TW201802279A - Conveyance apparatus capable of surely cooling an object to be conveyed while conveying the object in a vacuum atmosphere chamber - Google Patents

Abstract

Provided is a conveyance apparatus having a cooling structure with a simple configuration, which is capable of surely cooling an object to be conveyed while conveying the object in a vacuum atmosphere chamber. The conveyance apparatus includes: a conveyance belt (10) wound around at least two rollers (20), (30) for carrying a substrate (S) on an outer surface and advancing around. One portion of one of the portions of the conveyance belt that are positioned between the rollers and advance in opposite directions to each other is configured as an upper belt portion (Uv), and the other one of the portions is configured as a lower belt portion (Dv). The direction along which the upper belt portion and the lower belt portion are opposite to each other is configured as a vertical direction. On at least one surface of the lower surface of the upper belt portion and the upper surface and the lower surface of the lower belt portion, there is a cooling panel (40) with a length equal to or greater than the width of the conveyance belt, which is oppositely arranged in a manner of emptying out a specific interval in the vertical direction. The conveyance apparatus further includes: a cooling means (5) for cooling the cooling panel; and a gas supply means (70) for supplying an inert gas to the space (60) defined by the cooling panel and the conveyance belt.

Description

Conveying device

The present invention relates to a conveying device for conveying an object to be conveyed (mainly a substrate) while cooling it in a cavity in a vacuum atmosphere.

Such a conveying device is known, for example, from Patent Document 1. This device sequentially transfers the substrates as objects to be transported while being held on a tray in a plurality of vacuum atmosphere chambers connected to each other via a gate valve, and is installed in the chambers. The substrate is cooled by a cooling cavity in the middle of its transport path. In the cooling chamber, a plurality of cooling rollers are arranged side by side at a specific interval in the conveying direction, and a plurality of pressing rollers are arranged side by side opposite to each cooling roller. After that, with the cooling rollers and the pressing rollers holding the tray from both sides, the two rollers are driven to rotate, and the tray is conveyed from the upstream side to the downstream side in the conveying direction. During this period, the tray system is cooled by heat exchange due to heat conduction with the cooling roller, and as a result, the substrate system is transported while being cooled.

At each of the cooling rollers, a forward pipe and a return pipe through cooling means are connected respectively. When the pallet is transported, the refrigerant The sections are supplied to the respective cooling rollers via the return pipes, and the refrigerant flows in the internal passages of the respective cooling rollers, and then returns to the cooling means through the return pipes. Here, in the configuration of the above-mentioned prior art example, for example, when the area of the substrate to be transferred is large, the cooling roller can be made longer or even the internal passage can be changed because of this. It is long, so the cooling roller can be effectively cooled. However, for example, when the area of the substrate is small, if the miniaturization of the device is considered, the cooling roller itself must be shortened. Therefore, the system has a problem that the internal path becomes short and the cooling roller cannot be effectively cooled. As a result, the system may not be able to cool the substrate to a certain temperature or less. In addition, when a configuration in which refrigerant is supplied to a plurality of cooling rollers in a vacuum atmosphere chamber is adopted, it becomes a component that requires a lip seal or the like, and also has a problem that the device becomes complicated.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2010-21403

The present invention has been made in view of the foregoing points, and it is an object of the present invention to provide a conveying device having a cooling structure with a simple structure capable of reliably conveying an object to be conveyed while in a cavity of a vacuum atmosphere.

In order to solve the above-mentioned problems, the conveying device of the present invention for conveying objects while cooling the objects to be conveyed in a vacuum atmosphere chamber is characterized in that it includes a conveying belt and is wound around at least two rotating members. On the outer surface, the object to be transported is placed on the outer surface for cyclical advancement. One of the objects to be transported is stored in the part of the transport belt that is positioned between the rotating members and advances in the opposite direction to each other. Let it be the upper band part, and let the other part be the lower band part, and set the direction in which the upper band part and the lower band part oppose each other as the up-down direction, and below the upper band part and the lower band part At least one of the upper and lower surfaces is provided with a cooling panel having a length equal to or greater than the width of the conveying belt, and is arranged opposite to each other at a certain interval in the vertical direction. The conveying device further includes: The cooling means is to cool the cooling panel; and the gas supply means is to supply an inert gas to the space defined by the cooling panel and the conveying belt.

In another aspect of the present invention, it has the following features: that is, two of the above-mentioned conveying devices are arranged so that the upper belt portions thereof face each other, and are configured to borrow In a state where the object to be conveyed is held by the upper and lower belt portions from the upper and lower directions, the conveying belt is advanced forward and backward.

According to the above configuration, the conveying belt is cooled by radiation from the cooling panel opposite to the conveying belt over the entire width direction, and the inert gas supplied to the space is formed by The panel is cooled and cooled, and the cooled inert gas and The belts collide with each other to perform heat exchange, whereby the conveying belt is further cooled. In addition, when the object to be transported is carried on the conveyer belt or is held by the upper and lower pair of conveyer belts, the period from when it is conveyed from the upstream side to the downstream side in the conveyance direction is as described above. Generally, the object to be conveyed is effectively cooled by heat exchange due to heat conduction with the conveyed belt to be cooled. In this case, since the cooling panel is arranged only in the cavity so as to face the conveying belt, the configuration in which the cooling medium is supplied to a plurality of cooling rollers as compared with the above-mentioned prior art example is adopted. In other words, only a relatively simple device configuration is required. Here, the cooling means is constituted, for example, by a cooling head and a refrigerator body provided with a compressor, a condenser, and an expansion valve, and by using a refrigerant supplied from a heat exchanger and circulating to the refrigerator body. Cooling can cool the cooling head including the cooling panel to a specific temperature. In this case, it is only necessary to arrange the cooling head in the cavity, and the structure of the device can be simplified. In addition, the vertical distance between the conveying belt and the cooling panel is the average free stroke of the vacuum (pressure) in the cavity and the inert gas (atoms and molecules) in the cavity when the conveyed object is cooled while being conveyed. For consideration, it is appropriate to set it.

In the present invention, it is desirable to include an atmosphere separation means for surrounding the space and separating the space from the cavity for atmosphere separation. According to this, the cooled inert gas can be repeatedly collided with the conveying belt, and the cooling efficiency of the cooling panel can be improved. Also, it is preferable that the cooling panel is blackened so that the surface on the side of the conveying belt is blackened, and the surface on the side facing away from the conveying belt is mirror-finished. By. According to this, the cooling panel itself is more efficiently cooled, which is advantageous. Furthermore, it is preferable that the gas supply means includes a gas pipe fitted into a hole opened in the cooling panel. According to this, the gas pipe system is cooled by the heat conduction from the cooling panel, and the inert gas system passing through it is preliminarily cooled before being supplied to the space, and the gas pipe system is cooled by The collision of the cooling inert gas with the conveyor belt can further improve the cooling efficiency.

TM ₁ , TM ₂ ‧‧‧ transport device

S‧‧‧ substrate (to be transported)

Vc‧‧‧Cooling cavity (cavity)

1 ₁ , 1 ₂ , 10‧‧‧ transport belt

Dv‧‧‧ Lower Belt

Uv‧‧‧ Upper Belt Department

2a, 3a, 20‧‧‧ drive roller (rotating member)

2b, 3b, 30‧‧‧ Passive roller (rotating member)

4a, 4b, 40‧‧‧ cooling panel

5‧‧‧Freezer

6a, 6b, 60‧‧‧ space

7a, 7b, 70‧‧‧ gas pipes (components of gas supply means)

8‧‧‧ Metal foil (means of atmospheric separation)

[FIG. 1] A cross-sectional view schematically showing the configuration of a conveying device according to a first embodiment of the present invention.

[Fig. 2] A diagram viewed from a line II-II in Fig. 1. [Fig.

[Fig. 3] An enlarged view of a portion surrounded by a one-point chain line in Fig. 1. [Fig.

[Fig. 4] A perspective view of an important part of a partial modification of the first embodiment.

[FIG. 5] A cross-sectional view schematically showing a configuration of a film forming apparatus provided with a conveying apparatus according to a second embodiment.

Hereinafter, referring to the drawings, the object to be conveyed is a substrate S such as a glass substrate or a silicon wafer, and the conveying device of the present invention is used for conveying the substrate S while cooling the substrate S in a vacuum atmosphere chamber. real The application form is explained. Hereinafter, a person who sets the conveying device in the posture shown in FIG. 1 will be described, and the substrate S will be described as a person who moves from the left side to the right side in FIG. 1.

Referring to Fig. 1 and Fig. 2, TM ₁ is a transfer device according to the first embodiment. Although not particularly shown, the transfer device TM ₁ is located in a cooling chamber Vc located in the middle of the transfer path among a plurality of chambers connected to each other via a gate valve. A vacuum pump Pu is connected to the cooling chamber Vc, and can be evacuated to a specific pressure and maintained.

The conveying device TM ₁ is provided with a pair of upper and lower conveying belts 1 ₁ , 1 ₂ that hold the substrate S from both sides of the upper and lower sides and advance the cycle. In FIG. 1, the upper conveying belt 1 ₁ is respectively wound on the driving roller 2 a and the passive roller 2 b arranged at a certain interval in the conveying direction of the substrate S, and is additionally provided on the driving The motor M1 at the roller 2a is rotationally driven to perform the cycle forward at a specific speed. Further, in FIG. 1, a position to transfer the lower side of the conveyor belt _12, also based are wound in that the vertical direction respectively driving roller 2a and the driven roller 2b confrontation with the drive roller 3a and driven roller 3B, and by of the additional motor M2 disposed on the drive roller 3a of the rotational drive, the conveyor belt becomes for ₁₁ weeks back in synchronization proceeds. In this case, the rotation shafts 21, 31 of each of the driving rollers 2a, 3a and each of the passive rollers 2b, 3b are supported by the shaft on the wall surface of the cooling cavity Vc, and protrude to the outside from the cooling cavity Vc. Drive motors M1 and M2 are connected to portions of the drive rollers 2a and 3a, respectively. In addition, for example, the timing belt may be wound around the rotation shafts 21 and 31 of each of the driving rollers 2a and 3a and configured to be synchronously rotated by a single motor.

As each of the conveying belts 1 ₁ and 1 ₂ , it is suitable to select a material having a small specific heat and excellent heat conduction and suitable for use in a vacuum atmosphere. For example, an iron belt having a thickness in a range of 0.1 mm to 1.2 mm can be used. Each conveyor belt _11, width _12, the system response to the size of the substrate S (i.e., the width of the substrate so as to be relatively larger and the S mode) to be set appropriately. On the other hand, the outer surfaces of each of the driving rollers 2a, 3a and the passive rollers 2b, 3b are provided with a material having poor thermal conductivity (high thermal insulation effect) such as rubber or resin, and it is difficult to make the heat from driving roller 2a, 3a and the driven roller 2b, 3b and is conducted to each of the conveyor belt 1 _a, 1 _2. Each of the drive rollers 2a, 3a, and each of the driven roller 2B, lengths 3b, the lines in response to each of the conveyor belt _11, width ₁₂ of is suitable as set, and each said drive roll 2a, 3a, and each of the driven roller 2B, The interval between 3b is appropriately set according to the cooling temperature of the substrate S.

Thereto, respectively in the position of the driving roller 2a, 3a and the driven roller 2B, and 3b to each other at the forward face in the opposite direction of each conveyor belt _11, wherein one of the sandwiching portion ₁₂ of the substrate S in the portion of the set the upper band portion of Uv, additional belt portion and the lower portion Dv set one, the cooling chamber in the Vc, based on the respective conveyor belt _11, the direction of the belt portion under Dv ₁₂ and the lower directions respectively at empty of specific intervals are arranged to be provided on the respective conveyor belt _11, over width equal to the length of the cooling panel ₁₂ of the 4a, 4b. In the present embodiment, the cooling panels 4a and 4b are dimensioned so as to include a length that covers the entire length of the belt Dv in the transport direction of the belt rollers 2a and 3a and the passive rollers 2b and 3b. Developed. The cooling panels 4a and 4b are made of a material having a good thermal conductivity, for example, a plate having a specific thickness made of a metal selected from copper or aluminum or an alloy containing these metals as a main component. The cooling panels 4a, 4b are as shown in FIG. 3, so that the surface 41 on the lower side of the belt portion Dv is blackened, and the surface 42 on the side that faces the lower side of the belt portion Dv is mirror-finished. . The cooling panels 4 a and 4 b are cooled to a specific temperature (for example, 200K) by the refrigerator 5.

The refrigerator 5 is composed of a cooling head 51 in contact with the cooling panels 4a and 4b, and a refrigerator body 52 provided with a compressor, a condenser, and an expansion valve (not shown). The refrigerant is supplied and circulated to the refrigerator body 52 to be cooled. Since the refrigerator main body 52 can use a known structure, further detailed description is omitted. In this embodiment, it is located at a position shifted toward the upstream side (left side in FIG. 1) of the substrate S in the conveying direction, and one cooling head 51 is used for one cooling panel 4 a and 4 b. contact. In addition, 4a, 4b of the cooling headers the contact position of the cooling panel 51, as long as it can be in the substrate S by the conveyor belt _11, first transfer before ₁₂ and for pinching the conveyor belt _{11, 12} is cooled to a predetermined temperature, It is not particularly limited, and it may be configured to have a plurality of arrangements in the conveying direction of the substrate S according to the size of the cooling panels 4a, 4b, the cooling temperature of the substrate S, and the like.

At specific positions of the cooling panels 4a and 4b, holes 43 are formed in the upper and lower directions for penetration, and the holes 43 are fitted and inserted. There are front end portions of gas pipes 7a, 7b which are constituent parts of a gas supply means for supplying inert gas to the spaces 6a, 6b defined by the lower band portion Dv and the cooling panels 4a, 4b. As the inert gas, a rare gas such as helium or argon or nitrogen is used as a mass flow controller (not shown) as a constituent part of a gas supply means provided in the gas pipes 7a and 7b through an intermediary. It is adjusted to a specific flow rate and is supplied to the spaces 6a and 6b.

Here, one cooling head 51 is brought into contact with one cooling panel 4a, 4b at a position shifted toward the upstream side in the conveying direction of the substrate S as in this embodiment, and the cooling panel is cooled. When 4a and 4b are used for cooling, depending on the area of the cooling panels 4a and 4b, there may be a temperature gradient in their surfaces. Thus, based on the conveyor belt _11, the width direction ₁₂ of the substantially central portion, and toward the substrate S of the transport downstream side (i.e. that the contact with the cooling head 51 of a position in the conveyance direction, opposite side ) were made at a location offset 43 defines (in this case one of the holes in the conveyor belt system can also be 1 _1, 1 ₂ of the width direction at specific intervals of a plurality of holes opened). Therefore, if the front ends of the gas pipes 7a, 7b are fitted and inserted, and the inert gas is supplied to the spaces 6a, 6b defined by the lower band portion Dv and the cooling panels 4a, 4b, in terms of the temperature becomes high at a region of the cooling head 51 from the contact position and away from it, has become possible to efficiently conveyor belt _{11, 12} is cooled, and is advantageous. In addition, the number of holes 43 into which the gas pipes 7a and 7b are fitted and inserted or the positions where they are formed with respect to the cooling panels 4a and 4b are not particularly limited, and they correspond to the contact with the cooling panels 4a and 4b. The number of the cooling heads 51 and the area of the lower band portion Dv are appropriately designed.

The interval Ds in the vertical direction between the lower band portion Dv and the cooling panels 4a and 4b is appropriately set in accordance with the type and flow rate of the inert gas supplied to the spaces 6a and 6b. That is, depending on the type and flow rate of the inert gas, the thermal conductivity coefficients of the spaces 6a and 6b are determined, and accordingly, the interval Ds is determined. The larger the thermal conductivity, the more preferable it is, and it is desirable to be 3.0 W / m ² / K or more. For example, if the inert gas is Ar and the flow rate is such that the pressure in the spaces 6a and 6b becomes 100 Pa, the thermal conductivity is 3.0 W / m ² / K. The smaller the interval Ds is, the more ideal it is, and the larger the flow rate to be supplied to the spaces 6a and 6b (the higher the pressure in the spaces 6a and 6b) is, the more ideal.

If according to the above embodiment, the conveyor belt _{11, 12} opposing thereto from the system by the cooling panel, 4b from the radiation 4a, and covers the entire length of the width direction thereof as being cooled, and then, is supplied to the space 6a, 6b in the inert gas system by cooling panel 4a, 4b to be cooled, so that this is made by an inert gas and cooling the conveyor belt _{11, 12} collide, to exchange heat, by Thereby, the conveying belts 1 ₁ and ₁₂ are further cooled. And, with the substrate S to the conveyor belt _{11, 12} to be sandwiched between the above substrate S's and the following system and the conveyor belt _{11, 12} for surface contact in this state from the transport from upstream side toward during transport downstream side is made of, by the heat conduction between the heat ₁₂ to be made cooled conveyor belt _11, due to the exchange, based on the substrate S from beneath from being efficiently cooled as . In this case, since the system is only in the cooling chamber arranged at Vc cooling panel 4a, 4b and the conveyor belt _11, opposite to the manner _12, and head 51 are cooled with cooling panel 4a, 4b to make contacts, Therefore, the structure of the device can be simplified. And wherein the cooling panel 4a, 4b, since the system is a conveyor belt so that _{11, 12} of the side surface 41 and allowed for the processing of black away from the conveyor belt _{11, 12} of the side 42 for For mirror finishers, the cooling panels 4a and 4b themselves are cooled more efficiently. Furthermore, the gas pipes 7a and 7b are inserted into the holes of the cooling panels 4a and 4b. 7b is cooled by cooling the panels 4a, 4b, whereby the inert gas system passing through the interior of the gas pipes 7a, 7b is preliminarily cooled before being supplied into the spaces 6a, 6b, It is made an inert gas and cooled conveyor belt _{11, 12} collide, so that the cooling efficiency of the system can be made further improved.

As mentioned above, although embodiment of this invention was described, this invention is not limited to the said form. The above embodiment has been described with an example in which the holes 43 are formed in the cooling panels 4a and 4b, and only the front ends of the gas pipes 7a and 7b are inserted into each hole 43 as an example. is not limited thereto, can also be configured from the conveyor belt _11, the direction in which the width ₁₂ of one side or both sides of the inert gas is directly introduced into the space 6a, 6b are. Furthermore, for example, the piping can be performed in advance so that a specific length of the gas pipes 7a, 7b and the face 42 of the cooling panels 4a, 4b are brought into contact, and the inert gas is introduced into the spaces 6a, 6b. Prior to this, preliminary cooling was further performed.

Further, in the above embodiment, though for the Department, however, also possible to substrate S is _{11, 12} wound around the driving roller 2a, 3a and driven roller 2B, and 3b are an example has been described, and constancy for transport between the substrate S and the conveyor belt _{11, 12} for the embodiment of the contact surface to the driving roller 2a, for example, disposed between the other of the rollers 3a and the driven roller 2b, 3b. By this, the substrate S from the upstream side in the conveyance direction toward the downstream side as between conveyance from the conveyor belt 1 _1, 1 ₂ to the surface pressure system applying the substrates S increases, the substrate S and the conveyor belt _11, 1 ₂ based surface contact for more reliably, is made by a cooled conveyor belt _11, between the heat ₁₂ and the substrate S to be more efficient due to conductive heat exchange system, and the substrate S can be made quickly cool down. Further, in order from the conveyor belt _{11, 12} and the heat efficiently conducted to the substrate S, the system can also be in the conveyor belt ₁₁ at the contact surface between the substrate S, _12, is provided a so-called high thermal conductivity Sex rubber.

Furthermore, in the above-mentioned embodiment, as the cooling means for cooling the cooling panels 4a and 4b, although the description is made by using the refrigerator 5 as an example, the system is not limited to this. For example, it may be A well-known cooling unit (Chiller unit) is used, and a cooling medium is circulated from the cooling unit to the cooling panel to cool the cooling panels 4a, 4b. Furthermore, in the above-mentioned embodiment, although the cooling panels 4a and 4b are described as taking the length including the conveying direction covering the lower belt part Dv as a whole length as an example, the system is not limited to this, as long as there is provided by the respective conveyor belt _11, the conveyor belt can be at least equal to the length of the width ₁₂ of _{11, 12} covering the entire length of the width direction thereof are cooled to make, which is the length of the line and Not limited. Further, although the system for cooling panel 4a, 4b in the conveyor belt _11, the belt ₁₂ under the direction and the lower direction Dv respectively at specific intervals in the air to an example of the configuration are made to Although the description has been given, the positions of the cooling panels 4a and 4b are not limited to this. For example, a cooling panel may be provided in the space between the upper band portion Uv and the lower band portion Dv by blackening both sides, and the upper band portion Uv and the lower band portion Dv may be used simultaneously. Cooling composition.

When the inert gas is supplied to the spaces 6a and 6b through the holes 43 provided in the cooling panels 4a and 4b as in the above embodiment, the inert gas supplied to the spaces 6a and 6b becomes from the cooling panel 4a, 4b outside the peripheral portion of the conveyor belt, the gap width ₁₂ between the direction of the end portion ₁₁ is discharged into the cavity Vc of the cooling, however, is not limited to this system. For example, in order to also based cooling panel 4a, b beyond the peripheral edge portion of the conveyor belt _11, the gap between ₁₂ (i.e., the space 6a, 6b of the surrounding) and for enclosing the space 6a, 6b Atmosphere separation is performed from the cooling chamber Vc, and an atmosphere separation means is provided. As the means for separating the atmosphere, for example, as shown in FIG. 4, it can be constituted by a metal foil 8 installed around the cooling panels 4 a and 4 b, and the front end side can be extended to the conveying belt 1 _1. , 1 ₂ nearby. By this, it is possible for the conveyor belt system _{11, 12} is made so that the inert gas be cooled repeated collisions, it is possible to cool the panel 4a, 4b of the cooling efficiency is improved. In addition, although the description of the atmosphere separation method is made by using a metal foil 8 as an example, the material is not limited to this as long as it does not damage the surface of the conveying belt. For example, it may be Use a rubber sheet with a fluorine coating applied to the surface.

Next, referring to FIG. 5, the FC is a film forming apparatus including a transfer apparatus TM ₂ of the second embodiment. If the same components and elements as those of the first embodiment described above are added with the same element symbols for explanation, the film forming apparatus FC is provided with a film forming chamber Vf capable of performing vacuum evacuation by vacuum pump Pu. On the top surface of the film-forming cavity Vf, a film-forming source Fu such as a sputtering cathode is provided. In addition, the conveying device TM _{2 of} the second embodiment is installed on the bottom surface of the film-forming cavity Vf facing the film-forming source Fu.

The transfer device TM ₂ is provided with a transfer belt 10 on which a substrate S is stored and which is advanced in a cycle. The conveying belt 10 is wound on the driving roller 20 and the passive roller 30 which are arranged at a certain interval in the conveying direction of the substrate S, and a motor (not shown) additionally provided at the driving roller 20 is provided. It is driven to rotate, so that it advances in a cycle at a certain speed. As the conveying belt 10, the same one as the first embodiment is used. In addition, a cooling panel 40 having a length equal to or larger than the width of the conveying belt 10 is arranged opposite to the belt portion Dv below the conveying belt 10 at a specific interval. The cooling panel 40 is the same as the first embodiment described above, and is cooled to a specific temperature by the refrigerator 5. In addition, at a specific position of the cooling panel 40, holes 43 are formed in the vertical direction to penetrate therethrough. In the holes 43, the holes 43 are fitted and inserted as areas for dividing by the lower band portion Dv and the cooling panels 4a and 4b. The front end portion of the gas pipe 70 which is a component of the gas supply means which supplies the inert gas out of the space 60. In addition, in the film-forming chamber Vf, an adhesion preventing plate 9 having an opening 90 facing the substrate S is provided at a predetermined interval from the upper band portion Uv.

When the film formation process is performed on the substrate S, the substrate S is placed on the conveyance belt 10 at the upstream side in the conveyance direction, and then the conveyance belt 10 is advanced forward and backward. At this time, the cooling panel 40 is cooled by the refrigerator 5 and is in a state where an inert gas is supplied to the space 60. After that, if the substrate S reaches the position where the substrate S and the opening 90 coincide with each other in the up-down direction, the driving system of the conveying belt 10 is stopped. In this state, the film-forming source Fu system operates to specify the film formation. Processing is performed. During the film formation process, the substrate S is maintained in a cooled state. After that, if the film-forming process is completed, the conveying belt 10 series advances the cycle again, and the substrate S system that has completed the film-forming process is conveyed to the downstream side, and during this period, the substrate S system is cooled. In addition, the system may be configured to perform the film forming process without stopping the driving of the conveyance belt 10 and in a state where the conveyance belt 10 is advanced in a cycle. In addition, in the general case where the transfer device TM _{2 of} the second embodiment has been subjected to a specific treatment on one surface of the substrate S and the surface cannot be brought into contact with the transfer belt, it is also possible to simply transfer the substrate Applicable for cooling situations.

In addition, in the second embodiment described above, the cooling panel 40 has been described as an example in which the cooling panel 40 is arranged opposite to each other with a certain interval left below the belt portion Dv under the conveying belt 10, and has been described. However, the system is not limited to this, and may be provided below the lower belt portion Dv or in addition to the lower belt portion Dv, and further controlled under the belt portion Uv above the conveying belt 10 Cooling panels (not shown) are arranged to face each other at intervals.

TM ₂ ‧‧‧ Transfer Device

S‧‧‧ substrate (to be transported)

10‧‧‧ transport belt

Dv‧‧‧ Lower Belt

Uv‧‧‧ Upper Belt Department

FC‧‧‧Film forming device

Vf‧‧‧film forming cavity

Fu‧‧‧ Film Source

Pu‧‧‧Vacuum Pump

20‧‧‧Drive roller (rotating member)

30‧‧‧Passive roller (rotating member)

40‧‧‧ cooling panel

43‧‧‧hole

5‧‧‧Freezer

51‧‧‧cooling head

52‧‧‧Freezer body

60‧‧‧ space

70‧‧‧Gas tube (component of gas supply means)

9‧‧‧Anti-adhesive plate

90‧‧‧ opening

Claims (5)

A conveying device is a conveying device for conveying an object to be conveyed while cooling an object to be conveyed in a cavity in a vacuum atmosphere, and is characterized in that it is provided with a conveying belt which is wound on at least two rotating members, The object to be conveyed is stored on the outer surface for cyclical advancement. One of the parts of the conveying belt that is positioned between the rotating members and advances in the opposite direction to each other is set as The upper belt part, and the other part is set as the lower belt part, and the direction in which the upper belt part and the lower belt part oppose each other is set as the up and down direction, under the upper belt part and above and below the lower belt part At least one of the surfaces is provided with a cooling panel having a length equal to or greater than the width of the conveying belt. The conveying device is further provided with: Is to cool the cooling panel; and gas supply means is to supply inert gas to the space defined by the cooling panel and the conveyor belt. A conveying device characterized by arranging two conveying devices as described in item 1 of the patent application scope so that the upper belt portions thereof face each other, and is configured to pass between the two upper belts. In a state where the object to be conveyed is held from above and below, the conveying belt is moved forward and backward. The conveying device described in item 1 or 2 of the scope of the patent application, wherein the conveying device includes: an atmosphere separating means for surrounding the space and separating the space from the cavity for atmosphere separation. The conveying device according to any one of claims 1 to 3 in the scope of the patent application, wherein the cooling panel is formed by blackening the surface of the conveying belt side and facing away from the conveying belt. The side surface is used as a mirror finisher. The conveying device according to any one of claims 1 to 4, wherein the gas supply means includes a gas pipe fitted into a hole opened in the cooling panel.