TW201634929A - Fixture for wire probe - Google Patents

Abstract

The present invention provides a fixture for wire probe capable of allowing two ends of a wire probe to reliably contact a terminal of an electrode substrate and a terminal of an inspected substrate without wearing the wire probe easily. A base part (11) for holding a rear end part (45a) of a wire probe (45) and capable of allowing the rear end part (45a) and an electrode substrate (50) to be arranged in a contact manner, and a top part (20) for holding a front end part (45b) of the wire probe (45) and capable of allowing the front end part (45b) and an inspected substrate (55) to be arranged in a contact manner are arranged to be movable relative to each other. The base part (11) includes a first base plate (12) and a second base plate (15). The first base plate (12) is provided with a first guide hole (13) for allowing the wire probe (45) to penetrate through. The second base plate (15) is provided with a second guide hole (16). The second guide hole (16) is arranged in a manner of having a center thereof shifted from a center of the first guide hole (13) in a predetermined direction.

Description

Linear probe fixture

The present invention relates to a jig for a linear probe used for inspection of a substrate disposed between an electrode substrate and a substrate to be inspected.

In the past, in the conduction inspection and electrical property inspection of a semiconductor integrated circuit (inspected substrate), inspection using an extremely thin linear probe was performed. For example, there is known a method in which a plurality of linear probes are held by a jig for a linear probe, and the linear probe is sandwiched between the electrode substrate and the substrate to be inspected, and the both ends of the linear probe are respectively connected to the electrode. The terminal of the substrate is in contact with the terminal of the substrate to be inspected for inspection.

In such an inspection method, various methods have been proposed in order to reliably contact both ends of the linear probe with the terminals of the electrode substrate and the terminals of the substrate to be inspected.

For example, Patent Document 1 discloses a jig for a linear probe, which includes a distal end side support body having a distal end side through hole through which a distal end side portion of the probe penetrates and The opposite side surface of the object is inspected, and the rear end side support body is disposed at a rear side of the front end side support body with a predetermined gap from the front end side support body, the rear end side support body shape a rear end side through hole through which the rear end side portion of the probe passes; a connecting body that connects the front end side support body and the rear end side support body; and an electrode formed with the probe a contact surface of the rear end contact, the electrode being disposed at a rear of the rear end side support body; and a biasing mechanism that separates the contact surface and the opposite surface from the contact surface and the opposite surface Directional force. In the configuration described in Patent Document 1, when the jig for a linear probe is pressed against the substrate to be inspected, the rear-end support moves against the urging force of the urging mechanism, thereby causing the tip of the linear probe to be self-linear. The probe is highlighted with a jig.

Further, for example, Patent Document 2 discloses a jig for a linear probe that overlaps a plurality of plates that penetrate the wire-type probe and biases the plates in directions in which they are separated from each other. According to the configuration described in Patent Document 2, when the jig for the linear probe is pressed against the substrate to be inspected, the separated plates are brought into contact with each other, whereby the tip end of the linear probe protrudes outward.

Patent Document 1: Japanese Laid-Open Patent Publication No. 2009-47512

Patent Document 2: Japanese Laid-Open Patent Publication No. 2010-85398

However, in the structure described in Patent Document 1, the linear probe is slid in the rear end side through hole 20 every time the operation of pressing the linear probe jig to the inspection target substrate is repeated. Therefore, particularly in the opening edge of the rear end side through hole 20 (the drawing in FIG. 5 of Patent Document 1) Wear is likely to occur in the vicinity of the lead line indicated by the mark 15b. When the sliding resistance is increased by abrasion, there is a problem that the linear probe cannot smoothly slide in the rear end side through hole 20, and the front end of the linear probe cannot be in contact with the contact terminal of the electrode substrate.

Further, in the structure described in Patent Document 1, since the tip end of the linear probe comes into contact with or separates from the contact terminal of the electrode substrate, there is a possibility that the tip end of the linear probe is worn or dust adheres to cause contact failure.

Further, in the structure described in Patent Document 2, the linear probe slides in the holding hole 21 each time the linear probe jig is pressed against the substrate to be inspected. At this time, since the linear probe is disposed in the oblique direction in order to deflect the linear probe in a predetermined direction, the linear probe is likely to be worn at the opening edge of the holding hole 21 (the opening edge facing the bottom plate 14). When the sliding resistance is increased by abrasion, there is a problem that the linear probe cannot smoothly slide in the holding hole 21, and the front end of the linear probe cannot be in contact with the contact terminal of the electrode substrate.

Therefore, an object of the present invention is to provide a jig for a linear probe that can reliably contact both ends of the linear probe and the terminals of the substrate to be inspected and which is less likely to cause wear of the linear probe.

The present invention has been made to solve the above problems, and its features are as follows.

According to the invention of the first aspect of the invention, there is provided a jig for a linear probe, which is disposed between an electrode substrate and a substrate to be inspected and used in the inspection substrate, wherein the jig for a linear probe includes a base portion. The rear end portion of the linear probe is disposed so as to be in contact with the electrode substrate; and the top portion is configured to hold the front end portion of the linear probe and to contact the front end portion with the substrate to be inspected. The base portion and the top portion are provided to be movable to each other, and the base portion includes a first bottom plate and a second bottom plate disposed inside the first bottom plate, and the first bottom plate is provided with a wire-type probe through a first guiding hole, wherein the second bottom plate is provided with a second guiding hole through which the linear probe penetrating the first guiding hole is inserted, and the second guiding hole is centered with respect to the first guiding hole The center is set in a manner that is staggered in a prescribed direction.

According to the invention of the first aspect of the invention, the third aspect of the invention is characterized in that the top portion is provided with a third line through which the linear probe penetrating through the second guiding hole is inserted. The guide hole is provided such that the third guide hole is displaced in a direction different from the predetermined direction with respect to the center of the second guide hole.

According to the invention of the first aspect of the invention, the base portion that holds the rear end portion of the linear probe and that can contact the electrode substrate with the rear end portion and the distal end portion of the linear probe can be held. The tops of the front end portion that are in contact with the substrate to be inspected are disposed so as to be movable with each other. With such a configuration, when the linear probe is pressed against the substrate to be inspected, the linear probe is deflected, and the tip of the linear probe is protruded from the jig for the linear probe. The elasticity. Therefore, the front end of the linear probe can be reliably brought into contact with the substrate to be inspected.

In addition, since the linear probe is not slid inside the base or the top when the jig for pressing the probe is pressed against the substrate to be inspected, abrasion of the linear probe is less likely to occur.

In addition, in the case of the structure of the present invention, the distance between the intermediate portion of the linear probe and the structure described in Patent Document 2 is not larger than that of the structure described in Patent Document 2, and therefore The possibility of some force-time linear probes being easy to move. For example, the possibility of moving the linear probe inside the guide hole due to the self-weight of the linear probe increases, and the linear probe is pulled out from the guide hole when the linear probe is removed from the substrate to be inspected. The force generated causes the linear probe to move inside the guide hole to increase.

In this aspect, the base includes a first bottom plate and a second bottom plate disposed inside the first bottom plate, and the first bottom plate is provided with a first guide hole through which the linear probe is inserted. The second bottom plate is provided with a second guide hole through which the linear probe penetrating the first guide hole is inserted, and the second guide hole is shifted in a predetermined direction with respect to the center of the first guide hole. Settings. With such a configuration, the linear probe can be fixed without being moved by the misalignment of the guide holes, and therefore, for example, even when the jig for the linear probe is separated from the substrate to be inspected, the linear probe is self-guided. The pulled force can also prevent the linear probe from moving inside the guiding hole of the base.

As described above, in the present invention, when the linear probe jig is pressed against the substrate to be inspected, the tip end of the linear probe protrudes from the top, and the linear probe is fixed to the base in a non-movable manner. Thereby, both ends of the linear probe are reliably brought into contact with the electrode substrate and the substrate to be inspected and the abrasion of the linear probe is suppressed.

Further, with such a configuration, the rear end portion of the linear probe does not come into contact with or separate from the contact terminal of the electrode substrate, and therefore, the problem that the rear end portion of the linear probe is worn does not occur, and dust adheres to the line type. The problem with the rear end of the probe.

According to the invention of the second aspect of the invention, the top portion is provided with a third guide hole through which the linear probe penetrating through the second guide hole is inserted, and the third guide hole is centered with respect to the The center of the second guide hole is provided so as to be shifted in a direction different from the predetermined direction. In other words, the first guide hole, the second guide hole, and the third guide hole are arranged in Japanese. With such a configuration, by increasing the frictional force between the linear probe and the guide hole of the base, the movement of the linear probe in the base can be further suppressed.

10‧‧‧Line type probe fixture

11‧‧‧ base

11a‧‧‧ surface

12‧‧‧1st floor

13‧‧‧1st lead hole

13a‧‧‧Reducing section

13b‧‧‧Expansion Department

15‧‧‧2nd floor

16‧‧‧2nd guide hole

16a‧‧‧Reducing section

16b‧‧‧Expansion Department

20‧‧‧ top

20a‧‧‧ surface

20b‧‧‧3rd guide hole

21‧‧‧1st top board

22‧‧‧1st through hole

22a‧‧‧Reducing section

22b‧‧‧Expansion Department

23‧‧‧ Guide hole

24‧‧‧Spring hole

26‧‧‧2nd top board

27‧‧‧2nd through hole

27a‧‧‧Reducing section

27b‧‧‧Expansion Department

28‧‧‧Snap hole

28a‧‧‧Little Trails Department

28b‧‧‧The Great Trails Department

29‧‧‧Spring bracket

35‧‧‧ spacers

36‧‧‧Threaded Department

37‧‧‧Spring bracket

40‧‧‧Power components

41‧‧‧Bottom plate fixing screws

42‧‧‧Top plate fixing screws

43‧‧‧Guidance pin

43a‧‧‧Rotate Department

43b‧‧‧Guidance

43c‧‧‧Protection

45‧‧‧Line probe

45a‧‧‧ Back end

45b‧‧‧ front end

50‧‧‧Electrode substrate

51‧‧‧ wiring

55‧‧‧Inspected substrate

P‧‧‧ touch points

L‧‧‧Sliding distance

C1‧‧‧Center axis of the first guiding hole

C2‧‧‧Center axis of the 2nd guiding hole

C3‧‧‧Center axis of the third guiding hole

Fig. 1(a) is a perspective view of a jig for a linear probe, and Fig. 1(b) is a side view of the jig for a linear probe.

2 is a side cross-sectional view of the jig for a linear probe in a standby state.

3 is a side cross-sectional view of the jig for a linear probe in an inspection state.

4 is a partially enlarged side cross-sectional view of the jig for a linear probe in a standby state.

Fig. 5 is a partially enlarged side sectional view showing the jig for a linear probe in an inspection state.

Fig. 6 is a side view illustrating a configuration of a guide hole.

Fig. 7 is a plan view illustrating the arrangement of the guide holes.

Embodiments of the present invention will be described with reference to the drawings.

The jig for the linear probe of the present embodiment is a member for holding the linear probe 45 used for the substrate inspection, and is disposed between the substrate 55 to be inspected and the electrode substrate 50. As shown in FIG. 1, the linear probe jig 10 holds a plurality of linear probes 45 so that the plurality of linear probes 45 do not contact each other. When the jig for the linear probe is used, the other surface of the jig probe 10 is pressed against the surface of the electrode substrate 50 while the one surface of the jig probe 10 is fixed to the surface of the electrode substrate 50. The substrate 55 to be inspected, such as a semiconductor integrated circuit, is brought into contact with the terminals of the electrode substrate 50 and the terminals of the substrate to be inspected 55, respectively, at both ends of the held linear probe 45.

As shown in FIG. 2 and the like, the linear probe 45 is held by the jig 10 for the linear probe in such a manner that the rear end portion 45a and the distal end portion 45b are exposed. At the time of inspection, the exposed rear end portion 45a is brought into contact with the terminal of the electrode substrate 50, and the exposed front end portion 45b is brought into contact with the terminal of the inspection substrate 55.

The end portion of the wiring 51 is provided in an exposed manner at a position where the electrode substrate 50 is in contact with the rear end portion 45a of the linear probe 45. The wiring 51 is electrically connected to a scanner (not shown) for inspection, whereby the inspection of a predetermined portion of the substrate 55 to be inspected can be performed using the line probe 45.

As shown in FIG. 2 and FIG. 3, the jig 10 for a linear probe of the present embodiment includes: a base portion 11 which is Disposed on the electrode substrate 50 side; a top portion 20 disposed on the side of the substrate to be inspected 55; a spacer 35 disposed between the base portion 11 and the top portion 20; and a guide pin 43 for moving the top portion 20 and the spacer member 35 to each other The manner of joining; and the force applying member 40 biases the base 11 and the top 20 in a direction separating the base 11 and the top 20 from each other.

The base portion 11 is a plate-like portion that is disposed to hold the rear end portion 45a of the linear probe 45 and that can contact the electrode substrate 50 with the rear end portion 45a. In the present embodiment, the base portion 11 is composed of the first bottom plate 12 and The two bottom plates 15 are formed by overlapping the two plates. The two plates are joined by a bottom plate fixing screw 41. Further, the bottom plate fixing screw 41 that joins the two plates is screwed to the spacer 35, whereby the base portion 11 and the spacer 35 are integrally fixed and cannot be moved.

The first bottom plate 12 is a plate that is disposed to face the outer side of the base portion 11 , that is, the electrode substrate 50 . The surface of the first bottom plate 12 is in contact with the surface 11a of the base portion 11 of the electrode substrate 50. The first bottom plate 12 is provided with a first guide hole 13 through which the linear probe 45 is inserted. The first guide hole 13 is provided in an amount corresponding to the number of the linear probes 45 held. As shown in FIG. 4 and FIG. 5, the first guide hole 13 has a shape in which a cylindrical reduced diameter portion 13a having a small diameter and a funnel-shaped expanded portion 13b having a large diameter are continuous, and the reduced diameter portion 13a is disposed. On the side of the electrode substrate 50, the expanded portion 13b is disposed on the side of the substrate to be inspected 55. The central axis C1 of the first guiding hole 13 is perpendicular to the base 11.

The second bottom plate 15 is a plate that is disposed on the inner side of the first bottom plate 12, that is, on the side closer to the inspection substrate 55 than the first bottom plate 12. The second bottom plate 15 is provided with a second guide hole 16 through which the linear probe 45 penetrating the first guide hole 13 is inserted. The second guiding hole 16 communicates with the first guiding hole 13 The number corresponding to the number of linear probes 45 held is provided. As shown in FIG. 4 and FIG. 5, the second guide hole 16 has a shape in which a cylindrical reduced diameter portion 16a having a small diameter and a funnel-shaped expanded portion 16b having a large diameter are continuous, and the reduced diameter portion 16a is disposed. On the side of the substrate 55 to be inspected, the expanded portion 16b is disposed on the electrode substrate 50 side. In other words, the expanded portion 16b of the second guiding hole 16 is disposed to face the expanded portion 13b of the first guiding hole 13. Further, the opening of the expanded portion 16b of the second guiding hole 16 is larger than the opening of the expanded portion 13b of the first guiding hole 13. The central axis C2 of the second guiding hole 16 is perpendicular to the base 11.

The top portion 20 is a plate-like portion that is disposed to hold the front end portion 45b of the linear probe 45 and that can contact the inspection target substrate 55. In the present embodiment, the top portion 20 is the first top plate 21 and the first portion. 2 The top plate 26 is formed by overlapping the two plates. The two plates are coupled to each other by a top plate fixing screw 42.

The first top plate 21 is a plate disposed on the inner side of the top portion 20, that is, at a position on the side closer to the electrode substrate 50 than the second top plate 26. The first top plate 21 is provided with a first through hole 22 through which the linear probe 45 is inserted. The first through holes 22 are provided in an amount corresponding to the number of the linear probes 45 held. As shown in FIG. 4 and FIG. 5, the shape of the first through hole 22 is a shape in which a cylindrical reduced diameter portion 22a having a small diameter and a funnel-shaped expanded portion 22b having a large diameter are continuous, and the reduced diameter portion 22a is disposed. On the side of the substrate 55 to be inspected, the expanded portion 22b is disposed on the electrode substrate 50 side.

The second top plate 26 is a plate that is disposed to face the outer side of the top portion 20, that is, the substrate 55 to be inspected. The surface of the second top plate 26 is in contact with the surface 20a of the top portion 20 of the substrate 55 to be inspected. The second top plate 26 is provided with a second through hole 27 through which the linear probe 45 penetrating the first through hole 22 is inserted. The second through The hole 27 is provided in a number corresponding to the number of the linear probes 45 held so as to communicate with the first through hole 22. As shown in FIG. 4 and FIG. 5, the shape of the second through hole 27 is a shape in which a cylindrical reduced diameter portion 27a having a small diameter and a funnel-shaped expanded portion 27b having a large diameter are continuous, and the reduced diameter portion 27a is disposed. On the side of the substrate 55 to be inspected, the expanded portion 27b is disposed on the electrode substrate 50 side. Further, the size of the opening of the expanded portion 27b of the second through hole 27 is substantially the same as the size of the opening of the expanded portion 22b of the first through hole 22. Further, the diameter of the reduced diameter portion 27a of the second through hole 27 and the reduced diameter portion 22a of the first through hole 22 is smaller than the diameter of the reduced diameter portion 16a of the second guide hole 16 and the reduced diameter portion 13a of the first guide hole 13. When the linear probe 45 is inserted from the base portion 11 and the linear probe 45 is attached to the jig probe 10 for the linear probe, the coating portion of the linear probe 45 is engaged with the reduced diameter portion of the first through hole 22 . 22a, without the linear probe 45 being pulled out to the outside of the top 20.

The first through hole 22 and the second through hole 27 form a third guide hole 20b that communicates on the same axis. The third guide hole 20b is inserted through the linear probe 45 that penetrates the second guide hole 16, that is, the linear probe 45 is continuously inserted through the first guide hole 13, the second guide hole 16, and the third guide hole 20b. The jig probe 10 is used for the linear probe. The central axis C3 of the third guiding hole 20b is perpendicular to the base 11.

The spacer 35 is a member that connects the base portion 11 and the top portion 20 at a predetermined interval. In the present embodiment, a plurality of columnar members are used as the spacers 35. However, the present invention is not limited thereto, and the spacers 35 may be formed using, for example, a plate-shaped member. One end portion of the spacer 35 is fixed to the base portion 11 by a bottom plate fixing screw 41. Further, the other end portion of the spacer 35 is movably attached to the top portion 20 by a guide pin 43.

The guide pin 43 is a member for connecting the top portion 20 and the spacer 35 so as to be movable to each other. The guide pin 43 includes a spin-on portion 43a provided at the tip end portion, the screw-on portion 43a is cut with an external thread, a cylindrical guide portion 43b continuous with the spin-fit portion 43a, and a retaining portion 43c, It is provided at the rear end portion, and the diameter of the retaining portion 43c is formed larger than the diameter of the guide portion 43b. The screwing portion 43a is screwed to the female screw portion 36 formed in the spacer 35, and the guide portion 43b is inserted through the guide hole 23 formed in the first top plate 21, and the retaining portion 43c is engaged with the second top plate. The engaging hole 28 formed in the 26, whereby the guide pin 43 connects the spacer 35 and the top 20 so as to be movable to each other.

That is, as shown in Fig. 4, the engaging hole 28 formed in the second top plate 26 includes a small diameter portion 28a having a diameter smaller than the diameter of the retaining portion 43c and a large diameter portion 28b having a diameter larger than the diameter of the retaining portion 43c. The retaining portion 43c is engaged with the step at the boundary between the small diameter portion 28a and the large diameter portion 28b, so that the guide pin 43 serves as a stopper without causing the second top plate 26 to fall off from the first top plate 21. Further, the length of the guide portion 43b is set longer than the length obtained by adding the length of the guide hole 23 and the length of the small diameter portion 28a of the engagement hole 28, and therefore, the top portion 20 can be along the guide portion 43b of the guide pin 43. Move up and down. Specifically, the top portion 20 is movable relative to the spacer 35 (ie, the base portion 11) by an amount corresponding to the sliding distance L shown in FIG. 4 in the up and down direction. Further, the sliding distance L is a length obtained by "(the length of the guiding portion 43b) - (the length of the guiding hole 23) - (the length of the small diameter portion 28a of the engaging hole 28)".

The urging member 40 is a spring for biasing the top portion 20 and the spacer 35 (i.e., the base portion 11) in a direction separating the top portion 20 and the spacer member 35 (i.e., the base portion 11) from each other, as shown in Fig. 4, the urging member One end portion of 40 is supported by the spring holder portion 29 of the second top plate 26 and penetrates the spring hole 24 of the first top plate 21, and the other end portion of the biasing member 40 is supported by the spring holder portion 37 of the spacer 35. The force applying member 40 is compressed in a natural state, and therefore, under the urging force of the urging member 40, as shown in Fig. 4, the top portion 20 and the spacer 35 (i.e., the base portion 11) are separated from each other so as to maintain the sliding distance L.

When the linear probe jig 10 configured as described above is pressed against the substrate 55 to be inspected, as shown in FIGS. 3 and 5, the top portion 20 overcomes the biasing force of the biasing member 40 toward the spacer 35 (base portion 11). The direction of movement. Thereby, the distance between the top portion 20 and the base portion 11 is narrowed, and therefore, the linear probes 45 which are held at the both ends 20 and the base portion 11 respectively are deflected, and the elastic force of the linear probe 45 is generated. Since the distal end portion 45b of the linear probe 45 is pushed outward, the distal end portion 45b of the linear probe 45 can be reliably pressed against the inspection target substrate 55.

At this time, the first bottom plate 12 and the second bottom plate 15 constituting the base portion 11 do not move each other. Further, the first top plate 21 and the second top plate 26 constituting the top portion 20 do not move each other. Therefore, the movement of the linear probe 45 is not generated inside the base portion 11 and the top portion 20, or even if the movement for moving the linear probe 45 is generated, it is extremely small, so that the abrasion of the linear probe 45 can be minimized. limit.

Further, when the linear probe jig 10 is separated from the substrate to be inspected 55 after the end of the inspection, as shown in FIGS. 2 and 4, the top 20 is separated from the spacer 35 by the urging force of the urging member 40. The direction of the (base portion 11) moves. Thereby, the distance between the top portion 20 and the base portion 11 becomes large. At this time, the linear probe 45 is elongated due to the deflection, and therefore, the end portion of the linear probe 45 is sometimes pulled out from the top 20 and the base 11 (Japanese: 抜 ) force.

However, in the present embodiment, the linear probe 45 is restricted by locking the linear probe 45 at Movement within the base 11. In other words, as shown in FIG. 6, the central axis C1 of the first guiding hole 13 and the central axis C2 of the second guiding hole 16 of the present embodiment are provided so that the center thereof is shifted in a predetermined direction, thereby locking without causing the line type. The probe 45 moves in the first guide hole 13 and the second guide hole 16. By suppressing the movement of the linear probe 45 in this manner, the abrasion of the linear probe 45 can be prevented, and the movement of the rear end portion 45a of the linear probe 45 into contact with or separated from the wiring 51 can be prevented to prevent the linear probe 45 and the wiring 51 from being generated. Dust or surface wear occurs at the contact point P between.

Further, as shown in FIG. 6, the central axis C3 of the third guide hole 20b of the present embodiment is provided so that the center is shifted from the center of the central axis C2 of the second guide hole 16. Further, the direction of the central axis C2 of the second guiding hole 16 observed from the central axis C1 of the first guiding hole 13 and the center of the third guiding hole 20b viewed from the central axis C2 of the second guiding hole 16 are disposed. The directions of the axes C3 are different from each other. Therefore, the linear probe 45 penetrating through the three guiding holes is kept in Japanese " With such a holding method, since the frictional force between the linear probe 45 and the guide hole of the base portion 11 becomes large, the movement of the linear probe 45 in the base portion 11 can be further suppressed.

In the present embodiment, the direction (the left side in FIG. 6) of the central axis C2 of the second guiding hole 16 viewed from the central axis C1 of the first guiding hole 13 is the second guiding from the second guiding plane. The direction (the right side in FIG. 6) of the central axis C3 of the third guiding hole 20b observed by the central axis C2 of the hole 16 is in the opposite direction. In other words, as shown in FIG. 7( a ), the angle θ formed by the line connecting C1 and C3 and the line connecting C1 and C2 in the plan view is 180 degrees. However, embodiments of the invention are not limited thereto. For example, the angle θ may be an obtuse angle as shown in FIG. 7( b ) or may be an acute angle as shown in FIG. 7( c ). However, in order to prevent line type exploration For the purpose of the movement of the needle 45, the angle θ is preferably an obtuse angle, and the angle θ is more preferably 180 degrees.

As described above, in the present embodiment, the base portion 11 that holds the rear end portion 45a of the linear probe 45 and that allows the rear end portion 45a to contact the electrode substrate 50 and the front end of the linear probe 45 are held. The top portion 20 of the portion 45b that can be placed in contact with the inspection target substrate 55 can be provided to be movable from each other. With such a configuration, when the linear probe jig 10 is pressed against the substrate 55 to be inspected, the linear probe 45 is deflected, whereby the distal end portion 45b of the linear probe 45 is generated from the linear probe device 10 Outstanding elastic force. Therefore, the front end portion 45b of the linear probe 45 can be reliably brought into contact with the substrate 55 to be inspected.

Further, even when the linear probe jig 10 is pressed against the inspection target substrate 55, the linear probe 45 does not substantially move inside the guide hole, and thus the wear of the linear probe 45 is less likely to occur.

Further, the base portion 11 includes a first bottom plate 12 and a second bottom plate 15 disposed inside the first bottom plate 12, and the first bottom plate 12 is provided with a first guide hole 13 through which the linear probe 45 is inserted. The second bottom plate 15 is provided with a second guide hole 16 through which the linear probe 45 penetrating the first guide hole 13 is inserted, and the second guide hole 16 is centered on the center of the first guide hole 13 Set in a way that is staggered in the specified direction. With such a configuration, the linear probe 45 can be fixed without being moved by the misalignment of the guide holes, and therefore, for example, even when the jig for the linear probe is removed from the substrate 55 to be inspected, the linear probe is applied. The force extracted from the guide hole 45 can also fix the linear probe 45 without moving the linear probe 45 inside the guide hole of the base 11. Further, by fixing the rear end portion 45a of the linear probe 45 in this manner, it is possible to maintain the rear end portion 45a of the linear probe 45 in contact with the electrode substrate 50. status.

Further, with such a configuration, the rear end portion 45a of the linear probe 45 does not come into contact or separate from the contact terminal of the electrode substrate 50, and therefore, the problem that the rear end portion 45a of the linear probe 45 is worn does not occur. The problem that dust adheres to the rear end portion 45a of the linear probe 45.

Further, the top portion 20 is provided with a third guide hole 20b through which the linear probe 45 penetrating the second guide hole 16 is inserted, and the third guide hole 20b is centered with respect to the second guide hole 16 The center is provided in such a manner as to be shifted in a direction different from the predetermined direction. In other words, the first guide hole 13, the second guide hole 16, and the third guide hole 20b are arranged in Japanese. The zigzag shape can securely lock the linear probe 45 to the base portion 11. Therefore, the linear probe 45 does not move inside the guide hole of the base portion 11, and therefore, the linear probe 45 can be prevented from being worn easily.

Further, in the embodiment, the base 11 and the top 20 are respectively formed by using two plates. However, the embodiment of the present invention is not limited thereto, and the base portion 11 may be formed by using three or more sheets. At this time, guide holes through which the wire probes 45 are inserted are provided on three or more plates, and the centers of the respective guide holes are alternately arranged. Further, as for the top portion 20, it may be formed of one sheet or three or more sheets.

10‧‧‧Line type probe fixture

11‧‧‧ base

11a‧‧‧ surface

12‧‧‧1st floor

13‧‧‧1st lead hole

15‧‧‧2nd floor

16‧‧‧2nd guide hole

20‧‧‧ top

20a‧‧‧ surface

20b‧‧‧3rd guide hole

21‧‧‧1st top board

22‧‧‧1st through hole

26‧‧‧2nd top board

27‧‧‧2nd through hole

35‧‧‧ spacers

40‧‧‧Power components

41‧‧‧Bottom plate fixing screws

42‧‧‧Top plate fixing screws

43‧‧‧Guidance pin

45‧‧‧Line probe

45a‧‧‧ Back end

45b‧‧‧ front end

50‧‧‧Electrode substrate

51‧‧‧ wiring

Claims (2)

A jig for a linear probe, which is disposed between an electrode substrate and a substrate to be inspected and used in the inspection substrate, wherein the jig for a linear probe has a base portion for holding a rear end of the linear probe And arranging the rear end portion in contact with the electrode substrate; and a top portion configured to hold the front end portion of the linear probe and to contact the inspection target substrate, the base portion and the top portion The base portion includes a first bottom plate and a second bottom plate disposed inside the first bottom plate, and the first bottom plate is provided with a first guide hole through which the linear probe is inserted. The second bottom plate is provided with a second guide hole through which the linear probe penetrating through the first guide hole is inserted, and the second guide hole is provided such that the center is displaced in a predetermined direction with respect to the center of the first guide hole. . The jig for a linear probe according to the first aspect of the invention, wherein the top portion is provided with a third guide hole through which a linear probe penetrating through the second guide hole is inserted, the third The guide hole is provided such that the center is displaced in a direction different from the predetermined direction with respect to the center of the second guide hole.