TW201700218A - 具有可移除磨料構件之磨料物件及其分離與替換之方法 - Google Patents
具有可移除磨料構件之磨料物件及其分離與替換之方法 Download PDFInfo
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- TW201700218A TW201700218A TW104143006A TW104143006A TW201700218A TW 201700218 A TW201700218 A TW 201700218A TW 104143006 A TW104143006 A TW 104143006A TW 104143006 A TW104143006 A TW 104143006A TW 201700218 A TW201700218 A TW 201700218A
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- Prior art keywords
- abrasive
- abrasive article
- magnetic
- magnetic member
- major surface
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/14—Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/20—Mountings for the wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/007—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent between different parts of an abrasive tool
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/16—Bushings; Mountings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D9/00—Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
- B24D9/08—Circular back-plates for carrying flexible material
- B24D9/085—Devices for mounting sheets on a backing plate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
- C04B2235/422—Carbon
- C04B2235/427—Diamond
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
- C04B2235/483—Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/638—Removal thereof
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462095090P | 2014-12-22 | 2014-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
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| SG (1) | SG11201704838TA (enExample) |
| TW (1) | TW201700218A (enExample) |
| WO (1) | WO2016106020A1 (enExample) |
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|---|---|---|---|---|
| DE112017001938T5 (de) * | 2016-04-06 | 2019-01-17 | M Cubed Technologies, Inc. | Diamantverbundwerkstoff-Konditionierer für ein CMP-Tuch |
| EP3727753B1 (en) | 2017-12-20 | 2025-08-06 | 3M Innovative Properties Company | Abrasive articles including an anti-loading size layer |
| KR102674027B1 (ko) * | 2019-01-29 | 2024-06-12 | 삼성전자주식회사 | 재생 연마패드 |
| US20220388116A1 (en) * | 2021-06-04 | 2022-12-08 | Applied Materials, Inc. | Method of detecting chemical mechanical polishing conditioning disk orientation |
| CN113618620A (zh) * | 2021-09-07 | 2021-11-09 | 玉溪精工数控机床有限公司 | 一种数控车床主轴箱铲刮面研磨专用工装 |
| JP2024535447A (ja) * | 2021-09-29 | 2024-09-30 | インテグリス・インコーポレーテッド | 両面パッドコンディショナー |
| WO2023055663A1 (en) * | 2021-09-29 | 2023-04-06 | Entegris, Inc. | Pad conditioner with polymer backing plate |
| US20230264319A1 (en) * | 2022-02-21 | 2023-08-24 | Applied Materials, Inc. | Pad carrier assembly for horizontal pre-clean module |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1058502A (en) | 1965-05-06 | 1967-02-15 | Merit Products Inc | Mounting abrasive disks on a drive member |
| US4222204A (en) * | 1979-06-18 | 1980-09-16 | Benner Robert L | Holder for an abrasive plate |
| JPS5698554U (enExample) * | 1979-12-27 | 1981-08-04 | ||
| JPS5815089Y2 (ja) * | 1980-06-30 | 1983-03-26 | 東洋研磨材工業株式会社 | 研削といし |
| JPH0771788B2 (ja) * | 1986-07-29 | 1995-08-02 | 三菱マテリアル株式会社 | 砥 石 |
| BR9408041A (pt) * | 1993-11-12 | 1996-12-24 | Minnesota Mining & Mfg | Processo para preparação de grão abrasivo à base de alumina alfa cerâmico cristalino grão abrasivo e artigo abrasivo |
| JPH0929633A (ja) * | 1995-07-18 | 1997-02-04 | Toshiba Mach Co Ltd | ポリッシング研磨布用ドレッシング工具 |
| JP3981199B2 (ja) * | 1998-02-10 | 2007-09-26 | 八千代マイクロサイエンス株式会社 | 両面ラップ盤用回転定盤 |
| US6123612A (en) * | 1998-04-15 | 2000-09-26 | 3M Innovative Properties Company | Corrosion resistant abrasive article and method of making |
| US6224474B1 (en) * | 1999-01-06 | 2001-05-01 | Buehler, Ltd. | Magnetic disc system for grinding or polishing specimens |
| JP2001071273A (ja) * | 1999-09-01 | 2001-03-21 | Hitachi Maxell Ltd | 研磨シ―ト |
| US7377836B1 (en) * | 2000-10-10 | 2008-05-27 | Beaver Creek Concepts Inc | Versatile wafer refining |
| US6815052B2 (en) * | 2000-12-01 | 2004-11-09 | P1 Diamond, Inc. | Filled diamond foam material and method for forming same |
| JP2002254316A (ja) * | 2001-02-28 | 2002-09-10 | Hitachi Maxell Ltd | 研磨シ―ト |
| JP2006205316A (ja) * | 2005-01-28 | 2006-08-10 | Hitachi Maxell Ltd | 磁性層研磨用ラッピングテープ |
| KR101279819B1 (ko) * | 2005-04-12 | 2013-06-28 | 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스 인코포레이티드 | 방사-편향 연마 패드 |
| KR101483314B1 (ko) * | 2006-08-30 | 2015-01-15 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 수명이 연장된 연마 물품 및 방법 |
| TW201350267A (zh) * | 2012-05-04 | 2013-12-16 | Saint Gobain Abrasives Inc | 用於同雙側化學機械平坦化墊修整器一起使用之工具 |
| JP5919157B2 (ja) * | 2012-10-01 | 2016-05-18 | 株式会社荏原製作所 | ドレッサー |
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- 2015-12-15 JP JP2017552006A patent/JP2018501119A/ja active Pending
- 2015-12-15 SG SG11201704838TA patent/SG11201704838TA/en unknown
- 2015-12-15 KR KR1020177019967A patent/KR20170096025A/ko not_active Withdrawn
- 2015-12-15 EP EP15826084.4A patent/EP3237146A1/en not_active Withdrawn
- 2015-12-15 US US15/537,970 patent/US20180001441A1/en not_active Abandoned
- 2015-12-15 CN CN201580070047.8A patent/CN107257721A/zh active Pending
- 2015-12-21 TW TW104143006A patent/TW201700218A/zh unknown
Also Published As
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|---|---|
| KR20170096025A (ko) | 2017-08-23 |
| WO2016106020A1 (en) | 2016-06-30 |
| CN107257721A (zh) | 2017-10-17 |
| US20180001441A1 (en) | 2018-01-04 |
| SG11201704838TA (en) | 2017-07-28 |
| EP3237146A1 (en) | 2017-11-01 |
| JP2018501119A (ja) | 2018-01-18 |
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