TWI687525B - Soft magnetic alloy and magnetic parts - Google Patents

Abstract

The subject of the present invention is to provide a soft magnetic alloy having a high saturation magnetic flux density and a low coercive force. The solution of the present invention is a soft magnetic alloy characterized by a composition formula (Fe _{(1-(α+ β ))} X1 _α X2 _β ) _{(1-(a+b+c+d+e) )} A soft magnetic alloy composed of M _a Si _b Cu _c X3 _d B _e , X1 is selected from one or more groups consisting of Co and Ni, X2 is selected from Ti, V, Mn, Ag, Zn, Al, One or more species of Sn, As, Sb, Bi and rare earth elements, X3 is one or more species selected from the group consisting of C and Ge, M is selected from Zr, Nb, Hf, Ta, Mo and W One or more ethnic groups formed, 0.030≦a≦0.120, 0.020≦b≦0.175, 0≦c≦0.020, 0≦d≦0.100, 0≦e≦0.030, α≧0, β≧0, 0≦α +β≦0.55.

Description

Soft magnetic alloy and magnetic parts

The invention relates to soft magnetic alloys and magnetic parts.

In recent years, nanocrystalline materials have gradually become the mainstream of soft magnetic materials for magnetic parts, especially soft magnetic materials for power inductors. For example, Patent Document 1 describes an Fe-based soft magnetic alloy having a fine crystal particle size. Nanocrystalline materials can have higher saturation magnetic flux density than conventional crystalline materials such as FeSi or amorphous materials such as FeSiB.

However, with the further advancement of high-frequency and miniaturization of magnetic components, especially power inductors, soft magnetic alloys with higher DC superimposition characteristics and a core with low core loss (magnetic loss) are required. [Previous Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 2002-322546

[Problems to be solved by invention]

In addition, as a method of reducing the core loss of the magnetic core, it is conceivable to reduce the coercive force of the magnet constituting the magnetic core in particular. In addition, to obtain a method with high DC superimposition characteristics, it is considered to increase the saturation magnetic flux density of the magnet constituting the core in particular.

The present invention is directed to providing soft magnetic alloys with high saturation magnetic flux density, low coercive force, and high specific resistance. [Means for solving problems]

In order to achieve the above objective, the soft magnetic alloy of the present invention is characterized by a composition formula (Fe _{(1-(α+ β ))} X1 _α X2 _β ) _{(1-(a+b+c+d+ e))} Soft magnetic alloy composed of M _a Si _b Cu _c X3 _d B _e , X1 is selected from one or more groups consisting of Co and Ni, X2 is selected from Ti, V, Mn, Ag, Zn, One or more species of Al, Sn, As, Sb, Bi, and rare earth elements, X3 is one or more species selected from the group consisting of C and Ge, M is selected from Zr, Nb, Hf, Ta, Mo One or more of the groups formed by W and 0.030≦a≦0.120 0.020≦b≦0.175 0≦c≦0.020 0≦d≦0.100 0≦e≦0.030 α≧0 β≧0 0≦α+β≦0.55.

With regard to the soft magnetic alloy of the present invention, having the above-mentioned characteristics, it is easy to have a structure that easily becomes an Fe-based nanocrystalline alloy by heat treatment. Furthermore, the Fe-based nanocrystalline alloy having the above-mentioned characteristics can be a soft magnetic alloy having preferable soft magnetic characteristics with high saturation magnetic flux density and low coercive force.

The soft magnetic alloy of the present invention may be 0≦e≦0.010.

Regarding the soft magnetic alloy of the present invention, 0≦e<0.001.

Regarding the soft magnetic alloy of the present invention, 0.730≦1-(a+b+c+d+e)≦0.930 may also be used.

Regarding the soft magnetic alloy of the present invention, 0≦α{1-(a+b+c+d+e)}≦0.40.

Regarding the soft magnetic alloy of the present invention, α=0 may be used.

Regarding the soft magnetic alloy of the present invention, 0≦β{1-(a+b+c+d+e)}≦0.030.

Regarding the soft magnetic alloy of the present invention, β=0 may be used.

Regarding the soft magnetic alloy of the present invention, α=β=0 may be used.

The soft magnetic alloy of the present invention may have a nano-heterostructure in which initial microcrystals exist in the amorphous.

With regard to the soft magnetic alloy of the present invention, the average particle size of the initial microcrystals may be 0.3 to 10 nm.

The soft magnetic alloy of the present invention may have a structure composed of Fe-based nanocrystals.

Regarding the soft magnetic alloy of the present invention, the average particle diameter of the Fe-based nanocrystals may be 5 to 30 nm.

The soft magnetic alloy of the present invention may be in the shape of a thin strip.

The soft magnetic alloy of the present invention may be in powder form.

In addition, the magnetic component of the present invention is composed of the above-mentioned soft magnetic alloy.

The following describes the embodiments of the present invention.

The soft magnetic alloy of this embodiment is composed of the formula (Fe _{(1-(α+ β ))} X1 _α X2 _β ) _{(1-(a+b+c+d+e))} M _a Si _b Cu _c The soft magnetic alloy composed of X3 _d B _e , including X1 is one or more selected from the group consisting of Co and Ni, X2 is selected from Ti, V, Mn, Ag, Zn, Al, Sn, As, Sb, One or more groups of Bi and rare earth elements, X3 is one or more groups selected from the group consisting of C and Ge, M is one selected from the group consisting of Zr, Nb, Hf, Ta, Mo and W More than one type, 0.030≦a≦0.120 0.020≦b≦0.175 0≦c≦0.020 0≦d≦0.100 0≦e≦0.030 α≧0 β≧0 0≦α+β≦0.55.

The soft magnetic alloy having the above-mentioned composition is composed of an amorphous material, and it is easy to make a soft magnetic alloy that does not contain a crystal phase composed of crystals having a particle diameter larger than 15 nm. Then, when the soft magnetic alloy is heat-treated, Fe-based nanocrystals are easily precipitated. Then, soft magnetic alloys containing Fe-based nanocrystals tend to have high saturation magnetic flux density, low coercive force, and high specific resistance. Furthermore, the oxidation resistance also tends to be high.

In other words, a soft magnetic alloy having the above-mentioned composition can be easily used as a starting material for a soft magnetic alloy that precipitates Fe-based nanocrystals.

The so-called Fe-based nanocrystal refers to a crystal with a particle size of nanometer grade, and the crystal structure of Fe is bcc (body centered cubic lattice structure). In this embodiment, it is preferable to precipitate Fe-based nanocrystals having an average particle diameter of 5 to 30 nm. The soft magnetic alloy in which such Fe-based nanocrystals are deposited tends to have a higher saturation magnetic flux density and a lower coercive force. Furthermore, the specific resistance also tends to increase.

In addition, the soft magnetic alloy before heat treatment may be entirely composed of only amorphous, but only amorphous and initial microcrystals with a particle size of 15 nm or less, the initial microcrystals exist in the amorphous Nano heterostructures are preferred. By having a nano-heterostructure in which initial microcrystals exist in the amorphous, Fe-based nano crystals are easily precipitated during heat treatment. Furthermore, in this embodiment, the average particle diameter of the initial microcrystals is preferably 0.3 to 10 nm.

Hereinafter, each component of the soft magnetic alloy of the present embodiment will be described in detail.

M is one or more species selected from the group consisting of Zr, Nb, Hf, Ta, Mo, and W. In addition, the type of M is preferably composed of only one or more species selected from the group consisting of Nb, Hf, and Zr. When the type of M is one or more selected from the group consisting of Nb, Hf, and Zr, the saturation magnetic flux density tends to increase, and the coercive magnetic force tends to decrease.

The content (a) of M satisfies 0.030≦a≦0.120. The content (a) of M is preferably 0.050≦a≦0.100. When a is small, a crystalline phase composed of crystals with a particle size larger than 15 nm is likely to be generated in the soft magnetic alloy before heat treatment, Fe-based nanocrystals cannot be precipitated by heat treatment, and the coercive force tends to increase. When a is large, the saturation magnetic flux density tends to become low.

The content (b) of Si satisfies 0.020≦b≦0.175. The Si content (b) preferably satisfies 0.030≦b≦0.100. If the coercive force is too small, the coercive force tends to become high. In addition, when b is too large, the saturation magnetic flux density tends to become low.

In addition, the smaller the M content (a) and the larger the Si content (b), the better the tendency to obtain good characteristics. Conversely, the larger the M content (a) and the smaller the Si content, the better the tendency to obtain good characteristics.

The content (c) of Cu satisfies 0≦c≦0.020. That is, it may not contain Cu. The smaller the Cu content, the higher the saturation magnetic flux density. The more Cu content, the lower the coercive force. When c is too large, the saturation magnetic flux density becomes too low.

X3 is one or more species selected from the group consisting of C and Ge. The content (d) of X3 satisfies 0≦d≦0.100. That is, X3 may not be included. The content (d) of X3 is preferably 0≦d≦0.050. When the content of X3 is too large, the saturation magnetic flux density tends to be lower, and the coercive magnetic force tends to become higher.

The content (e) of B satisfies 0≦e≦0.030. That is, B may not be included. Furthermore, 0≦e≦0.010 is preferable, and B is substantially not included. In addition, it does not substantially contain B, which means a case where 0≦e<0.001. When the content of B is large, the saturation magnetic flux density tends to decrease, and the coercive force tends to increase.

The content of Fe (1-(a+b+c+d+e)) is not particularly limited, and it is preferable to satisfy 0.730≦1-(a+b+c+d+e)≦0.930. It can also satisfy 0.780≦1-(a+b+c+d+e)≦0.930. When the above range is satisfied, the saturation magnetic flux density is easily increased, and the coercive magnetic force is easily reduced.

In addition, regarding the soft magnetic alloy of this embodiment, a part of Fe may be replaced with X1 and/or X2.

X1 is one or more types selected from the group consisting of Co and Ni. The content (α) of X1 may be α=0. That is, X1 may not be included. In addition, the atomic number of X1 is preferably 100 at%, and preferably 40 at% or less. That is, it is preferable to satisfy 0≦α{1-(a+b+c+d+e)}≦0.40.

X2 is composed of one or more species selected from the group consisting of Ti, V, Mn, Ag, Zn, Al, Sn, As, Sb, Bi, and rare earth elements. The content (β) of X2 may also be β=0. That is, X2 may not be included. In addition, the atomic number of the entire composition is 100 at%, and the atomic number of X2 is preferably 3.0 at% or less. That is, it is preferable to satisfy 0≦β{1-(a+b+c+d+e)}≦0.030.

The range of the substitution amount in which Fe is substituted with X1 and/or X2 is 0≦α+β≦0.55. When α+β>0.55, it is difficult to make the Fe-based nanocrystalline alloy by heat treatment, and even if the Fe-based nanocrystalline alloy is made, the coercive force tends to increase.

Furthermore, the soft magnetic alloy of this embodiment may contain elements other than the above as unavoidable impurities. For example, it may contain 1% by weight or less with respect to 100% by weight of the soft magnetic alloy.

The method of manufacturing the soft magnetic alloy of this embodiment will be described below.

The method of manufacturing the soft magnetic alloy of this embodiment is not particularly limited. For example, there is a method of manufacturing a thin ribbon of the soft magnetic alloy of this embodiment by the single-roller method. In addition, the thin ribbon may be a continuous thin ribbon.

In the single-roller method, first, pure metals included in each metal element of the finally obtained soft magnetic alloy are prepared, and the same composition as the finally obtained soft magnetic alloy is weighed. Then, the pure metal of each metal element is melted and mixed to produce a master alloy. In addition, the method for melting the pure metal is not particularly limited. For example, a method of heating and melting with high frequency after evacuating the cavity. Furthermore, the master alloy and the resulting soft magnetic alloy composed of Fe-based nanocrystals usually have the same composition.

Next, the produced master alloy is heated and melted to obtain a molten metal (molten soup). The temperature of the molten metal is not particularly limited, and may be, for example, 1200 to 1500°C.

In the single-roller method, the thickness of the obtained thin ribbon can be adjusted mainly by adjusting the rotation speed of the roller, but for example, the thickness of the obtained thin ribbon can also be adjusted by adjusting the distance between the nozzle and the roller and the temperature of the molten metal. The thickness of the thin strip is not particularly limited, and may be, for example, 5 to 30 μm.

At a time before heat treatment to be described later, the thin ribbon system does not contain crystalline amorphous material having a particle size larger than 15 nm. By applying the heat treatment described later to the amorphous thin strip, the Fe-based nanocrystalline alloy can be obtained.

In addition, the method of confirming whether the thin ribbon of the soft magnetic alloy before the heat treatment contains crystals having a particle diameter larger than 15 nm is not particularly limited. For example, the presence or absence of crystals with a particle size larger than 15 nm can be confirmed by ordinary X-ray diffraction measurement.

In addition, the thin strip before heat treatment may not contain the initial microcrystals with a particle size of less than 15 nm, but it is preferable to contain the initial microcrystals. That is, the thin strip before heat treatment is preferably a nano-heterostructure composed of amorphous and the above-mentioned initial microcrystals present in the amorphous. In addition, the particle size of the initial microcrystals is not particularly limited, and the average particle size is preferably in the range of 0.3 to 10 nm.

In addition, there is no particular limitation on the observation method for the presence or absence of the above-mentioned initial microcrystals and average particle diameter. For example, for a sample thinned by ion milling, a transmission electron microscope is used to obtain a selected area diffraction image, Nanobeam diffraction image, bright field image or high resolution image to confirm. When using a selected area diffraction image or a nanobeam diffraction image, a ring-shaped diffraction is formed in the diffraction pattern relative to amorphous, and when it is not amorphous, a diffraction point due to a crystalline structure is formed. In addition, when using a bright field image or a high-resolution image, it can be visually observed at a magnification of 1.00×10 ⁵ to 3.00×10 ⁵ times, and the presence or absence of initial microcrystals and average particle size can be observed.

The temperature, rotation speed of the roller and the atmosphere inside the cavity are not particularly limited. The temperature of the roller is preferably 4 to 30°C for amorphization. The faster the rotation speed of the roller, the average particle size of the initial microcrystals tends to be smaller, and it is preferably 30 to 40 m/sec. to obtain the initial microcrystals with an average particle size of 0.3 to 10 nm. The atmosphere inside the cavity is better considering the cost.

In addition, the heat treatment conditions for manufacturing the Fe-based nanocrystalline alloy are not particularly limited. Depending on the composition of the soft magnetic alloy, the preferred heat treatment conditions are different. Generally, the preferred heat treatment temperature is approximately 400 to 600°C, and the preferred heat treatment time is approximately 10 minutes to 10 hours. However, for some compositions, there may be cases where the preferred heat treatment temperature and heat treatment time deviate from the above range. In addition, the atmosphere during heat treatment is not particularly limited. It can be carried out under an active atmosphere such as in the atmosphere, or under an inert atmosphere such as Ar gas.

In addition, the method of calculating the average particle diameter of the obtained Fe-based nanocrystalline alloy is not particularly limited. For example, it can be calculated by observation using a transmission electron microscope. In addition, the method of confirming that the crystal structure is bcc (body-centered cubic lattice structure) is not particularly limited. For example, it can be confirmed by X-ray diffraction measurement.

In addition to the method of obtaining the soft magnetic alloy of the present embodiment, in addition to the single roll method described above, there is also a method of obtaining the powder of the soft magnetic alloy of the present embodiment by, for example, a water spray method or a gas spray method. The following describes the gas spray method.

In the gas spray method, a molten alloy of 1200 to 1500° C. is obtained in the same manner as the single roller method described above. After that, the above molten alloy is sprayed into the cavity to produce a powder.

At this time, by setting the gas injection temperature to 4 to 30° C. and the vapor pressure in the cavity to 1 hPa or less, it is easy to obtain the above-described preferred nano-heterostructure.

After the powder is produced by the gas spray method, heat treatment at 400 to 600°C for 0.5 to 10 minutes can prevent the powders from sintering with each other to coarsen the powder and promote the diffusion of elements, which can be reached in a short time The thermodynamic equilibrium state can remove strain or stress, and it is easy to obtain Fe-based soft magnetic alloys with an average particle size of 10 to 50 nm.

Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment.

The shape of the soft magnetic alloy of this embodiment is not particularly limited. As mentioned above, the thin strip shape, the powder shape, etc. are exemplified, and agglomerate shape and the like can also be considered.

The use of the soft magnetic alloy (Fe-based nanocrystalline alloy) of this embodiment is not particularly limited. For example, a magnetic component can be mentioned, and a magnetic core is particularly mentioned. For inductors, especially suitable for magnetic cores for power inductors. The soft magnetic alloy of this embodiment can be applied to thin film inductors and magnetic heads in addition to magnetic cores.

Hereinafter, the method of obtaining magnetic parts, especially the magnetic core and the inductor from the soft magnetic alloy of the present embodiment will be described, but the method of obtaining the magnetic core and the inductor from the soft magnetic alloy of the present embodiment is not limited to The following method. In addition, the applications of the magnetic core include transformers, motors, etc. in addition to inductors.

The method of obtaining a magnetic core from a thin-strip-shaped soft magnetic alloy includes, for example, a method of winding a thin-strip-shaped soft magnetic alloy and a method of lamination. In the case of laminating soft magnetic alloys in the form of thin strips, the magnetic core can be further improved by stacking the insulators.

A method of obtaining a magnetic core from a soft magnetic alloy in powder form may be, for example, a method of molding with a metal mold after mixing with an appropriate binder. In addition, before mixing with the adhesive, by oxidizing the surface of the powder, insulating coating, etc., to increase the specific resistance, and become a magnetic core more suitable for the high frequency region.

The molding method is not particularly limited, and examples include molding using a metal mold, molding with a mold, and the like. The type of adhesive is not particularly limited, and silicone resin can be exemplified. The mixing ratio of the soft magnetic alloy powder and the binder is also not particularly limited. For example, 100% by mass of soft magnetic alloy powder is mixed with 1-10% by mass of adhesive.

For example, by mixing 100% by mass of soft magnetic alloy powder with 1 to 5% by mass of a binder and compressing it by using a metal mold, a space factor (powder filling factor) of 70% or more can be obtained by applying 1.6×10 A magnetic core with a magnetic flux density of 0.45T or more and a specific resistance of 1Ω‧cm or more in a magnetic field of ⁴ A/m. The above characteristics are equal to or higher than those of a general ferrite core.

In addition, for example, by mixing 100% by mass of soft magnetic alloy powder with 1 to 3% by mass of the adhesive, and by compression molding with a metal mold at a temperature above the softening point of the adhesive, a space factor of 80% or more can be obtained. A dust core with a magnetic flux density of 0.9T or more and a specific resistance of 0.1Ω‧cm or more when a magnetic field of 1.6×10 ⁴ A/m is applied. The above-mentioned characteristics are more excellent than general powder magnetic cores.

Furthermore, by applying a heat treatment as a strain-relief heat treatment to the formed body forming the above-mentioned magnetic core, the core loss is further reduced, and the usability is improved. Furthermore, the core loss of the magnetic core can be reduced by reducing the coercive force of the magnet constituting the magnetic core.

In addition, by winding the magnetic core, an inductor component can be obtained. The method of applying the winding wire and the method of manufacturing the inductor parts are not particularly limited. For example, a method of winding the magnetic core manufactured by the above method by winding at least one turn and winding the wire.

In addition, when using soft magnetic alloy particles, there is a method of manufacturing an inductor part by press-forming and integrating the winding coil in a state of a magnet. In this case, it is easy to obtain inductor parts that can handle high frequencies and large currents.

In addition, when soft magnetic alloy particles are used, the soft magnetic alloy paste and the conductor paste are alternately printed and laminated, and then calcined by heating to obtain inductor parts. Among them, the soft magnetic alloy paste is obtained by adding a binder and a solvent to the soft magnetic alloy particles, and the paste is formed by adding a binder and a solvent to the conductor metal for the coil. Alternatively, a soft magnetic alloy paste is used to make a soft magnetic alloy plate, and a conductor paste is printed on the surface of the soft magnetic alloy plate, and by laminating and forging it, an inductor part with a built-in magnet in the coil can be obtained.

Here, when manufacturing inductor parts using soft magnetic alloy particles, a soft magnetic alloy powder with a maximum particle size of 45 μm or less in sieve diameter and a core particle size (D50) of 30 μm or less is used to obtain excellent Q characteristics Better. In order to make the maximum particle size less than 45 μm in terms of sieve diameter, a sieve with a mesh size of 45 μm can be used, and only soft magnetic alloy powder that passes through the sieve is used.

The larger the maximum particle size, the softer magnetic alloy powder tends to decrease the Q value in the high-frequency region. In particular, when using the softer magnetic alloy powder with the maximum particle size exceeding 45 μm in sieve diameter, the The situation where the Q value drops greatly. However, when the Q value in the high-frequency region is not important, soft magnetic alloy powder with a large dispersion can be used. The soft magnetic alloy powder with large dispersion is relatively inexpensive to manufacture, and the cost can be reduced when using the soft magnetic alloy powder with large dispersion. [Example]

Hereinafter, the present invention will be specifically described based on examples.

In order to achieve the alloy composition of each of the examples and comparative examples shown in the table below, the raw metal was weighed and melted by high-frequency heating to produce a master alloy.

After that, the produced master alloy is heated and melted to form a molten metal at 1300°C, and then the 20°C roller is sprayed to the roller at a rotation speed of 40 m/sec. in the atmosphere using a single roller method. , Making thin strips. The thickness of the thin strip is 20-25 μm, the width of the thin strip is about 15 mm, and the length of the thin strip is about 10 m.

X-ray diffraction measurement was performed on each of the obtained thin ribbons, and it was confirmed whether or not crystals having a particle diameter larger than 15 nm were present. Then, when there is no crystal having a larger particle size than 15 nm, it is assumed to be composed of an amorphous phase; when there is a crystal having a larger particle size than 15 nm, it is assumed to be composed of a crystalline phase.

Thereafter, the thin strips of each example and comparative example were heat-treated at 550°C for 60 minutes. For each thin strip after heat treatment, the saturation magnetic flux density and coercive force are measured. The saturation magnetic flux density (Bs) is measured with a magnetic field of 1000 kA/m using a vibration sample type magnetometer (VSM). The coercive force (Hc) was measured with a magnetic field of 5 kA/m using a DC BH tracker. The specific resistance (ρ) is measured by resistivity measurement using the four-probe method. In this embodiment, the saturation magnetic flux density is preferably 1.30T or more, and more preferably 1.45T or more. The coercive magnetic force is preferably 10.0 A/m or less, and more preferably 7.0 A/m or less. Specific resistance (ρ) is the ratio of sweetfish to a thin ribbon (hereinafter also referred to as Fe ₉₀ Zr ₇ B ₃ thin ribbon) produced by the same method as in Example 3 except for the composition of Fe ₉₀ Zr ₇ B ₃ The resistance (ρ) is good when it rises by more than 20% but less than 40%, and is better when it rises by more than 40%. In the table below, when the specific resistance increases from the Fe ₉₀ Zr ₇ B ₃ thin strip by more than 40%, it is ◎, and from the Fe ₉₀ Zr ₇ B ₃ thin strip the specific resistance increases by more than 20% but less than 40% It is ○. It is △ when the specific resistance of the Fe ₉₀ Zr ₇ B ₃ thin strip is the same or rises less than 20%. It is × when the specific resistance of the Fe ₉₀ Zr ₇ B ₃ thin strip is lower. Furthermore, even if the specific resistance (ρ) is not good, it can achieve the objective of the invention.

In addition, Table 7 measures changes in saturation magnetic flux density and coercive force with time. Specifically, each thin strip after measuring the saturation magnetic flux density Bs ₀ and the coercive force Hc _{0 is} subjected to an oxidation treatment for 3000 minutes, and the saturation magnetic flux density (Bs ₃₀₀₀ ) and the coercive force (Hc) after the oxidation treatment are measured ₃₀₀₀ ). The oxidation treatment was carried out under the conditions of 150°C for 50 hours in an atmospheric atmosphere.

In Table 7, Bs ₀ ≧1.30T, Bs ₃₀₀₀ /Bs ₀ ≦0.85, Hc ₀ ≦10.0A/m, and Hc ₃₀₀₀ /Hc ₀ ≦1.30 are good.

In addition, as long as there is no special description in the examples shown below, it is confirmed by X-ray refractometry and observation by a transmission electron microscope that all of them have Fe Kenai with an average particle diameter of 5 to 30 nm and a crystal structure of bcc Rice crystals. In addition, all the examples and comparative examples described in the tables other than Table 8 below do not include X1 and X2.

[Table 1]

[Table 2]

[table 3]

[Table 4]

[table 5]

[Table 6]

[Table 7]

[Table 8]

[Table 9]

Table 1 describes examples and comparative examples in which M is only Zr and Cu, X3, and B are not included, and the content (a) of Zr is changed.

In Examples 1 to 6 where the content of each component is within a predetermined range, the saturation magnetic flux density Bs and the coercive magnetic force Hc are good.

On the other hand, in Comparative Example 1 where the Zr content is too small, the thin strip before heat treatment is composed of a crystalline phase, the coercive force Hc after heat treatment is significantly increased, and the specific resistance ρ becomes low. In addition, in Comparative Example 2 where the Zr content is too large, the saturation magnetic flux density decreases.

Table 2 describes examples and comparative examples where M is only Nb and Cu, X3, and B are not included, and the content (a) of Nb is changed.

In Examples 7 to 12 where the content of each component is within a predetermined range, the saturation magnetic flux density Bs, the coercive magnetic force Hc, and the specific resistance ρ are good.

On the other hand, in Comparative Example 3 where the content of Nb is too small, the thin ribbon system before heat treatment is composed of a crystal phase, and the coercive force Hc after heat treatment is remarkably improved. In addition, in Comparative Example 4 where the content of Nb is too large, the saturation magnetic flux density decreases.

Table 3 describes examples and comparative examples in which M is only Zr and X3 and B are not included, and the content (c) of Cu is changed.

In Examples 13 to 16 where the content of each component is within a predetermined range, the saturation magnetic flux density Bs and the coercive magnetic force Hc are good.

On the other hand, in Comparative Example 5 where the content of Cu is too large, the thin strip before heat treatment is composed of a crystal phase, and the coercive force Hc after heat treatment is significantly increased. Furthermore, the saturation magnetic flux density Bs becomes low.

Table 4 describes examples and comparative examples in which M is only Zr and Cu and B are not included, and the type and content (d) of X3 are changed.

In Examples 17 to 23 where the content of each component is within a predetermined range, the saturation magnetic flux density Bs, the coercive magnetic force Hc, and the specific resistance ρ are good.

On the other hand, in Comparative Example 7 where the content of X3 is too large, the saturation magnetic flux density Bs decreases, and the coercive force Hc becomes high.

Table 5 describes examples and comparative examples where M is only Zr and Cu and X3 are not included, and the content (e) of B is changed.

In Examples 24 to 27 where the content of each component is within a predetermined range, the saturation magnetic flux density Bs, the coercive magnetic force Hc, and the specific resistance ρ are good.

On the other hand, in Comparative Example 8 where the content of B is too large, the saturation magnetic flux density Bs decreases, and the coercive magnetic force Hc increases.

Table 6 describes examples in which the type of M is changed from Example 3.

Even if the type of M is changed and the contents of each component are within a predetermined range in Examples 28 to 32, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ are good.

Table 7 describes examples and comparative examples in which M is only Zr and Cu, X3, and B are not included, and the Zr content (a) and the Si content (b) are changed. In addition, as described above, with respect to the examples and comparative examples described in Table 7, changes in saturation magnetic flux density and coercive force with time were measured.

In Examples 32a to 32d and 52 to 56, the saturation magnetic flux density, coercive force, and specific resistance are excellent, and the changes in saturation magnetic flux density and coercive force due to changes over time are small. On the other hand, the comparative example 8a with too little Si has a large coercive force, and the results of changes over time in the saturation magnetic flux density and the coercive force are also large. In Comparative Example 11 with too much Si, the coercive force becomes larger. In addition, as compared with Examples 52 to 56 having the same Zr content, the saturation magnetic flux density became smaller.

Table 8 describes an example in which part of Fe is replaced with X1 and/or X2 for Example 3.

Substituting a part of Fe with X1 and/or X2 also showed good characteristics. However, in Comparative Example 9 where α+β exceeds 0.55, the coercive force increases.

Table 9 describes examples and comparative examples of Example 3 in which the average particle size of the initial microcrystal and the average particle size of the Fe-based nanocrystalline alloy are changed by changing the rotation speed of the roller, the heat treatment temperature and/or the heat treatment time .

Even if the average particle size of the initial microcrystals and the average particle size of the Fe-based nanocrystalline alloy are changed, the thin strip before heat treatment shows good characteristics when there is no crystal with a particle size larger than 15 nm. On the other hand, when there are crystals with a particle size larger than 15 nm before the heat treatment, that is, when the thin strips before the heat treatment are composed of crystalline phases, the average particle size of the Fe-based nanocrystals after heat treatment becomes significantly larger. The coercive magnetic force Hc becomes significantly higher.

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Claims (16)

A soft magnetic alloy characterized by a composition formula (Fe _(1-(α+β)) X1 _α X2 _β ) _{(1-(a+b+c+d+e))} M _a Si _b Cu _c X3 _d B _e (atomic ratio) soft magnetic alloy, X1 is selected from the group consisting of Co and Ni, X2 is selected from Ti, V, Mn, Ag, Zn, Al, Sn , As, Sb, Bi and rare earth elements composed of more than one species, X3 is selected from the group consisting of C and Ge more than one species, M is selected from Zr, Nb, Hf, Ta, Mo and W One or more of the ethnic groups formed, 0.030≦a≦0.120 0.020≦b≦0.175 0≦c≦0.020 0≦d≦0.100 0≦e≦0.030 α≧0 β≧0 0≦α+β≦0.55. For example, the soft magnetic alloy in the first item of patent scope, where 0≦e≦0.010. For example, the soft magnetic alloy in the scope of patent application item 1 or 2, where 0≦e<0.001. For example, the soft magnetic alloy in the scope of patent application item 1 or 2, where 0.730≦1-(a+b+c+d+e)≦0.930. For example, the soft magnetic alloy in the first or second patent application scope, where 0≦α{1-(a+b+c+d+e)}≦0.40. For example, the soft magnetic alloy in the scope of patent application item 1 or 2, where α=0. For example, the soft magnetic alloy in the scope of patent application item 1 or 2, where 0≦ β{1-(a+b+c+d+e)}≦0.030. For example, the soft magnetic alloy in the scope of patent application item 1 or 2, where β=0. For example, the soft magnetic alloy in the first or second patent application scope, where α=β=0. For example, the soft magnetic alloy according to item 1 or 2 of the patent application scope has a nano-heterostructure in which the initial microcrystals exist in the amorphous. For example, the soft magnetic alloy according to item 10 of the patent application, wherein the average particle size of the initial microcrystals is 0.3 to 10 nm. For example, the soft magnetic alloy according to item 1 or 2 of the patent application, wherein the soft magnetic alloy has a structure composed of Fe-based nanocrystals. For example, the soft magnetic alloy according to item 12 of the patent application, wherein the average particle size of the Fe-based nanocrystals is 5 to 30 nm. For example, the soft magnetic alloy in the scope of patent application 1 or 2 is in the shape of a thin strip. For example, the soft magnetic alloy according to item 1 or 2 of the patent application is in powder form. A magnetic part is composed of a soft magnetic alloy according to any one of the patent application items 1 to 15.