TW201930609A - Soft magnetic alloy and magnetic device - Google Patents

Abstract

A soft magnetic alloy includes a main component of (Fe(1-([alpha]+[beta]))X1[alpha]X2[beta])(1-(a+b+c+d+e))MaBbPcSidCe. X1 is one or more of Co and Ni. X2 is one or more of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, Cr, Bi, N, O, and rare earth elements. M is one or more of Nb, Hf, Zr, Ta, Mo, W, and V. 0.020 ≤ a ≤ 0.14 is satisfied. 0.020 < b ≤ 0.20 is satisfied. 0 ≤ d ≤ 0.060 is satisfied. [alpha] ≥ 0 is satisfied. [beta] ≥ 0 is satisfied. 0 ≤ [alpha]+[beta] ≤ 0.50 is satisfied. c and e are within a predetermined range. The soft magnetic alloy has a nanohetero structure or a structure of Fe based nanocrystallines.

Description

Soft magnetic alloy and magnetic parts

The present invention relates to a soft magnetic alloy and a magnetic member.

In recent years, low power consumption and high efficiency have been demanded in electronics, information, and communication equipment. In addition, the above requirements have become stronger for low-carbon society. Therefore, for power supply circuits such as electronics, information, and communication equipment, reduction in energy loss and improvement in power supply efficiency are also required. Further, the magnetic core of the magnetic element used in the power supply circuit requires an increase in saturation magnetic flux density, a decrease in core loss, and an increase in magnetic permeability. When the core loss is reduced, the loss of electric energy is reduced, and if the magnetic permeability is increased, the magnetic element can be miniaturized, so that high efficiency and energy saving can be achieved.

Patent Document 1 describes a soft magnetic amorphous alloy of Fe-BM (M=Ti, Zr, Hf, V, Nb, Ta, Mo, W). The soft magnetic amorphous alloy has good soft magnetic properties such as saturation magnetic flux density higher than that of commercially available amorphous Fe.
[Previous Technical Literature]
[Patent Literature]

Patent Document 1: Japanese Patent No. 3342767

[Problems to be solved by the invention]

Further, as a method of reducing the core loss of the above-described magnetic core, it is considered to reduce the coercive force of the magnetic body constituting the magnetic core.

In the Fe-based soft magnetic alloy of Patent Document 1, it is described that soft magnetic properties can be improved by depositing a fine crystal phase. However, at present, soft magnetic alloys are required to maintain high magnetic permeability up to high frequencies in addition to high soft magnetic properties.

An object of the present invention is to provide a soft magnetic alloy having a high electrical resistivity and a high saturation magnetic flux density, a low coercive force, and a high magnetic permeability even at a high frequency.
[Technical solution for solving the problem]

In order to achieve the above object, the soft magnetic alloy of the first aspect of the present invention is composed of a composition formula (Fe _(1-(α+β)) X1 _α X2 _β ) _{(1-(a+b+c+d+e) )} soft magnetic alloy the main component _{M a B b P c Si d} C e constituted configuration, wherein,
X1 is one or more selected from the group consisting of Co and Ni,
X2 is one or more selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, Cr, Bi, N, O, and rare earth elements.
M is one or more selected from the group consisting of Nb, Hf, Zr, Ta, Mo, W, and V,
0.020 ≤ a ≤ 0.14,
0.020<b≤0.20,
0.040<c≤0.15,
0≤d≤0.060,
0≤e≤0.030,
Α≥0,
Β≥0,
0 ≤ α + β ≤ 0.50,
A nano-hetero structure having initial crystallites present in the amorphous.

In order to achieve the above object, the soft magnetic alloy of the second aspect of the present invention is composed of a composition formula (Fe _(1-(α+β)) X1 _α X2 _β ) _{(1-(a+b+c+d+e) )} soft magnetic alloy the main component _{M a B b P c Si d} C e is constituted of the configuration, wherein,
X1 is one or more selected from the group consisting of Co and Ni,
X2 is one or more selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, Cr, Bi, N, O, and rare earth elements.
M is one or more selected from the group consisting of Nb, Hf, Zr, Ta, Mo, W, and V,
0.020 ≤ a ≤ 0.14,
0.020<b≤0.20,
0<c≤0.040,
0≤d≤0.060,
0.0005<e<0.0050,
Α≥0,
Β≥0,
0 ≤ α + β ≤ 0.50,
A nano-heterostructure having initial crystallites present in the amorphous.

In the soft magnetic alloy according to the first aspect and the second aspect of the present invention, the initial crystallite may have an average particle diameter of 0.3 to 10 nm.

In order to achieve the above object, the soft magnetic alloy of the third aspect of the present invention is composed of a composition formula (Fe _(1-(α+β)) X1 _α X2 _β ) _{(1-(a+b+c+d+e) )} soft magnetic alloy the main component _{M a B b P c Si d} C e is constituted of the configuration, wherein,
X1 is one or more selected from the group consisting of Co and Ni,
X2 is one or more selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, Cr, Bi, N, O, and rare earth elements.
M is one or more selected from the group consisting of Nb, Hf, Zr, Ta, Mo, W, and V,
0.020 ≤ a ≤ 0.14,
0.020<b≤0.20,
0.040<c≤0.15,
0≤d≤0.060,
0≤e≤0.030,
Α≥0,
Β≥0,
0 ≤ α + β ≤ 0.50,
The soft magnetic alloy has a structure composed of Fe-based crystals.

In order to achieve the above object, the soft magnetic alloy of the fourth aspect of the present invention is composed of a composition formula (Fe _(1-(α+β)) X1 _α X2 _β ) _{(1-(a+b+c+d+e) )} soft magnetic alloy the main component _{M a B b P c Si d} C e is constituted of the configuration, wherein,
X1 is one or more selected from the group consisting of Co and Ni,
X2 is one or more selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, Cr, Bi, N, O, and rare earth elements.
M is one or more selected from the group consisting of Nb, Hf, Zr, Ta, Mo, W, and V,
0.020 ≤ a ≤ 0.14,
0.020<b≤0.20,
0<c≤0.040,
0≤d≤0.060,
0.0005<e<0.0050,
Α≥0,
Β≥0,
0 ≤ α + β ≤ 0.50,
The soft magnetic alloy has a structure composed of Fe-based crystals.

In the soft magnetic alloy according to the third aspect and the fourth aspect of the present invention, the Fe-Nano crystal may have an average particle diameter of 5 to 30 nm.

The soft magnetic alloy according to the first aspect of the present invention has the above-described characteristics, whereby the soft magnetic alloy of the third aspect of the present invention can be easily obtained by heat treatment. The soft magnetic alloy according to the second aspect of the present invention has the above-described characteristics, whereby the soft magnetic alloy of the fourth aspect of the present invention can be easily obtained by heat treatment. Further, the soft magnetic alloy of the third aspect and the soft magnetic alloy of the fourth aspect have high resistivity, high saturation magnetic flux density, and low coercive force, and can maintain high magnetic permeability μ ́ up to high frequencies. Soft magnetic alloy. In addition, μ ́ is the real part of the complex magnetic permeability.

The following description regarding the soft magnetic alloy of the present invention is common to the first to fourth aspects.

In the soft magnetic alloy of the present invention, 0.73 ≤ 1-(a + b + c + d + e) ≤ 0.95 may also be used.

In the soft magnetic alloy of the present invention, 0 ≤ α {1 - (a + b + c + d + e)} ≤ 0.40.

In the soft magnetic alloy of the present invention, α = 0 may also be used.

In the soft magnetic alloy of the present invention, 0 ≤ β {1 - (a + b + c + d + e)} ≤ 0.030.

In the soft magnetic alloy of the present invention, β = 0 can also be used.

In the soft magnetic alloy of the present invention, α = β = 0 may also be used.

The soft magnetic alloy of the present invention may also have a thin strip shape.

The soft magnetic alloy of the present invention may also be in the form of a powder.

Further, the magnetic member of the present invention comprises the above-described soft magnetic alloy.

Hereinafter, the first embodiment to the fifth embodiment of the present invention will be described.

(First embodiment)
The soft magnetic alloy of the present embodiment is composed of a composition formula (Fe _(1-(α+β)) X1 _α X2 _β ) _{(1-(a+b+c+d+e))} M _a B _b P _c Si a soft magnetic alloy composed of a main component composed of _d C _e ,
X1 is one or more selected from the group consisting of Co and Ni,
X2 is one or more selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, Cr, Bi, N, O, and rare earth elements.
M is one or more selected from the group consisting of Nb, Hf, Zr, Ta, Mo, W, and V,
0.020 ≤ a ≤ 0.14,
0.020<b≤0.20,
0.040<c≤0.15,
0≤d≤0.060,
0≤e≤0.030,
Α≥0,
Β≥0,
0 ≤ α + β ≤ 0.50,
A nano-heterostructure having initial crystallites present in the amorphous.

When the soft magnetic alloy (the soft magnetic alloy of the first aspect of the present invention) is heat-treated, it is easy to precipitate Fe-Nano crystals in the soft magnetic alloy. In other words, the soft magnetic alloy described above is easily used as a starting material of a soft magnetic alloy (soft magnetic alloy of the third aspect of the present invention) which precipitates Fe-based crystals. Further, the initial crystallites preferably have an average particle diameter of 0.3 to 10 nm.

The soft magnetic alloy of the third aspect of the present invention has the same main component as the soft magnetic alloy of the first aspect, and has a structure composed of Fe-based nanocrystals.

The Fe-based nanocrystals refer to crystals having a particle size of nanometer order and a crystal structure of Fe of bcc (body-centered cubic lattice structure). In the present embodiment, it is preferred to precipitate Fe-Nano crystals having an average particle diameter of 5 to 30 nm. Such a soft magnetic alloy in which Fe-based nanocrystals are precipitated has a high saturation magnetic flux density and a low coercive force.

Hereinafter, each component of the soft magnetic alloy of the present embodiment will be described in detail.

M is at least one selected from the group consisting of Nb, Hf, Zr, Ta, Mo, W, and V.

The content (a) of M satisfies 0.020 ≤ a ≤ 0.14. The content (a) of M is preferably 0.040 ≤ a ≤ 0.10, more preferably 0.050 ≤ a ≤ 0.080. In the case where a is small, a crystal phase composed of crystals having a particle diameter of more than 30 nm is likely to be generated in the soft magnetic alloy. In the case where a crystal phase is generated, Fe-nano crystals cannot be precipitated by heat treatment. Further, the resistivity of the soft magnetic alloy tends to be low, the coercive force tends to be high, and the magnetic permeability μ ́ tends to be low. In the case where a is large, the saturation magnetic flux density of the soft magnetic alloy is liable to lower.

The content (b) of B satisfies 0.020 < b ≤ 0.20. Further, it may be 0.025 ≤ b ≤ 0.20, preferably 0.060 ≤ b ≤ 0.15, and more preferably 0.080 ≤ b ≤ 0.12. In the case where b is small, a crystal phase composed of crystals having a particle diameter of more than 30 nm is likely to be generated in the soft magnetic alloy. In the case where a crystal phase is generated, Fe-nano crystals cannot be precipitated by heat treatment. Further, the resistivity of the soft magnetic alloy tends to be low, the coercive force is liable to become high, and the magnetic permeability μ ́ is likely to become low. In the case where b is large, the saturation magnetic flux density of the soft magnetic alloy is liable to lower.

The content (c) of P satisfies 0.040 < c ≤ 0.15. Further, it may be 0.041 ≤ c ≤ 0.15, preferably 0.045 ≤ c ≤ 0.10, and more preferably 0.050 ≤ c ≤ 0.070. By including P in the above range, particularly in the range of c>0.040, the resistivity of the soft magnetic alloy is improved and the coercive force is lowered. Further, by increasing the resistivity of the soft magnetic alloy, it is possible to maintain a high magnetic permeability μ ́ up to a higher frequency. In the case where c is small, it is difficult to obtain the above effects. In the case where c is large, the saturation magnetic flux density of the soft magnetic alloy is liable to lower.

The content (d) of Si satisfies 0 ≤ d ≤ 0.060. That is, Si may not be contained. Further, it is preferably 0.005 ≤ d ≤ 0.030, and more preferably 0.010 ≤ d ≤ 0.020. By containing Si, the resistivity of the soft magnetic alloy is particularly easily increased, and the coercive force is easily lowered. Further, by increasing the electrical resistivity of the soft magnetic alloy, it is possible to maintain a high magnetic permeability μ ́ even at a high frequency. In the case where d is large, the coercive force of the soft magnetic alloy increases instead.

The content (e) of C satisfies 0 ≤ e ≤ 0.030. That is, C may not be included. Further, it is preferably 0.001 ≤ e ≤ 0.010, and more preferably 0.001 ≤ e ≤ 0.005. By containing C, the coercive force of the soft magnetic alloy is particularly easily lowered, and it becomes easy to maintain the high magnetic permeability μ ́ up to a high frequency. In the case where e is large, the resistivity of the soft magnetic alloy is lowered, and the coercive force is increased instead. Furthermore, it becomes difficult to maintain the high magnetic permeability μ ́ up to a high frequency.

The content of Fe (1-(a+b+c+d+e)) is not particularly limited, but is preferably 0.73 ≤ (1-(a+b+c+d+e)) ≤ 0.95. By setting (1-(a+b+c+d+e)) in the above range, it becomes difficult to produce a crystal phase composed of a crystal having a particle diameter of more than 30 nm. Further, it becomes easy to obtain a soft magnetic alloy which precipitates Fe-based crystals.

Further, in the soft magnetic alloy of the present embodiment, a part of Fe may be replaced by X1 and/or X2.

X1 is one or more selected from the group consisting of Co and Ni. Regarding the content of X1, α=0 may also be used. That is, X1 may not be included. Further, the number of atoms in the entire composition is 100 at%, and the number of atoms of X1 is preferably 40 at% or less. That is, it is preferable to satisfy 0 ≤ α {1 - (a + b + c + d + e)} ≤ 0.40.

X2 is at least one selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, Cr, Bi, N, O, and rare earth elements. Regarding the content of X2, β = 0 may also be used. That is, X2 may not be included. Further, the number of atoms in the entire composition is 100 at%, and the number of atoms of X2 is preferably 3.0 at% or less. That is, it is preferable to satisfy 0 ≤ β {1 - (a + b + c + d + e)} ≤ 0.030.

The range of the substitution amount in which Fe is substituted with X1 and/or X2 is set to be half or less of Fe based on the atomic number. That is, it is set to 0 ≤ α + β ≤ 0.50. In the case of α + β &gt; 0.50, it is difficult to obtain the soft magnetic alloy of the third aspect of the present invention by heat treatment.

Further, the soft magnetic alloy of the present embodiment may contain an element other than the above as an unavoidable impurity. For example, it may contain 0.1% by weight or less based on 100% by weight of the soft magnetic alloy.

Hereinafter, a method of producing a soft magnetic alloy will be described.

The method for producing the soft magnetic alloy is not particularly limited. For example, there is a method of manufacturing a thin strip of a soft magnetic alloy by a single roll method. Moreover, the thin strip can also be a continuous thin strip.

In the single roll method, first, a pure metal of each metal element contained in the finally obtained soft magnetic alloy is prepared and weighed so as to have the same composition as the finally obtained soft magnetic alloy. Then, the pure metal of each metal element is melted and mixed to prepare a master alloy. Further, the method for dissolving the pure metal is not particularly limited, and for example, there is a method in which a vacuum is applied to a chamber and then melted by high-frequency heating. In addition, the master alloy and the finally obtained soft magnetic alloy generally have the same composition.

Next, the produced master alloy is heated and melted to obtain a molten metal (fused metal). The temperature of the molten metal is not particularly limited, but can be, for example, 1200 to 1500 °C.

Fig. 1 is a schematic view showing an apparatus used in the single roll method of the embodiment. In the single roll method of the present embodiment, the molten metal 22 is ejected and supplied from the nozzle 21 to the roller 23 that rotates in the direction of the arrow from the nozzle 21, whereby the thin strip 24 is manufactured in the rotation direction of the roller 23. Further, in the present embodiment, the material of the roller 23 is not particularly limited. For example, a roller composed of Cu can be used.

On the other hand, Fig. 2 shows a schematic view of an apparatus used in a conventional single roll method. Inside the chamber 35, the molten metal 32 is ejected and supplied from the nozzle 31 to the roller 33 that rotates in the direction of the arrow, whereby the thin strip 34 is manufactured in the rotational direction of the roller 33.

Conventionally, in the single roll method, it is considered that it is preferable to increase the cooling rate to rapidly cool the molten metal, and it is considered that it is preferable to increase the cooling rate by extending the contact time of the molten metal with the roll. Further, it is considered to be preferable to increase the cooling rate by enlarging the temperature difference between the molten metal and the roll. Therefore, the temperature of the roll is generally considered to be preferably set to about 5 to 30 °C.

The inventors of the present invention further extend the contact time of the roller 23 with the thin strip 24 by rotating in the opposite direction to the rotation direction of the normal roller as shown in FIG. 1, even if the temperature of the roller 23 is raised to about 50 to 70 ° C. The ribbon 24 can be cooled sharply. In the soft magnetic alloy having the composition of the first embodiment, the temperature of the roller 23 is increased more than in the related art, and the time during which the roller 23 is in contact with the thin strip 24 is further extended, thereby improving the uniformity of the thin strip 24 after cooling and becoming difficult. A crystal phase composed of crystals having a particle diameter of more than 30 nm is produced. As a result, in the conventional method, even if a composition of a crystal phase composed of a crystal having a particle diameter of more than 30 nm is generated, a soft magnetic alloy which does not contain a crystal phase composed of a crystal having a particle diameter of more than 30 nm can be formed. Further, as shown in Fig. 1, when the temperature of the roller is 5 to 30 ° C as usual, while the temperature of the roller is rotated in the opposite direction to the rotation direction of the normal roller, the ribbon 24 is immediately peeled off from the roller 23, and is not obtained. The effect of rotating it in the opposite direction.

In the single roll method, the thickness of the obtained thin strip 24 can be adjusted mainly by adjusting the rotational speed of the roller 23, but the thinning can be adjusted, for example, by adjusting the interval between the nozzle 21 and the roller 23 or the temperature of the molten metal. The thickness of the belt 24. The thickness of the thin strip 24 is not particularly limited, but can be, for example, 15 to 30 μm.

The vapor pressure inside the chamber 25 is not particularly limited. For example, Ar gas having undergone dew point adjustment may be used, and the vapor pressure inside the chamber 25 may be 11 hPa or less. Further, the lower limit of the vapor pressure inside the chamber 25 is not particularly present. It is also possible to fill the Ar gas having the dew point adjustment and set the vapor pressure to 1 hPa or less, or to set the vapor pressure to 1 hPa or less in a state close to the vacuum.

The thin strip 24 of the soft magnetic alloy of the present embodiment contains an amorphous material which does not contain crystals having a particle diameter of more than 30 nm. Moreover, there is a nano-heterostructure in which initial crystallites are present in the amorphous. When the soft magnetic alloy described later is subjected to heat treatment described later, Fe-Nano crystals are easily precipitated.

Further, a method of confirming whether or not the crystal ribbon has a crystal grain having a particle diameter of more than 30 nm is not particularly limited. For example, the presence or absence of crystals having a particle diameter of more than 30 nm can be confirmed by a normal X-ray diffraction measurement.

Further, the method of observing the presence or absence of the above-mentioned initial crystallites and the average particle diameter is not particularly limited, but for example, a sample which is flaky by ion milling can be obtained by using a transmission electron microscope. Confirmation of the selected area diffracted image, nanobeam diffraction image, brightfield image or high resolution image. In the case where a selective diffraction image or a nanobeam diffraction image is used, a circular diffraction is formed in the case where the diffraction pattern is amorphous, whereas in the case where it is not amorphous, it is formed. Diffraction spots caused by crystal structure. In addition, when a bright field image or a high-resolution image is used, it is possible to observe the presence or absence of the initial crystallites and the average particle diameter by visual observation at a magnification of 1.00 × 10 ⁵ to 3.00 × 10 ⁵ .

The temperature of the roller, the rotational speed, and the gas atmosphere inside the chamber are not particularly limited. For the purpose of amorphization, the temperature of the roll is preferably set to 4 to 30 °C. The faster the rotation speed of the roll is, the smaller the average grain size of the initial crystallites tends to be. In order to obtain the initial crystallites having an average particle diameter of 0.3 to 10 nm, it is preferably 25 to 30 m/sec. If the cost is taken into consideration, the gas atmosphere inside the chamber is preferably set to the atmosphere.

Hereinafter, a soft magnetic alloy having a Fe-Nano crystal structure is produced by heat-treating a thin strip 24 composed of a soft magnetic alloy having a nano-heterostructure (the soft magnetic alloy of the first aspect of the present invention). A method of a soft magnetic alloy according to a third aspect of the invention.

The heat treatment conditions for producing the soft magnetic alloy of the present embodiment are not particularly limited. The preferred heat treatment conditions vary depending on the composition of the soft magnetic alloy. Generally, a preferred heat treatment temperature is approximately 450 to 650 ° C, and a preferred heat treatment time is approximately 0.5 to 10 hours. However, there are cases where a preferable heat treatment temperature and heat treatment time exist in a place deviating from the above range due to the composition. Further, the gas atmosphere at the time of heat treatment is not particularly limited. It can be carried out in an active gas atmosphere such as in the atmosphere, or in an inert gas atmosphere such as Ar gas.

Further, the calculation method of the average particle diameter of the Fe-based crystals contained in the soft magnetic alloy obtained by the heat treatment is not particularly limited. For example, it can be calculated by observation using a transmission electron microscope. Further, the method of confirming that the crystal structure is bcc (body-centered cubic lattice structure) is also not particularly limited. For example, it can be confirmed using an X-ray diffraction measurement.

Further, as a method of obtaining the soft magnetic alloy of the present embodiment, in addition to the above-described single roll method, there is a method of obtaining a powder of a soft magnetic alloy by, for example, a water atomization method or a gas atomization method. Hereinafter, the gas atomization method will be described.

In the gas atomization method, it is carried out in the same manner as the above-described single roll method to obtain a molten alloy of 1200 to 1500 °C. Then, the molten alloy is sprayed in the chamber to prepare a powder.

At this time, by setting the gas injection temperature to 50 to 200 ° C and setting the vapor pressure in the chamber to 4 hPa or less, it is easy to obtain the above-described preferable nano heterostructure.

After the powder composed of the soft magnetic alloy having a nano-heterostructure is produced by a gas atomization method, the heat treatment is performed at 400 to 600 ° C for 0.5 to 10 minutes, whereby the powders can be prevented from being sintered to each other. The coarsening and the diffusion of the elements promote the thermodynamic equilibrium in a short time, and the strain and stress can be removed, and the Fe-based soft magnetic alloy having an average particle diameter of 10 to 50 nm can be easily obtained.

(Second embodiment)
Hereinafter, a second embodiment of the present invention will be described. Description of the same portions as those of the first embodiment will be omitted.

In the second embodiment, the soft magnetic alloy before the heat treatment is composed only of amorphous material. Even if the soft magnetic alloy before heat treatment is composed only of amorphous, does not contain initial crystallites, and does not have a nano-heterostructure, it can be made into a soft Fe-Nano crystal structure by heat treatment. A magnetic alloy, that is, a soft magnetic alloy of the third aspect of the invention.

However, compared with the first embodiment, it is difficult to precipitate Fe-nano crystals by heat treatment, and it is difficult to control the average particle diameter of Fe-based crystals. Therefore, it is difficult to obtain excellent characteristics as compared with the first embodiment.

(Third embodiment)
Hereinafter, a third embodiment of the present invention will be described. Description of the same portions as those of the first embodiment will be omitted.

The soft magnetic alloy of the present embodiment is composed of a composition formula (Fe _(1-(α+β)) X1 _α X2 _β ) _{(1-(a+b+c+d+e))} M _a B _b P _c Si a soft magnetic alloy composed of a main component composed of _d C _e ,
X1 is one or more selected from the group consisting of Co and Ni,
X2 is one or more selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, Cr, Bi, N, O, and rare earth elements.
M is one or more selected from the group consisting of Nb, Hf, Zr, Ta, Mo, W, and V,
0.020 ≤ a ≤ 0.14,
0.020<b≤0.20,
0<c≤0.040,
0≤d≤0.060,
0.0005<e<0.0050,
Α≥0,
Β≥0,
0 ≤ α + β ≤ 0.50,
A nano-heterostructure having initial crystallites present in the amorphous.

When the soft magnetic alloy (the soft magnetic alloy of the second aspect of the present invention) described above is subjected to heat treatment, Fe-based nanocrystals are easily precipitated in the soft magnetic alloy. In other words, the soft magnetic alloy described above is easily used as a starting material of a soft magnetic alloy (the soft magnetic alloy of the fourth aspect of the present invention) in which Fe nanocrystals are crystallized. Further, the initial crystallites preferably have an average particle diameter of 0.3 to 10 nm.

The soft magnetic alloy of the fourth aspect of the present invention has the same main component as the soft magnetic alloy of the second aspect, and has a structure composed of Fe-based nanocrystals.

The content (c) of P satisfies 0 < c ≤ 0.040. Further, it is preferably 0.010 ≤ c ≤ 0.040, and more preferably 0.020 ≤ c ≤ 0.030. By containing P in the above range, the resistivity of the soft magnetic alloy is improved, and the coercive force is lowered. Further, by increasing the electrical resistivity of the soft magnetic alloy, it is possible to maintain a high magnetic permeability μ ́ up to a higher frequency. In the case of c=0, the above effects are not obtained.

The content (e) of C satisfies 0.0005 < e < 0.0050. Further, it is preferably 0.0006 ≤ e ≤ 0.0045, and more preferably 0.0020 ≤ e ≤ 0.0045. By making e more than 0.0005, the resistivity is easily increased, and the coercive force of the soft magnetic alloy is particularly easily lowered, and it becomes easy to maintain the high magnetic permeability μ ́ up to a high frequency. In the case where e is too large, the saturation magnetic flux density is lowered.

X2 is preferably one or more selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, Bi, N, O, and rare earth elements. X2 is one or more selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, Bi, N, O, and rare earth elements, and it is easy to obtain that the particle diameter is larger than A soft magnetic alloy of a crystal phase composed of 30 nm crystals (soft magnetic alloy of the second aspect of the present invention). Further, by subjecting the soft magnetic alloy to heat treatment, it is easy to obtain a soft magnetic alloy having a structure composed of Fe-based nanocrystals (a soft magnetic alloy according to a fourth aspect of the present invention).

(Fourth embodiment)
Hereinafter, a fourth embodiment of the present invention will be described. Description of the same portions as those of the third embodiment will be omitted.

In the fourth embodiment, the soft magnetic alloy before the heat treatment is composed only of amorphous material. Even if the soft magnetic alloy before heat treatment is composed only of amorphous, does not contain initial crystallites, and does not have a nano-heterostructure, it can be made into a soft Fe-Nano crystal structure by heat treatment. A magnetic alloy, that is, a soft magnetic alloy of the fourth aspect of the invention.

However, compared with the third embodiment, it is difficult to precipitate Fe-based crystals by heat treatment, and it is difficult to control the average particle diameter of Fe-based crystals. Therefore, it is difficult to obtain excellent characteristics as compared with the third embodiment.

(Fifth Embodiment)
The magnetic member according to the fifth embodiment, in particular, the magnetic core and the inductor are obtained from the soft magnetic alloy of any of the first to fourth embodiments. Hereinafter, a method of obtaining the magnetic core and the inductor of the fifth embodiment will be described. However, the method of obtaining the magnetic core and the inductor from the soft magnetic alloy is not limited to the following method. Further, as the use of the magnetic core, in addition to the inductor, a transformer, a motor, and the like may be mentioned.

As a method of obtaining a magnetic core from a thin-band-shaped soft magnetic alloy, for example, a method of winding a thin-band soft magnetic alloy or a method of laminating can be mentioned. When laminating a thin strip-shaped soft magnetic alloy via an insulator, a magnetic core having further improved characteristics can be obtained.

As a method of obtaining a magnetic core from a powder-shaped soft magnetic alloy, for example, a method of molding with a mold after mixing with a binder is suitably employed. Further, before the mixture with the binder, the surface of the powder is subjected to an oxidation treatment, an insulating coating, or the like, whereby the magnetic core having a higher specific resistance and being more suitable for the high-frequency band region is obtained.

The molding method is not particularly limited, and molding using a mold, press molding, or the like can be exemplified. The kind of the binder is not particularly limited, and a silicone resin can be exemplified. The mixing ratio of the soft magnetic alloy powder to the binder is also not particularly limited. For example, 1 to 10% by mass of a binder is mixed with respect to 100% by mass of the soft magnetic alloy powder.

For example, a binder of 1 to 5% by mass is mixed with 100% by mass of the soft magnetic alloy powder, and compression molding is carried out using a mold, whereby a space factor (powder filling ratio) of 70% or more can be obtained, and 1.6 × is applied. The magnetic flux density at a magnetic field of 10 ⁴ A/m is 0.45 T or more, and the magnetic resistivity is 1 Ω ‧ cm or more. The above characteristics are equivalent to or higher than those of a normal ferrite core.

In addition, for example, by mixing 1 to 3% by mass of the binder with respect to 100% by mass of the soft magnetic alloy powder, and performing compression molding using a mold under a temperature condition of a softening point or higher of the binder, a duty factor can be obtained. When the magnetic field of 1.6 × 10 ⁴ A/m is applied, the magnetic flux density is 0.9 T or more and the resistivity is 0.1 Ω ‧ cm or more. The above characteristics are superior to those of a conventional powder magnetic core.

Further, the molded body constituting the magnetic core described above is subjected to heat treatment after the strain heat treatment as the strain relief heat treatment, whereby the core loss is further reduced and the usefulness is improved. Further, the core loss of the magnetic core is lowered by lowering the coercive force of the magnetic body constituting the magnetic core.

Further, an inductance component is obtained by winding the magnetic core. The method of implementing the winding and the method of manufacturing the inductor component are not particularly limited. For example, a method of winding a winding of at least one turn or more with respect to a magnetic core manufactured by the above method can be mentioned.

Further, when soft magnetic alloy particles are used, there is a method of manufacturing an inductance component by performing press molding and integration in a state in which a winding coil is incorporated in a magnetic body. In this case, it is easy to obtain an inductance component corresponding to a high frequency and a large current.

Further, when a soft magnetic alloy particle is used, a soft magnetic alloy paste in which a binder and a solvent are added to a soft magnetic alloy particle, and a binder and a solvent are added to a conductor metal for a coil The conductor paste of the body is alternately printed and laminated, and then heated and fired, whereby an inductance component can be obtained. Alternatively, a soft magnetic alloy sheet is produced using a soft magnetic alloy paste, and a conductor paste is printed on the surface of the soft magnetic alloy sheet, and these layers are laminated and fired, whereby an inductance component in which the coil is built in the magnetic body can be obtained. .

When an inductor component is produced using soft magnetic alloy particles, in order to obtain excellent Q characteristics, it is preferable to use a soft magnetic particle having a mesh diameter of 45 μm or less and a center particle diameter (D50) of 30 μm or less in terms of a maximum particle diameter. Alloy powder. In order to make the maximum particle diameter 45 μm or less in terms of the mesh diameter, a sieve having a mesh size of 45 μm may be used, and only the soft magnetic alloy powder passing through the sieve may be used.

When the soft magnetic alloy powder having a larger maximum particle diameter is used, the Q value in the high-frequency region tends to decrease, and in particular, when a soft magnetic alloy powder having a maximum particle diameter of more than 45 μm in mesh diameter is used, sometimes The Q value in the high frequency region is greatly reduced. However, when the Q value in the high frequency region is not emphasized, the soft magnetic alloy powder having a large variation can be used. Since the soft magnetic alloy powder having a large deviation can be produced at a low price, when a soft magnetic alloy powder having a large variation is used, the cost can be reduced.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments.

The shape of the soft magnetic alloy is not particularly limited. As described above, the film shape or the powder shape is exemplified, but in addition to this, a block shape or the like can also be considered.

The use of the soft magnetic alloy (Fe-nanocrystalline alloy) of the first to fourth embodiments is not particularly limited. For example, a magnetic member can be cited, and among them, a magnetic core is particularly mentioned. It can be applied as a core for inductors, especially for power inductors. The soft magnetic alloy of the present embodiment can be applied to a thin film inductor or a magnetic head in addition to a magnetic core.
[Examples]

Hereinafter, the present invention will be specifically described based on examples.

(Experimental Example 1)
The raw material metal was weighed and melted by high-frequency heating to form a master alloy in such a manner as to be an alloy composition of each of the examples and the comparative examples shown in the following table. Further, the compositions of Sample Nos. 9 and 10 are generally known compositions of amorphous alloys.

Then, the produced mother alloy was heated and melted to obtain a molten metal at 1,250 ° C, and then the metal was sprayed by a single roll method in which the roll was rotated at a rotation speed of 25 m/sec. Thin strips. Further, the material of the roller is set to Cu.

In sample Nos. 1 to 4, the rolls were rotated in the direction shown in Fig. 2, and the roll temperature was set to 30 °C. Further, in sample Nos. 1 to 4, the thickness of the obtained ribbon was set to 20 μm to 30 μm by adjusting the rotational speed of the roller, the width of the ribbon was made 4 mm to 5 mm, and the length of the ribbon was made into several tens. m.

In sample Nos. 5 to 10, the rolls were rotated in the direction shown in Fig. 1, and the roll temperature was set to 70 °C. Further, in Sample Nos. 5 to 10, the thickness of the obtained ribbon was set by a pressure difference of 105 kPa in the chamber and the injection nozzle, a nozzle diameter of 5 mm, a fluidization amount of 50 g, and a roll diameter of 300 mm. In the range of 20 μm to 30 μm, the width of the thin strip is made 4 mm to 5 mm, and the length of the thin strip is made tens of meters.

In the sample Nos. 7a and 8a, the roller was rotated in the direction shown in Fig. 1, and the roller temperature was set to 30 °C. Further, in Sample Nos. 7a and 8a, the thickness of the obtained ribbon was set by a pressure difference of 105 kPa in the chamber and the injection nozzle, a nozzle diameter of 5 mm, a fluidization amount of 50 g, and a roll diameter of 300 mm. In the range of 20 μm to 30 μm, the width of the thin strip is made 4 mm to 5 mm, and the length of the thin strip is made tens of meters.

X-ray diffraction measurement was performed on each of the obtained ribbons, and the presence or absence of crystals having a particle diameter of more than 30 nm was confirmed. Then, when there is no crystal having a particle diameter of more than 30 nm, it is made of an amorphous phase, and when crystals having a particle diameter of more than 30 nm are present, it is composed of a crystal phase. Further, all of the examples except for the sample No. 135 described later had a nano-heterostructure in which the initial crystallites existed in the amorphous state.

Then, the strips of the respective examples and comparative examples were subjected to heat treatment under the conditions shown in the following tables. For each of the thin strips after the heat treatment, the resistivity, the saturation magnetic flux density, the coercive force, and the magnetic permeability μ ́ were measured. The specific resistance (ρ) was measured by the resistivity measurement by the four-probe method. The saturation magnetic flux density (Bs) was measured using a vibrating sample magnetometer (VSM) at a magnetic field of 1000 kA/m. The coercive force (Hc) was measured using a direct current BH tracker at a magnetic field of 5 kA/m. The magnetic permeability μ ́ was measured while changing the frequency using an impedance analyzer, and was evaluated at a frequency at which the magnetic permeability μ ́ became 10000 (hereinafter, also referred to as a specific frequency f). In the first to third examples, the specific resistance was 110 μΩcm or more, ○, 100 μΩcm or more and less than 110 μΩcm were set to ○, and less than 100 μΩcm was set to ×. Further, the evaluation was performed from ◎, ○, and × in order of high to low, and the case of ◎ or ○ was considered to be good. In terms of the saturation magnetic flux density, 1.35 T or more was set to be good, and 1.40 T or more was set to be further good. The coercive force is preferably 3.0 A/m or less, more preferably 2.5 A/m or less, more preferably 2.0 A/m or less, and most preferably 1.5 A/m or less. The magnetic permeability μ ́ is good for the magnetic permeability μ ́ when the specific frequency f is 100 kHz or more.

Further, in the examples shown below, all of the Fe-based nanoparticles having an average particle diameter of 5 to 30 nm and a crystal structure of bcc were confirmed by X-ray diffraction measurement and observation using a transmission electron microscope, unless otherwise specified. crystallization. Further, it has been confirmed by ICP analysis that there is no change in the alloy composition before and after the heat treatment.

[Table 1]

According to Table 1, the content of each component was within a predetermined range, and the characteristics of sample numbers 7 and 8 which appropriately controlled the roll contact distance and the roll temperature were all good. On the other hand, the content of each component (particularly, the content of P) deteriorated in any of the sample numbers 1, 2, 5, 6, 9, and 10 outside the predetermined range. Further, even if the content of each component is within a predetermined range, the thin strips before the heat treatment of sample numbers 3, 4, 7a, and 8a which do not appropriately control the roll contact distance and/or the roll temperature are composed of a crystal phase, and the resistance after heat treatment The rate becomes smaller and the coercive force becomes significantly larger. The magnetic permeability μ ́ is significantly smaller, and there is no specific frequency f.

(Experimental Example 2)
In the experimental example 2, the raw material metal was weighed so as to have the alloy composition of each of the examples and the comparative examples shown in the following table, and was melted by high-frequency heating to prepare a master alloy, and the other example was the same as in Experimental Example 1. The same conditions as in sample numbers 5 to 10 were carried out.

[Table 2]

[table 3]

[Table 4]

Table 2 describes examples in which the content (a) of M, the content (b) of B, the content (c) of P, the content (d) of Si, and the content (e) of C are changed. Further, the type of M is set to Nb. The specific resistance ρ, the saturation magnetic flux density Bs, the coercive force Hc, and the magnetic permeability μ ́ of the examples in which the content of each component is within a predetermined range are good.

The content of M (a) is too small. The thin band before the heat treatment of sample No. 12 is composed of a crystal phase, and the electric resistivity ρ after heat treatment is small, and the coercive force Hc is remarkably large. The magnetic permeability μ ́ is significantly smaller, and there is no specific frequency f. The content of M (a) is too large, and the saturation magnetic flux density Bs of sample No. 20 is lowered.

The content of B (b) is too small. The thin band before the heat treatment of sample No. 21 is composed of a crystal phase, and the electric resistivity ρ after heat treatment is small, and the coercive force Hc is remarkably large. The magnetic permeability μ ́ is significantly smaller, and there is no specific frequency f. The content of B (b) is too large, and the saturation magnetic flux density Bs of sample No. 28 is lowered.

When the content (P) of P is too small, the resistivity ρ after heat treatment of the sample No. 29 is small, and the coercive force Hc is increased. Further, the magnetic permeability μ ́ becomes small, and the specific frequency f becomes small. The saturation magnetic flux density Bs of the sample number 36 where the content of P (c) is too large is lowered.

The coercive force Hc after heat treatment of the sample No. 47 having an excessive Si content (d) is large. The resistivity ρ after heat treatment of the sample No. 41 having an excessive content of C (e) is small, and the coercive force Hc is increased. Further, the magnetic permeability μ ́ becomes small, and the specific frequency f becomes small.

Table 3 is an example in which the types of M were changed for sample numbers 11, 14, and 18. Sample Nos. 53 to 61 are examples in which the type of M was changed for sample number 14. Sample Nos. 62 to 70 are examples in which the type of M was changed for sample No. 11. Sample Nos. 71 to 79 are examples in which the type of M was changed for sample No. 18.

According to Table 3, even if the kind of M is changed, good characteristics are exhibited.

Table 4 is an example in which a part of Fe of sample No. 11 was substituted with X1 and/or X2.

According to Table 4, even if a part of Fe is substituted with X1 and/or X2, it exhibits good characteristics.

(Experimental Example 3)
In Experimental Example 3, with respect to sample No. 11, the metal temperature in the molten state and the heat treatment conditions after the ribbon production were appropriately changed, and the average particle diameter of the initial crystallites and the average particle diameter of the Fe-based nanocrystalline alloy were changed. The results are shown in Table 5. Further, the magnetic permeability μ ́ of the samples described in Table 5 was all good.

[table 5]

According to Table 5, in the case where the average crystallite diameter of the initial crystallites is 0.3 to 10 nm and the average particle diameter of the Fe-Nano crystal alloy is 5 to 30 nm, the saturation magnetic flux density Bs is compared with the case where the above range is deviated. Both the coercive force Hc is good.

(Experimental Example 4)
The raw material metal was weighed so as to have an alloy composition of each of the examples and the comparative examples shown in the following table, and was melted by high-frequency heating to prepare a master alloy. Further, Sample Nos. 9 and 10 were the same as Sample Nos. 9 and 10 of Experimental Example 1.

Then, the produced mother alloy was heated and melted, and after the molten metal at 1250 ° C was formed, the metal was sprayed by a single roll method in which the roll was rotated at a rotation speed of 25 m/sec. Thin strips. Further, the material of the roller is set to Cu.

In sample numbers 201 and 202, the rolls were rotated in the direction shown in Fig. 2, and the roll temperature was set to 30 °C. Further, in Sample Nos. 201 and 202, the thickness of the obtained ribbon was 20 μm to 30 μm by the adjustment of the rotational speed of the roller, and the width of the ribbon was 4 mm to 5 mm, and the length of the ribbon was several tens of m.

In the sample numbers 203 to 209, the roller was rotated in the direction shown in Fig. 1, and the roller temperature was 70 °C. Further, in Sample Nos. 203 to 209, the thickness of the obtained ribbon was set to be 105 kPa in the chamber and the injection nozzle, a nozzle diameter of 5 mm, a fluidization amount of 50 g, and a roll diameter of 300 mm. It is about 20 μm to 30 μm, and the width of the thin strip is 4 mm to 5 mm, so that the length of the thin strip is several tens of m.

X-ray diffraction measurement was performed on each of the obtained ribbons, and the presence or absence of crystals having a particle diameter of more than 30 nm was confirmed. Then, when there is no crystal having a particle diameter of more than 30 nm, it is made of an amorphous phase, and when crystals having a particle diameter of more than 30 nm are present, it is composed of a crystal phase. Further, in all the examples except for the sample No. 274 to be described later, there was a nano-heterostructure in which the initial crystallites existed in the amorphous state.

Then, the strips of the respective examples and comparative examples were subjected to heat treatment under the conditions shown in the following tables. For each of the thin strips after the heat treatment, the resistivity, the saturation magnetic flux density, the coercive force, and the magnetic permeability μ ́ were measured. The specific resistance (ρ) was measured by a resistivity measurement by a four-probe method. The saturation magnetic flux density (Bs) was measured using a vibrating sample magnetometer (VSM) at a magnetic field of 1000 kA/m. The coercive force (Hc) was measured using a direct current BH tracker at a magnetic field of 5 kA/m. The magnetic permeability μ ́ was measured while changing the frequency using an impedance analyzer, and was evaluated at a frequency at which the magnetic permeability μ ́ became 10000 (hereinafter, also referred to as a specific frequency f). In the experimental examples 4 to 6, the specific resistance was set to ◎ of 100 μΩcm or more, ○ of 80 μΩcm or more and less than 100 μΩcm, and × of less than 80 μΩcm. Further, the evaluation was performed from ◎, ○, and × in order of high to low, and the case of ◎ or ○ was considered to be good. The saturation magnetic flux density is set to be 1.50 T or more. The coercive force is set to be 4.0 A/m or less. The magnetic permeability μ ́ is good for the magnetic permeability μ ́ when the specific frequency f is 70 kHz or more.

Further, in the examples shown below, all of Fe-Nana having an average particle diameter of 5 to 30 nm and a crystal structure of bcc were confirmed by X-ray diffraction measurement and observation using a transmission electron microscope, unless otherwise specified. Rice crystals. Further, it has been confirmed by ICP analysis that there is no change in the alloy composition before and after the heat treatment.

[Table 6]

According to Table 6, the characteristics of the sample No. 206 in which the content of each component was within a predetermined range and the roll contact distance and the roll temperature were appropriately controlled were all good. On the other hand, the characteristics of each component (particularly, the content of P and/or the content of C) are deteriorated in any of the sample numbers 201 to 205 and 207 to 209 outside the predetermined range.

(Experimental Example 5)
In the experimental example 5, the raw material metal was weighed so as to have the alloy composition of each of the examples and the comparative examples shown in the following table, and was melted by high-frequency heating to prepare a mother alloy. In addition to this, the experimental example 4 was used. The same conditions as sample No. 206 were carried out.

[Table 7]

[Table 8]

[Table 9]

Table 7 shows an example in which the content (a) of M, the content (b) of B, the content (c) of P, the content (d) of Si, and the content (e) of C were changed. Further, the type of M is set to Nb. The specific resistance ρ, the saturation magnetic flux density Bs, the coercive force Hc, and the magnetic permeability μ ́ of the examples in which the content of each component is within a predetermined range are good.

The content of M (a) is too small. The thin band before heat treatment of sample No. 211 is composed of a crystal phase, and the specific resistance ρ after heat treatment is small, and the coercive force Hc is remarkably large. The magnetic permeability μ ́ is significantly smaller, and there is no specific frequency f. The content of M (a) is too large, and the saturation magnetic flux density Bs of sample number 220 is lowered.

The content of B (b) is too small. The thin band before heat treatment of sample No. 221 is composed of a crystal phase, and the specific resistance ρ after heat treatment is small, and the coercive force Hc is remarkably large. The magnetic permeability μ ́ is significantly smaller, and there is no specific frequency f. The content of B (b) is too large, and the saturation magnetic flux density Bs of sample No. 228 is lowered.

In the comparative example containing no P (c = 0) and the comparative example not containing C (e = 0), the specific resistance ρ after heat treatment was small, and the coercive force Hc tends to be large. Further, the magnetic permeability μ ́ becomes small and the specific frequency f tends to be small. In the comparative example in which the content (e) of C is excessively large, in addition to the decrease in the saturation magnetic flux density Bs, the magnetic permeability μ ́ is lowered and the specific frequency f tends to decrease.

The saturation magnetic flux density of the sample No. 252 having an excessive Si content (d) is large.

Table 8 is an example in which the type of M is changed for the sample number 206.

According to Table 8, even if the kind of M is changed, good characteristics are exhibited.

Table 9 is an example in which a part of Fe of sample No. 206 was substituted with X1 and/or X2.

According to Table 9, even if a part of Fe was substituted with X1 and/or X2, it exhibited favorable characteristics.

Further, in each of the samples described in Table 9, a soft magnetic alloy containing no crystal phase composed of a crystal having a particle diameter of more than 30 nm was confirmed for a sample in which a part of Fe was replaced by X2 (the second aspect of the present invention) The soft magnetic alloy) is easy to obtain. Specifically, the thickness of the obtained ribbon is set to be about 40 μm to 50 μm so that a crystal phase composed of a crystal having a particle diameter of more than 30 nm is easily formed. The results are shown in Table 10.

[Table 10]

According to Table 10, for each sample described in Table 9, even if the thickness of the obtained ribbon was about 40 μm to 50 μm, a soft magnetic alloy containing no crystal phase composed of crystal having a particle diameter of more than 30 nm was obtained. .

(Experimental Example 6)
In Experimental Example 6, with respect to sample No. 206, the metal temperature in the molten state and the heat treatment conditions after the ribbon production were appropriately changed, and the average particle diameter of the initial crystallites and the average particle diameter of the Fe-based nanocrystalline alloy were changed. The results are shown in Table 11. Further, all the samples described in Table 11 have good magnetic permeability μ ́.

[Table 11]

According to Table 11, in the case where the average crystallite diameter of the initial crystallites is 0.3 to 10 nm and the average particle diameter of the Fe-based nanocrystalline alloy is 5 to 30 nm, the saturation magnetic flux density is smaller than the case where the above range is deviated. Both Bs and coercive force Hc are good.

21, 31‧‧‧ nozzle

22, 32‧‧‧ molten metal

23, 33‧‧‧ Roll

24, 34‧‧‧ thin strip

25, 35‧‧‧ chamber

26‧‧‧ Stripping gas injection device

Figure 1 is a schematic illustration of a single roll process.

Figure 2 is a schematic illustration of a single roll process.

Claims (9)

A soft magnetic alloy consisting of a composition formula (Fe _(1-(α+β)) X1 _α X2 _β ) _{(1-(a+b+c+d+e))} M _a B _b P _c Si _d a soft magnetic alloy composed of a main component composed of C _e , X1 is selected from one or more selected from the group consisting of Co and Ni, and X 2 is selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, and Cr. One or more of the group consisting of Bi, N, O and rare earth elements, M is selected from one or more of the group consisting of Nb, Hf, Zr, Ta, Mo, W, and V, 0.020 ≤ a ≤ 0.14, 0.020<b≤0.20, 0.040<c≤0.15, 0≤d≤0.060, 0≤e≤0.030, α≥0, β≥0, 0≤α+β≤0.50, having the initial crystallites present in the amorphous Rice hetero-hetero structure. The soft magnetic alloy according to claim 1, wherein the initial crystallite has an average particle diameter of 0.3 to 10 nm. A soft magnetic alloy consisting of a composition formula (Fe _(1-(α+β)) X1 _α X2 _β ) _{(1-(a+b+c+d+e))} M _a B _b P _c Si _d a soft magnetic alloy composed of a main component composed of C _e , X1 is selected from one or more selected from the group consisting of Co and Ni, and X 2 is selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, and Cr. One or more of the group consisting of Bi, N, O and rare earth elements, M is selected from one or more of the group consisting of Nb, Hf, Zr, Ta, Mo, W, and V, 0.020 ≤ a ≤ 0.14, 0.020<b≤0.20, 0<c≤0.040, 0≤d≤0.060, 0.0005<e<0.0050, α≥0, β≥0, 0≤α+β≤0.50, having the initial crystallites present in the amorphous Rice heterostructure. The soft magnetic alloy according to claim 3, wherein the initial crystallite has an average particle diameter of 0.3 to 10 nm. A soft magnetic alloy consisting of a composition formula (Fe _(1-(α+β)) X1 _α X2 _β ) _{(1-(a+b+c+d+e))} M _a B _b P _c Si _d a soft magnetic alloy composed of a main component composed of C _e , X1 is selected from one or more selected from the group consisting of Co and Ni, and X 2 is selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, and Cr. One or more of the group consisting of Bi, N, O and rare earth elements, M is selected from one or more of the group consisting of Nb, Hf, Zr, Ta, Mo, W, and V, 0.020 ≤ a ≤ 0.14, 0.020<b≤0.20, 0.040<c≤0.15, 0≤d≤0.060, 0≤e≤0.030, α≥0, β≥0, 0≤α+β≤0.50, the soft magnetic alloy has a crystal composed of Fe-based nanocrystals Structure. The soft magnetic alloy according to claim 5, wherein the Fe-Nano crystal has an average particle diameter of 5 to 30 nm. A soft magnetic alloy consisting of a composition formula (Fe _(1-(α+β)) X1 _α X2 _β ) _{(1-(a+b+c+d+e))} M _a B _b P _c Si _d a soft magnetic alloy composed of a main component composed of C _e , X1 is one or more selected from the group consisting of Co and Ni, and X2 is selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Cu, Cr. And one or more of the group consisting of Bi, N, O, and a rare earth element, M is one or more selected from the group consisting of Nb, Hf, Zr, Ta, Mo, W, and V, 0.020 ≤ a ≤ 0.14, 0.020<b≤0.20, 0<c≤0.040, 0≤d≤0.060, 0.0005<e<0.0050, α≥0, β≥0, 0≤α+β≤0.50, the soft magnetic alloy described above has a crystal composed of Fe-based nanocrystals Structure. The soft magnetic alloy according to claim 7, wherein the Fe-Nano crystal has an average particle diameter of 5 to 30 nm. A magnetic member comprising the soft magnetic alloy according to any one of claims 1 to 8.