TW201805568A - Irradiation body and irradiation device enhancing the easiness of removal and attachment of a heat dissipation member to be attached by suction caused by a negative pressure - Google Patents

Abstract

Disclosed are an irradiation body and an irradiation device, the irradiation body comprising: a substrate; a first heat dissipation member; a second heat dissipation member comprising a support part for supporting the first heat dissipation member; and a moving mechanism for moving the first heat dissipation member with respect to the support part. The support part has a suction plane provided with an air suction path for sucking the first heat dissipation member by a negative pressure. The support part supports the first heat dissipation member so as to be able to move it to: a first position where the first heat dissipation member is in contact with the suction plane by the negative pressure; a second position where the first heat dissipation member is spaced apart from the suction plane and the first heat dissipation member can be attached to the suction plane by suction caused by the negative pressure; and a third position where the first heat dissipation member is spaced apart from the suction plane further than the second position. The moving mechanism moves the first heat dissipation member to the second position and the third position.

Description

Irradiation body and irradiation device

Embodiments of the present invention relate to an irradiation body and an irradiation device.

In the manufacturing process of various films or liquid crystal panels, a UV curing device is used to cause a curing reaction to occur in the UV curing resin. Such an ultraviolet irradiation device is known to have a structure in which a plurality of light-emitting diodes (Light Emitting Diodes, LEDs) and the like are used in a row as a light source. For an ultraviolet irradiation device using a light-emitting element, in order to ensure the same or more irradiation characteristics as a high-pressure discharge lamp, the light-emitting element is gradually increasing its output.

As the light-emitting element has a higher output, the junction temperature of the light-emitting element tends to increase. Therefore, an ultraviolet irradiation device using a light-emitting element adopts a cooling structure of an air-cooling method or a water-cooling method, and cools a heat-radiating member that supports a substrate on which the light-emitting element is mounted. Such a cooling structure has a problem that when the heat-radiating member to be cooled and the substrate on which the light-emitting element is mounted are not properly adhered, the amount of change in the illuminance distribution in the in-plane direction of the substrate increases. As a countermeasure to the problem, a technique is known in which a silicon grease or an adhesive tape is applied between the substrate and the heat radiating member in order to improve the adhesion between the substrate and the heat radiating member. Improve adhesion.

In addition, in the ultraviolet irradiation device, the illuminance of the ultraviolet rays from the light emitting element is reduced due to deterioration with time or adhesion of impurities or the like from the object to be irradiated with the ultraviolet rays. Therefore, the light emitting elements may be replaced. Therefore, when a silicone grease or an adhesive tape is used to improve the adhesion, it is difficult to replace the light-emitting element, and the light-emitting element lacks maintainability (maintainability).

Therefore, as an ultraviolet irradiation device, a structure has been proposed which includes a first heat radiating member supporting a substrate and a second heat radiating member supporting the first heat radiating member, and the first heat radiating member is radiated by negative pressure through the second heat radiating member. Parts are sucked. In the structure, the first heat radiating member is detachably adsorbed on the adsorption surface of the second heat radiating member, thereby ensuring the maintainability of the light emitting element, and improving the adhesion between the first heat radiating member and the second heat radiating member. To improve heat dissipation of the light-emitting element via the first heat dissipation member and the second heat dissipation member.

[Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 2010-197540

[Problems to be Solved by the Invention] However, for a structure in which a first heat radiating member is adsorbed to a second heat radiating member by using a negative pressure, by improving the adhesion between the adsorption surface of the second heat radiating member and the first heat radiating member, It may be difficult to remove the first heat radiating member adsorbed on the adsorption surface of the second heat radiating member from the adsorption surface even when the suction by the negative pressure is stopped. On the other hand, in the above-mentioned structure, in order to improve the detachability of the first heat radiating member with respect to the second heat radiating member, between the suction surface of the second heat radiating member and the first heat radiating member supported by the second heat radiating member. When the distance is increased, it may be difficult for the first heat radiating member to be uniformly adsorbed on the adsorption surface.

Therefore, an object of the present invention is to provide an irradiating body and an irradiating device capable of improving the detachability of a heat radiating member adsorbed by negative pressure.

[Technical Means for Solving the Problem] The irradiated body of the embodiment includes: a substrate provided with a light emitting element; a first heat radiation member provided with the substrate and releasing heat conducted from the substrate; a second heat radiation member including A support portion that supports the first heat dissipation member and releases heat transmitted from the first heat dissipation member; and a moving mechanism that moves the first heat dissipation member relative to the support portion. The support portion includes an adsorption surface provided with an air suction path, and movably supports the first heat radiating member at a first position, a second position, and a third position. Pressure to suck the first heat radiating member, the first position is a position where the first heat radiating member and the adsorption surface contact due to the negative pressure, and the second position is the first A position at which the heat radiation member is separated from the suction surface and the first heat radiation member can be suctioned to the suction surface by using the negative pressure, and the third position is such that the first heat radiation member is more than the second position Further away from the suction surface. The moving mechanism moves the first heat radiating member to the second position and the third position. An irradiation device according to an embodiment includes the illuminating body and a mounting portion to detachably mount the illuminating body.

[Effects of the Invention] According to the present invention, it is possible to improve the detachability of the heat radiating member that is adsorbed by the negative pressure.

The irradiated body of the embodiment described below includes a substrate, a first heat radiating member, a second heat radiating member, and a moving mechanism. The light emitting element is provided on the substrate. The substrate is disposed on the first heat dissipation member. The first heat radiation member releases heat conducted from the substrate. The second heat radiating member includes a supporting portion that supports the first heat radiating member. The second heat radiating member releases heat conducted from the first heat radiating member. The moving mechanism moves the first heat radiating member relative to the support portion. The support portion includes an adsorption surface provided with an air suction path for suctioning the first heat radiating member by using a negative pressure. The supporting portion movably supports the first heat dissipation member in the first position, the second position, and the third position. In the first position, the first heat radiating member is in contact with the suction surface due to negative pressure. In the second position, the first heat radiating member is separated from the adsorption surface, and the first heat radiating member can be adsorbed on the adsorption surface by using a negative pressure. In the third position, the first heat radiating member is farther from the suction surface than the second position. The moving mechanism moves the first heat radiating member to the second position and the third position.

The first heat radiating member in the irradiator according to the embodiment described below includes a contact surface that is in contact with the adsorption surface. The contact surface is provided with a recessed portion through which air ejected from the air suction path can enter.

In addition, a plurality of light-emitting elements are arranged on a substrate in an irradiator according to an embodiment described below. The first heat radiating member extends along an arrangement direction of the plurality of light emitting elements. The recessed portion is provided at an end in the arrangement direction of the contact surface.

The moving mechanism in the irradiator according to the embodiment described below includes a mounting hole and a moving member. The mounting hole is provided in the second heat dissipation member. The moving part passes through the mounting hole, so that the first heat radiation part is moved to the second position and the third position.

The irradiation device according to the embodiments described below includes the irradiation body and a mounting portion. The irradiating body is detachably mounted on the mounting portion.

(Embodiment) (Structure of an irradiation apparatus) Hereinafter, the irradiation apparatus of embodiment is demonstrated with reference to drawings. FIG. 1 is a perspective view schematically showing an irradiation apparatus according to the embodiment. As shown in FIG. 1, the irradiation device 1 according to this embodiment includes a plurality of irradiation bodies 2, a support base 3 that supports the plurality of irradiation bodies 2, a suction device 4 that introduces a negative pressure to each irradiation body 2, and an irradiation device. The body 2 is a cooling device 5 for cooling. The irradiation apparatus 1 according to the embodiment is configured as an ultraviolet irradiation apparatus.

The support base 3 is formed in a rectangular parallelepiped shape and includes a plurality of mounting portions 3 a, each of which is configured to detachably mount a plurality of irradiation bodies 2. The plurality of mounting portions 3 a are arranged at a predetermined interval on one side surface 3 b of the support base 3, and are formed so as to extend along the bottom surface 3 c of the support base 3. The mounting portion 3 a is formed in a concave shape corresponding to the outer shape of the irradiating body 2, and is opened on one side surface 3 b of the support base 3. The mounting portion 3 a includes a support projection (not shown) that supports the bottom surface side of the irradiator 2. Thereby, each irradiating body 2 is supported so that it can attach and detach to the attachment part 3a of the support base 3 by sliding in the X direction. In addition, although not shown in the figure, a configuration may also be adopted in which the engaging convex portion provided on the inner surface of the mounting portion 3 a is engaged with the engaging groove provided on the outer peripheral surface of the irradiating body 2, Each irradiating body 2 is detachably supported by the attachment part 3a.

In addition, a plurality of suction communication paths 6 a are provided inside the support base 3, and the plurality of suction communication paths 6 a communicate with an air suction path 14 which will be described later included in each irradiating body 2. Each suction communication path 6 a is formed in a linear shape along each irradiation body 2 and is connected to the suction device 4. The support base 3 is not limited to a structure including a plurality of suction communication paths 6 a, and may be a structure in which the support body 3 is arranged so as to cross the respective irradiating bodies 2 with respect to the X direction in which the irradiating bodies 2 are arranged. A suction communication path formed by serpentine.

In addition, a plurality of cooling communication paths 6 b are provided inside the support base 3, and the plurality of cooling communication paths 6 b communicate with a flow path 18 included in each of the irradiating bodies 2, which will be described later. Each cooling communication path 6b is independently connected to the cooling device 5 which circulates a cooling fluid. The support base 3 is not limited to a structure including a plurality of independent cooling communication paths 6b, and may be a structure including one formed so as to connect the flow paths 18 of the irradiating bodies 2 to each other. Cooling communication path. In addition, although not shown, the support base 3 may be provided with a flow path for circulating a cooling fluid by the cooling device 5 so that the irradiating body 2 and the support base 3 can be cooled together.

The suction device 4 includes a negative pressure introduction pipe 4 a that sucks air from the suction communication path 6 a that is connected to one end of the suction communication path 6 a of the support base 3. Although not shown, the cooling device 5 includes a heat exchanger that cools the cooling fluid, and a pump that circulates the cooling fluid. In addition, the cooling device 5 includes a connection pipe 5 a that circulates a cooling fluid through a cooling communication path 6 b that is connected to one end of the cooling communication path 6 b that supports the base 3. Although cooling water is used as the cooling fluid, it is not limited to water, and for example, oil or gas may be used.

In addition, the irradiating body 2 mounted on the mounting portion 3 a is electrically connected to a power source device (not shown) via a power supply line connected to a connection terminal (not shown) provided on the irradiating body 2. Ends. Furthermore, connection members such as a connector (not shown) are provided on the power supply line.

(Structure of Irradiation Body) FIG. 2 is a perspective view schematically showing an irradiation body included in the irradiation apparatus according to the embodiment. FIG. 3 is a perspective view schematically showing an irradiating body in the embodiment from a side where light emitting elements are arranged. FIG. 4 is a cross-sectional view showing a state in which the first heat radiating member is attached to the second heat radiating member in the irradiating body according to the embodiment. 5 is a cross-sectional view showing a state in which the first heat radiating member is moved by the moving mechanism in the irradiating body according to the embodiment. 6 is a cross-sectional view showing a state in which the first heat radiating member is adsorbed on the second heat radiating member in the irradiated body according to the embodiment.

As shown in FIG. 2, the irradiating body 2 is formed in a long shape and includes: a substrate 8 provided with a plurality of light emitting elements 7; a first heat dissipation member 11 that releases heat conducted from the substrate 8; and a second heat dissipation member 12 , Releases heat conducted from the first heat radiating member 11. The irradiating body 2 includes a moving mechanism 15 that moves the first heat radiating member 11 relative to the second heat radiating member 12.

As the light emitting element 7, a light emitting diode (LED) or a semiconductor laser (LD) that emits ultraviolet rays is used. The light-emitting element 7 is not limited to a light-emitting element that emits ultraviolet rays, and a light-emitting element that emits visible light or infrared rays may be used. The "ultraviolet light" referred to herein means light having a peak wavelength of 180 nm or more and 450 nm or less.

In addition, the plurality of light-emitting elements 7 are arranged in a straight line along the long-side direction of the substrate 8, that is, the X-direction. In addition, the arrangement of the plurality of light emitting elements 7 is not limited to a structure arranged in a straight line along one row, and may be a structure arranged in a plurality of rows or alternately staggered in a zigzag direction in the X direction. structure. In addition, a plurality of light emitting elements may be alternately arranged on the substrate 8 in the X direction according to the needs of irradiating desired light.

As shown in FIG. 3, the substrate 8 is made of, for example, a long substrate made of ceramic, and a printed wiring (not shown) formed in a desired pattern, such as silver, is provided on the substrate. The plurality of light emitting elements 7 are electrically connected to the printed wiring and are provided on the substrate 8.

In addition, although not shown, the areas of the substrate 8 other than the connection terminals to which the light-emitting elements 7 are connected and the power terminals that supply power from the power supply device are covered with a cover film to ensure insulation and prevent corrosion. The cover film is formed of, for example, an inorganic material having a glass material or the like as a main component. Furthermore, if necessary, the substrate 8 may be formed of white alumina having a high reflectance to improve the reflectivity of the light emitted from the light emitting element 7. In addition, the substrate 8 may be formed of aluminum nitride having high thermal conductivity to ensure high thermal conductivity.

The first heat radiating member 11 is formed in a block shape from a metal material having thermal conductivity, and as shown in FIG. 2 and FIG. 3, it is formed in a long shape extending along the long side direction of the substrate 8, that is, the X direction. It is preferable to use, for example, lighter aluminum and copper having higher thermal conductivity as the metal material forming the first heat radiating member 11. In addition, the first heat radiating member 11 is provided with a substrate 8 in contact with the bottom surface 11 a facing the outside of the illuminating body 2 to release heat conducted from the substrate 8. That is, the heat generated by the light emitting element 7 is conducted to the substrate 8, and the heat conducted to the substrate 8 is conducted to the first heat dissipation member 11, and thus, the heat of the light emitting element 7 is released from the first heat dissipation member 11.

In addition, regarding the first heat radiating member 11, the structure in which the substrate 8 is provided in contact refers to supporting the substrate 8 on the first heat radiating member in a thermally conductive contact state between the substrate 8 and the bottom surface 11 a of the first heat radiating member 11. The construction of 11. The contact state includes and indicates a state of direct contact and a state of indirect contact. In addition, the state of indirect contact includes, for example, a state in which it is fixed through an adhesive or an adhesive tape, or a state in which it is fixed through a surface-adhesive member such as silicone grease having good thermal conductivity. In this embodiment, the substrate 8 and the bottom surface 11 a of the first heat radiating member 11 are preferably provided in a state of being in close contact with each other.

In addition, a contact surface 11 b that is in contact with the second heat radiation member 12 is formed in a planar shape on the side of the first heat radiation member 11 opposite to the bottom surface 11 a on which the substrate 8 is provided. In addition, as shown in FIGS. 3 and 4, in the first heat radiation member 11, the flange-shaped engagement projections 11 c engaged with the second heat radiation member 12 are formed along the X direction so as to be orthogonal to the X direction. Both sides of the contact surface 11b in the Y direction.

The second heat radiating member 12 is formed in a block shape from a metal material having thermal conductivity, and as shown in FIG. 2, it is formed in a long shape extending along the long side direction of the substrate 8, that is, the X direction. Like the first heat radiating member 11, it is preferable to use, for example, lighter aluminum and copper having higher thermal conductivity as the metal material forming the second heat radiating member 12.

The second heat radiating member 12 includes a support portion 13 that supports the first heat radiating member 11. The support portion 13 is formed in a concave shape corresponding to the outer shape of the first heat radiating member 11. The first heat radiating member 11 is provided to be able to slide in the X direction with respect to the support portion 13, and is detachably supported by the support portion 13 by sliding in the X direction. In addition, inside the support portion 13, a suction surface 12 a that is in contact with the contact surface 11 b is formed in a planar shape at a position facing the contact surface 11 b of the first heat radiating member 11 supported by the support portion 13. In addition, as shown in FIGS. 2 and 4, on both sides in the Y direction of the supporting portion 13, engaging grooves 12 b are formed along the X direction, and the engaging grooves 12 b and the first heat radiating member supported on the supporting portion 13. The engaging projections 11c of 11 are engaged. A moving mechanism 15 is arranged on the bottom surface 12 c of the second heat radiating member 12.

In addition, an air suction path 14 is formed in the support portion 13, and the air suction path 14 is used to suck the first heat dissipation member 11 by using a negative pressure, so that the contact surface 11 b of the first heat dissipation member 11 and the support portion 13 The adsorption surface 12a is in contact. As shown in FIG. 2, the air suction path 14 includes a suction groove 14 a extending in the X direction along the contact surface 11 b and a plurality of suction holes 14 b extending in a direction orthogonal to the suction surface 12 a. The plurality of suction holes 14b are arranged at predetermined intervals in the X direction, and one end thereof communicates with the suction groove 14a. In addition, the other end of each suction hole 14 b penetrates to the outside of the second heat radiating member 12. The number of suction holes 14b is not limited, and for example, a single suction hole 14b may be used.

In addition, as shown in FIGS. 4, 5, and 6, the support portion 13 movably supports the first heat radiating member 11 at different first positions P1, second positions P2, and third positions P3 in the Z direction, respectively. At the first position P1, as shown in FIG. 6, the contact surface 11b of the first heat radiating member 11 and the suction surface 12a are in contact with each other due to negative pressure. At the second position P2, as shown in FIG. 5, the contact surface 11b of the first heat radiating member 11 is separated from the suction surface 12a by a distance capable of being suctioned by negative pressure. That is, at the second position P2, the first heat radiating member 11 is separated from the suction surface 12a, and the first heat radiating member 11 can be suctioned to the suction surface 12a by a negative pressure. In the third position P3, as shown in FIG. 4, the first heat radiating member 11 is farther from the suction surface 12a than the second position P2. That is, at the third position P3, the separation distance between the contact surface 11b of the first heat radiating member 11 and the adsorption surface 12a is greater than the separation distance between the contact surface 11b of the first heat radiating member 11 and the adsorption surface 12a at the second position P2. In addition, in the third position P3, the engaging convex portion 11c of the first heat radiating member 11 is supported on the lower surface inside the engaging groove 12b of the supporting portion 13, and the bottom surface 11a of the first heat radiating member 11 is from the bottom surface of the second heat radiating member 12. 12c protrudes downward.

As shown in FIG. 2, FIG. 4, and FIG. 5, the moving mechanism 15 includes a plurality of mounting holes 16, a support portion 13 provided in the second heat dissipation member 12, and a plurality of moving screws 17 as passing through the mounting holes 16. Moving parts. The mounting holes 16 and the moving screws 17 are respectively disposed on both sides in the Y direction of the support portion 13 and are disposed at a plurality of positions in the X direction of the support portion 13 at predetermined intervals.

The mounting hole 16 is formed, for example, from the bottom surface 12 c of the second heat radiating member 12 to the engaging groove 12 b of the support portion 13. The moving screw 17 includes a screw portion 17 a and a head portion 17 b, and the screw portion 17 a is screwed into the mounting hole 16. The head portion 17 b is formed to have a size that contacts the bottom surface 11 a of the first heat radiating member 11.

The operation screw 17 is screwed into the mounting hole 16 to change the relative position of the head 17 b of the first heat dissipation member 11 to the bottom surface 11 a in the Z direction. The screw portion 17a of the moving screw 17 is screwed into the mounting hole 16, whereby the head portion 17b abuts the bottom surface 11a of the first heat radiating member 11, and the first heat radiating member 11 is lifted by the head 17b. The moving screw 17 lifts the first heat radiating member 11 by the head 17b, thereby moving the first heat radiating member 11 from the third position P3 to the second position P2.

Furthermore, if necessary, the moving screw 17 may be further screwed in, thereby further moving the first heat radiating member 11 from the second position P2 to the first position P1, so that the negative pressure can be used to assist The first heat radiating member 11 adsorbed on the adsorption surface 12 a at the first position P1 is supported. In addition, the mounting hole 16 may be formed as a non-through hole, and the depth of the non-through hole may be set so that the first heat dissipation member 11 moves when it is moved from the third position P3 to the second position P2 by the moving screw 17. The screw-in operation with the screw 17 is restricted. Accordingly, the first heat radiating member 11 can be easily and appropriately moved to the second position P2.

In addition, as the moving screw 17 is moved below the mounting hole 16, the first heat radiating member 11 is lowered from the second position P2 to the third position P3 with respect to the support portion 13 by its own weight. In this way, the moving screw 17 is provided on the support portion 13 so that the first heat radiating member 11 can be moved to the second position P2 and the third position P3.

Furthermore, in the embodiment, the first heat radiating member 11 is supported by the head portion 17b of the moving screw 17 while the first heat radiating member 11 is moved to the suction surface 12a side, but the structure is not limited to this. For example, the front end of the screw portion 17a of the moving screw 17 may move the first heat dissipation member 11 to the suction surface 12a while supporting the engaging convex portion 11c of the first heat dissipation member 11.

A flow path 18 through which the cooling fluid flows is provided inside the second heat radiating member 12. The flow path 18 is formed in a U shape extending along the X direction of the second heat radiating member 12 and folded back at one end side in the X direction. In addition, both ends of the U-shaped flow path 18 penetrate to the end surface of the second heat radiating member 12 and are connected to the cooling communication path 6 b of the support base 3.

In addition, it is desirable that the contact surface 11b of the first heat radiating member 11 and the suction surface 12a of the second heat radiating member 12 ensure the flatness with high accuracy to improve the adhesion. In addition, if necessary, the substrate 8 on which the light emitting element 7 is mounted may be air-tightly covered with a covering member (not shown) having light transmittance, for example, ultraviolet transmittance. By using such a cover member, deterioration of the light emitting element 7 or the substrate 8 due to external air can be suppressed.

(Moving Operation of First Heat Dissipating Member) First, as shown in FIG. 4, the first heat dissipating member 11 is attached to the support portion 13 of the second heat dissipating member 12. At this time, the first heat radiating member 11 is located at the third position P3 in the support portion 13. Next, the moving screw 17 of the moving mechanism 15 is screwed in, whereby the first heat dissipation member 11 is moved by the head portion 17 b of the movement screw 17, and the first heat dissipation member 11 is moved from the third position P3. Go to the second position P2.

As shown in FIGS. 1 and 2, in the illuminating body 2, air is sucked from the suction hole 14 b of the air suction path 14 by the suction device 4, and thus, in the support portion 13 of the second heat radiation member 12, A negative pressure is generated along the suction groove 14a. As shown in FIG. 5 and FIG. 6, using the negative pressure, the first heat radiating member 11 that has been moved to the second position P2 is moved from the second position P2 to the first position P1 and is adsorbed on the second heat radiating member 12. Suction surface 12a.

At the first position P1, the first heat radiating member 11 is sucked by the air suction path 14, so that the entire contact surface 11b is brought into contact with the suction surface 12a of the second heat radiating member 12 and is brought into a close adsorption state. Accordingly, the thermal conductivity between the first heat radiating member 11 and the second heat radiating member 12 is improved. Therefore, the light emitting element 7 can be efficiently cooled through the first heat radiating member 11 and the second heat radiating member 12. In this way, the first heat radiating member 11 is attracted to the second heat radiating member 12 by using the negative pressure, whereby the change in the illuminance distribution in the longitudinal direction of the substrate 8 is suppressed, and the illuminance distribution is made uniform.

When the illuminating body 2 is turned on, for example, when the light emitting element 7 is turned on, a negative pressure is always introduced, thereby ensuring the adhesion between the first heat radiating member 11 and the second heat radiating member 12. In addition, by stopping the introduction of negative pressure through the air suction path 14, the first heat radiating member 11 that the contact surface 11b adsorbs on the suction surface 12a of the second heat radiating member 12 is lowered by its own weight and moves from the first position P1 to the second Position P2. Next, by moving the moving screw 17 of the moving mechanism 15 downward, the first heat radiating member 11 and the head portion 17b of the moving screw 17 are lowered by their own weight, and moved from the second position P2 to the third position P3.

As described above, the irradiating body 2 according to the embodiment includes the moving mechanism 15 that moves the first heat radiating member 11 relative to the support portion 13. The support portion 13 movably supports the first heat radiation member 11 at a first position P1, a second position P2, and a third position P3. The moving mechanism 15 moves the first heat radiating member 11 to the second position P2 and the third position P3. In this way, in the support portion 13, the second position P2 where the first heat radiating member 11 is sucked toward the suction surface 12a of the second heat radiating member 12 and the first position where the first heat radiating member 11 is suctioned on the suction surface 12a. Ensure space between P1. Therefore, when the introduction of the negative pressure through the air suction path 14 is stopped, a gap is easily generated between the suction surface 12 a of the second heat radiating member 12 and the contact surface 11 b of the first heat radiating member 11. The first heat radiating member 11 is removed from the heat radiating member 12. Therefore, the detachability of the first heat radiating member 11 that is adsorbed to the second heat radiating member 12 by the negative pressure can be improved.

As a result, it is possible to ensure the maintainability of maintenance work such as when the light emitting element 7 is degraded or when it is malfunctioning. In addition, the suction between the first heat radiating member 11 and the second heat radiating member 12 is improved by the suction using the negative pressure. Therefore, the heat radiation of the light emitting element 7 can be improved. Therefore, in a structure in which a plurality of light-emitting elements 7 are arranged on the substrate 8, it is possible to suppress changes in the illuminance distribution of the plurality of light-emitting elements 7, that is, it is possible to uniformize the illuminance distribution.

In addition, the moving mechanism 15 of the irradiator 2 according to the embodiment includes a moving screw 17 that passes through the mounting hole 16 to move the first heat radiation member 11 to the second position P2 and the third position P3. Thereby, the moving mechanism 15 can move the 1st heat radiating member 11 to a Z direction with a simple structure.

In addition, the first heat radiating member 11 of the irradiating body 2 is slidably supported by the support portion 13 of the second heat radiating member 12. Therefore, the first heat radiating member 11 can be easily attached and detached, and the maintainability of the light emitting element 7 can be further improved.

In addition, according to the embodiment, the cooling efficiency of the light-emitting element 7 is improved. Therefore, it is possible to suppress a decrease in the illuminance due to the temperature rise of the light-emitting element 7 and shorten the irradiation energy (illuminance) emitted from the irradiator 2 to become stable. Elapsed time (time required for ascent). Therefore, for example, in the process using an ultraviolet curable resin, the processing time (operating time) of each irradiation target object can be shortened, and productivity can be improved.

In addition, according to the embodiment, since the illuminance distribution in the long-side direction (X direction) of the long-shaped irradiating body 2 can be uniformized, it is particularly suitable for manufacturing a large-sized liquid crystal panel having a long side of about 1 to 2 m. And will improve the manufacturing quality of large LCD panels.

In addition, the first heat dissipating member 11 in the embodiment is provided with flange-shaped engaging protrusions 11 c protruding from both sides in the Y direction, but the overall outer shape may be formed in a flat plate shape to support the second heat dissipating member 12 Department 13. As a result, the external shape of the first heat radiating member 11 can be simplified, and thus the productivity of the first heat radiating member 11 and the irradiating body 2 can be improved.

Hereinafter, modification examples of the irradiating body included in the irradiating apparatus according to the embodiment will be described with reference to the drawings.

(First Modification) FIG. 7 is a cross-sectional view schematically showing an irradiation body according to a first modification of the embodiment. The first modification is different from the embodiment in that a recessed portion is provided in the contact surface 11 b of the first heat radiating member 11. In the first modification, the same reference numerals are assigned to the same configurations as those of the embodiment, and descriptions thereof are omitted.

As shown in FIG. 7, a concave portion 11 d is provided in the contact surface 11 b of the first heat radiating member 11 included in the irradiating body 20 according to the first modification to allow air ejected from the air suction path 14 to enter. When the first heat radiating member 11 whose contact surface 11b has been adsorbed on the adsorption surface 12a of the second heat radiating member 12 is removed, the air can be smoothly separated from the adsorption surface by ejecting air from the air suction path 14 into the recess 11d. 12a, thereby forcibly releasing the suction state of the first heat radiating member 11.

In addition, the recessed portions 11 d are provided at both end portions in the X direction (the arrangement direction of the plurality of light emitting elements 7) of the contact surface 11 b of the first heat radiating member 11. By disposing the recessed portion 11d as described above, the user can insert a fingertip or the like from an end portion of the first heat radiating member 11 supported on the support portion 13 to a gap generated between the suction surface 12a and the contact surface 11b, thereby The operation of removing the first heat radiating member 11 adsorbed to the second heat radiating member 12 can be performed more easily.

As described above, when the irradiating body 20 of the first modification example is the same as the embodiment, when the introduction of the negative pressure through the air suction path 14 is stopped, it is easy to contact the first heat radiating member 11 on the suction surface 12 a of the second heat radiating member 12 Since a gap is generated between the surfaces 11 b, the first heat radiating member 11 can be easily removed from the second heat radiating member 12. Therefore, the detachability of the first heat radiating member 11 adsorbed to the second heat radiating member 12 by the negative pressure can be further improved. In addition, in the first modification, the recessed portion 11 d through which the air ejected from the air suction path 14 enters is provided on the contact surface 11 b of the first heat radiating member 11, so that the suction surface 12 a of the second heat radiating member 12 can be forcibly released. Adsorption state with the contact surface 11b. Therefore, according to the first modification, the detachability of the first heat radiating member 11 that is adsorbed to the second heat radiating member 12 by the negative pressure can be further improved.

(Second Modification) FIG. 8 is a cross-sectional view schematically showing an irradiating body in a second modification. The second modification is different from the embodiment in the structure and moving mechanism of the first heat radiating member and the second heat radiating member. As shown in FIG. 8, the irradiator 30 in the second modification includes a plurality of light emitting elements 7, a substrate 8, a first heat radiating member 31, a second heat radiating member 32, and a moving mechanism 35.

The first heat radiating member 31 is formed of a metal material having thermal conductivity in a substantially semicircular cross-section, and is formed in a long shape extending along the X direction of the substrate 8. In addition, on the side of the first heat radiating member 31 opposite to the bottom surface 31 a on which the substrate 8 is provided, the contact surface 31 b that is in contact with the second heat radiating member 32 is formed into a curved surface with an arc-shaped cross section. In addition, on both sides of the contact surface 31 b in the Y direction orthogonal to the X direction of the first heat radiating member 31, engaging convex portions 31 c engaged with the second heat radiating member 32 are formed along the X direction.

The second heat radiating member 32 is formed in a block shape from a metal material having thermal conductivity, and includes a support portion 33 that supports the first heat radiating member 31. The support portion 33 is formed in a concave shape corresponding to the outer shape of the first heat radiating member 31. The first heat radiating member 31 is provided so as to be able to slide in the X direction with respect to the support portion 33, and is detachably supported by the support portion 33 by sliding in the X direction. In addition, inside the support portion 33, at a position facing the contact surface 31b of the first heat radiating member 31 supported by the support portion 33, the adsorption surface 32a in contact with the contact surface 31b is formed into a curved surface having a circular arc shape in cross section. In addition, on both sides in the Y direction of the supporting portion 33, engaging grooves 32 b are formed along the X direction, and the engaging grooves 32 b are engaged with the engaging projections 31 c of the first heat radiating member 31 supported on the supporting portion 33. Together. A moving mechanism 35 is arranged on the bottom surface 32 c of the second heat radiating member 32.

In addition, a plurality of air suction paths 34 are provided in the support portion 33, and the plurality of air suction paths 34 are configured to suck the first heat radiating member 31 by using a negative pressure. Each air suction path 34 is arranged at a predetermined interval on the suction surface 32 a, and is formed to extend substantially radially with respect to the center of a cross section parallel to the Y direction of the first heat radiating member 31. In addition, like the air suction path 14 in the embodiment, each air suction path 34 includes a plurality of suction grooves 34a extending along the X direction, and a plurality of suction holes 34b communicating with each suction groove 34a. .

In addition, as shown in FIG. 8, the contact surface 31 b of the first heat radiating member 31 is provided with a plurality of recessed portions 31 d into which air ejected from the suction groove 34 a enters. Both ends of the recessed portion 31d in the X direction of the contact surface 31b are provided at positions facing the respective suction grooves 34a. In addition, the recessed portion 31d may be formed to extend along the suction groove 34a, or the recessed portion 31d may be arranged in a plurality of portions along the longitudinal direction (X direction) of the suction groove 34a.

A flow path 38 is provided inside the second heat radiating member 32 in the same manner as the flow path 18 in the embodiment for the cooling fluid to flow. In addition, the flow path 38 is formed in an S shape that is folded back at the end in the X direction so as not to cross the air suction path 34.

In addition, like the second heat radiating member 12 in the embodiment, the support portion 33 of the second heat radiating member 32 movably supports the first heat radiating member 31 at different first, second, and Third position. FIG. 8 shows a state where the first heat radiating member 31 has moved to a second position where the contact surface 31 b of the first heat radiating member 31 can be adsorbed on the suction surface 32 a of the second heat radiating member 32.

As shown in FIG. 8, the moving mechanism 35 includes a plurality of mounting holes 36, a support portion 33 provided in the second heat radiating member 32, and a plurality of insertion pins 37 as moving members passing through the mounting holes 36. The mounting holes 36 and the insertion pins 37 are arranged in the same manner as the mounting holes 16 and the moving screws 17 in the embodiment.

The insertion pin 37 includes, for example, a shaft portion 37 a obtained by cutting a cylindrical tip into a V shape, and the shaft portion 37 a is provided at a predetermined length. The mounting hole 36 is not limited to a circular hole, and may be formed in a long hole shape. The shaft portion 37a of the insertion pin 37 may be formed into an arbitrary shape as necessary.

When the insertion pin 37 is inserted into the mounting hole 36, the shaft portion 37 a protrudes into the support portion 33 through the mounting hole 36, and the shaft portion 37 a lifts the engagement convex portion 31 c of the first heat radiation member 31. At this time, according to the length of the shaft portion 37a, the insertion pin 37 moves the first heat radiation member 31 toward the suction surface 32a side by a predetermined amount of movement, and the first heat radiation member 31 moves from the third position to the second position. As in the embodiment, the first heat radiating member 31 moved to the second position is sucked through the air suction path 34, thereby moving from the second position to the first position, and the contact surface 31b is attracted to the second heat radiating member. 32 的 sorption surface 32a.

As described above, the irradiating body 30 of the second modification is provided with the recessed portion 31 d in the contact surface 31 b of the first heat radiating member 31. Thus, similarly to the first modification, the suction surface of the second heat radiating member 32 can be forcibly released. The state of adsorption between 32a and the contact surface 31b. Therefore, according to the second modification, the first heat radiating member 31 can be easily removed from the second heat radiating member 32, and the detachability of the first heat radiating member 31 that is adsorbed to the second heat radiating member 32 by the negative pressure can be further improved.

As a result, similarly to the embodiment and the first modification, the second modification can ensure the maintainability of the light emitting element 7 and improve the heat dissipation of the light emitting element 7. Therefore, the illuminance distribution of the plurality of light emitting elements 7 can be made uniform.

In addition, in the second modification, the first heat radiating member 31 is sucked at a plurality of locations through a plurality of air suction paths 34. Therefore, the suction force can be further increased, and the first heat radiating member 31 and the second heat can be radiated. The stability of the adsorption state in which the member 32 is in close contact is improved.

In addition, the first heat radiation member 31 of the second modification includes the contact surface 31 b. Therefore, compared with the embodiment and the first modification, the contact area between the first heat radiation member 31 and the second heat radiation member 32 can be increased. It is possible to further improve the heat radiation property of the light emitting element 7.

In addition, the moving mechanism 35 in the second modification includes an insertion pin 37 that passes through the mounting hole 36 to move the first heat radiation member 31 to the second position P2 and the third position P3. Accordingly, the moving mechanism 35 can move the first heat radiating member 31 in the Z direction with a simple structure.

In addition, in the second modification, the first heat radiating member 31 also slides in the X direction with respect to the support portion 33 of the second heat radiating member 32, so that the first heat radiating member 31 can be easily attached to and detached from the support portion 33. Therefore, the maintainability of the light emitting element 7 can be further improved.

Furthermore, in the embodiment, the first modification, and the second modification, a structure in which the bottom surface 11a of the first heat radiating member 11 is lifted by the head portion 17b of the moving screw 17 or a shaft through which the pin 37 is inserted is adopted. The structure in which the portion 37 a lifts the engaging convex portion 31 c of the first heat radiating member 31 is not limited to this structure. The second heat dissipation members 12 and 32 may be movably provided with other moving members including a holding portion that holds the engaging convex portions 11c and 31c of the first heat dissipation members 11 and 31, for example.

In the present embodiment, a water cooling method is used to cool the first heat radiating member and the second heat radiating member, but it is not limited to the water cooling method. That is, although a flow path is provided in the second heat radiating member, it is not limited to a configuration in which a flow path is provided. The first heat radiation member and the second heat radiation member may be cooled by an air cooling method such as natural air cooling or forced air cooling. When the air cooling method is used, for example, a plurality of heat sinks may be provided on an end face in the longitudinal direction of the second heat radiating member or a bottom face irradiated with light by the light emitting element.

In addition, the present embodiment is configured as an irradiation device that irradiates ultraviolet rays. However, by using a light-emitting element that emits visible light, it can also be configured as a lighting device that irradiates illumination light. In the present embodiment, the first heat radiating member is sucked through an air suction path provided in a support portion of the second heat radiating member. For example, the first heat radiating member may be suctioned by a suction mechanism disposed outside the second heat radiating member. The first heat radiating member is sucked.

Although the embodiment of the present invention has been described, the embodiment is an embodiment presented as an example, and is not intended to limit the scope of the present invention. The embodiment can be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the spirit of the invention. The embodiments and the modifications thereof are included in the scope or spirit of the present invention, and are also included in the invention described in the technical solutions and the equivalent scope thereof.

1‧‧‧ irradiation device
2‧‧‧irradiated body
3‧‧‧ support matrix
3a‧‧‧Mounting Department
3b‧‧‧ one side
3c‧‧‧ Underside
4‧‧‧ Suction device
4a‧‧‧Negative pressure introduction pipe
5‧‧‧ Cooling device
5a‧‧‧Connecting tube
6a‧‧‧suction communication path
6b‧‧‧ cooling communication path
7‧‧‧Light-emitting element
8‧‧‧ substrate
11‧‧‧The first heat dissipation component
11a‧‧‧ Underside
11b‧‧‧contact surface
11c‧‧‧ Engagement protrusion
11d‧‧‧Concave
12‧‧‧Second heat dissipation component
12a‧‧‧ Adsorption surface
12b‧‧‧Slot
12c‧‧‧ Underside
13‧‧‧ support
14‧‧‧Air suction path
14a‧‧‧Suction trough
14b‧‧‧suction hole
15‧‧‧ mobile agency
16‧‧‧Mounting holes
17‧‧‧moving screws
17a‧‧‧Thread
17b‧‧‧Head
18‧‧‧flow
20‧‧‧Irradiated body
30‧‧‧irradiated body
31‧‧‧The first heat dissipation part
31a‧‧‧underside
31b‧‧‧contact surface
31c‧‧‧ Engagement protrusion
31d‧‧‧Concave
32‧‧‧Second heat dissipation component
32a‧‧‧ Adsorption surface
32b‧‧‧ snap groove
32c‧‧‧ Underside
33‧‧‧ support
34‧‧‧Air suction path
34a‧‧‧Suction trough
34b‧‧‧suction hole
35‧‧‧ mobile agency
36‧‧‧Mounting holes
37‧‧‧ insert pin
37a‧‧‧Shaft
38‧‧‧flow
P1‧‧‧First position
P2‧‧‧Second position
P3‧‧‧Third position

FIG. 1 is a perspective view schematically showing an irradiation apparatus according to the embodiment. FIG. 2 is a perspective view schematically showing an irradiating body included in the irradiation apparatus according to the embodiment. FIG. 3 is a perspective view schematically showing an irradiating body according to the embodiment from a side where light emitting elements are arranged. FIG. 4 is a cross-sectional view showing a state in which the first heat radiating member is attached to the second heat radiating member in the irradiating body according to the embodiment. 5 is a cross-sectional view showing a state in which the first heat radiating member is moved by the moving mechanism in the irradiating body according to the embodiment. 6 is a cross-sectional view showing a state in which the first heat radiating member is adsorbed on the second heat radiating member in the irradiated body according to the embodiment. FIG. 7 is a cross-sectional view schematically showing an irradiating body according to a first modified example of the embodiment. FIG. 8 is a cross-sectional view schematically showing an irradiating body according to a second modified example of the embodiment.

2‧‧‧irradiated body

7‧‧‧Light-emitting element

8‧‧‧ substrate

11‧‧‧The first heat dissipation component

11a‧‧‧ Underside

11b‧‧‧contact surface

11c‧‧‧ Engagement protrusion

12‧‧‧Second heat dissipation component

12a‧‧‧ Adsorption surface

12b‧‧‧Slot

12c‧‧‧ Underside

13‧‧‧ support

14‧‧‧Air suction path

14a‧‧‧Suction trough

14b‧‧‧suction hole

15‧‧‧ mobile agency

16‧‧‧Mounting holes

17‧‧‧moving screws

17a‧‧‧Thread

17b‧‧‧Head

18‧‧‧flow

P2‧‧‧Second position

Claims (5)

An illuminating body includes: a substrate provided with a light emitting element; a first heat dissipating member provided with the substrate and releasing heat conducted from the substrate; a second heat dissipating member including a support for the first heat dissipating member A support portion that releases heat conducted from the first heat dissipation member; and a moving mechanism that moves the first heat dissipation member relative to the support portion, the support portion including an adsorption surface provided with an air suction path And the first heat dissipation member is movably supported at the first position, the second position, and the third position, and the air suction path is used to suck the first heat dissipation member by using a negative pressure, so The first position is a position where the first heat radiating member is in contact with the suction surface due to the negative pressure, and the second position is a position where the first heat radiating member is separated from the suction surface and can use the negative A position where the first heat radiating member is adsorbed on the adsorption surface, and the third position is a position where the first heat radiating member is farther from the adsorption surface than the second position, and the moving mechanism makes All The first heat radiating member is moved to the second position and the third position. The irradiating body according to item 1 of the scope of patent application, wherein the first heat radiating member includes a contact surface that is in contact with the adsorption surface, and the contact surface is provided with a surface for ejection from the air suction path. Recesses where air enters. The illuminating body according to item 2 of the scope of patent application, wherein a plurality of the light emitting elements are arranged on the substrate, the first heat dissipation member extends along an arrangement direction of the plurality of light emitting elements, and the recess is provided At the end of the contact surface in the arrangement direction. The illuminating body according to any one of claims 1 to 3, wherein the moving mechanism includes: a mounting hole provided in the second heat dissipation member; and a moving member passing through the mounting A hole for moving the first heat dissipation member to the second position and the third position. An irradiation device includes: the irradiating body according to any one of items 1 to 4 of the scope of patent application; and a mounting portion to detachably mount the irradiating body.