TW201816518A - Method for forming coating film, apparatus for forming coating film and computer-readable recording medium - Google Patents

Abstract

This method for producing a coating film comprises: a first step for heating a body W to be processed, which comprises a substrate W1 and a projected part W2 provided on the surface of the substrate W1; a second step for obtaining a heated liquid by heating a coating liquid; and a third step for spraying the heated liquid in the form of droplets from a nozzle N onto the surface of the body W to be processed, which has been heated in the first step.

Description

Coating film forming method, coating film forming apparatus, and computer-readable recording medium

[0001] The present disclosure relates to a coating film forming method, a coating film forming apparatus, and a computer-readable recording medium.

[0002] Patent Document 1 discloses a method of forming a coating liquid (for example, a resist film) on a processed object having convex portions (protrusions, ridges, etc.) provided on a surface of a substrate (wafer). This method includes heating the object to be treated by heating while spraying the coating liquid droplets from the nozzle while meandering the nozzle above the surface of the object to be treated. [Prior Art Document] [Patent Document] [0003] [Patent Document 1] Japanese Patent Laid-Open No. 2005-019560

[Problems to be Solved by the Invention] [0004] The method disclosed in Patent Document 1 does not bury the space between the convex portions with the coating liquid material, but rather follows the surface of the object to be treated (the surface including the convex portions). The objective is to form a coating film evenly. However, if this method is used, the next coating liquid can be sprayed on the area of the surface of the object to be processed where the spraying area overlaps with the movement of the nozzle. When the solvent of the coating liquid has not completely evaporated. Therefore, even if the object to be processed is heated by heating means, the solute (coating material particles) of the coating liquid droplets is fixed on the side wall surface of the convex portion, and the coating liquid droplets (solvent) flow and the The base end side of the film is particularly thick when the thickness of the coating film is large. [0005] Here, the present disclosure describes a coating film forming method, a coating film forming apparatus, and a computer-readable recording medium capable of forming a coating film more uniformly along the surface of a processing object including a convex portion. . [Means to Solve the Problem] [0006] A method for forming a coating film according to one aspect of the present disclosure includes a first process for a processed object including a substrate and a convex portion provided on a surface of the substrate. Heating; the second process is to obtain the first heating liquid by heating the coating liquid; and the third process is to subject the surface of the object to be processed after being heated in the first process in the state of droplets The first heating liquid is sprayed from the nozzle. [0007] In the coating film forming method according to one aspect of the present disclosure, when the coating liquid is sprayed on the surface of the object to be processed, in the second process, the coating liquid is heated to become the first heating liquid. Therefore, when the first heating liquid is ejected from the nozzle, immediately after the solvent (solvent) evaporates, the concentration of material particles (solutes) in the coating liquid becomes high, so it becomes the fluidity of the coating liquid (first heating liquid) A state of decline. Therefore, on the surface (concavo-convex surface) of the object to be treated, the liquid droplets are condensed and flowed with each other. As a result, the material particles of the coating liquid easily adhere to the surface of the object to be treated uniformly. According to the above, the coating film can be formed more uniformly along the surface of the object including the convex portion. [0008] In addition, in the coating film forming method related to one aspect of the present disclosure, in the third process, the surface of the object to be processed after being heated in the first process is in a state of droplets. The first heating liquid is sprayed from below the nozzle. Therefore, since the object to be treated was heated before the third process, the solvent (solvent) of the coating liquid sprayed in the third process was volatilized by the object to be treated on the entire surface of the object to be treated. . Therefore, on the surface (concavo-convex surface) of the object to be treated, droplets are condensed and flow to each other. Therefore, a coating film can be formed more uniformly along the surface of a to-be-processed body including a convex part. [0009] It is acceptable to heat the coating liquid in the second process so that the temperature of the first heating liquid at the nozzle outlet becomes ½ or less of the boiling point of the solvent contained in the coating liquid. The higher the temperature of the solvent (solvent) of the coating liquid, the more the volatilization is promoted, but when the volatilization amount is increased too much, the droplets ejected from the nozzle will solidify before reaching the surface of the object to be processed. In addition, when the temperature of the first heating liquid at the outlet of the nozzle is heated to be less than 1/2 of the boiling point of the solvent contained in the coating liquid, the liquid droplets sprayed from the nozzle reach the object to be treated. The surface became difficult to cure before. [0010] Even in the second process, the coating liquid may be heated so that the temperature of the first heating liquid at the outlet of the nozzle becomes 35 ° C to 60 ° C. In this case, it becomes more difficult for the droplets sprayed from the nozzle to reach the surface of the object to be cured. [0011] Even in the second process, the first heating liquid may be obtained by mixing the coating liquid and the heated gas in the nozzle and heating the coating liquid. In this case, the fluidity of the coating liquid is maintained in a state immediately before the coating liquid is discharged from the nozzle. Therefore, it becomes easy to spray the coating liquid from the nozzle in the state of a droplet. Therefore, it is possible to generate droplets in a simple manner in response to the fluidity of the coating liquid before being ejected from the nozzle, and to reduce the fluidity of the coating liquid after being ejected from the nozzle. The opposite requirement is that the material particles adhere uniformly to the surface of the object to be treated. [0012] Even in the second process, the first heating liquid may be obtained by heating the coating liquid with a heater on the upstream side of the nozzle. In this case, the fluidity of the coating liquid can be maintained until immediately before the coating liquid is discharged from the nozzle. Therefore, it becomes easy to spray the coating liquid from the nozzle in the state of a droplet. Therefore, it is possible to generate droplets in a simple manner in response to the fluidity of the coating liquid before being ejected from the nozzle, and to reduce the fluidity of the coating liquid after being ejected from the nozzle. The opposite requirement is that the material particles adhere uniformly to the surface of the object to be treated. [0013] The coating film forming method related to one aspect of the present disclosure further includes a fourth process, which is after the third process, and the coating liquid is heated to obtain a second heating liquid; and a fifth process, which is a system After the 4th process, the second heating liquid is sprayed from a nozzle on the surface of the object to be coated with the coating film, and the temperature of the second heating liquid in the 4th process is set to be higher than The temperature of the first heating liquid in the second process is also acceptable. In this case, since the temperature of the first heating liquid is relatively low and the fluidity of the droplets sprayed from the nozzle is high, the liquid sprayed onto the surface of the object to be processed in the third process Drops easily enter the narrow recesses in the object. In addition, since the temperature of the second heating liquid is relatively high and the fluidity of the droplets sprayed from the nozzle is low, the droplets sprayed onto the surface of the object to be treated in the fifth process are likely to adhere. On the side of the convex part of the object. Therefore, a coating film can be formed more uniformly along the surface of a to-be-processed body including a convex part. [0014] Even in the third process, the droplets are sprayed from the nozzle on the surface of the object to be treated, and the gas nozzles different from the nozzles are caused to follow the nozzles, while the liquid droplets It is also possible to spray heated nitrogen gas at the spraying place. In this case, since the solvent is dried during the blowing of the droplets, the time required to form a coating film on the surface of the object can be shortened. [0015] A coating film forming apparatus related to another aspect of the present disclosure includes: a first heating section configured to heat a coating liquid; and a second heating section configured to heat a substrate including a substrate and a substrate provided thereon. The object to be processed on the convex portion of the surface; the supply unit having a nozzle; and the control unit, the control unit performs the first process, which controls the second heating unit to heat the object, and the second process, which controls the first The heating portion and the supply portion spray the liquid on the surface of the object heated by the first treatment from the nozzle in the state of droplets, and the first heating liquid is the coating liquid heated by the first heating portion. . [0016] In the coating film forming apparatus according to another aspect of the present disclosure, when the coating liquid is sprayed on the surface of the object to be processed, the control unit performs a second process of heating the coating liquid to become the first heating liquid. Therefore, when the first heating liquid is ejected from the nozzle, immediately after the solvent (solvent) evaporates, the concentration of material particles (solutes) in the coating liquid becomes high, so it becomes the fluidity of the coating liquid (first heating liquid). A state of decline. Therefore, on the surface (concavo-convex surface) of the object to be treated, the liquid droplets are condensed and flowed with each other. As a result, the material particles of the coating liquid easily adhere to the surface of the object to be treated uniformly. According to the above, the coating film can be formed more uniformly along the surface of the object including the convex portion. [0017] In addition, in the coating film forming apparatus related to another aspect of the present disclosure, the control unit controls the first heating unit and the supply unit in the second process, and is controlled from the nozzle pair by the first process. Liquid droplets are sprayed on the surface of the object after heating. Therefore, since the object to be treated is heated before the second treatment, the solvent (solvent) of the coating liquid sprayed in the second treatment is volatilized by the object to be treated on the entire surface of the object to be treated. . Therefore, on the surface (concavo-convex surface) of the object to be treated, the liquid droplets are condensed and flowed with each other. Therefore, a coating film can be formed more uniformly along the surface of a to-be-processed body including a convex part. [0018] Even if the coating liquid is heated in the first heating section, the temperature of the first heating liquid at the nozzle outlet may be made equal to or less than 1/2 of the boiling point of the solvent contained in the coating liquid. The higher the temperature of the solvent (solvent) of the coating liquid, the more the volatilization is promoted, but when the volatilization amount is increased too much, the droplets ejected from the nozzle will solidify before reaching the surface of the object to be processed. In addition, when the temperature of the first heating liquid at the outlet of the nozzle is heated to be less than 1/2 of the boiling point of the solvent contained in the coating liquid, the liquid droplets sprayed from the nozzle reach the object to be treated. The surface became difficult to cure before. [0019] Even if the first heating part heats the coating liquid so that the temperature of the first heating liquid at the nozzle outlet becomes 35 ° C to 60 ° C. In this case, it becomes more difficult for the droplets sprayed from the nozzle to reach the surface of the object to be cured. [0020] Even if the first heating section is configured to supply the heated gas to the nozzle, and the gas and the coating liquid are mixed in the nozzle, the coating liquid may be heated. In this case, the fluidity of the coating liquid is maintained in a state immediately before the coating liquid is discharged from the nozzle. Therefore, it becomes easy to spray the coating liquid from the nozzle in the state of a droplet. Therefore, it is possible to generate droplets in a simple manner in response to the fluidity of the coating liquid before being ejected from the nozzle, and to reduce the fluidity of the coating liquid after being ejected from the nozzle. The opposite requirement is that the material particles adhere uniformly to the surface of the object to be treated. [0021] Even if the first heating section is a heater that heats the coating liquid on the upstream side of the nozzle. In this case, the fluidity of the coating liquid can be maintained until immediately before the coating liquid is discharged from the nozzle. Therefore, it becomes easy to spray the coating liquid from the nozzle in the state of a droplet. Therefore, it is possible to generate droplets in a simple manner in response to the fluidity of the coating liquid before being ejected from the nozzle, and to reduce the fluidity of the coating liquid after being ejected from the nozzle. The opposite requirement is that the material particles adhere uniformly to the surface of the object to be treated. [0022] Even if the control unit further performs the third process after the second process, the control unit controls the first heating unit and the supply unit, and sprays the surface of the object to be treated from the nozzle in the state of liquid droplets through the first The coating liquid that is heated by the heating portion is the second heating liquid, and the temperature of the second heating liquid in the third process may be set higher than the temperature of the first heating liquid in the second process. In this case, since the temperature of the first heating liquid is relatively low and the fluidity of the droplets sprayed from the nozzle is high, the liquid sprayed onto the surface of the object to be processed in the second process Drops easily enter the narrow recesses in the object. In addition, because the temperature of the second heating liquid is relatively high and the fluidity of the droplets sprayed from the nozzle is low, the droplets sprayed onto the surface of the object to be treated in the third process are liable to adhere. On the side of the convex part of the object. Therefore, a coating film can be formed more uniformly along the surface of a to-be-processed body including a convex part. [0023] Even if the coating film forming apparatus related to another aspect of the present disclosure further includes a gas supply unit configured to discharge heated nitrogen gas from a gas nozzle, the control unit controls the first heating unit and the supply in a second process. It is also possible to spray liquid droplets from the nozzles and control the gas supply unit at the same time, while blowing the heated nitrogen gas from the gas nozzles on the surface of the object to be sprayed while the gas nozzles follow the nozzles. In this case, since the solvent is dried during the blowing of the droplets, the time required to form a coating film on the surface of the object can be shortened. [0024] A computer-readable recording medium related to other aspects of the present disclosure records a program for causing a coating film forming apparatus to execute the coating film forming method described above. In the computer-readable recording medium related to the other aspects of the present disclosure, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion in the same manner as the coating film forming method described above. In this manual, computer-readable recording media include non-transitory computer recording medium (for example, various main memory devices or auxiliary memory devices), or transmission computer (recording medium) (for example, , Data signals that can be provided via the Internet). [Inventive Effect] [0025] If a coating film forming method, a coating film forming apparatus, and a computer-readable recording medium related to the present disclosure are used, it is possible to make the surface more uniform along the surface of the object including the convex portion. A coating film is formed.

[0027] Since the embodiments related to the present disclosure described below are examples for explaining the present invention, the present invention should not be limited to the following. In the following description, the same reference numerals are used for elements having the same elements or the same functions, and redundant descriptions are omitted. [Coated Film Forming Apparatus] First, the outline of the coated film forming apparatus 1 will be described. The coating film forming apparatus 1 is an apparatus that forms a coating film R (see the same figure and the like) on the surface of the object to be processed W (see FIG. 6 and the like). [0029] Here, as shown in FIG. 6 and the like, the object to be processed W has a substrate (wafer) W1 and at least one convex portion W2. The substrate W1 may have a circular plate shape, a portion of a circle may be cut out, or a shape other than a circle such as a polygon. The substrate W1 may be, for example, various other substrates such as a semiconductor substrate, a glass substrate, a mask substrate, and a FPD (Flat Panel Display) substrate. The convex portion W2 is provided on the surface W1a of the substrate W1. It is sufficient if the convex portion W2 protrudes outward from the surface W1a of the substrate W1. The shape of the convex portion W2 may be any other shape, such as a rectangular parallelepiped shape, without any limitation. When the material of the convex portion W2 can form the coating film R on the surface W2a (the upper surface and the outer peripheral surface exposed to the outside) of the convex portion W2, even if it is an organic material or an inorganic material, there is no restriction. In addition, in this specification, "the surface of the to-be-processed object W" means the surface where the surface W1a of the board | substrate W1, and the surface W2a of the convex part W2 merge. [0030] The coating film R is formed on the surface of the object to be processed W by the coating film forming apparatus 1. As a material constituting the coating film R, any material such as a photoresist material, a color photoresist material, a polyimide material, a SOC (Spin On Carbon) material, and a metal hard mask material may be used without any restrictions. The photoresist material is not limited in any way, even if it is a resin material. The photoresist material may be, for example, a photosensitive material that exhibits light sensitivity with light of a specific wavelength. This photosensitive material may be a negative type or a positive type. [0031] As shown in FIGS. 1 to 3, the coating film forming apparatus 1 includes a carrier block 2, a processing block 3, and a controller (control unit) CU. [0032] The carrier block 2 includes a carrier station 21 and a loading / unloading unit 22. The carrier station 21 supports a plurality of carriers 10. The carrier 10 accommodates at least one object to be processed W in a sealed state. An opening / closing door (not shown) for taking out and placing the object to be processed W is provided on the side surface 10 a of the carrier 10. [0033] The loading / unloading unit 22 is located between the carrier station 21 and the processing block 3. As shown in FIG. 2, the loading / unloading unit 22 includes a plurality of opening / closing doors 22 a. When the carrier 10 is placed on the carrier station 21, it is in a state where the opening / closing surface of the carrier 10 faces the opening / closing door 22a. By opening the opening / closing door 22a and the opening / closing door at the side 10a at the same time, the inside of the carrier 10 and the inside of the carry-in / out portion 22 communicate with each other. The loading / unloading unit 22 has a receiving arm A1 built therein. The receiving arm A1 takes out the object W from the carrier 10 and delivers it to the processing block 3, and receives the object W from the processing block 3 and returns it to the carrier 10. [0034] As shown in FIGS. 2 and 3, the processing block 3 includes a plurality of processing modules 31 and 32, a shelf portion 33, and a transfer arm A2. As shown in FIG. 2, the processing modules 31 and 32 are arranged along the moving direction of the conveying arm A2. [0035] As shown in FIG. 3, the processing module 31 includes a plurality of liquid processing units U1, a coating liquid source B1, and a nitrogen source B2 arranged in the vertical direction. The liquid processing unit U1 is configured to apply a liquid for forming a coating film R to the surface of the object W to be processed. The coating liquid source B1 and the nitrogen source B2 are arranged below the liquid processing unit U1. The coating liquid source B1 and the nitrogen source B2 respectively contain a coating liquid and nitrogen (N ₂ gas) to be supplied to the liquid processing unit U1. The coating liquid contained in the coating liquid source B1 is a material (solute) that dilutes the material of the coating liquid with a solvent (solvent). The solvent is not limited as long as it is known to be suitable for the dilution of coating liquid material particles. For example, even if isopropyl alcohol (hereinafter, also referred to as IPA), propylene glycol monomethyl ether acetate (hereinafter (Also referred to as PGMEA), γ-butyrolactone (hereinafter, also referred to as GBL), and the like. The boiling point of IPA is 82.4 ° C. PGMEA has a boiling point of 146 ° C. The boiling point of GBL is 204 ° C. [0036] As shown in FIG. 3, the processing module 32 includes a plurality of heat treatment units U2 (second heating sections) arranged in the up-down direction. The heat treatment unit U2 is configured to perform heat treatment on the object to be processed W every time the coating film R is formed. Specific examples of the heat treatment include heat treatment to volatilize the solvent of the coating liquid, or to harden the material of the coating liquid. [0037] As shown in FIG. 2, the shelf unit 33 is arranged on the carrier block 2 side in the processing block 3. The scaffolding unit 33 temporarily accommodates the person to be processed W, and is used for receiving and receiving the object W between the receiving arm A1 and the processing block 3. The transfer arm A2 transfers the object to be processed W between the shelf portion 33 and the processing modules 31 and 32 and between the processing modules 31 and 32. [0038] The controller CU controls the coating film forming apparatus 1 partially or collectively. As shown in FIG. 4, the controller CU includes a reading unit M1, a memory unit M2, a processing unit M3, and an instruction unit M4 as a function module. These functional modules are just for the purpose of conveniently separating the functions of the controller CU from a plurality of modules, and do not necessarily mean that the hardware constituting the controller CU is divided into such modules. Each functional module is not limited to being implemented by the execution of a program, even if it is implemented by a dedicated circuit (such as a logic circuit) or an integrated circuit (ASIC: Application Specific Integrated Circuit) that integrates this. Anyone can. [0039] The reading unit M1 reads a program from a computer-readable recording medium 200. The recording medium 200 records programs for causing the coating film forming apparatus 1 to perform various operations. The recording medium 200 may be, for example, a semiconductor memory, an optical recording disc, a magnetic recording disc, or a magneto-optical recording disc. [0040] The memory unit M2 stores various data. The memory unit M2 stores, for example, a program read by the reading unit M1, for example, stores setting data input from an operator via an external input device (not shown). [0041] The processing unit M3 processes various materials. The processing unit M3 generates signals for operating the liquid processing unit U1 and the heat treatment unit U2 based on various data stored in the memory unit M2, for example. [0042] The instruction unit M4 sends the signal generated in the processing unit M3 to the liquid processing unit U1 or the heat treatment unit U2. [0043] The hardware of the controller CU is constituted by, for example, a computer for plural control. The controller CU includes a circuit CU1 shown in FIG. 5 in terms of hardware configuration. The circuit CU1 may be composed of circuit elements. The circuit CU1 specifically includes a processor CU2, a memory CU3, a storage CU4, a driver CU5, and an input / output port CU6. The processor CU2 cooperates with at least one of the memory CU3 and the storage CU4 to execute a program, and executes the input and output of signals through the input / output port CU6, thereby constituting the above-mentioned functional modules. The driver CU5 is a circuit that drives various devices of the coating film forming apparatus 1 respectively. The input / output port CU6 is used for inputting and outputting signals between the driver CU5 and various devices of the coating film forming apparatus 1. [0044] In this embodiment, although the coating film forming apparatus 1 includes one controller CU, it may include a control group (control unit) composed of a plurality of controller CUs. In the case where the coating film forming apparatus 1 includes a controller group, even if the above-mentioned function modules are respectively implemented by one controller CU, even if it is implemented by a combination of two or more controller CUs. In the case where the controller CU is constituted by a plurality of computers (circuit CU1), the above functional modules may be implemented by one computer (circuit CU1) respectively, even if it is implemented by a combination of two or more computers (circuit CU1). . The controller CU may have a plurality of processors CU2. In this case, even if the above-mentioned function modules are implemented by one processor CU2, respectively, even by a combination of two or more processors CU2. [Configuration of Liquid Processing Unit] Next, the liquid processing unit U1 will be described in more detail with reference to FIGS. 6 and 7. As shown in FIG. 6, the liquid processing unit U1 includes a rotation holding unit 40, a driving unit 50, a pump P, a valve V, a heater 71, and a heat insulator 72. [0046] The rotation holding portion 40 includes a rotation portion 41 and a holding portion 42. The rotating portion 41 includes a rotation shaft 43 protruding upward. The rotating portion 41 rotates the rotating shaft 43 using, for example, an electric motor or the like as a power source. The holding portion 42 is provided at the front end portion of the rotating shaft 43. The object to be processed W is arranged on the holding portion 42. The holding portion 42 holds the object W to be treated slightly by, for example, adsorption. That is, the rotation holding unit 40 rotates around the axis (rotation axis) perpendicular to the surface of the processing object W (the surface W1a of the substrate W1) in a state where the posture of the processing object W is slightly horizontal. . In this embodiment, the rotation axis passes through the center of the object to be processed W (substrate W1) having a circular shape, so it is also the center axis. In this embodiment, as shown in FIG. 6, the rotation holding unit 20 rotates the object W to be rotated clockwise as viewed from above. [0047] The driving unit 50 is configured to drive the nozzle N. The driving unit 50 includes a guide rail 51, a slider 52, and a robot arm 53. The guide rail 51 extends in a horizontal direction above the rotation holding portion 40 (the object to be processed W). The slider 52 is connected to the guide rail 51 so that it can move horizontally along the guide rail 51. The robot arm 53 is connected to the slider 52 so that it can move to an up-down direction. A nozzle N is connected to the lower end of the robot arm 53. A flow path through which the coating liquid can flow is formed in the robot arm 53. This flow path is connected to the coating liquid source B1 via a pump P. [0048] The driving unit 50 moves the slider 52 and the robot arm 53 by a power source (not shown) such as an electric motor, and thereby moves the nozzle N. In a plan view, the nozzle N moves along the radial direction of the processing object W on a straight line orthogonal to the rotation axis of the processing object W when the coating liquid is discharged. [0049] The nozzle N opens downward toward the surface of the object to be processed W. The nozzle N may be, for example, a two-fluid nozzle of an internal mixing type, or may be a two-fluid nozzle of an external mixing type, or may be a one-fluid nozzle. In this specification, the structure of the nozzle N will be described with reference to FIG. 7 by taking an internal mixed type two-fluid nozzle as an example. The nozzle N has a body N1 having a substantially cylindrical shape and a pipe N2 connected to a side surface of the body N1. The piping N2 is connected to the nitrogen source B2 via the valve V and the heater 71. [0050] Flow paths N3 and N4 are formed inside the body N1. The flow path N3 communicates with the flow path of the coating liquid formed inside the robot arm 53. The flow path N3 extends vertically in the body N1, and the lower end communicates with the discharge port N5 of the nozzle N. The flow path N4 communicates with the pipe N2. The flow path N4 extends from the outer peripheral surface of the body N1 to the vicinity of the lower end of the flow path N3 within the body N1. In the confluence portion N6 where the flow path N4 and the flow path N3 merge, the coating liquid flowing through the flow path N3 and the nitrogen flowing through the flow path N4 are conflicted and mixed to generate minute droplets of the coating liquid (the coating liquid drop). The liquid droplets are sprayed (sprayed) from the discharge port N5 toward the surface of the treatment object W. The height position from the surface of the object W to be discharged N5 (the straight line distance between the surface of the object N to be discharged N5 and the surface of the object W) depends on the size of the object W, the flow rate of the coating solution, The flow velocity of the coating liquid, the heating temperature of the coating liquid (to be described in detail later), and the like are appropriately set, but it may be, for example, about 50 mm to 100 mm, even about 65 mm to 80 mm, or about 70 mm to 75 mm. [0051] As shown in FIG. 6, the pump P receives the control signal from the controller CU, and sends the coating liquid from the coating liquid source B1 to the nozzle N. As shown in FIG. 7, the pump P, the robot arm 53, the nozzle N (the flow path N3), and the coating liquid source B1 constitute a supply unit 60 for supplying a coating liquid to the object W to be processed. [0052] As shown in FIG. 6, the valve V receives a control signal from the controller CU, and sends nitrogen from the nitrogen source B2 to the nozzle N. [0053] The heater 71 receives a control signal from the controller CU, and heats the nitrogen sent from the nitrogen source B2 to a specific temperature (a temperature higher than room temperature). Therefore, when the nitrogen gas heated by the heater 71 merges with the coating liquid at the merging portion N6, the coating liquid is heated to become a heating liquid. That is, the heated liquid is sprayed from the discharge port N5 of the nozzle N in a droplet state. [0054] Here, the heater is set such that the temperature of the heating liquid (droplet of the coating liquid) at the discharge port N5 of the nozzle N becomes less than 1/2 of the boiling point of the solvent (solvent) of the coating liquid. The heating amount of nitrogen gas due to 71 may also be used (first temperature range). Specifically, the temperature of the heating liquid at the outlet N5 may be 41.2 ° C or lower when the solvent is IPA, or 73 ° C or lower when the solvent is PGMEA, or even when the solvent is GBL. It may be 102 ° C or lower. In this case, since the coating liquid after being mixed with the heated nitrogen gas is unlikely to become high temperature, the volatile amount of the solvent (solvent) becomes too large, which is suppressed, and the droplets sprayed from the nozzle N reach the processing target. The surface of the body W was difficult to cure before. [0055] Alternatively, even if the temperature of the heating liquid (droplet of the coating liquid) at the discharge port N5 of the nozzle N becomes 35 ° C to 60 ° C, the heating amount of nitrogen gas caused by the heater 71 may be set. (Second temperature range). In this case, it also becomes difficult for the droplets sprayed from the nozzle to reach the surface of the object to be cured. Alternatively, even if the temperature of the heating liquid (droplet of the coating liquid) at the discharge port N5 of the nozzle N satisfies both the first and second temperature ranges, the heating amount of nitrogen gas by the heater 71 is set. Also possible (third temperature range). [0056] The heat insulator 72 is arranged around the pipe N2, and suppresses the movement of heat inside and outside the pipe N2. Therefore, the heat-insulating material 72 suppresses a decrease in the temperature of the heating liquid while the coating liquid (heating liquid) heated by the heater 71 is discharged from the discharge port N5. [0057] The valve V, the piping N2, the nozzle N (the flow path N4), the nitrogen source B2, and the heater 71 are configured to supply the heated nitrogen to the nozzle N, and at the same time, the coating liquid is heated by the heated nitrogen. Supply section 70 (first heating section). [Configuration of Heat Treatment Unit] Next, the configuration of the heat treatment unit U2 will be described with reference to FIGS. 8 and 9. The heat treatment unit U2 includes a heating chamber 110 that heats the object to be processed W, and a transport mechanism 120 that transports the object to be processed W in the housing 100. On both side walls of a portion of the housing 100 corresponding to the conveyance mechanism 120, a loading / unloading port 101 is formed to carry the processed body W into the housing 100 and to move the processed body W to the outside of the housing 100. [0059] The heating chamber 110 includes a cover portion 111 and a hot plate accommodation portion 112. The cover portion 111 is located above the hot plate accommodation portion 112 and can be moved up and down between an upper position spaced from the hot plate accommodation portion 112 and a position placed below the hot plate accommodation portion 112. When the cover portion 111 is located at a lower position, the cover portion 111 and the hot plate storage portion 112 constitute a processing chamber PR at the same time. An exhaust portion 111 a is provided in the center of the cover portion 111. The exhaust unit 111a is used to exhaust gas from the processing chamber PR. [0060] The hot plate housing portion 112 is cylindrical, and houses the hot plate 113 therein. The outer peripheral portion of the hot plate 113 is supported by a support member 114. The outer periphery of the support member 114 is supported by a cylindrical support ring 115. A gas supply port 115a is formed on the support ring 115 so as to open upward. The gas supply port 115a ejects an inert gas into the processing chamber PR. [0061] As shown in FIG. 9, the hot plate 113 is a flat plate having a circular shape. The outer shape of the hot plate 113 is larger than the outer shape of the object W to be processed. The hot plate 113 is formed with three through holes HL (see FIG. 9) that extend in the thickness direction. On the hot plate 113, six support pins 113a (see FIG. 8) supporting the object W to be processed are erected. The height of the support pin 113a may be, for example, about 100 μm. [0062] Returning to FIG. 8, a heater 116 is disposed below the hot plate 113. The heater 116 is connected to the controller CU, and is controlled according to an instruction signal from the controller CU. [0063] A lifting mechanism 119 is arranged below the hot plate 113. The elevating mechanism 119 includes a motor 119a disposed outside the housing 100, and three elevating pins 119b that move up and down by the motor 119a. The lift pins 119b are configured to pass through the corresponding through holes HL, respectively. When the controller CU sends a rising signal or a falling signal to the motor 119a, the lifting pin 119b moves up and down while moving in the corresponding through hole HL. When the front end of the lifting pin 119b protrudes above the hot plate 113, the object to be processed W can be placed on the front end of the lifting pin 119b. The object W placed on the front end of the lift pin 119b moves up and down as the lift pin 119b moves up and down. [0064] The conveyance mechanism 120 is provided adjacent to the heating chamber 110. The conveyance mechanism 120 includes a conveyance plate 121 on which the object to be processed W is placed. The conveying plate 121 is a rectangular flat plate as shown in FIG. 9. An end portion on the heating chamber 110 side of the conveying plate 121 has an arc shape protruding toward the heating chamber 110. [0065] The conveying plate 121 is mounted on a rail 122 extending toward the heating chamber 110 side. The conveying plate 121 is driven by the driving unit 123 and can move horizontally on the rail 122. The transfer plate 121 moved to the heating chamber 110 side is located above the hot plate 113. [0066] Two slits 124 extending along the extending direction of the rail 122 are formed in the conveying plate 121. The slit 124 is formed in the conveying plate 121 from an end portion on the heating chamber 110 side to a vicinity of a central portion of the conveying plate 121. The gap 124 prevents interference between the carrying plate 121 moved to the heating chamber 110 side and the lifting pin 119b protruding to the hot plate 113. [0067] As shown in FIG. 8, a lifting mechanism 125 is disposed below the conveying plate 121. The elevating mechanism 125 includes a motor 125a disposed outside the housing 100, and three elevating pins 125b that move up and down by the motor 125a. The lift pins 125b are each configured to pass through the slits 124. When the controller CU sends a rising signal or a falling signal to the motor 125a, the lifting pin 125b moves up and down while moving in the gap 124. When the front end of the lifting pin 125b protrudes above the conveying plate 121, the object to be processed W can be placed on the front end of the lifting pin 125b. The object W placed on the front end of the lifting pin 125b moves up and down as the lifting pin 125b moves up and down. [0068] [Method for Forming Coating Film] Next, a method (coating film formation method) for forming a coating film R on the surface of the object to be processed W will be described with reference to FIGS. 10 and 11. First, the controller CU controls the receiving arm A1, and the object W in the carrier 10 is transferred to the shelf portion 33 by the receiving arm A1. Next, the controller CU controls the conveying arm A2, and the object W to be processed is taken out from the rack portion 33 by the conveying arm A2, and is conveyed to the heat treatment unit U2. In the heat treatment unit U2, the controller CU controls the conveyance mechanism 120 (conveyance plate 121), and the to-be-processed object W is conveyed into the heating chamber 110 (step S1). When the object to be processed W is placed on the hot plate 113, the controller CU controls the lifting mechanism 119, and the cover 111 is lowered to the lower position by the lifting mechanism 119. According to this, the object to be processed W is housed in the processing chamber PR constituted by the cover portion 111 and the hot plate housing portion 112. [0069] Next, the controller CU controls the heating chamber 110, and the object to be processed W is heated to a specific temperature by the heating chamber 110 (step S2: first process; first process). The heating temperature of the processing object W in the heating chamber 110 may be set to a temperature lower than the boiling point of the solvent contained in the droplet by 0 ° C to 30 ° C. When the heating temperature of the object W caused by the heating chamber 110 is higher than or equal to 30 ° C. lower than the boiling point of the solvent contained in the droplets, it becomes easy to promote the solvent of the droplets sprayed in step S5 described later Of volatility. Therefore, the liquid droplets are retained in the concave portions (between the convex portions W2) of the object to be treated W, and the base portion side of the convex portions W2, in particular, the film thickness of the coating film R becomes suppressed. When the heating temperature of the treatment object W caused by the heating chamber 110 is lower than the temperature 0 ° C (that is, the temperature equal to the boiling point) of the boiling point of the solvent contained in the droplet, it is blown in step S5 described later Before the droplet reaches the surface of the object to be processed W, it is difficult for the solvent of the droplet to volatilize. Therefore, the coating liquid material particles contained in the coating liquid droplets are successively deposited on the surface of the object to be treated W while maintaining its shape. [0070] When the solvent of the coating liquid is IPA, since the boiling point of IPA is 82.4 ° C, the heating temperature of the object W in the heating chamber 110 may be set to approximately 55 ° C to 85 ° C. When the solvent of the coating liquid is PGMEA, since the boiling point of PGMEA is 146 ° C, the heating temperature of the object W in the heating chamber 110 may be set to about 110 ° C to 150 ° C. When the solvent of the coating liquid is GBL, since the boiling point of GBL is 204 ° C, the heating temperature of the object W in the heating chamber 110 may be set to approximately 150 ° C to 205 ° C. [0071] Next, the controller CU controls the elevating mechanism 119 and the conveying mechanism 120 to carry out the heated object W from the heating chamber 110. Next, the controller CU controls the transfer arm A2, takes out the to-be-processed object W from the heat processing unit U2 by the transfer arm A2, and conveys it to the liquid processing unit U1 (step S3). The time required for the object W to be heated after being heated by the heating chamber 110 to the liquid processing unit U1 is, for example, several seconds to 10 seconds. During this transportation, the temperature of the heated object W can be reduced, for example, by about 20 ° C to 30 ° C. [0072] When the object to be processed W is transferred to the liquid processing unit U1 and held by the holding portion 42 of the rotation holding portion 40, the controller CU controls the rotating portion 41 to rotate and drive the object to be processed W (step S4). In this state, the controller CU controls the driving unit 50, the pump P, the valve V, and the heater 71 so that the nozzle N follows the diameter of the processing object W on a straight line orthogonal to the rotation axis of the processing object W Moving, the droplets of the heated coating liquid (liquid droplets of the heating liquid) are sprayed onto the surface of the rotating processing object W from the discharge outlet N5 of the nozzle N (step S5; refer to FIG. 11 (a); 3 works; second treatment). [0073] At this time, the nitrogen gas heated by the heater 71 is supplied to the nozzle N and mixed with the coating liquid to form a heating liquid (first heating liquid) (second process; second process). Therefore, as shown in FIG. 11 (a), immediately after the droplet is sprayed from the nozzle N, the solvent of the droplet is volatilized, and the fluidity of the droplet (coating liquid) is reduced. Furthermore, at this time, the object to be processed W is heated in step S2, and the surface of the object to be processed W becomes a specific temperature. Therefore, the solvent immediately before the liquid droplet adhering to the processing object W or the liquid droplet adhering to the processing object W receives heat from the processing object W and volatilizes. According to this, the material particles (coating liquid material) of the liquid droplets adhere to the surface of the object to be processed W (see FIG. 11 (b)). The nozzle N is moved once or multiple times on the surface of the object W to form a coating film having a specific thickness on the surface of the object W (see FIG. 11 (c)). [0074] Next, the controller CU controls the transfer arm A2, takes out the processed object W from the liquid processing unit U1 by the transferred arm A2, and after the processed object W is cooled to a specific temperature, transfers it to the shelf portion 33. At this time, even if the object to be processed W is forcibly cooled using a cooling mechanism such as a cooling plate, it may be natural cooling. After that, the controller CU controls the receiving arm A1 and returns the object to be processed W from the rack portion 33 to the carrier 10 by the receiving arm A1 (step S6). With this, the formation process of the coating film R is completed. [Action] In the above-mentioned embodiment, when the coating liquid is sprayed on the surface of the object to be processed W, the coating liquid is heated to become a heating liquid. Therefore, when the heating liquid is ejected from the nozzle N, immediately after the solvent (solvent) is volatilized, the concentration of the material particles (solute) in the coating liquid becomes high, so that the fluidity of the coating liquid (heating liquid) is reduced. . Therefore, on the surface (concavo-convex surface) of the object to be processed W, the droplets are condensed and flowed with each other. As a result, the material particles of the coating liquid tend to adhere to the surface of the object W to be treated uniformly. As described above, the coating film R can be formed more uniformly along the surface of the object to be processed W including the convex portion W2. [0076] In addition, since the evaporation of the solvent (solvent) is promoted immediately after the heated liquid is sprayed from the nozzle N, in order to completely evaporate the solvent (solvent) of the droplets reaching the surface of the object to be treated W It is not necessary to transport the object to be processed W to the heat treatment unit U2. Therefore, in order to form a coating film R having a desired thickness on the surface of the object to be processed W, it is not necessary to cause the object to be processed W to and fro between the liquid processing unit U1 and the heat treatment unit U2. Therefore, the time for forming the coating film R on the object to be processed W can be extremely shortened. [0077] In this embodiment, before the droplets are sprayed on the surface of the object to be processed W, the object to be processed W is heated in the heat treatment unit U2 in step S2. Therefore, on the entire surface of the object to be processed W, the solvent (solvent) of the coating liquid sprayed in step S5 is volatilized by the heat from the object to be processed W. Therefore, on the surface (concave-convex surface) of the object to be processed W, the droplets are condensed and flowed, which is more suppressed. Therefore, the coating film R can be formed more uniformly along the surface of the processing object W including the convex portion W2. [0078] In this embodiment, the coating liquid and the heated nitrogen are mixed in the nozzle N to heat the coating liquid to obtain a heating liquid. Therefore, the fluidity of the coating liquid is maintained high until the coating liquid is discharged from the nozzle N. Therefore, it becomes easy to spray the coating liquid from the nozzle N in a droplet state. As a result, it is possible to generate liquid droplets in a simple manner in response to an increase in the fluidity of the coating liquid before being ejected from the nozzle N. On the other hand, after an ejection from the nozzle N, the fluidity of the coating liquid is to be reduced to make the coating The opposite requirement is that the material particles of the cloth liquid adhere uniformly to the surface of the object W to be processed. [0079] In this embodiment, in step S5, while the object to be processed W is being rotated, droplets are sprayed from the nozzle N to the surface of the object to be processed W. Therefore, it is more difficult to repeatedly spray the surface of the object to be processed W from the nozzle when the nozzle N is meandering on the surface of the object to be processed W while meandering from the nozzle N to the surface of the object to be processed W. Droplets of N. Therefore, the coating film R can be formed more uniformly along the surface of the processing object W including the convex portion W2. [Other Embodiments] Although the embodiments related to the present disclosure have been described in detail above, various modifications may be added to the above-mentioned embodiments within the scope of the gist of the present invention. For example, in the present embodiment, although the treatment of the object W is heated by the heating chamber 110 in the heat treatment unit U2 (step S2), the surface of the object W to be processed from the nozzle N to the object W is performed in the liquid processing unit U1. The process of spraying the coating liquid droplets is performed (step S5), but even if a processing chamber having both a liquid processing unit U1 and a heat processing unit U2 is used, both processes may be performed in the processing chamber. In this case, when the object to be processed W is heated, the rotation of the object to be processed W may be stopped first. [0081] In the case where a plurality of convex portions W2 exist in the radial direction of the substrate W1, the closer to the rotation axis of the substrate W1, the smaller the centrifugal force. Therefore, when the droplets condense on the surface of the object to be processed W, the closer to the rotation axis The more easily the coating liquid agglomerated in the convex portion W2 is retained. Therefore, when the nozzle N is located near the rotation axis, the moving speed of the nozzle N may be increased. In this case, on the surface of the object to be processed W, the spraying amount of the liquid droplets is reduced in the vicinity of the rotation axis, so that the coating liquid droplets are hardly aggregated. [0082] The controller CU may control the rotating section 41 even if the position of the nozzle N is closer to the rotation axis of the substrate W1, and the number of rotations of the object W is increased. At this time, even if the controller CU controls the rotating section 41, the moving speed (linear speed) of the processing object W immediately below the nozzle N may be constant regardless of the position of the nozzle N. Even if the controller CU implements the control in which the position of the nozzle N is closer to the rotation axis of the substrate W1, the control of the number of rotations of the object W is increased, and the more the nozzle N is located near the rotation axis, the faster the movement speed of the nozzle N is. Control is also available. Even if the controller CU controls the rotation part 41, the rotation number of the to-be-processed body W may be constant regardless of the position of the nozzle N with respect to the board | substrate W1. [0083] In a case where the spray area of the droplets from the nozzle N is equal to or larger than the size of the surface of the object to be processed W, the nozzle N may not be moved, and the object to be processed W may not be rotated. [0084] In addition to step S2, even when the liquid droplets are sprayed from the nozzle N to the surface of the object W to be processed (step S5), the object W to be processed may be heated. Alternatively, the process in step S2 of heating the object W in advance may not be performed. [0085] For example, as shown in FIG. 12, even if the liquid processing unit U1 further has a gas nozzle GN configured to inject heated nitrogen (high-temperature nitrogen) onto the surface of the object to be processed W, according to an instruction from the controller CU Alternatively, the operation of the gas nozzle GN may be controlled by the gas supply unit. Specifically, in step S5, even if the control unit CU controls the gas supply unit, while the gas nozzle GN follows the nozzle N, the high temperature is blown from the gas nozzle GN to the spraying point of the liquid droplet on the surface of the object W to be processed Nitrogen is also available. In this case, since the solvent is dried by the high-temperature nitrogen gas from the gas nozzle GN during the droplet spraying, the time required to form the coating film R on the surface of the object to be processed W can be shortened. The temperature of the high-temperature nitrogen gas may be about 50 ° C to 150 ° C. [0086] In the above embodiment, although the nitrogen gas is heated by the heater 71 and the coating liquid is heated by the heated nitrogen gas, even as shown in FIG. A heater 81 may be provided on the upstream side to directly heat the coating liquid instead of the heater 71. In this case, the fluidity of the coating liquid can be maintained until immediately before the coating liquid is discharged from the nozzle N. Therefore, it becomes easy to spray the coating liquid from the nozzle N in a droplet state. Therefore, it is possible to generate liquid droplets in a simple manner in order to improve the fluidity of the coating liquid before being ejected from the nozzle N, and to reduce the fluidity of the coating liquid after being ejected from the nozzle N to apply the coating. The opposite requirement is that the liquid material particles adhere uniformly to the surface of the object W to be processed. [0087] As shown in FIG. 14, a bypass flow path connecting the upstream side of the valve V and the downstream side of the heater 71 may be further provided, and a valve 73 may be provided in the bypass flow path. In this case, the controller CU controls the valves V and 73 to selectively supply the nozzle N with nitrogen heated by the heater 71 and nitrogen not heated by the heater 71 (normal temperature nitrogen). . Specifically, when the process of spraying droplets on the surface of the object to be processed W is the first time, even if the valve V is closed by the controller CU and the valve 73 is opened, the heated liquid is relatively reduced (the first Heating liquid). In addition, when the process of spraying liquid droplets on the surface of the object to be processed W is the second time, even if the valve V is opened by the controller CU and the valve 73 is closed, the heated liquid (the second heated liquid) is relatively increased. ) Temperature (4th process; 3rd process). In this way, the liquid droplets sprayed on the surface of the treatment object W for the first time (the third process; the second treatment) tend to have a high fluidity, and therefore it is easy to enter the narrow recesses (projections) in the treatment object W. W2). In addition, since the liquid droplets (the fifth process; the third process) sprayed on the surface of the object W for the second and subsequent times tend to have low fluidity, they are likely to adhere to the side surface of the convex portion W2 of the object W. Therefore, the coating film R can be formed more uniformly along the surface of the processing object W including the convex portion W2. Furthermore, in order to prevent the material particles of the coating liquid from solidifying in the nozzle N and the nozzle N is clogged, the valve V is closed by the controller CU and the valve 73 is opened even after the spraying process of the droplets from the nozzle N is performed. Supply nitrogen at room temperature to the nozzle N and cool the nozzle N. [0088] As shown in FIG. 15, in order to prevent the material particles of the coating liquid from solidifying in the nozzle N and the nozzle N is clogged, the liquid processing unit U1 may further include a cleaning unit 82 for the nozzle N. The washing unit 82 is a container that stores, for example, a solvent. The nozzle N is immersed in the solvent in the washing unit 82 by performing the spraying treatment of the droplets on the nozzle N to cool and clean the nozzle N. [0089] As the gas to be mixed into the coating liquid, various gases other than nitrogen (for example, inert gas, air, etc.) may be used. [Examples] In the case where the coating film R is formed on the surface of the object W using the coating film forming apparatus 1 related to this embodiment mode, it is confirmed that the coating film R can be formed along the surface including the convex portion W2. Since the coating film R was formed uniformly on the surface of the treatment body W, the following tests were performed. [0091] A to-be-processed body W having a plurality of convex portions W2 provided on a disc-shaped substrate W1 having a diameter of 150 mm is prepared. In addition, a photoresist for diluting a positive photoresist with PGMEA was prepared. [0092] Next, the object to be processed W is heated by the heat treatment unit U2 at 120 ° C. for 60 seconds. Next, the heated object W is transferred to the liquid processing unit U1, and the prepared photoresist liquid is sprayed from the nozzle N of the two-fluid nozzle to the surface of the object W to be processed. At this time, the number of rotations of the processing object W caused by the rotation holding unit 40 is changed within a range of 60 rpm to 600 rpm so that the moving speed (linear speed) of the processing object W immediately below the nozzle N becomes constant. . The moving speed of the nozzle N is 10 mm / second to 150 mm / second. In addition, the nozzle N was moved back and forth 14 times on the surface of the object to be processed W. As described above, a photoresist film (coating film R) is formed on the surface of the object to be processed W. [0093] Next, with respect to any two convex portions W2, the state of the cross section is observed with an electron microscope. Figs. 16 (a) and 16 (b) schematically show electron micrographs of the two convex portions W2. It was confirmed that the photoresist film (coating film R) was formed extremely uniformly on any of the convex portions W2 along the surface of the object W to be treated including the convex portions W2.

[0094]

1‧‧‧ coating film forming device

60‧‧‧Supply Department

70‧‧‧Heating supply unit (first heating unit)

71, 81‧‧‧ heater

72‧‧‧Insulation

CU‧‧‧Controller (Control Department)

N‧‧‧Nozzle

N5‧‧‧Spit Out

R‧‧‧ coated film

U1‧‧‧Liquid processing unit

U2‧‧‧ heat treatment unit (second heating section)

W‧‧‧ Subject

W1‧‧‧ substrate

W1a‧‧‧ surface

W2‧‧‧ convex

W2a‧‧‧ surface

[0026] FIG. 1 is a perspective view showing a coating film forming apparatus. FIG. 2 is a sectional view taken along the line II-II in FIG. 1. FIG. 3 is a sectional view taken along the line III-III in FIG. 2. FIG. 4 is a block diagram showing a coating film forming apparatus. FIG. 5 is a schematic diagram showing a hardware configuration of the controller. FIG. 6 is a schematic diagram showing a liquid processing unit. FIG. 7 is a partial cross-sectional view showing the vicinity of the nozzle. FIG. 8 is a sectional view of the heat treatment unit viewed from a side. FIG. 9 is a sectional view taken along the line IX-IX in FIG. 8. FIG. 10 is a flowchart for explaining the formation sequence of the coating film. FIG. 11 is a schematic diagram for explaining a forming sequence of a coating film. FIG. 12 is a schematic view partially showing another example of the liquid processing unit. Fig. 13 is a schematic diagram showing another example of the liquid processing unit. FIG. 14 is a schematic diagram showing another example of the liquid processing unit. FIG. 15 is a schematic diagram showing another example of the liquid processing unit. FIG. 16 is a diagram for explaining the embodiment.

Claims (15)

A method for forming a coating film includes: a first process for heating a processed object including a substrate and a convex portion provided on a surface of the substrate; a second process for heating a coating liquid to obtain a first process; 1 heating liquid; and 3rd process, which sprays said 1st heating liquid from a nozzle on the surface of the said to-be-processed body after being heated in the said 1st process. The method for forming a coating film according to claim 1, wherein in the second process, the coating liquid is heated so that the temperature of the first heating liquid in the outlet of the nozzle becomes the temperature of the solvent contained in the coating liquid. Less than 1/2 of the boiling point. The method for forming a coating film according to claim 1 or 2, wherein in the second process, the coating liquid is heated so that the temperature of the first heating liquid at the outlet of the nozzle is 35 ° C to 60 ° C. ℃. The coating film forming method according to claim 1 or 2, wherein in the second process, the coating liquid and the heated gas are mixed in the nozzle, and the coating liquid is heated to obtain the first Heat the liquid. The coating film forming method according to claim 1 or 2, wherein in the second process, the coating liquid is heated by a heater on the upstream side from the nozzle to obtain the first heating liquid. The coating film forming method according to claim 1 or 2, further comprising: a fourth process, which is after the third process, heating the coating liquid to obtain a second heating liquid; and a fifth process, which After the fourth process, the second heating liquid is sprayed from the nozzle on the surface of the object to be coated to form a coating film, and the second heating is performed in the fourth process. The temperature of the liquid is set higher than the temperature of the first heating liquid in the second process. The coating film forming method according to claim 1 or 2, wherein in the third process, the liquid droplets are sprayed from the nozzles on the surface of the object to be processed, while a gas nozzle different from the nozzles is sprayed. Following the nozzle, the heated nitrogen gas is sprayed from the gas nozzle to the spraying point of the liquid droplet on the surface of the object to be processed. A coating film forming apparatus comprising: a first heating section configured to heat a coating liquid; a second heating section configured to heat a processed object including a substrate and a convex portion provided on a surface of the substrate A supply unit having a nozzle; and a control unit, the control unit performs: a first process that controls the second heating unit to heat the object to be processed; and a second process that controls the first heating unit and The supply unit is configured to eject the coating liquid heated by the first heating unit from the nozzle in a state of droplets on the surface of the object to be processed heated by the first processing, that is, the first 1 Heat the liquid. The coating film forming apparatus according to claim 8, wherein the first heating section heats the coating liquid so that the temperature of the first heating liquid in the outlet of the nozzle becomes the temperature of the solvent contained in the coating liquid. Less than 1/2 of the boiling point. The coating film forming apparatus according to claim 8 or 9, wherein the first heating section heats the coating liquid so that the temperature of the first heating liquid at the outlet of the nozzle is 35 ° C to 60 ° C. The coating film forming apparatus according to claim 8 or 9, wherein the first heating section is configured to supply the heated gas to the nozzle, mix the gas and the coating liquid in the nozzle, and heat the coating. Cloth fluid. The coating film forming apparatus according to claim 8 or 9, wherein the first heating unit is a heater that heats the coating liquid on an upstream side from the nozzle. The coating film forming apparatus according to claim 8 or 9, wherein the control unit further performs a third process, which is after the second process, controls the first heating unit and the supply unit, and controls the object to be processed On the surface, the second heating liquid, that is, the coating liquid heated by the first heating portion, is sprayed from the nozzle in a state of droplets, and the temperature of the second heating liquid in the third processing is The temperature is set higher than the temperature of the first heating liquid in the second process. The coating film forming apparatus according to claim 8 or 9, further comprising a gas supply unit configured to discharge heated nitrogen gas from a gas nozzle, and the control unit controls the first heating unit in the second process. And the supply unit, which sprays the liquid droplets from the nozzles, and controls the gas supply unit to spray the liquid droplets on the surface of the object from the gas nozzles while the gas nozzles follow the nozzles The heated nitrogen was blown everywhere. A computer-readable recording medium for recording a program for causing a coating film forming apparatus to perform the coating film forming method described in any one of claims 1 to 7 of the scope of patent application.