TW201725117A - Release film for ceramic green sheet production process - Google Patents

Release film for ceramic green sheet production process Download PDF

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Publication number
TW201725117A
TW201725117A TW105140204A TW105140204A TW201725117A TW 201725117 A TW201725117 A TW 201725117A TW 105140204 A TW105140204 A TW 105140204A TW 105140204 A TW105140204 A TW 105140204A TW 201725117 A TW201725117 A TW 201725117A
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release agent
release
ceramic green
green sheet
film
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TW105140204A
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TWI701138B (en
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Keiichi Sato
Tomomi Fukaya
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Lintec Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00Producing shaped prefabricated articles from the material
    • B28B1/30Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/30Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
    • B32B27/308Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising acrylic (co)polymers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/36Layered products comprising a layer of synthetic resin comprising polyesters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G13/00Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00

Abstract

A release film 1A for a ceramic green sheet production process equipped with a base material 11 and a release agent layer 12 provided on one side of the base material 11, wherein the release agent layer 12 is obtained by curing a release agent composition containing a melamine resin and a polyorganosiloxane, and the release film 1A for a ceramic green sheet production process has a coating elastic modulus of 3.5-7.0 GPa, measured from the surface of the release agent layer 12 opposite the base material 11 by a nanoindentation test. The migration of the polyorganosiloxane from the release agent layer to the ceramic green sheet is suppressed by the release film 1A for a ceramic green sheet production process.

Description

陶瓷生片製造工程用剝離膜 Release film for ceramic green sheet manufacturing engineering

本發明係有關於一種在製造陶瓷生片之工程所使用之剝離膜。 The present invention relates to a release film used in the manufacture of ceramic green sheets.

先前,為了製造積層陶瓷電容器、多層陶瓷基板等之積層陶瓷製品,係進行成形陶瓷生片,而且將複數片所得到的陶瓷生片層積而煅燒。 Conventionally, in order to produce a laminated ceramic product such as a multilayer ceramic capacitor or a multilayer ceramic substrate, a ceramic green sheet is formed, and a plurality of ceramic green sheets obtained by lamination are laminated and fired.

陶瓷生片,係藉由將含有鈦酸鋇、氧化鈦等的陶瓷材料之陶瓷漿料塗佈在剝離膜上來成形。剝離膜,係被要求在該剝離膜上所成形之較薄的陶瓷生片不會從該剝離膜產生變形、斷裂等,而且能夠藉由適當的剝離力而剝離之剝離性。又,在塗佈陶瓷漿料且使其乾燥時,為了使在陶瓷生片不產生針孔、厚度不均等的缺陷,剝離膜係被要求塗佈陶瓷漿料之面(與陶瓷漿料.陶瓷生片接觸之面;以下有稱為「剝離面」之情形)之平滑性。 The ceramic green sheet is formed by applying a ceramic slurry containing a ceramic material such as barium titanate or titanium oxide to a release film. The release film is required to be such that the thin ceramic green sheet formed on the release film does not undergo deformation, breakage, or the like from the release film, and can be peeled off by an appropriate peeling force. Further, when the ceramic slurry is applied and dried, in order to prevent defects such as pinholes and thickness unevenness in the ceramic green sheets, the release film is required to be coated with the surface of the ceramic slurry (with ceramic slurry, ceramics). The smoothness of the surface of the green sheet; the following is the case of the "peeling surface".

專利文獻1及2,係揭示此種剝離膜的例子。專利文獻1所揭示之剝離膜,係將由紫外線硬化型樹脂所構成之層設置在基材上,在其上設置有機聚矽氧烷進行加成反應而形成之聚矽氧樹脂層作為剝離劑層。專利文獻2所揭示之剝離膜,係將含有(甲基)丙烯酸酯成分、及被(甲基)丙烯醯基及/或乙烯 基改性後的改性聚矽氧油之塗佈液塗佈在基材上,使該塗膜硬化而製造,藉此,將含有(甲基)丙烯酸酯成分的硬化物之層形成在基材上,而且將含有聚矽氧聚合物成分之層形成在其上作為剝離劑層。 Patent Documents 1 and 2 disclose examples of such a release film. The release film disclosed in Patent Document 1 is a layer obtained by disposing a layer composed of an ultraviolet curable resin on a substrate, and a polyoxyxylene resin layer formed by adding an organopolysiloxane to the release agent layer. . The release film disclosed in Patent Document 2 contains a (meth) acrylate component and is (meth) acrylonitrile and/or ethylene. The coating liquid of the modified polyxanthene oil after the base modification is applied onto a substrate to cure the coating film, whereby a layer of a cured product containing a (meth) acrylate component is formed on the base. On the material, a layer containing a polyoxymethylene polymer component is formed thereon as a release agent layer.

先前技術文獻 Prior technical literature 專利文獻 Patent literature

[專利文獻1]日本特許第5675246號 [Patent Document 1] Japanese Patent No. 5675246

[專利文獻2]日本特許第5423975號 [Patent Document 2] Japanese Patent No. 5423975

剝離劑組成物中的聚矽氧成分,係有容易轉移至陶瓷生片之與剝離劑層接觸的面之情形。聚矽氧轉移後的面係產生滑性,致使接著性低落。使用此種聚矽氧成分容易轉移的剝離片來製造陶瓷生片,進而使用該陶瓷生片而製造積層陶瓷製品時,在對層積後的陶瓷生片彼此施加壓力時,在積層陶瓷製品的層間有產生面方向的偏移之情形。產生此種偏移時,在所得到的積層陶瓷製品,電極等的位置精確度為低落,且無法得到積層陶瓷製品的製品性能。因此,被要求聚矽氧成分轉移至陶瓷生片較少的剝離膜。 The polyfluorene oxide component in the release agent composition is in a state where it is easily transferred to the surface of the ceramic green sheet which is in contact with the release agent layer. The surface layer after the polyoxygen transfer has slipperiness, resulting in a decrease in adhesion. When a ceramic green sheet is produced by using such a peeling sheet in which the polyoxygenated component is easily transferred, and when the ceramic green sheet is used to produce a laminated ceramic product, when the laminated ceramic green sheets are pressed against each other, the laminated ceramic product is laminated. There is a case where there is a shift in the plane direction between the layers. When such an offset occurs, the positional accuracy of the electrode or the like in the obtained laminated ceramic article is lowered, and the product properties of the laminated ceramic article cannot be obtained. Therefore, it is required to transfer the polyoxygen component to a release film having less ceramic green sheets.

但是,專利文獻1及2所記載之剝離膜,係無法充分地抑制聚矽氧成分的轉移。 However, in the release film described in Patent Documents 1 and 2, the transfer of the polyfluorene oxygen component cannot be sufficiently suppressed.

本發明係鑒於此種實際情況進行,其目的係提供一種能夠抑制聚有機矽氧烷從剝離劑層往陶瓷生片遷移之陶 瓷生片製造工程用剝離膜。 The present invention has been made in view of such actual circumstances, and an object thereof is to provide a pottery capable of suppressing migration of a polyorganosiloxane from a release agent layer to a ceramic green sheet. A peeling film for the production of porcelain green sheets.

為了達成上述目的,本發明第1係提供一種陶瓷生片製造工程用剝離膜,其係具備基材、及設置在前述基材的一側之剝離劑層之陶瓷生片製造工程用剝離膜,其特徵在於:前述剝離劑層係將含有三聚氰胺樹脂及聚有機矽氧烷之剝離劑組成物硬化而成者,藉由奈米壓痕(nanoindentation)試驗,在從前述剝離劑層之與前述基材為相反側的面所測定之被膜彈性模數為3.5~7.0GPa(發明1)。 In order to achieve the above object, a first aspect of the present invention provides a release film for a ceramic green sheet manufacturing process, which comprises a base material and a release film for a ceramic green sheet manufacturing process provided on a release agent layer on one side of the base material. The release agent layer is obtained by curing a release agent composition containing a melamine resin and a polyorganosiloxane, and is subjected to a nanoindentation test on the substrate from the release agent layer. The film elastic modulus measured for the opposite side surface was 3.5 to 7.0 GPa (Invention 1).

上述發明(發明1),藉由剝離劑層係由含有聚有機矽氧烷之剝離劑組成物所形成,表面自由能量為適度地較低,且將剝離膜從陶瓷生片剝離時的剝離性優異。又,在剝離劑層,藉由三聚氰胺樹脂為充分地硬化,而使被膜彈性模數成為上述範圍,被關入該網孔狀結構中之聚有機矽氧烷係被堅固地束縛,而能夠抑制聚有機矽氧烷從剝離劑層遷移至陶瓷生片。 According to the invention (Invention 1), the release agent layer is formed of a release agent composition containing a polyorganosiloxane, the surface free energy is moderately low, and the release film is peeled off from the ceramic green sheet. Excellent. In addition, when the release agent layer is sufficiently cured by the melamine resin, the film elastic modulus is in the above range, and the polyorganosiloxane which is held in the mesh structure is firmly bound, and can be suppressed. The polyorganosiloxane is migrated from the release agent layer to the ceramic green sheet.

又,通常所謂「三聚氰胺樹脂」,係意味著含有複數種三聚氰胺化合物及/或該三聚氰胺化合物縮合而產生的多核體之混合物。在本說明書,所謂「三聚氰胺樹脂」之用語,係意味著上述混合物或1種三聚氰胺化合物之聚集物。而且,在本說明書,係將該三聚氰胺樹脂硬化而成者稱為「三聚氰胺硬化物」。 Further, the term "melamine resin" as used herein means a mixture of a plurality of melamine compounds and/or a mixture of polynuclear bodies produced by condensation of the melamine compound. In the present specification, the term "melamine resin" means the above mixture or an aggregate of one melamine compound. Further, in the present specification, the melamine resin is cured and referred to as "melamine cured product".

在上述發明(發明1),前述聚有機矽氧烷的質量平均分子量係以500~20000為佳(發明2)。 In the above invention (Invention 1), the mass average molecular weight of the polyorganosiloxane is preferably from 500 to 20,000 (Invention 2).

在上述發明(發明1、2),相對於三聚氰胺樹脂100 質量份,前述聚有機矽氧烷之在前述剝離劑組成物中的含量,係以0.1~30質量份為佳(發明3)。 In the above invention (Inventions 1, 2), relative to the melamine resin 100 The content of the polyorganosiloxane in the release agent composition is preferably 0.1 to 30 parts by mass (Invention 3).

在上述發明(發明1~3),在前述剝離劑組成物所含有之前述三聚氰胺樹脂,係以含有甲基化三聚氰胺及/或亞胺基羥甲基三聚氰胺為佳(發明4)。 In the above invention (Inventions 1 to 3), it is preferred that the melamine resin contained in the release agent composition contains methylated melamine and/or iminomethylol melamine (Invention 4).

在上述發明(發明1~4),係以在前述基材與前述剝離劑層之間進一步具備樹脂層為佳(發明5)。 In the above invention (Inventions 1 to 4), it is preferable to further provide a resin layer between the substrate and the release agent layer (Invention 5).

在上述發明(發明5),前述樹脂層係以將含有活性能量線硬化性成分或熱硬化性成分之樹脂組成物硬化而成者為佳(發明6)。 In the above invention (Invention 5), it is preferred that the resin layer is cured by a resin composition containing an active energy ray-curable component or a thermosetting component (Invention 6).

在上述發明(發明6),前述活性能量線硬化性成分係以多官能丙烯酸酯為佳(發明7)。 In the above invention (Invention 6), the active energy ray-curable component is preferably a polyfunctional acrylate (Invention 7).

在上述發明(發明1~7),係以進一步具備設置在前述基材之與前述剝離劑層為相反側之第2樹脂層為佳(發明8)。 In the above invention (Inventions 1 to 7), it is preferable to further include the second resin layer provided on the substrate opposite to the release agent layer (Invention 8).

1A、1B、1C‧‧‧陶瓷生片製造工程用剝離膜 1A, 1B, 1C‧‧‧Removal film for ceramic green sheet manufacturing engineering

11‧‧‧基材 11‧‧‧Substrate

12‧‧‧剝離劑層 12‧‧‧ Stripper layer

13‧‧‧樹脂層 13‧‧‧ resin layer

14‧‧‧第2樹脂層 14‧‧‧2nd resin layer

第1圖係本發明之第1實施形態的陶瓷生片製造工程用剝離膜之剖面圖。 Fig. 1 is a cross-sectional view showing a release film for a ceramic green sheet manufacturing process according to a first embodiment of the present invention.

第2圖係本發明之第2實施形態的陶瓷生片製造工程用剝離膜之剖面圖。 Fig. 2 is a cross-sectional view showing a release film for a ceramic green sheet manufacturing process according to a second embodiment of the present invention.

第3圖係本發明之第3實施形態的陶瓷生片製造工程用剝離膜之剖面圖。 Fig. 3 is a cross-sectional view showing a release film for a ceramic green sheet manufacturing process according to a third embodiment of the present invention.

用以實施發明之形態 Form for implementing the invention

以下,說明本發明的實施形態。 Hereinafter, embodiments of the present invention will be described.

[陶瓷生片製造工程用剝離膜] [Release film for ceramic green sheet manufacturing engineering]

如第1圖所顯示,第1實施形態的陶瓷生片製造工程用剝離膜1A(以下有簡稱為「剝離膜1A」之情形),係具備基材11及剝離劑層12而構成。 As shown in Fig. 1, the release film 1A for a ceramic green sheet manufacturing process of the first embodiment (hereinafter referred to simply as "release film 1A") is provided with a substrate 11 and a release agent layer 12.

又,如第2圖所顯示,第2實施形態的陶瓷生片製造工程用剝離膜1B(以下有簡稱為「剝離膜1B」之情形),係具備基材11、層積在基材11的一面(在第2圖為上面)之樹脂層13、及層積在樹脂層13之與基材11為相反側的面之剝離劑層12而構成。 In addition, as shown in Fig. 2, the release film 1B for ceramic green sheet manufacturing engineering of the second embodiment (hereinafter referred to simply as "release film 1B") is provided with a substrate 11 and laminated on the substrate 11. The resin layer 13 on one surface (upper in FIG. 2) and the release agent layer 12 laminated on the surface of the resin layer 13 opposite to the substrate 11 are formed.

而且,如第3圖所顯示,第3實施形態的陶瓷生片製造工程用剝離膜1C(以下有簡稱為「剝離膜1C」之情形),係具備基材11、層積在基材11的一面(在第3圖為上面)之樹脂層13、層積在樹脂層13之與基材11為相反側的面之剝離劑層12、及層積在基材11的另一面(在第3圖為下面)之第2樹脂層14而構成。 In addition, as shown in FIG. 3, the release film 1C for ceramic green sheet manufacturing engineering of the third embodiment (hereinafter referred to as "peeling film 1C") is provided with a substrate 11 and laminated on the substrate 11. The resin layer 13 on one surface (the upper surface in FIG. 3), the release agent layer 12 laminated on the surface of the resin layer 13 opposite to the substrate 11, and the other layer laminated on the substrate 11 (at the third surface) The figure is the second resin layer 14 of the following).

在剝離膜1A、1B、1C,剝離劑層12係由含有三聚氰胺樹脂及聚有機矽氧烷之剝離劑組成物所形成。又,藉由奈米壓痕試驗,從在剝離劑層12之與樹脂層13為相反側的面所測定之被膜彈性模數為3.5~7.0GPa。 In the release films 1A, 1B, and 1C, the release agent layer 12 is formed of a release agent composition containing a melamine resin and a polyorganosiloxane. Further, by the nanoindentation test, the film elastic modulus measured on the surface of the release agent layer 12 opposite to the resin layer 13 was 3.5 to 7.0 GPa.

在剝離膜1A、1B、1C,因為剝離劑層12係使用含有聚有機矽氧烷之剝離劑組成物而形成,所以在剝離劑層12的剝離面之表面自由能量係成為適度較低者。而且,剝離膜1A、1B、1C係具有上述的被膜彈性模數。藉由該等,將剝離 膜1A、1B、1C從在剝離膜1A、1B、1C的剝離面上所成形的陶瓷生片剝離時之剝離力係成為適度較低者,且能夠發揮優異的剝離性。 In the release films 1A, 1B, and 1C, since the release agent layer 12 is formed using a release agent composition containing polyorganosiloxane, the free energy of the surface of the release surface of the release agent layer 12 is suitably low. Further, the release films 1A, 1B, and 1C have the above-described film elastic modulus. With these, it will be stripped When the film 1A, 1B, and 1C are peeled off from the ceramic green sheets formed on the release surfaces of the release films 1A, 1B, and 1C, the peeling force is moderately low, and excellent peelability can be exhibited.

而且,在剝離膜1A、1B、1C,聚有機矽氧烷係被關入藉由三聚氰胺樹脂硬化而形成之網孔狀結構中。在此,藉由三聚氰胺樹脂為充分地硬化而使被膜彈性模數成為上述的範圍,被關入上述網孔狀結構中之聚有機矽氧烷係堅固地被束縛,使得聚有機矽氧烷在硬化後的三聚氰胺樹脂中之自由移動受到限制。因而,將陶瓷生片成形在剝離膜1A、1B、1C的剝離面上時,能夠抑制聚有機矽氧烷從剝離劑層12遷移至陶瓷生片。藉此,將使用剝離膜1A、1B、1C而成形的陶瓷生片層積時,陶瓷生片彼此之接著力提升,在積層陶瓷製品的製造,能夠抑制在陶瓷生片之間、或在電極印刷面和與其接觸之陶瓷生片的面之間之產生偏移。 Further, in the release films 1A, 1B, and 1C, the polyorganosiloxane is incorporated in a mesh-like structure formed by hardening of a melamine resin. Here, the melamine resin is sufficiently hardened to have the film elastic modulus within the above range, and the polyorganosiloxane which is held in the above-mentioned mesh-like structure is firmly bound, so that the polyorganosiloxane is The free movement in the hardened melamine resin is limited. Therefore, when the ceramic green sheets are formed on the release surfaces of the release films 1A, 1B, and 1C, it is possible to suppress migration of the polyorganosiloxane from the release agent layer 12 to the ceramic green sheets. Thereby, when the ceramic green sheets formed by using the release films 1A, 1B, and 1C are laminated, the adhesion between the ceramic green sheets is improved, and in the production of the laminated ceramic products, it is possible to suppress between the ceramic green sheets or at the electrodes. There is a shift between the printed surface and the face of the ceramic green sheet that is in contact therewith.

又,在剝離膜1A、1B、1C,剝離劑層12係由含有三聚氰胺樹脂之剝離劑組成物所形成。因此,相較於只使用聚有機矽氧烷而形成剝離劑層的情況,能夠避免剝離劑層12的表面自由能量變得過低。又,與因氧阻礙引起表層的硬化不充分之活性能量線硬化性樹脂不同,因為三聚氰胺樹脂係藉由熱硬化而進行硬化,所以在剝離劑層12,不僅是全體的被膜彈性模數提升,而且在層內及表層之各自,彈性模數亦充分地提升。藉此,能夠將在剝離劑層12的表層附近所存在的聚有機矽氧烷充分地固定。而且,三聚氰胺樹脂與在後述樹脂層13所含有的樹脂之親和性較高。因此,在設置有樹脂層13之剝 離膜1B、1C,剝離劑層12與樹脂層13之間的密著性優異,而能夠抑制剝離劑層12從樹脂層13產生剝落。 Further, in the release films 1A, 1B, and 1C, the release agent layer 12 is formed of a release agent composition containing a melamine resin. Therefore, it is possible to prevent the surface free energy of the release agent layer 12 from becoming too low as compared with the case where the release agent layer is formed only by using the polyorganosiloxane. In addition, unlike the active energy ray-curable resin which is insufficient in the hardening of the surface layer due to the oxygen barrier, the melamine resin is cured by thermal curing, so that not only the entire film elastic modulus of the release agent layer 12 is improved. Moreover, the elastic modulus is also sufficiently improved in each of the layers and the surface layers. Thereby, the polyorganosiloxane which is present in the vicinity of the surface layer of the release agent layer 12 can be sufficiently fixed. Further, the affinity of the melamine resin to the resin contained in the resin layer 13 to be described later is high. Therefore, the peeling of the resin layer 13 is provided The release films 1B and 1C have excellent adhesion between the release agent layer 12 and the resin layer 13, and can prevent peeling of the release agent layer 12 from the resin layer 13.

1.剝離劑層 Stripping agent layer

(1)三聚氰胺樹脂 (1) Melamine resin

在剝離劑組成物所含有的三聚氰胺樹脂,係含有下述通式(a)所表示之三聚氰胺化合物、或該三聚氰胺化合物2個以上縮合而成之多核體。 The melamine resin contained in the release agent composition contains a melamine compound represented by the following formula (a) or a polynuclear body obtained by condensing two or more of the melamine compounds.

式(a)中,X係表示-H、-CH2-OH、或-CH2-O-R。該等基係構成在上述三聚氰胺化合物彼此的縮合反應之反應基。具體而言,藉由X成為H而形成之-NH基,係能夠在-N-CH2-OH基與-N-CH2-R基之間進行縮合反應。又,藉由X成為-CH2-OH而形成之-N-CH2-OH基、及藉由X成為-CH2-O-R而形成之-N-CH2-O-R基,係能夠同時在-NH基、-N-CH2-OH基及-N-CH2-O-R基之間進行縮合反應。 In the formula (a), X represents -H, -CH 2 -OH, or -CH 2 -OR. These groups constitute a reactive group in the condensation reaction of the above melamine compounds. Specifically, the -NH group formed by the fact that X is H is capable of undergoing a condensation reaction between the -N-CH 2 -OH group and the -N-CH 2 -R group. Further, by X become -CH -N-CH 2 -OH group formed of 2 -OH, and -N-CH 2 -OR group X by -CH 2 -OR be formed of, based on simultaneously - A condensation reaction is carried out between the NH group, the -N-CH 2 -OH group and the -N-CH 2 -OR group.

在上述-CH2-O-R基,R係表示碳數1~8個的烷基。該碳數係以1~6個為佳,特別是以1~3個為佳。作為碳數1~8的烷基,可舉出,例如,甲基、乙基、丙基、丁基、戊基、己基、辛基等,特別是以甲基為佳。 In the above -CH 2 -OR group, R represents an alkyl group having 1 to 8 carbon atoms. The number of carbon atoms is preferably from 1 to 6, especially from 1 to 3. The alkyl group having 1 to 8 carbon atoms may, for example, be a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group or an octyl group, and particularly preferably a methyl group.

上述X係各自可相同、亦可不同。又,上述R係各自可相同、亦可不同。 The above X systems may be the same or different. Further, the R systems may be the same or different.

三聚氰胺化合物,係通常存在下列種類:全部的X為-CH2-O-R之全醚型;至少1個X為-CH2-OH且至少1個X為H之亞胺基.羥甲基型;至少1個X為-CH2-OH且H之X為不存在之羥甲基型;及至少1個X為H且-CH2-OH之X為不存在之亞胺基型。作為在上述三聚氰胺樹脂所含有的三聚氰胺化合物,係以使用甲基化三聚氰胺(R為甲基之全醚型)、亞胺基羥甲基三聚氰胺(亞胺基.羥甲基型)、羥甲基三聚氰胺(羥甲基型)、丁基化三聚氰胺(R為丁基之全醚型)等為佳。而且,從容易溶解在有機溶劑,且在低溫容易硬化之觀點而言,以使用甲基化三聚氰胺或亞胺基羥甲基三聚氰胺為佳。特別是從不需要使保護基脫離之反應,且反應速度進一步提升之觀點而言,以使用亞胺基羥甲基三聚氰胺為佳。 The melamine compound usually has the following kinds: all X is a full ether type of -CH 2 -OR; at least one X is -CH 2 -OH and at least one X is an imine group of H. a hydroxymethyl group; at least one X is -CH 2 -OH and H of X is a hydroxymethyl group which is absent; and at least one X is H and -CH 2 -OH is an imine group which is absent type. As the melamine compound contained in the above melamine resin, methylated melamine (R is a methyl ether monoether type), iminomethylol melamine (imino.hydroxymethyl type), methylol group Melamine (hydroxymethyl type), butylated melamine (R is a butyl full ether type), etc. are preferred. Further, from the viewpoint of being easily dissolved in an organic solvent and being easily cured at a low temperature, it is preferred to use methylated melamine or imidomethylol melamine. In particular, from the viewpoint that the reaction for deprotecting the group is not required to be removed, and the reaction rate is further improved, it is preferred to use an imidomethylol melamine.

上述三聚氰胺樹脂,亦可含有2~50個上述式(a)表示之化合物縮合而成之多核體,又,亦可有2~30個縮合而成之多核體,特別是亦可有2~10個縮合而成之多核體,進而亦可含有2~5個縮合而成之多核體。 The melamine resin may further contain 2 to 50 polynuclear compounds obtained by condensing the compound represented by the above formula (a), or may have 2 to 30 condensed polynuclear bodies, in particular, 2 to 10 The condensed multinuclear body may further contain 2 to 5 condensed polynuclear bodies.

在用以形成剝離劑層12之剝離劑組成物,三聚氰胺樹脂的質量平均分子量係以120~10000為佳,特別是以200~5000為佳,進而以1000~4000為佳。藉由質量平均分子量為120以上,三聚氰胺樹脂能夠穩定地交聯,且形成更平滑的剝離面。另一方面,藉由質量平均分子量為10000以下,能夠抑制剝離劑組成物的黏度變得過高,且將剝離劑組成物塗佈在基材11上時,塗佈性變為良好。又,在本說明書之質量平均分子量,係使用凝膠滲透層析法(GPC)法所測定之標準聚苯 乙烯換算之值。 In the release agent composition for forming the release agent layer 12, the mass average molecular weight of the melamine resin is preferably from 120 to 10,000, particularly preferably from 200 to 5,000, more preferably from 1,000 to 4,000. By having a mass average molecular weight of 120 or more, the melamine resin can be stably crosslinked and a smoother peeling surface can be formed. On the other hand, when the mass average molecular weight is 10,000 or less, the viscosity of the release agent composition can be prevented from becoming too high, and when the release agent composition is applied onto the substrate 11, the coatability is improved. Moreover, the mass average molecular weight in the present specification is a standard polyphenylene measured by gel permeation chromatography (GPC). The value in terms of ethylene.

(2)聚有機矽氧烷 (2) Polyorganooxane

作為在剝離劑組成物所含有的聚有機矽氧烷,能夠使用下述通式(b)所表示之含矽化合物的聚合物。 As the polyorganosiloxane which is contained in the release agent composition, a polymer containing a ruthenium compound represented by the following formula (b) can be used.

式(b)中,m為1以上的整數。式(b)中,R1~R8係以烷基或芳基為佳,特別是以碳數1~8的烷基或碳數6~8的芳基為佳。作為碳數1~8的烷基,可舉出,例如,甲基、乙基、丙基、丁基、戊基、己基、辛基等,作為碳數6~8的芳基,可舉出苯基、甲基苯基,其中,特別是以甲基為佳。 In the formula (b), m is an integer of 1 or more. In the formula (b), R 1 to R 8 are preferably an alkyl group or an aryl group, and particularly preferably an alkyl group having 1 to 8 carbon atoms or an aryl group having 6 to 8 carbon atoms. Examples of the alkyl group having 1 to 8 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, and an octyl group. Examples of the aryl group having 6 to 8 carbon atoms include aryl groups having 6 to 8 carbon atoms. Phenyl and methylphenyl, among which methyl is particularly preferred.

R1~R8係可相同亦可不同。又,R1及R2為存在複數個時,R1及R2係在重複單元間可相同亦可不同。 The R 1 to R 8 systems may be the same or different. Further, when R 1 and R 2 are plural, R 1 and R 2 may be the same or different between the repeating units.

作為在剝離劑組成物所含有的聚有機矽氧烷,係以在末端或側鏈具有有機基者為佳。亦即,式(b)中的R1~R8之至少1個,係以有機基為佳。在本說明書,「有機基」係指不包含上述的烷基及芳基之基。作為此種有機基,可舉出聚醚、聚酯、聚胺酯等具有重複構造之有機基。在此種有機基,聚醚、聚酯、聚胺酯等各自的一末端之原子係鍵結在聚有機矽氧烷的末端或鏈中的矽原子。 As the polyorganosiloxane which is contained in the release agent composition, it is preferred to have an organic group at the terminal or side chain. That is, at least one of R 1 to R 8 in the formula (b) is preferably an organic group. In the present specification, "organic group" means a group which does not contain the above alkyl group and aryl group. Examples of such an organic group include organic groups having a repeating structure such as a polyether, a polyester, and a polyurethane. In such an organic group, an atomic group at one end of each of a polyether, a polyester, a polyurethane, or the like is bonded to a ruthenium atom at the end or chain of the polyorganosiloxane.

又,聚有機矽氧烷係以含有能夠交聯反應之官能 基為佳。能夠交聯反應的官能基係可直接鍵結在聚有機矽氧烷的矽原子,亦可透過前述的有機基而鍵結在聚有機矽氧烷。亦即,式(b)中的R1~R8之至少1個,係以能夠交聯的官能基或具有能夠交聯的官能基之有機基為佳。作為直接鍵結在矽原子之能夠交聯的官能基,可舉出烯基、氫基(氫矽烷基)、羥基(羥基矽烷基)等;作為透過有機基而鍵結在聚有機矽氧烷之官能基,可舉出羥基、羧基、環氧丙基、(甲基)丙烯醯基等。該等官能基之中,係以直接鍵結在矽原子之羥基(羥基矽烷基)或透過有機基之羥基為特佳。又,在本說明書之「(甲基)丙烯醯基」係意味著丙烯醯基及甲基丙烯醯基之雙方。針對其它類似用語亦同樣。 Further, the polyorganosiloxane is preferably a functional group containing a crosslinking reaction. The functional group capable of crosslinking reaction can be directly bonded to the ruthenium atom of the polyorganosiloxane, or can be bonded to the polyorganosiloxane through the aforementioned organic group. That is, at least one of R 1 to R 8 in the formula (b) is preferably a functional group capable of crosslinking or an organic group having a functional group capable of crosslinking. Examples of the functional group capable of crosslinking directly bonded to a ruthenium atom include an alkenyl group, a hydrogen group (hydroalkylene group), a hydroxyl group (hydroxy hydroxyalkyl group), and the like; and a polyorganosiloxane is bonded as an organic group. Examples of the functional group include a hydroxyl group, a carboxyl group, a glycidyl group, and a (meth)acryl fluorenyl group. Among these functional groups, a hydroxyl group (hydroxy hydroxyalkyl group) directly bonded to a ruthenium atom or a hydroxyl group which transmits an organic group is particularly preferred. Moreover, "(meth)acryl fluorenyl" in this specification means both an acryl hydryl group and a methacryl fluorenyl group. The same is true for other similar terms.

使含有具有羥基的聚有機矽氧烷之剝離劑組成物硬化而形成剝離劑層12時,三聚氰胺樹脂與聚有機矽氧烷透過該羥基而進行化學鍵結,且聚有機矽氧烷被三聚氰胺硬化物固定。藉此,聚有機矽氧烷在剝離劑層12之中,其自由的移動係有效地被限制,而能夠有效地抑制聚有機矽氧烷從剝離劑層12遷移至陶瓷生片。其結果,將陶瓷生片層積時,能夠有效地抑制陶瓷生片之間、或電極印刷面和與其接觸之陶瓷生片的面之間產生面方向的偏移,而提升電極等的位置精確度。 When the release agent composition containing the polyorganosiloxane having a hydroxyl group is cured to form the release agent layer 12, the melamine resin and the polyorganosiloxane are chemically bonded through the hydroxyl group, and the polyorganosiloxane is cured by the melamine. fixed. Thereby, the free movement of the polyorganosiloxane in the release agent layer 12 is effectively restricted, and the migration of the polyorganosiloxane from the release agent layer 12 to the ceramic green sheet can be effectively suppressed. As a result, when the ceramic green sheets are laminated, it is possible to effectively suppress the occurrence of the surface direction shift between the ceramic green sheets, or between the electrode printing surfaces and the surfaces of the ceramic green sheets in contact therewith, and to improve the position of the electrodes and the like. degree.

聚有機矽氧烷的質量平均分子量,係以500~20000為佳,特別是以1000~10000為佳,進而以3000~8000為佳。藉由聚有機矽氧烷的質量平均分子量為500以上,在剝離劑層12的剝離面之表面自由能量適當地降低,能夠使將剝離膜1A、1B、1C從陶瓷生片剝離時之剝離力有效地降低。藉由聚 有機矽氧烷的質量平均分子量為20000以下,能夠抑制剝離劑組成物的黏度變得過高,且變得容易塗佈剝離劑組成物。 The mass average molecular weight of the polyorganosiloxane is preferably from 500 to 20,000, particularly preferably from 1,000 to 10,000, more preferably from 3,000 to 8,000. When the mass average molecular weight of the polyorganosiloxane is 500 or more, the free energy on the surface of the release surface of the release agent layer 12 is appropriately lowered, and the peeling force when the release films 1A, 1B, and 1C are peeled off from the ceramic green sheet can be removed. Effectively reduced. By gathering The mass average molecular weight of the organic siloxane is 20,000 or less, and it is possible to suppress the viscosity of the release agent composition from becoming too high, and it is easy to apply the release agent composition.

相對於三聚氰胺樹脂100質量份,在剝離劑組成物中之聚有機矽氧烷的含量係以0.1~30質量份為佳,特別是以0.3~25質量份為佳,進而以0.5~20質量份為佳。藉由在剝離劑組成物中之聚有機矽氧烷的含量為0..1質量份以上,剝離劑層12的剝離面之表面自由能量充分地降低,而能夠達成適當的剝離力。另一方面,藉由在剝離劑組成物中之聚有機矽氧烷的含量為30質量份以下,能夠抑制上述聚有機矽氧烷的遷移。因此,能夠防止剝離劑組成物的表面自由能量過度降低,能夠抑制將剝離劑組成物的塗液塗佈在樹脂層13上時產生排拒,而且能夠良好地製造剝離膜1A、1B、1C。 The content of the polyorganosiloxane in the release agent composition is preferably 0.1 to 30 parts by mass, particularly preferably 0.3 to 25 parts by mass, and further preferably 0.5 to 20 parts by mass based on 100 parts by mass of the melamine resin. It is better. When the content of the polyorganosiloxane in the release agent composition is 0.1 part by mass or more, the surface free energy of the release surface of the release agent layer 12 is sufficiently lowered, and an appropriate peeling force can be achieved. On the other hand, when the content of the polyorganosiloxane in the release agent composition is 30 parts by mass or less, the migration of the above polyorganosiloxane can be suppressed. Therefore, it is possible to prevent the surface free energy of the release agent composition from being excessively lowered, and it is possible to suppress the occurrence of rejection when the coating liquid of the release agent composition is applied onto the resin layer 13, and to manufacture the release films 1A, 1B, and 1C favorably.

(3)其它成分 (3) Other ingredients

剝離劑組成物係以進一步含有酸觸媒為佳。作為酸觸媒的例子,係以鹽酸、硫酸、硝酸、磷酸、亞磷酸、對甲苯磺酸等為佳,特別是以對甲苯磺酸為佳。藉由剝離劑組成物含有酸觸媒,在上述三聚氰胺樹脂之縮合反應係效率良好地進行。 The release agent composition is preferably further contained in an acid catalyst. As an example of the acid catalyst, hydrochloric acid, sulfuric acid, nitric acid, phosphoric acid, phosphorous acid, p-toluenesulfonic acid or the like is preferred, and p-toluenesulfonic acid is particularly preferred. The condensation reaction of the above melamine resin proceeds efficiently by the release agent composition containing an acid catalyst.

相對於三聚氰胺樹脂100質量份,在剝離劑組成物中之酸觸媒的含量係以0.1~30質量份為佳,特別是以0.5~20質量份為佳,進而以1~15質量份為佳。 The content of the acid catalyst in the release agent composition is preferably 0.1 to 30 parts by mass, particularly preferably 0.5 to 20 parts by mass, more preferably 1 to 15 parts by mass, per 100 parts by mass of the melamine resin. .

剝離劑組成物係除了上述成分以外,亦可含有交聯劑、反應抑制劑等。 The release agent composition may contain a crosslinking agent, a reaction inhibitor or the like in addition to the above components.

(4)剝離劑層的厚度 (4) Thickness of the release agent layer

剝離劑層12的厚度係以5~2000nm為佳。特別是由基材 11及剝離劑層12所構成之剝離片1A時,剝離劑層12的厚度係以100~2000nm為佳,特別是以150~1000nm為佳,進而以200~600nm為佳。又,在基材11與剝離劑層12之間進一步具備樹脂層13之剝離片1B或剝離片1C時,剝離劑層12的厚度係以5~300nm為佳,特別是以10~250nm為佳,進而以15~200nm為佳。藉由剝離劑層12的厚度為5nm以上,能夠有效地發揮作為剝離劑層12之功能。又,藉由剝離劑層12的厚度為2000nm以下,能夠抑制產生捲曲。 The thickness of the release agent layer 12 is preferably from 5 to 2,000 nm. Especially by the substrate In the case of the release sheet 1A composed of the release agent layer 12, the thickness of the release agent layer 12 is preferably 100 to 2000 nm, particularly preferably 150 to 1000 nm, and more preferably 200 to 600 nm. Further, when the release sheet 1B or the release sheet 1C of the resin layer 13 is further provided between the substrate 11 and the release agent layer 12, the thickness of the release agent layer 12 is preferably 5 to 300 nm, particularly preferably 10 to 250 nm. Further, it is preferably 15 to 200 nm. When the thickness of the release agent layer 12 is 5 nm or more, the function as the release agent layer 12 can be effectively exhibited. Further, by the thickness of the release agent layer 12 being 2000 nm or less, curling can be suppressed.

2.基材 2. Substrate

剝離膜1A、1B、1C的基材11,係只要能夠層積樹脂層13,就沒有特別限定。作為此種基材11,可舉出,例如,由聚對苯二甲酸乙二酯、聚萘二甲酸乙二酯等的聚酯;聚丙烯、聚甲基戊烯等的聚烯烴;聚碳酸酯、聚乙酸乙烯酯等的塑膠所構成之薄膜,可為單層亦可為同種或異種之2層以上的多層。該等之中,以聚酯薄膜為佳,特別是以聚對苯二甲酸乙二酯薄膜為佳,進而以雙軸延伸聚對苯二甲酸乙二酯薄膜為佳。因為聚對苯二甲酸乙二酯薄膜係在加工時、使用時等,不容易產生塵埃等,而能夠有效地防止,例如,因塵埃等引起陶瓷漿料塗佈不良等。而且,藉由對聚對苯二甲酸乙二酯薄膜進行抗靜電處理,能夠防止將使用有機溶劑之陶瓷漿料進行塗佈時因靜電而起火、或提高防止塗佈不良等之效果。 The base material 11 of the release films 1A, 1B, and 1C is not particularly limited as long as the resin layer 13 can be laminated. Examples of such a substrate 11 include polyesters such as polyethylene terephthalate and polyethylene naphthalate; polyolefins such as polypropylene and polymethylpentene; and polycarbonate. The film made of a plastic such as an ester or a polyvinyl acetate may be a single layer or a multilayer of two or more layers of the same type or different types. Among these, a polyester film is preferred, particularly a polyethylene terephthalate film, and a biaxially oriented polyethylene terephthalate film is preferred. Since the polyethylene terephthalate film is not easily generated by dust or the like during processing or use, it can effectively prevent, for example, coating failure of the ceramic slurry due to dust or the like. Further, by performing an antistatic treatment on the polyethylene terephthalate film, it is possible to prevent the occurrence of ignition due to static electricity when the ceramic slurry using the organic solvent is applied, or to improve the effect of preventing coating failure.

又,在該基材11,為了提升與在其表面所設置的剝離劑層12或樹脂層13的密著性之目的,能夠依照需要而對一面或兩面,施行藉由氧化法、凹凸化法等之表面處理、或電 漿處理。作為上述氧化法,可舉出,例如,電暈放電處理、電漿放電處理、鉻氧化處理(濕式)、火焰處理、熱風處理、臭氧、紫外線照射處理等,又,作為凹凸化法,可舉出,例如,噴砂處理法、熱噴霧處理法等。該等表面處理法,係能夠按照基材薄膜的種類而適當地選擇,通常從效果及操作性方面而言,能夠適合地使用電暈放電處理法。 Further, in order to enhance the adhesion to the release agent layer 12 or the resin layer 13 provided on the surface of the substrate 11, the oxidation method or the unevenness method can be applied to one or both surfaces as needed. Surface treatment, or electricity Slurry treatment. Examples of the oxidation method include corona discharge treatment, plasma discharge treatment, chromium oxidation treatment (wet), flame treatment, hot air treatment, ozone, ultraviolet irradiation treatment, and the like. For example, a sand blasting method, a thermal spray treatment method, or the like. These surface treatment methods can be appropriately selected depending on the type of the base film, and in general, the corona discharge treatment can be suitably used in terms of effects and workability.

基材11的厚度,係通常10~300μm即可,較佳為15~200μm,特佳為20~125μm。 The thickness of the substrate 11 is usually 10 to 300 μm, preferably 15 to 200 μm, and particularly preferably 20 to 125 μm.

3.樹脂層 3. Resin layer

本實施形態的剝離膜,亦可在基材11與剝離劑層12之間具備樹脂層13。第2及3圖係各自顯示具備樹脂層13之剝離膜1B及1C。在剝離膜1B、1C,在基材11與剝離劑層12之間所設置之樹脂層13,係將在基材11之樹脂層13側的面之凹凸吸收。藉此,樹脂層13之與基材11為相反側的面具有較高的平滑性。而且,藉由在樹脂層13的該面設置剝離劑層12,在剝離劑層12剝離面之平滑性成為優異。 In the release film of the present embodiment, the resin layer 13 may be provided between the substrate 11 and the release agent layer 12. The second and third drawings each show the release films 1B and 1C including the resin layer 13. In the release films 1B and 1C, the resin layer 13 provided between the substrate 11 and the release agent layer 12 absorbs the unevenness on the surface of the substrate 11 on the resin layer 13 side. Thereby, the surface of the resin layer 13 on the opposite side to the substrate 11 has high smoothness. Further, by providing the release agent layer 12 on the surface of the resin layer 13, the smoothness of the release surface of the release agent layer 12 is excellent.

作為形成樹脂層13之樹脂,係只要不會妨礙本發明的效果而能夠對剝離面賦予平滑性者,就沒有特別限定。作為形成樹脂層13之樹脂,係以使用剝離膜1B、1C容易達成3.5~7.0GPa的被膜彈性模數者為佳。特別是樹脂層13係以由含有硬化性成分之樹脂組成物所形成為佳。該硬化性成分可為活性能量線硬化性成分,亦可為熱硬化性成分。 The resin which forms the resin layer 13 is not particularly limited as long as smoothness can be imparted to the peeling surface without impairing the effects of the present invention. As the resin for forming the resin layer 13, it is preferable to use a release film 1B or 1C to easily achieve a film elastic modulus of 3.5 to 7.0 GPa. In particular, the resin layer 13 is preferably formed of a resin composition containing a curable component. The curable component may be an active energy ray-curable component or a thermosetting component.

(1)活性能量線硬化性成分 (1) Active energy ray hardening component

作為活性能量線硬化性成分,係只要不會妨礙本發明的效 果,而可藉由照射活性能量線而硬化之成分,就沒有特別限制,可為單體、寡聚物或聚合物的任一種,亦可為該等的混合物。特別是作為活性能量線硬化性成分,係以使用構成丙烯酸樹脂之成分為佳,特別是以使用多官能丙烯酸酯為佳 As the active energy ray-curable component, as long as it does not hinder the effect of the present invention The component which can be hardened by irradiation with an active energy ray is not particularly limited, and may be any of a monomer, an oligomer or a polymer, or a mixture thereof. In particular, as the active energy ray-curable component, it is preferred to use a component constituting the acrylic resin, particularly preferably a polyfunctional acrylate.

作為多官能丙烯酸酯,可舉出,例如,1,4-丁二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、新戊二醇己二酸酯二(甲基)丙烯酸酯、羥基三甲基乙酸新戊二醇二(甲基)丙烯酸酯、二(甲基)丙烯酸二環戊酯、己內酯改性二(甲基)丙烯酸二環戊烯基酯、環氧乙烷改性磷酸二(甲基)丙烯酸酯、三聚異氰酸二(丙烯醯氧基乙基)酯、烯丙基化二(甲基)丙烯酸環己酯等的2官能型;三羥甲基丙烷三(甲基)丙烯酸酯、二新戊四醇三(甲基)丙烯酸酯、丙酸改性二新戊四醇三(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、環氧丙烷改性三羥甲基丙烷三(甲基)丙烯酸酯、異三聚氰酸參(丙烯醯氧基乙基)酯、ε-己內酯改性異三聚氰酸參(2-(甲基)丙烯醯氧基乙基)酯等的3官能型;二甘油四(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯等的4官能型;丙酸改性二新戊四醇五(甲基)丙烯酸酯等的5官能型;二新戊四醇六(甲基)丙烯酸酯、己內酯改性二新戊四醇六(甲基)丙烯酸酯等的6官能型等。該等可單獨使用1種,亦可組合2種以上而使用。作為多官能丙烯酸酯,從容易形成交聯結構且容易將剝離膜1B、1C的被膜彈性模數設定為後述之值的觀點而言,係以官能基數為3~15個者為佳,特別是以3~6個者為佳。上述多官能丙烯酸酯之中,從能夠有效地吸收 基材表面的凹凸且在剝離面達成優異的平滑性的觀點而言,以使用新戊四醇三丙烯酸酯或二新戊四醇六丙烯酸酯為佳。 The polyfunctional acrylate may, for example, be 1,4-butanediol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, neopentyl glycol di(methyl) Acrylate, polyethylene glycol di(meth)acrylate, neopentyl glycol adipate di(meth)acrylate, hydroxytrimethylacetic acid neopentyl glycol di(meth)acrylate, two Dicyclopentyl (meth)acrylate, caprolactone modified dicyclopentenyl bis(meth)acrylate, ethylene oxide modified di(meth)acrylate, and trimeric isocyanate Bifunctional type of propylene methoxyethyl ester, allylic cyclohexyl (meth) acrylate, etc.; trimethylolpropane tri(meth) acrylate, dipentaerythritol tris (methyl) Acrylate, propionic acid modified dipentaerythritol tri(meth)acrylate, pentaerythritol tri(meth)acrylate, propylene oxide modified trimethylolpropane tri(meth)acrylate a trifunctional type such as isomeric isocyanate (propylene oxyethyl) ester, ε-caprolactone modified isocyanuric acid (2-(methyl) propylene oxyethyl) ester ; diglycerin tetra (meth) acrylate, neopentyl alcohol tetra (methyl) propyl a tetrafunctional type such as an acid ester; a 5-functional type such as propionic acid-modified dipentaerythritol penta (meth) acrylate; dipentaerythritol hexa(meth) acrylate or caprolactone modified bis A 6-functional type such as pentaerythritol hexa(meth)acrylate. These may be used alone or in combination of two or more. From the viewpoint of easily forming a crosslinked structure and easily setting the film elastic modulus of the release films 1B and 1C to a value to be described later, it is preferable that the polyfunctional acrylate has a functional group number of from 3 to 15, particularly It is better to use 3 to 6 people. Among the above polyfunctional acrylates, can be effectively absorbed From the viewpoint of the unevenness of the surface of the substrate and the excellent smoothness of the release surface, it is preferred to use neopentyl alcohol triacrylate or dipentaerythritol hexaacrylate.

由含有活性能量線硬化性成分之樹脂組成物形成樹脂層13時,樹脂組成物係以進一步含有光聚合起始劑為佳。藉由含有光聚合起始劑,能夠使活性能量線硬化性成分效率良好地硬化,又,能夠減少聚合硬化時間及活性能量線的照射量。 When the resin layer 13 is formed of a resin composition containing an active energy ray-curable component, the resin composition preferably further contains a photopolymerization initiator. By containing a photopolymerization initiator, the active energy ray-curable component can be efficiently cured, and the polymerization hardening time and the irradiation amount of the active energy ray can be reduced.

作為光聚合起始劑,係沒有特別限制,能夠使用習知物。使用多官能丙烯酸酯作為活性能量線硬化性成分時,從促進聚合反應且提升硬化性之觀點而言,係以使用α-胺烷基苯酮系化合物為佳。作為α-胺烷基苯酮系化合物,可舉出,例如,2-甲基-1[4-(甲硫基)苯基]-2-嗎啉丙烷-1-酮、2-苄基-2-二甲胺基-1-(4-嗎啉苯基)-丁酮-1、2-二甲胺基-2-[(4-甲基苯基)甲基]-1-[4-(4-嗎啉基)苯基]-1-丁酮等。相對於多官能丙烯酸酯100質量份,在樹脂組成物中之α-胺烷基苯酮系化合物的含量,係以1~20質量份為佳,特別是3~15質量份為佳,進而以5~10質量份為佳。 The photopolymerization initiator is not particularly limited, and a conventional one can be used. When a polyfunctional acrylate is used as the active energy ray-curable component, it is preferred to use an α-aminoalkylphenone compound from the viewpoint of promoting the polymerization reaction and improving the curability. The α-aminoalkylphenone-based compound may, for example, be 2-methyl-1[4-(methylthio)phenyl]-2-morpholinan-1-one or 2-benzyl- 2-Dimethylamino-1-(4-morpholinylphenyl)-butanone-1, 2-dimethylamino-2-[(4-methylphenyl)methyl]-1-[4- (4-morpholinyl)phenyl]-1-butanone and the like. The content of the α-aminoalkylphenone compound in the resin composition is preferably from 1 to 20 parts by mass, particularly preferably from 3 to 15 parts by mass, based on 100 parts by mass of the polyfunctional acrylate. 5 to 10 parts by mass is preferred.

(2)熱硬化性成分 (2) Thermosetting components

作為熱硬化性成分,係只要不會妨礙本發明的效果,而可藉由加熱而硬化之成分,就沒有特別限制。特別是作為熱硬化性成分,係以使用三聚氰胺樹脂、醇酸樹脂、環氧樹脂、酚樹脂、尿素樹脂、聚酯樹脂、胺基甲酸酯樹脂、聚醯亞胺樹脂、苯并嗪(benzoxazine)樹脂或丙烯酸樹脂為佳,特別是以使用三聚氰胺樹脂為佳。藉由使用三聚氰胺樹脂,樹脂層13與剝離劑層12之間的接著力提升,能夠有效地抑制剝離劑層12從 樹脂層13剝落。又,藉由使用三聚氰胺樹脂,剝離膜1B、1C的被膜彈性模數提升,且將剝離膜1B、1C從陶瓷生片剝離時的剝離性提升。 The thermosetting component is not particularly limited as long as it does not interfere with the effects of the present invention and can be cured by heating. In particular, as a thermosetting component, a melamine resin, an alkyd resin, an epoxy resin, a phenol resin, a urea resin, a polyester resin, a urethane resin, a polyimide resin, a benzo compound, and the like are used. A benzoxazine resin or an acrylic resin is preferred, and a melamine resin is particularly preferred. By using the melamine resin, the adhesion between the resin layer 13 and the release agent layer 12 is increased, and the release agent layer 12 can be effectively prevented from peeling off from the resin layer 13. Further, by using the melamine resin, the film elastic modulus of the release films 1B and 1C is improved, and the peeling property when the release films 1B and 1C are peeled off from the ceramic green sheets is improved.

雖然用以形成樹脂層13之三聚氰胺樹脂係沒有特別限定,但是以使用與為了形成剝離劑層12而使用之三聚氰胺樹脂同種之物為佳。此時,藉由在樹脂層13與剝離劑層12之間的三聚氰胺樹脂彼此顯示高親和性,而在樹脂層13與剝離劑層12之間能夠得到高密著性,且能夠進一步有效地抑制剝離劑層12的剝落。 Although the melamine resin for forming the resin layer 13 is not particularly limited, it is preferably the same as the melamine resin used to form the release agent layer 12. At this time, the melamine resin between the resin layer 13 and the release agent layer 12 exhibits high affinity with each other, whereby high adhesion can be obtained between the resin layer 13 and the release agent layer 12, and peeling can be further effectively suppressed. The peeling of the agent layer 12.

(3)其它成分 (3) Other ingredients

除了上述的成分,樹脂組成物亦可含有交聯劑、反應抑制劑、抗靜電劑、密著提升劑等。 In addition to the above components, the resin composition may contain a crosslinking agent, a reaction inhibitor, an antistatic agent, an adhesion promoter, and the like.

(4)樹脂層的厚度 (4) Thickness of resin layer

樹脂層13之厚度,係以100~3000nm為佳,特別是以300~2000nm為佳,進而以500~1000nm為佳。藉由樹脂層13的厚度為100mm以上,能夠有效地吸收基材11表面的凹凸,且能夠在剝離面達成優異的平滑性。又,藉由樹脂層13的厚度為3000nm以下,能夠有效地抑制剝離膜1B、1C產生捲曲。 The thickness of the resin layer 13 is preferably from 100 to 3,000 nm, particularly preferably from 300 to 2,000 nm, more preferably from 500 to 1,000 nm. When the thickness of the resin layer 13 is 100 mm or more, the unevenness on the surface of the substrate 11 can be effectively absorbed, and excellent smoothness can be achieved on the peeled surface. Moreover, by the thickness of the resin layer 13 being 3000 nm or less, curling of the peeling films 1B and 1C can be effectively suppressed.

4.第2樹脂層 4. Second resin layer

在剝離膜1C,係在基材11之與樹脂層13為相反側的面(以下,有稱為「基材背面」之情形)設置第2樹脂層14。因為第2樹脂層14係將在基材背面所存在的凹凸吸收,所以相較於基材背面,在第2樹脂層14之與基材11為相反側的面之平滑性係成為較高者。而且,在將形成有陶瓷生片之剝離膜1C捲取 成為捲物狀時,因為陶瓷生片係與第2樹脂層14之具有較高的平滑性之面接觸,所以能夠提供平滑性更高的陶瓷生片。又,藉由存在第2樹脂層14,樹脂層13及/或剝離劑層12的硬化收縮係被第2樹脂層14的硬化收縮相抵銷,所以能夠抑制在剝離膜1C產生捲曲。 In the release film 1C, the second resin layer 14 is provided on the surface of the substrate 11 opposite to the resin layer 13 (hereinafter, referred to as "substrate back surface"). Since the second resin layer 14 absorbs the unevenness existing on the back surface of the substrate, the smoothness of the surface of the second resin layer 14 opposite to the substrate 11 is higher than that of the back surface of the substrate. . Moreover, the peeling film 1C in which the ceramic green sheet is formed is taken up In the case of a roll shape, the ceramic green sheet is in contact with the surface of the second resin layer 14 having high smoothness, so that a ceramic green sheet having higher smoothness can be provided. In addition, since the curing and shrinkage of the resin layer 13 and/or the release agent layer 12 are offset by the curing shrinkage of the second resin layer 14 by the presence of the second resin layer 14, it is possible to suppress the occurrence of curling in the release film 1C.

用以形成第2樹脂層14之樹脂,係沒有特別限定。作為第2樹脂層14用的樹脂,能夠使用為了形成樹脂層13所使用之前述樹脂。在剝離膜1B,所謂樹脂層13及第2樹脂層14,可為由同種樹脂所形成者,亦可為由異種樹脂所形成者。但是,從抑制捲曲的觀點而言,樹脂層13與第2樹脂層14係以由同種樹脂所形成為佳。 The resin for forming the second resin layer 14 is not particularly limited. As the resin for the second resin layer 14, the above-mentioned resin used to form the resin layer 13 can be used. In the release film 1B, the resin layer 13 and the second resin layer 14 may be formed of the same resin or may be formed of a different resin. However, from the viewpoint of suppressing curl, the resin layer 13 and the second resin layer 14 are preferably formed of the same resin.

第2樹脂層14的厚度係能夠與樹脂層13同樣地設定。但是,從有效地抑制產生捲曲的觀點而言,相對於樹脂層13及剝離劑層12的厚度之合計,第2樹脂層14的厚度之比係以0.2~2為佳,特別是以0.7~1.5為佳,進而以0.8~1.2為佳。 The thickness of the second resin layer 14 can be set in the same manner as the resin layer 13 . However, from the viewpoint of effectively suppressing the occurrence of curl, the ratio of the thickness of the second resin layer 14 is preferably 0.2 to 2, particularly 0.7 to the total thickness of the resin layer 13 and the release agent layer 12. 1.5 is better, and then 0.8 to 1.2 is preferred.

5.陶瓷生片製造工程用剝離膜的物性 5. Physical properties of the release film for ceramic green sheet manufacturing engineering

在剝離膜1A、1B、1C,藉由奈米壓痕試驗,在剝離劑層12之與樹脂層13為相反側的面所測定之被膜彈性模數為35~7.0GPa,以4.0~6.5GPa為佳,特別是以4.5~6.3GPa為佳。藉由剝離膜1A、1B、1C的被膜彈性模數為3.5GPa以上,能夠有效地實現將剝離膜1A、1B、1C從陶瓷生片剝離時之良好的剝離性。又,藉由剝離膜1A、1B、1C的被膜彈性模數為7.0GPa以下,剝離膜1A、1B、1C的捲取係變為容易。 In the release films 1A, 1B, and 1C, the film elastic modulus measured on the surface of the release agent layer 12 opposite to the resin layer 13 by the nanoindentation test was 35 to 7.0 GPa, and 4.0 to 6.5 GPa. Good, especially 4.5~6.3GPa. When the film elastic modulus of the release films 1A, 1B, and 1C is 3.5 GPa or more, good peeling properties when the release films 1A, 1B, and 1C are peeled off from the ceramic green sheets can be effectively achieved. In addition, when the film elastic modulus of the release films 1A, 1B, and 1C is 7.0 GPa or less, the winding of the release films 1A, 1B, and 1C is easy.

又,在本說明書之被膜彈性模數的測定,係藉由奈米壓痕試驗而進行。具體而言,係在接著於鋁製的底座之玻璃板上,將經裁斷成為10mm×10mm尺寸之剝離膜1A、1B、1C使用兩液系環氧接著劑固定。此時,在剝離膜1A、1B,係在基材11之與剝離劑層12為相反側的面塗佈兩液系環氧接著劑,而將該面固定在玻璃板。另一方面,在剝離膜1C,係在第2樹脂層14之與基材11為相反側的面塗佈兩液系環氧接著劑,而將該面固定在玻璃板。隨後,使用微小硬度評價裝置(在試驗例係使用MTS公司製的「Nano Indenter SA2」),而從在剝離劑層12之與基材11為相反側的面測定被膜彈性模數。 Moreover, the measurement of the elastic modulus of the film in the present specification was carried out by a nanoindentation test. Specifically, the release films 1A, 1B, and 1C which were cut to a size of 10 mm × 10 mm were fixed on a glass plate attached to a base made of aluminum using a two-liquid epoxy adhesive. At this time, in the release films 1A and 1B, a two-liquid epoxy adhesive is applied to the surface of the substrate 11 opposite to the release agent layer 12, and the surface is fixed to a glass plate. On the other hand, in the release film 1C, a two-liquid epoxy adhesive is applied to the surface of the second resin layer 14 opposite to the substrate 11, and the surface is fixed to a glass plate. Subsequently, the film hardness modulus was measured from the surface of the release agent layer 12 opposite to the substrate 11 using a micro hardness evaluation device ("Nano Indenter SA2" manufactured by MTS Co., Ltd. in the test example).

從在剝離膜1A、1B、1C的剝離面上所成形的陶瓷生片,將該剝離膜1A、1B、1C剝離時所需要的剝離力,係能夠適當地設定,以5~100mN/40mm為佳,特別是以7~50mN/40mm為佳,進而以10~30mN/40mm為佳。在剝離膜1A、1B、1C,剝離劑層12係使用含有聚有機矽氧烷之剝離劑組成物而形成,而且,因為剝離膜1A、1B、1C係具有適當的彈性,所以能夠適當地設定為5~100mN/40mm之剝離力。 The peeling force required for peeling off the peeling films 1A, 1B, and 1C from the ceramic green sheets formed on the peeling surfaces of the release films 1A, 1B, and 1C can be appropriately set, and is 5 to 100 mN/40 mm. Good, especially 7~50mN/40mm is better, and then 10~30mN/40mm is better. In the release films 1A, 1B, and 1C, the release agent layer 12 is formed using a release agent composition containing polyorganosiloxane, and since the release films 1A, 1B, and 1C have appropriate elasticity, they can be appropriately set. It is a peeling force of 5~100mN/40mm.

使用剝離膜1A、1B、1C而成形陶瓷生片時,能夠抑制聚有機矽氧烷從剝離劑層12遷移至陶瓷生片。藉此,將陶瓷生片成形在剝離膜1A、1B、1C的剝離面上之後,在將該陶瓷生片從剝離膜1A、1B、1C剝離時,在陶瓷生片之接觸剝離面的面之聚有機矽氧烷的遷移量係成為較低者。具體而言,使用剝離膜1A、1B、1C而成形陶瓷生片時,測定在該陶瓷生片之接觸剝離面的面而得到的矽原子比率,係以小於1.0原子 %為佳,特別是以小於0.5原子%為佳,進而以0.3原子%以下為佳。又,矽原子比率,係例如,能夠基於使用X射線光電子光譜分析法(XPS)而測定之矽原子(Si)、碳原子(C)及氧原子(O)的量(XPS統計數),依照下述式來算出。 When the ceramic green sheets are formed by using the release films 1A, 1B, and 1C, it is possible to suppress migration of the polyorganosiloxane from the release agent layer 12 to the ceramic green sheets. After the ceramic green sheets are formed on the release surfaces of the release films 1A, 1B, and 1C, the ceramic green sheets are peeled off from the release films 1A, 1B, and 1C, and the surface of the ceramic green sheets is in contact with the release surface. The migration amount of polyorganosiloxane is lower. Specifically, when the ceramic green sheets are formed by using the release films 1A, 1B, and 1C, the ratio of germanium atoms obtained on the surface of the ceramic green sheets contacting the peeling surface is less than 1.0 atom. % is preferable, particularly preferably less than 0.5 atom%, more preferably 0.3 atom% or less. Further, the atomic ratio of ruthenium, for example, can be measured based on the amount of ruthenium atom (Si), carbon atom (C), and oxygen atom (O) (XPS statistic) measured by X-ray photoelectron spectroscopy (XPS). Calculated by the following formula.

矽原子比率(原子%)=[(Si元素量)/{(C元素量)+(O元素量)+(Si元素量)}]×100 Helium atomic ratio (atomic %) = [(Si element amount) / {(C element amount) + (O element amount) + (Si element amount)}] × 100

又,測定用陶瓷生片,係能夠適當地選擇藉由XPS無法檢測出矽(亦即,不含有矽化合物)之陶瓷生片,而利用該矽原子比率作為剝離劑層12的聚有機矽氧烷的遷移量之評價基準。 Further, in the ceramic green sheet for measurement, it is possible to appropriately select a ceramic green sheet in which ruthenium (i.e., ruthenium-free compound is not contained) by XPS, and to use the ruthenium atom ratio as the polyorganosiloxane of the release agent layer 12. Basis for evaluation of the amount of migration of alkane.

在剝離膜1A、1B、1C的剝離面之最大突起高度Rp,係以5~800nm為佳,特別是以10~400nm為佳,進而以20~200nm為佳。特別是具備樹脂層13之剝離膜1B、1C時,在剝離面之最大突起高度Rp係以5~300nm為佳,特別是以10~150nm為佳,進而以20~75nm為佳。藉由剝離面的最大突起高度Rp為上述範圍,使用剝離膜1A、1B、1C而形成之陶瓷生片係顯示優異的平滑性,且能夠製造顯示優異的性能之積層陶瓷製品。特別是在剝離膜1B、1C,藉由具備樹脂層13,最大突起高度Rp係成為如上述非常小的值,而能夠形成平滑性更優異之陶瓷生片。又,在剝離面之最大突起高度Rp的測定方法係如後述的試驗例所示。 The maximum protrusion height Rp of the release faces of the release films 1A, 1B, and 1C is preferably 5 to 800 nm, particularly preferably 10 to 400 nm, and more preferably 20 to 200 nm. In particular, when the release films 1B and 1C of the resin layer 13 are provided, the maximum protrusion height Rp on the release surface is preferably 5 to 300 nm, particularly preferably 10 to 150 nm, and more preferably 20 to 75 nm. When the maximum projection height Rp of the peeling surface is in the above range, the ceramic green sheet formed using the release films 1A, 1B, and 1C exhibits excellent smoothness, and a laminated ceramic product exhibiting excellent performance can be produced. In particular, in the release films 1B and 1C, by providing the resin layer 13, the maximum protrusion height Rp is set to a very small value as described above, and a ceramic green sheet having more excellent smoothness can be formed. Moreover, the measuring method of the maximum protrusion height Rp on the peeling surface is as shown in the test example mentioned later.

6.陶瓷生片製造工程用剝離膜的製造方法 6. Method for producing release film for ceramic green sheet manufacturing engineering

製造剝離膜1A時,係將含有剝離劑組成物及依照需要的有機溶劑之塗佈液塗佈在基材11的一面後,藉由使該塗膜乾 燥及硬化而形成剝離劑層12。藉此,得到離膜1A。 When the release film 1A is produced, a coating liquid containing a release agent composition and an organic solvent as needed is applied to one surface of the substrate 11, and the coating film is dried. The release agent layer 12 is formed by drying and hardening. Thereby, the film 1A was obtained.

又,製造剝離膜1B時,係將含有樹脂組成物及依照需要的有機溶劑之塗佈液塗佈在基材11的一面後,藉由使該塗膜乾燥及硬化而形成樹脂層13。而且,將含有剝離劑組成物及依照需要的有機溶劑之塗佈液塗佈在樹脂層13之與基材11為相反側的面之後,藉由乾燥及加熱而使剝離劑組成物硬化,以形成剝離劑層12。藉此,得到剝離膜1B。 When the release film 1B is produced, a coating liquid containing a resin composition and an organic solvent as required is applied to one surface of the substrate 11, and then the resin film 13 is formed by drying and curing the coating film. Further, after the coating liquid containing the release agent composition and the organic solvent as needed is applied to the surface of the resin layer 13 opposite to the substrate 11, the release agent composition is cured by drying and heating. A release agent layer 12 is formed. Thereby, the peeling film 1B was obtained.

又,製造剝離膜1C時,係將含有樹脂層13用的樹脂組成物及依照需要的有機溶劑之塗佈液塗佈在基材11的一面後,藉由使該塗膜乾燥及硬化而形成樹脂層13。而且,將含有第2樹脂層14用的樹脂組成物及依照需要的有機溶劑之塗佈液塗佈在基材11的另一面後,藉由使該塗膜乾燥及硬化而形成第2樹脂層14。接著,將含有剝離劑組成物及依照需要的有機溶劑之塗佈液塗佈在樹脂層13之與基材11為相反側的面後,藉由乾燥及加熱而使剝離劑組成物硬化,以形成剝離劑層12。藉此,得到剝離膜1C。又,第2樹脂層14亦可比樹脂層13更先形成、或者亦可在剝離劑層12之後才形成。 In addition, when the release film 1C is produced, a resin composition containing the resin layer 13 and a coating liquid of an organic solvent as required are applied to one surface of the substrate 11, and then the coating film is dried and cured. Resin layer 13. Further, after the resin composition containing the second resin layer 14 and the coating liquid of the organic solvent as needed are applied to the other surface of the substrate 11, the coating film is dried and cured to form a second resin layer. 14. Next, a coating liquid containing a release agent composition and an organic solvent as needed is applied to the surface of the resin layer 13 opposite to the substrate 11, and then the release agent is cured by drying and heating. A release agent layer 12 is formed. Thereby, the peeling film 1C was obtained. Further, the second resin layer 14 may be formed earlier than the resin layer 13, or may be formed after the release agent layer 12.

在上述方法,樹脂組成物含有活性能量線硬化性成分時,係藉由對由樹脂組成物所構成之塗膜照射活性能量線而使其硬化。作為活性能量線,能夠使用,例如,在電磁波或荷電粒子線之中,具有能量子者,具體而言,係能夠使用紫外線、電子束等。特別是以操作較容易的紫外線為佳。紫外線的照射,係能夠使用高壓水銀燈、氙燈等而進行,紫外線的照射量係以照度為50~1000mW/cm2左右為佳。又,光量係以 50~10000mJ/cm2為佳,以80~5000mJ/cm2為較佳,以200~2000mJ/cm2為特佳。另一方面,電子束的照射係能夠使用電子束加速器等而進行,電子束的照射量係以10~1000krad左右為佳。又,對塗膜之活性能量線的照射,亦可在氮氣等惰性氣體的環境下進行。 In the above method, when the resin composition contains the active energy ray-curable component, the coating film composed of the resin composition is cured by irradiating the active energy ray. As the active energy ray, for example, an energy source can be used among electromagnetic waves or charged particle rays, and specifically, ultraviolet rays, electron beams, or the like can be used. In particular, it is preferable to use ultraviolet rays which are easy to handle. The irradiation of ultraviolet rays can be carried out using a high-pressure mercury lamp, a xenon lamp or the like, and the irradiation amount of the ultraviolet rays is preferably about 50 to 1000 mW/cm 2 . Further, the amount of light is preferably 50 to 10000 mJ/cm 2 , more preferably 80 to 5,000 mJ/cm 2 , and particularly preferably 200 to 2,000 mJ/cm 2 . On the other hand, the irradiation of the electron beam can be performed using an electron beam accelerator or the like, and the irradiation amount of the electron beam is preferably about 10 to 1000 krad. Further, the irradiation of the active energy ray of the coating film may be carried out in an atmosphere of an inert gas such as nitrogen.

又,樹脂組成物含有熱硬化性成分時,係藉由將由樹脂組成物所構成之塗膜加熱而使其硬化。此時的加熱溫度係以90~140℃為佳,特別是以110~130℃為佳。又,加熱時間係以10~120秒左右為佳,特別是以50~70秒左右為佳。 Further, when the resin composition contains a thermosetting component, it is cured by heating a coating film composed of the resin composition. The heating temperature at this time is preferably from 90 to 140 ° C, particularly preferably from 110 to 130 ° C. Further, the heating time is preferably about 10 to 120 seconds, and particularly preferably about 50 to 70 seconds.

在上述方法,作為塗佈液的塗佈方法,能夠使用,例如,凹版塗佈法、棒塗佈法、噴霧塗佈法、旋轉塗佈法、刮刀塗佈法、輥塗佈法、模塗佈法等。 In the above method, as the coating method of the coating liquid, for example, a gravure coating method, a bar coating method, a spray coating method, a spin coating method, a knife coating method, a roll coating method, or a die coating method can be used. Bufa and so on.

作為上述的有機溶劑,係沒有特別限制,能夠使用各式各樣者。能夠使用,例如,以甲苯、己烷、庚烷等的烴化合物為首、以及異丙醇、異丁醇、丙酮、乙酸乙酯、甲基乙基酮、甲基異丁基酮及該等混合物等。 The above organic solvent is not particularly limited, and various types can be used. It is possible to use, for example, a hydrocarbon compound such as toluene, hexane, heptane or the like, and isopropanol, isobutanol, acetone, ethyl acetate, methyl ethyl ketone, methyl isobutyl ketone and the like. Wait.

7.陶瓷生片製造工程用剝離膜的使用方法 7. Method for using release film for ceramic green sheet manufacturing engineering

為了製造陶瓷生片,能夠使用剝離膜1A、1B、1C。具體而言,能夠藉由對剝離劑層12的剝離面,塗佈含有鈦酸鋇、氧化鈦等的陶瓷材料之陶瓷漿料後,使該陶瓷漿料乾燥而到陶瓷生片。塗佈係能夠使用,例如,縫模(slot die)塗佈方式、刮刀片方式等而進行。 In order to manufacture a ceramic green sheet, the release films 1A, 1B, and 1C can be used. Specifically, a ceramic slurry containing a ceramic material such as barium titanate or titanium oxide can be applied to the release surface of the release agent layer 12, and then the ceramic slurry can be dried to a ceramic green sheet. The coating system can be used, for example, by a slot die coating method, a doctor blade method, or the like.

作為在陶瓷漿料所含有的黏結劑成分之例子,可舉出丁醛系樹脂、丙烯酸系樹脂等。又,作為在陶瓷漿料所含 有的溶劑之例子,可舉出有機溶劑、水系溶劑等。 Examples of the binder component contained in the ceramic slurry include a butyral resin, an acrylic resin, and the like. Also, as contained in the ceramic slurry Examples of the solvent include organic solvents, aqueous solvents, and the like.

在剝離膜1A、1B、1C,藉由使用含有聚有機矽氧烷之剝離劑組成物而形成剝離劑層12,且剝離膜1A、1B、1C係具有適當的彈性,因而能夠發揮優異的剝離性。而且,在剝離劑層12,因為聚有機矽氧烷係被關入由三聚氰胺樹脂硬化而形成之網孔狀結構中,所以聚有機矽氧烷的自由移動受到限制,因此能夠抑制聚有機矽氧烷從剝離劑層12至陶瓷生片的遷移。藉此,將所成形的陶瓷生片層積時,陶瓷生片彼此的接著力提升,且能夠抑制在陶瓷生片之間產生偏移。又,在具備樹脂層13之剝離膜1B、1C,藉由基材11表面的凹凸係被樹脂層13吸收,因而在剝離劑層12的剝離面能夠達成優異的平滑性。而且,剝離劑層12係由含有三聚氰胺樹脂之剝離劑組成物所形成,因為在剝離劑層12與樹脂層13之間的密著性成為優異,所以能夠抑制剝離劑層12從樹脂層13產生剝落。 In the release films 1A, 1B, and 1C, the release agent layer 12 is formed by using a release agent composition containing polyorganosiloxane, and the release films 1A, 1B, and 1C have appropriate elasticity, so that excellent release can be exhibited. Sex. Further, in the release agent layer 12, since the polyorganosiloxane is incorporated in a mesh-like structure formed by hardening of the melamine resin, the free movement of the polyorganosiloxane is restricted, and thus the polyorganosiloxane can be suppressed. The migration of the alkane from the stripper layer 12 to the ceramic green sheet. Thereby, when the formed ceramic green sheets are laminated, the adhesion between the ceramic green sheets is improved, and the occurrence of offset between the ceramic green sheets can be suppressed. Further, in the release films 1B and 1C including the resin layer 13, since the unevenness on the surface of the substrate 11 is absorbed by the resin layer 13, excellent smoothness can be achieved on the release surface of the release agent layer 12. Further, the release agent layer 12 is formed of a release agent composition containing a melamine resin, and since the adhesion between the release agent layer 12 and the resin layer 13 is excellent, the release agent layer 12 can be prevented from being generated from the resin layer 13. Peel off.

以上說明的實施形態,係為了容易理解本發明而記載,而不是為了限定本發明而記載。因而,在上述實施形態所揭示的各要素,其宗旨亦包含屬於本發明的技術範圍之全部的設計變更和均等物。 The embodiments described above are described in order to facilitate the understanding of the present invention and are not intended to limit the present invention. Therefore, the respective elements disclosed in the above embodiments are intended to include all design changes and equivalents belonging to the technical scope of the invention.

例如,在剝離膜1A之基材11與剝離劑層12之間,在剝離膜1B、1C之基材11與樹脂層13之間,或是在樹脂層13與剝離劑層12之間,或是在剝離膜1C之基材11與第2樹脂層14之間,亦可設置抗靜電層等的其它層。 For example, between the substrate 11 of the release film 1A and the release agent layer 12, between the substrate 11 of the release film 1B, 1C and the resin layer 13, or between the resin layer 13 and the release agent layer 12, or Other layers such as an antistatic layer may be provided between the substrate 11 of the release film 1C and the second resin layer 14.

[實施例] [Examples]

以下,藉由實施例等而更具體地說明本發明,但 是本發明的範圍係不被該等實施例等限定。 Hereinafter, the present invention will be more specifically described by way of examples, etc., but The scope of the present invention is not limited by the embodiments and the like.

[實施例1] [Example 1]

(1)樹脂層的形成 (1) Formation of resin layer

將作為活性能量線硬化性成分之新戊四醇三丙烯酸酯(新中村化學公司製,商品名:A-TMM-3L)100質量份(換算為固體成分之量;以下相同)、及作為光聚合起始劑之2-甲基-1[4-(甲硫基)苯基]-2-嗎啉丙烷-1-酮(BASF Japan公司製,商品名:IRGACURE907,α-胺烷基苯酮系化合物)10質量份,在使用作為溶劑之甲苯中混合,以得到固體成分濃度15質量%的樹脂組成物之塗佈液。 100 parts by mass of neopentyl alcohol triacrylate (trade name: A-TMM-3L, manufactured by Shin-Nakamura Chemical Co., Ltd.) as an active energy ray-curable component (in terms of solid content; the same applies hereinafter), and as light 2-methyl-1[4-(methylthio)phenyl]-2-morpholinanpropan-1-one (manufactured by BASF Japan Co., Ltd., trade name: IRGACURE 907, α-aminoalkyl benzophenone) 10 parts by mass of the compound) was mixed with toluene as a solvent to obtain a coating liquid of a resin composition having a solid concentration of 15% by mass.

將所得到的樹脂組成物之塗佈液,使用繞線棒#6均勻地塗佈在作為基材之雙軸延伸聚對苯二甲酸乙二酯薄膜(厚度:31μm)之算術平均粗糙度Ra為10nm、且最大突起高度Rp為80nm之面上。接著,使塗膜在80℃乾燥60秒鐘,在氮氣環境下(氧濃度1%以下),使用無電極燈照射紫外線(照度:150mW/cm2,光量:約350mJ/cm2)而使樹脂組成物硬化,以得到在基材上層積有厚度500nm的樹脂層之積層體。 The coating liquid of the obtained resin composition was uniformly applied to the arithmetic mean roughness Ra of the biaxially-oriented polyethylene terephthalate film (thickness: 31 μm) as a substrate by using a wire bar #6. It is 10 nm and the maximum protrusion height Rp is 80 nm. Next, the coating film was dried at 80 ° C for 60 seconds, and irradiated with ultraviolet light (illuminance: 150 mW/cm 2 , light amount: about 350 mJ/cm 2 ) in an airless lamp (oxygen concentration: 1% or less) to make the resin. The composition was cured to obtain a laminate in which a resin layer having a thickness of 500 nm was laminated on a substrate.

(2)剝離劑層的形成 (2) Formation of release agent layer

將亞胺基型甲基化三聚氰胺樹脂(日本CARBIDE工業公司製,商品名:MX730,質量平均分子量:1508)100質量份、聚二甲基矽氧烷(信越化學工業公司製,商品名:X-62-1387,質量平均分子量:2000)10質量份、及作為酸觸媒之對甲苯磺酸(日立化成POLYMER公司製,商品名:Drier 900)8質量份,在作為溶劑的甲苯中混合,以得到固體成分濃度2質量%的剝 離劑組成物之塗佈液。 Methylated melamine resin (manufactured by Japan CARBIDE INDUSTRIAL CO., LTD., trade name: MX730, mass average molecular weight: 1508), 100 parts by mass, polydimethyl methoxy oxane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name: X -62-1387, mass average molecular weight: 2000) 10 parts by mass, and 8 parts by mass of p-toluenesulfonic acid (manufactured by Hitachi Chemical Co., Ltd., trade name: Drier 900) as an acid catalyst, and mixed in toluene as a solvent. To obtain a solid content concentration of 2% by mass A coating solution of the release agent composition.

將所得到的剝離劑組成物之塗佈液,使用繞線棒#6均勻地塗佈在上述積層體的樹脂層之與基材為相反側的面上。接著,將塗膜於120℃加熱乾燥60秒鐘,使剝離劑組成物硬化,而在上述積層體上形成厚度100nm的剝離劑層。藉由以上而得到剝離膜。 The coating liquid of the obtained release agent composition was uniformly applied to the surface of the resin layer of the laminated body opposite to the substrate by using a wire bar #6. Next, the coating film was dried by heating at 120 ° C for 60 seconds to cure the release agent composition, and a release agent layer having a thickness of 100 nm was formed on the laminate. A release film was obtained by the above.

[實施例2] [Embodiment 2]

使用將亞胺基型甲基化三聚氰胺樹脂(日本CARBIDE工業公司製,商品名:MX730,質量平均分子量:1508)100質量份、含聚酯改性羥基的聚二甲基矽氧烷(BYK-Chemie Japan公司製,商品名:BYK-370,質量平均分子量:5000)0.1質量份、及作為酸觸媒的對甲苯磺酸(日立化成POLYMER公司製,商品名:Drier 900)8質量份,在作為溶劑的甲苯中混合,而調製成固體成分濃度15質量%的剝離劑組成物之塗佈液,而且,藉由將該塗膜於120℃加熱60秒鐘使其乾燥,以形成樹脂層,除此之外,係與實施例1同樣地進行而製造剝離膜。 100 parts by mass of an imido group-type methylated melamine resin (manufactured by JABIDE INDUSTRIAL CO., LTD., trade name: MX730, mass average molecular weight: 1508), polydimethylsiloxane containing a polyester-modified hydroxyl group (BYK-) Manufactured by Chemie Japan Co., Ltd., trade name: BYK-370, mass average molecular weight: 5000) 0.1 parts by mass, and p-toluenesulfonic acid (manufactured by Hitachi Chemical Co., Ltd., trade name: Drier 900) as an acid catalyst, 8 parts by mass, The mixture was mixed with toluene as a solvent to prepare a coating liquid of a release agent composition having a solid concentration of 15% by mass, and dried by heating the coating film at 120 ° C for 60 seconds to form a resin layer. A release film was produced in the same manner as in Example 1 except for the above.

[實施例3] [Example 3]

將在剝離劑組成物中之聚二甲基矽氧烷的含量變更成為30質量份,除此之外,係與實施例1同樣地進行而得到剝離膜。 A release film was obtained in the same manner as in Example 1 except that the content of the polydimethyl siloxane in the release agent composition was changed to 30 parts by mass.

[實施例4] [Example 4]

將在剝離劑組成物中之聚二甲基矽氧烷的含量變更成為40質量份,除此之外,係與實施例1同樣地進行而得到剝離膜。 A release film was obtained in the same manner as in Example 1 except that the content of the polydimethyl siloxane in the release agent composition was changed to 40 parts by mass.

[實施例5] [Example 5]

將在剝離劑組成物中之10質量份的聚二甲基矽氧烷變更 成為30質量份之含聚酯改性羥基的聚二甲基矽氧烷(BYK-Chemie Japan公司製,商品名:BYK-370,質量平均分子量:5000),除此之外,係與實施例1同樣地進行而得到剝離膜。 Change 10 parts by mass of polydimethyl siloxane in the stripper composition 30 parts by mass of a polyester-modified hydroxyl group-containing polydimethyl siloxane (manufactured by BYK-Chemie Japan Co., Ltd., trade name: BYK-370, mass average molecular weight: 5000), and other examples and examples 1 was carried out in the same manner to obtain a release film.

[比較例1] [Comparative Example 1]

將新戊四醇三丙烯酸酯(新中村化學公司製,商品名:A-TMM-3L)100質量份、聚二甲基矽氧烷(信越化學工業公司製,商品名:X-62-1387,質量平均分子量:2000)10質量份、及作為光聚合起始劑之2-甲基-1[4-(甲硫基)苯基]-2-嗎啉丙烷-1-酮(BASF Japan公司製,商品名:IRGACURE907,α-胺烷基苯酮系化合物)10質量份,在作為溶劑的甲苯中混合,以得到固體成分濃度15質量%的塗佈液。 100 parts by mass of neopentyl alcohol triacrylate (trade name: A-TMM-3L, manufactured by Shin-Nakamura Chemical Co., Ltd.), polydimethyl methoxy hydride (manufactured by Shin-Etsu Chemical Co., Ltd., trade name: X-62-1387 , mass average molecular weight: 2000) 10 parts by mass, and 2-methyl-1[4-(methylthio)phenyl]-2-morpholinepropan-1-one as a photopolymerization initiator (BASF Japan Corporation) 10 parts by mass of the product name: IRGACURE 907, α-aminoalkylphenone compound) was mixed with toluene as a solvent to obtain a coating liquid having a solid content concentration of 15% by mass.

將所得到的塗佈液,使用繞線棒#6均勻地塗佈在作為基材之雙軸延伸聚對苯二甲酸乙二酯薄膜(厚度:31μm)之算術平均粗糙度Ra為10nm、且最大突起高度Rp為80nm之面上。接著,使塗膜在80℃乾燥60秒鐘,在氮氣環境下(氧濃度1%以下),使用無電極燈照射紫外線(照度:150mW/cm2,光量:約350mJ/cm2)而使樹脂組成物硬化,以得到在基材上層積有厚度500nm的樹脂層之積層體。 The coating liquid obtained by uniformly applying the wound bar #6 to the biaxially-oriented polyethylene terephthalate film (thickness: 31 μm) as a substrate has an arithmetic mean roughness Ra of 10 nm, and The maximum protrusion height Rp is 80 nm. Next, the coating film was dried at 80 ° C for 60 seconds, and irradiated with ultraviolet light (illuminance: 150 mW/cm 2 , light amount: about 350 mJ/cm 2 ) in an airless lamp (oxygen concentration: 1% or less) to make the resin. The composition was cured to obtain a laminate in which a resin layer having a thickness of 500 nm was laminated on a substrate.

[比較例2] [Comparative Example 2]

將加成型聚矽氧系剝離劑(TORAY.DOW CORNING公司製,商品名:CF-2172,質量平均分子量:300000)100質量份、及白金系觸媒(TORAY.DOW CORNING公司製,BY24-835)2質量份,在作為溶劑的甲苯中進行混合,而調製成之固體成分 濃度1.5質量%的剝離劑組成物的塗佈液,除此之外,係與實施例1同樣地進行而製造剝離膜。 100 parts by mass of a polyfluorene-based stripper (trade name: CF-2172, mass average molecular weight: 300,000), and a platinum-based catalyst (TORAY.DOW CORNING) 2 parts by mass, mixed in toluene as a solvent, and prepared into a solid component A release film was produced in the same manner as in Example 1 except that the coating liquid of the release agent composition having a concentration of 1.5% by mass was used.

[試驗例1](被膜彈性模數的測定) [Test Example 1] (Measurement of film elastic modulus)

將實施例及比較例所得到的剝離膜裁斷成為10mm×10mm,接著,使用兩液系環氧接著劑,將經裁斷的剝離膜之基材背面固定在接著於鋁製底座之玻璃板上。然後,使用微小硬度評價裝置(MTS公司製,Nano Indenter SA2)在壓頭的最大壓入深度100nm、應變速度0.05sec-1、位移振幅2nm、振動頻率45Hz,進行奈米壓痕試驗,以測定上述剝離膜的被膜彈性模數。將結果顯示在表1。 The release film obtained in the examples and the comparative examples was cut into 10 mm × 10 mm, and then the back surface of the cut release film was fixed to a glass plate attached to an aluminum base using a two-liquid epoxy adhesive. Then, using a microhardness evaluation apparatus (Nano Indenter SA2, manufactured by MTS Co., Ltd.), a nanoindentation test was performed at a maximum indentation depth of 100 nm, a strain rate of 0.05 sec -1 , a displacement amplitude of 2 nm, and a vibration frequency of 45 Hz. The film elastic modulus of the release film. The results are shown in Table 1.

[試驗例2](聚有機矽氧烷遷移性的評價) [Test Example 2] (Evaluation of mobility of polyorganosiloxane)

將丙烯酸黏著膠帶(日東電工公司製,商品名:31B TAPE)貼附在實施例及比較例製造後、於常溫保管48小時後的剝離膜之剝離劑層的剝離面,且保管24小時。 An acrylic adhesive tape (manufactured by Nitto Denko Corporation, trade name: 31B TAPE) was attached to the peeling surface of the release agent layer of the release film which was stored at room temperature for 48 hours after the production of the examples and the comparative examples, and stored for 24 hours.

隨後,將剝離膜從上述黏著膠帶剝離,針對在該黏著膠帶之與剝離劑層表面接觸之面,基於使用X射線光電子光譜分析法(XPS)所測定之矽原子(Si)、碳原子(C)及氧原子(O)的量(XPS統計數),且依照下述式,算出矽原子比率(原子%)。 Subsequently, the release film is peeled off from the above adhesive tape, and the germanium atom (Si) and carbon atom (C) are determined based on the surface of the adhesive tape that is in contact with the surface of the release agent layer by X-ray photoelectron spectroscopy (XPS). And the amount of oxygen atom (O) (XPS statistic), and the atomic ratio (atomic %) was calculated according to the following formula.

矽原子比率(原子%)=[(Si元素量)/{(C元素量)+(O元素量)+(Si元素量)}]×100 Helium atomic ratio (atomic %) = [(Si element amount) / {(C element amount) + (O element amount) + (Si element amount)}] × 100

作為測定裝置,係使用Perkinelmer公司製的ESCA 5600,測定條件係如以下。 As the measuring device, ESCA 5600 manufactured by Perkinelmer Co., Ltd. was used, and the measurement conditions were as follows.

X射線源:Mg standard(15kv,400W) X-ray source: Mg standard (15kv, 400W)

取出角度:45。 Take out the angle: 45.

測定時間:3分鐘 Measurement time: 3 minutes

測定元素:矽原子(Si)、碳原子(C)、氧原子(O) Determination of elements: germanium atom (Si), carbon atom (C), oxygen atom (O)

然後,基於以下的判斷基準而進行評價聚有機矽氧烷遷移性。將矽原子比率及評價結果顯示在表1。 Then, the polyorganooxymethane mobility was evaluated based on the following criteria. The atomic ratio and the evaluation results are shown in Table 1.

◎…矽原子比率為小於0.35原子% ◎...矽 atomic ratio is less than 0.35 atomic %

○…矽原子比率為0.35原子%以上、小於0.5原子% ○...矽 atomic ratio is 0.35 atom% or more and less than 0.5 atom%

△…矽原子比率為0.5原子%以上、小於1.0原子% △...矽 atomic ratio is 0.5 atom% or more and less than 1.0 atom%

×…矽原子比率為1.0原子%以上 ×...矽 atomic ratio is 1.0 atom% or more

[試驗例3](在構成剝離膜之層間之密著性的評價) [Test Example 3] (Evaluation of adhesion between layers constituting the release film)

將實施例1~5及比較例2在形成剝離劑層前之樹脂層之與基材為相反側的面(以下有稱為「樹脂層表面」之情形)、以及實施例及比較例所得到之剝離膜的剝離面,使用手指摩擦10次,且在螢光燈下目視判斷有無產生混濁(smear)及脫落。然後,基於以下的評價基準,評價在構成剝離膜之層間之密著性。將結果顯示在表1。 In Examples 1 to 5 and Comparative Example 2, the surface of the resin layer before the formation of the release agent layer on the opposite side to the substrate (hereinafter referred to as "the surface of the resin layer"), and the examples and comparative examples were obtained. The peeling surface of the peeling film was rubbed 10 times with a finger, and it was visually judged by a fluorescent lamp to generate smear and fall off. Then, the adhesion between the layers constituting the release film was evaluated based on the following evaluation criteria. The results are shown in Table 1.

○...在摩擦樹脂層表面及剝離面之任一方,均不產生混濁及脫落,且密著性為良好 ○. . . No turbidity or shedding occurs on either the surface of the rubbing resin layer or the peeling surface, and the adhesion is good.

×...摩擦樹脂層表面及剝離面的至少一方時,產生混濁及脫落的至少一方,且密著性不良 ×. . . When at least one of the surface of the resin layer and the peeling surface is rubbed, at least one of turbidity and peeling occurs, and the adhesion is poor.

[試驗例4](剝離力的測定) [Test Example 4] (Measurement of peeling force)

在鈦酸鋇(BaTiO3;堺化學工業公司製,商品名:BT-03)100質量份、聚乙烯基丁醛(積水化學工業公司製,商品名:S-LEC B.KBM-2)8質量份、及苯二甲酸二辛酯(關東化學公司製,商品名:Di-octylphthalate鹿1級)1.4質量份,添加甲苯69質 量份及乙醇46質量份,使用球磨機使其混合分散,而調製陶瓷漿料。 100 parts by mass of barium titanate (BaTiO 3 ; 堺 Chemical Industry Co., Ltd., trade name: BT-03), polyvinyl butyral (product name: S-LEC B.KBM-2, manufactured by Sekisui Chemical Co., Ltd.) 1.4 parts by mass of di-octyl phthalate (manufactured by Kanto Chemical Co., Ltd., trade name: Di-octylphthalate deer), adding 69 parts by mass of toluene and 46 parts by mass of ethanol, and mixing and dispersing using a ball mill to prepare Ceramic slurry.

在實施例及比較例製造後,於常溫保管48小時後之剝離膜,使用塗佈器將上述陶瓷漿料均勻地塗佈在剝離劑層的剝離面,隨後,使用乾燥機於80℃使其乾燥1分鐘。藉此,在剝離膜上得到厚度3μm的陶瓷生片。如此進行而製造附陶瓷生片的剝離膜。 After the production of the examples and the comparative examples, the release film was stored at room temperature for 48 hours, and the ceramic slurry was uniformly applied to the release surface of the release agent layer using an applicator, and then dried at 80 ° C using a dryer. Dry for 1 minute. Thereby, a ceramic green sheet having a thickness of 3 μm was obtained on the release film. In this manner, a release film with a ceramic green sheet was produced.

將該附陶瓷生片的剝離膜,在室溫23度、相對濕度50的環境下靜置24小時。接著,對在陶瓷生片之與剝離膜為相反側的面,貼附丙烯酸黏著膠帶(日東電工公司製,商品名:31B TAPE),且在該狀態下裁斷成為20mm寬度。將其作為測定試樣。 The release film of the ceramic green sheet was allowed to stand in an environment of 23 ° C and a relative humidity of 50 for 24 hours. Next, an acrylic adhesive tape (manufactured by Nitto Denko Corporation, trade name: 31B TAPE) was attached to the surface of the ceramic green sheet opposite to the release film, and was cut to a width of 20 mm in this state. This was used as a measurement sample.

將該測定試樣的黏著膠帶側固定在平板,使用拉伸試驗機(島津製作所公司製,製品名:AG-IS500N),在180°的剝離角度、100mm/分鐘的剝離速度,將剝離膜從陶瓷生片剝離,且測定用以剝離所需要的力量(剝離力;mN/20mm)。將結果顯示在表1。 The adhesive tape side of the measurement sample was fixed to a flat plate, and a peeling film was removed from the peeling angle of 180° and a peeling speed of 100 mm/min using a tensile tester (product name: AG-IS500N, manufactured by Shimadzu Corporation). The ceramic green sheets were peeled off, and the force required for peeling (peeling force; mN/20 mm) was measured. The results are shown in Table 1.

[試驗例5](表面粗糙度的測定) [Test Example 5] (Measurement of surface roughness)

將雙面膠帶貼附在玻璃板,將實施例及比較例所得到的剝離膜,以與剝離劑層為相反側的面成為玻璃板側之方式,透過上述雙面膠帶而固定在玻璃板。針對該剝離膜的剝離面,使用光干渉式表面形狀觀察裝置(Bruker AXS公司製,製品名:WYKO-1100),在PSI模式以50倍率觀察最大突起高度(Rp;nm),基於在所得到的表面形狀影像之91.2×119.8μm的範圍 進行測定。將結果顯示在表1。 The double-sided tape was attached to the glass plate, and the release film obtained in the examples and the comparative examples was fixed to the glass plate through the double-sided tape so that the surface opposite to the release agent layer became the glass plate side. For the peeling surface of the release film, a light-drying surface shape observation device (manufactured by Bruker AXS Co., Ltd., product name: WYKO-1100) was used, and the maximum protrusion height (Rp; nm) was observed at a magnification of 50 in the PSI mode, based on the obtained Surface shape image of 91.2×119.8μm range The measurement was carried out. The results are shown in Table 1.

從表1能夠清楚明白,實施例所得到的剝離膜,係在從陶瓷生片剝離時,能夠使用適當的剝離力而剝離。而且,得知在接觸實施例所得到的剝離膜後之丙烯酸黏著膠帶的接觸面,矽原子比率相對較小。亦即,得知對於使用實施例的剝離膜所形成的陶瓷生片,能夠有效地抑制聚有機矽氧烷從剝離劑層之遷移。藉此,預料製造積層陶瓷製品時,能夠抑制以聚有機矽氧烷的遷移為主要原因之在陶瓷生片的積層物之層間於面方向的偏移。又,得知在實施例所得到的剝離膜,各層的密著性為充分地較高,且剝離劑層不容易從樹脂層產生剝落。而且,能夠確認相較於未設置樹脂層之比較例1的剝離膜,設置有樹脂層之實施例所得到的剝離膜,係剝離面的最大突起高度Rp相對較低,且平滑性亦較優異。 As is clear from Table 1, the release film obtained in the examples can be peeled off by using an appropriate peeling force when peeled off from the ceramic green sheets. Further, it was found that the contact area of the acrylic adhesive tape after the release film obtained in the examples was relatively small. That is, it was found that the migration of the polyorganosiloxane to the release agent layer can be effectively suppressed for the ceramic green sheet formed by using the release film of the embodiment. As a result, it is expected that when the laminated ceramic product is produced, it is possible to suppress the shift in the plane direction between the layers of the laminated body of the ceramic green sheet due to the migration of the polyorganosiloxane. Further, it was found that in the release film obtained in the examples, the adhesion of each layer was sufficiently high, and the release agent layer was less likely to peel off from the resin layer. Further, it was confirmed that the release film obtained in the example in which the resin layer was provided as compared with the release film of Comparative Example 1 in which the resin layer was not provided, the maximum protrusion height Rp of the release surface was relatively low, and the smoothness was excellent. .

另一方面,得知在接觸比較例所得到之剝離膜後 之丙烯酸黏著膠帶的接觸面,矽原子比率相對較大,而且無法充分地抑制聚有機矽氧烷遷移至使用該剝離膜而形成之陶瓷生片。又,針對比較例2的剝離膜,得知各層的密著性較低,而容易產生剝落。而且,相較於實施例的剝離膜,針對不具有樹脂層之比較例1的剝離膜,能夠確認剝離面的最大突起高度Rp較高且平滑性較低。 On the other hand, it was found that after contacting the release film obtained in the comparative example, The contact surface of the acrylic adhesive tape has a relatively large atomic ratio, and does not sufficiently inhibit the migration of the polyorganosiloxane to the ceramic green sheet formed using the release film. Further, with respect to the release film of Comparative Example 2, it was found that the adhesion of each layer was low, and peeling was likely to occur. Further, compared with the release film of the example, the release film of Comparative Example 1 having no resin layer was able to confirm that the maximum protrusion height Rp of the release surface was high and the smoothness was low.

產業上之可利用性 Industrial availability

本發明的陶瓷生片製造工程用剝離膜,係適合於成形聚有機矽氧烷的遷移較少之陶瓷生片。 The release film for ceramic green sheet manufacturing engineering of the present invention is suitable for forming ceramic green sheets having less migration of polyorganosiloxane.

1A‧‧‧陶瓷生片製造工程用剝離膜 1A‧‧‧Removal film for ceramic green sheet manufacturing engineering

11‧‧‧基材 11‧‧‧Substrate

12‧‧‧剝離劑層 12‧‧‧ Stripper layer

Claims (8)

一種陶瓷生片製造工程用剝離膜,其係具備基材、及設置在前述基材的一側之剝離劑層之陶瓷生片製造工程用剝離膜,其特徵在於:前述剝離劑層係將含有三聚氰胺樹脂及聚有機矽氧烷之剝離劑組成物硬化而成者,藉由奈米壓痕試驗,在從前述剝離劑層之與前述基材為相反側的面所測定之被膜彈性模數為3.5~7.0GPa。 A release film for a ceramic green sheet manufacturing process, comprising: a base material; and a release film for a ceramic green sheet manufacturing process provided in a release agent layer provided on one side of the base material, wherein the release agent layer is contained The composition of the release agent of the melamine resin and the polyorganosiloxane is hardened, and the film elastic modulus measured from the surface of the release agent layer opposite to the substrate is 3.5 by the nanoindentation test. ~7.0GPa. 如申請專利範圍第1項所述之陶瓷生片製造工程用剝離膜,其中前述聚有機矽氧烷的質量平均分子量為500~20000。 The release film for ceramic green sheet manufacturing engineering according to claim 1, wherein the polyorganosiloxane has a mass average molecular weight of 500 to 20,000. 如申請專利範圍第1項所述之陶瓷生片製造工程用剝離膜,其中相對於三聚氰胺樹脂100質量份,前述聚有機矽氧烷之在前述剝離劑組成物中的含量為0.1~30質量份。 The release film for a ceramic green sheet manufacturing process according to claim 1, wherein the polyorganosiloxane is contained in the release agent composition in an amount of 0.1 to 30 parts by mass based on 100 parts by mass of the melamine resin. . 如申請專利範圍第1項所述之陶瓷生片製造工程用剝離膜,其中在前述剝離劑組成物所含有之前述三聚氰胺樹脂,係含有甲基化三聚氰胺及/或亞胺基羥甲基三聚氰胺。 The release film for a ceramic green sheet manufacturing process according to the first aspect of the invention, wherein the melamine resin contained in the release agent composition contains methylated melamine and/or iminomethylol melamine. 如申請專利範圍第1項所述之陶瓷生片製造工程用剝離膜,其中在前述基材與前述剝離劑層之間進一步具備樹脂層。 A release film for a ceramic green sheet manufacturing process according to claim 1, wherein a resin layer is further provided between the substrate and the release agent layer. 如申請專利範圍第5項所述之陶瓷生片製造工程用剝離膜,其中前述樹脂層係將含有活性能量線硬化性成分或熱硬化性成分之樹脂組成物硬化而成者。 The release film for a ceramic green sheet manufacturing process according to the fifth aspect of the invention, wherein the resin layer is obtained by curing a resin composition containing an active energy ray-curable component or a thermosetting component. 如申請專利範圍第6項所述之陶瓷生片製造工程用剝離 膜,其中前述活性能量線硬化性成分為多官能丙烯酸酯。 Stripping of ceramic green sheet manufacturing engineering as described in item 6 of the patent application scope a film wherein the aforementioned active energy ray-curable component is a polyfunctional acrylate. 如申請專利範圍第1項所述之陶瓷生片製造工程用剝離膜,其中進一步具備設置在前述基材之與前述剝離劑層為相反側之第2樹脂層。 The release film for a ceramic green sheet manufacturing process according to the first aspect of the invention, further comprising a second resin layer provided on the substrate opposite to the release agent layer.
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