TW201704737A - Mura quantifying system by laser crystallization facility using UV and Mura quantifying method by laser crystallization facility using UV - Google Patents

Abstract

The present invention relates to Mura quantifying system and method, that is, a Mura quantifying system by a laser crystallization facility including a laser crystallization apparatus, in which the Mura quantifying apparatus is provided in the laser crystallization facility such that a substrate is crystallized by the laser crystallization apparatus and Mura is quantified in real time using an ultraviolet source while the crystallized substrate is moved, and a Mura quantifying method by a laser crystallization facility.

Description

Moiré quantification system through laser crystallization equipment using ultraviolet rays and moiré quantification method using laser crystallization equipment using ultraviolet rays

The present invention relates to a moiré quantification system and method, and more particularly to a moiré quantification system through a laser crystallization device using ultraviolet rays, and a moiré quantification method through a laser crystallization device, which can be borrowed The substrate is crystallized in an apparatus comprising one of the laser crystallization devices by only quantizing the moiré information of the substrate to ensure the reliability of the moiré detection.

A process for crystallizing an amorphous polycrystalline film such as an amorphous germanium film is generally required to fabricate electrical/electronic components such as liquid crystal displays or solar elements.

It is necessary to irradiate a laser having a predetermined energy to crystallize the amorphous ruthenium film into a crystalline ruthenium film (hereinafter, the film to be crystallized is referred to as a "substrate" for convenience). The density of the energy in the process is referred to as the energy density (hereinafter referred to as "ED"), and the ED having the condition for optimizing the crystallization result is referred to as the optimized energy density (hereinafter referred to as "OPED").

When viewed by a scanning electron microscope (SEM) for products exposed to an OPED-exposed laser, the orientation of the grains is uniform and the uniformity of grain size is also optimal. However, due to the time and labor required for the manufacturing process, it is generally impossible to inspect all products by SEM.

The reason is that a standard for selecting OPED via visual inspection has been established, which is called moiré, and is based on the intensity, frequency of occurrence, and occurrence trend of the moiré to determine OPED. When visually detecting a product that has undergone ED splitting (testing of crystallization in a region of several tens of millimeters under different EDs), it is difficult to observe moiré, and it can be clearly seen in the ED region in the OPED region. The product, and when going from the OPED area to a higher ED area, will show a lot of moiré. OPED will be selected in this way.

On the other hand, a laser crystallization process scanning process is used in which laser pulses will overlap and moiré will be generated in the overlap region due to differences in energy from the surroundings. The strip thus produced is called a shot moiré.

Further, when the substrate to be crystallized is scanned and the target film is crystallized, the unevenness of the linear laser beam is generated to cause a color unevenness, which is called scanning moiré.

In order to verify that the product is healthy/bad after crystallization by means of a crystallization apparatus, visual inspection of the product by visual inspection in a test apparatus has been used.

However, visually detecting moiré has its limitations, and depending on the position, various patterns of moiré are generated, and it is difficult to check the moiré. Moreover, the tester has a difference in detection, which makes the test productivity, accuracy, and reproducibility low. Moreover, due to the need to inspect personnel, labor and costs will be wasted.

Also, observation may only be made after manufacturing a cartridge (24 products), delaying the overall manufacturing time. To minimize this delay, not all products are tested, and some products are selected and tested, resulting in reduced process reliability.

Moreover, as shown in FIG. 1, the light source for detecting moiré in the related art uses visible light, so that when the moiré is detected, the substrate vacuum chuck line under the substrate will be reflected together with the moiré area. And it is therefore difficult to distinguish moiré areas from vacuum lines in image analysis.

When the substrate in the area is increased, the vacuum line should be denser, so it becomes difficult to distinguish the areas.

An object of the present invention is to provide a moiré quantification system through a laser crystallization device and a moiré quantification method through a laser crystallization device, which can ensure moiré by only quantifying the moiré information of the substrate The reliability of the detection is that the substrate is crystallized in an apparatus comprising a laser crystallization device.

In order to achieve the above object, according to one aspect of the present invention, a moiré quantification system is provided which passes through a laser crystallization apparatus including a laser crystallization apparatus, wherein the moiré quantification apparatus is disposed in the laser crystallization apparatus such that The substrate is crystallized by the laser crystallization device, and while moving the crystallized substrate, an ultraviolet light source is used to instantly quantize the moiré.

Moreover, in order to achieve the above object, according to another aspect of the present invention, a moiré quantification method for a laser crystallization apparatus is provided, comprising: a first step of loading a substrate, and a second step of crystallizing the loaded substrate using a laser The third step of instantaneously quantifying moiré using an ultraviolet light source while moving the crystallized substrate, and the fourth step of unloading the substrate that has undergone crystallization and moiré quantification.

The laser crystallization apparatus may include: a processing chamber; a laser beam generator disposed at one side of the processing chamber and radiating a laser beam toward the substrate; and a platform disposed in the processing chamber Used to load and unload the substrate.

The moiré quantification device may include: an image acquisition unit disposed above the platform to instantly acquire moiré in the crystallized substrate loaded by the platform without interfering with the laser beam; an ultraviolet light source is set At one side of the image acquisition unit, and illuminating the crystallized substrate; an image processing unit performs image pre-processing and image processing to extract the contrast image on the acquired moiré image, and analyze the The image is processed to quantify the moiré; and a central processing unit controls the image acquisition unit, the ultraviolet light source, and the image processing unit to display images obtained by the image acquisition unit and by the image processing unit The obtained image data and the determination of the crystallized substrate are suitable and defective.

The image acquisition unit may be a one-side camera, and the image acquisition unit adjusts a trigger by reacting signals related to the position of the platform to obtain a moiré image at regular intervals.

The image acquisition unit can adjust the moiré image at a fixed interval by adjusting the trigger for each region having an optimized energy density (OPED).

The image acquisition unit can be a linear scan camera.

The image acquisition unit may be configured to a 20 ^o ~ 70 ^o angle clip and the substrate, and the ultraviolet light source may be configured to a 20 ^o ~ 70 ^o angle clip and the substrate.

A polarizer may be disposed in front of the ultraviolet light source or the image acquisition unit. By rotating the polarizer, only light in the same direction as the moiré can pass, and a green filter can be disposed in front of the ultraviolet light source or the image acquisition unit.

The central processing unit can determine that the crystallized substrate is healthy and defective, and the central processing unit can change the energy density (ED) of the laser beam that is radiated to the substrate when a problem occurs.

According to the present invention, it is possible to quantify the moiré in one of the substrates crystallized in a device, and to immediately determine the health and/or failure of the crystallized substrate to achieve stable process management, wherein the device includes using an ultraviolet light source. A laser crystallization device.

Moreover, when ultraviolet light is used, images such as a vacuum chuck line under the substrate do not appear, so that only information about the moiré of the substrate can be obtained, and thus the reliability of the moiré detection can be increased, and the The moiré information greatly improved the yield.

Moreover, it may be possible to reduce the time it takes to find moiré compared to the existing method to ensure production yield. Further, it is possible to obtain reliable data and objectivity of the crystallized substrate by obtaining objective data of errors and differences in the determination by the inspector.

Moreover, by using a face camera or a linear scanning camera to acquire images, the time taken to detect moiré will be reduced, and the trigger signal will be reflected to obtain an image, so that moiré can be easily detected for each area of a substrate.

The invention relates to the use of machine vision to detect moiré and extract data to ensure the reliability of moiré detection by detecting and quantifying only the moiré information about the substrate, and to instantly determine whether the substrate is healthy/bad, The substrate is crystallized in an apparatus comprising a laser crystallization apparatus that uses an ultraviolet light source.

The present invention has been implemented to provide stable process management by inspecting process quality in an apparatus including one of the laser crystallization devices.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. 2 is a view showing main components of a moiré quantification system through a laser crystallization apparatus according to the present invention, and FIG. 3 is a block diagram showing a moiré quantification method of a laser crystallization apparatus according to the present invention, FIG. The figure shows the angle of the image acquisition unit and the ultraviolet light source and the substrate according to the present invention, the fifth figure shows the generalized expected surface appearance of the moiré, and the sixth figure shows the absorption depth diagram related to the wavelength, 7 is a diagram showing a substrate pattern according to the wavelength of the light source, and FIGS. 8A and 8B are diagrams showing a moiré image in the substrate according to the wavelength of the light source.

As shown in the figure, in accordance with one of the present invention, through a moiré quantification system of a laser crystallization apparatus 10, a moiré quantification apparatus 200 is provided in a device including a laser crystallization apparatus 100 for use in a laser crystallization apparatus. In the 100, a substrate 20 is crystallized, and while the crystallized substrate 20 is moved, an ultraviolet light source 220 is used to instantly detect and quantize moiré.

The present invention instantly determines whether the substrate 20 is healthy/bad by quantifying the moiré in the substrate 20, and the substrate is crystallized in a device including the laser crystallization device 100, wherein the moiré is automatically detected by machine vision to quantify the data. And the process quality is immediately checked in the apparatus including the laser crystallization apparatus 100 to stably manage the process.

Generally, the laser crystallization apparatus 100 includes a processing chamber 110, a laser beam generator 120, and a stage 130, and the moiré quantifying apparatus 200 is included in the laser crystallization apparatus 100. The laser beam generator is disposed at one side of the processing chamber 110 and radiates a laser beam toward the substrate 20. The platform is disposed in the processing chamber 110 to load and unload the substrate 20.

According to the present invention, the configuration for acquiring the moiré image is included in the laser crystallization apparatus 100, and the configuration for processing the detected moiré image, the data for making the moiré, and the control unit are set to the laser. A configuration other than the crystallization apparatus 100, and including all of the laser crystallization apparatus 100, and the apparatus for quantifying moiré is referred to as a laser crystallization apparatus 10. That is, laser crystallization, moiré detection, and quantification can be performed in the device.

The laser crystallization apparatus 100 for general crystallization 100 processing chamber 110 may be a vacuum chamber having a gate at a side end for placement in the substrate 20.

A laser beam generator for radiating a laser beam to crystallize the substrate 20 is disposed at one side of the processing chamber 110 and is designed to use an optical module and an optical power detector module (OPDM). The linear laser beam is efficiently radiated to the substrate 20.

Generally, the substrate 20 has a germanium film deposited on the glass, wherein the germanium film is an amorphous material, and the substrate 20 crystallized herein means an amorphous germanium film on a substrate such as glass. crystallization. For convenience of explanation, the present invention assumes that the substrate 20 includes a film to be crystallized and a substrate substrate under the film.

The density of the energy of the laser beam used for crystallization is called the energy density (hereinafter referred to as "ED"), and the ED having the state of optimizing the crystallization result is called the optimized energy density (hereinafter referred to as "OPED"). "). The edge is to provide a laser beam at a given OPED.

The laser beam generator crystallization of the substrate 20, for example, using an excimer laser beam, and the stage 130 is disposed in the processing chamber 110 and mounted with the substrate 20 to load and unload the substrate 20.

The platform 130 moves the substrate 20 to be crystallized relative to the laser beam such that the laser beam is radiated to the entire area of the substrate 20. In this configuration, it is possible to supply the encoder signal of the position of the platform 130 to the image acquisition unit 210 of the moiré quantization device 200, which will be described below, and then use the signals as the trigger signal of the image acquisition unit 210. Images must be taken at regular intervals. This is to obtain the moiré image and quantify the moiré according to the position of the platform 130, and therefore, it is possible to accurately find the place where the moiré has been generated.

Moreover, the substrate 20 is usually placed on the vacuum chuck line to fix the substrate 20 to the platform 130. When a moiré image is obtained by using commonly used light (400 nm to 700 nm), the vacuum chuck line will appear. In the moiré image, the reliability of moiré detection is reduced.

The moiré quantification device 200 is provided in a device including the laser crystallization device 100 to instantly quantize moiré while moving the crystallized substrate 20.

The moiré quantification device 200 includes an image acquisition unit 210 disposed above the platform 130 to instantly acquire the moiré in the crystallized substrate 20 loaded by the platform 130 without interfering with the laser beam; an ultraviolet light source 220, It is disposed at one side of the image acquisition unit 210 and illuminates the crystallized substrate 20; an image processing unit 230 performs image pre-processing and image processing to extract the contrast image on the acquired moiré image, and borrow The cloud image is quantized by analyzing the processed image into data; and a central processing unit 240, the image capturing unit 210, the ultraviolet light source 220, and the image processing unit 230 are displayed, and the image obtained by the image capturing unit 210 and the image obtained by the image capturing unit 210 are displayed. The image data acquired by the processing unit 230 determines that the crystallized substrate 20 is healthy/bad.

As described above, the image obtaining unit 210 of the moiré quantification device 200 can be disposed in the processing chamber 110 of the laser crystallization apparatus 100, and the image processing unit 230 and the central processing unit for processing the acquired image. 240 can be disposed outside the processing chamber 110.

The image acquisition unit 210 for obtaining the moiré image of the crystallized substrate 20 is a commonly used charge coupled device (CCD) camera that is connected to the central processing unit 240 for on/off and operation control using a side camera 211 or A linear scan camera 212 reduces the time it takes to detect moiré, and other cameras capable of capturing images can be used.

When it is necessary to use the face camera 211 to acquire images, it is possible to acquire images at regular intervals by adjusting a synchronization trigger. For example, an encoder signal regarding the position of the platform 130 may be reacted to adjust the trigger of the face camera 211 to obtain a moiré image at regular intervals. The edge is that a moiré image that has been taken on the substrate 20 may be found, and good and poor crystallization at a plurality of locations on the substrate 20 may be easily determined.

Moreover, it is possible to adjust the trigger for each of the OPED regions, that is, each optimized energy density region, to obtain the moiré image at regular intervals. That is, it is possible to determine whether the crystallization has been preferably performed by performing crystallization on each of the substrate 20 regions with different OPED and inputting the OPED to the image acquisition unit 210 as a trigger.

The ultraviolet light source 220 is provided at one side end of the image acquisition unit 210 and irradiates the crystallized substrate 20 so that an image can be appropriately obtained. The ultraviolet light source may have a dome, a ring, a rod, or an off-axis type, and uses ultraviolet rays (having a wavelength band of 400 nm or less). The ultraviolet light source 220 can adjust the angle, and the opening/closing and angle of the ultraviolet light source 220 can be adjusted by the central processing unit 240, which will be described below.

Typically, the substrate 20 is placed on a vacuum chuck line to secure the substrate 20 to the platform 130. When a moiré image is obtained by conventional visible light (400 nm to 700 nm), the vacuum chuck line will pass through The image reflected by the substrate 20 overlaps with the moiré image to reduce the reliability of moiré detection.

An ultraviolet light source 220 is used in the present invention to solve this problem. The ultraviolet light source 220 can obtain an image that is not transmitted through the thickness of the film on the substrate 20 (for example, the glass substrate) but is absorbed and reflected in the moiré image at a predetermined angle.

That is, when the ultraviolet light source 220 is used, the image reflected through the substrate will be reduced or eliminated, and the reliability of obtaining the moiré image is improved.

The face camera 211 and the linear scan camera 212 as shown in FIG. 4 can be configured to be at an angle (θ _AL ) of 20 ^o to 70 ^o with the substrate 20, and the ultraviolet light source 220 can be configured to be sandwiched with the substrate 20. 20 ^o ~ 70 ^o angle (θ _AL ). Fig. 4A shows a face camera 211 and a 4B chart showing a linear scan camera 212. The face camera 211 has an angle with a horizontally disposed substrate.

Figure 5 shows an overview of the expected moiré surface appearance, wherein the image acquisition unit 210 and the ultraviolet light source 220 are at different angles to obtain an image that overlaps the adjacent moiré, or to obtain error information about the height and width of the moiré.

Moreover, the image processing unit 230 performs image preprocessing and image processing to obtain a contrast image on the acquired moiré image, and analyzes the processed image into data to quantize the moiré.

It is often difficult to visually recognize the moiré image, so the contrast image is extracted to increase the visibility of the moiré image. Therefore, a smooth image is created by averaging the local brightness values in the acquired image to obtain a contrast image.

The contrast image is obtained by subtracting the reference image data value obtained by the preprocessing from the image originally acquired. The analysis image can be obtained by inputting a selectivity condition such as a contrast ratio and a line type based on the contrast image. The reason is that the quantized image data of the final moiré detection will be obtained.

The personal computer is generally used as the central processing unit 240, and controls the image acquisition unit 210, the ultraviolet light source 220, and the image processing unit 230 to display the data of the image acquired by the image acquisition unit 210 and the image obtained by the image processing unit 230. The image and the determination of the crystallized substrate 20 are healthy/bad.

For example, central processing unit 240 can be comprised of a keyboard, a panel, and a controller. The keyboard is used to control the image acquisition unit 210, the ultraviolet light source 220, and the image processing unit 230, and input a set value. This panel is used to display the acquired images and processed image data. The controller determines whether the crystallized substrate 20 is healthy/bad based on image data, and is used to control all components.

The central processing unit 240 is disposed outside of the laser crystallization apparatus 100. The central processing unit can control not only the moiré quantification device 200 but also the entire device including the laser crystallization device 100. Moreover, the central processing unit 240 can control the motion and position of the laser beam generator 120 and the platform 130 of the laser crystallization apparatus 100, wherein the position of the platform 130 is input to the image acquisition unit 210 as a trigger signal to operate the image at regular intervals. The unit 210 is acquired.

The central processing unit 240 can determine whether the crystallized substrate 20 is healthy/bad using the acquired image. The energy density of the laser beam radiated to the substrate 20 can be varied when the problem arises, wherein the ED can be automatically generated by the user based on a program that is pre- or directly set based on the result of determining the fit/badness, if necessary. change.

Hereinafter, the moiré quantification method of the laser crystallization apparatus 10 according to the present invention will be explained.

Figure 3 is a diagram showing a moiré quantization method according to the present invention. As shown in FIG. 2, the moiré quantification method of the laser crystallization apparatus 10 includes a first step of loading the substrate 20, a second step of crystallizing the loaded substrate 20 using a laser, and moving the crystallized substrate 20. The third step of simultaneously quantifying moiré using ultraviolet rays and the fourth step of unloading the substrate 20 which has been subjected to crystallization and moiré quantification are simultaneously performed.

The substrate 20 is mounted on the platform 130 of the laser crystallization apparatus 100 and loaded to a laser crystallization position. The loaded substrate 20 is crystallized by a laser beam from the laser beam generator. The moiré image is obtained from the crystallized substrate 20 by the image acquisition unit 210 while moving the crystallized substrate 20, and by processing the images, the moiré is instantly quantized. Next, the substrate 20 which has undergone crystallization and moiré quenching is unloaded, thereby completing the process.

The third step is to obtain a moiré image from the crystallized substrate 20, perform image processing on the acquired moiré image, analyze the image processed image into data to quantize the moiré, and then based on the quantized moiré. A procedure for determining the degree of crystallization of the substrate 20 is satisfactory/bad.

In the step of acquiring the moiré image from the crystallized substrate 20, the moiré image is obtained at a fixed interval by adjusting the synchronization trigger.

In order to obtain the moiré image of the crystallized substrate 20, an image acquisition unit 210 such as a face camera 211 or a linear scan camera 212 may be used, and the image may be acquired at a fixed interval by adjusting the synchronization trigger regarding the position of the image acquisition unit 210. .

For example, an encoder signal regarding the position of the platform 130 may be reacted to adjust the trigger of the face camera 211 to obtain a moiré image at regular intervals. The edge is that a moiré image that has been taken on the substrate 20 may be found, and good and poor crystallization at a plurality of locations on the substrate 20 may be easily determined.

Optionally detecting and quantifying moiré from a focus area of the acquired image, that is, an effective area other than the defocus area, and comparing the characteristics of each area with a reference level It is judged whether the substrate 20 is healthy/bad by the absolute comparison type or a relative comparison type in which the difference in characteristics of each region is compared.

Moreover, it is possible to adjust the trigger for each of the OPED regions, that is, each optimized energy density region, to obtain the moiré image at regular intervals. That is, it is possible to determine whether the crystallization has been preferably performed by performing crystallization on each of the substrate 20 regions with different OPED and inputting the OPED to the image acquisition unit 210 as a trigger.

For the image obtained by the linear scan camera 212, the perspective angle is corrected, a processing area, that is, an effective area is extracted, and the area characteristic is calculated by performing histogram quantization or calculation based on the cumulative profile, thereby determining the substrate 20 Fitness / bad.

By comparing the characteristics of each region with the reference level, or comparing the differences in the characteristics of each region, the determination of substrate health/badness is achieved.

To remove or reduce the image of the vacuum chuck line reflected through the substrate 20, an ultraviolet light source 220 is used in the present invention. The ultraviolet light source 220 can obtain an image that is not transmitted through the thickness of the film on the substrate 20 (for example, the glass substrate) but is absorbed and reflected in the moiré image at a predetermined angle.

That is, when the ultraviolet light source 220 is used, the image reflected through the substrate 20 will be reduced or eliminated, and the reliability of obtaining the moiré image is improved.

The face camera 211 and the linear scan camera 212 can be configured to have an angle (θ _AL ) of 20 ^o ~ 70 ^o with the substrate 20, and the ultraviolet light source 220 can be configured to be at an angle of 20 ^o ~ 70 ^o with the substrate 20. _AL ). Fig. 4A shows a face camera 211 and a 4B chart showing a linear scan camera 212. The face camera 211 has an angle with the horizontal arrangement substrate 20.

Figure 5 shows an overview of the expected moiré surface appearance, wherein the image acquisition unit 210 and the ultraviolet light source 220 are at different angles to obtain an image that overlaps the adjacent moiré, or to obtain error information about the height and width of the moiré.

Moreover, the image processing for the acquired moiré image is implemented by the image processing unit 230, wherein the image preprocessing and image processing for obtaining the contrast image can be performed on the acquired moiré image, and can be analyzed by The processed image is used as data to quantify moiré.

For example, a smooth image is created by averaging the local luminance values in the acquired image to extract the contrast image. That is, the contrast image is obtained by subtracting the reference image data value obtained by the preprocessing from the image originally acquired. The analysis image can be obtained by inputting a selectivity condition such as a contrast ratio and a line type based on the contrast image. The reason is that the quantized image data of the final moiré detection will be obtained.

Further, it is determined that the degree of crystallization of the substrate 20 is healthy/bad based on the quantized moiré, and when a problem occurs, the energy density (ED) of the laser beam radiated to the substrate 20 is changed, and the change is performed by the central processing. Unit 240 is implemented.

Hereinafter, the comparison data when the moiré image is obtained by the ultraviolet light source 220 according to the present invention and the moiré image is obtained by the visible light will be described.

Figure 6 shows the depth of absorption associated with the wavelength, where in the range of 400 nm or less of the ultraviolet light source 220, the image will be untransmissive due to the crystallized thickness of the tantalum film so that no image is reflected from the substrate. However, in the visible range, the transmission traverses the crystallization thickness of the ruthenium film, so that an image such as a vacuum chuck line below the substrate 20 is obtained.

Figure 7 shows an image of the substrate 20 in accordance with the wavelength of the light, wherein it can be seen that the pattern of the substrate 20 (e.g., the vacuum chuck line) is reduced to make it appear blurry.

Fig. 8A and Fig. 8B respectively show the moiré image when the ultraviolet light source 220 is radiated and when it is irradiated with visible light. When the visible light is irradiated, the vacuum chuck line reflected on the substrate 20 is taken, and when the ultraviolet light from the ultraviolet light source 220 is irradiated, the moiré image is obtained, but the vacuum chuck line does not appear on the substrate 20.

As described above, according to the present invention, it is possible to quantify the moiré in the substrate crystallized in a device and to instantly determine the health/defect of the crystallized substrate to achieve stable process management, wherein the device includes the use of ultraviolet light. One of the laser crystallization devices.

In particular, when ultraviolet light is used, an image such as a vacuum chuck line under the substrate does not appear, so that only information about the moiré image of the substrate can be obtained, and thus the reliability of the moiré detection can be increased, and The moiré information that has been obtained has greatly improved the yield.

10‧‧‧Laser crystallization unit

20‧‧‧Substrate

100‧‧‧Laser crystallizer

110‧‧‧Processing chamber

120‧‧‧Laser beam generator

130‧‧‧ platform

200‧‧‧ moiré quantification device

210‧‧‧Image acquisition unit

211‧‧‧ Face camera

212‧‧‧Linear Scan Camera

220‧‧‧UV light source

230‧‧‧Image Processing Unit

240‧‧‧Central Processing Unit

Θ‧‧‧ _AL angle

The above and other objects, features, and other advantages of the present invention will become more <RTIgt;

Figure 1 shows a moiré image obtained by visible light in the related art;

2 is a view showing main components of a moiré quantification system through a laser crystallization apparatus according to the present invention;

Figure 3 is a block diagram showing a moiré quantification method of a laser crystallization apparatus according to the present invention;

4A and 4B are angle diagrams showing the image acquisition unit and the ultraviolet light source to the substrate according to the present invention;

Figure 5 is a diagram showing the generalized expected surface appearance of the moiré;

Figure 6 is a graph showing the absorption depth associated with the wavelength;

Figure 7 is a diagram showing a substrate pattern according to the wavelength of the light source; and

Figures 8A and 8B show a moiré image in a substrate according to the wavelength of the light source.

no

10‧‧‧ Moiré quantification system

20‧‧‧Substrate

100‧‧‧Laser crystallizer

110‧‧‧Processing chamber

120‧‧‧Laser beam generator

130‧‧‧ platform

200‧‧‧ moiré quantification device

210‧‧‧Image acquisition unit

220‧‧‧UV light source

230‧‧‧Image Processing Unit

240‧‧‧Central Processing Unit

Claims (17)

A moiré quantification system that passes through a laser crystallization apparatus including a laser crystallization apparatus, wherein the moiré quantification apparatus is disposed in the laser crystallization apparatus such that a substrate is crystallized by the laser crystallization apparatus, and While moving the crystallized substrate, an ultraviolet light source is used to instantly quantize the moiré. The system of claim 1, wherein the laser crystallization apparatus comprises: a processing chamber; a laser beam generator disposed at one side of the processing chamber and radiating a laser beam toward the substrate; and a platform , disposed in the processing chamber and used to load and unload the substrate. The system of claim 2, wherein the moiré quantification device comprises: an image acquisition unit disposed above the platform to instantly acquire moiré in the crystallized substrate loaded by the platform without laser Beam interference; an ultraviolet light source is disposed at one side of the image acquisition unit and illuminates the crystallized substrate; an image processing unit performs image preprocessing and image processing to extract the acquired moiré image And the central processing unit controls the image acquisition unit, the ultraviolet light source, and the image processing unit to display the image obtained by the image acquisition unit. The image and the image data obtained by the image processing unit are determined, and the crystallized substrate is determined to be suitable and defective. The system of claim 3, wherein the image acquisition unit is a one-sided camera. The system of claim 4, wherein the image acquisition unit adjusts a trigger by reacting a signal about the position of the platform to obtain a moiré image at a fixed interval. The system of claim 4, wherein the image acquisition unit adjusts the trigger for each region having an optimized energy density (OPED) to obtain the moiré image at regular intervals. The system of claim 3, wherein the image acquisition unit is a linear scan camera. The system of claim 3, wherein the image acquisition unit is configured to be at an angle of 20 ^o to 70 ^o with the substrate. The system of claim 8, wherein the ultraviolet light source is configured to be at an angle of 20 ^o to 70 ^o with the substrate. The system of claim 3, wherein the central processing unit determines that the crystallized substrate is healthy and defective, and the central processing unit changes the energy density (ED) of the laser beam radiated to the substrate when a problem occurs. . A moiré quantification method for a laser crystallization apparatus, the method comprising: a first step of loading a substrate; a second step of crystallizing the loaded substrate using a laser; and a third step of moving the While crystallizing the substrate, an ultraviolet light source is used to instantly quantize the moiré; and a fourth step is to unload the substrate that has undergone crystallization and moiré quantification. The method of claim 11, wherein the third step comprises: obtaining a moiré image of the crystallized substrate by using an ultraviolet light source; performing image processing on the acquired moiré image; and analyzing the image through the image The processed image is used as data to quantify moiré; and based on the quantized moiré, the degree of crystallization of a substrate is determined to be robust and poor. The method of claim 12, wherein the moiré image obtained by crystallization of the substrate is adjusted by a position synchronization trigger to obtain a moiré image at regular intervals. The method of claim 12, wherein in the moiré image capturing the crystallized substrate, an image obtaining unit for acquiring the moiré image is disposed at an angle of 20 ^o to 70 ^o with the substrate. The method of claim 14, wherein the ultraviolet light source is configured to be at an angle of 20 ^o to 70 ^o with the substrate. The method of claim 12, wherein the image processing is performed on the acquired moiré image image processing system to perform image preprocessing and image processing to extract the contrast image of the acquired moiré image, and The processed image is analyzed into data to quantify moiré. The method of claim 12, wherein the determining whether the degree of crystallization of the substrate is based on the quantized moiré is poor or not, and when the problem is determined that the crystallized substrate is suitable or defective, the change is radiated to the substrate. The energy density (ED) of the laser beam.