳黑作為遮光性材料。感光性組成物中之(C)碳黑之含量,為感光性組成物之全固體成分中30質量%以上,40質量%以上較佳,50質量%以上更佳。感光性組成物,藉由包含該範圍之量的(C)碳黑,可形成遮光性優異的硬化膜。   (C)碳黑之含量的上限雖無特別限定,但為感光性組成物之全固體成分中75質量%以下較佳,70質量%以下更佳,60質量%以下特佳。<(C) Carbon Black> The photosensitive composition contains (C) carbon black as a light-shielding material. The content of the (C) carbon black in the photosensitive composition is preferably 30% by mass or more, more preferably 40% by mass or more, and more preferably 50% by mass or more, based on the total solid content of the photosensitive composition. The photosensitive composition can form a cured film excellent in light-shielding property by containing (C) carbon black in an amount of this range. (C) The upper limit of the content of the carbon black is not particularly limited, but is preferably 75% by mass or less, more preferably 70% by mass or less, and particularly preferably 60% by mass or less, based on the total solid content of the photosensitive composition.

碳黑之種類並無特別限定。作為碳黑,可使用例如槽黑、爐黑、熱碳黑、燈黑等公知的碳黑。又,亦可使用樹脂被覆碳黑。The type of carbon black is not particularly limited. As the carbon black, a known carbon black such as channel black, furnace black, hot carbon black, or lamp black can be used. Further, carbon black may be coated with a resin.

作為碳黑,經施以導入酸性基之處理的碳黑亦較佳。被導入至碳黑之酸性基,為顯示布氏(Bronsted)定義之酸性的官能基。作為酸性基的具體例,可舉例羧基、磺酸基、磷酸基等。被導入至碳黑的酸性基,亦可形成鹽。與酸性基形成鹽的陽離子,在不妨礙本發明之目的的範圍內便無特別限定。作為陽離子之例,可舉例各種金屬離子、含氮化合物之陽離子、銨離子等,鈉離子、鉀離子、鋰離子等之鹼金屬離子,或銨離子較佳。As the carbon black, carbon black to which an acidic group is introduced is also preferred. The acidic group introduced into the carbon black is an acidic functional group which is defined by Bronsted. Specific examples of the acidic group include a carboxyl group, a sulfonic acid group, a phosphoric acid group, and the like. It is introduced into the acidic group of carbon black to form a salt. The cation which forms a salt with an acidic group is not specifically limited in the range which does not impair the objective of this invention. Examples of the cation include various metal ions, cations of nitrogen-containing compounds, ammonium ions, and the like, and alkali metal ions such as sodium ions, potassium ions, and lithium ions, or ammonium ions are preferred.

以上說明之經施以導入酸性基之處理的碳黑之中,由達成使用感光性組成物而形成之遮光性的硬化膜之高電阻的觀點,具有選自羧酸基、羧酸鹽基、磺酸基及磺酸鹽基所成群組中之1種以上的官能基之碳黑較佳。The carbon black to which the acidic group is introduced as described above is selected from a carboxylic acid group and a carboxylate group from the viewpoint of achieving high resistance of the light-shielding cured film formed by using the photosensitive composition. Carbon black having one or more functional groups in the group of the sulfonic acid group and the sulfonic acid salt group is preferred.

於碳黑導入酸性基的方法並無特別限定。作為導入酸性基的方法,可舉例例如以下的方法。   1)藉由使用濃硫酸、發煙硫酸、氯磺酸等之直接取代法,或使用亞硫酸鹽、亞硫酸氫鹽等之間接取代法,而於碳黑導入磺酸基的方法。   2)使具有胺基及酸性基之有機化合物,與碳黑重氮耦合的方法。   3)使具有鹵素原子及酸性基之有機化合物,與具有羥基之碳黑藉由威廉森之醚化法進行反應的方法。   4)使具有鹵羰基及經保護基保護之酸性基的有機化合物,與具有羥基之碳黑進行反應的方法。   5)使用具有鹵羰基及經保護基保護之酸性基的有機化合物,對碳黑進行夫里德耳-夸夫特反應後,進行脫保護的方法。The method of introducing an acidic group into carbon black is not particularly limited. As a method of introducing an acidic group, the following methods are mentioned, for example. 1) A method of introducing a sulfonic acid group into carbon black by a direct substitution method using concentrated sulfuric acid, fuming sulfuric acid, chlorosulfonic acid or the like, or an indirect substitution method using a sulfite or a hydrogensulfite. 2) A method of coupling an organic compound having an amine group and an acidic group to a carbon black diazo. 3) A method of reacting an organic compound having a halogen atom and an acidic group with a carbon black having a hydroxyl group by an etherification method of Williamson. 4) A method of reacting an organic compound having a halogenic carbonyl group and an acidic group protected by a protective group with a carbon black having a hydroxyl group. 5) A method of deprotecting a carbon black after performing a Friedel-Zraft reaction using an organic compound having a halogenic carbonyl group and an acidic group protected by a protective group.

此等之方法之中,由酸性基之導入處理容易且安全來看,以方法2)較佳。作為方法2)所使用之具有胺基及酸性基之有機化合物,以於芳香族基鍵結有胺基及酸性基之化合物較佳。作為如此之化合物的例子,可舉例如磺胺酸之胺基苯磺酸,或如4-胺基苯甲酸之胺基苯甲酸。Among these methods, the introduction of the acidic group is easy and safe, and the method 2) is preferred. The organic compound having an amine group and an acidic group used in the method 2) is preferably a compound having an amine group and an acidic group bonded to the aromatic group. As an example of such a compound, for example, an aminobenzenesulfonic acid of sulfamic acid or an aminobenzoic acid such as 4-aminobenzoic acid can be mentioned.

被導入至碳黑之酸性基的莫耳數,在不妨礙本發明之目的的範圍內便無特別限定。被導入至碳黑之酸性基的莫耳數,相對於碳黑100g,為1mmol以上200mmol以下較佳,5mmol以上100mmol以下更佳。The number of moles introduced into the acidic group of carbon black is not particularly limited insofar as it does not impair the object of the present invention. The number of moles of the acidic group introduced into the carbon black is preferably 1 mmol or more and 200 mmol or less, and more preferably 5 mmol or more and 100 mmol or less, based on 100 g of carbon black.

經導入酸性基之碳黑,亦可施以樹脂之被覆處理。使用包含經樹脂被覆之碳黑的感光性組成物時,遮光性及絕緣性優異,容易形成表面反射率低之遮光性的硬化膜。此外,藉由樹脂之被覆處理,不會特別產生對於使用感光性組成物而形成之遮光性的硬化膜之誘電率的壞影響。作為可使用於碳黑之被覆的樹脂之例,可舉例酚樹脂、三聚氰胺樹脂、二甲苯樹脂、二烯丙基酞酸酯樹脂、甘酞樹脂、環氧樹脂、烷基苯樹脂等之熱硬化性樹脂,或聚苯乙烯、聚碳酸酯、聚對酞酸乙二酯、聚對苯二甲酸丁二酯、改質聚伸苯基氧化物、聚碸、聚對苯二甲醯對苯二胺、聚醯胺醯亞胺、聚醯亞胺、聚胺基雙馬來醯亞胺、聚醚磺基聚伸苯基碸、聚芳酯、聚醚醚酮等之熱可塑性樹脂。對碳黑之樹脂的被覆量,相對於碳黑之質量與樹脂之質量的合計而言,為1質量%以上30質量%以下較佳。The carbon black to which the acidic group is introduced may be subjected to a coating treatment of the resin. When a photosensitive composition containing the resin-coated carbon black is used, it is excellent in light-shielding property and insulating property, and it is easy to form a cured film having a light-shielding property having a low surface reflectance. Further, the coating treatment of the resin does not particularly adversely affect the electric conductivity of the cured film having a light-shielding property formed by using the photosensitive composition. As an example of a resin which can be used for coating of carbon black, heat hardening of a phenol resin, a melamine resin, a xylene resin, a diallyl phthalate resin, a glycerin resin, an epoxy resin, an alkylbenzene resin, or the like can be exemplified. Resin, or polystyrene, polycarbonate, polyethylene terephthalate, polybutylene terephthalate, modified polyphenylene oxide, polyfluorene, polyparaphenylene terephthalate A thermoplastic resin such as an amine, a polyamidimide, a polyimine, a polyamine bismaleimide, a polyether sulfopolyphenylene phthalate, a polyarylate, or a polyetheretherketone. The coating amount of the carbon black resin is preferably 1% by mass or more and 30% by mass or less based on the total mass of the carbon black and the mass of the resin.

為了使以上說明之(C)碳黑均勻分散於感光性組成物中,亦可進一步使用分散劑。作為如此之分散劑,使用聚乙烯亞胺系、胺甲酸酯樹脂系、丙烯酸樹脂系之高分子分散劑較佳。此等之中,使用丙烯酸樹脂系之分散劑較佳。   此外,亦有自硬化膜產生起因於分散劑之腐蝕性氣體的情形。因此,(C)碳黑係不使用分散劑而經分散處理者亦為較佳態樣之一例。In order to uniformly disperse the carbon black (C) described above in the photosensitive composition, a dispersing agent may be further used. As such a dispersing agent, a polyethyleneimine-based, urethane-based resin or acrylic resin-based polymer dispersing agent is preferably used. Among these, an acrylic resin-based dispersant is preferably used. Further, there is also a case where a self-hardening film generates a corrosive gas due to a dispersant. Therefore, (C) carbon black is one in which a dispersion treatment is not used without using a dispersant.

做成在分散劑之存在下或不存在下使(C)碳黑以適當的濃度分散而成的分散液後,再添加至感光性組成物中較佳。   此外,本說明書中,上述之(C)碳黑的使用量,可定義為亦包含其中存在之分散劑的值。It is preferred to add a dispersion liquid in which (C) carbon black is dispersed at an appropriate concentration in the presence or absence of a dispersant, and then add it to the photosensitive composition. Further, in the present specification, the amount of use of the above (C) carbon black may be defined as a value which also includes the dispersing agent present therein.

<(C’)其他遮光劑>   感光性組成物,亦可與(C)碳黑一起包含(C)碳黑以外之(C’)其他遮光劑。<(C') Other light-shielding agent> The photosensitive composition may contain (C) other light-shielding agents other than (C) carbon black together with (C) carbon black.

作為(C’)其他遮光劑,可使用例如苝系顏料。作為苝系顏料之具體例,可舉例下述式(c-1)所示之苝系顏料、下述式(c-2)所示之苝系顏料,及下述式(c-3)所示之苝系顏料。市售品中,作為苝系顏料較佳可使用BASF公司製之製品名K0084及K0086,或色素黑21、30、31、32、33及34等。As the (C') other light-shielding agent, for example, an anthraquinone-based pigment can be used. Specific examples of the fluorene-based pigments include an anthraquinone-based pigment represented by the following formula (c-1), an anthracene-based pigment represented by the following formula (c-2), and the following formula (c-3); The bismuth pigments are shown. In the commercial product, as the fluorene-based pigment, product names K0084 and K0086 manufactured by BASF, or pigment blacks 21, 30, 31, 32, 33, and 34 can be preferably used.

式(c-1)中,Rc1 及Rc2 各自獨立表示碳原子數1以上3以下之伸烷基,Rc3 及Rc4 各自獨立,表示氫原子、羥基、甲氧基或乙醯基。 In the formula (c-1), R c1 and R c2 each independently represent an alkylene group having 1 or more and 3 or less carbon atoms, and R c3 and R c4 each independently represent a hydrogen atom, a hydroxyl group, a methoxy group or an ethenyl group.

式(c-2)中,Rc5 及Rc6 各自獨立,表示碳原子數1以上7以下之伸烷基。 In the formula (c-2), R c5 and R c6 each independently represent an alkylene group having 1 or more and 7 or less carbon atoms.

式(c-3)中,Rc7 及Rc8 各自獨立,為氫原子、碳原子數1以上22以下之烷基M,亦可含有N、O、S或P之雜原子。Rc7 及Rc8 為烷基時,該烷基可為直鏈狀,亦可為支鏈狀。 In the formula (c-3), R c7 and R c8 are each independently a hydrogen atom, an alkyl group having 1 or more and 22 or less carbon atoms, and may contain a hetero atom of N, O, S or P. When R c7 and R c8 are alkyl groups, the alkyl group may be linear or branched.

上述之式(c-1)所示之化合物、式(c-2)所示之化合物及式(c-3)所示之化合物,可使用例如日本特開昭62-1753號公報、日本特公昭63-26784號公報所記載之方法來合成。即,將苝-3,5,9,10-四羧酸或其二酐與胺類作為原料,在水或有機溶劑中進行加熱反應。然後,可藉由將所得之粗製物在硫酸中使其再沉澱,或在水、有機溶劑或此等之混合溶劑中使其再結晶而得到目標物。For the compound represented by the above formula (c-1), the compound represented by the formula (c-2), and the compound of the formula (c-3), for example, JP-A-62-21753, JP-A The method described in Japanese Patent Publication No. 63-26784 is synthesized. That is, hydrazine-3,5,9,10-tetracarboxylic acid or its dianhydride and an amine are used as a raw material, and it heat-processes in water or an organic solvent. Then, the target product can be obtained by reprecipitating the obtained crude product in sulfuric acid or by recrystallizing it in water, an organic solvent or a mixed solvent of these.

為了在感光性組成物中使苝系顏料良好地分散,苝系顏料之平均粒徑為10nm以上1000nm以下較佳。In order to disperse the quinone-based pigment well in the photosensitive composition, the average particle diameter of the quinone-based pigment is preferably 10 nm or more and 1000 nm or less.

又,作為(C’)其他遮光劑,亦可含有內醯胺系顏料。作為內醯胺系顏料,可舉例例如下述式(c-4)所示之化合物。Further, as the (C') other light-shielding agent, an indoleamine-based pigment may be contained. The intrinsic amine-based pigment may, for example, be a compound represented by the following formula (c-4).

式(c-4)中,Xc 表示雙鍵,作為幾何異構物各自獨立為E體或Z體,Rc9 各自獨立,表示氫原子、甲基、硝基、甲氧基、溴原子、氯原子、氟原子、羧基或磺酸基,Rc10 各自獨立,表示氫原子、甲基或苯基,Rc11 各自獨立,表示氫原子、甲基或氯原子。   式(c-4)所示之化合物,可單獨或組合2種以上使用。   Rc9 ,由式(c-4)所示之化合物之製造為容易之點來看,以鍵結於二氫吲哚酮環之6位者較佳,Rc11 以鍵結於二氫吲哚酮環之4位者較佳。由同樣的觀點來看,Rc9 、Rc10 及Rc11 較佳為氫原子。   式(c-4)所示之化合物,雖作為幾何異構物具有EE體、ZZ體、EZ體,但可為此等之任一者的單一化合物,亦可為此等之幾何異構物的混合物。   式(c-4)所示之化合物,可藉由例如國際公開第2000/24736號及國際公開第2010/081624號所記載之方法來製造。In the formula (c-4), X c represents a double bond, and each of the geometric isomers is independently an E body or a Z body, and R c9 is independent of each other, and represents a hydrogen atom, a methyl group, a nitro group, a methoxy group, a bromine atom, A chlorine atom, a fluorine atom, a carboxyl group or a sulfonic acid group, and each of R c10 independently represents a hydrogen atom, a methyl group or a phenyl group, and R c11 each independently represents a hydrogen atom, a methyl group or a chlorine atom. The compound represented by the formula (c-4) may be used alone or in combination of two or more. R c9 , from the viewpoint of easy production of the compound represented by the formula (c-4), preferably bonded to the 6-position of the indanone ring, and R c11 is bonded to the indoline. The 4-bit of the ketone ring is preferred. From the same viewpoint, R c9 , R c10 and R c11 are preferably a hydrogen atom. The compound represented by the formula (c-4), which has an EE body, a ZZ body, and an EZ body as a geometric isomer, may be a single compound of any of these, or may be a geometric isomer thereof. mixture. The compound of the formula (c-4) can be produced, for example, by the method described in International Publication No. 2000/24736 and International Publication No. 2010/081624.

為了在感光性組成物中使內醯胺系顏料良好地分散,內醯胺系顏料之平均粒徑為10nm以上1000nm以下較佳。In order to disperse the indoleamine-based pigment well in the photosensitive composition, the average particle diameter of the indoleamine-based pigment is preferably 10 nm or more and 1000 nm or less.

進而,作為(C’)其他遮光劑亦可使用以銀錫(AgSn)合金為主成分之微粒子(以下,稱為「AgSn合金微粒子」)。此AgSn合金微粒子只要是AgSn合金為主成分,亦可含有例如Ni、Pd、Au等作為其他金屬成分。   此AgSn合金微粒子之平均粒徑為1nm以上300nm以下較佳。Further, as the (C') other light-shielding agent, fine particles containing a silver-tin (AgSn) alloy as a main component (hereinafter referred to as "AgSn alloy fine particles") may be used. The AgSn alloy fine particles may contain, for example, Ni, Pd, Au or the like as other metal components as long as the AgSn alloy is a main component. The average particle diameter of the AgSn alloy fine particles is preferably 1 nm or more and 300 nm or less.

AgSn合金以化學式AgxSn表示時,可得到化學安定之AgSn合金之x的範圍為1≦x≦10,可同時得到化學安定性與黑色度之x的範圍為3≦x≦4。   此處,若以上述x的範圍求出AgSn合金中之Ag的質量比,係 因此,此AgSn合金,Ag含有47.6質量%以上90質量%以下時成為化學安定者,Ag含有73.17質量%以上78.43質量%以下時相對於Ag量可有效地得到化學安定性與黑色度。When the AgSn alloy is represented by the chemical formula AgxSn, the range of x of the chemically stabilized AgSn alloy is 1 ≦ x ≦ 10, and the range of chemical stability and blackness x is 3 ≦ x ≦ 4 at the same time. Here, when the mass ratio of Ag in the AgSn alloy is determined by the range of x described above, Therefore, in the AgSn alloy, when Ag is contained in an amount of 47.6% by mass or more and 90% by mass or less, it is chemically stable, and when Ag is contained in an amount of 73.17% by mass or more and 78.43% by mass or less, the chemical stability and the degree of blackness can be effectively obtained with respect to the amount of Ag.

此AgSn合金微粒子,可使用通常之微粒子合成法來製作。作為微粒子合成法,可舉例氣相反應法、噴霧熱分解法、霧化法、液相反應法、冷凍乾燥法、水熱合成法等。This AgSn alloy fine particle can be produced by a usual microparticle synthesis method. Examples of the fine particle synthesis method include a gas phase reaction method, a spray pyrolysis method, an atomization method, a liquid phase reaction method, a freeze drying method, and a hydrothermal synthesis method.

雖然AgSn合金微粒子為絕緣性高者,但依據感光性組成物的用途,為了進一步提高絕緣性,以絕緣膜覆蓋表面覆亦無不可。作為如此之絕緣膜之材料,以金屬氧化物或有機高分子化合物為適宜。   作為金屬氧化物,合適使用具有絕緣性之金屬氧化物,例如氧化矽(silica)、氧化鋁(alumina)、氧化鋯(zirconia)、氧化釔(yttria)、氧化鈦(titania)等。   又,作為有機高分子化合物,合適使用具有絕緣性之樹脂,例如聚醯亞胺、聚醚、聚丙烯酸酯、多胺化合物等。Although the AgSn alloy fine particles are highly insulating, depending on the use of the photosensitive composition, it is not necessary to cover the surface with an insulating film in order to further improve the insulating property. As a material of such an insulating film, a metal oxide or an organic polymer compound is suitable. As the metal oxide, an insulating metal oxide such as silica, alumina, zirconia, yttria, titania or the like is suitably used. Further, as the organic polymer compound, an insulating resin such as polyimide, polyether, polyacrylate, polyamine compound or the like is suitably used.

絕緣膜之膜,為了充分提高AgSn合金微粒子表面的絕緣性而以1nm以上100nm以下之厚度較佳,更佳為5nm以上50nm以下。   絕緣膜,藉由表面改質技術或表面之塗佈技術可輕易地形成。特別是,若使用四乙氧基矽烷、鋁三乙氧化物等之烷氧化物,可以相對低溫形成膜厚均勻的絕緣膜故較佳。The film of the insulating film is preferably 1 nm or more and 100 nm or less in thickness in order to sufficiently improve the insulating property of the surface of the AgSn alloy fine particles, and more preferably 5 nm or more and 50 nm or less. The insulating film can be easily formed by surface modification techniques or surface coating techniques. In particular, when an alkoxide such as tetraethoxysilane or aluminum triethoxylate is used, an insulating film having a uniform thickness can be formed at a relatively low temperature, which is preferable.

作為(C’)其他遮光劑,可單獨使用上述之苝系顏料、內醯胺系顏料、AgSn合金微粒子,亦可組合此等使用。   此外,黑色顏料在調整色調之目的等下,亦可含有紅、藍、綠、黃等之色相的色素。黑色顏料之外之色相的色素,可由公知的色素適當地選擇。例如,作為黑色顏料之外之色相的色素,可使用上述各種顏料。黑色顏料之外之色相的色素之使用量,相對於黑色顏料之總質量而言,為15質量%以下較佳,10質量%以下更佳。The (C') other light-shielding agent may be used singly or in combination with the above-mentioned anthraquinone-based pigment, an indoleamine-based pigment, or AgSn-based fine particles. Further, the black pigment may contain a hue of red, blue, green, yellow or the like under the purpose of adjusting the color tone or the like. The pigment of the hue other than the black pigment can be appropriately selected from known pigments. For example, as the coloring matter other than the black pigment, various kinds of the above pigments can be used. The amount of the coloring matter of the hue other than the black pigment is preferably 15% by mass or less, more preferably 10% by mass or less, based on the total mass of the black pigment.

此外,感光性組成物中,於(C)碳黑或(C)碳黑與(C’)其他遮光劑之組合中,可進一步組合使用染料。此染料由公知的材料中適當地選擇即可。   作為感光性組成物可適用的染料,可舉例例如偶氮染料、金屬錯鹽偶氮染料、蒽醌染料、三苯基甲烷染料、二苯并哌喃染料、青色素(cyanine)染料、萘醌染料、醌亞胺染料、次甲基染料、酞青素染料等。   又,關於此等染料,藉由色澱化(鹽化(salification))分散於有機溶劑等中,將此作為(D)著色劑使用。   此等之染料以外,亦可較佳使用例如日本特開2013-225132號公報、日本特開2014-178477號公報、日本特開2013-137543號公報、日本特開2011-38085號公報、日本特開2014-197206號公報等記載之染料等。Further, in the photosensitive composition, a dye may be further used in combination with (C) carbon black or (C) carbon black and (C') other sunscreen. This dye may be appropriately selected from known materials. As the dye which can be used as the photosensitive composition, for example, an azo dye, a metal salt azo dye, an anthraquinone dye, a triphenylmethane dye, a dibenzopyran dye, a cyanine dye, a naphthoquinone can be exemplified. Dyes, quinone imine dyes, methine dyes, anthraquinone dyes, and the like. Further, these dyes are dispersed in an organic solvent or the like by lake formation (salification), and this is used as the (D) colorant. In addition to the above-mentioned dyes, for example, JP-A-2013-225132, JP-A-2014-178477, JP-A-2013-137543, JP-A-2011-38085, and JP-A-2011-38085 A dye or the like described in JP-A-2014-197206 or the like is disclosed.

(C’)其他遮光劑之含量,在不妨礙本發明之目的的範圍內便無特別限定。(C’)其他遮光劑之含量,為(C)碳黑與(C’)其他遮光劑之總量為感光性組成物之全固體成分中75質量%以下的量較佳,70質量%以下的量更佳,60質量%以下的量特佳。The content of the (C') other sunscreen agent is not particularly limited insofar as it does not impair the object of the present invention. (C') The content of the other light-shielding agent is preferably (C) carbon black and (C') the total amount of the other light-shielding agent is preferably 75% by mass or less, and 70% by mass or less of the total solid content of the photosensitive composition. The amount is better, and the amount below 60% by mass is particularly good.

<(D)黏結劑樹脂>   感光性組成物,亦可含有(D)黏結劑樹脂。(D)黏結劑樹脂,可為對鹼性溶液可溶之鹼可溶性樹脂,亦可為對鹼性溶液不溶之樹脂,包含鹼可溶性樹脂者較佳。<(D) Adhesive Resin> The photosensitive composition may also contain (D) a binder resin. (D) The binder resin may be an alkali-soluble resin which is soluble in an alkaline solution, or a resin which is insoluble to an alkaline solution, and preferably contains an alkali-soluble resin.

可作為(D)黏結劑樹脂使用之對鹼性溶液不溶之樹脂,在不妨礙本發明之目的的範圍內便無特別限定。作為對鹼性溶液不溶之樹脂的合適例子,可舉例例如甲基(甲基)丙烯酸酯為代表之丙烯酸酯的均聚物或共聚物。The resin which is insoluble in the alkaline solution which can be used as the (D) binder resin is not particularly limited as long as it does not impair the object of the present invention. As a suitable example of the resin insoluble to the alkaline solution, for example, a homopolymer or a copolymer of an acrylate represented by methyl (meth) acrylate is exemplified.

說明關於較佳使用作為(D)黏結劑樹脂之鹼可溶性樹脂。   此處,本說明書中,所謂鹼可溶性樹脂,係指分子內具備具有鹼可溶性之官能基(例如酚性羥基、羧基、磺酸基等)的樹脂。The alkali-soluble resin which is preferably used as the (D) binder resin is described. Here, in the present specification, the alkali-soluble resin refers to a resin having a functional group (for example, a phenolic hydroxyl group, a carboxyl group, a sulfonic acid group, or the like) having an alkali solubility in the molecule.

作為鹼可溶性樹脂合適的樹脂,可舉例(D1)具有卡多(cardo)結構之樹脂(以下,亦記為「(D1)卡多樹脂(cardo resin)」)。   作為鹼可溶性樹脂使用(D1)具有卡多結構之樹脂時,容易得到解像性優異之感光性組成物,使用感光性組成物容易形成難以因加熱而過度流動的硬化膜。As a resin suitable for the alkali-soluble resin, (D1) a resin having a cardo structure (hereinafter also referred to as "(D1) cardo resin") can be exemplified. When (D1) a resin having a cardo structure is used as the alkali-soluble resin, a photosensitive composition excellent in resolution is easily obtained, and a cured film which is less likely to flow excessively by heating is easily formed using the photosensitive composition.

[(D1)具有卡多結構之樹脂]   作為(D1)具有卡多結構之樹脂,可使用其結構中具有卡多骨架,具有特定之鹼可溶性的樹脂。所謂卡多骨架,係指於構成第1環狀結構之1個環碳原子上,鍵結有第2環狀結構與第3環狀結構的骨架。此外,所謂第2環狀結構與第3環狀結構,可為相同結構亦可為不同結構。   作為卡多骨架之代表的例子,可舉例茀環之9位的碳原子鍵結有2個芳香環(例如苯環)的骨架。[(D1) Resin having a Cardo Structure] As the resin having a cardo structure (D1), a resin having a cardo skeleton in its structure and having a specific alkali solubility can be used. The cardo skeleton refers to a skeleton in which a second cyclic structure and a third cyclic structure are bonded to one ring carbon atom constituting the first cyclic structure. Further, the second annular structure and the third annular structure may have the same structure or different structures. As an example of the representative of the cardo skeleton, a skeleton in which two carbon atoms (for example, a benzene ring) are bonded to a carbon atom at the 9-position of the anthracene ring can be exemplified.

作為(D1)卡多樹脂,並無特別限定,可使用以往公知的樹脂。其中,以下述式(d-1)所示之樹脂較佳。The (D1) cardo resin is not particularly limited, and a conventionally known resin can be used. Among them, a resin represented by the following formula (d-1) is preferred.

式(d-1)中,Xd 表示下述式(d-2)所示之基。m1表示0以上20以下之整數。In the formula (d-1), X d represents a group represented by the following formula (d-2). M1 represents an integer of 0 or more and 20 or less.

上述式(d-2)中,Rd1 各自獨立表示氫原子、碳原子數1以上6以下之烴基,或鹵素原子,Rd2 各自獨立表示氫原子或甲基,Rd3 各自獨立表示直鏈或支鏈之伸烷基,m2表示0或1,Wd 表示下述式(d-3)所示之基。In the above formula (d-2), R d1 each independently represents a hydrogen atom, a hydrocarbon group having 1 or more and 6 or less carbon atoms, or a halogen atom, and R d2 each independently represents a hydrogen atom or a methyl group, and R d3 each independently represents a straight chain or A branched alkyl group, m2 represents 0 or 1, and W d represents a group represented by the following formula (d-3).

式(d-2)中,作為Rd3 ,以碳原子數1以上20以下之伸烷基較佳,碳原子數1以上10以下之伸烷基更佳,碳原子數1以上6以下之伸烷基特佳,乙烷-1,2-二基、丙烷-1,2-二基及丙烷1,3-二基最佳。In the formula (d-2), R d3 is preferably an alkyl group having 1 or more and 20 or less carbon atoms, and an alkyl group having 1 or more and 10 or less carbon atoms is more preferable, and the number of carbon atoms is 1 or more and 6 or less. The alkyl group is particularly preferred, and the ethane-1,2-diyl group, the propane-1,2-diyl group and the propane 1,3-diyl group are most preferred.

式(d-3)中之環Ad ,表示可與芳香族環縮合且可具有取代基之脂肪族環。脂肪族環可為脂肪族烴環,亦可為脂肪族雜環。   作為脂肪族環,可舉例單環烷烴、雙環烷烴、三環烷烴、四環烷烴等。   具體而言,可舉例環戊烷、環己烷、環庚烷、環辛烷等之單環烷烴,或金剛烷、降莰烷、異莰烷、三環癸烷、四環十二烷。   可縮合於脂肪族環之芳香族環,可為芳香族烴環亦可為芳香族雜環,以芳香族烴環較佳。具體而言以苯環及萘環較佳。The ring A d in the formula (d-3) represents an aliphatic ring which is condensable with an aromatic ring and which may have a substituent. The aliphatic ring may be an aliphatic hydrocarbon ring or an aliphatic heterocyclic ring. As the aliphatic ring, a monocycloalkane, a bicycloalkane, a tricycloalkane, a tetracycloalkane or the like can be exemplified. Specifically, a monocycloalkane such as cyclopentane, cyclohexane, cycloheptane or cyclooctane, or adamantane, norbornane, isodecane, tricyclodecane or tetracyclododecane can be exemplified. The aromatic ring which may be condensed in the aliphatic ring may be an aromatic hydrocarbon ring or an aromatic hetero ring, and an aromatic hydrocarbon ring is preferred. Specifically, a benzene ring and a naphthalene ring are preferred.

作為式(d-3)所示之2價基的合適例子,可舉例下述之基。 As a suitable example of the divalent group represented by the formula (d-3), the following groups can be exemplified.

式(d-1)中之2價基Xd ,藉由使賦予殘基Zd 之四羧酸二酐與下式(d-2a)所示之二醇化合物進行反應,而導入(D1)卡多樹脂中。 The divalent group X d in the formula (d-1) is introduced into the (D1) by reacting a tetracarboxylic dianhydride imparting the residue Z d with a diol compound represented by the following formula (d-2a). Cardo resin.

式(d-2a)中,Rd1 、Rd2 、Rd3 及m2係如式(d-2)中所說明。關於式(d-2a)中之環Ad ,係如式(d-3)中所說明。In the formula (d-2a), R d1 , R d2 , R d3 and m2 are as described in the formula (d-2). Regarding the ring A d in the formula (d-2a), it is as described in the formula (d-3).

式(d-2a)所示之二醇化合物,可藉由例如以下之方法來製造。   首先,將下述式(d-2b)所示之二醇化合物具有之酚性羥基中的氫原子,視需要依循常規方法,取代成-Rd3 -OH所示之基後,使用表氯醇等進行環氧丙基化,得到下述式(d-2c)所示之環氧化合物。   接著,將式(d-2c)所示之環氧化合物,藉由使丙烯酸或甲基丙烯酸進行反應,而得到式(d-2a)所示之二醇化合物。   式(d-2b)及式(d-2c)中,Rd1 、Rd3 及m2,係如式(d-2)中所說明。關於式(d-2b)及式(d-2c)中之環Ad ,係如式(d-3)中所說明。   此外,式(d-2a)所示之二醇化合物的製造方法,不限定於上述之方法。 The diol compound represented by the formula (d-2a) can be produced, for example, by the following method. First, a diol compound represented by the following formula (d-2b) has a hydrogen atom in a phenolic hydroxyl group, and if necessary, it is substituted with a group represented by -R d3 -OH according to a conventional method, and epichlorohydrin is used. Epoxypropylation is carried out to obtain an epoxy compound represented by the following formula (d-2c). Next, the epoxy compound represented by the formula (d-2c) is reacted with acrylic acid or methacrylic acid to obtain a diol compound represented by the formula (d-2a). In the formula (d-2b) and the formula (d-2c), R d1 , R d3 and m2 are as described in the formula (d-2). The ring A d in the formula (d-2b) and the formula (d-2c) is as described in the formula (d-3). Further, the method for producing the diol compound represented by the formula (d-2a) is not limited to the above method.

作為式(d-2b)所示之二醇化合物的合適例子,可舉例以下之二醇化合物。 As a suitable example of the diol compound represented by the formula (d-2b), the following diol compounds can be exemplified.

上述式(d-1)中,Rd0 為氫原子或-CO-Yd -COOH所示之基。此處,Yd 表示自二羧酸酐去除酸酐基 (-CO-O-CO-)而成的殘基。作為二羧酸酐的例子,可舉例馬來酸酐、琥珀酸酐、伊康酸酐、酞酸酐、四氫酞酸酐、六氫酞酸酐、甲基內亞甲基四氫酞酸酐、氯橋酸酐、甲基四氫酞酐、戊二酸酐等。In the above formula (d-1), R d0 is a hydrogen atom or a group represented by -CO-Y d -COOH. Here, Y d represents a residue obtained by removing an acid anhydride group (-CO-O-CO-) from a dicarboxylic acid anhydride. Examples of the dicarboxylic anhydride include maleic anhydride, succinic anhydride, itaconic anhydride, decanoic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyl endomethylenetetrahydrophthalic anhydride, chloro bridge anhydride, and methyl group. Tetrahydrophthalic anhydride, glutaric anhydride, and the like.

又,上述式(d-1)中,Zd 表示自四羧酸二酐去除2個酸酐基而成的殘基。作為四羧酸二酐的例子,可舉例下述式(d-4)所示之四羧酸二酐、均苯四甲酸二酐、二苯甲酮四羧酸二酐、聯苯四羧酸二酐、聯苯醚四羧酸二酐等。   又,上述式(d-1)中,m1表示0以上20以下之整數。Further, in the above formula (d-1), Z d represents a residue obtained by removing two acid anhydride groups from the tetracarboxylic dianhydride. Examples of the tetracarboxylic dianhydride include tetracarboxylic dianhydride, pyromellitic dianhydride, benzophenone tetracarboxylic dianhydride, and biphenyltetracarboxylic acid represented by the following formula (d-4). Di-anhydride, diphenyl ether tetracarboxylic dianhydride, and the like. Further, in the above formula (d-1), m1 represents an integer of 0 or more and 20 or less.

(式(d-4)中,Rd4 、Rd5 及Rd6 各自獨立,表示選自由氫原子、碳原子數1以上10以下之烷基及氟原子所成群組中之1種,m3表示0以上12以下之整數)。 (In the formula (d-4), R d4 , R d5 and R d6 are each independently represented by one selected from the group consisting of a hydrogen atom, an alkyl group having 1 or more and 10 or less carbon atoms, and a fluorine atom, and m3 represents 0 or more and 12 or less integers).

作為式(d-4)中之Rd4 可選擇之烷基,係碳原子數為1以上10以下之烷基。藉由烷基之具備的碳原子數設定為此範圍,可使所得羧酸酯之耐熱性更進一步地提升。Rd4 為烷基時,其碳原子數,由容易獲得耐熱性優異之卡多樹脂之點來看,以1以上6以下較佳,1以上5以下更佳,1以上4以下進而佳,1以上3以下特佳。   Rd4 為烷基時,該烷基可為直鏈狀亦可為支鏈狀。The alkyl group which may be selected as R d4 in the formula (d-4) is an alkyl group having 1 or more and 10 or less carbon atoms. By setting the carbon number of the alkyl group to this range, the heat resistance of the obtained carboxylic acid ester can be further improved. When R d4 is an alkyl group, the number of carbon atoms is preferably 1 or more and 6 or less, more preferably 1 or more and 5 or less, and more preferably 1 or more and 4 or less, from the viewpoint of easily obtaining a cardo resin excellent in heat resistance. Above 3 is especially good. When R d4 is an alkyl group, the alkyl group may be linear or branched.

作為式(d-4)中之Rd4 ,由容易獲得耐熱性優異之卡多樹脂之點來看,各自獨立為氫原子或碳原子數1以上10以下之烷基更佳。式(d-4)中之Rd4 ,以氫原子、甲基、乙基、n-丙基或異丙基更佳,氫原子或甲基特佳。   式(d-4)中之複數的Rd4 ,由容易調製高純度之四羧酸二酐來看,為相同基較佳。R d4 in the formula (d-4) is preferably a hydrogen atom or an alkyl group having 1 or more and 10 or less carbon atoms, from the viewpoint of easily obtaining a cardo resin excellent in heat resistance. R d4 in the formula (d-4) is more preferably a hydrogen atom, a methyl group, an ethyl group, an n-propyl group or an isopropyl group, and particularly preferably a hydrogen atom or a methyl group. The plural R d4 in the formula (d-4) is preferably the same group in view of the ease of preparation of a high-purity tetracarboxylic dianhydride.

式(d-4)中之m3表示0以上12以下之整數。藉由m3之值定為12以下,可使四羧酸二酐的純化變得容易。   由四羧酸二酐之純化為容易之點來看,m3之上限為5較佳,3更佳。   由四羧酸二酐之化學安定性之點來看,m3之下限為1較佳,2更佳。   式(d-4)中之m3為2或3特佳。M3 in the formula (d-4) represents an integer of 0 or more and 12 or less. By setting the value of m3 to 12 or less, purification of tetracarboxylic dianhydride can be facilitated. From the viewpoint of ease of purification of tetracarboxylic dianhydride, the upper limit of m3 is preferably 5, and more preferably 3. From the viewpoint of the chemical stability of the tetracarboxylic dianhydride, the lower limit of m3 is preferably 1 and more preferably 2. The m3 in the formula (d-4) is preferably 2 or 3.

作為式(d-4)中之Rd5 及Rd6 可選擇的碳原子數1以上10以下之烷基,與作為Rd4 可選擇的碳原子數1以上10以下之烷基相同。   Rd5 及Rd6 ,由四羧酸二酐之純化為容易之點來看,為氫原子或碳原子數1以上10以下(較佳為1以上6以下,更佳為1以上5以下,再更佳為1以上4以下,特佳為1以上3以下)之烷基較佳,為氫原子或甲基特佳。The alkyl group having 1 or more and 10 or less carbon atoms which may be selected as R d5 and R d6 in the formula (d-4) is the same as the alkyl group having 1 or more and 10 or less carbon atoms which may be selected as R d4 . R d5 and R d6 are hydrogen atoms or carbon atoms of 1 or more and 10 or less (preferably 1 or more and 6 or less, more preferably 1 or more and 5 or less), and further preferably 1 or more and 5 or less. More preferably, it is preferably 1 or more and 4 or less, particularly preferably 1 or more and 3 or less. The alkyl group is preferably a hydrogen atom or a methyl group.

作為式(d-4)所示之四羧酸二酐,可舉例例如降莰烷-2-螺-α-環戊酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐(別名「降莰烷-2-螺-2’-環戊酮-5’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐」)、甲基降莰烷-2-螺-α-環戊酮-α’-螺-2’’-(甲基降莰烷)-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環己酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐(別名「降莰烷-2-螺-2’-環己酮-6’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐」)、甲基降莰烷-2-螺-α-環己酮-α’-螺-2’’-(甲基降莰烷)-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環丙酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環丁酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環庚酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環辛酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環壬酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環癸酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環十一酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環十二酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環十三酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環十四酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-環十五酮-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-(甲基環戊酮)-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐、降莰烷-2-螺-α-(甲基環己酮)-α’-螺-2’’-降莰烷-5,5’’,6,6’’-四羧酸二酐等。As the tetracarboxylic dianhydride represented by the formula (d-4), for example, norbornane-2-spiro-α-cyclopentanone-α'-spiro-2''-norbornane-5,5' can be exemplified. ',6,6''-tetracarboxylic dianhydride (alias "norbornane-2-spiro-2'-cyclopentanone-5'-spiro-2''-norbornane-5,5'', 6,6''-tetracarboxylic dianhydride"), methylnorbornane-2-spiro-α-cyclopentanone-α'-spiro-2''-(methylnorbornane)-5,5 '',6,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclohexanone-α'-spiro-2''-norbornane-5,5'',6, 6''-tetracarboxylic dianhydride (alias "norbornane-2-spiro-2'-cyclohexanone-6'-spiro-2''-norbornane-5,5'',6,6' '-tetracarboxylic dianhydride'), methylnorbornane-2-spiro-α-cyclohexanone-α'-spiro-2''-(methylnorbornane)-5,5'',6 ,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclopropanone-α'-spiro-2''-norbornane-5,5'',6,6''-four Carboxylic dianhydride, norbornane-2-spiro-α-cyclobutanone-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, Cyclodecane-2-spiro-α-cycloheptanone-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, norbornane-2 -spiro-α-cyclooctanone-α'- -2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclononanone-α'-spiro-2''- Cyclodecane-5,5'',6,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclononanone-α'-spiro-2''-norbornane-5 , 5'',6,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α-cycloundecenone-α'-spiro-2''-norbornane-5,5'' ,6,6''-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclododecanone-α'-spiro-2''-norbornane-5,5'',6,6 ''-Tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclotridecyl-α'-spiro-2''-norbornane-5,5'',6,6''-four Carboxylic dianhydride, norbornane-2-spiro-α-cyclotetradecyl-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride , decane-2-spiro-α-cyclopentadecanone-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, norbornane -2-spiro-α-(methylcyclopentanone)-α'-spiro-2''-norbornane-5,5'',6,6''-tetracarboxylic dianhydride, norbornane- 2-spiro-α-(methylcyclohexanone)-α'-spiro-2''-norbornane-5,5'', 6,6''-tetracarboxylic dianhydride, and the like.

(D1)卡多樹脂之重量平均分子量為1000以上40000以下較佳,1500以上30000以下更佳,2000以上10000以下進而佳。藉由成為上述之範圍,得到良好顯影性的同時,可得到充分的耐熱性、膜強度。(D1) The weight average molecular weight of the cardo resin is preferably 1,000 or more and 40,000 or less, more preferably 1,500 or more and 30,000 or less, and still more preferably 2,000 or more and 10,000 or less. By having the above range, good developability and sufficient heat resistance and film strength can be obtained.

[(D2)丙烯酸系樹脂]   作為鹼可溶性樹脂,(D1)卡多樹脂以外,可合適使用(D2)丙烯酸系樹脂。作為(D2)丙烯酸系樹脂,可使用包含來自(甲基)丙烯酸的結構單元及/或來自(甲基)丙烯酸酯等之其他單體的結構單元者。(甲基)丙烯酸為丙烯酸或甲基丙烯酸。(甲基)丙烯酸酯為下述式(d-5)所示者,只要不阻礙本發明之目的便無特別限定。[(D2) Acrylic Resin] As the alkali-soluble resin, (D2) an acrylic resin can be suitably used in addition to the (D1) cardo resin. As the (D2) acrylic resin, a structural unit containing a structural unit derived from (meth)acrylic acid and/or another monomer derived from (meth)acrylate or the like can be used. (Meth)acrylic acid is acrylic acid or methacrylic acid. The (meth) acrylate is represented by the following formula (d-5), and is not particularly limited as long as it does not inhibit the object of the present invention.

上述式(d-5)中,Rd7 為氫原子或甲基,Rd8 為1價有機基。此有機基,在該有機基中亦可包含雜原子等之烴基以外的鍵結或取代基。又,此有機基,可為直鏈狀、支鏈狀、環狀之任一者。In the above formula (d-5), R d7 is a hydrogen atom or a methyl group, and R d8 is a monovalent organic group. The organic group may further contain a bond or a substituent other than a hydrocarbon group such as a hetero atom in the organic group. Further, the organic group may be any of a linear chain, a branched chain, and a cyclic chain.

作為Rd8 之有機基中之烴基以外的取代基,只要不損及本發明效果便無特別限定,可舉例鹵素原子、羥基、巰基、硫醚基、氰基、異氰基、氰氧基、異氰酸基、硫氰氧基、異硫氰氧基、矽烷基、矽醇基、烷氧基、烷氧基羰基、胺甲醯基、硫胺甲醯基、硝基、亞硝基、羧基、羧酸酯基、醯基、醯氧基、亞磺酸基、磺酸基、磺酸鹽基、膦基、氧膦基、膦醯基、二負氧離子基膦氧基(phosphonato)、羥基亞胺基、烷基醚基、烷硫醚基、芳基醚基、芳基硫醚基、胺基(-NH2 、-NHR、-NRR’:R及R’各自獨立表示烴基)等。上述取代基所含之氫原子,亦可被烴基取代。又,上述取代基所含之烴基,可為直鏈狀、支鏈狀及環狀之任一者。The substituent other than the hydrocarbon group in the organic group of R d8 is not particularly limited as long as the effects of the present invention are not impaired, and examples thereof include a halogen atom, a hydroxyl group, a thiol group, a thioether group, a cyano group, an isocyano group, and a cyanooxy group. Isocyanate, thiocyanooxy, isothiocyanato, decyl, decyl, alkoxy, alkoxycarbonyl, aminemethanyl, thiamine, nitro, nitroso, Carboxyl, carboxylate, sulfhydryl, decyloxy, sulfinate, sulfonate, sulfonate, phosphino, phosphinyl, phosphonium, phosphonato , hydroxyimino group, alkyl ether group, alkyl sulfide group, aryl ether group, aryl sulfide group, amine group (-NH 2 , -NHR, -NRR': R and R' each independently represent a hydrocarbon group) Wait. The hydrogen atom contained in the above substituent may be substituted by a hydrocarbon group. Further, the hydrocarbon group contained in the substituent may be any of a linear chain, a branched chain, and a cyclic group.

作為Rd8 ,以烷基、芳基、芳烷基或雜環基較佳,此等基亦可經鹵素原子、羥基、烷基或雜環基取代。又,此等基包含伸烷基部分時,伸烷基部分亦可被醚鍵、硫醚鍵、酯鍵中斷。As R d8 , an alkyl group, an aryl group, an arylalkyl group or a heterocyclic group is preferred, and such groups may also be substituted by a halogen atom, a hydroxyl group, an alkyl group or a heterocyclic group. Further, when the groups include an alkyl group, the alkyl group may be interrupted by an ether bond, a thioether bond or an ester bond.

烷基為直鏈狀或支鏈狀者時,其碳原子數為1以上20以下較佳,1以上15以下更佳,1以上10以下特佳。作為合適的烷基之例子,可舉例甲基、乙基、n-丙基、異丙基、n-丁基、異丁基、sec-丁基、三級丁基、n-戊基、異戊基、sec-戊基、tert-戊基、n-己基、n-庚基、n-辛基、異辛基、sec-辛基、tert-辛基、n-壬基、異壬基、n-癸基、異癸基等。When the alkyl group is linear or branched, the number of carbon atoms is preferably 1 or more and 20 or less, more preferably 1 or more and 15 or less, and particularly preferably 1 or more and 10 or less. As examples of suitable alkyl groups, methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, n-pentyl, and iso are illustrated. Pentyl, sec-pentyl, tert-pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, sec-octyl, tert-octyl, n-fluorenyl, isodecyl, N-fluorenyl, isodecyl, and the like.

烷基為脂環式基,或包含脂環式基之基時,作為烷基所含之合適的脂環式基,可舉例環戊基及環己基等單環之脂環式基,或金剛烷基、降莰基、異莰基、三環壬基、三環癸基及四環十二烷基等之多環之脂環式基。When the alkyl group is an alicyclic group or a group containing an alicyclic group, as a suitable alicyclic group contained in the alkyl group, a monocyclic alicyclic group such as a cyclopentyl group or a cyclohexyl group, or a diamond can be exemplified. a polycyclic alicyclic group such as an alkyl group, a thiol group, an isodecyl group, a tricyclodecyl group, a tricyclodecyl group or a tetracyclododecyl group.

又,(D2)丙烯酸系樹脂,亦可為使(甲基)丙烯酸酯以外之單體聚合而成者。作為如此之單體,可舉例(甲基)丙烯醯胺類、不飽和羧酸類、烯丙基化合物、乙烯基醚類、乙烯酯類、苯乙烯類等。此等之單體,可單獨或組合2種以上來使用。Further, the (D2) acrylic resin may be one obtained by polymerizing a monomer other than (meth) acrylate. As such a monomer, a (meth) acrylamide, an unsaturated carboxylic acid, an allyl compound, a vinyl ether, a vinyl ester, a styrene, etc. are mentioned. These monomers may be used alone or in combination of two or more.

作為(甲基)丙烯醯胺類,可舉例(甲基)丙烯醯胺、N-烷基(甲基)丙烯醯胺、N-芳基(甲基)丙烯醯胺、N,N-二烷基(甲基)丙烯醯胺、N,N-芳基(甲基)丙烯醯胺、N-甲基-N-苯基(甲基)丙烯醯胺、N-羥基乙基-N-甲基(甲基)丙烯醯胺等。As the (meth) acrylamide, (meth) acrylamide, N-alkyl (meth) acrylamide, N-aryl (meth) acrylamide, N, N-dioxane can be exemplified. (meth)acrylamide, N,N-aryl(meth)acrylamide, N-methyl-N-phenyl(meth)acrylamide, N-hydroxyethyl-N-methyl (Methyl) acrylamide and the like.

作為不飽和羧酸類,可舉例巴豆酸等之單羧酸;馬來酸、富馬酸、檸康酸、中康酸、伊康酸等之二羧酸;此等二羧酸之酐;等。Examples of the unsaturated carboxylic acid include monocarboxylic acids such as crotonic acid; dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, and itaconic acid; and anhydrides of such dicarboxylic acids; .

作為烯丙基化合物,可舉例乙酸烯丙酯、己酸烯丙酯、辛酸烯丙酯、月桂酸烯丙酯、棕櫚酸烯丙酯、硬脂酸烯丙酯、苯甲酸烯丙酯、乙醯乙酸烯丙酯、乳酸烯丙酯等之烯丙酯類;烯丙氧基乙醇;等。Examples of the allyl compound include allyl acetate, allyl hexanoate, allyl octanoate, allyl laurate, allyl palmitate, allyl stearate, allyl benzoate, and B. Allyl acetate, allyl lactate, etc.; allyloxyethanol; and the like.

作為乙烯基醚類,可舉例己基乙烯基醚、辛基乙烯基醚、癸基乙烯基醚、乙基己基乙烯基醚、甲氧基乙基乙烯基醚、乙氧基乙基乙烯基醚、氯乙基乙烯基醚、1-甲基-2,2-二甲基丙基乙烯基醚、2-乙基丁基乙烯基醚、羥基乙基乙烯基醚、二乙二醇乙烯基醚、二甲胺基乙基乙烯基醚、二乙胺基乙基乙烯基醚、丁胺基乙基乙烯基醚、苄基乙烯基醚、四氫糠基乙烯基醚等之烷基乙烯基醚;乙烯基苯基醚、乙烯基甲苯基醚、乙烯基氯苯基醚、乙烯基-2,4-二氯苯基醚、乙烯基萘基醚、乙烯基蒽基醚等之乙烯基芳基醚;等。Examples of the vinyl ethers include hexyl vinyl ether, octyl vinyl ether, mercapto vinyl ether, ethylhexyl vinyl ether, methoxyethyl vinyl ether, and ethoxyethyl vinyl ether. Chloroethyl vinyl ether, 1-methyl-2,2-dimethylpropyl vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether, An alkyl vinyl ether of dimethylaminoethyl vinyl ether, diethylaminoethyl vinyl ether, butylaminoethyl vinyl ether, benzyl vinyl ether, tetrahydrofurfuryl vinyl ether or the like; Vinyl phenyl ether, vinyl tolyl ether, vinyl chlorophenyl ether, vinyl-2,4-dichlorophenyl ether, vinyl naphthyl ether, vinyl decyl ether, etc. ;Wait.

作為乙烯酯類,可舉例丁酸乙烯酯、異丁酸乙烯酯、三甲基乙酸乙烯酯、二乙基乙酸乙烯酯、戊酸乙烯酯、己酸乙烯酯、氯乙酸乙烯酯、二氯乙酸乙烯酯、甲氧基乙酸乙烯酯、丁氧基乙酸乙烯酯、苯基乙酸乙烯酯、乙醯乙酸乙烯酯、乳酸乙烯酯、β-苯基丁酸乙烯酯、苯甲酸乙烯酯、水楊酸乙烯酯、氯苯甲酸乙烯酯、四氯苯甲酸乙烯酯、萘甲酸乙烯酯等。Examples of the vinyl esters include vinyl butyrate, vinyl isobutyrate, trimethyl vinyl acetate, diethyl vinyl acetate, vinyl valerate, vinyl hexanoate, vinyl chloroacetate, and dichloroacetic acid. Vinyl ester, vinyl methoxy acetate, vinyl butoxide, vinyl acetate, vinyl acetate, vinyl lactate, vinyl β-phenylbutyrate, vinyl benzoate, salicylic acid Vinyl ester, vinyl chlorobenzoate, vinyl tetrachlorobenzoate, vinyl naphthalate, and the like.

作為苯乙烯類,可舉例苯乙烯;甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、異丙基苯乙烯、丁基苯乙烯、己基苯乙烯、環己基苯乙烯、癸基苯乙烯、苄基苯乙烯、氯甲基苯乙烯、三氟甲基苯乙烯、乙氧基甲基苯乙烯、乙醯氧基甲基苯乙烯等之烷基苯乙烯;甲氧基苯乙烯、4-甲氧基-3-甲基苯乙烯、二甲氧基苯乙烯等之烷氧基苯乙烯;氯苯乙烯、二氯苯乙烯、三氯苯乙烯、四氯苯乙烯、五氯苯乙烯、溴苯乙烯、二溴苯乙烯、碘苯乙烯、氟苯乙烯、三氟苯乙烯、2-溴-4-三氟甲基苯乙烯、4-氟-3-三氟甲基苯乙烯等之鹵苯乙烯;等。As the styrene, styrene; methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, diethyl styrene, isopropyl styrene, butyl styrene, hexyl group can be exemplified. An alkane such as styrene, cyclohexyl styrene, mercapto styrene, benzyl styrene, chloromethyl styrene, trifluoromethyl styrene, ethoxymethyl styrene, ethoxymethyl methyl styrene Alkoxystyrene, methoxystyrene, 4-methoxy-3-methylstyrene, dimethoxystyrene, etc.; chlorostyrene, dichlorostyrene, trichlorostyrene , tetrachlorostyrene, pentachlorostyrene, bromostyrene, dibromostyrene, iodine styrene, fluorostyrene, trifluorostyrene, 2-bromo-4-trifluoromethylstyrene, 4-fluoro- a halogenated styrene such as 3-trifluoromethylstyrene;

(D2)丙烯酸系樹脂中之來自(甲基)丙烯酸的結構單元之量,與來自其他單體的結構單元之量,在不妨礙本發明之目的的範圍內便無特別限定。(D2)丙烯酸系樹脂中之來自(甲基)丙烯酸的結構單元之量,相對於丙烯酸系樹脂之質量,為5質量%以上50質量%以下較佳,10質量%以上30質量%以下更佳。(D2) The amount of the structural unit derived from (meth)acrylic acid in the acrylic resin and the amount of the structural unit derived from the other monomer are not particularly limited as long as the object of the present invention is not impaired. (D2) The amount of the structural unit derived from (meth)acrylic acid in the acrylic resin is preferably 5% by mass or more and 50% by mass or less based on the mass of the acrylic resin, and more preferably 10% by mass or more and 30% by mass or less. .

(D2)丙烯酸系樹脂之重量平均分子量,為2000以上50000以下較佳,5000以上30000以下更佳。藉由成為上述之範圍,有容易取得感光性組成物之膜形成能力、曝光後顯影性之平衡的傾向。The weight average molecular weight of the (D2) acrylic resin is preferably 2,000 or more and 50,000 or less, more preferably 5,000 or more and 30,000 or less. By the above range, it is easy to obtain a balance between the film forming ability of the photosensitive composition and the developability after exposure.

[(D3)酚醛清漆樹脂)]   作為鹼可溶性樹脂,亦可較佳使用(D3)酚醛清漆樹脂。   作為(D3)酚醛清漆樹脂,可使用自以往感光性之樹脂組成物所調配的各種酚醛清漆樹脂。作為(D3)酚醛清漆樹脂,以藉由使具有酚性羥基之芳香族化合物(以下,簡單稱為「酚類」)與醛類在酸觸媒下進行加成縮合而得者較佳。[(D3) Novolak Resin]] As the alkali-soluble resin, (D3) novolak resin can also be preferably used. As the (D3) novolac resin, various novolac resins formulated from conventional photosensitive resin compositions can be used. The (D3) novolac resin is preferably obtained by addition-condensation of an aromatic compound having a phenolic hydroxyl group (hereinafter simply referred to as "phenol") and an aldehyde under an acid catalyst.

(酚類)   作為製作(D3)酚醛清漆樹脂時使用之酚類,可舉例例如酚;o-甲酚、m-甲酚、p-甲酚等之甲酚類;2,3-茬酚、2,4-茬酚、2,5-茬酚、2,6-茬酚、3,4-茬酚、3,5-茬酚等之茬酚類;o-乙基酚、m-乙基酚、p-乙基酚等之乙基酚類;2-異丙基酚、3-異丙基酚、4-異丙基酚、o-丁基酚、m-丁基酚、p-丁基酚以及p-三級丁基酚等之烷基酚類;2,3,5-三甲基酚,及3,4,5-三甲基酚等之三烷基酚類;間苯二酚、兒茶酚、氫醌、氫醌單甲基醚、五倍子酚及間苯三酚等之多元酚類;烷基間苯二酚、烷基兒茶酚及烷基氫醌等之烷基多元酚類(任一烷基皆為碳原子數1以上4以下);α-萘酚;β-萘酚;羥基二苯基;以及雙酚A等。此等之酚類可單獨使用,亦可組合2種以上使用。(Phenols) Examples of the phenols used in the production of the (D3) novolac resin include phenols such as phenol, o-cresol, m-cresol, and p-cresol; 2,3-indolylphenol, 2,4-nonanol, 2,5-nonanol, 2,6-nonanol, 3,4-nonanol, 3,5-nonanol, etc.; o-ethylphenol, m-ethyl Ethylphenols such as phenol and p-ethylphenol; 2-isopropylphenol, 3-isopropylphenol, 4-isopropylphenol, o-butylphenol, m-butylphenol, p-butyl Alkylphenols and alkylphenols such as p-tertiary butylphenol; 2,3,5-trimethylphenol; and trialkylphenols such as 3,4,5-trimethylphenol; Polyphenols such as phenol, catechol, hydroquinone, hydroquinone monomethyl ether, gallicol and phloroglucin; alkyls such as alkyl resorcinol, alkyl catechol and alkyl hydroquinone Polyhydric phenols (any alkyl group having 1 or more and 4 or less carbon atoms); α-naphthol; β-naphthol; hydroxydiphenyl; and bisphenol A. These phenols may be used singly or in combination of two or more.

此等酚類之中,以m-甲酚及p-甲酚較佳,併用m-甲酚與p-甲酚更佳。此時,藉由調整兩者之調配比例,可調節使用感光性組成物形成之硬化膜的耐熱性等之諸特性。   m-甲酚與p-甲酚之調配比例雖無特別限定,但以m-甲酚/p-甲酚之莫耳比計為3/7以上8/2以下較佳。藉由以該範圍之比率使用m-甲酚及p-甲酚,容易得到可形成耐熱性優異之硬化膜的感光性組成物。Among these phenols, m-cresol and p-cresol are preferred, and m-cresol and p-cresol are more preferred. At this time, by adjusting the blending ratio of the two, it is possible to adjust various properties such as heat resistance of the cured film formed using the photosensitive composition. The ratio of the mixing ratio of m-cresol to p-cresol is not particularly limited, but is preferably 3/7 or more and 8/2 or less in terms of the molar ratio of m-cresol/p-cresol. By using m-cresol and p-cresol in a ratio of this range, it is easy to obtain a photosensitive composition which can form a cured film excellent in heat resistance.

又,併用m-甲酚與2,3,5-三甲基酚製造的酚醛清漆樹脂亦較佳。使用該酚醛清漆樹脂時,特別容易得到可形成難以因後烘烤時之加熱而過度流動的硬化膜之感光性組成物。   m-甲酚與2,3,5-三甲基酚之調配比例雖無特別限定,但以m-甲酚/2,3,5-三甲基酚之莫耳比計為70/30以上95/5以下較佳。Further, a novolac resin produced by using m-cresol and 2,3,5-trimethylphenol is also preferred. When the novolak resin is used, it is particularly easy to obtain a photosensitive composition which can form a cured film which is hard to excessively flow by heating at the time of post-baking. The ratio of the ratio of m-cresol to 2,3,5-trimethylphenol is not particularly limited, but the molar ratio of m-cresol/2,3,5-trimethylphenol is 70/30 or more. 95/5 or less is preferred.

(醛類)   作為製作(D3)酚醛清漆樹脂時使用的醛類,可舉例例如甲醛、聚甲醛、糠醛、苯甲醛、硝基苯甲醛及乙醛等。此等之醛類可單獨使用,亦可組合2種以上使用。(Aldehyde) Examples of the aldehyde used in the production of the (D3) novolak resin include formaldehyde, polyoxymethylene, furfural, benzaldehyde, nitrobenzaldehyde, and acetaldehyde. These aldehydes may be used singly or in combination of two or more.

(酸觸媒)   作為製作(D3)酚醛清漆樹脂時使用的酸觸媒,可舉例例如鹽酸、硫酸、硝酸、磷酸及亞磷酸等之無機酸類;甲酸、草酸、乙酸、二乙基硫酸及對甲苯磺酸等之有機酸類;以及乙酸鋅等之金屬鹽類等。此等之酸觸媒可單獨使用,亦可組合2種以上使用。(Acid Catalyst) The acid catalyst used in the production of the (D3) novolak resin may, for example, be an inorganic acid such as hydrochloric acid, sulfuric acid, nitric acid, phosphoric acid or phosphorous acid; formic acid, oxalic acid, acetic acid, diethyl sulfuric acid and An organic acid such as toluenesulfonic acid; or a metal salt such as zinc acetate. These acid catalysts may be used singly or in combination of two or more.

(分子量)   (D3)酚醛清漆樹脂之聚苯乙烯換算之重量平均分子量(Mw;以下,簡單稱為「重量平均分子量」),由使用感光性組成物形成之硬化膜的對於加熱所致之流動之耐性的觀點來看,作為下限值以2000較佳,5000更佳,10000特佳,15000進而佳,20000最佳,作為上限值以50000較佳,45000更佳,40000進而佳,35000最佳。(Molecular weight) (D3) The weight average molecular weight (Mw; hereinafter simply referred to as "weight average molecular weight") in terms of polystyrene in the novolak resin, and the flow due to heating of the cured film formed using the photosensitive composition From the viewpoint of patience, the lower limit is preferably 2,000, 5,000 is better, 10000 is better, 15000 is better, and 20,000 is the best, and the upper limit is preferably 50,000, 45000 is better, 40,000 is better, and 35000 is better. optimal.

作為(D3)酚醛清漆樹脂,可組合使用至少2種聚苯乙烯換算之重量平均分子量不同者。藉由組合使用重量平均分子量大小不同者,可取得感光性組成物之顯影性與使用感光性組成物形成之硬化膜的耐熱性之平衡。As the (D3) novolak resin, at least two kinds of weight average molecular weights in terms of polystyrene may be used in combination. By using a combination of different weight average molecular weights, the balance between the developability of the photosensitive composition and the heat resistance of the cured film formed using the photosensitive composition can be obtained.

(D)黏結劑樹脂之含量,相對於感光性組成物之固體成分全體的質量為10質量%以上65質量%以下較佳,15質量%以上50質量%以下更佳。藉由成為上述之範圍,容易得到顯影性優異之樹脂組成物。(D) The content of the binder resin is preferably 10% by mass or more and 65% by mass or less based on the total mass of the solid content of the photosensitive composition, and more preferably 15% by mass or more and 50% by mass or less. By the above range, a resin composition excellent in developability can be easily obtained.

<(E)光聚合性單體>   感光性組成物亦可包含(E)光聚合性單體。(E)光聚合性單體,為具有可藉由(B)光聚合起始劑之作用而聚合之碳-碳雙鍵的化合物,只要是前述(A)交聯成分以外之化合物便無特別限定。   該(E)光聚合性單體中有單官能單體與多官能單體。<(E) Photopolymerizable monomer> The photosensitive composition may further contain (E) a photopolymerizable monomer. (E) The photopolymerizable monomer is a compound having a carbon-carbon double bond polymerizable by the action of the (B) photopolymerization initiator, and there is no particular compound as long as it is a compound other than the above (A) cross-linking component. limited. Among the (E) photopolymerizable monomers, there are monofunctional monomers and polyfunctional monomers.

作為單官能單體,可舉例(甲基)丙烯醯胺、羥甲基(甲基)丙烯醯胺、甲氧基甲基(甲基)丙烯醯胺、乙氧基甲基(甲基)丙烯醯胺、丙氧基甲基(甲基)丙烯醯胺、丁氧基甲氧基甲基(甲基)丙烯醯胺、N-羥甲基(甲基)丙烯醯胺、N-羥基甲基(甲基)丙烯醯胺、(甲基)丙烯酸、富馬酸、馬來酸、馬來酸酐、伊康酸、伊康酸酐、檸康酸、檸康酸酐、巴豆酸、2-丙烯醯胺-2-甲基丙烷磺酸、三級丁基丙烯醯胺磺酸、甲基(甲基)丙烯酸酯、乙基(甲基)丙烯酸酯、丁基(甲基)丙烯酸酯、2-乙基己基(甲基)丙烯酸酯、環己基(甲基)丙烯酸酯、2-羥基乙基(甲基)丙烯酸酯、2-羥基丙基(甲基)丙烯酸酯、2-羥基丁基(甲基)丙烯酸酯、2-苯氧基-2-羥基丙基(甲基)丙烯酸酯、2-(甲基)丙烯醯氧基-2-羥基丙基酞酸酯、甘油單(甲基)丙烯酸酯、四氫糠基(甲基)丙烯酸酯、二甲胺基乙基(甲基)丙烯酸酯、環氧丙基(甲基)丙烯酸酯、2,2,2-三氟乙基(甲基)丙烯酸酯、2,2,3,3-四氟丙基(甲基)丙烯酸酯、酞酸衍生物之半(甲基)丙烯酸酯等。此等之單官能單體,可單獨或組合2種以上來使用。As the monofunctional monomer, (meth) acrylamide, hydroxymethyl (meth) acrylamide, methoxymethyl (meth) acrylamide, ethoxymethyl (meth) propylene can be exemplified. Indoleamine, propoxymethyl (meth) acrylamide, butoxymethoxymethyl (meth) acrylamide, N-hydroxymethyl (meth) acrylamide, N-hydroxymethyl (Meth) acrylamide, (meth)acrylic acid, fumaric acid, maleic acid, maleic anhydride, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, crotonic acid, 2-propenylamine 2-methylpropane sulfonic acid, tertiary butyl acrylamide sulfonic acid, methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, 2-ethyl Hexyl (meth) acrylate, cyclohexyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (methyl) Acrylate, 2-phenoxy-2-hydroxypropyl (meth) acrylate, 2-(meth) propylene oxy-2-hydroxypropyl phthalate, glycerol mono (meth) acrylate, Tetrahydroindenyl (meth) acrylate, dimethylaminoethyl (meth) acrylate, epoxy Base (meth) acrylate, 2,2,2-trifluoroethyl (meth) acrylate, 2,2,3,3-tetrafluoropropyl (meth) acrylate, half of decanoic acid derivative (Meth) acrylate, etc. These monofunctional monomers can be used singly or in combination of two or more.

另一方面,作為多官能單體,可舉例乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,6-己烷甘醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、甘油二(甲基)丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、2,2-雙(4-(甲基)丙烯醯氧基二乙氧基苯基)丙烷、2,2-雙(4-(甲基)丙烯醯氧基聚乙氧基苯基)丙烷、2-羥基-3-(甲基)丙烯醯氧基丙基(甲基)丙烯酸酯、乙二醇二環氧丙基醚二(甲基)丙烯酸酯、二乙二醇二環氧丙基醚二(甲基)丙烯酸酯、酞酸二環氧丙基酯二(甲基)丙烯酸酯、甘油三丙烯酸酯、甘油聚環氧丙基醚聚(甲基)丙烯酸酯、胺甲酸酯(甲基)丙烯酸酯(即,苯亞甲基二異氰酸酯、三甲基六亞甲基二異氰酸酯或六亞甲基二異氰酸酯等與2-羥乙基(甲基)丙烯酸酯的反應物)、亞甲基雙(甲基)丙烯醯胺、(甲基)丙烯醯胺亞甲基醚、多元醇與N-羥甲基(甲基)丙烯醯胺之縮合物等之多官能單體,或1,3,5-三丙烯醯基六氫-1,3,5-三(triacrylformal)等。此等之多官能單體,可單獨或組合2種以上來使用。On the other hand, as the polyfunctional monomer, ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, propylene glycol II can be exemplified. Methyl) acrylate, polypropylene glycol di(meth) acrylate, butane diol di(meth) acrylate, neopentyl glycol di(meth) acrylate, 1,6-hexane glycol di(a) Acrylate, trimethylolpropane tri(meth)acrylate, glycerol di(meth)acrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pentaerythritol Di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, 2,2- Bis(4-(methyl)propenyloxydiethoxyphenyl)propane, 2,2-bis(4-(methyl)propenyloxypolyethoxyphenyl)propane, 2-hydroxy- 3-(Methyl)acryloxypropyl (meth) acrylate, ethylene glycol diepoxypropyl ether di(meth) acrylate, diethylene glycol II Oxypropyl propyl di(meth) acrylate, diepoxy propyl phthalate di(meth) acrylate, glycerol triacrylate, glycerol polyepoxypropyl ether poly(meth) acrylate, amine A Acid (meth) acrylate (ie, reaction of 2-hydroxyethyl (meth) acrylate, such as benzylidene diisocyanate, trimethylhexamethylene diisocyanate or hexamethylene diisocyanate a polyfunctional monomer such as methylene bis(meth) acrylamide, (meth) acrylamide benzyl ether, a condensate of a polyol and N-methylol (meth) acrylamide , or 1,3,5-tripropylene decyl hexahydro-1,3,5-three (triacrylformal) and the like. These polyfunctional monomers can be used singly or in combination of two or more.

作為此等之(E)光聚合性單體,由有提高硬化物之對基板的密著性與硬化物之強度的傾向之觀點來看,可使用3官能以上之多官能單體,可使用4官能以上之多官能單體,可使用5官能以上之多官能單體。   具體而言,使用5官能以上之多官能單體時,可實現基板之密著性的提升。典型而言,使用二季戊四醇五(甲基)丙烯酸酯,及/或二季戊四醇六(甲基)丙烯酸酯。As the (E) photopolymerizable monomer, a trifunctional or higher polyfunctional monomer can be used from the viewpoint of improving the adhesion of the cured product to the substrate and the strength of the cured product. As the polyfunctional monomer having 4 or more functional groups, a polyfunctional monomer having 5 or more functional groups can be used. Specifically, when a polyfunctional monomer having five or more functional groups is used, the adhesion of the substrate can be improved. Typically, dipentaerythritol penta (meth) acrylate, and/or dipentaerythritol hexa (meth) acrylate is used.

(E)光聚合性單體之感光性組成物中之含量在不妨礙本發明之目的的範圍內便無特別限定。但,由使本發明效果表現得更顯著之觀點來看,(E)光聚合性單體之感光性組成物中之含量,相對於(A)交聯成分之質量為50質量%以下較佳,30質量%以下更佳,10質量%以下特佳,5質量%以下進而佳,0質量%最佳。The content of the photosensitive composition of the (E) photopolymerizable monomer is not particularly limited as long as it does not impair the object of the present invention. However, the content of the (E) photopolymerizable monomer in the photosensitive composition is preferably 50% by mass or less based on the mass of the (A) cross-linking component, from the viewpoint of the effect of the present invention being more remarkable. 30% by mass or less is more preferably 10% by mass or less, particularly preferably 5% by mass or less, and most preferably 0% by mass.

<(S)有機溶劑>   感光性組成物,為了塗佈性之改善或黏度調整,包含(S)有機溶劑較佳。<(S) Organic Solvent> The photosensitive composition preferably contains (S) an organic solvent for improvement in coatability or viscosity adjustment.

作為(S)有機溶劑,具體而言可舉例乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單-n-丙基醚、乙二醇單-n-丁基醚、二乙二醇單甲基醚、二乙二醇單乙基醚、二乙二醇單-n-丙基醚、二乙二醇單-n-丁基醚、三乙二醇單甲基醚、三乙二醇單乙基醚、丙二醇單甲基醚、丙二醇單乙基醚、丙二醇單-n-丙基醚、丙二醇單-n-丁基醚、二丙二醇單甲基醚、二丙二醇單乙基醚、二丙二醇單-n-丙基醚、二丙二醇單-n-丁基醚、三丙二醇單甲基醚、三丙二醇單乙基醚等之(聚)烷二醇單烷基醚類;乙二醇單甲基醚乙酸酯、乙二醇單乙基醚乙酸酯、二乙二醇單甲基醚乙酸酯、二乙二醇單乙基醚乙酸酯、丙二醇單甲基醚乙酸酯(PGMEA)、丙二醇單乙基醚乙酸酯等之(聚)烷二醇單烷基醚乙酸酯類;二乙二醇二甲基醚、二乙二醇甲基乙基醚、二乙二醇二乙基醚、四氫呋喃等之其他醚類;甲基乙基酮、環己酮、2-庚酮、3-庚酮等之酮類;2-羥基丙酸甲酯、2-羥基丙酸乙基等之乳酸烷基酯類;2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基丙酸酯、乙酸乙酯、乙酸n-丙酯、乙酸i-丙酯、乙酸n-丁酯、乙酸i-丁酯、甲酸n-戊酯、乙酸i-戊酯、乙酸苄酯、丙酸n-丁酯、酪酸乙酯、酪酸n-丙酯、酪酸i-丙酯、酪酸n-丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸n-丙酯、乙醯乙酸甲酯、乙醯乙酸乙酯、2-側氧丁酸乙酯等之其他酯類;甲苯、二甲苯等之芳香族烴類;N-甲基-2-吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N,N-二甲基異丁基醯胺、N,N-二乙基乙醯胺、N,N-二乙基甲醯胺、N-甲基己內醯胺、1,3-二甲基-2-咪唑啶酮、吡啶及N,N,N’,N’-四甲脲等含氮極性有機溶劑;等。Specific examples of the (S) organic solvent include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, and ethylene glycol mono-n-butyl ether. Diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether , triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol single (poly)alkylene glycol monoalkyl ethers such as ethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether Ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl (poly)alkylene glycol monoalkyl ether acetates such as phenyl ether acetate (PGMEA), propylene glycol monoethyl ether acetate, etc.; diethylene glycol dimethyl ether, diethylene glycol methyl ethyl Other ethers such as ether, diethylene glycol diethyl ether, tetrahydrofuran; methyl Ketones such as ketone, cyclohexanone, 2-heptanone, 3-heptanone, etc.; alkyl lactate such as methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate; 2-hydroxy-2- Ethyl methacrylate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethoxylate Ethyl acetate, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutanoate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3 -methyl-3-methoxybutylpropionate, ethyl acetate, n-propyl acetate, i-propyl acetate, n-butyl acetate, i-butyl acetate, n-amyl formate, acetic acid I-amyl ester, benzyl acetate, n-butyl propionate, ethyl butyrate, n-propyl butyrate, i-propyl butyrate, n-butyl butyrate, methyl pyruvate, ethyl pyruvate, pyruvic acid Other esters such as n-propyl ester, ethyl acetoacetate, ethyl acetate, ethyl 2-oxobutanoate; aromatic hydrocarbons such as toluene and xylene; N-methyl-2-pyrrole Pyridone, N,N-dimethylformamide, N,N-dimethylacetamide, N,N-dimethylisobutylguanamine, N,N-diethylacetamide, N , N-diethylformamide, N- Caprolactam-yl, 1,3-dimethyl-2-piperidone imidazole, pyridine and N, N, N ', N'- tetramethyl urea and other nitrogen-containing polar organic solvent; and the like.

此等之中,以烷二醇單烷基醚類、烷二醇單烷基醚乙酸酯類、上述其他醚類、乳酸烷基酯類、上述其他酯類較佳,烷二醇單烷基醚乙酸酯類、上述其他醚類、乙酸苄基等之上述其他酯類更佳。   又,由各成分之溶解性,或(C)碳黑等之顏料之分散性等之點,(S)有機溶劑為包含含氮極性有機溶劑者較佳。作為含氮極性有機溶劑,可使用N,N,N’,N’-四甲脲等。   此等之溶劑,可單獨或組合2種以上來使用。Among these, alkanediol monoalkyl ethers, alkylene glycol monoalkyl ether acetates, the above other ethers, alkyl lactates, and the above other esters are preferred, alkanediol monoalkyl groups. The above other esters such as an ether acetate, the above other ethers, and a benzyl acetate are more preferable. Further, the (S) organic solvent is preferably a nitrogen-containing polar organic solvent, depending on the solubility of each component or the dispersibility of (C) a pigment such as carbon black. As the nitrogen-containing polar organic solvent, N, N, N', N'-tetramethyluron or the like can be used. These solvents may be used alone or in combination of two or more.

(S)有機溶劑之含量並無特別限定,以可塗佈至基板等的濃度,視塗佈膜厚適當地設定。感光性組成物之黏度為5cp以上500cp以下較佳,10cp以上50cp以下更佳,20cp以上30cp以下進而佳。又,固體成分濃度為5質量%以上100質量%以下較佳,15質量%以上50質量%以下更佳。The content of the (S) organic solvent is not particularly limited, and is appropriately set depending on the coating film thickness at a concentration that can be applied to a substrate or the like. The viscosity of the photosensitive composition is preferably 5 cp or more and 500 cp or less, more preferably 10 cp or more and 50 cp or less, and more preferably 20 cp or more and 30 cp or less. Further, the solid content concentration is preferably 5% by mass or more and 100% by mass or less, more preferably 15% by mass or more and 50% by mass or less.

<其他成分>   感光性組成物中,視需要可含有界面活性劑、密著性提升劑、熱聚合抑制劑、消泡劑、環氧化合物等之添加劑。任一添加劑皆可使用以往公知者。   作為界面活性劑,可舉例陰離子系、陽離子系、非離子系等之化合物,作為熱聚合抑制劑,可舉例氫醌、氫醌單乙基醚等,作為消泡劑,可舉例聚矽氧系、氟系化合物等。<Other Components> The photosensitive composition may contain an additive such as a surfactant, an adhesion promoter, a thermal polymerization inhibitor, an antifoaming agent, or an epoxy compound, as needed. Any of the additives can be used in the past. Examples of the surfactant include compounds such as anionic, cationic, and nonionic. Examples of the thermal polymerization inhibitor include hydroquinone and hydroquinone monoethyl ether. Examples of the antifoaming agent include polyoxyn , fluorine-based compounds, and the like.

<感光性組成物之調製方法>   以上說明之感光性組成物,可藉由將上述各成分分別混合指定量後,以攪拌機均勻地混合而得。此外,亦可使用過濾器進行過濾使所得混合物成為更均勻者。<Preparation Method of Photosensitive Composition> The photosensitive composition described above can be obtained by uniformly mixing the above components with a predetermined amount and then uniformly mixing them with a stirrer. In addition, filtration can also be carried out using a filter to make the resulting mixture more uniform.

使用以上說明之感光性組成物形成之硬化膜,遮光性優異,且,絕緣性與基板之密著性優異。因此,上述之感光性組成物,適合使用於各種顯示裝置用之顯示面板所具備的彩色濾光片中之黑矩陣的形成用途中。The cured film formed using the photosensitive composition described above is excellent in light-shielding property and excellent in insulation property and adhesion to a substrate. Therefore, the photosensitive composition described above is suitably used for forming a black matrix in a color filter provided in various display panels for display devices.

使用上述之感光性組成物形成之硬化膜,由於絕緣性及遮光性優異,較佳使用作為觸控面板中之引線的遮光材料。觸控面板中之引線上,藉由使用上述之感光性組成物形成硬化膜作為遮光材料,可使由觸控面板之使用者側難以視覺辨識引線。   因此,上述之感光性組成物,適合使用於觸控面板中之引線的遮光材料之形成用途中。The cured film formed using the above-described photosensitive composition is excellent in insulating properties and light-shielding properties, and is preferably used as a light-shielding material for a lead in a touch panel. In the lead wire of the touch panel, by using the above-described photosensitive composition to form a cured film as a light-shielding material, it is difficult to visually recognize the lead from the user side of the touch panel. Therefore, the above-mentioned photosensitive composition is suitable for use in forming a light-shielding material for a lead wire in a touch panel.

又,關於感光性組成物,以以下之條件做成硬化膜時的表面電阻值為1.0×1012 Ω/□以上較佳。下述之硬化條件,係使硬化膜長時間暴露於高溫之相當嚴苛的條件。藉由使用上述之感光性組成物,即使在如此嚴苛的條件中,亦可形成電阻值不易變化,且關於絕緣性能之信賴性高的硬化膜。 (硬化條件)   將感光性組成物以厚度成為1μm之方式塗佈在玻璃基板上,以ghi線50mJ/cm2 的曝光量進行曝光,接著以250℃、300分鐘的條件進行後烘烤,做成硬化膜。   又,以相同的條件做成硬化膜時的表面電阻值為1.0×1013 Ω/□以上更佳,1.0×1014 Ω/□以上進而佳。上限雖無特別限定,但例如1.0×1018 Ω/□以下。In addition, it is preferable that the surface resistivity of the photosensitive composition when the cured film is formed under the following conditions is 1.0 × 10 12 Ω/□ or more. The hardening conditions described below are conditions in which the cured film is exposed to a relatively high temperature for a long period of time. By using the above-mentioned photosensitive composition, even under such severe conditions, a cured film having a high resistance value and having high reliability with respect to insulation performance can be formed. (Curing the curing condition) The photosensitive composition was applied onto a glass substrate so as to have a thickness of 1 μm, and exposed to an exposure amount of 50 mJ/cm 2 on a ghi line, followed by post-baking at 250 ° C for 300 minutes. Become a hardened film. Further, the surface resistivity when the cured film is formed under the same conditions is preferably 1.0 × 10 13 Ω / □ or more, more preferably 1.0 × 10 14 Ω / □ or more. The upper limit is not particularly limited, but is, for example, 1.0 × 10 18 Ω / □ or less.

進而,關於感光性組成物,以以下之條件做成硬化膜時的光學密度為2.8/μm以上較佳。藉此,可實現具有更高的遮光性之硬化膜。 (硬化條件)   將感光性組成物以厚度成為1μm之方式塗佈在玻璃基板上,以ghi線50mJ/cm2 的曝光量進行曝光,接著以230℃、20分鐘的條件進行後烘烤,做成硬化膜。   又,以相同的條件做成硬化膜時的光學密度為3.0/μm以上更佳,3.2/μm以上進而佳。上限雖無特別限定,但例如5.0/μm以下。Further, in the photosensitive composition, the optical density when the cured film is formed under the following conditions is preferably 2.8/μm or more. Thereby, a cured film having a higher light blocking property can be realized. (Curing the curing condition) The photosensitive composition was applied onto a glass substrate so as to have a thickness of 1 μm, and exposed to an exposure amount of 50 mJ/cm 2 on a ghi line, followed by post-baking at 230 ° C for 20 minutes. Become a hardened film. Further, when the cured film is formed under the same conditions, the optical density is preferably 3.0/μm or more, and more preferably 3.2/μm or more. The upper limit is not particularly limited, but is, for example, 5.0/μm or less.

≪硬化膜之製造方法≫   作為硬化膜之製造方法,可無特別限定地採用使用包含光聚合性化合物之感光性組成物的以往已知的硬化膜之製造方法。(Manufacturing Method of the Cured Film) As a method of producing the cured film, a conventionally known method for producing a cured film using a photosensitive composition containing a photopolymerizable compound can be used without particular limitation.

作為硬化膜之合適的製造方法,可舉例包含:   藉由塗佈感光性組成物形成塗佈膜的步驟、   位置選擇性地曝光塗佈膜的步驟,與   將經曝光之塗佈膜進行顯影的步驟的方法。   藉由該方法,可形成圖型化成期望形狀的硬化膜。   藉由顯影形成之經圖型化之硬化膜,亦可進一步烘烤。As a suitable manufacturing method of the cured film, there may be mentioned, for example, a step of forming a coating film by coating a photosensitive composition, a step of selectively exposing the coating film, and developing the exposed coating film. The method of the step. By this method, a cured film patterned into a desired shape can be formed. The patterned cured film formed by development can be further baked.

此外,此處雖說明關於經圖型化之硬化膜的形成方法,但當然,亦可藉由對於塗佈膜全面進行曝光而形成不圖型化的硬化膜。Further, although a method of forming the patterned cured film is described here, of course, it is also possible to form a cured film which is not patterned by exposing the coating film to the entire surface.

為了使用感光性成物形成硬化膜,首先,將感光性組成物塗佈於視硬化膜之用途所選擇之基板上形成塗佈膜。塗佈膜之形成方法雖無特別限定,但使用例如輥塗佈機、逆轉塗佈機、棒塗佈機等之接觸轉印型塗佈裝置或旋塗器(旋轉式塗佈裝置)、簾流式塗佈機等之非接觸型塗佈裝置來進行。In order to form a cured film using a photosensitive product, first, a photosensitive film is applied onto a substrate selected for use in a cured film to form a coating film. The method for forming the coating film is not particularly limited, but a contact transfer type coating device or a spin coater (rotary coating device) such as a roll coater, a reverse coater, or a bar coater, and a curtain are used. It is carried out by a non-contact type coating device such as a flow coater.

經塗佈之感光性組成物,視需要進行乾燥,構成塗佈膜。乾燥方法並無特別限定,可舉例例如,(1)藉由加熱板以80℃以上120℃以下,較佳為90℃以上100℃以下之溫度使其乾燥60秒以上120秒以下的方法、(2)在室溫放置數小時~數日的方法、(3)放入溫風加熱器或紅外線加熱器中數十分鐘~數小時除去溶劑的方法等。The applied photosensitive composition is dried as needed to form a coating film. The drying method is not particularly limited, and for example, (1) a method of drying the hot plate at a temperature of 80 ° C or more and 120 ° C or less, preferably 90 ° C or more and 100 ° C or less, for 60 seconds or more and 120 seconds or less ( 2) A method of leaving at room temperature for several hours to several days, and (3) a method of removing the solvent in a warm air heater or an infrared heater for several tens of minutes to several hours.

接著對塗佈膜進行曝光。曝光係照射紫外線、準分子雷射光等之活性能量線來進行。曝光係藉由例如透過負型之遮罩進行曝光的方法等,位置選擇性地進行。照射之能量線量,雖因感光性組成物之組成而不同,但例如為40mJ/cm2 以上200mJ/cm2 以下左右較佳。   此外,塗佈膜全面進行曝光時,形成具有對應塗佈膜形狀的形狀之未圖型化的硬化膜。The coated film is then exposed. The exposure is performed by irradiating an active energy ray such as ultraviolet rays or excimer laser light. The exposure is performed selectively by a method such as exposure through a negative mask. The amount of the energy ray to be irradiated differs depending on the composition of the photosensitive composition, but is preferably, for example, 40 mJ/cm 2 or more and 200 mJ/cm 2 or less. Further, when the coating film is entirely exposed, a cured film having a shape corresponding to the shape of the coating film is formed.

塗佈膜位置選擇性地曝光時,藉由將曝光後之膜藉由顯影液進行顯影,未曝光部溶解於顯影液被去除,形成經圖型化之硬化膜。顯影方法並無特別限定,可使用例如浸漬法、噴霧法等。顯影液視感光性組成物之組成適當地選擇。作為顯影液,可使用例如氫氧化鈉、氫氧化鉀、碳酸鈉、氨、4級銨鹽等之鹼性的水溶液。When the position of the coating film is selectively exposed, the exposed film is developed by a developing solution, and the unexposed portion is dissolved in the developing solution to be removed, thereby forming a patterned cured film. The development method is not particularly limited, and for example, a dipping method, a spray method, or the like can be used. The developer is appropriately selected depending on the composition of the photosensitive composition. As the developer, an alkaline aqueous solution such as sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia or a quaternary ammonium salt can be used.

依期望,接著,進行對經圖型化之硬化膜的烘烤(後烘烤)。烘烤溫度雖無特別限定,但以180℃以上250℃以下較佳,220℃以上230℃以下更佳。烘烤時間,典型為10分鐘以上90分鐘以下,20分鐘以上60分鐘以下較佳。   藉由進行如上述之烘烤,可得到感光性組成物之硬化膜。Next, baking (post-baking) of the patterned cured film is carried out as desired. The baking temperature is not particularly limited, but is preferably 180° C. or higher and 250° C. or lower, and more preferably 220° C. or higher and 230° C. or lower. The baking time is typically 10 minutes or more and 90 minutes or less, and preferably 20 minutes or more and 60 minutes or less. A cured film of the photosensitive composition can be obtained by baking as described above.

如此形成之硬化膜,由於遮光性優異,且,絕緣性與對基板之密著性優異,故適合使用作為各種顯示裝置用之顯示面板所具備的彩色濾光片中之黑矩陣。   又,使用上述之感光性組成物形成之硬化膜,由於絕緣性及遮光性優異,故較佳使用作為觸控面板中之引線的遮光材料。藉由在觸控面板中之引線上,使用上述之感光性組成物形成硬化膜作為遮光材料,可使由觸控面板之使用者側難以視覺辨識引線。 [實施例]The cured film formed in this manner is excellent in light-shielding property and excellent in insulating property and adhesion to a substrate. Therefore, it is suitable to use a black matrix in a color filter included in a display panel for various display devices. Moreover, since the cured film formed using the above-mentioned photosensitive composition is excellent in insulation property and light-shielding property, it is preferable to use a light-shielding material as a lead wire in a touch panel. By forming a cured film as a light-shielding material on the lead in the touch panel using the above-described photosensitive composition, it is difficult to visually recognize the lead from the user side of the touch panel. [Examples]

以下,雖顯示實施例進一步具體說明本發明,但本發明之範圍並不限定於此等之實施例。Hereinafter, the present invention will be specifically described by showing examples, but the scope of the present invention is not limited to the examples.

實施例中,作為(A)交聯成分((A)成分),使用由(CH3 O)SiO3/2 (T單元)57莫耳%、(CH3 )SiO3/2 (T單元)21莫耳%與下述式之單元(T單元)22莫耳%而成之矽氧烷化合物(重量平均分子量:1900)。   此處,(CH3 O)SiO3/2 (T單元),相當於前述之結構單元I。又,(CH3 )SiO3/2 (T單元)及下述式之單元(T單元),相當於前述之結構單元II。   亦即,(A)交聯成分之矽氧烷化合物中,(結構單元I之莫耳量)/(結構單元I、結構單元II及結構單元III之莫耳量的總和)之值為0.57。 In the examples, as the (A) crosslinking component (component (A)), (CH 3 O)SiO 3/2 (T unit) 57 mol%, (CH 3 )SiO 3/2 (T unit) was used. 21 mole % and a unit of the following formula (T unit) 22 mole % of a decane compound (weight average molecular weight: 1900). Here, (CH 3 O)SiO 3/2 (T unit) corresponds to the above-mentioned structural unit I. Further, (CH 3 )SiO 3/2 (T unit) and a unit (T unit) of the following formula correspond to the above-mentioned structural unit II. That is, the value of (the molar amount of the structural unit I) / (the sum of the molar amounts of the structural unit I, the structural unit II, and the structural unit III) of the (A) cross-linking component is 0.57.

比較例中,改變(A)交聯成分,使用二季戊四醇六丙烯酸酯作為(E)光聚合性單體((E)成分)。In the comparative example, (A) a crosslinking component was changed, and dipentaerythritol hexaacrylate was used as (E) photopolymerizable monomer ((E) component).

實施例及比較例中,作為(B)光聚合性化合物((B)成分),使用下述結構之NCI-831 (ADEKA公司製)。 In the examples and the comparative examples, as the (B) photopolymerizable compound (component (B)), NCI-831 (manufactured by ADEKA CORPORATION) having the following structure was used.

實施例及比較例中,作為(C)碳黑((C)成分),使用碳黑分散液(大同化成工業公司製)。   此外,本實施例項之表1中,此顏料及分散劑的固體成分之合算值來記載其數值。In the examples and the comparative examples, as the (C) carbon black (component (C)), a carbon black dispersion (manufactured by Daisei Chemical Industries Co., Ltd.) was used. Further, in Table 1 of the present Example, the numerical value of the solid content of the pigment and the dispersing agent is described.

實施例及比較例中,作為(D)黏結劑樹脂((D)成分),使用以下之調製例1所得之樹脂D-1與丙烯酸系黏結劑樹脂D-2。In the examples and the comparative examples, as the (D) binder resin (component (D)), the resin D-1 obtained in the following Preparation Example 1 and the acrylic binder resin D-2 were used.

[調製例1]   首先,在500ml四口燒瓶中,加入雙酚茀型環氧樹脂(環氧當量235)235g、氯化四甲銨110mg、2,6-二-三級丁基-4-甲基酚100mg,及丙烯酸72.0g,一邊於此之中以25ml/分鐘的速度吹入空氣一邊以90~100℃加熱溶解。接著,溶液為白濁狀態下直接慢慢升溫,加熱至120℃使其完全溶解。此時,溶液雖逐漸變得透明黏稠,維持此狀態繼續攪拌。在此期間,測定酸價,繼續加熱攪拌至未達1.0mgKOH/g為止。酸價到達目標值為止需要12小時。然後冷卻至室溫,得到無色透明且固體狀之下述式所示之雙酚茀型環氧丙烯酸酯。 [Preparation Example 1] First, 235 g of bisphenol fluorene type epoxy resin (epoxy equivalent 235), 110 mg of tetramethylammonium chloride, and 2,6-di-tertiary butyl-4- are added to a 500 ml four-necked flask. 100 mg of methylphenol and 72.0 g of acrylic acid were dissolved by heating at 90 to 100 ° C while blowing air at a rate of 25 ml/min. Next, the solution was slowly warmed up in a white turbid state, and heated to 120 ° C to be completely dissolved. At this time, the solution gradually became transparent and viscous, and the state was maintained while stirring. During this period, the acid value was measured, and heating and stirring were continued until it was less than 1.0 mgKOH/g. It takes 12 hours for the acid price to reach the target value. Then, it was cooled to room temperature to obtain a bisphenolphthalein type epoxy acrylate represented by the following formula which was colorless, transparent and solid.

接著,在如此得到的上述之雙酚茀型環氧丙烯酸酯307.0g中加入溶解3-甲氧基丁基乙酸酯600g後,混合二苯甲酮四羧酸二酐80.5g及溴化四乙基銨1g,緩緩升溫以110~115℃使其反應4小時。確認酸酐基的消失後,混合1,2,3,6-四氫酞酐38.0g,以90℃使其反應6小時,得到樹脂D-1。酸酐基的消失係藉由IR光譜來確認。Next, after dissolving 600 g of 3-methoxybutyl acetate in 307.0 g of the above-mentioned bisphenol fluorene-type epoxy acrylate, 80.5 g of benzophenone tetracarboxylic dianhydride and brominated tetra were mixed. 1 g of ethylammonium was gradually heated to 110 to 115 ° C for 4 hours. After confirming the disappearance of the acid anhydride group, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed, and the mixture was reacted at 90 ° C for 6 hours to obtain a resin D-1. The disappearance of the acid anhydride group was confirmed by IR spectroscopy.

[實施例1及比較例1]   分別使表1之量的各成分與氟系界面活性劑0.1質量份,溶解、分散於(S)有機溶劑中成為固體成分濃度19質量%,而得到實施例及比較例之感光性組成物。作為(S)有機溶劑,係使用3-甲氧基丁基乙酸酯30質量%、環己酮20質量%與丙二醇單甲基醚乙酸酯50質量%之混合溶劑。[Example 1 and Comparative Example 1] Each component of the amount of Table 1 and 0.1 part by mass of the fluorine-based surfactant were dissolved and dispersed in the organic solvent (S) to have a solid concentration of 19% by mass. And the photosensitive composition of the comparative example. As the (S) organic solvent, a mixed solvent of 30% by mass of 3-methoxybutyl acetate, 20% by mass of cyclohexanone, and 50% by mass of propylene glycol monomethyl ether acetate was used.

關於實施例1之感光性組成物,依循以下之測定條件做成硬化膜,進行硬化膜之表面中之矽原子量(質量%)與碳原子量(質量%)的分析。分析的結果,硬化膜之表面中之矽原子量(質量%)/碳原子量(質量%)的比率為0.11(進行3處測定的平均值)。 (測定條件)   將感光性組成物以厚度成為1μm之方式塗佈在玻璃基板上,以ghi線50mJ/cm2 的曝光量進行曝光,接著以230℃、20分鐘的條件進行後烘烤,得到硬化膜。對此硬化膜之表面測定XPS,求得各元素之波峰面積,算出各元素之質量比例。With respect to the photosensitive composition of Example 1, a cured film was formed according to the following measurement conditions, and the amount of ruthenium atom (% by mass) and the amount of carbon atoms (% by mass) in the surface of the cured film were analyzed. As a result of the analysis, the ratio of the amount of ruthenium atom (% by mass) / the amount of carbon atoms (% by mass) in the surface of the cured film was 0.11 (the average value of the three measurements was performed). (Measurement conditions) The photosensitive composition was applied onto a glass substrate so as to have a thickness of 1 μm, and exposed to an exposure amount of 50 mJ/cm 2 on a ghi line, followed by post-baking at 230 ° C for 20 minutes. Hardened film. XPS was measured on the surface of the cured film, and the peak area of each element was determined, and the mass ratio of each element was calculated.

使用所得之感光性樹脂組成物,分別依循以下之方法,評估表面電阻值、光學密度(OD值),與密著性。此等之評估結果記於表1。 (表面電阻值測定)   將感光性組成物以厚度成為1μm之方式塗佈在玻璃基板上,以ghi線50mJ/cm2 的曝光量進行曝光,接著以250℃、300分鐘的條件進行後烘烤,得到硬化膜。對於所得之硬化膜,進行表面電阻值的測定。 (光學密度測定)   將感光性組成物以厚度成為1μm之方式塗佈在玻璃基板上,以ghi線50mJ/cm2 的曝光量進行曝光,接著以230℃、20分鐘的條件進行後烘烤,得到硬化膜。對於所得之硬化膜,進行光學密度的測定。 (密著性評價)   將感光性組成物以厚度成為1μm之方式塗佈在玻璃基板上,以ghi線50mJ/cm2 的曝光量進行曝光,接著以230℃、20分鐘的條件進行後烘烤,得到硬化膜。對於所得之硬化膜,以溫度:121℃、濕度:100%、壓力:2氣壓的條件靜置2小時,藉由交叉切割法(膠帶測試)評估密著性。關於此評估,依循ASTM D-3359的基準,進行關於0B~5B之評估。Using the obtained photosensitive resin composition, the surface resistance value, the optical density (OD value), and the adhesion were evaluated by the following methods, respectively. The results of these evaluations are shown in Table 1. (Measurement of surface resistance value) The photosensitive composition was applied onto a glass substrate so as to have a thickness of 1 μm, and exposed to an exposure amount of 50 mJ/cm 2 on a ghi line, followed by post-baking at 250 ° C for 300 minutes. , a cured film is obtained. The surface resistivity was measured about the obtained cured film. (Measurement of optical density) The photosensitive composition was applied onto a glass substrate so as to have a thickness of 1 μm, and exposed to an exposure amount of 50 mJ/cm 2 on a ghi line, followed by post-baking at 230 ° C for 20 minutes. A cured film is obtained. The optical density of the obtained cured film was measured. (Adhesion evaluation) The photosensitive composition was applied onto a glass substrate so as to have a thickness of 1 μm, and exposed to an exposure amount of 50 mJ/cm 2 on a ghi line, followed by post-baking at 230 ° C for 20 minutes. , a cured film is obtained. The obtained cured film was allowed to stand at a temperature of 121 ° C, a humidity of 100%, and a pressure of 2 atmospheres for 2 hours, and the adhesion was evaluated by a cross-cut method (tape test). For this assessment, an assessment of 0B~5B was conducted in accordance with ASTM D-3359.

依據表1,由實施例1可知,若為感光性組成物之全固體成分中的(C)碳黑含量為30質量%以上,感光性組成物之硬化物中之矽原子量(質量%)/碳原子量(質量%)的比率為0.05以上,且包含指定結構之矽氧烷化合物作為(A)交聯成分的感光性組成物,其可形成光學密度及表面電阻高,且對基板之密著性優異的硬化膜。   另一方面,由比較例1可知,若使用感光性組成物之全固體成分中的(C)碳黑含量為30質量%以上,且包含(E)光聚合性單體,而不含指定結構之矽氧烷化合物作為(A)交聯成分的感光性組成物,即使可形成光學密度高的硬化膜,卻只能形成表面電阻低,且對基板之密著性差的硬化膜。According to the first embodiment, the content of the (C) carbon black in the total solid content of the photosensitive composition is 30% by mass or more, and the amount of germanium in the cured product of the photosensitive composition (% by mass) / The ratio of the atomic weight of carbon atoms (% by mass) is 0.05 or more, and a siloxane compound having a predetermined structure is used as a photosensitive composition of (A) a crosslinking component, which can form an optical density and a high surface resistance, and is densely bonded to a substrate. Excellent hardening film. On the other hand, in Comparative Example 1, it is understood that the (C) carbon black content in the total solid content of the photosensitive composition is 30% by mass or more, and (E) photopolymerizable monomer is contained, and the specified structure is not contained. As a photosensitive composition of the crosslinked component (A), the siloxane compound can form a cured film having a low surface resistance and a poor adhesion to a substrate, even if a cured film having a high optical density can be formed.

Claims (12)

一種感光性組成物,其係包含(A)交聯成分、(B)光聚合起始劑與(C)碳黑的感光性組成物,   前述(A)交聯成分係包含選自下述式(a1)~(a4)所示之M單元、D單元、T單元及Q單元中之1種以上的結構單元之矽氧烷化合物:   M單元:R1 R2 R3 SiO1/2 ・・・(a1)   D單元:R4 R5 SiO2/2 ・・・(a2)   T單元:R6 SiO3/2 ・・・(a3)   Q單元:SiO4/2 ・・・(a4)   (式(a1)~(a4)中,R1 ~R6 各自獨立為R7 -或R7 -O-所示之基,R7 為藉由C-Si鍵鍵結於式(a1)~式(a3)中之矽原子的1價有機基,或藉由C-O鍵鍵結於R7 -O-中之氧原子的1價有機基),   前述矽氧烷化合物在其結構中具有2個以上之碳-碳雙鍵,且,前述矽氧烷化合物包含2個以上之選自M單元、D單元、T單元及Q單元中之結構單元,   前述感光性組成物之全固體成分中的前述(C)碳黑之含量為30質量%以上,   以下述測定條件測定前述感光性組成物之硬化物中的矽原子量(質量%)與碳原子量(質量%)時,矽原子量(質量%)/碳原子量(質量%)的比率為0.05以上; (測定條件)   將感光性組成物以厚度成為1μm之方式塗佈在玻璃基板上,以ghi線50mJ/cm2 的曝光量進行曝光,接著以230℃、20分鐘的條件進行後烘烤,做成硬化膜,對此硬化膜之表面測定XPS,求得各元素之波峰面積,算出各元素之質量比例。A photosensitive composition comprising (A) a crosslinking component, (B) a photopolymerization initiator, and (C) a carbon black photosensitive composition, wherein the crosslinking component (A) comprises a formula selected from the group consisting of a siloxane compound of one or more kinds of structural units of M unit, D unit, T unit, and Q unit represented by (a1) to (a4): M unit: R 1 R 2 R 3 SiO 1/2 ·・・(a1) D unit: R 4 R 5 SiO 2/2・・・(a2) T unit: R 6 SiO 3/2・・・(a3) Q unit: SiO 4/2・・・(a4) ( In the formulae (a1) to (a4), R 1 to R 6 are each independently a group represented by R 7 - or R 7 -O-, and R 7 is bonded to the formula (a1) by a C-Si bond. a monovalent organic group of a ruthenium atom in (a3) or a monovalent organic group bonded to an oxygen atom in R 7 -O- by a CO bond, and the above siloxane compound has two or more in its structure a carbon-carbon double bond, wherein the oxoxane compound contains two or more structural units selected from the group consisting of M unit, D unit, T unit, and Q unit, and the foregoing all of the total solid components of the photosensitive composition C) The content of the carbon black is 30% by mass or more, and the cured product of the photosensitive composition is measured under the following measurement conditions. When the amount of argon atoms (% by mass) and the amount of carbon atoms (% by mass), the ratio of the amount of argon atoms (% by mass) / the amount of carbon atoms (% by mass) is 0.05 or more; (Measurement conditions) The photosensitive composition has a thickness of 1 μm. The film was coated on a glass substrate, exposed to an exposure amount of 50 mJ/cm 2 on a ghi line, and then post-baked at 230 ° C for 20 minutes to form a cured film. The surface of the cured film was measured for XPS. The peak area of each element is used to calculate the mass ratio of each element. 如請求項1之感光性組成物,其中前述感光性組成物之全固體成分中的前述矽氧烷化合物之含量為5質量%以上。The photosensitive composition of claim 1, wherein the content of the above-mentioned siloxane compound in the total solid content of the photosensitive composition is 5% by mass or more. 如請求項1或2之感光性組成物,其中進而包含(D)黏結劑樹脂。The photosensitive composition of claim 1 or 2, which further comprises (D) a binder resin. 如請求項1~3中任1項之感光性組成物,其中前述矽氧烷化合物包含選自下述式(a1a)、式(a2a)、式(a3a)及式(a4)所示之結構單元中之1種以上的結構單元I:   (R7 O)3 SiO1/2 ・・・(a1a)   (R7 O)2 SiO2/2 ・・・(a2a)   (R7 O)SiO3/2 ・・・(a3a)   SiO4/2 ・・・(a4)   (式(a1a)、式(a2a)及式(a3a)中,R7 為藉由C-O鍵鍵結於R7 -O-中之氧原子的1價有機基)。The photosensitive composition according to any one of claims 1 to 3, wherein the oxoxane compound comprises a structure selected from the group consisting of the following formula (a1a), formula (a2a), formula (a3a), and formula (a4). One or more structural units in the unit: I(R 7 O) 3 SiO 1/2・・・(a1a) (R 7 O) 2 SiO 2/2・・・(a2a) (R 7 O)SiO 3 /2・・・(a3a) SiO 4/2・(a4) (In the formula (a1a), the formula (a2a), and the formula (a3a), R 7 is bonded to R 7 -O- by a CO bond. a monovalent organic group of an oxygen atom). 如請求項4之感光性組成物,其中前述矽氧烷化合物進而包含選自下述式(a1b)、式(a2b)及式(a3b)所示之結構單元中之1種以上的結構單元II,及/或   選自下述式(a1c)及式(a2c)所示之結構單元中之1種以上的結構單元III:   (R7 O)2 R7 SiO1/2 ・・・(a1b)   (R7 O)R7 SiO2/2 ・・・(a2b)   R7 SiO3/2 ・・・(a3b)   (式(a1b)、式(a2b)及式(a3b)中,R7 為以C-Si鍵鍵結於式(a1b)、式(a2b)及式(a3b)中之矽原子的1價有機基,或藉由C-O鍵鍵結於R7 -O-中之氧原子的1價有機基);   (R7 O)R7 2 SiO1/2 ・・・(a1c)   R7 2 SiO2/2 ・・・(a2c)   (式(a1c)及式(a2c)中,R7 為以C-Si鍵鍵結於式(a1c)及式(a2c)中之矽原子的1價有機基,或藉由C-O鍵鍵結於R7 -O-中之氧原子的1價有機基);   矽氧烷化合物中之(結構單元I之莫耳量)/(結構單元I、結構單元II及結構單元III之莫耳量的總和)之值為0.25以上。The photosensitive composition of claim 4, wherein the oxoxane compound further comprises one or more structural units selected from the structural units represented by the following formula (a1b), formula (a2b), and formula (a3b) And/or one or more structural units selected from the structural units represented by the following formulas (a1c) and (a2c): (R 7 O) 2 R 7 SiO 1/2 (a1b) (R 7 O)R 7 SiO 2/2・(a2b) R 7 SiO 3/2・(a3b) (In the formula (a1b), the formula (a2b), and the formula (a3b), R 7 is a C-Si bond bonded to a monovalent organic group of a halogen atom in the formula (a1b), the formula (a2b), and the formula (a3b), or an oxygen atom bonded to a carbon atom in R 7 -O- by a CO bond monovalent organic group); (R 7 O) R 7 2 SiO 1/2 · · · (a1c) R 7 2 SiO 2/2 · · · (a2c) ( formula (A1c) and formula (A2C), R 7 is a monovalent organic group bonded to a ruthenium atom in the formula (a1c) and the formula (a2c) by a C-Si bond, or a monovalent organic group bonded to an oxygen atom in R 7 -O- by a CO bond The value of (the molar amount of the structural unit I) / (the sum of the molar amounts of the structural unit I, the structural unit II, and the structural unit III) in the siloxane compound is 0.25 or more. 如請求項1~5中任1項之感光性組成物,其係用以形成黑矩陣。The photosensitive composition according to any one of claims 1 to 5, which is used to form a black matrix. 如請求項1~5中任1項之感光性組成物,其係用以形成觸控面板中之引線的遮光材料。The photosensitive composition according to any one of claims 1 to 5, which is used for forming a light-shielding material for a lead in a touch panel. 如請求項1~7中任1項之感光性組成物,其中以下述條件做成硬化膜時的表面電阻值為1.0×1012 Ω/□以上, (硬化條件)   將感光性組成物以厚度成為1μm之方式塗佈在玻璃基板上,以ghi線50mJ/cm2 的曝光量進行曝光,接著以250℃、300分鐘的條件進行後烘烤,做成硬化膜。The photosensitive composition according to any one of claims 1 to 7, wherein the surface resistivity when the cured film is formed under the following conditions is 1.0 × 10 12 Ω/□ or more, (hardening condition), the photosensitive composition is made to have a thickness The film was applied to a glass substrate in a manner of 1 μm, and exposed to an exposure amount of 50 mJ/cm 2 on a ghi line, followed by post-baking at 250 ° C for 300 minutes to form a cured film. 如請求項1~8中任1項之感光性組成物,其中以下述條件做成硬化膜時的光學密度為2.8/μm以上, (硬化條件)   將感光性組成物以厚度成為1μm之方式塗佈在玻璃基板上,以ghi線50mJ/cm2 的曝光量進行曝光,接著以230℃、20分鐘的條件進行後烘烤,做成硬化膜。The photosensitive composition according to any one of the above-mentioned items 1 to 8, wherein the optical density when the cured film is formed under the following conditions is 2.8/μm or more (curing condition), and the photosensitive composition is coated to have a thickness of 1 μm. The cloth was placed on a glass substrate and exposed to an exposure amount of 50 mJ/cm 2 on a ghi line, and then post-baked at 230 ° C for 20 minutes to form a cured film. 一種硬化膜,其係使如請求項1~9中任1項之感光性組成物硬化而成者。A cured film obtained by curing the photosensitive composition according to any one of claims 1 to 9. 一種顯示裝置,其具備如請求項10之硬化膜。A display device having a cured film as claimed in claim 10. 一種經圖型化之硬化膜的形成方法,其包含下述步驟:   藉由塗佈如請求項1~9中任1項之感光性組成物形成塗佈膜的步驟、   位置選擇性地曝光前述塗佈膜的步驟,與   將經曝光之前述塗佈膜進行顯影的步驟。A method of forming a patterned cured film, comprising the steps of: forming a coating film by applying a photosensitive composition according to any one of claims 1 to 9, and selectively exposing the foregoing The step of coating the film and the step of developing the exposed coating film.
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