JP2019143202A - Soft magnetic alloy and magnetic component - Google Patents

Abstract

To provide a soft magnetic alloy having high saturation magnetic flux density, low coercive force and high specific resistance.SOLUTION: There is provided a soft magnetic alloy consisting of a composition formula (FeX1X2)MSiCuX3B. X1 is one or more kind selected from a group consisting of Co and Ni, X2 is one or more kind selected from a group consisting of Ti, V, Mn, Ag, Zn, Al, Sn, As, Sb, Bi and rare earth elements, X3 is one or more kind selected from a group consisting of C and Ge, M is one or more kind selected from a group consisting of Zr, Nb, Hf, Ta, Mo and W. 0.030≤a≤0.120, 0.020≤b≤0.175, 0≤c≤0.020, 0≤d≤0.100, 0≤e≤0.030, α≥0, β≥0, 0≤α+β≤0.55.SELECTED DRAWING: None

Description

  The present invention relates to a soft magnetic alloy and a magnetic component.

  In recent years, nanocrystalline materials have become mainstream as soft magnetic materials for magnetic components, particularly soft magnetic materials for power inductors. For example, Patent Document 1 describes an Fe-based soft magnetic alloy having a fine crystal grain size. A nanocrystalline material can provide a higher saturation magnetic flux density or the like than a conventional crystalline material such as FeSi or an amorphous material such as FeSiB.

  At present, however, magnetic components, particularly power inductors, are further increased in frequency and size, and a soft magnetic alloy capable of obtaining a magnetic core having both high DC superposition characteristics and low core loss (magnetic loss) is demanded.

JP 2002-322546 A

  As a method for reducing the core loss of the magnetic core, it is conceivable to particularly reduce the coercive force and specific resistance of the magnetic body constituting the magnetic core. Further, as a method for obtaining a high DC superposition characteristic, it is conceivable to increase the saturation magnetic flux density of the magnetic material constituting the magnetic core.

  An object of the present invention is to provide a soft magnetic alloy having a high saturation magnetic flux density, a low coercive force, and a high specific resistance.

In order to achieve the above object, the soft magnetic alloy according to the present invention comprises:
Composition formula _{(Fe (1- (α + β} )) X1 α X2 β) a _{(1- (a + b + c} + d + e)) M a Si b Cu c soft magnetic alloy consisting of _X3 d _{B e,}
X1 is one or more selected from the group consisting of Co and Ni,
X2 is one or more selected from the group consisting of Ti, V, Mn, Ag, Zn, Al, Sn, As, Sb, Bi and rare earth elements,
X3 is one or more selected from the group consisting of C and Ge,
M is at least one selected from the group consisting of Zr, Nb, Hf, Ta, Mo and W;
0.030 ≦ a ≦ 0.120
0.020 ≦ b ≦ 0.175
0 ≦ c ≦ 0.020
0 ≦ d ≦ 0.100
0 ≦ e ≦ 0.030
α ≧ 0
β ≧ 0
0 ≦ α + β ≦ 0.55
It is characterized by being.

  The soft magnetic alloy according to the present invention has the above-described characteristics, and thus tends to have a structure that can easily become an Fe-based nanocrystalline alloy by performing heat treatment. Furthermore, the Fe-based nanocrystalline alloy having the above characteristics has a preferable soft magnetic characteristic of a high saturation magnetic flux density and a low coercive force, and further becomes a soft magnetic alloy having a high specific resistance.

  The soft magnetic alloy according to the present invention may satisfy 0 ≦ e ≦ 0.010.

  The soft magnetic alloy according to the present invention may satisfy 0 ≦ e <0.001.

  The soft magnetic alloy according to the present invention may satisfy 0.730 ≦ 1- (a + b + c + d + e) ≦ 0.930.

  The soft magnetic alloy according to the present invention may satisfy 0 ≦ α {1− (a + b + c + d + e)} ≦ 0.40.

  The soft magnetic alloy according to the present invention may have α = 0.

  The soft magnetic alloy according to the present invention may satisfy 0 ≦ β {1− (a + b + c + d + e)} ≦ 0.030.

  The soft magnetic alloy according to the present invention may have β = 0.

  The soft magnetic alloy according to the present invention may have α = β = 0.

  The soft magnetic alloy according to the present invention may have a nanoheterostructure in which initial microcrystals exist in an amorphous state.

  In the soft magnetic alloy according to the present invention, an average grain size of the initial microcrystal may be 0.3 to 10 nm.

  The soft magnetic alloy according to the present invention may have a structure made of Fe-based nanocrystals.

  The soft magnetic alloy according to the present invention may have an average particle size of the Fe-based nanocrystal of 5 to 30 nm.

  The soft magnetic alloy according to the present invention may have a ribbon shape.

  The soft magnetic alloy according to the present invention may be in powder form.

  The magnetic component according to the present invention is made of the soft magnetic alloy described above.

  Hereinafter, embodiments of the present invention will be described.

The soft magnetic alloy according to the present embodiment is a soft magnetic alloy having a composition formula (Fe _{(1- (α + β))} X1 _α X2 _β ) _{(1- (a + b + c + d + e))} M _a Si _b Cu _c X3 _d B _e. And
X1 is one or more selected from the group consisting of Co and Ni,
X2 is one or more selected from the group consisting of Ti, V, Mn, Ag, Zn, Al, Sn, As, Sb, Bi and rare earth elements,
X3 is one or more selected from the group consisting of C and Ge,
M is at least one selected from the group consisting of Zr, Nb, Hf, Ta, Mo and W;
0.030 ≦ a ≦ 0.120
0.020 ≦ b ≦ 0.175
0 ≦ c ≦ 0.020
0 ≦ d ≦ 0.100
0 ≦ e ≦ 0.030
α ≧ 0
β ≧ 0
0 ≦ α + β ≦ 0.55
The composition is

  The soft magnetic alloy having the above composition is easily made into a soft magnetic alloy which is made of an amorphous material and does not include a crystal phase made of crystals having a particle size larger than 15 nm. And when heat-treating the soft magnetic alloy, Fe-based nanocrystals are likely to precipitate. And the soft magnetic alloy containing Fe-based nanocrystal tends to have a high saturation magnetic flux density, a low coercive force, and a high specific resistance. Furthermore, the oxidation resistance tends to be high.

  In other words, the soft magnetic alloy having the above composition is easily used as a starting material for the soft magnetic alloy on which Fe-based nanocrystals are deposited.

  The Fe-based nanocrystal is a crystal having a particle size of nano-order and a Fe crystal structure of bcc (body-centered cubic lattice structure). In this embodiment, it is preferable to deposit Fe-based nanocrystals having an average particle size of 5 to 30 nm. A soft magnetic alloy in which such Fe-based nanocrystals are deposited tends to have a high saturation magnetic flux density and a low coercive force. Furthermore, the specific resistance tends to be high.

  The soft magnetic alloy before the heat treatment may be made entirely of amorphous material, but is composed of amorphous material and initial microcrystals having a particle size of 15 nm or less, and the initial microcrystals are in the amorphous state. It preferably has a nanoheterostructure present in When the initial microcrystal has a nanoheterostructure existing in an amorphous state, Fe-based nanocrystals are easily precipitated during heat treatment. In the present embodiment, the initial crystallites preferably have an average particle size of 0.3 to 10 nm.

  Hereinafter, each component of the soft magnetic alloy according to the present embodiment will be described in detail.

  M is at least one selected from the group consisting of Zr, Nb, Hf, Ta, Mo and W. Further, the type of M is preferably composed of only one or more selected from the group consisting of Nb, Hf and Zr. When the type of M is at least one selected from the group consisting of Nb, Hf, and Zr, the saturation magnetic flux density tends to increase and the coercive force tends to decrease.

  The M content (a) satisfies 0.030 ≦ a ≦ 0.120. The content (a) of M is preferably 0.050 ≦ a ≦ 0.100. When a is small, the soft magnetic alloy before the heat treatment tends to have a crystal phase composed of crystals having a particle size larger than 15 nm, and Fe-based nanocrystals cannot be precipitated by the heat treatment, and the coercive force tends to be high. Become. When a is large, the saturation magnetic flux density tends to be low.

  The Si content (b) satisfies 0.020 ≦ b ≦ 0.175. The Si content (b) preferably satisfies 0.030 ≦ b ≦ 0.100. When b is small, the coercive force tends to be high. Further, when b is large, the saturation magnetic flux density tends to be low.

  The smaller the M content (a), the better the Si content (b). Conversely, the larger the M content (a), the better the characteristics obtained when the Si content is smaller.

  The Cu content (c) satisfies 0 ≦ c ≦ 0.020. That is, Cu does not have to be contained. The saturation magnetic flux density increases as the Cu content decreases, and the coercive force tends to decrease as the Cu content increases. When c is too large, the saturation magnetic flux density is too low.

  X3 is at least one selected from the group consisting of C and Ge. The content (d) of X3 satisfies 0 ≦ d ≦ 0.100. That is, X3 may not be contained. The content (d) of X3 is preferably 0 ≦ d ≦ 0.050. When the content of X3 is too large, the saturation magnetic flux density tends to be low, and the coercive force tends to be high.

  The content (e) of B satisfies 0 ≦ e ≦ 0.030. That is, B may not be contained. Furthermore, it is preferable that 0 ≦ e ≦ 0.010, and it is further preferable that B is not substantially contained. Note that “substantially not containing B” refers to the case of 0 ≦ e <0.001. When the content of B is large, the saturation magnetic flux density tends to be low, and the coercive force is likely to be high.

  The Fe content (1- (a + b + c + d + e)) is not particularly limited, but preferably satisfies 0.730 ≦ 1- (a + b + c + d + e) ≦ 0.930. 0.780 ≦ 1- (a + b + c + d + e) ≦ 0.930 may be satisfied. When the above range is satisfied, the saturation magnetic flux density is easily improved and the coercive force is easily reduced.

  Further, in the soft magnetic alloy according to the present embodiment, a part of Fe may be substituted with X1 and / or X2.

  X1 is at least one selected from the group consisting of Co and Ni. The content (α) of X1 may be α = 0. That is, X1 may not be contained. Further, the number of atoms of X1 is preferably 40 at% or less, where the total number of atoms in the composition is 100 at%. That is, it is preferable to satisfy 0 ≦ α {1− (a + b + c + d + e)} ≦ 0.40.

  X2 is at least one selected from the group consisting of Ti, V, Mn, Ag, Zn, Al, Sn, As, Sb, Bi and rare earth elements. The content (β) of X2 may be β = 0. That is, X2 may not be contained. Further, the number of atoms of X2 is preferably 3.0 at% or less, where the number of atoms in the entire composition is 100 at%. That is, it is preferable to satisfy 0 ≦ β {1- (a + b + c + d + e)} ≦ 0.030.

  The range of substitution amount for substituting Fe with X1 and / or X2 is 0 ≦ α + β ≦ 0.55. In the case of α + β> 0.55, it becomes difficult to form an Fe-based nanocrystalline alloy by heat treatment, and even if the Fe-based nanocrystalline alloy is formed, the coercive force tends to increase.

  Note that the soft magnetic alloy according to the present embodiment may contain elements other than the above as inevitable impurities. Further, elements other than the above may be contained in total less than 1% by weight with respect to 100% by weight of the soft magnetic alloy.

  Hereinafter, a method for producing a soft magnetic alloy according to the present embodiment will be described.

  There is no limitation in particular in the manufacturing method of the soft-magnetic alloy which concerns on this embodiment. For example, there is a method of manufacturing a soft magnetic alloy ribbon according to this embodiment by a single roll method. The ribbon may be a continuous ribbon.

  In the single roll method, first, pure metals of respective metal elements contained in the finally obtained soft magnetic alloy are prepared and weighed so as to have the same composition as the finally obtained soft magnetic alloy. And the pure metal of each metal element is melt | dissolved and mixed, and a mother alloy is produced. The method for dissolving the pure metal is not particularly limited. For example, there is a method in which the pure metal is melted by high-frequency heating after evacuation in a chamber. The master alloy and the soft magnetic alloy consisting of the finally obtained Fe-based nanocrystal usually have the same composition.

  Next, the produced mother alloy is heated and melted to obtain a molten metal (molten metal). Although there is no restriction | limiting in particular in the temperature of a molten metal, For example, it can be 1200-1500 degreeC.

  In the single roll method, the thickness of the ribbon obtained mainly by adjusting the rotation speed of the roll can be adjusted, but for example, by adjusting the interval between the nozzle and the roll, the temperature of the molten metal, etc. The thickness of the obtained ribbon can be adjusted. Although there is no restriction | limiting in particular in the thickness of a ribbon, For example, it can be set as 5-30 micrometers.

  Before the heat treatment described later, the ribbon is an amorphous material that does not contain crystals having a particle size larger than 15 nm. An Fe-based nanocrystalline alloy can be obtained by subjecting the amorphous ribbon to a heat treatment described later.

  In addition, there is no restriction | limiting in particular in the method of confirming whether the thin ribbon of the soft-magnetic alloy before heat processing contains the crystal | crystallization with a particle size larger than 15 nm. For example, the presence or absence of crystals having a particle size larger than 15 nm can be confirmed by ordinary X-ray diffraction measurement.

  The ribbon before the heat treatment may not contain any initial microcrystals having a particle size of less than 15 nm, but preferably contains initial microcrystals. That is, it is preferable that the ribbon before the heat treatment has a nanoheterostructure composed of amorphous and the initial microcrystals present in the amorphous. In addition, although there is no restriction | limiting in particular in the particle size of an initial stage microcrystal, It is preferable that an average particle diameter exists in the range of 0.3-10 nm.

In addition, the observation method of the presence or absence of the initial microcrystal and the average particle size is not particularly limited. For example, for a sample sliced by ion milling, using a transmission electron microscope, a limited field diffraction image, This can be confirmed by obtaining a nanobeam diffraction image, a bright field image, or a high resolution image. When using a limited-field diffraction image or a nanobeam diffraction image, a ring-shaped diffraction pattern is formed when the diffraction pattern is amorphous, whereas diffraction spots due to the crystal structure are formed when the diffraction pattern is not amorphous. It is formed. When a bright field image or a high resolution image is used, the presence or absence of initial microcrystals and the average grain size can be observed by visual observation at a magnification of 1.00 × 10 ^{5 to} 3.00 × 10 ⁵ times. .

  There is no restriction | limiting in particular in the temperature of a roll, rotational speed, and the atmosphere inside a chamber. The roll temperature is preferably 4 to 30 ° C. for amorphization. The higher the rotational speed of the roll, the smaller the average grain size of the initial microcrystals, and 30-40 m / sec. Is preferable for obtaining initial microcrystals having an average particle size of 0.3 to 10 nm. The atmosphere inside the chamber is preferably in the air considering cost.

  Moreover, there is no restriction | limiting in particular in the heat processing conditions for manufacturing Fe group nanocrystal alloy. Preferred heat treatment conditions vary depending on the composition of the soft magnetic alloy. Usually, a preferable heat treatment temperature is about 400 to 600 ° C., and a preferable heat treatment time is about 10 minutes to 10 hours. However, depending on the composition, there may be a preferred heat treatment temperature and heat treatment time outside the above range. Moreover, there is no restriction | limiting in particular in the atmosphere at the time of heat processing. It may be performed under an active atmosphere such as in the air, or may be performed under an inert atmosphere such as in Ar gas.

  Moreover, there is no restriction | limiting in particular in the calculation method of the average particle diameter in the obtained Fe-based nanocrystal alloy. For example, it can be calculated by observing using a transmission electron microscope. There is no particular limitation on the method for confirming that the crystal structure is bcc (body-centered cubic lattice structure). For example, it can be confirmed using X-ray diffraction measurement.

  Further, as a method for obtaining the soft magnetic alloy according to the present embodiment, there is a method for obtaining the soft magnetic alloy powder according to the present embodiment by, for example, a water atomizing method or a gas atomizing method other than the single roll method described above. Hereinafter, the gas atomization method will be described.

  In the gas atomization method, a molten alloy at 1200 to 1500 ° C. is obtained in the same manner as the single roll method described above. Thereafter, the molten alloy is sprayed in a chamber to produce a powder.

  At this time, it becomes easy to obtain said preferable nanoheterostructure by making gas injection temperature into 4-30 degreeC and making vapor pressure in a chamber into 1 hPa or less.

  After producing the powder by the gas atomization method, heat treatment is performed at 400 to 600 ° C. for 0.5 to 10 minutes, so that each powder can be sintered and the elements can be prevented from being coarsened to diffuse the element. The thermodynamic equilibrium state can be reached in a short time, strain and stress can be removed, and an Fe-based soft magnetic alloy having an average particle size of 10 to 50 nm can be easily obtained.

  As mentioned above, although one Embodiment of this invention was described, this invention is not limited to said embodiment.

  There is no restriction | limiting in particular in the shape of the soft-magnetic alloy which concerns on this embodiment. As described above, a ribbon shape and a powder shape are exemplified, but a block shape and the like are also conceivable.

  There is no restriction | limiting in particular in the use of the soft magnetic alloy (Fe-based nanocrystal alloy) which concerns on this embodiment. For example, magnetic parts are mentioned, and among these, a magnetic core is particularly mentioned. It can be suitably used as a magnetic core for an inductor, particularly a power inductor. The soft magnetic alloy according to this embodiment can be suitably used for a thin film inductor and a magnetic head in addition to a magnetic core.

  Hereinafter, a method for obtaining a magnetic component, in particular, a magnetic core and an inductor from the soft magnetic alloy according to the present embodiment will be described. However, a method for obtaining the magnetic core and the inductor from the soft magnetic alloy according to the present embodiment is not limited to the following method. In addition to inductors, applications of magnetic cores include transformers and motors.

  Examples of a method for obtaining a magnetic core from a ribbon-shaped soft magnetic alloy include a method of winding and laminating a ribbon-shaped soft magnetic alloy. When laminating thin ribbon-shaped soft magnetic alloys via an insulator, a magnetic core with further improved characteristics can be obtained.

  Examples of a method for obtaining a magnetic core from a powder-shaped soft magnetic alloy include a method in which a magnetic core is appropriately mixed with a binder and then molded using a mold. In addition, by applying an oxidation treatment, an insulating film or the like to the powder surface before mixing with the binder, the specific resistance is improved and the magnetic core is adapted to a higher frequency band.

  There is no restriction | limiting in particular in a shaping | molding method, Molding using a metal mold | die, mold shaping | molding, etc. are illustrated. There is no restriction | limiting in particular in the kind of binder, A silicone resin is illustrated. There is no particular limitation on the mixing ratio of the soft magnetic alloy powder and the binder. For example, a binder of 1 to 10% by mass is mixed with 100% by mass of the soft magnetic alloy powder.

For example, a space factor (powder filling rate) is 70% or more and 1.6% by mixing a binder of 1 to 5% by mass with 100% by mass of the soft magnetic alloy powder and compression molding using a mold. A magnetic core having a magnetic flux density of 0.45 T or more and a specific resistance of 1 Ω · cm or more when a magnetic field of × 10 ⁴ A / m is applied can be obtained. The above characteristics are equivalent to or better than general ferrite cores.

Further, for example, by mixing 1 to 3% by weight of a binder with respect to 100% by weight of the soft magnetic alloy powder and compressing with a mold under a temperature condition equal to or higher than the softening point of the binder, the space factor is 80%. As described above, a dust core having a magnetic flux density of 0.9 T or more and a specific resistance of 0.1 Ω · cm or more when a magnetic field of 1.6 × 10 ⁴ A / m is applied can be obtained. The above characteristics are superior to general dust cores.

  Furthermore, the core loss is further reduced and the usefulness is increased by heat-treating the formed body having the above-described magnetic core after the forming as a strain removing heat treatment. Note that the core loss of the magnetic core is reduced by reducing the coercive force of the magnetic body constituting the magnetic core.

  An inductance component can be obtained by winding the magnetic core. There are no particular restrictions on the manner in which the winding is applied and the method of manufacturing the inductance component. For example, a method of winding a winding at least one turn or more around the magnetic core manufactured by the above method can be mentioned.

  Further, when soft magnetic alloy particles are used, there is a method of manufacturing an inductance component by press-molding and integrating the winding coil in a state where the winding coil is built in the magnetic body. In this case, it is easy to obtain an inductance component corresponding to a high frequency and a large current.

  Further, when soft magnetic alloy particles are used, a soft magnetic alloy paste obtained by adding a binder and a solvent to the soft magnetic alloy particles and a paste obtained by adding a binder and a solvent to the conductor metal for the coil. An inductance component can be obtained by heating and firing after alternately laminating and laminating the conductive paste. Alternatively, by producing a soft magnetic alloy sheet using a soft magnetic alloy paste, printing a conductor paste on the surface of the soft magnetic alloy sheet, laminating and firing these, an inductance component in which the coil is built in the magnetic body is obtained. Can be obtained.

  Here, when producing an inductance component using soft magnetic alloy particles, it is excellent to use a soft magnetic alloy powder having a maximum particle size of 45 μm or less and a center particle size (D50) of 30 μm or less. It is preferable for obtaining the Q characteristic. In order to set the maximum particle size to 45 μm or less in terms of sieve diameter, a sieve having an opening of 45 μm may be used, and only the soft magnetic alloy powder passing through the sieve may be used.

  The Q value in the high frequency region tends to decrease as the soft magnetic alloy powder having a large maximum particle size is used. Particularly when the soft magnetic alloy powder having a maximum particle size exceeding 45 μm in the sieve diameter is used, The Q value may be greatly reduced. However, if the Q value in the high frequency region is not important, soft magnetic alloy powder having a large variation can be used. Since soft magnetic alloy powders with large variations can be manufactured at a relatively low cost, it is possible to reduce costs when using soft magnetic alloy powders with large variations.

  Hereinafter, the present invention will be specifically described based on examples.

  The raw metal was weighed so as to have the alloy compositions of the examples and comparative examples shown in the following table, and was melted by high-frequency heating to prepare a master alloy.

  Thereafter, the produced master alloy was heated and melted to form a molten metal at 1300 ° C., and then a 20 ° C. roll was rotated in the atmosphere at a rotational speed of 40 m / sec. The metal was jetted onto a roll by the single roll method used in the above to create a ribbon. The thickness of the ribbon was 20 to 25 μm, the width of the ribbon was about 15 mm, and the length of the ribbon was about 10 m.

  X-ray diffraction measurement was performed on each obtained ribbon to confirm the presence or absence of crystals having a particle size larger than 15 nm. When there is no crystal having a particle size larger than 15 nm, it is assumed to be composed of an amorphous phase, and when a crystal having a particle size larger than 15 nm is present, it is composed of a crystalline phase.

Thereafter, heat treatment was performed at 550 ° C. for 60 minutes on the ribbons of the examples and comparative examples. Saturation magnetic flux density and coercive force were measured for each ribbon after the heat treatment. The saturation magnetic flux density (Bs) was measured at a magnetic field of 1000 kA / m using a vibrating sample magnetometer (VSM). The coercive force (Hc) was measured at a magnetic field of 5 kA / m using a direct current BH tracer. The specific resistance (ρ) was measured by resistivity measurement by a 4-probe method. In this example, the saturation magnetic flux density was set to 1.30 T or more, and 1.45 T or more was further improved. The coercive force was 10.0 A / m or less, and 7.0 A / m or less was even better. The specific resistance (ρ) is the specific resistance (ρ) of a ribbon (hereinafter also referred to as Fe ₉₀ Zr ₇ B ₃ ribbon) prepared by the same manufacturing method as in Example 3 except that the composition is Fe ₉₀ Zr ₇ B _3. ) To 20% or more and less than 40%, the case where it rises is considered good, and the case where it rises 40% or more is considered even better. In the table shown below, when the specific resistance increases by 40% or more from the specific resistance of the Fe ₉₀ Zr ₇ B ₃ ribbon, ◎, 20% or more and less than 40% from the specific resistance of the Fe ₉₀ Zr ₇ B ₃ ribbon, The case where it rises is ◯, the specific resistance of Fe ₉₀ Zr ₇ B ₃ ribbon is equal to or less than 20%, the case where it rises is Δ, and the case where it is lower than the resistivity of Fe ₉₀ Zr ₇ B ₃ ribbon is x. . The object of the present invention can be achieved even if the specific resistance (ρ) is not good.

In Table 7, changes in saturation magnetic flux density and coercive force due to changes with time were measured. Specifically, each strip obtained by measuring the saturation magnetic flux density Bs ₀ and the coercive force Hc ₀ is subjected to an oxidation treatment for 3000 minutes, and the saturation magnetic flux density (Bs ₃₀₀₀ ) and the coercive force (Hc ₃₀₀₀ ) after the oxidation treatment. Was measured. The oxidation treatment was performed under an atmosphere of 150 ° C. for 50 hours.

In Table 7, the case where Bs ₀ ≧ 1.30T, Bs ₃₀₀₀ / Bs ₀ ≦ 0.85, Hc ₀ ≦ 10.0 A / m and Hc ₃₀₀₀ / Hc ₀ ≦ 1.30 was considered good.

  In the examples shown below, X-ray diffraction measurement, and transmission electron microscope showed that all Fe-based nanocrystals having an average particle diameter of 5 to 30 nm and a crystal structure of bcc were present unless otherwise specified. It was confirmed by observation using Moreover, all the Examples and Comparative Examples described in Tables other than Table 8 below do not contain X1 and X2.

  Table 1 describes examples and comparative examples in which the content (a) of Zr was changed when M was only Zr and Cu, X3 and B were not included.

  In Examples 1 to 6 in which the content of each component is within a predetermined range, the saturation magnetic flux density Bs and the coercive force Hc were good.

  On the other hand, in Comparative Example 1 in which the Zr content was too small, the ribbon before the heat treatment was composed of a crystalline phase, the coercive force Hc after the heat treatment was significantly increased, and the specific resistance ρ was decreased. Further, in Comparative Example 2 in which the Zr content was too large, the saturation magnetic flux density was lowered.

  Table 2 describes examples and comparative examples in which the content (a) of Nb was changed when M was only Nb and Cu, X3 and B were not included.

  In Examples 7 to 12 in which the content of each component is within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

  On the other hand, in Comparative Example 3 in which the Nb content was too small, the ribbon before the heat treatment was composed of a crystalline phase, and the coercive force Hc after the heat treatment was remarkably high. Further, in Comparative Example 4 in which the Nb content was too large, the saturation magnetic flux density was lowered.

  Table 3 describes examples and comparative examples in which the Cu content (c) was changed when M was only Zr and X3 and B were not included.

  In Examples 13 to 16 in which the content of each component is within a predetermined range, the saturation magnetic flux density Bs and the coercive force Hc were good.

  On the other hand, in Comparative Example 5 in which the Cu content was too large, the ribbon before the heat treatment consisted of a crystalline phase, and the coercive force Hc after the heat treatment was remarkably increased. Furthermore, the saturation magnetic flux density Bs was lowered.

  Table 4 describes examples and comparative examples in which the type and content (d) of X3 are changed when M is only Zr and Cu and B are not included.

  In Examples 17 to 23 in which the content of each component is within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

  On the other hand, in Comparative Example 7 in which the content of X3 is too large, the saturation magnetic flux density Bs was decreased and the coercive force Hc was increased.

  Table 5 describes examples and comparative examples in which the content (e) of B was changed when M was only Zr and Cu and X3 were not included.

  In Examples 24-27 in which the content of each component is within a predetermined range, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

  On the other hand, in Comparative Example 8 in which the B content was too large, the saturation magnetic flux density Bs was decreased and the coercive force Hc was increased.

  Table 6 describes examples in which the type of M was changed from that in Example 3.

  In Examples 28 to 32 in which the content of each component was within a predetermined range even when the type of M was changed, the saturation magnetic flux density Bs, the coercive force Hc, and the specific resistance ρ were good.

  Table 7 describes examples and comparative examples in which the content of Zr (a) and the content of Si (b) were changed when M was Zr only and Cu, X3 and B were not included. . As described above, with respect to the examples and comparative examples shown in Table 7, changes in saturation magnetic flux density and coercive force due to changes with time were measured.

  Examples 32a-32d and 52-56 were excellent in saturation magnetic flux density, coercive force, and specific resistance, and the change in saturation magnetic flux density and coercive force with time was also small. On the other hand, Comparative Example 8a having too little Si has a large coercive force, and also has a large change with time in the saturation magnetic flux density and the coercive force. Comparative Example 11 with too much Si resulted in a large coercive force. In addition, the saturation magnetic flux density was reduced as compared with Examples 52 to 56 having the same Zr content.

  Table 8 describes an example in which a part of Fe was replaced with X1 and / or X2 in Example 3.

  Even when a part of Fe was replaced with X1 and / or X2, good characteristics were exhibited. However, in Comparative Example 9 where α + β exceeds 0.55, the coercive force increased.

  Table 9 shows examples and comparative examples in which the average grain size of the initial microcrystals and the average grain size of the Fe-based nanocrystalline alloy were changed by changing the rotation speed of the roll, the heat treatment temperature and / or the heat treatment time for Example 3. Is described.

Even when the average grain size of the initial microcrystals and the average grain size of the Fe-based nanocrystalline alloy were changed, good characteristics were exhibited when there were no crystals having a grain size larger than 15 nm in the ribbon before the heat treatment. On the other hand, when there is a crystal having a particle size larger than 15 nm in the ribbon before the heat treatment, that is, when the ribbon before the heat treatment is composed of a crystalline phase, the average particle diameter of the Fe-based nanocrystals after the heat treatment Was significantly increased, and the coercive force Hc was significantly increased.

Claims (16)

Composition formula _{(Fe (1- (α + β} )) X1 α X2 β) a _{(1- (a + b + c} + d + e)) M a Si b Cu c soft magnetic alloy consisting of _X3 d _{B e,}
X1 is one or more selected from the group consisting of Co and Ni,
X2 is one or more selected from the group consisting of Ti, V, Mn, Ag, Zn, Al, Sn, As, Sb, Bi and rare earth elements,
X3 is one or more selected from the group consisting of C and Ge,
M is at least one selected from the group consisting of Zr, Nb, Hf, Ta, Mo and W;
0.030 ≦ a ≦ 0.120
0.020 ≦ b ≦ 0.175
0 ≦ c ≦ 0.020
0 ≦ d ≦ 0.100
0 ≦ e ≦ 0.030
α ≧ 0
β ≧ 0
0 ≦ α + β ≦ 0.55
A soft magnetic alloy characterized by   The soft magnetic alloy according to claim 1, wherein 0 ≦ e ≦ 0.010.   The soft magnetic alloy according to claim 1, wherein 0 ≦ e <0.001.   The soft magnetic alloy according to claim 1, wherein 0.730 ≦ 1- (a + b + c + d + e) ≦ 0.930.   The soft magnetic alloy according to claim 1, wherein 0 ≦ α {1− (a + b + c + d + e)} ≦ 0.40.   The soft magnetic alloy according to claim 1, wherein α = 0.   The soft magnetic alloy according to claim 1, wherein 0 ≦ β {1− (a + b + c + d + e)} ≦ 0.030.   The soft magnetic alloy according to claim 1, wherein β = 0.   The soft magnetic alloy according to claim 1, wherein α = β = 0.   The soft magnetic alloy according to any one of claims 1 to 9, wherein the initial microcrystal has a nanoheterostructure existing in an amorphous state.   The soft magnetic alloy according to claim 10, wherein the initial crystallite has an average particle size of 0.3 to 10 nm.   The soft magnetic alloy according to claim 1, wherein the soft magnetic alloy has a structure made of Fe-based nanocrystals.   The soft magnetic alloy according to claim 12, wherein the average particle diameter of the Fe-based nanocrystal is 5 to 30 nm.   The soft magnetic alloy according to any one of claims 1 to 13, which has a ribbon shape.   The soft magnetic alloy according to any one of claims 1 to 13, which has a powder shape.   A magnetic component comprising the soft magnetic alloy according to claim 1.