TW201818558A - Paste composition which can form an electrode capable of imparting a high conversion efficiency and a high short circuit current value in a solar cell wafer such as a PERC type solar cell wafer - Google Patents
Paste composition which can form an electrode capable of imparting a high conversion efficiency and a high short circuit current value in a solar cell wafer such as a PERC type solar cell wafer Download PDFInfo
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- TW201818558A TW201818558A TW106137170A TW106137170A TW201818558A TW 201818558 A TW201818558 A TW 201818558A TW 106137170 A TW106137170 A TW 106137170A TW 106137170 A TW106137170 A TW 106137170A TW 201818558 A TW201818558 A TW 201818558A
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- aluminum
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- paste
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- 239000000203 mixture Substances 0.000 title claims abstract description 80
- 238000006243 chemical reaction Methods 0.000 title abstract description 29
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- 239000002245 particle Substances 0.000 claims abstract description 160
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 66
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 65
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 claims abstract description 41
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 39
- 239000010703 silicon Substances 0.000 claims abstract description 39
- 229910000676 Si alloy Inorganic materials 0.000 claims abstract description 37
- 239000002923 metal particle Substances 0.000 claims abstract description 37
- 239000000843 powder Substances 0.000 claims abstract description 29
- 239000011521 glass Substances 0.000 claims abstract description 26
- 238000000790 scattering method Methods 0.000 claims abstract description 6
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 5
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052796 boron Inorganic materials 0.000 claims abstract description 5
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims abstract description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 4
- 239000011574 phosphorus Substances 0.000 claims abstract description 4
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 3
- -1 organic carrier Substances 0.000 abstract description 13
- 235000012431 wafers Nutrition 0.000 description 34
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- 239000000956 alloy Substances 0.000 description 8
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- 238000000034 method Methods 0.000 description 5
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
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- 238000005259 measurement Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- XUMBMVFBXHLACL-UHFFFAOYSA-N Melanin Chemical compound O=C1C(=O)C(C2=CNC3=C(C(C(=O)C4=C32)=O)C)=C2C4=CNC2=C1C XUMBMVFBXHLACL-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 238000009689 gas atomisation Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- ODCMOZLVFHHLMY-UHFFFAOYSA-N 1-(2-hydroxyethoxy)hexan-2-ol Chemical compound CCCCC(O)COCCO ODCMOZLVFHHLMY-UHFFFAOYSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910021364 Al-Si alloy Inorganic materials 0.000 description 1
- 229910000952 Be alloy Inorganic materials 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Inorganic materials [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
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- 150000001913 cyanates Chemical class 0.000 description 1
- 238000011161 development Methods 0.000 description 1
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- 238000010586 diagram Methods 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- HDNHWROHHSBKJG-UHFFFAOYSA-N formaldehyde;furan-2-ylmethanol Chemical compound O=C.OCC1=CC=CO1 HDNHWROHHSBKJG-UHFFFAOYSA-N 0.000 description 1
- 239000007849 furan resin Substances 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- BSPSZRDIBCCYNN-UHFFFAOYSA-N phosphanylidynetin Chemical compound [Sn]#P BSPSZRDIBCCYNN-UHFFFAOYSA-N 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920001955 polyphenylene ether Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Inorganic materials [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000013008 thixotropic agent Substances 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- ZFZQOKHLXAVJIF-UHFFFAOYSA-N zinc;boric acid;dihydroxy(dioxido)silane Chemical compound [Zn+2].OB(O)O.O[Si](O)([O-])[O-] ZFZQOKHLXAVJIF-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Sustainable Energy (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Conductive Materials (AREA)
Abstract
Description
本發明係關於一種膏狀組成物。 The present invention relates to a paste composition.
近年,以提升結晶系太陽電池晶片之轉換效率(發電効率)或信頼性等作為目的,目前進行了各種之研究開發。其中之一,PERC(Passivated emitter and rear cell)型高轉換效率晶片已被注目。PERC型高轉換效率晶片,例如,具有一構造,該構造係具備鋁作為主成分之電極。目前已知藉由適切地設計此電極層之構成,可提高PERC型高轉換效率晶片之轉換效率。例如,專利文獻1,已記載一種鋁膏狀組成物,其係含有由30-70mol%Pb2+、1-40mol%Si4+、10-65mo%B3+、1-25mol%Al3+所構成之玻璃料。 In recent years, various researches and developments have been conducted for the purpose of improving the conversion efficiency (power generation efficiency) and reliability of crystalline solar cell wafers. One of them, the PERC (Passivated emitter and rear cell) type high conversion efficiency chip has been attracting attention. The PERC type high conversion efficiency wafer has, for example, a structure including an electrode having aluminum as a main component. It is known that by appropriately designing the structure of this electrode layer, the conversion efficiency of a PERC type high conversion efficiency chip can be improved. For example, Patent Document 1 describes an aluminum paste-like composition containing 30-70 mol% Pb 2+ , 1-40 mol% Si 4+ , 10-65mo% B 3+ , and 1-25 mol% Al 3+ The frit formed.
【專利文獻1】日本特開2013-145865號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2013-145865
然而,使用傳統之膏狀組成物所形成之具備電極之太陽電池晶片的轉換效率,相較於理論轉換效率卻仍留有提升之餘地,並未實現得到充分之高轉換效率。特別係,使用傳統之膏狀組成物時,有難以得到高短路電流值之課題。 However, the conversion efficiency of solar cell wafers with electrodes formed using the traditional paste composition still leaves room for improvement compared to the theoretical conversion efficiency, and has not achieved a sufficiently high conversion efficiency. In particular, when a conventional paste composition is used, it is difficult to obtain a high short-circuit current value.
本發明係鑑於上述技術背景而成,目的在於提供一種膏狀組成物,其係可形成一電極,對於PERC型太陽電池晶片等之太陽電池晶片可得到高轉換效率及高短路電流值者。 The present invention has been made in view of the above-mentioned technical background, and an object thereof is to provide a paste-like composition that can form an electrode and can obtain high conversion efficiency and high short-circuit current value for a solar cell wafer such as a PERC type solar cell wafer.
本發明人等為達到上述目的而深入研究的結果,發現藉由將具有特定之粒度分佈之鋁粒子及/或鋁-矽合金粒子作為必要之構成成分時,可達成上述目的,從而完成本發明。 As a result of intensive research in order to achieve the above-mentioned object, the present inventors have found that the above-mentioned object can be achieved by using aluminum particles and / or aluminum-silicon alloy particles having a specific particle size distribution as essential constituents, thereby completing the invention .
亦即,本發明,例如,係包含以下之項所記載之主題。 That is, the present invention includes, for example, the subject matter described in the following items.
項1.一種膏狀組成物,其特徵係至少包含:鋁粒子及鋁-矽合金粒子中至少一者的金屬粒子、玻璃粉末、有機載體,前述金屬粒子,以雷射衍射散射法所測定之作為體積基準之粒度分佈曲線中,最小粒徑Dmin係1.5μm以上2.0μm以下,前述粒度分佈曲線中,該當50%目之中心粒徑(D50)係4.0μm以上8.0μm以下,且,後述式(1) D=D50/(D90-D10) (1)(式(1)中,D50係前述中心粒徑,D90,係前述粒度分佈曲線中該當90%目之粒徑,D10,係前述粒度分佈曲線中該當10%目之粒徑)所表示之D值係0.7以上。 Item 1. A paste-like composition, characterized in that it contains at least one of aluminum particles and metal particles of aluminum-silicon alloy particles, glass powder, and organic carrier. The metal particles are measured by laser diffraction scattering method as a volume basis. In the particle size distribution curve, the minimum particle diameter Dmin is 1.5 μm or more and 2.0 μm or less. In the aforementioned particle size distribution curve, the 50% mesh central particle size (D50) is 4.0 μm or more and 8. 0 μm or less, and will be described later. Formula (1) D = D50 / (D90-D10) (1) (In formula (1), D50 is the aforementioned central particle diameter, D90 is the particle diameter that should be 90% mesh in the aforementioned particle size distribution curve, and D10 is the aforementioned particle diameter. The D value represented by the particle size distribution curve (which should be a particle size of 10% mesh) is 0.7 or more.
項2.如項1所記載之膏狀組成物,其中,前述玻璃粉末,係包含選自鉛(Pb)、鉍(Bi)、釩(V)、硼(B)、矽(Si)、錫(Sn)、磷(P)及鋅(Zn)所成群中1種以上之元素。 Item 2. The paste composition according to item 1, wherein the glass powder is selected from the group consisting of lead (Pb), bismuth (Bi), vanadium (V), boron (B), silicon (Si), and tin (Sn) , Phosphorus (P) and zinc (Zn) in a group of one or more elements.
項3.如項1或2所記載之膏狀組成物,其中,前述金屬粒子100質量份時,前述玻璃粉末之含有量係1質量份以上8質量份以下,前述有機載體之含有量係20質量份以上45質量份以下。 Item 3. The paste composition according to item 1 or 2, wherein when the mass of the metal particles is 100 parts by mass, the content of the glass powder is 1 part by mass or more and 8 parts by mass or less, and the content of the organic carrier is 20 parts by mass or more. 45 parts by mass or less.
藉由本發明之膏狀組成物,可形成對於PERC型太陽電池晶片等之太陽電池晶片可賦予高轉換效率及高短路電流值之電極。 With the paste composition of the present invention, an electrode capable of imparting high conversion efficiency and a high short-circuit current value to a solar cell wafer such as a PERC type solar cell wafer can be formed.
1‧‧‧矽半導體基板 1‧‧‧ silicon semiconductor substrate
2‧‧‧n型不純物層 2‧‧‧n-type impurity layer
3‧‧‧反射防止膜(鈍化膜) 3‧‧‧Anti-reflection film (passivation film)
4‧‧‧柵電極 4‧‧‧ grid electrode
5‧‧‧電極層 5‧‧‧ electrode layer
6‧‧‧合金層 6‧‧‧ alloy layer
7‧‧‧p+層 7‧‧‧p + layer
8‧‧‧裏面電極 8‧‧‧ inside electrode
9‧‧‧接觸孔 9‧‧‧ contact hole
10‧‧‧膏狀組成物 10‧‧‧ paste composition
【圖1】表示PERC型太陽電池晶片之斷面構造之一例的模式圖,(a)係實施形態之一例,(b)係實施形態之其他例。 FIG. 1 is a schematic view showing an example of a cross-sectional structure of a PERC solar cell wafer, (a) is an example of an embodiment, and (b) is another example of an embodiment.
【圖2】實施例與比較例所製作之電極構造之斷面的模式圖。 [Fig. 2] A schematic view of a cross section of an electrode structure produced in Examples and Comparative Examples.
以下,詳細說明本發明之實施形態。 Hereinafter, embodiments of the present invention will be described in detail.
本發明之膏狀組成物,例如,係為形成太陽電池晶片之電極而使用之材料。太陽電池晶片,並無特別限定,可列舉例如,PERC(Passivated emitter and rear cell)型高轉換效率晶片(以下,稱為「PERC型太陽電池晶片」)。本發明之膏狀組成物,例如,係用以形成PERC型太陽電池晶片之裏面電極。以下,本發明之膏狀組成物,亦有簡單記載為「膏狀組成物」之情形。 The paste composition of the present invention is, for example, a material used for forming an electrode of a solar cell wafer. The solar cell wafer is not particularly limited, and examples thereof include a PERC (Passivated emitter and rear cell) type high conversion efficiency wafer (hereinafter, referred to as a "PERC type solar cell wafer"). The paste composition of the present invention is, for example, used to form a back electrode of a PERC type solar cell wafer. Hereinafter, the paste composition of the present invention may be simply described as a "paste composition".
最初,說明PERC型太陽電池晶片之構造之一例。 First, an example of the structure of a PERC solar cell wafer will be described.
1.PERC型太陽電池晶片 1. PERC solar cell wafer
圖1(a)、(b),係PERC型太陽電池晶片之一般狀態之斷面構造之模式圖。PERC型太陽電池晶片,可具備:矽半導體基板1、n型不純物層2、反射防止膜3、柵電極4、電極層5、合金層6、p+層7,作為構成要素。 Figures 1 (a) and (b) are schematic diagrams of the cross-sectional structure of a general state of a PERC solar cell wafer. The PERC solar cell wafer may include a silicon semiconductor substrate 1, an n-type impurity layer 2, an antireflection film 3, a gate electrode 4, an electrode layer 5, an alloy layer 6, and a p + layer 7 as constituent elements.
矽半導體基板1,例如,係用作厚度為180~250μm之p型矽基板。 The silicon semiconductor substrate 1 is used, for example, as a p-type silicon substrate having a thickness of 180 to 250 μm.
n型不純物層2,係設置於矽半導體基板1之受光面側。n型不純物層2之厚度,例如,係0.3~0.6μm。 The n-type impurity layer 2 is provided on the light-receiving surface side of the silicon semiconductor substrate 1. The thickness of the n-type impurity layer 2 is, for example, 0.3 to 0.6 μm.
反射防止膜3及柵電極4,係設置於n型不純物層2之表面。反射防止膜3,例如,亦稱作氮化矽膜所形成之鈍化膜。反射防止膜3,係作為鈍化膜發揮作用,抑制矽半導體基板1之表面發生之電子的再結合,其結果,可減少發生之載體的再結合率。藉此,提高PERC型太 陽電池晶片之轉換效率。 The antireflection film 3 and the gate electrode 4 are provided on the surface of the n-type impurity layer 2. The anti-reflection film 3 is, for example, a passivation film formed of a silicon nitride film. The antireflection film 3 functions as a passivation film and suppresses recombination of electrons generated on the surface of the silicon semiconductor substrate 1. As a result, the recombination rate of the carriers that occur can be reduced. This improves the conversion efficiency of the PERC solar cell chip.
反射防止膜3,亦設置於矽半導體基板1之裏面側,亦即,設置於與前述受光面為逆側之面。此外,將此裏面側之反射防止膜3貫通,且,削除矽半導體基板1之裏面的一部份而形成之接觸孔,係形成於矽半導體基板1之裏面側。 The antireflection film 3 is also provided on the back side of the silicon semiconductor substrate 1, that is, on the side opposite to the light receiving surface. In addition, the antireflection film 3 on the back side is penetrated, and a contact hole formed by cutting a part of the back side of the silicon semiconductor substrate 1 is formed on the back side of the silicon semiconductor substrate 1.
電極層5,係形成為通過前述接觸孔與矽半導體基板1接觸者。電極層5,係藉由本發明之膏狀組成物而形成之部材,形成為所定之圖案形狀。如圖1(a)之形態,電極層5,亦可形成為覆蓋PERC型太陽電池晶片之裏面全體者,抑或,形成為覆蓋接觸孔及其附近者。電極層5之主成分係鋁,電極層5係鋁電極層。 The electrode layer 5 is formed so as to be in contact with the silicon semiconductor substrate 1 through the contact hole. The electrode layer 5 is a member formed by the paste composition of the present invention and is formed in a predetermined pattern shape. As shown in the form of FIG. 1 (a), the electrode layer 5 may be formed so as to cover the entire inside of the PERC solar cell wafer, or it may be formed so as to cover the contact hole and its vicinity. The main component of the electrode layer 5 is aluminum, and the electrode layer 5 is an aluminum electrode layer.
電極層5,例如,藉由將膏狀組成物塗佈為所定之圖案形狀而形成並得到。塗佈方法並無特別限定,可列舉例如,絲網印刷等習知的方法。塗佈膏狀組成物後,因應必要進行乾燥後,例如,藉由660℃等超過鋁之熔點的溫度進行短時間燒成,從而形成電極層5並得到。 The electrode layer 5 is formed and obtained, for example, by applying a paste composition in a predetermined pattern shape. The coating method is not particularly limited, and examples thereof include known methods such as screen printing. After the paste-like composition is applied and dried as necessary, for example, the electrode layer 5 is obtained by firing for a short time at a temperature exceeding the melting point of aluminum, such as 660 ° C.
藉由如此之燒成,膏狀組成物所含之鋁,會於矽半導體基板1之內部擴散。藉此,電極層5與矽半導體基板1之間,可形成鋁-矽(Al-Si)合金層(合金層6),同時,藉由鋁原子之擴散,可形成p+層7作為不純物層。 By such firing, aluminum contained in the paste-like composition will diffuse inside the silicon semiconductor substrate 1. Thereby, an aluminum-silicon (Al-Si) alloy layer (alloy layer 6) can be formed between the electrode layer 5 and the silicon semiconductor substrate 1, and at the same time, a p + layer 7 can be formed as an impurity layer by diffusion of aluminum atoms.
p+層7,可得到防止電子的再結合,提升生成載體之收集効率之効果,亦即,可得到BSF(Back Surface Field)効果。 The p + layer 7 can obtain the effect of preventing the recombination of electrons and improving the collection efficiency of the generated carrier, that is, the BSF (Back Surface Field) effect can be obtained.
前述電極層5與合金層6所形成之電極,係圖1所示之裏面 電極8。因此,裏面電極8,係使用膏狀組成物而形成者,例如,藉由於裏面側之反射防止膜3(鈍化膜3)上塗佈,可形成裏面電極8。特別係,使用本發明之膏狀組成物形成裏面電極8時,可容易抑制電極層5與矽半導體基板1之界面中空洞的生成,從而可得到良好之BSF効果。 The electrode formed by the aforementioned electrode layer 5 and alloy layer 6 is the inner electrode 8 shown in Fig. 1. Therefore, the back electrode 8 is formed using a paste-like composition. For example, the back electrode 8 can be formed by coating on the back anti-reflection film 3 (passivation film 3). In particular, when the back electrode 8 is formed using the paste composition of the present invention, it is possible to easily suppress the formation of voids in the interface between the electrode layer 5 and the silicon semiconductor substrate 1, so that a good BSF effect can be obtained.
2.膏狀組成物 2. Paste composition
接著詳述,本實施形態之膏狀組成物。 Next, the paste-like composition of this embodiment will be described in detail.
膏狀組成物,係至少包含鋁粒子及鋁-矽合金粒子中至少一方者的金屬粒子、玻璃粉末、有機載體,前述金屬粒子,雷射衍射散射法所測定作為體積基準之粒度分佈曲線中,最小粒徑Dmin係1.5μm以上2.0μm以下,前述粒度分佈曲線中,該當50%目之中心粒徑(D50)係4.0μm以上8.0μm以下,且,後述式(1) The paste-like composition is a metal particle, a glass powder, and an organic carrier containing at least one of aluminum particles and aluminum-silicon alloy particles. The metal particle has a particle size distribution curve determined by laser diffraction scattering method as a volume basis. The minimum particle diameter Dmin is 1.5 μm or more and 2.0 μm or less. In the aforementioned particle size distribution curve, the central particle diameter (D50) of 50% mesh is 4.0 μm or more and 8. 0 μm or less, and the following formula (1)
D=D50/(D90-D10) (1) D = D50 / (D90-D10) (1)
(式(1)中,D50係前述中心粒徑,D90,係前述粒度分佈曲線中該當90%目之粒徑,D10,係前述粒度分佈曲線中該當10%目之粒徑) (In formula (1), D50 is the aforementioned central particle diameter, D90 is the aforementioned particle diameter of 90% in the particle size distribution curve, and D10 is the aforementioned particle diameter of 10% in the particle size distribution curve)
所表示之D值係0.7以上。 The D value indicated is above 0.7.
藉由本發明之膏狀組成物,可形成對於PERC型太陽電池晶片等之太陽電池晶片可賦予高轉換效率及高短路電流值之電極。 With the paste composition of the present invention, an electrode capable of imparting high conversion efficiency and a high short-circuit current value to a solar cell wafer such as a PERC type solar cell wafer can be formed.
如前述,藉由使用膏狀組成物,可形成PERC型太陽電池晶片等之太陽電池晶片之裏面電極。亦即,本發明之膏狀組成物,可用作為通過形成於矽基板上之鈍化膜所具有之孔穴而與矽基板電接觸,從而形成太陽電池用裏面電極者。 As described above, by using a paste-like composition, an inner electrode of a solar cell wafer such as a PERC type solar cell wafer can be formed. That is, the paste-like composition of the present invention can be used to form an inner electrode for a solar cell by making electrical contact with a silicon substrate through a hole in a passivation film formed on the silicon substrate.
膏狀組成物,係含有鋁粒子及鋁-矽合金粒子中至少一者作為金屬粒子之構成成分。藉由使膏狀組成物含有前述金屬粒子,膏狀組成物可被燒成而形成燒結體,發揮導電性。 The paste composition contains at least one of aluminum particles and aluminum-silicon alloy particles as a constituent component of the metal particles. When the paste-like composition contains the metal particles, the paste-like composition can be fired to form a sintered body and exhibit electrical conductivity.
膏狀組成物,可含有鋁粒子及鋁-矽合金粒子中至少一者作為構成成分,或者,可將鋁粒子及鋁-矽合金粒子之兩者作為構成成分。 The paste composition may contain at least one of aluminum particles and aluminum-silicon alloy particles as a constituent component, or may include both aluminum particles and aluminum-silicon alloy particles as a constituent component.
前述金屬粒子之形狀並無特別限定。例如,前述金屬粒子之形狀可係球狀、橢圓狀、不定形狀、鱗片狀、纖維狀等中任一者。前述金屬粒子之形狀係球狀時,藉由膏狀組成物所形成之前述電極層5中,前述金屬粒子之填充性增大,可有效地降低電阻抗。此外,前述金屬粒子之形狀係球狀時,藉由膏狀組成物所形成之前述電極層5中,矽半導體基板1與前述金屬粒子(鋁粒子及/或鋁-矽合金粒子)之接點增加,可易於形成良好之BSF層。 The shape of the aforementioned metal particles is not particularly limited. For example, the shape of the metal particles may be any of a spherical shape, an oval shape, an indefinite shape, a scaly shape, and a fibrous shape. When the shape of the metal particles is spherical, in the electrode layer 5 formed by the paste composition, the filling property of the metal particles is increased, and the electrical impedance can be effectively reduced. When the shape of the metal particles is spherical, the contact point between the silicon semiconductor substrate 1 and the metal particles (aluminum particles and / or aluminum-silicon alloy particles) in the electrode layer 5 formed by the paste-like composition is spherical. Increased, can easily form a good BSF layer.
膏狀組成物含有鋁粒子時,燒成膏狀組成物而形成燒結體時與矽半導體基板1之間可形成含有鋁-矽合金之合金層6及p+層7,從而可進一步提高前述之BSF効果。 When the paste composition contains aluminum particles, when the paste composition is fired to form a sintered body, an aluminum-silicon alloy-containing alloy layer 6 and a p + layer 7 can be formed between the silicon semiconductor substrate 1 and the above-mentioned BSF can be further improved. effect.
另一方面,膏狀組成物含有鋁-矽合金粒子時,鋁-矽合金粒子中所含矽成分,可得到稼動控制膏狀組成物中之鋁與矽半導體基板1中之矽的過剩反應。藉此,可易於抑制電極層5與矽半導體基板1之界面中產生空洞。 On the other hand, when the paste composition contains aluminum-silicon alloy particles, the silicon component contained in the aluminum-silicon alloy particles can control excess reaction of aluminum in the paste composition with silicon in the silicon semiconductor substrate 1. This makes it possible to easily prevent voids from being generated at the interface between the electrode layer 5 and the silicon semiconductor substrate 1.
鋁粒子及鋁-矽合金粒子之純度並無特別限定,此外,鋁粒子及鋁-矽合金粒子,亦可包含無法避免含有之金屬。 The purity of the aluminum particles and aluminum-silicon alloy particles is not particularly limited. In addition, the aluminum particles and aluminum-silicon alloy particles may also contain metals that cannot be avoided.
鋁-矽合金粒子,只要係鋁及矽之合金即可,兩者之比率並 無特別限定。例如,鋁-矽合金粒子中,含有矽5質量%以上40質量%以下時,由此膏狀組成物形成之電極層可維持低阻抗值。 The aluminum-silicon alloy particles may be alloys of aluminum and silicon, and the ratio of the two is not particularly limited. For example, when the aluminum-silicon alloy particles contain silicon in an amount of 5 mass% to 40 mass%, the electrode layer formed from the paste composition can maintain a low resistance value.
前述金屬粒子,以雷射衍射散射法所測定之作為體積基準之粒度分佈曲線中,最小粒徑Dmin係1.5μm以上2.0μm以下。Dmin在此範圍中時,膏狀組成物,係意指具較少之微粉狀之前述金屬粒子。Dmin未達1.5μm時,短路電流降低,此外,Dmin超過2.0μm時,開放端電壓降低,惡化太陽電池晶片之轉換效率。Dmin,係1.5~1.8μm特佳。 In the particle size distribution curve of the aforementioned metal particles measured by laser diffraction scattering method as a volume basis, the minimum particle diameter Dmin is 1.5 μm or more and 2.0 μm or less. When Dmin is in this range, the paste-like composition means the aforementioned metal particles having less fine powder. When Dmin is less than 1.5 μm, the short-circuit current decreases. In addition, when Dmin exceeds 2.0 μm, the open-end voltage decreases, which deteriorates the conversion efficiency of the solar cell wafer. Dmin, especially 1.5 ~ 1.8μm.
前述金屬粒子,前述粒度分佈曲線中,該當50%目之中心粒徑(D50)係4.0μm以上8.0μm以下。D50未達4.0μm時,太陽電池晶片之轉換效率會減少,D50超過8.0μm時,開放端電壓會降低。此外,藉由D50係4.0μm以上8.0μm以下,前述金屬粒子的凝集難以發生,並且,燒成時之反應性亦良好,鋁可容易與矽等形成合金。 In the aforementioned metal particles, in the aforementioned particle size distribution curve, the central particle diameter (D50) which should be 50% of the mesh is 4.0 μm or more and 8. 0 μm or less. When D50 is less than 4.0 μm, the conversion efficiency of solar cell wafers will decrease. When D50 exceeds 8.0 μm, the open-end voltage will decrease. In addition, when the D50 is 4.0 μm or more and 8. 0 μm or less, the agglomeration of the metal particles is difficult to occur, and the reactivity at the time of firing is also good, and aluminum can easily form an alloy with silicon and the like.
前述金屬粒子,係式(1) The aforementioned metal particles, formula (1)
D=D50/(D90-D10) (1) D = D50 / (D90-D10) (1)
(式(1)中,D50係前述中心粒徑,D90,係前述粒度分佈曲線中該當90%目之粒徑,D10,係前述粒度分佈曲線中該當10%目之粒徑) (In formula (1), D50 is the aforementioned central particle diameter, D90 is the aforementioned particle diameter of 90% in the particle size distribution curve, and D10 is the aforementioned particle diameter of 10% in the particle size distribution curve)
所表示之D值為0.7以上。藉由D值在此範圍中,前述金屬粒子,係意指微粉及粗粉之比例較少,粒徑之分佈較小,具有進一步平均之粒度。D值未達0.7時,阻抗難以降低,轉換效率不充分。D值之上限,例如, 可係2.0,此時,生產性之低化難以發生。較佳之D值之上限,係1.4。D值,係0.7~1.0特佳。 The D value indicated is above 0.7. With the D value in this range, the aforementioned metal particles mean that the ratio of the fine powder and the coarse powder is small, the particle size distribution is small, and the particle size is further averaged. When the value of D is less than 0.7, it is difficult to reduce the impedance and the conversion efficiency is insufficient. The upper limit of the D value may be 2.0, for example. In this case, it is difficult to reduce productivity. The upper limit of the preferred D value is 1.4. The D value is particularly good from 0.7 to 1.0.
前述粒度分佈曲線,可根據JIS Z 8825:2013而使用雷射衍射散射法測定前述金屬粒子所得。Dmin,係前述粒度分佈曲線中,最小粒徑之值。D50,係前述粒度分佈曲線中該當50%目之粒徑,換言之,係意指前述粒度分佈曲線中粒徑之積算值為50%時之粒徑。相同地,D90,係意指前述積算值為90%,D10,係意指前述積算值為10%時之粒徑。 The particle size distribution curve can be obtained by measuring the metal particles using a laser diffraction scattering method in accordance with JIS Z 8825: 2013. Dmin is the value of the smallest particle diameter in the aforementioned particle size distribution curve. D50 is the particle size that should be 50% in the aforementioned particle size distribution curve, in other words, it means the particle size when the cumulative value of the particle diameter in the aforementioned particle size distribution curve is 50%. Similarly, D90 means the aforementioned cumulative value of 90%, and D10 means the particle diameter at the aforementioned cumulative value of 10%.
本發明中,前述粒度分佈曲線,例如,可使用麥奇克拜爾公司製之雷射衍射散射式粒徑分佈測定裝置「Microtrac MT3000II系列」而得,可計測Dmin、D10、D50及D90。 In the present invention, the aforementioned particle size distribution curve can be obtained, for example, by using a laser diffraction scattering particle size distribution measuring device "Microtrac MT3000II series" manufactured by McKebel, and can measure Dmin, D10, D50, and D90.
前述金屬粒子,藉由具有Dmin、D50及D之3種類的參數在前述特定之範圍內,使具備膏狀組成物所形成之電極層之太陽電池晶片具有高短路電流(ISC),此外,開放端電壓(VOC)亦提高,從而可顯示出優異之轉換效率。 The aforementioned metal particles have a high short-circuit current (I SC ) in a solar cell wafer having an electrode layer formed of a paste-like composition within the aforementioned specific range by having three kinds of parameters of Dmin, D50, and D. The open-end voltage (V OC ) is also increased, which can show excellent conversion efficiency.
特別係,膏狀組成物係如前述,微粉之量已控制,於膏狀組成物之燒成時鋁可容易與矽等形成合金,易於得到良好之BSF効果,其結果,太陽電池晶片之轉換效率可較傳統還高。藉此,本申請發明者,發現傳統上未受注目之膏狀組成物中之前述金屬粒子的微粉,可對於太陽電池晶片之轉換效率有很大之影響力,應須防止前述金屬粒子之微細粉末之混入,調節前述之3種類之參數。藉此,得到可提高太陽電池晶片之轉換效率者。 In particular, the paste composition is as described above, the amount of fine powder is controlled, and aluminum can easily form an alloy with silicon when the paste composition is fired, and it is easy to obtain a good BSF effect. As a result, the conversion of solar cell wafers Efficiency can be higher than traditional. Based on this, the inventors of the present application have discovered that the fine powder of the aforementioned metal particles in the traditional unobtrusive paste composition can have a great influence on the conversion efficiency of solar cell wafers, and the fineness of the aforementioned metal particles should be prevented Mix the powder and adjust the three types of parameters mentioned above. Thereby, those who can improve the conversion efficiency of solar cell wafers are obtained.
膏狀組成物所含前述金屬粒子,亦可係鋁粒子及鋁-矽合金粒子兩者。此外,膏狀組成物,只要不阻礙本發明之効果,亦可含有鋁粒子及鋁-矽合金粒子以外之其他金屬粒子。 The aforementioned metal particles contained in the paste composition may be both aluminum particles and aluminum-silicon alloy particles. In addition, the paste-like composition may contain metal particles other than aluminum particles and aluminum-silicon alloy particles as long as the effect of the present invention is not hindered.
膏狀組成物含有鋁粒子及鋁-矽合金粒子兩者時,兩者之混合比率並無特別限定。例如,相對於鋁粒子100質量份,鋁-矽合金粒子為100質量份以上500質量份以下即可,在膏狀組成物之燒成時,藉由鋁與矽半導體基板1中之矽的過剩反應而可有效地控制,易於得到優異之BSF効果。 When the paste composition contains both aluminum particles and aluminum-silicon alloy particles, the mixing ratio of the two is not particularly limited. For example, the aluminum-silicon alloy particles may be 100 mass parts or more and 500 mass parts or less with respect to 100 mass parts of aluminum particles. When the paste-like composition is fired, the excess of silicon in the silicon and semiconductor substrate 1 is caused by the excess of aluminum. The reaction can be effectively controlled, and it is easy to obtain excellent BSF effect.
鋁粒子及鋁-矽合金粒子,任一者皆可藉由習知的方法製造。 Either aluminum particles or aluminum-silicon alloy particles can be produced by a conventional method.
鋁粒子及鋁-矽合金粒子之Dmin、D50、D值的調節,亦可藉由傳統所進行之粒度分佈的控制方法而進行。特別係,根據可容易對於此等之值進行調節之觀點,藉由氣體霧化法,製造鋁粒子及鋁-矽合金粒子為佳。 The Dmin, D50, and D values of aluminum particles and aluminum-silicon alloy particles can also be adjusted by the conventional particle size distribution control method. In particular, from the viewpoint that these values can be easily adjusted, it is preferable to produce aluminum particles and aluminum-silicon alloy particles by a gas atomization method.
玻璃粉末,係發揮幫助前述金屬粒子與矽的反應,以及,前述金屬粒子本身的燒結之作用。 The glass powder plays a role in assisting the reaction between the metal particles and silicon, and sintering of the metal particles themselves.
玻璃粉末並未特別限定,例如,可係為了形成太陽電池晶片之電極層而使用之膏狀組成物所含習知的玻璃成分。玻璃粉末之具體例,可係選自鉛(Pb)、鉍(Bi)、釩(V)、硼(B)、矽(Si)、錫(Sn)、磷(P),以及,鋅(Zn)所成群中1種,或亦可含有2種以上之元素。此外,亦可使用含有鉛之玻璃粉末,或者,鉍系、釩系、錫-磷系、硼矽酸鋅系、鹼性硼矽酸系等之無鉛之玻璃粉末。特別係根據對於人體影 響之觀點,使用無鉛之玻璃粉末為佳。 The glass powder is not particularly limited, and may be, for example, a conventional glass component contained in a paste composition used to form an electrode layer of a solar cell wafer. Specific examples of the glass powder may be selected from lead (Pb), bismuth (Bi), vanadium (V), boron (B), silicon (Si), tin (Sn), phosphorus (P), and zinc (Zn ) One or more elements may be contained in the group. In addition, lead-containing glass powders or lead-free glass powders such as bismuth-based, vanadium-based, tin-phosphorus-based, zinc borosilicate-based, and alkaline borosilicate-based glass powders can also be used. In particular, it is preferable to use lead-free glass powder from the viewpoint of human body impact.
具體之玻璃粉末,可含有係選自B2O3、Bi2O3、ZnO、SiO2、Al2O3、BaO、CaO、SrO、V2O5、Sb2O3、WO3、P2O5及TeO2所成群中至少1種之成分。例如,亦可在玻璃粉末中,將B2O3成分與Bi2O3成分之莫耳比(B2O3/Bi2O3)係0.8以上4.0以下之玻璃料,V2O5成分與BaO成分之莫耳比(V2O5/BaO)係1.0以上2.5以下之玻璃料組合。 Specifically, the glass powder may contain B 2 O 3 , Bi 2 O 3 , ZnO, SiO 2 , Al 2 O 3 , BaO, CaO, SrO, V 2 O 5 , Sb 2 O 3 , WO 3 , P A component of at least one of the groups of 2 O 5 and TeO 2 . For example, in a glass powder, the molar ratio (B 2 O 3 / Bi 2 O 3 ) of the B 2 O 3 component and the Bi 2 O 3 component may be a glass frit of 0.8 to 4.0, V The molar ratio (V 2 O 5 / BaO) of the 2 O 5 component and the BaO component is a glass frit combination of 1.0 to 2.5.
玻璃粉末之軟化點,例如,可係750℃以下。玻璃粉末所含粒子之平均粒徑,例如,可係1μm以上3μm以下。 The softening point of the glass powder may be, for example, below 750 ° C. The average particle diameter of the particles contained in the glass powder may be, for example, 1 μm or more and 3 μm or less.
膏狀組成物中所含玻璃粉末之含有量,例如,相對於前述金屬粒子100質量份,係0.5質量份以上40質量份以下為佳。此時,矽半導體基板1及反射防止膜3(鈍化膜)之密著性良好,此外,電阻抗難以增大。膏狀組成物中所含玻璃粉末之含有量,相對前述金屬粒子100質量份,係1質量份以上8質量份以下特佳。 The content of the glass powder contained in the paste-like composition is, for example, preferably 0.5 to 40 parts by mass relative to 100 parts by mass of the metal particles. At this time, the silicon semiconductor substrate 1 and the antireflection film 3 (passivation film) have good adhesion, and it is difficult to increase the electrical impedance. The content of the glass powder contained in the paste composition is particularly preferably 1 part by mass or more and 8 parts by mass or less based on 100 parts by mass of the metal particles.
有機載體,可使用以溶劑溶解因應必要之各種添加劑及樹脂所成材料。或者,亦可使用未含溶劑而直接將樹脂作為有機載體使用。 As the organic carrier, materials made of various additives and resins which are necessary to dissolve in a solvent can be used. Alternatively, the resin may be used as an organic vehicle without using a solvent.
溶劑,可使用習知的種類,具體而言,可列舉如:二乙二醇單丁醚、二乙二醇單丁醚乙酸酯、二丙二醇單甲醚等。 As the solvent, a known type may be used. Specifically, examples thereof include diethylene glycol monobutyl ether, diethylene glycol monobutyl ether acetate, and dipropylene glycol monomethyl ether.
各種添加劑,例如,可使用抗氧化劑、腐蝕抑制劑、消泡劑、增黏劑、黏著賦予劑、耦合劑、静電賦予劑、聚合禁止劑、觸變性劑、沉降防止劑等。具體而言,例如,可使用聚乙二醇酯化合物、聚乙二醇醚化合物、聚氧乙烯脫水山梨糖醇酯化合物、脫水山梨糖醇烷基酯化合物、脫 水山梨糖醇烷基酯化合物、磷酸酯化合物、醯胺聚酯酸胺鹽、氧化聚乙烯系化合物、脂肪酸醯胺蠟等。 Various additives can be used, for example, antioxidants, corrosion inhibitors, defoamers, tackifiers, adhesion-imparting agents, coupling agents, static-imparting agents, polymerization inhibitors, thixotropic agents, sedimentation inhibitors, and the like. Specifically, for example, a polyethylene glycol ester compound, a polyethylene glycol ether compound, a polyoxyethylene sorbitan ester compound, a sorbitan alkyl ester compound, a sorbitan alkyl ester compound, Phosphate ester compounds, ammonium polyester acid salts, oxidized polyethylene compounds, fatty acid ammonium waxes, and the like.
樹脂可使用習知的種類,可將乙基纖維素、硝化纖維素、聚乙烯醇縮丁醛、酚醛樹脂、黑色素樹脂、尿素樹脂、二甲苯樹脂、醇酸樹脂、不飽和聚酯樹脂、丙烯酸樹脂、聚酰亞胺樹脂、呋喃樹脂、聚氨酯樹脂、異氰酸酯化合物、熱固性樹脂如氰酸酯化合物等、聚乙烯、聚丙烯、聚苯乙烯、ABS樹脂、聚甲基丙烯酸甲酯、聚氯乙烯、聚偏二氯乙烯、聚乙酸乙烯酯、聚乙烯醇、聚縮醛、聚碳酸酯、聚對苯二甲酸乙二酯、聚對苯二甲酸丁二醇酯、聚苯醚、聚砜、聚酰亞胺、聚醚砜、聚芳酯、聚醚醚酮、聚四氟乙烯、矽樹脂等二種以上組合使用。 As the resin, a known type can be used, and ethyl cellulose, nitrocellulose, polyvinyl butyral, phenol resin, melanin resin, urea resin, xylene resin, alkyd resin, unsaturated polyester resin, and acrylic acid can be used. Resins, polyimide resins, furan resins, polyurethane resins, isocyanate compounds, thermosetting resins such as cyanate compounds, polyethylene, polypropylene, polystyrene, ABS resins, polymethyl methacrylate, polyvinyl chloride, Polyvinylidene chloride, polyvinyl acetate, polyvinyl alcohol, polyacetal, polycarbonate, polyethylene terephthalate, polybutylene terephthalate, polyphenylene ether, polysulfone, poly Two or more kinds of imide, polyethersulfone, polyarylate, polyetheretherketone, polytetrafluoroethylene, and silicone resin are used in combination.
有機載體所含樹脂、溶劑、各種添加劑之比率可任意調整,例如,可與習知的有機載體相同之成分比。 The ratio of the resin, the solvent, and various additives contained in the organic vehicle may be arbitrarily adjusted, and for example, the same component ratio as that of the conventional organic vehicle may be used.
有機載體之含有比率並無特別限定,例如,根據具有良好印刷性之觀點,相對前述金屬粒子100質量份,係10質量份以上500質量份以下為佳,20質量份以上45質量份以下特佳。 The content ratio of the organic vehicle is not particularly limited. For example, from the viewpoint of good printability, it is preferably 10 parts by mass or more and 500 parts by mass or less, and particularly preferably 20 parts by mass or more and 45 parts by mass or less. .
本發明之膏狀組成物,例如,可適用於形成太陽電池晶片之電極層(特別係如圖1所示之PERC型太陽電池晶片之裏面電極8)。因此,本發明之膏狀組成物,可作為太陽電池裏面電極形成劑使用而得。 The paste composition of the present invention is, for example, suitable for forming an electrode layer of a solar cell wafer (especially, the inner electrode 8 of the PERC type solar cell wafer shown in FIG. 1). Therefore, the paste composition of the present invention can be obtained as an electrode forming agent in a solar cell.
以下,藉由實施例進一步具體說明本發明,惟本發明並未限定為此等實施例之態樣。 Hereinafter, the present invention is further specifically described by examples, but the present invention is not limited to the aspects of these examples.
(實施例1) (Example 1)
使用既知的分散裝置(分散器)將藉由氣體霧化法調製之鋁粒子100質量份、具有B2O3-Bi2O3-SrO-BaO-Sb2O3=40/40/10/5/5(mol%)之成分比之玻璃粉末1.5質量份、及以丁基二甘醇溶解乙基纖維素之樹脂液(有機載體)35質量份混合,從而得到膏狀組成物。使用之鋁粒子的Dmin、D10、D50及D90,如後揭之表1所示。 Using a known dispersing device (disperser), 100 parts by mass of aluminum particles prepared by a gas atomization method and having B 2 O 3 -Bi 2 O 3 -SrO-BaO-Sb 2 O 3 = 40/40/10 / 1.5 parts by mass of 5/5 (mol%) glass powder and 35 parts by mass of a resin solution (organic vehicle) in which ethyl cellulose was dissolved with butyldiethylene glycol were mixed to obtain a paste-like composition. The Dmin, D10, D50, and D90 of the aluminum particles used are shown in Table 1 disclosed later.
(實施例2) (Example 2)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁-矽合金粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum-silicon alloy particles having Dmin, D10, D50, and D90 shown in Table 1.
(實施例3) (Example 3)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum particles having Dmin, D10, D50, and D90 shown in Table 1.
(實施例4) (Example 4)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁-矽合金粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum-silicon alloy particles having Dmin, D10, D50, and D90 shown in Table 1.
(實施例5) (Example 5)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁粒子及鋁-矽合金粒子之混合粒子以外,其他皆與實施例1相同得到膏狀組成物。前述混合粒子中,鋁粒子與鋁-矽合金粒子之質量比率係1:1。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to mixed particles of aluminum particles and aluminum-silicon alloy particles having Dmin, D10, D50, and D90 shown in Table 1. In the aforementioned mixed particles, the mass ratio of the aluminum particles to the aluminum-silicon alloy particles is 1: 1.
(實施例6) (Example 6)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁粒子及鋁-矽合金粒子之混合粒子以外,其他皆與實施例1相同得到膏狀組成物。前述混合粒子中,鋁粒子與鋁-矽合金粒子之質量比率係1:1。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to mixed particles of aluminum particles and aluminum-silicon alloy particles having Dmin, D10, D50, and D90 shown in Table 1. In the aforementioned mixed particles, the mass ratio of the aluminum particles to the aluminum-silicon alloy particles is 1: 1.
(比較例1) (Comparative example 1)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum particles having Dmin, D10, D50, and D90 shown in Table 1.
(比較例2) (Comparative example 2)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁-矽合金粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum-silicon alloy particles having Dmin, D10, D50, and D90 shown in Table 1.
(比較例3) (Comparative example 3)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum particles having Dmin, D10, D50, and D90 shown in Table 1.
(比較例4) (Comparative Example 4)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum particles having Dmin, D10, D50, and D90 shown in Table 1.
(比較例5) (Comparative example 5)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁-矽合金粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum-silicon alloy particles having Dmin, D10, D50, and D90 shown in Table 1.
(比較例6) (Comparative Example 6)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁粒子及鋁-矽合金粒子之混合粒子以外,其他皆與實施例1相 同得到膏狀組成物。前述混合粒子中,鋁粒子與鋁-矽合金粒子之質量比率係1:1。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to mixed particles of aluminum particles and aluminum-silicon alloy particles having Dmin, D10, D50, and D90 shown in Table 1. In the aforementioned mixed particles, the mass ratio of the aluminum particles to the aluminum-silicon alloy particles is 1: 1.
(比較例7) (Comparative Example 7)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum particles having Dmin, D10, D50, and D90 shown in Table 1.
(比較例8) (Comparative Example 8)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum particles having Dmin, D10, D50, and D90 shown in Table 1.
(比較例9) (Comparative Example 9)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum particles having Dmin, D10, D50, and D90 shown in Table 1.
(比較例10) (Comparative Example 10)
除了鋁粒子,係變更為具有表1所示之Dmin、D10、D50及D90之鋁粒子以外,其他皆與實施例1相同得到膏狀組成物。 A paste-like composition was obtained in the same manner as in Example 1 except that the aluminum particles were changed to aluminum particles having Dmin, D10, D50, and D90 shown in Table 1.
(評估方法) (assessment method)
評估用之太陽電池晶片之燒成基板係如以下而製作。首先,如圖2之(A)所示,首先,準備厚度為180μm之矽半導體基板1。並且,如圖2之(B)所示,使用波長為532nm之YAG雷射作為雷射發振器,於矽半導體基板1之表面形成直徑D為100μm,深度為1μm之接觸孔9。此矽半導體基板1,阻抗值係3Ω.cm,係裏面鈍化型單結晶。 The fired substrate of the solar cell wafer for evaluation was produced as follows. First, as shown in (A) of FIG. 2, first, a silicon semiconductor substrate 1 having a thickness of 180 μm is prepared. As shown in FIG. 2 (B), a YAG laser having a wavelength of 532 nm is used as a laser oscillator, and a contact hole 9 having a diameter D of 100 μm and a depth of 1 μm is formed on the surface of the silicon semiconductor substrate 1. The silicon semiconductor substrate 1 has an impedance of 3Ω. cm, the passivation type single crystal inside.
接著,如圖2之(C)所示,將上述各實施例及比較例所得各膏狀組成物10如包覆裏面全體(形成接觸孔9之側的面),於矽半導體 基板1之表面上,使用絲網印刷機,印刷為1.0-1.1g/pc。接著,雖圖未顯示,於受光面印刷由習知的技術作成之Ag膏。之後,使用設定為800℃之紅外帶爐進行燒成。藉由此燒成,如圖2之(D)所示,形成電極層5,此外,進行此燒成時藉由鋁在矽半導體基板1之內部擴散,使電極層5與矽半導體基板1之間形成Al-Si之合金層6,且藉由鋁原子之擴散形成不純物層之p+層(BSF層)7。如以上,製作評估用之燒成基板。 Next, as shown in (C) of FIG. 2, each paste-like composition 10 obtained in each of the above Examples and Comparative Examples is coated on the entire surface (the surface on the side where the contact hole 9 is formed) on the surface of the silicon semiconductor substrate 1. In the above, a screen printing machine was used, and the printing was 1.0-1 g / pc. Next, although not shown, an Ag paste made by a conventional technique is printed on the light receiving surface. Thereafter, firing was performed using an infrared band furnace set at 800 ° C. As a result of this firing, as shown in FIG. 2 (D), the electrode layer 5 is formed. In addition, during this firing, aluminum is diffused inside the silicon semiconductor substrate 1 to make the electrode layer 5 and the silicon semiconductor substrate 1 An Al-Si alloy layer 6 is formed in between, and a p + layer (BSF layer) 7 of an impurity layer is formed by diffusion of aluminum atoms. As described above, a fired substrate for evaluation is produced.
如此所得太陽電池晶片,使用Wacom電創之太陽模擬器:WXS-156S-10,I-V測定裝置IV15040-10,進行I-V測定。藉此,測定短路電流(ISC)及開放端電圧(VOC),此外,算出曲線因子(FF)及轉換效率Eff。曲線因子(FF),係使用市販之太陽模擬器進行。 The solar cell wafer thus obtained was subjected to IV measurement using Wacom Denso's solar simulator: WXS-156S-10, IV measuring device IV15040-10. Thereby, a short-circuit current (I SC ) and an open-end voltage (V OC ) are measured, and a curve factor (FF) and a conversion efficiency Eff are calculated. The curve factor (FF) was performed using a commercially available solar simulator.
關於氣孔之評估,以光學顯微鏡(200倍)觀察所得之燒成基板之各試料的斷面,觀察基板與電極層界面中氣孔的有無。觀察光學顯微鏡之觀察視野中複數之接觸孔,所有的接觸孔中未形成空洞時評估為◎,形成空洞之接觸孔係未達全個數之20%評估為○,形成空洞之接觸孔係全個數之20~50%評估為△。 Regarding the evaluation of porosity, the cross section of each sample of the obtained fired substrate was observed with an optical microscope (200 times), and the presence or absence of porosity at the interface between the substrate and the electrode layer was observed. Observe the number of contact holes in the observation field of the optical microscope. If no holes are formed in all the contact holes, it is evaluated as ◎. If the number of contact holes that form a cavity is less than 20% of the total number, it is evaluated as ○. 20 to 50% of the number was evaluated as △.
表1中,表示評估結果。又,表1中,「Al」係表示所使用之膏狀組成物所含金屬粒子係鋁粒子,「Al-Si」係表示所使用之膏狀組成物所含金屬粒子係鋁-矽合金粒子。此外,「Al+Al-Si」,係意指金屬粒子係鋁粒子及鋁-矽合金粒子之混合粒子。 Table 1 shows the evaluation results. In Table 1, "Al" indicates that the metal particles contained in the paste composition used are aluminum particles, and "Al-Si" indicates that the metal particles contained in the paste composition used are aluminum-silicon alloy particles. . In addition, "Al + Al-Si" means a mixed particle of metal particles based on aluminum particles and aluminum-silicon alloy particles.
表1中Dmin、D10、D50及D90,係根據JIS Z 8825:2013所規定之測定條件,係使用麥奇克拜爾公司製之雷射回折散亂式粒徑分佈測定裝置「Microtrac MT3000II系列」而計測。 Dmin, D10, D50, and D90 in Table 1 are in accordance with the measurement conditions specified in JIS Z 8825: 2013, using a laser retracement scattered particle size distribution measuring device "Microtrac MT3000II Series" manufactured by McKebel And measurement.
如表1所示,使用具有Dmin為1.5~2.0μm,D50為4.0~8.0μm,並且,D值為0.7以上之粒度分佈之金屬粒子時,任一者之Isc皆較大,再者,可達成21.4%以上之高轉換效率。 As shown in Table 1, when metal particles having a particle size distribution with Dmin of 1.5 to 2.0 μm, D50 of 4.0 to 8.0 μm, and D value of 0.7 or more are used, The sc are relatively large. Furthermore, a high conversion efficiency of more than 21.4% can be achieved.
考慮到此次所使用之晶片之理論轉換效率係21.5%,使用實施例所得之膏狀組成物時,可認為優異之BSF効果得到發揮。關於比較例4、5,雖Isc係9.83A以上,但VOC未到達0.665mV。因此,BSF効果不充分。 Considering that the theoretical conversion efficiency of the wafer used this time is 21.5%, when the paste composition obtained in the example is used, it can be considered that the excellent BSF effect is exerted. Regarding Comparative Examples 4 and 5, although I sc was 9.83 A or more, V OC did not reach 0.665 mV. Therefore, the BSF effect is insufficient.
此外,鋁粒子,與鋁-矽合金粒子比較,並未對轉換效率產生較大影響,惟確認含有鋁-矽合金粒子之膏狀組成物者,可抑制空洞(氣孔)的發生,提升信頼性。 In addition, compared with aluminum-silicon alloy particles, aluminum particles do not significantly affect the conversion efficiency. However, it is confirmed that the paste composition containing aluminum-silicon alloy particles can suppress the occurrence of voids (stomases) and improve the reliability. .
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