TW201806876A - Regenerative ion exchange device and operation method therefor - Google Patents

Abstract

According to the present invention, a supply pipe 3 for pretreated water W to be subjected to ion exchange is coupled to the upper part of a regenerative ion exchange column 1, whereas a discharge pipe 4 for ion exchange-treated water W1 is coupled to the lower part of the regenerative ion exchange column 1. A pipe 5 and a pipe 6 for respectively supplying a NaOH solution and hydrochloric acid (HCl), which are regeneration drug liquids, are respectively coupled to the supply pipe 3 and the discharge pipe 4. In addition, a discharge pipe 7 for waste water to be regenerated is coupled to a side section of a column body 1A. In addition, the discharge pipe 4 has a resistivity meter 8, and a sodium ion electrode 9 for measuring the sodium ion (Na+) concentration of the ion exchange-treated water W1. According to the regenerative ion exchange device, short-term fluctuations can be inhibited in the concentrations of sodium ions (Na+) and chloride ions (Cl-) in treated water in a secondary pure water system (sub-system) provided subsequent to the regenerative ion exchange device.

Description

Regenerative ion exchange device and operation method thereof

The invention relates to a regenerative ion exchange device used in a primary pure water system of an ultrapure water manufacturing equipment used in the process of manufacturing electronic products and the like, and in particular, to a method capable of suppressing a primary pure water system. A non-regenerable ion exchange device used in a later-stage subsystem or the like regenerates an ion exchange device that handles short-term fluctuations in ion concentration in water and a method of operating the same.

Ultra-pure water manufacturing equipment usually includes a pre-treatment system, a primary pure water system, and a secondary pure water system (subsystem). The pretreatment system includes coagulation, pressure floating (precipitation), filtration (membrane filtration) devices, etc., and removes suspended or colloidal substances in raw water. In this process, high molecular organics, hydrophobic organics, etc. can also be removed. In addition, the primary pure water system basically has a reverse osmosis (RO (Reverse osmosis)) membrane separation device and a regenerative ion exchange device (mixed bed type or 4 bed 5 tower type, etc.) to remove salts in the RO membrane separation device. At the same time, total organic carbon (TOC) of ionic and colloidal properties is removed. In a regenerative ion exchange device, salts are removed, and at the same time, TOC components that are adsorbed or ion exchanged by an ion exchange resin are removed.

Furthermore, the subsystem basically includes a low-pressure ultraviolet (UV) oxidation device, a non-regenerating mixed-bed ion exchange device, and an ultrafiltration (UF) membrane separation device, and further improves the purity of primary pure water to make ultra Pure water. In a low-pressure UV oxidation device, TOC is decomposed into an organic acid and further into CO ₂ using ultraviolet rays of 185 nm radiated from a low-pressure ultraviolet lamp. In addition, organic matter and CO ₂ generated by the decomposition are removed by a non-regenerating mixed-bed type ion exchange device at a later stage. In the UF membrane separation device, fine particles are removed, and particles flowing out of the ion exchange resin are also removed.

In the general ultrapure water production device, the regenerative ion exchange device of the primary pure water system includes one tower or a plurality of towers including a deaerator, so that it can be set to correspond to the required water quality of the treated water. The water treatment device usually has a reverse osmosis (RO) membrane device at the front stage. In addition, ultra-pure water can be produced by disposing a secondary pure water system (subsystem) including a non-regenerative ion exchange device at the rear stage of the regenerative ion exchange device.

The ion concentration of the treated water of the ion exchange device mainly removing ions in the water is determined by the concentration of the supplied water ion and the amount of treated water (space velocity and linear velocity). Previously, regenerative ion exchange devices set a threshold value for the resistivity (or conductivity) of the treated water, while repeatedly regenerating and taking water, while removing ions in the water. The ion exchange resin filled in such an ion exchange device removes ions in water electrochemically, but its capacity is limited. Therefore, in a regenerative ion exchange device, chemicals are periodically used to regenerate the ion exchange resin. Rebirth.

When regenerating an ion exchange resin filled in a regenerative ion exchange device, a chemical such as hydrochloric acid (HCl) or sodium hydroxide (NaOH) is used corresponding to the ion exchange resin filled in an anion exchange resin or a cation exchange resin. products, but these ions after the regeneration the regeneration chemical residues exchange resin, for removing the treated water is detected deionized water sodium (Na ⁺⁾ or chloride ion (Cl ^-).

[Problems to be Solved by the Invention] Recently, it has been found that there is a problem that the sodium ion (Na ⁺ ) concentration in the treated water of the non-regenerative ion exchange device of the subsystem (secondary pure water device) at the back of the regenerative ion exchange device is present. Or the fluctuation of the chloride ion (Cl ⁻ ) concentration becomes more and more obvious, which has an effect on the yield of semiconductor products manufactured by using the water for cleaning.

Accordingly, the present inventors have non-regenerative ion-exchange of sodium ions in water processing apparatus (Na ^+), or the concentration of chloride ion (Cl ^-) concentration change Cause were studied, it was found, remaining in the water system constituting a water treatment apparatus regenerative ion exchanger sodium ion (Na ^+), or the concentration of chloride ion (Cl ^-) ion concentration of non-regenerative subsystem latter stage of the water treatment apparatus exchange water impact, and by using The yield of a semiconductor product manufactured by washing with the water has an effect.

The present invention has been made in view of the above problems, and an object thereof is to provide a sodium pure ion (Na ⁺ ) or a chloride ion (Cl ^- ) A regenerative ion exchange device with short-term fluctuations in concentration and its operation method. [Means for solving problems]

In view of the above-mentioned object, first, the present invention provides a regenerative ion-exchange device having a regenerative ion-exchange tower alone, and the regenerative ion-exchange device has an ion concentration of treated water alone for the regenerative ion-exchange tower. Ion electrode for measurement (Invention 1).

According to the invention (Invention 1), when the regenerative ion exchange device constituting the primary pure water system is a separate regenerative ion exchange tower, not only the resistance of the treated water during regeneration of the treated water alone in the regenerative ion exchange tower is measured. The ion concentration (value measured using an ion electrode) is measured, and the adequacy of regeneration is controlled based on this. This allows the ion concentration of the subsystem flowing into the subsequent stage to be controlled, thereby suppressing non-regeneration that constitutes the subsystem. The short-term fluctuation of the ion concentration of the treated water of the type ion exchange device can also suppress the ion concentration itself to be low.

In addition, the present invention provides a regenerative ion exchange device including a plurality of towers including a plurality of regenerative ion exchange towers and a degassing device, and the regenerative ion exchange device includes An ion electrode for measuring the ion concentration of the treated water in the last column (Invention 2).

According to the invention (Invention 2), when the regenerative ion exchange device constituting the primary pure water system includes a plurality of towers including the regenerative ion exchange tower and the degassing device, not only the regenerative ion exchange tower in the last stage is measured. The specific resistance of the treated water at the time of regeneration is measured, and the ion concentration (value measured with an ion electrode) is measured, and the appropriateness of regeneration is managed based on this, thereby controlling the ion concentration flowing into the subsystem at the later stage. It is possible to suppress short-term fluctuations in the ion concentration of the treated water of the non-regenerating ion exchange device constituting the subsystem, and to suppress the ion concentration itself to be low.

In the invention (Invention 1, Invention 2), it is preferable that the regenerative ion exchange tower for measuring the ion concentration by the ion electrode is filled with at least an anion exchange resin, and the ion electrode is sodium ion for treated water. (Na ⁺ ) sodium ion electrode for measuring the concentration (Invention 3).

According to the invention (Invention 3), not only the resistivity of the treated water at the time of regeneration of the regeneration type ion exchange tower filled with the anion exchange resin is measured, but also the sodium ion (Na ⁺ ) concentration is measured using a sodium ion (Na ⁺ ) electrode. Based on the measured value, whether the regeneration is appropriate or not can be used to control the short-term fluctuation of the sodium ion (Na ⁺ ) concentration of the treated water in the non-regenerative ion exchange device of the subsystem at the later stage, and the ion concentration itself can also be controlled. Suppressed low.

Second, the present invention provides a method for operating a regenerative ion exchange device, which uses an ion electrode to measure the ion concentration of the regenerated treated water in a regenerative ion exchange device having a regenerative ion exchange tower alone, and based on the The ion concentration measured by the ion electrode controls the regeneration of the regenerative ion exchange tower (Invention 4). In addition, the present invention provides a method for operating a regenerative ion exchange device that uses an ion electrode to measure a column in the last stage of the regenerative ion exchange device including a plurality of columns including a plurality of regenerative ion exchange towers and a plurality of degassing devices. Regarding the ion concentration of the treated water after regeneration, the regeneration of the regenerative ion exchange tower is managed based on the ion concentration measured by the ion electrode (Invention 5).

According to the invention (Invention 4 and Invention 5), while regenerating the ion exchange tower and switching between water extraction, the measurement is performed not only on the resistivity of the treated water during regeneration but also on the ion concentration (values measured using ion electrodes). Based on this, whether the regeneration is appropriate or not is controlled, whereby the short-term fluctuation of the ion concentration existing in the treated water of the non-regenerative ion exchange device of the subsystem at the subsequent stage can be suppressed, and it can be suppressed low.

In the invention (Invention 4, Invention 5), it is preferable that the regenerative ion exchange tower for measuring the ion concentration by the ion electrode is at least filled with an anion exchange resin, and the ion electrode is a sodium ion (Na ⁺ ) The sodium ion electrode whose concentration is measured, and the sodium ion electrode is used to measure the sodium ion concentration of the treated water after the regeneration of the anion exchange resin to manage the regeneration of the regenerative ion exchange tower (Invention 6).

According to the invention (Invention 6), not only the resistivity of the treated water at the time of regeneration of the regeneration type ion exchange tower filled with the anion exchange resin is measured, but also the sodium ion (Na ⁺ ) concentration using the sodium ion (Na ⁺ ) electrode is measured. Based on the measured value, whether the regeneration is appropriate or not is controlled, thereby controlling the short-term fluctuation of the sodium ion (Na ⁺ ) concentration of the treated water of the non-regenerative ion exchange device of the subsystem at the later stage, and the ion concentration can also be adjusted. Self-inhibition is low. [Effect of the invention]

According to the present invention, not only the resistivity of the treated water at the time of taking water from the regenerative ion exchange tower, but also the ion concentration (a value measured using an ion electrode) is managed, so that it is possible to suppress the sub-stages of the regenerative ion exchange device. The non-regenerating ion exchange system of the system can process short-term fluctuations in the ion concentration in the treated water, and can suppress the ion concentration to be low. It is particularly preferable that the regeneration of the anion exchange resin is managed by a sodium ion electrode based on the sodium ion concentration. Thereby, the yield of the semiconductor product manufactured by cleaning using the obtained ultrapure water can be maintained high.

Hereinafter, a first embodiment of the regenerative ion exchange device of the present invention will be described in detail with reference to FIG. 1.

The regenerative ion exchange device shown in FIG. 1 is a state in which the regenerative ion exchange device includes a regenerative ion exchange tower alone. In the present embodiment, regarding the regenerative ion exchange tower 1, an ion exchange resin layer 2 formed of a mixed resin of a cation exchange resin and an anion exchange resin is arranged in a cylindrical tower body 1A. A supply pipe 3 for pretreatment water W for ion exchange treatment is connected to the upper part of the column body 1A, and a discharge pipe 4 for ion exchange treatment water W1 is connected to the lower part. Further, the supply pipes 3 and the discharge pipes 4 are respectively connected to a NaOH solution supply pipe 5 which is an alkali as a regenerating chemical solution, and an acid hydrochloric acid (HCl) supply pipe 6. Furthermore, a discharge pipe 7 for regenerating wastewater is connected to the side of the tower body 1A. The supply pipes 3, the discharge pipe 4, the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, and the regeneration waste water discharge pipe 7 are respectively provided with on-off valves. The discharge pipe 4 is provided with a resistivity meter 8 and a sodium ion electrode 9 as an ion electrode that measures the sodium ion (Na ⁺ ) concentration of the ion-exchange treated water W1. Note that in FIG. 1, reference numeral 10 denotes a heater (plate heat exchanger) provided in the NaOH solution supply pipe 5.

In the general regenerative ion exchange device, as the cation exchange resin constituting the ion exchange resin layer 2, a strongly acidic cation exchange resin having a fluorene group attached to the cation exchange group and a weakly acidic cation attached to a carboxylic acid group can be used. In any of the exchange resins, a gel-type resin is generally used in terms of little elution of PSA. In addition, in the cation exchange resin, divinylbenzene serves as a crosslinking agent, and a chain structure is crosslinked to form a resin having a mesh structure. The more divinylbenzene, the more the branches of the chain become denser, and if the divinylbenzene is small, a resin having a large mesh with few branches can be obtained. A resin used in general water treatment has a degree of crosslinking of about 8% and is referred to as a standard crosslinked resin. In contrast, a resin having a degree of crosslinking of 9% or more is referred to as a high degree of crosslinking resin. In this embodiment, any one can be used, but a standard crosslinked resin is preferred.

As the anion exchange resin, a gel-type resin is used in terms of less elution of PSA. A strong basic anion exchange resin having a quaternary ammonium group such as a trimethylammonium group or a dimethylethanolammonium group on a styrene skeleton based on a styrene-divinylbenzene copolymer or the like can be used. Divinylbenzene copolymer and the like are weakly basic anion exchange resins having a primary amine group to a tertiary amine group as functional groups on a styrene skeleton or a polyacrylic acid ester skeleton. Basic anion exchange resin. The exchange group of the anion exchange resin is preferably OH.

The mixing ratio of the cation exchange resin and the anion exchange resin in the mixed resin constituting the ion exchange resin layer 2 is preferably a cation exchange resin: the anion exchange resin is 30:70 to 70:30, and more preferably 30:70 to 50: In the 50 method, anion exchange resin is mixed in a large amount.

A method of operating the general regenerative ion exchange device will be described. First, in the water extraction mode, when the supply pipe 3 and the discharge pipe 4 are opened, and the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, and the discharge pipe 7 are closed, when the pretreatment water W flows downward from the supply pipe 3 When water is passed through the system, the pre-treated water W is removed from the discharge pipe 4 as the ion-exchange treated water W1 after the cationic component and the anionic component are removed from the ion exchange resin layer 2 formed of the mixed resin, and is supplied to an unillustrated water. Subsystem. The water-passing conditions at this time can be set to be the same as the normal ion-exchange treatment, as long as the space velocity is set to 5 h ^-1 to 100 h ^-1 with respect to the volume of the ion-exchange resin of the ion-exchange resin layer 2. It can be 5 h ^-1 to 50 h ^-1 .

When the resistivity of the ion-exchanged water W1 using the resistivity meter 8 exceeds a predetermined value, the ion-exchange energy of the ion-exchange resin layer 2 is considered to be lowered and switched to the regeneration mode, and mixing in the regeneration-type ion exchange tower 1 is performed. Regeneration of resin. In this regeneration mode, first, the ion exchange treated water W1 is supplied from the discharge pipe 4 and discharged from the supply pipe 3, and the mixed resin constituting the ion exchange resin layer 2 is backwashed. During this backwashing, the anion exchange resin was separated into the upper side and the cation exchange resin was separated into the lower side due to the slight difference in specific gravity between the anion exchange resin and the cation exchange resin.

Then, in a state where the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, and the regeneration wastewater discharge pipe 7 are opened, the sodium hydroxide aqueous solution is supplied from the NaOH solution supply pipe 5 to regenerate the anion exchange resin that is biased to the upper side. The supply pipe 6 supplies hydrochloric acid and regenerates the cation exchange resin that is biased to the lower side. In this case, in order to efficiently regenerate the anion exchange resin, the sodium hydroxide aqueous solution is preferably heated to about 30 ° C to 50 ° C by the heater 10. These sodium hydroxide aqueous solutions and hydrochloric acid-regenerated wastewater are discharged from the discharge pipe 7 of the recycled wastewater.

Then, in a state where the supply pipe 3 and the discharge pipe 4 are opened, and the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, and the regeneration waste water discharge pipe 7 are closed, the ion-exchanged treated water W1 is supplied from the supply pipe 3 and the discharge pipe 4 discharge, can be used in one-pass extrusion regeneration of the chemical solution (sodium hydroxide aqueous solution and hydrochloric acid). The regeneration operation thus far is preferably performed twice or more in a case where the resistivity of the ion-exchange treated water W1 is lowered or the sodium concentration is increased.

Next, when the separated ion-exchange resins constituting the ion-exchange resin layer 2 are mixed, the pre-treated water W is supplied from the supply pipe 3 and discharged from the discharge pipe 4 to produce ion-exchanged water W1, thereby circulating the ion-exchange resin. Cleaning. The ion exchange treated water W1 produced here is not supplied to the subsystem, and the sodium ion electrode 9 is used to measure the sodium ion (Na ⁺ ) concentration of the ion exchange treated water W1. If the cycle cleaning is insufficient, a large amount of sodium ions are contained in the ion-exchanged water W1 due to the NaOH solution used for regeneration. Therefore, when the sodium ion concentration becomes below a predetermined value, the regeneration is judged to be better, and the process ends. Regeneration operation, return to water intake mode. At this time, the appropriateness of regeneration can also be judged by both the sodium ion concentration and the resistivity of the ion-exchange treated water W1 using the resistivity meter 8. When the sodium ion concentration exceeds a predetermined value, the cycle cleaning may be continued. The regenerative ion exchange device can be operated by alternately performing the water extraction mode and the regeneration mode.

In this way, based on the sodium ion concentration, it is judged whether the regeneration of the anion exchange resin is appropriate or not. After the regeneration is determined to be good, the ion exchange treated water W1 is supplied to the subsystem, whereby ultrapure water (subsystem treated water) can be supplied. The sodium ion (Na ⁺ ) concentration is kept low to the desired value to stabilize it.

Next, a second embodiment of the regenerative ion exchange device of the present invention will be described with reference to FIG. 2. In this embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed descriptions thereof are omitted.

The regenerative ion exchange device shown in FIG. 2 is a state in which the regenerative ion exchange device includes a regenerative ion exchange tower alone. In this embodiment, the regenerative ion exchange tower 1 has an upward flow, and the cylindrical body 1A is separated from the upper side to form an anion exchange resin layer 2A and a cation exchange resin layer. In the two-layer ion exchange tower of 2B, a supply pipe 3 for pretreatment water W for ion exchange treatment is connected to the lower part of the tower body 1A, and an outlet pipe 4 for ion exchange treatment water W1 is connected to the upper part. A NaOH solution supply pipe 5 as an alkali for regenerating the chemical solution is connected to the discharge pipe 4, and a NaOH regeneration waste water discharge pipe 7A is connected to the side of the tower body 1A. On the other hand, a hydrochloric acid (HCl) supply pipe 6 as an acid is connected to the side of the tower body 1A, and a discharge pipe 7B of hydrochloric acid wastewater is connected to the supply pipe 3. These supply pipes 3, discharge pipes 4, NaOH solution supply pipes 5, hydrochloric acid supply pipes 6, NaOH regeneration waste water discharge pipes 7A, and hydrochloric acid waste water discharge pipes 7B are respectively provided with on-off valves. The discharge pipe 4 is provided with a resistivity meter 8 and a sodium ion electrode 9 that measures the sodium ion (Na ⁺ ) concentration of the ion-exchanged water W1. Note that 10 is a heater (plate heat exchanger) provided in the NaOH solution supply pipe 5, and 1B is a shielding plate having a plurality of holes smaller than the anion exchange resin constituting the anion exchange resin layer 2A.

A method of operating the general regenerative ion exchange device will be described. First, in the water extraction mode, when the supply pipe 3 and the discharge pipe 4 are opened, and the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, the NaOH regeneration wastewater discharge pipe 7A, and the hydrochloric acid wastewater discharge pipe 7B are closed, When the pre-treated water W is supplied by the supply pipe 3 in the lower part of the main body 1A and passed upward, the pre-treated water W removes cationic components in the cation exchange resin layer 2B, and then removes the anionic components in the anion exchange resin layer 2A As the ion-exchange treated water W1, it is supplied from the discharge pipe 4 to a subsystem (not shown). The water-passing conditions at this time can be set to be the same as that of a normal ion exchange process, as long as the space velocity is set to 5 h ^-1 to 100 h ^-1 with respect to the volume of the ion exchange resin, in particular, 5 h ^-1 to 50 h ^{-1 is} sufficient.

When the resistivity of the ion-exchanged treated water W1 using the resistivity meter 8 exceeds a predetermined value, the mode is switched to the regeneration mode, and the anion exchange resin layer 2A and the cation exchange resin layer 2B in the regenerative tower body 1A are regenerated. Regarding this regeneration, in a state where the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, the NaOH regeneration waste water discharge pipe 7A, and the hydrochloric acid waste water discharge pipe 7B are opened, an aqueous sodium hydroxide solution is supplied from the NaOH solution supply pipe 5 to exchange anions. The resin layer 2A is regenerated, and the regenerating chemical liquid is discharged from the NaOH regenerating wastewater discharge pipe 7A. In this case, in order to efficiently regenerate the anion exchange resin, the sodium hydroxide aqueous solution is preferably heated to about 30 ° C to 50 ° C by the heater 10. On the other hand, hydrochloric acid is supplied from the hydrochloric acid supply pipe 6 connected to the side of the tower body 1A to regenerate the cation exchange resin layer 2B, and the regeneration chemical solution is discharged from the hydrochloric acid wastewater discharge pipe 7B.

Then, the NaOH solution supply pipe 5 is supplied with the ion-exchanged treated water W1 and discharged from the NaOH regeneration wastewater discharge pipe 7A, and the NaOH solution for regeneration can be extruded in one pass. On the other hand, the solution is supplied from the hydrochloric acid supply pipe. 6 The ion-exchanged treated water W1 is supplied and discharged from the hydrochloric acid wastewater discharge pipe 7B, and the hydrochloric acid for regeneration can be extruded in one pass. So far, regeneration is preferably performed twice or more in a case where the resistivity of the ion-exchanged water W1 is lowered or the sodium concentration is increased. Then, in a state where the supply pipe 3 and the discharge pipe 4 are opened, and the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, the NaOH regeneration wastewater discharge pipe 7A, and the hydrochloric acid wastewater discharge pipe 7B are closed, the pretreatment water is supplied from the supply pipe 3 W is also discharged from the discharge pipe 4 to produce ion-exchanged treated water W1, thereby circulating cleaning of the ion-exchange resin.

The ion exchange treated water W1 produced here is not supplied to the subsystem, and the sodium ion electrode 9 is used to measure the sodium ion (Na ⁺ ) concentration of the ion exchange treated water W1. If the cycle cleaning is insufficient, a large amount of sodium ions are contained in the ion-exchanged water W1 due to the NaOH solution used for regeneration. Therefore, when the sodium ion concentration becomes below a predetermined value, the regeneration is judged to be better, and the process ends. Regeneration operation, return to water intake mode. At this time, the appropriateness of regeneration can also be judged by both the sodium ion concentration and the resistivity of the ion-exchange treated water W1 using the resistivity meter 8. When the sodium ion concentration exceeds a predetermined value, the cycle cleaning may be continued. The regenerative ion exchange device can be operated by alternately performing the water extraction mode and the regeneration mode.

In this way, based on the sodium ion concentration, it is judged whether the regeneration of the anion exchange resin is appropriate or not. After the regeneration is determined to be good, the ion exchange treated water W1 is supplied to the subsystem, whereby ultrapure water (subsystem treated water) can be supplied. The sodium ion (Na ⁺ ) concentration is kept low to the desired value to stabilize it.

Next, a third embodiment of the regenerative ion exchange device according to the present invention will be described with reference to FIG. 3. In this embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed descriptions thereof are omitted.

The regenerative ion exchange device shown in FIG. 3 is a state in which the regenerative ion exchange device includes a regenerative ion exchange tower alone. In this embodiment, the regenerative ion exchange tower 1 is passed upward, and the cation exchange resin layer 2B and the anion exchange resin layer are formed separately from the upper side in the cylindrical tower body 1A. In the two-layer ion exchange tower of 2A, a supply pipe 3 for pretreatment water W for ion exchange treatment is connected to the lower part of the tower body 1A, and an outlet pipe 4 for ion exchange treatment water W1 is connected to the upper part. Further, a hydrochloric acid (HCl) supply pipe 6 as an acid for regenerating the chemical solution is connected to the discharge pipe 4, and a discharge pipe 7B of hydrochloric acid wastewater is connected to the side of the tower body 1A. A NaOH solution supply pipe 5 as an alkali is connected to the side of the tower body 1A, and a NaOH regeneration wastewater discharge pipe 7A is connected to the supply pipe 3. These supply pipes 3, discharge pipes 4, NaOH solution supply pipes 5, hydrochloric acid supply pipes 6, NaOH regeneration waste water discharge pipes 7A, and hydrochloric acid waste water discharge pipes 7B are respectively provided with on-off valves. In addition, the discharge pipe 4 is provided with a resistivity meter 8 and a chloride ion electrode 9A that measures the chloride ion (Cl ⁻ ) concentration of the ion-exchange treated water W1. Note that 10 is a heater (plate heat exchanger) provided in the NaOH solution supply pipe 5, and 1B is a shielding plate having a plurality of holes smaller than the cation exchange resin constituting the cation exchange resin layer 2B.

A method of operating the general regenerative ion exchange device will be described. First, in the water extraction mode, when the supply pipe 3 and the discharge pipe 4 are opened, and the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, the NaOH regeneration wastewater discharge pipe 7A, and the hydrochloric acid wastewater discharge pipe 7B are closed, When the pre-treated water W is supplied by the supply pipe 3 in the lower part of the main body 1A and passed upward, the pre-treated water W removes anionic components in the anion exchange resin layer 2A, and then removes cationic components in the cation exchange resin layer 2B. The ion exchange treatment water W1 is discharged from the discharge pipe 4 and is supplied to a subsystem (not shown). The water-passing conditions at this time can be set to be the same as that of a normal ion exchange process, as long as the space velocity is set to 5 h ^-1 to 100 h ^-1 with respect to the volume of the ion exchange resin, in particular, 5 h ^-1 to 50 h ^{-1 is} sufficient.

When the resistivity of the ion-exchanged water W1 using the resistivity meter 8 exceeds a predetermined value, the mode is switched to the regeneration mode, and the anion exchange resin layer 2A and the cation exchange resin layer 2B of the regenerative ion exchange tower 1 are regenerated. Regarding this regeneration, the NaOH solution supply pipe 5 connected to the side of the tower body 1A was opened with the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, the NaOH regeneration wastewater discharge pipe 7A, and the hydrochloric acid wastewater discharge pipe 7B opened. The sodium hydroxide aqueous solution is supplied to regenerate the anion exchange resin layer 2A, and the regenerating chemical solution is discharged from the NaOH regeneration wastewater discharge pipe 7A. In this case, in order to efficiently regenerate the anion exchange resin, the sodium hydroxide aqueous solution is preferably heated to about 30 ° C to 50 ° C by the heater 10. On the other hand, hydrochloric acid is supplied from the hydrochloric acid supply pipe 6 in the upper part of the tower body 1A to regenerate the cation exchange resin layer 2B, and the regeneration chemical solution is discharged from the hydrochloric acid wastewater discharge pipe 7B.

Then, the ion-exchanged treated water W1 is supplied from the NaOH solution supply pipe 5 and discharged from the NaOH regeneration wastewater discharge pipe 7A, and the NaOH solution used in the regeneration is extruded in a one-pass manner. 6 The ion exchange process water W1 is supplied and the discharge pipe 7B of the hydrochloric acid wastewater is opened, and the hydrochloric acid used for regeneration is extruded in one pass. The regeneration so far is preferably performed two or more times in succession in the case where the resistivity of the ion-exchanged treated water W1 is lowered or the sodium concentration is increased. Then, in a state where the supply pipe 3 and the discharge pipe 4 are opened, and the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, the NaOH regeneration wastewater discharge pipe 7A, and the hydrochloric acid wastewater discharge pipe 7B are closed, the pretreatment water is supplied from the supply pipe 3 W is also discharged from the discharge pipe 4 to produce ion-exchanged treated water W1, thereby circulating cleaning of the ion-exchange resin. The ion exchange treated water W1 produced here is not supplied to the subsystem, and the chloride ion electrode 9A is used to measure the chloride ion (Cl ⁻ ) concentration of the ion exchange treated water W1. If the cycle cleaning is insufficient, a large amount of chloride ions are contained in the ion-exchanged water W1 due to the hydrochloric acid solution used for regeneration. Therefore, when the chloride ion concentration becomes a predetermined value or less, the regeneration is judged to be better and the process ends. Regeneration operation, return to water intake mode. The regenerative ion exchange device can be operated by alternately performing the water extraction mode and the regeneration mode.

In this way, it is not limited to the sodium ion concentration, and whether the regeneration of the cation exchange resin is appropriate or not is determined by the chloride ion concentration of the chloride ion electrode 9A. After it is judged that the regeneration is better, the ion exchange treatment water W1 is supplied to the subsystem. whereby the ultrapure water may be (water treatment subsystems) chlorine ions (Cl ^-) concentration is maintained low to give a desired value can be stabilized.

A fourth embodiment of the regenerative ion exchange device of the present invention will be described in detail with reference to Fig. 4.

The regenerative ion exchange device shown in FIG. 4 is a so-called two-bed three-column ion exchange device. The regenerative ion exchange device includes a two-layer regenerative cation exchange resin tower (H tower) 11 and a degassing device 12. And a two-layer regenerative anion exchange resin tower (OH tower) 13. A supply pipe 14 for pretreatment water W for ion exchange treatment is connected to the lower side of the H tower 11. On the other hand, a discharge pipe 15 for the ion exchange water W1 is connected to the upper side of the OH tower 13. A resistivity meter 16 and a sodium ion electrode 17 for measuring the sodium ion (Na ⁺ ) concentration of the ion-exchanged water W1 are provided. Further, an acidic hydrochloric acid (HCl) supply pipe 18 is connected to the upper side of the H tower 11, and a pretreated water W supply pipe 14 at the lower side of the H tower 11 is connected to a hydrochloric acid (HCl) wastewater discharge pipe 19. Furthermore, a NaOH solution supply pipe 20 as an alkali is connected to the upper side (discharge side) of the OH tower 13, and a NaOH solution discharge pipe 21 is connected to the lower side (supply side) of the OH tower 13. In addition, 22 is a heater (plate heat exchanger) provided in the NaOH solution supply pipe 20, and 23 is a pump for supplying the treated water processed by the deaerator 12 to the OH tower 13.

In the two-bed, three-tower ion exchange device, the H tower 11 has a two-layer structure of a weak cation exchange resin layer 11A and a strong cation exchange resin layer 11B, and the OH tower 13 becomes a weak anion exchange resin layer 13A and a strong anion exchange resin layer. 13B's two-layer structure. Furthermore, there are provided between the weak cation exchange resin layer 11A and the strong cation exchange resin layer 11B, the weak anion exchange resin layer 13A, and the strong anion exchange resin layer 13B, which are smaller than those of the anion exchange resin and the cation exchange resin. Masking hole (not shown).

Next, a method of operating the general regenerative ion exchange device will be described. First, in the water extraction mode, the pretreatment water W can be passed through the supply pipe 14. In the H tower 11, weakly acidic cation components are removed in the weak cation exchange resin layer 11A, and in the strong cation exchange resin layer 11B removal. The cationic component of the salt is removed in the degassing device 12 by removing carbon dioxide and other gases dissolved in the pretreatment water W, and further, in the OH tower 13, the weakly acidic anion component is removed in the weak anion exchange resin layer 13A, and The strong anion exchange resin layer 13B removes the anion component of the neutral salt, thereby producing ion-exchanged water W1. The ion-exchanged water W1 is further subjected to various treatments or fine particles are removed and supplied to the subsystem as necessary.

When the resistivity of the ion-exchange treated water W1 using the resistivity meter 16 exceeds a predetermined value, the mode is switched to the regeneration mode, and the flow path of the H tower 11 is switched on and the hydrochloric acid is supplied from the hydrochloric acid supply pipe 18 to the H tower 11 to thereby While regenerating the cation exchange resin layers 11A and 11B, it was discharged from the hydrochloric acid wastewater discharge pipe 19. On the other hand, it is appropriate to open and close the flow path of the OH tower 13 and supply the NaOH solution from the NaOH solution supply pipe 20, thereby regenerating the anion exchange resin layers 13A and 13B and discharging from the NaOH solution discharge pipe 21. At this time, in order to efficiently regenerate the anion exchange resin layers 13A and 13B, the sodium hydroxide aqueous solution is preferably heated to approximately 30 ° C to 50 ° C by the heater 22.

Then, ion exchanged water W1 is supplied from the hydrochloric acid supply pipe 18 to the H tower 11, and hydrochloric acid used for regeneration is extruded from the hydrochloric acid wastewater discharge pipe 19 in a one-pass type. On the other hand, ions are supplied from the upper side of the OH tower 13. The treated water W1 is exchanged, and the NaOH solution used for regeneration is extruded from the discharge pipe 21 of the NaOH solution in one pass. Next, the hydrochloric acid supply pipe 18 and the NaOH solution supply pipe 20 are closed, and the pretreatment water W is passed through the supply pipe 14 to perform circulating cleaning of the H tower 11, the deaerator 12, and the OH tower 13. The ion exchange treated water W1 produced here is not supplied to the subsystem, and the sodium ion electrode 17 is used to measure the sodium ion (Na ⁺ ) concentration of the ion exchange treated water W1. If the cycle cleaning is insufficient, a large amount of sodium ions are contained in the ion-exchanged water W1 due to the NaOH solution used for regeneration. Therefore, when the sodium ion concentration becomes below a predetermined value, it is judged that regeneration is better and the regeneration operation is ended. To return to the water intake mode. The regenerative ion exchange device can be operated by alternately performing the water extraction mode and the regeneration mode.

As described above, the present invention is not limited to the case where the regenerative ion exchange column is separately included, and an ion exchange process is provided for the regenerative anion exchange resin column (OH column) 13 which is the last stage of two or more regenerative ion exchange columns. The sodium ion electrode 17 for measuring the sodium ion concentration of water W1 similarly determines whether the anion exchange resin layers 13A and 13B are properly regenerated based on the sodium ion concentration, and supplies the ion exchange treated water W1 to the subsystem. This can control the sodium ion (Na ⁺ ) concentration of ultrapure water (subsystem treated water) to a desired value.

Next, a fifth embodiment of the regenerative ion exchange device of the present invention will be described in detail with reference to FIG. 5.

The regenerative ion exchange device shown in FIG. 5 is a so-called 3 bed 4 tower type ion exchange device. In this embodiment, the regenerative ion exchange device includes a two-layered first regenerative cation exchange resin column (H1 column) 31, a degassing device 32, a two-layered regenerative anion exchange resin column (OH column) 33, And a single-layer second regenerative cation exchange resin column (H2 column) 34. A supply pipe 35 for pretreatment water W for ion exchange treatment is connected to the lower side of H1 tower 31, and a discharge pipe 36 for ion exchange water W1 is connected to the lower side of H2 tower 34. A resistivity meter 37 and a chloride ion electrode 38 for measuring the chloride ion (Cl ⁻ ) concentration of the ion-exchanged water W1 are provided at 36. Furthermore, a hydrochloric acid (HCl) supply pipe 39 as an acid is connected to the upper side of the H2 tower 34, and a discharge pipe 40 of hydrochloric acid wastewater is connected to the discharge pipe 36. The discharge pipe 40 of the hydrochloric acid wastewater is connected to the upper side (discharge side) of the H1 tower 31, and the waste pipe 41 of the hydrochloric acid (HCl) wastewater is connected to the lower side (supply side) of the H1 tower 31. Furthermore, an NaOH solution supply pipe 42 as an alkali is connected to the upper side (discharge side) of the OH tower 33, and a discharge pipe 43 of NaOH regeneration wastewater is connected to the lower side (supply side) of the OH tower 33. Reference numeral 44 denotes a heater (plate heat exchanger) provided in the NaOH solution supply pipe 42, and reference numeral 45 denotes a pump for supplying the treated water processed by the deaerator 32 to the OH tower 33.

In the three-bed, four-tower ion exchange device, the H1 tower 31 has a two-layer structure of a weak cation exchange resin layer 31A and a strong cation exchange resin layer 31B, and the OH tower 33 becomes a weak anion exchange resin layer 33A and a strong anion exchange resin layer. 33B two-layer structure. Furthermore, a shielding plate (not shown) having a plurality of holes smaller than those of the anion exchange resin and the cation exchange resin is provided between the weak cation exchange resin layer 31A and the strong cation exchange resin layer 31B.

Even if it is an ion exchange device of the three-bed, four-tower type, the pre-treated water W is supplied from the H1 tower 31 and discharged from the H2 tower 34, so that the ion-exchanged treated water W1 can be produced, and the first to third In the fourth embodiment, reproduction is performed in the same manner. In addition, a chloride ion electrode 38 for measuring the chloride ion concentration of the ion exchange treated water W1 in the H2 column 34 which is the last stage of two or more regenerative ion exchange columns is provided based on the chloride ion concentration. By judging whether the regeneration of the cation exchange resin is appropriate or not, and supplying the ion exchange treated water W1 to the subsystem, the chloride ion concentration of the ultrapure water (subsystem treated water) can be controlled to a desired value. .

Further, a sixth embodiment of the regenerative ion exchange device of the present invention will be described in detail with reference to FIG. 6. In this embodiment, the same components as those in the fifth embodiment are denoted by the same reference numerals, and the detailed description is omitted.

The regenerative ion exchange device shown in FIG. 6 is a so-called 4 bed 5 tower type ion exchange device, and basically includes a regenerative cation exchange resin column of the 3 bed 4 tower type ion exchange device of the fifth embodiment. (H2 tower) A structure in which a second-stage regenerative anion exchange resin tower (OH2 tower) 46 of a single-layer type is provided at the latter stage of (H2 tower) 34. A drain pipe 36 of ion-exchanged water W1 is connected to the lower side of the OH2 tower 46. A resistivity meter 37 and sodium for measuring the sodium ion (Na ⁺ ) concentration of the ion-exchanged water W1 are provided in the drain pipe 36. Ionic electrode 38A. An NaOH solution supply pipe 47 as an alkali is connected to the upper side of the OH 2 tower 46, and a NaOH solution discharge pipe 48 is connected to the lower discharge pipe 36. The discharge pipe 48 is connected to the upper side (discharge side) of the first regenerative anion exchange resin tower (OH1 tower) 33 as a NaOH solution supply pipe, and to the lower side (supply side) of the OH1 tower 33 is connected a waste of NaOH regeneration wastewater. Tube 49.

Even if it is an ion exchange device of the four-bed, five-tower type, the pre-treated water W is supplied from the H1 tower 31 and discharged from the OH2 tower 46, so that the ion-exchanged treated water W1 can be produced. In the fifth embodiment, reproduction is performed in the same manner. The sodium ion electrode 38A for measuring the sodium ion concentration of the ion exchange water W1 of the OH2 column 46 which is the last stage of the two or more regenerative ion exchange columns is provided based on the sodium ion concentration. By judging whether the regeneration of the cation exchange resin is appropriate or not, and supplying the ion exchange treated water W1 to the subsystem, the chloride ion concentration of the ultrapure water (subsystem treated water) can be controlled to a desired value. .

The present invention has been described above with reference to the accompanying drawings. However, the present invention is not limited to the above-mentioned embodiments, and various modifications can be made. For example, the configuration of the regenerative ion exchange device is not limited to the above-mentioned embodiments, and various changes can be made. In addition, a well-known element for water treatment such as a reverse osmosis membrane separation device may be provided at the front stage of the regenerative ion exchange device. In addition, when the resistivity of the ion exchange treated water W1 using the resistivity meter exceeds a predetermined value, the mode is switched to the regeneration mode. However, the operation may be performed by regenerating the ion exchange treated water W1 in a predetermined volume. Furthermore, it is also possible to measure the timing of regeneration by other than a resistivity meter. [Example]

The present invention is further described in detail by the following specific examples.

[Example 1] In FIG. 1, "PK228L" (porous type) manufactured by Mitsubishi Chemical Corporation as a cation exchange resin and "PA312L" (porous type) manufactured by Mitsubishi Chemical Corporation as an anion exchange resin were filled with a cation exchange resin : Anion exchange resin = 1: 2 (volume ratio) mixed resin to form the ion exchange resin layer 2 to form a 1-column regenerative ion exchange device. In addition, as the resistivity meter 8, "MX-3" manufactured by Kurita Industry Co., Ltd. was used, and as the sodium ion (Na ⁺ ) electrode 9, "swan AMI Soditrace" manufactured by T & C technical company was used.

Regarding this one-column regenerative ion exchange device, first, in the water extraction mode, the pretreatment water W is passed through at a space velocity (SV) of 40 h ^-1 relative to the volume of the ion exchange resin layer 2. Thus, the resistivity and the sodium ion (Na ⁺ ) concentration of the ion-exchanged water W1 were measured. In addition, the ion-exchanged treated water W1 was supplied to a subsystem equipped with a non-regenerating ion-exchange device provided at a later stage, and the subsystem-treated water was analyzed using ICP-MS ("7500cs" manufactured by Agilent Technologies). Sodium concentration. In addition, as a non-regenerating ion exchange device, a cation exchange resin: anion exchange resin = 1: 1.6 (volume ratio) was used for filling, and water was passed at SV = 80 h ^-1 .

When the resistivity of the ion-exchanged water W1 using the resistivity meter 8 is less than 18.0 MΩ · cm, the water extraction is stopped, and the second mode is switched to the regeneration mode. The ion-exchanged water W1 is supplied from the discharge pipe 4 and discharged from the supply pipe 3. Thereby, the mixed resin constituting the ion exchange resin layer 2 is backwashed to separate the anion exchange resin into the upper side and the cation exchange resin into the lower side.

Then, in a state where the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, and the regeneration waste water discharge pipe 7 are opened, a 4% sodium hydroxide aqueous solution prepared from the NaOH solution supply pipe 5 is supplied to bias the anion exchange existing on the upper side. Resin is regenerated, and 5% industrial hydrochloric acid (HCl) prepared from the hydrochloric acid (HCl) supply pipe 6 is supplied to regenerate the cation exchange resin which is present on the lower side. The sodium hydroxide aqueous solution and the regeneration wastewater of hydrochloric acid are The discharge pipe 7 discharges. At this time, in order to efficiently regenerate the anion exchange resin, the sodium hydroxide aqueous solution was heated to 40 ° C. by the heater 10.

Next, in a state where the supply pipe 3 and the discharge pipe 4 are opened, and the NaOH solution supply pipe 5, the hydrochloric acid supply pipe 6, and the regeneration waste water discharge pipe 7 are closed, the ion exchange treatment water W1 is supplied from the discharge pipe 4 and discharged from the supply pipe 3. In this way, the chemical solution (sodium hydroxide aqueous solution and hydrochloric acid) used in the one-pass extrusion regeneration is used, and then the pretreatment water W is circulated to perform the cycle cleaning of the ion exchange resin. At this time, the resistivity of the treated water W1 was measured with a resistivity meter 8 and the sodium ion (Na ⁺ ) concentration was measured using a sodium ion electrode 9. The resistivity became 18.0 MΩ · cm or more, and the sodium ion (Na ⁺ ) concentration became At times below 300 ng / L, regeneration is considered complete and the regeneration operation is terminated.

Next, the regenerative ion exchange device is switched to the water extraction mode again, the pretreatment water W is circulated in the regenerative ion exchange device, and the water extraction is started again, and the ion exchange treatment water W1 is supplied to the non-regenerating ion provided at the rear stage. Subsystem of the switching device. When the resistivity of the treated water of the ion-exchanged treated water W1 by the resistivity meter 8 is less than 18.0 MΩ · cm, the water intake is stopped, and the operation of regenerating and water intake is repeated 8 times in the same manner. Table 1 shows the measurement results of the resistivity and the sodium ion (Na ⁺ ) concentration of the ion-exchanged water W1 after 12 hours from the start of taking water from the regenerative ion exchange device. In addition, the sodium ion (Na ⁺ ) concentration of the treated water of the non-regenerative ion exchange device provided at the subsequent stage at this time was measured. The results are shown in Table 2.

[Comparative Example 1] The sodium ion electrode 9 was not provided in Example 1. When the resistivity of the resistivity meter 8 became 18.0 MΩ · cm or more, the regeneration mode of the regenerative ion exchange device was terminated and switched to the water intake mode. In the type ion exchange device, the pretreatment water W is circulated and the water extraction is started again. The operation is similarly performed, and the regeneration and water extraction operations are repeated 8 times in the same manner. Table 1 shows the measurement results of the resistivity and the sodium ion (Na ⁺ ) concentration of the ion-exchange treated water W1 12 hours after the start of taking water from the regenerative ion exchange device. In addition, the sodium ion (Na ⁺ ) concentration of the treated water of the non-regenerative ion exchange device provided at the subsequent stage at this time was measured. The results are shown in Table 2 together.

[Reference Example] In Example 1, when the resistivity of the ion-exchanged water W1 of the regenerative ion exchange device was less than 18.0 MΩ · cm, regeneration was stopped and regeneration was performed in a regeneration mode. Regarding this regeneration, only the anion exchange resin and the cation exchange resin in the cation exchange resin separated by backwashing were regenerated with a 5% by-product hydrochloric acid (HCl) aqueous solution adjusted, and the resistivity at the time of cycle cleaning was 18.0 When the MΩ · cm or more and the sodium ion (Na ⁺ ) concentration became 300 ng / L or less, the regeneration operation was completed in the same manner except that the regeneration and water extraction operations were repeated 8 times in the same manner. When the sodium ion (Na ⁺ ) concentration of the ion-exchanged treated water W1 at the time of taking water was 500 ng / L or more, the regeneration operation was repeated twice. Table 1 shows the measurement results of the resistivity and the sodium ion (Na ⁺ ) concentration of the ion-exchange treated water W1 12 hours after the start of taking water from the regenerative ion exchange device. In addition, the sodium ion (Na ⁺ ) concentration of the treated water of the non-regenerative ion exchange device provided at the subsequent stage at this time was measured. The results are shown in Table 2 together.

[Comparative Example 2] In the reference example, the sodium ion electrode 9 is not provided. When the resistivity becomes 18.0 MΩ · cm or more, the regeneration mode of the regenerative ion exchange device is ended and switched to the water extraction mode. The pre-treatment water W was circulated and water extraction was started again, and the same operation was performed except that the regeneration and water extraction operations were repeated 8 times in the same manner. Table 1 shows the measurement results of the resistivity and the sodium ion (Na ⁺ ) concentration of the ion-exchange treated water W1 12 hours after the start of taking water from the regenerative ion exchange device. In addition, the sodium ion (Na ⁺ ) concentration of the treated water of the non-regenerative ion exchange device provided at the subsequent stage at this time was measured. The results are shown in Table 2 together.

[Table 1]

As is clear from Table 1, according to the operating method of the regenerative ion exchange device of Example 1, the appropriateness of the regeneration of the ion-exchanged treated water W1 is determined based on the sodium ion (Na ⁺ ) concentration measured by the sodium ion electrode 9. No, compared with the case where the sodium ion (Na ⁺ ) concentration can be controlled to 300 ng / L or less after 12 hours from the start of the water intake, as in Comparative Example 1 and Comparative Example 2, the resistivity may be controlled. The sodium ion (Na ⁺ ) concentration exceeds 300 ng / L, which cannot be fully controlled. In addition, when only the cation exchange resin is regenerated as in the reference example, the anion exchange resin cannot be regenerated, and therefore the sodium ion concentration is increased.

[Table 2]

As is clear from Table 2, according to the operating method of the regenerative ion exchange device of Example 1, the appropriateness of the regeneration of the ion-exchanged treated water W1 is determined based on the sodium ion (Na ⁺ ) concentration measured by the sodium ion electrode 9. No, it can be seen that the sodium ion (Na ⁺ ) concentration of the treated water of the non-regenerating ion exchange device of the subsystem in the subsequent stage can be controlled to be low and the fluctuation range can be controlled to be small.

From these results, it can be seen that by managing the water quality during regeneration of the regenerative ion exchange device based on the sodium ion (Na ⁺ ) concentration measured by the sodium ion electrode 9, the regeneration conditions can be reconsidered and the subsystems in the latter stage can be controlled. Short-term changes in the sodium ion (Na ⁺ ) concentration of treated water in a non-regenerative ion exchange device.

1‧‧‧ Regenerative ion exchange tower
1A‧‧‧Tower Body
1B‧‧‧shield
2‧‧‧ ion exchange resin layer
2A‧‧‧ anion exchange resin layer
2B‧‧‧ cation exchange resin layer
3, 14, 35‧‧‧ supply pipe
4, 15, 36‧‧‧ discharge pipe
5, 20, 42, 47‧‧‧NaOH solution supply tube
6, 18, 39‧‧‧ HCl supply pipe
7‧‧‧ Discharge pipe for reclaimed wastewater
7A‧‧‧NaOH wastewater discharge pipe
7B‧‧‧HCl (hydrochloric acid) wastewater discharge pipe
8, 16, 37‧‧‧‧ resistivity meter
9,17,38A‧‧‧Sodium ion electrode (ion electrode)
9A, 38‧‧‧ chloride ion electrode (ion electrode)
10, 22, 44 ‧‧‧ heater (plate heat exchanger)
11‧‧‧Two-layer type regenerative cation exchange resin tower (H tower)
11A, 31A‧‧‧‧Weak cation exchange resin layer
11B, 31B‧‧‧Strong cation exchange resin layer
12, 32‧‧‧ degassing device
13‧‧‧ two-layer regenerative anion exchange resin tower (OH tower)
13A, 33A‧‧‧ Weak anion exchange resin layer
13B, 33B‧‧‧‧ Strong anion exchange resin layer
19, 40‧‧‧ Discharge pipe of hydrochloric acid (HCl) wastewater
21, 48‧‧‧NaOH solution discharge pipe
23, 45‧‧‧ pump
31‧‧‧Two-layer type first regeneration cation exchange resin tower (H1 tower)
33‧‧‧Regenerating anion exchange resin tower (OH tower)
34‧‧‧Second regeneration cation exchange resin tower (H2 tower)
41‧‧‧ Discarded pipe of hydrochloric acid (HCl) wastewater
43‧‧‧NaOH wastewater discharge pipe
46‧‧‧Second regeneration anion exchange resin tower (OH2 tower)
49‧‧‧NaOH waste pipe
W‧‧‧ pre-treated water
W1‧‧‧Ion exchange treated water

FIG. 1 is a schematic system diagram showing a regenerative ion exchange device according to a first embodiment of the present invention. FIG. 2 is a schematic system diagram showing a regenerative ion exchange device according to a second embodiment of the present invention. Fig. 3 is a schematic system diagram showing a regenerative ion exchange device according to a third embodiment of the present invention. FIG. 4 is a schematic system diagram showing a regenerative ion exchange device according to a fourth embodiment of the present invention. Fig. 5 is a schematic system diagram showing a regenerative ion exchange device according to a fifth embodiment of the present invention. Fig. 6 is a schematic system diagram showing a regenerative ion exchange device according to a sixth embodiment of the present invention.

1‧‧‧ Regenerative ion exchange tower

1A‧‧‧Tower Body

2‧‧‧ ion exchange resin layer

3‧‧‧ supply tube

4‧‧‧ discharge pipe

5‧‧‧NaOH solution supply tube

6‧‧‧ Hydrochloric acid (HCl) supply tube

7‧‧‧ Discharge pipe for reclaimed wastewater

8‧‧‧ Resistivity Meter

9‧‧‧ Sodium ion electrode

10‧‧‧heater (plate heat exchanger)

W‧‧‧ pre-treated water

W1‧‧‧Ion exchange treated water

Claims (6)

A regenerative ion-exchange device includes a regenerative ion-exchange tower alone, and the regenerative ion-exchange device includes an ion electrode for measuring an ion concentration of treated water alone in the regenerative ion-exchange tower. A regenerative ion exchange device includes a plurality of towers including a plurality of regenerative ion exchange towers and a degassing device. The regenerative ion exchange device is provided with a column for the last stage of the plurality of regenerative ion exchange towers. An ion electrode for measuring the ion concentration of treated water. The regenerative ion exchange device according to item 1 or 2 of the scope of application for a patent, wherein the regenerative ion exchange tower for measuring the ion concentration by the ion electrode is filled with at least an anion exchange resin, and the ion electrode is A sodium ion electrode that measures the sodium ion (Na ⁺ ) concentration of the treated water. A method for operating a regenerative ion exchange device, wherein an ion electrode is used to measure the ion concentration of regenerated treated water in a regenerative ion exchange device having a regenerative ion exchange tower alone, and is based on the ion electrode measured. Ion concentration controls the regeneration of regenerative ion exchange towers. A method for operating a regenerative ion exchange device using an ion electrode to measure post-regeneration treatment of a column in the last stage of a regenerative ion exchange device including a plurality of regenerative ion exchange towers and a plurality of columns of a degassing device. The ion concentration of water manages the regeneration of a regenerative ion exchange tower based on the ion concentration measured by the ion electrode. The method for operating a regenerative ion exchange device according to item 4 or 5 of the scope of patent application, wherein the regenerative ion exchange tower for measuring the ion concentration by the ion electrode is filled with at least an anion exchange resin, and The ion electrode is a sodium ion electrode for measuring sodium ion (Na ⁺ ) concentration, and the sodium ion electrode is used to measure the sodium ion concentration of the treated water after regeneration of the anion exchange resin to manage a regenerative ion exchange tower. Regeneration.