JP4955458B2 - Probe unit and circuit board inspection device - Google Patents

Description

  The present invention includes a main body portion having a pair of support portions in which insertion holes are formed, and a probe pin supported by the main body portion in a state where the distal end side and the base end portion side are respectively inserted into the pair of insertion holes. The present invention relates to a probe unit and a circuit board inspection apparatus including the probe unit.

  As this type of probe unit, a vertically operated probe guard (hereinafter also simply referred to as “probe guard”) disclosed in Japanese Patent Laid-Open No. 2000-292439 is known. The probe guard includes a plurality of probes having a buckled portion at the center, a substrate on which a wiring pattern that contacts the probes is formed, and an upper support substrate and a lower support substrate on which a plurality of through holes are formed. And a probe support member provided. In this case, in this probe guard, each probe is fixed to the upper support substrate with an adhesive in a state of being passed through the through hole of the upper support substrate and the through hole of the lower support substrate. For this reason, this probe guard has a problem that the probe removal work and attachment work when replacing the probe are complicated.

  In order to solve this problem, as shown in FIG. 11, the applicant forms a first support portion 131 in which a first insertion hole 131 a is formed, a second insertion hole 132 a and a first support portion 131. The probe unit 102 is developed to support the probe pin 111 by the main body portion 112 having the second support portion 132 disposed opposite to the main body portion 112. In the probe unit 102, the base end portion 122 (large diameter portion) of the probe pin 111 is formed by performing a coating process using, for example, a fluorine-based resin on the base end portion 122 of each probe pin 111 to form the large diameter portion 124. 124) is used to prevent the second support portion 132 from falling off. The probe unit 102 also includes an electrode plate (terminal support portion) 113 that supports a connection terminal 113a for connecting the cable 113b to each probe pin 111. The electrode plate 113 is fixed to the second support portion 132. Thus, each connection terminal 113 a is connected to the base end portion 122 of the probe pin 111.

In this case, the second insertion hole 132a is formed such that the inner diameter on the electrode plate 113 side is larger than the inner diameter on the first support part 131 side, and a step is formed in the middle thereof. ing. Specifically, the second insertion hole 132 a is formed so that the inner diameter on the first support portion 131 side is slightly larger than the probe main body 120 and slightly smaller than the large diameter portion 124. The inner diameter of the electrode plate 113 is slightly larger than that of the large diameter portion 124. As a result, when the probe pin 111 is about to move in the direction of the arrow A in the figure, the large diameter portion 124 abuts on the stepped portion in the second insertion hole 132a and restricts the movement. The situation of falling off from the second support part 132 is avoided. Further, when probing, the probe pin 111 slides in the direction of arrow B with respect to the main body portion 112 by the tip portion 121 coming into contact with the inspection object, and as a result, the base end portion 122 is brought into contact with the connection terminal 113a. Is possible.
Japanese Unexamined Patent Publication No. 2000-292439 (page 3, FIG. 1)

  However, the probe unit 102 developed by the applicant has the following problems to be improved. That is, in the probe unit 102, the large diameter portion 124 is formed at the proximal end portion 122 of the probe pin 111, and the inner diameter of the second insertion hole 132a on the first support portion 131 side is smaller than the large diameter portion 124. In addition, the probe pin 111 can be slid toward the electrode plate 113 during probing while avoiding dropping of the probe pin 111 from the second support portion 132 by forming the probe main body 120 to have a larger diameter than the probe main body 120. An acceptable configuration is adopted. In this case, in this type of probe unit, a very thin probe pin having a diameter of about 50 μm is used. Therefore, it is difficult to process the second insertion hole 132a to a desired inner diameter (an inner diameter slightly smaller than the large diameter portion 124 and slightly larger than the probe main body 120). For this reason, when the second support portion 132 is manufactured (when the second insertion hole 132a is formed), the inner diameter of the second insertion hole 132a on the first support portion 131 side is slightly larger than the desired inner diameter. The diameter of the large diameter portion 124 may be approximately the same as the diameter of the large diameter portion 124 or may be slightly smaller than the desired inner diameter and may be approximately the same as the diameter of the probe main body 120.

  In this case, when the inner diameter of the second insertion hole 132a on the first support portion 131 side is larger than the desired inner diameter, for example, the tip 121 of the probe pin 111 is stuck in a through hole or the like during probing. When the probe unit 102 is moved up in this state, when the probe pin 111 moves relative to the main body 112 in the direction of arrow A shown in FIG. There is a possibility that the contact of the large-diameter portion 124 with respect to the portion is released and the probe pin 111 (base end portion 122) falls out of the second support portion 132. On the other hand, in a state where the inner diameter of the second insertion hole 132a on the first support portion 131 side is smaller than the desired inner diameter, the probe pin 111 is prevented from sliding with respect to the second support portion 132 during probing. There is a possibility that the base end portion 122 is not in contact with the terminal 113a. As described above, the probe unit 102 developed by the applicant causes the probe pin 111 to drop off due to difficulty in accurately forming the second insertion hole 132a having a desired inner diameter. There exists a subject that there exists a possibility that the base end part 122 and the connecting terminal 113a may become non-contact.

  The probe unit 102 developed by the applicant employs a configuration in which the base end portion 122 is brought into contact with the connection terminal 113a by sliding the probe pin 111 with respect to the second support portion 132 during probing. Therefore, an impact is applied to both the base end portion 122 of the probe pin 111 and the connection terminal 113a during probing. For this reason, due to this impact, there is a problem that the base end portion 122 and the connection terminal 113a slightly wear each time probing.

  The present invention has been made in view of such a problem to be solved, and a main object of the present invention is to provide a probe unit and a circuit board inspection apparatus that can reliably prevent the probe pins from dropping from the main body. It is another object of the present invention to provide a probe unit and a circuit board inspection apparatus that can reliably contact each other without causing excessive wear of the connection terminals and probe pins.

In order to achieve the above object, the probe unit according to claim 1 is arranged so as to be opposed to the plate-like first support portion formed with the first insertion hole and the first support portion, and to form the second insertion hole. A main body having a plate-shaped second support portion, and a probe pin supported by the main body in a state where a distal end portion and a base end portion are inserted through the first insertion hole and the second insertion hole, respectively. The probe unit includes a plate-like terminal support portion in which a terminal insertion hole is formed, and the probe pin has a large diameter portion larger than the second insertion hole in a part of the base end portion. as a, the large-diameter portion is formed of a resilient material projecting from the surface opposite to the first support portion in the second supporting section, the terminal support portion, said formed of an elastic material In the terminal insertion hole and in the terminal insertion hole A support member that is in close contact with the connected connection terminal and supports the connection terminal while allowing movement thereof; and is disposed to face the second support portion and is connected to the base end portion of the probe pin. The terminal is fixed to the main body in a state where the end faces thereof are in contact with each other, and the terminal insertion hole gradually increases in diameter as it is separated from the main body at least in the central portion in the insertion direction of the connection terminal. The support member is formed so that the outer diameter thereof is the same as the inner diameter of the terminal insertion hole, and gradually increases in diameter as the support member is separated from the main body side .

  According to a second aspect of the present invention, in the probe unit according to the first aspect, the large-diameter portion is formed by coating a part of the base end portion with a coating material.

Further, the probe unit according to claim 3, wherein, in the probe unit according to claim 1 or 2, wherein the terminal support portion is provided with a disengagement restricting portion for restricting the disengagement of the support member from the terminal insertion hole, said support The member is configured to be peelable from the inner wall surface as the connection terminal moves in the terminal insertion hole.

A circuit board inspection apparatus according to a fourth aspect is based on the probe unit according to any one of the first to third aspects, a moving mechanism for moving the probe unit, and an electric signal input through the probe unit. And an inspection unit that performs an electrical inspection on the inspection object.

According to the probe unit according to claim 1 and the circuit board inspection device according to claim 4 , the probe pin is configured by having a large diameter portion larger than the second insertion hole as a part of the base end portion. By configuring the probe unit by forming the large diameter portion from an elastic material and projecting from the surface of the second support portion opposite to the first support portion, the second insertion hole is slightly smaller than the desired inner diameter, for example. Even when the probe pin is about to move toward the first support part with respect to the main body part (second support part), even if it is formed in a large diameter, it contacts the mouth part of the second insertion hole. As a result of the elastic deformation of the large diameter portion that is in contact and further increasing the diameter, the contact of the large diameter portion with the rim portion of the second insertion hole is maintained, and further movement of the probe pin is restricted. Thus, according to the probe unit and the circuit board inspection apparatus, it is possible to reliably avoid the drop of the probe pin from the main body. In this case, according to the probe unit and the circuit board inspection apparatus, the large-diameter portion is protruded from the surface of the second support portion opposite to the first support portion side to form a wide space around the large-diameter portion. Therefore, the diameter of the large diameter portion can be increased, and the large diameter portion can be sufficiently deformed without being obstructed by the main body portion or the like. Therefore, according to the probe unit and the circuit board inspection apparatus, it is possible to reliably prevent the probe pins from dropping off. In addition, a terminal support portion, which is formed of an elastic material and includes a support member that closely contacts the connection terminal and supports the connection terminal while allowing the movement of the connection terminal, is disposed opposite to the second support portion so that the base of the probe pin is provided. Since the end face of the connection terminal is in contact with the end portion, the probe pin 111 is slid with respect to the main body portion 112 and the base end portion 122 is brought into contact with the connection terminal 113a every time probing is performed. Unlike the conventional probe unit 102 having the configuration, since the base end portion of the probe pin and the connection terminal are brought into contact with each other at the time of manufacture, it is not necessary to slide the probe pin with respect to the main body portion at the time of probing. Even in a state where the two insertion holes are formed slightly smaller than the desired inner diameter, the probe pin (base end) and the connection terminal are not in contact with each other. It is possible to avoid the situation. Further, according to this probe unit, since a large impact is not applied to the contact portion between the base end of the probe pin and the connection terminal, the amount of wear of the probe pin and the connection terminal is sufficiently reduced (excessive wear is reduced). Can be avoided). Furthermore, by forming the terminal insertion hole so that the diameter gradually increases as the distance from the body portion side increases at least in the central part in the insertion direction of the connection terminal, and the outer diameter is the same as the inner diameter of the terminal insertion hole. By forming the support member so as to gradually increase in diameter as it moves away from the main body side, the support member is sufficiently elastically deformed even if there is a probe pin with a large base end protrusion from the main body. As a result of the movement of the connection terminal being allowed, a state in which the base end portion and the connection terminal are brought into contact with each other can be maintained without applying an excessively large force to the contact portion between the base end portion and the connection terminal. Further, according to this probe unit, even when a large force that is difficult to absorb due to deformation of the probe pin is applied to the probe pin during probing, the movement of the connection terminal is allowed by the elastic deformation of the support member. A situation in which an excessively large force is applied to the contact portion of the pin (base end portion) and the connection terminal can be avoided.

  Further, according to the probe unit of claim 2, by forming a large diameter portion by coating a part of the base end portion of the probe pin with a coating material, for example, a large diameter formed separately from the probe main body. Compared with a configuration in which the portion is fixed to the base end portion of the probe main body with an adhesive or the like, the probe pin can be configured at a sufficiently low price by the amount that can eliminate the need for fixing the large diameter portion (adhesion operation). .

Furthermore, according to the probe unit according to claim 3 , the terminal support portion includes a detachment restricting portion that restricts detachment of the support member from the terminal insertion hole, and the support member moves the connection terminal in the terminal insertion hole. With this configuration, the support member is easily elastic as compared with a configuration in which, for example, the support member and the inner wall surface of the terminal insertion hole are fixed to each other. Can be deformed. Therefore, according to this probe unit, it is possible to reliably avoid a situation in which an excessively large force is applied to the base end portion of the probe pin and the contact portion of the connection terminal.

  Hereinafter, the best mode of a probe unit and a circuit board inspection apparatus according to the present invention will be described with reference to the drawings.

  First, the configuration of the circuit board inspection apparatus 1 will be described. A circuit board inspection apparatus 1 shown in FIG. 1 is an example of a circuit board inspection apparatus according to the present invention. For example, a predetermined electrical inspection is performed on a circuit board 100 (an example of an inspection object in the present invention). It is configured to be possible. Specifically, as shown in the figure, the circuit board inspection apparatus 1 includes a probe unit (pin block) 2, a moving mechanism 3, a substrate support unit 4, an inspection unit 5, and a control unit 6. .

  2 and 3, the probe unit 2 includes a plurality of probe pins 11, a main body portion 12, and an electrode plate 13. The probe pin 11 is an example of the probe pin in the present invention. As shown in FIG. 3, the probe pin 11 is configured in a needle shape (cylindrical shape) as a whole, and the distal ends of the distal end portion 21 and the proximal end portion 22 are sharp. Is formed. The probe pin 11 is configured such that the probe main body 20 can be elastically deformed by a conductive metal material (for example, beryllium copper alloy, SKH (high speed tool steel), tungsten steel, etc.). The central portion 23 of the probe pin 11 is coated with an insulating coating material (for example, a fluorine resin such as Teflon (registered trademark). For this reason, the central portion 23 is The probe main body 20 (the distal end portion 21 and the proximal end portion 22 excluding the later described large diameter portion 24) has a slightly larger diameter, and the proximal end portion 22 is made of an insulating elastic material. The large-diameter portion 24 having a slightly larger diameter than the central portion 23 is formed by performing a coating process using the configured coating material (silicone resin as an example).

  As shown in FIG. 2, the main body portion 12 includes a first support portion 31, a second support portion 32, and a connecting portion 33. The 1st support part 31 is formed in plate shape with the resin material etc. which have nonelectroconductivity. Further, as shown in FIG. 3, the first support portion 31 is formed with a plurality of first insertion holes 31a through which the distal end portion 21 of the probe pin 11 is inserted so as to communicate from one surface to the other surface. ing. In this case, in the probe unit 2 according to the present invention, as described later, the large diameter portion 24 restricts the movement of the probe pin 11 toward the distal end portion 21 side. For this reason, in this probe unit 2, by defining the inner diameter of the first insertion hole 31a to be slightly larger than the central part 23, both the tip part 21 and the central part 23 are made to be the first insertion hole as necessary. The distal end portion 21 can be protruded greatly from the first support portion 31 by being inserted through 31a.

  The second support portion 32 is formed in a plate shape by a non-conductive resin material or the like in the same manner as the first support portion 31 described above. Further, the second support portion 32 is disposed to face the first support portion 31 so as to be parallel (substantially parallel), and is connected to the first support portion 31 by a connecting portion 33 as shown in FIG. Has been. Further, as shown in FIG. 3, a plurality of second insertion holes 32 a are formed in the second support portion 32 so as to communicate from one surface to the other surface. In this case, the second insertion hole 32a is slightly larger in diameter than the central portion 23 (coated portion) of the probe pin 11 and slightly smaller in diameter than the large diameter portion 24 of the probe pin 11, that is, The inner diameter is regulated so that the central portion 23 can be inserted and the large diameter portion 24 cannot be inserted.

Here, the magnitude relationship of the outer diameter of each of the probe main body 20, the central portion 23 (the coated portion) and the large diameter portion 24 and the inner diameter of each of the insertion holes 31a and 32a in the probe pin 11 is as follows. It is expressed by the following relational expression.
E1 <E2 <I1 ≦ I2 <E3 Formula (1)
E1: Outer diameter of the probe body 20 E2: Outer diameter of the central portion 23 E3: Outer diameter of the large diameter portion 24 at the base end portion I1: Inner diameter of the first insertion hole 31a I2: Inner diameter of the second insertion hole 32a

  The electrode plate 13 corresponds to a terminal support portion in the present invention, and as shown in FIG. 3, a support portion 41 formed in a plate shape by a non-conductive resin material or the like, and a presser fixed to the support portion 41. And a plate 42 (an example of a “detachment restricting portion” in the present invention), and is disposed so as to face the second support portion 32 of the main body portion 12 via the connecting portion 14 (see FIG. 2). It is fixed to the part 12. Further, the electrode plate 13 includes a connection terminal 13 a for connecting the cable 13 b to the base end portion 22 of each probe pin 11 (for connecting each probe pin 11 to the inspection unit 5). In this case, the support portion 41 is formed with terminal insertion holes 41a through which the connection terminals 13a are inserted so as to communicate from one surface to the other surface. Further, the holding plate 42 is formed so that a terminal insertion hole 42a for inserting each of the connection terminals 13a communicates from one surface to the other surface and communicates with the terminal insertion hole 41a of the support portion 41. Has been.

  In this case, as shown in FIG. 4, the terminal insertion hole 41a has an end portion (lower end portion in the figure) on the second support portion 32 side in the insertion direction (vertical direction in the figure) of the connection terminal 13a. The diameter is larger than that of the second insertion hole 32a, and the diameter is substantially the same as or substantially the same as that of the second insertion hole 32a. In addition, the terminal insertion hole 41a is at least in the insertion direction (at least a portion excluding the end portion on the second support portion 32 side: in this example, all portions other than the end portion on the first support portion 31 side), It is formed so as to gradually increase in diameter as it is separated from the main body 12 side. Further, the terminal insertion hole 42a has a larger diameter than the connection terminal 13a and, as an example, is formed so as to have the same diameter or substantially the same diameter as the end of the terminal insertion hole 41a on the second support part 32 side. Has been.

Here, the relationship between the outer diameter of each of the large-diameter portion 24 and the connection terminal 13a in the probe pin 11 and the inner diameter of each of the terminal insertion holes 41a and 42a is expressed by the following relational expression.
E4 <I3a ≦ I4 <E3 <I3b (2)
E3: Outer diameter of the large diameter portion 24 at the base end portion E4: Outer diameter of the connection terminal 13a I3a: Inner diameter of the terminal insertion hole 41a on the second support portion 32 side I3b: Inner diameter of the terminal insertion hole 41a on the holding plate 42 side I4: Inner diameter of terminal insertion hole 42a

  Further, the terminal insertion holes 41a and 42a are formed by filling an insulating elastic material (for example, silicone resin) between the peripheral surface of the connection terminal 13a and the inner wall surfaces of the terminal insertion holes 41a and 42a. The support member 43 is disposed. In this case, since the support member 43 is formed by filling an elastic material, the outer diameter thereof is the same as the inner diameter of the terminal insertion holes 41a and 42a. Further, in the probe unit 2, the support member 43 is formed so as not to be fixed to the inner wall surfaces of the terminal insertion holes 41a and 42a (so that the terminal insertion holes 41a and 42a can be peeled off from the inner wall surfaces). Therefore, the support member 43 is allowed to peel from the inner wall surface of the terminal insertion hole 41a as shown in FIG. 8 when the connection terminal 13a moves relative to the support portion 41 and the holding plate 42 as described later. The Further, in this probe unit 2, detachment of the support member 43 from the terminal insertion holes 41 a and 42 a is restricted by a pressing plate 42 fixed to the support portion 41.

  The moving mechanism 3 is configured to be able to fix the probe unit 2, and moves the probe unit 2 in a direction in which the probe unit 2 comes in contact with and separates from the substrate support unit 4 under the control of the control unit 6. The substrate support unit 4 is configured to be able to hold the circuit board 100. The inspection unit 5 performs a predetermined electrical inspection such as a disconnection inspection or a short circuit inspection on the circuit board 100 based on an electric signal input via the probe pin 11 of the probe unit 2 according to the control of the control unit 6. . The control unit 6 moves the probe unit 2 fixed to the moving mechanism 3 by controlling the moving mechanism 3. In addition, the control unit 6 controls the inspection unit 5 to execute a predetermined electrical inspection on the circuit board 100.

  Next, a method for assembling the probe unit 2 will be described with reference to the drawings.

  First, the distal end portion 21 of each probe pin 11 is inserted into each second insertion hole 32 a of the second support portion 32, and each probe pin 11 is pushed toward the first support portion 31, whereby the distal end of each probe pin 11 is The portion 21 is inserted through the first insertion hole 31 a of the first support portion 31. In this case, in the probe unit 2, the outer diameter of each of the distal end portion 21 (probe main body 20), the central portion 23, and the large diameter portion 24 of the probe pin 11 and the inner diameters of the respective insertion holes 31 a and 32 a are as described above. It is defined in the magnitude relation of the formula (1). Therefore, the distal end portion 21 is inserted through the second insertion hole 32a and the first insertion hole 31a in this order and protrudes to the outside of the first support portion 31 (the lower side in FIGS. 2 and 3), and the central portion 23 is the first portion. The second insertion hole 32 a is inserted between the first support part 31 and the second support part 32.

  Further, as described above, since the inner diameter of the second insertion hole 32a is smaller than the outer diameter of the large diameter portion 24, the end portion on the distal end portion 21 side in the large diameter portion 24 (specifically, the lower end surface of the coating material) is Contact with the edge of the second insertion hole 32a prevents further insertion of the probe pin 11 (movement to the protruding side). As a result, as shown in FIGS. 2 and 3, the tip 21 of the probe pin 11 protrudes outside the main body 12 (first support 31) by a predetermined length (lower side in the figure) (that is, The protruding length of the distal end portion 21 from the main body portion 12 is adjusted to a predetermined length). Further, the base end portion 22 (the large diameter portion 24 and the probe main body 20 on the end side of the large diameter portion 24) of the probe pin 11 is outside the main body portion 12 (second support portion 32) (upper side in the figure). It will be in the state of protruding.

  Next, as shown in FIG. 4, the electrode plate 13 is fixed to the main body portion 12 via the connecting portion 14 in a state where the electrode plate 13 is disposed opposite to the outside of the second support portion 32 (upper side in the drawing). In this case, the distance from the end on the distal end 21 side of the large-diameter portion 24 of each probe pin 11 supported by the main body 12 to the end on the proximal end 22 side of the probe main body 20 (that is, the above-described first 2) The protrusion length of the probe pin 11 from the support portion 32) is slightly different for each probe pin 11 due to a very small manufacturing error that occurs when the probe pin 11 is manufactured. Therefore, when the electrode plate 13 is fixed to the main body portion 12, the base end portion 22 (probe main body 20) of each probe pin 11 is in contact with each connection terminal 13 a of the electrode plate 13. The distance of the plate 13 is adjusted as appropriate.

  Specifically, even if one of the probe pins 11 is in contact with the connection terminal 13a as shown in FIG. 4 due to the difference in the protruding length of the probe pin 11 described above. As shown in FIG. 5, there may be a probe pin 11 (probe pin 11 having a short protruding length) in which the base end portion 22 (probe body 20) is not in contact with the connection terminal 13a. . At this time, the electrode plate 13 is brought closer to the main body 12 as indicated by an arrow A in FIG. 5, so that the proximal end portion 22 (probe main body 20) of the probe pin 11 as shown in FIG. The connection terminal 13a is brought into contact with At this time, the probe pin 11 (for example, the probe shown in FIG. 4) in which the base end portion 22 (probe main body 20) is in contact with the connection terminal 13a before the electrode plate 13 is brought close to the main body portion 12 as described above. The pin 11) is pushed into the main body 12 as indicated by an arrow A in FIG.

  In this case, the probe unit 2 is different from the configuration in which the second support portion 132 exists around the large-diameter portion 124 as in the probe unit 102 developed by the applicant, the proximal end portion of the probe pin 11. A sufficiently wide space is formed around the large-diameter portion 24 by causing the main body portion 12 (second support portion 32) to protrude. Further, in the probe unit 2, as described above, the large-diameter portion 24 is formed of an elastic material (in this example, a silicone resin) so as to be elastically deformable. Therefore, as shown in FIG. 7, when the electrode plate 13 is moved (approached) with respect to the main body portion 12, the large-diameter portion 24 is sufficiently elastically deformed. As a result, the probe pin 11 is pushed into the main body portion 12. Is acceptable. At this time, the outer diameter of the large diameter portion 24 is deformed as the large diameter portion 24 is elastically deformed as long as the large diameter portion 24 is in contact with the edge portion of the second insertion hole 32a even slightly. As a result of the larger diameter than before, the contact state of the large diameter portion 24 with the edge portion of the second insertion hole 32a is maintained. Therefore, further insertion of the probe pin 11 (movement to the protruding side) is reliably prevented.

  On the other hand, in each of the probe pins 11, there may be a probe pin 11 (not shown) having a longer protruding length from the main body 12 (second support portion 32) than the probe pin 11 shown in FIG. When such a probe pin 11 exists, not only the probe pin 11 is pushed into the main body 12 by deforming the large diameter portion 24 as shown in FIG. 7, but also as shown in FIG. The connection terminal 13a abutted against the pin 11 moves in the terminal insertion holes 41a and 42a relative to the support portion 41 and the pressing plate 42 in the direction of arrow B, so that the probe pin 11 with respect to the main body portion 12 is obtained. Is avoided.

  In this case, in the probe unit 2, as described above, the terminal insertion hole 41a is formed so that the diameter gradually increases as the distance from the main body portion 12 side increases, and the terminal insertion hole 41a and the terminal insertion hole 42a are connected. A support member 43 is formed by filling an elastic material between the terminals 13a. For this reason, as shown in FIGS. 4-7, the support member 43 is the center part (direction of the arrow B shown in FIG. 8: the insertion direction with respect to the support part 41 and the pressing plate 42) in the said movement direction of the connection terminal 13a. The portion of the terminal insertion hole 41a excluding the portion that is in contact with the end portion on the second support portion 32 side and the portion that is in contact with the terminal insertion hole 42a) gradually increases as the outer diameter is separated from the main body portion 12 side. It has a large diameter. Therefore, for example, as shown in FIG. 8, as the connection terminal 13 a moves, the outer diameter of the support member 43 is the same as that in which the terminal insertion holes 41 a and 42 a are formed so as to have the same diameter at any part. When a force in the direction of arrow B is applied to the support member 43, the portion having a large diameter in the support member 43 is elastically deformed so as to be sufficiently compressed. Thereby, the smooth movement of the connection terminal 13a is permitted.

  In the probe unit 2, as described above, the support member 43 is configured to be peelable from the inner wall surface of the terminal insertion hole 41a. For this reason, as described above, when the support member 43 is elastically deformed so that the portion having a large diameter is compressed due to the force to move the connection terminal 13a in the direction of the arrow B. In addition, the portion of the support member 43 that was in contact with the inner wall surface of the terminal insertion hole 41a before being deformed peels from the inner wall surface and moves in the terminal insertion hole 41a toward the holding plate 42 together with the connection terminal 13a. Therefore, in this probe unit 2, a force that maintains the outer peripheral surface of the support member 43 in contact with the inner wall surface of the terminal insertion hole 41 a (that is, pulls the connection terminal 13 a back in the direction opposite to the direction of the arrow B). (Force to try) is sufficiently small. Thereby, in this probe unit 2, compared with the structure which the outer peripheral surface of the supporting member 43 and the inner wall face of the terminal penetration hole 41a mutually adhere, force required for the elastic deformation of the supporting member 43 is enough, for example The connection terminal 13a is allowed to move more smoothly. For this reason, the state in which the probe pin 11 (base end part 22) and the connection terminal 13a were connected is maintained, without causing destruction of the probe pin 11 or the connection terminal 13a. Thus, the assembly of the probe unit 2 is completed. Thereafter, the probe unit 2 is screwed to a mounting plate (not shown) of the moving mechanism 3. Thereby, the attachment of the probe unit 2 to the circuit board inspection apparatus 1 is completed.

  Next, a method for performing an electrical inspection on the circuit board 100 using the circuit board inspection apparatus 1 will be described with reference to the drawings.

  First, the circuit board 100 is fixed to the board support 4. Next, the circuit board inspection apparatus 1 is operated. At this time, the control unit 6 controls the moving mechanism 3 to move the probe unit 2 in the direction approaching the circuit board 100. Subsequently, the control unit 6 further moves the probe unit 2 by a predetermined distance from the position where the tip 21 of each probe pin 11 of the probe unit 2 contacts the terminal of the circuit board 100. In this case, in the probe unit 2, the central portion 23 of the probe pin 11 is slightly curved in advance. Therefore, when the distal end portion 21 of the probe pin 11 is moved to the second support portion 32 side with the movement of the probe unit 2, the bending amount of the central portion 23 changes (increases) and the bending amount The distal end of the base end portion 22 reliably contacts the connection terminal 13a of the electrode plate 13 by the elastic force resulting from the change.

  Next, the inspection unit 5 performs an electrical inspection on the circuit board 100 based on the electrical signal input via the probe pin 11 under the control of the control unit 6. Subsequently, when the inspection of the circuit board 100 is completed, the control unit 6 controls the moving mechanism 3 to move the probe unit 2 in a direction away from the circuit board 100. Next, when an electrical inspection is performed on another circuit board 100, the above steps are repeated. In this case, in the probe unit 102 developed by the applicant, the base end portion 122 contacts the connection terminal 113a of the electrode plate 113 by sliding each probe pin 111 with respect to the main body portion 112 every time probing is performed. Is adopted. On the other hand, in the probe unit 2 according to the present invention, as described above, the base end portion 22 is set in contact with the connection terminal 13a of the electrode plate 13 during assembly, and each probe pin is used during probing. 11 is maintained in a stationary state with respect to the second support portion 32 of the main body portion 12.

  Further, for example, an excessively large force is applied in an orientation in which the probe pin 11 is moved upward with respect to the main body portion 12 by, for example, foreign matter being sandwiched between the circuit board 100 and the tip portion 21 of each probe pin 11. When added, the center portion 23 of the probe pin 11 is curved as described above, and at the same time, as shown in FIG. 9, with the slide of the probe pin 11 with respect to the main body portion 12 (movement in the direction of arrow B), The support member 43 is elastically deformed and the connection terminal 13a slides in the direction of arrow B. Thereby, it is avoided that an excessively strong force is applied to the contact portion between the base end portion 22 of the probe pin 11 and the connection terminal 13a. Further, for example, when the probe unit 2 is moved up with the tip 21 of the probe pin 11 stuck in the through hole of the circuit board 100 during probing, the bending amount of the central portion 23 of the probe pin 11 is increased. Simultaneously with the decrease (the degree of bending decreases), as shown in FIG. 10, the large-diameter portion 24 is elastically deformed and deformed before the probe pin 11 moves in the direction of arrow A with respect to the main body portion 12. Larger diameter. Thereby, the contact state of the large diameter part 24 with respect to the edge part of the 2nd penetration hole 32a is maintained, and the situation where the probe pin 11 (base end part 22) falls out from the 2nd support part 32 is avoided.

  Thus, according to the probe unit 2 and the circuit board inspection apparatus 1, the probe pin 11 is configured by having the large diameter portion 24 larger than the second insertion hole 32a as a part of the base end portion 22. In addition, the large diameter portion 24 is formed of an elastic material (silicone resin in this example) and protrudes from the surface of the second support portion 32 opposite to the first support portion 31, for example, a second insertion hole. Even when the probe pin 11 is about to move toward the first support portion 31 with respect to the main body portion 12 (second support portion 32), even when the diameter 32a is slightly larger than the desired inner diameter. Furthermore, as a result of the large diameter portion 24 in contact with the edge portion of the second insertion hole 32a being elastically deformed and further increasing in diameter, the contact of the large diameter portion 24 with the edge portion of the second insertion hole 32a is caused. And further movement of the probe pin 11 is restricted. . Thereby, according to this probe unit 2 and the circuit board test | inspection apparatus 1, dropping of the probe pin 11 from the main-body part 12 can be avoided reliably. In this case, according to the probe unit 2 and the circuit board inspection apparatus 1, the large diameter portion 24 is protruded from the surface of the second support portion 32 opposite to the first support portion 31 side, so that the large diameter portion 24 Since a large space is formed around the periphery, the diameter of the large-diameter portion 24 can be increased, and the large-diameter portion 24 can be sufficiently deformed without being obstructed by the main body portion 12 or the like. Therefore, according to the probe unit 2 and the circuit board inspection apparatus 1, it is possible to reliably prevent the probe pin 11 from dropping off.

  Further, according to the probe unit 2 and the circuit board inspection apparatus 1, the large diameter portion 24 is formed by coating a part of the base end portion 22 of the probe pin 11 with the coating material. Compared to the configuration in which the separately formed large diameter portion 24 is fixed to the base end portion 22 of the probe body 20 with an adhesive or the like, the probe can be fixed to the extent that the fixing work (adhesion work) of the large diameter portion 24 can be eliminated. The pin 11 can be configured sufficiently inexpensively.

  Further, according to the probe unit 2 and the circuit board inspection apparatus 1, the probe unit 2 and the circuit board inspection apparatus 1 are formed of an elastic material (silicone resin in this example) and are in close contact with the connection terminal 13a to support the connection terminal 13a while allowing its movement. In the state where the electrode plate 13 (terminal support portion) provided with the support member 43 is disposed opposite to the second support portion 32 and the end face of the connection terminal 13 a is in contact with the base end portion 22 of the probe pin 11. Unlike the conventional probe unit 102 in which the probe pin 111 is slid with respect to the main body portion 112 and the base end portion 122 is brought into contact with the connection terminal 113a every time probing is performed. The proximal end portion 22 of the probe pin 11 and the connection terminal 13a are brought into contact with each other, and the probing is performed with respect to the main body portion 12 during probing. Since it is not necessary to slide the pin 11, the probe pin 11 (base end portion 22) and the connection terminal 13 a are not connected even when the second insertion hole 32 a is formed to have a diameter slightly smaller than the desired inner diameter. A situation of contact can be avoided. Further, according to the probe unit 2 and the circuit board inspection apparatus 1, since a large impact is not applied to the contact portion between the base end portion 22 of the probe pin 11 and the connection terminal 13a, the probe pin 11 and the connection terminal 13a It is possible to sufficiently reduce the amount of wear (avoid excessive wear).

  In addition, according to the probe unit 2 and the circuit board inspection apparatus 1, the terminal insertion holes 41a and 42a are gradually increased in diameter as they are separated from the main body 12 side at least in the central portion in the insertion direction of the connection terminal 13a. And the support member 43 is formed by filling an elastic member (silicone resin in this example) between the peripheral surface of the connection terminal 13a and the inner wall surfaces of the terminal insertion holes 41a and 42a. Even if the probe pin 11 having a large protruding amount of the base end portion 22 from 12 exists, the support member 43 is sufficiently elastically deformed to allow the connection terminal 13a to move. As a result, the base end portion 22 and the connection terminal 13a The state in which the base end portion 22 and the connection terminal 13a are in contact with each other can be maintained without applying excessively large force to the contact portion. Further, according to the probe unit 2 and the circuit board inspection apparatus 1, even when a large force that is difficult to absorb due to deformation of the probe pin 11 is applied to the probe pin 11 during probing, the connection terminal is connected by elastic deformation of the support member 43. By allowing the movement of 13a, it is possible to avoid a situation in which an excessively large force is applied to the contact portion between the probe pin 11 (base end portion 22) and the connection terminal 13a.

  Further, according to the probe unit 2 and the circuit board inspection apparatus 1, the electrode plate 13 includes the pressing plate 42 (detachment restricting portion) that restricts the separation of the support member 43 from the terminal insertion holes 41a and 42a, and the terminal. Since the support member 43 is configured to peel from the inner wall surface of the terminal insertion hole 41a, 42a with the movement of the connection terminal 13a in the insertion hole 41a, 42a, for example, the support member 43 and the terminal insertion hole 41a, 42a The support member 43 can be easily elastically deformed as compared with the configuration in which the inner wall surfaces are fixed to each other. Therefore, according to the probe unit 2 and the circuit board inspection apparatus 1, it is possible to reliably avoid a situation in which an excessively large force is applied to the contact portion between the proximal end portion 22 of the probe pin 11 and the connection terminal 13a.

  In addition, this invention is not limited to said structure. For example, the configuration example in which the base end portion 22 of the probe pin 11 is coated with a coating material (silicone resin in this example) to form the large-diameter portion 24 has been described above. A configuration in which the large-diameter portion 24 is provided in the base end portion 22 by fixing the diameter portion 24 to the base end portion 22 of the probe main body 20 (adhering as an example) can be employed. In addition, the configuration example in which the distal end portion 21 of the probe pin 11 is not coated with the coating material has been described above. However, the probe pin 11 coated with the coating material is also used on the distal end portion 21 except the portion that contacts the inspection object. You can also. According to this configuration, by using a coating material having a small friction coefficient, the frictional force between the inner peripheral wall constituting the first insertion hole 31a and the tip 21 can be kept small. For this reason, the operation | movement at the time of moving the front-end | tip part 21 of the probe pin 11 to the 2nd support part 32 side with the movement of the probe unit 2 at the time of a test | inspection can be made smooth.

  Furthermore, the configuration example in which the support member 43 is formed by filling an elastic material (silicone resin in this example) between the peripheral surface of the connection terminal 13a and the inner wall surfaces of the terminal insertion holes 41a and 42a is described above. The support member 43 configured separately from the portion 41, the pressing plate 42, and the connection terminal 13a is fixed to the connection terminal 13a (adhered as an example), and in this state, the connection terminal 13a and the support member are placed in the terminal insertion hole 41a. It is possible to adopt a configuration in which 43 is inserted and the pressing plate 42 is fixed to the support portion 41. By adopting this configuration, the support member 43 can be securely fixed to the connection terminal 13a, and the support member 43 can be reliably peeled from the inner wall surface of the terminal insertion hole 41a as the connection terminal 13a moves. The electrode plate 13 can be configured as possible.

  Further, the probe unit 2 having a plurality of probe pins 11 of 10 or more has been described as an example. However, the configuration of the probe unit (the number of probe pins) according to the present invention is not limited to this. The above-described configuration of the present invention can also be applied to a probe unit (not shown) having a configuration in which a pair of probe pins 11 and 11 used by the terminal method measurement are supported by the main body portion 12. Even in the probe unit configured as described above, the same effects as those of the probe unit 2 can be obtained. Further, the configuration in which the connection terminal 13a is directly connected to the base end portion 22 of each probe pin 11 supported by the main body portion 12 has been described. For example, an anisotropic conductive rubber is provided between the base end portion 22 and the connection terminal 13a. Etc. can also be inserted. According to this configuration, the same effect as that when the support member 43 of the probe unit 2 is deformed can be obtained by the elastic force of the anisotropic conductive rubber.

1 is a configuration diagram showing a configuration of a circuit board inspection device 1. FIG. 2 is a configuration diagram showing a configuration of a probe unit 2. FIG. 3 is a cross-sectional view of the probe unit 2. FIG. It is sectional drawing of the probe unit 2 which shows the site | part of the probe pin 11 in the state in which the base end part 22 is contacting with respect to the connection terminal 13a. It is sectional drawing of the probe unit 2 which shows the site | part of the probe pin 11 in the state in which the base end part 22 is non-contact with respect to the connection terminal 13a. FIG. 6 is a cross-sectional view of the probe unit 2 in a state where the electrode plate 13 in the state shown in FIG. 5 is brought close to the main body portion 12 and the base end portion 22 is brought into contact with the connection terminal 13a. FIG. 7 is a cross-sectional view of the probe unit 2 showing a portion of the probe pin 11 shown in FIG. 4 when the electrode plate 13 is brought close to the main body 12 as shown in FIG. 6. FIG. 4 is a cross-sectional view of the probe unit 2 in a state where movement of the connection terminal 13a is allowed by elastic deformation of the support member 43. FIG. 6 is a cross-sectional view of the probe unit 2 in a state where the support member 43 is elastically deformed and the connection terminal 13a is moved along with the movement of the probe pin 11 with respect to the main body 12. It is sectional drawing of the probe unit 2 of the state by which the main-body part 12 was moved up in the state in which the front-end | tip part 21 stabbed into the through hole. It is a block diagram of the conventional probe unit 102 which the applicant has developed.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Circuit board inspection apparatus 2 Probe unit 3 Movement mechanism 4 Board | substrate support part 5 Inspection part 6 Control part 11 Probe pin 12 Main body part 13 Electrode plate 13a Connection terminal 13b Cable 14,33 Connection part 20 Probe main body 21 Front-end | tip part 22 Base end part 23 central part 24 large diameter part 31 first support part 31a first insertion hole 32 second support part 32a second insertion hole 41 support part 41a, 42a terminal insertion hole 42 holding plate 43 support member 100 circuit board

Claims (4)

A main body having a plate-like first support portion in which a first insertion hole is formed and a plate-like second support portion that is disposed opposite to the first support portion and in which a second insertion hole is formed; A probe unit including a probe pin supported by the main body in a state where a distal end portion and a proximal end portion are respectively inserted into the first insertion hole and the second insertion hole;
It has a plate-like terminal support part in which a terminal insertion hole is formed,
The probe pin has a large-diameter portion larger in diameter than the second insertion hole as a part of the base end portion, and the large-diameter portion is formed of an elastic material and is formed in the second support portion. 1 protrudes from the surface opposite to the support portion,
The terminal support portion is formed of an elastic material and disposed in the terminal insertion hole, and is in close contact with the connection terminal inserted in the terminal insertion hole and supports the connection terminal while allowing movement thereof. A support member that is arranged to face the second support portion and is fixed to the main body portion in a state where the end surface of the connection terminal is in contact with the base end portion of the probe pin,
The terminal insertion hole is formed so as to gradually increase in diameter as it is separated from the main body part side at least in the central part in the insertion direction of the connection terminal,
The probe unit is a probe unit that is formed such that an outer diameter thereof is the same as an inner diameter of the terminal insertion hole, and gradually increases in diameter as the support member is separated from the main body portion side .   The probe unit according to claim 1, wherein the large-diameter portion is formed by coating a part of the base end portion with a coating material. The terminal support portion includes a detachment restricting portion for restricting detachment of the support member from the terminal insertion hole,
Wherein the support member, the probe unit releasably is configured according to claim 1 or 2 from the inner wall surface with the movement of the connecting terminal in the terminal insertion hole. The probe unit according to any one of claims 1 to 3 , a moving mechanism for moving the probe unit, and an inspection unit that performs an electrical inspection on an object to be inspected based on an electrical signal input via the probe unit. And a circuit board inspection apparatus.

Images