TW201614192A - Shape measuring device - Google Patents

Shape measuring device

Info

Publication number
TW201614192A
TW201614192A TW104131827A TW104131827A TW201614192A TW 201614192 A TW201614192 A TW 201614192A TW 104131827 A TW104131827 A TW 104131827A TW 104131827 A TW104131827 A TW 104131827A TW 201614192 A TW201614192 A TW 201614192A
Authority
TW
Taiwan
Prior art keywords
board
measuring device
fluid
shape measuring
surface shape
Prior art date
Application number
TW104131827A
Other languages
English (en)
Chinese (zh)
Inventor
Tadashi Takahashi
Original Assignee
Nippon Electric Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co filed Critical Nippon Electric Glass Co
Publication of TW201614192A publication Critical patent/TW201614192A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW104131827A 2014-10-01 2015-09-25 Shape measuring device TW201614192A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014203087A JP6410208B2 (ja) 2014-10-01 2014-10-01 形状測定装置

Publications (1)

Publication Number Publication Date
TW201614192A true TW201614192A (en) 2016-04-16

Family

ID=55630288

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104131827A TW201614192A (en) 2014-10-01 2015-09-25 Shape measuring device

Country Status (4)

Country Link
JP (1) JP6410208B2 (ja)
CN (1) CN206504714U (ja)
TW (1) TW201614192A (ja)
WO (1) WO2016052248A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107702675A (zh) * 2017-09-27 2018-02-16 西安理工大学 一种自适应支撑装置及应用其的测量系统
FR3090088B1 (fr) * 2018-12-12 2021-06-18 Saint Gobain Procédé de mesure des écarts géométriques entre les surfaces incurvées d'une pluralité de matériaux à évaluer et une surface incurvée d’un matériau de référence
CN115349076A (zh) * 2021-03-12 2022-11-15 法国圣戈班玻璃厂 用于以高测量精度确定板状或层状对象的表面形状的迭代方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9203448D0 (en) * 1992-02-18 1992-04-01 British Steel Plc Shape detection
JPH1068620A (ja) * 1996-08-28 1998-03-10 Kobe Steel Ltd 薄板の平坦度測定方法および装置
JP5884267B2 (ja) * 2010-04-01 2016-03-15 株式会社ニコン 物体搬送装置、露光装置、デバイス製造方法、フラットパネルディスプレイの製造方法、及び物体搬送方法
US20120064461A1 (en) * 2010-09-13 2012-03-15 Nikon Corporation Movable body apparatus, exposure apparatus, device manufacturing method, flat-panel display manufacturing method, and object exchange method
JP5907429B2 (ja) * 2012-07-24 2016-04-26 日本電気硝子株式会社 板状体の反り検査装置及びその反り検査方法
JP2014089111A (ja) * 2012-10-30 2014-05-15 Avanstrate Inc ディスプレイ用ガラス基板の形状測定装置、および、ガラス基板の製造方法

Also Published As

Publication number Publication date
JP2016070866A (ja) 2016-05-09
CN206504714U (zh) 2017-09-19
JP6410208B2 (ja) 2018-10-24
WO2016052248A1 (ja) 2016-04-07

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