TWI694158B - Soft magnetic alloy and magnetic parts - Google Patents

Abstract

The object of the present invention is to provide a soft magnetic alloy having both high saturation magnetic flux density and low coercive force, excellent soft magnetic properties, and small changes in saturation magnetic flux density with time, and small changes in coercive force with time. The solution is the soft magnetism formed by the composition formula ((Fe _{(1-(α+ β ))} X1 _α X2 _β ) _(1-(a+b+c)) M _a B _b Si _c ) _1-d C _d alloy. X1 is one or more types selected from the group consisting of Co and Ni. X2 is one or more selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Bi, N, O, and rare earth elements. M is one or more types selected from the group consisting of Nb, Hf, Zr, Ta, Ti, Mo, W, and V. 0.030≦a≦0.15, 0.020<b≦0.20, 0<c<0.050, 0<d<0.030, α≧0, β≧0, 0≦a+β≦0.50.

Description

Soft magnetic alloy and magnetic parts

The invention relates to soft magnetic alloys and magnetic parts.

In recent years, low power consumption and high efficiency have been demanded in electronics, information and communication equipment. Furthermore, in order to move towards a low-carbon society, the above requirements have become stronger. Therefore, power circuits in electronic, information, and communications equipment are also required to reduce energy loss or improve power efficiency. Then, the magnetic core of the magnetic element used in the power supply circuit is required to increase the saturation magnetic flux density and reduce the core loss (core loss). Reducing the core loss can make the power loss smaller, and can achieve high efficiency and energy saving.

Patent Document 1 describes a Fe-B-M (M=Ti, Zr, Hf, V, Nb, Ta, Mo, W)-based soft magnetic amorphous alloy. Compared with the commercially available amorphous Fe, the soft magnetic amorphous alloy has a high saturation magnetic flux density, etc., and has good soft magnetic characteristics. [Prior Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent No. 3342767

[Problems to be solved by the invention]

In addition, as a method of reducing the core loss of the above-mentioned magnetic core, it is considered to reduce the coercive force of the magnet constituting the magnetic core.

However, in the alloy composition of Patent Document 1, the saturation magnetic flux density and coercive force greatly change with time. That is, there is a problem that the stability against the passage of time is insufficient.

The present invention aims to provide a soft magnetic alloy having both high saturation magnetic flux density and low coercive force, excellent soft magnetic force characteristics, and small changes in saturation magnetic flux density with time and small coercive force changes with time. [Means for solving problems]

In order to achieve the above objective, the soft magnetic alloy of the present invention is characterized in that it has the composition formula ((Fe _{(1-(α+ β ))} X1 _α X2 _β ) _(1-(a+b+c)) M _a B _b Si _c ) _1-d C _d soft magnetic alloy, X1 is selected from the group consisting of Co and Ni, X2 is selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, One or more of the group consisting of Sb, Bi, N, O and rare earth elements, M is one or more selected from the group consisting of Nb, Hf, Zr, Ta, Ti, Mo, W and V, 0.030 ≦a≦0.15 0.020<b≦0.20 0<c<0.050 0<d<0.030 α≧0 β≧0 0≦a+β≦0.50.

With regard to the soft magnetic alloy of the present invention, having the above-mentioned characteristics, it is easy to have a structure that easily becomes an Fe-based nanocrystalline alloy by heat treatment. In addition, the Fe-based nanocrystalline alloy having the above-mentioned characteristics can be a soft magnetic alloy having preferable soft magnetic characteristics with high saturation magnetic flux density and low coercive force. Furthermore, the Fe-based nanocrystalline alloy having the above characteristics has a small change in saturation magnetic flux density with time, and a small change in coercive force with time.

Regarding the soft magnetic alloy of the present invention, 0.73≦1-(a+b+c)≦0.95 may also be used.

Regarding the soft magnetic alloy of the present invention, 0≦α{1-(a+b+c)}(1-d)≦0.40 may be used.

Regarding the soft magnetic alloy of the present invention, α=0 may be used.

Regarding the soft magnetic alloy of the present invention, 0≦β{1-(a+b+c)}(1-d)≦0.030.

Regarding the soft magnetic alloy of the present invention, β=0 may be used.

Regarding the soft magnetic alloy of the present invention, α=β=0 may be used.

The soft magnetic alloy of the present invention may be formed of amorphous and initial microcrystals, and the initial microcrystals exist in the nano-heterostructure in the amorphous.

The average particle size of the initial microcrystals may be 0.3 to 10 nm.

The soft magnetic alloy of the present invention may have a structure formed by Fe-based nanocrystals.

The average particle size of the Fe-based nanocrystals may be 5-30 nm.

The soft magnetic alloy of the present invention may be in the shape of a thin strip.

The soft magnetic alloy of the present invention may be in powder form.

In addition, the magnetic component of the present invention is formed of the above-mentioned soft magnetic alloy.

The following describes the embodiments of the present invention.

The soft magnetic alloy of the present embodiment has a content of Fe, M, B, Si, and C in a specific range. Specifically, it is formed by the composition formula ((Fe _{(1-(α+ β ))} X1 _α X2 _β ) _(1-(a+b+c)) M _a B _b Si _c ) _1-d C _d Soft magnetic alloy, X1 is one or more selected from the group consisting of Co and Ni, X2 is selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Bi, N, O and rare earth elements One or more of the group, M is one or more selected from the group consisting of Nb, Hf, Zr, Ta, Ti, Mo, W and V, and 0.030≦a≦0.15 0.020<b≦0.20 0<c <0.050 0<d<0.030 α≧0 β≧0 0≦a+β≦0.50.

The soft magnetic alloy having the above-mentioned composition is made of amorphous material, and it is easy to make a soft magnetic alloy containing no crystal phase formed by crystals having a particle diameter larger than 15 nm. Then, when this soft magnetic alloy is heat-treated, Fe-based nanocrystals are easily precipitated. Then, soft magnetic alloys containing Fe-based nanocrystals tend to have good magnetic properties. Furthermore, it is easy to make a soft magnetic alloy excellent in corrosion resistance.

In other words, with the soft magnetic alloy formed as described above, it is easy to make the starting material of the soft magnetic alloy that crystallizes Fe-based nanocrystals.

The so-called Fe-based nanocrystal refers to a crystal with a grain size of nanometer grade, and the crystal structure of Fe is a bcc (body-centered cubic lattice structure) crystal. In this embodiment, it is preferable to precipitate Fe-based nanocrystals having an average particle size of 5 to 30 nm. The soft magnetic alloy in which such Fe-based nanocrystals are precipitated has a higher saturation magnetic flux density and a lower coercive force.

Furthermore, the soft magnetic alloy before heat treatment may be formed entirely of amorphous only, but only by amorphous and initial microcrystals with a particle size of 15 nm or less, the initial microcrystals exist in the amorphous Nano heterostructures are preferred. By having a nano-heterostructure in which initial microcrystals exist in the amorphous, Fe-based nano crystals are easily precipitated during heat treatment. Furthermore, in the present embodiment, the average grain size of the initial microcrystals is preferably 0.3 to 10 nm.

Hereinafter, each component of the soft magnetic alloy of the present embodiment will be described in detail.

M is one or more types selected from the group consisting of Nb, Hf, Zr, Ta, Ti, Mo, W, and V. In addition, from the viewpoint of increasing the saturation magnetic flux density, the proportion of elements selected from the group consisting of Nb, Hf, and Zr in the total M is preferably more than 50 at%.

The content (a) of M satisfies 0.030≦a≦0.15. When a is small, a crystalline phase formed by crystals with a particle size larger than 15 nm is likely to be generated in the soft magnetic alloy before heat treatment, and Fe-based nanocrystals cannot be precipitated by heat treatment, and the retention force tends to increase. Furthermore, the changes over time of the saturation magnetic flux density and coercive force tend to become larger. When a is large, the saturation magnetic flux density tends to become low. In addition, the coercive force changes with time easily becomes larger.

The content (b) of B satisfies 0.020<b≦0.20. In addition, it is better to satisfy 0.025≦b≦0.20, and it is more preferable to satisfy 0.025≦b≦0.10. When b is small, a crystalline phase formed by crystals with a particle size larger than 15 nm is likely to be generated in the soft magnetic alloy before heat treatment, and Fe-based nanocrystals cannot be precipitated by heat treatment, and the retention force tends to increase. Furthermore, the changes over time of the saturation magnetic flux density and coercive force tend to become larger. When b is large, the saturation magnetic flux density becomes lower easily. In addition, the coercive force changes with time easily becomes larger.

The content (c) of Si satisfies 0<c<0.050. In addition, it is better to satisfy 0.001≦c≦0.040, and more preferably to satisfy 0.010≦c≦0.030. When c is too small and c is too large, the temporal change of the saturation magnetic flux density and the temporal change of the coercive force easily become larger.

The content of Fe (1-(a+b+c)) is not particularly limited, and it is preferable to satisfy 0.73≦1-(a+b+c)≦0.95. 0.73≦1-(a+b+c), it is easy to increase the saturation magnetic flux density. In addition, when 1-(a+b+c)≦0.95, the soft magnetic alloy before heat treatment is formed of primary microcrystals having a particle size of 15 nm or less, and nanoparticles having the above initial microcrystals in the amorphous material are likely to be generated. Amorphous phase of rice heterostructure. In addition, the said Fe content (1-(a+b+c)) is the value which rounded off the 3rd decimal place.

The content (d) of C satisfies 0<d<0.030. In addition, it is better to satisfy 0.001≦d≦0.025, and more preferably to satisfy 0.005≦d≦0.020. When d is too small and d is too large, the temporal change of the saturation magnetic flux density and the temporal change of the coercive force easily become larger.

Regarding the soft magnetic alloy of this embodiment, as compared with when only Si is included (c=0) or when only C is included (d=0), by containing both Si and C, the saturation magnetic flux density can be significantly increased over time Changes and changes in coercivity over time become smaller.

In addition, in the soft magnetic alloy of this embodiment, a part of Fe may be replaced with X1 and/or X2.

X1 is one or more types selected from the group consisting of Co and Ni. The content (α) of X1 may be α=0. That is, X1 may not be included. In addition, the atomic number of the entire composition is 100 at%, and the atomic number of X1 is preferably 40 at% or less. That is, it is preferable to satisfy 0≦α{1-(a+b+c)}(1-d)≦0.40.

X2 is one or more selected from the group consisting of Al, Mn, Ag, Zn, Sn, As, Sb, Bi, N, O, and rare earth elements. The content (β) of X2 may be β=0. That is, X2 may not be included. In addition, the atomic number of the entire composition is 100 at%, and the atomic number of X2 is preferably 3.0 at% or less. That is, it is preferable to satisfy 0≦β{1-(a+b+c)}(1-d)≦0.030.

The range of the substitution amount in which Fe is substituted with X1 and/or X2 is not more than half of Fe based on the number of atoms. That is, 0≦a+β≦0.50. When a+β>0.50, it is difficult to make Fe-based nanocrystalline alloy by heat treatment.

Furthermore, the soft magnetic alloy of this embodiment may contain elements other than the above as unavoidable impurities. For example, it may contain 1% by weight or less with respect to 100% by weight of the soft magnetic alloy.

The method of manufacturing the soft magnetic alloy of this embodiment will be described below.

The method of manufacturing the soft magnetic alloy of this embodiment is not particularly limited. For example, there is a method of manufacturing a thin ribbon of the soft magnetic alloy of this embodiment by the single-roller method. In addition, the thin ribbon may be a continuous thin ribbon.

In the single-roller method, first, pure metals included in each metal element of the finally obtained soft magnetic alloy are prepared, and the same composition as the finally obtained soft magnetic alloy is weighed. Then, the pure metals of each metal element are melted and mixed to make a master alloy. In addition, the method for melting the pure metal is not particularly limited. For example, a method of heating and melting with high frequency after evacuating the cavity. Furthermore, the master alloy and the resulting soft magnetic alloy formed of Fe-based nanocrystals usually have the same composition.

Next, the produced master alloy is heated and melted to obtain a molten metal (bath). The temperature of the molten metal is not particularly limited, and can be, for example, 1200 to 1500°C.

In the single-roller method, the thickness of the obtained thin ribbon can be adjusted mainly by adjusting the rotation speed of the roller, but the thickness of the obtained thin ribbon can also be adjusted, for example, by adjusting the distance between the nozzle and the roller or the temperature of the molten metal. The thickness of the thin strip is not particularly limited, and may be, for example, 5 to 30 μm.

Before the heat treatment to be described later, the thin strip is an amorphous material that does not contain crystals having a particle size larger than 15 nm. By applying the heat treatment described later to the amorphous thin strip, the Fe-based nanocrystalline alloy can be obtained.

In addition, the method of confirming whether the thin ribbon of the soft magnetic alloy before the heat treatment contains crystals having a particle diameter larger than 15 nm is not particularly limited. For example, the presence or absence of crystals with a particle size larger than 15 nm can be confirmed by ordinary X-ray diffraction measurement.

In addition, the thin strip before heat treatment may not contain the initial microcrystals with a particle diameter of less than 15 nm at all, and it is preferable to contain the initial microcrystals. That is, the thin strip before heat treatment is preferably a nano-heterostructure formed of amorphous and the initial microcrystals present in the amorphous. In addition, the particle size of the initial microcrystals is not particularly limited, and the average particle size is preferably in the range of 0.3 to 10 nm.

In addition, there is no particular limitation on the observation method for the presence or absence of the above-mentioned initial microcrystals and average particle size. For example, for a sample thinned by ion milling, a transmission electron microscope is used to obtain a selected area diffraction and nanometer. Rice beam diffraction, bright field image or high-resolution image confirmation. When using selective diffraction or nanobeam diffraction, a ring-shaped diffraction is formed in the diffraction pattern relative to amorphous, and when it is not amorphous, a diffraction point due to a crystalline structure is formed. In addition, when using a bright field image or a high-resolution image, it can be observed at a visual magnification of 1.00×10 ⁵ to 3.00×10 ⁵ times, and the presence or absence of initial microcrystals and average particle size can be observed.

The temperature, rotation speed of the roller and the atmosphere inside the cavity are not particularly limited. The temperature of the roller is preferably 4 to 30°C for amorphization. The faster the rotation speed of the roller, the average particle size of the initial microcrystals tends to be smaller. In order to obtain the initial microcrystals with an average particle size of 0.3 to 10 nm, it is preferably 25 to 30 m/sec. Considering the cost, the atmosphere inside the cavity is preferably atmospheric.

In addition, the heat treatment conditions for manufacturing the Fe-based nanocrystalline alloy are not particularly limited. Depending on the formation of the soft magnetic alloy, the preferred heat treatment conditions are different. Generally, the preferred heat treatment temperature is approximately 400 to 700°C, and the preferred heat treatment time is approximately 0.5 to 10 hours. However, depending on the formation, there are cases where the preferred heat treatment temperature and heat treatment time are outside the above range. In addition, the atmosphere during heat treatment is not particularly limited. It can be carried out under an active atmosphere such as in the atmosphere, or under an inert atmosphere such as in Ar gas.

In addition, the method of calculating the average particle diameter of the obtained Fe-based nanocrystalline alloy is not particularly limited. For example, it can be calculated by observation using a transmission electron microscope. In addition, the method of confirming that the crystal structure is bcc (body-centered cubic lattice structure) is not particularly limited. For example, it can be confirmed by X-ray diffraction measurement.

In addition to the method of obtaining the soft magnetic alloy of the present embodiment, in addition to the single-roller method described above, for example, a powder of the soft magnetic alloy of the present embodiment can be obtained by a water atomization method or a gas atomization method. method. The following describes the gas atomization method.

In the gas atomization method, a molten alloy of 1200 to 1500° C. is obtained in the same manner as the single roller method described above. After that, the above molten alloy is sprayed into the cavity to produce a powder.

At this time, by setting the gas injection temperature to 4 to 30° C. and the vapor pressure in the cavity to 1 hPa or less, it becomes easy to obtain the above-described preferred nano heterostructure.

After the powder is produced by gas atomization, heat treatment at 400~700℃ for 0.5~10 minutes can prevent each powder from sintering to make the powder coarse, and promote the diffusion of elements, which can reach the thermodynamics in a short time. In the equilibrium state, strain or stress can be removed, and it becomes easy to obtain Fe-based soft magnetic alloys with an average particle size of 10 to 50 nm.

Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment.

The shape of the soft magnetic alloy of this embodiment is not particularly limited. As described above, the shape of the thin strip and the shape of the powder can be exemplified, and in addition to this, the shape of the agglomerate can be considered.

The use of the soft magnetic alloy (Fe-based nanocrystalline alloy) of this embodiment is not particularly limited. For example, a magnetic component can be mentioned, and a magnetic core is particularly mentioned. For inductors, it is particularly suitable for magnetic cores for power inductors. The soft magnetic alloy of the present embodiment can be favorably used for thin film inductors and magnetic heads in addition to magnetic cores.

Hereinafter, a method of obtaining a magnetic part from the soft magnetic alloy of the present embodiment, particularly a magnetic core and an inductor will be described, but the method of obtaining a magnetic core and an inductor from the soft magnetic alloy of the present embodiment is not limited to the following述方法。 The method. In addition, the applications of the magnetic core include transformers, motors, etc. in addition to inductors.

The method of obtaining a magnetic core from a thin-strip-shaped soft magnetic alloy includes, for example, a method of winding a thin-strip-shaped soft magnetic alloy, a method of lamination, and the like. When laminating a soft magnetic alloy in the shape of a thin strip, when laminating via an insulator, a magnetic core with further improved characteristics can be obtained.

A method of obtaining a magnetic core from a soft magnetic alloy in powder form may be, for example, a method of molding with a metal mold after mixing with an appropriate binder. In addition, before mixing with the adhesive, by oxidizing the surface of the powder or insulating coating, etc., to increase the specific resistance, it becomes a magnetic core more suitable for the high-frequency region.

The molding method is not particularly limited, and examples include molding using a metal mold, molding using a mold, and the like. The type of adhesive is not particularly limited, and silicone resin can be exemplified. The mixing ratio of the soft magnetic alloy powder and the glue adhesive is also not particularly limited. For example, 100% by mass of soft magnetic alloy powder is mixed with 1-10% by mass of adhesive.

For example, by mixing 100% by mass of soft magnetic alloy powder with 1 to 5% by mass of the adhesive and compressing it by using a metal mold, the yield rate (powder filling rate) of 70% or more can be obtained by applying 1.6×10 ⁴ A/ A magnetic core with a magnetic flux density of 0.45T or more and a specific resistance of 1Ω‧cm or more in the magnetic field of m. The above characteristics are equal to or higher than those of a general ferrite core.

In addition, for example, 100% by mass of soft magnetic alloy powder, mixed with 1 to 3% by mass of the adhesive, by compression molding with a metal mold at a temperature above the softening point of the adhesive, the yield rate can be more than 80% , When the magnetic field density of 1.6×10 ⁴ A/m is applied, the magnetic flux density is 0.9T or more, and the specific resistance is 0.1Ω‧cm or more. The above-mentioned characteristics are more excellent than general powder magnetic cores.

Furthermore, by applying a heat treatment as a strain-relief heat treatment to the formed body forming the above-mentioned magnetic core, the core loss is further reduced, and the usability is improved. Furthermore, the core loss of the magnetic core can be reduced by reducing the coercive force of the magnet constituting the magnetic core.

In addition, by winding the magnetic core, an inductance component can be obtained. The method of applying the winding wire and the method of manufacturing the inductive parts are not particularly limited. For example, the magnetic core manufactured by the above method can be wound by winding at least one turn.

In addition, when using soft magnetic alloy particles, there is a method of manufacturing an inductance component by press-forming and integrating the winding coil in a magnet. In this case, it is easy to obtain an inductance component that can cope with high frequency and large current.

In addition, when using soft magnetic alloy particles, a soft magnetic alloy paste in which a binder and a solvent are added to the soft magnetic alloy particles, and a conductor in which a binder and a solvent are added to the conductor metal for coils are used to paste After lamination of the paste and alternating printing, the inductor parts can be obtained by heating and forging. Alternatively, a soft magnetic alloy sheet is produced using a soft magnetic alloy paste, a conductor paste is printed on the surface of the soft magnetic alloy sheet, and the layered and calcined layers are used to obtain an inductance component having a magnet with a built-in coil.

Here, when manufacturing an inductance component using soft magnetic alloy particles, it is preferable to use a soft magnetic alloy powder having a maximum particle diameter of 45 μm or less and a core particle diameter (D50) of 30 μm or less to obtain excellent Q characteristics. In order to make the maximum particle size below the sieve diameter of 45 μm, a sieve with a mesh size of 45 μm can be used, and only soft magnetic alloy powder that passes through the sieve is used.

Use of a larger soft magnetic alloy powder for the maximum particle size tends to decrease the Q value in the high-frequency region. Especially when using a soft magnetic alloy powder with a maximum particle size of more than 45 μm in sieve diameter, the Q value in the high-frequency region is reduced. Obviously falling situation. However, when the Q value in the high-frequency region is not important, soft magnetic alloy powder with a large dispersion can be used. The soft magnetic alloy powder with large dispersion is relatively inexpensive to manufacture, and the cost can be reduced when using the soft magnetic alloy powder with large dispersion. [Example]

Hereinafter, the present invention will be specifically described based on examples.

The raw material metal was weighed into the alloy composition of each example and comparative example shown in the following table, and melted by high-frequency heating to produce a master alloy.

After that, the produced master alloy is heated and melted to form a molten metal at 1300°C. In the atmosphere, the above-mentioned metal is rolled toward the roll by a single-roller method using a 20°C roll at the rotation speed shown in the following table. Round spray, making thin strips. In the examples and comparative examples where the rotation speed is not described, the rotation speed is 30 m/sec. The thickness of the thin strip is 20-25 μm, the width of the thin strip is about 15 mm, and the length of the thin strip is about 10 m.

The obtained thin ribbon was subjected to X-ray diffraction measurement to confirm the presence or absence of crystals having a particle size larger than 15 nm. Then, when there is no crystal having a larger particle size than 15 nm, it is formed as an amorphous phase, and when there is a crystal having a larger particle size than 15 nm, it is formed as a crystalline phase.

Thereafter, the thin strips of the examples and comparative examples were heat-treated at the heat treatment temperatures shown in the following table. In the examples and comparative examples where the heat treatment temperature is not described, heat treatment is performed at 550°C. For each thin strip after heat treatment, the saturation magnetic flux density (Bs ₀ ) and coercive force (Hc ₀ ) before oxidation treatment described below were measured. The saturation magnetic flux density is measured with a magnetic field of 1000 kA/m using a vibrating sample type magnetometer (VSM). The coercive force is measured with a magnetic field of 5 kA/m using a DC BH tracker.

Furthermore, each thin strip was subjected to an oxidation treatment for 3000 minutes, and the saturation magnetic flux density (Bs ₃₀₀₀ ) and coercive force (Hc ₃₀₀₀ ) after the oxidation treatment were measured. The oxidation treatment was carried out under the conditions of 150°C for 50 hours in an atmospheric atmosphere.

In this embodiment, Bs ₀ ≧1.30T, Bs ₃₀₀₀ /Bs ₀ ≦0.85, Hc ₀ ≦10.0A/m and Hc ₃₀₀₀ /Hc ₀ ≦1.30 are preferred. In addition, Bs ₀ ≧1.60T and Hc ₀ ≦5.0A/m are better, and Bs ₀ ≧1.60T and Hc ₀ ≦3.0A/m are the best.

In addition, as long as there is no special description in the examples shown below, it is confirmed by X-ray refractometry and observation by a transmission electron microscope that all of them have Fe Kenai with an average particle diameter of 5 to 30 nm and a crystal structure of bcc Rice crystals.

[Table 1]

[Table 2]

[table 3]

[Table 4]

[table 5]

[Table 6]

[Table 7]

[Table 8]

[Table 9]

Table 1 describes examples and comparative examples in which the content (a) of M is changed.

In the embodiment in which the content of each component is within a predetermined range, the saturation magnetic flux density and coercive force before oxidation treatment are good. Furthermore, changes in saturation magnetic flux density and coercive force due to oxidation treatment are small.

On the other hand, in the comparative example where a=0.025, the thin strip before heat treatment is formed of a crystalline phase, and the coercive force after heat treatment becomes significantly higher. Furthermore, changes in saturation magnetic flux density and coercive force due to oxidation treatment are large. In addition, in the comparative example where a=0.180, the saturation magnetic flux density decreases, and the coercive force due to the oxidation treatment changes greatly.

Table 2 describes examples and comparative examples in which the content (b) of B is changed.

In the embodiment in which the content of each component is within a predetermined range, the saturation magnetic flux density and coercive force before oxidation treatment are good. Furthermore, changes in saturation magnetic flux density and coercive force due to oxidation treatment are small.

On the other hand, in the comparative example with b=0.020, the thin strip before heat treatment is formed of a crystalline phase, and the coercive force after heat treatment is remarkably high. Furthermore, changes in saturation magnetic flux density and coercive force due to oxidation treatment are large. In addition, in the comparative example of b=0.230, the saturation magnetic flux density decreases, and the coercive force due to oxidation treatment changes greatly.

Table 3 describes examples and comparative examples in which the content of M (a) or the content of B (b) is changed within the scope of the present invention, and the content of Si (c) and the content of C (d) are simultaneously changed.

In the embodiment in which the content of each component is within a predetermined range, the saturation magnetic flux density and coercive force before oxidation treatment are good. Furthermore, changes in saturation magnetic flux density and coercive force by oxidation treatment are small.

On the other hand, in the comparative example where c=0 and d=0, that is, the comparative example not containing Si and C, the change in saturation magnetic flux density and coercive force by oxidation treatment are very large. In addition, in some comparative examples, the coercive force also increases.

Table 4 describes examples and comparative examples in which the content (c) of Si and/or the content (d) of C are changed.

In the embodiment in which the content of each component is within a predetermined range, the saturation magnetic flux density and coercive force before oxidation treatment are good. Furthermore, changes in saturation magnetic flux density and coercive force by oxidation treatment are small.

On the other hand, in the comparative example of c=0, the comparative example of c=0.050, the comparative example of d=0, and the comparative example of d=0.030, the change of saturation magnetic flux density and coercive force by oxidation treatment change greatly.

Table 5 describes examples of changing the type of M.

Even if the type of M is changed and the content of each component is within a predetermined range, the saturation magnetic flux density and coercive force before oxidation treatment are good. Furthermore, changes in saturation magnetic flux density and coercive force by oxidation treatment are small. Especially when using Nb, Hf or Zr, there is a tendency to increase the residual magnetic flux density.

Table 6 describes examples in which M uses two elements.

Even if the type of M is changed and the content of each component is within a predetermined range, the saturation magnetic flux density and coercive force before oxidation treatment are good. Furthermore, changes in saturation magnetic flux density and coercive force by oxidation treatment are small. Especially when two elements are selected from Nb, Hf or Zr, there is a tendency to increase the saturation magnetic flux density.

Table 7 describes examples and comparative examples in which M uses three elements.

Even if the type of M is changed and the content of each component is within a predetermined range, the saturation magnetic flux density and coercive force before oxidation treatment are good. Furthermore, changes in saturation magnetic flux density and coercive force by oxidation treatment are small. In particular, two or more elements are selected from Nb, Hf, and Zr. When the ratio of Nb, Hf, and Zr accounts for more than 50 at% of the entire M, the saturation magnetic flux density tends to increase.

In contrast, in the comparative example where a=0.029, the thin strip before heat treatment is formed of a crystalline phase, and the coercive force after heat treatment is remarkably high. Furthermore, changes in saturation magnetic flux density and coercive force by oxidation treatment are large. In addition, in the comparative example of a=0.160, the saturation magnetic flux density decreases, and the coercive force of the oxidation treatment changes greatly.

Table 8 shows an example in which part of Fe is replaced with X1 and/or X2 for Example 28.

Even if a part of Fe is replaced with X1 and/or X2, it shows good characteristics.

Table 9 is an example of changing the average particle size of the initial microcrystals and the average particle size of the Fe-based nanocrystalline alloy by changing the rotation speed and/or heat treatment temperature of the roller for Example 28.

The average particle size of the initial microcrystals is 0.3 to 10 nm, and when the average particle size of the Fe-based nanocrystalline alloy is 5 to 30 nm, compared with the case outside the above range, there is a tendency to show good characteristics.

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Claims (12)

A soft magnetic alloy characterized by a composition formula ((Fe _(1-(α+β)) X1 _α X2 _β ) _(1-(a+b+c)) M _a B _b Si _c ) _{1 -d} C _d soft magnetic alloy, wherein X1 is selected from the group consisting of Co and Ni, X2 is selected from Al, Mn, Ag, Zn, Sn, As, Sb, Bi, N, One or more types of O and rare earth elements, M is one or more types selected from the group consisting of Nb, Hf, Zr, Ta, Ti, Mo, W, and V, and 0.030≦a≦0.15 0.020 <b≦0.20 0<c<0.050 0<d<0.030 0≦α{1-(a+b+c)}(1-d)≦0.40 0≦β{1-(a+b+c)}( 1-d)≦0.030 0≦a+β≦0.50. The soft magnetic alloy as described in item 1 of the patent application scope, where 0.73≦1-(a+b+c)≦0.95. The soft magnetic alloy as described in item 1 or 2 of the patent application, where α=0. The soft magnetic alloy as described in item 1 or 2 of the patent application, where β=0. The soft magnetic alloy as described in item 1 or 2 of the patent application, where α=β=0. The soft magnetic alloy as described in item 1 or 2 of the patent application range has an amorphous structure and an initial microcrystal, and the initial microcrystal exists in the amorphous structure of the nanostructure. The soft magnetic alloy according to item 6 of the patent application scope, in which the above-mentioned initial microcrystalline The average particle size is 0.3~10nm. The soft magnetic alloy as described in item 1 or 2 of the patent application scope has a structure formed by Fe-based nanocrystals. The soft magnetic alloy as described in item 8 of the patent application range, wherein the average particle diameter of the Fe-based nanocrystals is 5 to 30 nm. The soft magnetic alloy as described in item 1 or 2 of the patent application has a thin ribbon shape. The soft magnetic alloy as described in item 1 or 2 of the patent application is in powder form. A magnetic part formed of a soft magnetic alloy as described in any one of items 1 to 11 of the patent application.