TW201839411A - Method for manufacturing probe and its structure and probe head using the same providing a probe with a stopper structure and capable of saving manufacturing time and reducing manufacturing costs - Google Patents

Abstract

A method for manufacturing a probe, comprising the steps of: (a) coating a first insulation layer on a surface of a needle body, wherein the needle body has a needle head, a needle body and a needle tail; (b) removing the first insulation layer located at the needle head and the needle tail; (c) sleeving and soldering a hollow stopper fixed to the needle tail to form a probe semi-finished product; (d) coating a second insulation layer on the surface of the probe semi-finished product; (e) removing the second insulation layer at the ends of the needle had and the probe semi-finished product. Thereby, the manufacturing method of the present invention can save manufacturing time and reduce manufacturing costs. Further, the present invention further provides a probe made by the aforementioned manufacturing method and a probe head using the same.

Description

Probe manufacturing method and structure thereof, and probe head using the same

The present invention relates to an upright probe applied to a probe card, and more particularly to a method of manufacturing an upright probe, a probe made by the manufacturing method, and a probe head using the probe.

Referring to FIG. 1 , FIG. 1 is a schematic cross-sectional view of a probe head 10 using a vertical probe 11 . The probe head 10 is actually arranged with a plurality of electrical contacts corresponding to the object to be tested. For the convenience of description, in the drawings of all of the probe heads shown in Fig. 1 and below, only a small portion of the probe head 10 and two probes 11 therein are shown.

The conventional probe head 10 mainly includes one (or more) upper guide plates 15, one (or more) lower guide plates 17, and a plurality of metal probes 11 having specific flexibility. The upper guide plate 15 has a plurality of upper through holes 16 , and the lower guide plate 17 has a plurality of lower through holes 18 . Each of the probes 11 has a through hole 16 and is partially protruded above the upper guide plate 15 for use. The pin tail 12 electrically connected to the electrical contact of the space transformer or the circuit board, passes through the lower through hole 18 and partially protrudes below the lower guide plate 17 for electrical connection, The needle 13 that touches the electrical contact of the object to be tested, and a needle body 14 that connects the needle tail 12 and the needle 13 between the upper and lower guide plates 15, 17 and has a buckling shape. In fact, before the probe 11 is assembled to the upper and lower guide plates 15, 17, the entire probe 11 is in a straight line shape. When the probe head 10 is assembled, the linear probe 11 is first threaded in a straight line. In the corresponding upper and lower through holes 16, 18, the upper guide plate 15 and/or the lower guide plate 17 are then relatively displaced in the horizontal direction, so that the upper and lower guide plates 15 and 17 are horizontally displaced, and thus the same root probe The needle tail 12 of the needle 11 and the needle 13 will be staggered from the original position on the same vertical extension axis, and the needle body 14 of the probe 11 will be bent and deformed, whereby the probe 11 can be passed through the needle tail 12 and the needle. 13 respectively abuts against the hole walls of the upper perforation 16 and the lower perforation 18 to remain positioned in the upper and lower guide plates 15, 17 without falling, and, when the probe 11 touches the object to be tested, the probe 11 The needle body 14 can be further flexed to cushion the reaction force from the object to be tested.

However, in addition to the process of assembling the misalignment described above, when the upper and lower guide plates 15, 17 are adjusted to return to the relative position where the probe 11 is in a straight state for needle changing or maintenance, the probe 11 is likely to occur from above. The lower guide plates 15, 17 are dropped. Secondly, during the detection process of the tip of the needle 13 repeatedly touching the object to be tested, or during the needle cleaning process in which the cleaning element is in frictional contact with the tip end of the needle 13, the probe sometimes occurs due to the elastic deformation movement of the probe 11. Part of the detachment occurs so that the needle tail 12 comes out of the perforation 16 above the upper guide 15, or the tip of the needle 13 deviates from the original predetermined position, or even the entire probe 11 is dislodged, and the probe must be reorganized or replaced. These issues are urgently needed to be overcome by the industry.

In order to solve the problem of the above-mentioned probes falling out or falling, the MEMS technology has been used to form a stop structure at the needle tail 12 when the probe is manufactured, so that the probe 11 can be prevented by the stopper structure. The effect of dropping and peeling out, but manufacturing the probe by microelectromechanical technology, there will be problems that the process is time consuming and costly, and therefore there is a need for improvement.

SUMMARY OF THE INVENTION A primary object of the present invention is to provide a method of manufacturing a probe which can produce a probe having a stopper structure and which has a short processing time and a low manufacturing cost.

In order to achieve the above object, the manufacturing method of the present invention comprises the following steps:

a) coating a first insulating layer on the surface of a needle body, the needle body having a needle, a needle tail and a needle body connecting the needle head and the needle tail; b) removing the coating layer covering the needle head and the needle tail An insulating layer; c) arranging and soldering a hollow stopper to form a probe semi-finished product at the needle tail, wherein the stopper has a diameter larger than a diameter of the needle body; d) coating a second insulating layer And a surface of the semi-finished product of the probe; and e) removing a second insulating layer covering the end of the needle and the semi-finished product of the probe.

Since the manufacturing method of the present invention combines a mechanically formed stopper with the needle body by welding (for example, resistance welding), thereby forming a probe having a blocking effect, and using a microelectromechanical process Compared with the technology, the manufacturing method provided by the invention has the advantages of simple process, short process time and low manufacturing cost. In addition, the needle body and the stopper are insulated to avoid leakage or short circuit of the probe during subsequent use.

Preferably, in the probe semi-finished product formed in the step c), the end of the needle tail protrudes from the stopper to constitute the end of the probe semi-finished product. In an embodiment of the invention, the end of the tail is located in the stop, such that the end of the stop constitutes the end of the probe blank.

Preferably, after removing the first insulating layer covering the needle and the needle tail, a metal bonding layer may be coated on the surface of the needle tail to improve the bonding strength between the stopper and the needle tail. In this way, it is particularly advantageous for the combination of the needle body and the stopper of different metal materials.

Preferably, after removing the second insulating layer covering the needle and the end of the probe semi-finished product, a conductive layer may be coated on the surface of the end of the probe semi-finished product, for example, conductive material made of gold (Au). Layer to increase the conductive effect of the probe.

Preferably, for the probe to meet the requirement of a fine pitch, and to prevent the stopper from having an excessive diameter after being sleeved on the needle tail to interfere with the adjacent needle, the sleeve is provided with a stopper. The diameter of the needle tail can be designed to be smaller than the diameter of the needle body. However, the diameter of the needle tail is not limited to the diameter of the needle body. For example, the diameter of the needle tail may be equal to the diameter of the needle body, that is, the entire needle body is a linear metal having a uniform diameter, which simplifies the manufacturing process of the needle body.

Preferably, in step c), the stopper is fixed to the needle tail by press welding, so that the stopper can be slightly deformed, so that the stopper has an elliptical cross section and has an outward direction. The protruding expansion portion helps to prevent the probe from coming down to the upper perforation of the upper guide.

Another object of the present invention is to provide a probe and a probe head using the same which can avoid the occurrence of needle drop during assembly, needle cleaning or maintenance.

In order to achieve the above object, the probe provided by the present invention has a needle body and a hollow stopper, the needle body having a needle, a needle tail and a needle body connecting the needle head and the needle tail, the stopper sleeve The needle tail fixed to the needle body is set and welded, and the maximum diameter of the stopper is larger than the diameter of the needle body of the needle body to provide a blocking effect.

Preferably, the blocking member can have different lengths according to actual needs, or different sleeve positions, so that the end of the needle tail protrudes from the stopper after being sleeved on the needle tail. Or the end of the needle tail does not protrude from the stopper and is located in the stopper. If the former is used, the probe abuts the electrical contact of the space transformer or the circuit board by the end of the tail. If the latter, the probe abuts the electrical connection by the end of the stopper. point. In addition, in the case where the end of the needle tail does not protrude from the stopper, the end of the stopper may be designed to have a claw-shaped contact portion, thereby increasing contact stability and avoiding needle drop or The case where the contact end is bonded to the electrical contact.

In another aspect, the present invention provides a probe head using the above probe, having an upper guide plate, a lower guide plate, and the aforementioned probe penetrating between the lower and lower guide plates. Wherein, the needle end of the probe needle passes through one of the upper guide plates, the needle of the needle passes through one of the lower guide plates, and the needle tail and the needle are not on the same vertical extension axis, and the needle body is located on the upper side, Between the lower guide plates, the blocking member abuts against the side of the upper guide plate facing away from the lower guide plate, and the maximum diameter of the blocking member is larger than the diameter of the through hole above the upper guide plate, so that the blocking member The stop cannot be perforated through the upper guide. Thereby, the probe head of the present invention is provided by the stopper during the assembly dislocation or when the upper and lower guide plates are returned to the relative position where the probe is in a straight state for maintenance. The blocking effect can effectively prevent the probe from falling from the upper and lower guide plates.

The detailed construction, features, assembly or use of the probe of the present invention and the structure of the probe and the probe head using the probe will be described in the detailed description of the subsequent embodiments. However, it should be understood by those of ordinary skill in the art that the present invention is not limited by the scope of the invention.

The Applicant first describes the same or similar elements or structural features thereof in the embodiments and the drawings which will be described below. Secondly, in order to facilitate the display and description of the technical features of the case, the dimensions and proportions of the various components in the drawings are not drawn according to the actual situation.

Referring to Figures 2 and 3, the probe 20 of the first preferred embodiment of the present invention is similar to the conventional buckling probe 10 shown in Figure 1, but has a special stop structure. Hereinafter, a method of manufacturing the probe 20 according to the first preferred embodiment of the present invention will be described, and structural features of the probe 20 will be described.

As shown in Fig. 2, the manufacturing method of the probe 20 according to the first preferred embodiment of the present invention mainly comprises the following steps:

a) coating a first insulating layer 25 on the surface of a needle body 21.

As shown in step S1 in Fig. 2, the present invention first uses a linear metal wire body manufactured by machining as the needle body 21 of the probe 20. The material of the needle body 21 may be, but not limited to, an alloy of tungsten, palladium, cobalt, nickel, platinum, copper or silver, and the diameter may be (but not limited to) 20 to 80 μm (micrometer), and the length may be (but not limited to) ) 300 to 800 μm. The needle body 21 has a needle 22, a needle tail 23 and a needle body 24 connecting the needle head 22 and the needle tail 23. As shown in Fig. 8, in the present invention, the so-called needle 22 means that the needle body 21 of the probe 20 in the probe head 70 passes through the lower through hole 74 of the lower guide plate 73 and is exposed on the bottom surface of the lower guide plate 73. The portion below 73a, in the embodiment, may also include a portion of the needle body 21 extending a predetermined length (maintaining a straight line) above the top surface 73b of the lower guide 73; the so-called needle tail 23 is generally referred to as the needle body 21 of the probe 20. Passing through the upper perforation 72 of the upper guide 71 and protruding above the top surface 71b of the upper guide 71, in an embodiment, the needle body 21 may also extend under the bottom surface 71a of the upper guide 71 by a predetermined length (maintained The portion of the straight body 24 is referred to as a portion between the upper and lower guide plates 71 and 73 and connecting the needle 22 and the needle tail 23. In the preferred embodiment, the needle body 21 is a cylindrical wire having a uniform diameter, that is, as shown in Fig. 2, the diameter D1 of the needle tail 23 is equal to the diameter D2 of the needle body 24 and is equal to the diameter of the needle. The free end of the needle 22 is formed in a conical shape and has a pointed point for touching the object to be tested. However, the shape of the point end of the needle 22 is not limited thereto. The free end portion (end 231) of the needle tail 23 is formed in a cylindrical shape and has a lead angle (not shown) for contacting the electrical contact of the space transformer or the circuit mother board, however, the point contact end of the needle tail 23 The shape is not limited to this. The diameter D1 of the aforementioned needle tail 23, at the point end position of the needle tail 23, may be different due to the provision of a guide angle or other structural shapes.

Next, as shown in step S2 of Fig. 2, the needle body 21 is subjected to the first insulation treatment so that the surface of the needle body 21 is covered with a first insulating layer 25. The material of the first insulating layer 25 may be, but not limited to, a metal oxide such as alumina, cerium oxide, titanium dioxide, or a material such as polyvinyl chloride (PVC) or polymethyl methacrylate (PMMA). High molecular polymer. The method of coating the first insulating layer 25 on the surface of the needle body 21 may be, but not limited to, physical vapor deposition, chemical vapor deposition, sol-gel method, vapor deposition method, atomic layer deposition method, and the like. .

b) removing the first insulating layer covering the needle 22 and the needle tail 23. As shown in step S3 of Fig. 2, the first insulating layer 25 covering the entire area or partial region of the needle 22 and the needle tail 23 is removed by wet etching, so that the entire area or partial region of the needle 22 and the needle tail 23 are exposed. The foregoing processing is not limited to wet etching, and other methods such as dry etching and mechanical polishing may also be employed.

Next, as shown in step S4 of Fig. 2, a metal bonding layer 26 is optionally coated on the surface of the needle tail 23 first. The material of the metal bonding layer 26 may be, but not limited to, a metal such as nickel, a nickel alloy, a palladium alloy or gold. The coating method may be, but not limited to, electroplating, physical vapor deposition, chemical vapor deposition, Methods such as electroless plating and atomic layer deposition.

c) arranging and welding a hollow stop member 30 to the needle tail 23 to form a probe semi-finished product 20a. As shown in step S5 of Fig. 2, a hollow stopper 30 is first inserted into a predetermined position of the needle tail 23, and the stopper 30 is fixed to the needle tail 23 by resistance welding, whereby the needle The body 21 is combined with the stopper 30 to form a probe semi-finished product 20a. In the present invention, the so-called hollow stopper 30 means an element having at least one hollow portion that can accommodate the needle tail 23. In the present embodiment, the stopper 30 is hollow and has a circular opening at both ends. The metal pipe column has a diameter larger than the diameter D2 of the needle body 24, and the material may be, but not limited to, nickel, cobalt, palladium, platinum or an alloy thereof, and the diameter may be (but not limited to) 30 to 90 μm (micrometer), and the length L (as shown in Figure 3) can be, but is not limited to, 50 to 250 μm.

In this step, after the stopper 30 is sleeved on the predetermined position of the needle tail 23, the stopper member 30 is pressed in the middle by the two welding electrodes and an electric current is applied, and between the stopper member 30 and the needle tail 23 at this time. The contact surface and the adjacent area are heated to a molten or plastic state by the resistance heat effect generated when the current passes, so that the stopper 30 and the needle tail 23 are bonded and fixed together. In this embodiment, the end of the tail 23 protrudes from the stopper 30 (as shown in Fig. 3) by a certain length, and since the stopper 30 is pressed by the welding electrode with a certain force during the welding process The force of the pressing will cause the tubular stopper 30 to be deformed, so that the opposite sides of the uncompressed side are outwardly expanded and protruded, and therefore, from the direction of the needle tail 23 (as shown in FIG. 4), the stop The cross-sectional shape of the member 30 will be similarly elliptical such that the maximum diameter D3 of the stop member 30 will be greater than the diameter D1 of the needle tail 23 and the diameter D2 of the needle body 24. Thereby, as shown in Fig. 8, after the probe 20 is assembled, the bottom end of the stopper 30 (the end near the needle tip) will form a stop surface which can be abutted against the top surface 71b of the upper guide 71.

In addition, it should be additionally noted that if the material of the needle body 21 and the stopper 30 are different, in order to achieve a good bonding effect between the needle body 21 and the stopper 30, between step b) and step c) That is, after removing the first insulating layer 25 coated on the needle 22 and the needle tail 23, the above step S4 is performed, that is, the surface of the needle tail 23 is first plated with a metal bonding layer 26, so that the stopper 30 and the stopper 30 are When the stitch tails 23 are joined by the resistance welding process, the bonding strength between the pins can be improved by the metal bonding layer 26.

d) coating a second insulating layer 27 on the surface of the probe semi-finished product 20a, so that the second insulating layer 27 is completely covered on the surface of the needle body 21 and the surface of the stopper member 30. That is, as shown in step S6 of Fig. 2, the probe semi-finished product 20a (i.e., the needle body 21 together with the stopper 30) is subjected to a second insulation treatment to bring the surface of the needle body 21 and the surface of the stopper member 30. A second insulating layer 27 is collectively coated. The material of the second insulating layer 27 may be, but not limited to, a metal oxide such as alumina, cerium oxide, titanium oxide, or a high molecular polymer such as PVC or PMMA. The method of coating the second insulating layer 27 may be, but not limited to, a physical vapor deposition method, a chemical vapor deposition method, a sol-gel method, an evaporation method, an atomic layer deposition method, or the like.

e) removing a second insulating layer overlying the needle and one end of the probe blank. As shown in step S7 of FIG. 2, the entire or partial portion of the needle 22 and at least the end 231 of the needle tail 23 (ie, the end of the probe blank 20a) are removed or added by a processing such as wet etching. A small segment is connected to the second insulating layer 27 of the needle tail 23 region of the end 23 of the needle tail 23, on the one hand, the conductive needle 22 is exposed, so that the tip end of the needle 22 can perform needle measurement on the object to be tested, and on the other hand, at least the needle tail is allowed. The end 231 of the 231 is exposed, but the surface of the stopper 30 still covers the second insulating layer 27, so that the end 231 of the tail 23 can be electrically connected to the electrical contact of the space transformer or the circuit board. This completes the manufacture of the probe 20.

Further, as shown in step S8 of FIG. 2, after the second insulating layer 27 of the end 231 of the needle tail 23 is removed, optionally at the end 231 of the needle tail 23 or with a needle tail 23 connecting a small section of the end 231 of the needle tail 23 The surface of the region is plated with a layer of gold (Au) as the conductive layer 28 to increase the conductive effect of the probe 20. It should be noted that the step of coating the surface of the end 231 of the tail 23 with the conductive layer 28 may also be performed after the completion of the above step S5 (that is, after the stopper 30 is fixed to the tail 23). .

According to the above manufacturing method, the present invention combines the stopper 30 and the needle body 21 by electric resistance welding, thereby forming a probe 20 having a blocking effect, compared with the conventional technique of using a microelectromechanical process, the present invention The method provided is simple in process and easy to implement, so that the process time can be shortened and the manufacturing cost can be effectively reduced. In addition, the needle body 21 is insulated together with the needle body 24 and the stopper member 30 and even a portion of the needle 22 and the needle tail 23 region, so that the probe 20 can be prevented from leaking during subsequent use or because the adjacent needles collide with each other. Short circuit situation.

5A and 5B show a probe 40 according to a second preferred embodiment of the present invention. The probe 40 provided in this embodiment is substantially similar to the probe 20 of the first preferred embodiment described above, except that the needle body 21 used has a diameter of the needle tail 23 which is smaller than the diameter of the needle body 24. That is, the diameter of the needle tail 23 is first wet-etched by a cylindrical needle-shaped needle having a uniform diameter, and then the desired probe 40 is produced by the same manufacturing steps as described above. At this time, as shown in Fig. 5B, the stopper 30 is sleeved and fixed to the needle tail 23 having a small diameter. Therefore, compared with the first preferred embodiment, the present embodiment can use a metal sleeve with a small outer diameter as the stopper 30, so that the fine pitch can be satisfied. Needle layout requirements.

Please refer to Fig. 6, which is a probe 50 according to a third preferred embodiment of the present invention. The probe 50 provided in this embodiment is substantially similar to the probe 40 of the second preferred embodiment described above. The needle body 21 used in the probe 50 is identical in structure to that used in the second preferred embodiment, except that the length of the stopper 30 used is long, or the stopper member 30 is sleeved on the needle tail 23 of the needle body 21. The position of the stop member 32 is such that after the weld is fixed to the needle tail 23 to form the probe blank, the end 231 of the needle tail 23 does not protrude from the stopper 30 but is located in the interior of the stopper 30. In this case, in step S6 of the above manufacturing method, the second insulating layer 27 also covers the entire outer surface of the probe blank 20a, and may simultaneously cover a small portion of the stopper 32 protruding from the end 231 of the needle tail 23 Internal surface. Next, in step S7, the end covering the end of the stopper 30 (i.e., the end of the probe blank) and the second insulating layer on the stopper connecting the end are utilized, for example, dry or wet. The step of removing the conductive layer is performed by etching, and then selectively, at a portion where the stopper is removed from the second insulating layer. Of course, as described above, the step of coating the conductive layer may also be performed after the completion of the probe semi-finished product. Therefore, the probe 50 of the third embodiment of the present invention abuts the one end of the needle body 24 (that is, the end of the stopper 30) by the stopper 30 to abut the electrical connection of the space transformer or the circuit board. Therefore, the contact area can be appropriately reduced to increase the contact stability of the probe 50, thereby preventing the needle 50 from being stuck.

Please refer to Fig. 7, which is a probe 60 according to a fourth preferred embodiment of the present invention. The probe 60 is substantially similar to the probe 50 provided by the third preferred embodiment described above, except that the end of the stop member 30 has a claw-shaped contact portion 36. The probe 60 abuts the electrical contact of the space transformer or the circuit board by the claw-shaped contact portion 36, so that the contact area can be further reduced, and the contact stability of the probe 60 can be further increased, thereby avoiding the probe 60. The situation occurs when the needle is stuck.

Referring to FIG. 8, the present invention further provides a probe head 70. The probe head 70 includes an upper guide 71, a lower guide 73, and a plurality of probes 20. In the present embodiment, an upper guide plate 71 and a lower guide plate 73 are used. However, the number of the upper and lower guide plates 71 and 73 is not limited thereto, for example, as shown in FIG. As shown in a probe head 80, two upper and lower upper guide plates 71 may be used, and two upper and lower lower guide plates 73 may be stacked. Next, in the present embodiment, the probe head 70 is the probe 20 provided in the first preferred embodiment, but the probes 40, 50, 60 provided in the other embodiments described above may be used.

When the probe 20 is assembled with the upper and lower guide plates 71 and 73, the upper and lower guide plates 71 and 73 are stacked in such a manner that the upper perforations 72 and the lower perforations 74 are linearly aligned, and then the probe 20 is attached to the upper guide plate 71. The upper ones are inserted into the upper and lower through holes 72, 74 of the upper and lower guide plates 71, 73, and then the upper guide plate 71 is pulled up until the stopper 30 tops the top surface 71b of the upper guide plate 71. At this time, the needle tail 23 and the needle 22 of each needle body 21 respectively pass through the perforation 72 of one of the upper guide plates 71 corresponding to the straight line and the lower perforation 74 of the lower guide plate 73, and the needle body 24 of the needle body 21 is introduced. Between the upper and lower guide plates 71, 73. Then, the horizontal relative displacements of the upper and lower guide plates 71, 73 are misaligned, so that the needle 22 and the needle tail 23 are not on the same vertical extension axis, and the needle body 24 is elastically deformed in an arc shape, and then the use of such as bolts, clamps and the like. The fixing member fixes the upper and lower guide plates 71, 73. After the assembly is completed, since the maximum diameter D3 of the stopper 30 is larger than the diameter D4 of the through hole 72 above the upper guide 71, the stopper 30 abuts against the side of the upper guide 71 facing away from the lower guide 73 ( That is, the top surface 71b) cannot pass through the perforations 72 above the upper guide 71. Thereby, the probe head 70 of the present invention is used for the maintenance during the assembly misalignment or when the upper and lower guide plates 71, 73 are returned to the relative position where the probe 20 is in a straight state for maintenance, by the stopper The blocking effect provided by 30 can effectively prevent the probe 20 from falling from the upper and lower guide plates 71, 73.

Finally, it is to be noted that the constituent elements disclosed in the foregoing embodiments are merely illustrative and are not intended to limit the scope of the present invention, and alternative or variations of other equivalent elements should also be the scope of the patent application of the present application. Covered.

[Prior technology]

10‧‧‧Probe head

11‧‧‧Probe

12‧‧‧needle tail

13‧‧‧ needle

14‧‧‧ needle body

15‧‧‧Upper guide

16‧‧‧Upper perforation

17‧‧‧ lower guide

18‧‧‧ underperture

[Examples]

20‧‧‧ probe

20a‧‧‧ probe semi-finished products

21‧‧‧ needle

22‧‧‧ needle

23‧‧‧needle tail

End of 231‧‧‧

24‧‧‧ needle body

25‧‧‧First insulation

26‧‧‧Metal joint

27‧‧‧Second insulation

28‧‧‧ Conductive layer

30‧‧‧stops

36‧‧‧ claw contact

40, 50, 60‧ ‧ probe

70, 80‧‧ ‧ probe head

71‧‧‧Upper guide

71a‧‧‧ bottom

71b‧‧‧Top

72‧‧‧Upper perforation

73‧‧‧ lower guide

73a‧‧‧ bottom

73b‧‧‧ top surface

74‧‧‧Under perforation

D1‧‧‧needle diameter

D2‧‧‧ needle diameter

D3‧‧‧Maximum diameter of the stop

D4‧‧‧perforated aperture

L‧‧‧stop length

S1~S8‧‧‧Steps

Figure 1 is a schematic cross-sectional view of a conventional probe head. Fig. 2 is a schematic view showing the manufacturing process of the probe according to the first preferred embodiment of the present invention. Fig. 3 is a perspective view showing the three-dimensional combination of the probes according to the first preferred embodiment of the present invention. Fig. 4 is a top plan view showing the probe according to the first preferred embodiment of the present invention, showing a state in which the stopper is fixed to the tail of the needle. Fig. 5A is a perspective exploded view of the probe according to the second preferred embodiment of the present invention. Fig. 5B is a perspective view showing the three-dimensional combination of the probes according to the second preferred embodiment of the present invention. Figure 6 is a perspective view showing the three-dimensional combination of the probes according to the third preferred embodiment of the present invention. Figure 7 is a schematic view showing the structure of a probe according to a fourth preferred embodiment of the present invention. Fig. 8 is a schematic cross-sectional view showing a probe head using a probe according to a first preferred embodiment of the present invention. Fig. 9 is a schematic cross-sectional view showing another probe head using the probe of the first preferred embodiment of the present invention.

Claims (16)

A method for manufacturing a probe, comprising the steps of: a) coating a first insulating layer on a surface of a needle body, the needle body having a needle, a needle tail and a needle body connecting the needle head and the needle tail; Removing a first insulating layer overlying the needle and the tail; c) arranging and soldering a hollow stop to form a probe semi-finished product at the end of the needle, wherein the stop has a diameter larger than the needle body Diameter; d) coating a second insulating layer on the surface of the probe semi-finished product; and e) removing a second insulating layer overlying the needle and one end of the probe blank. The manufacturing method according to claim 1, wherein in the probe semi-finished product formed in the step c), one end of the needle tail protrudes from the stopper; in the step e), the end of the probe semi-finished product It is the end of the needle tail. The manufacturing method of claim 2, wherein after the step e), the step of coating a conductive layer on the surface of the end of the tail is further included. The manufacturing method according to claim 1, wherein in the probe semi-finished product formed in the step c), one end of the needle tail is located in the stopper; in the step e), the end of the probe semi-finished product is Is the end of one of the stops. The manufacturing method according to claim 4, wherein after the step e), the step of coating a conductive layer on the surface of the end of the stopper is further included. The manufacturing method of claim 4, wherein the end of the stopper has a claw-shaped contact portion. The manufacturing method of claim 1, wherein the step b) and the step c) further comprise a step of coating a metal bonding layer on the surface of the needle tail; in the step c), the blocking member is permeable. The metal bonding layer is fixed to the tail of the needle. The manufacturing method of claim 1, wherein the diameter of the needle tail is less than or equal to the diameter of the needle body. The manufacturing method according to claim 1, wherein in the step c), the stopper is welded and fixed to the needle tail, and the stopper has an elliptical cross section. A probe comprising: a needle body having a needle, a needle tail and a needle body connecting the needle head and the needle tail; and a hollow stopper member sleeved and welded to the needle tail of the needle body, The maximum diameter of the stop member is greater than the diameter of the needle body of the needle body. The probe of claim 10, wherein one end of the needle tail protrudes from the stopper. The probe of claim 10, wherein the diameter of the needle tail is less than or equal to the diameter of the needle body. The probe of claim 10, wherein one end of the needle tail is located in the stop. The probe of claim 13 wherein one of the ends of the stop has a claw-shaped contact. The probe of claim 10, wherein the stop member has an elliptical cross-sectional shape. A probe head comprising: an upper guide plate having an upper perforation; a lower guide plate having a lower perforation; and a probe according to any one of claims 10 to 15, the needle end of the needle being worn Through the perforation above the upper guide plate, the needle of the needle body passes through the lower surface of the lower guide plate, and the needle tail of the needle body and the needle of the needle body are not on the same vertical extension axis, and the needle body of the needle body is introduced. Between the upper and lower guide plates, the stopping member abuts against one side of the upper guiding plate facing the lower guiding plate, and the maximum diameter of the blocking member is larger than the diameter of the perforation above the upper guiding plate.