TW201723405A - Industrial furnace - Google Patents

Abstract

This invention provides for an industrial furnace capable of heating and cooling efficiently and being compactly structured in size. An industrial furnace includes a heating passage 4 provided within a furnace body 2, the heating passage having a heater 3 and being capable of being connected with a heat treatment cavity la where a work is heat-treated, a cooling passage 6 provdide within the furnace body, the cooling passage having a cooler 5 and being capable of being connected with a heat treatment cavity where a work is heat-treated, a damper 7selectively cutting off the communication between the heat treatment cavity and either one of the heat passage or cooling passage and establishing the communication between the heat treatment cavity and the other, a fan 8 provided within the furnace body for circulating the air in the furnace body, and a thermal insulator ceiling 6a provided between the heating passage and the cooling passage.

Description

Industrial furnace

The present invention relates to a small industrial furnace that can be efficiently heated and cooled.

In an industrial furnace for heat-treating a workpiece, there is an industrial furnace having a cooling function by a cooler or the like for cooling, temperature adjustment, or temperature change after heating the workpiece. For example, the "cleaning furnace" of Patent Document 1 is a clean furnace that realizes almost no heat loss and has high clean performance and further reduces the burden on equipment, and is installed in a pipe and a furnace outside the furnace. The first connection portion and the second connection portion having the same pressure of the ambient gas are connected so that the first connection portion and the second connection portion communicate with each other, and the duct is provided with a cooler and a cooler fan. Since the cooler is disposed outside the furnace, there is almost no heat loss, and further, since the throttle is not provided, dust is not generated and high cleaning performance is obtained. Further, when the supply of the cooling water is stopped during heating, since the cooler is stopped by the fan, there is no need for a pipe for discharging the steam to the clean room. In Patent Document 1, a pipe that is provided outside the furnace and that is provided with a fan for a cooler and a cooler is connected to the inside of the furnace by two connecting portions.

Further, Patent Documents 2 and 3 are known. The "batch furnace" of Patent Document 2 is directed to a batch furnace that provides power saving and can be rapidly cooled, and is configured to provide a water-cooled fin cooler by bypassing a part of the passages on the hot air circulation path and switch by Festival The damper selects a passage through the bypass of the water-cooled fin cooler and a portion of the bypass. The "cleaning furnace" of the patent document 3 is a clean furnace which heat-treats in the high-temperature ambient gas heated up to about 500 degreeC, and it is set as the environmental- Heated by a heater and passed through a filter and a heat treatment chamber while circulating, and the heat treatment chamber is placed in a clean atmosphere in a clean atmosphere gas, and heat is set as the filter. a heat-resistant filter having a temperature of about 500 ° C. On the other hand, a bypass passage for cooling is provided in a portion of the circulation path of the ambient gas and a cooler is disposed in the bypass passage, and is disposed as a circulation passage and a bypass passage. The first and second switching boards of the switching path switching means. In the above-described Patent Documents 2 and 3, a substantially chiller is provided in the furnace, and a throttle passage that switches between a flow path through a portion where the cooler is provided and a flow path through a portion where the cooler is not provided is provided.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2007-271126

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2000-329474

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2004-353928

In the case of the above-described furnace, when a pipe having a fan for a cooler and a cooler is provided outside the furnace, a wide installation space corresponding to the size of the pipe protruding to the outside of the furnace is required. Further, in the case where the cooler and the heater are arranged in series with respect to the airflow in the heating furnace, there is a problem that if the workpiece is added in the furnace After the heat is switched, the flow path is switched by the throttle valve for cooling, and the air passing through the heater in the high temperature state that has not been cooled flows to the cooler side, or the air cooled by the cooler passes through the high temperature state that has not been cooled. When the heater side is equal to the other, the cooling efficiency is lowered, and when heating is performed after cooling, the heating efficiency is also lowered.

The present invention has been made in view of the above-described problems, and an object of the invention is to provide a small industrial furnace that can efficiently perform heating and cooling.

An industrial furnace according to the present invention is characterized by comprising: a heating flow path which is provided in the furnace body, has a heater, and is connectable with a heat treatment space for heat-treating the workpiece; and a cooling flow path is provided in the above The furnace body has a cooler and is connectable with the heat treatment space; the throttle valve selectively closes any one of the heating flow path and the cooling flow path to connect the other to the heat treatment space; A fan is disposed in the furnace body to circulate air in the furnace body, and a heat insulating material interposed between the heating flow path and the cooling flow path.

The present invention is characterized in that the heating flow path is located above the cooling flow path, and the heat treatment space is located on the heating flow path.

The present invention is characterized in that the throttle door is formed of a heat insulating material, and an opening of the heating flow path closed by the throttle door or an opening communicating with a confluence portion of the cooling flow path and the throttle door Sealed, and an abutting portion for the throttle to be abutted is provided on the opening side.

The present invention is characterized in that a lattice material on which a workpiece is placed is provided on the heating flow path.

The present invention is characterized in that the heater of the heating flow path and the cooler of the cooling flow path are in the direction of the flow paths so as to overlap each other Some of them are half or less and are set to be staggered.

The industrial furnace of the present invention can be efficiently heated and cooled, and can be miniaturized.

1‧‧‧Industrial furnace

1a‧‧‧ Heat treatment space

2‧‧‧ furnace body

2a‧‧‧ inner wall

2b‧‧‧ bottom

2c‧‧‧ sidewall

3‧‧‧heater

4‧‧‧heating flow path

4a‧‧‧ Heat transfer top wall

4b‧‧‧ openings for heating flow paths

5‧‧‧ cooler

6‧‧‧Cooling flow path

6a‧‧‧Insulated top wall

6b‧‧‧Opening of the cooling circuit

6c‧‧‧ opening of the confluence

6d‧‧‧Rotary axis

7‧‧‧ damper

7a‧‧‧ Sealing material

7b, 7c‧‧‧Apartment

8‧‧‧fan

9‧‧‧ lattice material

10‧‧‧Screen filter

11‧‧‧Multi-stage stacking storage box

12‧‧‧HEPA filter

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an explanatory view showing a configuration of a preferred embodiment of an industrial furnace according to the present invention, wherein Fig. 1(a) shows a cross-sectional view of a front side of heating, and Fig. 1(b) shows a front side of cooling. Sectional view.

Figure 2 is a cross-sectional view taken along line A-A of Figure 1.

Fig. 3 is an explanatory view for explaining the action of the throttle valve used in the industrial furnace of Fig. 1. Fig. 3(a) shows an enlarged partial cross-sectional view of the main part of the heating, and Fig. 3(b) shows the main part of the cooling. Sectional view.

Fig. 4 is an exploded assembly view of a throttle valve applied to the industrial furnace shown in Fig. 1.

Hereinafter, an embodiment of the industrial furnace of the present invention will be described in detail with reference to the accompanying drawings. Fig. 1 is an explanatory view showing a configuration of an industrial furnace according to the present embodiment. Fig. 1(a) is a cross-sectional view showing a front side of heating, and Fig. 1(b) is a cross-sectional view showing a front side of cooling. Figure 2 is a cross-sectional view taken along line A-A of Figure 1. Fig. 3 is an explanatory view for explaining the action of the throttle valve used in the industrial furnace of Fig. 1. Fig. 3(a) shows an enlarged partial cross-sectional view of the main part of the heating, and Fig. 3(b) shows the main part of the cooling. Sectional view. Fig. 4 is an exploded assembly view of a throttle valve applied to the industrial furnace shown in Fig. 1.

As shown in Fig. 1 and Fig. 2, the industrial furnace 1 of the present embodiment is attached to The inside of the furnace body 2 having a rectangular parallelepiped inner space surrounded by a heat insulating material has a heating flow path 4 provided with a heater 3 and connected to a heat treatment space 1a for heat-treating a workpiece (not shown). a cooling flow path 6 provided with a cooler 5 and connectable to the heat treatment space 1a; a throttle door 7 which alternatively closes either of the heating flow path 4 and the cooling flow path 6 and causes the other The person is in communication with the heat treatment space 1a; and the fan 8 circulates the air in the furnace body 2.

The inside of the furnace body 2 is formed in a rectangular parallelepiped inner space, and has a horizontal cross section in a rectangular shape, and facilitates returning the fan 8 from the lower side of the internal space to the air conveyed toward the upper side of the internal space by the fan 8. The upper side of the internal space is substantially at the center of the longitudinal direction of the rectangle, and is divided into two spaces by the mesh filter 10 made of metal. One of the spaces differentiated by the screen filter 10 is provided with a lattice-like metal lattice material 9 which is located below the upper portion of the inner space, in other words, is located at a lower portion of the upper portion of the inner space. The upper portion of the heating flow path 4 is configured such that air can flow toward the upper and lower sides of the lattice material 9.

The space on the upper side of the lattice material 9 is a heat treatment space 1a in which a workpiece such as a glass substrate is disposed, and a multi-stage stack storage case in which a workpiece such as the glass substrate can be placed on the lattice material 9 can be disposed. 11.

On the other side of the space on the upper side, on the inner wall 2a opposite to the heat treatment space 1a, a fan 8 for circulating air in the furnace body 2 is provided, and between the screen filter 10 and the fan 8, A HEPA (High-Efficiency Particulate Air) filter 12 is disposed so that air can flow in the longitudinal direction of the upper space.

The lower space is provided with two flow paths 4 and 6 so that the upper and lower layers are two layers. In the two flow paths 4 and 6, the lower stage is provided with a cooler 5 inside to become The cooling flow path 6 for cooling the air flowing through the flow path in the lower stage is provided with a heater 3 in the upper stage to be a heating flow path 4 for heating the air flowing through the flow path in the upper stage.

The insulating top wall portion 6a in which the cooling flow path 6 of the heat insulating material is interposed is provided between the heating flow path 4 and the cooling flow path 6, and heat is not formed in the heating flow path 4 and the cooling flow path 6. Pass between.

Since the high-temperature air rises, the heating flow path 4 is disposed in the upper stage, and the cooling flow path 6 is disposed in the lower stage, and the influence of the heat is not affected by each other. Further, the heater 3 is not disposed directly above the cooler 5, but is disposed in such a manner that the overlapping portions of the heating flow path 4 and the cooling flow path 6 are shifted by half or less, for example, for example, for example, for example, for example, for example, Regarding the length dimension along the flow path direction, when the lengths of the heater 3 and the cooler 5 are the same, the two are arranged such that they are disposed at positions shifted by half or more of the length dimension. These rooms are not susceptible to thermal effects.

Furthermore, the overlapping portions are one-and-a-half or less of each other, and of course, the case where they do not overlap at all.

Further, the upper surface of the heating flow path 4, that is, the portion separating the heating flow path 4 and the upper space is configured to form the heat transfer top wall portion 4a of the heating flow path 4 by the member having thermal conductivity, so that the heater 3 is provided. The heat is conducted to the upper heat transfer top wall portion 4a, and radiation is also present from above the heat transfer top wall portion 4a, thereby heating the heat treatment space 1a.

Therefore, the cooling flow path 6 is formed between the bottom 2b of the furnace body 2 and the heat insulating top wall portion 6a, and both ends of the rectangular long side in the horizontal cross section are open openings 6b, and are configured as air. Circulate along the long side.

Further, the heating flow path 4 is formed between the heat insulating top wall portion 6a and the heat transfer top wall portion 4a, and the both ends of the rectangular long side in the horizontal cross section are opened as in the cooling flow path 6. The opening 4b is configured such that air flows in the longitudinal direction. Further, the opening 6b of the cooling flow path 6 is opened so as to communicate both end portions in the longitudinal direction in the vertical direction, and the opening 4b of the heating flow path 4 is used for the insulating top wall portion 6a and the heat transfer top wall. The end portion of the portion 4a in the longitudinal direction is open to communicate in the vertical direction. In other words, the heating flow path 4 and the cooling flow path 6 are provided so that the air flows in the longitudinal direction of the internal space in which the horizontal cross section is rectangular.

Further, the heating flow path 4 and the cooling flow path 6 are converged by the opening 6c of the confluent portion. The opening 6c of the confluence portion is in communication with the cooling flow path 6. Further, as shown in FIG. 3, an abutting portion 7b is formed at an end portion of the heat transfer top wall portion 4a which is an opening side of the heating flow path 4, and an opening 6c of the confluent portion, that is, an opening 6c of the confluent portion. An abutting portion 7c is also provided around the opening, and the opening 4b of the heating flow path 4 and the opening 6c of the confluent portion are formed to have the same size.

The boundary between the opening 4b of the heating flow path 4 and the opening 6b of the cooling flow path 6, more specifically, the edge of the insulating top wall portion 6a forming the opening 6b, is provided to selectively close the heating flow path 4 A throttle door 7 that communicates with either of the cooling flow paths 6 and connects the other to the heat treatment space 1a.

As shown in Fig. 1, Fig. 3, and Fig. 4, the throttle door 7 is formed into a plate-like member made of a heat insulating material only slightly larger than the opening 4b of the heating flow path 4 and the opening 6c of the confluent portion. The rotation shaft 6d is provided, and is rotated about a rotation shaft 6d inserted into a hole provided at an edge of the heat insulating top wall portion 6a by an operation of a rotation mechanism (not shown) provided outside, and is rotatable Alternatively, either one of the opening 4b of the heating flow path 4 and the opening 6c of the confluent portion communicating with the cooling flow path 6 is closed.

When the throttle door 7 abuts against the abutting portions 7b and 7c, the throttle door 7 is brought into contact with the surfaces on the sides of the openings 4b and 6c, and the opening 4b of the heating flow path 4 closed by the throttle door 7 is formed. Or the opening 6c communicating with the confluence portion of the cooling flow path 6 and the throttle valve 7 are sealed to prevent air from leaking.

However, the opening 4b of the heating flow path 4 and the opening 4b of the heating flow path 4 may be closed when the throttle door 7 closes the opening 4b of the heating flow path 4 and the opening 6c that communicates with the confluent portion of the cooling flow path 6 at the peripheral portion of the throttle door 7. The heat-resistant sealing material 7a that is sealed against the contact surface of the opening 6c of the bus portion is provided over the entire circumference of the openings 4b and 6c.

The heater 3, the cooler 5, the throttle valve 7, the fan 8, and the like are appropriately controlled by a control unit (not shown) provided outside the industrial furnace 1.

The industrial furnace 1 of the present embodiment operates, for example, in a state in which a multi-stage stack storage case 11 in which a workpiece subjected to heat treatment in the heat treatment space 1a is placed is placed on the lattice material 9. When the workpiece is heated, the throttle valve 7 is rotated by the control of the control unit, and the opening 6c that communicates with the bus portion of the cooling flow path 6 is closed. Thereby, the inside of the cooling flow path 6 is formed by the bottom 2b of the internal space formed by the heat insulating material, the side wall 2c, the heat insulating top wall portion 6a, and the heat insulating damper 7, and the heat treatment space 1a and The space for heating the flow path 4 is insulated. At this time, the heating flow path 4 is in communication with the heat treatment space 1a side.

Then, the heater 3 and the fan 8 in the heating flow path 4 are operated. Thereby, the air heated by the heater 3 flows out from the heating flow path 4 to the heat treatment space 1a side by the air current generated by the fan 8. The air in the furnace body 2 is circulated by the air flow generated by the fan 8, whereby the air in the furnace body 2 is heated by the heater 3 to increase the temperature when it passes through the heating flow path 4. . At this time, the heat transfer top wall portion 4a forming the heating flow path 4 is also heated by the heater 3, and by the heat transfer top wall The heat of the portion 4a causes the air on the heating flow path 4 to be heated to flow inside the lattice material 9, and the heat treatment space 1a located above it is heated to heat the workpiece.

Next, in the case of cooling the workpiece, the multi-stage stack storage case 11 in which the workpiece subjected to the heat treatment in the heat treatment space 1a is placed is placed on the grid material 9 in the same manner as in the case of heating. When the workpiece is cooled, the throttle valve 7 is rotated by the control of the control unit, and the opening 4b of the heating flow path 4 is closed. Thereby, the heating flow path 4 is closed by the throttle door 7 to close the opening 4b. At this time, the cooling flow path 6 communicates with the heat treatment space 1a side.

Then, the cooler 5 in the cooling flow path 6 and the fan 8 are operated. Thereby, the air cooled by the cooler 5 flows out from the inside of the cooling flow path 6 to the heat treatment space 1a side by the air flow generated by the fan 8. The air in the furnace body 2 is circulated by the air flow generated by the fan 8, whereby the air in the furnace body 2 is cooled by the cooler 5 when passing through the cooling flow path 6, thereby The temperature-reduced air causes the heat treatment space 1a to be cooled to cool the workpiece.

According to the industrial furnace 1 of the present embodiment, any one of the heating flow path 4 and the cooling flow path 6 in the internal space of the furnace body 2 is selectively closed by the throttle door 7 and the other is heat-treated. The space 1a is connected, and the heating flow path 4 is provided with a heater 3 and is connectable to a heat treatment space 1a for heat-treating a workpiece, and the cooling flow path 6 is provided with a cooler 5 and is connectable to the heat treatment space 1a, so that it can be When the workpiece is heated only, the air heated by the heater 3 does not flow through the cooling flow path 6 including the cooler 5, and flows from the heating flow path 4 to the heat treatment space 1a. Therefore, the workpiece can be heated more efficiently.

Moreover, when the workpiece is only cooled, it is not cooled by the cooler 5 The air flows through the heating flow path 4 including the heater 3, and flows through the cooling flow path 6 in the heat treatment space 1a. Therefore, the workpiece can be cooled more efficiently.

That is, in the case where it is convenient to heat the workpiece and then heat it, since the cooling flow path 6 is closed by the throttle door 7, the heated air does not pass through the cooling flow path 6 in a state where the temperature is lowered. Therefore, heating can be performed more quickly. Further, at this time, since the cooling flow path 6 is closed, the cooler 5 in a state where the temperature is lowered can be kept warm, and the next cooling process can be prepared.

That is, in the case where it is convenient to heat the workpiece and then cool it, since the heating flow path 4 is closed by the throttle door 7, the cooled air does not pass through the heating flow path 4 in a state where the temperature rises. Therefore, cooling can be performed more quickly. Further, at this time, since the heating flow path 4 is closed, the heater 3 in a state where the temperature rises can be kept warm, and the next heating process can be prepared.

Further, since the fan 8 is provided in the furnace body 2, the heating flow path 4 and the cooling flow path 6 are arranged side by side with respect to the airflow generated by the fan 8, and the heating flow path 4 and the cooling flow are alternately arranged. Since the road 6 is closed, the installation space can be made smaller as compared with the case where the heater 3 and the cooler 5 are arranged in series, and the heat treatment can be performed more efficiently. Therefore, heating and cooling can be performed efficiently, and the industrial furnace 1 of the small 1 can be provided.

Further, since the heating flow path 4 is located above the cooling flow path 6, and the heat treatment space 1a is located on the heating flow path 4, the heat treatment space can also be irradiated by the radiation from the heat transfer top wall portion 4a of the heating flow path 4. 1a and the workpiece are heated. Since the lattice material 9 is placed on the heat transfer top wall portion 4a, the workpiece can be heated by the radiation from the heat transfer top wall portion 4a that conducts the heat of the heater 3 through the gap.

Moreover, since there is a space between the heating flow path 4 and the cooling flow path 6, The insulating top wall portion 6a of the heat insulating material prevents the air of the cooling flow path 6 from being heated by the heat of the heating flow path 4, or the air of the heating flow path 4 by the cold air of the cooling flow path 6 cool down. Therefore, the heat treatment can be performed more efficiently.

Further, since the throttle member 7 is provided with the sealing material 7a for sealing the opening 4b of the heating flow path 4 or the opening 6b of the cooling flow path 6, the heating flow path can be more reliably closed by the throttle door 7. 4 or cooling flow path 6. Therefore, the heat treatment can be performed more efficiently.

Further, since the throttle door 7 is provided with a heat insulating material, it is possible to prevent the heat of the heating flow path 4 closed by the throttle door 7 or the cooling heat of the closed cooling flow path 6 from being transmitted to the furnace via the throttle door 7. 2 inside the air.

In the above-described embodiment, the example in which the seal member 7a that seals the gap between the opening 4b of the heating flow path 4 and the opening 6b of the cooling flow path 6 is provided in the throttle door 7 is not limited. Here, a sealing material may be provided on the opening 4b side of the heating flow path 4 and the abutting portions 7b and 7c that communicate with the opening 6c side of the confluent portion of the cooling flow path 6. Further, the sealing member 7a may not be provided in particular, and the throttle door 7 itself may be adhered to the contact portions 7b and 7c.

1‧‧‧Industrial furnace

1a‧‧‧ Heat treatment space

2‧‧‧ furnace body

2a‧‧‧ inner wall

2b‧‧‧ bottom

3‧‧‧heater

4‧‧‧heating flow path

4a‧‧‧ Heat transfer top wall

4b‧‧‧ openings for heating flow paths

5‧‧‧ cooler

6‧‧‧Cooling flow path

6a‧‧‧Insulated top wall

6b‧‧‧Opening of the cooling circuit

6c‧‧‧ opening of the confluence

7‧‧‧ damper

8‧‧‧fan

9‧‧‧ lattice material

10‧‧‧Screen filter

11‧‧‧Multi-stage stacking storage box

12‧‧‧HEPA filter

Claims (5)

An industrial furnace characterized by comprising: a heating flow path, which is provided in a furnace body, has a heater, and is connectable with a heat treatment space for heat-treating the workpiece; and a cooling flow path is provided in the above The furnace body has a cooler and is connectable with the heat treatment space; the throttle valve selectively closes any one of the heating flow path and the cooling flow path to connect the other to the heat treatment space; A fan is disposed in the furnace body to circulate air in the furnace body, and a heat insulating material interposed between the heating flow path and the cooling flow path. The industrial furnace according to claim 1, wherein the heating flow path is located above the cooling flow path, and the heat treatment space is located on the heating flow path. The industrial furnace according to claim 1 or 2, wherein the throttle door is made of a heat insulating material, and the opening of the heating flow path closed by the throttle door or the communication portion of the cooling flow path is connected The opening is sealed between the damper and the damper is provided with an abutting portion for the damper to abut. The industrial furnace according to any one of claims 1 to 3, wherein a lattice material on which the workpiece is placed is provided on the heating flow path. The industrial furnace according to any one of claims 1 to 4, wherein the heater of the heating flow path and the cooler of the cooling flow path are in the direction of the flow paths, and the overlapping Some of the ways that are one to the other of each other are staggered and set.