TWI646210B - Method for adjusting flatness of sheet parts of chemical vapor deposition machine - Google Patents

Abstract

The present disclosure provides a flatness processing method for a plate-shaped member of a chemical vapor deposition machine, comprising: (a) drawing a calibration system corresponding to a CVD plate-like member, the coordinate system including a plurality of coordinate points; b) measuring the flatness of each coordinate point; (c) determining whether the flatness of each coordinate point conforms to a predetermined flatness; and (d) if the flatness of the respective coordinate point does not conform to the predetermined flatness, then At a normal temperature, a pressure is applied to the coordinate point where the flatness adjustment is required, and the steps are returned to steps (b) and (c). The present disclosure can reduce the flatness adjustment time of the CVD plate member.

Description

Flatness processing method of plate member of chemical vapor deposition machine law

The present invention relates to a method for processing a component of a chemical vapor deposition machine, and more particularly to a method for treating flatness of a plate member of a chemical vapor deposition machine.

Chemical vapor deposition (CVD) machines are commonly used in optoelectronic semiconductor processes and are widely used in the manufacture of display panels. The various parts of the CVD machine are prone to deterioration after a period of use. In order to maintain the service life of the various components of the CVD machine, it is necessary to maintain and trim the CVD components. How to shorten the regeneration time of the CVD components and control the time cost is an important issue in the field. In addition, how to shorten the manufacturing time for new CVD parts is also a concern in the field.

Please refer to FIG. 1, which shows a schematic structural view of a conventional CVD machine 1. In the CVD machine 1, a diffuser 12 is used as an upper electrode, and a susceptor 14 is used as a lower electrode. A backing plate 16 is secured to the wall of the chamber and provides support for the installation of the diffuser panel 12. When chemical vapor deposition is performed, gas is introduced from the inlet 11 and diffused in the gap between the diffusion plate 12 and the backing plate 16, and the diffusion plate 12 is diffused. The plurality of holes in the cavity enter the cavity. The voltage difference between the diffuser plate 12 and the heater 14 causes the charged gas molecules to move toward the heater 14, as deposited on the glass substrate 10 to facilitate the manufacture of the display element, and the excess gas is discharged from the outlet 19.

The plate-like members (for example, the diffusion plate 12, the heater 14, and the back plate 16) in the CVD machine 1 are often deformed by various factors, so that the flatness cannot satisfy the original requirements. Therefore, the industry needs to regularly or irregularly adjust the flatness of the CVD plate member. For a CVD plate-like member, whether it is a new product or a recycled product, the process of flatness is generally performed by placing the plate-like member on a platform in an oven and in accordance with a desired formed shape in the plate-like member. A certain counterweight is applied thereto, and the temperature is raised and lowered in the oven to gradually shape the shape to a predetermined shape.

However, in order to avoid the rebound phenomenon of the CVD plate member in the future use, the temperature rising and cooling process in the oven needs to be performed slowly, and the process usually takes 2 to 3 days. Moreover, after shaping in the oven, if the flatness or configuration of the CVD plate member does not meet the predetermined requirements, it needs to be reinserted into the oven and reshaped. The flatness treatment of such a CVD plate-like member not only consumes a considerable amount of time, but also the plastic forming effect is quite unstable.

The present disclosure provides a method of flatness processing of a plate member of a chemical vapor deposition machine to reduce the time cost of the flatness processing of the plate member.

In order to achieve the above object, the present disclosure provides a flatness processing method for a plate-shaped member of a chemical vapor deposition machine, comprising: (a) drawing a calibration system corresponding to a CVD plate-like member, the coordinate system including a plurality of Coordinate point; (b) measure each Flatness of the coordinate points; (c) determining whether the flatness of each coordinate point conforms to a predetermined flatness; and (d) if the flatness of the respective coordinate points does not conform to the predetermined flatness, then pressing at a normal temperature The head applies pressure to the coordinate points where the flatness adjustment is required, and returns to steps (b) and (c).

In the flatness processing method of the plate-like member of the CVD machine of the present disclosure, the flatness processing of the plate-shaped member is performed by the indenter at normal temperature, and the present disclosure can be adopted by a method of heating the weight compared with the prior art. The regenerative time of the CVD component is shortened, the time cost is saved, the manufacturing time of the new CVD component is also reduced, and the technical problem of the plastic formation instability is effectively solved.

1‧‧‧CVD machine

10‧‧‧ glass substrate

11‧‧‧ Entrance

12‧‧‧Diffuser

14‧‧‧heater

16‧‧‧ Backboard

19‧‧‧Export

30‧‧‧Diffuser

40‧‧‧Indenter

S10~S16‧‧‧Steps

Fig. 1 is a view showing the structure of a conventional CVD machine.

2 is a flow chart showing a method of processing flatness of a plate member of a CVD machine according to the present disclosure.

Figure 3 shows a schematic of a diffuser panel in accordance with the present disclosure.

Fig. 4 is a schematic view showing the indenter pressing plate member according to the present disclosure.

Fig. 5 is a view showing an example of a flatness processing method according to the present disclosure.

The present disclosure will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the disclosure, the disclosure The word "embodiment" is used to mean serving as an example, example or illustration and is not intended to limit the disclosure. In addition, the articles "a" or "an" or "an"

The present disclosure provides a flatness processing method for a plate member of a chemical vapor deposition (CVD) machine, which can effectively shorten the processing time of the flatness of the CVD plate member.

The CVD plate member may be a diffuser or upper electrode, a susceptor or a lower electrode, and a backing plate in a CVD machine. As shown in FIG. 1, the disclosure is not specific. The limitation is as long as it is a plate member in the CVD machine. The material of the CVD plate member is a metal, in particular an aluminum material.

The CVD plate member may be a new product or a recycled product, the new product means a product that has just been manufactured and not yet used, and the recycled product means a component that has been used in a chemical deposition process of a CVD machine and needs to be recycled.

Please refer to FIG. 2, and the specific steps of the flatness processing method of the present disclosure are as follows:

Step S10: drawing a calibration system corresponding to a CVD plate-like member, the coordinate system including a plurality of coordinate points.

In this step, a coordinate system can be drawn on the plate member. In one example, as shown in FIG. 3, a plurality of identical intervals are drawn on the diffusion plate 30. Partition lines, such as longitudinal and lateral dividers, form a plurality of areas of the same area, each of which can serve as a coordinate point.

Further, the coordinate system corresponding to the coordinate system on FIG. 3 can also be drawn on the computer by using the graphic drawing software, so that the flatness of each coordinate point can be established after the subsequent flat measurement.

Step S12: Measure the flatness of each coordinate point.

In this step, the flatness of each coordinate point can be measured using an infrared level to establish a flatness distribution of the plate member. Specifically, the flatness of each coordinate point is measured one by one on the plate member by using an infrared level, and then input into a graphic drawing software installed in the computer, thereby establishing the flatness distribution of the entire plate member. The graphics rendering software can use an interpolation algorithm to derive the simulated flatness distribution.

Step S14: It is judged whether the flatness of each coordinate point conforms to a predetermined flatness.

In one example, the operator can check the flatness of each of the coordinate points on the CVD plate member to determine whether it meets the predetermined flatness, and to list the coordinate points that do not conform to the predetermined flatness as the coordinate points to be adjusted. In some cases, the operator can also check the flatness of some of the coordinate points and then check whether the surrounding area is smooth to determine whether to perform flatness processing without checking all coordinate points.

In another example, a predetermined flat value corresponding to each coordinate point of the predetermined flatness may be established by the software, and each of the measured values in step S12 is measured. The measured value of the coordinate point is compared with a predetermined flat value to determine whether the flatness of each of the punctuation points meets the requirements.

If the flatness of each coordinate point has conformed to the predetermined flatness, it indicates that the flatness of the CVD plate member has met the forming requirements, and the flow can be ended. On the other hand, if the flatness of each coordinate point does not conform to the predetermined flatness, it means that the flatness of the CVD plate member needs to be adjusted, and the flow proceeds to step S16.

As an example, the average of the difference between the measured value of each coordinate point and the predetermined flat value may be added and then the root value is taken. If the result is less than a threshold, the determination meets the flatness requirement, and if If the result is greater than the threshold, it is determined that the flatness requirement is not met.

Step S16: Apply pressure to the coordinate point where the flatness adjustment is required with an indenter at normal temperature.

In this step, as shown in Fig. 4, a certain coordinate point of the plate-like member is biased and pressed by the ram 40 driven by a hydraulic press (not shown) to adjust the flatness thereof. Specifically, in one example, the operator can perform the flatness adjustment for the coordinate point whose flatness determined in step S14 does not satisfy the predetermined flatness. The operator moves the indenter 40 above the coordinate point and then moves the indenter 40 downward to apply a certain pressure to a coordinate point to change the flatness of the coordinate point. In another example, the operator knows the difference between the measured value of each coordinate point and the predetermined flat value in step S16, and if the difference is greater than a predetermined value, the flatness adjustment is performed on the coordinate point.

The amount of force required for the indenter can be derived from a force application model that can be modeled using mathematical modeling or statistical methods. According to the magnitude of the force to be applied provided by the force application model, the worker can achieve the predetermined force application by setting the contact time of the pressure head with the plate member.

After step S16, the process proceeds to step S12, and the flatness of each coordinate point after the flatness adjustment is measured again, and the process proceeds to step S14 to determine whether the flatness meets the requirements. If yes, the process ends, and if otherwise, the flat head is used for flatness. Adjustment.

In one embodiment, referring to Fig. 5, it is assumed that the predetermined shape of the CVD plate member is curved. Whether it is a new product or a recycled product, the flatness can be adjusted by the following steps: (1) adjusting the flatness of the central portion of the plate member; (2) then adjusting the flatness of the central region and the surrounding region of the plate member. To achieve the predetermined arc requirement. In the flatness adjustment process, multiple indenters may be used for simultaneous pressure application, or a single indenter may be used to apply pressure to different regions in turn.

Prior to step S10, the method of the present disclosure may further comprise the step of heat treating the CVD plate member to relieve its stress. In the case of new products, processing stress tends to remain in the process of processing, which becomes an unstable factor in the flatness treatment, and therefore heat treatment is required. In one example, the CVD plate-like member may be heat-treated at a temperature of 420 ° C for 4 hours and a temperature drop of 6 hours. The case where the stress accumulation of the recycled product is usually not significant, the step of heat treatment can be omitted to improve the flatness processing efficiency.

Prior to the step of performing the heat treatment, the method of the present disclosure may further comprise the step of forming a protective layer on the CVD plate member. CVD plate-like member is aluminum In the case of the material, the aluminum plate may be subjected to a redox reaction to form an aluminum oxide layer thereon to enhance the corrosion resistance.

Prior to the flatness adjustment, the CVD plate member may be cleaned, such as a chemical wash, to remove residual debris thereon to avoid affecting the flatness treatment.

Specifically, in one embodiment, the processing steps of the new product are as follows: the sheet is first processed into a shape similar to a predetermined forming requirement (for example, a curved shape), chemically cleaned, a protective layer is formed on the sheet, and then heat treated. The steps are to relieve the stress, and then the fine flatness adjustment is performed by using steps S10 to S16, and then washed once and then shipped. In one embodiment, the processing steps of the recycled product are as follows: the plate-shaped member is chemically cleaned, and then the flatness adjustment of steps S10 to S16 is performed, and then the cleaning is performed once, that is, the regeneration of the plate-shaped member is completed.

It takes 2 to 3 days to shape a CVD plate member using a conventional warming weight. In terms of the effectiveness of the present technology, for the 8.5th generation diffusion plate, the flatness processing can be completed in only 1/3 of the time of the prior art, and only about 1 for the 6th generation diffusion plate. /6 time. The technology can effectively save time cost and reduce the influence of unstable factors in the prior art.

In the flatness processing method of the plate-like member of the CVD machine of the present disclosure, the flatness processing of the plate-shaped member is performed by the indenter at normal temperature, and the present disclosure can be adopted by a method of heating the weight compared with the prior art. The regenerative time of the CVD component is shortened, the time cost is saved, the manufacturing time of the new CVD component is also reduced, and the technical problem of the plastic formation instability is effectively solved.

The present disclosure has been disclosed in the above preferred embodiments. However, it is not intended to limit the scope of the disclosure, and various modifications and changes can be made without departing from the spirit and scope of the disclosure. Therefore, the scope of protection of this disclosure is subject to the definition of the scope of the patent application.

Claims (13)

A flatness processing method for a plate-shaped member of a chemical vapor deposition (CVD) machine, comprising: (a) drawing a calibration system corresponding to a CVD plate-like member, the coordinate system including a plurality of coordinates (b) measuring the flatness of each coordinate point; (c) determining whether the flatness of each coordinate point conforms to a predetermined flatness; and (d) if the flatness of the respective coordinate point does not conform to the predetermined flatness Then, at a normal temperature, a pressure is applied to the coordinate point where the flatness adjustment is required, and the steps are returned to steps (b) and (c). The method of claim 1, further comprising: (e) if the flatness of the respective coordinate points conforms to the predetermined flatness, the process ends. The method of claim 1, wherein the CVD plate member is selected from the group consisting of a diffuser, a susceptor, and a backing plate. The method of claim 1, wherein prior to the step (a), the method further comprises: heat treating the CVD plate member to relieve stress thereof. The method of claim 4, wherein prior to the step of heat treating, the method further comprises: forming a protective layer on the CVD plate member. The method of claim 5, wherein in the step of forming the protective layer, the protective layer is formed by a redox reaction. The method of claim 1, wherein prior to the step (a), the method further comprises: chemically washing the CVD plate member. The method of claim 1, wherein the step (a) comprises: establishing a coordinate system corresponding to the CVD plate member by a graphic drawing software. The method of claim 8, wherein the step (b) comprises: establishing a flatness distribution of the CVD plate member by the graphic drawing software. The method of claim 1, wherein the step (b) comprises: measuring the flatness of each coordinate point using an infrared level. The method of claim 1, wherein the step (c) comprises: comparing the flatness measurement values of the respective coordinate points measured in the step (b) with the predetermined flatness, thereby determining whether the compliance is met. The predetermined flatness. The method of claim 1, wherein the step (d) comprises: (d1) adjusting a flatness of a central region of the CVD plate member; and (d2) after the step (d1), The flatness adjustment is performed in the central region and the surrounding region of the CVD plate member. The method of claim 1, wherein the indenter is driven by a hydraulic press.