TW201922365A - Method for manufacturing glass plate - Google Patents

Abstract

A method for manufacturing a glass plate (G) is provided with a washing step (S2) for washing a glass plate (G) by supplying a first liquid (19, 20) to the glass plate (G) and a drying step (S3) for eliminating the first liquid (19, 20) from the glass plate (G) by blowing a gas (26) onto the glass plate (G) that is transported into a drying chamber (12) and being transported on a prescribed transport pathway (L) within the drying chamber (12). Liquid eliminating drying is performed by blowing the gas (26) onto the glass plate (G) in a state where a second liquid (32) is disposed at the bottom of the drying chamber (12).

Description

Manufacturing method of glass plate

The present invention relates to a method for manufacturing a glass plate, and more particularly, to a technology for preventing the adhesion of fine particles on the surface of a glass plate when the glass plate is dried after removing the cleaning liquid after the glass plate is washed.

For example, when manufacturing a glass plate typified by a glass substrate for a liquid crystal display, the glass plate cut out of the glass original plate (formed original plate) is subjected to processing such as end face processing, and then the glass plate is cleaned and The air is blown by an air knife or the like to remove the cleaning liquid (de-liquidation) attached to the surface of the glass plate during cleaning and dry the glass plate (for example, refer to Patent Document 1). In addition, after the series of operations described above, the presence or absence of foreign matter remaining on (attached to) the obtained glass plate was checked.
[Prior Art Literature]
[Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 2014-38914

[Problems to be Solved by the Invention]
As described above, in the inspection step, the presence or absence of foreign matter such as glass frit adhering to the surface of the glass plate is inspected, and the number of foreign matter is sometimes measured. Here, the foreign objects to be measured are classified into a plurality of levels according to their sizes. Among them, there are also many foreign objects with a minimum level (less than 1.0 μm) detected (hereinafter, referred to as only fine particles in this specification). tendency. It is difficult to completely remove such fine particles during the period before the inspection step. For example, as described in Patent Document 1, even after the surface of the glass plate is cleaned and the liquid knife is deliquored and dried, after drying, There are also a number of particles on the surface of the glass plate that cannot be ignored. Of course, the attachment of fine particles becomes a factor that reduces the surface quality of the glass plate, and therefore, the adherence of fine particles should be avoided.

In view of the foregoing, in the present specification, as a technical problem to be solved by the present invention, it is considered to reduce the adhesion of fine particles to the surface of a glass plate and provide a glass plate with excellent surface quality.
[Means for solving problems]

The above-mentioned problem is solved by the manufacturing method of the glass plate of this invention. That is, the manufacturing method includes a washing step of supplying the first liquid to the glass plate to clean the glass plate, and a drying step of being carried into the drying processing chamber and being carried on a predetermined transportation path in the drying processing chamber. The glass plate is blown with gas, and the first liquid is removed from the glass plate. The manufacturing method is characterized in that the gas is blown into the glass plate in a state where a second liquid is arranged at the bottom of the drying processing chamber.

The inventors investigated the relationship between the air flow in the drying processing chamber and the behavior of the microparticles when performing the cleaning and deliquoring drying, and obtained the following findings. That is, when the cleaning and drying is performed in the drying processing chamber, a glass blower such as an air knife disposed in the drying processing chamber is used to perform deliquoring (washing liquid or shower) of the glass plate that has been carried into the drying processing chamber. Removal of lotions, etc.). At this time, it was found that the gas supplied to the glass plate from the gas blowing device generated a turbulent flow in the drying processing chamber, and the turbulent flow was removed from the surface of the glass plate together with the first liquid (cleaning liquid, etc.) and settled Particles flying to the bottom of the drying chamber flutter. From the above, it is presumed that the adhesion of the fine particles on the surface of the glass plate is caused by an irregular flow (turbulent flow) generated in the drying processing chamber due to the blowing of the gas to the glass plate.

The present invention is based on the above findings. When cleaning and drying a glass plate using a first liquid, a gas is blown to the glass plate in a state where a second liquid for trapping is disposed at the bottom of the drying processing chamber. In this manner, the liquid is blown off by using a gas blower in an environment where a second liquid is disposed at the bottom of the drying processing chamber which should be set to a dry environment, thereby removing particles from the glass plate together with the cleaning liquid and the like. Two liquid traps. Therefore, even if a turbulent flow due to gas blowing occurs in the drying processing chamber, it is difficult for the fine particles that have settled to fly in the turbulent flow. Therefore, it is possible to efficiently remove the cleaning liquid in the drying processing chamber to dry the glass plate, reduce the adhesion of fine particles, and provide a glass plate with excellent surface quality. In addition, since the second liquid is supplied to the bottom of the drying processing chamber, the opportunity for the glass plate to contact the second liquid can be eliminated as much as possible. Therefore, it is possible to prevent the degradation of the surface quality of the glass plate caused by disposing the second liquid in the drying processing chamber as much as possible. Furthermore, as a method other than capturing the second liquid, for example, it is also possible to consider exhausting the gas in the drying processing chamber, passing the exhausted gas through a predetermined filter to remove particulates, and then returning to the drying processing again. Indoor method, etc. However, if it is this method, it requires a large exhaust capacity, and it is unavoidable that the exhaust equipment becomes complicated and expensive. On the other hand, according to the microparticle capturing method of the present invention, it is possible to reduce the adhesion of microparticles to the surface of the glass plate only by maintaining the state in which the second liquid is disposed on the bottom of the drying processing chamber, so that only a simple device is required. . As described above, according to the present invention, it is possible to avoid cost increase and improve the surface quality of the glass plate. The first liquid is a liquid that is supplied to the glass plate in the cleaning step. In the embodiment described later, the cleaning liquid and the eluent correspond to the first liquid.

Moreover, in the manufacturing method of the glass plate of this invention, you may blow gas to a glass plate in the state which the bottom part of a drying processing chamber was covered with the 1st liquid and the 2nd liquid.

By covering the bottom of the drying processing chamber with the first liquid and the second liquid as described above, it is possible to reliably and reliably capture particles that have settled in the drying processing chamber. In addition, it is possible to reliably prevent the second liquid from rising and coming into contact with the glass plate due to the influence of turbulence and the like. As described above, according to this structure, the adhesion of fine particles to the glass plate can be further reduced, and the glass plate can be dried.

Moreover, in the manufacturing method of the glass plate of this invention, a 2nd liquid may be pure water.

Drying process chambers generally manage higher cleanliness than cleaning process chambers. Therefore, by using pure water for the second liquid, it is possible to capture particles suspended and settled in the air without deteriorating the cleanliness of the air in the drying treatment chamber, and reduce adhesion to the surface of the glass plate.

Moreover, in the manufacturing method of the glass plate of this invention, the 2nd liquid arrange | positioned at the bottom can also be replaced by supplying a 2nd liquid into a drying process chamber, and discharging a 2nd liquid into a drying process chamber.

By changing the liquid disposed at the bottom of the drying processing chamber as described above, the captured microparticles can be discharged together with the second liquid. Thereby, the cleanliness of a drying process chamber can be maintained high.
[Effect of the invention]

As described above, according to the present invention, the adhesion of fine particles to the surface of the glass plate can be reduced, and a glass plate having excellent surface quality can be provided.

Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. 1 to 3.

As shown in FIG. 1, the method for manufacturing a glass plate according to this embodiment includes a processing step S1 to perform predetermined processing on the glass plate, a cleaning step S2 to clean the glass plate that has been subjected to the predetermined processing, and a drying step S3. The cleaning liquid adhering to the cleaned glass plate is removed to dry the glass plate; and the inspection step S4 is performed to check whether there is foreign matter such as fine particles adhering to the surface of the dried glass plate. In the processing step S1, the end surface of a glass plate is processed using a grindstone, for example. As a step before the processing step S1, a cutting step of cutting a glass plate of a desired size from the forming original plate may be provided. The following description focuses on the washing step S2 and the drying step S3.

FIG. 2 is a side view showing the overall configuration of the washing and drying device 10 used in the washing step S2 and the drying step S3. As shown in FIG. 2, the cleaning and drying device 10 includes a cleaning processing chamber 11 and a drying processing chamber 12, and a conveyance path L of the glass plate G is provided so as to cross the cleaning processing chamber 11 and the drying processing chamber 12. In this case, a conveying device 13 and a conveying device 14 that convey the glass sheet G along the conveying path L are disposed in the cleaning processing chamber 11 and the drying processing chamber 12. Each of the conveying devices 13 and 14 includes, for example, a roller conveyor.

In this embodiment, the cleaning processing chamber 11 includes a first cleaning chamber 15 and a second cleaning chamber 16. Among them, the first cleaning chamber 15 includes a cleaning roller 17 that wipes the surfaces Ga and Ga of the glass plate G to remove dirt such as foreign matter adhering to the surfaces Ga and Ga. In this embodiment, a pair of upper and lower cleaning rollers 17 and 17 are arranged at positions facing each other across the conveyance path L of the glass sheet G. The cleaning roller 17 may be a person who forms a contact portion with the glass plate G using an elastic material such as a sponge, or a person who forms a contact portion with the glass plate G using a brush. In the former case, the cleaning roller 17 becomes a sponge roller, and in the latter case, the cleaning roller 17 becomes a brush roller.

A cleaning liquid supply device 18 is disposed in the first cleaning chamber 15. In this case, the supply port of the cleaning liquid supply device 18 is set so that the cleaning liquid 19 (first liquid) is supplied to the entire surface Ga, Ga of the glass plate G passing through the conveyance path L (omitted from the figure) (Shown) dimensions, supply dimensions, etc. Here, the "width direction" in the present specification means a direction that coincides with the width direction of the glass sheet G that is conveyed on the conveyance path L. Further, for the cleaning liquid 19, for example, pure water may be used, and if necessary, a detergent or a surfactant, alkaline ionized water, sodium hypochlorite, or the like may be added.

The second cleaning chamber 16 is located on the downstream side closer to the transport path L than the first cleaning chamber 15 and has an eluent (washing liquid) 20 as a first liquid supplied to the second cleaning chamber that has been carried in from the first cleaning chamber 15 The eluent supply device 21 on the surfaces Ga and Ga of the glass plate G in the chamber 16. In this case, the supply port of the eluent supply device 21 is also set so that the eluent 20 is supplied to the entire surface Ga and Ga of the glass plate G passing through the conveyance path L (not shown). Direction or width dimension, supply flow rate, etc. In addition, as the eluent 20, a known kind of eluent liquid such as pure water can be used.

Further, the cleaning liquid 19 that has been supplied onto the glass plate G flows down to the bottom portion 15 a of the first cleaning chamber 15. Therefore, although illustration is omitted, in the bottom portion 15a, a discharge port for discharging the washing liquid 19 that has flowed down is provided in the bottom portion 15a. In addition, the cleaning liquid 19 and the eluent 20 that have been supplied to the glass plate G flow down to the bottom 16 a of the second cleaning chamber 16. Therefore, although the illustration is omitted, in the bottom portion 16a, a discharge port for discharging the flowing down washing liquid 19 and eluent liquid 20 is provided in the bottom portion 16a.

The drying processing chamber 12 includes a dehydration chamber 22 and a first drying chamber 23 located on the downstream side of the transport path L than the dehydration chamber 22. In the present embodiment, the drying processing chamber 12 includes a second drying chamber 24 on a downstream side closer to the transport path L than the first drying chamber 23. A partition plate 25 is provided between the dehydration chamber 22 and the first drying chamber 23. Thereby, the air or the like of the dehydration chamber 22 is restricted from flowing into the first drying chamber 23. Furthermore, since the washing liquid 19 and the eluent 20 supplied in the washing step remain on the glass plate G carried into the dehydration chamber 22, the eluent 20 and the like flow down to the bottom 22a of the dehydration chamber 22. Therefore, the bottom 22a of the dehydration chamber 22 is covered with the eluent 20 and the like, and becomes a wet state. At this time, although illustration is omitted, a drain port for discharging the eluent 20 and the like flowing down may be provided in the bottom 22a.

A gas blowing device 27 is provided in the first drying chamber 23 to blow a predetermined gas 26 (for example, clean and dry air) toward the surface Ga and Ga of the glass sheet G carried into the first drying chamber 23. In this embodiment, the gas blowing device 27 is a pair of upper and lower air knives 28 and 28, and the conveyance path L of the glass plate G is located between the pair of air knives 28 and 28. Here, the widthwise dimension of the supply port 28a of each air knife 28 is set to a size that can blow the gas 26 to the entire surface Ga, Ga of the glass plate G passing between the pair of air knifes 28, 28. In addition, the angle of the supply port 28a of each air knife 28 is set to such a size that the gas 26 can be blown onto the surface Ga of the glass plate G from the first drying chamber 23 side to the dehydration chamber 22 side. In the example shown in the figure, the surfaces Ga, G, and G of the glass plate G are positioned closer to the dehydration chamber 22 than the boundary position of the dehydration chamber 22 and the first drying chamber 23 (the position of the partition plate 25). A pair of air knives 28 and 28 are arranged as the Ga blow gas 26, but the Ga blow gas 26 can also be blown on the surface at the boundary position between the deliquoring chamber 22 and the first drying chamber 23 (between the upper and lower partitions 25 and 25). A pair of air knives 28, 28 is configured in the same manner.

A partition plate 29 is provided between the first drying chamber 23 and the second drying chamber 24. Thereby, the internal space of the first drying chamber 23 and the internal space of the second drying chamber 24 are divided, so that the air or the like of the first drying chamber 23 is restricted from flowing into the second drying chamber 24. Therefore, the cleanliness of the second drying chamber 24 can be made higher than that of the first drying chamber 23.

A gas blowing device 30 is provided in the second drying chamber 24 for blowing a predetermined gas 26 toward the surfaces Ga and Ga of the glass sheet G carried into the second drying chamber 24. In this embodiment, the gas blowing device 30 is a pair of upper and lower air knives 31 and 31, and the conveyance path L of the glass plate G is located between the pair of air knives 31 and 31. Here, the width direction dimension of the supply port 31a of each air knife 31 is set to a size that can blow the gas 26 to the entire surface Ga, Ga of the glass plate G passing between the pair of air knife 31, 31. In addition, the angle of the supply port 31a of each air knife 31 is set to a size where the gas 26 can be blown onto the surface Ga of the glass plate G from the second drying chamber 24 side to the first drying chamber 23 side. The angle of the supply port 31 a of each air knife 31 may be the same as or different from the angle of the supply port 28 a of each air knife 28 in the first drying chamber 23. In the example shown in the figure, the surface Ga of the glass plate G is closer to the first drying chamber 23 than the boundary position (the position of the partition plate 29) of the first drying chamber 23 and the second drying chamber 24. A pair of air knives 31 and 31 are arranged so that the gas 26 is blown by Ga. However, the surface Ga can also be blown at the boundary position between the first drying chamber 23 and the second drying chamber 24 (between the upper and lower partitions 29 and 29). A pair of air knives 31 and 31 are arranged in the form of the gas 26. Alternatively, the pair of air knives 31 and 31 may be disposed so as to blow the gas 26 on the surface Ga at a position closer to the second drying chamber 24 than the boundary position.

In the bottom 23 a of the first drying chamber 23 and the bottom 24 a of the second drying chamber 24, a liquid 32 (second liquid) for capturing particles is disposed. In the present embodiment, the bottom 23 a of the first drying chamber 23 and the bottom 24 a of the second drying chamber 24 are in a state covered by the layered liquid 32. The liquid 32 is not one obtained by flowing down the first liquid such as the eluent 20 remaining on the glass plate G, but is separately supplied to the bottom 23 a of the first drying chamber 23 and the bottom 24 a of the second drying chamber 24.

As long as the fine particles 33 can be captured in the fine particle-trapping liquid 32, any kind of liquid can be used, and for example, various kinds of pure water such as ion-exchanged water, distilled water, and industrial pure water can be used. Alternatively, in order to further improve the capturing ability of the microparticles 33, a surfactant may be added to the liquid 32. Specifically, a surfactant obtained by adding a surfactant to the pure water may be used as the liquid 32.

Next, an example of the washing step S2 and the drying step S3 using the washing and drying device 10 having the above-mentioned structure will be described together with the effects of the present invention.

(S2) Cleaning step In this step, if a predetermined processing (at least one of end surface processing, surface processing, and the like) is performed in processing step S1, the glass plate G is carried into the most upstream side of the conveyance path L. In the first cleaning chamber 15 of the washing and drying device 10, the cleaning liquid 19 is supplied from the cleaning liquid supply devices 18, 18 toward the surface Ga, Ga of the glass plate G conveyed by the conveying device 13 on the conveying path L. As a result, the surfaces Ga and Ga of the glass plate G are in a state of being wet with the cleaning liquid 19. Then, the glass plate G in this state is transported to a pair of cleaning rollers 17 and 17 located further downstream than the cleaning liquid supply devices 18 and 18, and the surfaces Ga and Ga of the glass plate G are wiped with the cleaning rollers 17 and 17. Thereby, foreign matter such as the fine particles 33 adhering to the surface Ga and Ga is wiped off. Then, the glass plate G is carried into the second cleaning chamber 16 by the carrying device 13. In the second cleaning chamber 16, the eluent supply device 21 supplies the eluent 20 toward the surface Ga, Ga of the glass plate G conveyed by the conveyance device 13 on the conveyance path L, and flushes the glass plate G away. The cleaning liquid 19 on the surface Ga and Ga and foreign matter. Then, the glass plate G is discharged to the outside of the second cleaning chamber 16 by the transfer device 13.

(S3) The glass sheet G which has been discharged to the outside of the second cleaning chamber 16 by the conveying device 13 in the drying step is then conveyed into the drying processing chamber 12 by the conveying device 14 and accurately into the dehydration chamber 22. Immediately before being carried into the first drying chamber 23 from the dehydration chamber 22, a pair of air knives 28, 28 serving as a gas blowing device 27 blows gas 26 toward the surfaces Ga and Ga of the glass plate G. Thereby, the eluent 20 (sometimes also a small amount of the cleaning liquid 19) remaining on the surface Ga and Ga of the glass plate G and the foreign matter including the fine particles 33 are blown away. The blown-off fine particles 33 settle toward the bottom 22 a of the dehydration chamber 22 or the bottom 23 a of the first drying chamber 23.

The dewatered glass sheet G is then conveyed by the conveying device 14 in the first drying chamber 23, and is blown as a gas immediately before being conveyed from the first drying chamber 23 into the second drying chamber 24. The pair of air knives 31 and 31 of the apparatus 30 blows gas 26 toward the surfaces Ga and Ga of the glass plate G. Thereby, the eluent 20 and the like remaining on the surface Ga and Ga of the glass plate G and the foreign matter including the fine particles 33 are blown away. The blown-off fine particles 33 settle toward the bottom 23 a of the first drying chamber 23 or the bottom 24 a of the second drying chamber 24. As described above, the foreign matters including the eluent 20 and the fine particles 33 are removed, whereby the surfaces Ga and Ga of the glass plate G are in a dry state.

Here, for example, as shown in FIG. 3, when the liquid 32 is not disposed in the first drying chamber 23 and the second drying chamber 24 of the drying processing chamber 12, the eluent 20 and the like already supplied to the glass plate G Most of the flow down to the upstream side than the air knives 28, 28, so the eluent 20 and the like only flow down slightly to the downstream side than the air knives 28, 28. Therefore, most of the bottom 23a of the first drying chamber 23 and the bottom 24a of the second drying chamber 24 are in a dry state.

The fine particles 33 blown away with the eluent 20 and the like by a pair of air knives 28, 28 (31, 31) settle, and are deposited on the bottom 23a of the first drying chamber 23 without contacting the liquid 32, or the first On the bottom 24a of the two drying chambers 24. On the other hand, a turbulent flow 34 may be generated in the first drying chamber 23 or the second drying chamber 24 by blowing the gas 26 from the pair of air knives 28, 28 (31, 31) toward the glass plate G. Due to this turbulent flow 34, the fine particles 33 blown away from the surfaces Ga and Ga of the glass plate G and located on the bottom portions 23a and 24a of the dry state fly and attach to the surfaces Ga and Ga of the glass plate G again.

In contrast, in the method for manufacturing a glass sheet of the present invention, a gas 26 is blown onto the glass sheet G in a state where the liquid 32 is disposed at the bottom of the drying processing chamber 12 (see FIG. 2). In this case, the bottom of the drying processing chamber 12 is made wet by the liquid 32. Therefore, when the fine particles 33 are removed from the glass plate G and settled, they are captured by the liquid 32. Therefore, even if a turbulent flow 34 (see FIG. 3) caused by the blowing of the gas 26 is generated in the first drying chamber 23 or the second drying chamber 24, it is difficult for the fine particles 33 that have settled to fly on the turbulent flow 34. Therefore, the cleaning liquid 19 and the eluent 20 can be efficiently removed to dehydrate and dry the glass plate G, reduce the adhesion of the fine particles 33, and provide the glass plate G with excellent surface quality. In addition, since the liquid 32 for trapping the fine particles 33 is disposed on the bottom of the drying processing chamber 12, the chance of the glass plate G contacting the liquid 32 can be eliminated as much as possible. Therefore, it is possible to prevent the degradation of the surface quality of the glass plate G caused by disposing the liquid 32 in the drying processing chamber 12 as much as possible. In addition, according to this method, it is possible to reduce the adhesion of the fine particles 33 only by arranging the liquid 32 on the bottom of the drying processing chamber 12, so that only a simple device is required. As described above, according to the present invention, it is possible to avoid cost increase and improve the surface quality of the glass plate G.

In the present embodiment, the bottom of the dehydration chamber 22 is covered with the eluent 20 and the like, and the bottoms 23 a and 24 a of the first and second drying chambers 23 and 24 are covered with the liquid 32 (see FIG. 2). Therefore, the bottom of the drying processing chamber 12 is covered with the first liquid (the washing liquid 19 or the eluent 20) and the second liquid 32, and the particles that have settled to the bottom of the drying processing chamber 12 can be captured without any omissions and reliably. 33. As described above, the adhesion of the fine particles 33 to the glass plate G can be further reduced, and the glass plate G can be deliquored and dried. Therefore, the surface quality of the glass plate G will be improved without deviation.

(S4) Inspection step The glass plate G that has been cleaned and dried as described above is transported toward the inspection step, and the presence and amount of foreign matter remaining on the surface Ga of the glass plate G are measured and evaluated by a predetermined inspection device. The measurement of the number of the fine particles 33 is also included in the measurement of the presence or absence of a foreign substance. Furthermore, for example, if the number of measured fine particles 33 (the number per unit area) is equal to or smaller than a threshold value, they are transported to the packaging and shipping steps as those who satisfy the shipping criteria.

As mentioned above, although the 1st Embodiment of this invention was described, it is needless to say that the manufacturing method of the glass plate of this invention is not limited to the said example. This manufacturing method can adopt various aspects within the scope of the present invention.

FIG. 4 is a side view showing the overall configuration of a washing and drying device 40 according to a second embodiment of the present invention. The cleaning and drying device 40 is different from the first embodiment shown in FIG. 2 in that a structure for replacing the liquid 32 is provided in the first drying chamber 23 and the second drying chamber 24. Specifically, one or more supply ports 41 for supplying the liquid 32 to the bottom 23a are provided below the sides of the first drying chamber 23, and one or more for discharging the liquid 32 are provided in the bottom 23a.的 排 口 42。 The exhaust port 42. The discharge port 42 is connected to the filter device 43, and the liquid 32 that has been discharged from the discharge port 42 to the outside of the first drying chamber 23 is filtered by the filter device 43. In addition, as shown in FIG. 5, the liquid 32 from which foreign matter such as the fine particles 33 is removed by filtration has a structure in which the pump 44 is pressure-fed to the supply port 41 and is again supplied to the bottom portion 23 a. Similarly to the first drying chamber 23, the second drying chamber 24 is also provided with a liquid 32 replacement structure including a supply port 41, a discharge port 42, a filtering device 43, and a pump 44. In addition, the arrangement of the filtering device 43 and the pump 44 may be changed. In other words, the liquid 32 ejected from the pump 44 may be passed through the filtering device 43 and then supplied to the bottom portion 23 a through the supply port 41.

In this manner, by replacing the liquid 32 supplied to the bottoms of the first drying chamber 23 and the second drying chamber 24, the trapped fine particles 33 can be discharged together with the liquid 32. Thereby, the cleanliness of the first drying chamber 23 and the second drying chamber 24 can be maintained in a high state. In particular, as shown in FIG. 5, the liquid 32 is circulated and supplied to the bottom 23 a (24 a) by the replacement structure including the supply port 41 and the discharge port 42, and the filter device 43 and the pump 44. The amount of equipment and the amount of liquid 32 can also maintain the cleanliness of the first drying chamber 23 and the second drying chamber 24 to a high state.

It should be noted that the arrangement form of the liquid 32 is not limited to the arrangement form in a layered shape as exemplified in FIG. 2 and the like. For example, the liquid 32 may be arranged in a spot shape by spreading the drop-shaped liquid 32 on the bottom of the drying processing chamber 12. In addition, the liquid 32 may be arranged in a layered form by dispersing the drop-shaped liquid 32 on the bottom of the drying processing chamber 12. From the viewpoint of further reducing the adhesion of the fine particles 33 to the glass plate G, the liquid 32 is preferably arranged in a layered form. The arrangement region of the liquid 32 may be a region in a dry state (a region where the first liquid such as the eluent 20 does not flow down) in the bottom of the drying processing chamber 12.

In addition, when the bottom of the drying processing chamber 12 is covered with the first liquid and the second liquid, the bottom 22a of the dehydration chamber 22 is not limited to being covered with the first liquid such as the eluent 20 as described in the above embodiment, and the A form in which the second liquid 32 covers the bottom 23 a of the first drying chamber 23 and the bottom 24 a of the second drying chamber 24. For example, part or all of the bottom of the drying processing chamber 12 may be covered with a mixed liquid of the first liquid and the second liquid 32.

10.40‧‧‧washing and drying device

11‧‧‧Clean treatment room

12‧‧‧ drying treatment room

13, 14‧‧‧ transport device

15‧‧‧The first cleaning room

15a, 16a, 22a, 23a, 24a ‧‧‧ bottom

16‧‧‧Second cleaning room

17‧‧‧cleaning roller

18‧‧‧ Cleaning liquid supply device

19‧‧‧Cleaning liquid (first liquid)

20‧‧‧ Eluent (washing liquid, first liquid)

21‧‧‧ Eluent supply device

22‧‧‧ Dehydration chamber

23‧‧‧The first drying room

24‧‧‧Second drying room

25, 29‧‧‧ partition

26‧‧‧Gas

27, 30‧‧‧gas blowing device

28, 31‧‧‧ Air Knife

28a, 31a, 41‧‧‧ supply ports

32‧‧‧ liquid (second liquid)

33‧‧‧ fine particles

34‧‧‧ turbulent

42‧‧‧Exhaust

43‧‧‧filtration device

44‧‧‧ pump

G‧‧‧ glass plate

Ga‧‧‧ surface

L‧‧‧ transport route

Steps S1 ～ S4‧‧‧‧

FIG. 1 is a flowchart showing a procedure of a method for manufacturing a glass plate according to a first embodiment of the present invention.

FIG. 2 is a side view of the glass plate washing and drying apparatus according to the first embodiment of the present invention.

Fig. 3 is a side view of a washing and drying device for a glass plate for comparison with the present invention.

Fig. 4 is a side view of a glass plate washing and drying device according to a second embodiment of the present invention.

Fig. 5 is an A-A sectional view of the washing and drying device shown in Fig. 4.

Claims (4)

A method for manufacturing a glass plate includes: A washing step of supplying the first liquid to the glass plate to clean the glass plate; and A drying step of blowing a gas on the glass plate carried into the drying processing chamber and carried on a predetermined transportation path in the drying processing chamber to remove the first liquid from the glass plate; and In a state where a second liquid is disposed at the bottom of the drying processing chamber, the gas is blown to the glass plate. The method for manufacturing a glass plate according to item 1 of the scope of patent application, wherein the glass plate is blown with the first liquid and the second liquid in a state where the bottom of the drying processing chamber is covered with the first liquid and the second liquid. gas. The method for manufacturing a glass plate according to item 1 or item 2 of the scope of patent application, wherein the second liquid is pure water. The method for manufacturing a glass plate according to any one of claims 1 to 3, wherein the second liquid is supplied to the drying processing chamber and the first liquid is discharged to the drying processing chamber. Two liquids, and the second liquid disposed on the bottom is replaced.