TW201743400A - Method for aligning object on alignment platform by utilizing two cameras, method for aligning and gluing substrate of display panel, and method for aligning upper and lower substrates of display panel - Google Patents
Method for aligning object on alignment platform by utilizing two cameras, method for aligning and gluing substrate of display panel, and method for aligning upper and lower substrates of display panel Download PDFInfo
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本發明係關於一種影像伺服定位技術,特別有關一種能夠縮短影像伺服定位時間的採用雙攝像鏡頭為對位平台上的物件進行對位的方法、顯示面板之基板對位上膠的方法和顯示面板之上下基板的對位方法。 The invention relates to an image servo positioning technology, in particular to a method for aligning objects on a matching platform by using a dual camera lens capable of shortening image servo positioning time, a method for aligning a substrate of a display panel, and a display panel The alignment method of the upper substrate.
隨著高科技產品之精密化的趨勢,加上精密加工技術的快速發展,使得許多工業產品能夠突破製程上的限制,提高一定的良率和精密度。 With the trend of high-tech products and the rapid development of precision machining technology, many industrial products can break through the limitations of the process and increase the yield and precision.
例如,半導體製造設備、液晶面板製造設備、網印設備以及印刷電路板製造設備中,為了在精密度上進一步提升,必須使用對位平台進行精確的對位移動程序。 For example, in semiconductor manufacturing equipment, liquid crystal panel manufacturing equipment, screen printing equipment, and printed circuit board manufacturing equipment, in order to further improve the precision, it is necessary to use an alignment platform for accurate alignment movement procedures.
這些自動化/半自動化設備機台一定要確保製造品有 精確的對位,才能讓製造品內的元件或組件能在很小的誤差下對應到設定的位置,這些誤差通常要求在幾百到幾個微米(Micrometer)以下。 These automated/semi-automated equipment machines must ensure that the manufactured products have Accurate alignment allows the components or components within the article to correspond to a set position with minimal error, typically requiring a few hundred to a few micrometers.
在對位技術中,通常會採用機械視覺(Machine Vision)的功能來導引對位平台位移,機械視覺是利用影像擷取設備(如CCD鏡頭)來獲取影像,透過電腦進行計算分析,最終生成要輸入給對位平台的移動參數,使對位平台據此產生位移及/或角位移,從而將對位平台上的目標物體移動到設定的位置。 In the alignment technology, the function of Machine Vision is usually used to guide the displacement of the alignment platform. The mechanical vision is to use an image capturing device (such as a CCD lens) to acquire images, perform calculation and analysis through a computer, and finally generate The movement parameters to be input to the alignment platform are such that the alignment platform generates displacement and/or angular displacement, thereby moving the target object on the alignment platform to the set position.
常見的對位平台例如有XYθ平台、XXY平台和XYY平台等。XYθ平台具有三個相互獨立的移動軸,即X軸、Y軸及沿XY平面旋轉的θ軸,也就是,X軸、Y軸和θ軸上的移動量不會互相影響。XXY平台上有兩個X移動軸,θ角的角位移即由兩個X移動軸和Y軸來達成,而類似地,XYY平台的θ角位移是由X軸和兩個Y軸來達成。其他對位平台還例如有XY、UVW和XXYY平台等。 Common alignment platforms include, for example, the XYθ platform, the XXY platform, and the XYY platform. The XYθ stage has three independent moving axes, that is, the X-axis, the Y-axis, and the θ-axis rotating along the XY plane, that is, the amounts of movement on the X-axis, the Y-axis, and the θ-axis do not affect each other. There are two X moving axes on the XXY platform. The angular displacement of the θ angle is achieved by two X moving axes and the Y axis. Similarly, the θ angular displacement of the XYY platform is achieved by the X axis and the two Y axes. Other alignment platforms include, for example, XY, UVW, and XXYY platforms.
第1圖顯示一種習知的對位配置示意圖,對位平台10上放置有需要進行對位的物件12,物件12上設置有定位標記14,習知技術一般採用一個攝像鏡頭16拍攝對位平台10上物件12之定位標記14的影像,來導引對位平台10為物件12進行對位。 1 is a schematic diagram of a conventional alignment configuration. An object 12 that needs to be aligned is placed on the alignment platform 10. The object 12 is provided with a positioning mark 14. The conventional technology generally uses a camera lens 16 to shoot the alignment platform. The image of the positioning mark 14 of the object 12 is 10 to guide the alignment platform 10 to align the object 12.
請參閱第2A圖至第2C圖,在攝像鏡頭16的視野下,攝像鏡頭16看到的定位標記14的座標位置記為P,進行對位時需要將定位標記14移至某一設定位置,例如假定為視野中心,即O點的位置,則計算器首先需要計算P點到O點的平移距離(例如X座標 移動3個單位、Y座標移動2個單位)並通知對位平台10進行平移,如第2A圖所示。當定位標記14移動到該設定位置(即O點的位置)後,計算器計算需要旋轉的角度,而後通知對位平台10進行旋轉,如第2B圖所示。最後,物件12完成了對位,其定位標記14的位置和角度如第2C圖所示。 Referring to FIGS. 2A to 2C , in the field of view of the imaging lens 16 , the coordinate position of the positioning mark 14 seen by the imaging lens 16 is denoted as P, and the positioning mark 14 needs to be moved to a certain setting position when the alignment is performed. For example, if you assume the center of the field of view, that is, the position of the O point, the calculator first needs to calculate the translation distance from point P to point O (for example, the X coordinate). Move 3 units, the Y coordinate moves 2 units) and notify the alignment platform 10 to pan, as shown in Figure 2A. When the positioning mark 14 is moved to the set position (i.e., the position of the O point), the calculator calculates the angle at which rotation is required, and then notifies the alignment platform 10 to rotate, as shown in Fig. 2B. Finally, the object 12 is aligned and its position and angle of the positioning mark 14 is as shown in Figure 2C.
習知技術中,影像伺服定位需要兩階段定位,即平移對位和角度對位,這樣,對位平台需要一段時間進行平移對位,在另一段時間進行角度對位,存在對位時間過長的技術問題,尤其是在大量製造的情況下,需要對每一製造品進行對位,使得整個產出時間拉出。 In the prior art, image servo positioning requires two-stage positioning, that is, translational alignment and angle alignment, so that the alignment platform needs to perform translational alignment for a period of time, and angle alignment is performed for another period of time, and the alignment time is too long. The technical problem, especially in the case of mass production, requires alignment of each manufactured product so that the entire production time is pulled out.
舉例來說,在顯示面板製程中,在對基板塗膠以進行後續封裝之前,需先利用對位平台對基板進行對位,使自動塗膠機能夠將膠施於正確的位置,而塗膠後,上下基板透過膠進行貼合前也需要對上下基板的位置進行對位。因此,縮短對位所花的時間,能夠有效縮短顯示面板的產出時間,提高生產效率。 For example, in the process of the display panel, before the substrate is glued for subsequent packaging, the alignment platform is used to align the substrate, so that the automatic coating machine can apply the glue to the correct position and apply the glue. After that, the positions of the upper and lower substrates need to be aligned before the upper and lower substrates are bonded by the glue. Therefore, shortening the time spent on the alignment can effectively shorten the output time of the display panel and improve production efficiency.
本發明的一個目的在於提供一種採用雙攝像鏡頭為對位平台上的物件進行對位的方法、顯示面板之基板對位上膠的方法和顯示面板之上下基板的對位方法,以縮短影像伺服定位所需的時間,提高生產效率。 An object of the present invention is to provide a method for aligning an object on a aligning platform by using a dual camera lens, a method for aligning a substrate of a display panel, and a method for aligning the upper and lower substrates of the display panel to shorten the image servo. Position the time required to increase productivity.
為達成上述目的,本發明一方面提供一種採用雙攝像鏡頭為對位平台上的物件進行對位的方法,包含如下步驟:(a) 決定該對位平台之物件上的第一定位標記在第一攝像鏡頭之視野下的第一目標位置;決定該對位平台之物件上的第二定位標記在該第二攝像鏡頭之視野下的第二目標位置;(b)利用該第一攝像鏡頭拍攝包含該物件之第一定位標記的影像,並得出該物件之第一定位標記的第一當前位置;利用該第二攝像鏡頭拍攝包含該物件之第二定位標記的影像,並得出該物件之第二定位標記的第二當前位置;(c)利用方程式AZ=B,得出將該第一定位標記從第一當前位置移動到該第一目標位置和將該第二定位標記從第二當前位置移動到該第二目標位置時所需輸入給該對位平台的補償位移量,其中A代表該對位平台的特性矩陣,B代表該第一當前位置與該第一目標位置在各個座標軸下的差以及該第二當前位置與該第二目標位置在各個座標軸下的差所構成的矩陣,Z代表要輸入給該對位平台的補償位移量所構成的矩陣;以及(d)將該補償位移量輸入到該對位平台,使該對位平台產生位移及/或角位移,以使該物件之第一定位標記的第一當前位置移動到該第一目標位置,該物件之第二定位標記的第二當前位置移動到該第二目標位置。 In order to achieve the above object, an aspect of the present invention provides a method for aligning an object on a aligning platform by using a dual camera lens, comprising the following steps: (a) Determining a first target position on the object of the alignment platform in a first target position in a field of view of the first imaging lens; determining a second positioning mark on the object of the alignment platform in a field of view of the second imaging lens a second target position; (b) capturing an image of the first positioning mark including the object by using the first imaging lens, and obtaining a first current position of the first positioning mark of the object; and capturing, by using the second imaging lens An image of the second positioning mark of the object, and obtaining a second current position of the second positioning mark of the object; (c) using the equation AZ=B, moving the first positioning mark from the first current position to a first target position and a compensation displacement amount required to be input to the alignment platform when the second positioning mark is moved from the second current position to the second target position, wherein A represents a characteristic matrix of the alignment platform, B a matrix representing a difference between the first current position and the first target position under respective coordinate axes and a difference between the second current position and the second target position under respective coordinate axes, where Z represents an input to the matrix a matrix formed by the compensation displacement of the alignment platform; and (d) inputting the compensation displacement amount to the alignment platform to cause displacement and/or angular displacement of the alignment platform to cause the first positioning mark of the object The first current position of the object moves to the first target position, and the second current position of the second positioning mark of the object moves to the second target position.
本發明另一方面提供一種顯示面板之基板對位上膠的方法,包含如下步驟:利用機械手臂將該顯示面板之基板移動到對位平台上;利用第一攝像鏡頭和第二攝像鏡頭分別拍攝該基板上之第一定位標記和第二定位標記,以得出該第一定位標記在該第一攝像鏡頭之座標系下的第一當前位置以及該第二定位標記在該第二攝像鏡頭之座標系下的第二當前位置;得出將該基板之 第一定位標記從該第一攝像鏡頭之座標系下的該第一當前位置移動到一第一目標位置和將該基板之第二定位標記從該第二攝像鏡頭之座標系下的該第二當前位置移動到一第二目標位置時所需輸入給該對位平台的補償位移量,其中該對位平台的補償位移量是對該對位平台的特性矩陣以及該第一當前位置與該第一目標位置在各個座標軸下的差以及該第二當前位置與該第二目標位置在各個座標軸下的差所構成的矩陣進行運算而得出;將該補償位移量輸入到該對位平台,以使得在第一攝像鏡頭之座標系下該第一當前位置移動到該第一目標位置,在該第二攝像鏡頭之座標系下該第二當前位置移動到該第二目標位置,完成該基板之對位;以及利用自動塗膠機,對該已完成對位之基板進行上膠。 Another aspect of the present invention provides a method for aligning a substrate of a display panel, comprising the steps of: moving a substrate of the display panel to a positioning platform by using a mechanical arm; and respectively shooting by using the first camera lens and the second camera lens a first positioning mark and a second positioning mark on the substrate to obtain a first current position of the first positioning mark under the coordinate system of the first imaging lens and the second positioning mark in the second imaging lens a second current position under the coordinate system; Moving the first positioning mark from the first current position under the coordinate system of the first imaging lens to a first target position and the second positioning mark of the substrate from the second under the coordinate system of the second imaging lens The amount of compensation displacement required to be input to the alignment platform when the current position is moved to a second target position, wherein the compensation displacement amount of the alignment platform is a characteristic matrix of the alignment platform and the first current position and the first Calculating a difference between a target position under each coordinate axis and a matrix formed by a difference between the second current position and the second target position under each coordinate axis; inputting the compensation displacement amount to the alignment platform to The first current position is moved to the first target position under the coordinate system of the first imaging lens, and the second current position is moved to the second target position under the coordinate system of the second imaging lens to complete the substrate. The alignment is performed; and the completed substrate is sized using an automatic applicator.
本發明再一方面提供一種顯示面板之上下基板的對位方法,包含如下步驟:利用機械手臂將該顯示面板之第一基板移動到第一對位平台上;利用第一攝像鏡頭和第二攝像鏡頭分別拍攝該第一基板上之第一定位標記和第二定位標記,以得出該第一定位標記之當前位置以及該第二定位標記之當前位置;得出將該第一基板之第一定位標記從其當前位置移動到一第一目標位置和將該第一基板之第二定位標記從其當前位置移動到一第二目標位置時所需輸入給該第一對位平台的補償位移量;將要輸入給該第一對位平台的該補償位移量輸入到該第一對位平台,以使得該第一基板之第一定位標記從其當前位置移動到該第一目標位置,該第一基板之第二定位標記從其當前位置移動到該第二目標位 置;利用該機械手臂將該顯示面板之第二基板移動到與該第一對位平台平行設置的第二對位平台上;利用與該第一攝像鏡頭背向對應設置的第三攝像鏡頭和與該第二攝像鏡頭背向對應設置的第四攝像鏡頭分別拍攝該第二基板上之第三定位標記和第四定位標記,以得出該第三定位標記之當前位置以及該第四定位標記之當前位置;得出將該第二基板之第三定位標記從其當前位置移動到與該第一目標位置相對應之一第三目標位置和將該第二基板之第四定位標記從其當前位置移動到與該第二目標位置相對應之一第四目標位置時所需輸入給該第二對位平台的補償位移量;以及將要輸入給該第二對位平台的該補償位移量輸入到該第二對位平台,以使得該第二基板之第三定位標記從其當前位置移動到該第三目標位置,該第二基板之第四定位標記從其當前位置移動到該第四目標位置。 A further aspect of the present invention provides a method for aligning a lower substrate on a display panel, comprising the steps of: moving a first substrate of the display panel to a first alignment platform by using a mechanical arm; using the first camera lens and the second camera The lens respectively captures the first positioning mark and the second positioning mark on the first substrate to obtain a current position of the first positioning mark and a current position of the second positioning mark; and the first of the first substrate is obtained A compensation displacement amount required to be input to the first alignment platform when the positioning mark is moved from its current position to a first target position and the second positioning mark of the first substrate is moved from its current position to a second target position Inputting the compensation displacement amount to be input to the first alignment platform to the first alignment platform to move the first positioning mark of the first substrate from its current position to the first target position, the first Moving the second positioning mark of the substrate from its current position to the second target position Using the mechanical arm to move the second substrate of the display panel to the second alignment platform disposed parallel to the first alignment platform; using a third imaging lens disposed opposite to the first imaging lens and a fourth positioning lens disposed opposite to the second imaging lens, respectively, capturing a third positioning mark and a fourth positioning mark on the second substrate to obtain a current position of the third positioning mark and the fourth positioning mark a current position; moving the third positioning mark of the second substrate from its current position to a third target position corresponding to the first target position and the fourth positioning mark of the second substrate from its current position a compensation displacement amount required to be input to the second alignment platform when the position is moved to a fourth target position corresponding to the second target position; and the compensation displacement amount to be input to the second alignment platform is input to The second alignment platform moves the third positioning mark of the second substrate from the current position to the third target position, and the fourth positioning mark of the second substrate moves from the current position thereof The fourth target location.
本發明採用雙攝像鏡頭為對位平台上的物件進行對位的方法,利用兩攝像鏡頭分別記錄物件上的第一定位標記和第二定位標記的位置,並利用對位平台的特性矩陣,以預定算法得出要輸入給對位平台的補償位移量,使得對位平台能夠依此補償位移量將第一定位標記和第二定位標記移動到目標位置。本發明中,對位平台能夠依此補償位移量同時完成平移位移和角位移,而沒有習知技術需分段進行平移對位和旋轉對位導致的對位時間過長的技術問題,因此本發明可縮短影像伺服定位所需的時間,提高生產效率。 The invention adopts a dual camera lens to align the objects on the alignment platform, and uses the two camera lenses to record the positions of the first positioning mark and the second positioning mark on the object respectively, and utilizes the characteristic matrix of the alignment platform to The predetermined algorithm derives the amount of compensation displacement to be input to the alignment platform such that the alignment platform can compensate the displacement amount to move the first positioning marker and the second positioning marker to the target position. In the present invention, the alignment platform can compensate the displacement amount and simultaneously complete the translational displacement and the angular displacement, and there is no technical problem that the conventional technique needs to segment the translational alignment and the rotational alignment to cause the alignment time to be too long. The invention can shorten the time required for image servo positioning and improve production efficiency.
10‧‧‧對位平台 10‧‧‧ alignment platform
12‧‧‧物件 12‧‧‧ objects
14‧‧‧定位標記 14‧‧‧ Positioning Mark
16‧‧‧攝像鏡頭 16‧‧‧ camera lens
30‧‧‧對位平台 30‧‧‧ alignment platform
32‧‧‧物件 32‧‧‧ objects
341‧‧‧第一定位標記 341‧‧‧First positioning mark
342‧‧‧第二定位標記 342‧‧‧Second positioning mark
361‧‧‧第一攝像鏡頭 361‧‧‧ first camera lens
362‧‧‧第二攝像鏡頭 362‧‧‧Second camera lens
O、P、P1、P2‧‧‧座標點 O, P, P1, P2‧‧‧ punctuation
S102~S108‧‧‧步驟 S102~S108‧‧‧Steps
S202~S210‧‧‧步驟 S202~S210‧‧‧Steps
S302~S310‧‧‧步驟 S302~S310‧‧‧Steps
S402~S416‧‧‧步驟 S402~S416‧‧‧Steps
△X1、△Y1、△X2、△Y2‧‧‧位移量 △X 1 , △Y 1 , △X 2 , △Y 2 ‧‧‧ displacement
第1圖顯示一種習知的對位配置示意圖。 Figure 1 shows a schematic diagram of a conventional alignment configuration.
第2A圖至第2C圖顯示習知的平移和旋轉兩階段對位方式的示意圖。 Figures 2A through 2C show schematic diagrams of conventional two-stage alignment of translation and rotation.
第3圖顯示本發明所採用的對位配置示意圖。 Figure 3 shows a schematic diagram of the alignment configuration employed by the present invention.
第4圖顯示本發明中採用雙攝像鏡頭為對位平台上的物件進行對位的方法流程圖。 Fig. 4 is a flow chart showing the method of using the dual camera lens to align the objects on the alignment platform in the present invention.
第5A圖和第5B圖分別顯示第一攝像鏡頭和第二攝像鏡頭的座標系的示意圖。 FIGS. 5A and 5B are schematic views showing coordinate systems of the first imaging lens and the second imaging lens, respectively.
第6A圖和第6B圖分別顯示第一攝像鏡頭的座標系下第一定位標記的當前位置和第二攝像鏡頭的座標系下第二定位標記的當前位置的示意圖。 6A and 6B are schematic views respectively showing the current position of the first positioning mark under the coordinate system of the first imaging lens and the current position of the second positioning mark under the coordinate system of the second imaging lens.
第7圖顯示本發明之對位平台的特性矩陣的獲取方法的示意圖。 Fig. 7 is a view showing a method of acquiring the characteristic matrix of the alignment platform of the present invention.
第8A圖和第8B圖分別顯示本發明中在一個軸向上給予對位平台一個單位的移動量時第一攝像鏡頭量測到的第一量測點的位移量和第二攝像鏡頭量測到的第二量測點的位移量的示意圖。 8A and 8B respectively show the displacement amount of the first measurement point measured by the first imaging lens and the second imaging lens measured when the movement amount of one unit of the alignment platform is given in one axial direction in the present invention. Schematic diagram of the amount of displacement of the second measurement point.
第9圖顯示本發明之顯示面板之基板對位上膠的方法流程圖。 Figure 9 is a flow chart showing a method of aligning the substrate of the display panel of the present invention.
第10圖顯示本發明之顯示面板之上下基板的對位方法流程圖。 Figure 10 is a flow chart showing the alignment method of the lower substrate above the display panel of the present invention.
為使本發明的目的、技術方案及效果更加清楚、明確,以下參照圖式並舉實施例對本發明進一步詳細說明。 The present invention will be further described in detail below with reference to the drawings and embodiments.
請參閱第3圖,其顯示本發明所採用的對位配置示意圖。本發明係為對位平台30上的物件32進行對位,物件32上設置有第一定位標記341和第二定位標記342,本發明採用了兩個攝像鏡頭,即第一攝像鏡頭361和第二攝像鏡頭362,分別用來拍攝物件32上的第一定位標記342和第二定位標記342的影像,以在第一攝像鏡頭361的視野下(即,在第一攝像鏡頭361的座標系下)記錄第一定位標記342的位置,在第二攝像鏡頭362的視野下(即,在第二攝像鏡頭362的座標系下)記錄第二定位標記342的位置,導引對位平台30為物件32進行對位。 Please refer to FIG. 3, which shows a schematic diagram of the alignment configuration employed by the present invention. The present invention is to align the object 32 on the alignment platform 30. The object 32 is provided with a first positioning mark 341 and a second positioning mark 342. The present invention employs two imaging lenses, namely a first imaging lens 361 and a Two imaging lenses 362 are respectively used to capture images of the first positioning mark 342 and the second positioning mark 342 on the object 32 to be in the field of view of the first imaging lens 361 (ie, under the coordinate system of the first imaging lens 361) Recording the position of the first positioning mark 342, recording the position of the second positioning mark 342 in the field of view of the second imaging lens 362 (ie, under the coordinate system of the second imaging lens 362), guiding the alignment platform 30 as an object 32 is in place.
本發明中,對位平台30可以採用XYθ平台、XXY平台或XYY平台,XYY平台與XXY平台主要的不同之處在於完成θ角位移所使用的軸,但其機制類似,因此XYY平台與XXY平台能夠應用相同的概念所得出的算法。此外,本發明的概念還可移植到例如XY、UVW和XXYY等平台的對位。 In the present invention, the alignment platform 30 can adopt an XYθ platform, an XXY platform or an XXY platform. The main difference between the XY platform and the XXY platform is that the axis used for the θ angular displacement is completed, but the mechanism is similar, so the XYY platform and the XXY platform are used. An algorithm that can apply the same concept. Moreover, the concepts of the present invention can also be ported to the alignment of platforms such as XY, UVW, and XXYY.
以下將以XXY平台和XYθ平台為例來說明本發明採用雙攝像鏡頭為對位平台上的物件進行對位的方法,首先會配合XXY平台介紹本發明的對位算法和各個對位流程,並在後續說明XYθ平台的對位機制。 The following uses the XXY platform and the XYθ platform as an example to illustrate the method for aligning objects on the alignment platform by using the dual camera lens. Firstly, the alignment algorithm and the alignment processes of the present invention are introduced in conjunction with the XXY platform, and The alignment mechanism of the XYθ platform will be described later.
第4圖顯示本發明中採用雙攝像鏡頭為對位平台上的物件進行對位的方法流程圖。請一併參閱第3圖和第4圖,本發 明採用雙攝像鏡頭為對位平台上的物件進行對位的方法包含如下步驟: Fig. 4 is a flow chart showing the method of using the dual camera lens to align the objects on the alignment platform in the present invention. Please refer to Figure 3 and Figure 4 together. The method for aligning objects on the alignment platform by using a dual camera lens includes the following steps:
步驟S102:決定第一定位標記341的第一目標位置;決定第二定位標記342的第二目標位置。具體來說,在此步驟中,決定對位平台30之物件32上的第一定位標記341在第一攝像鏡頭361之視野下(即,在第一攝像鏡頭361的座標系下)的第一目標位置;決定對位平台30之物件32上的第二定位標記342在第二攝像鏡頭361之視野下(即,在第二攝像鏡頭362的座標系下)的第二目標位置。 Step S102: determining a first target position of the first positioning mark 341; determining a second target position of the second positioning mark 342. Specifically, in this step, the first positioning mark 341 on the object 32 of the alignment platform 30 is determined to be the first in the field of view of the first imaging lens 361 (ie, under the coordinate system of the first imaging lens 361). The target position; the second target mark 342 on the object 32 of the alignment platform 30 is determined to be in the second target position of the second imaging lens 361 (ie, under the coordinate system of the second imaging lens 362).
如第5A圖和第5B圖所示,第5A圖和第5B圖分別代表第一攝像鏡頭361和第二攝像鏡頭362的座標系,方框代表其視野,兩相互垂直的虛線代表其座標軸,如X軸和Y軸。假定第一定位標記341的第一目標位置為第一攝像鏡頭361的視野中心(即,第5A圖中O點的位置),第二定位標記342的第二目標位置為第二攝像鏡頭362的視野中心(即,第5B圖中O點的位置)。也就是說,整個對位的目的,是要將第一定位標記341移動到第一目標位置,將第二定位標記342移動到第二目標位置。 As shown in FIGS. 5A and 5B, FIGS. 5A and 5B represent the coordinate systems of the first imaging lens 361 and the second imaging lens 362, respectively, the squares represent their fields of view, and the two mutually perpendicular dashed lines represent their coordinate axes. Such as the X axis and the Y axis. It is assumed that the first target position of the first positioning mark 341 is the center of the field of view of the first imaging lens 361 (ie, the position of the point O in FIG. 5A), and the second target position of the second positioning mark 342 is the second imaging lens 362. Center of view (ie, the position of point O in Figure 5B). That is, the purpose of the entire alignment is to move the first positioning mark 341 to the first target position and the second positioning mark 342 to the second target position.
當然,第一目標位置不必然為第一攝像鏡頭361的視野中心,也可以為其他位置;類似地,第一目標位置不必然為第二攝像鏡頭362的視野中心,也可以為其他位置。惟,第一目標位置和第二目標位置必須分別在第一攝像鏡頭361和第二攝像鏡頭362的視野內,以方便後續作位置計算。 Of course, the first target position is not necessarily the center of the field of view of the first imaging lens 361, and may be other positions; similarly, the first target position is not necessarily the center of the field of view of the second imaging lens 362, and may be other positions. However, the first target position and the second target position must be within the fields of view of the first camera lens 361 and the second camera lens 362, respectively, to facilitate subsequent position calculation.
通常,兩攝像鏡頭361、362與自動化/半自動化設備中的其他操作機台的位置已經過調教,設置成只要將標記移動到鏡頭視野內的某一設定的固定位置即完成對位。在對位程序之前,兩攝像鏡頭361、362的位置可能因調教需要而變動,但在整個對位過程中,兩攝像鏡頭361、362的位置基本上是保持不變的。另外,在生產過程中,整批的物件都要一一進行對位,攝像鏡頭361、362固定不動可以確保每個物件都對位到同一位置,也能夠避免移動攝像鏡頭所必須花費的時間,減少整個製程時間。 Typically, the positions of the two camera lenses 361, 362 and other operating machines in the automated/semi-automated device have been tuned to be set to complete the alignment as long as the marker is moved to a fixed position within the field of view of the lens. Prior to the alignment procedure, the positions of the two camera lenses 361, 362 may vary due to the need for tuning, but the position of the two camera lenses 361, 362 remains substantially constant throughout the alignment process. In addition, in the production process, the entire batch of objects must be aligned one by one, and the camera lenses 361, 362 can be fixed to ensure that each object is aligned to the same position, and the time required to move the camera lens can be avoided. Reduce the overall process time.
步驟S104:利用第一攝像鏡頭361得出第一定位標記341的第一當前位置;利用第二攝像鏡頭362得出第二定位標記342的第二當前位置。具體來說,在此步驟中,利用第一攝像鏡頭361拍攝包含物件32之第一定位標記341的影像,並得出物件32之第一定位標記341的第一當前位置;利用第二攝像鏡頭362拍攝包含物件32之第二定位標記342的影像,並得出物件32之第二定位標記342的第二當前位置。 Step S104: The first current position of the first positioning mark 341 is obtained by using the first imaging lens 361; and the second current position of the second positioning mark 342 is obtained by the second imaging lens 362. Specifically, in this step, the image of the first positioning mark 341 including the object 32 is captured by the first imaging lens 361, and the first current position of the first positioning mark 341 of the object 32 is obtained; and the second imaging lens is utilized. 362 takes an image of the second positioning mark 342 containing the object 32 and derives a second current position of the second positioning mark 342 of the object 32.
如第6A圖和第6B圖所示,第6A圖和第6B圖分別顯示在第一攝像鏡頭361的視野下的第一定位標記341的位置和在第二攝像鏡頭362的視野下的第二定位標記342的位置。例如,物件32的第一定位標記341在第一攝像鏡頭361的座標系下的位置為第6A圖顯示的P1點,物件32的第二定位標記342在第二攝像鏡頭362的座標系下的位置為第6B圖顯示的P2點。 As shown in FIGS. 6A and 6B, FIGS. 6A and 6B respectively show the position of the first positioning mark 341 in the field of view of the first imaging lens 361 and the second position in the field of view of the second imaging lens 362. Position the marker 342. For example, the position of the first positioning mark 341 of the object 32 under the coordinate system of the first imaging lens 361 is the point P1 shown in FIG. 6A, and the second positioning mark 342 of the object 32 is under the coordinate system of the second imaging lens 362. The position is the P2 point shown in Figure 6B.
第一定位標記341的第一當前位置可透過計算分析器(未圖示)分析第一攝像鏡頭361拍攝到的影像來計算得出,第二定位標記342的第二當前位置亦透過類似之方式得出,此為機械視覺(Machine Vision)領域常用之方式。 The first current position of the first positioning mark 341 can be calculated by analyzing a image captured by the first imaging lens 361 by a calculation analyzer (not shown), and the second current position of the second positioning mark 342 is also transmitted in a similar manner. It is concluded that this is a common method in the field of Machine Vision.
步驟S106:利用預定算法,得出將第一定位標記341移動到第一目標位置(如第6A圖的O點位置)和將第二定位標記342移動到第二目標位置(如第6B圖的O點位置)時所需輸入給對位平台30的補償位移量。具體來說,在此步驟中,利用方程式AZ=B,得出將第一定位標記341從第一當前位置(如P1點的位置)移動到第一目標位置(如O點的位置)和將第二定位標記342從第二當前位置(如P2點的位置)移動到第二目標位置(如O點的位置)時所需輸入給對位平台30的補償位移量,其中A代表對位平台30的特性矩陣,B代表該第一當前位置與該第一目標位置在各個座標軸下的差以及該第二當前位置與該第二目標位置在各個座標軸下的差所構成的矩陣,Z代表要輸入給對位平台30的補償位移量所構成的矩陣。 Step S106: Using a predetermined algorithm, it is determined that the first positioning mark 341 is moved to the first target position (such as the O point position of FIG. 6A) and the second positioning mark 342 is moved to the second target position (as shown in FIG. 6B). At the O point position, the amount of compensation displacement required to be input to the alignment stage 30 is required. Specifically, in this step, using the equation AZ=B, it is determined that the first positioning mark 341 is moved from the first current position (such as the position of the P1 point) to the first target position (such as the position of the O point) and The amount of compensation displacement required to be input to the alignment platform 30 when the second positioning mark 342 is moved from the second current position (such as the position of the P2 point) to the second target position (such as the position of the O point), where A represents the alignment platform a characteristic matrix of 30, B represents a matrix formed by the difference between the first current position and the first target position under respective coordinate axes, and a difference between the second current position and the second target position under each coordinate axis, and Z represents A matrix formed by the amount of compensation displacement input to the registration platform 30.
整個對位的目的即為將第一定位標記341和第二定位標記342的當前位置P1、P2所構成之向量,重合對準於第6A圖中的O點和第6B圖中的O點所構成之向量,因兩向量存在著△x、△y與△θ(註:此為對位平台的參數標示)的誤差。 The purpose of the entire alignment is to align the vectors formed by the current positions P1 and P2 of the first positioning mark 341 and the second positioning mark 342 to the O point in FIG. 6A and the O point in FIG. 6B. The vector of the composition, because of the existence of Δx, Δy and Δθ in the two vectors (Note: this is the parameter of the alignment platform) error.
以XXY平台為例,上述方程式AZ=B可以寫為:
上述方程式AZ=B中,補償位移量的矩陣Z等效於下式:Z=(ATA)-1ATB,其中T代表求取矩陣的轉置矩陣,而-1代表求取矩陣的反矩陣。 In the above equation AZ=B, the matrix Z for compensating the displacement amount is equivalent to the following formula: Z=(A T A) -1 A T B, where T represents the transposed matrix of the obtained matrix, and -1 represents the seeking matrix The inverse matrix.
在同樣的配置下,同一類型的對位平台具有相同的特性矩陣A,至於如何獲取對位平台的特性矩陣A為清楚起見將於後文描述。在對位過程中,特性矩陣A是已知的,加上矩陣B可以在兩攝像鏡頭的座標系下求得,故矩陣B也是已知的,因此可以得出補償位移量的矩陣Z。 In the same configuration, the same type of alignment platform has the same characteristic matrix A, and how to obtain the characteristic matrix A of the alignment platform will be described later for clarity. In the alignment process, the characteristic matrix A is known, and the matrix B can be obtained under the coordinate system of the two imaging lenses, so the matrix B is also known, so that the matrix Z for compensating the displacement amount can be obtained.
步驟S108:將該補償位移量輸入到對位平台30。具體來說,在此步驟中,將該補償位移量輸入到對位平台30,使對位平台30產生位移及/或角位移,以使物件32之第一定位標記341的第一當前位置移動到該第一目標位置,物件32之第二定位標記342的第二當前位置移動到該第二目標位置。也就是,第6A圖中的P1點移至O點,第6B圖中的P2點移至O點。在此步驟中,根據求得的補償位移量的矩陣Z,輸入矩陣Z中X、Y、θ的值給對位矩陣。 Step S108: Input the compensation displacement amount to the alignment platform 30. Specifically, in this step, the compensation displacement amount is input to the alignment platform 30, and the alignment platform 30 is displaced and/or angularly displaced to move the first current position of the first positioning mark 341 of the object 32. To the first target position, the second current position of the second positioning mark 342 of the object 32 is moved to the second target position. That is, the P1 point in Fig. 6A moves to the O point, and the P2 point in Fig. 6B moves to the O point. In this step, the values of X, Y, and θ in the matrix Z are input to the alignment matrix based on the matrix Z of the obtained compensation displacement amount.
以XXY對位平台來說,上述θ值需轉換為各軸的進給量,一個轉換的例子是,XXY對位平台旋轉θ時,所需的各軸相對進給量為:X1軸:δX1=Rcos(δθ+θX1+θ0)-Rcos(θX1+θ0) X2軸:δX2=Rcos(δθ+θX2+θ0)-Rcos(θX2+θ0) Y軸:δY=Rsin(δθ+θY+θ0)-Rsin(θY+θ0)其中,R=90,為通過連接在各軸上的交叉滾柱軸承中心的假設圓半徑(預定參數);θX1=90,為連接在X1軸上的交叉滾柱軸承中心的角度位置(預定參數);θX2=279,為連接在X2軸上的交叉滾柱軸承中心的角度位置(預定參數);θY=180,為連接在Y軸上的交叉滾柱軸承中心的角度位置(預定參數);θ0為計算動作前的工作台角度;以及δθ為工作台要旋轉的角度。 In the XXY alignment platform, the above θ value needs to be converted into the feed amount of each axis. An example of a conversion is that when the XXY alignment platform rotates θ, the required relative feed amount of each axis is: X1 axis: δ X1 = Rcos(δ θ + θ X1 + θ 0 ) - Rcos (θ X1 + θ 0 ) X2 axis: δ X2 = Rcos (δ θ + θ X2 + θ 0 ) - Rcos (θ X2 + θ 0 ) Y axis : δ Y = Rsin(δ θ + θ Y + θ 0 ) - Rsin(θ Y + θ 0 ) where R = 90 is the assumed circle radius through the center of the crossed roller bearing connected to each axis (predetermined parameter ); θ X1 = 90, the angular position of the center of the crossed roller bearing connected to the X1 axis (predetermined parameter); θ X2 = 279, the angular position of the center of the crossed roller bearing connected to the X2 axis (predetermined parameter) ); θ Y = 180, which is the angular position (predetermined parameter) of the center of the crossed roller bearing connected to the Y axis; θ 0 is the table angle before the calculation operation; and δ θ is the angle at which the table is to be rotated.
本發明採用雙攝像鏡頭為對位平台上的物件進行對位的方法,利用兩攝像鏡頭361、362分別記錄物件32上的第一定位標記341和第二定位標記342的位置,並利用對位平台30的特性 矩陣,以預定算法得出要輸入給對位平台30的補償位移量,使得對位平台30能夠依此補償位移量將第一定位標記341和第二定位標記342移動到目標位置。本發明中,對位平台30能夠依此補償位移量同時完成平移位移和角位移,而沒有習知技術需分段進行平移對位和旋轉對位導致的對位時間過長的技術問題,因此本發明可縮短影像伺服定位所需的時間,提高生產效率。 The present invention uses a dual camera lens to align the objects on the alignment platform, and uses the two camera lenses 361, 362 to record the positions of the first positioning mark 341 and the second positioning mark 342 on the object 32, respectively, and utilize the alignment. Characteristics of platform 30 The matrix, in a predetermined algorithm, derives the amount of compensation displacement to be input to the alignment platform 30, so that the alignment platform 30 can compensate the displacement amount to move the first positioning mark 341 and the second positioning mark 342 to the target position. In the present invention, the alignment platform 30 can compensate for the displacement amount and simultaneously complete the translational displacement and the angular displacement, and there is no technical problem that the conventional technique needs to segment the translational alignment and the rotational alignment to cause the alignment time to be too long. The invention can shorten the time required for image servo positioning and improve production efficiency.
在對位平台30之特性矩陣的獲取方面,本發明利用每次給予對位平台30些微移動量,觀察其上之量測點的位移,來獲取其特性矩陣。具體來說,使對位平台30每次僅在一個軸向(如X軸向、Y軸向和θ軸向)上產生一個單位的移動量,利用第一攝像鏡頭361和第二攝像鏡頭362分別記錄對位平台30上的第一量測點和第二量測點在對位平台30每次在一個軸向上產生一個單位的移動量時所對應的位移量,基於上述方程式AZ=B,來得出對位平台30的特性矩陣A。 In terms of obtaining the characteristic matrix of the alignment platform 30, the present invention utilizes a slight amount of movement each time the alignment platform 30 is given, and observes the displacement of the measurement points thereon to obtain its characteristic matrix. Specifically, the alignment platform 30 is caused to generate one unit of movement amount in only one axial direction (such as the X-axis, the Y-axis, and the θ-axis) at a time, using the first imaging lens 361 and the second imaging lens 362. Recording, respectively, the displacement amount corresponding to the first measurement point and the second measurement point on the alignment platform 30 when the alignment platform 30 generates a unit movement amount in one axial direction, based on the above equation AZ=B, The characteristic matrix A of the alignment platform 30 is derived.
請參閱第7圖,其顯示本發明之對位平台的特性矩陣的獲取方法的示意圖。本發明之對位平台的特性矩陣的獲取方法可分為如下步驟: Please refer to FIG. 7, which shows a schematic diagram of a method for acquiring a characteristic matrix of the alignment platform of the present invention. The method for obtaining the characteristic matrix of the alignment platform of the present invention can be divided into the following steps:
步驟S202:利用第一攝像鏡頭361和第二攝像鏡頭362分別拍攝對位平台30上的第一量測點和第二量測點的影像,記錄第一量測點在第一攝像鏡頭361之視野下的位置,記錄第二量測點在第二攝像鏡頭362之視野下的位置。如第8A圖和第8B圖所示,在初始時,假定第一量測點是位於第一攝像鏡頭361之座標系的視 野中心,第二量測點是位於第二攝像鏡頭362之座標系的視野中心,也就是,都分別位於座標原點。 Step S202: The first imaging lens 361 and the second imaging lens 362 respectively capture images of the first measurement point and the second measurement point on the alignment platform 30, and record the first measurement point in the first imaging lens 361. The position under the field of view records the position of the second measurement point in the field of view of the second imaging lens 362. As shown in FIGS. 8A and 8B, initially, it is assumed that the first measurement point is the view of the coordinate system located in the first imaging lens 361. In the wild center, the second measurement point is located at the center of the field of view of the coordinate system of the second camera lens 362, that is, at the coordinate origin.
步驟S204:使對位平台30在X軸向上產生一個單位的移動量,例如輸入X=1給對位平台30,命令其依此移動,利用第一攝像鏡頭361和第二攝像鏡頭362得出第一量測點和第二量測點的位移量,例如此時利用第一攝像鏡頭361可以得出第一量測點產生了△X1和△Y1的位移(如第8A圖所示),利用第二攝像鏡頭362可以得出第二量測點產生了△X2和△Y2的位移(如第8A圖所示)。 Step S204: The alignment platform 30 is caused to generate a unit of movement amount in the X-axis direction, for example, input X=1 to the alignment platform 30, and command the movement thereof to be performed by using the first imaging lens 361 and the second imaging lens 362. The displacement amount of the first measurement point and the second measurement point, for example, at this time, the first imaging lens 361 can be used to obtain that the first measurement point generates displacements of ΔX 1 and ΔY 1 (as shown in FIG. 8A). Using the second imaging lens 362, it can be concluded that the second measurement point produces a displacement of ΔX 2 and ΔY 2 (as shown in FIG. 8A).
步驟S206:類似地,使對位平台30在Y軸向上產生一個單位的移動量,利用第一攝像鏡頭361和第二攝像鏡頭362得出第一量測點和第二量測點的位移量。 Step S206: Similarly, the alignment platform 30 is caused to generate a unit of movement amount in the Y-axis direction, and the displacement amounts of the first measurement point and the second measurement point are obtained by using the first imaging lens 361 and the second imaging lens 362. .
步驟S208:使對位平台30在θ軸向上產生一個單位的移動量,利用第一攝像鏡頭361和第二攝像鏡頭362得出第一量測點和第二量測點的位移量。 Step S208: The alignment platform 30 is caused to generate a unit of movement amount in the θ-axis direction, and the displacement amounts of the first measurement point and the second measurement point are obtained by the first imaging lens 361 and the second imaging lens 362.
步驟S210:利用步驟S202至S208中所得出的第一量測點和第二量測點分別於對位平台30在X軸向、Y軸向和θ軸向上產生一個單位的移動量時的位移量,基於上述方程式AZ=B,得出對位平台30的特性矩陣。 Step S210: using the first measuring point and the second measuring point obtained in steps S202 to S208 to respectively generate a displacement of the unit platform 30 in the X-axis, the Y-axis and the θ-axis. The quantity, based on the above equation AZ=B, results in a characteristic matrix of the alignment platform 30.
如下以XXY對位平台來作試驗,依上述方式求其特性矩陣。首先,將標靶(即量測點)分別移到第一攝像鏡頭361(CCD_1)與第二攝像鏡頭362(CCD_2)的視野中間,並紀錄其數值,接著將XXY對平台分別給予X軸向、Y軸向及θ軸向一個單
位之移動量的命令後,可得到下表1的數據,單位為一個像素(Pixel):
依上述數據,可以分别得出、
、,進而得出特性矩陣A,其中以一個像素為4.7um進行換算,下列特性矩陣A的單位為公釐(mm):
如下以XXY對位平台來作試驗,瞭解採用本發明之方法的對位精確度。假設第一定位標記341在第一攝像鏡頭361(CCD_1)的座標系下的第一當前位置為(304.622,577.674),第二定位標記342在第二攝像鏡頭362(CCD_2)的座標系下的第二當 前位置為(293.503,232.356),現要將其分別移動到座標(640,480)與(640,480)的位置。則,依據上述方程式AZ=B,計算出要輸入給XXY對位平台的補償位移量為:X=-1.009、Y=-0.504、θ=3.006。 The XXY alignment platform was tested as follows to understand the alignment accuracy using the method of the present invention. It is assumed that the first current position of the first positioning mark 341 under the coordinate system of the first imaging lens 361 (CCD_1) is (304.622, 577.674), and the second positioning mark 342 is under the coordinate system of the second imaging lens 362 (CCD_2). Second The front position is (293.503, 232.356), and it is now moved to the coordinates (640, 480) and (640, 480) respectively. Then, according to the above equation AZ=B, the compensation displacement amount to be input to the XXY alignment platform is calculated as: X=-1.009, Y=-0.504, θ=3.006.
如上所述,XXY對位平台旋轉θ時,θ值需轉換為各軸的進給量,依據上述轉換公式,將δθ=3.006代入轉換公式,可得到δX1=-4.72、δX2=4.72、δY=-4.72。因此,最後要送給XXY對位平台的值為:X1=-1.009-4.72=-5.729 X2=-1.009+4.72=3.711 Y=-0.504-4.72=-5.224 As described above, when the XXY alignment platform rotates θ, the θ value needs to be converted into the feed amount of each axis. According to the above conversion formula, δ θ =3.006 is substituted into the conversion formula, and δ X1 =- 4.72 and δ X2 =4.72 can be obtained. , δ Y = -4.72. Therefore, the value to be sent to the XXY registration platform is: X1=-1.009-4.72=-5.729 X2=-1.009+4.72=3.711 Y=-0.504-4.72=-5.224
採用本發明之對位方法以XXY對位平台進行對位試驗所產生的誤差如下表2所示,試驗結果顯示誤差約在20微米以下,精確度在合理範圍內。其中,1個pixel=4.7um。 The error caused by the alignment test of the XXY alignment platform by the alignment method of the present invention is shown in Table 2 below. The test results show that the error is about 20 microns or less, and the accuracy is within a reasonable range. Among them, 1 pixel = 4.7um.
針對XYθ對位平台,在對位過程中,上述步驟S106中的方程式AZ=B可以寫為:
此外,在XYθ對位平台的特性矩陣A的獲取方面,可以採用與上述步驟S202~S210所描述的類似方式來得出此特性矩陣。 In addition, in the acquisition of the characteristic matrix A of the XYθ alignment platform, the characteristic matrix can be obtained in a similar manner to that described in the above steps S202 to S210. .
如下以XYθ對位平台來作試驗,求其特性矩陣。首先,將標靶(即量測點)分別移到第一攝像鏡頭361(CCD_1)與
第二攝像鏡頭362(CCD_2)的視野中間,並紀錄其數值,接著將XYθ對平台分別給予X軸向、Y軸向及θ軸向一個單位之移動量的命令後,可得到下表3的數據,單位為一個像素(Pixel):
依上述數據,可以得出特性矩陣A,其中以一個像素為4.7um進行換算,下列特性矩陣A的單位為公釐(mm):
如下以XYθ對位平台來作試驗,瞭解採用本發明之方法的對位精確度。假設第一定位標記341在第一攝像鏡頭361(CCD_1)的座標系下的第一當前位置為(637.056,479.057),第二定位標記342在第二攝像鏡頭362(CCD_2)的座標系下的第二當前位置為(610.396,485.554),現要將其分別移動到座標(964.435, 443.672)與(938.305,690.729)的位置。則,依據上述方程式AZ=B,計算出要輸入給XYθ對位平台的補償位移量為:X=0.006、Y=0.003、θ=0.0164。 The XYθ alignment platform was tested as follows to understand the alignment accuracy using the method of the present invention. It is assumed that the first current position of the first positioning mark 341 under the coordinate system of the first imaging lens 361 (CCD_1) is (637.056, 479.057), and the second positioning mark 342 is under the coordinate system of the second imaging lens 362 (CCD_2). The second current position is (610.396, 485.554), and now it is moved to the coordinates (964.435, 443.672) and the location of (938.305, 690.729). Then, according to the above equation AZ=B, the compensation displacement amount to be input to the XYθ alignment platform is calculated as: X=0.006, Y=0.003, θ=0.0164.
採用本發明之對位方法以XYθ對位平台進行對位試驗所產生的誤差如下表4所示,試驗結果顯示誤差約在20微米以下,精確度在合理範圍內。其中,1個pixel=4.7um。 The error caused by the alignment test of the XYθ alignment platform by the alignment method of the present invention is shown in Table 4 below. The test results show that the error is about 20 microns or less, and the accuracy is within a reasonable range. Among them, 1 pixel = 4.7um.
應用本發明之上述概念,本發明還提供一種顯示面板之基板對位上膠的方法。請參閱第9圖,其顯示本發明之顯示面板之基板對位上膠的方法流程圖,本發明對位上膠方法包含如下步驟: Applying the above concept of the present invention, the present invention also provides a method for aligning a substrate of a display panel. Please refer to FIG. 9 , which is a flow chart showing a method for aligning the substrate of the display panel of the present invention. The method for aligning the aligning method of the present invention comprises the following steps:
步驟S302:將顯示面板之基板移動到對位平台上。在此步驟中,可以利用機械手臂,將要進行上膠的基板放置到對位平台上,先進行對位,此基板後續係與對向基板進行貼合組裝。 Step S302: Move the substrate of the display panel to the alignment platform. In this step, the robotic arm can be used to place the substrate to be glued onto the alignment platform, and then the alignment is performed first, and the substrate is subsequently assembled and assembled with the opposite substrate.
步驟S304:利用第一攝像鏡頭得出基板之第一定位標記的第一當前位置;利用第二攝像鏡頭得出基板之第二定位標記的第二當前位置。具體來說,利用第一攝像鏡頭和第二攝像鏡頭分別拍攝該基板上之第一定位標記和第二定位標記,以得出該第一定位標記在該第一攝像鏡頭之座標系下的第一當前位置以及該第二定位標記在該第二攝像鏡頭之座標系下的第二當前位置。此步驟可以採用機械視覺技術來達成。 Step S304: Deriving a first current position of the first positioning mark of the substrate by using the first imaging lens; and obtaining a second current position of the second positioning mark of the substrate by using the second imaging lens. Specifically, the first positioning mark and the second positioning mark on the substrate are respectively captured by using the first imaging lens and the second imaging lens to obtain the first positioning mark under the coordinate system of the first imaging lens. a current position and a second current position of the second positioning mark under the coordinate system of the second imaging lens. This step can be achieved using mechanical vision techniques.
步驟S306:得出要輸入給對位平台的補償位移量。具體來說,得出將該基板之第一定位標記從該第一攝像鏡頭之座標系下的該第一當前位置移動到一第一目標位置和將該基板之第二定位標記從該第二攝像鏡頭之座標系下的該第二當前位置移動到一第二目標位置時所需輸入給該對位平台的補償位移量,其中該對位平台的補償位移量是對該對位平台的特性矩陣以及該第一當前位置與該第一目標位置在各個座標軸下的差以及該第二當前位置與該第二目標位置在各個座標軸下的差所構成的矩陣進行運算而得出。針對XXY對位平台和XYθ對位平台,此步驟可以分別採用上述提及的兩個方程式來達成。 Step S306: Determine the amount of compensation displacement to be input to the alignment platform. Specifically, the first positioning mark of the substrate is moved from the first current position under the coordinate system of the first imaging lens to a first target position and the second positioning mark of the substrate is removed from the second a compensation displacement amount required to be input to the alignment platform when the second current position under the coordinate system of the camera lens is moved to a second target position, wherein the compensation displacement amount of the alignment platform is a characteristic of the alignment platform The matrix and the matrix of the first current position and the difference of the first target position under the respective coordinate axes and the difference between the second current position and the second target position under the respective coordinate axes are calculated. For the XXY alignment platform and the XYθ alignment platform, this step can be achieved by using the two equations mentioned above, respectively.
步驟S308:將該補償位移量輸入到對位平台。具體來說,將該補償位移量輸入到該對位平台,即可使得在第一攝像鏡頭之座標系下該第一當前位置移動到該第一目標位置,在該第二攝像鏡頭之座標系下該第二當前位置移動到該第二目標位置,完成該基板之對位。 Step S308: Input the compensation displacement amount to the alignment platform. Specifically, the compensation displacement amount is input to the alignment platform, so that the first current position is moved to the first target position under the coordinate system of the first imaging lens, and the coordinate system of the second imaging lens is The second current position is moved to the second target position to complete the alignment of the substrate.
步驟S310:對該已完成對位之基板進行上膠。在此步驟中,可以利用自動塗膠機來對該基板進行上膠。該基板完成上膠後,後續可進行與對向基板進行貼合組裝的程序,以完成顯示面板之製造。 Step S310: Sizing the completed substrate. In this step, the substrate can be sized using an automatic applicator. After the substrate is glued, a process of bonding and assembling with the opposite substrate can be performed to complete the manufacture of the display panel.
應用本發明之上述概念,本發明還提供一種顯示面板之上下基板的對位方法。請參閱第10圖,其顯示本發明之顯示面板之上下基板的對位方法流程圖,本發明的上下基板對位方法包含如下步驟: Applying the above concept of the present invention, the present invention also provides a method for aligning a lower substrate on a display panel. Please refer to FIG. 10, which is a flowchart of a method for aligning a lower substrate on a display panel of the present invention. The method for aligning the upper and lower substrates of the present invention includes the following steps:
步驟S402:將顯示面板之第一基板移動到第一對位平台上。在此步驟中,可以利用機械手臂,將第一基板放置到該第一對位平台上。 Step S402: moving the first substrate of the display panel to the first alignment platform. In this step, the first substrate can be placed on the first alignment platform using a robotic arm.
步驟S404:利用第一攝像鏡頭得出第一基板之第一定位標記的當前位置;利用第二攝像鏡頭得出第一基板之第二定位標記的當前位置。具體來說,在此步驟中,可以利用第一攝像鏡頭和第二攝像鏡頭分別拍攝該第一基板上之第一定位標記和第二定位標記,配合機械視覺技術,得出該第一定位標記之當前位置以及該第二定位標記之當前位置。 Step S404: obtaining a current position of the first positioning mark of the first substrate by using the first imaging lens; and obtaining a current position of the second positioning mark of the first substrate by using the second imaging lens. Specifically, in this step, the first positioning mark and the second positioning mark on the first substrate may be respectively captured by using the first imaging lens and the second imaging lens, and the first positioning mark is obtained according to the mechanical vision technology. The current position and the current position of the second positioning mark.
步驟S406:得出要輸入給第一對位平台的補償位移量。具體來說,針對XXY對位平台和XYθ對位平台,可以分別採用上述提及的兩個方程式,來得出將該第一基板之第一定位標記從其當前位置移動到一第一目標位置和將該第一基板之第二定位 標記從其當前位置移動到一第二目標位置時所需輸入給該第一對位平台的補償位移量。 Step S406: Deriving a compensation displacement amount to be input to the first alignment platform. Specifically, for the XXY alignment platform and the XYθ alignment platform, the two equations mentioned above may be respectively used to move the first positioning mark of the first substrate from its current position to a first target position and Second positioning of the first substrate The amount of compensation displacement required to be input to the first alignment platform when the marker is moved from its current position to a second target position.
步驟S408:將要輸入給該第一對位平台的該補償位移量輸入到該第一對位平台,以使得該第一基板之第一定位標記從其當前位置移動到該第一目標位置,該第一基板之第二定位標記從其當前位置移動到該第二目標位置。例如,以XXY對位平台來說,可以得出X、Y和θ之補償位移量,而後將θ值轉換為各軸的進給量。 Step S408: input the compensation displacement amount to be input to the first alignment platform to the first alignment platform, so that the first positioning mark of the first substrate moves from the current position to the first target position, The second positioning mark of the first substrate moves from its current position to the second target position. For example, in the XXY alignment platform, the compensation displacement amounts of X, Y, and θ can be obtained, and then the θ value is converted into the feed amount of each axis.
步驟S410:將顯示面板之第二基板移動到與第一對位平台平行設置的第二對位平台上。此步驟亦可利用機械手臂來移動第二基板。 Step S410: Moving the second substrate of the display panel to the second alignment platform disposed in parallel with the first alignment platform. This step can also use a robotic arm to move the second substrate.
步驟S412:利用與第一攝像鏡頭背向設置的第三攝像鏡頭得出第二基板之第三定位標記的當前位置;利用與第二攝像鏡頭背向設置的第四攝像鏡頭得出第二基板之第四定位標記的當前位置。在此步驟中,可以配合機械視覺技術,利用與該第一攝像鏡頭背向對應設置的第三攝像鏡頭和與該第二攝像鏡頭背向對應設置的第四攝像鏡頭分別拍攝該第二基板上之第三定位標記和第四定位標記,以得出該第三定位標記之當前位置以及該第四定位標記之當前位置。在此步驟中,第三攝像鏡頭較佳與第一攝像鏡頭沿一直線排列背向對應設置,且此兩攝像鏡頭的倍率和解析度相同;第四攝像鏡頭較佳與第二攝像鏡頭沿一直線排列背向 對應設置,且此兩攝像鏡頭的倍率和解析度相同;以簡化後續的對位運算複雜度。 Step S412: obtaining a current position of the third positioning mark of the second substrate by using the third imaging lens disposed opposite to the first imaging lens; and obtaining the second substrate by using the fourth imaging lens disposed opposite to the second imaging lens The current position of the fourth positioning mark. In this step, the third imaging lens disposed correspondingly to the first imaging lens and the fourth imaging lens disposed opposite to the second imaging lens may be respectively used to capture the second substrate. And a third positioning mark and a fourth positioning mark to obtain a current position of the third positioning mark and a current position of the fourth positioning mark. In this step, the third imaging lens is preferably disposed opposite to the first imaging lens in a straight line, and the magnification and resolution of the two imaging lenses are the same; the fourth imaging lens is preferably aligned with the second imaging lens in a straight line. Backward Corresponding settings, and the magnification and resolution of the two camera lenses are the same; to simplify the subsequent alignment operation complexity.
步驟S414:得出要輸入給第二對位平台的補償位移量。具體來說,得出將該第二基板之第三定位標記從其當前位置移動到與該第一目標位置相對應之一第三目標位置和將該第二基板之第四定位標記從其當前位置移動到與該第二目標位置相對應之一第四目標位置時所需輸入給該第二對位平台的補償位移量。補償位移量可利用上述提及的方程式計算得出。在此步驟中,該第三目標位置基本上與該第一目標位置相同或相應,該第四目標位置基本上與該第二目標位置相同或相應,這樣的話,即可很方便地將第二基板之第三定位標記移動到與第一基板之第一定位標記相應的位置上,將第二基板之第四定位標記移動到與第一基板之第二定位標記相應的位置上,實現第一基板與第二基板的對位。 Step S414: The compensation displacement amount to be input to the second alignment platform is obtained. Specifically, it is determined that the third positioning mark of the second substrate is moved from its current position to a third target position corresponding to the first target position and the fourth positioning mark of the second substrate is from its current The amount of compensation displacement required to be input to the second alignment platform when the position is moved to a fourth target position corresponding to the second target position. The amount of compensation displacement can be calculated using the equations mentioned above. In this step, the third target position is substantially the same as or corresponding to the first target position, and the fourth target position is substantially the same as or corresponding to the second target position, so that the second position can be conveniently Moving the third positioning mark of the substrate to a position corresponding to the first positioning mark of the first substrate, and moving the fourth positioning mark of the second substrate to a position corresponding to the second positioning mark of the first substrate, achieving the first The alignment of the substrate and the second substrate.
步驟S416:將要輸入給該第二對位平台的該補償位移量輸入到該第二對位平台,以使得該第二基板之第三定位標記從其當前位置移動到該第三目標位置,該第二基板之第四定位標記從其當前位置移動到該第四目標位置。此時,第二基板之第三定位標記的位置即對應第一基板之第一定位標記的位置,第二基板之第四定位標記的位置即對應第一基板之第二定位標記的位置,完成了顯示面板之第一基板和第二基板(即,上下基板)的對位。 Step S416: input the compensation displacement amount to be input to the second alignment platform to the second alignment platform, so that the third positioning mark of the second substrate is moved from the current position to the third target position, The fourth positioning mark of the second substrate moves from its current position to the fourth target position. At this time, the position of the third positioning mark of the second substrate corresponds to the position of the first positioning mark of the first substrate, and the position of the fourth positioning mark of the second substrate corresponds to the position of the second positioning mark of the first substrate. The alignment of the first substrate and the second substrate (ie, the upper and lower substrates) of the display panel.
本發明已用較佳實施例揭露如上,然其並非用以限定本發明,本發明所屬技術領域中具有通常知識者,在不脫離本 發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 The present invention has been disclosed in the above preferred embodiments, and is not intended to limit the present invention. In the spirit and scope of the invention, the scope of the invention is defined by the scope of the appended claims.
S102~S108‧‧‧步驟 S102~S108‧‧‧Steps
Claims (9)
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TWI653190B (en) | 2017-11-30 | 2019-03-11 | 財團法人金屬工業研究發展中心 | Alignment method and alignment device |
CN111250406B (en) * | 2020-03-16 | 2023-11-14 | 科为升视觉技术(苏州)有限公司 | Automatic placement method and system for PCB detection assembly line based on visual positioning |
CN113670230A (en) * | 2020-05-15 | 2021-11-19 | 全研科技有限公司 | XXY alignment platform inspection method |
CN112762831B (en) * | 2020-12-29 | 2022-10-11 | 南昌大学 | Method for realizing posture reconstruction of moving object with multiple degrees of freedom by adopting multiple cameras |
CN114543678A (en) * | 2022-04-25 | 2022-05-27 | 征图新视(江苏)科技股份有限公司 | Visual detection method based on XXY correction platform |
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US5858806A (en) * | 1995-03-24 | 1999-01-12 | Matsushita Electric Industrial Co., Ltd. | Method of bonding IC component to flat panel display |
JP2011248207A (en) * | 2010-05-28 | 2011-12-08 | Hitachi High-Technologies Corp | Proximity exposure device, alignment method of proximity exposure device, and manufacturing method of panel substrate |
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