TW201630276A - Intermediate connector and substrate inspecting apparatus - Google Patents

Abstract

The present invention provides an intermediate connector, which can easily reduce mutual interferences of a plurality of terminal members, and increase configuration density of the terminal members. The intermediate connector includes a board, a covering conductor layer, a plurality of terminal members and an insulating layer. The board is formed with through holes; the covering conductor layer is provided to cover the inner surface of the through holes; the plurality of terminal member penetratingly mounted inside the covering conductive layer, and the plural terminal member have a rod-like shape and are conductive; the insulating layer is formed between the covering conductor layer and the terminal members, making each of the covering conductor layers insulated from the terminal members; a first connecting portion is provided at an end portion of plural terminal members respectively, a second connection portion disposed at the other end portion of the plural terminal members respectively.

Description

Relay connector and substrate inspection device

The present invention relates to a relay connector suitable for relaying between connection terminals as a wire object, and a substrate inspection device including the same.

In the related art, a relay connector in which a through hole is formed in a matrix on a base plate and a pin-shaped terminal member is inserted into the through hole is known (for example, see Patent Document 1). The relay connector is a hole that is inserted into the through hole adjacent to the through hole into which the terminal member is inserted without being inserted into the terminal member. A conductor layer is formed on the inner peripheral surface of the cavity, and the conductor layer can be in contact with the ground. Therefore, the two terminal members are not adjacent to each other, and a grounded hole is disposed between the two terminal members. Thereby, mutual interference of a plurality of terminal members can be reduced.

Prior technical literature

Patent literature

Patent Document 1: Japanese Laid-Open Patent Publication No. 2013-214376

However, according to the above technique, since holes are disposed between the two terminal members, there is a problem that it is not easy to increase the arrangement density of the terminal members.

The present invention provides a relay connector that reduces mutual interference of a plurality of terminal members and that is easy to increase the arrangement density of the terminal members, and a substrate inspection device including the relay connector.

The present invention discloses a relay connector adapted to relay between a plurality of first connection terminals as a wire object and a plurality of second connection terminals as wire objects. The relay connector includes a board, a conductive cover conductor layer, a terminal member, and an insulating layer. The plate is a plate-shaped member formed with a plurality of through holes penetrating in the thickness direction; the conductive cover conductor layer is provided to cover the inner surface of each of the through holes; and the terminal member is penetratingly attached to the cover conductor layer of each through hole. The inner side of the terminal member is rod-shaped and electrically conductive; the insulating layer is formed between each of the covering conductor layers and the terminal member that is inserted through the inner side of each of the covering conductor layers, and each of the covering conductor layers and each of the covering conductor layers The terminal component is insulated. A first connection portion configured to be connectable to the plurality of first connection terminals is provided at one end portion of the plurality of terminal members, and the other end portions of the plurality of terminal members are respectively configured to be connectable to the plurality of second connections a second connection portion to which the terminal is connected.

Preferably, the relay connector has a plurality of plates, and the plurality of plates are laminated to form a plurality of through holes forming a mutually adjacent plate and a plurality of through holes communicating with each other; a plurality of terminal members It is installed through a plurality of communication holes.

Preferably, in the plate faces of the plurality of plates facing the plates of the adjacent plates, the openings are formed so as to avoid the ends of the insulating layers in the through holes in the plate faces. a conductor portion; the conductor portion is provided to be connected to the covered conductor layer formed in each of the through holes; and the conductor portions formed on the opposite plate faces are in contact with each other, thereby connecting a plurality of the plurality of connected holes in the thickness direction The cover conductor layer is turned on.

Preferably, the conductor portion is formed in a planar shape on the opposite plate surface so as to be connected to the ends of the plurality of covered conductor layers and to electrically conduct between the plurality of covered conductor layers.

Preferably, at least one of the two plate faces located at both end portions in the stacking direction among the plurality of laminated plates is formed such that the opening portion is provided so as to avoid the end portions of the insulating layers and expand into a planar shape The conductive layer is connected to the end of one side of each of the covered conductor layers.

The present invention discloses a substrate inspection apparatus including the above-described relay connector.

The relay connector and the substrate inspection device of such a configuration can easily reduce mutual interference of a plurality of terminal members and increase the arrangement density of the terminal members.

According to the present invention, since the first connection portion provided at one end of the plurality of terminal members can be connected to the first connection terminal of the wire object, the second connection portion provided at the other end of the plurality of terminal members can be connected The second connection terminal of the wire object is connected, so that the first connection terminal and the second connection terminal are relayed by the terminal component. That is, the signal flows through each terminal component. Further, each of the terminal members is surrounded by the covered conductor layer in a state insulated by the insulating layer. Thereby, each terminal member can be electromagnetically shielded by covering the conductor layer. As a result, mutual interference (crosstalk) of a plurality of terminal members can be reduced. Further, since it is not necessary to dispose holes between the two terminal members as in the prior art, it is easy to increase the arrangement density of the terminal members.

In addition, the distance of the signal relayed by the relay connector can be adjusted by the number of slices of the board. Therefore, it is easy to manufacture a relay connector corresponding to the distance of the signal to be relayed.

Further, by laminating a plurality of plates, the conductor portions of the respective plates are in contact with each other and electrically connected, and a plurality of covered conductor layers connected in the thickness direction in the communication holes formed by the through holes of the respective plates are electrically connected. As a result, since the terminal member that is inserted through the communication hole can be surrounded by continuously covering the conductor layer without a gap, it is possible to increase the electromagnetic shielding effect by the covering conductor layer, that is, the mutual interference of the plurality of terminal members ( Crosstalk reduction effect.

Further, when the conductor portion is grounded, the planar conductor portion serves as a ground conductor, and the effect of stabilizing the ground potential and the effect of reducing the impedance can be further increased, and the electromagnetic shielding effect by the covering conductor layer can be further increased.

Further, when the conductive layer is grounded, the planar conductive layer serves as a ground conductor, and the area of the ground conductor can be increased, the ground potential can be stabilized, and the ground resistance can be reduced. Therefore, it is possible to increase the connection based on the ground. The electromagnetic shielding effect of covering the conductor layer.

Further, in the substrate inspection apparatus, the effect of the above-described relay connector can be achieved.

Hereinafter, a relay connector according to an embodiment of the present invention will be described based on the drawings. In the drawings, the same reference numerals are given to the same structures, and the description thereof will be omitted. 1 is a side view schematically showing a configuration of a relay connector and a first connection terminal and a second connection terminal of a connection object connected to the relay connector according to an embodiment of the present invention.

The relay connector 1 shown in Fig. 1 is connected to the connection switching unit 2 on one side (lower side in the drawing) and to the connector 3 on the other side (upper side in the drawing). The relay connector 1 is relayed between the connection switching unit 2 and the connector 3. The relay connector 1 is configured by supporting a plurality of electrically conductive terminal members 10 in a plate-like bottom plate A.

The connection switching unit 2 is a scanning device used for a substrate inspection device that performs electrical property inspection of a wiring pattern provided on a substrate. The connection switching unit 2 switches the electrical connection relationship between the probe of the inspection jig and the inspection unit including the power supply unit for inspection, the voltage detection unit, and the current detection unit including the inspection apparatus main body. The connection switching unit 2 is composed of a plurality of substrate units 21 each including a plurality of switching elements, and a plurality of first connection terminals 22 projecting in a pin shape are provided at one end portion of each substrate unit 21 at a predetermined pitch.

A substrate inspection device according to an embodiment of the present invention includes a relay connector 1. The relay connector 1 relays between the inspection jig and the connection switching unit 2 (scanning device), and the inspection jig includes a probe for bringing it into contact with a checkpoint such as a wiring pattern of the inspection object.

When the relay connector 1 is attached to the connection switching unit 2, one end portion of the plurality of terminal members 10 is connected to a plurality of first connection terminals 22, respectively.

A plurality of terminal accommodating holes 32 capable of accommodating the other end portion of the terminal member 10 protruding from the relay connector 1 to be described later are formed in the connector 3. A pin-shaped second connection terminal 31 is provided in the terminal accommodating hole 32. The plurality of second connection terminals 31 are connected to the respective electrode portions connected to the respective probes of the inspection jig via the wires 4, respectively.

If the connector 3 is mounted on the relay connector 1, the other end portions of the plurality of terminal members 10 are respectively accommodated in the plurality of terminal accommodating holes 32, and in each of the terminal accommodating holes 32, the other of the plurality of terminal members 10 One end portion is connected to a plurality of second connection terminals 31, respectively. That is, by connecting the connection switching unit 2, the relay connector 1, and the connector 3, the plurality of probes provided in the inspection jig are electrically connected to the plurality of first connection terminals 22 of the connection switching unit 2, respectively.

Further, although the example in which the relay connector 1 is relayed between the inspection jig of the substrate inspection device and the connection switching unit 2 (scanning device) is shown, the relay connector 1 can be used for various purposes. The first connection terminal 22 is not limited to the connection terminal to which the switching unit 2 is connected, and the second connection terminal 31 is not limited to the connection terminal to which the inspection jig (probe) is connected.

FIG. 2 is a plan view of the relay connector 1 shown in FIG. 1. The top view shown in Fig. 2 shows the upper surface of the relay connector 1 shown in Fig. 1. Since the upper surface and the lower surface of the relay connector 1 are configured to be substantially the same, the lower surface of the relay connector 1 will also be described with reference to FIG. Fig. 3 is a cross-sectional view taken along line III-III of the relay connector 1 shown in Fig. 2 .

The relay connector 1 shown in FIGS. 2 and 3 includes a plate-shaped bottom plate A and a plurality of terminal members 10 for relay connection. The bottom plate A is formed by laminating the plates 7, 8, and 9. The plates 7, 8, 9 are formed of, for example, an insulating material such as resin or glass fiber. The plates 7, 8, and 9 are joined and laminated by, for example, bonding means such as an adhesive. In addition, the number of sheets is not limited to three. The number of sheets constituting the bottom plate A may be one sheet, and may be two sheets or four sheets or more. Further, the bottom plate A is not limited to a plate shape. The bottom plate A may also be, for example, a block shape.

According to this configuration, the distance at which the signal is relayed by the relay connector 1 can be adjusted by the number of sheets. Therefore, it is easy to manufacture the relay connector 1 corresponding to the distance to which the signal is to be relayed.

The number of the plurality of through holes, for example, 1024, is arranged, for example, in a matrix form on the plates 7, 8, and 9, that is, 1024 through holes 71 are formed in the plate 7, and 1024 through holes 81 are formed in the plate 8. On the board 9, 1024 through holes 91 are formed. In addition, in FIGS. 2 to 4, for the sake of simplification of the description, an example in which twelve through holes 71, 81, and 91 are formed in the plates 7, 8, and 9, respectively.

The through holes 71, 81, 91 are formed at mutually corresponding positions of the plates 7, 8, 9. The plates 7, 8, and 9 are stacked so that the through holes of the mutually adjacent plates communicate with each other to form a plurality of communication holes. The through hole 71 is formed with a cover conductor layer 72 so as to cover the inner wall surface thereof. The through hole 71 and the cover conductor layer 72 form a so-called through hole. Similarly, the cover conductor layer 82 is formed in the through hole 81, and the cover conductor layer 92 is formed in the through hole 91. The cover conductor layers 72, 82, and 92 are formed of a plating layer made of a conductive metal such as copper.

The thickness of the plates 7, 8, 9 is, for example, set to 5.0 mm, respectively; the inner diameter of the through holes 71, 81, 91 is set to, for example, 2.2 mm; the inner diameter of the cover conductor layers 72, 82, 92 is set, for example, to 1.4 mm. The pitch of the through holes 71, 81, 91 is set to, for example, 2.54 mm; the diameter of the terminal member 10 is set to, for example, 1.0 mm.

Insulating layers 73, 83, and 93 formed of an insulating material such as a resin are formed inside the cover conductor layers 72, 82, and 92. The terminal member 10 having a rod shape is inserted through the inside of the insulating layers 73, 83, and 93 so that the communication holes formed by the through holes 71, 81, and 91 communicate with each other. The terminal member 10 is held in the communication hole by the insulating layers 73, 83, 93 and insulated from the cover conductor layers 72, 82, 92.

The two plate faces (the upper surface of the plate 7 and the lower surface of the plate 9 in FIG. 3) of the bottom plate A formed by laminating the plates 7, 8, and 9 in the stacking direction are expanded into a planar conductive shape. The layers 74 and 94 are formed with openings 77 and 97 so as to avoid the ends of the insulating layers 73 and 93 exposed on the respective plate faces. The conductive layer 74 is connected to an end portion on the upper surface side of the plate 7 covering the conductor layer 72. The conductive layer 94 is connected to an end portion on the lower surface side of the plate 9 covering the conductor layer 92. The conductive layers 74, 94 constitute a so-called full-page pattern.

In addition, it is not necessarily limited to the example in which the conductive layers 74 and 94 are formed. Among the conductive layers 74 and 94, for example, only the conductive layer 74 may be provided, or only the conductive layer 94 may be provided, or any one of the conductive layers 74 and 94 may not be provided.

Referring to FIG. 3 and FIG. 4, FIG. 4 is a view showing a plate surface facing the plates of the adjacent plates among the plate faces of the plates 7, 8, and 9 (the lower surface of the plate 7 in FIG. 3, the plate 8 A top view of the upper surface and the lower surface, the upper surface of the plate 9, hereinafter referred to as the opposing plate surface.

The opposing plate surface is opened so as to be surrounded by the end faces of the insulating layers 73, 83, and 93 which are formed in the through holes 71, 81, and 91 formed in the plate surface, and is connected to the cover conductor layers 72, 82, and 92. Conductor portions 75, 85, 95. Thus, when the plates 7 , 8 , and 9 are laminated to form the bottom plate A, the conductor portion 75 is in contact with the conductor portion 85 , and the conductor portion 85 is in contact with the conductor portion 95 . As a result, the conductive layer 74, the covered conductor layers 72, 82, 92, and the conductive layer 94 are turned on. In order to prevent an increase in contact resistance on the surfaces of the conductor portions 75, 85, and 95, for example, an oxidation prevention treatment such as gold plating is performed.

Through holes 76, 86, 96 are formed in the plates 7, 8, and 9, at positions corresponding to each other. The vias 76, 86, 96 are connected to the conductive layers 74, 94. When the plates 7, 8, and 9 are stacked to form the bottom plate A, the through holes 76, 86, and 96 communicate with each other to constitute a communication hole. Conductive connecting pins 5 are inserted through the communication holes, and the covered conductor layers 72, 82, 92 on the inner faces of the through holes 76, 86, 96 are electrically connected to the connecting pins 5. Thereby, the connection pins 5 are connected to the ground by using, for example, a wiring or the like, whereby the conductive layers 74, 94 and the cover conductor layers 72, 82, 92 are grounded.

1 to 5, FIG. 5 is a vertical cross-sectional view showing an example of the configuration of the terminal member 10 shown in FIG. 3. The terminal member 10 is configured to include a tubular portion 11 , a plunger 12 , and a compression spring 13 . The tubular portion 11 has an elongated cylindrical shape, and a first connecting portion 111 is provided at one end portion thereof. The tubular portion 11, the plunger 12, and the compression spring 13 are made of a conductive material such as a conductive metal.

When the pin-shaped first connection terminal 22 of the connection switching unit 2 is inserted into the first connection portion 111, the first connection portion 111 is externally fitted to the first connection terminal 22 and electrically connected. Further, one or a plurality of conductive sliding contact pieces 112 that are in sliding contact with the side surface of the inserted first connection terminal 22 are provided on the inner circumferential surface of the first connection portion 111.

A partition wall-shaped fixing portion 113 for preventing and disengaging the compression spring 13 to be described later is provided inside the tubular portion 11. Further, the tubular portion 11 is provided with a roller caulking portion 114 which is engaged with the engaging portion 123 provided on one side of the plunger 12 to be described later to partially prevent the plunger 12 from being loosened. Further, in the cylindrical portion 11, the insulating layer 73 is provided when the terminal member 10 is inserted (pressed) into the inner sides of the insulating layers 73, 83, 93 of the through holes 71, 81, 91 of the plates 7, 8, 9. The inner circumference of 83 and 93 faces the outer side of the radial direction to press the terminal member 10 to prevent the terminal member 10 from being partially expanded.

The plunger 12 is formed of a conductive material such as a conductive metal, and has an elongated substantially rod-like shape, one end side of which is in the axial direction from the other side of the cylindrical portion 11 toward the cylindrical portion 11 (arrow B in Fig. 5) The direction of the indication is inserted in a state where it can slide. At the other end of the plunger 12, a second connecting portion 121 to which the pin-shaped second connecting terminal 31 of the connector 3 is electrically connected is provided, and at the front end of the second connecting portion 121, a second connecting terminal 31 is provided. The recessed portion 122 in which the front end of the second connection terminal 31 is fitted when connected.

Further, as a modification, the recessed portion 122 may be provided at the front end of the second connection terminal 31 instead of the front end of the second connection portion 121. Further, in a portion of the plunger 12 that is inserted into the tubular portion 11, an engaging portion 123 that engages with the roller caulking portion 114 of the tubular portion 11 is provided in order to prevent seizure.

The compression spring 13 is inserted and held in a state of being compressed in the axial direction between the fixed portion 113 in the tubular portion 11 and one end portion of the plunger 12, and the one end portion of the plunger 12 is turned to the other side (the plunger is inserted) 12 is pressed in the direction in which the outer side of the tubular portion 11 is pushed out.

Therefore, when the second connecting portion 121 of the plunger 12 is connected to the second connecting terminal 31, the plunger 12 is pressed into the tubular portion 11 against the urging force of the compression spring 13 due to the load at the time of connection. At this time, since the second connection portion 121 is pressed toward the second connection terminal 31 by the urging force of the compression spring 13, the stable connection state between the second connection portion 121 and the second connection terminal 31 can be obtained.

The connection of the relay connector 1 thus constructed and the connection switching unit 2 is performed by inserting each of the first connection terminals 22 of the connection switching unit 2 into the first connection portion 111 of the corresponding terminal member 10 of the relay connector 1. In-house. Further, the connection of the relay connector 1 and the connector 3 is such that the terminal is accommodated by inserting the second connection portion 121 of each terminal member 10 of the relay connector 1 into the corresponding terminal accommodating hole of the connector 3. The front end of the second connection terminal 31 in the hole is fitted into the recessed portion 122 of the second connection portion 121. Thereby, the first connection terminal 22 of the connection switching unit 2 and the second connection terminal 31 of the connector 3 are electrically connected via the terminal member 10 of the relay connector 1.

Since the relay connector 1 configured as described above can electromagnetically shield (shield) the terminal member 10 through which the signal to be relayed is covered by the cover conductor layers 72, 82, 92, it is possible to reduce a plurality of The terminal members 10 interfere with each other, so-called crosstalk. Further, since the relay connector 1 does not need to provide a cavity between the two terminal members as in the prior art, it is easy to increase the arrangement density of the terminal member 10.

Further, since the conductor portions 75, 85, and 95 are formed on the opposing plate faces of the plates 7, 8, and 9, the bottom plate A is formed by laminating the plates 7, 8, and 9, whereby the conductor portion 75 is in contact with the conductor portion 85. The conductor portion 85 is in contact with the conductor portion 95. As a result, since the covered conductor layers 72, 82, and 92 associated with one communication hole can be easily electrically connected, it is easy to cause the cover conductor layers 72, 82, and 92 to function as electromagnetic masks (masks).

Preferably, by providing at least one of the conductive layers 74, 94, the area of the ground conductor can be increased to stabilize the ground potential, and since the impedance of the ground can be reduced, the coverage based on the ground connection can be increased. The electromagnetic shielding effect of the conductor layers 72, 82, 92. When the structure including the conductive layers 74 and 94 is used, the effect of stabilizing the ground potential and the effect of reducing the impedance are further increased, and the electromagnetic shielding effect by the covering conductor layers 72, 82, and 92 can be further increased.

Preferably, although the conductor portions 75, 85, and 95 are formed corresponding to the plurality of through holes 71, 81, and 91, respectively, the conductor portions 75, 85, 95 and the conductive layers 74, 94 may be configured. . Similarly, the opposing plate faces are formed in a planar shape so as to be connected to the ends of the plurality of cover conductor layers 72, 82, 92, and a plurality of cover conductor layers 72, 82, 92 are formed in the face direction of the opposing plate faces. The conduction between the conductor portions 75, 85, 95 formed in a planar shape is connected to the connection pin 5. In this way, it is possible to further increase the stabilizing effect of the ground potential and the effect of reducing the impedance, and it is possible to further increase the electromagnetic shielding effect by the covering conductor layers 72, 82, and 92.

FIG. 6 is an explanatory diagram for explaining a method of manufacturing the relay connector 1. First, as shown in FIG. 6(a), a plurality of through holes and through holes 76 constituting the through hole 71 and the cover conductor layer 72 are formed, and the conductive layer 74 is formed on one surface and the conductor portion 75 is formed on the other surface. The two-sided via substrate serves as the board 7. Further, although the plate 7 is taken as an example in FIGS. 6(a), (b), and (c), FIGS. 6(a), (b), and (c) are similarly applied to the plates 8 and 9.

Next, as shown in FIG. 6(b), an insulating material C such as a resin is filled in a region surrounded by the covered conductor layer 72 in the through hole. Next, as shown in FIG. 6(c), the insulating material C filled in the through hole is formed with a through hole D having an inner diameter substantially equal to the outer shape of the tubular portion 11 by, for example, drilling.

Next, as shown in FIG. 6(d), the thus-formed sheets 7, 8, and 9 are laminated to form the bottom plate A. Next, as shown in FIG. 6(e), the terminal member 10 is inserted (press-fitted) into the communication hole in which the conductor layers 72, 82, and 92 are formed to communicate with each other, and the through holes 76, 86, and 96 are formed in communication. The communication hole penetrates (presses) the connection pin 5 through. As described above, the relay connector 1 can be manufactured by the manufacturing flow shown in FIGS. 6(a) to 6(e).

Next, in order to confirm the electromagnetic shielding effect between the terminal members 10, that is, the effect of reducing crosstalk, with respect to the relay connector 1 configured as described above, the electrostatic capacitance between the adjacent two terminal members 10 was experimentally measured. . The smaller the electrostatic capacitance between the adjacent two terminal members 10, the greater the electromagnetic shielding effect of the terminal members 10, that is, the reduction effect of crosstalk.

As a comparative example for confirming the effect, a comparative sample in which the cover conductor layers 72, 82, 92, the conductive layers 74, 94, and the conductor portions 75, 85, 95 (see Fig. 2) were removed from the relay connector 1 was produced. Then, for the relay connector 1 and the comparison sample, the electrostatic capacitance between the two terminal members 10 was measured at each frequency of 20 kHz, 100 kHz, and 1 MHz. As a result, in the relay connector 1, when the measurement frequency is 20 kHz, it is 17.9 Ff, and when the measurement frequency is 100 kHz, it is 15.7 fF, and when the measurement frequency is 1 MHz, it is 13.4 fF. On the other hand, in the comparative sample, the measurement frequency was 130.4 fF at 20 kHz, and the measurement frequency was 143.6 fF at 100 kHz, and 132.5 fF at the measurement frequency of 1 MHz.

According to the above experimental results, the capacitance of the relay connector 1 between the two terminal members 10 is reduced by about 1/10 with respect to the comparative sample, and the electromagnetic shielding effect, that is, the effect of reducing the crosstalk can be confirmed.

1‧‧‧Relay connector
2‧‧‧Connection switching unit
3‧‧‧Connector
4‧‧‧ wire
5‧‧‧Connecting pins
7, 8, 9‧‧ boards
10‧‧‧Terminal parts
11‧‧‧ Tube
12‧‧‧Plunger
13‧‧‧Compression spring
21‧‧‧Substrate unit
22‧‧‧First connection terminal
31‧‧‧Second connection terminal
32‧‧‧Terminal receiving hole
71, 81, 91‧‧‧through holes
72, 82, 92‧‧‧ covered conductor layers
73, 83, 93‧‧‧ insulation
74, 94‧‧‧ conductive layer
75, 85, 95‧‧‧ conductors
76, 86, 96‧‧‧through holes
77, 97‧‧‧ openings
111‧‧‧First connection
112‧‧‧Sliding contact piece
113‧‧‧ fixed department
114‧‧‧ Roller riveting
115‧‧‧ Pressure ring
121‧‧‧Second connection
122‧‧‧Depression
123‧‧‧Clock Department
A‧‧‧floor
C‧‧‧Insulation materials
D‧‧‧through hole

1 is a side view schematically showing a configuration of a relay connector and a first connection terminal and a second connection terminal of a connection object connected to the relay connector according to an embodiment of the present invention.

2 is a top plan view of the relay connector shown in FIG. 1.

Fig. 3 is a cross-sectional view taken along line III-III of the relay connector shown in Fig. 2;

4 is a plan view showing a plate surface facing each other in the respective plate faces of the plate.

Fig. 5 is a longitudinal sectional view showing an example of a configuration of a terminal member shown in Fig. 3;

Fig. 6 is an explanatory diagram for explaining a method of manufacturing the relay connector.

1‧‧‧Relay connector

5‧‧‧Connecting pins

7, 8, 9‧‧ boards

10‧‧‧Terminal parts

71, 81, 91‧‧‧through holes

72, 82, 92‧‧‧ covered conductor layers

73, 83, 93‧‧‧ insulation

74, 94‧‧‧ conductive layer

75, 85, 95‧‧‧ conductors

76, 86, 96‧‧‧through holes

77, 97‧‧‧ openings

A‧‧‧floor

Claims (6)

A relay connector adapted to relay between a plurality of first connection terminals as a wire object and a plurality of second connection terminals as a wire object, the relay connector comprising: a board a plate-shaped member having a plurality of through holes penetrating in the thickness direction; a conductive cover layer covering the inner surface of each of the through holes; and a plurality of terminal members The plurality of terminal members are rod-shaped and electrically conductive, and an insulating layer is formed on each of the covering conductor layers and is mounted on each of the covered conductor layers. Covering between the terminal members on the inner side of the conductor layer, and insulating each of the cover conductor layers from each of the terminal members; and configuring one end portion of the plurality of terminal members to be connectable to the plurality of first connection terminals a first connecting portion; and a second connecting portion configured to be connectable to the plurality of second connecting terminals at each of the other end portions of the plurality of terminal members. The relay connector according to claim 1, wherein the relay connector has a plurality of the plates, and the plurality of the plates are stacked as a plurality of the through holes of the plates adjacent to each other The through holes communicate with each other to form a plurality of communication holes, and the plurality of terminal members are inserted through the plurality of communication holes. The relay connector of claim 2, wherein an opening portion is formed in an upper surface of each of the plurality of plates facing the adjacent plate of the plate The plate surface avoids a conductor portion of the end portion of the insulating layer in each of the through holes; the conductor portion is disposed to be connected to the covered conductor layer formed in each of the through holes; and is formed on the opposite plate The conductor portions of the face are in contact with each other such that a plurality of the covered conductor layers connected in the thickness direction of the respective communication holes are electrically connected. The relay connector of claim 3, wherein the conductor portion is formed in a planar shape on the opposite plate surface so as to be connected to the ends of the plurality of the cover conductor layers and the plurality of The conductive layer is covered between the conductive layers. The relay connector according to any one of claims 2 to 4, wherein at least one of the two plate faces at both end portions in the stacking direction of the plurality of stacked plates is laminated The conductive portion is formed to be a conductive layer which is formed to avoid the end portions of the insulating layers and expand into a planar shape on one side thereof; the conductive layer is connected to an end portion on one side of each of the covering conductor layers. A substrate inspection apparatus comprising the relay connector according to any one of claims 1 to 5.