TW201621324A - Inspection system of probe card - Google Patents

Abstract

An inspection system of probe card comprises a probe card, an inspection board, at least one driving unit, and a control unit, wherein the probe card has a plurality of probes, and the inspection board has a plurality of inspection portions in which its number is less than the probes on the probe card, and the driving unit is assembled to the probe card or the inspection board, and the control unit includes an inspection circuit and an algorithm driving circuit. The inspection circuit is electrically connected to the probe card, the inspection board while the algorithm driving circuit is electrically connected to the inspection circuit and the driving unit so that the probe card or the inspection board is driven by the driving unit to allow a part of probes on the probe card is in contact with and inspected by the inspection portions, and partial completed inspection signals are generated by the inspection circuit that then are accessed and stored by the algorithm driving circuit, and furthermore the displacement stroke of the probe card or the inspection board is controlled by control parameter determined by the algorithm to enable the inspection portions to further inspect probes that are not completed. Accordingly, more probes can be effectively completed with inspection through less inspection portions and the fastest speed and shortest time.

Description

Probe card detection system

The present invention relates to a detection system, and more particularly to a probe card detection system capable of efficiently detecting a large number of probes by using fewer detection sections.

For a long time, the semiconductor industry will first verify that the probe card is available during the wafer acceptance test. The probe card is responsible for the last test, before the IC is cut (WS: Wafer Sort), the important role of the functional test is normal, when the IC test can work normally, the IC will be packaged (FT: Final Test; IC has been packaged) and then the subsequent classification (BIN) test, thereby It can be seen that when the error rate of the probe card is high, it will directly affect the speed and quality of the subsequent shipment. Therefore, it is very important to detect whether the probe of the probe card is available and the efficiency of the detection work.

However, as the IC card becomes more and more powerful, the number of probe pins is increasing, and even the number of probe pins is up to tens of thousands. If we use the number of detection parts of the probe card probe, we can make it. The same amount as the probe card probe results in a significant increase in cost and is not economical.

Therefore, the inventor's current concept of continuous improvement and innovation based on products is based on years of experience in the design and development of semiconductor and electronic related test industry products, as well as active research and development, through numerous practical tests and experiments. The invention has been produced.

The object of the present invention is to provide a driving unit for driving a probe card or detecting Board, and control the probe card or the detection plate displacement stroke by the control parameters determined according to the algorithm, so that all the probes can be detected without repeated detection, and the detection portion can be used with less detection The probe card detection system that detects a large number of probes is completed.

For the above purposes, the present invention comprises a probe card, a detecting board, at least one driving unit, and a control unit, wherein the probe card has a plurality of probes; the detecting board has a number detecting portion, and the number of detecting portions The probe unit is connected to one of the probe card and the detecting board; the control unit includes a detecting circuit and an algorithm driving circuit, and the detecting circuit is electrically connected to the detecting circuit The probe card and the detection board are electrically connected to the detection circuit and the driving unit.

The probe card or the detecting board is driven by the driving unit, so that the detecting part contacts and detects a part of the probe of the probe card, and the detection circuit generates a partially completed detection signal, and then the algorithm drives the circuit to access the memory. And controlling the displacement of the probe card or the detecting plate by the control parameter determined according to the algorithm, so that the detecting portion further detects the probe that has not been completed, and can have fewer detecting portions and can be at the fastest speed, The detection of more probes is done efficiently in the shortest time.

The following is a detailed description of the present invention and the detailed description of the various features and features of the present invention.

10‧‧‧ probe card

11‧‧‧Probe

12‧‧‧Probe card interface

20‧‧‧Test board

21‧‧‧Detection Department

30‧‧‧Drive unit

40‧‧‧Control unit

41‧‧‧Detection circuit

42‧‧‧ algorithm drive circuit

50‧‧‧ Conversion Card

51‧‧‧Connecting line

60‧‧‧Mobile unit

70‧‧‧ drive unit

A‧‧‧Logic Analyzer

B‧‧‧Digital Signal Generator

Figure 1 is a perspective exploded view of the present invention.

Fig. 2 is a view (I) of the detection embodiment of the present invention.

Figure 3 is a diagram (II) of the detection embodiment of the present invention.

Fig. 4 is a view (3) of the detection embodiment of the present invention.

Figure 5 is a diagram (4) of the detection embodiment of the present invention.

Figure 6 is a diagram (5) of the detection embodiment of the present invention.

Figure 7 is a diagram (6) of the detection embodiment of the present invention.

Figure 8 is a diagram (I) of the detection embodiment of the present invention for detecting a large-area rectangular probe card.

Figure 9 is a diagram (2) of the detection embodiment of the present invention for detecting a large-area rectangular probe card.

Figure 10 is a diagram (I) of the detection embodiment of the present invention for detecting two rectangular planar probe cards.

Figure 11 is a diagram (2) of the detection embodiment of the present invention for detecting two rectangular planar probe cards.

Figure 12 is a perspective exploded view of another configuration of the present invention.

Figure 13 is a diagram (I) of a detection embodiment of another configuration of the present invention.

Figure 14 is a diagram (II) of a detection embodiment of another configuration of the present invention.

Fig. 15 is a view (3) showing a detection embodiment of another configuration of the present invention.

Figure 16 is a diagram (4) of a detection embodiment of another configuration of the present invention.

Fig. 17 is a view (1) showing an embodiment of detecting a large-area rectangular probe card of another configuration of the present invention.

Figure 18 is a diagram (2) showing an embodiment of detecting a large-area rectangular probe card of another configuration of the present invention.

Fig. 19 is a view (1) showing an embodiment of detection of two rectangular planar probe cards in another configuration of the present invention.

Figure 20 is a diagram (2) showing an embodiment of detection of two rectangular planar probe cards in another configuration of the present invention.

Figure 21 is a perspective view showing another configuration of the detecting plate of the present invention.

Fig. 22 is a plan view showing another configuration of the probe and the detecting portion of the present invention.

Referring to FIG. 1 and FIG. 4, the probe card detection system of the present invention comprises a probe card 10, a detecting board 20, a number driving unit 30, and a control unit 40, which will be described in detail below. : The probe card 10 has a plurality of probes 11; the probe card 10 can be a direct current probe card.

The detecting plate 20 has a number detecting portion 21 having a smaller number than the probe 11 of the probe card 10; the detecting portion 21 of the present embodiment has a protruding shape.

The driving unit 30 is connected to the probe card 10. In the embodiment, the driving unit 30 is configured to receive the movement control signal of the control unit 40, thereby driving the probe card 10 to perform a predetermined stroke in the X-axis and Y-axis directions in the vertical and horizontal directions. The displacement.

The control unit 40 includes a detection circuit 41 and an algorithm driving circuit 42. The detection circuit 41 is electrically connected to the probe card 10 and the detecting board 20. The algorithm driving circuit 42 is electrically connected to the detecting circuit 41. And the drive unit 30.

In one embodiment, the present invention includes a probe card interface 12 and a conversion card 50. The probe card interface 12 and the conversion card 50 are electrically connected in a stack, and the detection of the probe card 10 is usually performed. The electrical connection is disposed on the probe card 30, and the conversion card 50 can be electrically connected to one of the test instruments.

The conversion card 50 is connected to a plurality of mobile units 60 for receiving the movement control signal of the control unit 40, and driving the probe card interface 12 and the conversion card 50 to perform a predetermined stroke in the X-axis and Y-axis directions in the vertical direction and the horizontal direction. Displacement.

Referring to FIG. 2, FIG. 3, and FIG. 6, when the present invention is applied, the probe unit interface 12, the conversion card 50, and the probe card 10 are moved toward the detecting board 20 by the driving unit 30 and the moving unit 60. And the detecting portion 21 of the detecting board 20 is in contact with a part of the probe 11 of the probe card 10.

Referring to FIG. 4, the detection unit 21 contacts and detects a part of the probe 11 of the probe card 10, and the detection circuit 41 of the control unit 40 generates a partially completed detection signal, and then the algorithm is executed. The drive circuit 42 accesses the memory and controls the control by the algorithm. The number of strokes of the probe card 10 is controlled. Referring to FIG. 5 and FIG. 7 , the probe card interface 12 , the conversion card 50 , and the probe card 10 are driven by the moving unit 60 and the driving unit 30 away from the detecting board. 20 detecting the position and performing the displacement of the predetermined stroke in the horizontal direction, and moving the probe card 10 toward the detecting plate 20 again (please refer to FIG. 3), so that the detecting portion 21 further detects the probe 11 that has not completed the detection, and can The detection unit 21 is less likely to be able to efficiently perform the detection of a large number of probes 11 at the fastest speed and in the shortest time.

In addition, the conversion card 50 can be electrically connected to the logic analyzer A, and the detection board 20 can be electrically connected to the digital signal generator B, and the AC circuit and the transmission line principle are used to cooperate with the logic analyzer A, the digital signal generator B, and the like. The error analysis test and improvement of the probe card 10 can be performed by using the communication method, thereby avoiding the misjudgment of the error rate of the probe card 10, reducing the card exchange rate and the cleaning rate, and reducing the inventory rate of the DC probe card.

Referring to FIG. 8 and FIG. 9 , in a configuration embodiment, the probe card 10 can be a rectangular having a large area, and only the movement of the probe card 10 can be applied, and the detection portion 21 can be used in a small amount. It is possible to efficiently perform the detection of a large number of probes 11 at the fastest speed and in the shortest time.

Referring to FIG. 10 and FIG. 11 , in a configuration embodiment, the probe card 10 can be two rectangular faces, and only the movement of the probe card 10 can be applied, and the detection portion 21 can be used with less. It is possible to efficiently perform the detection of a large number of probes 11 at the fastest speed and in the shortest time.

Referring to FIG. 12, FIG. 13, FIG. 14, FIG. 15, and FIG. 16, in a configuration embodiment, the detecting board 20 is connected to the driving unit 70, and the driving unit 70 is configured to receive The movement control signal of the control unit 40 further drives the detecting plate 20 to perform displacement of the predetermined strokes in the X-axis and Y-axis directions in the vertical and horizontal directions. Accordingly, only the movement of the detecting plate 20 is applied, and the detecting portion 21 can be used in the same manner. And it can efficiently detect more probes at the fastest speed and in the shortest time. 11.

Referring to FIG. 17 and FIG. 18, in a configuration embodiment, in a configuration embodiment, the probe card 10 can be a rectangle having a large area, and only the movement of the detecting board 20 can be applied, and the same can be performed. The detecting unit 21 can efficiently perform the detection of a large number of probes 11 at the fastest speed and in the shortest time.

Referring to FIG. 19 and FIG. 20, in a configuration embodiment, the probe card 10 can be two rectangular faces, and only the movement of the detecting plate 20 can be applied, and the detecting portion 21 can be used with less. The probe 11 is detected more efficiently in the fastest speed and in the shortest time.

Referring to FIG. 21, in a configuration embodiment, the detecting portion 21 of the detecting plate 20 is planar or concave (not shown), and is also capable of detecting.

Referring to FIG. 22, in a configuration embodiment, the probe 11 of the probe card 10 and the detecting portion 21 of the detecting board 20 may be arranged irregularly.

The above embodiments of the present invention are provided for convenience of explanation only. When the meaning of the case cannot be limited, the various transformation designs according to the scope of the listed patent application should be included in the patent scope of the present application.

10‧‧‧ probe card

11‧‧‧Probe

12‧‧‧Probe card interface

20‧‧‧Test board

21‧‧‧Detection Department

30‧‧‧Drive unit

40‧‧‧Control unit

41‧‧‧Detection circuit

42‧‧‧ algorithm drive circuit

50‧‧‧ Conversion Card

51‧‧‧Connecting line

60‧‧‧Mobile unit

A‧‧‧Logic Analyzer

B‧‧‧Digital Signal Generator

Claims (5)

A probe card detecting system includes: a probe card having a plurality of probes; a detecting plate having a plurality of detecting portions, the number of detecting portions being less than a probe of the probe card; at least one driving unit, a group Connected to the probe card and one of the detecting boards; a control unit includes a detecting circuit and an algorithm driving circuit, the detecting circuit is electrically connected to the probe card, the detecting board, and the algorithm driving circuit Electrically connected to the detection circuit and the driving unit. The probe card detecting system according to claim 1, wherein the detecting portion has a protruding shape. The probe card detecting system of claim 1, wherein the probe card is rectangular. The probe card detecting system of claim 1, wherein the probe card has two rectangular faces. The probe card detecting system according to claim 1, wherein the detecting portion of the detecting plate is one of a flat shape and a concave shape.