JP2019038673A - Film sticking device - Google Patents

Abstract

To provide a device capable of applying a suitable tension to a film for sticking on a substrate.SOLUTION: A film sticking device 100 comprises: an optical film-supplying device 3 for supporting an optical film F including a base material film and a separator; a first tension-adjusting unit 35 for applying tension to an optical film supplied from the optical film-supplying device 3; a film sticking unit 6 for peeling the separator from the optical film F supplied from the optical film-supplying device 3 to stick the base material film on the substrate P; a second tension-adjusting unit 55 for applying tension to the separator peeled in the film sticking unit 6; and a separator take-up device 5 for taking up and holding the separator peeled in the film sticking unit 6.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a technique for attaching a film to a substrate.

  Various films are affixed to substrates of organic EL panels and liquid crystal display panels. A film attached to a substrate such as an organic EL panel or a liquid crystal display panel is a protective film or a polarizing film. These films attached to a substrate such as an organic EL panel or a liquid crystal display panel will be referred to as a base film in the following description.

  A film called a separator is usually attached to the base film. The joint surface of the base film with the separator is an adhesive surface. That is, by peeling the separator from the base film, the adhesive surface of the base film is exposed. By attaching the adhesive surface of the base film to the substrate of the organic EL panel or the liquid crystal display panel, an attaching process to the substrate is performed.

  Moreover, the protective film may be affixed separately on the surface on the opposite side to the separator of a base film. The protective film is attached to the substrate together with the base film. Thus, the base film has a separator attached to one side and a protective film attached to the other side. An optical film having a three-layer structure of the base film, the separator, and the protective film is set at a predetermined position of the film sticking apparatus as a roll-shaped raw material.

  The optical film fed out from the roll-shaped raw material is conveyed to the position where the substrate is stuck. And while a separator peels from an optical film, a base film is affixed on a board | substrate.

  The following Patent Document 1 discloses an apparatus for continuously applying an optical film to liquid crystal panels that are sequentially transported. In Patent Document 1, as shown in FIG. 5 of Patent Document 1, the carrier film peeled from the optical film is wound around the carrier film winding drive device 210 after being transported by a plurality of rollers. It has become.

Japanese Patent No. 4377961

  In patent document 1, after conveying the carrier film peeled from the optical film with a some roller, it is made to wind up by a carrier film winding drive device. In Patent Document 1, a speed adjusting device 180 is provided on the upstream side of the position where the optical film is attached to the liquid crystal panel.

  An object of the present invention is to provide an apparatus capable of applying an appropriate tension to a film to be attached to a substrate.

(Configuration 1)
The film sticking apparatus for sticking the base film to the substrate of the present embodiment includes an optical film supply device that supports the optical film including the base film and a separator, and the optical film supplied from the optical film supply device. A first tension adjusting unit that applies tension; a film pasting unit that peels off the separator from the optical film supplied from the optical film supply device; and affixing the base film to the substrate; A second tension adjusting unit that applies tension to the peeled separator; and a separator winding device that winds and holds the separator peeled at the film sticking unit. The base film can be attached to the substrate while applying tension to the optical film by the first tension adjusting unit on the upstream side of the film attaching unit and the second tension adjusting unit on the downstream side of the film attaching unit. . Thereby, a base film can be stuck, sending out an optical film with fixed tension.

(Configuration 2)
Moreover, in the film sticking apparatus of this Embodiment, a said 1st tension adjustment part provides tension | tensile_strength to the said optical film with the weight of the driven roller which can move to an up-down direction. Since tension is applied to the optical film by the weight of the driven roller, the optical film can be supplied to the film sticking portion at a constant speed.

(Configuration 3)
In the film sticking apparatus of the present embodiment, the second tension adjusting unit applies tension to the separator by the weight of a driven roller that can move in the vertical direction. Since the tension is applied to the optical film by the weight of the driven roller, the optical film can be supplied to the film sticking portion with a certain tension.

(Configuration 4)
Further, in the film sticking apparatus of the present embodiment, the film sticking apparatus includes a cutting device that cuts the base film, and the first tension adjusting unit includes the optical film supply device and the cutting device. A tension is applied to the optical film conveyed between the two. Since the optical film can be fed into the cutting device with a constant tension, the accuracy of the optical film cutting interval can be increased.

(Configuration 5)
Further, in the film sticking device of the present embodiment, the cutting device cuts one sheet of the base film pasted on the substrate, and the first tension adjusting unit is pasted on the substrate. The optical film corresponding to the base film for the number of sheets is held. Since the tension during feeding of one optical film can be kept constant, the base film can be adhered to the substrate with high accuracy.

  According to the film sticking apparatus of the present embodiment, it is possible to apply an appropriate tension to the film to be stuck on the substrate, and it is possible to attach the film to the substrate with high accuracy.

It is a whole side view of the film sticking apparatus 100 which concerns on this Embodiment. 1 is an overall plan view of a film sticking apparatus 100 according to the present embodiment. It is a front view of the film supply apparatus 3 holding the optical film which concerns on this Embodiment. It is a side view in the board | substrate receiving position of the board | substrate conveyance apparatus 1 which concerns on this Embodiment. It is a top view of the board | substrate conveyance apparatus 1 which concerns on this Embodiment. It is a side view in the film sticking position of the board | substrate conveying apparatus 1 which concerns on this Embodiment. It is a side view of the board | substrate support apparatus which concerns on this Embodiment. It is a side surface enlarged view of the board | substrate support apparatus which concerns on this Embodiment. It is a plane enlarged view of the substrate support device concerning this embodiment. It is an enlarged side view of the film sticking part of the film sticking apparatus which concerns on this Embodiment. It is a figure which shows the structure of the optical film F which concerns on this Embodiment.

  The film sticking apparatus 100 according to the present embodiment will be described below with reference to the accompanying drawings. FIG. 1 is an overall side view of a film sticking apparatus 100 according to the present embodiment. FIG. 2 is an overall plan view of the film sticking apparatus 100 according to the present embodiment. In FIG. 2, only a part of the structure of the film sticking apparatus 100 is shown.

{1. Overall configuration of film sticking apparatus}
As shown in the figure, an xyz axis is defined in a space where the film sticking apparatus 100 is installed. The x-axis and y-axis extend in the plane direction. The x axis and the y axis intersect perpendicularly. The z axis extends in the vertical direction.

  The film sticking apparatus 100 includes a rail 102 on a base 101. The film sticking apparatus 100 includes the apparatus main body 2 on a base 101. As shown in FIGS. 1 and 2, the substrate transfer device 1 is placed on the rail 102. The substrate transfer apparatus 1 can reciprocate on the rail 102 in the x-axis direction. The operation of the substrate transfer apparatus 1 is controlled by a control unit 20 provided in the apparatus main body 2. The substrate transfer apparatus 1 can reciprocate in the x-axis direction by a motor 1021 provided on the rail 102. The motor 1021 is controlled by the control unit 20.

  In FIG. 1 and FIG. 2, the substrate transfer apparatus 1 indicated by a two-dot chain line shows a state in which the substrate transfer apparatus 1 is at the receiving position A for the substrate P. In FIG. 1 and FIG. 2, the board | substrate conveyance apparatus 1 shown with the continuous line has shown the state which the board | substrate conveyance apparatus 1 has moved to the sticking position B of a film.

  In the substrate transfer apparatus 1, the position correction unit 11 is placed on the top of the carriage 111. A case 12 is placed on top of the position correction unit 11. The case 12 is open at the top, and houses the substrate support device 13 therein. A detailed description of the substrate transfer apparatus 1 will be described later.

  A film supply device 3 is disposed above the apparatus main body 2. As shown in FIGS. 1 and 2, the film supply device 3 includes an optical film roll 30 that is a raw fabric formed by winding an optical film F. The optical film roll 30 is wound around the feed shaft 312. The feeding shaft 312 is supported by the support portion 31. The support portion 31 has a motor 311 (see FIG. 3). By driving the motor 311, the feeding shaft 312 is driven, and the optical film F wound around the optical film roll 30 is moved downstream. Can be sent out.

  FIG. 3 is a front view of the fill supply device 3. As shown in the figure, a support portion 31 is provided on one side of the optical film roll 30. The support portion 31 extends upward (z-axis direction) from the apparatus main body 2. The feeding shaft 312 is supported substantially horizontally in the y-axis direction by the support portion 31. The support unit 31 includes a motor 311. The motor 311 and the feed shaft 312 are connected by a belt 313. The motor 311 is controlled by the control unit 20 of the apparatus main body 2. The rotational force of the motor 311 driven by the control of the control unit 20 is transmitted to the feeding shaft 312 via the belt 313. Thereby, the feeding shaft 312 can be rotated to feed the optical film F from the optical film roll 30.

  In the present embodiment, the optical film F is a film having a three-layer structure. As shown in FIG. 11, the protective film F2 is stuck on one surface of the base film F1. A separator F3 is attached to the other surface of the base film F1. The contact surface with the separator F3 of the base film F1 is an adhesive surface to which an adhesive is applied. After separating the separator F3 from the optical film F, the base film F1 is attached to the substrate P of the liquid crystal display panel or the organic EL panel together with the protective film F2.

  Refer to FIG. 1 again. A tension adjusting unit 35 is provided on the downstream side of the film supply device 3. The tension adjusting unit 35 includes fixed driven rollers 32, 32, 32. The fixed driven rollers 32, 32, 32 have fixed shaft positions. The fixed driven rollers 32, 32, 32 can be rotated by the conveyed optical film F.

  The tension adjustment unit 35 also includes moving driven rollers 33 and 33. The movable driven rollers 33 and 33 are connected by a connecting plate 331. The movement driven rollers 33 and 33 are configured such that the axis position is movable in the vertical direction (z-axis direction). The movable driven rollers 33 and 33 can be rotated by the conveyed optical film F. In FIG. 1, the position of the moving driven rollers 33 and 33 indicated by the solid line is the lowest point of the moving driven rollers 33 and 33. In FIG. 1, the positions of the movable driven rollers 33 and 33 indicated by broken lines are the highest points of the movable driven rollers 33 and 33. The two moving driven rollers 33 and 33 are integrally formed by being connected by a connecting plate 331. That is, the two moving driven rollers 33 and 33 can move integrally between the lowest point position and the highest point position. The two moving driven rollers 33 and 33 can apply tension to the optical film F by their weight. The two movable driven rollers 33 and 33 can always apply a constant tension to the optical film F between the lowest point position and the highest point position. Thus, in the film sticking apparatus 100 of this Embodiment, the tension adjustment part 35 gives tension to the optical film F in the film sticking part 6 with the weight of the driven rollers 33 and 33 which can move to an up-down direction. Since tension is applied by the weight of the two driven rollers 33, 33, the optical film F can be fed into the film sticking unit 6 while applying a certain tension.

  A half-cut device 4 is provided on the downstream side of the tension adjusting unit 35. The half-cut device 4 includes two driven rollers 42 and 42. A cutter device 41 is provided between the two driven rollers 42 and 42.

  The cutter apparatus 41 cut | disconnects only the base film F1 and the protective film F2 among the optical films F of 3 layer structure. That is, the cutter device 41 cuts the base film F1 and the protective film F2 without cutting the separator F3. The cutter device 41 cuts the base film F1 and the protective film F2 at regular intervals according to the length of the substrate P such as a liquid crystal display panel or an organic EL panel.

  On the downstream side of the half-cut device 4, a film sticking unit 6 is disposed. The film sticking unit 6 includes a plurality of driven rollers 62, 62..., A backup roller 621 and a sticking roller 625. Further, the backup roller 122 and the support roller 123 included in the substrate transport apparatus 1 also function as components of the film sticking unit 6. The detailed configuration of the film sticking unit 6 will be described later.

  In the film sticking part 6, the separator F3 is peeled from the optical film F. In the film sticking part 6, the base film F1 and the protective film F2 are stuck on the board | substrate P by peeling the separator F3. As described above, the base film F1 and the protective film F2 are cut according to the length of the substrate P. Thereby, one base film F1 is affixed with the protective film F2 with respect to the one board | substrate P conveyed by the board | substrate conveyance apparatus 1. FIG.

  A tension adjusting unit 55 is provided on the downstream side of the film pasting unit 6. A separator take-up device 5 is disposed downstream of the tension adjusting unit 55. The separator winding device 5 includes a separator winding roll 50.

  The tension adjusting unit 55 includes fixed driven rollers 52, 52, 52. The fixed driven rollers 52, 52, 52 have fixed shaft positions. The fixed driven rollers 52, 52, 52 can be rotated by the conveyed separator F3.

  The tension adjustment unit 55 also includes moving driven rollers 53 and 53. The movable driven rollers 53 and 53 are connected by a connecting plate 531. The movable driven rollers 53, 53 are movable in the vertical direction (z-axis direction). The movable driven rollers 53, 53,... Can be rotated by the conveyed separator F3. In FIG. 1, the position of the movable driven rollers 53, 53 indicated by the solid line is the lowest point of the movable driven rollers 53, 53. In FIG. 1, the position of the movable driven rollers 53, 53 indicated by a broken line is the highest point of the movable driven rollers 53, 53. The two moving driven rollers 53 and 53 are integrally formed by being connected by a connecting plate 531. That is, the two moving driven rollers 53 and 53 can move integrally between the lowest point position and the highest point position. The two movable driven rollers 53 and 53 can apply tension to the separator F3 by its weight. The two movable driven rollers 53 and 53 can always apply a constant tension to the separator F3 between the lowest point position and the highest point position. The two movable driven rollers 53 and 53 can apply tension to the optical film F in the film attaching unit 6 by applying tension to the separator F3.

  Thus, in the film sticking apparatus 100 of this Embodiment, the tension adjustment part 55 gives tension to the optical film F in the film sticking part 6 with the weight of the driven rollers 53 and 53 which can move to an up-down direction. Since tension is applied by the weight of the two driven rollers 53, 53, the optical film F can be fed into the film sticking section 6 with a constant tension. In particular, in the present embodiment, since tension is applied to the optical film F by the tension adjusting unit 35 on the upstream side of the film attaching unit 6 and the tension adjusting unit 55 on the downstream side of the film attaching unit 6, the optical film F is stabilized. The film can be fed into the film pasting portion 6 by tension.

  The separator take-up roll 50 is formed by winding the separator F3. The separator take-up roll 50 is wound around a separator take-up shaft 501. The separator take-up shaft 501 is a drive shaft. The separator winding shaft 501 is driven under the control of the control unit 20 and winds the separator F3 around the separator winding shaft 501.

{2. Configuration of Substrate Transfer Device 1}
Next, the configuration of the substrate transfer apparatus 1 will be described in detail with reference to FIGS. FIG. 4 is a side view of the substrate transfer apparatus 1. FIG. 4 is a diagram showing a state in which the substrate transport apparatus 1 is moved to the receiving position A for the substrate P. As shown in the figure, the substrate transfer apparatus 1 includes a carriage 111 at the bottom. The position correction unit 11 is placed on the top of the carriage 111. A case 12 is placed on top of the position correction unit 11. A substrate support device 13 is accommodated in the case 12.

  The position correction unit 11 can move the table provided in the position correction unit 11 in the x-axis direction with respect to the carriage 111. The position correction unit 11 can move a table provided in the position correction unit 11 in the y-axis direction with respect to the carriage 111. The position correction unit 11 can rotate the table provided in the position correction unit 11 in a horizontal plane with respect to the carriage 111. The position correction unit 11 is controlled by the control unit 20. By controlling the position correction unit 11 by the control unit 20, the position correction unit 11 can move the table provided in the position correction unit 11 in the x-axis direction or the y-axis direction with respect to the carriage 111, and the table is moved to the carriage. 111 can be rotated. A case 12 is placed on a table provided in the position correction unit 11. As a result, the case 12 and the substrate support device 13 can also move in the x-axis direction or the y-axis direction and can rotate in the horizontal plane.

  A substrate P of a liquid crystal display panel or an organic EL panel is placed on the substrate support device 13. By moving the substrate support device 13 in the x-axis direction under the control of the position correction unit 11, the position of the substrate P placed on the substrate support device 13 can be adjusted in the x-axis direction. By moving the substrate support device 13 in the y-axis direction under the control of the position correction unit 11, the position of the substrate P placed on the substrate support device 13 can be adjusted in the y-axis direction. Further, by rotating the substrate support device 13 in the horizontal plane under the control of the position correction unit 11, the position of the substrate P placed on the substrate support device 13 can be adjusted by rotating in the horizontal plane.

  The carriage 111 is also provided with a roller support 125. A backup roller 122 and a support roller 123 are provided at the upper end of the roller support portion 125. The support roller 123 can be rotationally driven by a motor 1251 provided in the roller support portion 125. The motor 1251 that drives the support roller 123 is controlled by the control unit 20. The lower end of the support roller 123 is in contact with the upper end of the backup roller 122. As a result, the backup roller 122 rotates as the support roller 123 rotates.

  Further, the backup roller 122 and the support roller 123 can move in the vertical direction (z-axis direction) together. A lift motor 1252 is provided in the roller support portion 125. By driving the motor 1252, the backup roller 122 and the support roller 123 can be moved in the vertical direction (z-axis direction). The motor 1252 is controlled by the control unit 20.

  When the substrate transport apparatus 1 is moved to the receiving position A for the substrate P shown in FIG. 1, the backup roller 122 and the support roller 123 are moved to the lower standby position C. FIG. 4 shows a state in which the backup roller 122 and the support roller 123 are moved to the standby position C.

  The substrate support device 13 includes a plurality of support columns 131, 131... And a support portion 132 provided on the upper portion of each support column 131. The support part 132 houses the sphere 133. The spherical body 133 is rotatable with respect to the support portion 132 and exposed at the upper portion of the support portion 132. The substrate transport apparatus 1 can support the substrate P by placing the substrate P on the upper surfaces of the spheres 133, 133.

  FIG. 5 is a plan view of the substrate transfer apparatus 1. As shown in the figure, in the present embodiment, a total of 32 support portions 132 of 8 × 4 are provided. That is, 32 support portions 132, 132,... Are provided on the upper portions of the 32 support columns 131, 131,... 32 spheres 133 are formed in the 32 support portions 132, 132,. , 133... Are supported. However, the number of the support portions 132 is an example, and can be appropriately changed according to conditions such as the size and material of the substrate P to be placed.

  Refer to FIG. 4 again. The substrate support device 13 is movable in the vertical direction (z-axis direction) with respect to the case 12 by a servo 1250 housed in the case 12. The servo 1250 is controlled by the control unit 20. FIG. 4 shows a state in which the substrate support device 13 is lifted and moved to the receiving position E of the substrate P. That is, in a state where the substrate transport apparatus 1 is at the receiving position A, the substrate support apparatus 13 is controlled to move to the receiving position E (arrow E in FIG. 4).

  FIG. 6 is a side view of the substrate transfer apparatus 1. FIG. 6 is a diagram illustrating a state in which the substrate transport apparatus 1 is moved to the attachment position B of the optical film F. As shown in FIG. 1, in the state where the substrate transport apparatus 1 is moved to the pasting position B, the substrate transport apparatus 1 is moved to the vicinity of the film sticking unit 6.

  As shown in FIG. 6, when the substrate transport apparatus 1 is moved to the attaching position B, the backup roller 122 and the support roller 123 are raised and moved to the attaching position D. The support roller 123 rises to a position in the vicinity of the application roller 625, and the substrate P is sandwiched from above and below by the support roller 123 and the application roller 625. As described above, in the attaching position B, the supporting roller 123 that supports the substrate P placed on the support portion 132 is provided, and in the attaching position B, synchronized with the process of attaching the base film F1 to the substrate P. The support roller 123 can be driven to attach the base film F1 to the substrate P. Since the board | substrate conveyance apparatus 1 which has mounted the board | substrate P is equipped with the support roller 123, the base film F1 can be affixed accurately according to the position of the board | substrate P. FIG. Moreover, since the raising / lowering means which raises the support roller 123 is provided, the support roller 123 can be contacted from the downward direction with respect to the board | substrate P, and the base film F1 can be stuck to the board | substrate P with sufficient precision.

  As shown in FIG. 6, when the substrate transfer apparatus 1 is moved to the attaching position B, the substrate support apparatus 13 is lowered and moved to the transfer position F. As described above, the substrate support device 13 rises when the substrate transfer device 1 is located at the receiving position A, and moves to the receiving position E shown in FIG. At the receiving position A, the substrate P is placed on the substrate support device 13. In other words, the substrate P is placed on the upper surfaces of the plurality of spheres 133, 133. When the substrate transport device 1 is placed on the substrate support device 13 at the receiving position A, the substrate support device 13 is lowered at the receiving position A and moves to the transport position F. After the substrate support device 13 is lowered to the transfer position F, the substrate transfer device 1 moves from the receiving position A to the attaching position B. As described above, when the substrate P is received at the receiving position A, the substrate P can be received smoothly because the elevating means for raising the plurality of support pillars 131 and the plurality of spheres 133 (curved surfaces) is provided.

{3. Configuration of Substrate Support Device 13}
Next, the configuration of the substrate support apparatus 13 will be described with reference to FIGS. FIG. 7 is an enlarged view of the side surface of the substrate support device 13 shown in FIG. 4 or FIG. As shown in the figure, the substrate support device 13 includes a lower plate 130. .. Are provided at equal intervals on the upper surface of the lower plate 130. As shown in FIG. 5, the support columns 131, 131... Are arranged at equal intervals in the x-axis direction and the y-axis direction.

  A support portion 132 is provided at the upper end of each support column 131. The support pillar 131 and the support portion 132 are resin members in the present embodiment. The support pillar 131 and the support portion 132 may be made of a metal member.

  FIG. 8 is an enlarged view of the support portion 132. The support portion 132 is provided with an insertion hole 1331, and a spherical body 133 is provided inside the insertion hole 1331. The sphere 133 is freely rotatable within the insertion hole 1331. In the present embodiment, the sphere 133 is a resinous member. FIG. 9 is an enlarged plan view of the support portion 132. As shown in the figure, the central portion of the sphere 133 is exposed outward in plan view. The side wall of the support part 132 covers the upper part of the outer periphery of the sphere 133 in plan view. Thereby, the vertical movement of the sphere 133 is restricted.

  The sphere 133 corresponds to the curved surface portion in the present invention. That is, the substrate P is supported by a plurality of curved surface portions convex upward. Since the substrate P is supported by the plurality of curved portions convex upward, the substrate can be transported regardless of whether the substrate P is a hard glass substrate or a flexible substrate. it can. Further, since the curved surface portion is a spherical surface, it can be supported without damaging the substrate. In addition, the substrate can be smoothly transported in the substrate receiving process and the sending process. Furthermore, since the curved surface portion is a rotatable sphere, it can be supported without scratching the substrate. In addition, the substrate can be smoothly transported in the substrate receiving process and the sending process.

{4. Film sticking process}
The process of sticking a film to the substrate P by the film sticking apparatus 100 having the above configuration will be described. Please refer to FIG. The substrate transport apparatus 1 first moves to the receiving position A for the substrate P. When the substrate P is moved to the receiving position A, the substrate supporting device 13 of the substrate transport apparatus 1 is raised and moved to the receiving position E (see FIG. 4).

  Here, the substrate P is placed on top of the substrate support device 13 by a substrate P transport device (not shown). The transport device for the substrate P is, for example, a fork-type device. The substrate P is placed on the top of the fork, and the fork enters between the support columns 131, 131. Then, after placing the substrate P on the support portion 132, the fork is retracted to complete the delivery of the substrate P. Or the conveyance apparatus of the board | substrate P may be a suction type. A method of transferring the substrate P by releasing the suction force after adsorbing the end portion of the upper surface of the substrate P and placing the substrate P on the support portion 132 may be used. Or the conveyance apparatus of the board | substrate P may be a chuck type. A configuration in which the substrate P is sandwiched by the chuck type transporting device and the substrate P is placed on the support portion 132 may be adopted.

  In parallel with the delivery operation of the substrate P to the substrate transport apparatus 1, the optical film F is fed out from the optical film supply apparatus 3 in the film supply apparatus 3. Specifically, when the motor 311 is driven, the feeding shaft 312 is driven and the optical film F is fed. The fed optical film F is sent to the tension adjusting unit 35.

  The optical film F sent from the optical film F to the tension adjusting unit 35 pushes down the movable driven rollers 33 and 33 downward. When one optical film F to be attached to the substrate P is unwound from the optical film roll 30, the tension adjusting unit 35 holds one optical film F to be attached to the substrate P. That is, the optical film F fed out from the optical film roll 30 is not sent downstream from the tension adjusting unit 35 and is held in the tension adjusting unit 35.

  After the optical film F for one sheet to be attached to the substrate P is unwound from the optical film roll 30, the optical film F for one sheet held in the tension adjusting unit 35 by the next attaching process is 35 to the downstream side. The optical film F sent to the downstream side of the tension adjusting unit 35 is sent to the half-cut device 4. The optical film F sent to the half-cut device 4 is cut into the base film F1 and the protective film F2 by the cutter device 41. Thereby, the base film F1 and the protective film F2 for one sheet affixed on the board | substrate P are cut | disconnected. Moreover, the optical film F arrange | positioned downstream from the half-cut apparatus 4 is sent into the film sticking part 6 in a sticking process.

  As described above, the tension adjusting unit 35 applies tension to the optical film F transported between the optical film supply device 3 and the half-cut device 4. Since the optical film F can be fed into the half-cut device 4 with a constant tension, the accuracy of the cutting interval of the optical film F can be increased.

  Further, the tension adjusting unit 35 holds the optical film F corresponding to the single base film F1 attached to the substrate. Since the tension during the delivery of one optical film F can be kept constant, the base film F1 can be adhered to the substrate P with high accuracy.

  Next, the substrate transfer apparatus 1 on which the substrate P is placed moves on the rail 102 in the x-axis direction and arrives at the attachment position B. When the substrate transport apparatus 1 is moving on the rail 102, the camera C1 shown in FIGS. 1 and 2 captures an image placed on the substrate support apparatus 13, and the captured image is transferred to the control unit 20. send. The control unit 20 analyzes the position of the substrate P from the acquired image and controls the position correction unit 11. Thereby, the x-axis coordinate, the y-axis coordinate, and the rotation angle of the substrate support device 13 are adjusted. After the position adjustment of the substrate P is performed in this way, the substrate transport apparatus 1 arrives at the attaching position B.

  When the substrate transport apparatus 1 arrives at the attaching position B, the attaching process is started. In the sticking step, as shown in FIG. 6, the backup roller 122 and the support roller 123 rise and move to the sticking position D. As a result, the substrate P is sandwiched between the support roller 123 and the sticking roller 625.

  When the substrate transfer device 1 moves to the affixing position B and the backup roller 122 and the support roller 123 move to the affixing position D, the support roller 123 and the plurality of drive rollers 71 and 71 of the conveyor 7 start to drive in synchronization. To do. When the support roller 123 and the drive rollers 71 and 71 start driving synchronously, the operation of attaching the base film F1 to the substrate P is started. In the initial step, the moving roller 57 is used to feed the front end portion of the optical film F to the application position of the film application unit 6 (that is, between the application roller 625 and the support roller 123). That is, the movement drive roller 57 shown in FIG. 1 moves downward and sandwiches the separator F3 with the fixed driven roller 52 (52a). And the movement drive roller 57 is driven by control of the control part 20, and the front-end | tip part of the optical film F is advanced to the sticking position of the film sticking part 6 by sending the separator F3 downstream (separator winding device 5 side). . After the initial process is completed, the moving roller 57 returns to the original upper position.

  The controller 20 drives the driving rollers 71, 71... In synchronization with the driving of the support roller 123. FIG. 10 is an enlarged view of the film sticking portion 6. When the support roller 123 and the drive rollers 71, 71... Are driven, one sheet of the optical film F located on the downstream side of the half-cut device 4 is fed into the film application unit 6. The optical film F sent to the film sticking part 6 is guided by the peeling edge 63 and sent to the tip of the peeling edge 63.

  As for the optical film F sent to the front-end | tip of the peeling edge 63, the separator F3 is peeled. The separated separator F3 is sent to the tension adjusting unit 55 side. The tension adjusting unit 55 holds a separator F3 corresponding to the length of one base film F1. That is, the separator F3 corresponding to the length of one peeled sheet is not sent downstream from the tension adjusting unit 55 and is held in the tension adjusting unit 55. In this way, a constant tension is applied by the tension adjusting unit 55 during the pasting operation for the base film F1 for one sheet. The optical film F from which the separator F3 has been peeled, that is, the base film F1 and the protective film F2 are attached to the substrate P. Specifically, the surface of the base film F1 to which the separator F3 has been attached is an adhesive surface, and the adhesive surface of the base film F1 is attached to the substrate P.

  Thus, in the film sticking apparatus 100 according to the present embodiment, the first tension adjusting unit 35 on the upstream side of the film sticking unit 6 and the second tension adjusting unit 55 on the downstream side of the film sticking unit 6 The base film F1 can be attached to the substrate P while applying tension to the optical film F. Thereby, base film F1 can be stuck, sending out optical film F with fixed tension.

  The board | substrate P with which the base film F1 and the protective film F2 were affixed is sent to the conveyor 7 side. The conveyor 7 includes a plurality of drive rollers 71, 71. The plurality of drive rollers 71 convey the substrate P to the downstream side by being rotationally driven. Thereby, the one base film F1 and the protective film F2 are affixed on the board | substrate P. FIG. The substrate P1 to which the base film F1 and the protective film F2 are attached is conveyed in the direction of arrow M in FIG.

  As described above, one base film F1 is attached to the substrate P, and the separator F3 corresponding to the length of one base film F1 is held in the tension adjusting unit 55. In the next step, the separator take-up shaft 501 is driven, and the separator F 3 corresponding to the length of one sheet held in the tension adjusting unit 55 is taken up on the separator take-up roll 50. When the winding process of the separator F3 with respect to the separator winding roll 50 is completed, the process returns to the first process again. The substrate transfer apparatus 1 moves again to the receiving position A in FIG. Further, the optical film F for one sheet is sent from the optical film supply device 3 to the tension adjusting unit 35, and the film sticking process for the next substrate P is started.

  Although the embodiments have been described above, the present disclosure is not limited to the above-described embodiments, and various modifications can be made without departing from the gist thereof.

DESCRIPTION OF SYMBOLS 1 Substrate conveyance apparatus 2 Apparatus main body 3 Film supply apparatus 4 Cut apparatus 5 Separator take-up apparatus 6 Pasting part 13 Substrate support apparatus 30 Optical film roll (original fabric)
DESCRIPTION OF SYMBOLS 50 Separator winding roll 100 Film sticking apparatus 131 Support pillar 132 Support part 133 Sphere

Claims (5)

A film sticking device for sticking a base film to a substrate,
An optical film supply device for supporting an optical film including the base film and a separator;
A first tension adjusting unit that applies tension to the optical film supplied from the optical film supply device;
A film sticking unit for peeling the separator from the optical film supplied from the optical film supply device and attaching the base film to the substrate;
A second tension adjusting unit for applying tension to the separator peeled off at the film attaching unit;
A separator winder that winds and holds the separator peeled off at the film application part;
A film sticking apparatus comprising: The film sticking device according to claim 1,
The first tension adjusting unit is a film sticking device that applies tension to the optical film by the weight of a driven roller movable in the vertical direction. The film sticking device according to claim 1 or 2,
The second tension adjusting unit is a film sticking device that applies tension to the separator by the weight of a driven roller movable in the vertical direction. The film sticking device according to claim 2,
The film sticking device is a cutting device for cutting into the base film,
With
The first tension adjusting unit is a film sticking device that applies tension to the optical film conveyed between the optical film supply device and the cutting device. The film sticking device according to claim 4,
The cutting device cuts the one piece of the base film attached to the substrate, and the first tension adjusting unit corresponds to the one piece of the base film attached to the substrate. Film sticking device that holds the film.

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