TW201807404A - Method and apparatus of detecting particles on upper surface of glass, and method of irradiating incident light - Google Patents

Method and apparatus of detecting particles on upper surface of glass, and method of irradiating incident light Download PDF

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TW201807404A
TW201807404A TW106117330A TW106117330A TW201807404A TW 201807404 A TW201807404 A TW 201807404A TW 106117330 A TW106117330 A TW 106117330A TW 106117330 A TW106117330 A TW 106117330A TW 201807404 A TW201807404 A TW 201807404A
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Taiwan
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glass
region
light
incident light
mirror
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TW106117330A
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Chinese (zh)
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黃成真
鄭智華
金泰皓
李亨哲
表誠鐘
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韓商康寧精密素材股份有限公司
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/94Investigating contamination, e.g. dust
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765Method using an image detector and processing of image signal
    • G01N2021/177Detector of the video camera type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/94Investigating contamination, e.g. dust
    • G01N2021/945Liquid or solid deposits of macroscopic size on surfaces, e.g. drops, films, or clustered contaminants
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Abstract

A particle detecting method including: disposing a rotatable mirror on a path of light emitted from a light source so that the mirror reflects the light to irradiate an incident light to the upper surface; calculating an incident angle of the incident light so that a first region where the incident light meets the upper surface of the glass and a second region where light transmits through the glass and meets a lower surface of the glass do not overlap with each other when viewed from above; rotating the mirror based on the calculated incident angle; acquiring an image of the first region with a camera disposed above the first region while conveying the glass in a horizontal direction; and detecting particles by analyzing the acquired image. The detected particles are considered as existing on the upper surface.

Description

在玻璃上表面上偵測粒子的方法與設備以及照射入射光的方法Method and apparatus for detecting particles on an upper surface of glass and method of irradiating incident light

本申請案主張對於申請於2016年5月25日的韓國專利申請案第10/2016/0064134號的優先權權益,在此仰賴此韓國專利申請案內容且併入其全文以作為參照。The present application claims priority to the Korean Patent Application No. 10/2016/0064, filed on May 25, 2016, the content of which is hereby incorporated by reference.

本揭示內容相關於用於偵測玻璃上表面上的粒子的方法與設備,以及照射入射光的方法。The present disclosure relates to methods and apparatus for detecting particles on an upper surface of a glass, and methods of illuminating incident light.

一般而言,僅在用於平面顯示器的平坦玻璃的一個表面(例如上表面)上沈積微型電路圖樣,而不在平坦玻璃的另一表面(例如下表面)上沈積微型電路圖樣。若微型電路圖樣被沈積在存在平坦玻璃的上表面上的粒子上,則微型電路圖樣可具有一些缺陷。因此,在沈積微型電路圖樣之前,需要檢查平坦玻璃的上表面上是否存在粒子。In general, a microcircuit pattern is deposited only on one surface (e.g., the upper surface) of a flat glass for a flat panel display without depositing a microcircuit pattern on the other surface (e.g., the lower surface) of the flat glass. If the microcircuit pattern is deposited on particles present on the upper surface of the flat glass, the microcircuit pattern can have some drawbacks. Therefore, it is necessary to check the presence or absence of particles on the upper surface of the flat glass before depositing the microcircuit pattern.

為了僅偵測平坦玻璃的上表面上的粒子,習知的平坦玻璃粒子偵測設備包含:第一與第二照射裝置,經配置以在平坦玻璃上方分別以不同的角度,照射光至平坦玻璃的上表面與下表面;以及第一與第二攝影機,經配置以各自獲取上表面照射區域與下表面照射區域的影像。In order to detect only particles on the upper surface of the flat glass, conventional flat glass particle detecting devices include: first and second illumination devices configured to illuminate the flat glass at different angles above the flat glass, respectively The upper surface and the lower surface; and the first and second cameras are configured to each acquire an image of the upper surface illumination area and the lower surface illumination area.

因為平坦玻璃具有預定的厚度,在影像上上表面上的粒子被指示為亮部,且下表面上的粒子被指示為暗部。習知設備經配置以比較並分析第一與第二攝影機之每一者獲取的影像,並偵測上表面上存在的粒子。Since the flat glass has a predetermined thickness, particles on the upper surface of the image are indicated as bright portions, and particles on the lower surface are indicated as dark portions. Conventional devices are configured to compare and analyze images acquired by each of the first and second cameras and to detect particles present on the upper surface.

然而,因為習知設備具有兩個照射裝置與兩個攝影機,增加了製造設備的成本(以及製造平坦玻璃的成本)。再者,隨著平坦玻璃的輸送速度近來變得越來越高,需要增強平坦玻璃上表面上的粒子的偵測速度。然而,因為習知設備必需比較與分析兩個攝影機獲取的影像,習知設備難以滿足這種需求。However, since the conventional device has two illumination devices and two cameras, the cost of manufacturing equipment (and the cost of manufacturing flat glass) is increased. Furthermore, as the conveying speed of flat glass has recently become higher and higher, it is necessary to enhance the detection speed of particles on the upper surface of the flat glass. However, conventional devices have difficulty meeting this need because conventional devices must compare and analyze images acquired by two cameras.

本揭示內容處理對於前述問題之至少一者的解決方案。本揭示內容提供偵測玻璃上表面上的粒子的方法與設備,此種方法與設備可僅使用一個光源與一個攝影機,本揭示內容並提供照射入射光的方法。The present disclosure addresses a solution to at least one of the foregoing problems. The present disclosure provides methods and apparatus for detecting particles on the upper surface of a glass. Such a method and apparatus can use only one light source and a camera, and the present disclosure provides a method of illuminating incident light.

本揭示內容的一個態樣提供偵測玻璃上表面上的粒子的方法。方法包含:在光源發出的光的路徑上放置可旋轉的鏡,使得鏡反射光以將入射光照射至上表面;計算入射光的入射角,使得在從上方觀看時第一區域與一第二區域不互相重疊,第一區域為入射光交會玻璃的上表面處,第二區域為光傳送透過玻璃且交會玻璃的下表面處;基於計算出的入射角旋轉鏡;以放置在第一區域上方的攝影機獲取第一區域的影像;以及藉由分析獲取到的影像來偵測粒子。所偵測到的粒子被視為存在上表面上。One aspect of the present disclosure provides a method of detecting particles on an upper surface of a glass. The method includes: placing a rotatable mirror on a path of light emitted by the light source such that the mirror reflects light to illuminate the incident light to the upper surface; calculating an incident angle of the incident light such that the first region and the second region are viewed from above Do not overlap each other, the first area is at the upper surface of the incident light intersection glass, and the second area is where the light is transmitted through the glass and intersects the lower surface of the glass; the mirror is rotated based on the calculated incident angle; to be placed above the first area The camera acquires an image of the first region; and detects the particles by analyzing the acquired image. The detected particles are considered to be present on the upper surface.

在一個具體實施例中,基於玻璃的折射角與厚度計算入射角。In a specific embodiment, the angle of incidence is calculated based on the angle of refraction of the glass and the thickness.

在一個具體實施例中,基於第一區域的右端與第二區域的左端之間的水平距離的最大值,來計算入射角。In a specific embodiment, the angle of incidence is calculated based on a maximum of the horizontal distance between the right end of the first region and the left end of the second region.

在一個具體實施例中,基於下列方程式來計算水平距離的最大值:, 其中L'為水平距離, d為該玻璃的該厚度, n為該玻璃的該折射率, θ為該入射光的該入射角,且 W為該入射光的一寬度。In a specific embodiment, the maximum value of the horizontal distance is calculated based on the following equation: Where L' is the horizontal distance, d is the thickness of the glass, n is the refractive index of the glass, θ is the incident angle of the incident light, and W is a width of the incident light.

在一個具體實施例中,在輸送玻璃之前執行旋轉鏡。In a specific embodiment, the rotating mirror is performed prior to conveying the glass.

在一個具體實施例中,攝影機被安裝為使得第一區域的右端被定位在攝影機的視野的右端處。In a specific embodiment, the camera is mounted such that the right end of the first region is positioned at the right end of the field of view of the camera.

在一個具體實施例中,在玻璃的折射率與厚度之至少一者改變時,執行計算入射光的入射角以及旋轉鏡。In a specific embodiment, the incidence angle of the incident light and the rotating mirror are performed when at least one of the refractive index and the thickness of the glass is changed.

本揭示內容的另一態樣提供一種將入射光照射至玻璃的上表面以偵測上表面上的粒子的方法。方法包含:在光源發出的光的路徑上放置可旋轉的鏡,使得鏡反射光以將入射光照射至上表面;基於玻璃的折射角與厚度來計算入射光的入射角,使得在從上方觀看時第一區域與一第二區域不互相重疊,第一區域為入射光交會玻璃的上表面處,第二區域為光傳送透過玻璃且交會玻璃的下表面處;以及基於所計算出的入射角旋轉鏡。在玻璃的折射率與厚度之至少一者改變時,執行計算入射角以及旋轉鏡。Another aspect of the present disclosure provides a method of irradiating incident light onto an upper surface of a glass to detect particles on the upper surface. The method includes: placing a rotatable mirror on a path of light emitted by the light source such that the mirror reflects light to illuminate the incident light to the upper surface; and calculating an incident angle of the incident light based on a refractive angle and a thickness of the glass such that when viewed from above The first region and the second region do not overlap each other, the first region is at the upper surface of the incident light intersecting glass, the second region is where the light is transmitted through the glass and intersects the lower surface of the glass; and is rotated based on the calculated incident angle mirror. When the at least one of the refractive index and the thickness of the glass is changed, the calculation of the incident angle and the rotation of the mirror are performed.

在一個具體實施例中,基於第一區域的右端與第二區域的左端之間的水平距離的最大值,來計算入射角。In a specific embodiment, the angle of incidence is calculated based on a maximum of the horizontal distance between the right end of the first region and the left end of the second region.

在一個具體實施例中,基於下列方程式來計算水平距離的最大值:, 其中L'為水平距離, d為該玻璃的該厚度, n為該玻璃的該折射率, θ為該入射光的該入射角,且 W為該入射光的該寬度。In a specific embodiment, the maximum value of the horizontal distance is calculated based on the following equation: Where L' is the horizontal distance, d is the thickness of the glass, n is the refractive index of the glass, θ is the incident angle of the incident light, and W is the width of the incident light.

本揭示內容的另一個態樣提供偵測玻璃上表面上的粒子的設備。設備包含:光源,經配置以發出光;可旋轉的鏡,放置在光的路徑上,且經配置以調整要照射至上表面的入射光的入射角;控制器,經配置以控制鏡的旋轉,使得在從上方觀看時第一區域與第二區域不互相重疊,第一區域為入射光交會上表面處,第二區域為光傳送透過玻璃且交會玻璃的下表面處;以及攝影機,經配置以獲取第一區域的影像。控制器經配置以藉由分析所獲取的影像來偵測粒子,並將偵測到的粒子視為存在上表面上。Another aspect of the present disclosure provides an apparatus for detecting particles on an upper surface of a glass. The apparatus includes a light source configured to emit light, a rotatable mirror disposed on the path of the light, and configured to adjust an angle of incidence of incident light to be illuminated to the upper surface, and a controller configured to control rotation of the mirror, The first area and the second area do not overlap each other when viewed from above, the first area is at the upper surface of the incident light intersection, the second area is where the light is transmitted through the glass and the lower surface of the intersecting glass; and the camera is configured to Get the image of the first area. The controller is configured to detect the particles by analyzing the acquired images and to treat the detected particles as being present on the upper surface.

在一個具體實施例中,控制器經配置以基於玻璃的折射角與厚度來控制旋轉。In a particular embodiment, the controller is configured to control rotation based on the angle of refraction and thickness of the glass.

在一個具體實施例中,控制器經配置以基於第一區域的右端與第二區域的左端之間的水平距離的最大值,來控制旋轉。In a particular embodiment, the controller is configured to control the rotation based on a maximum of a horizontal distance between a right end of the first region and a left end of the second region.

在一個具體實施例中,基於下列方程式來計算水平距離的最大值:, 其中L'為水平距離, d為該玻璃的該厚度, n為該玻璃的該折射率, θ為該入射光的該入射角,且 W為該入射光的一寬度。In a specific embodiment, the maximum value of the horizontal distance is calculated based on the following equation: Where L' is the horizontal distance, d is the thickness of the glass, n is the refractive index of the glass, θ is the incident angle of the incident light, and W is a width of the incident light.

在一個具體實施例中,攝影機經配置以使得第一區域的右端被定位在攝影機的視野的右端處。In a specific embodiment, the camera is configured such that the right end of the first region is positioned at the right end of the field of view of the camera.

下文將參考附加圖式,說明用於偵測玻璃上表面上的粒子的方法與設備,以及照射入射光的方法的具體實施例。A specific embodiment of a method and apparatus for detecting particles on the upper surface of a glass, and a method of illuminating incident light will be described below with reference to additional figures.

附加圖式的 1 3 中使用二維笛卡兒座標系統(X軸與Y軸)。在下面的說明中,正X軸方向與正Y軸方向,分別指示向右方向與向上方向。再者,負X軸方向與負Y軸方向,分別指示向左方向與向下方向。Accompanying drawings, and first to FIG. 3 of two-dimensional Cartesian coordinate system (X and Y axes). In the following description, the positive X-axis direction and the positive Y-axis direction indicate the rightward direction and the upward direction, respectively. Furthermore, the negative X-axis direction and the negative Y-axis direction indicate the leftward direction and the downward direction, respectively.

在下面的說明中,用詞「上」、「下」、「上方」、「下方」、「右」、「左」等等係參照附加圖式中圖示的相對空間關係(其中假定玻璃被水平輸送),且並非意為代表取決於玻璃輸送方向的絕對空間關係。In the following description, the words "upper", "lower", "upper", "lower", "right", "left", etc. refer to the relative spatial relationship illustrated in the additional schema (where glass is assumed) Horizontal transport), and is not intended to represent an absolute spatial relationship depending on the direction of glass transport.

1 2 圖示,根據一個具體實施例的偵測玻璃上表面上的粒子的設備100(此後簡稱為「粒子偵測設備」),包含:光源110;鏡120;控制器;以及攝影機140。As FIG. 1 and FIG. 2 illustrates, according to a specific embodiment to detect particles on the upper surface of the device 100 of the embodiment of the glass (hereinafter simply referred to as "particle detector apparatus"), comprising: a light source 110; mirror 120; controller And the camera 140.

在粒子偵測設備100中,要檢查的目標為玻璃10,玻璃10被輸送於水平方向中(例如向右方向中)。在根據另一具體實施例的粒子偵測設備中,要檢查的目標可為未被輸送且為固定的玻璃。玻璃10包含上表面11與下表面12,在上表面11上沉積微型電路圖樣,在下表面12上不沉積微型電路圖樣。在另一具體實施例中,玻璃10可包含平坦玻璃、玻璃基板、平坦玻璃基板等等,且具有預定厚度與預定寬度,並沿著向左方向或向右方向延伸。為了更佳地解釋粒子偵測設備100,在 1 3 中,玻璃10被圖示說明為具有放大的厚度,即被圖示為厚於玻璃10的實際厚度(例如約數毫米至數微米)。In the particle detecting apparatus 100, the object to be inspected is the glass 10, and the glass 10 is conveyed in the horizontal direction (for example, in the right direction). In the particle detecting apparatus according to another specific embodiment, the object to be inspected may be a glass that is not transported and is fixed. The glass 10 includes an upper surface 11 and a lower surface 12 on which a microcircuit pattern is deposited, and no microcircuit pattern is deposited on the lower surface 12. In another specific embodiment, the glass 10 may comprise a flat glass, a glass substrate, a flat glass substrate, or the like, and has a predetermined thickness and a predetermined width, and extends in a leftward or rightward direction. In order to better explain the particle detector device 100, the first to figures 1 3, the glass 10 is illustrated as having a larger thickness, i.e., thicker than the actual thickness of the illustrated glass 10 (e.g., about several millimeters to a few microns).

光源110被放置在玻璃10上方,以在垂直於玻璃10的方向中發出光31。因為攝影機140亦被放置在玻璃10上方,光源110可被製造為與攝影機140整合,從而減少粒子偵測設備100的尺寸。光源110可涵蓋多個概念,如發光裝置、照明裝置、燈、波束成型器(beam former)等等。在另一具體實施例中,光源110可被放置在玻璃10上方,以在傾斜於玻璃10的方向中發出光31。在一個具體實施例中,光31可包含射線以及雷射光束等等。在一個具體實施例中,光源110可包含聚焦透鏡111,以將光31聚焦至預定照射區域。聚焦透鏡111可經配置以調整光源110發出的光31的照射區域的尺寸。Light source 110 is placed over glass 10 to emit light 31 in a direction perpendicular to glass 10. Because the camera 140 is also placed over the glass 10, the light source 110 can be fabricated to integrate with the camera 140 to reduce the size of the particle detecting device 100. Light source 110 can encompass a variety of concepts such as lighting devices, lighting devices, lights, beam formers, and the like. In another embodiment, the light source 110 can be placed over the glass 10 to emit light 31 in a direction that is oblique to the glass 10. In a particular embodiment, light 31 can include radiation as well as laser beams and the like. In one particular embodiment, light source 110 can include a focusing lens 111 to focus light 31 to a predetermined illumination area. The focus lens 111 can be configured to adjust the size of the illuminated area of the light 31 emitted by the light source 110.

鏡120被放置在光源110發出的光31的路徑上,使得入射光32被照射至玻璃10的上表面11。由放置在光31路徑上的鏡120,調整入射光32的入射角θ。因此,相較於使光源直接對玻璃傾斜的習知設備而言,可由相對大範圍的入射角θ將入射光32照射至玻璃10的上表面11。鏡120被電性連接至控制器130,以被基於來自控制器130的控制訊號來旋轉。鏡120可在順時針方向或逆時針方向中沿著旋轉軸121旋轉。為此,鏡120可包含驅動機制與電力傳輸機制。在一個具體實施例中,驅動機制可包含驅動馬達、電性馬達等等。在一個具體實施例中,電力傳輸機制可包含滑輪與傳動帶、鏈輪和鏈條、驅動齒輪和從動齒輪等等。在一個具體實施例中,鏡120可涵蓋多個概念,如反射鏡、反射裝置、反射器等等。在下面的說明中,入射光32表示從光31被鏡120反射時,進程到光31到達玻璃10上表面11時的光。The mirror 120 is placed on the path of the light 31 emitted by the light source 110 such that the incident light 32 is illuminated to the upper surface 11 of the glass 10. The incident angle θ of the incident light 32 is adjusted by the mirror 120 placed on the path of the light 31. Thus, incident light 32 can be illuminated to the upper surface 11 of the glass 10 by a relatively wide range of angles of incidence θ as compared to conventional devices that direct the source directly to the glass. The mirror 120 is electrically coupled to the controller 130 to be rotated based on control signals from the controller 130. The mirror 120 is rotatable along the rotational axis 121 in a clockwise or counterclockwise direction. To this end, the mirror 120 can include a drive mechanism and a power transfer mechanism. In a particular embodiment, the drive mechanism can include a drive motor, an electric motor, and the like. In one particular embodiment, the power transfer mechanism can include pulleys and belts, sprocket and chain, drive and driven gears, and the like. In one particular embodiment, mirror 120 can encompass a variety of concepts such as mirrors, reflective devices, reflectors, and the like. In the following description, the incident light 32 represents light when the light 31 is reflected by the mirror 120 and proceeds to reach the upper surface 11 of the glass 10 from the light 31.

控制器130經配置以計算入射光32的入射角θ、基於所計算的入射角θ而控制鏡120的旋轉、藉由分析攝影機140獲取的影像而偵測粒子、以及判定所偵測到的粒子被視為存在玻璃10的上表面11上。Controller 130 is configured to calculate an angle of incidence θ of incident light 32, control rotation of mirror 120 based on the calculated angle of incidence θ, detect particles by analyzing images acquired by camera 140, and determine detected particles It is considered to be present on the upper surface 11 of the glass 10.

特定而言,控制器130經配置以計算入射光32的入射角θ,使得在從上方觀看時第一區域41與第二區域42不彼此重疊。在此,第一區域41為入射光32交會玻璃10上表面11的區域,而第二區域42為傳送透過玻璃10的經傳送光33交會玻璃10的下表面12的區域。換言之,控制器130經配置以計算入射光32的入射角θ,以使第一區域41右端與第二區域42左端之間的水平距離L'大於零。In particular, the controller 130 is configured to calculate the angle of incidence θ of the incident light 32 such that the first region 41 and the second region 42 do not overlap each other when viewed from above. Here, the first region 41 is a region where the incident light 32 intersects the upper surface 11 of the glass 10, and the second region 42 is a region where the transmitted light 33 transmitted through the glass 10 intersects the lower surface 12 of the glass 10. In other words, the controller 130 is configured to calculate the angle of incidence θ of the incident light 32 such that the horizontal distance L' between the right end of the first region 41 and the left end of the second region 42 is greater than zero.

若在從上方觀看時第一區域41與第二區域42不彼此重疊,則可能藉由使用玻璃10上方的攝影機140獲取第一區域41的影像,而不獲取第二區域42的影像。在此情況中,因為玻璃10的下表面12上的照射區域(亦即第二區域42)的影像沒有被攝影機140獲取,攝影機140無法獲取第二區域42上的粒子影像。再者,因為沒有光到達存在玻璃10下表面12上的非照射區域(亦即除了第二區域42以外的其餘區域)上的粒子,攝影機140無法獲取粒子影像。因此,攝影機140可僅獲取第一區域41上的上側粒子21的影像,而玻璃10的下表面12上的下側粒子的影像可不被攝影機140獲取。If the first area 41 and the second area 42 do not overlap each other when viewed from above, it is possible to acquire the image of the first area 41 by using the camera 140 above the glass 10 without acquiring the image of the second area 42. In this case, since the image of the illuminated area (i.e., the second area 42) on the lower surface 12 of the glass 10 is not captured by the camera 140, the camera 140 cannot acquire the particle image on the second area 42. Furthermore, since no light reaches the particles on the non-irradiated area (i.e., the remaining areas other than the second area 42) on the lower surface 12 of the glass 10, the camera 140 cannot acquire the particle image. Therefore, the camera 140 can acquire only the image of the upper side particle 21 on the first area 41, and the image of the lower side particle on the lower surface 12 of the glass 10 can be acquired by the camera 140.

在一個具體實施例中,控制器130可包含具有程式儲存部件的電腦。程式儲存部件可儲存任何相關於計算入射角θ、旋轉鏡120、以及分析影像的一或更多個程式。例如,程式儲存部件可包含電腦可讀取硬碟、可撓式碟片、光碟、磁性光學碟片、以及記憶卡等等。In one embodiment, controller 130 can include a computer having program storage components. The program storage component can store any one or more programs associated with calculating the angle of incidence θ, rotating the mirror 120, and analyzing the image. For example, the program storage unit may include a computer readable hard disk, a flexible disk, a compact disk, a magnetic optical disk, a memory card, and the like.

在一個具體實施例中,控制器130可經配置以基於玻璃10的折射率與厚度來控制鏡120的旋轉,使得在從上方觀看時第一區域41與第二區域42不彼此重疊。In one particular embodiment, the controller 130 can be configured to control the rotation of the mirror 120 based on the refractive index and thickness of the glass 10 such that the first region 41 and the second region 42 do not overlap each other when viewed from above.

例如,可由下列方程式計算水平距離L':, 其中L'為水平距離, d為玻璃10的厚度, n為玻璃10的折射率, θ為入射光32的入射角,且 W為水平方向中的入射光32的寬度。For example, the horizontal distance L' can be calculated from the following equation: Where L' is the horizontal distance, d is the thickness of the glass 10, n is the refractive index of the glass 10, θ is the incident angle of the incident light 32, and W is the width of the incident light 32 in the horizontal direction.

方程式1可從下列的方程式2至6導出。首先,水平距離L'可如以下由方程式2表示:其中,參照 3 ,WA 為第一區域41的水平寬度, WB 為第二區域42的水平寬度,且 L為WA 中心與WB 中心之間的水平距離。Equation 1 can be derived from Equations 2 through 6 below. First, the horizontal distance L' can be expressed by Equation 2 as follows: Here, referring to Fig . 3 , W A is the horizontal width of the first region 41, W B is the horizontal width of the second region 42, and L is the horizontal distance between the center of W A and the center of W B .

在方程式2中,因為玻璃10的厚度非常薄(諸如從0.2毫米至4毫米),可假定第一區域41的水平寬度WA 等效地等於第二區域42的水平寬度WB 。因此,水平距離L'可如以下由方程式3表示: In Equation 2, since the thickness of the glass 10 is very thin (such as from 0.2 mm to 4 mm), it can be assumed that the horizontal width W A of the first region 41 is equivalently equal to the horizontal width W B of the second region 42. Therefore, the horizontal distance L' can be expressed by Equation 3 as follows:

在方程式3中的L,可由相關於折射角α的方程式4使用三角函數表示: L in Equation 3 can be represented by a trigonometric function from Equation 4 relating to the refraction angle α:

在方程式4中的折射角α,可由相關於入射角θ的方程式5使用斯乃爾定律(Snell's law)表示: The angle of refraction α in Equation 4 can be expressed by Equation 5, which is related to the angle of incidence θ, using Snell's law:

在方程式3中的WA ,可由相關於入射角θ的方程式6來表示: W A in Equation 3 can be expressed by Equation 6 relating to the angle of incidence θ:

若方程式4至6被應用至方程式3,則解出方程式1。因為在方程式1中折射率n、厚度d以及寬度W為定值,水平距離L'被由相關於入射角θ的函數表示。If Equations 4 through 6 are applied to Equation 3, Equation 1 is solved. Since the refractive index n, the thickness d, and the width W are constant values in Equation 1, the horizontal distance L' is represented by a function related to the incident angle θ.

因此,若特定的玻璃被判定為要檢查的目標,則特定玻璃的折射率與厚度亦被判定。在此情況中,可基於方程式1計算入射角θ,而使得水平距離L'大於零(亦即在從上方觀看時第一區域41與第二區域42不彼此重疊)。Therefore, if a specific glass is judged as the target to be inspected, the refractive index and thickness of the specific glass are also determined. In this case, the incident angle θ can be calculated based on Equation 1 such that the horizontal distance L′ is greater than zero (that is, the first region 41 and the second region 42 do not overlap each other when viewed from above).

再者,方程式1為理論性的,而實際上折射率在玻璃整體中可不為一致的。因此,為了確保第一區域41與第二區域42不重疊,可基於方程式1計算入射角θ而使得水平距離L'具有最大值。例如,在玻璃10的折射率n為1.5、寬度W為100微米、且厚度為500微米時,水平距離L'與入射角θ之間的關係被圖示說明於 4 中。參照 4 ,在入射角θ為58.5度時,水平距離L'具有最大值。在此情況中,水平距離L'的最大值為154.1微米。Furthermore, Equation 1 is theoretical, and in fact the refractive index may not be uniform throughout the glass. Therefore, in order to ensure that the first region 41 and the second region 42 do not overlap, the incident angle θ can be calculated based on Equation 1 such that the horizontal distance L′ has a maximum value. For example, the refractive index n of the glass 10 is 1.5, a width W of 100 microns, and a thickness of 500 microns, the relationship between the horizontal distance L 'and the incident angle θ is illustrated in FIG. 4. Referring to Fig . 4 , when the incident angle θ is 58.5 degrees, the horizontal distance L' has a maximum value. In this case, the maximum value of the horizontal distance L' is 154.1 μm.

控制器130經配置以基於透過前述方法計算出的入射角θ,透過驅動鏡120的驅動機制來控制鏡120的旋轉(或傾斜角)。The controller 130 is configured to control the rotation (or tilt angle) of the mirror 120 by the drive mechanism of the drive mirror 120 based on the incident angle θ calculated by the foregoing method.

如前述,使第一區域41與第二區域42不彼此重疊的入射角θ,取決於玻璃10的折射率與厚度。因此,在作為檢查目標的玻璃的折射率與厚度的至少一者改變時,控制器130經配置以基於改變的折射率(或改變的厚度)計算出入射光32的入射角θ,藉以根據所計算出的入射角θ控制鏡120的旋轉。As described above, the incident angle θ at which the first region 41 and the second region 42 do not overlap each other depends on the refractive index and thickness of the glass 10. Therefore, when at least one of the refractive index and the thickness of the glass as the inspection target is changed, the controller 130 is configured to calculate the incident angle θ of the incident light 32 based on the changed refractive index (or the changed thickness), thereby calculating The resulting incident angle θ controls the rotation of the mirror 120.

攝影機140被在垂直於玻璃10的方向中放置在玻璃10上方。攝影機140具有視野FOV(見 1 2 圖示的虛線),視野FOV在垂直於玻璃10的方向中,從攝影機140向下延伸以交會玻璃10的上表面11。攝影機140經配置以獲取第一區域41的影像,而不獲取第二區域42的影像。換言之,攝影機140被安裝為使得攝影機140視野FOV包含第一區域41,且不包含第二區域42。因為存在上表面11的第一區域41上的上側粒子21散射入射光32以形成散射光34,攝影機140獲取上側粒子的影像。攝影機140電性連接至控制器130。攝影機140獲取的影像被由電性訊號的形式傳送至控制器130。在此具體實施例中,攝影機140可包含線型電荷耦合裝置(CCD)攝影機。在一個具體實施例中,攝影機140可涵蓋多個概念,如錄影裝置、成像裝置、偵測裝置、以及偵測器等等。The camera 140 is placed above the glass 10 in a direction perpendicular to the glass 10. Camera 140 has a field of view FOV (see dashed lines in FIG. 1 and illustrated in FIG. 2), the field of view FOV in the direction of the glass 10, the upper surface 11 extends to the intersection of the glass 10 from the camera 140 vertically downward. Camera 140 is configured to acquire an image of first region 41 without acquiring an image of second region 42. In other words, the camera 140 is mounted such that the camera 140 field of view FOV includes the first area 41 and does not include the second area 42. Since the upper side particles 21 on the first region 41 of the upper surface 11 scatter the incident light 32 to form the scattered light 34, the camera 140 acquires an image of the upper side particles. The camera 140 is electrically connected to the controller 130. The image acquired by the camera 140 is transmitted to the controller 130 in the form of an electrical signal. In this particular embodiment, camera 140 can include a linear charge coupled device (CCD) camera. In one embodiment, camera 140 may encompass a variety of concepts, such as video devices, imaging devices, detection devices, and detectors, to name a few.

在一個具體實施例中,如 2 圖示,攝影機140可被安裝為使得第一區域41的右端被定位在視野FOV的右端處,藉以將視野FOV定位為離第二區域42最遠。因此,可能限制存在第二區域42上的下側粒子22所散射的光,使其不在攝影機140獲取的影像中產生雜訊。In one particular embodiment, as illustrated in FIG. 2, the camera 140 may be installed such that the right end of the first region 41 is positioned at the right end of the field of view FOV, whereby the field of view FOV is positioned furthest from the second region 42. Therefore, it is possible to restrict the light scattered by the lower side particles 22 on the second area 42 from being generated in the image acquired by the camera 140.

控制器130經配置以藉由分析攝影機140獲取的影像,將影像上的亮部視為粒子。如前述,攝影機140未獲取存在玻璃10下表面12上的下側粒子22的影像。因此,控制器130經配置以將所有偵測到的粒子,視為存在玻璃10上表面11上。The controller 130 is configured to view the highlights on the image as particles by analyzing the image acquired by the camera 140. As described above, the camera 140 does not acquire an image of the underside particles 22 present on the lower surface 12 of the glass 10. Thus, the controller 130 is configured to treat all detected particles as being present on the upper surface 11 of the glass 10.

5 圖示,根據一個具體實施例的偵測玻璃200的上表面上的粒子的方法(以下簡稱為「粒子偵測方法」)包含:放置鏡S201;計算入射光的入射角S202;旋轉鏡S203;獲取第一區域的影像S204;以及偵測粒子S205。As shown in FIG . 5 , a method for detecting particles on the upper surface of the glass 200 according to a specific embodiment (hereinafter referred to as "particle detection method") includes: placing a mirror S201; calculating an incident angle S202 of the incident light; Rotating the mirror S203; acquiring the image S204 of the first area; and detecting the particle S205.

在放置鏡S201中,鏡120被放置在光源110發出的光31的路徑上。鏡120反射光31以照射入射光32至玻璃10的上表面11。In the placement mirror S201, the mirror 120 is placed on the path of the light 31 emitted by the light source 110. The mirror 120 reflects the light 31 to illuminate the incident light 32 to the upper surface 11 of the glass 10.

在計算入射光的入射角S202中,計算入射光32的入射角θ為使得在從上方觀看時,第一區域41與第二區域42不彼此重疊。計算入射光32的入射角θ的方式,可與根據一個具體實施例的粒子偵測設備100相同。換言之,可基於玻璃10的折射率與厚度計算入射光32的入射角θ。再者,可基於水平距離L'的最大值計算入射光32的入射角θ。再者,可由方程式1計算水平距離L'的最大值。In the incident angle S202 at which the incident light is calculated, the incident angle θ of the incident light 32 is calculated such that the first region 41 and the second region 42 do not overlap each other when viewed from above. The manner in which the angle of incidence θ of the incident light 32 is calculated may be the same as that of the particle detecting apparatus 100 according to one embodiment. In other words, the incident angle θ of the incident light 32 can be calculated based on the refractive index and thickness of the glass 10. Furthermore, the incident angle θ of the incident light 32 can be calculated based on the maximum value of the horizontal distance L'. Furthermore, the maximum value of the horizontal distance L' can be calculated by Equation 1.

在旋轉鏡S203中,基於在計算入射光的入射角S202中計算出的入射角θ來旋轉鏡120。在一個具體實施例中,可在輸送玻璃10之前執行旋轉鏡S203。因此,因為在開始檢查玻璃10之前先控制鏡120的旋轉,可能減少檢查玻璃10所需的實際時間。In the rotating mirror S203, the mirror 120 is rotated based on the incident angle θ calculated in the incident angle S202 at which the incident light is calculated. In a specific embodiment, the rotating mirror S203 can be performed prior to transporting the glass 10. Therefore, since the rotation of the mirror 120 is controlled before starting to inspect the glass 10, it is possible to reduce the actual time required to inspect the glass 10.

在獲取第一區域的影像S204中,攝影機140獲取第一區域41的影像,同時玻璃10被輸送在水平方向中(例如向右方向)。因為已說明了根據一個具體實施例的粒子偵測設備100中的攝影機140的位置與功能,所以在此省略關於前述內容的特定說明。In the image S204 of the first region, the camera 140 acquires the image of the first region 41 while the glass 10 is conveyed in the horizontal direction (for example, to the right). Since the position and function of the camera 140 in the particle detecting apparatus 100 according to one embodiment have been explained, a detailed description about the foregoing is omitted herein.

在偵測粒子S205中,藉由分析在獲取第一區域的影像S202中所獲取的影像,來偵測粒子。特定而言,藉由在影像中尋找散射光34所顯示的亮部,來偵測粒子。在偵測粒子S205中偵測到的粒子,被視為存在玻璃10的上表面11上。In the detection particle S205, the particle is detected by analyzing the image acquired in the image S202 of the first region. In particular, the particles are detected by looking for bright portions displayed by the scattered light 34 in the image. The particles detected in the detecting particles S205 are considered to be present on the upper surface 11 of the glass 10.

6 圖示,根據一個具體實施例的照射入射光300的方法包含:放置鏡S301;計算入射光S302的入射角;以及旋轉鏡S303。在此具體實施例中,在玻璃10的折射率與厚度之至少一者改變時,執行計算入射光的入射角S302以及旋轉鏡S303。As illustrated in FIG . 6 , a method of illuminating incident light 300 according to a specific embodiment includes: placing a mirror S301; calculating an incident angle of the incident light S302; and rotating the mirror S303. In this embodiment, the incident angle S302 of the incident light and the rotating mirror S303 are performed when at least one of the refractive index and the thickness of the glass 10 is changed.

因為 6 中圖示的放置鏡S301與旋轉鏡S303,相同於 5 中圖示的放置鏡S201與旋轉鏡S203,在此省略關於前述內容的特定說明。Since the placement mirror S301 and the rotation mirror S303 illustrated in Fig . 6 are the same as the placement mirror S201 and the rotation mirror S203 illustrated in Fig . 5 , a detailed description about the foregoing is omitted herein.

在計算入射光的入射角S302中,基於玻璃10的折射率與厚度計算入射光32的入射角θ,使得在從上方觀看時,第一區域41與第二區域42不彼此重疊。計算入射光32的入射角θ的方式,可與根據一個具體實施例的粒子偵測設備100相同。換言之,可基於水平距離L'的最大值計算入射光32的入射角θ。再者,可由方程式1計算水平距離L'的最大值。In the incident angle S302 at which the incident light is calculated, the incident angle θ of the incident light 32 is calculated based on the refractive index and the thickness of the glass 10 such that the first region 41 and the second region 42 do not overlap each other when viewed from above. The manner in which the angle of incidence θ of the incident light 32 is calculated may be the same as that of the particle detecting apparatus 100 according to one embodiment. In other words, the incident angle θ of the incident light 32 can be calculated based on the maximum value of the horizontal distance L'. Furthermore, the maximum value of the horizontal distance L' can be calculated by Equation 1.

本揭示內容的技術想法,並不限於前述具體實施例以及附加圖式中圖示的範例。在本發明技術領域中具有通常知識者將顯然得知,在本揭示內容的技術想法的範圍內可能存在各種替換、修改以及改變。The technical idea of the present disclosure is not limited to the examples illustrated in the foregoing specific embodiments and additional drawings. It will be apparent to those skilled in the art of the present invention that various alternatives, modifications and variations are possible within the scope of the technical idea of the present disclosure.

根據一個具體實施例的偵測玻璃上表面上的粒子的方法與設備,經配置以計算入射光的最佳入射角,並基於所計算出的最佳入射角控制鏡的旋轉。因此,可能藉由僅使用一個攝影機,即能僅精確偵測玻璃上表面上的粒子。再者,根據照射入射光的方法,可能將具有最佳入射角的入射光,精確照射至玻璃的上表面。A method and apparatus for detecting particles on an upper surface of a glass according to a specific embodiment is configured to calculate an optimum angle of incidence of incident light and to control rotation of the mirror based on the calculated optimal angle of incidence. Therefore, it is possible to accurately detect only the particles on the upper surface of the glass by using only one camera. Further, according to the method of irradiating the incident light, it is possible to accurately irradiate the incident light having the optimum incident angle to the upper surface of the glass.

10‧‧‧玻璃
11‧‧‧上表面
12‧‧‧下表面
21‧‧‧上側粒子
22‧‧‧下側粒子
31‧‧‧光
32‧‧‧入射光
33‧‧‧經傳送光
34‧‧‧散射光
41‧‧‧第一區域
42‧‧‧第二區域
100‧‧‧粒子偵測設備
110‧‧‧光源
111‧‧‧聚焦透鏡
120‧‧‧鏡
121‧‧‧旋轉軸
130‧‧‧控制器
140‧‧‧攝影機
FOV‧‧‧視野
200‧‧‧粒子偵測方法
300‧‧‧照射入射角的方法
10‧‧‧ glass
11‧‧‧ upper surface
12‧‧‧ Lower surface
21‧‧‧Upper particles
22‧‧‧lower particles
31‧‧‧Light
32‧‧‧ incident light
33‧‧‧ transmitted light
34‧‧‧scattered light
41‧‧‧First area
42‧‧‧Second area
100‧‧‧ particle detection equipment
110‧‧‧Light source
111‧‧‧focus lens
120‧‧ ‧ mirror
121‧‧‧Rotary axis
130‧‧‧ Controller
140‧‧‧ camera
FOV‧‧ Vision
200‧‧‧ particle detection method
300‧‧‧Method of illuminating the angle of incidence

1 圖示根據一個具體實施例的偵測玻璃上表面上的粒子的設備的示意側視圖。 FIG 1 illustrates a schematic side view of a first device on the surface of particles of glass in accordance with the detection of a particular embodiment.

2 1 的部分放大圖。 FIG 2 is a first partially enlarged view of FIG.

3 2 的部分放大圖。 FIG 3 is a second partially enlarged view of FIG.

4 為圖示在使用 1 所示設備時,入射角與水平距離之間的關係的圖表。 Fig . 4 is a graph showing the relationship between the incident angle and the horizontal distance when the apparatus shown in Fig . 1 is used.

5 圖示根據一個具體實施例的偵測玻璃上表面上的粒子的方法的流程圖。 FIG 5 illustrates a flowchart of a method according to the particles on the surface of the glass on the detection of a particular embodiment.

6 圖示根據一個具體實施例的照射入射光的方法的流程圖。 Flowchart of a method illustrating a sixth embodiment of the incident light is irradiated to the specific embodiment.

國內寄存資訊 (請依寄存機構、日期、號碼順序註記) 無Domestic deposit information (please note according to the order of the depository, date, number)

國外寄存資訊 (請依寄存國家、機構、日期、號碼順序註記) 無Foreign deposit information (please note in the order of country, organization, date, number)

Claims (15)

一種偵測一玻璃的一上表面上的粒子的方法,包含以下步驟: 放置步驟,在一光源發出的一光的路徑上放置一可旋轉的鏡,使得該鏡反射該光以將一入射光照射至該上表面; 計算步驟,計算該入射光的一入射角,使得在從上方觀看時一第一區域與一第二區域不互相重疊,該第一區域為該入射光交會該玻璃的該上表面處,該第二區域為光傳送透過該玻璃且交會該玻璃的一下表面處; 旋轉步驟,基於該計算出的入射角旋轉該鏡; 獲取步驟,以放置在該第一區域上方的一攝影機獲取該第一區域的一影像;以及 偵測步驟,藉由分析該獲取到的影像來偵測粒子, 其中該偵測到的粒子被視為存在該上表面上。A method of detecting particles on an upper surface of a glass, comprising the steps of: placing a step of placing a rotatable mirror on a path of light emitted by a light source such that the mirror reflects the light to reflect an incident light Irradiating to the upper surface; calculating a period of incidence of the incident light such that a first region and a second region do not overlap each other when viewed from above, the first region being the incident light that intersects the glass At the upper surface, the second region is where light is transmitted through the glass and intersects the lower surface of the glass; a rotating step of rotating the mirror based on the calculated angle of incidence; a step of acquiring to place a portion above the first region The camera acquires an image of the first region; and a detecting step of detecting the particle by analyzing the acquired image, wherein the detected particle is regarded as being present on the upper surface. 如請求項1所述之方法,其中基於該玻璃的一折射角與一厚度計算該入射角。The method of claim 1, wherein the incident angle is calculated based on a refractive angle of the glass and a thickness. 如請求項2所述之方法,其中基於該第一區域的該右端與該第二區域的該左端之間的一水平距離的一最大值,來計算該入射角。The method of claim 2, wherein the incident angle is calculated based on a maximum value of a horizontal distance between the right end of the first region and the left end of the second region. 如請求項3所述之方法,其中基於下列方程式來計算該水平距離的該最大值:, 其中L'為水平距離, d為該玻璃的該厚度, n為該玻璃的該折射率, θ為該入射光的該入射角,且 W為該入射光的一寬度。The method of claim 3, wherein the maximum value of the horizontal distance is calculated based on the following equation: Where L' is the horizontal distance, d is the thickness of the glass, n is the refractive index of the glass, θ is the incident angle of the incident light, and W is a width of the incident light. 如請求項1所述之方法,其中旋轉該鏡的旋轉步驟係執行在輸送該玻璃之前。The method of claim 1, wherein the rotating step of rotating the mirror is performed prior to transporting the glass. 如請求項1所述之方法,其中該攝影機被安裝為使得該第一區域的該右端被定位在該攝影機的一視野的該右端處。The method of claim 1, wherein the camera is mounted such that the right end of the first area is positioned at the right end of a field of view of the camera. 如請求項1所述之方法,其中在該玻璃的一折射率與一厚度之至少一者改變時,執行計算該入射角的該計算步驟以及旋轉該鏡的該旋轉步驟。The method of claim 1, wherein the calculating step of calculating the incident angle and the rotating step of rotating the mirror are performed when at least one of a refractive index and a thickness of the glass is changed. 一種將一入射光照射至一玻璃的一上表面以偵測該上表面上的粒子的方法,包含以下步驟: 放置步驟,在一光源發出的一光的路徑上放置一可旋轉的鏡,使得該鏡反射該光以將該入射光照射至該上表面; 計算步驟,基於該玻璃的一折射率與一厚度計算該入射光的一入射角,使得在從上方觀看時一第一區域與一第二區域不互相重疊,該第一區域為該入射光交會該上表面處,該第二區域為光傳送透過該玻璃且交會該玻璃的一下表面處;以及 旋轉步驟,基於該計算出的入射角旋轉該鏡, 其中在該玻璃的一折射率與一厚度之至少一者改變時,執行計算該入射角的該計算步驟以及旋轉該鏡的該旋轉步驟。A method of irradiating an incident light onto an upper surface of a glass to detect particles on the upper surface, comprising the steps of: placing a step of placing a rotatable mirror on a path of light emitted by a light source such that The mirror reflects the light to illuminate the incident light onto the upper surface; and the calculating step calculates an incident angle of the incident light based on a refractive index and a thickness of the glass such that a first region and a The second regions do not overlap each other, the first region is where the incident light meets the upper surface, the second region is where the light is transmitted through the glass and intersects the lower surface of the glass; and the rotating step is based on the calculated incident The mirror is rotated angularly, wherein the calculating step of calculating the incident angle and the rotating step of rotating the mirror are performed when at least one of a refractive index and a thickness of the glass is changed. 如請求項8所述之方法,其中基於該第一區域的該右端與該第二區域的該左端之間的一水平距離的一最大值,來計算該入射角。The method of claim 8, wherein the incident angle is calculated based on a maximum value of a horizontal distance between the right end of the first region and the left end of the second region. 如請求項9所述之方法,其中基於下列方程式來計算該水平距離的該最大值:, 其中L'為水平距 d為該玻璃的該厚度, n為該玻璃的該折射率, θ為該入射光的該入射角,且 W為該入射光的該寬度。The method of claim 9, wherein the maximum value of the horizontal distance is calculated based on the following equation: Where L' is the horizontal distance d is the thickness of the glass, n is the refractive index of the glass, θ is the incident angle of the incident light, and W is the width of the incident light. 一種偵測一玻璃的一上表面上的粒子的設備,包含: 一光源,該光源經配置以發出光; 一可旋轉的鏡,該鏡放置在該光的一路徑上,且該鏡經配置以將一入射光的一入射角調整為照射至該上表面; 一控制器,該控制器經配置以控制該鏡的旋轉,使得在從上方觀看時一第一區域與一第二區域不互相重疊,該第一區域為該入射光交會該上表面處,該第二區域為光傳送透過該玻璃且交會該玻璃的一下表面處; 一攝影機,該攝影機經配置以獲取該第一區域的一影像, 其中該控制器經配置以藉由分析該所獲取的影像來偵測粒子,並將該等偵測到的粒子視為存在該上表面上。An apparatus for detecting particles on an upper surface of a glass, comprising: a light source configured to emit light; a rotatable mirror placed on a path of the light, the mirror configured Adjusting an incident angle of incident light to illuminate the upper surface; a controller configured to control rotation of the mirror such that a first region and a second region do not interact with each other when viewed from above Overlap, the first area is where the incident light meets the upper surface, the second area is where the light is transmitted through the glass and intersects the lower surface of the glass; a camera, the camera is configured to acquire one of the first areas An image, wherein the controller is configured to detect particles by analyzing the acquired image and to treat the detected particles as being present on the upper surface. 如請求項11所述之設備,其中該控制器經配置以基於該玻璃的一折射角與一厚度來控制該旋轉。The apparatus of claim 11, wherein the controller is configured to control the rotation based on a refractive angle and a thickness of the glass. 如請求項12所述之設備,其中該控制器經配置以基於該第一區域的一右端與該第二區域的一左端之間的一水平距離的一最大值,來控制該旋轉。The device of claim 12, wherein the controller is configured to control the rotation based on a maximum of a horizontal distance between a right end of the first region and a left end of the second region. 如請求項13所述之設備,其中基於下列方程式來計算該水平距離的該最大值:, 其中L'為水平距離, d為該玻璃的該厚度, n為該玻璃的該折射率, θ為該入射光的該入射角,且 W為該入射光的一寬度。The apparatus of claim 13, wherein the maximum value of the horizontal distance is calculated based on the following equation: Where L' is the horizontal distance, d is the thickness of the glass, n is the refractive index of the glass, θ is the incident angle of the incident light, and W is a width of the incident light. 如請求項11所述之方法,其中該攝影機經配置為使得該第一區域的該右端被定位在該攝影機的一視野的該右端處。The method of claim 11, wherein the camera is configured such that the right end of the first region is positioned at the right end of a field of view of the camera.
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