TW201934791A - Method for adjusting flatness of sheet parts of chemical vapor deposition machine - Google Patents

Abstract

The present disclosure provides a method for adjusting flatness of a sheet part of a chemical vapor deposition (CVD) machine. The method includes (a) drawing a coordinate system corresponding to a CVD sheet part, the coordinate system including a plurality of coordinates; (b) measuring flatness of each coordinate; (c) determining whether flatness on each coordinate meets a predetermined flatness; (d) if the flatness on each coordinate does not meet the predetermined flatness, utilizing a stamp to apply a stress force under normal temperature onto the coordinates required to be adjusted in flatness, and back to steps (b) and (c). The present disclosure can reduce the time required for adjusting the flatness of the CVD sheet part.

Description

Flatness treatment method of plate-shaped member of chemical vapor deposition machine law

The invention relates to a method for processing components of a chemical vapor deposition machine, and more particularly to a method for processing flatness of a plate-shaped member of a chemical vapor deposition machine.

Chemical vapor deposition (CVD) machines are commonly used in optoelectronic semiconductor manufacturing processes and are widely used in the manufacture of display panels. Each component of the CVD machine is prone to deterioration after a period of use. In order to maintain the service life of each component of the CVD machine, it is necessary to maintain and repair the CVD component. How to shorten the regeneration time of the CVD component and control the time cost are important issues in the field. In addition, how to shorten the manufacturing time of new CVD parts is also a concern in the field.

Please refer to FIG. 1, which shows a schematic structural diagram of a conventional CVD machine 1. In the CVD machine 1, a diffuser 12 serves as an upper electrode, and a heater 14 serves as a lower electrode. A backing plate 16 is fixed on the cavity wall and provides support for the installation of the diffusion plate 12. When performing chemical vapor deposition, gas is introduced from the inlet 11 and diffuses in the gap between the diffusion plate 12 and the back plate 16 to self-diffusion plate 12 A plurality of holes in the cavity enter the cavity. The voltage difference between the diffuser plate 12 and the heater 14 causes the charged gas molecules to move toward the heater 14, because the deposition on the glass substrate 10 facilitates the manufacture of the display element, and the excess gas is discharged from the outlet 19.

The plate-like members (such as the diffuser plate 12, the heater 14, and the back plate 16) in the CVD machine 1 are often deformed due to various factors, so that the flatness cannot meet the original requirements. Therefore, the industry needs to modify the flatness of the CVD plate-like member regularly or irregularly. Regarding the CVD plate-shaped member, whether it is a new product or a recycled product, the flatness processing flow is generally to place the plate-shaped member on a platform in an oven, and according to the desired forming shape, the plate-shaped member A certain weight is applied on the top, and the temperature is raised and lowered in the oven so that its shape gradually reaches a predetermined shape.

However, in order to avoid springback of the CVD plate-like member in the future, the heating and cooling process in the oven needs to be performed slowly. This process usually takes 2 to 3 days. In addition, after the shaping in the oven, if the flatness or configuration of the CVD plate-shaped member does not meet the predetermined requirements, it needs to be placed in the oven again and reshaped. Such a flatness processing method of the CVD plate-shaped member not only consumes a considerable amount of time cost, but also the plastic forming effect is quite unstable.

The present disclosure provides a method for processing flatness of a plate-shaped member of a chemical vapor deposition machine to reduce the time cost of flatness processing of the plate-shaped member.

To achieve the above object, the present disclosure provides a method for processing flatness of a plate-like member of a chemical vapor deposition machine, including: (a) drawing a coordinate system corresponding to a CVD plate-like member, the coordinate system including a plurality of Coordinate points; (b) Measure each The flatness of each coordinate point; (c) judging whether the flatness of each coordinate point conforms to a predetermined flatness; and (d) if the flatness of each coordinate point does not conform to the predetermined flatness, then press at a pressure at room temperature The head applies pressure to the coordinate points requiring flatness adjustment, and returns to steps (b) and (c).

In the flatness processing method of the plate-shaped member of the CVD machine disclosed in the present disclosure, the flatness processing of the plate-shaped member is performed by using an indenter at normal temperature. Compared with the conventional technique of using a heating weight, the present disclosure can Reducing the regeneration time of CVD parts, saving time and cost, reducing the manufacturing time of new CVD parts, and effectively solving the technical problem of unstable plastic forming efficiency.

1‧‧‧CVD machine

10‧‧‧ glass substrate

11‧‧‧ entrance

12‧‧‧ diffuser

14‧‧‧ heater

16‧‧‧ back plate

19‧‧‧ export

30‧‧‧ diffuser

40‧‧‧ Indenter

S10 ~ S16‧‧‧step

FIG. 1 is a schematic diagram showing the structure of a conventional CVD machine.

FIG. 2 is a flowchart illustrating a method for processing flatness of a plate-shaped member of a CVD machine according to the present disclosure.

FIG. 3 shows a schematic view of a diffusion plate according to the present disclosure.

FIG. 4 shows a schematic view of pressing a plate-shaped member by an indenter according to the present disclosure.

FIG. 5 is a schematic diagram showing an example of a flatness processing method according to the present disclosure.

In order to make the objectives, technical solutions, and effects of the present disclosure more clear and definite, the following further describes the present disclosure in detail with reference to the drawings and examples. It should be understood that the specific embodiments described herein are only used to explain this disclosure, and this disclosure specification The word "embodiment" is used as an example, example, or illustration and is not intended to limit the present disclosure. In addition, the articles "a" and "an" used in this disclosure and the scope of the appended patents may generally be construed to mean "one or more" unless specified otherwise or clear from context to be singular.

The present disclosure provides a method for processing flatness of a plate-shaped member of a chemical vapor deposition (CVD) machine, which can effectively shorten the processing time of the flatness of a CVD plate-shaped member.

The CVD plate-like member may be a diffuser or an upper electrode, a susceptor or a lower electrode, and a backing plate in a CVD machine. As shown in FIG. 1, this disclosure does not specifically describe The limitation is only a plate-shaped member in a CVD machine. The material of the CVD plate-like member is a metal, particularly an aluminum material.

The CVD plate-like member may be a new product or a recycled product. The new product means a product that has not been used just after being manufactured, and the recycled product means a component that has been used in a CVD machine for a chemical deposition process and needs to be recycled.

Please refer to FIG. 2. The specific steps of the flatness processing method of the present disclosure are described as follows:

Step S10: Draw a coordinate system corresponding to a CVD plate-shaped member, and the coordinate system includes a plurality of coordinate points.

In this step, you can draw the coordinate system on the plate-like member. In one example, as shown in FIG. 3, a plurality of pieces are drawn on the diffuser plate 30 at the same interval from each other. Dividing lines, such as vertical dividing lines and horizontal dividing lines, these dividing lines constitute a plurality of areas of the same area, and each area can be used as a coordinate point.

Further, the coordinate system corresponding to the figure 3 can also be drawn on a computer by using a graphic drawing software. In this way, a flatness graph of each coordinate point can be established after subsequent flatness measurement.

Step S12: Measure the flatness of each coordinate point.

In this step, an infrared level can be used to measure the flatness of each coordinate point to establish the flatness distribution of the plate-like member. Specifically, an infrared level meter is used to measure the flatness of each coordinate point on the plate-shaped member one by one, and then input it into the graphics drawing software installed in the computer to establish the flatness distribution of the entire plate-shaped member. The graphics rendering software can use interpolation algorithms to arrive at a simulated flatness distribution.

Step S14: Determine whether the flatness of each coordinate point conforms to a predetermined flatness.

In one example, the operator can check the flatness of each coordinate point on the CVD plate-like member, determine whether it meets a predetermined flatness, and list the coordinate points that do not meet the predetermined flatness as the coordinate points to be adjusted. In some cases, the operator can also only check the flatness of certain coordinate points, and then check whether the surrounding area is smooth, to determine whether to perform flatness processing, without checking all the coordinate points.

In another example, the software may be used to establish a predetermined flatness value that conforms to each coordinate point under the predetermined flatness, and each measured in step S12 The measured values of the coordinate points are compared with a predetermined flatness value, so as to determine whether the flatness of each coordinate point meets the requirements.

If the flatness of each coordinate point has met the predetermined flatness, it means that the flatness of the CVD plate-shaped member has met the forming requirements, and the process can be ended. If the flatness of each coordinate point does not conform to the predetermined flatness, it means that the flatness of the CVD plate-shaped member needs to be adjusted, and the flow proceeds to step S16.

As an example, the difference between the measured value of each coordinate point and a predetermined flat value can be added up and then the root value can be taken. If the result obtained is less than a threshold value, it is determined that the flatness requirement is met. If the obtained result is greater than the threshold, it is determined that the flatness requirement is not met.

Step S16: Apply pressure to a coordinate point requiring flatness adjustment with an indenter at normal temperature.

In this step, as shown in FIG. 4, a pressure point 40 driven by a hydraulic press (not shown) is used to apply force and squeeze to a certain coordinate point of the plate-like member to adjust its flatness. Specifically, in one example, the operator may perform flatness adjustment on the coordinate points whose flatness determined in step S14 does not conform to the predetermined flatness. The operator moves the indenter 40 above the coordinate point, and then moves the indenter 40 downward to apply a certain pressure to a coordinate point to change the flatness of the coordinate point. In another example, the operator knows the difference between the measured value of each coordinate point and a predetermined flat value in step S16. If the difference is greater than a predetermined value, the flatness adjustment is performed on the coordinate point.

The magnitude of the force required by the indenter can be obtained through a force model, which can be established using mathematical modeling or statistical methods. According to the magnitude of the force to be applied provided by the force application model, a worker can reach a predetermined force by setting the contact time between the indenter and the plate-like member.

After step S16, proceed to step S12, and measure the flatness of each coordinate point after the flatness adjustment again, and proceed to step S14 to determine whether the flatness meets the requirements. If so, end the process; otherwise, use the indenter to perform a flatness again. Adjustment.

In an embodiment, referring to FIG. 5, it is assumed that the predetermined forming shape of the CVD plate-shaped member is an arc shape. Regardless of whether it is new or recycled, you can adjust its flatness in the following steps: (1) first adjust the flatness of the central area of the plate-shaped member; (2) then adjust the flatness of the central area of the plate-shaped member and the surrounding area To meet the predetermined radian requirements. In the flatness adjustment process, multiple indenters can be used to apply pressure simultaneously, or a single indenter can be used to apply pressure to different areas in turn.

Prior to step S10, the method of the present disclosure may further include a step of heat-treating the CVD plate-like member to relieve its stress. For new products, it is easy to remain processing stress during processing and become an unstable factor in flatness processing, so it needs to be heat treated. In one example, the CVD plate-like member may be heat-treated at a temperature of 420 ° C, a temperature increase of 4 hours, and a temperature decrease of 6 hours. Stress accumulation in recycled products is usually not significant, and the heat treatment step can be omitted to improve the flatness processing efficiency.

Before performing the heat treatment step, the method of the present disclosure may further include a step of forming a protective layer on the CVD plate-like member. CVD plate-shaped member is aluminum In terms of materials, an aluminum plate can be subjected to a redox reaction to form an aluminum oxide layer thereon to improve the corrosion resistance.

Before performing the flatness adjustment, the CVD plate-like member may be cleaned, such as chemical wash, to remove residual impurities thereon, so as to avoid affecting the flatness processing.

Specifically, in an embodiment, the processing steps of the new product are as follows: first, the plate is processed into a shape close to a predetermined forming requirement (such as an arc), chemically cleaned, a protective layer is formed on the plate, and then heat treated Steps to relieve stress, and then use steps S10 to S16 to fine-tune the flatness adjustment. After another cleaning, it can be shipped. In one embodiment, the processing steps of the recycled product are as follows: performing chemical cleaning on the plate-like member, and then performing the flatness adjustment of steps S10 to S16, and then performing another cleaning to complete the regeneration of the plate-like member.

It takes 2 to 3 days to shape a CVD plate-shaped member using a conventional heating weight. In terms of the effectiveness of this technology, for the diffusion plate of the 8.5th generation, it only takes 1/3 of the time of the prior art to complete the flatness processing, and for the diffusion plate of the 6th generation, it only takes about 1 / 6 time. This technology can effectively save time and cost, and also reduce the influence of unstable factors in the conventional technology.

In the flatness processing method of the plate-shaped member of the CVD machine disclosed in the present disclosure, the flatness processing of the plate-shaped member is performed by using an indenter at normal temperature. Compared with the conventional technique of using a heating weight, the present disclosure can Reducing the regeneration time of CVD parts, saving time and cost, reducing the manufacturing time of new CVD parts, and effectively solving the technical problem of unstable plastic forming efficiency.

The present disclosure has been disclosed as above with a preferred embodiment, but it is not intended to limit the present disclosure. Those with ordinary knowledge in the technical field to which this disclosure belongs can make various changes and modifications without departing from the spirit and scope of this disclosure. Therefore, the scope of protection of this disclosure shall be determined by the scope of the appended patent application.

Claims (13)

A method for processing flatness of a plate-shaped member of a chemical vapor deposition (CVD) machine, comprising: (a) drawing a coordinate system corresponding to a CVD plate-shaped member, the coordinate system including a plurality of coordinates; Points; (b) measure the flatness of each coordinate point; (c) determine whether the flatness of each coordinate point conforms to a predetermined flatness; and (d) if the flatness of each coordinate point does not conform to the predetermined flatness , At a normal temperature, apply pressure to a coordinate point that needs to be adjusted for flatness with an indenter, and return to steps (b) and (c). The method according to item 1 of the patent application scope further includes: (e) if the flatness of each coordinate point conforms to the predetermined flatness, then the process is ended. The method according to item 1 of the scope of patent application, wherein the CVD plate-shaped member is selected from the group consisting of a diffuser, a heater, and a backing plate. The method according to item 1 of the scope of patent application, wherein before step (a), the method further comprises: heat-treating the CVD plate-shaped member to relieve its stress. The method according to item 4 of the scope of patent application, wherein before the step of heat treatment, the method further comprises: forming a protective layer on the CVD plate-shaped member. The method according to item 5 of the scope of patent application, wherein in the step of forming the protective layer, the protective layer is formed by using a redox reaction. The method according to item 1 of the scope of patent application, wherein before step (a), the method further comprises: chemically washing the CVD plate-shaped member. The method according to item 1 of the scope of patent application, wherein step (a) includes: establishing a coordinate system corresponding to the CVD plate-shaped member by a graphic drawing software. The method according to item 8 of the scope of patent application, wherein step (b) includes: establishing flatness distribution of the CVD plate-shaped member by using the graphic drawing software. The method according to item 1 of the scope of patent application, wherein step (b) comprises: measuring the flatness of each coordinate point using an infrared level. The method according to item 1 of the scope of patent application, wherein step (c) comprises: comparing the flatness measurement value of each coordinate point measured in step (b) with the predetermined flatness, so as to determine whether it is consistent The predetermined flatness. The method according to item 1 of the scope of patent application, wherein step (d) includes: (d1) adjusting the flatness of the central area of the CVD plate-shaped member; and (d2) after step (d1), The central region and the surrounding region of the CVD plate-shaped member are adjusted for flatness. The method according to item 1 of the scope of patent application, wherein the indenter is driven by a hydraulic press.