CN104502874A - Method for effectively control diameter of probe in probe clamp - Google Patents

Method for effectively control diameter of probe in probe clamp Download PDF

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Publication number
CN104502874A
CN104502874A CN201410692983.XA CN201410692983A CN104502874A CN 104502874 A CN104502874 A CN 104502874A CN 201410692983 A CN201410692983 A CN 201410692983A CN 104502874 A CN104502874 A CN 104502874A
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CN
China
Prior art keywords
probe
pin
pin footpath
footpath
test
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410692983.XA
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Chinese (zh)
Inventor
沈茜
莫保章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Huali Microelectronics Corp
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Shanghai Huali Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Shanghai Huali Microelectronics Corp filed Critical Shanghai Huali Microelectronics Corp
Priority to CN201410692983.XA priority Critical patent/CN104502874A/en
Publication of CN104502874A publication Critical patent/CN104502874A/en
Pending legal-status Critical Current

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Abstract

The invention belongs to the field of microelectronics, and specifically relates to a method for effectively control the diameter of a probe in a probe clamp. Before a tested structure is tested, a diameter reference value spec is set, afterwards, a comparison and a judgment are made between the diameter reference value and the diameter of the probe in the probe clamp used for a test, if the diameter of the probe in the probe clamp is greater than the diameter reference value spec, the test is stopped, the probe clamp is sent for plan maintenance operation, and otherwise, the test process of the tested structure is continuously carried out. Through such a method, the problems are effectively controlled that since the probe diameter of the probe clamp is increased as application time increases, the probe is inserted out of a pad, causing decrease of the size of a device and increase of a damage ratio, and at the same time, the ineffective test time caused by the performance problem of the probe clamp is reduced, and the test efficiency is improved.

Description

A kind of method of pin footpath of effective control probe internal probe
Technical field
The invention belongs to microelectronic, be specifically related to a kind of method of pin footpath of effective control probe internal probe.
Background technology
Along with the development of microelectric technique, more and more higher to the test request technology of microelectronic component, higher pursuit has been had on the impact that other devices cause in pursuit test is accurately simultaneously on the efficiency of testing and test process, current is directly change test to treat that the probe that geodesic structure needs is tested to the test of microelectronic component, effectively completes the test process of microelectronic component.
The pin footpath of probe internal probe is very little, but the growth of the time used along with probe, probe internal probe pin footpath (diameter at probe internal probe tip) can become large, prick out the possible of pad at bundle to having during pad for this reason, thus cause device failure, and the whether good user of the performance of the probe corresponding with microelectronic component to be measured that existing method of testing is selected when testing not knowing, only just can know after test completes, and owing to being the performance just knowing probe at test completing user, if probe is not intact, waste the test duration undoubtedly, reduce testing efficiency.
Therefore, how to find a kind of method can knowing the performance of current used probe before microelectronic component is tested, a great problem becoming those skilled in the art to prevent the waste of test duration and face.
Summary of the invention
For the problems referred to above, the present invention proposes a kind of method of pin footpath of effective control probe internal probe, set pin footpath reference value spec before testing, first to testing the pin footpath size of probe internal probe that uses and the pin footpath reference value size of setting compares judgement before treating micrometer electronics and implementing test, if the pin footpath of probe internal probe is greater than the pin footpath reference value preset, then stop test, probe sends to PM (plan maintain, schedule maintenance), if the pin footpath of probe internal probe is not more than the pin footpath reference value preset, then continue the test process to tested structure.Concrete grammar is:
The method in the pin footpath of effective control probe internal probe, wherein, described method comprises:
There is provided the probe that comprises multiple probe, each described probe is all for connecting test board and tested structure;
Described tester table sets the pin footpath reference value of described probe;
Before described tested structure is tested, judge whether the pin footpath of described probe is greater than described pin footpath reference value, if the pin footpath of described probe is greater than described pin footpath reference value, then stop described probe to the test of described tested structure.
Said method, wherein, described method also comprises:
If the pin footpath of described probe is not more than described pin footpath reference value, proceed the test of described probe to described tested structure.
Said method, wherein, described method also comprises:
Stop described probe to after the test of described tested structure, schedule maintenance is carried out to described probe.
Said method, wherein, also comprises the step detected described probe after attended operation of hitting the target, to guarantee that the pin footpath of probe internal probe is not more than described pin footpath reference value.
Said method, wherein, described tester table also comprises:
To pin module, for performing operating pin of described probe and described probe.
Said method, wherein, described to being also provided with pin footpath measurement module in pin module, described pin footpath measurement module is for measuring the pin footpath size of described probe.
Said method, wherein, before judging whether the pin footpath of described probe is greater than the step of described pin footpath reference value, described pin footpath measurement module is measured described probe, to obtain the pin footpath size of described probe.
Said method, wherein, described tester table is also provided with an alarm module;
When the pin footpath of described probe is greater than described pin footpath reference value, described alarm module sends warning message.
The beneficial effect that the present invention reaches:
By before to microelectronic component test to will pin footpath (the i.e. diameter of probe tip of probe internal probe of use, the pin footpath of probe internal probe is collectively referred to as during this paper is follow-up) judge, the pin footpath effectively reducing probe internal probe becomes large and pricks out the possibility reducing and damage causing device outside pad, effectively reduce the waste of test duration, improve testing efficiency.
Accompanying drawing explanation
Fig. 1 is the method schematic diagram in the pin footpath effectively controlling probe internal probe in the present invention.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment, the present invention is further illustrated, but not as limiting to the invention.
For above-mentioned Problems existing, the present invention discloses a kind of method of pin footpath of effective control probe internal probe, before to tested structure microelectronic component test, set a pin footpath reference value spec, then to test probe internal probe used pin footpath carry out carrying out contrast with pin footpath reference value and judge, then make corresponding process according to the pin footpath of probe internal probe to the magnitude relationship of pin footpath reference value spec to operate, below in conjunction with accompanying drawing, the present embodiment is described further.
Method provided by the invention comprises:
There is provided the probe that comprises multiple probe, in the present invention's preferred embodiment, each probe is all for connecting test board and tested structure;
In the present invention's preferred embodiment, tester table sets the pin footpath reference value of probe;
Before tested structure is tested, judge whether the pin footpath of probe is greater than set pin footpath reference value, if the pin footpath of the probe used is greater than the pin footpath reference value of setting, then stop probe to the test of structure tested in the preferred embodiment of the present invention.
In the preferred embodiment of the invention, method of the present invention also comprises:
If the pin footpath of preferred embodiment of the invention middle probe is not more than pin footpath reference value, proceed the test of probe to tested structure.
Method of the present invention, also comprises in the preferred embodiment of the invention:
Stop probe to after the test of tested structure, schedule maintenance is carried out to probe.
Method of the present invention, in the present invention's preferred embodiment, also comprises the step detected probe after attended operation of hitting the target, to guarantee that probe internal probe pin footpath is not more than pin footpath reference value.
In the present invention's preferred embodiment, tester table also comprises:
To pin module, for performing operating pin of probe internal probe and probe.
In the present invention's preferred embodiment, to being also provided with pin footpath measurement module in pin module, pin footpath measurement module is used for the pin footpath size of measuring probe.
In the present invention's preferred embodiment, before judging whether the pin footpath of probe is greater than the step of pin footpath reference value, pin footpath measurement module is measured described probe, to obtain the pin footpath of probe.
In the present invention's preferred embodiment, tester table is also provided with an alarm module; When the pin footpath of probe is greater than pin footpath reference value, alarm module sends warning message.
The present invention will be further elaborated to lift specific embodiment below:
The schematic flow sheet of the pin routing method of effective control probe internal probe shown in Figure 1, first PCIL file is set, as a kind of embodiment, the path of PCIL file is /WATSERV/ETC/PCIL, in prior art, in the probe that neocaine completes or PM comes back, capital is arranged under PCIL file, such as, RFID (Radio FrequencyIdentification, radio-frequency (RF) identification) arrange with resistance, by reading corresponding RFID or resistance calls corresponding probe type.
When setting PCIL file, in identical file, adding the pin footpath reference value spec parameter of probe internal probe, testing the probe that uses the need of the normative reference sending PM for follow-up judgement the present embodiment.
Perform tester table selected by the present embodiment to pin module operation, have two effects to pin module at this in the present invention: the first, for make the probe in probe with its should position in probe uniquely corresponding one by one; The second, the pin footpath size of measuring probe card internal probe.
Judge the pin footpath of probe internal probe and the magnitude relationship of pin footpath reference value spec, by the diameter inspection of pin footpath under enlargement ratio to probe internal probe, judge that the pin footpath of probe internal probe is whether within the scope of the pin footpath reference value spec of setting (namely whether the pin footpath of probe internal probe is the pin footpath reference value spec being not more than setting), if the pin footpath of probe internal probe is greater than the pin footpath reference value spec of setting, tester table screen can demonstrate warning message " Thiscard should be PM ", now, stop test, the probe that the present embodiment uses sends to schedule maintenance, by MFG (Manufacturing, Quality Mgmt Dept) notify PE (ProcessingEngineer, process engineer) determine to move EE (Equipment Engine the need of friendship, Facilities Engineer) carry out PM (Plan Maintain, schedule maintenance), schedule maintenance terminates the detection module of rear execution probe, the probe of confirmation selected by the present embodiment is after carrying out schedule maintenance, the pin footpath of probe internal probe is within the scope of the pin footpath reference value spec of setting, the execution of whole process, slip-stick artist is without the need to manually carrying out the pin footpath checking probe internal probe, if the pin footpath of probe internal probe is not more than the pin footpath reference value spec of setting, illustrates that used probe can use, then proceed the test process to tested structure, if the pin footpath of probe internal probe, not within the scope of the pin footpath reference value spec of setting, continues to send to schedule maintenance.
In sum, the present invention proposes a kind of method of pin footpath of effective control probe internal probe, before to tested structured testing, judgement contrast is carried out to the pin footpath of probe internal probe, if the pin footpath of probe internal probe is greater than the pin footpath reference value of setting, stop test process, probe sends to maintenance of making the plan, pass through the method, reducing and damaging ratio of device is caused along with the pin footpath of the elongated probe internal probe of service time becomes to cause greatly pricking out outside pad in the pin footpath effectively controlling probe internal probe, save because probe card performance problem causes time of invalid test simultaneously, improve testing efficiency.
It should be appreciated by those skilled in the art that those skilled in the art are realizing described change case in conjunction with prior art and above-described embodiment, do not repeat at this.Such change case does not affect flesh and blood of the present invention, does not repeat them here.
Above preferred embodiment of the present invention is described.It is to be appreciated that the present invention is not limited to above-mentioned particular implementation, the equipment wherein do not described in detail to the greatest extent and structure are construed as to be implemented with the common mode in this area; Any those of ordinary skill in the art, do not departing under technical solution of the present invention ambit, the Method and Technology content of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solution of the present invention, or being revised as the Equivalent embodiments of equivalent variations, this does not affect flesh and blood of the present invention.Therefore, every content not departing from technical solution of the present invention, according to technical spirit of the present invention to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs to the scope of technical solution of the present invention protection.

Claims (8)

1. effectively control the method in the pin footpath of probe internal probe, it is characterized in that, described method comprises:
There is provided the probe that comprises multiple probe, each described probe is all for connecting test board and tested structure;
Described tester table sets the pin footpath reference value of described probe;
Before described tested structure is tested, judge whether the pin footpath of described probe is greater than described pin footpath reference value, if the pin footpath of described probe is greater than described pin footpath reference value, then stop described probe to the test of described tested structure.
2. method as claimed in claim 1, it is characterized in that, described method also comprises:
If the pin footpath of described probe is not more than described pin footpath reference value, proceed the test of described probe to described tested structure.
3. method as claimed in claim 1, it is characterized in that, described method also comprises:
Stop described probe to after the test of described tested structure, schedule maintenance is carried out to described probe.
4. method as claimed in claim 3, is characterized in that, also comprise the step detected described probe after attended operation of hitting the target, to guarantee that probe internal probe pin footpath is not more than described pin footpath reference value.
5. method as claimed in claim 1, it is characterized in that, described tester table also comprises:
To pin module, for performing operating pin of described probe and described probe.
6. method as claimed in claim 5, it is characterized in that, described to being also provided with pin footpath measurement module in pin module, described pin footpath measurement module is for measuring the pin footpath size of described probe.
7. method as claimed in claim 6, it is characterized in that, before judging whether the pin footpath of described probe is greater than the step of described pin footpath reference value, described pin footpath measurement module is measured described probe, to obtain the pin footpath size of described probe.
8. method as claimed in claim 1, it is characterized in that, described tester table is also provided with an alarm module;
When the pin footpath of described probe is greater than described pin footpath reference value, described alarm module sends warning message.
CN201410692983.XA 2014-11-26 2014-11-26 Method for effectively control diameter of probe in probe clamp Pending CN104502874A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104034737A (en) * 2014-06-13 2014-09-10 上海华岭集成电路技术股份有限公司 Method for detecting testability of three-dimensional chip
CN105651228A (en) * 2015-12-31 2016-06-08 深圳安博电子有限公司 Method and device for setting substrate test parameters on probe station
CN108132021A (en) * 2017-12-21 2018-06-08 上海华力微电子有限公司 Probe automatic monitoring method

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CN103293503A (en) * 2013-05-24 2013-09-11 上海宏力半导体制造有限公司 Probe card detecting method
CN103336257A (en) * 2013-06-26 2013-10-02 上海华力微电子有限公司 WAT testing system and method

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CN1962089A (en) * 2006-11-24 2007-05-16 薛云智 Pin diameter automatic detecting and sorting system
US20090251163A1 (en) * 2008-04-02 2009-10-08 Tokyo Electron Limited Alignment method, tip position detecting device and probe apparatus
CN103293503A (en) * 2013-05-24 2013-09-11 上海宏力半导体制造有限公司 Probe card detecting method
CN103336257A (en) * 2013-06-26 2013-10-02 上海华力微电子有限公司 WAT testing system and method

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104034737A (en) * 2014-06-13 2014-09-10 上海华岭集成电路技术股份有限公司 Method for detecting testability of three-dimensional chip
CN105651228A (en) * 2015-12-31 2016-06-08 深圳安博电子有限公司 Method and device for setting substrate test parameters on probe station
CN105651228B (en) * 2015-12-31 2018-05-18 深圳安博电子有限公司 A kind of method and device being configured on probe station to tester substrate parameter
CN108132021A (en) * 2017-12-21 2018-06-08 上海华力微电子有限公司 Probe automatic monitoring method

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Application publication date: 20150408

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