TW201936944A - Soft magnetic alloy and magnetic component - Google Patents

Abstract

Provided is a soft magnetic alloy which has high saturation flux density and low coercivity and is represented by the compositional formula (Fe(1-([alpha]+[beta]))X1[alpha]X2[beta])(1-(a+b+c+d+e+f))MaPbSicCudX3eBf, wherein X1 is at least one element selected from the group consisting of Co and Ni, X2 is at least one element selected from the group consisting of Ti, V, Mn, Ag, Zn, Al, Sn, As, Sb, Bi, and rare earth elements, X3 is at least one element selected from the group consisting of C and Ge, and M is at least one element selected from the group consisting of Zr, Nb, Hf, Ta, Mo, and W, and wherein 0.030 ≤ a ≤ 0.120, 0.010 ≤ b ≤ 0.150, 0 ≤ c ≤ 0.050, 0 ≤ d ≤ 0.020, 0 ≤ e ≤ 0.100, 0 ≤ f ≤ 0.030, [alpha] ≥ 0, [beta] ≥ 0, and 0 ≤ [alpha]+[beta] ≤ 0.55.

Description

Soft magnetic alloy and magnetic parts

The present invention relates to soft magnetic alloys and magnetic parts.

In recent years, nanocrystalline materials have gradually become the soft magnetic material of magnetic parts, especially the mainstream of soft magnetic materials for power inductors. For example, Patent Document 1 describes an Fe-based soft magnetic alloy having a fine crystal grain size. The nanocrystalline material can obtain a high saturation magnetic flux density or the like as compared with a conventional crystalline material such as FeSi or an amorphous material such as FeSiB.

However, with the further advancement of high-frequency and miniaturization of magnetic components, particularly power inductors, a soft magnetic alloy having a core with higher DC superposition characteristics and low core loss (magnetic loss) is required.
[Previous Technical Literature]
[Patent Literature]

Patent Document 1: Japanese Laid-Open Patent Publication No. 2002-322546

[Problems to be solved by the invention]

Further, in the method of reducing the core loss of the above-described magnetic core, in particular, it is conceivable to reduce the coercive force of the magnet constituting the core. Further, a method of obtaining high DC superposition characteristics, in particular, it is conceivable to increase the saturation magnetic flux density of the magnet constituting the core.

The present invention is directed to providing a soft magnetic alloy or the like having a high saturation magnetic flux density and a low coercive force.
[Means for solving problems]

In order to achieve the above object, a soft magnetic alloy according to the present invention is characterized by a composition formula (Fe _{(1-(α+ β ))} X1 _α X2 _β ) _{(1-(a+b+c+d+ e+f)) a} soft magnetic alloy composed of M _a P _b Si _c Cu _d X3 _e B _f ,
X1 is one or more selected from the group consisting of Co and Ni.
X2 is one or more selected from the group consisting of Ti, V, Mn, Ag, Zn, Al, Sn, As, Sb, Bi, and rare earth elements.
X3 is one or more selected from the group consisting of C and Ge.
The M system is one or more selected from the group consisting of Zr, Nb, Hf, Ta, Mo, and W.
0.030≦a≦0.120
0.010≦b≦0.150
0≦c≦0.050
0≦d≦0.020
0≦e≦0.100
0≦f≦0.030
≧0
≧0
0≦α+β≦0.55.

According to the soft magnetic alloy of the present invention, it is easy to have a structure in which Fe-Nano crystal alloy is easily formed by heat treatment. Further, the Fe-based nanocrystalline alloy having the above characteristics can be a soft magnetic alloy having a preferable soft magnetic property of high saturation magnetic flux density and low coercive force.

Regarding the soft magnetic alloy of the present invention, b≧c may also be used.

The soft magnetic alloy of the present invention may also be 0 ≦f ≦ 0.010.

The soft magnetic alloy of the present invention may be 0 ≦f < 0.001.

Regarding the soft magnetic alloy of the present invention, 0.730 ≦ 1-(a + b + c + d + e + f) ≦ 0.930 may also be used.

Regarding the soft magnetic alloy of the present invention, 0 ≦ α {1 - {a + b + c + d + e + f )} ≦ 0.40 may also be used.

Regarding the soft magnetic alloy of the present invention, α = 0 may also be used.

The soft magnetic alloy of the present invention may also be 0 ≦ β {1 - {a + b + c + d + e + f )} ≦ 0.030.

Regarding the soft magnetic alloy of the present invention, β = 0 can also be used.

Regarding the soft magnetic alloy of the present invention, α = β = 0 can also be used.

The soft magnetic alloy of the present invention may have a nano-heterostructure in which initial microcrystals are present in the amorphous state.

In the soft magnetic alloy of the present invention, the initial microcrystals may have an average particle diameter of 0.3 to 10 nm.

The soft magnetic alloy of the present invention may have a structure composed of Fe-based nanocrystals.

In the soft magnetic alloy of the present invention, the Fe-based nanocrystals may have an average particle diameter of 5 to 30 nm.

The soft magnetic alloy of the present invention may have a thin strip shape.

The soft magnetic alloy of the present invention may also be in the form of a powder.

Further, the magnetic component of the present invention is composed of the above soft magnetic alloy.

Embodiments of the present invention will be described below.

The soft magnetic alloy of the present embodiment is composed of a composition formula (Fe _{(1-(α+ β ))} X1 _α X2 _β ) _{(1-(a+b+c+d+e+f))} M _a P _b A soft magnetic alloy composed of Si _c Cu _d X3 _e B _f having:
X1 is one or more selected from the group consisting of Co and Ni.
X2 is one or more selected from the group consisting of Ti, V, Mn, Ag, Zn, Al, Sn, As, Sb, Bi, and rare earth elements.
X3 is one or more selected from the group consisting of C and Ge.
The M system is one or more selected from the group consisting of Zr, Nb, Hf, Ta, Mo, and W.
0.030≦a≦0.120
0.010≦b≦0.150
0≦c≦0.050
0≦d≦0.020
0≦e≦0.100
0≦f≦0.030
≧0
≧0
The composition of 0≦α+β≦0.55.

The soft magnetic alloy having the above-described composition is composed of an amorphous material, and is easily formed into a soft magnetic alloy containing a crystal phase composed of crystals having a particle diameter larger than 15 nm. Then, when the soft magnetic alloy is heat-treated, Fe-Nano crystals are easily precipitated. Then, the soft magnetic alloy containing Fe-based crystals easily has a high saturation magnetic flux density, a low coercive force, and a high specific resistance.

In other words, the soft magnetic alloy having the above composition is likely to be a starting material for a soft magnetic alloy in which Fe-nano crystals are precipitated.

The Fe-based nanocrystal refers to a crystal having a particle size of a nanometer grade and a crystal structure of Fe of a bcc (body-centered cubic lattice structure). In the present embodiment, it is preferred to precipitate Fe-based crystals having an average particle diameter of 5 to 30 nm. In the soft magnetic alloy in which such Fe-Nylon crystals are precipitated, the saturation magnetic flux density becomes high, and the coercive force is liable to become low. Furthermore, the specific resistance is also likely to become high.

Further, the soft magnetic alloy before the heat treatment may be composed entirely of amorphous material, but may be composed of amorphous and primary microcrystals having a particle diameter of 15 nm or less, and the initial microcrystals may be present in the amorphous material. The nano-heterostructure in the middle is better. By having a nano-heterostructure in which initial microcrystals are present in the amorphous state, it is easy to precipitate Fe-nano crystals during heat treatment. Further, in the present embodiment, the average particle diameter of the initial microcrystals is preferably 0.3 to 10 nm.

Hereinafter, each component of the soft magnetic alloy of the present embodiment will be described in detail.

M is one or more selected from the group consisting of Zr, Nb, Hf, Ta, Mo, and W. Further, it is preferable that the type of M is composed of only one or more selected from the group consisting of Nb, Hf, and Zr. When the type of M is one or more selected from the group consisting of Nb, Hf, and Zr, the saturation magnetic flux density tends to be high, and the coercive force tends to be low.

The content of M (a) satisfies 0.030 ≦ a ≦ 0.120. The content of M (a) is preferably 0.050 ≦ a ≦ 0.100. When a is small, it is easy to produce a crystal phase composed of crystals having a particle diameter larger than 15 nm in the soft magnetic alloy before the heat treatment, and it is impossible to precipitate Fe base crystal by heat treatment, and the coercive force is likely to be high. When a is large, the saturation magnetic flux density tends to be low.

The content of P (b) satisfies 0.010 ≦ b ≦ 0.150. The content of P (b) is preferably 0.018 ≦ b ≦ 0.131, more preferably 0.026 ≦ b ≦ 0.105. When b is small, it is easy to produce a crystal phase composed of crystals having a particle diameter larger than 15 nm in the soft magnetic alloy before the heat treatment, and it is impossible to precipitate Fe base crystal by heat treatment, and the coercive force is liable to become high, and the specific resistance is easily changed. low. When b is large, the saturation magnetic flux density tends to be low.

The content of Si (c) satisfies 0≦c≦0.050. That is, Si may not be contained. The content of Si (c) is preferably such as to satisfy 0.005 ≦ c ≦ 0.040. When c is large, the saturation magnetic flux density tends to be low. Further, when Si is contained, the soft magnetic alloy before heat treatment does not easily cause a crystal phase composed of crystals having a particle diameter larger than 15 nm as compared with the case where Si is not contained.

Furthermore, b≧c is preferred. When b≧c, especially the coercive force is liable to become low.

The content of Cu (d) satisfies 0≦d≦0.020. That is, it may not contain Cu. The smaller the content of Cu, the higher the saturation magnetic flux density, and the more the content of Cu, the lower the coercive force. When d is too large, it is easy to produce a crystal phase composed of a crystal having a particle diameter larger than 15 nm in a soft magnetic alloy before heat treatment, and it is impossible to precipitate Fe-nano crystal by heat treatment, and the saturation magnetic flux density tends to be low. The coercive force tends to become high.

X3 is one or more selected from the group consisting of C and Ge. The content (e) of X3 satisfies 0≦e≦0.100. That is, X3 may not be included. The content of X3 (e) is preferably 0 ≦e ≦ 0.050. When the content of X3 is too large, the saturation magnetic flux density tends to be low, and the coercive force tends to be high.

The content of B (f) satisfies 0≦f≦0.030. That is, B may not be included. Furthermore, it is preferable to use 0≦f≦0.010, and it is preferable that B is not substantially contained. Further, the fact that B is not substantially contained means that 0 ≦ f < 0.001. When the content of B is large, the saturation magnetic flux density tends to be low, and the coercive force tends to be high.

The content of Fe (1-(a+b+c+d+e+f)) is not particularly limited, and it is preferably satisfied that 0.730≦1-(a+b+c+d+e+f)≦0.930. It can also satisfy 0.780≦1-(a+b+c+d+e+f)≦0.930. When the above range is satisfied, it is easy to increase the saturation magnetic flux density, and it is easy to lower the coercive force.

Further, in the soft magnetic alloy of the present embodiment, a part of Fe may be substituted with X1 and/or X2.

X1 is one or more selected from the group consisting of Co and Ni. The content of X1 (α) may be α = 0. That is, X1 may not be included. Further, the number of atoms of X1 is preferably 100 at% in terms of the total number of atoms, and preferably 40 at% or less. That is, it is preferable to satisfy 0 ≦ α {1 - (a + b + c + d + e + f)} ≦ 0.40.

X2 is one or more selected from the group consisting of Ti, V, Mn, Ag, Zn, Al, Sn, As, Sb, Bi, and a rare earth element. The content of X2 (β) may also be β=0. That is, X2 may not be included. Further, the number of atoms in the entire composition is 100 at%, and the number of atoms in X2 is preferably 3.0 at% or less. That is, it is preferable to satisfy 0 ≦ β {1 - (a + b + c + d + e + f)} ≦ 0.030.

The range of substitution amount of Fe substituted by X1 and/or X2 is 0≦α+β≦0.55. When α + β > 0.55, it is difficult to form a Fe-based nanocrystalline alloy by heat treatment, and even if it is made into a Fe-based nanocrystalline alloy, the coercive force is liable to become high.

Further, the soft magnetic alloy of the present embodiment may contain an element other than the above as an unavoidable impurity. For example, the soft magnetic alloy may be contained in an amount of 1% by weight or less based on 100% by weight.

Hereinafter, a method of manufacturing the soft magnetic alloy according to the embodiment will be described.

The method for producing the soft magnetic alloy of the present embodiment is not particularly limited. For example, there is a method of producing a thin strip of the soft magnetic alloy of the present embodiment by a single roll method. In addition, the ribbon can be a continuous strip.

In the single roll method, first, a pure metal contained in each metal element of the finally obtained soft magnetic alloy is prepared, and the same composition as that of the finally obtained soft magnetic alloy is weighed. Then, the pure metal of each metal element is melted and mixed to form a master alloy. Further, the method of melting the above pure metal is not particularly limited, and for example, a method of melting at a high frequency after evacuating a cavity. Further, the mother alloy and the soft magnetic alloy finally composed of Fe-based nanocrystals generally have the same composition.

Next, the produced master alloy is heated and melted to obtain a molten metal (melt). The temperature of the molten metal is not particularly limited and may be, for example, 1200 to 1500 °C.

In the single roll method, the ribbon is mainly free of crystals having a larger particle size than 15 nm at a time point before the heat treatment described later. A Fe-based nanocrystalline alloy can be obtained by subjecting an amorphous ribbon to heat treatment described later.

Furthermore, the thickness of the obtained ribbon can be adjusted by adjusting the rotational speed of the thin-belt roller of the soft magnetic alloy before the heat treatment, but it can be adjusted, for example, by adjusting the interval between the nozzle and the roller, the temperature of the molten metal, and the like. The thickness of the ribbon. The thickness of the thin strip is not particularly limited and may be, for example, 5 to 30 μm.

There is no particular limitation on the method of confirming whether or not the crystal having a particle diameter larger than 15 nm is contained. For example, the presence or absence of crystals having a particle diameter larger than 15 nm can be confirmed by a normal X-ray diffraction measurement.

Further, the thin strip before the heat treatment may be completely free of the initial microcrystals having a particle diameter of less than 15 nm, but it is preferable to contain the initial microcrystals. That is, the thin strip before the heat treatment is preferably a nano-heterostructure composed of amorphous and the initial microcrystals present in the amorphous material. Further, the particle diameter of the initial microcrystals is not particularly limited, and the average particle diameter is preferably in the range of 0.3 to 10 nm.

Further, the method of observing the presence or absence of the initial microcrystals and the average particle diameter is not particularly limited. For example, a sample which is exfoliated by ion milling is subjected to a transmission electron microscope to obtain a diffraction image of the selected region. Confirmation of the nanobeam diffraction image, brightfield image or high resolution image. When a selective diffraction image or a nanobeam diffraction image is used, a circular diffraction is formed in the diffraction pattern with respect to the amorphous material, and a diffraction point due to the crystal structure is formed when it is not amorphous. Further, when a bright field image or a high-resolution image is used, it can be visually observed at a magnification of 1.00 × 10 ⁵ to 3.00 × 10 ⁵ times, and the presence or absence of initial microcrystals and average particle diameter can be observed.

The temperature and rotation speed of the roller and the atmosphere inside the cavity are not particularly limited. The temperature of the roller is preferably 4 to 30 ° C for the purpose of amorphization. The faster the rotation speed of the roller, the smaller the average particle diameter of the initial microcrystals tends to be 30-40 m/sec. It is preferable because the initial microcrystals having an average particle diameter of 0.3 to 10 nm can be obtained. The atmosphere inside the chamber is preferably considered to be atmospheric.

Further, the heat treatment conditions for producing the Fe-based crystal alloy are not particularly limited. The preferred heat treatment conditions vary depending on the composition of the soft magnetic alloy. Generally, the preferred heat treatment temperature is approximately 400 to 600 ° C, and the preferred heat treatment time is approximately 10 minutes to 10 hours. However, some compositions also have better heat treatment temperatures and heat treatment times which deviate from the above range. Further, the atmosphere at the time of heat treatment is not particularly limited. It can be carried out in an active atmosphere such as an atmosphere, or in an inert atmosphere such as Ar gas.

Further, the method of calculating the average particle diameter of the obtained Fe-based nanocrystalline alloy is not particularly limited. For example, it can be calculated using a transmission electron microscope. Further, a method of confirming that the crystal structure is bcc (body-centered cubic lattice structure) is also not particularly limited. It can be confirmed using, for example, an X-ray diffraction measurement.

Further, in the method of obtaining the soft magnetic alloy of the present embodiment, a method of obtaining a powder of the soft magnetic alloy of the present embodiment by a water spray method or a gas spray method may be employed in addition to the above-described single roll method. The following describes the gas spray method.

In the gas spray method, a molten alloy of 1200 to 1500 ° C was obtained in the same manner as the above-described single roll method. Thereafter, the molten alloy is sprayed in the cavity to prepare a powder.

At this time, by setting the gas injection temperature to 4 to 30 ° C and the vapor pressure in the chamber to be 1 hPa or less, the above-described preferable nano heterostructure is easily obtained.

After the powder is produced by the gas spray method, the heat treatment is carried out at 400 to 600 ° C for 0.5 to 10 minutes, whereby the powders can be prevented from sintering each other to coarsen the powder, and the diffusion of the elements can be promoted, and the thermodynamics can be reached in a short time. The equilibrium state can remove strain, stress, etc., and it is easy to obtain a Fe-based soft magnetic alloy having an average particle diameter of 10 to 50 nm.

Although an embodiment of the present invention has been described above, the present invention is not limited to the above embodiment.

The shape of the soft magnetic alloy of the present embodiment is not particularly limited. As described above, a ribbon shape, a powder shape, and the like can be exemplified, and a briquette shape or the like can also be considered.

The use of the soft magnetic alloy (Fe-nanocrystalline alloy) of the present embodiment is not particularly limited. For example, a magnetic component can be mentioned, and among them, a magnetic core is particularly preferable. For inductors, especially for magnetic inductors. The soft magnetic alloy of the present embodiment can be applied to a thin film inductor or a magnetic head in addition to the magnetic core.

Hereinafter, a method of obtaining a magnetic component, particularly a magnetic core and an inductor, from the soft magnetic alloy of the present embodiment will be described. However, the method of obtaining the magnetic core and the inductor from the soft magnetic alloy of the present embodiment is not limited to the following. method. In addition, the use of the magnetic core may be, in addition to the inductor, a transformer, a motor, or the like.

A method of obtaining a magnetic core from a soft magnetic alloy having a thin strip shape may, for example, be a method of winding a thin-band soft magnetic alloy, a method of laminating, or the like. When a thin magnetic stripe-shaped soft magnetic alloy is laminated, an insulator is laminated, and a magnetic core having further improved characteristics can be obtained.

A method of obtaining a magnetic core from a powder-shaped soft magnetic alloy may be, for example, a method of forming a metal mold after mixing with a suitable binder. Further, before the mixture with the binder, the surface of the powder is subjected to an oxidation treatment, an insulating coating, or the like to increase the specific resistance, and the magnetic core is more suitable for the high-frequency region.

The molding method is not particularly limited, and molding using a metal mold, molding, or the like can be exemplified. The type of the binder is not particularly limited, and an anthrone resin can be exemplified. The mixing ratio of the soft magnetic alloy powder and the binder is also not particularly limited. For example, 100% by mass of the soft magnetic alloy powder is mixed with 1 to 10% by mass of a binder.

For example, 100% by mass of the soft magnetic alloy powder and 1 to 5% by mass of the binder are mixed and formed by compression using a metal mold to obtain a space factor (powder filling ratio) of 70% or more and application of 1.6 × 10 ⁴ A/m. The magnetic flux density in the magnetic field is 0.45 T or more, and the specific resistance is 1 Ω ‧ cm or more. The above characteristics are equivalent to those of a general ferrite core.

Further, for example, 100% by mass of the soft magnetic alloy powder is mixed with 1 to 3% by mass of the binder, and the space factor is 80% or more by compression molding under a temperature condition of a softening point or higher of the binder. When a magnetic field of 1.6 × 10 ⁴ A/m is applied, the magnetic flux density is 0.9 T or more, and the specific resistance is 0.1 Ω ‧ cm or more. The above characteristics are superior to those of a conventional powder magnetic core.

Further, by forming a molded body of the above-described magnetic core, heat treatment is applied as a strain relief heat treatment after molding, thereby further reducing core loss and improving usability. Furthermore, the core loss of the magnetic core can be lowered by lowering the coercive force of the magnet constituting the magnetic core.

Further, an inductor component can be obtained by applying a winding to the above magnetic core. The method of applying the winding and the method of manufacturing the inductor component are not particularly limited. For example, a winding method in which at least one turn is wound on the magnetic core manufactured by the above method.

Further, when soft magnetic alloy particles are used, there is a method in which an inductor component is manufactured by press-molding and integrating a winding coil in a state in which a magnet is built. At this time, it is easy to obtain an inductor component that can correspond to a high frequency and a large current.

Further, when soft magnetic alloy particles are used, after the soft magnetic alloy paste and the conductor paste are alternately printed and laminated, an inductor component can be obtained by heating and calcining, wherein the soft magnetic alloy paste is a soft magnetic alloy. The particles are formed by adding a binder and a solvent, and the conductor paste is formed by adding a binder and a solvent to a conductor metal for a coil. Alternatively, a soft magnetic alloy sheet is produced using a soft magnetic alloy paste, and a conductor paste is printed on the surface of the soft magnetic alloy sheet, and by laminating it, the inductor component of the coil built-in magnet can be obtained.

Here, when an inductor component is produced using soft magnetic alloy particles, a soft magnetic alloy powder having a maximum particle diameter of 45 μm or less and a center particle diameter (D50) of 30 μm or less is preferably used to obtain excellent Q characteristics. In order to make the maximum particle diameter of 45 μm or less, a mesh having a mesh size of 45 μm can be used, and only a soft magnetic alloy powder that has passed through the sieve can be used.

When the maximum particle diameter is a large soft magnetic alloy powder, the Q value in the high-frequency region tends to decrease. In particular, when the soft magnetic alloy powder having a mesh diameter of more than 45 μm is used, the Q of the high-frequency region is present. The situation where the value is greatly reduced. However, when the Q value of the high frequency region is not emphasized, a soft magnetic alloy powder having a large dispersion can be used. Discretely large soft magnetic alloy powders are relatively inexpensive to manufacture, and when a relatively large soft magnetic alloy powder is used, the cost can be reduced.
[Examples]

Hereinafter, the present invention will be specifically described based on examples.

In order to achieve the alloy compositions of the respective examples and comparative examples shown in the following table, the raw material metal was weighed and melted at a high frequency to prepare a master alloy.

Thereafter, the produced master alloy was heated and melted to prepare a molten metal at 1300 ° C, and then the metal was sprayed at a rotation speed of 40 m/sec using a single roll method to a roller at 20 ° C in the air. , making thin strips. The thickness of the thin strip is 20 to 25 μm, the width of the thin strip is about 15 mm, and the length of the thin strip is about 10 m.

The obtained ribbon was subjected to X-ray diffraction measurement to confirm the presence or absence of crystals having a particle diameter larger than 15 nm. Then, in the case where there is no crystal having a particle diameter larger than 15 nm, it is composed of an amorphous phase, and when there is a crystal having a particle diameter larger than 15 nm, it is composed of a crystal phase.

Thereafter, the ribbons of the respective examples and comparative examples were heat-treated at 550 ° C for 60 minutes. The saturation magnetic flux density and the coercive force were measured for each of the thin strips after the heat treatment. The saturation magnetic flux density (Bs) was measured using a vibration sample magnetometer (VSM) at a magnetic field of 1000 kA/m. The coercive force (Hc) was measured using a direct current BH tracker at a magnetic field of 5 kA/m. The specific resistance (ρ) was measured by a resistivity measurement using a 4-probe method. In the present embodiment, the saturation magnetic flux density is preferably 1.30 T or more, and more preferably 1.50 T or more. The coercive force is preferably 10.0 A/m or less, and more preferably 5.0 A/m or less. Specific resistance of a thin strip (hereinafter also referred to as Fe ₉₀ Zr ₇ B ₃ thin strip) produced by the same method as that of Example 3 except that the specific resistance (ρ) is a point of composition of Fe ₉₀ Zr ₇ B ₃ (ρ), a case where the temperature rises by 20% or more and is less than 40% or less is good, and the case where the temperature rises by 40% or more is more preferable. In the table shown below, when the specific resistance increases by 40% or more from the specific resistance of the Fe ₉₀ Zr ₇ B ₃ thin strip, it is ◎, and when the specific resistance of the Fe ₉₀ Zr ₇ B ₃ thin strip is increased by 20% or more and less than 40%. ○, when the specific resistance of the Fe ₉₀ Zr ₇ B ₃ ribbon is the same or the rise is less than 20%, it is Δ, and when the specific resistance of the Fe ₉₀ Zr ₇ B ₃ ribbon is low, it is ×. Furthermore, the specific resistance (ρ) can achieve the object of the present invention even if it is not good.

In addition, unless otherwise described in the examples shown below, it was confirmed by X-ray diffraction measurement and transmission electron microscope that all of Fe-Nano having an average particle diameter of 5 to 30 nm and a crystal structure of bcc were obtained. Rice crystals. Further, in all of the examples and comparative examples described in the tables other than Table 19 below, X1 and X2 were not included.

[Table 1]
Table 1

[Table 2]
Table 2

[table 3]
table 3

[Table 4]
Table 4

[table 5]
table 5

[Table 6]
Table 6

[Table 7]
Table 7

[Table 8]
Table 8

[Table 9]
Table 9

[Table 10]
Table 10

[Table 11]
Table 11

[Table 12]
Table 12

[Table 13]
Table 13

[Table 14]
Table 14

[Table 15]
Table 15

[Table 16]
Table 16

[Table 17]
Table 17

[Table 18]
Table 18

[Table 19]
Table 19

[Table 20]
Table 20

[Table 21]
Table 21

Table 1 shows an example and a comparative example in which M is only Zr and the content (a) of Zr is changed without Si, Cu, X3, and B.

In Examples 1 to 6 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs and the coercive force Hc were good.

On the other hand, in Comparative Example 1 in which the content of Zr was too small, the ribbon before the heat treatment was composed of a crystal phase, and the coercive force Hc after the heat treatment was remarkably improved, and the specific resistance ρ was lowered. Further, in Comparative Example 2 in which the content of Zr was too large, the saturation magnetic flux density was lowered.

Table 2 shows examples and comparative examples in which M is only Nb and does not contain Si, Cu, X3, and B, and the content (a) of Nb is changed.

In Examples 7 to 11 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 3 in which the content of Nb was too small, the ribbon before the heat treatment was composed of a crystal phase, and the coercive force Hc after the heat treatment was remarkably improved, and the specific resistance ρ was lowered. Further, in Comparative Example 5 in which the content of Nb was excessively large, the saturation magnetic flux density was lowered.

Table 3 shows examples and comparative examples in which M is only Zr and does not contain Si, Cu, X3, and B, and the content (b) of P is changed.

In Examples 12 to 17 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs and the coercive force Hc were good.

On the other hand, in Comparative Example 6 in which the content of P was too small, the ribbon before the heat treatment was composed of a crystal phase, and the coercive force Hc after the heat treatment was remarkably improved, and the specific resistance ρ was lowered. In Comparative Example 7 in which the content of P was excessive, the saturation magnetic flux density Bs decreased.

Table 4 shows examples and comparative examples in which M is only Zr and does not contain Si, X3, and B, and the content (d) of Cu is changed.

In Examples 18 to 21 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs and the coercive force Hc were good.

On the other hand, in Comparative Example 8 in which the content of Cu was excessively large, the ribbon before the heat treatment was composed of a crystal phase, and the coercive force Hc after the heat treatment was remarkably improved. Furthermore, the saturation magnetic flux density Bs becomes low.

Table 5 shows examples and comparative examples in which M is only Zr and does not contain Si, Cu, and B, and the type and content (e) of X3 are changed.

In Examples 22 to 28 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Examples 9 and 10 in which the content of X3 was too large, the saturation magnetic flux density Bs was lowered, and the coercive force Hc was increased.

Table 6 shows an example and a comparative example in which M is only Zr and does not contain Si, Cu, and X3, and the content (f) of B is changed.

In Examples 29 to 31 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 12 in which the content of B was excessively large, the coercive force Hc became high.

Table 7 shows examples and comparative examples in which M is only Nb and does not contain Si, Cu, and X3, and the content (f) of B is changed.

In Examples 33 to 36 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 13 in which the content of B was excessively large, the saturation magnetic flux density Bs became low, and the coercive force Hc became high.

Table 8 shows an example in which the kind of M is changed from the third embodiment.

Even in Examples 37 to 41 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

Table 9 shows an example in which M is only Zr and does not contain Cu, X3, and B. The ratio of the content (b) of the fixed P to the content (c) of Si is changed, and the ratio of P to Si is changed.

In Examples 42 to 48 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good. In particular, in Examples 42 to 46 of b≧c, the saturation magnetic flux density Bs and the coercive force Hc were superior as compared with Examples 47 and 48 of b<c.

Table 10 shows examples and comparative examples in which M is only Zr and does not contain Cu, X3, and B, and the content (c) of Si is changed.

In Examples 49 to 54 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 14 in which the Si content was excessively large, the saturation magnetic flux density Bs was lowered.

Table 11 shows an example and a comparative example in which M is only Zr and does not contain Cu, X3, and B, and the content (a) of Zr is changed.

In Examples 56 to 60 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 15 in which the content of Zr was excessively large, the saturation magnetic flux density Bs was lowered.

Table 12 shows examples and comparative examples in which M is only Nb and does not contain Cu, X3, and B, and the content (a) of Nb is changed.

In Examples 61 to 66 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 16 in which the content of Nb was too small, the ribbon before the heat treatment was composed of a crystal phase, and the coercive force Hc after the heat treatment was remarkably improved. Further, in Comparative Example 17, the content of Nb was too large, and the saturation magnetic flux density Bs was lowered.

Table 13 shows examples and comparative examples in which M is only Zr and does not contain Cu, X3, and B, and changes the content (b) of P and the content (c) of Si.

In Examples 67 to 73 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 18 in which the P content was too small, the ribbon before the heat treatment was composed of a crystal phase, and the coercive force Hc after the heat treatment was remarkably improved. Furthermore, the specific resistance ρ also decreases. Further, in Comparative Example 17 in which the content of Zr was too large, the coercive force Hc became large.

Table 14 shows examples and comparative examples in which M is only Zr and does not contain X3 and B, and the content (d) of Cu is changed.

In Examples 74 to 77 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 20 in which the content of Cu was excessively large, the saturation magnetic flux density Bs became small.

Table 15 shows examples and comparative examples in which M is only Zr and does not contain Cu or B, and the type and content (e) of X3 are changed.

In Examples 78 to 85 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 21 in which the content of X3 was too large, the saturation magnetic flux density Bs became small.

Table 16 shows examples and comparative examples in which M is only Zr and does not contain Cu or X3, and the content (f) of B is changed.

In Examples 86 to 89 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 22 in which the content of B was excessively large, the coercive force Hc became large.

Table 17 shows examples and comparative examples in which M is only Hf, and Cu and X3 are not contained, and the content (f) of B is changed.

In Examples 90 to 94 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 23 in which the content of B was excessively large, the coercive force Hc became large.

Table 18 shows examples and comparative examples in which M is only Hf, and Cu and X3 are not contained, and the content (f) of B is changed.

In Examples 96 to 99 in which the content of each component was within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

On the other hand, in Comparative Example 24 in which the content of B was excessively large, the saturation magnetic flux density Bs was small, and the coercive force Hc was increased.

Table 19 shows an example in which a part of Fe is substituted with X1 and/or X2 for Example 43.

Substitution of a portion of Fe with X1 and/or X2 also shows good properties. However, in Comparative Example 25 in which α + β exceeded 0.50, the coercive force increased.

Table 20 shows an example and a comparative example in which the average particle diameter of the initial microcrystals and the average particle diameter of the Fe-based crystal alloy were changed by changing the number of rotations of the rolls, the heat treatment temperature, and/or the heat treatment time in Example 3. . Table 21 shows an example in which the number of revolutions of the rolls, the heat treatment temperature, and/or the heat treatment time were changed, and the average particle diameter of the initial microcrystals and the average particle diameter of the Fe-based crystal alloy were changed in Example 43.

Even if the average particle diameter of the initial microcrystals and the average particle diameter of the Fe-based nanocrystalline alloy are changed, the thin ribbon before the heat treatment exhibits excellent characteristics when there is no crystal having a larger particle diameter than 15 nm. On the other hand, when the ribbon before the heat treatment has a crystal having a larger particle diameter than 15 nm, that is, when the ribbon before the heat treatment is composed of a crystal phase, the average particle diameter of the Fe-Nano crystal after the heat treatment is remarkably large. The coercive force Hc is remarkably high.

no.

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Claims (17)

A soft magnetic alloy characterized by a composition formula (Fe _{(1-(α+ β ))} X1 _α X2 _β ) _{(1-(a+b+c+d+e+f))} M _a P a soft magnetic alloy composed of _b Si _c Cu _d X3 _e B _f , wherein X1 is selected from one or more of the group consisting of Co and Ni, and X2 is selected from the group consisting of Ti, V, Mn, Ag, Zn, Al, and Sn. One or more of the group consisting of As, Sb, Bi, and a rare earth element, X3 is selected from one or more of the group consisting of C and Ge, and the M system is selected from the group consisting of Zr, Nb, Hf, Ta, Mo, and W. One or more of the ethnic groups, 0.030≦a≦0.120 0.010≦b≦0.150 0≦c≦0.050 0≦d≦0.020 0≦e≦0.100 0≦f≦0.030 α≧0 β≧0 0≦α+β≦0.55 . Such as the soft magnetic alloy of claim 1 of the patent scope, wherein b≧c. A soft magnetic alloy as claimed in claim 1 or 2, wherein 0 ≦ f ≦ 0.010. For example, the soft magnetic alloy of claim 1 or 2, wherein 0 ≦ f ≦ 0.001. For example, the soft magnetic alloy of claim 1 or 2, wherein 0.730 ≦ 1-(a + b + c + d + e + f) ≦ 0.930. For example, the soft magnetic alloy of claim 1 or 2, wherein 0 ≦ α {1 - {a + b + c + d + e + f )} ≦ 0.40. A soft magnetic alloy as claimed in claim 1 or 2 wherein α = 0. A soft magnetic alloy according to claim 1 or 2, wherein 0 ≦ β {1 - {a + b + c + d + e + f )} ≦ 0.030. A soft magnetic alloy as claimed in claim 1 or 2 wherein β = 0. A soft magnetic alloy according to claim 1 or 2, wherein α = β = 0. A soft magnetic alloy according to claim 1 or 2, which has a nano-heterostructure in which initial microcrystals are present in an amorphous state. A soft magnetic alloy according to claim 11, wherein the initial microcrystals have an average particle diameter of 0.3 to 10 nm. A soft magnetic alloy according to claim 1 or 2, wherein the soft magnetic alloy has a structure composed of Fe-based crystals. The soft magnetic alloy of claim 13, wherein the Fe-nano crystal has an average particle diameter of 5 to 30 nm. A soft magnetic alloy as claimed in claim 1 or 2, which is in the form of a thin strip. A soft magnetic alloy according to claim 1 or 2, which is in the form of a powder. A magnetic component comprising the soft magnetic alloy of any one of claims 1 to 16.