TWI814710B - Water quality management system and operation method of water quality management system - Google Patents
Water quality management system and operation method of water quality management system Download PDFInfo
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- TWI814710B TWI814710B TW106130620A TW106130620A TWI814710B TW I814710 B TWI814710 B TW I814710B TW 106130620 A TW106130620 A TW 106130620A TW 106130620 A TW106130620 A TW 106130620A TW I814710 B TWI814710 B TW I814710B
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 363
- 238000003326 Quality management system Methods 0.000 title claims abstract description 48
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- 239000011734 sodium Substances 0.000 abstract description 36
- FKNQFGJONOIPTF-UHFFFAOYSA-N Sodium cation Chemical compound [Na+] FKNQFGJONOIPTF-UHFFFAOYSA-N 0.000 abstract description 29
- 229910021642 ultra pure water Inorganic materials 0.000 abstract description 9
- 239000012498 ultrapure water Substances 0.000 abstract description 9
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 8
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- 125000000129 anionic group Chemical group 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- GCTOSMYFALESJI-UHFFFAOYSA-N azane;2-methylpropan-2-ol Chemical group N.CC(C)(C)O GCTOSMYFALESJI-UHFFFAOYSA-N 0.000 description 1
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- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical group CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 1
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- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
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- B01J39/08—Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
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- B01J41/08—Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
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- B01J41/14—Macromolecular compounds obtained by reactions only involving unsaturated carbon-to-carbon bonds
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- B01J49/70—Regeneration or reactivation of ion-exchangers; Apparatus therefor for large scale industrial processes or applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
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Abstract
一種水質管理系統10,其包括:再生式離子交換裝置1;水質測定裝置2,具有離子濃度計22;第1排出管3,供自再生式離子交換裝置1排出的處理水W1流通;以及第2排出管4,經由自動閥5而自第1排出管3分支,且將處理水W1供給至水質測定裝置2。根據所述水質管理系統,可穩定地降低自用於超純水製造裝置的一次純水系統的再生式離子交換裝置排出的處理水中的鈉離子(Na+ )或氯化物離子(Cl- )的濃度,而且,可抑制自用於後段的子系統的非再生式離子交換裝置排出的處理水中的鈉離子(Na+ )濃度或氯化物離子(Cl- )濃度的短期變動。A water quality management system 10, which includes: a regenerative ion exchange device 1; a water quality measuring device 2 having an ion concentration meter 22; a first discharge pipe 3 for circulating treated water W1 discharged from the regenerative ion exchange device 1; and a first discharge pipe 3. 2. The discharge pipe 4 branches from the first discharge pipe 3 via the automatic valve 5 and supplies the treated water W1 to the water quality measuring device 2. According to the water quality management system, the concentration of sodium ions (Na + ) or chloride ions (Cl - ) in the treated water discharged from the regenerative ion exchange device of the primary pure water system used in the ultrapure water production device can be stably reduced. , and can suppress short-term fluctuations in the sodium ion (Na + ) concentration or the chloride ion (Cl - ) concentration in the treated water discharged from the non-regenerative ion exchange device used in the subsequent subsystem.
Description
本發明是有關於一種水質管理系統及該系統的運轉方法,其是對自再生式離子交換裝置、特別是自用於製造電子製品等的過程中的超純水製造裝置的一次純水系統中使用的再生式離子交換裝置排出的處理水的水質進行管理。 The present invention relates to a water quality management system and an operation method of the system, which are used in a primary pure water system of a self-regeneration ion exchange device, especially an ultrapure water manufacturing device used in the process of manufacturing electronic products, etc. Manage the quality of the treated water discharged from the regenerative ion exchange device.
超純水製造裝置通常包括前處理系統、一次純水系統、二次純水系統(子系統)。前處理系統包括凝聚、加壓浮上(沈澱)、過濾(膜過濾)裝置等,並進行原水中的懸浮物質或膠體物質的去除。於前處理系統的處理過程中亦可去除高分子系有機物、疏水性有機物等。一次純水系統基本上包括逆滲透(RO(Reverse osmosis))膜分離裝置及再生型離子交換裝置(混床式或4床5塔式等)。於RO膜分離裝置中,去除鹽類,並且去除離子性、膠體性的總有機碳(Total organic carbon,TOC)成分。於再生型離子交換裝置中,去除鹽類,並且亦去除藉由離子交換樹脂進行吸附或離子交換的TOC成分。 Ultrapure water manufacturing equipment usually includes a pre-treatment system, a primary pure water system, and a secondary pure water system (subsystem). The pre-treatment system includes coagulation, pressurized flotation (sedimentation), filtration (membrane filtration) devices, etc., and removes suspended substances or colloidal substances in raw water. During the treatment process of the pre-treatment system, polymeric organic matter, hydrophobic organic matter, etc. can also be removed. The primary pure water system basically includes a reverse osmosis (RO (Reverse osmosis)) membrane separation device and a regenerative ion exchange device (mixed bed type or 4-bed, 5-tower type, etc.). In the RO membrane separation device, salts are removed, and ionic and colloidal total organic carbon (TOC) components are removed. In the regenerative ion exchange device, salts are removed, and TOC components adsorbed or ion exchanged by the ion exchange resin are also removed.
子系統基本上包括低壓紫外線(UltraViolet,UV)氧化裝置、非再生型混床式離子交換裝置及超濾(Ultrafiltration,UF)膜分離裝置,並藉由進一步提高一次純水的純度來製造超純水。於低壓UV氧化裝置中,利用自低壓紫外線燈所照射的185nm的紫 外線將TOC成分分解為有機酸、進而分解為CO2。藉由分解而生成的有機物及CO2利用後段的非再生型混床式離子交換裝置而去除。於UF膜分離裝置中,去除微粒子,並且亦去除離子交換樹脂的流出粒子。 The subsystem basically includes a low-pressure ultraviolet (UV) oxidation device, a non-regenerative mixed-bed ion exchange device and an ultrafiltration (UF) membrane separation device, and further improves the purity of primary water to create ultrapure water. water. In the low-pressure UV oxidation device, the TOC component is decomposed into organic acids and further into CO 2 using ultraviolet light of 185 nm irradiated from a low-pressure ultraviolet lamp. The organic matter and CO 2 generated by decomposition are removed using the non-regenerative mixed-bed ion exchange device in the subsequent stage. In the UF membrane separation device, fine particles are removed, and the outflow particles of the ion exchange resin are also removed.
所述般的超純水製造裝置中,用於一次純水系統的再生式離子交換裝置與所要求的處理水的水質相對應地包括1塔或包含脫氣裝置的多個塔,通常於前段具有逆滲透(RO)膜裝置。而且,於該再生式離子交換裝置的後段設有包括非再生式離子交換裝置的子系統。 In the above-mentioned ultrapure water production device, the regenerative ion exchange device used in the primary pure water system includes one tower or multiple towers including degassing devices according to the required water quality of the treated water, usually in the front stage. Equipped with reverse osmosis (RO) membrane device. Furthermore, a subsystem including a non-regenerative ion exchange device is provided at the rear of the regenerative ion exchange device.
先前,於所述般的再生式離子交換裝置中,一面重複進行取水與再生,一面以電化學的方式去除水中的離子類。再者,所謂再生,於離子交換裝置的離子交換的功能降低的情況下,使填充至離子交換裝置中的陰離子交換樹脂或陽離子交換樹脂等離子交換樹脂與鹽酸(HCl)或氫氧化鈉(NaOH)等再生化學品接觸來進行再生。利用主要去除被處理水中的離子類的離子交換裝置進行處理的處理水的離子濃度由所供給的被處理水的離子濃度與處理水量(空間速度與線速度)來決定,因此通常於所述般的再生式離子交換裝置中對處理水的電阻率(或導電度)設定臨限值,於超過該臨限值的時刻藉由再生化學品進行離子交換樹脂的再生。然而,因殘存於再生後的離子交換樹脂中的再生化學品而導致於去除離子後 的取水時的處理水中存在鈉離子(Na+)或氯化物離子(Cl-)。 Previously, in the above-mentioned regenerative ion exchange device, water intake and regeneration were repeated while ions in the water were electrochemically removed. Furthermore, regeneration means that when the ion exchange function of the ion exchange device is reduced, an ion exchange resin such as an anion exchange resin or a cation exchange resin filled in the ion exchange device is mixed with hydrochloric acid (HCl) or sodium hydroxide (NaOH). Wait for regeneration chemicals to come into contact for regeneration. The ion concentration of the treated water treated with an ion exchange device that mainly removes ions from the treated water is determined by the ion concentration of the supplied treated water and the amount of treated water (space velocity and linear velocity). Therefore, it is usually as described above. In the regenerative ion exchange device, a threshold value is set for the resistivity (or conductivity) of the treated water, and the ion exchange resin is regenerated by regeneration chemicals when the threshold value is exceeded. However, due to the regeneration chemicals remaining in the regenerated ion exchange resin, sodium ions (Na + ) or chloride ions (Cl − ) are present in the treated water when taking water after removing ions.
最近,可知存在如下擔憂:子系統中所使用的非再生式離子交換裝置中,處理水中的鈉離子(Na+)濃度或氯化物離子(Cl-)濃度的短期變動越來越明顯,並且於將該非再生式離子交換裝置的處理水用於半導體製品的清洗的情況下,導致所製造的半導體製品的良率降低。 Recently, it has been found that there is a concern that short-term fluctuations in the concentration of sodium ions (Na + ) or chloride ions (Cl - ) in the treated water are becoming more and more obvious in non-regenerative ion exchange devices used in subsystems, and in When the treated water of the non-regenerative ion exchange device is used for cleaning semiconductor products, the yield of the manufactured semiconductor products is reduced.
因此,本發明者對自所述般的再生式離子交換裝置排出的處理水中的鈉離子(Na+)濃度或氯化物離子(Cl-)濃度變動的原因進行了研究,結果可知,一次純水系統中所使用的再生式離子交換裝置的處理水的鈉離子(Na+)濃度或氯化物離子(Cl-)濃度對後段的子系統中所使用的非再生式離子交換裝置的處理水的水質產生影響。 Therefore, the present inventors studied the causes of changes in the concentration of sodium ions (Na + ) or chloride ions (Cl - ) in the treated water discharged from the above-mentioned regenerative ion exchange device. As a result, it was found that primary pure water The sodium ion (Na + ) concentration or chloride ion (Cl - ) concentration of the treated water of the regenerative ion exchange device used in the system affects the quality of the treated water of the non-regenerative ion exchange device used in the subsequent subsystem. Make an impact.
本發明是鑒於所述課題而成者,其目的在於提供一種水質管理系統及水質管理系統的運轉方法,其可穩定地降低自用於超純水製造裝置的一次純水系統的再生式離子交換裝置排出的處理水中的鈉離子(Na+)或氯化物離子(Cl-)的濃度,而且,可抑制自用於後段的子系統的非再生式離子交換裝置排出的處理水中的鈉離子(Na+)濃度或氯化物離子(Cl-)濃度的短期變動。 The present invention was made in view of the above problems, and its object is to provide a water quality management system and an operation method of the water quality management system that can stably reduce the cost of a regenerative ion exchange device in a primary pure water system used in an ultrapure water production device. The concentration of sodium ions (Na + ) or chloride ions (Cl - ) in the discharged treated water can be suppressed, and the sodium ions (Na + ) in the treated water discharged from the non-regenerative ion exchange device used in the subsequent subsystem can be suppressed. Concentration or short-term changes in chloride ion (Cl - ) concentration.
為了解決所述課題,第一,本發明提供一種水質管理系統,其包括:再生式離子交換裝置;水質測定裝置,具有離子濃度計;第1排出管,供自所述再生式離子交換裝置排出的處理水流 通;以及第2排出管,自所述第1排出管分支,將所述處理水供給至所述水質測定裝置(發明1)。 In order to solve the above problems, first, the present invention provides a water quality management system, which includes: a regenerative ion exchange device; a water quality measuring device having an ion concentration meter; and a first discharge pipe for discharge from the regenerative ion exchange device. of treatment flow and a second discharge pipe branched from the first discharge pipe to supply the treated water to the water quality measuring device (Invention 1).
根據所述發明(發明1),利用水質測定裝置,不僅可測定自再生式離子交換裝置排出的處理水的電阻率,而且亦可測定離子濃度,因此藉由基於該測定值來管理離子交換樹脂的再生的適當與否,可穩定地降低處理水中的離子濃度,而且,可抑制自用於後段的子系統的非再生式離子交換裝置排出的處理水中的離子濃度的短期變動。另外,水質測定裝置例如經由自動閥而連接於自第1排出管分支的第2排出管而並非設於第1排出管上,藉此可根據自動閥的切換操作在視需要的時機來簡單地測定處理水的水質。 According to the invention (Invention 1), the water quality measuring device can measure not only the resistivity of the treated water discharged from the regenerative ion exchange device, but also the ion concentration. Therefore, the ion exchange resin can be managed based on the measured value. Whether the regeneration is appropriate or not, the ion concentration in the treated water can be stably reduced, and short-term fluctuations in the ion concentration in the treated water discharged from the non-regenerative ion exchange device used in the subsequent subsystem can be suppressed. In addition, the water quality measuring device is connected to the second discharge pipe branched from the first discharge pipe via an automatic valve, for example, instead of being provided on the first discharge pipe. This allows the water quality measuring device to be easily connected at the necessary timing according to the switching operation of the automatic valve. Determine the quality of treated water.
所述發明(發明1)中,較佳為於所述再生式離子交換裝置具有多個再生式離子交換塔的情況下,將自所述再生式離子交換裝置的最後段的再生式離子交換塔流出的流出水設為所述處理水(發明2)。 In the invention (Invention 1), when the regenerative ion exchange device has a plurality of regenerative ion exchange towers, it is preferable that the regenerative ion exchange tower from the last stage of the regenerative ion exchange device The effluent water flowing out is the treated water (invention 2).
於再生式離子交換裝置具有多個再生式離子交換塔的情況下,為了降低流入後段的子系統中的被處理水中的離子濃度,只要降低最後段的再生式離子交換塔的處理水中的離子濃度即可。根據所述發明(發明2),將最後段的再生式離子交換塔的流出水設為處理水,測定離子濃度(及電阻率),並基於該測定值來管理離子交換樹脂的再生的適當與否,藉此可穩定地降低處理水中的離子濃度,而且,可抑制自用於後段的子系統的非再生式離子交換 裝置排出的處理水中的離子濃度的短期變動。 When the regenerative ion exchange device has a plurality of regenerative ion exchange towers, in order to reduce the ion concentration in the treated water flowing into the subsequent subsystem, it is only necessary to reduce the ion concentration in the treated water of the last regenerative ion exchange tower. That’s it. According to the invention (Invention 2), the effluent of the last stage regenerative ion exchange tower is used as treated water, the ion concentration (and resistivity) is measured, and the appropriateness and regeneration of the ion exchange resin are managed based on the measured values. No, this can stably reduce the ion concentration in the treated water and suppress non-regenerative ion exchange from the subsystem used in the subsequent stage. Short-term changes in ion concentration in the treated water discharged from the device.
所述發明(發明1、發明2)中,較佳為包括自動地切換運轉模式的自動切換控制機構,所述運轉模式包含用以對所述處理水進行取水的取水模式、與用以使所述再生式離子交換裝置再生的再生模式,所述自動切換控制機構與所述水質測定裝置的測定值相對應地,進行所述運轉模式的自動切換控制(發明3)。
In the invention (
根據所述發明(發明3),可利用水質測定裝置測定自再生式離子交換裝置排出的處理水的離子濃度(及電阻率),與該測定值相對應地將再生式離子交換裝置的運轉模式自動地切換為取水模式或再生模式,因此可適當地管理再生式離子交換裝置的再生,而且可控制流入後段的子系統中的被處理水中的離子濃度。 According to the invention (Invention 3), the ion concentration (and resistivity) of the treated water discharged from the regenerative ion exchange device can be measured using a water quality measuring device, and the operation mode of the regenerative ion exchange device can be determined in accordance with the measured value. Automatically switches to water intake mode or regeneration mode, so the regeneration of the regenerative ion exchange device can be appropriately managed, and the ion concentration of the treated water flowing into the subsequent subsystem can be controlled.
所述發明(發明1~發明3)中,較佳為包括N個(N為2以上的整數)並列設置的所述再生式離子交換裝置、與N個以下的並列設置的所述水質測定裝置,且構成為可將自所述N個再生式離子交換裝置的各個排出的各處理水供給至所述N個以下的水質測定裝置的各個(發明4)。
In the invention (
先前的測定離子濃度的離子濃度計根據個體差而其測定值在數百ng/L水準的濃度範圍內產生偏差。因而,於並列設置有多個再生式離子交換裝置的情況下,若為了對各系列測定處理水的離子濃度而設置離子濃度計,則會產生如下狀況:各離子濃度計的校正與交叉校驗需要時間,導致無法於視需要的時機適當地進行處理水的水質的管理。根據所述發明(發明4),即便於並列 設置有N個(N為2以上的整數)再生式離子交換裝置的情況下,亦可利用一個水質管理系統在視需要的時機選擇特定的再生式離子交換裝置來進行水質的測定,因此與對每個再生式離子交換裝置設置離子濃度計(水質測定裝置)的情況相比,能夠使處理水的水質的管理簡單且抑制了離子濃度的處理水穩定地流入後段的子系統。另外,可利用一個水質管理系統來管理多個再生式離子交換裝置的水質,因此無須對每個再生式離子交換裝置設置離子濃度計(水質測定裝置),就所述方面而言,經濟的效果亦大。該效果於水質測定裝置的個數小於再生式離子交換裝置的個數的情況下特別明顯。 Conventional ion concentration meters that measure ion concentrations have deviations in their measured values within a concentration range of hundreds of ng/L due to individual differences. Therefore, when a plurality of regenerative ion exchange devices are installed in parallel, if an ion concentration meter is installed to measure the ion concentration of the treated water for each series, the following situation will arise: Calibration and cross-checking of each ion concentration meter It takes time, making it impossible to properly manage the quality of the treated water at the required timing. According to the invention (Invention 4), it is possible to parallel When N (N is an integer of 2 or more) regenerative ion exchange devices are installed, one water quality management system can be used to select a specific regenerative ion exchange device at the necessary timing to measure the water quality. Compared with the case where an ion concentration meter (water quality measuring device) is provided for each regenerative ion exchange device, the management of the water quality of the treated water can be simplified, and the treated water with suppressed ion concentration can flow stably into the subsequent subsystem. In addition, one water quality management system can be used to manage the water quality of multiple regenerative ion exchange devices, so there is no need to install an ion concentration meter (water quality measuring device) for each regenerative ion exchange device. In this regard, the economical effect is Also large. This effect is particularly noticeable when the number of water quality measuring devices is smaller than the number of regenerative ion exchange devices.
第二,本發明提供一種水質管理系統的運轉方法,其為所述發明1至所述發明4的任一發明中所述的水質管理系統的運轉方法,所述水質管理系統的運轉方法包括:利用所述離子濃度計來測定所述處理水的離子濃度的步驟;以及基於所述測定的離子濃度的測定值,來自動切換控制用以對所述處理水進行取水的取水模式、與用以使所述再生式離子交換裝置再生的再生模式的步驟(發明5)。
Secondly, the present invention provides an operation method of a water quality management system, which is the operation method of the water quality management system described in any one of the
根據所述發明(發明5),不僅可測定自再生式離子交換裝置排出的處理水的電阻率,而且亦可測定離子濃度,因此可基於該測定值來將運轉模式自動地切換為取水模式或再生模式。因而,即便於再生式離子交換裝置具有多個再生式離子交換塔的情況下,或並列設置有多個的情況下,亦可適當地管理處理水的水質,而 且,可抑制自用於後段的子系統的非再生式離子交換裝置排出的處理水中的離子濃度的短期變動。 According to the invention (Invention 5), not only the resistivity of the treated water discharged from the regenerative ion exchange device can be measured, but also the ion concentration can be measured. Therefore, the operation mode can be automatically switched to the water intake mode or the water intake mode based on the measured value. Regeneration mode. Therefore, even when the regenerative ion exchange device has a plurality of regenerative ion exchange towers, or when a plurality of regenerative ion exchange towers are installed in parallel, the quality of the treated water can be appropriately managed, and Furthermore, short-term fluctuations in the ion concentration of the treated water discharged from the non-regenerative ion exchange device used in the subsequent subsystem can be suppressed.
根據本發明,利用水質測定裝置,不僅可測定自再生式離子交換裝置排出的處理水的電阻率,而且亦可測定離子濃度,因此藉由基於該測定值來管理離子交換樹脂的再生的適當與否,可穩定地降低處理水中的離子濃度,而且,可抑制自用於後段的子系統的非再生式離子交換裝置排出的處理水中的離子濃度的短期變動。另外,水質測定裝置經由自動閥而連接於自第1排出管分支的第2排出管而並非設於第1排出管上,藉此可根據自動閥的切換操作在視需要的時機來簡單地測定處理水的水質。 According to the present invention, the water quality measuring device can measure not only the resistivity of the treated water discharged from the regenerative ion exchange device, but also the ion concentration. Therefore, the appropriateness and regeneration of the ion exchange resin can be managed based on the measured value. No, the ion concentration in the treated water can be stably reduced, and short-term fluctuations in the ion concentration in the treated water discharged from the non-regenerative ion exchange device used in the subsequent subsystem can be suppressed. In addition, the water quality measuring device is connected to the second discharge pipe branched from the first discharge pipe via the automatic valve instead of being provided on the first discharge pipe. This allows simple measurement at the necessary timing according to the switching operation of the automatic valve. Treat water quality.
1:再生式離子交換裝置 1: Regenerative ion exchange device
1A:第1再生式離子交換裝置 1A: The first regenerative ion exchange device
1B:第2再生式離子交換裝置 1B: The second regenerative ion exchange device
1C:第3再生式離子交換裝置 1C: The third regenerative ion exchange device
2:水質測定裝置 2:Water quality measuring device
2A:第1水質測定裝置 2A: No. 1 water quality measuring device
2B:第2水質測定裝置 2B: Second water quality measuring device
3:第1排出管 3: 1st discharge pipe
4:第2排出管 4: 2nd discharge pipe
4a、4c、4e:第1支管
4a, 4c, 4e:
4b、4d、4f:第2支管 4b, 4d, 4f: 2nd branch pipe
5、5a~5f:自動閥 5. 5a~5f: automatic valve
6:供給管 6: Supply pipe
7:第1藥液供給管 7: 1st liquid medicine supply tube
8:第2藥液供給管 8: 2nd liquid medicine supply tube
9:再生廢水排出管 9: Regeneration wastewater discharge pipe
10、10':水質管理系統 10, 10': Water quality management system
11:再生式離子交換塔 11: Regenerative ion exchange tower
11A:再生式陰離子交換樹脂塔(OH塔)(第一再生式陰離子交換樹脂塔(OH1塔)) 11A: Regenerative anion exchange resin tower (OH tower) (first regenerative anion exchange resin tower (OH1 tower))
11A':第二再生式陰離子交換樹脂塔(OH2塔) 11A': The second regenerative anion exchange resin tower (OH2 tower)
11B:再生式陽離子交換樹脂塔(H塔)(第一再生式陽離子交換樹脂塔(H1塔)) 11B: Regenerative cation exchange resin tower (H tower) (first regenerative cation exchange resin tower (H1 tower))
11B':第二再生式陽離子交換樹脂塔(H2塔) 11B': The second regenerative cation exchange resin tower (H2 tower)
12:離子交換樹脂層 12: Ion exchange resin layer
12A:陰離子交換樹脂層 12A: Anion exchange resin layer
12a:弱陰離子交換樹脂層 12a: Weak anion exchange resin layer
12a':強陰離子交換樹脂層 12a':Strong anion exchange resin layer
12B:陽離子交換樹脂層 12B: Cation exchange resin layer
12b:弱陽離子交換樹脂層 12b: Weak cation exchange resin layer
12b':強陽離子交換樹脂層 12b': Strong cation exchange resin layer
13A、13B:遮蔽板 13A, 13B: Shielding plate
20:脫氣裝置 20: Degassing device
21:電阻率計 21: Resistivity meter
22:離子濃度計 22: Ion concentration meter
23:第1自動閥 23: 1st automatic valve
24:第2自動閥 24: 2nd automatic valve
25:第3自動閥 25: 3rd automatic valve
26:第1廢水排出管 26: 1st wastewater discharge pipe
27:第2廢水排出管 27: 2nd wastewater discharge pipe
30:泵 30:Pump
71:加熱器(板式熱交換器) 71: Heater (plate heat exchanger)
91:第1再生廢水排出管 91: 1st regeneration wastewater discharge pipe
92:第2再生廢水排出管 92: 2nd regeneration wastewater discharge pipe
93:NaOH再生廢水的廢棄管 93:Waste pipe for NaOH regeneration wastewater
94:鹽酸再生廢水的廢棄管 94: Waste pipe for hydrochloric acid regeneration wastewater
111:交換塔本體 111: Exchange tower body
W:前處理水 W: pre-treatment water
W1:離子交換處理水 W1: Ion exchange treated water
圖1為表示本發明的第一實施形態的水質管理系統的概略系統圖。圖1中,水質管理系統包括第一例的再生式離子交換裝置。 FIG. 1 is a schematic system diagram showing the water quality management system according to the first embodiment of the present invention. In Figure 1, the water quality management system includes a first example of a regenerative ion exchange device.
圖2為表示本發明的第二實施形態的水質管理系統的概略系統圖。圖2中,省略各系列的再生式離子交換裝置的表示。 FIG. 2 is a schematic system diagram showing a water quality management system according to a second embodiment of the present invention. In FIG. 2 , the representation of each series of regenerative ion exchange devices is omitted.
圖3為表示本發明的水質管理系統所包括的再生式離子交換裝置的第二例的概略系統圖。 3 is a schematic system diagram showing a second example of a regenerative ion exchange device included in the water quality management system of the present invention.
圖4為表示本發明的水質管理系統所包括的再生式離子交換裝置的第三例的概略系統圖。 4 is a schematic system diagram showing a third example of a regenerative ion exchange device included in the water quality management system of the present invention.
圖5為表示本發明的水質管理系統所包括的再生式離子交換 裝置的第四例的概略系統圖。 Figure 5 shows the regenerative ion exchange included in the water quality management system of the present invention. Schematic system diagram of the fourth example of the device.
圖6為表示本發明的水質管理系統所包括的再生式離子交換裝置的第五例的概略系統圖。 6 is a schematic system diagram showing a fifth example of a regenerative ion exchange device included in the water quality management system of the present invention.
圖7為表示本發明的水質管理系統所包括的再生式離子交換裝置的第六例的概略系統圖。 7 is a schematic system diagram showing a sixth example of a regenerative ion exchange device included in the water quality management system of the present invention.
以下,適宜參照圖式來對本發明的水質管理系統的實施形態進行說明。以下所說明的實施形態為用以容易理解本發明者,並不對本發明作任何限定。 Hereinafter, embodiments of the water quality management system of the present invention will be described with reference to the drawings. The embodiments described below are provided to facilitate understanding of the present invention and do not limit the present invention in any way.
[第一實施形態] [First Embodiment]
圖1為表示本發明的第一實施形態的水質管理系統10的概略系統圖。圖1中,水質管理系統10包括:再生式離子交換裝置1;水質測定裝置2,具有電阻率計21與離子濃度計22;第1排出管3,供自再生式離子交換裝置1排出的離子交換處理水W1流通;以及第2排出管4,將離子交換處理水W1供給至水質測定裝置2,第2排出管4為經由自動閥5而自第1排出管3分支的構成。另外,水質管理系統10包括自動地切換運轉模式的自動切換控制機構(未圖示),所述運轉模式包含用以對離子交換處理水W1進行取水的取水模式、與用以使再生式離子交換裝置1再生的再生模式。再者,第一實施形態中,將水質管理系統10所包括的再生式離子交換裝置1設為再生式離子交換裝置的第一例。
FIG. 1 is a schematic system diagram showing the water
<再生式離子交換裝置> <Regenerative ion exchange device>
本實施形態中,構成再生式離子交換裝置1的再生式離子交換塔11於圓筒狀的交換塔本體111內配置有由陽離子交換樹脂與陰離子交換樹脂的混合樹脂形成的離子交換樹脂層12。於交換塔本體111的上部連接有供給進行離子交換處理的前處理水W的供給管6,另一方面,於下部連接有排出離子交換處理水W1的第1排出管3,第1排出管3上經由自動閥5而連接有第2排出管4。再者,第1排出管3連接於後段的子系統(未圖示)。前處理水W藉由再生式離子交換裝置1而去除離子成分,作為離子交換處理水W1並經過第1排出管3供給至子系統。由子系統所製造的超純水被供給至使用點(use-point),並於製造電子製品等的過程中用於清洗等。
In this embodiment, the regenerative
於供給管6上連接有供給作為再生藥液的鹼的氫氧化鈉(NaOH)水溶液的第1藥液供給管7。於第1排出管3上在自動閥5的上游側連接有供給作為再生藥液的酸的鹽酸(HCl)的第2藥液供給管8。於交換塔本體111的側部連接有排出再生時的廢水的再生廢水排出管9。於該些第1排出管3、第2排出管4、供給管6、第1藥液供給管7、第2藥液供給管8及再生廢水排出管9上分別設有開關閥(未圖示)。本實施形態中,於第1藥液供給管7上設有加熱器(板式熱交換器)71。
The
(陽離子交換樹脂) (cation exchange resin)
再生式離子交換裝置1中,作為構成離子交換樹脂層12的陽離子交換樹脂,可使用作為陽離子交換基而附著有碸基的強酸性
陽離子交換樹脂、附著有羧酸基的弱酸性陽離子交換樹脂的任一種,就PSA的溶出少的方面而言,通常使用凝膠型樹脂。另外,所述陽離子交換樹脂中二乙烯苯成為交聯劑,鏈狀結構進行交聯而形成網眼結構的樹脂,因此二乙烯苯越多則鏈的分支越多,成為緻密的結構,若二乙烯苯少,則可獲得分支少的網眼大的樹脂。通常的水處理中使用的樹脂的交聯度為8%左右,而被稱為標準交聯樹脂。相對於此,將交聯度為9%以上者稱為高交聯度樹脂。本實施形態中,可使用標準交聯樹脂、高交聯度樹脂的任一種,但可較佳地使用標準交聯樹脂。
In the regenerative
(陰離子交換樹脂) (Anion exchange resin)
作為構成離子交換樹脂層12的陰離子交換樹脂,就PSA的溶出少的方面而言,使用凝膠型樹脂。可使用以苯乙烯-二乙烯苯共聚物等為母體的在苯乙烯骨架上具有三甲基銨基或二甲基乙醇銨基等四級銨基的強鹼性陰離子交換樹脂、以苯乙烯-二乙烯苯共聚物等為母體的在苯乙烯骨架上或聚丙烯酸酯骨架上具有一級胺基~三級胺基作為官能基的弱鹼性陰離子交換樹脂的任一種,但可較佳地使用強鹼性陰離子交換樹脂。陰離子交換樹脂的交換基較佳為OH型。
As an anion exchange resin constituting the ion
構成離子交換樹脂層12的混合樹脂中的陽離子交換樹脂與陰離子交換樹脂的混合比例較佳為陽離子交換樹脂與陰離子交換樹脂的比為30:70~70:30,尤佳為以30:70~50:50的方式大量地混合有陰離子交換樹脂。再者,關於構成離子交換樹脂層
12的離子交換樹脂的物性,若為粒狀,則並無特別限制。
The mixing ratio of the cation exchange resin and the anion exchange resin in the mixed resin constituting the ion
(再生式離子交換塔) (Regenerative ion exchange tower)
再生式離子交換塔11的材質只要為對離子交換樹脂的再生化學品具有耐受性者,則並無特別限制。
The material of the regenerative
<水質測定裝置> <Water quality measuring device>
本實施形態中,水質測定裝置2依序具有電阻率計21與離子濃度計22。水質測定裝置2於電阻率計21與離子濃度計22之間的配管上具有第2自動閥24。於電阻率計21與第2自動閥24之間的配管上,經由第1自動閥23而分支設有用以將利用電阻率計21的電阻率測定後的廢水排出至系統外的第1廢水排出管26。另外,於離子濃度計22的下游側經由第3自動閥25而設有用以將自水質測定裝置2排出的廢水排出至系統外的第2廢水排出管27。
In this embodiment, the water
(電阻率計) (resistivity meter)
構成水質測定裝置2的電阻率計21為對離子交換處理水W1的電阻率進行測定者。電阻率計21的種類並無特別限定,例如可利用市售的電阻率計來測定離子交換處理水W1的電阻率。再者,於以1L/min對純水進行通水的情況下,電阻率計21的測定單元的材質只要為測定對象的離子濃度不溶出20ng/L以上者,則並無特別限定。
The
(離子濃度計) (ion concentration meter)
構成水質測定裝置2的離子濃度計22為對離子交換處理水W1的離子濃度進行測定者。離子濃度計22的種類並無特別限定,
本實施形態中,利用鈉離子電極來測定離子交換處理水W1的離子濃度。再者,於以1L/min對純水進行通水的情況下,離子濃度計22的測定單元的材質只要為測定對象的離子濃度不溶出20ng/L以上者,則並無特別限定。
The
<自動切換控制機構> <Automatic switching control mechanism>
自動切換控制機構為與水質測定裝置2的測定值相對應地進行運轉模式的切換控制者。具體而言,於取水模式時,利用電阻率計21來測定離子交換處理水W1的電阻率,於該測定值超過電阻率計21中預先設定的臨限值的時刻,判斷離子交換樹脂層12的離子交換能降低,進行朝再生模式的切換。而且,於再生模式時,利用離子濃度計22來測定離子交換處理水W1中所含的鈉離子(Na+)濃度,於該測定值成為離子濃度計22中預先設定的臨限值以下的時刻,將再生判斷為較佳,結束再生處理而進行朝取水模式的切換。
The automatic switching control mechanism is a controller that switches the operation mode in accordance with the measured value of the water
(再生化學品) (recycled chemicals)
本實施形態中,作為填充至再生式離子交換塔11的交換塔本體111內的離子交換樹脂的再生中使用的化學品,使用氫氧化鈉(NaOH)及鹽酸(HCl),若為不顯著降低離子交換樹脂的性能而可進行回生者,則並不限定於該些。
In this embodiment, sodium hydroxide (NaOH) and hydrochloric acid (HCl) are used as chemicals used to regenerate the ion exchange resin filled in the
(前處理水) (pre-treated water)
關於前處理水W的水質,因製造電子製品等的過程中所使用的超純水的要求水質而原水的處理方法不同,因此並無特別限制。 另外,前處理水W的原水亦無特別限制。 The quality of the pre-processed water W is not particularly limited because the raw water treatment method differs depending on the required water quality of ultrapure water used in the process of manufacturing electronic products and the like. In addition, the raw water of the pre-processed water W is not particularly limited.
(配管) (Piping)
於以1L/min對純水進行通水的情況下,水質管理系統10中所使用的第1排出管3等配管的材質只要為測定對象的離子濃度不溶出20ng/L以上者,則並無特別限定。
When pure water is circulated at 1 L/min, the material of the
(自動閥) (automatic valve)
於以1L/min對純水進行通水的情況下,水質管理系統10中所使用的自動閥的規格只要為測定對象的離子濃度不溶出20ng/L以上者,則並無特別限定。
When flowing pure water at 1 L/min, the specifications of the automatic valve used in the water
[水質管理系統的運轉方法] [How to operate the water quality management system]
其次,對所述第一實施形態的水質管理系統10的運轉方法進行說明。再者,以下中所謂「取水模式」,是指自再生式離子交換裝置1排出的離子交換處理水W1取水時的運轉方式,所謂「再生模式」,是指再生式離子交換裝置1的離子交換樹脂層12再生時的運轉方式。
Next, the operation method of the water
<取水模式> <Water dispensing mode>
於取水模式中,打開供給管6及第1排出管3,關閉第1藥液供給管7、第2藥液供給管8及再生廢水排出管9後,將第1排出管3設為亦可藉由自動閥5朝第2排出管4通水,於所述狀態下,自供給管6以下向流的方式將前處理水W供給至再生式離子交換塔11。所供給的前處理水W於作為填充至再生式離子交換塔11的混合樹脂的離子交換樹脂層12中,去除陽離子性成分及陰離
子性成分(離子交換步驟)。去除了離子成分的前處理水W作為離子交換處理水W1而經過第1排出管3供給至後段的子系統,同時經過第2排出管4供給至水質測定裝置2。再者,此時的通水條件可設為與通常的離子交換的處理為相同程度,只要相對於離子交換樹脂層12的離子交換樹脂的容積而將空間速度設為5h-1~100h-1、特別是設為5h-1~50h-1即可。
In the water dispensing mode, you can open the
水質測定裝置2中,在打開第1自動閥23、關閉第2自動閥24的狀態下,離子交換處理水W1自第2排出管4通水至電阻率計21。利用電阻率計21對經通水的離子交換處理水W1進行電阻率的測定(電阻率測定步驟)。電阻率測定後的離子交換處理水W1經過第1廢水排出管26而被排出至系統外。自動切換控制機構於離子交換處理水W1的電阻率超過預先設定的臨限值的時刻,判斷離子交換樹脂層12的離子交換能降低,進行朝再生模式的切換。再者,自再生式離子交換裝置1排出的離子交換處理水W1朝水質測定裝置2的流量較佳為1L/min以上,更佳為1.5L/min。
In the water
<再生模式> <Regeneration mode>
於再生模式中,首先,自第1排出管3以上向流的方式將離子交換處理水W1供給至再生式離子交換塔11,並自供給管6排出,藉此對構成離子交換樹脂層12的混合樹脂進行逆洗(逆洗步驟)。藉由該逆洗步驟,因陰離子交換樹脂與陽離子交換樹脂的微小的比重差而將陰離子交換樹脂分離為交換塔本體111的上側,
將陽離子交換樹脂分離為交換塔本體111的下側。
In the regeneration mode, first, the ion exchange treated water W1 is supplied to the regeneration type
其次,在打開第1藥液供給管7、第2藥液供給管8及再生廢水排出管9的狀態下,自第1藥液供給管7以下向流的方式將氫氧化鈉水溶液供給至再生式離子交換塔11,並且自第2藥液供給管8以上向流的方式將鹽酸供給至再生式離子交換塔11(再生處理步驟)。藉此,使偏向存在於交換塔本體111的上側的陰離子交換樹脂再生,並且使偏向存在於交換塔本體111的下側的陽離子交換樹脂再生。此時,為了使陰離子交換樹脂高效地進行再生,氫氧化鈉水溶液較佳為利用設於第1藥液供給管7的加熱器71而加熱至30℃~50℃左右。再生後的氫氧化鈉水溶液及鹽酸的廢水是自再生廢水排出管9排出。
Next, with the first chemical
繼而,打開供給管6及第1排出管3,關閉第1藥液供給管7、第2藥液供給管8及再生廢水排出管9後,第1排出管3中停止藉由自動閥5朝第2排出管4通水,於所述狀態下,自供給管6以下向流的方式將離子交換處理水W1供給至再生式離子交換塔11,並自第1排出管3排出,藉此以一過式自再生式離子交換塔11擠出再生中使用的藥液(氫氧化鈉水溶液及鹽酸)(擠出步驟)。此時,自第1排出管3排出的離子交換處理水W1未供給至後段的子系統。再者,至此的再生操作(逆洗步驟、再生處理步驟及擠出步驟)較佳為於離子交換處理水W1的電阻率的降低或後述的鈉離子濃度的上昇大的情況下,連續進行兩次以上。
Then, after opening the
將構成離子交換樹脂層12的經分離的離子交換樹脂混
合後,將第1排出管3設為亦可藉由自動閥5朝第2排出管4通水,除此以外,於與擠出步驟同樣的配管的打開/關閉狀態下,自供給管6以下向流的方式將前處理水W供給至再生式離子交換塔11,並自第1排出管3排出離子交換處理水W1,藉此進行離子交換樹脂的循環清洗(循環清洗步驟)。此時,自第1排出管3排出的離子交換處理水W1並未供給至後段的子系統。同時,循環清洗步驟中所製造的離子交換處理水W1經過第2排出管4而供給至水質測定裝置2。再者,將自再生式離子交換裝置1排出的離子交換處理水W1朝水質測定裝置2的流量設為1L/min以上,較佳為1.5L/min。
The separated ion exchange resin constituting the ion
水質測定裝置2中,於打開第2自動閥24及第3自動閥25、關閉第1自動閥23的狀態下,使離子交換處理水W1自第2排出管4通水至離子濃度計22。利用離子濃度計22的鈉離子電極來對經通水的離子交換處理水W1進行鈉離子(Na+)濃度的測定(離子濃度測定步驟)。於循環清洗步驟不充分的情況下,起因於用於再生處理的氫氧化鈉水溶液的鈉離子(Na+)大量地包含於離子交換處理水W1中。因而,於離子交換處理水W1的鈉離子(Na+)濃度成為預先設定的臨限值以下的時刻,自動切換控制機構將再生判斷為較佳,結束再生處理而進行朝取水模式的切換。再者,離子濃度測定後的離子交換處理水W1經過第2廢水排出管27而被排出至系統外。
In the water
離子濃度測定步驟中,於離子交換處理水W1的鈉離子 (Na+)濃度超過預先設定的臨限值的情況下,只要繼續進行循環清洗步驟即可。 In the ion concentration measurement step, when the sodium ion (Na + ) concentration of the ion-exchange treated water W1 exceeds a preset threshold value, the cycle cleaning step only needs to be continued.
再者,自動切換控制機構亦可以如下方式構成:基於利用電阻率計21獲得的離子交換處理水W1的電阻率的測定值、與利用離子濃度計22的鈉離子電極獲得的離子交換處理水W1的鈉離子(Na+)濃度的測定值這兩者的測定值,來判斷再生的適當與否。
Furthermore, the automatic switching control mechanism may be configured based on the measured value of the resistivity of the ion-exchange treated water W1 obtained by the
如此,利用自動切換控制機構而交替地重複進行取水模式與再生模式來運轉,藉此可基於利用水質測定裝置2獲得的測定值、特別是離子交換處理水W1的鈉離子(Na+)濃度來判斷離子交換樹脂層12的再生的適當與否,將判斷為再生較佳後的離子交換處理水W1供給至後段的子系統,因此可將超純水(子系統處理水)的鈉離子(Na+)濃度維持得低至所期望的值而使其穩定。
In this way, by using the automatic switching control mechanism to alternately repeat the water intake mode and the regeneration mode, it is possible to measure the water quality based on the measured value obtained by the water
[第二實施形態] [Second Embodiment]
圖2為表示本發明的第二實施形態的水質管理系統10'的概略系統圖。圖2的水質管理系統10'包括並列設置有三個的再生式離子交換裝置1(第一例)、與並列設置有兩個的水質測定裝置2,且構成為自三個再生式離子交換裝置1的各個排出的各處理水可供給至兩個水質測定裝置2的各個。再者,圖2中省略各系列的再生式離子交換裝置1(1A、1B、1C)的表示。另外,圖2及以下的說明中,對具有與第一實施形態相同的構成或相同的功能的裝置等使用相同的符號,並省略其詳細說明。
FIG. 2 is a schematic system diagram showing the water quality management system 10' according to the second embodiment of the present invention. The water quality management system 10' in FIG. 2 includes three regenerative ion exchange devices 1 (first example) arranged in parallel, and two water
本實施形態中,作為水質測定裝置2,並列設置有兩段第1水質測定裝置2A與第2水質測定裝置2B,作為再生式離子交換裝置1,並列設置有三段第1再生式離子交換裝置1A與第2再生式離子交換裝置1B以及第3再生式離子交換裝置1C。第1再生式離子交換裝置1A的第2排出管4分支為第1支管4a與第2支管4b。第1支管4a上經由自動閥5a而連接有第1水質測定裝置2A,第2支管4b上經由自動閥5b而連接有第2水質測定裝置2B。
In this embodiment, as the water
第2再生式離子交換裝置1B的第2排出管4分支為第1支管4c與第2支管4d。第1支管4c經由自動閥5c而與第1支管4a匯合,第2支管4d經由自動閥5d而與第2支管4b匯合。第3再生式離子交換裝置1C的第2排出管4分支為第1支管4e與第2支管4f。第1支管4e經由自動閥5e而於第1支管4a與第1支管4c的匯合點的更下游側與第1支管4a匯合,第2支管4f經由自動閥5f而於第2支管4b與第2支管4d的匯合點的更下游側與第2支管4b匯合。
The
[水質管理系統的運轉方法] [How to operate the water quality management system]
其次,對第二實施形態的水質管理系統10'的運轉方法進行說明。再者,以下的說明中,以利用第1再生式離子交換裝置1A的第1系列及利用第2再生式離子交換裝置1B的第2系列為取水模式、利用第3再生式離子交換裝置1C的第3系列為再生模式的情況為例進行說明。
Next, the operation method of the water quality management system 10' of the second embodiment will be described. In addition, in the following description, the first series using the first regenerative ion exchange device 1A and the second series using the second regenerative ion exchange device 1B are taken as the water intake mode, and the third series using the third regenerative
(第1系列-取水模式) (Series 1 - Water Dispensing Mode)
第1系列為如下狀態:於離子交換步驟後自第1再生式離子交換裝置1A排出的離子交換處理水W1經過第1排出管3而供給至後段的子系統,同時經過第2排出管4及第1支管4a而通水至第1水質測定裝置2A。而且,第1水質測定裝置2A中,利用電阻率計21測定離子交換處理水W1的電阻率(電阻率測定步驟)。電阻率測定後的離子交換處理水W1經過第1廢水排出管26而被排出至系統外。於經測定的電阻率超過預先設定的臨限值的時刻,利用自動切換控制機構來進行朝再生模式的切換。
The first series is in a state in which the ion-exchange treated water W1 discharged from the first regenerative ion exchange device 1A after the ion exchange step passes through the
(第2系列-再生模式) (Series 2 - Regeneration Mode)
第2系列為如下狀態:相對於逆洗步驟後的第2再生式離子交換裝置1B的再生式離子交換塔11,自第1藥液供給管7供給氫氧化鈉水溶液,並且自第2藥液供給管8供給鹽酸(再生處理步驟)。再者,第2再生式離子交換裝置1B中的再生後的氫氧化鈉水溶液及鹽酸的廢水是自再生廢水排出管9排出。
The second series is in a state in which the sodium hydroxide aqueous solution is supplied from the first chemical
(第3系列-再生模式) (Series 3 - Regeneration Mode)
第3系列為如下狀態:於循環步驟後自第3再生式離子交換裝置1C排出的離子交換處理水W1經過第1排出管3而排出,同時經過第2排出管4及第2支管4f而通水至第2水質測定裝置2B。而且,第2水質測定裝置2B中,利用離子濃度計22測定離子交換處理水W1的離子濃度(離子濃度測定步驟)。此時,第1水質測定裝置2A用於第1再生式離子交換裝置1A的離子交換處
理水W1的電阻率的測定,因此自第3再生式離子交換裝置1C排出的離子交換處理水W1以利用自動閥5e未朝第1支管4e通水,而朝第2支管4f通水的方式進行自動控制,因此可選擇未使用的第2水質測定裝置2B來進行離子交換處理水W1的鈉離子(Na+)濃度的測定。
The third series is in a state in which the ion-exchange treated water W1 discharged from the third regenerative
如此,即便於並列設置有三個再生式離子交換裝置1的情況下,亦可利用一個水質管理系統10'在視需要的時機選擇特定的再生式離子交換裝置1來進行水質的測定,因此與對每個再生式離子交換裝置1(1A、1B、1C)設置水質測定裝置2的情況相比,能夠使處理水的水質的管理簡單且抑制了離子濃度的處理水穩定地流入後段的子系統。
In this way, even when three regenerative
[再生式離子交換裝置的其他例] [Other examples of regenerative ion exchange devices]
其次,分別對圖3~圖7所示的第二例~第六例的再生式離子交換裝置1進行說明。以下的例子中,於再生式離子交換裝置1包括多個再生式離子交換塔11的情況下,關於自再生式離子交換裝置1的最後段的再生式離子交換塔11排出的離子交換處理水W1,只要基於第一實施形態或第二實施形態來進行水質(電阻率、鈉離子(Na+)濃度)的測定即可。即,只要為再生式離子交換裝置1的最後段的再生式離子交換塔11的第2排出管4連接於水質測定裝置2的構成即可。此時,水質測定裝置2較佳為設於自動閥5的跟前。再者,圖3~圖7以及以下的說明中,對具有相同構成或相同功能的裝置等使用相同符號,並省略其詳細說明。
Next, the regenerative
(第二例的再生式離子交換裝置) (Second example of regenerative ion exchange device)
圖3所示的再生式離子交換裝置1為包含單獨的再生式離子交換塔11的態樣。本實施形態中,再生式離子交換塔11的通水方式為上向流,且為於圓筒狀的交換塔本體111內自上側起分別隔開而形成有陰離子交換樹脂層12A與陽離子交換樹脂層12B的兩層式離子交換塔。於交換塔本體111的下部連接有進行離子交換處理的前處理水W的供給管6,另一方面,於上部連接有離子交換處理水W1的第1排出管3,於第1排出管3上經由自動閥5而分支連接有第2排出管4。而且,於第1排出管3上在自動閥5的上游側連接有用以供給作為再生藥液的鹼的NaOH溶液的第1藥液供給管7,於交換塔本體111的側部連接有用以排出NaOH再生廢水的第1再生廢水排出管91。另一方面,於交換塔本體111的側部連通有用以供給作為再生藥液的酸的鹽酸(HCl)的第2藥液供給管8,於供給管6連接有用以排出鹽酸再生廢水的第2再生廢水排出管92。於該些第1排出管3、第2排出管4、供給管6、第1藥液供給管7、第2藥液供給管8、第1再生廢水排出管91及第2再生廢水排出管92上分別設有開關閥(未圖示)。再者,圖3中,71為設於第1藥液供給管7的加熱器(板式熱交換器),13A為具有多個較構成陰離子交換樹脂層12A的陰離子交換樹脂而言更小的孔的遮蔽板。
The regenerative
(第三例的再生式離子交換裝置) (Regenerative ion exchange device of the third example)
圖4所示的再生式離子交換裝置1為包含單獨的再生式離子
交換塔11的態樣。本實施形態中,再生式離子交換塔11的通水方式為上向流,且為於圓筒狀的交換塔本體111內自上側起分別隔開而形成有陽離子交換樹脂層12B與陰離子交換樹脂層12A的兩層式離子交換塔。於交換塔本體111的下部連接有進行離子交換處理的前處理水W的供給管6,另一方面,於上部連接有離子交換處理水W1的第1排出管3,於第1排出管3上經由自動閥5而連接有第2排出管4。而且,於第1排出管3上在自動閥5的上游側連通有用以供給作為再生藥液的酸的鹽酸(HCl)的第2藥液供給管8,於交換塔本體111的側部連接有用以排出鹽酸再生廢水的第2再生廢水排出管92。另外,於交換塔本體111的側部連接有用以供給作為再生藥液的鹼的NaOH溶液的第1藥液供給管7,於供給管6連接有用以排出NaOH再生廢水的第1再生廢水排出管91。於該些第1排出管3、第2排出管4、供給管6、第1藥液供給管7、第2藥液供給管8、第1再生廢水排出管91及第2再生廢水排出管92上分別設有開關閥(未圖示)。再者,圖4中,71為設於第1藥液供給管7的加熱器(板式熱交換器),13B為具有多個較構成陽離子交換樹脂層12B的陽離子交換樹脂而言更小的孔的遮蔽板。
The regenerative
(第四例的再生式離子交換裝置) (Regenerative ion exchange device of the fourth example)
圖5所示的再生式離子交換裝置1為所謂的2床3塔式的離子交換裝置,且為包含兩層型的再生式陽離子交換樹脂塔(H塔)11B、脫氣裝置20、以及兩層型的再生式陰離子交換樹脂塔(OH
塔)11A的態樣。於H塔11B的下側連接有進行離子交換處理的前處理水W的供給管6,另一方面,於OH塔11A的上側連接有離子交換處理水W1的第1排出管3,於第1排出管3經由自動閥5而連接有第2排出管4。而且,於H塔11B的上側連接有用以供給作為再生藥液的酸的鹽酸(HCl)的第2藥液供給管8,並且於H塔11B的下側的前處理水W的供給管6連接有用以排出鹽酸再生廢水的第2再生廢水排出管92。進而,於OH塔11A的上側(排出側)的第1排出管3上在自動閥5的上游側連接有用以供給作為再生藥液的鹼的NaOH溶液的第1藥液供給管7,於OH塔11A的下側(供給側)連接有用以排出NaOH再生廢水的第1再生廢水排出管91。再者,圖5中,71為設於第1藥液供給管7的加熱器(板式熱交換器),30為用以將藉由脫氣裝置20進行了處理的處理水供給至OH塔11A的泵。對脫氣裝置20的規格及設於脫氣裝置20的後段的泵30並無特別限制。以下的第五例及第六例亦相同。
The regenerative
該2床3塔式的離子交換裝置中,填充至H塔11B的離子交換樹脂層12為弱陽離子交換樹脂層12b與強陽離子交換樹脂層12b'的兩層結構,填充至OH塔11A的離子交換樹脂層12為弱陰離子交換樹脂層12a與強陰離子交換樹脂層12a'的兩層結構。再者,於弱陽離子交換樹脂層12b及強陽離子交換樹脂層12b'、弱陰離子交換樹脂層12a及強陰離子交換樹脂層12a'之間分別設有具有多個較陰離子交換樹脂及陽離子交換樹脂而言更小的孔的
遮蔽板(未圖示)。
In this 2-bed, 3-tower ion exchange device, the ion
(第五例的再生式離子交換裝置) (Regenerative ion exchange device of the fifth example)
圖6所示的再生式離子交換裝置1為所謂的3床4塔式的離子交換裝置,且為包含兩層型的第一再生式陽離子交換樹脂塔(H1塔)11B、脫氣裝置20、兩層型的再生式陰離子交換樹脂塔(OH塔)11A、以及單層型的第二再生式陽離子交換樹脂塔(H2塔)11B'的態樣。於H1塔11B的下側連接有進行離子交換處理的前處理水W的供給管6,另一方面,於H2塔11B'的下側連接有離子交換處理水W1的第1排出管3,於第1排出管3經由自動閥5而連接有第2排出管4。而且,於H2塔11B'的上側連接有用以供給作為再生藥液的酸的鹽酸(HCl)的第2藥液供給管8,於第1排出管3上在自動閥5的上游側連接有用以排出鹽酸再生廢水的第2再生廢水排出管92。第2再生廢水排出管92連接於H1塔11B的上側(排出側),於H1塔11B的下側(供給側)的供給管6連接有鹽酸再生廢水的廢棄管94。進而,於OH塔11A的上側(排出側)連接有用以供給作為鹼的NaOH溶液的第1藥液供給管7,於OH塔11A的下側(供給側)連接有用以排出NaOH再生廢水的第1再生廢水排出管91。再者,71為設於第1藥液供給管7的加熱器(板式熱交換器),30為用以將藉由脫氣裝置20進行了處理的處理水供給至OH塔11A的泵。
The regenerative
該3床4塔式的離子交換裝置中,填充至H1塔11B的離子交換樹脂層12為弱陽離子交換樹脂層12b與強陽離子交換樹
脂層12b'的兩層結構,填充至OH塔11A的離子交換樹脂層12為弱陰離子交換樹脂層12a與強陰離子交換樹脂層12a'的兩層結構。再者,於弱陽離子交換樹脂層12b及強陽離子交換樹脂層12b'、弱陰離子交換樹脂層12a及強陰離子交換樹脂層12a'之間分別設有具有多個較陰離子交換樹脂及陽離子交換樹脂而言更小的孔的遮蔽板(未圖示)。
In this 3-bed 4-tower ion exchange device, the ion
(第六例的再生式離子交換裝置) (Regenerative ion exchange device of the sixth example)
圖7所示的再生式離子交換裝置1為所謂的4床5塔式的離子交換裝置,基本上具有在所述第五例的3床4塔式的離子交換裝置1的再生式陽離子交換樹脂塔(H2塔)11B'的後段進而設置單層型的第二再生式陰離子交換樹脂塔(OH2塔)11A'的構成。於該OH2塔11A'的下側連接有離子交換處理水W1的第1排出管3,於該第1排出管3經由自動閥5而連接有第2排出管4。而且,於OH2塔11A'的上側連接有用以供給作為鹼的NaOH溶液的第1藥液供給管7,於下側的第1排出管3上在自動閥5的下游側連接有用以排出NaOH再生廢水的第1再生廢水排出管91。第1再生廢水排出管91作為NaOH溶液供給管而連接於第一再生式陰離子交換樹脂塔(OH1塔)11A的上側(排出側),於OH1塔11A的下側(供給側)連接有NaOH再生廢水的廢棄管93。
The regenerative
以上,參照隨附圖式對本發明進行了說明,但本發明並不限於所述實施形態而可實施各種變更。例如,並列設置有多個的再生式離子交換裝置1的個數、與並列設置的水質測定裝置2的
個數的比只要為水質測定裝置2的個數等同於再生式離子交換裝置1的個數或小於其的個數即可,並不限於3比2。另外,可於再生式離子交換裝置1的前段設置逆滲透膜分離裝置等公知的水處理用元件。進而,於所述實施形態中,於利用電阻率計21獲得的離子交換處理水W1的電阻率超過預先設定的臨限值的時刻,進行朝再生模式的切換,但亦可以於製造規定體積的離子交換處理水W1的時刻切換為再生模式的方式進行運轉,亦可藉由電阻率計以外來測定切換為再生模式的時機。
As mentioned above, the present invention has been described with reference to the accompanying drawings. However, the present invention is not limited to the above-described embodiments and can be modified in various ways. For example, the number of regenerative
[實施例] [Example]
以下,基於實施例來對本發明進行進一步詳細說明,但本發明並不限定於以下的實施例。 Hereinafter, the present invention will be described in further detail based on Examples, but the present invention is not limited to the following Examples.
[實施例] [Example]
並列設置兩段圖1所示的第一例的再生式離子交換裝置1,利用圖2所示的水質管理系統10'依序進行四次再生模式與取水模式的切換運轉。通常,第1系列(第1再生式離子交換裝置1A)為取水模式,第2系列(第2再生式離子交換裝置1B)成為再生模式及待機。
Two stages of the regenerative
於第1水質測定裝置1A、第2水質測定裝置1B中均使用MX-3(栗田工業公司製造)作為電阻率計21,使用swan AMI Soditrace(T&C科技(T&C technical)公司製造)作為使用鈉離子電極的離子濃度計22。
In both the first water quality measuring device 1A and the second water quality measuring device 1B, MX-3 (manufactured by Kurita Industrial Co., Ltd.) is used as the
作為填充至離子交換塔11的離子交換樹脂,使用作為
陽離子交換樹脂的多孔型的PK228L(三菱化學公司製造)、作為陰離子交換樹脂的多孔型的PA312L(三菱化學公司製造)。
As the ion exchange resin filled in the
(第1系列) (Series 1)
首先,使相對於以容量比1:2混合填充陽離子交換樹脂與陰離子交換樹脂的離子交換樹脂,而以40h-1的空間速度(Space Velocity,SV)進行取水的第1再生式離子交換裝置1A的再生前的離子交換處理水W1通水至第1水質測定裝置2A,從而測定離子交換處理水W1中的電阻率及鈉離子(Na+)濃度。
First, the first regenerative ion exchange device 1A that takes in water at a space velocity (Space Velocity, SV) of 40 h -1 with respect to the ion exchange resin filled with a mixture of cation exchange resin and anion exchange resin at a volume ratio of 1:2 is used. The ion-exchange treated water W1 before regeneration is passed to the first water
其次,將第1再生式離子交換裝置1A的運轉模式自取水模式切換為再生模式,並進行填充至再生式離子交換塔11的離子交換樹脂層12的再生作業。再生作業的詳細步驟如以下般。
Next, the operation mode of the first regenerative ion exchange device 1A is switched from the water intake mode to the regeneration mode, and the regeneration operation of filling the ion
最初,在停止朝第1水質測定裝置2A的通水的狀態下,利用離子交換處理水W1對填充至再生式離子交換塔11的離子交換樹脂層12進行逆洗,從而將陽離子交換樹脂與陰離子交換樹脂分離(逆洗步驟)。
Initially, with the water flow to the first water
其次,在停止朝第1水質測定裝置2A的通水的狀態下,將調整為5%的工業用鹽酸(HCl)水溶液作為再生藥液而使經分離的陽離子交換樹脂再生,同時將利用藉由加熱器71加熱至40℃的水調整為4%的工業用氫氧化鈉(NaOH)水溶液作為再生藥液而使經分離的陰離子交換樹脂再生(再生處理步驟)。
Next, while the water flow to the first water
繼而,在停止朝第1水質測定裝置2A的通水的狀態下,以下向流的方式將離子交換處理水W1供給至藉由再生藥液進行
了再生的陽離子交換樹脂與陰離子交換樹脂的各個,利用一過式擠出再生式離子交換塔11內與離子交換樹脂層12中的再生藥液(擠出步驟)。
Next, in a state where the water flow to the first water
而且,在停止朝第1水質測定裝置2A的通水的狀態下,以下向流的方式將前處理水W供給至再生式離子交換塔11,藉此將擠出再生藥液後的陽離子交換樹脂與陰離子交換樹脂混合,利用前處理水W對混合的離子交換樹脂進行循環清洗(循環清洗步驟)。
Furthermore, in a state where the water flow to the first water
同時,將第1再生式離子交換裝置1A的循環處理水通水至第1水質測定裝置2A,並測定循環處理水的電阻率及鈉離子(Na+)濃度。於電阻率成為18.0MΩ.cm以上、且鈉離子(Na+)濃度成為300ng/L以下的時刻,停止朝第1水質測定裝置2A的通水,從而結束再生處理。
At the same time, the circulated treated water of the first regenerative ion exchange device 1A is passed to the first water
將第1再生式離子交換裝置1A的運轉模式自再生模式切換為取水模式,開始填充至再生式離子交換塔11的離子交換樹脂層12的離子交換處理水W1的取水,同時使離子交換處理水W1通水至第1水質測定裝置2A,從而測定電阻率及鈉離子(Na+)濃度。
The operation mode of the first regenerative ion exchange device 1A is switched from the regeneration mode to the water intake mode, and the intake of the ion exchange treated water W1 filled into the ion
(第2系列) (Series 2)
關於取水中的第2再生式離子交換裝置1B,利用第2水質測定裝置2B來測定再生處理前的離子交換處理水W1的電阻率及鈉離子(Na+)濃度。將第2再生式離子交換裝置1B的運轉模式自
取水模式切換為再生模式,與第1再生式離子交換裝置1A的情況同樣地進行填充至再生式離子交換塔11的離子交換樹脂層12的再生處理。
Regarding the second regenerative ion exchange device 1B that takes in water, the resistivity and sodium ion (Na + ) concentration of the ion-exchange treated water W1 before the regeneration process is measured using the second water
另外,於各再生式離子交換裝置(1A、1B)的取水模式時,使用ICP-MS(安捷倫科技(Agilent Technologies)公司製造,7500cs)來分析自設於後段的子系統的非再生式離子交換裝置(容量;陽離子交換樹脂/陰離子交換樹脂=1/1.6,SV;80-h)排出的處理水的鈉離子(Na+)濃度。 In addition, in the water intake mode of each regenerative ion exchange device (1A, 1B), ICP-MS (manufactured by Agilent Technologies, 7500cs) was used to analyze the non-regenerative ion exchange in the subsystem installed at the back end. Sodium ion (Na + ) concentration of the treated water discharged from the device (capacity; cation exchange resin/anion exchange resin = 1/1.6, SV; 80 -h ).
[比較例] [Comparative example]
與所述實施例同樣地,並列設置兩段圖1所示的第一例的再生式離子交換裝置1,利用圖2所示的水質管理系統10'依序進行四次再生模式與取水模式的切換運轉。通常,第1系列(第1再生式離子交換裝置1A)為取水模式,第2系列(第2再生式離子交換裝置1B)成為再生模式及待機。
Similar to the above embodiment, two sections of the regenerative
將調整為5%的副生鹽酸(HCl)水溶液作為再生化學品而使藉由逆洗步驟進行了分離的陽離子交換樹脂進行再生。 The cation exchange resin separated by the backwash step was regenerated using a 5% by-product hydrochloric acid (HCl) aqueous solution as a regeneration chemical.
另外,於各再生式離子交換裝置(1A、1B)的取水模式時,使用ICP-MS(安捷倫科技(Agilent Technologies)公司製造,7500cs)來分析自設於後段的子系統的非再生式離子交換裝置(容量;陽離子交換樹脂/陰離子交換樹脂=1/1.6,SV;80-h)排出的處理水的鈉離子(Na+)濃度。 In addition, in the water intake mode of each regenerative ion exchange device (1A, 1B), ICP-MS (manufactured by Agilent Technologies, 7500cs) was used to analyze the non-regenerative ion exchange in the subsystem installed at the back end. Sodium ion (Na + ) concentration of the treated water discharged from the device (capacity; cation exchange resin/anion exchange resin = 1/1.6, SV; 80 -h ).
再者,關於取水中的各再生式離子交換裝置(1A、1B) 的離子交換處理水W1的電阻率成為18.0MΩ.cm以下、且鈉離子(Na+)濃度超過500ng/L以上後的再生,重複兩次再生處理。 Furthermore, the resistivity of the ion-exchange treated water W1 of each regenerative ion exchange device (1A, 1B) in the water intake is 18.0 MΩ. cm below and the sodium ion (Na + ) concentration exceeds 500ng/L, repeat the regeneration process twice.
將第1再生式離子交換裝置1A中的取水開始12小時後的離子交換處理水W1的電阻率與鈉離子(Na+)濃度(表中,由A所示。以下相同)、以及第2再生式離子交換裝置1B中的取水開始12小時後的離子交換處理水W1的電阻率與鈉離子(Na+)濃度(表中,由B所示。以下相同)的比較示於表1中。且可知,藉由利用水質管理系統10'來管理再生時及取水時的離子交換處理水W1中的鈉離子(Na+)濃度,可將取水時的離子交換處理水W1中的鈉離子(Na+)濃度控制為300ng/L以下。
The resistivity and sodium ion (Na + ) concentration of the ion-exchange treated
將第1再生式離子交換裝置1A及第2再生式離子交換裝置1B的取水時的自設於後段的子系統的非再生式離子交換裝置排出的處理水的鈉離子(Na+)濃度的比較示於表2中。且可知,藉由利用水質管理系統10'來管理各再生式離子交換裝置(1A、1B)的再生時及取水時的離子交換處理水W1中的鈉離子(Na+)濃度,可控制自後段的非再生式離子交換裝置排出的處理水中的鈉離子(Na+)濃度的短期變動。 Comparison of the sodium ion (Na + ) concentration of the treated water discharged from the non-regenerative ion exchanger of the subsequent subsystem when water is taken from the first regenerative ion exchanger 1A and the second regenerative ion exchanger 1B Shown in Table 2. Furthermore, it can be seen that by using the water quality management system 10' to manage the sodium ion (Na + ) concentration in the ion-exchange treated water W1 during regeneration and water intake of each regenerative ion exchange device (1A, 1B), it is possible to control the sodium ion (Na + ) concentration from the subsequent stage. Short-term changes in the sodium ion (Na + ) concentration in the treated water discharged from the non-regenerative ion exchange device.
如以上般,可知關於再生式離子交換裝置1的再生時及取水時的離子交換處理水W1的水質,不僅測定電阻率而且亦測定鈉離子(Na+)濃度,基於該些測定值來管理離子交換樹脂層12的再生的適當與否,藉此可適當地進行再生模式/取水模式的切換,並可控制自後段的子系統的非再生式離子交換裝置排出的處理水中的鈉離子(Na+)濃度的短期變動。
As described above, it can be seen that not only the resistivity but also the sodium ion (Na + ) concentration is measured for the quality of the ion-exchange treated water W1 during regeneration and water extraction of the regenerative
1‧‧‧再生式離子交換裝置 1‧‧‧Regenerative ion exchange device
2‧‧‧水質測定裝置 2‧‧‧Water quality measuring device
3‧‧‧第1排出管 3‧‧‧1st discharge pipe
4‧‧‧第2排出管 4‧‧‧Second discharge pipe
5‧‧‧自動閥 5‧‧‧Automatic valve
6‧‧‧供給管 6‧‧‧Supply pipe
7‧‧‧第1藥液供給管 7‧‧‧No.1 chemical liquid supply pipe
8‧‧‧第2藥液供給管 8‧‧‧Second chemical liquid supply pipe
9‧‧‧再生廢水排出管 9‧‧‧Regeneration wastewater discharge pipe
10‧‧‧水質管理系統 10‧‧‧Water quality management system
11‧‧‧再生式離子交換塔 11‧‧‧Regenerative ion exchange tower
12‧‧‧離子交換樹脂層 12‧‧‧Ion exchange resin layer
21‧‧‧電阻率計 21‧‧‧Resistivity meter
22‧‧‧離子濃度計 22‧‧‧Ion concentration meter
23‧‧‧第1自動閥 23‧‧‧No. 1 automatic valve
24‧‧‧第2自動閥 24‧‧‧Second automatic valve
25‧‧‧第3自動閥 25‧‧‧3rd automatic valve
26‧‧‧第1廢水排出管 26‧‧‧No.1 wastewater discharge pipe
27‧‧‧第2廢水排出管 27‧‧‧Second wastewater discharge pipe
71‧‧‧加熱器(板式熱交換器) 71‧‧‧Heater (plate heat exchanger)
111‧‧‧交換塔本體 111‧‧‧Exchange tower body
W‧‧‧前處理水 W‧‧‧Pre-treatment water
W1‧‧‧離子交換處理水 W1‧‧‧Ion exchange treated water
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JPH09117679A (en) * | 1995-10-24 | 1997-05-06 | Japan Organo Co Ltd | Regeneration of ion exchange resin tower |
TWI296539B (en) * | 2005-04-13 | 2008-05-11 | United States Filter Corp | Method and system for purifying liquids and method of regeneration ion exchange media |
TWI411153B (en) * | 2005-07-26 | 2013-10-01 | Pionetics Corp | Electrochemical ion exchange with textured membranes and cartridge |
TWI483778B (en) * | 2009-09-30 | 2015-05-11 | Kurita Water Ind Ltd | Ion exchange device |
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JPH09117679A (en) * | 1995-10-24 | 1997-05-06 | Japan Organo Co Ltd | Regeneration of ion exchange resin tower |
TWI296539B (en) * | 2005-04-13 | 2008-05-11 | United States Filter Corp | Method and system for purifying liquids and method of regeneration ion exchange media |
TWI411153B (en) * | 2005-07-26 | 2013-10-01 | Pionetics Corp | Electrochemical ion exchange with textured membranes and cartridge |
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