五、新型說明： 【新型所屬之技術領域】 [0001] 本創作係有關於一種加熱爐，尤指一種回收廢氣用以冷 卻之高溫加熱爐。 【先前技術】 [0002] 液晶顯示面板（LCD)或電漿顯示面板（PDP)等大型基板的 製造過程中，加熱、乾燥及測試是不可或缺的製程之一 ，此些製程通常是在加熱爐内進行。 [0003] 傳統的加熱爐係包含爐體、設置在爐體内的加熱裝置、 多數承載架及抽風機，抽風機係用於吹送加熱裝置所產 生的熱氣，並提高容室内溫度的均勻性；惟，在烘烤的 過程中，加熱爐的溫度並非一成不變，而是視不同產品 或測試條件據以調整溫度，因此，一般加熱爐通常也須 進行加熱爐内溫度的冷卻流程。 [0004] 習用加熱爐的冷卻方式是利用關閉加熱器，並持續不斷 地將外部氣體送入加熱爐，再排出爐内部分熱氣來進行 熱交換，據以降低爐内溫度，並達到降低烘烤物溫度的 結果；然而，此種降溫方式的效率慢，尤其當加熱爐内 氣體若需維持一定的含氧濃度、濕度、或含氮濃度時， 加熱爐内則以相當緩慢的速度進行熱交換，不但延長烘 烤流程時間，亦造成整體生產流程停頓，故不敷使用。 [0005] 有鑑於此，本創作人為達到上述目的，乃特潛心研究並 配合學理之運用，終於提出一種設計合理且有效改善上 述缺失之本創作。 表單編號A0101 第3頁/共14頁 M427661 【新型内容】 [0006] 本創作之一目的，在於提供一種高溫加熱爐，其係回收 爐内氣體用以冷卻，以達到降低爐内溫度的效果。 [0007] 本創作另之一目的，在於提供一種高溫加熱爐，其係回 收爐内氣體用以冷卻，可減少外部氣體供應量，進而維 持爐内氣體的物理特性。 [0008] 為了達成上述之目的，本創作係為一種回收廢氣用以冷 卻之高溫加熱爐，包括爐體、加熱裝置、冷卻器、及自 動風門，爐體包含爐壁、由爐壁所界定的一容腔、及設 置在容腔内的複數側壁，該些側壁在容腔内圍設成一容 置空間，加熱裝置設置在容腔内，容腔内的氣體經由加 熱裝置而加熱，並在容腔内循環，冷卻器安裝在爐體的 一側邊，自動風門設置在爐體的一側邊，並與容腔相連 通，其中，自動風門係為開啟時，容置空間内的氣體經 由自動風門而流該冷卻器，再送回至容腔内循環。 [0009] 相較於習知，本創作之回收廢氣用以冷卻之高溫加熱爐 的爐體係設置有一自動風門，另在爐體的一側邊安裝冷 卻器，當加熱爐欲進行溫度冷卻流程時，即打開自動風 門，並將爐體内循環的氣體送至冷卻器冷卻，再送回至 爐體内循環，藉此達到不需使用外部氣體而降溫的效果 ，並維持爐内氣體的物理特性（如含氧濃度、濕度、或含 氮濃度等），以縮短烘烤時間，促進生產流程順暢，增加 本創作之實用性。 【實施方式】 [0010] 有關本創作之詳細說明及技術内容，配合圖式說明如下 表單编號A0101 第4頁/共14頁 ，然而所附圖式僅提供參考與說明用，並非用來對本創 作加以限制者。 [0011] 請參照第一圖，係為本創作之高溫加熱爐的剖視圖；本 創作之高溫加熱爐1包括一爐體1 〇、一加熱裝置2〇、一冷 卻器30及一自動風門40。 [0012] 該爐體1〇包含爐壁丨丨、由爐壁丨丨所界定的一容腔12、及 設置在該容腔12内的複數側壁π，該些側壁13在該容腔 12内圍設成的一容置空間14。 [0013] 本實施例中，該爐體10更包括一承載框架15及複數隔板 16，該承載框架15係用以承載待烘烤物體（圖未示），該 承載框架15係結合在該容置空間14内，該些隔板16則是 位於該些側壁13底側，並在該容置空間14的外圍形成有 一第二容置空間17，該第二容置空間丨7中係容置有該加 熱裝置20 ;此外，該些側壁13係在對應該承載框架15的 一側邊設有複數出·風口 131，並在對應該承載框架15的另 一側邊設有複數入風口 132。 [0014] 該加熱裝置20設置在該容腔12内，該容腔12内的氣體係 流入該第一容置空間1 7中，並經該加熱裝置2 〇而加熱， 並在該容腔12内循環。 [0015] 該冷卻器30係安裝在該爐體1〇的一側邊，用以冷卻該容 腔12内的氣體溫度；於本實施例中，該冷卻器3〇係設置 在該爐體10底側，該爐體1〇更包含一連接管18 ,該連接 管18的一端係設置在該容腔丨2内，該連接管18的另一端 則是連接該冷卻器30。 表單編號A0101 第5頁/共14頁 M427661 [0016] 再者，該自動風門40係設置在該爐體10的一側邊，並與 該容腔12相連通，其中，當該爐體10的内部溫度達到一 額定溫度時，該自動風門40係為開啟，該容置空間14内 的氣體係從該些出風口 131處流出，並經由該自動風門40 而流入該連接管18，經由該連接管18而流經該冷卻器30 ，再送回至該容腔12内循環。值得注意的是，當該自動 風門40開啟時，該加熱裝置20係停止加熱，以利於對該 容腔12内的氣體進行冷卻。 [0017] 請同時參照第二圖，係為本創作之冷卻器的側視圖；該 冷卻器30包含交錯設置的至少一冷卻水管（圖未示），該 冷卻水管的一端為一冷卻水入口 31，另一端為一冷卻水 出口 32，再者，該冷卻器30的一端為一冷卻入風口 33， 另一端為一冷卻出風口 34。使用時，冷卻水係連接該冷 卻水管，並自該冷卻水入口 31而流入該冷卻器30内，接 著，冷卻水會再從冷卻水出口 32流出。另一方面，該冷 卻入風口 33係連接該連接管18，因此，該容腔12内的氣 體係自該冷卻入風口 33而流入該冷卻器30内，並流經該 冷卻水管而進行熱交換，最後再從該冷卻出風口 34處排 出。 [0018] 此外，該爐體10更包含一鼓風機19，該鼓風機19係連接 該冷卻器30，並設置在該冷卻出風口 34的一側邊，用以 將冷卻後的氣體送回至該容腔12而循環使用。 [0019] 請續參照第三圖，係為本創作之高溫加熱爐的加熱示意 圖；本創作之高溫加熱爐1的加熱作業進行時，該自動風 門40係為關閉，同時該加熱裝置20係為啟動以對容腔12 表單編號A0101 第6頁/共14頁 内的氣體進行加熱（亦可導入外部氣體），此時，該容腔 12内的氣體係流入該第二容置空間17中加熱，並在該容 腔12内循環。 [0020] 請再參照第四圖，係為本創作之高溫加熱爐之冷卻器的 另一實施態樣；本實施例之爐體1結構與第一實施例大致 相同，其不同之處在於冷卻器30’係設置在爐體10外部 ，此外，用以連接該冷卻器30’的連接管18’外側更包 覆有一保護層181’ ，該保護層181’可作為該連接管18 ’的保護結構而枋止外物撞擊，並維持該連接管18’内 的氣體溫度。 [0021] 以上所述僅為本創作之較佳實施例，非用以限定本創作 之專利範圍，其他運用本創作之專利精神之等效變化， 均應倶屬本創作之專利範圍。 【圖式簡單說明】 [0022] 第一圖係本創作之高溫加熱爐的剖視圖； [0023] 第二圖係本創作之冷卻器的側視圖； [0024] 第三圖係為本創作之高溫加熱爐的加熱示意圖-; [0025] 第四圖係本創作之高溫加熱爐之冷卻器的另一實施態樣 〇 【主要元件符號說明】 [0026] 1高溫加熱爐 [0027] 10 爐體 [0028] 11 爐壁 表單編號A0101 第7頁/共14頁 M427661 [0029] 12容腔 [0030] 13侧壁 [0031] 131出風口 [0032] 1 32入風口 [0033] 14容置空間 [0034] 15承載框架 [0035] 16隔板 [0036] 17第二容置空 [0037] 18連接管 [0038] 19鼓風機 [0039] 20加熱裝置 [0040] 30冷卻器 [0041] 31冷卻水入口 [0042] 32冷卻水出口 [0043] 33冷卻入風口 [0044] 34冷卻出風口 [0045] 40自動風門 [0046] 30’冷卻器 [0047] 18’連接管 [0048] 181’保護層 表單编號A0101 第8頁/共14頁V. New description: [New technical field] [0001] This creation relates to a heating furnace, especially a high-temperature heating furnace for recovering exhaust gas for cooling. [Prior Art] [0002] Heating, drying, and testing are one of the indispensable processes in the manufacture of large substrates such as liquid crystal display panels (LCDs) or plasma display panels (PDPs), which are usually heated. In the furnace. [0003] A conventional heating furnace includes a furnace body, a heating device disposed in the furnace body, a plurality of carriers and an exhaust fan, and the exhaust fan is used for blowing hot air generated by the heating device and improving uniformity of temperature in the chamber; However, during the baking process, the temperature of the heating furnace is not constant, but the temperature is adjusted according to different products or test conditions. Therefore, the general heating furnace usually also needs to perform the cooling process of the temperature inside the heating furnace. [0004] The conventional heating furnace is cooled by using a shutdown heater, and continuously sending external air into the heating furnace, and then discharging some of the hot gas in the furnace for heat exchange, thereby reducing the temperature in the furnace and reducing the baking. The result of the temperature of the material; however, the efficiency of the cooling method is slow, especially when the gas in the furnace needs to maintain a certain oxygen concentration, humidity, or nitrogen concentration, the heat exchange in the furnace is performed at a relatively slow speed. Not only does it extend the baking process time, but it also causes the overall production process to stop, so it is not enough. [0005] In view of this, in order to achieve the above objectives, the present creator has devoted himself to researching and cooperating with the application of the theory, and finally proposed a creation that is reasonable in design and effective in improving the above-mentioned lack. Form No. A0101 Page 3 of 14 M427661 [New Content] [0006] One of the purposes of this creation is to provide a high-temperature heating furnace that recovers the gas in the furnace for cooling to reduce the temperature in the furnace. Another object of the present invention is to provide a high-temperature heating furnace which recovers the gas in the furnace for cooling, thereby reducing the supply of external gas and thereby maintaining the physical properties of the gas in the furnace. [0008] In order to achieve the above object, the present invention is a high temperature heating furnace for recovering exhaust gas for cooling, including a furnace body, a heating device, a cooler, and an automatic damper, the furnace body including a furnace wall and defined by the furnace wall. a cavity and a plurality of sidewalls disposed in the cavity, the sidewalls are disposed in the cavity as an accommodation space, the heating device is disposed in the cavity, and the gas in the cavity is heated by the heating device, and The cavity is circulated in the cavity, and the cooler is installed on one side of the furnace body. The automatic damper is disposed on one side of the furnace body and communicates with the cavity. When the automatic damper is opened, the gas in the accommodating space passes through The damper flows through the chiller and is sent back to the cavity for circulation. [0009] Compared with the prior art, the furnace system of the high-temperature heating furnace for recovering exhaust gas of the present invention is provided with an automatic damper, and a cooler is installed on one side of the furnace body, when the heating furnace is to perform a temperature cooling process. The automatic damper is opened, and the gas circulated in the furnace body is sent to the cooler for cooling, and then sent back to the furnace body for circulation, thereby achieving the effect of cooling without using external gas, and maintaining the physical properties of the gas in the furnace ( Such as oxygen concentration, humidity, or nitrogen concentration, etc., to shorten the baking time, promote the smooth production process, and increase the practicality of this creation. [Embodiment] [0010] The detailed description and technical contents of the present creation are described below with reference to the following form number A0101, page 4 of 14 pages, however, the drawings are provided for reference and explanation only, and are not intended to be used for this purpose. Creation is limited. [0011] Please refer to the first drawing, which is a cross-sectional view of the high temperature heating furnace of the present invention; the high temperature heating furnace 1 of the present invention comprises a furnace body 1 , a heating device 2 , a cooler 30 and an automatic damper 40 . [0012] The furnace body 1 includes a furnace wall, a cavity 12 defined by the furnace wall, and a plurality of sidewalls π disposed in the cavity 12, the sidewalls 13 being in the cavity 12 A accommodating space 14 is enclosed. [0013] In the embodiment, the furnace body 10 further includes a bearing frame 15 and a plurality of partitions 16 for carrying an object to be baked (not shown), and the bearing frame 15 is coupled to the bearing frame 15 In the accommodating space 14 , the partitions 16 are located on the bottom side of the side walls 13 , and a second accommodating space 17 is formed in the outer periphery of the accommodating space 14 . The heating device 20 is disposed; furthermore, the side walls 13 are provided with a plurality of air outlets 131 on the side corresponding to the supporting frame 15, and a plurality of air inlets 132 are provided on the other side corresponding to the supporting frame 15. . [0014] The heating device 20 is disposed in the cavity 12, and the gas system in the cavity 12 flows into the first accommodating space 17 and is heated by the heating device 2, and is in the cavity 12 Inner loop. [0015] The cooler 30 is installed on one side of the furnace body 1 to cool the temperature of the gas in the cavity 12; in the embodiment, the cooler 3 is disposed on the furnace body 10. On the bottom side, the furnace body 1 further includes a connecting pipe 18, one end of the connecting pipe 18 is disposed in the cavity 2, and the other end of the connecting pipe 18 is connected to the cooler 30. Form No. A0101 Page 5 of 14 M427661 [0016] Furthermore, the automatic damper 40 is disposed on one side of the furnace body 10 and communicates with the cavity 12, wherein, when the furnace body 10 When the internal temperature reaches a rated temperature, the automatic damper 40 is opened, and the gas system in the accommodating space 14 flows out from the air outlets 131, and flows into the connecting pipe 18 via the automatic damper 40, via the connection. The tube 18 flows through the cooler 30 and is returned to the chamber 12 for circulation. It should be noted that when the automatic damper 40 is opened, the heating device 20 stops heating to facilitate cooling of the gas in the chamber 12. [0017] Please also refer to the second figure, which is a side view of the cooler of the present invention; the cooler 30 includes at least one cooling water pipe (not shown) which is staggered, and one end of the cooling water pipe is a cooling water inlet 31. The other end is a cooling water outlet 32. Further, one end of the cooler 30 is a cooling air inlet 33, and the other end is a cooling air outlet 34. In use, the cooling water is connected to the cooling water pipe and flows into the cooler 30 from the cooling water inlet 31, and then the cooling water flows out of the cooling water outlet 32. On the other hand, the cooling air inlet 33 is connected to the connecting pipe 18, so that the gas system in the cavity 12 flows into the cooler 30 from the cooling air inlet 33, and flows through the cooling water pipe for heat exchange. Finally, it is discharged from the cooling air outlet 34. [0018] In addition, the furnace body 10 further includes a blower 19 connected to the cooler 30 and disposed on one side of the cooling air outlet 34 for returning the cooled gas to the capacity. The chamber 12 is recycled. [0019] Please refer to the third figure for the heating diagram of the high-temperature heating furnace of the present invention; when the heating operation of the high-temperature heating furnace 1 of the present invention is performed, the automatic damper 40 is closed, and the heating device 20 is The heating is performed to heat the gas in the cavity 12 form number A0101, page 6 / 14 (the external gas can also be introduced), and at this time, the gas system in the cavity 12 flows into the second accommodating space 17 to be heated. And circulating in the cavity 12. [0020] Please refer to the fourth figure again, which is another embodiment of the cooler of the high temperature heating furnace of the present invention; the structure of the furnace body 1 of the present embodiment is substantially the same as that of the first embodiment, and the difference is that cooling The device 30' is disposed outside the furnace body 10. In addition, the outer side of the connecting pipe 18' for connecting the cooler 30' is further covered with a protective layer 181', which can be protected as the connecting pipe 18' The structure stops the foreign object from colliding and maintains the temperature of the gas in the connecting pipe 18'. [0021] The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the patent of the present invention, and other equivalent changes of the patent spirit using the present invention are all within the scope of the patent of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS [0022] The first drawing is a cross-sectional view of the high temperature heating furnace of the present invention; [0023] The second drawing is a side view of the cooler of the present invention; [0024] The third drawing is the high temperature of the creation Heating diagram of the heating furnace-[0025] The fourth drawing is another embodiment of the cooler of the high-temperature heating furnace of the present invention. [Main component symbol description] [0026] 1 high-temperature heating furnace [0027] 10 furnace body [ 0028] 11 Wall Form No. A0101 Page 7 of 14 M427661 [0029] 12 cavity [0030] 13 side wall [0031] 131 air outlet [0032] 1 32 air inlet [0033] 14 accommodation space [0034 15 bearing frame [0035] 16 partition [0036] 17 second accommodation empty [0037] 18 connecting pipe [0038] 19 blower [0039] 20 heating device [0040] 30 cooler [0041] 31 cooling water inlet [ 0042] 32 cooling water outlet [0043] 33 cooling air inlet [0044] 34 cooling air outlet [0045] 40 automatic air door [0046] 30' cooler [0047] 18' connecting tube [0048] 181 'protective layer form number A0101 Page 8 of 14