TW201733810A - Manufacturing method and manufacturing device for glass film laminate - Google Patents

Abstract

This manufacturing method for a glass film laminate LG comprises: a step for adsorbing a supporting glass SG on a holding surface 5 of an upper stage 2; a step for placing a resin film 8 on a supporting surface 6 of a lower stage 3; a step for placing a glass film GF on the resin film 8; a step for adsorbing the resin film 8 on the supporting surface 6 of the lower stage 3; and a step for, after adsorbing the resin film 8 on the supporting surface 6 of the lower stage 3, closely adhering the supporting glass SG held in the upper stage 2 with the glass film GF supported in the lower stage 3.

Description

Method and device for producing glass film laminate

The present invention relates to a method and apparatus for producing a glass film laminate which supports a glass-laminated glass film.

From the viewpoint of space saving, a flat panel display such as a liquid crystal display, a plasma display, or an organic EL display that has been popularized in recent years has replaced a conventional CRT type display.

For substrates or cover glass used in devices such as flat panel displays, the need for high flexibility and greater size can be achieved. When a glass substrate is made flexible, it is extremely effective to form a thin glass substrate, and Patent Document 1 discloses a glass film (ultra-thin glass) having a thickness of 200 μm or less.

Various types of manufacturing processes are applied to a glass substrate used in a device such as a flat panel display, such as a processing treatment or a cleaning treatment. However, when a thin glass substrate used for such an electronic device is formed, since the glass is a brittle material, it is damaged by a change in stress, and there is a problem that it is extremely difficult to handle the above-described manufacturing-related treatment. Further, the glass film having a thickness of 200 μm or less is rich in flexibility, and there is a problem in that positioning is difficult when performing processing.

In order to improve the handleability of a glass film, Patent Document 1 discloses a glass film laminate in which a glass film is laminated on a support glass. In this way, since the glass film having no strength or rigidity is laminated on the support glass having high rigidity, the positioning of the entire glass film laminate is easy during the treatment.

Further, after completion of the treatment, the glass film laminate can be quickly peeled off from the support glass without causing damage to the glass film. In addition, the thickness of the glass film laminate is the same as the thickness of a conventional glass substrate, and an electronic device manufacturing line for a conventional glass substrate can be shared, and an electronic device can be manufactured.

[Previous Technical Literature] [Patent Document]

Patent Document 1: Japanese Laid-Open Patent Publication No. 2011-183792

When the glass film laminate is produced, in order to prevent the glass film from being twisted, and bubbles (bubbles) are not generated between the glass film and the support glass, it is necessary to bond the glass to the support glass. In the past, this bonding was performed by hand (hand bonding). However, in recent years, along with the tendency of the equipment to increase in size, it has become difficult to manufacture a large-sized glass film laminate by hand bonding.

The present invention has been made in view of the above circumstances, and an object of the invention is to provide a method and a device for producing a large-sized glass film laminate.

The present invention has been made to solve the above problems, and a method for producing a glass film laminate of the present invention is produced by laminating a support glass held by an upper stage having a holding surface, and a glass film supported by a downloading stage having a supporting surface. A method of coating a glass film laminate, comprising: a step of adsorbing the support glass on the holding surface of the loading table; a step of placing a resin film on the support surface of the downloading station; and placing the resin film on the resin film a step of adsorbing the resin film on the support surface of the downloading station; and after the resin film is adsorbed on the support surface of the downloading stage, the supporting glass and the supporting glass held on the loading table are supported by The step of adhering the glass film of the downloading station to the above.

According to the above configuration, the supporting glass is adsorbed on the holding surface of the loading table, and the glass film supported on the supporting surface of the downloading station is adhered to the supporting glass, whereby the glass film laminated body can be formed. When the glass film laminate is formed, the glass film is supported on the support surface of the downloading station through the resin film. After the resin film is adsorbed on the support surface, the glass film supported on the resin film is not displaced when it is in close contact with the support glass. Further, since the resin film is interposed between the glass film and the support surface of the downloading station, no distortion or bubbles (bubbles) are generated in the glass film.

In other words, when the glass film is adhered to the support glass without using a resin film, the glass film is adsorbed on the support surface, but at this time, the surface characteristics of the support surface such as the hole or the groove are transferred to the glass film. Concavities and the like are generated in the glass film. Therefore, once the glass film is intimately attached to the support glass In the case of glass, the glass film is twisted, and bubbles are generated between the glass and the supporting glass. According to the present invention, the resin film is adsorbed on the support surface of the downloading station, and the problem of the glass film laminate as described above can be prevented. Thereby, even a large-sized glass film laminated body can be suitably manufactured.

Further, the method for producing a glass film laminate according to the present invention further includes a step of transporting the glass film in a predetermined conveyance direction by a conveyance device, wherein the conveyance device transports the glass film by moving the resin film. As described above, by transporting the glass film by moving the resin film, the glass film can be efficiently transported and the support surface can be disposed.

The conveying device is preferably a carrying conveyor belt that transfers the glass film to the resin film. Thereby, the glass film laminated body can be conveyed more effectively.

Further, the transport device includes a position changing unit that can change the vertical position of the resin film on which the glass film is placed. When the glass film is conveyed toward the support surface of the downloading station by the resin film, the position changing unit lifts the resin film to separate the resin film from the support surface, thereby allowing the resin film to be adsorbed on the support surface. The above resin film rises when it rises. Thereby, the resin film can carry the glass film without being in contact with the support surface of the download stage, and the glass film can be placed on the predetermined position of the support surface.

More specifically, the position changing unit includes a first support portion that can support the resin film on the upstream side of the downloading table, and a second support that can support the resin film on the downstream side of the downloading table. When the resin film is lowered, after the first support portion is lowered The second support portion can be lowered. In addition, depending on the size and weight of the glass film, when the first support portion and the second support portion are simultaneously lowered, the position of the glass film may be shifted. On the other hand, in the present invention, the first support portion on the upstream side in the transport direction is lowered, and the second support portion on the downstream side is lowered, and the contact between the glass film and the resin film is maintained to prevent the positional deviation of the glass film. Placed on a predetermined position on the support surface.

Moreover, it is preferable that the conveyance device is a carry-out conveyor including a glass film laminate in which the support glass and the glass film are adhered to each other from the resin film. Thereby, the glass film laminated body can be conveyed efficiently. In the case where the glass film laminate on the resin film is carried out by the carry-out conveyor, the position changing portion is preferably such that the resin film is raised to separate the resin film from the support surface. Thereby, the resin film can be carried out without being in contact with the support surface of the downloading stage, and the formed glass film laminated body can be carried out.

The present invention is an apparatus for producing a glass film laminate having a glass film and a supporting glass, and is characterized in that it comprises an loading table, a holding surface for adsorbing the supporting glass, and a downloading station. a supporting surface that supports the glass film through a resin film, wherein the support surface of the downloading station is configured by adsorbing the resin film, and the resin film is adsorbed on the supporting surface, and the support is held by the loading table. The glass is adhered to the glass film supported on the above-mentioned downloading stage to form a glass film laminate.

According to the above configuration, the supporting glass is adsorbed on the holding surface of the loading table, and the glass film supported on the supporting surface of the downloading station is adhered to the supporting glass. The glass can thereby form a glass film laminate. When the glass film laminate is formed, the glass film is supported on the support surface of the downloading station through the resin film. After the resin film is adsorbed on the support surface, the glass film supported on the resin film is not displaced when it is in close contact with the support glass. Further, since the resin film is interposed between the glass film and the support surface of the downloading station, no distortion or bubbles (bubbles) are generated in the glass film.

That is, when the glass film is adhered to the support glass without using a resin film, the glass film is adsorbed on the support surface, but at this time, the surface characteristics of the support surface such as the hole or the groove are transferred to the glass film. Concavities and the like are generated in the glass film. Therefore, when the glass film is adhered to the supporting glass, the glass film is twisted, and bubbles are generated between the glass and the supporting glass. According to the present invention, the resin film is adsorbed on the support surface of the downloading station, and the problem of the glass film laminate as described above can be prevented. Thereby, even a large-sized glass film laminated body can be suitably manufactured.

According to the present invention, even a large glass film laminate can be produced.

1‧‧‧Manufacturing device for glass film laminate

2‧‧‧ Uploading station

3‧‧‧ download station

4‧‧‧Transportation device

4a‧‧‧1st transport device (moving into the conveyor belt)

4b‧‧‧2nd handling device

4c‧‧‧3rd handling device (moving out the conveyor belt)

5‧‧‧ Keep face

6‧‧‧Support surface

8‧‧‧ resin film

10‧‧‧Location Change Department

GF‧‧‧glass film

LG‧‧ ‧ glass film laminate

SG‧‧‧Support glass

Fig. 1 is a side view showing a manufacturing apparatus of a glass film laminate according to the first embodiment.

Fig. 2 is a view showing the steps of a method for producing a glass film laminate; Side view of the device.

Fig. 3 is a side view showing a manufacturing apparatus showing one step of a method of manufacturing a glass film laminate.

Fig. 4 is a side view showing a manufacturing apparatus showing one step of a method of manufacturing a glass film laminate.

Fig. 5 is a side view showing a manufacturing apparatus showing one step of a method of manufacturing a glass film laminate.

Fig. 6 is a side view showing a manufacturing apparatus showing one step of a method of manufacturing a glass film laminate.

Fig. 7 is a side view showing a manufacturing apparatus showing one step of a method of manufacturing a glass film laminate.

Fig. 8 is a side view showing a manufacturing apparatus showing one step of the method for producing a glass film laminate.

Fig. 9 is a side view showing the apparatus for manufacturing the glass film laminate of the second embodiment.

Fig. 10 is a side view showing a manufacturing apparatus showing one step of a method of manufacturing a glass film laminate.

Hereinafter, the form for carrying out the present invention will be described with reference to the drawings. Fig. 1 to Fig. 8 show a first embodiment of a method for producing a glass film laminate of the present invention and a manufacturing apparatus therefor. Further, the glass film laminate LG produced by the present invention is formed by laminating a transparent rectangular glass film GF on a transparent rectangular support glass SG. As a glass film GF is an ultrathin plate glass having a thickness of 200 μm or less, but is not limited thereto.

As shown in Fig. 1, the manufacturing apparatus 1 of the present invention includes an loading table 2 that holds the supporting glass SG, a downloading station 3 that supports the glass film GF, and a conveying device 4 that transports the glass film GF and the glass film laminate LG.

The loading table 2 has a holding surface 5 to which the supporting glass SG is fixed. As shown in Fig. 1, a plurality of holes 5a for adsorbing the supporting glass SG are formed on the holding surface 5. Each hole 5a is connected to a vacuum pump (not shown). The holding surface 5 is a negative pressure generated between the supporting glass SG and the supporting glass SG through the hole 5a, thereby adsorbing the supporting glass SG. As described above, although the loading table 2 adsorbs the supporting glass SG by the vacuum adsorption method, the present invention is not limited thereto, and the supporting glass SG may be adsorbed by the electrostatic adsorption method. Further, as the holding surface 5, the self-adhesive member may be used in its entirety, and a part of the surface is preferably used to hold the supporting glass SG.

The loading table 2 is a first posture in which the holding surface 5 faces upward (a posture indicated by a two-dotted line in the first drawing) and a second posture in which the holding surface 5 faces downward by a reversing device (not shown). 1 is a posture in a posture indicated by a solid line.

The download stage 3 has a support surface 6 that supports the glass film GF. As shown in Fig. 1, a plurality of holes 6a capable of adsorbing a part of the conveying device 4 are formed on the support surface 6. Each hole 6a is connected to a vacuum pump (not shown). The support surface 6 is passed through the hole 6a to generate a negative pressure between a part of the conveying device 4, thereby absorbing a part of the conveying device 4. As described above, the downloading station 3 is a part of the adsorption carrying device 4 by the vacuum adsorption method, but is not limited thereto. Thus, it is also possible to constitute a part of the adsorption transporting device 4 by electrostatic adsorption.

Further, the downloading station 3 is disposed to face the holding surface 5 of the loading table 2 that is in the second posture with the support surface 6 facing upward. Further, as shown in Fig. 1, the downloading station 3 is configured to be movable up and down by the lifting device 7 provided at the lower portion thereof.

The conveyance device 4 includes a first conveyance device 4a that conveys the glass film GF to a position near the downloading station 3, and receives a glass film GF from the first conveyance device 4a and is placed on a predetermined position of the support surface 6 of the downloading station 3. The second conveyance device 4b of the glass film laminate LG formed by the glass film GF and the support glass SG being adhered to the support glass 3 is carried out.

The first conveying device 4a is disposed on the upstream side of the conveying direction of the second conveying device 4b. The first conveying device 4a is constituted by a roller conveyor, but is not limited thereto, and various other conveying devices of the belt conveyor may be used. The first conveyance device 4a transfers the glass film GF to the second conveyance device 4b, and has a function as a conveyance belt (loading conveyance belt) that carries the glass film GF into the download table 3.

The second conveying device 4b includes a resin film 8 that transports the glass film GF, a driving unit 9 that moves the resin film 8 in a predetermined direction, and a position changing unit that changes the position of the resin film 8 in the vertical direction. 10.

The resin film 8 is horizontally stretched from a position on the upstream side of the upstream side of the download table 3 from the position on the downstream side. The resin film 8 is conveyed to the support surface 6 of the download table 3 by the glass film CF conveyed by the first conveyance device 4a. The glass film laminate LG manufactured by the manufacturing apparatus 1 is transferred to the third conveyance device 4c.

The drive unit 9 is a winding device having a drive roller 11 located on the downstream side of the download table 3 and a driven roller 12 located on the upstream side of the download table 3. The driving portion 9 winds the resin film 8 wound around the driven roller 12 by the driving roller 11, thereby moving the resin film 8. Thereby, the resin film 8 can move the glass film GF received from the 1st conveyance apparatus 4a in the conveyance direction. Further, the drive roller 11 is rotationally driven by a drive means such as a motor (not shown).

The position changing unit 10 is disposed on the upstream side of the downloading table 3, and includes a first supporting portion 13 that can support the resin film 8 and that can be raised and lowered, and is disposed on the downstream side of the downloading table 3, and supports the resin film 8 so as to be movable up and down. The second support portion 14. The first support portion 13 includes a first roller 15 and an actuator 16 that moves the first roller 15 up and down. The second support portion 14 includes a second roller 17 and an actuator 18 that moves the second roller 17 up and down. As shown in Fig. 1, a part of the resin film 8 is horizontally supported by the first roller 15 and the second roller 17 in a state where tension is applied.

The position changing unit 10 changes the vertical position of a part of the resin film 8 by the lifting operation of the first support portion 13 and the second support portion 14. Specifically, the position changing unit 10 is configured such that the position of the resin film 8 is raised by the respective actuators 16 and 18 so that the rollers 15 and 17 are lifted upward, and the first position is separated upward from the support surface 6 and The second position where the rollers 15 and 17 are lowered and brought into contact with the support surface 6 is changed.

That is, the position changing unit 10 places the glass film by the resin film 8. When the GF is conveyed toward the support surface 6 of the download table 3, the resin film 8 is raised to separate the resin film 8 from the support surface 6, and when the resin film 8 is adsorbed on the support surface 6, the rising resin film 8 is lowered.

The third conveying device 4c is a conveyor belt (removing conveyor) that receives the glass film laminate LG formed by adhering the glass film GF and the supporting glass SG from the resin film 8 of the second conveying device 4b, and carries it out from the downloading station 3. Similarly to the first conveyance device 4a, the third conveyance device 4c is constituted by a roller conveyor. However, the present invention is not limited thereto, and various other conveyance devices of the belt conveyor may be used. When the glass film laminate LG is carried out by the third transport device 4c, the position changing unit 10 of the second transport device 4b changes a part of the resin film 8 from the first position to the second position.

Hereinafter, the manufacturing apparatus 1 of the above-described configuration will be described with reference to FIGS. 1 to 8 for the method of manufacturing the glass film laminate LG.

First, as shown in Fig. 1, the support glass SG is placed on the holding surface 5 of the loading table 2 located in the first posture (the posture indicated by the dotted line at two points). Thereafter, the support glass SG is adsorbed on the holding surface 5 through the hole 5a by the operation of the vacuum pump. Thereafter, the loading station 2 changes its posture to the second posture (the posture indicated by the solid line) by the operation of the inverting device.

Next, as shown in FIG. 2, the glass film GF conveyed by the 1st conveyance apparatus 4a is conveyed to the 2nd conveyance apparatus 4b. At this time, the second conveying device 4b simultaneously raises the first roller 15 and the second roller 17, and changes a part of the resin film 8 from the second position to the first position. Thereby, a part of the resin film 8 is separated from the support surface 6 of the downloading table 3 and positioned above. after that, The second conveying device 4b operates the driving roller 11 to wind the resin film 8 to move the resin film 8. Thereby, the resin film 8 moves the glass film GF received from the 1st conveyance apparatus 4a downstream in the conveyance direction.

As shown in Fig. 3, when the glass film GF is moved to a predetermined position (a position below the supporting glass SG), the second conveying device 4b stops the driving roller 11 and stops the resin film 8.

Thereafter, the position changing unit 10 changes a part of the resin film 8 from the second position toward the first position. Specifically, the position changing unit 10 is in a state in which the second roller 17 of the second support portion 14 is maintained at the upper position as shown in FIG. 4, and the first roller 15 of the first support portion 13 is first lowered and returned to the lower side. position. When the first roller 15 is moved to the lower position, the second conveying device 4b is shown in Fig. 5, and the second roller 17 is lowered from the upper position and returned to the lower position.

As described above, after the first roller 15 of the first support portion 13 is lowered, the second roller 17 of the second support portion 14 is lowered, whereby the glass film GF on the resin film 8 can be prevented from being displaced. Mounted on the support surface 6 of the download station 3. In other words, when the thickness of the glass film GF is 200 μm or less, since the first roll 15 and the second roll 17 are simultaneously lowered, the glass film GF floats from the resin film 8 and is displaced. Hey. On the other hand, in the present embodiment, the first roller 15 on the upstream side is lowered first, and the second roller 17 on the downstream side is lowered rearward, whereby the glass film can be prevented by the frictional force between the resin film 8 and the glass film GF. The position of the GF is offset.

Of course, the second roller 17 can also be lowered first, and the first When the first roll 15 is lowered and the glass film GF has a sufficient weight, the first roll 15 and the second roll 17 may be simultaneously lowered.

As described above, when a part of the resin film 8 is lowered toward the second position by the operation of the first support portion 13 and the second support portion 14, the glass film GF is placed on the support surface 6 of the download table 3. The download stage 3 operates the vacuum pump to adsorb the resin film 8 to the hole 6a of the support surface 6. Thereby, the resin film 8 is fixed to the support surface 6 in close contact. Thereafter, the downloading station 3 is as shown in Fig. 6, and is moved upward by the operation of the lifting device 7. The glass film GF supported on the downloading stage 3 is in close contact with the supporting glass SF held on the loading table 2. After the state is maintained for a predetermined period of time, the loading table 2 stops the vacuum pump and releases the holding of the supporting glass SG.

Thereafter, as shown in Fig. 7, the downloading station 3 is lowered by the operation of the lifting device 7. As a result, the supporting glass SG and the glass film GF held on the loading table 2 are simultaneously lowered together with the downloading table 3. The glass SG is separated from the loading table 2 by the supporting glass SG, and the glass film laminate LG in which the glass film GF is adhered to the supporting glass SG is placed on the downloading stage 3.

Then, the position changing unit 10 of the second conveying device 4b is shown in Fig. 8, and the first roller 15 of the first supporting portion 13 and the second roller 17 of the second supporting portion 14 are simultaneously raised to form a part of the resin film 8. The portion is separated upward from the support surface 6 of the download table 3. In addition, the second conveying device 4b operates the driving roller 11 of the driving unit 9, moves the resin film 8, and conveys the glass film laminate LG toward the third conveying device 4c. Finally, the glass film laminate LG is transferred from the second transfer device 4b to the third transfer device 4c, and is carried out from the download station 3.

According to the manufacturing method and manufacturing apparatus 1 of the glass film laminated body LG of the present embodiment described above, the supporting glass SG is adsorbed on the holding surface 5 of the loading table 2, and the supporting glass SG and the supporting surface 6 supported by the downloading table 3 are supported. The glass film GF is adhered to each other, whereby the glass film laminate LG can be formed.

When the glass film laminate LG is formed, the glass film GF is supported by the support surface 6 of the download table 3 through the resin film 8. After the resin film 8 is adsorbed on the support surface 6, the glass film GF supported by the resin film 8 does not deviate in position when it is in close contact with the support glass SG. Further, since the resin film 8 is interposed between the glass film GF and the support surface 6 of the download table 3, the glass film GF does not cause distortion or bubbles (bubbles).

In other words, when the glass film GF is adhered to the support glass SG without using the resin film 8, the glass film GF is adsorbed on the support surface 6, but at this time, the surface characteristics of the hole 6a of the support surface 6 are transferred to The glass film GF, such unevenness or the like is generated in the glass film GF. Therefore, when the glass film GF is adhered to the supporting glass SG, the glass film GF is twisted, and bubbles (bubbles) and the like are generated between the glass film GF and the supporting glass SG. In the present embodiment, the resin film 8 is adsorbed on the support surface 6 of the downloading station 3, and the problem of the glass film laminate LG as described above can be prevented. Thereby, even a large-sized glass film laminated body LG can be suitably manufactured.

The ninth and tenth drawings show a second embodiment of the method for producing the glass film laminate LG of the present invention and the manufacturing apparatus 1. In the present embodiment, the configuration of the download station 3 is different from that of the first embodiment.

As shown in Figure 9, the download station 3 has a movable up and down Diaphragm 19. The diaphragm 19 is made of an elastic body such as rubber. A plurality of holes 19a are formed in the diaphragm 19 therethrough. The diaphragm 19 is a pump device (not shown), and the resin film 8 can be adsorbed through the hole 19a.

Further, the diaphragm 19 is a pump device, and as shown in Fig. 10, it can be expanded upward to be convex. The diaphragm 19 is thereby expanded so that the glass film GF supported on the resin film 8 moves upward and is in close contact with the supporting glass SG held by the loading table 2.

When the glass film GF is in close contact with the supporting glass SG, the loading table 2 releases the holding glass SG, and the expanded diaphragm 19 shrinks and returns to its original position. Thereby, the support glass SG and the glass film GF are integrated, that is, the glass film laminated body LG is placed on the separator 19. After that, the glass film laminate LG is transferred from the second conveyance device 4b toward the third conveyance device 4c as in the first embodiment.

Further, the present invention is not limited to the configuration of the above embodiment, and is not limited to the above-described operational effects. The present invention can be variously modified without departing from the spirit and scope of the invention.

In the above-described embodiment, the configuration in which the glass film GF is transported by the transport device 4 is exemplified, but the present invention is not limited thereto, and the first transport device 4a and the third transport device 4c may be omitted. Further, the drive unit 9 and the position changing unit 10 of the second transport device 4b may be omitted. At this time, the glass film GF can be placed on the support surface 6 of the download table 3 by a writer. Specifically, after the rectangular resin film 8 larger than the glass film GF is placed on the support surface 6, the glass film GF may be placed on the resin film 8, or the glass film GF may be placed on the rectangular resin. After the film 8, the sheets are placed on the support surface 6.

In the above-described embodiment, the downloading table 3 is raised by the lifting device 7, and the glass film GF is adhered to the supporting glass SG. However, the present invention is not limited thereto. For example, the loading table 2 may be lowered toward the downloading table 3, and the supporting glass SG may be adhered to the glass film GF to form the glass film laminate LG. Alternatively, the supporting glass SG is dropped from the loading table 2, and the supporting glass is adhered to the glass film GF.

In the above-described embodiment, the resin film 8 is wound around the resin film 8 by the driving roller 11, and the resin film 8 is moved and recovered. However, the present invention is not limited thereto. For example, the moving resin film 8 may be sandwiched between the nip rolls that do not fix the inner surface of the resin film 8, and the resin film 8 may be recovered in a recovery box (not shown).

1‧‧‧Manufacturing device for glass film laminate

2‧‧‧ Uploading station

3‧‧‧ download station

4‧‧‧Transportation device

4a‧‧‧1st transport device (moving into the conveyor belt)

4b‧‧‧2nd handling device

4c‧‧‧3rd handling device (moving out the conveyor belt)

5‧‧‧ Keep face

5a‧‧‧ hole

6‧‧‧Support surface

6a‧‧‧ hole

7‧‧‧ Lifting device

8‧‧‧ resin film

9‧‧‧ Drive Department

10‧‧‧Location Change Department

11‧‧‧Drive roller

12‧‧‧ Passive roller

13‧‧‧1st support

14‧‧‧2nd support

15‧‧‧1st roll

16‧‧‧Actuator

17‧‧‧2nd roller

18‧‧‧Actuator

GF‧‧‧glass film

LG‧‧ ‧ glass film laminate

SG‧‧‧Support glass

Claims (9)

A method for producing a glass film laminate is a method of producing a glass film laminate by laminating a support glass held by an upper stage having a holding surface and a glass film supported by a downloading stage having a support surface, and is characterized by comprising: a step of adsorbing the support glass on the holding surface of the loading table; a step of placing a resin film on the support surface of the downloading station; a step of placing the glass film on the resin film; and adsorbing the resin film on the download a step of supporting the support surface of the stage; and after the resin film is adsorbed on the support surface of the download stage, the support glass held by the loading stage is adhered to the glass film supported by the download stage. The method for producing a glass film laminate according to the first aspect of the invention, further comprising the step of transporting the glass film in a predetermined transport direction by a transport device, wherein the transport device transports the glass film by moving the resin film. The method for producing a glass film laminate according to the second aspect of the invention, wherein the conveying device includes a loading conveyor that transfers the glass film to the resin film. The method for producing a glass film laminate according to the second aspect of the invention, wherein the transfer device includes a position changing unit that changes a vertical position of the resin film on which the glass film is placed. The method of producing a glass film laminate according to the fourth aspect of the invention, wherein the position changing unit conveys the resin film from the support when the glass film is conveyed toward the support surface of the downloading station by the resin film The resin film is lifted up in a plane, and the resin film after the rise is lowered when the resin film is adsorbed on the support surface. The method of manufacturing a glass film laminate according to claim 5, wherein the position changing unit includes a first support portion that can be raised and lowered to support the resin film on an upstream side of the downloading station, and The second support portion that can be raised and lowered supports the resin film on the downstream side of the downloading table, and when the resin film is lowered, the first support portion is lowered to lower the second support portion. The method for producing a glass film laminate according to any one of the present invention, wherein the transfer device includes a glass film laminate in which the support glass is adhered to the glass film from the resin film. The body is carried out of the conveyor belt. In the method of producing a glass film laminate according to the seventh aspect of the invention, the position changing unit removes the resin film from the support surface when the transfer film is carried out by the carry-out conveyor. The above resin film is lifted separately. An apparatus for producing a glass film laminate, which is a device for producing a glass film laminate having a glass film and a supporting glass, comprising: an loading table having a holding surface for adsorbing the supporting glass, and a downloading station having a resin The film supports the support surface of the glass film, and the support surface of the download station is configured to adsorb the resin film. The glass film laminate is formed by adhering the support glass held on the loading table and the glass film supported on the downloading stage in a state in which the resin film is adsorbed on the support surface.