TW201925545A - Horizontal transport type electrolytic plating device enabling easy maintenance and inspection work for allowing operators to easily perform maintenance and inspection work inside a plating processing tank from outside of the tank - Google Patents

Abstract

Provided is a horizontal transport type electrolytic plating device which is easy for operators to perform maintenance and inspection work inside the plating processing tank from outside of the plating processing tank. Through inspection ports (10, 22) recessed and defined in each side surface portion of the plating processing tank (1) and auxiliary tank (20), operators are allowed to perform maintenance and inspection work inside the plating processing tank from outside of the tank. In the inspection port (10) of the plating processing tank (1), a side cover (11) may be easily and reliably attached and detached by a pressing member (14). A side cover (23) with an up-and-down sliding type attaching and detaching structure is disposed on the inspection port (22) of the auxiliary tank (20), so that attachment and detachment can be easily and reliably performed. A clamping jig (5) that clamps both side edges of a substrate product (P) for carrying is configured to be easily attached and detached by using fixing bolts (41) and bolt engagement holes (40). By detaching the clamping jig (5), it is much easier to perform the maintenance and inspection work inside the plating processing tank.

Description

Horizontal transfer electrolytic plating device with easy maintenance and inspection

The present invention relates to a horizontal transfer type electrolytic plating device, and more particularly, to an electrolytic plating device that facilitates maintenance and inspection work inside a plating treatment tank.

The conventional horizontal transfer type electrolytic plating device is a method in which a substrate product to which a cathode current is supplied in a plating solution in a plating treatment tank is oriented horizontally between the upper and lower electrodes to which the anode current is supplied in a single direction. During the horizontal transportation, the substrate products are subjected to electrolytic plating. In addition, as a means for horizontally transporting the aforementioned substrate product in one direction, it is provided with a transport driving means and a plurality of clamping jigs. The transport driving means is provided on both sides of the transport path across the substrate product and is looped. This gripping jig is mounted on the conveyance drive means so that the upper part is located in the air, and is moved around by the conveyance drive means. It has a holding contact part in the lower part and is used across the conveyance path. The grip contact points of the plurality of gripping jigs that move on the inner linear movement paths that are parallel to each other grip the edges of both sides of the substrate product from the up and down direction, and the substrate product is in a state where the surface of the substrate is facing up and down. The processing liquid in the processing tank is horizontally transported in one direction. Such a horizontal transport type electrolytic plating apparatus is also known (Patent Documents 1 and 2). In this horizontal transport type electrolytic plating device, the maintenance and inspection work inside the plating treatment tank is performed after the plating solution is discharged, because the inside of the plating treatment tank is surrounded by the side wall surface of the treatment tank and the tank is complicatedly equipped. It is very difficult for the operator to enter the interior of the processing tank, and its maintenance and inspection work is not easy.

In addition, in a horizontal transfer type electrolytic plating device, as a means of horizontally transporting a substrate product in a single direction, an electrolytic plating device employing a plurality of clamping fixtures that are moved in a circle is disposed in most of the processing tank. The presence of two holding jigs is an obstacle, and it is not easy to perform maintenance and inspection work inside the plating treatment tank.

[Patent Document 1] Japanese Utility Model Registration No. 3176980 [Patent Document 2] Japanese Patent Application Publication No. 2014-105339

[Problems to be solved by the invention]

The problem to be solved by the present invention is to make it easy for the operator to perform the maintenance and inspection work inside the electroplating treatment tank of the electrolytic plating device from the outside of the electroplating treatment tank in the horizontal transport type electrolytic electroplating device, and to make it easy for the operator to perform electroplating. Maintenance inspection work inside the processing tank.

In addition, in the horizontal transfer type electrolytic electroplating device, even if the substrate product is horizontally transported in one direction, the electrolytic electroplating device using a plurality of clamping fixtures that are moved in a detour can still allow the operator to easily remove the electroplating. The inside of the electroplating treatment tank is subjected to maintenance and inspection operations on the outside of the treatment tank, so that the operator can easily perform the maintenance and inspection operations inside the electroplating treatment tank. [Technical means to solve the problem]

In order to solve the foregoing problems, the horizontal transport type electrolytic electroplating device provided by the present invention with easy maintenance and inspection work is a method in which a substrate product to which a cathode current is supplied is placed in an electroplating bath in an electroplating treatment tank with a plate surface facing up and down. The upper and lower electrodes that supply the anode current are horizontally transported in a single direction, and the substrate product is subjected to electrolytic plating treatment in this horizontal transport process. It is characterized in that the two parts of the aforementioned electroplating treatment tank made of plastic are along two sides of the product transport direction. The side portion is recessed to form an inner inspection opening that opens upward so that the inside of the plating treatment tank can be maintained and inspected from the outside, and the height of the lower edge portion of the recessed opening of the inner inspection opening is at least higher than that of the substrate product. The horizontal conveying height line is recessed so that the inner side inspection cover is detachably installed with a plastic inner side cover. The side cover can seal the inner inspection opening from the outside into a closed state and It is detachable, and auxiliary grooves are respectively provided on both side portions of the electroplating treatment groove. The bottom surface portion and the side portion surrounded by the side are recessed and formed upward at the position of the auxiliary groove corresponding to the side portion of the inner inspection opening from the outside so that the inside of the plating treatment tank can be maintained and inspected through the inner inspection opening. The outer inspection opening of the opening is recessed so that the height position of the lower edge portion of the recessed opening of the outer inspection opening is at least lower than the horizontal conveying height line of the substrate product. An outer side cover is installed, which can close the outer inspection port into a closed state and can be removed.

According to the present invention, inspection openings are formed in each side of the plating treatment tank and the auxiliary tank. After the plating solution in the plating treatment tank is discharged, the inspection openings after the inner and outer side covers are removed, Allows the operator to easily perform maintenance and inspection work inside the plating treatment tank from outside the tank.

In addition, the horizontal transport type electrolytic plating device of the present invention is an electrolytic plating device that performs a plating process in the process of horizontally transporting a substrate product in a plating solution in a plating treatment tank, and is more efficient than a substrate product in a plating solution. The electroplating device that carries the plating process while carrying it in a vertical posture can reduce the height of the plating treatment tank. In this way, according to the present invention, the operator can easily attach and remove the side cover from the outside of the device at an appropriate height position, and the electroplating treatment tank can be placed on the stand, so that the maintenance and inspection of the equipment in the tank can be easily performed.

In addition, in the present invention, an inspection port is provided at a side portion of the plating treatment tank, an auxiliary groove surrounding the inspection port is provided outside the inspection port, and an inspection port is also provided at the side portion of the auxiliary groove, and these inspection ports are attachable and detachable. Since the side cover is installed on the floor, it also has comprehensive measures to prevent liquid leakage in the treatment tank.

In addition, in order to solve the aforementioned problems, the horizontal transport type electrolytic electroplating device provided by the present invention is easy to maintain and inspect, and the substrate products to which the cathode current is supplied are placed in the plating solution in the plating treatment tank with the surface of the substrate facing up and down. Means of horizontally transporting in a single direction between the upper and lower electrodes to which anode current is supplied, and carrying out electrolytic plating treatment on the substrate product during the horizontal conveying process, and the method of horizontally transporting the substrate product in a single direction are provided with a transportation driving means and a plurality of means The holding jig is formed in a long shape in the up-and-down direction. The conveying driving means is provided on both sides of the conveying path of the substrate product and is driven in a circle. The holding jig is the above. The part is mounted on the conveyance driving means so as to be located in the air, and is moved around by the conveyance driving means. The lower part has a holding contact part and moves on a linear moving path parallel to each other through the conveying path. The holding contact portions of the plurality of holding jigs clamp the edge portions on both sides of the substrate product from up and down, and the substrate product The plate surface is transported horizontally in one direction in the plating solution in the processing tank in a state in which the surface of the plate is facing up and down. The inner side of the plating treatment tank is inspected from the outside to form an inner inspection opening that opens upward, and the height position of the lower edge of the concave opening of the inner inspection opening is at least more than the horizontal conveying height line of the substrate product. The lower side is formed by recessing. A plastic inner side cover is detachably installed on the inner inspection port. The side cover can seal the inner inspection port from the outside into a closed state and can be removed. An auxiliary groove is provided on each of the two side portions of the electroplating treatment tank. The auxiliary groove includes a bottom surface portion and a side portion surrounding the inner inspection port from the outside. At the position of the auxiliary groove corresponding to the side portion of the inner inspection port, The inside inspection opening can be recessed from the outside through the aforementioned inside inspection opening to form a maintenance inspection inside the plating treatment tank, and the outside inspection opening can be used for inspection. The height position of the lower edge of the recessed opening of the port is at least lower than the horizontal conveying height line of the substrate product. The recessed formation is formed, and an outer side cover is detachably installed at the outer inspection port. The outer inspection port can be closed and detachable. The clamping jig is attached to the transportation driving means through a conductive clamping jig attachment body connected to the transportation driving means. The fixture mounting body is fitted to the fixed rail from the outside while slidingly moving with a fixed rail fixedly arranged along the moving path of the clamping fixture. The clamping fixture is formed to be up and down. A fixed clamping portion having a long direction and conductivity, a movable clamping portion having a long shape in a vertical direction and having conductivity, and an opening / closing mechanism, the fixed clamping portion is located above the air The method is fixedly held by the clamping jig mounting body, and the movable clamping section is movably held up and down by the fixed clamping section. The opening and closing mechanism is formed for the fixed structure. The grip contact portion of the lower end portion of the fixed gripping portion is closed by moving the grip contact portion formed at the lower end portion of the movable gripping portion upward or downward by the elastic force of a compression spring, and is provided in the The upper clamping body of the clamping jig is engaged with an engaging guide that is fixedly arranged at the open position of the clamping jig that moves around and has a height difference, thereby resisting the elastic pressure of the compression spring to make the aforementioned movable clamp The holding contact portion of the holding portion opens the holding contact portion of the fixed clamping portion, and passes through the holding fixture mounting body and the holding fixture to the substrate from the holding contact portion of the holding fixture. The product supplies the cathode current, and a pair of left and right bolt engaging holes are passed through the upper part of the fixed clamping part, and the mounting wall surface on the conveying path side of the clamping jig mounting body corresponds to the bolt engaging hole. The left and right pair of fixing bolts are screwed into and installed so that the bolt heads protrude. The lower part of the bolt engaging hole is formed wide to allow the bolt heads of the fixing bolts to pass through. The The continuous upper hole portion of the square hole portion is formed to be narrow so as to allow the bolt shaft portion of the fixing bolt to pass, but not to allow the bolt head portion of the fixing bolt to pass. In this way, a fixing clip formed in the holding jig is used. The bolt engaging hole of the holding part and the fixing bolt screwed into the mounting fixture mounting body are detachably fixed to the mounting fixture mounting body.

According to the present invention, by removing the inside and outside side cover plates, the inside and outside inspection openings allow an operator to easily perform maintenance and inspection operations inside the plating treatment tank from outside the tank. In addition, the clamping jig is configured to be capable of attaching and detaching a clamping jig mounting body that is slidably engaged with a fixed guide rail and is driven by a conveyance drive means (chain driving means) By performing a detour movement, the fixing bolts and bolt engaging holes can be used for simple and reliable mounting and dismounting. Therefore, the maintenance and inspection of the clamp after disassembly is easy, and the maintenance and inspection work in the tank is performed by By removing a plurality of clamping jigs from the clamping jig mounting body, maintenance and inspection work inside the plating treatment tank can be performed more easily.

In addition, in the horizontal transport type electrolytic plating device with easy maintenance and inspection work provided by the present invention, the inside side cover plate is a detachable mounting means for the inside inspection port, and is formed by protruding from the side surface outside the side portion. A section-shaped locking frame is provided along the recess of the inside inspection opening and is opened upward. The locking frame is formed so as to protrude between the inside of the locking frame and the inside. A gap surface capable of functioning as a locking surface is retained on the outer surface between the recessed opening edge portions of the inspection port, and the inner side cover is covered by the inner side cover in the inner locking portion of the locking frame. When installed from the outside, it is used to receive and lock the side edges of the side cover and the bottom edge in a flat shape. The inner side cover can be installed in the inner locking part of the locking frame. Removably inserted into the state of being locked by the above-mentioned locking surface from the outside. The installation method is provided with a plurality of pressing members. The pressing members can be fixed and released from the pressing end by the action end side. Rotate between positions The other end portion is pivoted on the top surface of the locking frame body by bolts and nuts. At this tightly fixed position, the inner side cover after the installation can be locked from the outside to the aforementioned locking The side of the face is tightly pressed and fixed, and the side cover can be removed at the pressing release position; the pressing member is installed on the top surface of the locking frame by screwing in from the inside of the plating treatment tank. A bolt inserted in a state and a hand-turned nut that is screwed to the bolt shaft from the outside of the plating treatment tank are supported by the shaft.

According to the present invention, the outer hand turning nut (knob nut) on the outside of the electroplating treatment tank is loosened with fingers, and the pressing member is rotated and moved to the pressing release position, so that the locking frame can be moved by the aforementioned locking frame. The inner side cover of the body and the locking surface is easily removed from the inner inspection opening of the plating treatment tank. In addition, tighten the fingers of the outer hand turning nut (handle nut) on the outer side of the plating treatment tank in the tightening direction to rotate the pressing member to the pressing fixed position, so that the locking frame can be locked. The side cover which is locked on the inside of the locking surface is easily installed in the inside inspection port of the plating treatment tank and is closed.

In addition, in the horizontal transport type electrolytic plating device with easy maintenance and inspection provided by the present invention, the outer side cover plate is a detachable mounting means for the outer inspection port, and is attached to the recessed opening edge of the outer inspection port. Guide groove portions are provided on the left and right side edge portions of the guide groove portion, and both side edges of the outer side cover are fitted in a slidable state, and opening edge portions are recessed in the outer inspection opening. The bottom edge portion is provided with a locking groove portion, and the bottom edge portion of the side cover plate is locked at the locking groove portion, and the outer side cover plate is installed to be slidable up and down along the guide groove portion.

According to the present invention, the side cover plate on the outer side is structured to be attached and detached by a left and right guide groove portion. Therefore, the outer side cover can be easily attached and detached at the inspection opening on the outer side of the groove assist groove. [Effect of the invention]

According to the present invention, inspection openings are formed in each side of the plating treatment tank and the auxiliary tank. After the plating solution in the plating treatment tank is discharged, the inspection openings after the inner and outer side covers are removed, Allows the operator to easily perform maintenance and inspection work inside the plating treatment tank from outside the tank.

In addition, the horizontal transport type electrolytic plating device of the present invention is an electrolytic plating device that performs a plating process in the process of horizontally transporting a substrate product in a plating solution in a plating treatment tank, and is more efficient than a substrate product in a plating solution. The electroplating device that carries the plating process while carrying it in a vertical posture can reduce the height of the plating treatment tank. In this way, according to the present invention, the operator can easily attach and remove the side cover from the outside of the device at an appropriate height position, and the electroplating treatment tank can be placed on the stand, so that the maintenance and inspection of the equipment in the tank can be easily performed.

In addition, in the present invention, an inspection port is provided on the side of the plating treatment tank, an auxiliary groove surrounding the inspection port is provided on the outer side of the inspection port, and an inspection port is also provided on the side of the auxiliary tank, and these inspection ports are attachable and detachable. Since the side cover is installed on the floor, it also has comprehensive measures to prevent liquid leakage in the treatment tank.

In addition, according to the present invention, the clamping jig is configured to be capable of attaching and detaching a clamping jig mounting body, and the clamping jig mounting body is slidably engaged with a fixed guide rail and is driven by a conveyance driving means ( Chain drive means) can be moved in a detour, and can be easily and reliably attached and detached using the fixing bolts and bolt engagement holes. Therefore, the maintenance and inspection of the clamp fixture after removal is easy, and the maintenance and inspection work in the groove is easy. At this time, by removing a plurality of clamping jigs from the clamping jig mounting body, maintenance and inspection work inside the plating treatment tank can be performed more easily.

In addition, according to the present invention, the side cover plate on the inner side after the locking frame body and the locking surface portion are locked can be easily and reliably attached and detached to the inner inspection opening of the plating treatment tank by the pressing member. In addition, the outer side cover also has an up-and-down sliding attachment and detachment structure, so it can be easily and reliably attached to the outside inspection opening of the auxiliary tank.

An embodiment of the present invention will be described with reference to the drawings. 1 and 2 are schematic views showing the entire horizontal transfer type electrolytic plating apparatus of the present invention. This horizontal transfer type electrolytic plating device is a rectangular substrate product P (thin plate-shaped product such as a printed circuit board) in which a cathode current is supplied in the plating solution W in the plating treatment tank 1 with the plate surface facing up and down. The state is horizontally transported in a single direction (direction of arrow F in FIG. 2) between the upper and lower electrodes (2, 2) to which the anode current is supplied, and the substrate product P is subjected to electrolytic plating treatment in the horizontal transportation process. Furthermore, in the illustrated embodiment, as a means for horizontally transporting the substrate product P in a single direction (direction of arrow F in FIG. 2), it is provided with the transport driving means 4, 4 and a plurality of long and vertical shapes. The holding jig 5 and the conveying driving means 4 and 4 are roller chains and the like that are provided on both sides of the conveying path 3 across the substrate product P and are driven in a circular motion. The holding jig 5 Is mounted on the conveyance driving means 4 in the air so that the upper part is moved by the conveyance drive means 4 and has a holding contact portion 6 at the lower part, and uses linear movement on the inner sides parallel to each other across the conveying path 3 The grip contact points 6 of the plurality of gripping jigs 5 moving along the path grip the edges of both sides of the substrate product P from the up-down direction, and the substrate product P is placed in the processing tank 1 with the board surface facing up and down. The plating solution W is transported horizontally in one direction. The aforementioned conveyance driving means 4 such as a roller chain is wound around a sprocket or a pulley having a groove, and is rotationally driven by a conveyance drive motor (not shown), and is driven in a circular manner. In FIG. 2, the gripping jig 5 is shown only in a partial range of the conveyance driving means (roller chain) 4 that is driven in a circular shape. However, the gripping jig 5 is in the entire range of the conveyance driving means 4. Install at equal intervals.

In the present invention, the plastic plating tank 1 is formed in a generally U-shape so as to face upward in a U-shape so as to allow maintenance and inspection of the inside of the processing tank 1 from the outside on both side portions along the product conveying direction of the product. The inside inspection opening 10 of the opening is located at a position lower than the horizontal conveyance height line of the substrate product P (represented by the symbol L in FIG. 2 and FIG. 3) at a height position of the lower edge portion of the recessed opening of the inside inspection opening 10. The inner side inspection cover 10 is detachably installed with a lateral rectangular plastic inner side cover 11 detachably installed therein. The side cover 11 can seal the inner inspection opening 10 from the outside into a closed state and Removable. The inside inspection port 10 is formed in a plurality of side surfaces on both sides. The number of the inner inspection ports 10 can be determined according to the length of the side surface portion of the plating treatment tank 1.

Further, two side surfaces of the plating treatment tank 1 are respectively provided with a plastic auxiliary tank 20 having a bottom surface portion and a side portion surrounding the inner inspection port 10 from the outside, and the auxiliary tank 20 is provided in the auxiliary tank. The position of 20 corresponding to the side surface portion of the inner inspection port 10 is recessed in an approximately U-shape so as to form an outer inspection port opening upward so that the inside of the processing tank 1 can be inspected through the inner inspection port 10 from the outside. 22, and the recess is formed so that the height position of the lower edge of the recessed opening of the outer inspection port 22 is at least lower than the horizontal conveyance height line of the substrate product P (indicated by the symbol L in FIGS. 1 and 3). The lateral inspection cover 22 is detachably provided with a laterally rectangular plastic outer side cover 23. The lateral inspection cover 22 can seal the outer inspection opening 22 in a closed state and can be removed.

As shown in FIG. 1, the present invention is a horizontal transfer type electrolytic plating device that performs a plating process during the horizontal transfer of a substrate product P in a plating solution W in a plating treatment tank 1, as compared with a substrate product that is subjected to electroplating. An electroplating apparatus that performs plating treatment while carrying the liquid in a vertical posture can have a structure that reduces the height of the plating treatment tank 1 (the height of the plating treatment tank 1 shown in the embodiment of FIG. 1 is about 32 cm). Therefore, as shown in FIG. 1, the plating treatment tank 1 can be placed on the stand 28 at an appropriate height position where the operator can simply attach and detach the side cover plates 11 and 23 from outside the device. In FIG. 1, reference numeral 20A represents a discharge pipe for the plating solution provided on the bottom surface of the auxiliary tank 20, and reference numeral 29 represents a management bath for the plating solution provided below the plating treatment tank 1. The discharge pipe 20A is a through pipe and The management bath 29 of the plating solution communicates. In addition, in FIG. 2, reference numeral 1A represents a discharge pipe for the plating solution provided on the bottom surface portion of the plating treatment tank 1, and the discharge pipe 1A is also connected to the management tank 29 for the plating solution through the pipe. The management tank 29 temporarily stores the plating solution discharged from the plating processing tank 1 and the auxiliary tank 20, and returns the plating solution from the management tank 29 to the plating processing tank 1 during the plating process.

As shown in FIG. 3 to FIG. 5, in the present invention, the inner side cover plate 11 is a detachable mounting means for the inner inspection port 10. The locking frame body 12 having a recessed opening edge portion and opening upward is formed in the inner inspection port 10. The locking frame body 12 is formed so as to protrude inside the locking frame body 12 and the aforementioned locking frame body 12. The outside surface between the recessed opening edge portions of the inner inspection opening 10 retains a clearance surface that can function as a locking surface portion 13 which will be in the inside locking portion of the locking frame body 12 When the inner side cover 11 is inserted and installed from the outside, the side cover 11 is used to receive and lock the side edge portions and the lower edge portion of the side cover 11 in a plane shape, and is locked inside the lock frame 12. The inner side cover plate 11 can be detachably fitted in the state to be locked from the outside with the locking surface portion 13 described above. This mounting means is provided with a plurality of (in the embodiment of FIG. 3, a total of 8) compression. The member 14, the aforementioned pressing member 14, is capable of being in the pressing fixed position and the pressing release position on the acting end side. The other end portion is pivoted between the top surface of the locking frame 12 by bolts and nuts in a rotating manner. At the tightly fixed position, the inner side cover 11 can be inserted. The side surface cover 11 can be detached from the outside to the locking surface portion 13 by pressing and fixing; the pressing member 14 is formed on the top surface of the locking frame 12 by Bolts 15 inserted into the plating treatment tank in a screwed-on state and hand-turned nuts (handle nuts) 16 screwed onto the shafts of the bolts from the outside of the plating treatment tank are pivotally supported.

In this way, in the present invention shown in FIG. 3 to FIG. 5, the hand-turned nut (handle nut) 16 on the outer side of the plating treatment tank is loosened with fingers, and the pressing member 14 is rotated and moved to the pressing release position. Thereby, the side cover plate 11 locked inside by the locking frame body 12 and the locking surface portion 13 can be easily removed from the inner inspection port 10 of the plating treatment tank 1. In addition, the hand-turned nut (handle nut) 16 on the outer side of the plating treatment tank 1 is tightened with a finger in a tightening direction, and the pressing member 14 is rotated and moved to a pressing fixed position, so that the The side cover plate 11 on the inside of the stopper frame body 12 and the stopper surface portion 13 is easily attached to the inner inspection port 10 of the plating treatment tank 1 to be closed.

As shown in FIGS. 3 to 4, a top plate portion 11 a extending in a substantially L shape from the upper end portion of the side cover plate to the outside is formed on the inner side cover plate 11. The top plate portion 11 a assists The groove 20 is covered from above. Furthermore, a handle 11b is provided on the outer side surface of the inner side cover plate 11 to facilitate grasping the cover plate from the outside.

In addition, as shown in FIGS. 3 to 5, in the present invention, the outer side cover 23 is a detachable mounting means at the outer inspection port 22, and is a recessed opening in the outer inspection port 22. Guide groove portions 24 are provided on the left and right side edges of the edge portion, and both sides of the outer side cover 23 are fitted in a slidable state in the guide groove portion 24, and A locking groove portion 25 is provided at the bottom edge portion of the recessed opening edge portion, and the bottom edge portion of the side cover plate 23 is locked at the locking groove portion 25. The outer side cover plate 23 is installed to be able to follow the guide. The groove part 24 slides up and down freely. According to the invention, the side cover 23 on the outer side is configured to be attached to and detached from the upper and lower sides by the left and right guide groove portions 24. Therefore, the outer side cover 23 can be easily attached to and detached from the inspection slot 22 outside the auxiliary groove 20.

As shown in FIGS. 3 to 5, a top plate portion 23 a extending substantially in an L shape from the upper end portion of the side cover plate to the inside is formed on the outer side cover plate 23, and the auxiliary groove 20 is formed by the top plate portion 23 a. Covered from above. Furthermore, a handle 23b is provided on the outer surface of the outer side cover 23 to facilitate grasping the cover from the outside. The handle 23b also functions as a rib for reinforcing the cover.

As shown in FIG. 3 (A) and FIG. 6, the holding jig 5 of the present invention has a detachable structure. The gripping jig 5 is mounted on the carrying driving means 4 through a gripping jig mounting body 31 having conductivity and connected to a carrying driving means 4 such as a roller chain. The fixed guide rail 30 is fixed to the fixed guide rail 30 while being fixedly arranged along the moving path of the holding jig, and is fitted to the fixed guide rail 30 from the outside. The holding jig 5 includes a fixed holding portion 32 having a long shape in the vertical direction and conductivity, a movable holding portion 33 having a long shape in the vertical direction and conductivity, and an opening and closing mechanism. The fixed clamping portion 32 is fixedly held by the aforementioned clamping jig mounting body 31 such that the upper portion thereof is in the air, and the movable clamping portion 33 is held movably up and down by the fixed clamping portion 32. The opening / closing mechanism is the grip contact portion 6 formed on the lower end portion of the fixed gripping portion 32, and the grip contact portion 6 formed on the lower end portion of the movable gripping portion 33 is caused by the spring force of the compression spring 34. Move upwards or downwards to close (Figure 6 shows the embodiment of downwards to close), so that the engaging body 36 provided on the upper part of the clamping jig 5 is engaged with the fixed configuration and moved around. The engaging guide 35 with the height difference of the opening position of the clamping jig 5 is used to resist the elastic pressure of the compression spring 34 and make the holding contact portion 6 of the movable clamping portion 33 to the fixed clamping. The grip contact portion 6 of the portion 32 is opened.

In the opening and closing mechanism used in the embodiment of FIG. 6, as the engaging body 36, a substantially L-shaped reversing lever 36 a is pivotably reversibly connected to the fixed clamping portion 32 with a bent portion as a fulcrum portion. The upper end portion is rotatably connected to the upper end portion of the movable clamping portion 33 through a pin through a pin shaft, and a rotary roller is installed at the front end of the upper arm portion of the reverse rod 36a. In the engaged state where the rotary roller 36b is rotated along the upper surface of the engagement guide 35, the roller 36b reverses the upper arm portion in an upward direction, and allows the movable clamp connected to the lower arm portion The portion 33 moves upward against the urging force of the compression spring 34, so that the grip contact portion 6 of the movable grip portion 33 opens the grip contact portion 6 of the fixed grip portion 32.

A cathode current can be supplied to the substrate product P from the holding contact portion 6 of the holding jig through the fixed rail 30, the holding jig mounting body 31, and the holding jig 5.

As shown in FIG. 6, a pair of left and right bolt engaging holes 40 are passed through the upper portion of the fixed clamping portion 32, and the mounting wall surface on the conveying path side of the clamping jig mounting body 31 is connected to the aforementioned A pair of left and right fixing bolts 41 are screwed and installed at positions corresponding to the bolt engaging holes 40 so that the heads of the bolts protrude. The bolt engaging holes 40 have a lower hole portion 40 a formed to allow the fixing bolts 41. The bolt head has a wide width, and the upper hole portion 40b continuous with the lower hole portion 40a is formed so as to allow the bolt shaft portion of the fixing bolt 41 to pass, but not to allow the bolt head to pass therethrough. In the embodiment shown in FIG. 6 (B), the lower hole portion 40a is formed in a wide circle, and the upper hole portion 40b continuous with the lower hole portion 40a is formed in a narrow and long shape.

To install the clamping jig 5 after being removed from the clamping jig mounting body 31, as shown in FIG. 6, the screw jig is screwed into the clamping jig mounting body with the bolt head protruding. A pair of fixing bolts 41 on the left and right sides of the left and right wide holes 40a of the bolt engaging holes 40 of the holding jig 5 are inserted, and then the holding jig 5 is lowered to form a narrow and long upper hole. The portion 40b is locked to the fixing bolt 41, and the holding jig 5 is held in a fixed state by the holding jig mounting body 31. Then, if the fixing bolt 41 is tightened, it can be maintained in a more reliable fixed state. To remove the clamping jig 5 from the clamping jig mounting body 31, simply loosen the tightened fixing bolt 41 slightly, and then raise the clamping jig 5 to open the wide lower hole 40a. The clamping jig 5 is easily removed. In this way, it is possible to easily and reliably attach and detach the clamping jig 5 having a long structure in the vertical direction.

According to the present invention, by removing the inner and outer side cover plates 11 and 23, the inner and outer inspection openings 10 and 22 allow the operator to easily perform maintenance and inspection operations inside the plating treatment tank 1 from outside the tank. In addition, the clamping jig 5 is configured to be capable of attaching and detaching a clamping jig mounting body 31 that is slidably engaged with the fixed guide rail 30 and is driven by a conveyance driving means ( The chain driving means) 4 performs a detour movement, and can be easily and reliably attached and detached using the fixing bolt 41 and the bolt engaging hole 40. Therefore, the maintenance and inspection of the removed clamping jig 5 becomes easy, as shown in FIG. 3 As shown in (A), during the maintenance and inspection work in the tank 1, the maintenance and inspection work in the plating treatment tank 1 can be performed by removing the plurality of clamping jigs 5 from the clamping jig mounting body 31. Easier.

1‧‧‧Plating treatment tank

1A‧‧‧Exhaust pipe

2,2‧‧‧up and down anodes

3‧‧‧carrying path

4,4‧‧‧handling driving means

5‧‧‧ holding fixture

6‧‧‧ Holding contact section

10‧‧‧ inside inspection

11‧‧‧ inside side cover

12‧‧‧ locking frame

13‧‧‧ stuck face

14‧‧‧Tightening component

15‧‧‧ Bolt

16‧‧‧Hand Turn Nut (Handle Nut)

20‧‧‧ auxiliary tank

20A‧‧‧Exhaust pipe

22‧‧‧outer inspection port

23‧‧‧ outside side cover

24‧‧‧Guide groove

25‧‧‧Locking groove

28‧‧‧stand

29‧‧‧Plating bath management tank

30‧‧‧Fixed rail

31‧‧‧Clamping fixture mounting body

32‧‧‧Fixed clamping section

33‧‧‧ Movable clamping section

34‧‧‧Compression spring

35‧‧‧ snap guide

36‧‧‧ Fitted

40‧‧‧ Bolt engagement hole

40a‧‧‧Bottom hole

40b‧‧‧upper hole

41‧‧‧Fixing bolts

W‧‧‧Plating solution

P‧‧‧Substrate products

L‧‧‧ Horizontal conveying height line of substrate products

Fig. 1 is a schematic longitudinal sectional front view of the present invention. FIG. 2 is a schematic plan view of the present invention. FIG. 3 is a side view of the main part of the present invention. (A) shows the inside inspection port, and (B) shows the outside inspection port. FIG. 4 is a longitudinal sectional front view of the main part of the present invention. FIG. 5 is a cross-sectional top view of a main part of the present invention. FIG. 6 shows an example of the attachable / detachable clamping jig of the present invention, in which (A) is a front view and (B) is a side view.

Claims (4)

The utility model relates to a horizontal transport type electrolytic electroplating device with easy maintenance and inspection. The substrate products to which a cathode current is supplied are plated in an electroplating bath in an electroplating treatment tank, with a plate surface facing up and down. It is transported horizontally in the direction, and the substrate product is subjected to electrolytic plating treatment in the horizontal transport process. It is characterized in that: it is placed on the side surface of the plastic plating tank, which is along both sides of the product transport direction, so that the plating can be performed from the outside. The method for performing maintenance inspection in the processing tank is recessed to form an inner inspection opening that opens upward, and the height position of the lower edge of the recessed opening of the inner inspection opening is at least lower than the horizontal conveying height line of the substrate product. It is recessed, and a plastic inner side cover is detachably installed in the inner inspection port. The side cover can seal the inner inspection port from the outside into a closed state and can be removed. An auxiliary groove is provided on each of the two side portions, and the auxiliary groove includes a bottom surface portion and a side surface surrounding the inner inspection port from the outer side. At the position of the auxiliary groove corresponding to the side surface portion of the inner inspection port, the outer inspection port opening upward is recessed so that the inside of the plating treatment tank can be maintained and inspected from the outer inspection port through the inner inspection port, and It is recessed so that the height position of the lower edge portion of the recessed opening of the outer inspection port is at least lower than the horizontal conveyance height line of the substrate product, and an outer side cover is detachably mounted on the outer inspection port. The side cover can close the outer inspection port into a closed state and can be removed. The utility model relates to a horizontal transport type electrolytic electroplating device with easy maintenance and inspection. The substrate products to which a cathode current is supplied are plated in an electroplating bath in an electroplating treatment tank, with a plate surface facing up and down. It is horizontally transported in the direction, and the substrate products are subjected to electrolytic plating treatment in the horizontal transportation process, and the means for horizontally transporting the aforementioned substrate products in one direction is provided with a transport driving means and a plurality of clamps formed into a long shape in the vertical direction. The holding jig, the conveying driving means, is arranged on both sides of the conveying path across the substrate product and is driven in a circular manner. The holding jig is installed on the conveying driving means with the upper part in the air. In addition, it is moved around by the conveyance driving means, and has a holding contact point portion at the lower portion. The holding contact point portion of the plurality of holding jigs is moved on a linear moving path that is parallel to each other through the inside of the conveying path. The edges of both sides of the substrate product are clamped from the up and down direction, and the substrate product is placed in the processing tank with the plate surface facing up and down. The liquid is transported horizontally in one direction, and is characterized in that: is recessed on the side surface of the plastic plating tank along both sides of the product transport direction so that the plating tank can be maintained and inspected from the outside. An inside inspection opening that opens upward is formed in a recessed manner such that the height position of the lower edge portion of the recessed opening of the inside inspection opening is at least lower than the horizontal conveying height line of the substrate product, and the inside inspection opening is formed. A plastic inner side cover is detachably installed. The side cover can seal the inner inspection port from the outside into a closed state and can be removed. Auxiliary grooves are respectively provided on the two side portions of the plating treatment tank. The auxiliary groove includes a bottom surface portion and a side portion that surround the inner inspection opening from the outside. At the position of the auxiliary groove corresponding to the side portion of the inner inspection opening, the inside of the plating treatment groove can be passed through the inner inspection opening from the outside. The maintenance inspection is performed to form an outer inspection opening opening upward, and the height of the lower edge portion of the concave inspection opening of the outer inspection opening is recessed. The recess is formed at least lower than the horizontal conveyance height line of the substrate product. An outer side cover is detachably installed at the outer inspection port, and the side cover can close the outer inspection port in a closed state and Removable: The clamping jig is attached to the transportation driving means through a clamping jig mounting body connected to the transportation driving means and having conductivity. The fixed guide rail of the holding jig is fixedly fitted to the fixed guide rail from the outside so as to move while sliding. The holding jig is provided with a conductive fixing formed in a long shape in the vertical direction. A clamping portion, a movable movable clamping portion formed in a shape having a long vertical direction, and an opening and closing mechanism, and the fixed clamping portion is fixed by the clamping jig mounting body such that its upper portion is in the air. The movable clamping portion is held in a movable manner by the fixed clamping portion. The opening and closing mechanism is a handle for the lower end portion of the fixed clamping portion. The contact portion is closed by moving the holding contact portion formed on the lower end portion of the movable clamping portion upward or downward by the elastic force of a compression spring, and the engaging body provided on the upper portion of the clamping jig is closed. It is engaged with an engaging guide fixed in an open position of the clamping jig that moves around and has a height difference, thereby resisting the elastic pressure of the compression spring to make the holding contact portion of the movable clamping portion to the foregoing The holding contact portion of the fixed clamping portion is opened, and a cathode current is supplied from the holding contact portion of the holding fixture to the substrate product through the fixed guide rail, the holding fixture mounting body, and the holding fixture, A pair of left and right bolt engaging holes are passed through the upper part of the fixed clamping part, and a left and right one is formed at a position corresponding to the bolt engaging hole on the mounting wall surface of the conveying path side of the clamping jig mounting body. The pair of fixing bolts are screwed in and installed so that the bolt heads protrude. The lower hole portion of the bolt engaging hole is formed in a wide area to allow the bolt head of the fixing bolt to pass through. The continuous upper hole portion is formed to be narrow so as to allow the bolt shaft portion of the fixing bolt to pass, but not to allow the bolt head portion of the fixing bolt to pass. In this way, the fixing clamping portion formed in the clamping jig is used. Bolt engaging holes and fixing bolts screwed into the clamping jig mounting body, and the clamping jig is detachably fixed to the clamping jig mounting body. The horizontal transfer type electrolytic plating device with easy maintenance and inspection operations according to claim 1 or 2, wherein the inside side cover is made detachable to the inside inspection port and is installed outside the side portion. A side-shaped locking frame is formed protruding along the concave opening edge portion of the inner inspection opening and opened upward, and the locking frame is formed so as to protrude inside the locking frame. A gap surface capable of functioning as a locking surface is retained on the outer surface between the portion and the recessed opening edge portion of the inner inspection port, and the locking surface is internally located in the inner locking portion of the locking frame. When the side cover plate is inserted and installed from the outside, it is used to receive and lock the side edge portions and the lower side edge portion of the side cover plate in a plane shape, and the inner side of the inner side of the locking frame body is locked. The side cover can be detachably inserted into the state of being locked by the locking surface from the outside. The installation method is provided with a plurality of pressing members. The pressing members can be fixed at the pressing end by the action end side. And squeeze release The other end portion is pivoted between the top surface of the locking frame body by bolts and nuts in a rotating manner. At this tightly fixed position, the inner side cover plate after the fitting can be inserted from the outside. Press and fix to the side of the locking surface, and the side cover can be removed at the pressing release position; the pressing member is formed on the top surface of the locking frame body from the inside of the plating treatment tank. The bolt inserted in the state of being screwed in and installed, and a hand-turned nut which is screwed onto the shaft portion of the bolt from the outside of the electroplating treatment tank are supported by the shaft. The horizontal transfer-type electrolytic plating device with easy maintenance and inspection operations according to claim 1 or 2, wherein the outer side cover is a detachable mounting means for the outer inspection port, and is attached to the outer inspection port. Guide grooves are provided on the left and right side edges of the recessed opening edge portion, and both sides of the outer side cover are fitted in a slidable state in the guide groove portion, and the recesses on the outer inspection opening are recessed. The bottom edge portion of the opening edge portion is provided with a locking groove portion. The bottom edge portion of the side cover plate is locked at the locking groove portion, and the outer side cover plate is installed to be slidable along the guide groove portion. .