TW201810867A - Actuator - Google Patents

Abstract

There is provided an actuator which is capable of coinciding a thrust center in the Z-axis direction with a rotation center in the [theta]-axis direction. On an excitation portion (1), permanent magnets (3a) with N-pole surface and permanent magnets (3b) with S-pole surfaces are arranged with each other in cellular manner in the [theta]-axis direction and the Z-axis direction. On an armature portion (11), there are provided first cores (12a), second cores (12b) arranged in the [theta]-axis direction with respect to the first cores (12a), third cores (12c) arranged in the Z-axis direction with respect to the first cores (12a), and first to third coils (13a-13c) wound around the first to third cores (12a-12c). A control device (14) supplies electric current for the first coils (13a) and the second coils (13b) in a manner of generating torques in the [theta]-axis direction. Further, the control device (14) supplies electric current for the first coils (13a) and the third coils (13c) in a manner of generating thrusts in the Z-axis direction.

Description

Actuator

The present invention relates to an actuator that can be driven in, for example, two axial directions of the θ-axis direction and the Z-axis direction.

For example, a pick and place mechanism for mounting devices such as semiconductors and electronic parts, and various inspection devices use Z-θ actuation that can be driven in the θ-axis direction (ie, the rotation direction) and the Z-axis direction. Z-theta actuator. When the Z-θ actuator is used in the pick-and-place mechanism, the workpiece is lifted by the Z-axis, and the angle of the workpiece is positioned by the θ-axis, and the workpiece is pressed against the mounting position by the Z-axis.

As a conventional Z-θ actuator, a motor including a Z-axis (even a Z armature that generates a thrust in the Z-axis direction) and a motor for a θ-axis (even if the thrust is generated in the θ-axis direction) is known. The person who is pivoting (see Patent Document 1). The field magnet portion is composed of a Z field magnet in which magnetic poles are formed in the Z-axis direction and a θ field magnet in which magnetic poles are formed in the θ-axis direction. When the winding of the Z armature is excited and the thrust is generated in the Z-axis direction, the armature portion relatively moves in the Z-axis direction with respect to the field magnet portion. When the winding of the θ armature is excited and a thrust (ie, a moment) is generated in the θ-axis direction, the armature portion relatively moves in the θ-axis direction with respect to the field magnet portion.

[Previous Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open Publication No. 2012-60853

However, in the conventional Z-θ actuator, since the Z-axis motor is separated from the θ-axis motor, the thrust center in the Z-axis direction is slightly shifted from the rotation center in the θ-axis direction. Therefore, with the rise and fall of the workpiece in the Z-axis direction, the θ axis, which is positioned well, sometimes has a slight positional shift.

Accordingly, an object of the present invention is to provide an actuator that can match the center of the thrust in the Z-axis direction with the center of rotation in the θ-axis direction.

In order to solve the above problems, an aspect of the present invention provides an actuator including: a field magnet portion that is alternately and lattice-arranged in a first direction and a second direction orthogonal to the first direction a permanent magnet having an N-pole surface and a permanent magnet having an S-pole surface; and an armature portion having a first core and a second core disposed in the first direction with respect to the first core, relative to The first core is disposed in the third core in the second direction and the first to third coils wound around the first to third cores; and a control device in the field magnet portion When the armature portion relatively moves in the first direction, a current is supplied to the first coil and the second coil so that a thrust force is generated in the first direction, and the field magnet portion is opposite to the electric field. When the pivot portion relatively moves in the second direction, a current is supplied to the first coil and the third coil so that a thrust force is generated in the second direction.

Another aspect of the present invention provides an actuator including: a field magnet portion that is alternately arranged in a lattice shape in a first direction and a second direction orthogonal to the first direction, and has a surface N a permanent magnet and a permanent magnet with an S-pole surface; An armature portion having a first core, a second core disposed in the first direction with respect to the first core, and a third core disposed in the second direction with respect to the first core a fourth iron core disposed in an oblique direction with respect to the first iron core, and first to fourth coils wound around the first to fourth iron cores; and a control device for the field magnet When the portion moves relatively in the first direction with respect to the armature portion, the first coil and the second coil, or the third coil and the fourth coil are applied to generate thrust in the first direction Supplying a current, and when the field magnet portion relatively moves in the second direction with respect to the armature portion, the first coil and the third coil are paired with the thrust generated in the second direction The second coil and the fourth coil described above supply current.

According to an aspect of the present invention, a first core and a first coil for generating a thrust (for example, a moment) in a first direction (for example, a θ-axis direction) are used, and the actuator is used to The second direction (for example, the Z-axis direction) generates a first core and a first coil of thrust. Therefore, the center of the thrust in the Z-axis direction can be made coincident with the center of rotation in the θ-axis direction.

According to another aspect of the present invention, when the actuator generates a thrust (for example, a moment) in a first direction (for example, the θ-axis direction) and causes the actuator to generate a thrust in a second direction (for example, a Z-axis direction) At least one of the first to fourth cores and at least one of the first to fourth coils are used in combination. Therefore, the center of the thrust in the Z-axis direction can be made coincident with the center of rotation in the θ-axis direction.

1‧‧‧ Field Magnet Department

2‧‧‧Axis

3a‧‧‧ permanent magnet with N-pole surface

3b‧‧‧ permanent magnet with S-pole surface

4‧‧‧ cover

11‧‧‧ Armature

12‧‧‧ iron core

12a‧‧‧A phase iron core (first core)

12b‧‧‧B phase iron core (second core)

12c‧‧‧C phase iron core (third core)

12d‧‧‧D phase iron core (fourth core)

13‧‧‧ coil

13a‧‧‧A phase coil (first coil)

13a'‧‧‧A phase coil

13b‧‧‧B phase coil (second coil)

13b'‧‧‧B phase coil

13c‧‧‧C phase coil (third coil)

13c'‧‧‧C phase coil

13d‧‧‧D phase coil (fourth coil)

13d'‧‧‧D phase coil

14‧‧‧Control device

16‧‧‧The core of the core

17a, 17b‧‧‧ both ends of the core

22‧‧‧ iron core

22a‧‧‧ Body Department

22b‧‧‧ teeth

23‧‧‧ coil

31‧‧‧ Armature

Fig. 1 is a perspective view of an actuator according to a first embodiment of the present invention.

Fig. 2 is a side view of the actuator of the embodiment.

Fig. 3 is a front view of the actuator of the embodiment.

Fig. 4 is an enlarged view of the portion IV of Fig. 1 (side view of the iron core and the coil).

Fig. 5 is a view showing a permanent magnet and a coil after being unfolded into a plane.

Fig. 6 is a view for explaining the principle of the actuator of the embodiment rotating in the θ-axis direction.

Fig. 7 is a view for explaining the principle of the actuator of the embodiment moving in the Z-axis direction.

Fig. 8 is a view for explaining the principle of the actuator moving in the oblique direction in the embodiment.

Fig. 9 is a side view of a core and a coil incorporated in an actuator according to a second embodiment of the present invention.

Fig. 10 is a view showing a permanent magnet and a coil which are unfolded in a plane in the actuator according to the second embodiment of the present invention.

Fig. 11 is a view showing a permanent magnet and a coil which are unfolded in a plane in the actuator according to the third embodiment of the present invention.

Hereinafter, an actuator according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. However, the actuator of the present invention can be embodied in various forms, and is not limited to the embodiments described in the specification. The present embodiments are provided for the purpose of sufficiently fully understanding the scope of the invention in the technical field of the present invention.

(First embodiment)

Fig. 1 is a perspective view of an actuator according to a first embodiment of the present invention, Fig. 2 is a side view, and Fig. 3 is a front view. In Fig. 1, the component symbol 1 is a field magnet portion, a 2-axis shaft, a 3a-type permanent magnet of the N-pole surface, a 3b-type permanent magnet of the S-pole, an 11-series armature portion, a 12-series core, and 13 Coil. The armature portion 11 constitutes a stator, The field magnet unit 1 constitutes a mover. The actuator of this embodiment is a two-phase Z-θ stepping motor. When the excitation of the coil 13 of the armature portion 11 is switched, a thrust force (for example, a moment) is generated in the θ-axis direction, and the field magnet portion 1 is rotated in the θ-axis direction at a predetermined step angle. When the excitation of the coil 13 of the armature portion 11 is switched, a thrust is generated in the Z-axis direction, and the field magnet portion 1 is moved in the Z-axis direction by a predetermined amount.

The field magnet unit 1 includes a shaft 2, a plurality of permanent magnets 3a and 3b attached to the surface of the shaft 2, and a plurality of lids 4 covering a pair of permanent magnets 3a and 3b adjacent to the Z-axis direction. The shaft 2 is elongated in the Z-axis direction and has a polygonal cross section (a hexagon in the present embodiment). The shape of the shaft 2 can also be set to a cylindrical shape or a cylindrical shape.

As shown in Fig. 3, on the shaft 2, a permanent magnet 3a having a surface of an N pole and a permanent magnet 3b having a surface of an S pole are alternately arranged at a constant interval in the θ-axis direction in which the first direction is written. In the figure, λ ₁ is the inter-NS spacing, λ ₁ = τ ₁ (i.e., the spacing between NNs)/2. In the present embodiment, a total of six permanent magnets 3a and 3b are arranged in the θ-axis direction.

As shown in FIG. 2, in the axis 2, in the Z-axis direction in which the second direction is written, the permanent magnet 3a having the surface as the N pole and the permanent magnet 3b having the surface as the S pole are alternately arranged at a certain distance λ ₂ . λ ₂ is the inter-NS spacing, λ ₂ = τ ₂ (i.e., the spacing between NNs)/2. In Figs. 1 to 3, a permanent magnet 3a whose surface is an N pole is indicated by a diagonal line, and a permanent magnet 3b whose surface is an S pole is marked with a dot.

As shown in FIG. 2 and FIG. 3, the plurality of permanent magnets 3a and 3b are arranged in a lattice shape (in other words, a matrix shape) along the θ-axis direction and the Z-axis direction at regular intervals. The permanent magnet 3a adjacent to the Z-axis direction and the permanent magnet 3b (see FIG. 2) are aligned in the θ-axis direction (see FIG. 3). The permanent magnet 3a adjacent to the θ-axis direction and the permanent magnet 3b (see FIG. 3) are aligned in the Z-axis direction (see FIG. 2). therefore, The field magnet portion 1 is formed with N poles and S poles alternately and in a lattice shape in the θ-axis direction or the Z-axis direction.

As shown in FIG. 1, a plurality of cores 12 and a plurality of coils 13 are arranged around the field magnet portion 1 in the circumferential direction and the axial direction. In the present embodiment, twelve iron cores 12 and twelve coils 13 are arranged at a constant distance along the θ-axis direction, and four iron cores 12 and coils 13 are arranged at a constant distance along the Z-axis direction. In addition, although the iron core 12 and the coil 13 of four rows are shown in the Z-axis direction in FIG. 1, FIG. 2, the minimum number of the iron core 12 and the coil 13 is two.

The iron cores 12 are separated from each other. The iron core 12 and the coil 13 are fixed to a cylindrical outer casing (not shown).

4 shows a side view of the iron core 12 and the coil 13 wound around the iron core 12. The iron core 12 has a plate-like main body portion 16 elongated in the Z-axis direction, and both end portions 17a and 17b bent from the main body portion 16 toward the field magnet portion 1 into a hook shape. The coil 13 is wound around the body portion 16. The both end portions 17a and 17b protrude from the coil 13 and face the permanent magnets 3a and 3b of the field magnet unit 1 with a gap interposed therebetween. When the coil 13 is excited, the both end portions 17a and 17b of the iron core 12 are magnetized to the N pole and the S pole. The pitch P ₁ between the magnetic poles of the both end portions 17a and 17b is equal to the inter-NS pitch λ ₂ (see FIG. 2) in the Z-axis direction of the permanent magnets 3a and 3b.

As shown in FIG. 3, one of the pair of cores 12a and 12b adjacent to each other in the θ-axis direction is disposed at an offset τ ₁ /4. That is, when one of the adjacent cores 12a, 12b is located directly above the N pole of the permanent magnet 3a, the other core 12b is located between the permanent magnet 3a and the permanent magnet 3b. Here, the adjacent one of the pair of cores 12a and 12b may be disposed at a position where the offset τ ₁ /4+n ₁ ×τ ₁ (n ₁ is an integer of 0 or more).

As shown in Fig. 2, one of the pair of cores 12a and 12c adjacent to each other in the Z-axis direction is disposed at an offset of τ ₂ × 5/4 (see also Fig. 5). That is, when the opposite end portions 17a, 17b of one of the adjacent iron cores 12a, 12c are located directly above the permanent magnets 3a, 3b, the opposite end portions 17a, 17b of the other core 12c are located. The middle of the permanent magnets 3a, 3b (see also Fig. 5). Here, the adjacent one of the pair of cores 12a and 12c may be disposed at a position shifted by τ ₂ /4+n ₂ ×τ ₂ (n ₂ is an integer of 0 or more).

As shown in FIG. 2, the coil 13 is composed of four winding units. That is, the A-phase coil 13a, the B-phase coil 13b, the C-phase coil 13c, and the D-phase coil 13d constitute one winding unit. The A-phase coil 13a and the /A-phase coil 13a' are connected so as to flow current in opposite directions at the same time. Similarly, the B-phase coil 13b and the /B-phase coil 13b', the C-phase coil 13c and the /C-phase coil 13c', and the D-phase coil 13d and the /D-phase coil 13d' are configured to simultaneously flow current in opposite directions. link.

The iron core 12 also constitutes one iron core unit in four. That is, the A-phase iron core 12a, the B-phase iron core 12b, the C-phase iron core 12c, and the D-phase iron core 12d constitute one iron core unit.

When the field magnet portion 1 is rotated in the θ-axis direction, the control device 14 supplies a phase-shifted current to the A-phase coil 13a and the B-phase coil 13b, or the C-phase coil 13c and the D-phase coil 13d. Further, when the field magnet portion 1 is moved in the Z-axis direction, the control device 14 supplies a phase-shifted current to the A-phase coil 13a and the C-phase coil 13c, or the B-phase coil 13b and the D-phase coil 13d. The principle that the field magnet portion 1 is driven in the θ-axis direction and the Z-axis direction will be described later.

Fig. 5 shows the permanent magnets 3a, 3b and the coils 13a to 13d, 13a' to 13d' which are unfolded into a plane. As described above, the interval between the A-phase coil 13a and the B-phase coil 13b adjacent in the θ-axis direction is τ ₁ /4. The interval between the A-phase coil 13a and the C-phase coil 13c adjacent in the Z-axis direction is τ ₂ × 5/4.

In the actuator of this embodiment, the A-phase coil 13a is a first coil. The B-phase coil 13b disposed in the θ-axis direction with respect to the A-phase coil 13a is a second coil. The C-phase coil 13c disposed in the Z-axis direction with respect to the A-phase coil 13a is a third coil. The D-phase coil 13d which is disposed in the oblique direction (the direction in which the θ-axis direction or the Z-axis direction is inclined) with respect to the A-phase coil 13a is a fourth coil. The A-phase iron core 12a, the B-phase iron core 12b, the C-phase iron core 12c, and the D-phase iron core 12d are a first iron core, a second iron core, a third iron core, and a fourth iron core, respectively.

As shown in Fig. 5, when the A-phase coil 13a is excited, the left end portion of the A-phase coil 13a is magnetized to the N-pole, and the right end portion of the A-phase coil 13a is magnetized to the S-pole. Since the current in the opposite direction to the A-phase coil 13a is supplied to the /A-phase coil 13a', the left end portion of the /A-phase coil 13a' is magnetized to the S-pole, and the right end portion of the /A-phase coil 13a' is magnetized to N. pole. Since the magnetic poles at both end portions of the A-phase coil 13a and the /A-phase coil 13a' and the permanent magnets 3a and 3b are attracted to each other, the armature portion 11 is stationary at the position shown in FIG.

The principle of the actuator of the present embodiment rotating in the θ-axis direction will be described with reference to Fig. 6 . Hereinafter, for convenience of explanation, the armature portion 11 is set to rotate in the positive direction of the θ-axis with respect to the field magnet portion 1. Table 1 shows the excitation patterns of the A-phase to D-phase coils 13a to 13d.

N and S in Table 1 indicate magnetic poles generated at the left end portions of the coils 13a to 13d in Fig. 6. × indicates that the coils 13a to 13d are not energized.

First, in S1, when the A-phase coil 13a is excited, the magnetic poles indicated by S1 are formed at both end portions of the A-phase coil 13a and the /A-phase coil 13a'. The armature portion 11 is attracted at a position indicated by S1 to be stably stationary.

Next, the process proceeds to S2, the excitation of the A-phase coil 13a is stopped, and the B-phase coil 13b is excited. As a result, the magnetic poles indicated by S2 are formed at both end portions of the B-phase coil 13b and the /B-phase coil 13b'. Therefore, the armature portion 11 is stationary after being rotated by τ ₁ /4 from the position of S1 toward the positive direction of the θ-axis. The τ ₁ / 4 is the step angle.

Next, the process proceeds to S3, the excitation of the B-phase coil 13b is stopped, and the A-phase coil 13a is excited so that the reverse current flows. As a result, the magnetic poles indicated by S3 are formed at both end portions of the A-phase coil 13a and the /A-phase coil 13a'. Therefore, the armature portion 11 is further rotated from the position of S2 by further rotating τ ₁ /4 in the positive direction of the θ-axis.

Next, the process proceeds to S4, the excitation of the A-phase coil 13a is stopped, and the B-phase coil 13b is excited so that the reverse current flows. As a result, the magnetic poles indicated by S4 are formed at both end portions of the B-phase coil 13b and the /B-phase coil 13b'. Therefore, the armature portion 11 is further rotated from the position of S3 by further rotating τ ₁ /4 in the positive direction of the θ-axis.

Second, return to S1. Then, by repeating S2, S3, and S4 repeatedly, one step is performed at a time. The above is the principle of rotation in the θ-axis direction.

According to this rotation principle, as long as the AC current having a phase difference of 90° is transmitted to the A-phase coil 13a and the B-phase coil 13b, a rotating magnetic field can be generated in the armature portion 11 in the same manner as the synchronous motor, and the field magnet portion 1 is The rotating magnetic field is attracted while rotating at a synchronous speed of the rotating magnetic field. Therefore, the actuator of the present embodiment can be applied not only to a stepping motor but also to a synchronous motor.

The principle of the actuator of the present embodiment moving in the Z-axis direction will be described with reference to Fig. 7 . Table 2 shows the excitation patterns of the A-phase to D-phase coils 13a to 13d.

N and S in Table 2 indicate magnetic poles generated at the left end portions of the coils 13a to 13d in Fig. 7. × indicates that the coils 13a to 13d are not energized.

First, in S1, when the A-phase coil 13a is excited, the magnetic poles indicated by S1 are formed at both end portions of the A-phase coil 13a and the /A-phase coil 13a'. The armature portion 11 is attracted at a position indicated by S1 to be stably stationary.

Next, the process proceeds to S2, the excitation of the A-phase coil 13a is stopped, and the C-phase coil 13c is excited. As a result, the magnetic poles indicated by S2 are formed at both end portions of the C-phase coil 13c and the /C-phase coil 13c'. Therefore, the armature portion 11 is stationary after moving τ ₂ /4 from the position of S1 in the positive direction of the Z-axis. The τ ₂ /4 is a step amount.

Next, the process proceeds to S3, the excitation of the C-phase coil 13c is stopped, and the A-phase coil 13a is excited so that the reverse current flows. As a result, the magnetic poles indicated by S3 are formed at both end portions of the A-phase coil 13a and the /A-phase coil 13a'. Therefore, the armature portion 11 is further moved from the position of S2 further toward the positive Z-axis direction by τ ₂ /4.

Next, the process proceeds to S4, the excitation of the A-phase coil 13a is stopped, and the C-phase coil 13c is excited so that the reverse current flows. As a result, the magnetic poles indicated by S4 are formed at both end portions of the C-phase coil 13c and the /C-phase coil 13c'. Therefore, the armature portion 11 is further moved from the position of S3 further toward the positive Z-axis direction by τ ₂ /4.

Second, return to S1. Then, by repeating S2, S3, and S4 repeatedly, one step is performed at a time. The above is the principle of movement in the positive direction of the Z axis.

It can be seen that according to the principle of movement, as long as the phase A of the A phase coil 13a, C When the ring 13c flows through an alternating current having a phase difference of 90°, a moving magnetic field is generated in the armature portion 11 in the same manner as the synchronous motor, and the field magnet portion 1 is moved by the moving magnetic field while moving at a synchronous speed of the moving magnetic field. Therefore, the actuator of the present embodiment can be applied not only to a stepping motor but also to a synchronous motor.

According to the actuator of the present embodiment, the A-phase iron core 12a and the A-phase coil 13a for generating a moment in the θ-axis direction of the actuator are used together, and the thrust is generated in the Z-axis direction by the actuator. A phase iron core 12a and A phase coil 13a. Therefore, the center of the thrust in the Z-axis direction can be made coincident with the center of rotation in the θ-axis direction. Further, since the field magnet portion 1 can be driven in the Z-axis direction or the θ-axis direction by one control device 14, the control device can be reduced as compared with the case where the θ armature and the Z armature are respectively provided. Further, since the number of coils can be reduced as compared with the case where the θ armature and the Z armature are separately provided, a relatively compact actuator can be obtained.

In FIG. 6, in order to rotate the armature portion 11 in the positive direction of the θ-axis, the A-phase coil 13a and the B-phase coil 13b are excited. However, when the armature portion 11 is at the position shown by S2 in Fig. 7, even if the A-phase coil 13a and the B-phase coil 13b are excited, the armature portion 11 cannot be rotated in the positive direction of the θ-axis. This is because the magnetic poles at both end portions of the A-phase coil 13a and the B-phase coil 13b are located between the permanent magnets 3a and 3b. In this case, it is necessary to excite the C-phase coil 13c and the D-phase coil 13d.

Further, in Fig. 7, in order to rotate the armature portion 11 in the positive direction of the Z-axis, the A-phase coil 13a and the C-phase coil 13c are excited. However, when the armature portion 11 is at the position shown by S2 in Fig. 6, even if the A-phase coil 13a and the C-phase coil 13c are excited, the armature portion 11 cannot be moved. This is because the magnetic poles at both end portions of the A-phase coil 13a and the C-phase coil 13c are located between the permanent magnets 3a and 3b. to In this case, it is necessary to excite the B-phase coil 13b and the D-phase coil 13d.

The principle of the actuator of the present embodiment moving in the oblique direction will be described with reference to Fig. 8 . Table 3 shows the excitation patterns of the A-phase to D-phase coils 13a to 13d.

N and S in Table 3 indicate magnetic poles generated at the left end portions of the coils 13a to 13d in Fig. 8. × indicates that the coils 13a to 13d are not energized.

First, in S1, when the A-phase coil 13a is excited, the magnetic poles indicated by S1 are formed at both end portions of the A-phase coil 13a and the /A-phase coil 13a'. The armature portion 11 is attracted at a position indicated by S1 to be stably stationary.

Next, the process proceeds to S2, the excitation of the A-phase coil 13a is stopped, and the B-phase coil 13b and the C-phase coil 13c are excited. As a result, the magnetic poles indicated by S2 are formed at both end portions of the B-phase coil 13b, the C-phase coil 13c, the /B-phase coil 13b', and/or the C-phase coil 13c'. Therefore, the armature portion 11 is rotated by τ ₁ /8 from the position of S1 in the positive direction of the θ-axis and τ ₂ /8 in the positive direction of the Z-axis. At the same time, the B-phase coil 13b and the C-phase coil 13c are excited to prevent the rotation and movement of the armature portion 11 from becoming unstable when the D-phase coil 13d is excited by the subsequent S3.

Next, the process proceeds to S3, and the excitation of the B-phase coil 13b and the C-phase coil 13c is stopped, and the D-phase coil 13d is excited. As a result, the magnetic poles indicated by S3 are formed at both end portions of the D-phase coil 13d and the /D-phase coil 13d'. Therefore, the armature portion 11 is further rotated by τ ₁ /8 from the position of S2 toward the positive direction of the θ-axis, and is moved to τ ₂ /8 in the positive direction of the Z-axis to be stationary.

Next, the process proceeds to S4, the excitation of the D-phase coil 13d is stopped, and the B-phase coil 13b and the C-phase coil 13c are excited so that the reverse current flows. As a result, the magnetic poles indicated by S4 are formed at both end portions of the B-phase coil 13b, the C-phase coil 13c, the /B-phase coil 13b', and/or the C-phase coil 13c'. Therefore, the armature portion 11 is further rotated by τ ₁ /8 from the position of S3 toward the positive direction of the θ-axis, and is moved to τ ₂ /8 in the positive direction of the Z-axis to be stationary.

Next, the process proceeds to S5, and the excitation of the B-phase coil 13b and the C-phase coil 13c is stopped, and the A-phase coil 13a is excited. As a result, the magnetic poles indicated by S5 are formed at both end portions of the A-phase coil 13a and the /A-phase coil 13a'. Therefore, the armature portion 11 is further rotated by τ ₁ /8 from the position of S4 toward the positive direction of the θ-axis, and is moved to τ ₂ /8 in the positive direction of the Z-axis to be stationary. Then, by repeatedly performing S1 to S5, the armature portion 11 is moved in the oblique direction. The above is the principle of movement in the oblique direction.

(Second embodiment)

Fig. 9 shows a core 22 and a coil 23 used in the actuator according to the second embodiment of the present invention. In the first embodiment, a claw pole type iron core is used. However, in the second embodiment, a comb-shaped iron core 22 is used. The entire configuration of the field magnet portion 1 and the armature portion 11 is the same as that of the first embodiment.

As shown in FIG. 9, the core 22 has a plate-shaped main body portion 22a and teeth 22b protruding from the main body portion 22a toward the field magnet portion 1. A coil 23 is wound around the tooth 22b. The front end of the tooth 22b faces the permanent magnets 3a and 3b of the field magnet unit 1 with a gap therebetween. When the coil 23 is excited, the magnetic poles of the N pole or the S pole are formed at the front end of the tooth 22b. Further, the iron core may be formed in such a manner that a plurality of teeth protrude from the inner circumference of the annular magnetic body toward the field magnet portion 1.

Fig. 10 shows the permanent magnets 3a, 3b and the coils 13a to 13d which are unfolded into a plane. The actuator of the second embodiment is a two-phase Z-θ stepping motor as in the first embodiment. Similarly to the first embodiment, the coils 13a to 13d are classified into an A-phase coil 13a, a B-phase coil 13b, a C-phase coil 13c, and a D-phase coil 13d. The interval between the pair of coils 13a, 13b adjacent to the θ-axis direction is τ ₁ /4. The interval between the pair of coils 13a, 13c adjacent to the Z-axis direction is τ ₂ /4.

In the second embodiment, as in the first embodiment, the A-phase to D-phase coils 13a to 13d can be excited, and the armature portion 11 can be rotated one step at a time in the θ-axis direction toward the Z-axis. Move 1 step at a time. Further, the armature portion 11 can be moved in the oblique direction.

(Third embodiment)

Fig. 11 shows the permanent magnets 3a and 3b and the coil of the third embodiment of the present invention which are unfolded in a plane. In the third embodiment, as in the second embodiment, the iron core is of a comb type.

The actuator of the third embodiment is a 3-phase Z-θ stepping motor. The coils are classified into A1~A4 phase coils, B1~B4 phase coils and C1~C4 phase lines. The /A1~/A4 phase coil is connected in such a manner that the current flows in the opposite direction to the A1~A4 phase coil. The interval between the pair of coils A1, B1 adjacent to the θ-axis direction is τ ₁ /6. The interval between one pair of coils A1, A2 adjacent in the Z-axis direction is τ ₂ /6.

When the A1 phase coil and the A4 phase coil are excited, the armature portion 31 facilitates the position shown in Fig. 11 to be stationary. Next, when the excitation of the A1 phase coil and the A4 phase coil is stopped, and the C1 phase coil and the C4 phase coil are excited, the armature portion 11 is stepped by τ ₁ /6 in the positive direction of the θ axis. Next, when the excitation of the C1 phase coil and the C4 phase coil is stopped, and the B1 phase coil and the B4 phase coil are excited, the armature portion 31 is stepped by τ ₁ /6 in the positive direction of the θ axis. Next, if the excitation of the B1 phase coil and the B4 phase coil is stopped, and the A1 phase coil and the A4 phase coil are excited in such a manner that the reverse current flows, the armature portion 31 steps τ ₁ /6 toward the positive direction of the θ axis. . By repeating the above-described operation, one step is performed in the positive direction of the θ axis. The above is the principle of rotation in the positive direction of the θ axis.

According to the rotation principle, it is possible to generate a rotating magnetic field in the armature portion 31 in the same manner as the synchronous motor by circulating the alternating current having a phase difference of 120° with respect to the A1, B1, and C1 phase coils and the A4, B4, and C4 phase coils. The field magnet unit 1 is rotated at the synchronous speed of the rotating magnetic field while being sucked by the rotating magnetic field. Therefore, the actuator of the present embodiment can be applied not only to a stepping motor but also to a synchronous motor.

When the rest position shown in Fig. 11 is stopped, the excitation of the A1 phase coil and the A4 phase coil is stopped, and the A3 phase coil is excited, and the armature portion 31 is stepped by τ ₂ /6 in the positive direction of the Z axis. Next, if the excitation of the A3 phase coil is stopped and the A2 phase coil is excited, the armature portion 31 is stepped by τ ₂ /6 in the positive direction of the Z axis. Next, when the excitation of the A2 phase coil is stopped and the A1 phase coil and the A4 phase coil are excited so that the reverse current flows, the armature portion 31 steps τ ₁ /6 in the positive direction of the Z axis. By repeating the above-described actions, one step is stepped in the positive direction of the Z-axis. The above is the principle of movement in the positive direction of the Z axis.

According to this principle of movement, it is possible to generate a moving magnetic field in the armature portion 31 in the same manner as the synchronous motor by flowing an alternating current having a phase difference of 120° to the A1, A2, and A3 phase coils, and the field magnet portion 1 is moved by the movement. The magnetic field is attracted while moving at the synchronous speed of the moving magnetic field. Therefore, the actuator of the present embodiment can be applied not only to a stepping motor but also to a synchronous motor.

The present invention is not limited to the embodiments described above, and may be embodied in various embodiments without departing from the scope of the invention.

In the foregoing embodiments, an example in which the actuator of the present invention is applied to a Z-θ stepping motor has been described, but the actuation of the present invention can also be performed as described above. The device is applied to a Z-θ synchronous motor.

In the above-described embodiment, an example in which the actuator is driven in the θ-axis direction and the Z-axis direction has been described. However, the actuator may be driven in the X-axis direction and the Y-axis direction in the plane.

The field magnet portion relatively moves relative to the movement of the armature portion, and the field magnet portion can be moved or the armature portion can be moved.

The driving method of the A phase to the D phase coil is not limited. For example, it can be either a two-pole drive or a unipolar drive. Further, either single-phase excitation or two-phase excitation can be performed. If it can be driven by single-phase excitation, the two-phase excitation can also be absolutely operated. In addition, microstepping drive is also possible.

The present specification is based on Japanese Patent Application No. 2016-146211 filed on July 26, 2016. The contents are included in this specification.

Claims (9)

An actuator comprising: a field magnet portion in which a permanent magnet having a surface of an N pole and a surface are arranged alternately and in a lattice shape in a first direction and a second direction orthogonal to the first direction a permanent magnet of the S pole; the armature portion having a first core, a second core disposed in the first direction with respect to the first core, and a second core disposed on the first core a third iron core in a direction, and first to third coils wound around the first to third iron cores; and a control device, wherein the field magnet portion faces the first direction with respect to the armature portion When moving relatively, a current is supplied to the first coil and the second coil so that a thrust force is generated in the first direction, and when the field magnet portion relatively moves in the second direction with respect to the armature portion And supplying a current to the first coil and the third coil in such a manner as to generate a thrust in the second direction. An actuator comprising: a field magnet portion in which a permanent magnet having a surface of an N pole and a surface are arranged alternately and in a lattice shape in a first direction and a second direction orthogonal to the first direction a permanent magnet of the S pole; the armature portion having a first core, a second core disposed in the first direction with respect to the first core, and a second core disposed on the first core a third iron core in a direction, a fourth iron core disposed in an oblique direction with respect to the first iron core, and first to fourth coils wound around the first to fourth iron cores; and a control device When the field magnet portion relatively moves in the first direction with respect to the armature portion, the first line is applied to generate the thrust in the first direction. And generating a current to the second coil or the third coil and the fourth coil, and generating the current in the second direction when the field magnet portion relatively moves in the second direction with respect to the armature portion In the thrust mode, current is supplied to the first coil and the third coil, or to the second coil and the fourth coil. The actuator of claim 2, wherein the control device excites the first coil when the field magnet portion relatively moves in the first direction with respect to the armature portion, and then performs the second coil Exciting or exciting the third coil, and exciting the fourth coil, and exciting the first coil when the field magnet portion relatively moves in the second direction with respect to the armature portion Then, the third coil is excited or the second coil is excited, and then the fourth coil is excited. The actuator of claim 2 or 3, wherein the control device excites the first coil when the field magnet portion relatively moves in the oblique direction with respect to the armature portion, and then simultaneously applies the second The coil is excited with the third coil described above, and then the fourth coil is excited. The actuator according to any one of claims 1 to 3, wherein the first core and the second core adjacent to each other in the first direction are disposed at an offset τ ₁ /4+n ₁ ×τ _a position of ₁ and the first core and the third core adjacent to the second direction are disposed at an offset of τ ₂ /4+n ₂ ×τ ₂ , wherein τ ₁ is the field magnet In the first direction of the first direction, n ₁ is an integer of 0 or more, τ ₂ is an inter-NN pitch of the second direction of the field magnet portion, and n ₂ is an integer of 0 or more. The actuator according to any one of claims 1 to 3, wherein the armature portion has at least three cores including the first core and the second core in the first direction, and is in the above The two directions have at least three iron cores including the first iron core and the third iron core, and one of the adjacent ones in the first direction is disposed on the iron core system at an offset of τ ₁ /6+n ₁ ×τ ₁ And a position adjacent to the second direction is disposed at a position of the offset τ ₂ /6+n ₂ ×τ ₂ , wherein τ ₁ is the first direction of the field magnet portion The magnetic pole pitch between the NNs, n ₁ is an integer of 0 or more, and τ ₂ is a magnetic pole pitch between the NNs in the second direction of the field magnet portion, and n ₂ is an integer of 0 or more. The actuator according to any one of claims 1 to 3, wherein each of the first to third iron cores has a body portion around which the first to third coils are wound, respectively, and The main body portion is bent at both end portions of the hook-shaped claw, and the both end portions face the permanent magnet of the field magnet portion with a gap interposed therebetween. The actuator according to any one of claims 1 to 3, wherein each of the first to third iron cores has teeth respectively wound with the first to third coils, and the front end of the teeth The portion faces the permanent magnet of the field magnet portion via a gap. The actuator according to any one of claims 1 to 8, wherein the first direction is a θ-axis direction and the second direction is a Z-axis direction.