TW201607767A - Carrier stripping device - Google Patents

Carrier stripping device Download PDF

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Publication number
TW201607767A
TW201607767A TW104125598A TW104125598A TW201607767A TW 201607767 A TW201607767 A TW 201607767A TW 104125598 A TW104125598 A TW 104125598A TW 104125598 A TW104125598 A TW 104125598A TW 201607767 A TW201607767 A TW 201607767A
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TW
Taiwan
Prior art keywords
peeling
adhesive
carrier
unit
composite panel
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TW104125598A
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Chinese (zh)
Inventor
Toshiharu Kishimura
Takeshi Ishida
Yukinori Nakayama
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Hitachi Ltd
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Publication of TW201607767A publication Critical patent/TW201607767A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B13/00Feeding the unshaped material to moulds or apparatus for producing shaped articles; Discharging shaped articles from such moulds or apparatus
    • B28B13/04Discharging the shaped articles
    • B28B13/06Removing the shaped articles from moulds

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  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

Provided herein is a carrier stripping device for effectively stripping a carrier from a composite panel, which is formed a flexible panel on the surface of the carrier, characterized by comprising: a holding table (10) for mounting a composite panel (100) consisted of an upper carrier (101), a panel (102) and a lower carrier (103); a first adhesive lift pin (12A), mounted in the holding table (10) and having a first shaft unit (13) that is vertically movable and a first adhesive unit (14) located at one end of the first shaft unit (13); a second adhesive lift pin (12B), mounted in the holding table (10) and having a second shaft unit (13) that is vertically movable and a second adhesive unit (14) located at one end of the second shaft unit (13); and a bow-like peeling table (21) provided with a third adhesive unit (23) and a rubber suction unit (24).

Description

載件剝離裝置 Carrier peeling device

本發明,係關於載件剝離裝置,尤其關於從於載件之表面形成有可撓性面板的複合面板將載件作剝離之載件剝離裝置。 The present invention relates to a carrier peeling device, and more particularly to a carrier peeling device for peeling a carrier from a composite panel in which a flexible panel is formed on a surface of a carrier.

在可撓性OLED(Organic Light-Emitting Diode;有機發光二極體)面板等之可撓性面板的生產程序方面,已想出於載件玻璃之表面作成膜,將被成膜之載件玻璃在成膜面作貼合,從而形成將兩面以載件玻璃作夾持的可撓性面板之複合面板,之後從複合面板將載件玻璃作剝離從而生產可撓性面板之方法。為此,要求穩定而高速就容易破裂之載件玻璃作剝離的載件剝離裝置。 In the production process of a flexible panel such as a flexible OLED (Organic Light-Emitting Diode) panel, it has been proposed to form a film for the surface of the carrier glass. A method of producing a flexible panel by laminating the film-forming surface to form a composite panel of a flexible panel sandwiching the carrier glass with both sides, and then peeling the carrier glass from the composite panel. For this reason, a carrier peeling device which is required to be stable and which is easily broken at a high speed is required to be peeled off.

關於如此之載件的剝離,於專利文獻1(日本發明專利公開2004-17623號公報),係已揭露供以於陶瓷生片(green sheet)被形成於載件膜之表面的複合片,從前述陶瓷生片將前述載件膜作剝離用之載件膜剝離方法,包含:於前述複合片之端部至中途的區間形成是從前述陶瓷生片所分離的前述載件膜之一部分的剝離部分之剝離部 分形成程序;以及前述剝離部分的區域之中於避開前述端部的位置,以於外周面具有黏著性之黏著輥作按壓而保持前述載件膜後,將前述黏著輥予以旋轉而將前述載件膜從前述陶瓷生片剝離之載件膜除去程序(請求項1參照)。 For the peeling of such a carrier, Patent Document 1 (Japanese Laid-Open Patent Publication No. 2004-17623) discloses a composite sheet for forming a ceramic green sheet on the surface of a carrier film. In the ceramic green sheet, the carrier film peeling method for peeling the carrier film includes: forming a peeling off of a portion of the carrier film separated from the ceramic green sheet in a section from the end portion to the middle of the composite sheet Partial stripping And a part forming process; and a position of the peeling portion avoiding the end portion, and holding the carrier film after pressing the adhesive roller having an adhesive surface on the outer peripheral surface, and rotating the adhesive roller A carrier film removal procedure in which the carrier film is peeled off from the ceramic green sheet (refer to claim 1).

此外,於專利文獻2(日本發明專利第 4482757號公報),係已揭露將於襯紙上被連續而貼附之片材,藉保持於其下表面而可直線運動於剝離邊緣與被貼附物之間的貼附頭,而在前述剝離邊緣位置從前述襯紙作剝離的片材貼附裝置(從襯紙將片材作剝離之剝離裝置)(請求項1參照)。 In addition, in Patent Document 2 (Japanese Invention Patent No. Japanese Patent Publication No. 4482757 discloses a sheet which is continuously attached to a liner, and which is linearly movable between the peeling edge and the attached object by being held on the lower surface thereof, and is peeled off in the foregoing. A sheet attaching device (a peeling device for peeling a sheet from a liner) from which the edge position is peeled off (refer to claim 1).

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本發明專利公開2004-17623號公報 [Patent Document 1] Japanese Patent Publication No. 2004-17623

[專利文獻2]日本發明專利第4482757號公報 [Patent Document 2] Japanese Invention Patent No. 4482757

在揭露於引用文獻1之剝離方法,係利用黏著輥而將載件膜作剝離,故需要從黏著輥將被剝離之載件膜作除去。為此,分成剝離部分形成程序、及載件膜除去程序,而作成於載件膜除去程序中載件膜之端部未保持於黏著輥之狀態,使得成為可從黏著輥將載件膜作除去之構 成。然而,在揭露於引用文獻1之剝離方法,係載件膜之剝離所需的時間變長,故難以使生產性提升。 In the peeling method disclosed in the cited document 1, the carrier film is peeled off by the adhesive roller, and it is necessary to remove the peeled carrier film from the adhesive roller. For this reason, it is divided into a peeling portion forming program and a carrier film removing program, and the end portion of the carrier film is not held in the state of the adhesive roller in the carrier film removing process, so that the carrier film can be made from the adhesive roller. Structure to make. However, in the peeling method disclosed in the cited document 1, the time required for peeling off the carrier film becomes long, and it is difficult to improve productivity.

此外,在揭露於引用文獻2之剝離方法,係 利用剝離邊緣而從襯紙將片材作剝離,故將此應用於從兩面被以載件玻璃作夾持的可撓性面板將載件玻璃作剝離之程序時,有超過容許彎曲極限,而載件玻璃、可撓性面板破損之虞。 Further, in the peeling method disclosed in the cited document 2, The sheet is peeled off from the liner by the peeling edge, so when applied to the process of peeling the carrier glass from the flexible panel sandwiched by the carrier glass on both sides, the allowable bending limit is exceeded. Damage to the carrier glass and flexible panel.

所以,本發明,係以提供有效從於載件之表 面形成有可撓性面板的複合面板將載件作剝離之載件剝離裝置為課題。 Therefore, the present invention is to provide a table effective from the carrier. A composite peeling panel in which a flexible panel is formed on the surface of the carrier peeling off the carrier is a problem.

為了解決如此之課題,本發明,係一種載件剝離裝置,特徵在於:具備:就由上載件、面板及下載件所成之複合面板作載置的保持台;設於前述保持台,具有可上下動之第1軸體部及設於該第1軸體部之端部的第1黏著部之第1黏著升降銷;設於前述保持台,具有可上下動之第2軸體部及設於該第2軸體部之端部的第2黏著部之第2黏著升降銷;以及具有第3黏著部及橡膠吸附部的弓狀之剝離台。 In order to solve such a problem, the present invention provides a carrier peeling apparatus characterized by comprising: a holding table on which a composite panel formed by an uploading member, a panel, and a downloading member is placed; a first adhesive lift pin that moves up and down the first shaft body portion and a first adhesive portion that is provided at an end portion of the first shaft body portion; and the second shaft body portion that is movable up and down a second adhesion lifting pin of the second adhesive portion at the end of the second shaft portion; and an arcuate peeling table having the third adhesive portion and the rubber adsorption portion.

依本發明,即可提供有效從於載件之表面形成有可撓性面板的複合面板將載件作剝離之載件剝離裝 置。 According to the present invention, it is possible to provide a carrier peeling device which can effectively peel the carrier from a composite panel in which a flexible panel is formed on the surface of the carrier. Set.

1‧‧‧載件剝離裝置 1‧‧‧Package stripping device

10‧‧‧保持台 10‧‧‧ Keeping the table

11‧‧‧真空吸附部 11‧‧‧ Vacuum Adsorption Department

12、12A、12B‧‧‧黏著升降銷 12, 12A, 12B‧‧‧ adhesive lifting pin

13‧‧‧軸體部(第1軸體部、第2軸體部) 13‧‧‧Axis body (1st axis body, 2nd axis body part)

14‧‧‧黏著部(第1黏著部、第2黏著部) 14‧‧‧Adhesive part (first adhesive part, second adhesive part)

15‧‧‧滑動機構 15‧‧‧Sliding mechanism

20‧‧‧剝離單元 20‧‧‧ peeling unit

21‧‧‧剝離台 21‧‧‧ peeling station

22‧‧‧弓狀板部 22‧‧‧ Bow Plate

23‧‧‧黏著部(第2黏著部) 23‧‧‧Adhesive part (2nd adhesion part)

24‧‧‧橡膠吸附部 24‧‧‧Rubber Adsorption Department

25‧‧‧輥子單元 25‧‧‧ Roller unit

26‧‧‧輥子 26‧‧‧ Roller

27‧‧‧滑動機構 27‧‧‧Sliding mechanism

28‧‧‧導軌 28‧‧‧rails

29‧‧‧剝離台卡止手段 29‧‧‧ peeling station card means

30‧‧‧基台部 30‧‧‧Base Department

31‧‧‧導軌 31‧‧‧ rails

32‧‧‧支撐柱 32‧‧‧Support column

33‧‧‧直動驅動器(彈起手段) 33‧‧‧Direct drive (bounce means)

100、100A‧‧‧複合面板 100, 100A‧‧‧ composite panel

101‧‧‧上載件玻璃(上載件) 101‧‧‧Uploaded glass (uploaded)

102‧‧‧可撓性面板(面板) 102‧‧‧Flexible panel (panel)

103‧‧‧下載件玻璃(下載件) 103‧‧‧Download glass (download)

M1‧‧‧方向(保持台之移動方向) M1‧‧‧ direction (keeping the direction of movement of the station)

M2‧‧‧方向(剝離單元端部之移動方向) M2‧‧‧ direction (moving direction of the end of the stripping unit)

M3‧‧‧方向(輥子單元之移動方向) M3‧‧‧ direction (moving direction of the roller unit)

M4‧‧‧方向(剝離台端部之移動方向) M4‧‧‧ direction (moving direction of the peeling end)

[圖1]複合面板及本實施形態相關的載件剝離裝置之示意圖。 Fig. 1 is a schematic view of a composite panel and a carrier peeling device according to the embodiment.

[圖2]就本實施形態相關的載件剝離裝置之剝離動作作繪示的流程圖。 Fig. 2 is a flow chart showing the peeling operation of the carrier peeling device according to the embodiment.

[圖3]就將上載件玻璃作剝離的樣子作繪示之載件剝離裝置的動作圖。 Fig. 3 is an operation diagram of a carrier peeling device showing a state in which the uploader glass is peeled off.

[圖4]就將所剝離之上載件玻璃從剝離台作回收的樣子作繪示之載件剝離裝置的動作圖。 Fig. 4 is an operation diagram of a carrier peeling device for illustrating a state in which the peeled off-loader glass is recovered from a peeling table.

以下,就供以實施本發明用的形態(以下稱作 「實施形態」),邊參照適當圖式邊詳細作說明。另外,在各圖中,對於共通之部分係附加相同符號並省略重複之說明。 Hereinafter, the form for carrying out the invention (hereinafter referred to as The "embodiment" will be described in detail with reference to the appropriate drawings. In the drawings, the same reference numerals will be given to the common parts, and the description thereof will not be repeated.

≪複合面板≫ ≪Compound panel≫

首先,於就本實施形態相關之載件剝離裝置1作說明前,針對複合面板100利用圖1作說明。圖1,係複合面板100及本實施形態相關之載件剝離裝置1之示意圖。 First, before the description of the carrier peeling apparatus 1 according to the present embodiment, the composite panel 100 will be described with reference to Fig. 1 . Fig. 1 is a schematic view showing a composite panel 100 and a carrier peeling device 1 according to the present embodiment.

如圖1所示,複合面板100,係上載件玻璃 101、可撓性面板102、及下載件玻璃103被積層而構成。亦即,複合面板100,係具有將可撓性面板102之兩面以載件玻璃101、103作夾持的構造。 As shown in Figure 1, the composite panel 100 is a carrier glass 101. The flexible panel 102 and the download glass 103 are laminated. That is, the composite panel 100 has a structure in which both surfaces of the flexible panel 102 are sandwiched by the carrier glasses 101 and 103.

≪載件剝離裝置≫ ≪Package stripping device≫

接著,就本實施形態相關之載件剝離裝置1作說明。於此,本實施形態相關之載件剝離裝置1,係從複合面板100(可撓性面板102)將上載件玻璃101作剝離之裝置。 Next, the carrier peeling device 1 according to the present embodiment will be described. Here, the carrier peeling device 1 according to the present embodiment is a device for peeling off the uploader glass 101 from the composite panel 100 (flexible panel 102).

如圖1所示,本實施形態相關之載件剝離裝 置1,係以保持台10、剝離單元20、基台部30、及控制部(未圖示)而構成。 As shown in FIG. 1, the carrier peeling device according to the embodiment The first stage is configured by the holding table 10, the peeling unit 20, the base unit 30, and a control unit (not shown).

保持台10,係具備真空吸附部11、黏著升降 銷12、及滑動機構15。 The holding table 10 is provided with a vacuum suction portion 11 and an adhesive lifting device The pin 12 and the sliding mechanism 15 are provided.

真空吸附部11,係形成於保持台10之上表 面。於複合面板100被載置於保持台10之上表面的狀態,真空吸附部11,係利用減壓手段(未圖示)而將保持台10之上表面與複合面板100的下表面之間作減壓,使得可將複合面板100真空吸附於保持台10之上表面。另外,控制部(未圖示),係就減壓手段(未圖示)之動作作控制,使得可就在真空吸附部11的複合面板100之真空吸附及解除作控制。 The vacuum adsorption unit 11 is formed on the holding table 10 surface. In a state where the composite panel 100 is placed on the upper surface of the holding table 10, the vacuum suction portion 11 is formed between the upper surface of the holding table 10 and the lower surface of the composite panel 100 by a decompression means (not shown). The pressure is reduced so that the composite panel 100 can be vacuum-adsorbed to the upper surface of the holding table 10. Further, the control unit (not shown) controls the operation of the pressure reducing means (not shown) so that the vacuum suction and release of the composite panel 100 of the vacuum suction unit 11 can be controlled.

黏著升降銷12,係具有藉驅動部(未圖示)而 上下動的軸體部13、及設於軸體部13之上端部的由黏著構材所成之黏著部14。於複合面板100被載置於保持台 10之上表面的狀態,黏著升降銷12,係利用驅動部(未圖示)而使軸體部13上升,從而使黏著部14黏著於複合面板100之下表面,使得可就複合面板100作保持。此外,利用驅動部(未圖示)而使軸體部13下降,從而將黏著部14從複合面板100之下表面作剝離,使得可就複合面板100之保持進行解除。另外,控制部(未圖示),係就驅動部(未圖示)之動作作控制,使得可就黏著升降銷12之上下動進行控制。 Adhesive lift pin 12 has a drive unit (not shown) The shaft body portion 13 that moves up and down and the adhesive portion 14 that is provided at the upper end portion of the shaft body portion 13 by an adhesive member. The composite panel 100 is placed on the holding table In the state of the upper surface of 10, the lift pin 12 is adhered, and the shaft portion 13 is raised by a driving portion (not shown), so that the adhesive portion 14 is adhered to the lower surface of the composite panel 100, so that the composite panel 100 can be made. maintain. Further, the shaft portion 13 is lowered by the driving portion (not shown), and the adhesive portion 14 is peeled off from the lower surface of the composite panel 100, so that the holding of the composite panel 100 can be released. Further, the control unit (not shown) controls the operation of the driving unit (not shown) so that the upper and lower sides of the adhesion lifting pin 12 can be controlled to move downward.

此外,黏著升降銷12,係從後述之藉剝離台 21所為之上載件玻璃101之剝離方向(於圖1中左右方向)所見時,設於真空吸附部11之兩側。於以下之說明,將於圖1中真空吸附部11之左側的黏著升降銷12稱作黏著升降銷12A,將於圖1中真空吸附部11之右側的黏著升降銷12稱作黏著升降銷12B。另外,黏著升降銷12之個數,係非限定於2個,可適當變更。 In addition, the adhesion lifting pin 12 is attached from the peeling table described later. When the peeling direction of the uploading glass 101 (the horizontal direction in FIG. 1) is 21, it is provided on both sides of the vacuum adsorption part 11. In the following description, the adhesive lift pin 12 on the left side of the vacuum suction portion 11 in Fig. 1 is referred to as an adhesive lift pin 12A, and the adhesive lift pin 12 on the right side of the vacuum suction portion 11 in Fig. 1 is referred to as an adhesive lift pin 12B. . In addition, the number of the adhesion lifting pins 12 is not limited to two, and can be appropriately changed.

滑動機構15,係作成形成於保持台10之下 端,可沿著基台部30之導軌31而使保持台10移動於M1方向(圖1中左右方向)。具體而言,保持台10,係作成藉滑動機構15,而可移動於圖1中是以實線作表示之位置(將複合面板100設於保持台10之位置)的原點位置、及於圖1中是以雙點劃線作表示之位置(後述之藉剝離單元20從複合面板100將上載件玻璃101作剝離的位置)的剝離位置。另外,控制部(未圖示),係就滑動機構15之動作作控制,使得可就保持台10之M1方向(圖1中左右方 向)的移動進行控制。 The sliding mechanism 15 is formed to be formed under the holding table 10 At the end, the holding table 10 can be moved in the M1 direction (the horizontal direction in Fig. 1) along the guide rail 31 of the base portion 30. Specifically, the holding table 10 is configured to be moved by the position of the solid line (the position where the composite panel 100 is placed at the holding table 10) in the position shown by the solid line in FIG. In Fig. 1, the position at which the position is indicated by a two-dot chain line (a position at which the exfoliation unit 20 peels off the uploader glass 101 from the composite panel 100, which will be described later) is used. Further, the control unit (not shown) controls the operation of the slide mechanism 15 so that the M1 direction of the holding table 10 can be maintained (left and right in Fig. 1). Control to the movement of).

剝離單元20,係以從基台部30所立設之支撐 柱32支撐為搖動自如,此外藉可伸縮之直動驅動器33作支撐。藉此,將直動驅動器33伸縮,使得可將剝離單元20之左側端部予以移動於M2方向(圖1中略上下方向)。 具體而言,將直動驅動器33伸長從而使剝離單元20移動至圖1中是以實線作表示之位置的上升位置(彈起位置),將直動驅動器33收縮使得可使剝離單元20移動至於圖1中是以雙點劃線作表示之位置的下降位置。另外,控制部(未圖示),係就直動驅動器33之動作作控制,使得可就剝離單元20之M2方向(圖1中略上下方向)的移動進行控制。 The peeling unit 20 is supported by the base portion 30. The column 32 is supported for rocking, and is supported by a telescopic linear actuator 33. Thereby, the linear motion drive 33 is expanded and contracted so that the left end portion of the peeling unit 20 can be moved in the M2 direction (slightly up and down direction in FIG. 1). Specifically, the linear motion driver 33 is extended to move the peeling unit 20 to the rising position (the pop-up position) in the position indicated by the solid line in FIG. 1, and the linear motion driver 33 is contracted so that the peeling unit 20 can be moved. As for the descending position of the position indicated by the two-dot chain line in Fig. 1 . Further, the control unit (not shown) controls the operation of the linear actuator 33 so that the movement of the peeling unit 20 in the M2 direction (slightly upward and downward in FIG. 1) can be controlled.

剝離單元20,係具備剝離台21、輥子單元 25、及導軌28。 The peeling unit 20 is provided with a peeling table 21 and a roller unit 25, and rails 28.

剝離台21,係具有弓狀板部22、黏著部23、 及橡膠吸附部24。弓狀板部22,係彎曲之板構材。於弓狀板部22之下表面,係設有由黏著構材所成之黏著部23、及由橡膠片所成之橡膠吸附部24。 The peeling table 21 has an arcuate plate portion 22, an adhesive portion 23, And a rubber adsorption portion 24. The arcuate plate portion 22 is a curved plate member. On the lower surface of the arcuate plate portion 22, an adhesive portion 23 made of an adhesive member and a rubber suction portion 24 made of a rubber sheet are provided.

於此,黏著部23,係配置於後述之藉剝離台 21所為的上載件玻璃101之剝離方向(圖1中左右方向)之前側(圖1中左側),橡膠吸附部24,係從剝離方向之中間部而配置於後側(圖1中右側)。換言之,保持台10位於剝離位置(圖1中以雙點劃線作表示的保持台10之位置)的情況下,在與比真空吸附部11靠左側之黏著升降銷 12A對應的位置設有黏著部23,在與真空吸附部11對應之位置及與比真空吸附部11靠右側之黏著升降銷12B對應的位置設有橡膠吸附部24。再換言之,從將剝離單元20可彈起地支撐的支撐柱32遠離之側設有黏著部23,於靠近支撐柱32之側設有橡膠吸附部24。 Here, the adhesive portion 23 is disposed on a stripping station to be described later. In the peeling direction (the left-right direction in FIG. 1) of 21 of the uploading glass 101, the rubber adsorption part 24 is arrange|positioned by the back side (the right side in FIG. In other words, in the case where the holding table 10 is located at the peeling position (the position of the holding table 10 indicated by a chain double-dashed line in FIG. 1), the fixing pin is on the left side of the vacuum suction portion 11 The adhesive portion 23 is provided at a position corresponding to 12A, and a rubber suction portion 24 is provided at a position corresponding to the vacuum suction portion 11 and a position corresponding to the adhesion lift pin 12B on the right side of the vacuum suction portion 11. In other words, the adhesive portion 23 is provided from the side away from the support post 32 which is bounceable by the peeling unit 20, and the rubber suction portion 24 is provided on the side close to the support post 32.

另外,剝離台21,係呈只要在依剝離台卡止 手段29(後述之圖3參照)而限制之範圍內則可自由移動於內部,此外呈在將剝離單元20彈起時亦藉剝離台卡止手段29而與剝離單元20一起將剝離台21彈起。 In addition, the peeling station 21 is only required to be stuck at the peeling station. The means 29 (refer to FIG. 3 to be described later) can be freely moved inside while being restricted, and the peeling table 21 is also used together with the peeling unit 20 by the peeling station locking means 29 when the peeling unit 20 is bounced. Start.

輥子單元25,係具有設於下方之輥子26、及 設於上方之滑動機構27。滑動機構27,係呈可沿著導軌28而使輥子單元25移動於M3方向(圖1中略左右方向)。另外,控制部(未圖示),係就滑動機構27之動作作控制,使得可就輥子單元25之M3方向(圖1中略左右方向)的移動進行控制。然後,輥子單元25移動於M3方向時,輥子26邊與剝離台21(弓狀板部22)之上表面作接觸邊移動,使得剝離台21之端部移動於M4方向(圖1中略上下方向)。 The roller unit 25 has a roller 26 disposed below, and A sliding mechanism 27 is provided above. The slide mechanism 27 is configured to move the roller unit 25 in the M3 direction (slightly left and right direction in Fig. 1) along the guide rail 28. Further, the control unit (not shown) controls the operation of the slide mechanism 27 so that the movement of the roller unit 25 in the M3 direction (the direction in the left-right direction in Fig. 1) can be controlled. Then, when the roller unit 25 is moved in the M3 direction, the roller 26 is moved while contacting the upper surface of the peeling table 21 (the arcuate plate portion 22), so that the end portion of the peeling table 21 is moved in the M4 direction (the vertical direction in FIG. 1) ).

控制部(未圖示),係就真空吸附部11之減壓 手段(未圖示)、黏著升降銷12(12A、12B)之驅動部(未圖示)、保持台10之滑動機構15、輥子單元25之滑動機構27、及直動驅動器33作控制,使得可就藉載件剝離裝置1所為的剝離動作之整體進行控制。 The control unit (not shown) is a decompression of the vacuum adsorption unit 11 Means (not shown), a driving unit (not shown) to which the lift pins 12 (12A, 12B) are attached, a slide mechanism 15 of the holding table 10, a slide mechanism 27 of the roller unit 25, and a linear actuator 33 are controlled so that The entire peeling operation by the carrier peeling device 1 can be controlled.

≪藉載件剝離裝置所為之剝離動作≫ 剥离The peeling action by the carrier peeling device≫

接著,就本實施形態相關之載件剝離裝置1之動作,利用圖2至圖4作說明。圖2,係就本實施形態相關之載件剝離裝置1的剝離動作作繪示之流程圖。圖3,係就將上載件玻璃101作剝離的樣子作繪示之載件剝離裝置1的動作圖。圖4,係就將被剝離之上載件玻璃101從剝離台21回收的樣子作繪示之載件剝離裝置1的動作圖。 Next, the operation of the carrier peeling device 1 according to the present embodiment will be described with reference to Figs. 2 to 4 . Fig. 2 is a flow chart showing the peeling operation of the carrier peeling device 1 according to the embodiment. Fig. 3 is an operation diagram of the carrier peeling device 1 in which the uploader glass 101 is peeled off. 4 is an operation diagram of the carrier peeling device 1 in which the peeled off-loader glass 101 is collected from the peeling table 21 as shown.

另外,採取在示於圖2的控制之開始時,保 持台10係位於原點位置,黏著升降銷12係位於下降位置,剝離單元20係位於上升位置(彈起位置),輥子單元25係位於剝離台21之黏著部23的位置。此外,採取真空吸附部11之減壓手段(未圖示)係停止。 In addition, taken at the beginning of the control shown in Figure 2, The holding table 10 is located at the origin position, the adhesion lifting pin 12 is located at the lowered position, the peeling unit 20 is located at the raised position (the pop-up position), and the roller unit 25 is located at the position of the adhesive portion 23 of the peeling table 21. Further, the pressure reducing means (not shown) that takes the vacuum suction unit 11 is stopped.

首先,藉設於載件剝離裝置1之外部的搬送 手段(未圖示)而使複合面板100被載置於保持台10之上表面。 First, the transport by the outside of the carrier peeling device 1 The composite panel 100 is placed on the upper surface of the holding table 10 by means of a means (not shown).

於步驟S1,控制部(未圖示),係就在保持台 10之上是否載置了複合面板100作判定。未載置了複合面板100之情況(S1,No)下,重複步驟S1直到有載置。 載置了複合面板100之情況(S1,YES)下,控制部(未圖示)之處理係進至步驟S2。 In step S1, the control unit (not shown) is in the holding station. Whether or not the composite panel 100 is placed on top of 10 is determined. In the case where the composite panel 100 is not placed (S1, No), the step S1 is repeated until it is placed. When the composite panel 100 is placed (S1, YES), the processing of the control unit (not shown) proceeds to step S2.

於步驟S2,控制部(未圖示),係就黏著升降 銷12之驅動部(未圖示)作控制,而使黏著升降銷12上升。藉此,使黏著部14黏著於複合面板100之下表面,就複合面板100作保持。 In step S2, the control unit (not shown) is attached to the lift The driving portion (not shown) of the pin 12 is controlled to raise the adhesion lifting pin 12. Thereby, the adhesive portion 14 is adhered to the lower surface of the composite panel 100, and the composite panel 100 is held.

於步驟S3,控制部(未圖示),係就真空吸附 部11之減壓手段(未圖示)作控制,而將保持台10之上表面與複合面板100之下表面之間作減壓。藉此,可將複合面板100真空吸附於保持台10之上表面。 In step S3, the control unit (not shown) is vacuum adsorbed. The decompression means (not shown) of the portion 11 is controlled to decompress between the upper surface of the holding table 10 and the lower surface of the composite panel 100. Thereby, the composite panel 100 can be vacuum-adsorbed to the upper surface of the holding table 10.

於步驟S4,控制部(未圖示),係就保持台10 之滑動機構15作控制,而使保持了複合面板100之保持台10從原點位置移動至剝離位置。 In step S4, the control unit (not shown) holds the stage 10 The slide mechanism 15 is controlled to move the holding table 10 holding the composite panel 100 from the origin position to the peeling position.

於步驟S5,控制部(未圖示),係就直動驅動 器33作控制,而使剝離單元20從上升位置(彈起位置)移動至下降位置。於此,輥子單元25係位於剝離台21之黏著部23的位置,故使剝離單元20下降,使得如圖3(a)所示,剝離台21之黏著部23壓住於包含複合面板100(上載件玻璃101)之端部的上表面(圖3(a)之箭頭參照),上載件玻璃101被吸附於剝離台21之黏著部23。 In step S5, the control unit (not shown) is driven by direct drive. The device 33 controls to move the peeling unit 20 from the raised position (the pop-up position) to the lowered position. Here, since the roller unit 25 is located at the position of the adhesive portion 23 of the peeling table 21, the peeling unit 20 is lowered, so that the adhesive portion 23 of the peeling table 21 is pressed against the composite panel 100 as shown in FIG. 3(a) ( The upper surface of the end portion of the uploader glass 101) (the arrow of FIG. 3(a) is referred to), and the uploader glass 101 is adsorbed to the adhesive portion 23 of the peeling table 21.

於步驟S6,控制部(未圖示),係就輥子單元 25之滑動機構27作控制,而使輥子單元25移動於剝離方向(圖3(b)之箭頭參照)。於此,如圖3(b)所示,輥子單元25移動於剝離方向(圖3(b)之箭頭參照),使得剝離台21,係沿著弓狀板部22之彎曲形狀而移動於上載件玻璃101之上。此情況下,由於弓狀板部22之彎曲形狀,黏著部23成為被抬起之狀態。另一方面,下載件玻璃103之下表面,係由黏著升降銷12(12A、12B)之黏著部14及真空吸附部11而保持。為此,以與黏著部23吸附的上載件玻璃101之端部(圖3(b)中左側)為起點,上載件玻璃 101係從可撓性面板102剝離。 In step S6, the control unit (not shown) is a roller unit. The slide mechanism 27 of 25 is controlled to move the roller unit 25 in the peeling direction (refer to the arrow of Fig. 3(b)). Here, as shown in FIG. 3(b), the roller unit 25 is moved in the peeling direction (the arrow of FIG. 3(b) is referred to) so that the peeling stage 21 moves along the curved shape of the arcuate plate portion 22 to be uploaded. Above the piece of glass 101. In this case, the adhesive portion 23 is in a raised state due to the curved shape of the arcuate plate portion 22. On the other hand, the lower surface of the download glass 103 is held by the adhesive portion 14 of the adhesion lifting pins 12 (12A, 12B) and the vacuum suction portion 11. For this reason, the end portion of the uploading glass 101 (the left side in FIG. 3(b)) which is adhered to the adhesive portion 23 is used as a starting point, and the carrier glass is loaded. The 101 is peeled off from the flexible panel 102.

於步驟S7,控制部(未圖示),係就輥子單元 25之滑動機構27作控制,而使輥子單元25移動至剝離方向(圖3(b)之箭頭參照)之終端部而停止。藉此,如圖3(c)所示,上載件玻璃101之上表面,係成為吸附於剝離台21之黏著部23與橡膠吸附部24的狀態。另外,將上載件玻璃101被剝離之可撓性面板102及下載件玻璃103於以下的說明稱作複合面板100A。 In step S7, the control unit (not shown) is a roller unit. The slide mechanism 27 of 25 controls the roller unit 25 to move to the end portion of the peeling direction (the arrow reference of Fig. 3(b)) and stops. As a result, as shown in FIG. 3(c), the upper surface of the uploader glass 101 is in a state of being adsorbed to the adhesive portion 23 of the peeling table 21 and the rubber adsorption portion 24. The flexible panel 102 and the download glass 103 in which the uploader glass 101 is peeled off are referred to as a composite panel 100A in the following description.

於步驟S8,控制部(未圖示),係就直動驅動 器33作控制,而使剝離單元20從下降位置移動至上升位置(彈起位置)。於此,上載件玻璃101,係由剝離台21之黏著部23及橡膠吸附部24所保持。另外,輥子單元25在示於圖3(c)之位置作停止,故剝離台21的黏著部23之側係因弓狀板部22之彎曲形狀,而成為被比橡膠吸附部24之側還抬起的狀態,再者,從黏著部23被設於從將剝離單元20可彈起地支撐的支撐柱32遠離之側,故即使於使剝離單元20移動至上升位置(彈起位置)的狀態下黏著部23仍成為比橡膠吸附部24高之位置。為此,成為可將上載件玻璃101之上側以吸附力高的黏著部23作吸附,將從中間部之下側藉橡膠吸附部24作吸附的構造。藉此,上載件玻璃101,係從保持在保持台10之複合面板100A,被完全剝離。 In step S8, the control unit (not shown) is driven by direct drive. The device 33 controls to move the peeling unit 20 from the lowered position to the raised position (the pop-up position). Here, the uploader glass 101 is held by the adhesive portion 23 of the peeling table 21 and the rubber suction portion 24. Further, since the roller unit 25 is stopped at the position shown in Fig. 3(c), the side of the adhesive portion 23 of the peeling table 21 is bent by the arcuate plate portion 22, and is also on the side of the rubber adsorption portion 24. In the lifted state, the adhesive portion 23 is provided on the side away from the support post 32 that bounces the peeling unit 20, so that the peeling unit 20 is moved to the raised position (the pop-up position). In the state, the adhesive portion 23 still has a position higher than the rubber adsorption portion 24. For this reason, the adhesive portion 23 having a high adsorption force can be adsorbed on the upper side of the uploader glass 101, and the rubber adsorption portion 24 can be adsorbed from the lower side of the intermediate portion. Thereby, the uploader glass 101 is completely peeled off from the composite panel 100A held by the holding stage 10.

於步驟S9,控制部(未圖示),係就保持台10 之滑動機構15作控制,而使保持了複合面板100A之保持 台10從剝離位置移動至原點位置。 In step S9, the control unit (not shown) holds the stage 10 The sliding mechanism 15 is controlled to maintain the retention of the composite panel 100A. The stage 10 is moved from the peeling position to the origin position.

於步驟S10,控制部(未圖示),係就真空吸附 部11之減壓手段(未圖示)作控制,而將真空吸附部11之真空吸附作解除,同時就黏著升降銷12之驅動部(未圖示)作控制,而使黏著升降銷12下降。藉此,黏著升降銷12之黏著部14從複合面板100A之下表面而分離,複合面板100A之保持被解除。 In step S10, the control unit (not shown) is vacuum adsorbed. The pressure reducing means (not shown) of the portion 11 is controlled to release the vacuum suction of the vacuum suction portion 11, and the driving portion (not shown) to which the lift pin 12 is adhered is controlled to lower the adhesive lift pin 12. . Thereby, the adhesive portion 14 to which the lift pins 12 are attached is separated from the lower surface of the composite panel 100A, and the holding of the composite panel 100A is released.

步驟S10之後,藉設於載件剝離裝置1之外 部的搬送手段(未圖示)而使複合面板100A被從保持台10之上表面而回收。 After step S10, it is borrowed from the carrier stripping device 1 The composite panel 100A is collected from the upper surface of the holding table 10 by means of a transport means (not shown).

於步驟S11,控制部(未圖示),係就複合面板 100A是否被從保持台10之上作回收而進行判定。複合面板100A未被回收之情況(S11,No)下,重複步驟S11直到被回收。複合面板100A被回收之情況(S11,Yes)下,控制部(未圖示)之處理係進至步驟S12。 In step S11, the control unit (not shown) is a composite panel. Whether or not 100A is recovered from above the holding table 10 is determined. In the case where the composite panel 100A is not recovered (S11, No), the step S11 is repeated until it is recovered. When the composite panel 100A is recovered (S11, Yes), the processing of the control unit (not shown) proceeds to step S12.

於步驟S12,控制部(未圖示),係就保持台10 之滑動機構15作控制,而使空的保持台10從原點位置移動至剝離位置。 In step S12, the control unit (not shown) holds the stage 10 The sliding mechanism 15 is controlled to move the empty holding table 10 from the origin position to the peeling position.

於步驟S13,控制部(未圖示),係就黏著升降 銷12之驅動部(未圖示)作控制,而使黏著升降銷12上升。 In step S13, the control unit (not shown) is attached to the lift The driving portion (not shown) of the pin 12 is controlled to raise the adhesion lifting pin 12.

於步驟S14,控制部(未圖示),係就直動驅動 器33作控制,而使剝離單元20從上升位置(彈起位置)移動至下降位置。於此,輥子單元25係位於剝離台21的橡 膠吸附部24之側的位置,故使剝離單元20下降,使得如圖4(a)所示,保持台10之黏著升降銷12B的黏著部14被壓在上載件玻璃101之下表面(圖4(a)之箭頭參照),上載件玻璃101被吸附於黏著升降銷12B之黏著部24。 In step S14, the control unit (not shown) is driven by direct drive. The device 33 controls to move the peeling unit 20 from the raised position (the pop-up position) to the lowered position. Here, the roller unit 25 is located at the rubber of the peeling station 21 The position of the side of the glue adsorption portion 24 causes the peeling unit 20 to be lowered, so that the adhesive portion 14 of the adhesion lifting pin 12B of the holding table 10 is pressed against the lower surface of the uploading member glass 101 as shown in Fig. 4 (a) (Fig. 4(a) 4 (a) arrow reference), the uploader glass 101 is adsorbed to the adhesive portion 24 of the adhesive lift pin 12B.

於步驟S15,控制部(未圖示),係就輥子單元 25之滑動機構27作控制,而使輥子單元25移動於回收方向(圖4(b)之箭頭參照)。於此,如圖4(b)所示,輥子單元25移動於回收方向(圖4(b)之箭頭參照),使得吸附著上載件玻璃101之剝離台21,係沿著弓狀板部22之彎曲形狀而移動於保持台10之上。此情況下,由於弓狀板部22之彎曲形狀,成為剝離台21的橡膠吸附部24之側被抬起的狀態。於此,黏著升降銷12B之黏著部14的吸附力比剝離台21之橡膠吸附部24的吸附力還強,故上載件玻璃101被從剝離台21剝離。 In step S15, the control unit (not shown) is a roller unit. The slide mechanism 27 of 25 is controlled to move the roller unit 25 in the recovery direction (refer to the arrow of Fig. 4(b)). Here, as shown in FIG. 4(b), the roller unit 25 is moved in the recovery direction (the arrow of FIG. 4(b) is referred to) so that the peeling table 21 to which the uploader glass 101 is adsorbed is along the arcuate plate portion 22. The curved shape moves over the holding table 10. In this case, the curved portion of the arcuate plate portion 22 is in a state in which the side of the rubber suction portion 24 of the peeling table 21 is lifted. Here, since the adsorption force of the adhesive portion 14 of the adhesion lifting pin 12B is stronger than the adsorption force of the rubber adsorption portion 24 of the peeling table 21, the uploader glass 101 is peeled off from the peeling table 21.

於步驟S16,控制部(未圖示),係就輥子單元 25之滑動機構27作控制,而使輥子單元25移動至回收方向(圖4(b)之箭頭參照)之終端部而停止。藉此,如圖4(c)所示,上載件玻璃101之下表面,係成為吸附於黏著升降銷12A之黏著部14與黏著升降銷12B之黏著部14的狀態。亦即,上載件玻璃101,係成為吸附於保持台10之狀態。 In step S16, the control unit (not shown) is a roller unit. The slide mechanism 27 of 25 controls the roller unit 25 to move to the end portion of the recovery direction (the arrow reference of Fig. 4(b)) and stops. As a result, as shown in FIG. 4(c), the lower surface of the carrier glass 101 is in a state of being attracted to the adhesive portion 14 of the adhesion lifting pin 12A and the adhesive portion 14 of the adhesion lifting pin 12B. In other words, the uploader glass 101 is in a state of being adsorbed to the holding table 10.

於步驟S17,控制部(未圖示),係就直動驅動 器33作控制,而使剝離單元20從下降位置移動至上升位置(彈起位置)。於此,黏著升降銷12A、12B之黏著部14 的吸附力比剝離台21之黏著部23的吸附力還強,故上載件玻璃101被從剝離台21剝離。藉此,上載件玻璃101,係從剝離台21被完全剝離。 In step S17, the control unit (not shown) is driven by direct drive. The device 33 controls to move the peeling unit 20 from the lowered position to the raised position (the pop-up position). Here, the adhesive portion 14 of the lift pins 12A, 12B is adhered thereto. Since the adsorption force is stronger than the adsorption force of the adhesive portion 23 of the peeling table 21, the uploader glass 101 is peeled off from the peeling table 21. Thereby, the uploader glass 101 is completely peeled off from the peeling stage 21.

於步驟S18,控制部(未圖示),係就保持台10 之滑動機構15作控制,而使保持著上載件玻璃101之保持台10從剝離位置移動至原點位置。 In step S18, the control unit (not shown) holds the stage 10 The slide mechanism 15 controls the holding table 10 holding the uploader glass 101 from the peeling position to the original position.

於步驟S19,控制部(未圖示),係就黏著升降 銷12之驅動部(未圖示)作控制,而使黏著升降銷12下降。藉此,黏著升降銷12之黏著部14從上載件玻璃101之下表面而分離,上載件玻璃101之保持被解除。 In step S19, the control unit (not shown) is attached to the lift The drive portion (not shown) of the pin 12 is controlled to lower the adhesive lift pin 12. Thereby, the adhesive portion 14 to which the lift pins 12 are adhered is separated from the lower surface of the uploader glass 101, and the holding of the uploader glass 101 is released.

步驟S19之後,藉設於載件剝離裝置1之外 部的搬送手段(未圖示)而使上載件玻璃101被從保持台10之上表面而回收。 After step S19, borrowed from the carrier stripping device 1 The carrier glass 101 is collected from the upper surface of the holding table 10 by means of a transport means (not shown).

於步驟S20,控制部(未圖示),係就上載件玻 璃101是否被從保持台10之上作回收而進行判定。上載件玻璃101未被回收之情況(S20,No)下,重複步驟S20直到被回收。上載件玻璃101被回收之情況(S20,Yes)下,結束控制部(未圖示)之處理。 In step S20, the control unit (not shown) uploads the glass Whether or not the glass 101 is recovered from above the holding table 10 is determined. In the case where the uploader glass 101 is not recovered (S20, No), the step S20 is repeated until it is recovered. When the uploader glass 101 is collected (S20, Yes), the processing of the control unit (not shown) is completed.

如以上,依本實施形態相關之載件剝離裝置 1,即可穩定而高速從複合面板100將上載件玻璃101作剝離。此外,本實施形態相關之載件剝離裝置1的剝離動作,係得以藉黏著升降銷12之驅動部(未圖示)、滑動機構15、滑動機構27、及直動驅動器33所為之往復運動而實現,不需要如專利文獻1之複雜的控制,可提高裝置之 耐久性。 As described above, the carrier peeling device according to the embodiment 1. The uploader glass 101 can be peeled off from the composite panel 100 at a stable and high speed. Further, the peeling operation of the carrier peeling device 1 according to the present embodiment is performed by reciprocating the driving portion (not shown) to which the lift pin 12 is attached, the slide mechanism 15, the slide mechanism 27, and the linear actuator 33. Realization does not require complicated control as in Patent Document 1, and can improve the device Durability.

≪變化例≫ ≪Change example≫

另外,本實施形態相關之載件剝離裝置1,係非限定於上述實施形態之構成者,在不脫離發明之趣旨的範圍內可作各種之變更。 In addition, the carrier peeling apparatus 1 according to the present embodiment is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the invention.

本實施形態相關之載件剝離裝置1的保持台 10,係以具備真空吸附部11者而作說明,惟並非限定於此者,亦可不具備真空吸附部11。 Holding table of the carrier peeling device 1 according to the embodiment 10, the vacuum adsorption unit 11 is provided, but the invention is not limited thereto, and the vacuum adsorption unit 11 may not be provided.

此外,亦可採取於步驟S15,於使上載件玻璃 101吸附於保持台10後,使真空吸附部11動作而進一步作真空吸附。藉此,於步驟S17,使剝離單元20移動至上升位置(彈起位置)時,比起剝離台21之黏著部23的吸附力,可確實使黏著升降銷12A、12B的黏著部14之吸附力及真空吸附部11的真空吸附力之和更強,故可確實將上載件玻璃101從剝離台21剝離。 In addition, the step S15 may also be adopted to make the uploading glass After the 101 is adsorbed to the holding stage 10, the vacuum suction unit 11 is operated to further perform vacuum adsorption. As a result, when the peeling unit 20 is moved to the raised position (the pop-up position) in step S17, the adhesion of the adhesive portion 14 of the adhesive lifting pins 12A and 12B can be reliably absorbed compared to the suction force of the adhesive portion 23 of the peeling table 21. Since the sum of the vacuum suction forces of the force and vacuum adsorption unit 11 is stronger, the carrier glass 101 can be surely peeled off from the peeling stage 21.

1‧‧‧載件剝離裝置 1‧‧‧Package stripping device

10‧‧‧保持台 10‧‧‧ Keeping the table

11‧‧‧真空吸附部 11‧‧‧ Vacuum Adsorption Department

12、12A、12B‧‧‧黏著升降銷 12, 12A, 12B‧‧‧ adhesive lifting pin

13‧‧‧軸體部(第1軸體部、第2軸體部) 13‧‧‧Axis body (1st axis body, 2nd axis body part)

14‧‧‧黏著部(第1黏著部、第2黏著部) 14‧‧‧Adhesive part (first adhesive part, second adhesive part)

15‧‧‧滑動機構 15‧‧‧Sliding mechanism

20‧‧‧剝離單元 20‧‧‧ peeling unit

21‧‧‧剝離台 21‧‧‧ peeling station

22‧‧‧弓狀板部 22‧‧‧ Bow Plate

23‧‧‧黏著部(第2黏著部) 23‧‧‧Adhesive part (2nd adhesion part)

24‧‧‧橡膠吸附部 24‧‧‧Rubber Adsorption Department

25‧‧‧輥子單元 25‧‧‧ Roller unit

26‧‧‧輥子 26‧‧‧ Roller

27‧‧‧滑動機構 27‧‧‧Sliding mechanism

28‧‧‧導軌 28‧‧‧rails

30‧‧‧基台部 30‧‧‧Base Department

31‧‧‧導軌 31‧‧‧ rails

32‧‧‧支撐柱 32‧‧‧Support column

33‧‧‧直動驅動器(彈起手段) 33‧‧‧Direct drive (bounce means)

100‧‧‧複合面板 100‧‧‧Composite panel

101‧‧‧上載件玻璃(上載件) 101‧‧‧Uploaded glass (uploaded)

102‧‧‧可撓性面板(面板) 102‧‧‧Flexible panel (panel)

103‧‧‧下載件玻璃(下載件) 103‧‧‧Download glass (download)

M1‧‧‧方向(保持台之移動方向) M1‧‧‧ direction (keeping the direction of movement of the station)

M2‧‧‧方向(剝離單元端部之移動方向) M2‧‧‧ direction (moving direction of the end of the stripping unit)

M3‧‧‧方向(輥子單元之移動方向) M3‧‧‧ direction (moving direction of the roller unit)

M4‧‧‧方向(剝離台端部之移動方向) M4‧‧‧ direction (moving direction of the peeling end)

Claims (5)

一種載件剝離裝置,特徵在於:具備:就由上載件、面板及下載件所成之複合面板作載置的保持台;設於前述保持台,具有可上下動之第1軸體部及設於該第1軸體部之端部的第1黏著部之第1黏著升降銷;設於前述保持台,具有可上下動之第2軸體部及設於該第2軸體部之端部的第2黏著部之第2黏著升降銷;以及具有第3黏著部及橡膠吸附部的弓狀之剝離台。 A carrier peeling device comprising: a holding table on which a composite panel formed by an uploading member, a panel, and a downloading member is placed; and a holding unit having a first shaft body portion that can be moved up and down a first adhesion lift pin of the first adhesive portion at an end portion of the first shaft body portion; and a second shaft body portion that is movable up and down and an end portion of the second shaft body portion provided on the holding table The second adhesive lifting pin of the second adhesive portion; and the arcuate peeling table having the third adhesive portion and the rubber adsorption portion. 如申請專利範圍第1項之載件剝離裝置,其中,將前述第1黏著升降銷及前述第2黏著升降銷予以上升,而以前述第1黏著部及前述第2黏著部就前述複合面板之前述下載件作保持,同時以前述剝離台之前述第3黏著部壓住前述複合面板之前述上載件而予以吸附,使前述剝離台沿著該剝離台之形狀而移動於前述上載件之上,從而將前述上載件作剝離。 The carrier peeling device according to the first aspect of the invention, wherein the first adhesive lift pin and the second adhesive lift pin are raised, and the first adhesive portion and the second adhesive portion are the composite panel While the downloading member is held, the third adhesive portion of the peeling table is pressed against the uploading member of the composite panel, and the peeling table is moved over the uploading member along the shape of the peeling table. Thereby, the aforementioned uploading member is peeled off. 如申請專利範圍第2項之載件剝離裝置,其中,前述第1黏著升降銷,係設於前述剝離台的前述第3黏著部之側,前述第2黏著升降銷,係設於前述剝離台的前述橡膠吸附部之側, 於從前述保持台將前述面板及前述下載件作回收後,將前述第1黏著升降銷及前述第2黏著升降銷予以上升,而將吸附在前述剝離台之前述上載件在前述剝離台的前述橡膠吸附部之側壓在前述第2黏著升降銷之前述第2黏著部而予以吸附,使前述剝離台沿著該剝離台之形狀而移動於前述保持台之上,從而使前述上載件吸附於前述保持台。 The carrier peeling device according to the second aspect of the invention, wherein the first adhesive lift pin is provided on a side of the third adhesive portion of the peeling table, and the second adhesive lift pin is provided on the peeling station. On the side of the aforementioned rubber adsorption portion, After recovering the front panel and the downloading member from the holding table, the first adhesive lifting pin and the second adhesive lifting pin are raised, and the uploading member adsorbed on the peeling table is on the peeling table. The side of the rubber adsorption portion is adsorbed by the second adhesive portion of the second adhesive lift pin, and the peeling table is moved over the holding table along the shape of the peeling table, thereby adsorbing the uploading member The aforementioned holding table. 如申請專利範圍第2或3項之載件剝離裝置,其進一步具備可藉滑動機構沿著導軌而往復動之輥子單元,藉該輥子單元使前述剝離台沿著該剝離台之弓狀的形狀而移動。 The carrier peeling device of claim 2 or 3, further comprising a roller unit reciprocable along the guide rail by a sliding mechanism, wherein the roller unit has an arcuate shape along the peeling table And move. 如申請專利範圍第4項之載件剝離裝置,其進一步具備可將具有前述剝離台及前述輥子單元的剝離單元作彈起之彈起手段。 The carrier peeling device of claim 4, further comprising a pop-up means capable of bounce the peeling unit having the peeling table and the roller unit.
TW104125598A 2014-08-21 2015-08-06 Carrier stripping device TW201607767A (en)

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